JP2014014206A - Transfer line fixing member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transfer line fixing member which fixes transfer lines so as to smoothly follow the movement of a movable part while suppressing dust generation and breakage of the transfer lines.SOLUTION: A transfer line fixing member (7) lays a plurality of transfer lines (85) between a first place and a second place, and maintains a laid state between the first place and the second place by moving the transfer lines while bending the transfer lines when the second place is relatively moved with respect to the first place. The transfer line fixing member (7) includes: side face blocks (71); holes (715, 716a, 716b) opened on both ends of each of the side face blocks; and a bending shaft (714) engaging with the holes of the adjacent side face blocks and connecting the side face blocks in a freely bendable manner. The plurality of side face blocks are connected in a long chain shape. The plurality of transfer lines arranged in parallel on the plurality of side face blocks connected in the long chain shape are fastened by a fastening member (72) passing through a hollow part of the bending shaft.

Description

  The present invention relates to a transmission line fixing member that fixes a transmission line such as a lead wire or a tube so as to follow the movement of a movable portion.

  A processing apparatus such as a cutting apparatus includes a holding unit (chuck table) for sucking and holding a workpiece and a processing unit for processing the workpiece as movable parts. A tube that transmits suction force to the suction surface, a lead wire that supplies power to a driving unit such as a motor, and the like are connected to the holding unit. A tube for supplying cutting water, a lead wire for supplying power to a driving unit such as a motor, and the like are connected to the processing means. Transmission lines such as tubes and lead wires connected to the movable part are drawn from the base of the processing apparatus.

  Movable parts such as holding means and processing means of the processing apparatus are moved relative to the base during processing of the workpiece. For this reason, the transmission line is drawn out from the base with a sufficient length so as to follow the movement of the movable part. The transmission line is accommodated, for example, in a state where the transmission line is collected in a transmission line fixing member so as not to hinder the movement of the movable portion. As such a transmission line fixing member, there is known a structure in which a plurality of frames are rotatably connected to form a long chain (see, for example, Patent Document 1).

  In the transmission line fixing member described in Patent Document 1, a plurality of frames are connected so as to be able to be bent in an arc shape. In a processing apparatus provided with this transmission line fixing member, for example, one end of the transmission line fixing member is fixed to a holding means as a movable part, and the other end of the transmission line fixing member is fixed to a base. And the one end part of a transmission wire fixing member is moved to one direction with respect to the other end part fixed to the base by the movement of a holding means. As a result, the position of the arc-shaped bent portion of the transmission line fixing member continuously changes, and the transmission line accommodated in the transmission line fixing member follows the movement of the holding means.

JP 2002-176274 A

  However, when the transmission line fixing member of Patent Document 1 is used, the transmission line follows the movement of the movable part, but the transmission lines are rubbed within the transmission line fixing member, and the transmission line and the transmission line fixing member Rubbing with the wall surface occurs. There is a possibility that dust is generated due to rubbing of the transmission line, and the transmission line is damaged.

  This invention is made in view of this point, and provides the transmission line fixing member which fixes a transmission line so that the movement of a movable part may be followed smoothly, suppressing the generation | occurrence | production and damage of a transmission line. With the goal.

  The transmission line fixing member according to the present invention spans a transmission line composed of a plurality of lead wires or tubes between a first location and a second location, and the second location is in relation to the first location. A transmission line fixing member that maintains a span between the first part and the second part by moving the transmission line while bending the transmission line when relatively moving, and a side block; Each side block includes two holes opened at both ends, and a bending shaft that engages with the hole of the adjacent side block and flexibly connects the side blocks, and the plurality of the side blocks includes a plurality of side blocks. The bending shaft is connected in a long chain shape, the bending shaft has a hollow portion, and a plurality of transmission lines arranged in parallel with the plurality of side blocks connected in a long chain shape are connected to the bending shaft. The fastening member passing through the hollow portion is connected to the bending axis. It is sintered, during flexion, that the bending shaft is rotated to follow the flexing of the transmission line, characterized by.

  According to this configuration, since the transmission line is fastened to the bending shaft by the fastening member, there is no need to provide an inner wall for supporting the transmission line on the transmission line fixing member, and the transmission line and the inner wall of the transmission line fixing portion Can be prevented. Therefore, friction of the transmission line can be suppressed, and dust from the transmission line and breakage of the transmission line can be prevented.

  ADVANTAGE OF THE INVENTION According to this invention, the transmission line fixing member which fixes a transmission line so that the movement of a movable part may be tracked smoothly is provided, suppressing the generation | occurrence | production and damage of a transmission line.

1 is a perspective view of a cutting device according to Embodiment 1. FIG. 3 is a perspective view of the periphery of a transmission line fixing member according to Embodiment 1. FIG. 3 is an enlarged perspective view showing a part of a transmission line fixing member according to Embodiment 1. FIG. FIG. 3 is an exploded perspective view showing a state in which a part of the transmission line fixing member according to Embodiment 1 is disassembled. 6 is a schematic diagram for explaining a bending operation of the transmission line fixing member according to Embodiment 1. FIG. It is a disassembled perspective view which shows the state which decomposed | disassembled some transmission wire fixing members which concern on a modification. 6 is an exploded perspective view showing a state in which a part of a transmission line fixing member according to Embodiment 2 is exploded. FIG.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. In the following, a configuration in which the transmission line fixing member is applied to a cutting device as a processing device will be described, but the present invention is not limited to this configuration. The transmission line fixing member according to the present invention is applicable to any processing apparatus in which the movable portion moves with the bending of the transmission line.

(Embodiment 1)
FIG. 1 is a perspective view of a cutting apparatus according to the present embodiment. In FIG. 1, the transmission line fixing member for the blade unit is omitted for convenience of explanation.

  As shown in FIG. 1, the cutting apparatus 1 is configured to cut a workpiece W by relatively moving a pair of blade units 4 having a cutting blade 41 and a chuck table 3 holding the workpiece W. Has been. The workpiece W is formed in a substantially disk shape, and is partitioned into a plurality of regions by scheduled division lines arranged on the surface in a lattice shape. A device is formed in the partitioned area. The workpiece W is carried into the cutting device 1 while being supported by the annular frame F via the adhesive tape T.

In the present embodiment, a semiconductor wafer made of silicon, gallium arsenide, or the like will be described as an example of the workpiece W. However, the present invention is not limited to this configuration. Ceramics, glass, inorganic material substrates such as sapphire (Al ₂ O ₃ ), semiconductor product packages, adhesive members such as DAF (Die Attach Film) provided on the back side of semiconductor wafers, various electrical components and micron-order processing position accuracy Various members that are required may be processed.

  The cutting apparatus 1 has a base 11, and a chuck table moving mechanism 5 that processes and feeds the chuck table 3 in the X-axis direction is provided on the base 11. Further, a gate-shaped column portion 12 is provided on the base 11 so as to straddle the chuck table moving mechanism 5, and a pair of blade units 4 are provided on the column portion 12 above the chuck table 3. A blade unit moving mechanism 6 for indexing and feeding in the Y-axis direction is provided.

  The chuck table moving mechanism 5 includes a pair of guide rails 52 disposed on the upper surface of the base 11 and parallel to the X-axis direction, and a motor-driven X-axis table 51 slidably installed on the pair of guide rails 52. Have. On the top of the X-axis table 51, the chuck table 3 is provided. A nut portion (not shown) is formed on the back side of the X-axis table 51, and a ball screw 53 is screwed to the nut portion. A drive motor 54 is connected to one end of the ball screw 53. The ball screw 53 is rotationally driven by the drive motor 54, and the X-axis table 51 is moved along the guide rail 52 in the X-axis direction.

  The chuck table 3 includes a θ table 31 that is fixed to the upper surface of the X-axis table 51 and that can rotate about the Z-axis, and a holding unit 32 that is provided on the θ table 31 and holds the workpiece W by suction. doing. The holding portion 32 has a disk shape having a predetermined thickness, and an adsorption surface made of a porous ceramic material is formed at the center of the upper surface. Around the holding portion 32, four clamp portions 33 are provided via a pair of support arms extending radially outward from the four directions of the θ table 31. The four clamp portions 33 are driven by an air actuator and sandwich and fix an annular frame F that supports the workpiece W.

  The chuck table 3 is connected to a tube that transmits a suction force to the suction surface, a lead wire that supplies power to a driving device such as the θ table 31, and the like. Various transmission lines 85 such as tubes and lead wires are drawn from the upper surface of the base 11 with a sufficient length, and are bent (curved) in an arc shape in the middle. The transmission line 85 drawn from the base 11 is fixed to a long-chain transmission line fixing member 7 for preventing the transmission line 85 from being twisted or disconnected. The details of the transmission line fixing member 7 will be described later.

  The blade unit moving mechanism 6 includes a pair of guide rails 63 parallel to the Y-axis direction on the front surface of the column portion 12 and a pair of motor-driven Y-axis tables 61 slidably installed on the pair of guide rails 63. doing. The blade unit moving mechanism 6 includes a pair of guide rails 64 arranged in front of each Y-axis table 61 and parallel to the Z-axis direction, and a motor-driven Z-axis table slidably installed on each guide rail 64. 62. Each Z-axis table 62 is provided with a blade unit 4.

  In addition, nut portions (not shown) are formed on the back side of each Y-axis table 61 and each Z-axis table 62, and ball screws 65 and 66 are screwed into these nut portions. Drive motors 67 and 68 are connected to one end of a ball screw 65 for the Y-axis table 61 and a ball screw 66 for the Z-axis table 62, respectively. The ball screws are rotated by these drive motors 67 and 68, and the blade unit 4 is moved along the guide rails 63 and 64 in the Y-axis direction and the Z-axis direction.

  The blade unit 4 includes a disc-shaped cutting blade 41 provided at the tip of a spindle that rotates about the Y axis, and an injection nozzle (not shown) that injects cutting water onto the cutting portion. The blade unit 4 rotates the cutting blade 41 at a high speed by a spindle, and cuts the workpiece W while spraying cutting water from a plurality of nozzles onto a cutting portion.

  The blade unit 4 is connected to a tube that supplies cutting water to the spray nozzle, a lead wire that supplies power to the spindle driving device, and the like. Various transmission lines (not shown) such as a tube and a lead wire are drawn out from the front surface of the column part 12 with a margin, and are bent (curved) in an arc shape in the middle. The transmission line drawn out from the column portion 12 is fixed to a long-chain transmission line fixing member (not shown) for preventing the transmission line from being twisted or disconnected. The transmission line fixing member has the same configuration as the transmission line fixing member 7 for fixing the transmission line 85.

  In the cutting apparatus 1, the cutting blade 41 is aligned with the planned division line of the workpiece W by the movement of the Y-axis table 61. Next, the cutting depth with respect to the workpiece W of the cutting blade 41 rotated by the movement of the Z-axis table 62 is adjusted. Then, by moving the X-axis table 51 relative to the cutting blade 41, the workpiece W held on the chuck table 3 is cut along the planned division line.

  The transmission line fixing member 7 will be described with reference to FIGS. FIG. 2 is a perspective view of the periphery of the transmission line fixing member 7 according to the present embodiment. FIG. 3 is an enlarged perspective view showing a part of the transmission line fixing member 7 according to the present embodiment. FIG. 4 is an exploded perspective view showing a state in which a part of the transmission line fixing member 7 according to the present embodiment is disassembled.

  As shown in FIGS. 2 and 3, the transmission line fixing member 7 includes two sets in which a plurality of side blocks 71 are connected in a long chain shape so that a plurality of transmission lines 85 bent in an arc shape can be fixed. Unit 7a, 7b. The plurality of transmission lines 85 extend so as to span the first portion on the lower surface of the X-axis table 51 and the second portion on the upper surface of the base 11. The plurality of transmission lines 85 are aligned to extend in the X-axis direction by being fixed to the units 7a and 7b arranged along the guide rails 52 extending in the X-axis direction via the fastening members 72. ing. In addition, the transmission line 85 should just follow the movable part of the cutting device 1, and is not limited to a tube or a lead wire. Specifically, for example, a communication cable such as an optical fiber may be used.

  The two sets of units 7 a and 7 b of the transmission line fixing member 7 are configured to be bent along an arc shape along the plurality of transmission lines 85. One end portions of the units 7 a and 7 b are connected to the lower surface of the X-axis table 51, and the other end portions of the units 7 a and 7 b are connected to the upper surface of the base 11. One end of each of the units 7a and 7b is moved relative to the other end fixed to the base 11 as the X-axis table 51 moves in the X-axis direction. The units 7a and 7b can follow the movement of the X-axis table 51 by continuously changing the position of the arc-shaped bent portion in the X-axis direction by the relative movement of the one end with respect to the other end.

  As shown in FIG. 4, the side block 71 constituting the units 7 a and 7 b has a main body 711 having a substantially rectangular parallelepiped shape. On one end side in the longitudinal direction of the main body portion 711, a plate-like connecting portion 712 extending outward from the central portion in the width direction is provided. Further, a pair of connecting portions 713 a and 713 b corresponding to the connecting portion 712 is provided on the other end side in the longitudinal direction of the main body portion 711. The connecting portions 713a and 713b extend outward from both end portions in the width direction of the main body portion 711, and both have a plate shape.

  The connecting portion 712 includes a cylindrical bending shaft 714 that protrudes in a direction perpendicular to the main surface 712a. The bending shaft 714 has a hollow portion that penetrates the connecting portion 712. A hole 715 is formed by the hollow portion of the bending shaft 714. The connecting portions 713 a and 713 b have holes 716 a and 716 b that can be engaged with the bending shaft 714. The side block 71 is connected by engaging the bending shaft 714 of the side block 71 with the holes 716a and 716b of another adjacent side block 71.

  The side block 71 is made of, for example, a resin material and can be easily deformed. For this reason, if it deform | transforms so that the space | interval of the connection part 713a and the connection part 713b may be expanded, and the connection part 712 of another side block 71 is inserted, the bending axis | shaft 714 and hole 716a, 716b will be engaged. Can do. In this way, the bending shaft 714 and the holes 716a and 716b are engaged with each other to connect any number of the side blocks 71, whereby two sets of units 7a that connect the plurality of side blocks 71 in a long chain shape. , 7b (see FIG. 2 or FIG. 3).

  The outer diameter of the bending shaft 714 is slightly smaller than the inner diameters of the holes 716a and 716b. For this reason, the side blocks 71 connected in a long chain shape are each rotated around the bending shaft 714 of the adjacent side block 71. Thereby, the long-chain units 7a and 7b can be bent with the bending shaft 714 of each side block 71 as a fulcrum.

  A fastening member 72 (see FIG. 2 or 3) for fixing the plurality of transmission lines 85 is passed through the hollow portion (hole 715) of the bending shaft 714. As shown in FIG. 3, the fastening member 72 includes a band-shaped band portion 721 and a head portion 722 on one end side of the band portion 721. A hole 723 through which the band portion 721 passes is formed in the head portion 722, and a claw portion (not shown) for fixing the band portion 721 is provided inside the hole 723. The size of the head portion 722 is larger than the diameter of the hole 715 (see FIG. 4).

  The plurality of transmission lines 85 are fixed to the transmission line fixing member 7 configured as described above. For example, as shown in FIG. 3, the plurality of transmission lines 85 are fixed by passing two fastening members 72 in opposite directions with respect to the hollow portion (hole 715) of the same side block 71. Specifically, first, the units 7a and 7b are arranged in parallel so as to sandwich the plurality of transmission lines 85 therebetween, and two fastenings are made in the hollow portions of the pair of side blocks 71 facing each other in the units 7a and 7b. The band part 721 of the member 72 is passed. At this time, the head portion 722 of one fastening member 72 is positioned outside the unit 7a (the side opposite to the unit 7b), and the head portion 722 of the other fastening member 72 is outside the unit 7b (the side opposite to the unit 7a). ). Further, the upper and lower sides of the plurality of transmission lines 85 are sandwiched between the two fastening members 72.

  Then, the band portion 721 of the other fastening member 72 is passed through the hole 723 of the head portion 722 of the one fastening member 72, and the band portion 721 of the one fastening member 72 is inserted into the hole 723 of the head portion 722 of the other fastening member 72. Pass through. Thus, the two fastening members 72 are connected in a state where the upper and lower sides of the plurality of transmission lines 85 are sandwiched, and are fixed to the side block 71. In other words, the plurality of transmission lines 85 are fastened to the units 7 a and 7 b via the two fastening members 72. Since the size of the head portion 722 is larger than the diameter of the hole 715, the two fastening members 72 are not dropped from the units 7a and 7b.

  The fastening by the fastening member 72 as described above is performed for a set of a plurality of side blocks 72 facing each other in the units 7a and 7b. In this Embodiment, the fastening member 72 is fastened every other group with respect to the group of the several side block 72 which comprises unit 7a, 7b, and the some transmission wire 85 is fixed. However, this invention is not limited to this, The fastening member 72 can be fastened to the arbitrary side block 71, and the some transmission line 85 can be fixed. For example, the fastening members 72 may be fastened to all the side block 71 sets. In this case, the plurality of transmission lines 85 can be firmly fixed.

  After the fastening member 72 is fastened to the side block 72, the fastener 724 is attached to the band portion 721 of the fastening member 72, and the plurality of transmission lines 85 are collected in an arbitrary number of units. Thereby, since the plurality of transmission lines 85 are not scattered, the friction of the plurality of transmission lines 85 can be further suppressed. However, the fastener 724 may not be used.

  Next, the bending operation of the transmission line fixing member 7 will be described with reference to FIG. FIG. 5 is a schematic diagram for explaining the bending operation of the transmission line fixing member 7 according to the present embodiment.

  As shown in FIG. 5A, the transmission line fixing member 7 according to the present embodiment includes units 7a and 7b in which a plurality of side surface blocks 71 are connected in a long chain shape. The plurality of transmission lines 85 are fixed in parallel to the units 7a and 7b by a fastening member 72 that passes through the hollow portion of the bending shaft 714 (see FIG. 4). That is, the plurality of transmission lines 85 are extended along the long chain units 7a and 7b. The units 7a and 7b are bent in accordance with the bending of the transmission line 85.

  As shown in FIG. 5B, when the X-axis table 51 is moved in the direction indicated by the arrow D1, the bent portions of the units 7a and 7b and the plurality of transmission lines 85 are also moved in the direction indicated by the arrow D1. As described above, since the plurality of transmission lines 85 are fastened to the units 7 a and 7 b via the fastening member 72, the plurality of transmission lines 85 and the units 7 a and 7 b follow the movement of the X-axis table 51. Are moved together. In the bent portion, the bending shaft 714 (see FIG. 4) of the side block 71 is rotated so as to follow the bending of the transmission line 85.

  As described above, in the transmission line fixing member 7 according to the present embodiment, the transmission line 85 is fastened to the bending shaft 714 by the fastening member 72, so that the transmission line 85 is supported by the transmission line fixing member 7. It is not necessary to provide an inner wall, and rubbing between the transmission line 85 and the inner wall of the transmission line fixing portion 7 can be prevented. Therefore, rubbing of the transmission line 85 can be suppressed, and dust from the transmission line 85 and damage to the transmission line 85 can be prevented.

  Next, a transmission line fixing member according to a modification of the present embodiment will be described with reference to FIG. FIG. 6 is an exploded perspective view showing a state in which a part of the transmission line fixing member according to the modification is disassembled. The transmission line fixing member according to the modification is common to the transmission line fixing member 7 described above in many respects. For this reason, the detailed description about a common point is abbreviate | omitted.

  As shown in FIG. 6, the transmission line fixing member according to the modification is different from the above-described transmission line fixing member 7 in that a cylindrical rotating shaft 717 is inserted into the hollow portion (hole 715) of the bending shaft 714. doing. In this transmission line fixing member, the fastening member 72 is fixed by being passed through the hollow portion 718 of the rotating shaft 717. Although the shape of the hollow part 718 is arbitrary, it is more preferable if it is formed according to the shape of the band part 721 so that the fastening member 72 can be fixed. The outer diameter of the rotating shaft 717 is slightly smaller than the inner diameter of the hollow portion (hole 715) of the bending shaft 714, and the rotating shaft 717 can rotate according to the bending of the transmission line 85.

  As described above, in the transmission line fixing member according to the modification, the rotating shaft 717 through which the fastening member 72 is passed can be rotated according to the bending of the transmission line 85, so that the friction between the transmission line 85 and the fastening member 72 is also suppressed. it can. Therefore, the friction of the transmission line can be further suppressed, and dust from the transmission line and breakage of the transmission line can be prevented.

(Embodiment 2)
In the present embodiment, a transmission line fixing member having a configuration different from that of the first embodiment will be described. FIG. 7 is an exploded perspective view showing a state in which a part of the transmission line fixing member according to the present embodiment is disassembled. The transmission line fixing member according to the present embodiment is common to the transmission line fixing member 7 according to the first embodiment in many respects. For this reason, the detailed description about a common point is abbreviate | omitted.

  As shown in FIG. 7, the configuration of the side block 73 used in the transmission line fixing member according to the present embodiment is similar to the configuration of the side block 71 used in the transmission line fixing member 7 according to the first embodiment. Yes. The side block 73 differs from the side block 71 in that it does not have an integral bending shaft 714. That is, the connecting portion 712 of the side block 73 is not provided with the bending shaft 714, and only the hole 715 is formed.

  Side block 73 according to the present embodiment is connected by a separate bending shaft 731. Specifically, the connecting portion 712 of another side block 71 is positioned between the connecting portion 713a and the connecting portion 713b, and the cylindrical bending shaft 731 is engaged with each of the holes 715, 716a, and 716b. The fastening member 72 is fixed through the hollow portion 732 of the bending shaft 731. Although the shape of the hollow part 732 is arbitrary, it is more preferable if it is formed according to the shape of the band part 721 so that the fastening member 72 can be fixed. The outer diameter of the bending shaft 731 is slightly smaller than the inner diameters of the holes 715, 716 a, and 716 b, and the bending shaft 731 can rotate according to the bending of the transmission line 85.

  As described above, in the transmission line fixing member 7 according to the present embodiment, the transmission line 85 is fastened to the bending shaft 731 by the fastening member 72, so that the inner wall for supporting the transmission line 85 on the transmission line fixing member 7. Therefore, it is possible to prevent rubbing between the transmission line 85 and the inner wall of the transmission line fixing portion 7. Further, since the bending shaft 731 through which the fastening member 72 passes is rotated according to the bending of the transmission line 85, the friction between the transmission line 85 and the fastening member 72 can also be suppressed. Therefore, the friction of the transmission line can be further suppressed, and dust from the transmission line and breakage of the transmission line can be prevented. The structures, methods, and the like described in this embodiment can be combined as appropriate with any of the structures, methods, and the like described in the other embodiments.

  In addition, this invention is not limited to description of the said embodiment, It can implement by changing variously. For example, in the said embodiment, although the structure using what is called a binding band is illustrated as a fastening member, a fastening member is not restricted to this. For example, a string-like fastening member may be used. Note that it is preferable to use a fastening member having a certain degree of rigidity in order to appropriately fix the plurality of transmission lines while keeping the interval between the long chain units constant.

  Moreover, in the said embodiment, although the transmission line fixing member using two sets of long chain units is illustrated, the number of the long chain units used for a transmission line fixing member is not specifically limited. The number of long-chain units may be increased or decreased so that a plurality of fixed transmission lines can be appropriately supported. For example, in a configuration with a small number of transmission lines, the transmission line fixing member can be configured with a single unit. On the other hand, in a configuration with a large number of transmission lines, the transmission line fixing member may be configured using three or more sets of units. Further, the plurality of transmission lines may be fixed to one side of one set of units or may be fixed to both sides.

  In addition, the configurations, methods, and the like according to the above-described embodiments can be changed as appropriate without departing from the scope of the object of the present invention.

  The transmission line fixing member of the present invention is useful when fixing transmission lines such as lead wires and tubes so as to follow the movement of the movable portion.

DESCRIPTION OF SYMBOLS 1 Cutting device 7 Transmission line fixing member 7a, 7b Unit 11 Base 51 X-axis table 71,73 Side block 72 Fastening member 85 Transmission line 711 Main body part 712,713a, 713b Connection part 712a Main surface 714,731 Bending shaft 715, 716a, 716b, 723 hole 717 rotating shaft 718, 732 hollow part 721 band part 722 head part 724 fastener

Claims (1)

When a transmission line composed of a plurality of lead wires or tubes is spanned between the first location and the second location, and the second location moves relative to the first location, A transmission line fixing member that maintains a span between the first part and the second part by moving the transmission line while bending it,
A plurality of the side surfaces, each of which includes a side block, two holes opened at both ends of each side block, and a bending shaft that engages with the hole of the adjacent side block and flexibly connects the side blocks. The blocks are connected in a long chain by a plurality of the bending axes,
The bending axis has a hollow portion;
A plurality of transmission lines arranged in parallel with the plurality of side blocks connected in a long chain shape are fastened to the bending shaft by a fastening member that passes through the hollow portion of the bending shaft,
A transmission line fixing member, wherein the bending axis rotates following the bending of the transmission line during bending.

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