JP2014046338A - Laser processing apparatus, shaping punch, and laser boring processing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser processing apparatus, in which an optical component such as a capacitor lens 17 or a processing fiber 13 is sufficiently prevented from burning during a boring process of a workpiece W.SOLUTION: By a first punch-inclined face 35a and a second punch-inclined face 35b in a punch tip portion 35 of a shaping punch 31, a bored portion of a workpiece W is formed with a recess C having a first inclined recess surface Ca and a second inclined recess surface Cb inclined in the thickness direction of the workpiece W. The first inclined recess surface Ca of the recess C of the workpiece W is irradiated, while an assist gas being injected from a laser working head 11 toward the first inclined recess surface Ca of the recess C of the workpiece W, with a laser beam LB.

Description

  The present invention relates to a laser processing apparatus, a laser drilling method, and the like that perform drilling on a workpiece using laser light oscillated from a laser oscillator.

  The drilling process using laser light emitted from a laser oscillator such as a carbon dioxide laser oscillator or a fiber laser oscillator will be briefly described as follows.

  Set with the work piece supported on the work table. Next, a laser processing head provided on the side facing the processing table in the Z-axis direction and optically connected to the laser oscillator is used, and the laser processing head is placed on the workpiece (in other words, the processing table). By relatively moving in at least one of the X-axis direction and the Y-axis direction, the tip of the laser processing head is positioned at a position facing the punched portion of the workpiece in the Z-axis direction. Then, the laser beam is irradiated from the tip of the laser processing head toward the drilled portion of the workpiece by the operation of the laser oscillator. As a result, it is possible to drill a workpiece by using the laser beam oscillated from the laser oscillator.

  In addition, there exist some which are shown to patent document 1-patent document 3 as a prior art relevant to this invention.

JP 2012-24778 A JP 2010-240689 A JP 2009-226474 A

  By the way, when drilling a workpiece made of a highly reflective material such as copper, copper alloy, aluminum, or aluminum alloy, a large amount of reflected light (return light) is generated and a part of the reflected light is generated. Enters the laser processing head. Therefore, when a part of the reflected light reaches an optical component such as a condensing lens and a process fiber arranged from the laser processing head to the laser oscillator side, the optical component is likely to be burned out and the optical component is burned out. Along with this, there is a problem that the optical parts need to be replaced, and the work becomes complicated.

  Accordingly, an object of the present invention is to provide a laser processing apparatus and a laser drilling method having a novel configuration that can solve the above-described problems.

A first feature of the present invention is a laser processing apparatus for drilling a workpiece (work) using laser light oscillated from a laser oscillator.
A processing table for supporting the workpiece;
Provided on the side facing the machining table in the Z-axis direction so as to be movable in the X-axis direction, the Y-axis direction, and the Z-axis direction relative to the machining table, and optically connected to the laser oscillator; A laser processing head for irradiating a laser beam toward the workpiece;
The molding punch is provided on the side facing the machining table in the Z-axis direction so as to be movable relative to the machining table in the X-axis direction and the Y-axis direction, and movable in the Z-axis direction. And a recess forming unit that has a punch inclined surface that is inclined with respect to a direction parallel to the axis of the forming punch and that forms a recess at a drilled portion of the workpiece. .

  In the specification and claims of the present application, “drilling” means piercing before cutting, and “provided” means directly provided. In addition, it is intended to include being indirectly provided through another member. The “Z-axis direction” refers to a direction orthogonal to the X-axis direction and the Y-axis direction, and the “X-axis direction” refers to the table length direction of the machining table. "Direction" refers to the table width direction orthogonal to the table length direction. Furthermore, “to form a recess in the holed portion of the workpiece” includes forming a recess in an area having the holed hole of the workpiece.

  According to the first feature, first, the workpiece is set on the processing table while being supported. Then, by moving the recess forming unit relative to the workpiece (in other words, the processing table) in at least one of the X-axis direction and the Y-axis direction, The punch inclined surface is positioned at a position facing the punched portion of the workpiece in the Z-axis direction. Subsequently, by moving the molding punch in the Z-axis direction approaching the workpiece, the punch inclined surface of the molding punch causes the hole to be punched in the workpiece with respect to the thickness direction of the workpiece. The concave portion having a concave inclined surface that is inclined is formed.

  After the recess is formed in the workpiece, the laser machining head is moved in at least one of the X-axis direction and the Y-axis direction relative to the workpiece (in other words, the machining table). By moving, the tip of the laser processing head is positioned at a position facing the concave inclined surface of the concave portion of the workpiece in the Z-axis direction. Subsequently, the laser oscillator is operated to irradiate laser light onto the inclined surface of the concave portion of the concave portion of the workpiece from the laser processing head. Accordingly, the workpiece can be drilled using the laser light oscillated from the laser oscillator.

  Here, since the laser beam is irradiated from the laser processing head to the concave inclined surface of the concave portion, which is the drilled portion of the workpiece, the workpiece is made of copper, copper alloy, aluminum, or aluminum. Even if it is made of a highly reflective material such as an alloy, the laser beam is reflected toward the laser processing head during the drilling of the workpiece, in other words, a part of the reflected light. Can be prevented from entering the laser processing head.

The second feature of the present invention is used when drilling a workpiece using laser light oscillated from a laser oscillator, and the thickness of the workpiece is provided at a drilled portion of the workpiece. In a forming punch for forming a recess having a recess inclined surface inclined with respect to the direction,
A punch inclined surface inclined with respect to a direction parallel to the axis of the molding punch is formed at the tip, and an inclination angle of the punch inclined surface with respect to the parallel direction is set to 10 to 80 degrees. To do.

  Even when the workpiece is perforated using the forming punch having the second feature, the same effect as that of the first feature is achieved.

A third feature of the present invention is a laser drilling method for drilling a workpiece (work) using laser light oscillated from a laser oscillator.
In a state where the workpiece is supported by the machining table, a molding punch provided on the side facing the Z-axis direction and movable in the Z-axis direction is used on the machining table, and the molding punch is attached to the workpiece. By relatively moving in at least one of the X-axis direction and the Y-axis direction, the molding punch is positioned at a position facing the Z-axis direction at the drilled portion of the workpiece, and subsequently, By moving the forming punch in the Z-axis direction approaching the workpiece, the punched portion of the workpiece is inclined with respect to the thickness direction of the workpiece (in other words, the laser beam irradiation direction). A recessed portion forming step of forming a recessed portion having a recessed portion inclined surface;
After completion of the recess forming step, a laser processing head provided on the side facing the processing table in the Z-axis direction and optically connected to the laser oscillator is used, and the laser processing head is attached to the processing table. By relatively moving in at least one of the X-axis direction and the Y-axis direction, the tip of the laser processing head is opposed to the recess inclined surface of the recess of the workpiece in the Z-axis direction. And subsequently irradiating a laser beam from the laser processing head toward the concave inclined surface of the concave portion of the workpiece by the operation of the laser oscillator. And

  According to the third feature, since the laser beam is irradiated from the laser processing head to the concave inclined surface of the concave portion, which is the drilled portion of the workpiece, the workpiece is made of copper, a copper alloy, Even if it is made of a highly reflective material such as aluminum or aluminum alloy, the laser beam is reflected toward the laser machining head during the drilling of the workpiece, in other words, the reflection. Part of the light can be prevented from entering the laser processing head.

  According to the present invention, even if the workpiece is made of a highly reflective material, it is possible to prevent a part of the reflected light from entering the laser machining head. In addition, it is possible to sufficiently prevent the optical components disposed on the laser oscillator side from being burned out of the laser processing head, and accordingly, the replacement of the optical components is reduced as much as possible, thereby complicating the work. Can be suppressed.

FIG. 1A is a view showing a main part of a laser processing apparatus according to an embodiment of the present invention, FIG. 1B is a view showing a forming punch according to the embodiment of the present invention, and FIG. It is a figure which shows the arrow view part IC in FIG.1 (b). FIG. 2 is a perspective view of the laser processing apparatus according to the embodiment of the present invention. FIGS. 3A and 3B are diagrams for explaining the operation of the laser processing apparatus according to the embodiment of the present invention and the laser drilling method according to the embodiment of the present invention. 4A is a diagram for explaining the operation of the laser processing apparatus according to the embodiment of the present invention and the laser drilling method according to the embodiment of the present invention, and FIG. 4B is a diagram in FIG. It is an enlarged view of arrow view part IVB. FIG. 5 is a diagram for explaining the operation of the laser processing apparatus according to the embodiment of the present invention and the laser drilling method according to the embodiment of the present invention. 6A is a view showing a main part of a laser processing apparatus according to another embodiment of the present invention, FIG. 6B is a view showing a forming punch according to another embodiment of the present invention, FIG. (C) is a figure which shows the arrow view part VIC in FIG.6 (b). FIG. 7A is a diagram for explaining the operation of a laser processing apparatus according to another embodiment of the present invention and a laser drilling method according to another embodiment of the present invention, and FIG. A corresponding figure, FIG.7 (b), is an enlarged view of the arrow view part VIIB in Fig.7 (a). FIG. 8 is a diagram showing a result of a laser beam reflection test in the case where a recess is formed in a holed portion of a copper workpiece, and a recess is not formed in the copper workpiece.

(Embodiment)
An embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 2, the laser processing apparatus 1 according to the embodiment of the present invention uses a laser beam LB oscillated from a fiber laser oscillator 3 to highly reflect copper, copper alloy, aluminum, aluminum alloy, or the like. It is an apparatus for drilling a plate-like workpiece (work) W made of a material. Hereinafter, the configuration and the like of the laser processing apparatus 1 according to the embodiment of the present invention will be described. The configuration of the fiber laser oscillator 3 is a known configuration as shown in Patent Document 1 described above.

  In addition to the fiber laser oscillator 3, the laser processing apparatus 1 includes a processing table 5 that supports the workpiece W, and the processing table 5 extends in the X-axis direction (front-rear direction). A plurality of support portions (not shown) for supporting the workpiece W by point contact, and clamp members (not shown) for fixing the workpiece W to the multiple support portions are provided. Further, a gate-shaped X-axis movable frame (X-axis carriage) 7 is provided on the processing table 5 so as to be movable in the X-axis direction via an X-axis guide member (not shown) extending in the X-axis direction. The X-axis movable frame 7 is moved in the X-axis direction by driving an X-axis servo motor (not shown). Further, a Y-axis carriage 9 is provided on the horizontal portion 7a of the X-axis movable frame 7 so as to be movable in the Y-axis direction via a Y-axis guide member (not shown) extending in the Y-axis direction. The shaft carriage 9 is moved in the Y-axis direction by driving a Y-axis servo motor (not shown).

  As shown in FIG. 1A and FIG. 2, a laser processing head 11 that irradiates a laser beam LB while injecting an assist gas toward a workpiece W is provided on a Y-axis carriage 9 in the Z-axis direction (vertical direction). ) Is provided so as to be movable in the Z-axis direction via a Z-axis guide member (not shown) extending to In other words, on the side facing the machining table 5 in the Z-axis direction (above the machining table 5), the laser machining head 11 passes through the X-axis movable frame 7 and the Y-axis carriage 9 in the X-axis direction and the Y-axis. It can be moved in the direction and the Z-axis direction. The laser processing head 11 moves in the Z-axis direction by driving a Z-axis servo motor (not shown), and moves in the X-axis direction integrally with the X-axis movable frame 7 by driving the X-axis servo motor. The Y-axis servo motor is driven to move integrally with the Y-axis carriage 9 in the Y-axis direction.

  The laser processing head 11 is optically connected to the fiber laser oscillator 3 via a process fiber 13, and converts a laser beam LB emitted from the emission end of the process fiber 13 into parallel light, and A condenser lens 17 that condenses the laser light LB emitted from the collimator lens 15 is provided. The laser processing head 11 is connected to a gas supply source (not shown) that supplies assist gas.

  At a position adjacent to the laser processing head 11 in the Y-axis carriage 9, a recess forming unit 19 for forming a recess C (see FIG. 4A) is provided at a drilled portion of the workpiece W, in other words. For example, a recess forming unit 19 is provided on the side facing the processing table 5 in the Z-axis direction so as to be movable in the X-axis direction and the Y-axis direction via the X-axis movable frame 7 and the Y-axis carriage 9. The recess forming unit 19 is moved in the X-axis direction integrally with the X-axis movable frame 7 by driving the X-axis servo motor, and is moved in the Y-axis direction integrally with the Y-axis carriage 9 by driving the Y-axis servo motor. It is supposed to move. Here, as shown in FIG. 4B, the recess C is a rectangular first recess inclined surface Ca that is inclined with respect to the thickness direction of the workpiece W (in other words, the irradiation direction of the laser beam LB). And a rectangular second recessed portion inclined surface Cb that is adjacent to the first recessed portion inclined surface Ca and is inclined with respect to the thickness direction of the workpiece W. And the concrete structure of the recessed part formation unit 19 is as follows.

  As shown in FIG. 1A, the Y-axis carriage 9 is provided with a pair of Z-axis guide rails 23 each having a punch holding member 21 extending in the Z-axis direction so as to be movable in the Z-axis direction. A Z-axis servomotor 25 is provided on the carriage 9 as an actuator for moving the punch holding member 21 in the Z-axis direction. The Y-axis carriage 9 is rotatably provided with a screw member 27 extending in the Z-axis direction and interlockingly connected to the output shaft of the Z-axis servo motor 25. The punch holding member 21 has a screw member 27 attached thereto. A screwed nut member 29 is provided.

  A forming punch 31 is detachably attached to a lower portion (tip portion) of the punch holding member 21, and the forming punch 31 is integrated with the punch holding member 21 by driving the Z-axis servo motor 25 in the Z-axis direction. To move to. Further, as shown in FIGS. 1B and 1C, the forming punch 31 includes a cylindrical punch base 33 and a square piece punch tip integrally formed on the tip side (lower end side) of the punch base 33. A portion 35 is provided. Furthermore, a rectangular first punch slope inclined with respect to a direction parallel to the axis of the molding punch 31 (axial center of the punch base 33) 31s is formed at the punch tip 35 of the molding punch 31 (tip of the molding punch 31). A surface 35a and a rectangular second punch inclined surface 35b adjacent to the first punch inclined surface 35a and inclined with respect to the parallel direction are formed. The first punch inclined surface 35a of the punch tip 35 of the molding punch 31 forms the first recess inclined surface Ca of the recess C, and the second punch inclined surface of the punch tip 35 of the molding punch 31. 35b is for forming the second recessed portion inclined surface Cb of the recessed portion C.

  Here, as shown in FIGS. 1B and 4B, the inclination angle α of the first punch inclined surface 35a of the punch tip 35 with respect to the parallel direction is 10 to 80 degrees, preferably 10 to 10 degrees. It is set to 50 degrees. The inclination angle α of the first punch inclined surface 35a of the punch tip 35 is set to 10 degrees or more. When the inclination angle α is set to be less than 10 degrees, the first concave portion C with respect to the thickness direction of the workpiece W is set. This is because the inclination angle α ′ of the 1-recess inclined surface Ca becomes less than 10 degrees, and the depth of the recess C becomes too deep. On the other hand, the inclination angle α of the first punch inclined surface 35a of the punch tip 35 is set to 80 degrees or less. If the inclination angle α is set to exceed 80 degrees, the reflected light to the laser processing head 11 side is set. This is because it is difficult to sufficiently reduce (return light) LB ′. Note that it is preferable that the inclination angle α of the first punch inclined surface 35a of the punch tip 35 is set to 50 degrees or less. If the inclination angle α is set to exceed 50 degrees, the thickness direction of the workpiece W is set. This is because the inclination angle α ′ of the first concave inclined surface Ca of the concave C with respect to the angle exceeds 50 degrees, and the absorptance of the laser beam LB with respect to the workpiece W decreases. In particular, when the workpiece W is made of copper or a copper alloy, it is desirable that the inclination angle α of the first punch inclined surface 35a of the punch tip 35 with respect to the axis of the forming punch 31 is close to 50 degrees.

  The intersection angle β between the first punch inclined surface 35a and the second punch inclined surface 35b at the punch tip portion 35 of the molding punch 31 is set to 95 to 120 degrees. The intersection angle β between the first punch inclined surface 35a and the second punch inclined surface 35b at the punch tip portion 35 of the molding punch 31 is set to 95 degrees or more. The angle of intersection β ′ between the first concave inclined surface Ca and the second concave inclined surface Cb in C becomes less than 95 degrees, and the reflected light (returned light) LB ′ toward the laser processing head 11 can be sufficiently reduced. Because it becomes difficult. On the other hand, the reason why the intersection angle β between the first punch inclined surface 35a and the second punch inclined surface 35b in the punch tip portion 35 of the forming punch 31 is set to 120 degrees or less is set to exceed 120 degrees. This is because the intersection angle β ′ between the first recessed portion inclined surface Ca and the second recessed portion inclined surface Cb in the recessed portion C exceeds 120 degrees, and the depth of the recessed portion C becomes too shallow.

  Subsequently, a laser drilling method according to an embodiment of the present invention will be described.

  The laser drilling method according to the embodiment of the present invention uses a laser beam LB oscillated from the fiber laser oscillator 3 to form a plate-like plate made of a highly reflective material such as copper, copper alloy, aluminum, or aluminum alloy. A method for drilling a workpiece W, which includes a recess forming step and a laser beam irradiation step. And the concrete content of each process in the laser drilling method which concerns on embodiment of this invention is as follows.

Concave Forming Step As shown in FIG. 1 (a), with the work table W supported on the work table 5, the concavity forming unit 19 is moved in the X-axis direction and the Y-axis by driving the X-axis servo motor and the Y-axis servo motor. By moving in the axial direction, the first punch inclined surface 35a of the punch tip portion 35 of the forming punch 31 is positioned at a position facing the punched portion of the workpiece W in the Z-axis direction. Subsequently, as shown in FIG. 3A, the molding punch 31 is moved in the Z-axis direction (downward) approaching the workpiece W (in other words, the machining table 5) by driving the Z-axis servomotor 25. Let As a result, the thickness direction of the workpiece W (in other words, the laser beam LB) is formed at the drilled portion of the workpiece W by the first punch inclined surface 35a and the second punch inclined surface 35b at the punch tip portion 35 of the forming punch 31. The recessed part C which has the 1st recessed part inclined surface Ca and the 2nd recessed part inclined surface Cb inclined with respect to (irradiation direction) can be formed (refer FIG.4 (b)). Here, for the above-mentioned reason, the inclination angle α ′ of the first concave inclined surface Ca of the concave C to be formed on the surface of the workpiece W is set to 10 to 80 degrees, preferably 10 to 50 degrees. The intersection angle β ′ between the first recessed portion inclined surface Ca and the second recessed portion inclined surface Cb in the recessed portion C is set to 95 to 120 degrees.

  In addition, after forming the recessed part C in the drilled part of the workpiece W, the Z-axis direction (in other words, the machining punch 31 is separated from the workpiece W (in other words, the machining table 5) by driving the Z-axis servo motor 25). Move upward) to return to the original height position.

Laser beam irradiation step After the recess formation step, as shown in FIG. 3B, the laser processing head 11 is moved in the Y-axis direction by driving the Y-axis servo motor, thereby the tip of the laser processing head 11 ( The lower end portion is positioned at a position facing the first recessed portion inclined surface Ca of the recessed portion C of the workpiece W in the Z-axis direction. Subsequently, as shown in FIGS. 4 (a) and 4 (b), the fiber laser is adjusted under the condition that the focal position of the laser beam LB is adjusted by the movement of the laser processing head 11 in the Z-axis direction by driving the Z-axis servo motor. The laser beam LB is irradiated while the assist gas is jetted from the laser processing head 11 toward the first recess inclined surface Ca of the recess C of the workpiece W by the operation of the oscillator 3 and the gas supply source. As a result, as shown in FIG. 5, the machining hole H can be formed by drilling the workpiece W using the laser beam LB oscillated from the fiber laser oscillator 3.

  Then, the effect | action and effect of embodiment of this invention are demonstrated.

  Since the laser beam LB is radiated from the laser processing head 11 to the first concave inclined surface Ca of the concave portion C that is a drilled portion of the workpiece W, the workpiece W is copper, copper alloy, aluminum, or aluminum alloy. Even when the workpiece W is made of a highly reflective material, the laser beam LB is reflected toward the laser machining head 11 during the drilling of the workpiece W, in other words, the reflected beam LB ′. It is possible to prevent a part from entering the laser processing head 11. In particular, the intersection angle β between the first punch inclined surface 35a and the second punch inclined surface 35b in the punch tip portion 35 of the molding punch 31, in other words, the first recessed portion inclined surface Ca and the second recessed portion inclined surface Cb in the recessed portion C, Is set to 95 to 120 degrees, it is possible to sufficiently reduce the reflected light LB ′ toward the laser processing head 11 (see examples described later).

  Further, the inclination angle α of the first punch inclined surface 35 a of the punch tip 35 with respect to the axis of the forming punch 31, in other words, the inclination angle α ′ of the first concave inclined surface Ca of the concave portion C with respect to the surface of the workpiece W. Is set to 10 to 50 degrees, the absorption rate of the laser beam LB with respect to the workpiece W can be sufficiently increased.

  Therefore, according to the embodiment of the present invention, even if the workpiece W is made of a highly reflective material, it is possible to prevent a part of the reflected light LB ′ from entering the laser processing head 11. During drilling of the workpiece W, it is possible to sufficiently prevent the optical components such as the condensing lens 17 and the process fiber 13 from being burned out, and accordingly, the optical components such as the condensing lens 17 and the process fiber 13. Can be reduced as much as possible, and the complexity of work can be suppressed. Moreover, since the absorption rate of the laser beam LB with respect to the workpiece W can be sufficiently increased, a stable drilling process can be performed on the workpiece W.

(Another embodiment)
Another embodiment of the present invention will be described with reference to FIGS.

  Two punch inclined surfaces (first punch inclined surface 35a and second punch inclined surface 35b) are formed at the punch tip portion 35 of the forming punch 31 (see FIGS. 1A, 1B, and 1C). 6 (a), 6 (b), and 6 (c), only one punch inclined surface (first punch inclined surface) 35a may be formed at the punch tip portion 35 of the forming punch 31. The inclination angle α of the first punch inclined surface 35a of the punch tip 35 with respect to the direction parallel to the axis 31s of the forming punch 31 is set to 10 to 80 degrees, preferably 10 to 50 degrees, for the reasons described above. Yes. In this case, as shown in FIGS. 7 (a) and 7 (b), a recess C having only one recess inclined surface (first recess inclined surface) Ca is formed at a drilled portion of the workpiece W. become.

  And in another embodiment of the present invention, the same operation and effect as the embodiment of the present invention are exhibited.

  Note that the present invention is not limited to the description of the above-described embodiment. For example, the punch of the forming punch 31 so that the first recessed portion inclined surface Ca and the second recessed portion inclined surface Cb in the recessed portion C each have a rectangular shape. The first punch inclined surface 35a and the second punch inclined surface 35b in the distal end portion 35 can be implemented in various other forms such as a circular shape or a conical shape. Further, the scope of rights encompassed by the present invention is not limited to these embodiments.

  An embodiment of the present invention will be described with reference to FIG.

  As shown in FIG. 8, when a recess is formed in a drilled portion of a copper workpiece (in the case of the invention example), compared to a case where no recess is formed in the copper workpiece (in the case of the conventional example), It was confirmed by a laser beam reflection test that the amount of reflected light reflected toward the laser processing head side can be greatly reduced. Here, the inclination angle of the first recessed portion inclined surface of the recessed portion is set to 30 degrees, and the intersection angle between the first recessed portion inclined surface and the second recessed portion inclined surface in the recessed portion is set to 100 degrees. In the laser beam reflection test, the laser beam was irradiated so as to be focused at a depth of 1.0 mm from the surface of the copper workpiece. Note that the magnitude of the amount of reflected light in FIG. 7 is made dimensionless with the conventional example being 100%.

W Workpiece C Recessed portion Ca First recessed portion inclined surface Cb Second recessed portion inclined surface H Processing hole LB Laser light LB 'Reflected light 1 Laser processing device 3 Fiber laser oscillator 5 Processing table 7 X-axis movable frame 7a Horizontal portion 9 Y-axis Carriage 11 Laser processing head 13 Process fiber 15 Collimating lens 17 Condensing lens 19 Recessed unit 21 Punch holding member 23 Z-axis guide rail 25 Z-axis servo motor 27 Screw member 29 Nut member 31 Molding punch 33 Punch base 35 Punch tip 35a First punch inclined surface 35b Second punch inclined surface

Claims (10)

In a laser processing apparatus for drilling a workpiece using laser light oscillated from a laser oscillator,
A processing table for supporting the workpiece;
Provided on the side facing the machining table in the Z-axis direction so as to be movable in the X-axis direction, the Y-axis direction, and the Z-axis direction relative to the machining table, and optically connected to the laser oscillator; A laser processing head for irradiating a laser beam toward the workpiece;
The molding punch is provided on the side facing the machining table in the Z-axis direction so as to be movable relative to the machining table in the X-axis direction and the Y-axis direction, and movable in the Z-axis direction. A punch inclined surface that is inclined with respect to a direction parallel to the axis of the molding punch is formed at the tip of the punch, and a recess forming unit that forms a recess at a drilled portion of the workpiece. Laser processing equipment.   The laser processing apparatus according to claim 1, wherein an inclination angle of the punch inclined surface with respect to the parallel direction is set to 10 to 80 degrees.   3. The laser processing according to claim 1, wherein another punch inclined surface that is adjacent to the punch inclined surface and is inclined with respect to the parallel direction is formed at a tip of the molding punch. 4. apparatus.   The laser processing apparatus according to claim 3, wherein an intersection angle between the punch inclined surface and the another punch inclined surface in the molding punch is set to 95 to 120 degrees. Recessed inclined surface that is used when drilling a workpiece using laser light oscillated from a laser oscillator and is inclined with respect to the thickness direction of the workpiece at the drilled portion of the workpiece In a molding punch for forming a recess having
A punch inclined surface inclined with respect to a direction parallel to the axis of the molding punch is formed at the tip, and an inclination angle of the punch inclined surface with respect to the parallel direction is set to 10 to 80 degrees. Forming punch.   Another punch inclined surface that is adjacent to the punch inclined surface and inclined with respect to the parallel direction is formed at the tip, and the intersection angle between the punch inclined surface and the another punch inclined surface is set to 95 to 120 degrees. The forming punch according to claim 5, wherein In a laser drilling method for drilling a workpiece using laser light oscillated from a laser oscillator,
In a state where the workpiece is supported on the machining table, a molding punch provided on the side facing the Z-axis direction and movable in the Z-axis direction is used on the machining table, and the molding punch is attached to the workpiece. By relatively moving the punch in at least one of the X-axis direction and the Y-axis direction to position the molding punch at a position facing the Z-axis direction at the drilled portion of the workpiece, By moving the forming punch in the Z-axis direction approaching the workpiece, a concave portion having a concave inclined surface that is inclined with respect to the thickness direction of the workpiece at the perforated portion of the workpiece. A recess forming step to be formed;
After completion of the recess forming step, a laser processing head provided on the side facing the processing table in the Z-axis direction and optically connected to the laser oscillator is used, and the laser processing head is attached to the workpiece. The tip of the laser processing head is opposed to the concave inclined surface of the concave portion of the workpiece in the Z-axis direction by relatively moving in at least one of the X-axis direction and the Y-axis direction. And a laser beam irradiation step of irradiating a laser beam from the laser processing head to the concave inclined surface of the concave portion of the workpiece by the operation of the laser oscillator. Laser drilling method.   The laser drilling method according to claim 7, wherein an inclination angle of the concave inclined surface of the concave portion in the thickness direction of the workpiece is set to 10 to 80 degrees.   The said recessed part has another recessed part inclined surface which was adjacent to the said recessed part inclined surface and inclined with respect to the thickness direction of the said workpiece other than the said recessed part inclined surface. Alternatively, the laser drilling method according to claim 8.   10. The laser drilling method according to claim 9, wherein an angle of intersection between the recessed portion inclined surface and the another recessed portion inclined surface in the recessed portion is set to 95 to 120 degrees.

Images