JP2014066700A5 - - Google Patents

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Publication number
JP2014066700A5
JP2014066700A5 JP2013152527A JP2013152527A JP2014066700A5 JP 2014066700 A5 JP2014066700 A5 JP 2014066700A5 JP 2013152527 A JP2013152527 A JP 2013152527A JP 2013152527 A JP2013152527 A JP 2013152527A JP 2014066700 A5 JP2014066700 A5 JP 2014066700A5
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JP
Japan
Prior art keywords
cantilever beam
resonant cantilever
resonant
sensing
thermoelectrically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2013152527A
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English (en)
Japanese (ja)
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JP2014066700A (ja
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Publication date
Priority claimed from US13/625,699 external-priority patent/US8873029B2/en
Application filed filed Critical
Publication of JP2014066700A publication Critical patent/JP2014066700A/ja
Publication of JP2014066700A5 publication Critical patent/JP2014066700A5/ja
Withdrawn legal-status Critical Current

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JP2013152527A 2012-09-24 2013-07-23 半導体基板の同軸ジャイロ加速度計 Withdrawn JP2014066700A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/625,699 US8873029B2 (en) 2012-09-24 2012-09-24 Coaxial gyro accelerometer in a semiconductor substrate
US13/625,699 2012-09-24

Publications (2)

Publication Number Publication Date
JP2014066700A JP2014066700A (ja) 2014-04-17
JP2014066700A5 true JP2014066700A5 (enExample) 2016-09-08

Family

ID=48748043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013152527A Withdrawn JP2014066700A (ja) 2012-09-24 2013-07-23 半導体基板の同軸ジャイロ加速度計

Country Status (3)

Country Link
US (1) US8873029B2 (enExample)
EP (1) EP2711668A1 (enExample)
JP (1) JP2014066700A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10330697B2 (en) 2015-05-15 2019-06-25 Honeywell International Inc. Active, in-situ, calibration of MEMS accelerometers using optical forces
US9874581B2 (en) 2015-05-15 2018-01-23 Honeywell International Inc. In-situ bias correction for MEMS accelerometers
US9983225B2 (en) 2015-06-29 2018-05-29 Honeywell International Inc. Optical-mechanical vibrating beam accelerometer
US10822858B2 (en) 2017-07-24 2020-11-03 Gmi Holdings, Inc. Power supply for movable barrier opener with brushless DC motor
US10954708B2 (en) 2017-07-24 2021-03-23 Gmi Holdings, Inc. Movable barrier opener with brushless DC motor
US11371843B2 (en) * 2020-07-02 2022-06-28 Anello Photonics, Inc. Integration of photonics optical gyroscopes with micro-electro-mechanical sensors
CN115267971B (zh) * 2022-08-10 2024-03-26 南京邮电大学 一种光子惯导芯片及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614677A (en) 1966-04-29 1971-10-19 Ibm Electromechanical monolithic resonator
US6259089B1 (en) 1998-05-15 2001-07-10 Rice Systems, Inc. Integrated optics rotation sensor
US20080013094A1 (en) 2006-07-14 2008-01-17 Honeywell International Inc. Semiconductor substrate for interferometer fiber optic gyroscopes
US7929143B2 (en) 2008-12-08 2011-04-19 Honeywell International Inc. Integrated resonating gyro accelerometer in a semiconductor substrate

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