JP2014066468A - Heat treatment furnace and reflector thermal insulation material - Google Patents

Heat treatment furnace and reflector thermal insulation material Download PDF

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JP2014066468A
JP2014066468A JP2012213555A JP2012213555A JP2014066468A JP 2014066468 A JP2014066468 A JP 2014066468A JP 2012213555 A JP2012213555 A JP 2012213555A JP 2012213555 A JP2012213555 A JP 2012213555A JP 2014066468 A JP2014066468 A JP 2014066468A
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furnace
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insulating material
heat treatment
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JP6017246B2 (en
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Tsunetaka Yamada
恒孝 山田
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Dowa Thermotech Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a heat treatment furnace including a reflector thermal insulation material in which thermal insulation performance and heat reflectivity are not deteriorated even when the material is used for a long period under a high-temperature carburization atmosphere or an oxidation atmosphere.SOLUTION: A heat treatment furnace 10 for treating a treatment object 20 with heat includes a reflector thermal insulation material 1 in the furnace. In the reflector thermal insulation material 1, a plurality of reflectors R for reflecting heat are arranged so that respective faces are parallel with each other and stored in an airtight case 2. Even when the inside of the heat treatment furnace 10 is under a high-temperature carburization atmosphere or under an oxidation atmosphere, heat reflectivity and thermal insulation performance can be maintained without carburizing or oxidizing the reflectors R of the reflector thermal insulation material 1.

Description

本発明は、熱処理炉および熱処理炉で用いられる反射板断熱材に関するものである。   The present invention relates to a heat treatment furnace and a reflector heat insulating material used in the heat treatment furnace.

従来、加熱炉や熱処理炉等の炉体には、外壁に沿って断熱層が設けられ、さらに省エネルギーを目的として、熱反射板を用いることが提案されている。   Conventionally, it has been proposed that a furnace body such as a heating furnace or a heat treatment furnace is provided with a heat insulating layer along an outer wall and further uses a heat reflecting plate for the purpose of energy saving.

特許文献1では、炉内側から順にセラミックファイバー層、シリカ系材質のセラミックブロックからなる断熱層、および炉殻層で炉体が構成された浸炭処理や窒化処理などに用いられる熱処理炉が開示されている。   Patent Document 1 discloses a heat treatment furnace used for carburizing treatment, nitriding treatment, or the like in which a furnace body is configured by a ceramic fiber layer, a heat insulating layer made of a silica-based ceramic block, and a furnace shell layer in order from the inside of the furnace. Yes.

特許文献2では、第1層として鉄分1重量%以下の耐火断熱煉瓦が使用され、第2層以降に例えば無定型シリカからなる微細多孔構造等の断熱材からなる断熱構造を有する浸炭処理や窒化処理などに用いられる熱処理炉が開示されている。   In Patent Document 2, a refractory heat-insulating brick having an iron content of 1% by weight or less is used as the first layer, and carburizing treatment or nitriding having a heat insulating structure made of a heat insulating material such as a microporous structure made of amorphous silica after the second layer. A heat treatment furnace used for processing or the like is disclosed.

そして、特許文献3では、断熱材が設けられたケーシングの炉内側に、複数枚の反射板を積層してなるリフレクタを備えた断熱構造を有するセラミックス素体の焼成などに用いられる熱処理炉が開示されている。   And in patent document 3, the heat processing furnace used for the baking etc. of the ceramic body which has the heat insulation structure provided with the reflector formed by laminating | stacking a several reflector in the furnace inside of the casing in which the heat insulating material was provided is disclosed. Has been.

特開2007−93160号公報JP 2007-93160 A 特開平9−79761号公報Japanese Patent Laid-Open No. 9-79761 特開2012−21742号公報JP 2012-21742 A

しかしながら、最高使用温度が800〜1100℃になる高温雰囲気炉では、浸炭雰囲気または酸化雰囲気中での断熱材の劣化の抑制が課題となる。   However, in a high-temperature atmosphere furnace in which the maximum operating temperature is 800 to 1100 ° C., it is a problem to suppress deterioration of the heat insulating material in the carburizing atmosphere or the oxidizing atmosphere.

特許文献1、2に記載された炉の構造では、断熱材の乖離によるコンタミネーションや、断熱材に水分が吸着することによる断熱性能低下という問題がある。さらに、微細多孔構造断熱材は、極めて脆く、耐久性が低い。また、これらの特許文献に記載された浸炭処理や窒化処理に用いられる熱処理炉は、熱反射板が設けられていないものである。   In the structure of the furnace described in Patent Documents 1 and 2, there is a problem of contamination due to divergence of the heat insulating material and deterioration of heat insulating performance due to moisture adsorbed on the heat insulating material. Furthermore, the fine porous structure heat insulating material is extremely brittle and has low durability. Moreover, the heat treatment furnace used for the carburizing process and the nitriding process described in these patent documents is not provided with a heat reflecting plate.

特許文献3に記載された熱処理炉においては、複数の反射板による断熱材は、不活性ガス中や真空中であれば初期の反射率や断熱性能を維持できるが、高温の浸炭雰囲気または酸化雰囲気中では、反射板が浸炭または酸化されて変色し、断熱効果が大幅に低下する。また、熱反射率が低下して、目的とする省エネルギー効果が期待できなくなる。さらに、炉内のガスをファンで攪拌しながら熱処理した場合、反射板の間の対流の影響を受けやすくなる。   In the heat treatment furnace described in Patent Document 3, the heat insulating material by a plurality of reflectors can maintain the initial reflectivity and heat insulating performance in an inert gas or in a vacuum, but a high-temperature carburizing atmosphere or oxidizing atmosphere Among them, the reflector plate is carburized or oxidized to discolor, and the heat insulation effect is greatly reduced. Further, the heat reflectance is lowered, and the intended energy saving effect cannot be expected. Further, when the gas in the furnace is heat-treated while being stirred with a fan, it is easily affected by convection between the reflectors.

一方、炉の小型化に対応するためには、断熱層の厚さは、従来と同等またはそれよりも薄いことが望ましい。さらに、従来の小型の熱処理炉は炉内が狭いために作業性が悪く、メンテナンスの際には、外壁(炉殻)および脆くなった微細多孔構造の断熱材等を崩れないように注意して外す必要がある。したがって、メンテナンス性を向上することが望まれる。   On the other hand, in order to cope with the downsizing of the furnace, it is desirable that the thickness of the heat insulating layer is equal to or thinner than the conventional one. In addition, conventional small heat treatment furnaces have poor workability due to the narrow inside of the furnace, and care must be taken not to break the outer wall (furnace shell) and the brittle microporous insulation material during maintenance. It is necessary to remove. Therefore, it is desirable to improve maintainability.

本発明の目的は、これらの事情に鑑みてなされたものであり、高温の浸炭雰囲気あるいは酸化雰囲気で長時間使用した場合でも、断熱性能や熱反射率が低下することがない反射板断熱材と、それを備えた熱処理炉を提供することにある。   The object of the present invention has been made in view of these circumstances, and even when used for a long time in a high-temperature carburizing atmosphere or an oxidizing atmosphere, the heat insulating performance and the heat insulation performance of the reflector are not reduced. It is to provide a heat treatment furnace including the same.

上記問題を解決するため、本発明は、被処理体を熱処理する熱処理炉であって、炉内に反射板断熱材を備え、前記反射板断熱材は、熱を反射する複数の反射板が、間隔を有して面同士が並列に配置され、密閉されたケース内に収容されていることを特徴とする、熱処理炉を提供する。   In order to solve the above problems, the present invention is a heat treatment furnace for heat-treating an object to be processed, and includes a reflector heat insulating material in the furnace, and the reflector heat insulating material includes a plurality of reflectors that reflect heat, Provided is a heat treatment furnace characterized in that the surfaces are arranged in parallel with an interval and are housed in a sealed case.

この熱処理炉において、外周を覆う炉殻層と、前記炉殻層の内側に設けられた断熱層と、前記断熱層の内側に設けられた前記反射板断熱材とを備えてもよい。   The heat treatment furnace may include a furnace shell layer covering an outer periphery, a heat insulating layer provided inside the furnace shell layer, and the reflector heat insulating material provided inside the heat insulating layer.

また、前記反射板断熱材が、炉内の側壁および天井の表面に設置されていてもよい。さらに、炉内に、雰囲気撹拌用ファンが設けられていてもよい。そして、850℃以上の浸炭雰囲気中で前記被処理体が熱処理されてもよい。   Moreover, the said reflector heat insulating material may be installed in the side wall and ceiling surface in a furnace. Furthermore, an atmosphere stirring fan may be provided in the furnace. And the said to-be-processed object may be heat-processed in 850 degreeC or more carburizing atmosphere.

前記反射板断熱材は、不活性ガスあるいは還元性ガスを循環させるガス流入口および流出口が設けられていてもよい。また、前記反射板断熱材の前記複数の反射板は、炉内側が熱反射率50%以上のニッケル基合金の超耐熱合金からなり、炉外側がステンレスからなるものでもよい。   The reflector heat insulating material may be provided with a gas inlet and an outlet for circulating an inert gas or a reducing gas. The plurality of reflectors of the reflector heat insulating material may be made of a nickel base alloy super heat-resistant alloy having a heat reflectance of 50% or more on the furnace inner side and stainless steel on the furnace outer side.

また、本発明は、熱を反射する複数の反射板が、間隔を有して面同士が並列に配置され、密閉されたケース内に収容されていることを特徴とする、反射板断熱材を提供する。   Further, the present invention provides a reflector heat insulating material, characterized in that a plurality of reflectors that reflect heat are arranged in parallel and spaced from each other and housed in a sealed case. provide.

本発明によれば、熱処理炉内が高温の浸炭雰囲気や酸化雰囲気中であっても、反射板断熱材の反射板が浸炭または酸化されにくく、熱反射率および断熱性能を維持することができる。   According to the present invention, even if the inside of the heat treatment furnace is in a high-temperature carburizing atmosphere or oxidizing atmosphere, the reflecting plate of the reflecting plate heat insulating material is hardly carburized or oxidized, and the heat reflectivity and heat insulating performance can be maintained.

本発明にかかる反射板断熱材の例を示す断面図である。It is sectional drawing which shows the example of the reflecting plate heat insulating material concerning this invention. 本発明にかかる反射板断熱材の異なる例を示す断面図である。It is sectional drawing which shows the example from which the reflecting plate heat insulating material concerning this invention differs. 本発明にかかる熱処理炉の例を示す断面図である。It is sectional drawing which shows the example of the heat processing furnace concerning this invention. 本発明にかかる熱処理炉の異なる例を示す断面図である。It is sectional drawing which shows the example from which the heat processing furnace concerning this invention differs. 実施例で用いた反射板断熱材を示す断面図である。It is sectional drawing which shows the reflecting plate heat insulating material used in the Example.

以下、本発明の実施の形態を、図を参照して説明する。なお、本明細書および図面において、実質的に同一の機能構成を有する要素においては、同一の符号を付することにより重複説明を省略する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the present specification and drawings, elements having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

図1は、本発明にかかる反射板断熱材の実施形態の一例を示す。   FIG. 1 shows an example of an embodiment of a reflector heat insulating material according to the present invention.

反射板断熱材1は、直方体のケース2と、その内部に収容された複数の反射板Rで構成されている。ケース2の材質は、耐熱性および耐酸化性に優れた例えばステンレスであり、SUS310等が用いられる。複数の反射板Rは、ケース2の内部に、所定の間隔を有して面同士が並列に収容され、上下が支持部材3で支持されている。複数の反射板Rは、互いの面が平行であることが好ましいが、厳密に平行でなくても、略平行であればよい。   The reflector heat insulating material 1 is composed of a rectangular parallelepiped case 2 and a plurality of reflectors R housed therein. The material of the case 2 is, for example, stainless steel excellent in heat resistance and oxidation resistance, and SUS310 or the like is used. The plurality of reflectors R are housed in parallel inside the case 2 with a predetermined interval and are supported by the support member 3 at the top and bottom. The plurality of reflectors R are preferably parallel to each other, but may be substantially parallel, even if not strictly parallel.

ケース2は、直方体の一面が開口になっている本体と、その開口面を塞ぐ蓋とからなる。例えば図1では手前側または奥側の一面が開口面であり、蓋を開放した状態で複数の反射板Rをケース2の本体内に装入し、支持部材3の位置に合わせて各反射板Rを所定の位置に収容した後、開口面を蓋で塞ぐ。蓋は、溶接やろう接等で隙間を完全に密封するように取り付けても良いが、完全な気密状態に密封されなくても良い。蓋は、炉内の浸炭ガスや酸化ガスのケース2内への侵入を概ね抑制できれば良く、メンテナンス性を考慮すれば、例えば単にはめ込んで取り付けたり、あるいはネジ止め等で固定しても良い。   The case 2 includes a main body having an opening on one surface of a rectangular parallelepiped and a lid that closes the opening surface. For example, in FIG. 1, one surface on the front side or the back side is an opening surface, and a plurality of reflecting plates R are inserted into the main body of the case 2 with the lid open, and each reflecting plate is matched with the position of the support member 3. After accommodating R in a predetermined position, the opening surface is closed with a lid. The lid may be attached so as to completely seal the gap by welding or brazing, but may not be sealed in a completely airtight state. The lid only needs to be able to substantially suppress the intrusion of carburizing gas or oxidizing gas into the case 2 in the furnace, and in consideration of maintainability, the lid may be simply fitted or fixed by screwing or the like.

反射板Rの材質は、耐熱性に優れるとともに熱反射率が高い金属板であり、ステンレスや耐熱合金等が好適である。反射板Rは複数枚が用いられ、高温部と低温部とで、反射板Rの材質を変えても良い。炉内側11の高温部(本明細書では700℃〜1000℃程度の温度域)では、酸化性ガスや浸炭性ガス中でも熱反射率の経時劣化が小さい材質、例えば950℃の浸炭ガス雰囲気中で1週間保持した後の熱反射率が50%以上のものが好ましい。具体的には、ニッケル基合金の超耐熱合金、例えば「ヘインズアロイ」(登録商標)が好ましい。炉外側12の低温部(本明細書では700℃未満の温度域)では、浸炭されることはないが、酸化は起こる温度域であるため、酸化されにくいステンレス、例えばSUS304やSUS310等を用いることが好ましい。さらに温度が低く酸化されにくい温度領域では、ステンレスにAgめっき等を施して熱反射率を高めたものを使用すると良い。反射板Rの枚数は、合計で8〜12枚程度が好ましい。枚数が少なすぎると断熱効果が低くなる。一方、枚数が多すぎると、反射板Rを収容するケース2が厚くなり、炉内に多くのスペースを要するので、小型の熱処理炉では使用しにくくなる。さらに、低温部の複数の反射板の間に、黒体の板を配置することが好ましい。黒体の板は、市販の黒色の鉄板やSUSなどの表面に耐熱性の黒体塗料を塗布したものであり、反射板だけを配置した場合と比べて断熱効果がさらに向上することがわかってきた。   The material of the reflecting plate R is a metal plate that has excellent heat resistance and high heat reflectivity, and stainless steel, heat resistant alloys, and the like are suitable. A plurality of reflectors R may be used, and the material of the reflector R may be changed between the high temperature part and the low temperature part. In a high temperature portion (in this specification, a temperature range of about 700 ° C. to 1000 ° C.) of the furnace inner side 11, in a material having a small thermal reflectance deterioration with time even in an oxidizing gas or a carburizing gas, for example, in a carburizing gas atmosphere at 950 ° C. It is preferable that the heat reflectance after holding for one week is 50% or more. Specifically, a nickel base alloy super heat resistant alloy such as “Hanes Alloy” (registered trademark) is preferable. Although it is not carburized in the low temperature part (the temperature range below 700 ° C. in this specification) of the furnace outer side 12, it is a temperature range where oxidation occurs, and therefore, stainless steel that is difficult to oxidize, such as SUS304 or SUS310, is used. Is preferred. Further, in a temperature region where the temperature is low and is not easily oxidized, it is preferable to use a stainless steel that has been subjected to Ag plating or the like to increase the heat reflectance. The total number of reflectors R is preferably about 8 to 12. If the number is too small, the heat insulation effect is lowered. On the other hand, if the number is too large, the case 2 that houses the reflector R becomes thick and requires a lot of space in the furnace, which makes it difficult to use in a small heat treatment furnace. Furthermore, it is preferable to dispose a black body plate between the plurality of reflectors in the low temperature part. Black body plates are made by applying a heat-resistant black body paint to the surface of a commercially available black iron plate or SUS, etc., and it has been found that the heat insulation effect is further improved compared to the case where only a reflector plate is arranged. It was.

また、ケース2内での反射板R同士の間隔は、0.5cm〜5cm、さらには1cm〜4cmが好ましい。間隔が狭すぎると、反射板R同士が熱変形した際に接触して断熱性が低下する可能性があり、広すぎるとケース2が厚くなりすぎる。   Further, the interval between the reflecting plates R in the case 2 is preferably 0.5 cm to 5 cm, and more preferably 1 cm to 4 cm. If the interval is too narrow, the reflecting plates R may come into contact with each other when they are thermally deformed, resulting in a decrease in heat insulation. If it is too wide, the case 2 becomes too thick.

以上の構成を有する本発明の反射板断熱材1にあっては、複数の反射板Rが、略密閉されたケース2内に収容されているので、酸化性ガスや浸炭性ガスの侵入を防止または抑制して、ケース2内の反射板の酸化や浸炭を防ぐ。尚、ケース2の外側の表面は、酸化や浸炭によって黒く変色しても、ケース2内の反射板Rにより熱反射および断熱効果を維持することができる。   In the reflector heat insulating material 1 of the present invention having the above-described configuration, the plurality of reflectors R are accommodated in the substantially sealed case 2, so that intrusion of oxidizing gas or carburizing gas is prevented. Or it suppresses and the oxidation and carburization of the reflecting plate in case 2 are prevented. In addition, even if the outer surface of the case 2 turns black due to oxidation or carburization, the reflection plate R in the case 2 can maintain heat reflection and heat insulation effects.

また、ケース2は略密閉されているが、加熱膨張等により、蓋と本体との隙間から炉内雰囲気ガスがケース2内に侵入する可能性がある。そのため、図2に示すように、ケース2に、不活性ガスあるいは還元性ガスを循環させるガス流入口4および流出口5を設けて、ケース2内の雰囲気を不活性ガスあるいは還元性ガスを流すことにより制御し、反射板Rの変色を抑制しても良い。   Although the case 2 is substantially sealed, the atmospheric gas in the furnace may enter the case 2 from the gap between the lid and the main body due to thermal expansion or the like. Therefore, as shown in FIG. 2, the case 2 is provided with a gas inlet 4 and an outlet 5 for circulating an inert gas or a reducing gas, and the inert gas or the reducing gas flows through the atmosphere in the case 2. This may be controlled to suppress discoloration of the reflector R.

さらに、図2に示すように、炉外側12のケース2の外側に、さらに断熱材6を取り付けて、ケース2の外周から外部への熱伝導による放熱を抑制しても良い。この断熱材6は、例えば真空断熱パネルや多孔質断熱材等、従来断熱材として使用されてきたものを用いれば良い。   Furthermore, as shown in FIG. 2, a heat insulating material 6 may be further attached to the outside of the case 2 on the furnace outer side 12 to suppress heat radiation due to heat conduction from the outer periphery of the case 2 to the outside. As this heat insulating material 6, what has been used as a conventional heat insulating material such as a vacuum heat insulating panel or a porous heat insulating material may be used.

また、本発明においては、反射板断熱材1を、炉内側11と炉外側12とで複数(例えば2個)の別体のケースで構成してもよい。例えば、炉内側11の反射板断熱材1のケースには、ニッケル基合金の超耐熱合金等からなる反射板Rを収容し、炉外側12の反射板断熱材1のケースには、SUS304やSUS310等からなる反射板Rを収容する。この場合にも、上記実施形態と同様、外部への熱伝導による放熱を抑制することができる。また、複数のケースの間(接続部)に、フェルト状の断熱パッキンシールなどの断熱材を配置することが好ましく、これにより固体熱伝導が抑制され、断熱性能をさらに向上させることができる。   Moreover, in this invention, you may comprise the reflector heat insulating material 1 by the separate case of multiple (for example, two pieces) by the furnace inner side 11 and the furnace outer side 12. FIG. For example, a reflector R made of a nickel-base alloy super heat-resistant alloy or the like is accommodated in the case of the reflector insulating material 1 inside the furnace 11, and SUS304 or SUS310 is contained in the case of the reflector insulating material 1 outside the furnace 12. A reflector R made of, for example, is accommodated. Also in this case, heat radiation due to heat conduction to the outside can be suppressed as in the above embodiment. Moreover, it is preferable to arrange | position heat insulating materials, such as a felt-like heat insulation packing seal, between several cases (connection part), and solid heat conduction is suppressed by this, and heat insulation performance can further be improved.

図3は、本発明にかかる反射板断熱材1を用いた高温熱処理炉10の一例を示す。熱処理炉10の外側表面を形成する例えば鉄やステンレス等の金属材料からなる炉殻21の内側の、天井部および側壁部に、例えば真空断熱材や多孔質断熱材等による断熱層22が形成されている。床部には、セラミックブロックや耐熱レンガ等の断熱構造材23が配置されている。そして、天井部および側壁部の断熱層22の内表面に、例えば図1または図2に示す本発明の反射板断熱材1が設けられる。反射板断熱材1は、なるべく天井および側壁の全面に設け、熱処理炉10の内部の熱処理室24を取り囲むようにすることが効果的であるが、必ずしも全面を覆っていなくても構わない。また、反射板断熱材1のケースの内部の反射板Rの表面は、熱処理室24の天井部や側壁部の面に略平行とし、反射効果を大きくするような配置とすることが好ましい。熱処理室24内には、例えば被処理体20を囲むようにヒータ25が設けられ、熱処理室24内が800℃〜1100℃、浸炭処理において好ましくは850℃〜1050℃程度に加熱されて、熱処理室24に搬入された被処理体20に対して浸炭等の熱処理が行われる。   FIG. 3 shows an example of a high-temperature heat treatment furnace 10 using the reflector heat insulating material 1 according to the present invention. A heat insulating layer 22 made of, for example, a vacuum heat insulating material or a porous heat insulating material is formed on the ceiling and side walls inside the furnace shell 21 made of a metal material such as iron or stainless steel that forms the outer surface of the heat treatment furnace 10. ing. A heat insulating structural member 23 such as a ceramic block or a heat-resistant brick is disposed on the floor. And the reflector heat insulating material 1 of this invention shown, for example in FIG. 1 or FIG. 2 is provided in the inner surface of the heat insulation layer 22 of a ceiling part and a side wall part. Although it is effective to provide the reflector heat insulating material 1 as much as possible on the entire surface of the ceiling and side walls so as to surround the heat treatment chamber 24 inside the heat treatment furnace 10, it is not always necessary to cover the entire surface. Moreover, it is preferable that the surface of the reflector R inside the case of the reflector heat insulating material 1 is substantially parallel to the surface of the ceiling part or the side wall part of the heat treatment chamber 24 so as to increase the reflection effect. In the heat treatment chamber 24, for example, a heater 25 is provided so as to surround the object 20 to be processed, and the heat treatment chamber 24 is heated to 800 ° C. to 1100 ° C., preferably about 850 ° C. to 1050 ° C. in the carburizing treatment. A heat treatment such as carburization is performed on the workpiece 20 carried into the chamber 24.

図4は、本発明にかかる高温熱処理炉30の異なる実施形態の例を示し、図3の構成に加えて、炉内上部に雰囲気撹拌用のファン26を設けたものである。従来、複数の反射板からなる反射板断熱材を用いた熱処理炉では、雰囲気を撹拌することにより、反射板Rの間に処理ガスが流れ込んで断熱性が低下するという問題が生じていたが、本発明では、反射板Rがケース2で覆われているため、反射板Rの間に、比較的温度の低い処理ガスが入り込むことがなく、断熱性を維持できる。また、複数の反射板の間に対流が起こって炉内の雰囲気や温度分布に影響を与えることもない。しかも、メンテナンス時には、ケース2ごと取り出すことができるので、炉の中で長時間作業をすることなく交換等が行える。   FIG. 4 shows an example of a different embodiment of the high-temperature heat treatment furnace 30 according to the present invention. In addition to the configuration of FIG. 3, a fan 26 for stirring the atmosphere is provided in the upper part of the furnace. Conventionally, in a heat treatment furnace using a reflector heat insulating material composed of a plurality of reflectors, by stirring the atmosphere, there has been a problem that the treatment gas flows between the reflector plates R and the heat insulation is reduced, In the present invention, since the reflecting plate R is covered with the case 2, the processing gas having a relatively low temperature does not enter between the reflecting plates R, and heat insulation can be maintained. Further, convection does not occur between the plurality of reflectors, and the atmosphere and temperature distribution in the furnace are not affected. Moreover, since the entire case 2 can be taken out during maintenance, replacement can be performed without working for a long time in the furnace.

以上、本発明の好適な実施形態について説明したが、本発明はかかる例に限定されない。当業者であれば、特許請求の範囲に記載された技術的思想の範疇内において、各種の変更例または修正例に想到しうることは明らかであり、それらについても当然に本発明の技術的範囲に属するものと了解される。   As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to this example. It is obvious for those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea described in the claims. It is understood that it belongs to.

[本発明例1]
図5に示す反射断熱材1として、厚さ1mmのSUS310S製の直方体のケース2と、同じ材質のケースの蓋を準備した。このケース2の中に、SUS304製の10枚の反射板(図5におけるR1が2枚、R2が2枚、R3が2枚、R4が4枚)を、支持部材により反射板の板面が互いに略平行になるように並列に保持させた後、ケースの蓋を被せて密閉した。反射板の板厚は全て1.0mmであり、炉内側から1枚目〜6枚目(R1、R2、R3)の反射板の間隔はいずれも10mmとし、炉内側から6枚目と7枚目(R3の炉外側とR4の最も炉内側)の反射板の間隔は30mmとし、炉内側から7枚目〜10枚目の反射板の間隔は20mmとした。また、ケース2の炉内側の面と炉内側から1枚目(R1の炉外側)の反射板、ケース2の炉外側の面と炉内側から10枚目(R4の最も炉外側)の反射板の間隔は20mmとした。すなわち反射板断熱材1の厚さは192mm(20cm以下)となった。
[Invention Example 1]
As the reflective heat insulating material 1 shown in FIG. 5, a rectangular parallelepiped case 2 made of SUS310S having a thickness of 1 mm and a case lid made of the same material were prepared. In this case 2, there are 10 reflectors made of SUS304 (R1 in FIG. 5, 2 R2, 2 R3, 4 R4), and the support member makes the surface of the reflector plate surface. After being held in parallel so as to be substantially parallel to each other, the case was covered and sealed. The thickness of all the reflectors is 1.0 mm, and the interval between the first to sixth reflectors (R1, R2, R3) from the inside of the furnace is 10 mm, and the sixth and seventh sheets from the inside of the furnace. The distance between the reflectors (the outer side of the furnace of R3 and the innermost side of the furnace of R4) was 30 mm, and the distance between the seventh and tenth reflectors from the inner side of the furnace was 20 mm. Also, the inner surface of the case 2 and the first reflector from the inner side of the furnace (the outer side of the furnace R1), the outer surface of the case 2 and the tenth reflector from the inner side of the furnace (the outermost side of the furnace R4). The interval was set to 20 mm. That is, the thickness of the reflector heat insulating material 1 was 192 mm (20 cm or less).

上記の構造の反射板断熱材1を、浸炭雰囲気、950℃の温度に1週間曝した後(ケース2の表面が黒色に変色)、反射板断熱材1の炉内側11のケース2の表面温度を950℃としたときの、炉外側12のケース2の表面から放出される輻射熱エネルギーを計算したところ、約21W/mであった。 After the reflector heat insulating material 1 having the above structure is exposed to a carburizing atmosphere and a temperature of 950 ° C. for one week (the surface of the case 2 turns black), the surface temperature of the case 2 inside the furnace 11 of the reflector heat insulating material 1 When the radiant heat energy released from the surface of the case 2 on the outside 12 of the furnace when the temperature was 950 ° C. was calculated, it was about 21 W / m 2 .

[本発明例2]
図5に示すように、炉内側から順に、ヘインズアロイ製の反射板R1を2枚、SUS304製の反射板R2を2枚、SUS304の表面を鏡面磨きした反射板R3を2枚、SUS304の表面にAgメッキを施した反射板R4を4枚、合計10枚の反射板Rをケース2の内部に取り付けた以外は、本発明例1と同様の反射板断熱材を作製した。
[Invention Example 2]
As shown in FIG. 5, in order from the inside of the furnace, two reflectors R1 made of Haynes alloy, two reflectors R2 made of SUS304, two reflectors R3 having a mirror polished surface of SUS304, and the surface of SUS304 A reflector heat insulating material similar to that of Example 1 of the present invention was prepared except that four reflectors R4 plated with Ag and four reflectors R in total were attached to the inside of the case 2.

本発明例1と同様の条件で、炉外側12のケース2の表面から放出される輻射熱エネルギーを計算したところ、約14W/mであった。 The radiant heat energy released from the surface of the case 2 on the outside 12 of the furnace was calculated under the same conditions as in Example 1 of the present invention, and it was about 14 W / m 2 .

[本発明例3]
炉内側から順に、ヘインズアロイ製の反射板R1を2枚、SUS304製の反射板R2を2枚、SUS304の表面を鏡面磨きした反射板R3を2枚、SUS304の表面にAgメッキを施した反射板R4を3枚、合計9枚の反射板Rをケース2の内部に取り付けた以外は、本発明例1と同様の反射断熱材を作製した。
[Invention Example 3]
In order from the inside of the furnace, two reflection plates R1 made of Haynes alloy, two reflection plates R2 made of SUS304, two reflection plates R3 whose surfaces of SUS304 are mirror-polished, and reflection with Ag plating on the surface of SUS304 A reflective heat insulating material similar to Example 1 of the present invention was produced except that three plates R4 and a total of nine reflectors R were attached to the inside of the case 2.

本発明例1と同様の条件で、炉外側12のケース2の表面からの輻射熱エネルギーを計算したところ、約20W/mであった。すなわち本発明例1の反射断熱材よりも21mm(約10%)厚さを減じた本発明例3でも、本発明例1と同等以上の断熱性が得られた。 When the radiant heat energy from the surface of the case 2 on the outside 12 of the furnace was calculated under the same conditions as in Example 1 of the present invention, it was about 20 W / m 2 . That is, even in the present invention example 3 in which the thickness of the reflective heat insulating material of the present invention example 1 was reduced by 21 mm (about 10%), the heat insulation equivalent to or higher than that of the present invention example 1 was obtained.

[本発明例4]
炉内側から順に、ヘインズアロイ製の反射板R1を2枚、SUS304製の反射板R2を2枚、SUS304の表面を鏡面磨きした反射板R3を2枚、SUS304の表面に黒体塗料を塗布した黒体からなる板(炉内側12から7枚目)を1枚、SUS304の表面にAgメッキを施した反射板R4(炉内側12から8枚目、9枚目、10枚目)を3枚、合計10枚の反射板Rをケース2の内部に取り付けた以外は、本発明例1と同様の反射断熱材を作製した。
[Invention Example 4]
In order from the inside of the furnace, two reflectors R1 made of Haynes alloy, two reflectors R2 made of SUS304, two reflectors R3 having a mirror-polished surface of SUS304, and a black body paint were applied to the surface of SUS304. One black plate (7th from the furnace inner side 12), 3 reflectors R4 (8th, 9th, 10th from the furnace inner side 12) with SUS304 surface plated with Ag A reflective heat insulating material similar to that of the present invention example 1 was produced except that a total of ten reflectors R were attached to the inside of the case 2.

本発明例1と同様の条件で、炉外側12のケース2の表面からの輻射熱エネルギーを計算したところ、約5W/mであった。黒体の板を複数の反射板の間に配置したことにより、大幅に断熱性能が向上することがわかった。 When the radiant heat energy from the surface of the case 2 on the furnace outer side 12 was calculated under the same conditions as in Example 1 of the present invention, it was about 5 W / m 2 . It was found that the heat insulation performance was greatly improved by arranging the black body plate between the plurality of reflectors.

[本発明例5]
炉内側から順に、ヘインズアロイ製の反射板R1を2枚、SUS304製の反射板R2を2枚、SUS304の表面を鏡面磨きした反射板R3を2枚、SUS304の表面に黒体塗料を塗布した黒体からなる反射板R4(炉内側12から7枚目)を1枚、SUS304の表面にAgメッキを施した反射板R4(炉内側12から8枚目)を1枚、合計8枚の反射板Rをケース2の内部に取り付けた以外は、本発明例1と同様の反射断熱材を作製した。
[Invention Example 5]
In order from the inside of the furnace, two reflectors R1 made of Haynes alloy, two reflectors R2 made of SUS304, two reflectors R3 having a mirror-polished surface of SUS304, and a black body paint were applied to the surface of SUS304. One reflector R4 (seventh from the furnace inner side 12) made of black body, one reflector R4 (8th from the furnace inner side 12) with Ag plating on the surface of SUS304, a total of eight reflectors A reflective heat insulating material similar to Example 1 of the present invention was produced except that the plate R was attached to the inside of the case 2.

本発明例1と同様の条件で、炉外側12のケース2の表面からの輻射熱エネルギーを計算したところ、約17W/mであった。すなわち、黒体の板を複数の反射板の間に配置することにより、本発明例1の反射断熱材よりも42mm(約20%)厚さを減じた本発明例5でも、本発明例1と同等以上の断熱性が得られた。 When the radiant heat energy from the surface of the case 2 on the outside 12 of the furnace was calculated under the same conditions as in Example 1 of the present invention, it was about 17 W / m 2 . In other words, the present invention example 5 in which the thickness of the reflective heat insulating material of the present invention example 1 is reduced by 42 mm (about 20%) by disposing the black body plate between the plurality of reflectors is equivalent to that of the present invention example 1. The above heat insulation was obtained.

なお、本発明例1〜5の反射断熱材1の炉外側12のケース2の外側に、厚さが5cmの真空断熱パネルの断熱材6を取り付け、図3または図4に示す構造の熱処理炉10を構築することにより、断熱性能およびメンテナンス性に優れた熱処理炉を提供することができる。   In addition, a heat insulating material 6 of a vacuum heat insulating panel having a thickness of 5 cm is attached to the outside of the case 2 on the furnace outer side 12 of the reflective heat insulating material 1 of Invention Examples 1 to 5, and the heat treatment furnace having the structure shown in FIG. 3 or FIG. By constructing 10, it is possible to provide a heat treatment furnace having excellent heat insulation performance and maintainability.

[比較例]
比較例として、反射板Rがケース2に収容されていない以外は、本発明例1と同様の構造のケース2の内部に反射板が10枚保持された反射板断熱材1を作製した。
[Comparative example]
As a comparative example, a reflector heat insulating material 1 was produced in which ten reflectors were held inside a case 2 having the same structure as that of Example 1 except that the reflector R was not accommodated in the case 2.

本発明例1と同様の条件で、炉外側12の反射板の表面からの輻射熱エネルギーを計算したところ、約2000W/mであった。これは、反射板が浸炭により黒体(黒色)となったためで、断熱材としての役目をなしていないことを示す。 When the radiant heat energy from the surface of the reflector 12 on the outside 12 of the furnace was calculated under the same conditions as in Example 1 of the present invention, it was about 2000 W / m 2 . This is because the reflector has become a black body (black) due to carburization and thus does not serve as a heat insulating material.

また、参考例として、反射板断熱材1の代わりに、無定型シリカ等からなる微細多孔構造の厚さ200mmの断熱材「マイクロサーム」(商標登録)を使用し、同様の熱条件に曝した。この場合の炉外側12のマイクロサーム表面の放散熱(輻射エネルギーの他に熱伝導等による熱放散も含まれる)は約2100W/mであった。 In addition, as a reference example, a 200 μm thick heat insulating material “Microtherm” (registered trademark) made of amorphous silica or the like was used instead of the reflector heat insulating material 1 and exposed to the same heat conditions. . In this case, the heat dissipated on the surface of the microtherm on the outside 12 of the furnace (including heat dissipation due to heat conduction in addition to radiant energy) was about 2100 W / m 2 .

本発明は、高温の浸炭処理や酸化処理などの熱処理炉に適用できる。   The present invention can be applied to a heat treatment furnace such as high-temperature carburizing treatment or oxidation treatment.

1 反射板断熱材
2 ケース
3 支持部材
10、30 熱処理炉
11 炉内側
12 炉外側
20 被処理体
21 炉殻
22 断熱層
23 断熱構造材
24 熱処理室
25 ヒータ
26 ファン
R 反射板
DESCRIPTION OF SYMBOLS 1 Reflection board heat insulating material 2 Case 3 Support member 10, 30 Heat treatment furnace 11 Furnace inner side 12 Furnace outer side 20 To-be-processed object 21 Furnace shell 22 Thermal insulation layer 23 Thermal insulation structural material 24 Heat treatment chamber 25 Heater 26 Fan R Reflector

Claims (8)

被処理体を熱処理する熱処理炉であって、
炉内に反射板断熱材を備え、
前記反射板断熱材は、熱を反射する複数の反射板が、間隔を有して面同士が並列に配置され、密閉されたケース内に収容されていることを特徴とする、熱処理炉。
A heat treatment furnace for heat-treating a workpiece,
Reflector heat insulation in the furnace,
The heat treatment furnace characterized in that the reflection plate heat insulating material includes a plurality of reflection plates that reflect heat, the surfaces are arranged in parallel at intervals and are accommodated in a sealed case.
外周を覆う炉殻層と、前記炉殻層の内側に設けられた断熱層と、前記断熱層の内側に設けられた前記反射板断熱材とを備えることを特徴とする、請求項1に記載の熱処理炉。   The furnace shell layer which covers outer periphery, the heat insulation layer provided inside the said furnace shell layer, and the said reflector heat insulating material provided inside the said heat insulation layer, It is characterized by the above-mentioned. Heat treatment furnace. 前記反射板断熱材が、炉内の側壁および天井の表面に設置されていることを特徴とする、請求項1または2に記載の熱処理炉。   The heat treatment furnace according to claim 1, wherein the reflector heat insulating material is installed on a side wall and a ceiling surface in the furnace. 炉内に、雰囲気撹拌用ファンが設けられていることを特徴とする、請求項1〜3のいずれかに記載の熱処理炉。   The heat treatment furnace according to any one of claims 1 to 3, wherein an atmosphere stirring fan is provided in the furnace. 850℃以上の浸炭雰囲気中で前記被処理体が熱処理されることを特徴とする、請求項1〜4のいずれかに記載の熱処理炉。   The heat treatment furnace according to any one of claims 1 to 4, wherein the object to be treated is heat-treated in a carburized atmosphere at 850 ° C or higher. 前記反射板断熱材は、不活性ガスあるいは還元性ガスを循環させるガス流入口および流出口が設けられていることを特徴とする、請求項1〜5のいずれかに記載の熱処理炉。   The heat treatment furnace according to claim 1, wherein the reflector heat insulating material is provided with a gas inlet and an outlet for circulating an inert gas or a reducing gas. 前記反射板断熱材の前記複数の反射板は、炉内側が熱反射率50%以上のニッケル基合金の超耐熱合金からなり、炉外側がステンレスからなることを特徴とする、請求項1〜6のいずれかに記載の熱処理炉。   The plurality of reflecting plates of the reflecting plate heat insulating material are made of a nickel base alloy super heat-resistant alloy having a heat reflectance of 50% or more on the inside of the furnace and made of stainless steel on the outside of the furnace. The heat treatment furnace in any one of. 熱を反射する複数の反射板が、間隔を有して面同士が並列に配置され、密閉されたケース内に収容されていることを特徴とする、反射板断熱材。   A reflector heat insulating material characterized in that a plurality of reflectors that reflect heat are arranged in parallel with each other in parallel and are housed in a sealed case.
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JP2016125769A (en) * 2015-01-05 2016-07-11 Dowaサーモテック株式会社 Heat treatment furnace, heat insulation material unit, agitation fan, and method for building furnace
JP2018119626A (en) * 2017-01-26 2018-08-02 三菱重工業株式会社 Heat insulation structure for moss type liquefied gas storage tank, liquefied gas carrying vessel, and method for constructing heat insulation structure for moss type liquefied gas storage tank
US20190024232A1 (en) * 2017-07-14 2019-01-24 Hitachi Kokusai Electric Inc. Substrate processing apparatus and substrate retainer
KR102509142B1 (en) * 2021-09-29 2023-03-14 주식회사 썸백 Electric Furnace With Reflector

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JP2000161588A (en) * 1998-11-20 2000-06-16 Matsushita Electric Ind Co Ltd Composite heat insulating material
WO2007108417A1 (en) * 2006-03-23 2007-09-27 Murata Manufacturing Co., Ltd. Heat treating furnace
JP2008241194A (en) * 2007-03-28 2008-10-09 Hitachi Ltd Heating furnace
JP2012021742A (en) * 2010-07-16 2012-02-02 Murata Mfg Co Ltd Heat treatment furnace

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JP2000161588A (en) * 1998-11-20 2000-06-16 Matsushita Electric Ind Co Ltd Composite heat insulating material
WO2007108417A1 (en) * 2006-03-23 2007-09-27 Murata Manufacturing Co., Ltd. Heat treating furnace
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JP2012021742A (en) * 2010-07-16 2012-02-02 Murata Mfg Co Ltd Heat treatment furnace

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016125769A (en) * 2015-01-05 2016-07-11 Dowaサーモテック株式会社 Heat treatment furnace, heat insulation material unit, agitation fan, and method for building furnace
JP2018119626A (en) * 2017-01-26 2018-08-02 三菱重工業株式会社 Heat insulation structure for moss type liquefied gas storage tank, liquefied gas carrying vessel, and method for constructing heat insulation structure for moss type liquefied gas storage tank
US20190024232A1 (en) * 2017-07-14 2019-01-24 Hitachi Kokusai Electric Inc. Substrate processing apparatus and substrate retainer
KR102509142B1 (en) * 2021-09-29 2023-03-14 주식회사 썸백 Electric Furnace With Reflector

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