JP2014066700A - 半導体基板の同軸ジャイロ加速度計 - Google Patents

半導体基板の同軸ジャイロ加速度計 Download PDF

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Publication number
JP2014066700A
JP2014066700A JP2013152527A JP2013152527A JP2014066700A JP 2014066700 A JP2014066700 A JP 2014066700A JP 2013152527 A JP2013152527 A JP 2013152527A JP 2013152527 A JP2013152527 A JP 2013152527A JP 2014066700 A JP2014066700 A JP 2014066700A
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JP
Japan
Prior art keywords
cantilever beam
resonant cantilever
resonant
substrate
piezoresistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2013152527A
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English (en)
Japanese (ja)
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JP2014066700A5 (enExample
Inventor
Wilfinger Ray
レイ・ウィルフィンガー
E Bailey William
ウィリアム・イー・ベイリー
Wingard Carl
カール・ウィンガード
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
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Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of JP2014066700A publication Critical patent/JP2014066700A/ja
Publication of JP2014066700A5 publication Critical patent/JP2014066700A5/ja
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58—Turn-sensitive devices without moving masses
    • G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/72—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
    • G01C19/721—Details, e.g. optical or electronical details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Optical Integrated Circuits (AREA)
JP2013152527A 2012-09-24 2013-07-23 半導体基板の同軸ジャイロ加速度計 Withdrawn JP2014066700A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/625,699 US8873029B2 (en) 2012-09-24 2012-09-24 Coaxial gyro accelerometer in a semiconductor substrate
US13/625,699 2012-09-24

Publications (2)

Publication Number Publication Date
JP2014066700A true JP2014066700A (ja) 2014-04-17
JP2014066700A5 JP2014066700A5 (enExample) 2016-09-08

Family

ID=48748043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013152527A Withdrawn JP2014066700A (ja) 2012-09-24 2013-07-23 半導体基板の同軸ジャイロ加速度計

Country Status (3)

Country Link
US (1) US8873029B2 (enExample)
EP (1) EP2711668A1 (enExample)
JP (1) JP2014066700A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023533231A (ja) * 2020-07-02 2023-08-02 アネロ フォトニクス インコーポレイテッド フォトニクス光ジャイロスコープの微小電気機械センサとの統合

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10330697B2 (en) 2015-05-15 2019-06-25 Honeywell International Inc. Active, in-situ, calibration of MEMS accelerometers using optical forces
US9874581B2 (en) 2015-05-15 2018-01-23 Honeywell International Inc. In-situ bias correction for MEMS accelerometers
US9983225B2 (en) 2015-06-29 2018-05-29 Honeywell International Inc. Optical-mechanical vibrating beam accelerometer
US10822858B2 (en) 2017-07-24 2020-11-03 Gmi Holdings, Inc. Power supply for movable barrier opener with brushless DC motor
US10954708B2 (en) 2017-07-24 2021-03-23 Gmi Holdings, Inc. Movable barrier opener with brushless DC motor
CN115267971B (zh) * 2022-08-10 2024-03-26 南京邮电大学 一种光子惯导芯片及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614677A (en) 1966-04-29 1971-10-19 Ibm Electromechanical monolithic resonator
US6259089B1 (en) 1998-05-15 2001-07-10 Rice Systems, Inc. Integrated optics rotation sensor
US20080013094A1 (en) 2006-07-14 2008-01-17 Honeywell International Inc. Semiconductor substrate for interferometer fiber optic gyroscopes
US7929143B2 (en) 2008-12-08 2011-04-19 Honeywell International Inc. Integrated resonating gyro accelerometer in a semiconductor substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023533231A (ja) * 2020-07-02 2023-08-02 アネロ フォトニクス インコーポレイテッド フォトニクス光ジャイロスコープの微小電気機械センサとの統合

Also Published As

Publication number Publication date
EP2711668A1 (en) 2014-03-26
US8873029B2 (en) 2014-10-28
US20140085624A1 (en) 2014-03-27

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