JP2014012255A - Apparatus, system and method for generating and supplying bubble mixed liquid, and program thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a bubble mixed liquid supplying system, etc., having high versatility, and configured to set optionally and variably a mixing amount of bubbles to be mixed in the liquid such as a cleaning water or the lubrication oil.SOLUTION: An apparatus for generating and supplying a bubble mixed liquid includes: liquid transfer piping 11 for transferring liquid in a reservoir tank 10 to a liquid using machine 1A; a bubble mixing mechanism 12 for mixing bubbles in the liquid taken in; and a liquid transfer pump 15 with pressure for feeding the liquid to the liquid using machine 1A. The liquid transfer piping 11 has: first and second piping sections 11A, 11B each connected with the reservoir tank 10, and disposed in parallel mutually and connected together with the reservoir tank 10; a convergence piping section 11G for converging the downstream side of each of the piping section; and a downstream side piping section 11C the upstream end of which is connected with the convergence piping section 11G, and the downstream end of which is connected with the liquid using machine 1A. Then, the bubble mixing mechanism 12 is provided in the first piping section 11A, and a convergent liquid regulation means 14 for variably setting a flow rate of liquid flowing through the second piping section 11B is provided in the second piping section 11B.

Description

  The present invention relates to a bubble mixed liquid generation and supply device, a bubble mixed liquid supply system and the like for mixing fine bubbles in a liquid and transferring them to a use location, and in particular, for surface cleaning liquids for precision instruments and processing machines. The present invention relates to a bubble-containing liquid generation and supply device, a bubble-containing liquid supply system, a bubble-containing liquid supply method, and a program therefor, which generate a bubble-containing liquid suitable as a cutting fluid or lubricating oil for various devices and supply it to used devices.

Conventionally known methods for mixing bubbles in a liquid such as a cleaning liquid or lubricating oil are as follows.
(1). A suction method using an ejector (aspirator) using the negative pressure on the suction side of the pump.
(2). A method of stirring liquid and gas in the three-dimensional space of the same container.
(3). A method of passing liquid and gas through a fine gap like a sponge.
(Four). A method of generating bubbles by lowering the pressure from a state of being pressurized and dissolved.
(Five). A method of refining bubbles with ultrasonic waves.

All of the conventionally known methods correspond to the problem of how to mix a gas in a liquid finely and in large quantities. For example, it is necessary to quantitatively control the mixing rate. There is no disclosure of specific technology.
Here, the bubble mixing rate K is defined by the following equation.
Bubble mixing rate K (%) = [(W−W ′) / W] × 100
here,
W: Pure liquid weight (100 cc)
W ′: Weight of liquid mixed with gas (100 cc)
And

On the other hand, the following Patent Documents 1 and 2 are known as prior arts related to the above-described bubble mixed liquid.
Among these, Patent Document 1 discloses a technique in which a plurality of ejectors (aspirators), which are open / close valves, are provided in parallel, and the bubble mixing rate is set by adjusting the number of open / close.

  Further, in Patent Document 2, a liquid in which bubbles are mixed and a liquid in which bubbles are not mixed are placed in one liquid tank, and the respective amounts are set in advance, whereby the total bubble mixing rate is determined. Techniques for adjustment are disclosed.

As a specific conventional method for mixing bubbles in a liquid, an ejector-type bubble mixing device shown in FIG. 6 is also known. In the ejector shown in FIG. 6, the liquid is introduced from the liquid inlet 102, and the shape 103 of the flow path is narrowed at the center of the figure as shown in FIG. A diaphragm 101 is provided.
As a result, the flow rate of the narrowed portion of the flow path shape 103 is increased, so that the pressure is lowered at the corresponding portion. For this reason, the gas is sucked from the gas throttle portion 101 located on the upper side of the figure and mixed as bubbles. It is like that.

JP2011-011154 JP2009-291681

When bubbles are mixed into the liquid, it is only necessary to mix a large amount of bubbles, and there is a case where an accurate adjustment of the mixing rate may be required.
For example, there is a certain range of contamination ratios for the optimum value of the bubble contamination rate when introducing water for bubble contamination, which is effective for cleaning substrates equipped with electronic components, and oxygen for biological growth. If it is too much or too little, the effect may be impaired.

However, in the bubble mixing method using the ejector shown in FIG. 6, the flow rate and pressure of the flow channel shape 103 of the liquid constriction part for adjusting the mixing rate, and further the adjustment of the flow channel shape 103, etc. It greatly affects the amount of suction.
For this reason, although the mixing rate is stable under the fixed conditions, there is an essential problem that adjustment when changing the mixing rate is very difficult.

  On the other hand, in Patent Document 1, as described above, an on-off valve and an ejector equivalent to the ejector shown in FIG. 6 are paired in series, and a plurality of them are arranged in parallel to control the opening and closing of each valve. Thus, the mixing rate is controlled. However, this method has a disadvantage that the configuration is large and the control is complicated.

  Moreover, the thing of patent document 2 adjusted the quantity of the bubble mixing liquid, and the quantity of the liquid in which the bubble was not mixed beforehand, respectively, and poured it in the tank, and adjusted the bubble mixing rate as a whole. Therefore, there is always the inconvenience of requiring both a mixing tank and a stirring mechanism.

  Furthermore, in recent years, studies have been made to improve the lubrication effect by mixing fine bubbles in the lubricating oil (Japanese Patent Laid-Open No. 2011-007524). In this case, since the setting of the bubble mixing rate with a good lubricating effect is often different depending on the lubricating oil, a test apparatus for specifying the optimum bubble mixing rate (for example, the bubble mixing rate is changed from 0% to 20%). There is also a social demand that requires a variable setting of up to%.

  However, none of the related technologies described above and Patent Documents 1 and 2 disclose any technology that can respond to the above social demands.

(Object of invention)
The present invention improves the inconvenience of the related art, and a highly versatile bubble mixed liquid generation and supply device capable of arbitrarily variably setting the amount of bubbles mixed in a liquid such as washing water or lubricating oil, It is an object of the present invention to provide a bubble mixed liquid supply system, a bubble mixed liquid generation method, and a program thereof.

In order to achieve the above object, a bubble mixed liquid generation and supply device according to the present invention includes a storage tank for storing a liquid, a liquid transfer pipe for transferring the liquid in the storage tank to a liquid use machine, and the liquid transfer pipe. In a bubble mixed liquid production and supply device comprising a bubble mixing mechanism for mixing bubbles into the liquid taken in from the storage tank and a liquid pump for sending the liquid from the storage tank to the liquid use machine,
The liquid transfer pipe includes a first pipe portion having an upstream end connected to the storage tank, a second pipe portion installed in parallel to the first pipe section and having an upstream end connected to the storage tank, A merging pipe section formed by merging each downstream side of the first piping section and the second piping section, and a downstream piping section whose upstream end is connected to the merging piping section and whose downstream end is connected to the liquid use machine. Have
The bubble mixing mechanism is provided in the first piping section, and a merging liquid adjusting means for variably setting the flow rate of the liquid flowing through the second piping section is provided in the second piping section. It is characterized by.

  In order to achieve the above object, a bubble-containing liquid supply system according to the present invention includes a storage tank that stores liquid, a liquid transfer pipe that guides the transfer of the liquid in the storage tank to a liquid use machine, A bubble mixing mechanism that is provided in the liquid transfer pipe and mixes bubbles into the liquid taken from the storage tank, and a liquid pressure feed that urges the liquid taken into the liquid transfer pipe to transfer the liquid to the liquid use machine. With a pump.

Furthermore, in this bubble-containing liquid supply system, the liquid transfer pipe is installed in parallel with the first piping section whose upstream end is connected to the storage tank and the first piping section, and the upstream end is connected to the storage tank. A second pipe connected to each other; a merged pipe formed by joining the downstream sides of the first pipe and the second pipe; and an upstream end connected to the merged pipe and the downstream end connected to the liquid A downstream piping section connected to the machine used,
The first piping unit is equipped with the bubble mixing mechanism having a bubble mixing amount adjusting valve, and the flow rate of the liquid flowing through the second piping unit is variably set in the second piping unit. Equipped with a liquid adjustment valve for merging,
The downstream pipe section located on the upstream side of the liquid use machine is equipped with a use liquid amount adjusting valve for adjusting the use amount of the bubble mixed liquid used in the liquid use machine,
A main body control unit is provided for individually setting and controlling the open / close amounts of the bubble mixing amount adjusting valve, the merging liquid adjusting valve, and the used liquid amount adjusting valve based on an external command.

In order to achieve the above-mentioned object, a method for supplying air bubbles mixed liquid according to the present invention includes a liquid transfer pipe for guiding the liquid in a storage tank to be transferred to a liquid use machine, and the storage tank of the liquid transfer pipe. Required for the bubble mixing mechanism that is included in the first piping section that constitutes the connecting side of the gas and that mixes bubbles into the liquid taken in from the storage tank, and the bubble mixed liquid in which bubbles are mixed by the bubble mixing mechanism In the bubble mixed liquid supply system provided with a liquid pump for energizing the transfer force,
In the first piping part, a second piping part that joins at the joining piping part at the downstream end thereof and takes in the liquid in the storage tank is installed in parallel.
Based on an operation command from the outside, the bubble mixing mechanism is set to an operating state, and a bubble mixing amount adjusting valve that is equipped in advance is adjusted to mix a predetermined amount of bubbles into the liquid moving in the first piping section. A bubble entrained liquid generation step (first step);
The amount of movement of the liquid in the storage tank that moves in the second piping section at the same time as or after the operation of the bubble mixing mechanism is set by a confluence liquid adjustment valve that is preliminarily installed in the second piping section. A confluence liquid adjusting step to be controlled (second step);
A use liquid amount adjusting valve preliminarily installed in the downstream pipe portion that forms the downstream side of the liquid transfer pipe is used for the bubble mixed liquid having a predetermined bubble mixture ratio formed by joining in the merge pipe section. And a use liquid amount adjustment step (third step) to be adjusted,
The opening degree adjustment of each valve in each of these steps and the setting control thereof are sequentially performed by a main body control unit provided in advance in each valve based on an external command.

In order to achieve the above object, a control program for a liquid supply system according to the present invention includes a liquid transfer pipe for guiding a liquid in a storage tank to be transferred to a liquid use machine, and the storage tank of the liquid transfer pipe. Necessary for the bubble mixing mechanism that is installed in the first piping part that constitutes the connection side with the bubble and mixes bubbles into the liquid taken in from the storage tank, and the bubble mixed liquid in which bubbles are mixed by the bubble mixing mechanism An air bubble mixed liquid supply system including a liquid pump for energizing various transfer forces,
In the first piping part, a second piping part that joins at the joining piping part at the downstream end thereof and takes in the liquid in the storage tank is installed in parallel.
Based on an operation command from the outside, the bubble mixing mechanism is operated and a bubble mixing amount adjustment valve preliminarily provided in the bubble mixing mechanism is driven and controlled, so that a predetermined amount of the liquid moving in the first pipe section is supplied. Bubble mixing liquid generation control function to mix bubbles and generate bubble mixing liquid,
The second piping unit is preliminarily equipped with a transfer amount of the liquid that is operated simultaneously with or before and after the operation of the bubble mixing mechanism and is transferred toward the merging piping unit in the second piping unit. A liquid adjustment control function for confluence, which adjusts to an appropriate amount set in advance by driving and controlling the liquid adjustment valve for confluence,
In addition, the use amount of the bubble mixed liquid having a predetermined bubble mixture rate generated by being merged in the merge pipe unit is driven and controlled using a use liquid amount adjusting valve that is preliminarily installed in the downstream pipe unit of the liquid transfer pipe. Use liquid volume setting control function to set and control to the required amount
The operation control function of each valve is realized by a computer provided in a main body control unit installed in advance for the entire valve.

  Since the present invention is configured as described above, according to this, when a bubble mixed liquid in which a certain amount of bubbles are mixed by the bubble mixing mechanism is transferred, a homogeneous liquid in which bubbles are not mixed or the amount of mixed bubbles is small. Since the appropriate amount of the bubble mixture rate adjusting liquid is combined and transferred, the highly versatile bubble mixture generation and supply device and the bubble mixture solution can arbitrarily and smoothly variably set the bubble rate of the bubble mixture liquid. A supply system, a bubble mixed liquid supply method, and a program thereof can be provided (claims 1 to 12).

  In the present invention, a use liquid amount adjustment valve for controlling the flow rate of the liquid sent to the liquid use machine is provided in the downstream pipe section, and an upstream end is located on the upstream side of the use liquid amount adjustment valve. For example, when the amount of liquid used is restricted by the use liquid amount adjusting valve, the excess liquid circulation pipe connected to the side pipe portion and the downstream end thereof to the storage liquid tank is provided. Is smoothly returned to the storage tank through the excess liquid circulation pipe. It is possible to effectively avoid the adverse effect of the surge phenomenon that occurs even when the operating fluid amount adjusting valve is operated rapidly. That is, the surplus of the bubble mixed liquid is automatically returned to the storage tank only by adjusting the use liquid amount adjusting valve according to the use amount of the liquid. Thereby, the effective use of the liquid and the smooth operation of the apparatus are ensured (claim 2).

  In addition, according to the present invention, since the liquid pressure pump is installed on the downstream side of the merging point of the first and second piping parts, on the merging point side of the first piping part, that is, on the downstream side of the bubble mixing mechanism. A certain bubble mixing portion can be easily and reliably set to a negative pressure state, and for this reason, bubbles can be effectively and efficiently mixed into the liquid in the bubble mixing mechanism portion. 3).

  Furthermore, in the present invention, since the liquid transfer pipe portion on the downstream side of the liquid pressure pump is equipped with the bubble mixing rate measuring means for measuring the mixing rate of bubbles in the liquid, the position close to the liquid using machine is thereby obtained. Since the bubble mixing rate is measured at the operator, the operator can confirm the desired bubble mixing rate to be used in the liquid using machine in real time. It is convenient in terms of obtaining (Claim 4).

  In the present invention, the bubble mixing mechanism is equipped with a bubble mixing amount adjusting valve for adjusting the amount of bubbles mixed in the liquid, and the merging liquid amount adjusting means is constituted by a merging liquid adjusting valve. In this way, for example, the bubble mixing amount adjustment valve set before the operation can be adjusted to preset the bubble mixing rate in the liquid after the operation starts. The opening degree of the valve can be variably set, and the amount of mixing liquid (bubble mixing rate adjustment liquid) can be set freely, thereby changing the bubble mixing amount adjustment valve for the bubble mixing mechanism Without control, the bubble mixing rate in the liquid can be variably set within a certain range (claim 5).

  Furthermore, in the present invention, a passage throttle valve that functions to promote the refinement of bubbles in the bubble mixed liquid is provided in the pipe portion downstream of the liquid pump and the upstream of the bubble mixing rate measuring means. Because it is equipped, the valve operation of the passage throttle valve facilitates the miniaturization of the bubbles in the bubble mixture liquid, thereby suppressing the escape of bubbles in the liquid to the outside, and a constant bubble mixture rate even during use. Thus, for example, the expected cleaning effect can be continuously maintained (claim 6).

  Furthermore, in the present invention, the storage tank is provided with a liquid temperature setting device that controls the temperature of the internal liquid to a preset temperature, and this liquid temperature setting device is disposed in the liquid in the storage tank. A heater, a liquid temperature sensor for measuring the temperature of the liquid heated by the heater, and an energization control of the heater for setting a preset appropriate temperature that operates based on temperature information from the liquid temperature sensor. Therefore, the liquid temperature in the storage tank is always maintained at a constant temperature even when there is a change in the temperature of the surrounding environment. (Such as ability) can always maintain a constant state (claim 7).

  In the present invention, the bubble mixing amount adjustment valve and the merging liquid amount adjustment valve are structured such that the drive amount of each valve can be electrically changed, and the valve opening degree of each adjustment valve is set. Since the valve opening setting control unit that is individually set by an external command is provided, first, the opening of the bubble mixing amount adjustment valve is adjusted before the entire apparatus is operated so that the bubble mixing amount becomes, for example, the maximum. Next, while the actual device is in operation, the opening of the merging liquid amount adjusting valve is freely adjusted to flow the liquid transfer pipes after the merging point of each of the first and second pipe parts. It is possible to freely and smoothly variably set the bubble mixture rate of the bubble mixture liquid within a range not exceeding the preset maximum value (claim 8).

  Further, in the present invention, the passage restriction amount of the passage restriction valve described above is configured to be electrically changeable, and the restriction amount of the passage restriction valve is adjusted based on information obtained by the bubble mixing rate measuring means. Since the adjustment control unit is provided, a predetermined command is input from the outside to the miniaturization adjustment control unit to freely variably set the passage throttle amount of the passage throttle valve, and thereby the bubble mixed liquid flowing in the liquid transfer pipe The air bubbles are refined, the air bubbles are confined in the liquid, and the liquid with the required air bubble mixing rate can be reliably supplied to the liquid use machine (claim 9).

It is a block diagram which shows 1st Embodiment of the bubble mixing liquid supply system concerning this invention. It is explanatory drawing which shows the side by side relationship of the 1st, 2nd piping part which comprises a part of 1st Embodiment disclosed in FIG. 3 is a flowchart illustrating an operation example of the first embodiment disclosed in FIG. 1. It is sectional drawing which shows an example of the bubble mixing mechanism (ejector) which comprises a part of 1st Embodiment disclosed in FIG. The experimental data in 2nd Embodiment is shown, Comprising: It is a case where the liquid in 1st Embodiment is made into lubricating oil, Comprising: The bubble mixing rate computed from the weight of the bubble mixed lubricating oil, and the lubricating oil with an in-line density meter It is explanatory drawing which shows the correlation with the oil density at the time of measuring, FIG. 5 (A) shows the case where the temperature (oil temperature) of lubricating oil is 40 degreeC, FIG.5 (B) shows the temperature (( It is a diagram which shows the case where oil temperature is 60 degreeC. It is sectional drawing which shows the prior art example of an ejector type bubble mixing device.

[First Embodiment]
A first embodiment of the present invention will be described below with reference to FIGS.
(Overall configuration)
As shown in FIG. 1, a bubble mixed liquid supply system 1 according to the present invention includes a bubble mixed liquid generation and supply device 2 that forms a central portion of the bubble mixed liquid generation and supply device 2 and the entire operation of the bubble mixed liquid generation and supply device 2. And a main body control unit 3 for individually controlling.

  Among these, the bubble mixed liquid generation supply device 2 is an apparatus for supplying a liquid (cleaning liquid in the first embodiment) necessary for the liquid use machine 1A to the liquid use machine 1A installed at the right end of FIG. Thus, the storage tank 10 for storing the required amount of liquid as the cleaning liquid in advance, the liquid transfer pipe 11 for transferring the liquid in the storage tank 10 to the liquid use machine 1A, and the liquid transfer pipe 11 are provided. A bubble mixing mechanism 12 for mixing bubbles in the liquid taken in from the storage tank 10 and a bubble mixing amount adjusting valve 12C, and a liquid pressure pump 15 for sending the liquid from the storage tank 10 to the liquid use machine 1A are provided. .

  Here, the liquid transfer pipe 11 includes a first pipe portion 11A having an upstream end connected to the storage tank 10 and a second pipe connected in parallel to the first pipe section and having an upstream end connected to the storage tank 10 described above. The piping portion 11B, the merging piping portion 11G formed by merging the downstream sides of the first piping portion 11A and the second piping portion 11B, the upstream end is connected to the merging piping portion 11G, and the downstream end is the above-mentioned And a downstream piping section 11C connected to the liquid use machine 1A.

  The bubble mixing mechanism 12 described above is provided in the first piping part 11A, and a merging liquid adjustment valve 14 serving as a merging liquid adjusting means for variably setting the flow rate of the liquid flowing through the second piping part 11B, It is provided in the second piping part 11B.

  Here, the storage tank 10 is provided with a liquid temperature setting device 20 that constantly maintains the temperature of the liquid in the storage tank 10 (hereinafter referred to as “liquid temperature”). In the first embodiment, the liquid in the storage tank 10 is a cleaning liquid intended for cleaning the substrate and the like in the liquid use machine 1A. Thus, for example, lubricating oil may be used as a target liquid mixed with bubbles instead of the cleaning liquid.

  The bubble mixed liquid generation and supply device 2 is further equipped with the first piping unit 11A in parallel, and bubbles are generated in the liquid continuously taken out from the storage tank 10 by the first piping unit 11A. Corresponding to the bubble mixing mechanism 12 and the bubble mixing amount adjusting valve 12C to be mixed, the merging liquid adjusting means 14 for freely adjusting the flow rate of the liquid continuously taken out from the storage tank 10 to the second pipe 11B. Equipped with.

  The merging liquid adjusting means 14 adjusts the flow rate of the liquid taken out from the storage tank 10 with respect to the bubble mixed liquid sent out from the bubble mixing mechanism 12 described above, and merges the appropriate amount thereof, thereby mixing bubbles in the liquid. In the first embodiment, the merging liquid adjustment valve is used as described above.

  Further, the above-described joining pipe part 11G indicates a pipe joining point where the liquid taken out by the first and second pipe parts 11A and 11B is joined. In the first embodiment, in the merging pipe section 11G, the downstream ends of the pipes of the first and second pipe sections 11A and 11B described above and the upstream side of the downstream pipe section 11C of the liquid transfer pipe 11 described above. The ends are integrally connected (see FIG. 2).

  In this way, in the merging pipe portion 11G in the pipe during transfer of the bubble mixed liquid in which a predetermined amount of bubbles is mixed, the liquid having the same quality of bubbles as the bubble mixed liquid is small (or is free of bubbles). Is adjusted to adjust the valve opening of the merging liquid adjustment valve (merging liquid adjusting means) 14 of the second piping part 11B. Even when the bubble mixing amount adjustment valve 12C on the bubble mixing mechanism 12 side is not variably controlled, the bubble mixing rate of the bubble mixing liquid generated in the piping part 11A can be variably set smoothly and arbitrarily.

  Here, for the bubble mixing amount adjustment valve 12C, for example, the bubble mixing ratio in the liquid after the operation may be set in advance by adjusting before the operation is started. At the same time, after the operation is started, the opening degree of the merging liquid adjustment valve 14 can be variably set to freely set the amount of the merging liquid mixing amount (bubble mixing rate adjusting liquid). As described above, the bubble mixing rate in the transfer liquid can be variably set within a predetermined range without variably controlling the bubble mixing amount adjusting valve 12C applied to the bubble mixing mechanism 12.

  Further, on the liquid transfer pipe 11 described above, on the downstream pipe section 11C from the merging pipe section 11G in FIG. 1 to the downstream liquid use machine 1A, as shown in the drawing, the storage tank 10 is sequentially arranged from the upstream side. A liquid pump 15 for energizing a necessary transfer force (fluid force) to the liquid taken out from the first and second piping parts 11A and 11B and mixed with bubbles, and the aforementioned bubble mixture A passage restriction valve 16 suitable for promoting the refinement of bubbles in the liquid, a bubble mixture ratio measuring means 17 for measuring the bubble mixture ratio of the bubble mixture after passing through the passage throttle valve 16, and a liquid use machine 1A A use liquid amount adjusting valve 18 that adjusts the amount of bubble mixed liquid that is actually used and a flow rate sensor 19 that measures the flow rate of the bubble mixed liquid sent out from the use liquid amount adjusting valve 18 are equipped in series. Yes.

  In this case, since the liquid pumping pump 15 is provided on the downstream side of the merging pipe portion 11G, the bubble mixing portion on the merging piping portion 11G side of the first piping portion 11A, that is, the downstream side of the bubble mixing mechanism 12 is easily provided. In addition, it is possible to reliably set the negative pressure state, and therefore it is possible to efficiently mix bubbles into the liquid in the bubble mixing mechanism 12 only by adjusting the bubble mixing amount adjusting valve 12C. It becomes.

  Further, as described above, the bubble mixing rate measuring means 17 for measuring the mixing rate of bubbles in the liquid is provided in the downstream pipe portion 11C portion on the downstream side of the liquid pump 15 so that the position is close to the liquid use machine 1A. Since the bubble mixing rate is measured by the operator, the operator can confirm the desired bubble mixing rate used in the liquid use machine 1A in real time, and if the bubble mixing rate deviates from the target value, This is convenient in that the operator can respond quickly.

  Further, a passage throttle valve 16 that functions to promote the refinement of bubbles in the bubble-containing liquid is provided in the downstream pipe portion 11C portion on the downstream side of the liquid pump 15 and on the upstream side of the bubble mixture rate measuring means 17. Since it is equipped, the fine operation of the bubbles in the bubble mixed liquid is promoted by the valve operation of the passage restricting valve 16, thereby preventing the bubbles in the liquid from escaping to the outside. Since the mixing rate is maintained, for example, it is convenient in that the expected cleaning effect can be continuously maintained.

  In addition, as described above, the bubble mixed liquid generation and supply device 2 is arranged on the downstream side of the bubble mixed ratio measuring means 17 and the flow rate of the bubble mixed liquid sent out from the use liquid amount adjusting valve 18 and the used liquid amount adjusting valve 18. Since the flow rate sensor 19 for measuring the flow rate is provided, the operator can always grasp the flow rate of the bubble mixed liquid fed into the liquid use machine 1A and can freely increase or decrease the setting.

By configuring in this way, an appropriate amount of the bubble mixed liquid in which the bubble mixing rate is controlled can be smoothly and freely applied to the liquid using machine 1A without using complicated and sophisticated equipment. There is an advantage that it can be set.
Here, the bubble mixing rate measuring means 17 may be constituted by a liquid density meter 17A as described later.

  In addition, in the downstream side piping portion 11C located between the bubble mixing rate measuring means 17 and the used liquid amount adjusting valve 18, an excess of the bubble mixed liquid whose use amount is limited by the used liquid amount adjusting valve 18 is provided. Is provided with a surplus liquid circulation pipe (surplus liquid circulation path) 11E for returning the fluid toward the storage tank 10 described above.

  That is, the upstream end is connected to the above-described downstream side piping portion 11C on the upstream side of the use liquid amount adjusting valve that controls the flow rate of the liquid (bubble mixed liquid) sent to the liquid use machine 1A, and the downstream end is A surplus liquid circulation pipe (surplus liquid circulation path) 11E connected to the above-described reservoir tank 10 was provided. For this reason, for example, when the usage amount of the liquid is restricted by the usage liquid amount adjusting valve, the excess amount is smoothly returned to the storage tank 10 via the excess liquid circulation pipe 11E. In this case, it is possible to effectively avoid the adverse effect of the surge phenomenon that occurs even when the operating fluid amount adjusting valve 18 is operated rapidly. That is, the surplus amount of the bubble mixed liquid is automatically returned to the storage tank 10 only by adjusting the used liquid amount adjusting valve 18 according to the amount of the bubble mixed liquid used. Thereby, the effective use of the liquid and the smooth operation of the apparatus are ensured.

  As a result, the used liquid amount adjusting valve 18 allows the liquid amount of the bubble mixed liquid supplied to the liquid using machine 1A to be freely controlled without giving load fluctuations to the respective constituent parts while allowing the proper operation of the respective parts described above. A highly versatile and durable bubble mixed liquid production and supply device 2 that can be adjusted and variably set can be obtained.

  Further, in the first embodiment, in addition to the bubble mixed liquid generation and supply device 2, in order to obtain the bubble mixed liquid having the bubble mixed ratio intended by the operator, the valves 12C, 14, 16, 18 described above are obtained. A main body control unit 3 is provided which variably controls each of the operations and the operation of the liquid pump 15 according to a program set in advance. As described above, the main body control unit 3 and the above-described bubble mixed liquid generation / supply device 2 constitute the bubble mixed liquid supply system 1.

  Next, each configuration of the bubble mixed liquid generation supply device 2 will be described more specifically.

(Bubble mixed liquid generation unit and bubble mixing rate adjustment unit)
As described above, the bubble mixing mechanism 12 that generates the bubble mixed liquid is provided in the first piping portion 11A (see FIGS. 1 and 2).
The first piping portion 11A includes a liquid collecting side piping portion 11Aa and a bubble mixing liquid sending side piping portion 11Ab connected via a bubble mixing mechanism 12. The leading end of the liquid collection side piping section 11Aa is disposed in the liquid in the storage tank 10 described above, and the downstream side of the bubble mixed liquid delivery piping section 11Ab is the liquid transfer piping in the above-described confluence piping section 11G. 11 is connected to the downstream piping portion 11C.

  Further, the bubble mixing mechanism 12 is equipped with the bubble mixing amount adjusting valve 12C for mixing a predetermined amount of bubbles into the liquid taken out from the storage tank 10 via the liquid collecting side piping section 11Aa as described above. ing. The bubble mixing amount adjustment valve 12C has a function of setting the bubble mixing rate in the bubble mixing mechanism 12 by adjusting the opening of the valve.

As a result, the valve opening and the bubble mixing set by the bubble mixing amount adjustment valve 12C are entrained in the liquid energized by the liquid pumping pump 15 described above and taken from the storage tank 10 via the liquid collection side piping section 11Aa. A predetermined amount of bubbles specified by the relationship with the negative pressure in the mechanism 12 is mixed efficiently and continuously in the bubble mixing mechanism 12 portion.
That is, the bubble mixed liquid in which a predetermined amount of bubbles is mixed by the bubble mixing mechanism 12 is continuously sent out from the first piping portion 11A toward the merging piping portion 11G.

  Here, the bubble mixing mechanism 12 uses an ejector as shown in FIG. 4 in the first embodiment. Although this ejector will be described in detail later, an ejector equivalent to the ejector shown in FIG. 6 is used.

On the other hand, the merging liquid adjustment valve 14 for adjusting an appropriate amount of the merging liquid for adjusting the bubble mixing rate is provided in the second piping portion 11B as described above.
Here, as shown in FIG. 2, the second piping portion 11B is constituted by a liquid collecting side piping portion 11Ba and a merging liquid delivery side piping portion 11Bb connected via a merging liquid adjusting valve 14. ing. And the front-end | tip part of the liquid collection side piping part 11Ba is arrange | positioned in the liquid in the storage tank 10 mentioned above (similar to the case of the 1st piping part 11A mentioned above), and the liquid delivery piping part 11Bb for confluence | merging The downstream side of the pipe joins the first pipe part 11A described above at the joint pipe part 11G and is connected to the downstream pipe part 11C of the liquid transfer pipe 11.

  Among these, the merging liquid adjusting means 14 continuously increases the bubble mixing rate of the entire merging liquid on the premise that the bubble mixing liquid fed from the bubble mixing mechanism 12 is merged by the merging pipe portion 11G. In order to adjust the accuracy, as described above, the merging liquid adjustment valve is used in the first embodiment.

That is, the merging liquid adjustment valve (merging liquid adjusting means) 14 does not include bubbles that merge with the aforementioned bubble mixed liquid in the merging pipe portion 11G as described above by adjusting the opening of the valve. It has a function of adjusting and setting an appropriate amount of liquid (or a small amount of bubbles).
As a result, it is possible to freely set the bubble mixing rate of the bubble mixed solution fed into the liquid use machine 1A described above via the liquid transfer pipe 11 in small increments (or at an arbitrary ratio) according to the application. Become.

(Reservoir 10)
The storage tank 10 stores a necessary amount of liquid as a cleaning liquid in advance. And about this liquid, with the operation of the whole system, the shortage is always replenished from the outside.
Reference numeral 10A indicates a liquid supply valve, and reference numeral 10B indicates a waste liquid valve. In addition, the first and second pipe portions 11A and 11B described above are disposed on the opposite side of the storage tank 10 by being partitioned by the fine dust removal net 1C from the liquid supply valve 10A described above.

In addition, the storage tank 10 is equipped with a temperature setting device 20 that maintains the internal liquid at a constant temperature (for example, 20 [° C.], 40 [° C.], or 60 [° C.]) at all times.
Here, reference numeral 20A denotes a waterproof heater, reference numeral 20B denotes a temperature sensor, and reference numeral 20C denotes a temperature regulator. Reference numeral 20E denotes a temperature control unit. The temperature control unit 20E operates in response to a command from the main control unit 35 of the main body control unit 3 described later, controls the energization current of the waterproof heater via the temperature adjuster 20C, and controls the liquid temperature in the storage tank 1. It has a function to control the setting to a constant value.

The storage tank 10 is further provided with an end portion on the liquid return side of the above-described excess liquid circulation pipe 11E. As described above, the surplus liquid circulation pipe 11E is a liquid return pipe for returning the surplus air bubble mixed liquid to the storage tank 10 when surplus air bubble mixed liquid is generated on the downstream side of the liquid transfer pipe 11. Function as.
For this reason, the liquid stored in the storage tank 10 actually includes both the case where the bubbles are not mixed and the case where the bubbles are slightly mixed depending on the use situation. ing.

  Here, the end portion (discharge port) on the liquid return side of the above-described excess liquid circulation pipe 11E installed in the storage tank 10 is the liquid intake of the above-described second pipe section 11B in the first embodiment. It is disposed at a position sufficiently away from the installation position of the liquid suction port portion of the side piping portion 11Ba. More preferably, it is good in the position away from 11 A of 1st piping parts.

  Thereby, in the 2nd piping part 11B, the liquid with a low bubble mixing rate will be taken in (taken in), and it functions effectively for adjustment of a bubble mixing rate.

(Bubble mixing mechanism 12)
In the first embodiment, the above-described ejector shown in FIG. 4 is used as the bubble mixing mechanism 12 equipped in the first piping section 11A.
In FIG. 4, an ejector (bubble mixing mechanism) 12 is configured such that the liquid in the storage tank 10 flows from the liquid inlet 102 via the liquid suction pipe portion 11Aa, and the shape of the flow path is illustrated. As shown in FIG.

  Specifically, the bubble mixing mechanism 12 includes a shaft core body 12B that sets the intake width 103A of the narrowing portion 103 of the flow path, and holds the shaft core body 12B via the screw portion 12a at the left end in FIG. And an ejector main body 12A. The narrowing width 103 has a structure that allows outside gas to be sucked from the upper part of FIG. And the bubble mixing amount adjustment valve 12C for adjusting the amount of sucked gas is provided as described above.

  In this way, the flow rate of the liquid rises at the narrowing portion 103 due to the pump suction force of the liquid pumping pump 15 located on the downstream side, and at the same time, the pressure at that point decreases (occurrence of a negative pressure state). Gas is sucked in through the intake width 103A from the gas restrictor 101 located at the position and continuously mixed.

  In this case, the bubble mixing rate by the ejector may be adjusted roughly. Then, as described above, the liquid contained in the storage tank 10 is joined by the joining pipe part 11G via the second pipe part 11B with respect to the bubble mixed liquid generated thereby, so that the ejector alone is unstable. The bubble mixing rate can be variably set by adjusting the bubble mixing amount adjusting valve 12C on the bubble mixing mechanism 12 side by adjusting the merging liquid adjusting valve (merging liquid adjusting means) 14 provided in the second piping part 11B. It can be arbitrarily and smoothly set without control.

(Measurement of bubble mixing rate)
Further, as described above, the bubble mixing rate measuring means 17 for measuring the mixing ratio of bubbles in the liquid is provided in the downstream piping portion 11C portion of the liquid transfer piping 11 located on the downstream side of the liquid pump 15 described above. Equipped. Thereby, it is possible to continuously capture and inform the outside of the bubble mixing rate of the bubble mixing solution sent to the use region of the bubble mixing solution. In this case, the bubble mixing rate measuring means 17 may use, for example, a liquid density meter shown in the second embodiment.

(Passage restricting valve 16 / promoting bubble miniaturization)
Further, a passage restrictor for promoting the refinement of bubbles in the bubble mixed liquid in the downstream pipe portion 11C portion on the downstream side of the liquid pump 15 and upstream of the bubble mixing rate measuring means 17. A valve 16 is provided.
That is, if a throttle valve (passage throttle valve 16) is provided after the liquid confluence pump 15 after the liquid merge, the pressure suddenly decreases when it passes through the throttle valve and collides with a normal pressure liquid. Refine.
Thereby, the bubble particle | grains of the bubble mixed liquid sent to 1 A of liquid use machines are refined | miniaturized further, and a bubble mixed liquid suitable as a cleaning liquid can be obtained.

(Drive control unit for each valve)
Here, the drive control part of each valve which controls each operation | movement of each valve | bulb 12C, 14B, 16, 18 mentioned above individually is demonstrated.
First, as the bubble mixing amount adjustment valve 12C and the combined liquid amount adjustment valve 14B described above, those that can electrically change the valve opening are used, and correspondingly, an opening set by an external command is used. A valve opening setting control unit 31 for individually setting and controlling the valve opening of each valve 12C, 14B based on the degree information is provided.

Also, the passage throttle valve 16 and the used fluid amount adjusting valve 18 described above are both equipped with valves whose valve opening can be electrically changed, and opening information set by an external command given at the start of operation. The fine adjustment control unit 32 and the liquid amount adjustment control unit 33 that operate based on the above and individually set the valve openings of the corresponding valves 16 and 18 are individually provided.
In the first embodiment, the operation control units 31, 32, and 33 of the valves and the liquid pump 15 described above are configured to operate based on an external setting command or setting operation by the operator. The valves may be configured to be driven and controlled based on commands from a main control unit 35 described later.

(Main body control unit 3)
As described above, the main body control unit 3 receives the predetermined operation commands from the valve opening setting control unit 31, the fine adjustment control unit 32, the liquid amount adjustment control unit 33, and the operation control units. The main control unit 35 is configured to transmit.
In this case, it may be configured such that each operation control unit individually controls the operation of each valve 12C, 14B, 16, and 18 based on an external command from the operator in accordance with a command from the main control unit 35.
Further, in the first embodiment, the liquid pressure feed pump 15 is configured so that its output operation is set and controlled based on a command from the main control unit 35, but from the operation panel (not shown). You may comprise so that it may operate | move based on the direct command by an operator.

The main control unit 35 is preliminarily provided with a command input unit 35A, a storage unit 36, and a display unit 37. Control operation commands for the control units 31, 32, and 33 described above are input from the input unit 35A. In response to an external command or based on a program or operation reference information stored in advance in the storage unit 36. The same applies to the liquid pump 15. And about each said operation command by the main control part 35, it is displayed on the said display part 37 in order of passage of time.
Here, the main control unit 35 may be configured to be equipped in advance with a computer that executes the control command and other control operations.

  Here, reference numeral 40 denotes a sample collecting valve. The sample collecting valve 40 is used for sampling the bubble mixed liquid immediately before being supplied to the liquid use machine 1A through the used liquid amount adjusting valve 18 and for strictly measuring the bubble mixed ratio. Reference numeral 41 denotes a sampler.

(Overall operation)
Next, the operation of the first embodiment will be described based on the flowchart of FIG.
First, the basic operation of the bubble mixed liquid generation and supply device 2 that is the main part of the first embodiment will be described, and then the overall operation of the bubble mixed liquid supply system will be described.

  First, when the entire system is set to the operating state, the temperature setting device 20 of the storage tank 10 is operated, the liquid in the storage tank 1 is set and controlled to 20 ° C., for example, and the liquid pumping pump 15 is simultaneously operated. (FIG. 2: Steps S101 and S102). Thereby, first, the liquid in the storage tank 1 is taken out separately for mixing bubbles in the first and second piping parts 11A and 11B, respectively. Subsequently, a state in which the liquid is transferred to the liquid use machine 1 </ b> A through the downstream pipe portion 11 </ b> C of the liquid transfer pipe 11 is set.

  Next, based on an operation command from the outside (main control unit 35), the bubble mixing mechanism 12 and the bubble mixing amount adjustment valve 12C equipped in advance operate, and the bubble mixing mechanism 12 is provided at the first piping portion 11A. Mixes a predetermined amount of bubbles, and sends the liquid as bubble-mixed liquid to the merging pipe section 11G (FIG. 2: step S103 / first step).

  At the same time, as described above, a predetermined amount of the liquid in the storage tank 1 is continuously taken out from the second piping portion 11B portion, and the appropriate amount of the liquid is adjusted by the merging liquid adjusting valve (merging liquid adjusting means) 14. It is set by opening degree adjustment, and is similarly sent out toward the joint pipe portion 11G.

In this merging pipe section 11G, the bubble mixed liquid generated in the first pipe section 11A and the appropriate amount of the same homogeneous liquid for adjusting the bubble mixing ratio set in the second pipe section 11B are merged. Thus, the bubble mixed liquid adjusted to a predetermined bubble mixing rate is sent out to the downstream pipe portion 11C of the liquid transfer pipe 11 (FIG. 2: Step S104 / second step).
The series of movements of the liquid is performed by the suction operation of the liquid pressure feed pump 15 provided in the downstream pipe portion 11C of the liquid transfer pipe 11.

  Next, the passage throttle valve 16 provided on the downstream side of the liquid pressure pump 15 is operated, and the bubbles in the bubble mixed liquid transferred through the downstream pipe portion 11C are throttled by the passage throttle valve 16, It is refined appropriately (FIG. 2: Step S105 / bubble refinement process).

Subsequently, the bubble mixed liquid in which the fine bubbles are mixed is transferred to the liquid use machine 1A through the use liquid amount adjusting valve 18 and the flow rate sensor 19 provided on the downstream side in the downstream pipe portion 11C. (FIG. 2: Steps S106 to S109 / third step).
At the same time, the use amount adjustment valve 18 limits the amount of liquid used in the liquid use machine 1A. However, the excess amount does not cause an excessive load fluctuation to the liquid pumping pump 15 described above, and the excess liquid amount is not increased. It is automatically sent back to the storage tank 1 through the circulation pipe 11E.

  In this case, the opening adjustment and setting of each valve in each of these steps are executed by an operation command that the main body control unit 3 provided in advance in each valve transmits based on an external command. It may be configured to be executed manually.

This will be described in detail below.
As described above, when the entire system is set to the operating state, first, the temperature setting device 20 provided in the storage tank 10 is operated, and the temperature of the liquid in the storage tank 10 is set to 20 [° C.], for example. Control.
Subsequently, the main control unit 35 of the main body control unit 3 is activated (FIG. 2: steps S101 and S102), the liquid pumping pump 15 is set to an operating state, and corresponds to each of the valves 12C, 14B, 16, and 18. Operation commands having preset contents are sequentially transmitted to the operation control units 31, 32, and 33.

  In this case, the valve opening setting control unit 31 operates based on a command from the main control unit 35 for the bubble mixing valve 12C on the first piping unit 11A side, and the bubble mixing mechanism 12 is used for liquid transfer. The valve opening degree is adjusted so as to obtain the maximum bubble mixing rate allowed in the liquid flowing in the pipe 11 (FIG. 2: step S103).

  At the same time, the valve opening setting control unit 31 takes out the liquid taken out from the storage tank 1 for the merging liquid with respect to the merging liquid regulating valve (merging liquid regulating means) 14 on the second piping part 11B side. Is adjusted to a predetermined flow rate commanded by the main control unit 35, the valve opening of the combined liquid amount adjusting valve 14B is adjusted (FIG. 2: step S104).

  Next, the miniaturization adjustment control unit 32 is instructed by the main control unit 35 about the valve opening degree of the passage throttle valve 16 and the bubble mixing rate detected by the bubble mixing rate measuring means 17 after the operation of the entire apparatus is started. Then, the setting is controlled again so as to be a certain value (FIG. 2: step S105).

In this case, the main control unit 35 determines whether or not the bubble mixing rate measured by the bubble mixing rate measuring unit 17 is within the allowable range of the set value X [%] (FIG. 2: step S106).
The allowable range of the set value X [%] is previously input from the operator via the input unit 35A and stored in the storage unit 36 in advance. Specifically, the allowable range of X [%] is, for example, a maximum value of 5 [%] ± 1 [%], 10 [%] ± 2 [%], 15 [%] ± 3 [%], Alternatively, it is set in advance or switched as 20 [%] ± 4 [%].

  If the determination result is yes (FIG. 2: step S106 / yes), as described above, the bubble-containing liquid in which the fine bubbles are mixed is contained in the downstream side pipe portion 11C of the liquid transfer pipe 11. Is sent to the liquid use machine 1A through the use liquid amount adjusting valve 18 and the flow rate sensor 19 installed on the downstream side (FIG. 2: steps S106 to S109) / third step).

On the other hand, if the determination result is no (No) in Step S106 (FIG. 2: Step S106 / No), the process immediately proceeds to the readjustment step of the bubble mixture rate.
First, the output of the liquid pump 15 is adjusted by the main control unit 35 (FIG. 2: step S110). In this step S110, when the bubble mixing rate is determined as described above and the bubble mixing rate is larger than the allowable value of the set value X [%], the output of the liquid pressure pump 15 is adjusted to decrease by 10 [%], for example. In the opposite case, the output of the liquid pump 15 is adjusted to increase by 10%, for example. These output adjustments are executed by the main control unit 35 described above.

Next, after the output adjustment in step S110, it is determined whether or not the liquid pump 15 is operating normally (FIG. 2: step S111).
If it is operating normally, the flow returns to the adjustment of the merging fluid adjustment valve 14 described above (FIG. 2: step S104), and the allowable range of the set value X [%] of the bubble mixing rate is variably adjusted. In order to do this, the opening adjustment of the merging liquid adjustment valve 14 is executed.

  On the other hand, when the liquid pump 15 is not operating normally, the operation of the liquid pump 15 is stopped, and the entire bubble-containing liquid supply system 1 is set to a stopped state on the premise of re-operation after repair. The

  Here, the control processing related to the operations of the valves 12C, 14B, 16, 18 and the liquid pump 15 in the first to fourth steps and the operation steps corresponding thereto is programmed and described above. You may make it make the computer with which the main-control part 35 is provided perform.

  In this case, the program may be recorded on a recording medium (for example, DVD, CD, flash memory, etc.). The program is read from the recording medium by the computer and executed.

  As described above, in the first embodiment, as described above, two flow paths (first and second pipe portions 11A and 11B) are arranged in parallel as flow paths for taking out the liquid in the storage tank 10. Furthermore, the first piping section 11A is equipped with a bubble mixing mechanism 12 and a bubble mixing amount adjusting valve 12C, and the second piping 11B is equipped with a merging liquid adjusting valve 14.

  In addition, as described above, in the first piping portion 11A that is one of the flow paths, a liquid in which bubbles are mixed is generated by the bubble mixing mechanism 12, but the bubble mixing rate is not finely adjusted. Here, a rough adjustment is performed on the bubble mixing rate. On the other hand, in the second piping section 11B which is the other flow path, an appropriate amount of liquid in the storage tank 10 set by adjusting the opening degree of the confluence liquid adjustment valve 14 is used as it is for adjusting the bubble mixing rate. Is done.

And the bubble mixing liquid produced | generated by the 1st piping part 11A side which is this one flow path does not have the bubble mixing set by the 1st piping part 11A side in the confluence | merging piping part 11G (or few). The liquid is merged.
That is, in the first embodiment, the bubble mixing rate of the bubble mixing liquid generated in one channel is set to a predetermined value by adjusting an appropriate amount of the merging solution by the merging solution adjusting valve 14 installed in the other channel. Adjustment to a value is a configuration that can be executed continuously and easily.

  In this respect, according to the first embodiment, there is an advantage that the bubble mixing rate can be arbitrarily and easily adjusted with inexpensive equipment.

Further, as described above, the passage throttle valve 16 is provided after the liquid pumping pump 15 of the liquid transfer pipe 11 through which the combined bubble mixed liquid flows. And if this passage throttle valve 16 passes, a pressure will fall rapidly and a bubble will further refine.
In this way, a liquid in which fine bubbles are mixed is generated, and the required amount of the liquid is adjusted by the use liquid amount adjusting valve 18 on the downstream side.

  That is, since the first embodiment is configured and functions as described above, according to this, no bubbles are mixed or bubbles are mixed during the transfer of the bubble mixed liquid in which a certain amount of bubbles are mixed. Since a small amount of homogeneous liquid is mixed and transferred as an admixture, it is transported, so it is possible to generate and supply a highly versatile bubbling mixture that can variably set the amount of bubbles in the liquid arbitrarily and smoothly. An apparatus, a bubble mixed liquid supply system, a bubble mixed liquid supply method, and a program thereof can be obtained.

  Further, in the first embodiment described above, the bubble mixing mechanism 12 and the merging liquid adjustment valve 14 installed in parallel thereto are separated from the storage tank 10 using the liquid pumping force of the liquid pump 15. Since the liquid is sucked out by the flow path, each can operate freely without being affected by other operations, and in this respect, each of the bubble mixing mechanism 12 and the combined liquid adjusting valve 14 can be operated. Has an advantage that the bubble mixing rate of the combined liquid can be freely and smoothly variably set within a preset range in a stable state by quickly and efficiently executing a preset function.

Here, in the said 1st Embodiment, although the case where the one storage tank 10 was provided was illustrated, the exclusive storage tanks 10 and 10 corresponding to 1st, 2nd piping part 11A, 11B mentioned above were made independent. In addition, the liquid return pipe part of the above-described surplus liquid circulation pipe 11E may be installed on the dedicated storage tank 10 side corresponding to the first pipe part 11A.
In this way, it is possible to set the appropriate amount of the zero-bubble confluence liquid sent from the second piping part 11B (amount suitable for a preset bubble mixing rate) with high accuracy at any time. Even when a command to change the bubble mixing rate is input, there is an advantage that an appropriate amount of confluence liquid specified in advance can be promptly sent to the confluence pipe portion 11G.

In the first embodiment, the front end portions (end portions on the storage tank 10 side) of the first and second pipe sections 11A and 11B described above are separately provided so as to suck the liquid in the storage tank 10 separately. The first and second pipe parts 11A and 11B are provided with a common suction port at the upstream end, and the first pipe part 11A and the first pipe part are provided downstream of the suction port. You may comprise so that it may isolate | separate into 2 piping parts 11B.
Even if it does in this way, in addition to the effect similar to the case of 1st Embodiment mentioned above, there exists an advantage that the piping installation operation | work with respect to the storage tank 10 becomes easy.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.
The second embodiment is characterized in that the liquid is a lubricant (hereinafter referred to as “oil”), whereas the liquid is a cleaning liquid in the first embodiment.
On the other hand, in this 2nd Embodiment, about each structural member to be used, the thing of 1st Embodiment mentioned above is used as it is.

In this case, the second embodiment is characterized in that a liquid density meter 17A is used as the bubble ratio measuring means 17 provided in the first embodiment.
Other configurations are the same as those of the first embodiment described above.

Here, we experimentally confirmed the correspondence between the change in the density of oil mixed with air bubbles and the change in the air bubble contamination rate in the oil obtained by sampling and directly measuring the oil mixed with air bubbles. saw. The results are shown in FIGS. 5 (A) and 5 (B).
In this case, FIG. 5A shows the case where the oil temperature is 40 [° C.], and FIG. 5B shows the case where the oil temperature is 60 [° C.]. As the oil, engine oil to which an antifoaming agent was added was used.

  FIG. 5A shows the relationship between the mixing rate obtained by back calculation from the density information of the liquid detected by the liquid density meter 17A and the mixing rate measured by sampling from the sample collector 41 of FIG. It is a graph to show. It can be seen that there is a high correlation between the two as shown in the figure, and the bubble mixing rate can be known in real time with the liquid density meter 17A. Experimentally, it was possible to adjust the bubble mixing rate with a precision on the order of percent by adjusting the flow path using the confluence liquid adjustment valve 14.

  FIG. 5 (B) shows the graph of the bubble mixture rate measured with the same circuit and means as in FIG. 5 (A) except when the oil temperature is 60 ° C. . As in the case of the oil temperature of 40 [° C.], there is a high correlation between the two, and from the approximate expression in the figure, the bubble mixing rate can be known in real time with a density meter. Also in this case, it was possible to adjust the bubble mixing rate with the accuracy of the percent order by adjusting the flow path by the confluence liquid adjusting valve 14.

  As apparent from FIGS. 5A and 5B, there is a close correlation between the oil bubble mixing rate and the oil density. By measuring the change in the oil density in real time, the oil bubble mixing rate is obtained. It was found that can be accurately detected in real time.

For this reason, according to the second embodiment equipped with the liquid density meter 17A, not only can the bubble mixing rate in oil and its change be obtained quickly, but also a relatively inexpensive and compact and robust structure. Therefore, there is an advantage that the entire apparatus can be obtained at low cost and durability can be increased.
Other configurations and the operation and effects thereof are the same as those of the first embodiment described above.

DESCRIPTION OF SYMBOLS 1 Bubble mixing liquid supply system 1A Liquid use machine 1C Waste liquid collection | recovery means 2 Bubble mixing liquid production | generation supply apparatus 3 Main body control part 10 Storage tank 11 Pipe for liquid transfer 11A 1st piping part 11B 2nd piping part 11C Downstream piping Part 11E Excess liquid circulation piping (excess liquid circulation path)
11G Merge piping section 12 Bubble mixing mechanism 12C Bubble mixing amount adjustment valve 14 Liquid adjustment valve for merge (liquid adjustment means for merge)
DESCRIPTION OF SYMBOLS 15 Liquid pressure pump 16 Passage restrictor valve 17 Bubble mixing rate measuring means 17A Liquid density meter 18 Liquid usage adjustment valve 20 Liquid temperature measuring device 20A Heater 20B Liquid temperature sensor 20E Temperature control unit 31 Valve opening setting control unit 32 Refinement Adjustment control unit 33 Flow rate adjustment control unit 35 Main control unit

Claims (12)

A storage tank for storing liquid, a liquid transfer pipe for transferring the liquid in the storage tank to a liquid use machine, and a bubble mixing for introducing bubbles into the liquid taken in from the storage tank provided in the liquid transfer pipe In the bubble mixed liquid generation and supply device including a mechanism and a liquid pressure feed pump that sends the liquid from the storage tank to the liquid use machine,
The liquid transfer pipe includes a first pipe portion having an upstream end connected to the storage tank, a second pipe portion installed in parallel to the first pipe section and having an upstream end connected to the storage tank, A merging pipe section formed by merging each downstream side of the first piping section and the second piping section, and a downstream piping section whose upstream end is connected to the merging piping section and whose downstream end is connected to the liquid use machine. Have
The bubble mixing mechanism is provided in the first piping section;
An air bubble mixed liquid production and supply device, wherein a confluence liquid adjusting means for variably setting the flow rate of the liquid flowing through the second pipe section is provided in the second pipe section. In the bubble mixed liquid production supply device according to claim 1,
A use liquid amount adjustment valve for controlling the flow rate of the liquid sent to the liquid use machine is provided in the downstream pipe section,
A bubble mixed liquid generation supply characterized in that an upstream end is connected to the downstream pipe section on the upstream side of the use liquid amount adjusting valve, and an excess liquid circulation path is connected to the storage liquid tank at the downstream end. apparatus. In the bubble mixed liquid production supply device according to claim 2,
An air bubble mixed liquid generation and supply device, wherein the liquid pump is provided in the downstream pipe portion located on the downstream side of the confluent pipe section and upstream of the surplus liquid circulation path. In the bubble mixed liquid production and supply device according to claim 3,
An air bubble mixed liquid production and supply apparatus, wherein the downstream pipe portion located downstream of the liquid pump is equipped with an air bubble mixing rate measuring means for measuring an air bubble mixing rate in the liquid. In the bubble mixed liquid production and supply device according to claim 1, 2, 3, or 4,
The bubble mixing mechanism is equipped with a bubble mixing amount adjusting valve for adjusting the amount of bubbles mixed into the liquid, and the merging liquid amount adjusting means is constituted by a merging liquid adjusting valve. Liquid generation supply device. In the bubble mixed liquid production supply device according to claim 5,
The downstream piping portion located downstream of the liquid pump and upstream of the bubble mixing rate measuring means is equipped with a passage throttle valve that functions to promote the refinement of bubbles in the bubble mixed liquid. An air bubble mixed liquid production and supply device characterized by the above. In the bubble mixed liquid production supply device according to claim 6,
The storage tank is provided with a liquid temperature setting device that controls the temperature of the liquid inside to a preset temperature,
The liquid temperature setting device is operated based on a heater disposed in the liquid in the storage tank, a liquid temperature sensor for measuring the temperature of the liquid heated by the heater, and temperature information from the liquid temperature sensor. And a temperature control unit that controls energization of the heater to set an appropriate temperature that is set in advance. In the bubble mixed liquid production and supply device according to claim 3,
The bubble mixing amount adjustment valve and the combined liquid amount adjustment valve have a structure in which the drive amount of each valve can be electrically changed,
An air bubble mixed liquid generating / supplying device provided with a valve opening setting control unit for individually setting the valve opening of each adjusting valve by an external command. In the bubble mixed liquid production and supply device according to claim 3,
While having a structure that can electrically change the amount of passage restriction of the passage restriction valve,
A bubble mixed liquid generation and supply device provided with a fine adjustment control unit that adjusts the throttle amount of the passage throttle valve based on information obtained by the bubble mixture ratio measuring means. A storage tank for storing the liquid, a liquid transfer pipe for guiding the transfer of the liquid in the storage tank to the liquid use machine, and bubbles in the liquid taken in from the storage tank provided in the liquid transfer pipe In a bubble mixing liquid supply system comprising a bubble mixing mechanism to be mixed, and a liquid pressure feeding pump that urges the liquid taken into the liquid transfer pipe to transfer the liquid to the liquid use machine,
The liquid transfer pipe includes a first pipe portion having an upstream end connected to the storage tank, a second pipe portion installed in parallel to the first pipe section and having an upstream end connected to the storage tank, A merging pipe section formed by merging each downstream side of the first piping section and the second piping section, and a downstream piping section whose upstream end is connected to the merging piping section and whose downstream end is connected to the liquid use machine. Have
The first piping unit is equipped with the bubble mixing mechanism having a bubble mixing amount adjusting valve, and the second piping unit is configured to variably set the flow rate of the liquid flowing through the second piping unit. Equipped with liquid adjustment valve,
Equipped with a use liquid amount adjustment valve for adjusting the use amount of the bubble-containing liquid used in the liquid use machine, in the downstream pipe section located on the upstream side of the liquid use machine,
Air bubbles characterized in that a main body control unit is provided for individually setting and controlling the opening / closing amounts of the bubble mixing amount adjustment valve, the confluence liquid adjustment valve, and the use liquid amount adjustment valve based on an external command. Mixed liquid supply system. The storage tank is equipped with a liquid transfer pipe that guides the transfer of the liquid in the storage tank to the liquid use machine, and a first piping section that constitutes a connection side of the liquid transfer pipe with the storage tank. A bubble mixing liquid supply system comprising: a bubble mixing mechanism for mixing bubbles in the liquid taken in from the liquid; and a liquid pump for energizing a transfer force necessary for the bubble mixed liquid in which bubbles are mixed by the bubble mixing mechanism There,
In the first piping part, a second piping part that joins at the joining piping part at the downstream end thereof and takes in the liquid in the storage tank is installed in parallel.
Based on an operation command from the outside, the bubble mixing mechanism is set to an operating state, and a bubble mixing amount adjusting valve that is equipped in advance is adjusted to mix a predetermined amount of bubbles into the liquid moving in the first piping section. A bubble entrained liquid generation step (first step);
The amount of movement of the liquid in the storage tank that moves in the second piping section at the same time as or after the operation of the bubble mixing mechanism is set by a confluence liquid adjustment valve that is preliminarily installed in the second piping section. A confluence liquid adjusting step to be controlled (second step);
A use liquid amount adjusting valve preliminarily installed in the downstream pipe portion that forms the downstream side of the liquid transfer pipe is used for the bubble mixed liquid having a predetermined bubble mixture ratio formed by joining in the merge pipe section. And a use liquid amount adjustment step (third step) to be adjusted,
A bubble mixed liquid supply method characterized in that the opening degree adjustment and setting control of each valve in each of these processes are sequentially executed based on an external command by a main body controller provided in advance in each valve. The storage tank is equipped with a liquid transfer pipe that guides the transfer of the liquid in the storage tank to the liquid use machine, and a first piping section that constitutes a connection side of the liquid transfer pipe with the storage tank. A bubble mixing liquid supply system comprising: a bubble mixing mechanism for mixing bubbles in the liquid taken in from the liquid; and a liquid pump for energizing a transfer force necessary for the bubble mixed liquid in which bubbles are mixed by the bubble mixing mechanism There,
In the first piping part, a second piping part that joins at the joining piping part at the downstream end thereof and takes in the liquid in the storage tank is installed in parallel.
Based on an operation command from the outside, the bubble mixing mechanism is operated and a bubble mixing amount adjustment valve preliminarily provided in the bubble mixing mechanism is driven and controlled, so that a predetermined amount of the liquid moving in the first pipe section is supplied. Bubble mixing liquid generation control function to mix bubbles and generate bubble mixing liquid,
The second piping unit is preliminarily equipped with a transfer amount of the liquid that is operated simultaneously with or before and after the operation of the bubble mixing mechanism and is transferred toward the merging piping unit in the second piping unit. A liquid adjustment control function for confluence, which adjusts to an appropriate amount set in advance by driving and controlling the liquid adjustment valve for confluence,
In addition, the use amount of the bubble mixed liquid having a predetermined bubble mixture rate generated by being merged in the merge pipe unit is driven and controlled using a use liquid amount adjusting valve that is preliminarily installed in the downstream pipe unit of the liquid transfer pipe. Use liquid volume setting control function to set and control to the required amount
A control program for a liquid supply system, wherein the operation control function of each valve is realized by a computer provided in a main body control unit installed in advance for the entire valve.

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