JP2014092304A - Roller hearth kiln and burning method using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a roller hearth kiln and a burning method using the same in which a contact accident with a setter within a burning chamber can be prevented, a heat efficiency within the burning chamber can be improved and a consumption power can be decreased.SOLUTION: A roller hearth kiln 1 comprises a kiln 7 including a burning chamber 5 having a pair of facing side walls 11 and a large number of rollers 17 arranged inside the chamber, and a temperature control part 3 for controlling a temperature within the kiln 7. This roller hearth kiln 1 comprises plate-like setters 23 for use in mounting items 25 to be burnt. The setters 23 have a shape without any corners around it and so when the setters 23 are transported within the burning chamber 5, the setters 23 are not caught on the side walls 11 and so the burning chamber 5 can be relatively narrow in its width.

Description

  The present invention relates to a roller hearth kiln and a firing method using the same, and more particularly to a roller hearth kiln configured to convey an object to be fired using a setter having a specific shape, and a firing method using the same.

  Conventionally, a roller hearth kiln for firing an object to be fired such as a semiconductor chip is known. Generally, a roller hearth kiln includes a furnace having a predetermined length, and a number of rollers extending in a direction orthogonal to the transport direction are laid in the furnace. When firing the object to be fired using a roller hearth kiln, place the object to be fired on a setter formed of alumina, etc., set the setter on the roller, and rotate a number of rollers around the axis. By doing so, the setter and the material to be fired thereon are conveyed toward the downstream side. And a to-be-fired material is heated and baked, for example to about 1000 degreeC within a roller hearth kiln. As such a roller hearth kiln, what was described in patent document 1 is known.

JP 2002-87835 A

  In general, a setter used when feeding an object to be fired into a roller hearth kiln has a square shape, and the objects to be fired are arranged on the upper surface thereof. The firing chamber in the roller hearth kiln has a rectangular or semi-cylindrical space, and a roller extending in the width direction is disposed on the bottom surface of the space.

  And when transporting the fired product in a roller hearth kiln using a square setter that has been used in the past, the roller hearth kiln has a width of the firing chamber in consideration of the setter moving in a meandering manner on the transport path. Is designed to be relatively wide. That is, since the roller in the firing chamber has a certain length, a certain amount of bending is always generated in the axial direction, and the amount of bending differs depending on each roller. Therefore, the roller hearth kiln type baking apparatus is designed in consideration of the meandering of the setter during the conveyance of the object to be fired.

  If the setter meanders when conveying an object to be fired in the firing chamber, the setter comes into contact with the wall of the firing chamber. When the setter continues to drive the roller while being in contact with the wall of the baking chamber, the corner of the setter is caught on the wall of the baking chamber. If the next setter flows from the upstream side in this state, an accident occurs in contact with the setter on which the next setter is caught. When a setter contact accident occurs in the firing chamber, it is necessary to temporarily stop and cool the heating of the firing chamber and collect the object to be fired and the setter scattered in the firing chamber. In addition, when the setter is caught on the side wall and the side wall is damaged, the setter becomes more easily caught, so that the side wall has to be repaired each time.

  In order to prevent such an accident, it is conceivable to increase the width of the baking chamber by increasing the length of the roller. However, if the width of the baking chamber is increased, the volume of the baking chamber increases correspondingly. If it does so, the electric power required in order to keep a baking chamber at fixed temperature will increase remarkably, and it is not preferable.

  Therefore, the present invention has been made to solve the above-described problems, can prevent a setter contact accident in the firing chamber, and can improve the thermal efficiency in the firing chamber and reduce the power consumption. It is an object to provide a roller hearth kiln that can be used and a firing method using the same.

  In order to solve the above-described problem, the present invention includes a kiln including a firing chamber having at least a pair of side walls facing each other and a plurality of rollers arranged therein, and a temperature control unit that controls the temperature in the kiln. A roller hearth kiln with a plate-like setter for placing the object to be fired, and this setter has a shape that does not have corners around it. When being done, the side wall is not caught and the width of the baking chamber can be made relatively narrow.

  According to the present invention configured as described above, by using a setter having a shape having no corners, even if the setter meanders and contacts the side wall of the baking chamber when the object to be fired is conveyed, Can be prevented. Thereby, since the baking chamber can be designed without considering the meandering of the setter, the width of the baking chamber can be narrowed. And by narrowing the width of the firing chamber, the thermal efficiency in the firing chamber can be improved, and further, the length of the roller can be shortened, so that the bending of the roller can be suppressed and the meandering of the setter can be reduced. it can.

  In the present invention, it is preferable that the setter is a circular or oval plate.

  In the present invention, preferably, the width of the firing chamber is a value obtained by adding 20 mm to 100 mm to the maximum width of the setter.

  In order to solve the above-described problem, the present invention provides a kiln including a firing chamber having at least a pair of side walls facing each other and a large number of rollers arranged therein, and a temperature control unit that controls the temperature in the kiln. A method for firing an object to be fired using a roller hearth kiln, wherein the object to be fired is placed on a plate-like setter, and the setter is placed on a roller and conveyed in the firing chamber. The setter has a shape with no corners around it, so that the setter does not get caught on the side wall when being transported in the firing chamber, and the width of the firing chamber can be made relatively narrow It has become.

  As described above, according to the present invention, a setter contact accident can be prevented in the firing chamber, and the thermal efficiency in the firing chamber can be improved to reduce power consumption.

It is a sectional side view of the roller hearth kiln by embodiment of this invention. It is sectional drawing of the II-II cross section of FIG. 1 of FIG. It is a top view which shows the setter by embodiment of this invention. It is a top view in a baking chamber which shows a state when conveying a setter and a to-be-baked material in a to-be-baked chamber by embodiment of this invention.

Hereinafter, a roller hearth kiln according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a side sectional view of a roller hearth kiln, and FIG. 2 is a sectional view taken along the line II-II in FIG.

  First, as shown in FIGS. 1 and 2, the roller hearth kiln 1 includes a kiln 7 including a firing chamber 5 that is maintained at a predetermined temperature by the temperature control unit 3. The firing chamber 5 in the kiln 7 is divided into a plurality of small rooms by a partition wall 9, and the temperature control unit 3 adjusts the temperature of each small room.

  The firing chamber 5 includes a pair of opposing side walls 11, a ceiling 13, and a floor 15. The pair of opposing side walls 11 extends substantially vertically. A plurality of rollers 17 are passed between the pair of opposing side walls 11. In each small chamber of the baking chamber 5, there are provided an electric heating pair 19 for detecting the temperature in the small chamber and a heating element 21 for heating the small chamber. As the heating element 21, for example, a silicon carbide heating element capable of heating the inside of a small room to about 1500 ° C. can be used. The temperature control unit 3 controls the heating element 21 while monitoring the temperature in the baking chamber 5 with the electric heating pair 19, thereby controlling the temperature in the baking chamber 5.

  The firing chamber 5 has a width narrower than that of the conventionally used roller hearth kiln, and it is sufficient that the width is about 20 mm to 100 mm longer than the maximum width of the ceramic setter. When a circular or elliptical setter is used, the width of the firing chamber 5 is preferably a maximum setter width, that is, a value obtained by adding 20 to 100 mm to the diameter or major axis. Moreover, the height of the baking chamber 5 is about 200 mm.

  The plurality of rollers 17 are arranged so that their axes are parallel in the same plane. The plurality of rollers 17 extend between the pair of side walls 11, and both ends thereof extend through the side walls of the baking chamber 5. The plurality of rollers 17 protrude from the baking chamber 5 by about 100 mm. One end of each of the plurality of rollers 17 is supported so as to freely rotate, and the other end is supported so as to be rotatable around an axis. And the some roller 17 is comprised so that it can rotate around each axis | shaft by a drive control part. The outer periphery of the roller 17 has a constant coefficient of friction, and is configured to be able to convey the setter 23 placed on the roller 17 toward the downstream side by rotating around the axis.

FIG. 3 is a top view showing the setter.
As shown in FIG. 3, the setter 23 is configured by a circular plate. The shape of the setter 23 may be any shape as long as it is plate-shaped and has no corners around it, and does not catch even if it contacts the side wall 11 of the baking chamber 5 during transportation. Etc. Then, by placing the object to be fired 25 on such a setter 23 and transporting it within the firing chamber 5, even if the setter 23 contacts the side wall 11, the setter 23 is prevented from being caught on the side wall 11. Can do.

FIG. 4 is a top view of the firing chamber showing a state when the setter and the object to be fired are conveyed in the firing chamber.
When the setter 23 and the object to be fired 25 are transported in the firing chamber 5, even if the setter 23 meanders and contacts the side wall 11, the setter 23 does not get caught on the side wall 11. Compared to when the setter 23 is used, there is no need to worry about the position of the setter 23 on the roller 17. In addition, when the setter 23 comes into contact with the side wall 11, the setter 23 may rotate to some extent, but it is necessary to align the setter 23 when the setter 23 is collected by using the disk-shaped setter 23. Disappear.

Next, the relationship between the diameter of the disk-shaped setter 23 and the width of the firing chamber 5 will be described in detail.
In a commonly used square square setter, the width of the firing chamber is set to a value obtained by adding a length of 100 mm to 150 mm to the length of the diagonal line of the setter. Table 1 shows the relationship between the length of one side of a commonly used square prismatic setter and the width of the firing chamber required for transporting the prismatic setter so as not to contact the inner wall. . The “average value of the width of the baking chamber” in Table 1 is a value indicating the average of the “minimum width of the baking chamber” and the “maximum width of the baking chamber”.

  On the other hand, when using a round setter, the width of the baking chamber can be set to a value obtained by adding a length of 20 to 100 mm to the diameter of the setter. Table 2 shows the relationship between the diameter of the round setter and the width of the firing chamber necessary for conveying the round setter. The round setters according to Examples 1 to 5 described in Table 2 have the same mounting area as the square setters according to Comparative Examples 1 to 5 described above, respectively.

  As can be seen from Tables 1 and 2, when using a round setter, it can be seen that the width of the firing chamber can be made narrower by about 100 to 150 mm than when using a square setter.

  When the furnace body is formed by surrounding the firing chambers shown in Table 1 and Table 2 with a heat insulating layer having a thickness of 200 mm, the dimensions of the furnace body are as shown in Table 3.

  The energy required for firing is substantially equal to the dissipated energy from the inner wall of the firing chamber and is proportional to the perimeter of the furnace body. Table 4 shows the ratio of the perimeters and the energy saving ratio calculated from this ratio.

  As can be seen from Table 4, when a round setter is used, an energy saving rate of about 10% can be expected compared to when a square setter is used.

  As described above, according to the present invention, by using the setter 23 having no corner, it is possible to prevent the setter 23 from being caught on the side wall of the baking chamber 5 even if the setter 23 meanders. Thereby, it can prevent that the setter 23 stagnates in the baking chamber 5, and the setters 23 contact. Moreover, the width | variety of the baking chamber 5 can be narrowed by making the setter 23 into the shape which does not have a corner | angular shape, and preventing catching on the side wall 11 of the baking chamber 5. FIG. And thereby, the consumption of the electric power used in order to heat the baking chamber 5 can be suppressed. Furthermore, by narrowing the width of the firing chamber 5, the length of the roller 17 can be shortened, whereby the deflection of the roller 17 can be reduced. And the meandering of the setter 23 can be suppressed by reducing the bending of the roller 17.

  Furthermore, by using a round setter, the width of the firing chamber 5 can be narrowed, thereby reducing the energy required during firing.

1 Roller Hearth Kiln 3 Temperature Control Unit 5 Baking Chamber 7 Kiln 11 Side Wall 17 Roller 23 Setter 25 Workpiece

Claims (4)

A kiln comprising at least a pair of side walls facing each other and a firing chamber having a number of rollers arranged therein;
A roller hearth kiln comprising a temperature control unit for controlling the temperature in the kiln,
A plate-like setter for placing an object to be fired is provided, and this setter has a shape that does not have corners around it, so that the setter is not caught on the side wall when being transported in the firing chamber. A roller hearth kiln that can reduce the width of the firing chamber.   The roller hearth kiln according to claim 1, wherein the setter is a circular or elliptical plate.   The roller hearth kiln according to claim 1 or 2, wherein the width of the baking chamber is a value obtained by adding 20 mm to 100 mm to the maximum width of the setter. A kiln comprising at least a pair of side walls facing each other and a firing chamber having a number of rollers arranged therein;
A temperature control unit that controls the temperature in the kiln, and a method for firing a material to be fired using a roller hearth kiln,
Place the object to be fired on a plate-like setter, arrange the setter on a roller and transport it in the firing chamber,
The setter has a shape that does not have corners around it, so that the setter is not caught on the side wall when being conveyed in the firing chamber, and the width of the firing chamber can be made relatively narrow. , A method for firing an object to be fired using a roller hearth kiln.

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