JP2014041067A - Ultrasonic flaw detection method and device - Google Patents
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Abstract
Description
本発明は、超音波探傷センサを使用する超音波探傷方法に係り、特に探傷の信頼度を向上できる探傷方法に関する。 The present invention relates to an ultrasonic flaw detection method using an ultrasonic flaw detection sensor, and more particularly to a flaw detection method that can improve the reliability of flaw detection.
初めに２次元走査を例にフェーズドアレイ超音波探傷方法の概要を説明し、その３次元化について説明する。 First, the outline of the phased array ultrasonic flaw detection method will be described by taking two-dimensional scanning as an example, and the three-dimensionalization will be described.
非特許文献１に記載の２次元超音波探傷（２ＤＵＴ）では、直方体の超音波素子３１を１方向に配列し、保護ケース３４に収納した２次元超音波探傷センサ３５を使用する。２次元超音波探傷センサ３５を構成する個々の超音波素子３１は、検査対象に対面する底面に設けられた電極３２と、各超音波素子の上面に設けられた電極３２Ｂに電圧を印加する信号線（図示せず）を備えている。この電極３２Ｂ上に、Ｓ／Ｎを向上するため、超音波送信時の残振を低減するためのバッキング３３が設置されている。図１５にはこの２次元超音波探傷センサ３５を示す。図１６には、この２次元超音波探傷センサ３５を用いて超音波を２次元走査する方法の説明図を示す。各超音波素子から焦点に同時に超音波が届くように時間差をつけて超音波を発信する（以下、超音波発振時間差を電気的に制御して焦点３６を変更することを電子走査と称す）。センサを構成する各超音波素子から焦点に同時に超音波が到達するため、焦点の音圧が高められて焦点の検出感度が向上する。２次元超音波探傷センサは超音波素子を１列配列しているため、配列方向を含む平面上で超音波の焦点距離と屈折角度が走査可能となる。 In the two-dimensional ultrasonic flaw detection (2DUT) described in Non-Patent Document 1, a two-dimensional ultrasonic flaw detection sensor 35 in which rectangular parallelepiped ultrasonic elements 31 are arranged in one direction and stored in a protective case 34 is used. Each ultrasonic element 31 constituting the two-dimensional ultrasonic flaw detection sensor 35 is a signal for applying a voltage to the electrode 32 provided on the bottom surface facing the inspection object and the electrode 32B provided on the top surface of each ultrasonic element. A line (not shown) is provided. On this electrode 32B, in order to improve S / N, the backing 33 for reducing the after vibration at the time of ultrasonic transmission is installed. FIG. 15 shows the two-dimensional ultrasonic inspection sensor 35. FIG. 16 is an explanatory diagram of a method for two-dimensionally scanning ultrasonic waves using the two-dimensional ultrasonic flaw detection sensor 35. An ultrasonic wave is transmitted with a time difference so that ultrasonic waves simultaneously reach the focal point from each ultrasonic element (hereinafter, changing the focal point 36 by electrically controlling the ultrasonic oscillation time difference is referred to as electronic scanning). Since ultrasonic waves simultaneously reach the focal point from each ultrasonic element constituting the sensor, the sound pressure at the focal point is increased and the detection sensitivity of the focal point is improved. Since the two-dimensional ultrasonic flaw detection sensor has one row of ultrasonic elements, the focal length and refraction angle of the ultrasonic wave can be scanned on a plane including the arrangement direction.
非特許文献２に記載の３次元超音波探傷（３ＤＵＴ）では、直方体の超音波素子３１を２方向に配列してした３次元超音波探傷センサ１を使用する。図３に示すように３次元超音波探傷センサ１は、２方向に配列している。この超音波素子配列の場合、２つの配列方向に超音波を走査可能であり、焦点距離も調整可能であるため、図４に示す３次元走査が可能となる。 In the three-dimensional ultrasonic flaw detection (3DUT) described in Non-Patent Document 2, a three-dimensional ultrasonic flaw detection sensor 1 in which rectangular parallelepiped ultrasonic elements 31 are arranged in two directions is used. As shown in FIG. 3, the three-dimensional ultrasonic flaw detection sensors 1 are arranged in two directions. In the case of this ultrasonic element arrangement, since ultrasonic waves can be scanned in two arrangement directions and the focal length can be adjusted, the three-dimensional scanning shown in FIG. 4 is possible.
上述の超音波探傷では、検査対象を挟んで送信センサ及び受信センサを設置した場合に下記のような課題がある。 In the above-described ultrasonic flaw detection, there are the following problems when a transmission sensor and a reception sensor are installed across an inspection target.
図１９（ａ）は検査対象上の適正位置に超音波探傷センサが設置された場合の超音波の送受信状況で、送信された超音波が検査箇所に入射し、受信センサで送信された超音波が受信される。図１９（ｂ）に示すように、センサ間の相対位置がずれた場合には、検査箇所で反射された超音波が受信されない。また、図１９（ｃ）に示すように、検査対象上のセンサの位置がずれた場合、探傷箇所には超音波が入射されず、検査の信頼度が低下する。すなわち、センサ間の相対位置及びセンサと被検査対象の相対位置を適正位置とする必要がある。 FIG. 19A shows an ultrasonic transmission / reception state when the ultrasonic flaw detection sensor is installed at an appropriate position on the inspection target, and the transmitted ultrasonic wave enters the inspection location and is transmitted by the reception sensor. Is received. As shown in FIG. 19B, when the relative position between the sensors is deviated, the ultrasonic wave reflected at the inspection location is not received. Further, as shown in FIG. 19C, when the position of the sensor on the inspection object is shifted, the ultrasonic wave is not incident on the flaw detection portion, and the reliability of the inspection is lowered. That is, it is necessary to set the relative position between the sensors and the relative position between the sensor and the test object to be proper positions.
特許文献１では、２つの探触子がタービンの軸方向に沿って対称位置に設置されているかどうか確認し、必要に応じて前記対称位置に設置されるように調整している。しかし、検査対象上のセンサ位置は不明なため、探傷箇所へ超音波が送受信されているか否か不明である。 In Patent Document 1, it is confirmed whether or not two probes are installed at symmetrical positions along the axial direction of the turbine, and adjustment is made so that they are installed at the symmetrical positions as necessary. However, since the sensor position on the object to be inspected is unknown, it is unknown whether ultrasonic waves are being transmitted to the flaw detection site.
本発明の課題は、センサ間の相対位置と、検査対象上のセンサ位置を評価することにより、検査の信頼度を向上することである。 The subject of this invention is improving the reliability of a test | inspection by evaluating the relative position between sensors and the sensor position on a test object.
２つ以上の超音波探傷センサを用いる超音波探傷法において、
（１）検査対象形状を超音波探傷装置の制御装置に入力するステップと、
（２）１つ以上のセンサから超音波を３次元走査するするステップと、
（３）センサ間で直接送受信された超音波の伝搬距離と屈折角から、センサ間の相対位置を評価するステップと、
（４）検査対象で反射された超音波の伝搬距離と屈折角から、検査対象上のセンサ位置を評価するステップと、
（５）センサ位置を調整するステップと、
（６）超音波探傷結果を評価するステップを設ける。
In the ultrasonic flaw detection method using two or more ultrasonic flaw detection sensors,
(1) inputting a shape to be inspected into a control device of an ultrasonic flaw detector;
(2) three-dimensionally scanning ultrasonic waves from one or more sensors;
(3) a step of evaluating a relative position between sensors based on a propagation distance and a refraction angle of ultrasonic waves directly transmitted and received between the sensors;
(4) evaluating a sensor position on the inspection object from a propagation distance and a refraction angle of the ultrasonic wave reflected by the inspection object;
(5) adjusting the sensor position;
(6) A step of evaluating the ultrasonic flaw detection result is provided.
このステップ（２）の３次元超音波走査は、超音波の電子走査、センサの機械走査、あるいは電子走査と機械走査の組み合わせとするのが良い。 The three-dimensional ultrasonic scanning in this step (2) is preferably ultrasonic electronic scanning, sensor mechanical scanning, or a combination of electronic scanning and mechanical scanning.
また、ステップ（３）とステップ（４）でセンサ間の相対位置と検査対象上のセンサ位置が適正と評価された場合、ステップ（５）は省略してもよい。 If the relative position between the sensors and the sensor position on the inspection object are evaluated as appropriate in step (3) and step (4), step (5) may be omitted.
また、ステップ（４）で求めたセンサ間の相対位置と検査対象上のセンサ位置を画像表示するのが良い。 Further, it is preferable to display an image of the relative position between the sensors obtained in step (4) and the sensor position on the inspection object.
また、センサの設置位置精度が高い場合には探傷終了後に探傷結果を用いてステップ（３）とステップ（４）を実施するのがよい。 If the sensor installation position accuracy is high, it is preferable to perform step (3) and step (4) using the flaw detection result after the flaw detection is completed.
本発明によれば、センサと検査対象の相対位置を評価することが可能なため、検査の信頼度を向上できる。 According to the present invention, since the relative position between the sensor and the inspection object can be evaluated, the reliability of the inspection can be improved.
以下、本発明の実施の形態を、図面を用いて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図１〜１１、数式（１）〜（６）を用いて、２つの３次元超音波探傷センサを用いてセンサ間の相対位置と検査対象上のセンサ位置を測定する第１実施例について説明する。 A first embodiment for measuring a relative position between sensors and a sensor position on an inspection object using two three-dimensional ultrasonic flaw detection sensors will be described with reference to FIGS. 1 to 11 and mathematical expressions (1) to (6). .
図１に第１実施例の超音波探傷方法の概念図を示す。検査対象上に２つの３次元超音波探傷センサ１及び３次元超音波探傷センサ２を設置し、センサ間で直接送受信する超音波の伝播距離と送受信方向からセンサ間の相対位置を評価する。また、一方の３次元超音波探傷センサ１から超音波を送信し、検査対象で反射させて、もう１方の３次元超音波探傷センサ２で受信した場合の超音波の送受信距離と送受信方向から、検査対象上の３次元超音波探傷センサ位置を評価する。 FIG. 1 shows a conceptual diagram of the ultrasonic flaw detection method of the first embodiment. Two three-dimensional ultrasonic flaw detection sensors 1 and 2 are installed on the inspection object, and the relative position between the sensors is evaluated from the propagation distance and transmission / reception direction of ultrasonic waves directly transmitted / received between the sensors. Also, from the transmission / reception distance and transmission / reception direction of the ultrasonic wave when the ultrasonic wave is transmitted from one three-dimensional ultrasonic flaw detection sensor 1, reflected by the inspection object, and received by the other three-dimensional ultrasonic flaw detection sensor 2. The position of the three-dimensional ultrasonic flaw detection sensor on the inspection object is evaluated.
図２に第１実施例の超音波探傷システムのブロック図を示す。この超音波探傷には超音波を送受信するための超音波探傷装置８、３次元超音波探傷センサ１、超音波探傷装置を制御するとともに、センサ間の相対位置、センサと検査対象の相対位置を評価するために用いるパソコン９より構成される。 FIG. 2 shows a block diagram of the ultrasonic flaw detection system according to the first embodiment. In this ultrasonic flaw detection, the ultrasonic flaw detector 8 for transmitting / receiving ultrasonic waves, the three-dimensional ultrasonic flaw detector 1, and the ultrasonic flaw detector are controlled, and the relative position between the sensors and the relative position between the sensor and the inspection object are determined. It is comprised from the personal computer 9 used in order to evaluate.
図３には３次元超音波探傷センサ１の構成図を示す。図４には３次元超音波走査法を示す。これらの概要は背景技術に記述したとおりである。 FIG. 3 shows a configuration diagram of the three-dimensional ultrasonic flaw detection sensor 1. FIG. 4 shows a three-dimensional ultrasonic scanning method. These outlines are as described in the background art.
図５〜図１０でセンサ間の相対位置とセンサと検査対象の相対位置を測定する方法について説明する。 A method for measuring the relative position between sensors and the relative position between the sensor and the inspection object will be described with reference to FIGS.
図５に高さＨ幅Ｗ長さＬの直方体の検査対象上へのセンサ配置を示す。検査対象の高さをｚ軸、幅をｘ軸、長さをｙ軸と一致させている。３次元超音波探傷センサ１はｙ＝０におけるｘ−ｚ面上の（ｘ１，０、ｚ１）の位置で、ｚ軸に対し角度θ１傾いて配置されている。ｘ１、ｚ１、θ１が未知のパラメータとなる。３次元超音波探傷センサ２は、ｙ＝Ｌにおけるｘ−ｚ面上の（ｘ２，Ｌ、ｚ２）の位置で、ｚ軸に対し角度θ２傾いて配置されている。ｘ２、ｚ２、θ２が未知のパラメータとなる。 FIG. 5 shows a sensor arrangement on a test object of a rectangular parallelepiped having a height H width W length L. The height of the inspection object is matched with the z axis, the width is matched with the x axis, and the length is matched with the y axis. The three-dimensional ultrasonic flaw detection sensor 1 is disposed at an angle θ1 with respect to the z axis at a position (x1, 0, z1) on the xz plane at y = 0. x1, z1, and θ1 are unknown parameters. The three-dimensional ultrasonic flaw detection sensor 2 is disposed at an angle θ2 with respect to the z axis at a position (x2, L, z2) on the xz plane at y = L. x2, z2, and θ2 are unknown parameters.
図６はセンサ間距離測定の説明図で、３次元超音波探傷センサ１から超音波を送信して３次元超音波探傷センサ２で受信する場合の最短の伝搬距離としてセンサ間距離Ｌ１が求められる。Ｌ１はセンサの位置座標を用いて数式（１）で記述される。 FIG. 6 is an explanatory diagram of the inter-sensor distance measurement. The inter-sensor distance L1 is obtained as the shortest propagation distance when the ultrasonic wave is transmitted from the three-dimensional ultrasonic flaw detection sensor 1 and received by the three-dimensional ultrasonic flaw detection sensor 2. . L1 is described by Expression (1) using the position coordinates of the sensor.
Ｌ１＝｛（ｘ１−ｘ２）２＋（Ｌ）２＋（ｚ１−ｚ２）２｝０．５ ・・・数式（１）
図７はセンサ検査対象間距離測定の説明図で、３次元超音波探傷センサ１から検査対象の上面に超音波を送信し、３次元超音波探傷センサ２で受信される最短の距離を測定したものである。このときの伝搬距離Ｌ２は数式（２）で記述される。
Ｌ２＝｛（ｘ１−ｘ２）２+（Ｌ）２+（２ｈ−ｚ１−ｚ２）２｝０．５ ・・・数式（２）
L1 = {(x1−x2) 2 + (L) 2 + (z1−z2) 2 } 0.5 Expression (1)
FIG. 7 is an explanatory diagram of distance measurement between sensor inspection targets, and the ultrasonic wave is transmitted from the three-dimensional ultrasonic flaw detection sensor 1 to the upper surface of the inspection target, and the shortest distance received by the three-dimensional ultrasonic flaw detection sensor 2 is measured. Is. The propagation distance L2 at this time is described by Expression (2).
L2 = {(x1-x2) 2 + (L) 2 + (2h-z1-z2) 2} 0.5 ··· Equation (2)
図８は他のセンサ検査対象間距離測定の説明図で、３次元超音波探傷センサ１から検査対象の上面の角に超音波を送信し、３次元超音波探傷センサ２で受信される距離を測定したものである。角では面反射以外に回折波も発生するため、反射波強度の極大点として角で反射した時の超音波送受信経路が特定される。このときの伝搬距離Ｌ３は数式（３）で記述される。
Ｌ３＝｛（ｘ１+ｘ２）２+（Ｌ）２+（２ｈ−ｚ１−ｚ２）２｝０．５・・・数式（３）
FIG. 8 is an explanatory diagram of the distance measurement between other sensor inspection objects. The ultrasonic wave is transmitted from the three-dimensional ultrasonic inspection sensor 1 to the corner of the upper surface of the inspection object, and the distance received by the three-dimensional ultrasonic inspection sensor 2 is shown. It is measured. In addition to the surface reflection, diffracted waves are also generated at the corners, so that the ultrasonic wave transmission / reception path when reflected at the corners is specified as the maximum point of reflected wave intensity. The propagation distance L3 at this time is described by Expression (3).
L3 = {(x1 + x2) 2 + (L) 2 + (2h−z1−z2) 2 } 0.5 Equation (3)
図９は他のセンサ検査対象間距離測定の説明図で、もう１つの検査対象上面の角を通る超音波伝搬経路の距離を測定したものである。このときの伝搬距離Ｌ４は数式（４）で記述される。
Ｌ４＝｛（２w−ｘ１−ｘ２）２+（Ｌ）２+（２ｈ−ｚ１−ｚ２）２｝０．５・・・数式（４）
FIG. 9 is an explanatory diagram of another distance measurement between sensor inspection objects, and is a measurement of the distance of the ultrasonic propagation path passing through the corner of the other upper surface of the inspection object. The propagation distance L4 at this time is described by Expression (4).
L4 = {(2w−x1−x2) 2 + (L) 2 + (2h−z1−z2) 2 } 0.5 Equation (4)
Ｌ１〜Ｌ４の測定結果と数式（１）〜（４）を用いることにより３次元超音波探傷センサ１と３次元超音波探傷センサ２の位置座標、ｘ１、ｘ２、ｚ１、ｚ２が求められる。また、検査対象に超音波反射源となる凹凸形状がある場合、角のかわりに凹凸部とセンサとの距離を測定してもよい。 By using the measurement results of L1 to L4 and the mathematical expressions (1) to (4), the position coordinates x1, x2, z1, and z2 of the three-dimensional ultrasonic flaw detection sensor 1 and the three-dimensional ultrasonic flaw detection sensor 2 are obtained. In addition, when the inspection target has an uneven shape serving as an ultrasonic reflection source, the distance between the uneven portion and the sensor may be measured instead of the corner.
図１０はセンサ設置角計算方法の説明図で、検査対象のｚ軸に対する３次元超音波探傷センサ１の中心軸がなす角度θ１は、こうして求めたｘ１、ｘ２、ｚ１、ｚ２と３次元超音波探傷センサ１から３次元超音波探傷センサ２へのｘ−ｚ平面における送信角ζ１を用いて、数式（５）で記述される。
θ１＝ζ１−ｔａｎ−１｛（ｚ１−ｚ２）÷（ｘ１−ｘ２）｝・・・数式（５）
ここで、ｔａｎ−１は正接の逆関数を表す。また、３次元超音波探傷センサ２の設置角は３次元超音波探傷センサ２から３次元超音波探傷センサ１へ超音波を送信することにより求めることが可能である。
FIG. 10 is an explanatory diagram of a sensor installation angle calculation method. The angle θ1 formed by the central axis of the three-dimensional ultrasonic flaw detection sensor 1 with respect to the z axis to be inspected is the x1, x2, z1, z2 thus determined and the three-dimensional ultrasonic wave. Using the transmission angle ζ1 in the xz plane from the flaw detection sensor 1 to the three-dimensional ultrasonic flaw detection sensor 2, it is described by Expression (5).
θ1 = ζ1−tan −1 {(z1−z2) ÷ (x1−x2)} (5)
Here, tan −1 represents a tangent inverse function. The installation angle of the three-dimensional ultrasonic flaw detection sensor 2 can be obtained by transmitting ultrasonic waves from the three-dimensional ultrasonic flaw detection sensor 2 to the three-dimensional ultrasonic flaw detection sensor 1.
このようにセンサ間で直接超音波を送受信させるとともに、検査対象で超音波を反射させて送受信することで、検査対象上のセンサ位置を評価することが可能である。 As described above, it is possible to evaluate the sensor position on the inspection object by transmitting and receiving the ultrasonic wave directly between the sensors and reflecting and transmitting the ultrasonic wave on the inspection object.
図１１に第１実施例の超音波探傷方法のフローチャートを示す。以下、このフローチャート及び図２の超音波探傷システムのブロック図を用いて超音波探傷方法を説明する。 FIG. 11 shows a flowchart of the ultrasonic flaw detection method of the first embodiment. Hereinafter, the ultrasonic flaw detection method will be described with reference to this flowchart and the block diagram of the ultrasonic flaw detection system of FIG.
ステップ１０１で、パソコンのキーボード２６あるいは記録メディア２７のうち１つ以上の入力装置を用いて検査対象の形状を入力する。記録メディアとしては、ＤＶＤ、ブルーレイディスク、ＭＯ等を用いる。検査対象の形状はＩ／Ｏポート２５を経由して中央演算処理装置（ＣＰＵ）２１に伝達するとともに、ハードディスクドライブ（ＨＤＤ）２２、ランダムアクセスメモリ（ＲＡＭ）２３のうち、１つ以上の記憶媒体に記憶する。 In step 101, the shape to be inspected is input using one or more input devices of the keyboard 26 or the recording medium 27 of the personal computer. As a recording medium, a DVD, a Blu-ray disc, an MO, or the like is used. The shape to be inspected is transmitted to the central processing unit (CPU) 21 via the I / O port 25 and at least one storage medium of the hard disk drive (HDD) 22 and the random access memory (RAM) 23. To remember.
ステップ１０２で検査対象上に２つの３次元超音波探傷センサを設置する。 In step 102, two three-dimensional ultrasonic flaw detection sensors are installed on the inspection target.
ステップ１０３で、３次元超音波探傷を実施する。探傷は、キーボードから超音波探傷開始信号を入力することで開始する。この開始信号はＩ／Ｏポートを介してＣＰＵに伝達され、ＣＰＵで探傷開始信号に基づきパソコンのＩ／Ｏポート、超音波探傷装置のＩ／Ｏポート２５、Ｄ／Ａコンバータ３０を介してセンサの圧電素子に電圧を印加する。電圧印加により圧電素子が振動して超音波が送信され、受信センサの圧電素子で送信波を振動として受信する。受信された振動は電圧に変換されてＡ／Ｄコンバータ２９、超音波探傷装置のＩ／Ｏポート、パソコンのＩ／Ｏポートを介してパソコンのＣＰＵに伝達される。ＣＰＵは超音波の送信角、集束距離、及び、受信強度の時間変化をＲＡＭ、ＨＤＤのうち１つ以上の記憶装置に記憶させる。ＣＰＵにおいて、この探傷結果とリードオンリーメモリ（ＲＯＭ）２４、ＲＡＭ、ＨＤＤのうち１つ以上の記憶装置に記憶させた数式（１）から（５）を解くプログラムを用い、超音波探傷結果から、センサ間の相対位置と検査対象上におけるセンサ位置を評価する。こうして評価されたセンサ位置は、ＲＡＭ、ＨＤＤのうち１つ以上の記憶装置に記憶する。 In step 103, three-dimensional ultrasonic testing is performed. The flaw detection is started by inputting an ultrasonic flaw detection start signal from the keyboard. This start signal is transmitted to the CPU via the I / O port. Based on the flaw detection start signal, the CPU detects the sensor via the I / O port of the personal computer, the I / O port 25 of the ultrasonic flaw detector, and the D / A converter 30. A voltage is applied to the piezoelectric element. When the voltage is applied, the piezoelectric element vibrates and ultrasonic waves are transmitted, and the transmission wave is received as vibration by the piezoelectric element of the receiving sensor. The received vibration is converted into voltage and transmitted to the CPU of the personal computer via the A / D converter 29, the I / O port of the ultrasonic flaw detector, and the I / O port of the personal computer. The CPU stores temporal changes in the transmission angle, focusing distance, and reception intensity of ultrasonic waves in one or more storage devices of RAM and HDD. In the CPU, using this flaw detection result and a program that solves equations (1) to (5) stored in one or more storage devices of the read-only memory (ROM) 24, RAM, and HDD, The relative position between the sensors and the sensor position on the inspection object are evaluated. The sensor position evaluated in this way is stored in one or more storage devices of RAM and HDD.
ステップ１０４で、ステップ１０３で求めた検査対象上のセンサ位置をＩ／Ｏポートを介してモニタ２８に表示する。センサ位置が不適切である場合、センサ位置測定結果に基づいてセンサ設置位置を変更し、ステップ１０３を行う。センサ位置が適切な場合、ステップ１０５に進む。ここでいう適切なセンサ位置とは、検査箇所への超音波入射角が超音波の反射効率が高くなる位置である。すなわち、縦波の場合０〜２０°あるいは７０〜９０°、横波の場合３５〜５５°となるようセンサを設置することが好ましい。 In step 104, the sensor position on the inspection object obtained in step 103 is displayed on the monitor 28 via the I / O port. If the sensor position is inappropriate, the sensor installation position is changed based on the sensor position measurement result, and step 103 is performed. If the sensor position is appropriate, go to step 105. An appropriate sensor position here is a position where the ultrasonic incident angle to the inspection location increases the reflection efficiency of the ultrasonic waves. That is, it is preferable to install the sensor so that the longitudinal wave is 0 to 20 ° or 70 to 90 °, and the transverse wave is 35 to 55 °.
ステップ１０５で、モニタに表示された探傷結果から欠陥信号を弁別する。欠陥信号は、健全な検査対象の反射波との差異として評価される。また、センサ設置面積が小さいなどの理由により設置位置の誤差が小さいと想定される場合、ステップ１０４を省略してステップ１０５を行い、探傷結果を用いてステップ１０４を実施して、設置位置に問題が無いことを確認してもよい。この場合超音波探傷の信頼度を確保しつつ高速化が可能となる。 In step 105, a defect signal is discriminated from the flaw detection result displayed on the monitor. The defect signal is evaluated as a difference from a reflected wave to be inspected soundly. Also, if it is assumed that the error of the installation position is small due to a small sensor installation area, etc., step 104 is omitted and step 105 is performed, and step 104 is performed using the flaw detection result. You may confirm that there is no. In this case, it is possible to increase the speed while ensuring the reliability of ultrasonic flaw detection.
また、直接送受された超音波による探傷結果を使用しなくても、角部での反射超音波、検査対象面での反射超音波のみを用いてもセンサ間の相対位置と検査対象上のセンサ位置を評価することが可能である。ただし、検査対象によっては、角部での反射超音波や検査対象面での反射超音波が十分に得られない場合もある。したがって、検査対象によっては、センサ間の直接送受された超音波の伝搬距離と走査方向からセンサ間の相対位置を求め、検査対象からの反射波の伝搬距離と走査方向から検査対象上の超音波探傷センサの位置を求めることが重要になる。 In addition, the relative position between the sensors and the sensor on the inspection object can be used even if only the reflected ultrasonic wave at the corner and the reflected ultrasonic wave at the inspection target surface are used, without using the flaw detection result by the ultrasonic wave directly transmitted and received. It is possible to evaluate the position. However, depending on the inspection object, there may be a case where the reflected ultrasonic wave at the corner and the reflected ultrasonic wave at the inspection object surface cannot be sufficiently obtained. Therefore, depending on the inspection object, the relative position between the sensors is obtained from the propagation distance of the ultrasonic wave directly transmitted and received between the sensors and the scanning direction, and the ultrasonic wave on the inspection object is calculated from the propagation distance of the reflected wave from the inspection object and the scanning direction. It is important to obtain the position of the flaw detection sensor.
本発明は以上説明したように構成されているため、センサ間の相対位置と検査対象上のセンサ位置を評価することが可能であるため、超音波探傷の信頼度が向上する。また、超音波探傷が高速化される。 Since the present invention is configured as described above, it is possible to evaluate the relative position between the sensors and the sensor position on the inspection object, so that the reliability of ultrasonic flaw detection is improved. Also, the ultrasonic flaw detection is speeded up.
図１２を用いて３次元超音波探傷センサを３つ用いる第２実施例について説明する。本実施例における検査対象は、段がある構造である。３次元超音波探傷センサ１から送信された超音波は検査対象で反射される。しかし、この反射波は段にさえぎられて３次元超音波探傷センサ２では測定されないシャドーゾーン５０が形成される。このシャドーゾーンに到達する反射波を受信するため３次元超音波探傷センサ３を設置したものである。３次元超音波探傷センサ１と３次元超音波探傷センサ２、３次元超音波探傷センサ１と３次元超音波探傷センサ３との間の相対位置及び検査対象上のセンサ位置を評価するアルゴリズムは第１実施例と同様である。 A second embodiment using three three-dimensional ultrasonic flaw detection sensors will be described with reference to FIG. The inspection object in the present embodiment has a structure with steps. The ultrasonic wave transmitted from the three-dimensional ultrasonic flaw detection sensor 1 is reflected by the inspection object. However, this reflected wave is blocked by a step, and a shadow zone 50 that is not measured by the three-dimensional ultrasonic flaw detection sensor 2 is formed. In order to receive the reflected wave that reaches this shadow zone, a three-dimensional ultrasonic flaw detection sensor 3 is installed. The algorithm for evaluating the relative position between the three-dimensional ultrasonic flaw detection sensor 1 and the three-dimensional ultrasonic flaw detection sensor 2, the three-dimensional ultrasonic flaw detection sensor 1 and the three-dimensional ultrasonic flaw detection sensor 3 and the sensor position on the inspection object is first. This is the same as in the first embodiment.
この実施例は受信センサを１つから２つに増やした例であるが、送信側、受信側とも複数個のセンサを用いても、第１実施例と同様のアルゴリズムでセンサと検査対象の相対位置を評価することが可能である。この実施例は、段差を持つ検査対象において、第１の実施例よりも探傷可能範囲が広がるというメリットを持つ。 This embodiment is an example in which the number of reception sensors is increased from one to two, but even if a plurality of sensors are used on both the transmission side and the reception side, the relative algorithm between the sensor and the inspection object is the same as in the first embodiment. It is possible to evaluate the position. This embodiment has the merit that the flaw detection range is wider than that of the first embodiment in the inspection object having a step.
図１３〜図１８を用いて、２次元超音波探傷センサを機械走査して３次元超音波探傷を行う第３実施例について説明する。 A third embodiment in which three-dimensional ultrasonic flaw detection is performed by mechanically scanning a two-dimensional ultrasonic flaw detection sensor will be described with reference to FIGS.
図１３に第３実施例の３次元超音波走査方法の概念図を示す。この実施例では１軸方向に電子走査し、もう１軸方向にはセンサを機械走査して回転させ、超音波を３次元走査するものである。 FIG. 13 shows a conceptual diagram of the three-dimensional ultrasonic scanning method of the third embodiment. In this embodiment, electronic scanning is performed in one axial direction, and the sensor is mechanically scanned and rotated in the other axial direction, and ultrasonic waves are three-dimensionally scanned.
図１４に第３実施例の超音波探傷システムのブロック図を示す。第１の実施例の超音波探傷システムのパソコンにセンサ移動機構４０へ電力を供給するためのＤ／Ａコンバータ３０を設け、センサ移動機構を駆動するものである。 FIG. 14 shows a block diagram of an ultrasonic flaw detection system according to the third embodiment. A D / A converter 30 for supplying electric power to the sensor moving mechanism 40 is provided in the personal computer of the ultrasonic flaw detection system of the first embodiment, and the sensor moving mechanism is driven.
図１５には２次元超音波探傷センサ３５の構成図を示す。図１６には２次元超音波探傷法を示す図で、その概要は背景技術に記載したとおりである。 FIG. 15 shows a configuration diagram of the two-dimensional ultrasonic flaw detection sensor 35. FIG. 16 is a diagram showing a two-dimensional ultrasonic flaw detection method, the outline of which is as described in the background art.
図１７にセンサ移動機構の構成例を示す。この移動機構はセンサを回転させる回転ステージ４５、２次元面上で２次元超音波探傷センサを検査対象に対して垂直及び水平方向へ平行移動させる２つの平行移動ステージ４４、平行移動量の誤差を低減するための移動ステージガイド４１、この移動機構を検査対象に固定するための吸盤４３より構成される。吸盤は、磁石、クランプ等で代替してもよい。回転ステージおよび移動ステージの駆動はアクチュエータやモータを利用する。平行移動においては、移動量の誤差を減らすためにガイドを設けているが、アクチュエータ等の位置決め精度が高い場合には、このガイドは設けなくともよい。 FIG. 17 shows a configuration example of the sensor moving mechanism. This moving mechanism includes a rotary stage 45 for rotating the sensor, two translation stages 44 for translating the two-dimensional ultrasonic flaw detection sensor vertically and horizontally with respect to the inspection object on the two-dimensional plane, and an error in the translation amount. A moving stage guide 41 for reduction and a suction cup 43 for fixing the moving mechanism to an inspection object are constituted. The suction cup may be replaced with a magnet, a clamp, or the like. Actuators and motors are used to drive the rotary stage and the moving stage. In parallel movement, a guide is provided in order to reduce an error in the amount of movement. However, this guide need not be provided if the positioning accuracy of the actuator or the like is high.
図１８に第３実施例の超音波探傷方法のフローチャートを示す。この超音波探傷方法は、検査対象形状をパソコンに入力するステップ３０１、２次元超音波探傷センサとセンサ移動機構を検査対象に設置するステップ３０２、超音波探傷を実施するステップ３０３、超音波送受信データからセンサ位置を評価するステップ３０４、ステップ３０４でセンサ位置が不適であった場合に移動機構を用いてセンサを適正位置に移動させるステップ３０５、超音波探傷結果を評価するステップ３０６よりなる。このうちステップ３０１は第１実施例のステップ１０１、ステップ３０２はステップ１０２、ステップ３０４はステップ１０４、ステップ３０６はステップ１０５と同様である。 FIG. 18 shows a flowchart of the ultrasonic flaw detection method of the third embodiment. This ultrasonic flaw detection method includes step 301 for inputting the inspection object shape to the personal computer, step 302 for installing the two-dimensional ultrasonic flaw detection sensor and sensor moving mechanism on the inspection object, step 303 for performing ultrasonic flaw detection, ultrasonic transmission / reception data Step 304 for evaluating the sensor position, Step 305 for moving the sensor to an appropriate position using a moving mechanism when the sensor position is inappropriate in Step 304, and Step 306 for evaluating the ultrasonic flaw detection result. Of these steps, step 301 is the same as step 101 of the first embodiment, step 302 is step 102, step 304 is step 104, and step 306 is the same as step 105.
第１実施例とは異なるステップ３０３とステップ３０５について超音波探傷システムのブロック図を用いて説明する。 Steps 303 and 305 that are different from the first embodiment will be described with reference to a block diagram of an ultrasonic flaw detection system.
ステップ３０３は、ステップ１０３と超音波走査方法が異なる。ステップ３０３では電子走査の他に、機械走査で超音波の送信方向を変更する。２次元電子走査完了後、ＣＰＵからＩ／Ｏポート、パソコンのＤ／Ａコンバータを介して回転ステージに電力を供給し、センサを回転させる。この超音波走査ステップ以外の超音波探傷はステップ１０３と同様である。 Step 303 differs from Step 103 in the ultrasonic scanning method. In step 303, in addition to electronic scanning, the transmission direction of ultrasonic waves is changed by mechanical scanning. After the two-dimensional electronic scanning is completed, power is supplied from the CPU to the rotary stage via the I / O port and the D / A converter of the personal computer to rotate the sensor. Ultrasonic flaw detection other than this ultrasonic scanning step is the same as step 103.
ステップ３０４でセンサ位置が不適と評価された場合、ステップ３０５で、ＣＰＵを用いてＩ／Ｏポート、Ｄ／Ａコンバータを介して平行移動ステージ及び回転ステージへ電力を供給し、超音波探傷に好適なセンサ位置へ移動させる。こうしてセンサを移動させた後、ステップ３０３を再実施し、ステップ３０６に進み超音波探傷結果を評価する。 If the sensor position is evaluated as inappropriate in step 304, in step 305, power is supplied to the translation stage and rotary stage via the I / O port and D / A converter using the CPU, which is suitable for ultrasonic flaw detection. Move to the correct sensor position. After moving the sensor in this way, step 303 is performed again, and the process proceeds to step 306 to evaluate the ultrasonic flaw detection result.
以上説明したように本実施例の超音波探傷システムは構成されているため、超音波探傷センサの設置位置が不適であった場合、第１実施例及び第２実施例よりもセンサ位置変更を迅速に行うことが可能なため、更に検査時間が短縮されるというメリットを持つ。 As described above, since the ultrasonic flaw detection system according to the present embodiment is configured, if the installation position of the ultrasonic flaw detection sensor is inappropriate, the sensor position can be changed more quickly than the first embodiment and the second embodiment. Therefore, the inspection time can be further shortened.
１、２、３：３次元超音波探傷センサ
４：検査対象
８：超音波探傷装置
９：パソコン
２１：ＣＰＵ
２２：ハードディスクドライブ（ＨＤＤ）
２３：ランダムアクセスメモリ（ＲＡＭ）
２４：リードオンリーメモリ（ＲＯＭ）
２５：Ｉ／Ｏポート
２６：キーボード
２７：記録メディア
２８：モニタ
２９：Ａ／Ｄコンバータ
３０：Ｄ／Ａコンバータ
３１：超音波素子
３２、３２Ｂ：電極
３３：パッキング
３４：保護ケース
３５：２次元超音波探傷センサ
３６：焦点
４０：センサ移動機構
４１：移動ステージガイド
４３：吸盤
４４：平行移動ステージ
４５：回転ステージ
Ｓ１０１：検査対象形状入力ステップ
Ｓ１０２：センサ設置ステップ
Ｓ１０３：超音波探傷ステップ
Ｓ１０４：センサ位置評価ステップ
Ｓ１０５：超音波探傷結果評価ステップ
Ｓ３０１：検査対象形状入力ステップ
Ｓ３０２：センサ及びセンサ移動機構設置ステップ
Ｓ３０３：超音波送受信ステップ
Ｓ３０４：センサ試験体相対位置評価ステップ
Ｓ３０５：センサ移動ステップ
Ｓ３０６：超音波探傷結果評価ステップ
1, 2, 3: Three-dimensional ultrasonic flaw detection sensor 4: Inspection object 8: Ultrasonic flaw detection device 9: Personal computer 21: CPU
22: Hard disk drive (HDD)
23: Random access memory (RAM)
24: Read-only memory (ROM)
25: I / O port 26: Keyboard 27: Recording medium 28: Monitor 29: A / D converter 30: D / A converter 31: Ultrasonic element 32, 32B: Electrode 33: Packing 34: Protective case 35: More than two dimensions Sonic flaw detection sensor 36: focus 40: sensor moving mechanism 41: moving stage guide 43: sucker 44: parallel moving stage 45: rotating stage S101: inspection object shape input step
S102: Sensor installation step S103: Ultrasonic flaw detection step S104: Sensor position evaluation step S105: Ultrasonic flaw detection result evaluation step S301: Inspection object shape input step
S302: Sensor and sensor moving mechanism installation step S303: Ultrasonic wave transmission / reception step S304: Sensor specimen relative position evaluation step S305: Sensor movement step S306: Ultrasonic flaw detection result evaluation step
Claims (8)
超音波センサ間の最短距離と送信方向を求めるステップと、
超音波センサ間の最短距離と送信方向からセンサ間の相対位置を求めるステップと、
検査対象で反射された超音波が受信される最短距離と送信方向を求めるステップと、
前記ステップで求めた最短距離と送信方向から検査対象上のセンサ位置を評価するステップを有することを特徴とする超音波探傷方法。 In a three-dimensional ultrasonic inspection method using two or more ultrasonic inspection sensors,
Determining the shortest distance and transmission direction between ultrasonic sensors;
Obtaining a relative position between the sensors from the shortest distance between the ultrasonic sensors and the transmission direction;
Determining the shortest distance and transmission direction in which the ultrasonic waves reflected by the inspection object are received;
An ultrasonic flaw detection method comprising a step of evaluating a sensor position on an inspection object from the shortest distance obtained in the step and a transmission direction.
超音波探傷結果から、
超音波センサ間の最短距離と送信方向を求めるステップと、
超音波センサ間の最短距離と送信方向からセンサ間の相対位置を求めるステップと、
検査対象で反射された超音波が受信される最短距離と送信方向を求めるステップと、
前記ステップで求めた最短距離と送信方向から検査対象上のセンサ位置を評価するステップを有することを特徴とする超音波探傷方法。 In a three-dimensional ultrasonic inspection method using two or more ultrasonic inspection sensors,
From the ultrasonic flaw detection results,
Determining the shortest distance and transmission direction between ultrasonic sensors;
Obtaining a relative position between the sensors from the shortest distance between the ultrasonic sensors and the transmission direction;
Determining the shortest distance and transmission direction in which the ultrasonic waves reflected by the inspection object are received;
An ultrasonic flaw detection method comprising a step of evaluating a sensor position on an inspection object from the shortest distance obtained in the step and a transmission direction.
超音波探傷センサ間の送信方向と、超音波探傷送信センサからの超音波送信方向の差として、検査対象に対する超音波探傷センサの設置角を求めるステップを有することを特徴とする超音波探傷方法。 The ultrasonic flaw detection method according to any one of claims 1 and 2,
An ultrasonic flaw detection method comprising a step of obtaining an installation angle of the ultrasonic flaw detection sensor with respect to an inspection object as a difference between a transmission direction between the ultrasonic flaw detection sensors and an ultrasonic transmission direction from the ultrasonic flaw detection transmission sensor.
電子的あるいは電子及び機械の組み合わせにより超音波を３次元走査することを特徴とする超音波探傷方法。 The ultrasonic flaw detection method according to any one of claims 1 to 3, wherein the ultrasonic wave is three-dimensionally scanned electronically or by a combination of an electronic device and a machine.
検査対象上の超音波探傷センサの測定結果に基づき、超音波の送受信効率が高くなる超音波入射角となる位置に前記超音波探傷センサを移動するステップを設けたことを特徴とする超音波探傷方法。 The ultrasonic flaw detection method according to any one of claims 1 to 4,
An ultrasonic flaw detection device comprising a step of moving the ultrasonic flaw detection sensor to a position where an ultrasonic incident angle at which ultrasonic wave transmission / reception efficiency is high is provided based on a measurement result of the ultrasonic flaw detection sensor on an inspection target. Method.
センサ移動ステップが、センサ移動機構により前記超音波探傷センサ位置を調整することを特徴とする超音波探傷方法。 The ultrasonic flaw detection method according to claim 5,
An ultrasonic flaw detection method, wherein the sensor moving step adjusts the position of the ultrasonic flaw detection sensor by a sensor moving mechanism.
超音波探傷センサ間の相対位置、検査対象上の前記超音波探傷センサ位置のうち1つ以上を画像表示することを特徴とする超音波探傷方法。 The ultrasonic flaw detection method according to any one of claims 1 to 4,
An ultrasonic flaw detection method characterized by displaying an image of at least one of a relative position between ultrasonic flaw detection sensors and the position of the ultrasonic flaw detection sensor on an inspection target.
前記超音波探傷センサの探傷結果から、超音波センサ間の最短距離と送信方向を求め、超音波センサ間の最短距離と送信方向からセンサ間の相対位置を求め、
前記超音波探傷センサの探傷結果から、検査対象で反射された超音波が受信される最短距離と送信方向を求め、
前記求めた最短距離と送信方向から検査対象上のセンサ位置を評価する計算装置と、
前記評価結果を表示する表示装置を有することを特徴とする超音波探傷装置。 In a three-dimensional ultrasonic inspection apparatus using two or more ultrasonic inspection sensors,
From the flaw detection result of the ultrasonic flaw detection sensor, obtain the shortest distance between the ultrasonic sensors and the transmission direction, obtain the relative position between the sensors from the shortest distance between the ultrasonic sensors and the transmission direction,
From the flaw detection result of the ultrasonic flaw detection sensor, obtain the shortest distance and transmission direction in which the ultrasonic wave reflected by the inspection object is received,
A calculation device for evaluating the sensor position on the inspection object from the determined shortest distance and transmission direction;
An ultrasonic flaw detector comprising a display device for displaying the evaluation result.
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| JP2020525780A (en) * | 2017-07-05 | 2020-08-27 | サウジ アラビアン オイル カンパニー | System and method for acoustic vessel volumetric calibration |
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