JP2014007825A - Electromagnet type actuator and planar motor using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electromagnet type actuator in which a high thrust is acquired by using a permanent magnet, and a planar motor using the same.SOLUTION: A stator core 1a has a plurality of core teeth 11 which are arranged in an X-direction and extended in a Y-direction on both sides thereof, and a stator core 1b has a plurality of core teeth 12 which are arranged in the X-direction and extended in the Y-direction on both sides thereof. In a groove between the core teeth 11 and 12 of stator cores 1a and 1b, coils 2a and 2b for generating magnetic flux are wound. A moving element 3 is provided movably in the X-direction between stator cores 1a and 1b, and has a magnetic body 31 and a nonmagnetic material 32 which are arranged in the X-direction and extended alternately in the Y-direction. A control circuit 4 provides driving currents Iand Ito the coils 2a and 2b in accordance with a moving element current position x and a moving element movement position x, and repeats alternately a perpendicular magnetic flux effect driving state where magnetic flux is made to be applied vertically to the magnetic body 31 of the moving element 3 and a parallel magnetic flux effect driving state where magnetic flux is made to be applied in parallel to the magnetic body 31 of the moving element 3.

Description

  The present invention relates to an electromagnet (EM) type actuator and a planar motor using the same.

  EM actuators that can be easily stacked compared to permanent magnet actuators have attracted attention in terms of high thrust.

  A conventional EM type actuator is composed of a plurality of stators having core teeth arranged in parallel and wound with coils, and a mover in which magnetic bodies and non-magnetic bodies (or gaps) are alternately arranged. (Reference: Patent Documents 1 and 2).

Japanese Patent Laid-Open No. 2003-23764 JP 2001-69746 A

  However, in the above-described conventional EM actuator, in the case of a mover that does not use a permanent magnet, it is necessary to supply a drive current to the coil to advance the mover only by the thrust of the attraction force. There is a problem that a pause period in which the drive current is not supplied to the coil occurs, and therefore the average thrust is reduced.

  In order to solve the above-described problem, an EM actuator according to the present invention includes a plurality of first core teeth arranged in a first direction and extending in a second direction substantially orthogonal to the first direction. And a second stator core having a plurality of second core teeth arranged in the first direction and extending in the second direction and facing the first core teeth. The first stator teeth of the first stator core and the second core teeth of the second stator core are provided so as to be movable in the first direction, and extend alternately in the second direction. A first and second coil for generating first and second magnetic fluxes with respect to the first and second stator cores; 1. Vertical magnets that supply first and second drive currents to the first and second coils so that the first and second magnetic fluxes flow in the third direction of the magnetic body of the mover. A working drive state, first, in which and a control circuit for repeatedly alternating between parallel flux acting drive state to flow a second magnetic flux in a first direction of the magnetic body of the movable element. Thereby, there is no driving rest period.

  According to the present invention, since there is no rest period, the average thrust can be increased.

1A and 1B show a first embodiment of an EM actuator according to the present invention, in which FIG. 1A is an overall perspective view, and FIG. 1B is a perspective view with a part of a coil removed. It is sectional drawing for demonstrating the vertical magnetic flux action drive state of the EM type actuator of FIG. FIG. 3 is a circuit diagram showing a magnetic equivalent circuit of one magnetic path in FIG. 2. It is sectional drawing for demonstrating the parallel magnetic flux action drive state of the EM type actuator of FIG. It is a circuit diagram which shows the magnetic equivalent circuit of the two magnetic paths of FIG. 2A and 1B are diagrams for explaining two driving states of the EM type actuator of FIG. 1, FIG. 3A is a diagram for explaining shape parameter values, and FIG. It is a figure for demonstrating the drive method of the EM type actuator of FIG. 3 is a routine for determining an optimum shape parameter of the EM actuator of FIG. It is a table which shows the example of the selection model of FIG. It is a figure which shows the example of the optimal shape parameter obtained by the optimal shape parameter determination routine of FIG. It is a figure for demonstrating the rightward movement of the needle | mover in the EM type actuator of FIG. 1 which has the optimal shape parameter of FIG. It is a figure for demonstrating the leftward movement of the needle | mover in the EM type actuator of FIG. 1 which has the optimal shape parameter of FIG. It is a whole perspective view which shows the example of a change of the EM type actuator of FIG. It is a graph for demonstrating the effect of the magnetic body number of the needle | mover of the EM type actuator of FIG. It is a graph for demonstrating the lamination | stacking effect of the needle | mover of the EM type actuator of FIG. It is a whole perspective view which shows 2nd Embodiment of the EM type actuator which concerns on this invention. It is a figure explaining the case where only a perpendicular magnetic flux action drive state is performed as a reference drive state of the EM type actuator of FIG. It is a figure explaining the case where only a parallel magnetic flux action drive state is performed as a reference drive state of the EM type actuator of FIG. It is a figure explaining the case where both a perpendicular magnetic flux action drive state and a parallel magnetic flux action drive state are performed as a drive state of this invention of the EM type actuator of FIG. A phase in FIG. 19, B-phase, C phase, D-phase currents I _A, I _B, is a diagram showing an I _C, I _D. It is a figure which shows the example of a change of FIG. It is a whole perspective view which shows the example of a change of the EM type actuator of FIG. It is a figure explaining the case where both a perpendicular magnetic flux action drive state and a parallel magnetic flux action drive state are performed as a drive state of this invention of the EM type actuator of FIG. FIGS. 1, 13, 16, and 22 show a first example of the coil, in which (A) is a plan view before assembly, and (B) is a perspective view for explaining assembly. FIG. It is a top view which shows the 2nd example of the coil of FIG.1, FIG.13, FIG.16 and FIG. It is a top view which shows the example of a change of the coil of FIG. 25A. FIGS. 1, 13, 16, and 22 show a third example of the coil, in which (A) is an overall perspective view, (B) is an enlarged plan view of part B of (A), and (C) is (A). FIG. It is a perspective view for demonstrating the assembly of the coil of FIG. It is a perspective view which shows the example of a change of the edge part of the conductor of FIG. 25, FIG. It is sectional drawing which shows the example of a change of FIG. 2, FIG. The planar motor which concerns on this invention is shown, (A) is a perspective view, (B) is a top view. FIGS. 30A and 30B illustrate an example of the size of the linear actuator in FIG. 30, in which FIG. 30A is a longitudinal sectional view and FIG. 30B is a side view. 30 is a diagram for explaining another example of the size of the linear actuator in FIG. 30, in which (A) is a longitudinal sectional view and (B) is a side view. It is a figure explaining operation | movement of the planar motor of FIG. 30, FIG. 31 or FIG.

  1A and 1B show a first embodiment of an EM actuator according to the present invention, in which FIG. 1A is an overall perspective view, and FIG. 1B is a perspective view with a part of a coil removed. Note that the EM type actuator of FIG. 1 is a single-phase type and has a single-layer structure with one mover.

  In FIG. 1, the stator core 1a has a plurality of core teeth 11 arranged in the X direction and extending in the Y direction on both sides thereof, and the stator core 1b is arranged in the X direction on both sides thereof and in the Y direction. It has a plurality of core teeth 12 extending in the direction. In this case, each core tooth 11 of the stator core 1a and each core tooth 12 of the stator core 1b are opposed to each other.

Coils 2a and 2b for generating magnetic flux are wound around grooves (slots) between the core teeth 11 and 12 of the stator cores 1a and 1b. A method of winding the coils 2a and 2b will be described later. Driving currents I _2a and I _2b are supplied to the coils 2a and 2b.

  On the other hand, the mover 3 is provided between the stator cores 1a and 1b so as to be driven in the X direction, and has a magnetic body 31 and a nonmagnetic body (spacer) 32 arranged in the X direction and alternately extending in the Y direction. . Further, the mover 3 is also movable in the Y direction, so that the EM actuator of FIG. 1 can be applied to a planar motor.

The driving state of EM-shaped actuator of FIG. 1, the driving current I _2a supplied to the coil 2a, 2b, according to the combination of I _2b, flux of words mover 3 with respect to the magnetic body 31 of the movable element 3 A vertical magnetic flux action drive state S _V that acts perpendicularly to the X direction of movement, and a parallel magnetic flux action drive that causes the magnetic flux to act on the magnetic body 31 of the mover 3, that is, parallel to the move direction of the mover 3. there is a state S _P.

The control circuit 4, for example, the microcomputer receives the relative position of the mover 3 (hereinafter referred to as the mover current position) x and the move position of the mover 3 (hereinafter referred to as the mover move position) x _a and moves the mover move position x. drive current I _2a corresponding to _a and armature current position x, the I _2b coil 2a, the mover current position x is supplied to 2b performs feedback control so that the armature movement position x _a. For example, when x _a <x, the mover 3 moves to the minus side in the X direction, that is, to the right. On the other hand, when x _a > x, the mover 3 moves to the plus side in the X direction, that is, to the left. In this case, the mover current position x is obtained from a position detection sensor (not shown) that detects the phase of the magnetic body 31 of the mover 3 provided in the mover 3.

Next, the vertical magnetic flux acting drive state S _V rightward movement in FIG. 1 with reference to FIG.

When x _a <x, as shown in FIG. 2, the control circuit supplies drive currents I _2a = 4A, I _2b = 4A to the coils 2a and 2b, for example. As a result, the magnetic fluxes φ1, φ2, φ3, φ4, and φ5 generated by the coils 2a and 2b are, as indicated by arrows, the core teeth 11 of the stator core 1a → the gap Ga1 → the magnetic body 31 of the mover 3 → the gap Gb1 → It flows like the core tooth 12 of the stator core 1b → the gap Gb2 → the magnetic body 31 of the mover 3 → the gap Ga2 → the core tooth 11 of the stator core 1a. In this case, the magnetic fluxes φ1, φ2, φ3, φ4, and φ5 are perpendicular to the magnetic body 31 of the mover 3, that is, perpendicular to the X direction of movement of the mover 3.

The magnetic equivalent circuit of one magnetic flux φ1 in FIG. 2 is as shown in FIG. In FIG.
Ni (2a): Magnetomotive force of coil 2a
Ni (2b): Magnetomotive force of coil 2b
Rm (1a); Rm ′ (1a): Magnetoresistance of the stator core 1a (in this case, Rm (1a) ≈Rm ′ (1a))
Rm (1b); Rm '(1b): Magnetoresistance of the stator core 1b (in this case, Rm (1b) ≒ Rm' (1b))
R1 (x); R1 ′ (x): the magnetic body 31 of the mover 3 as a function of the mover current position x and the magnetic resistances of the gaps Ga1, Gb1; Ga2, Gb2 (in this case, R1 (x) ≈R1 ′ (x))

The magnetoresistance R can be generally expressed by the following equation.
R = L / μS
Where L: magnetic path length μ: permeability
S: Magnetic path cross-sectional area

Therefore, in FIG. 2, the center of each magnetic body 31 of the mover 3 is always the center of each core tooth 11 (12) of the stator core 1a (1b) (excluding the core teeth 11 (12) at both ends). In other words, in other words, the magnetic resistances R1 (x) and R1 ′ (x) in FIG. 3 are reduced so that the total magnetic resistance is reduced, that is, the mover current position x is the mover moving position x _a = To approach 0, the thrust T is generated in the X direction of movement, in the case of FIG. 2, in the right direction.

Next, the parallel magnetic flux acting drive state S _P output rightward movement in FIG. 1 with reference to FIG.

When x _a <x, as shown in FIG. 4, the control circuit supplies, for example, drive currents I _2a = −4 A, I _2b = 4 A to the coils 2 a and 2 b. As a result, magnetic fluxes φ1a, φ2a, φ3a, φ4a, φ5a; φ1b, φ2b, φ3b, φ4b, and φ5b are generated by the coils 2a and 2b. The magnetic fluxes φ1a (φ1b), φ2a (φ2b), φ3a (φ3b), φ4a (φ4b), φ5a (φ5b) are the core teeth 11 (12) → gap Ga1 of the stator core 1a (1b) as indicated by arrows. (Gb1) → the magnetic body 31 of the mover 3 → the gap Ga2 (Gb2) → the core teeth 11 (12) of the stator core 1a (1b). In this case, the magnetic fluxes φ1a (φ1b), φ2a (φ2b), φ3a (φ3b), φ4a (φ4b), and φ5a (φ5b) are relative to the magnetic body 31 of the mover 3, that is, relative to the X direction of movement of the mover 3. Are parallel.

The magnetic equivalent circuit of the two magnetic fluxes φ1a and φ1b in FIG. 4 is as shown in FIG. In FIG.
Ni (2a): Magnetomotive force of coil 2a
Ni (2b): Magnetomotive force of coil 2b
Rm (1a); Rm ′ (1a): Magnetoresistance of the stator core 1a (in this case, Rm (1a) ≈Rm ′ (1a))
Rm (1b); Rm '(1b): Magnetoresistance of the stator core 1b (in this case, Rm (1b) ≒ Rm' (1b))
R2 (x); R2 '(x): Magnetoresistance of air gap Ga1 or Gb1, which is a function of the mover current position x (in this case, R2 (x) ≒ R2' (x))
R3 (x); R3 '(x): Magnetoresistance of air gap Ga1 or Gb2 that is a function of the mover current position x (in this case, R3 (x) ≒ R3' (x))

Therefore, in FIG. 4, the center of each magnetic body 31 of the mover 3 is always the center of the coil 2a (2b) (slot) of the stator core 1a (1b), in other words, the magnetic field of FIG. The resistance R2 (x) (R2 '(x)) is equal to R3 (x) (R3' (x)) and the total magnetic resistance is reduced, that is, the mover current position x is the mover moving position. In order to approach x _a = 0, the thrust T is generated in the X direction of movement, in the case of FIG. 4, in the right direction.

In the case of leftward movement, relative to the vertical flux acting drive state S _V, I _2a = -4A, next I _2b = 4A, the other hand, for magnetic flux parallel acting drive state S _P is I _2a = 4A, I _2b = 4A.

Will now be described with reference to FIG. 6 the thrust T in the vertical magnetic flux acting drive state S _V and the parallel magnetic flux acting drive state S _P.

As shown in FIG. 6A, the parameters of the EM actuator shown in FIG. 1 are assumed as follows.
Total length L: 20mm
About the stator core 1a (the same applies to the stator core 1b) The tooth width t _c of the core teeth 11 (12): 2 mm
Slot width t _{s of} core teeth 11 (12): 2 mm
Cycle Pi of core teeth 11 (12): 4mm
Core thickness h _c : 1mm
Total core thickness h: 5mm
About the mover 3 The width t _m of the magnetic body 31: 2 mm
Width t _ms of non-magnetic material 32: 2 mm

As shown in FIG. 6 (B), in the vertical magnetic flux acting drive state S _V parallel flux acting drive state S _P, it can be seen the direction of the thrust T are opposite. Note that the absolute value of the thrust T in the vertical magnetic flux action driving state S _V is smaller than the thrust T in the parallel magnetic flux action driving condition S _P is the sum of the gaps Ga1 and Gb1 (sum of the gaps Ga2 and Gb2) in FIG. 4 is smaller than the sum of the gaps Ga1 and Ga2 (sum of the gaps Gb1 and Gb2), so that the magnetoresistances R1 (x) and R1 ′ (x) in FIG. 3 are the magnetoresistances R2 (x) (R2 ′ (x This is because it is smaller than the sum of R3 (x) (R3 ′ (x)).

As can be seen from FIG. 6 (B), by using both the vertical magnetic flux acting drive state S _V parallel flux acting drive state S _P, attained the enhancement of the thrust T. For example, in the case of a rightward movement, the control circuit 4 supplies the drive currents I _2a and I _2b shown in FIGS. 7A and 7B to the coils 2a and 2b to drive the vertical magnetic flux action drive state S _V (I _2a = 4A, I _2b = 4A) and the parallel magnetic flux action driving state S _P (I _2a = -4A, I _2b = 4A) are repeated in synchronism with the mover current position x without providing a pause period. As a result, as shown in FIG. 7C, the average thrust of the thrust T is increased, and thus a large thrust T is obtained. In addition, the thrust ripple is reduced by the absence of the suspension period. In the case of leftward movement, the drive current I _2a is reversed and the thrust T is negative.

  Next, the determination of the shape parameters of the EM actuator of FIG. 1 will be described with reference to the routine of FIG.

First, in step 801, an appropriate value of the ratio of the tooth width t _c / slot width t _s of the core teeth 11 and 12 of the stator cores 1a and 1b is selected. For example,
L = 20mm
h = 5mm
And multiple models with high average thrust density, for example,
Model 1: t _c / t _s = 0.43 (h _c = t _c )
Model 2: t _c / t _s = 0.25 (h _c = t _c )
Model 3: t _c / t _s = 0.67 (h _c = t _c / 2)
Model 4: t _c / t _s = 0.43 (h _c = t _c / 2)
Select. The average thrust density is
Average thrust / (Mover mass + Stage mass provided on the mover)
Given in.

Next, in step 802, an appropriate value of the ratio of the width t _m of the magnetic body 31 of the mover 3 to the width t _ms of the non-magnetic body 32 for each of the models 1, 2, 3, 4 selected in step 801. Select. For example, for model 1, the average thrust density is large and the thrust ripple is small.
t _m / t _ms = 1
Is selected as an appropriate value. Similarly, for model 2, t _m / t _ms = 1 is selected as an appropriate value, for model 3, t _m / t _ms = 1.5 is selected as an appropriate value, and for model 4 Select t _m / t _ms = 1 as an appropriate value. The thrust ripple is
(Maximum value of thrust waveform−minimum value of thrust waveform) / average value of thrust waveform.

  The model 1, model 2, model 3, and model 4 selected in steps 801 and 802 are shown in the table of FIG.

  Next, in step 803, an optimum model is determined according to the average thrust density and thrust ripple from the models 1, 2, 3, and 4 of FIG. Although the difference between the average thrust density models 1, 2, 3, and 4 is small, the model 1 is determined as the optimum model because the model 1 has the smallest thrust ripple.

Next, in step 804, determining the thickness h _m of the mover 3 with respect to the optimal model 1 determined in step 803. In other words, when changing the thickness h _m of the mover 3 with respect to the optimal model 1, with increasing thickness h _m of the movable element 3, the average thrust increases, the average thrust density h _m = 0.5 mm in so was the largest, determines the 0.5mm the thickness h _m of the mover 3.

  At step 805, the routine of FIG. 8 ends, and the optimum shape parameters of the EM actuator of FIG. 1 are as shown in FIG. In FIG. 10, the air gap G is 0.1 mm.

  FIG. 11 is a diagram for explaining the movement of the mover 3 on the negative side in the X direction, that is, the rightward movement, in the EM type actuator of FIG.

That is, the movable element when the current position x = -2 mm, switched from a parallel flux acting drive state S _P to the vertical magnetic flux acting drive state S _V.

Then, when the -2 mm <x <0, including an armature current position x = -1 mm, the thrust T of the rightward perpendicular magnetic flux acting drive state S _V in FIG. 11 is increased.

Then, when the armature current position x = 0, switched from the vertical magnetic flux acting drive state S _V to the magnetic flux parallel acting drive state S _P.

Then, the movable element when 0 <x <2 mm including the current position x = 1 mm, the thrust T of the right direction in FIG. 11 of the magnetic flux parallel acting drive state S _P increases.

Then, the movable element when the current position x = 2 mm, switched from a parallel flux acting drive state S _P to the vertical magnetic flux acting drive state S _V.

Thus, the movable element 3 is moved in the right direction in FIG. 11 by a large average thrust due to repeated iterations vertical flux action drive state S _V and the parallel magnetic flux acting drive state S _P.

  FIG. 12 is a diagram for explaining the plus side in the X direction, that is, the leftward movement of the mover 3 in the EM type actuator of FIG. 1 having the optimum shape parameter of FIG.

That is, the movable element when the current position x = 2 mm, switched from a parallel flux acting drive state S _P to the vertical magnetic flux acting drive state S _V.

Then, when 0 <x <2 mm including the mover current position x = 1 mm, the thrust T of the left vertical flux acting drive state S _V 12 of increases.

Then, when the armature current position x = 0, switched from the vertical magnetic flux acting drive state S _V to the magnetic flux parallel acting drive state S _P.

Then, when the -2 mm <x <0, including an armature current position x = -1 mm, the thrust T of the left in FIG. 12 of the magnetic flux parallel acting drive state S _P increases.

Then, the movable element when the current position x = -2 mm, switched from a parallel flux acting drive state S _P to the vertical magnetic flux acting drive state S _V.

Thus, the movable element 3 is moved in the left direction in FIG. 12 by a large average thrust due to repeated iterations vertical flux action drive state S _V and the parallel magnetic flux acting drive state S _P.

FIG. 13 is an overall perspective view showing a modified example of the EM actuator of FIG. The EM type actuator of FIG. 13 is a single-phase mover multilayer type. The average thrust of the EM actuator in FIG.
Depth length L _Y ,
The number n _m of the magnetic bodies 31 of the mover 3,
Number of stacks of mover 3 n _L ,
Depends on. For example, the EM-type actuator of FIG. 13 by using optimal shape parameters of FIG. 10, the depth direction length L _Y is 30 mm, the number n _m is 15, stacking number n _L of the movable element 3 of the magnetic member 31 of the movable element 3 In the case of ² , the average thrust was about 72N and the average thrust density was about 191.7N / kg when the coil occupation ratio of the coils 2a and 2b was 60% and the current density was 56A / mm ² .

14, the EM-type actuator of FIG. 13 shows the average thrust in the case where the number n _m of the magnetic member 31 of the movable element 3 is changed from 1 to 5 using the optimal shape parameters of FIG. That is, the average thrust when driven only by the vertical magnetic flux action drive state S _V, the average thrust when driven only by the parallel magnetic flux action drive state S _P , and the vertical magnetic flux action drive state S _V and the parallel magnetic flux action drive state S _P the average thrust when driven by the are both increases with increase in the number n _m of the magnetic member 31 of the movable element 3. That is, there are effects of several _nm of the magnetic body 31 of the mover 3. In this case, when the total length L = 20 mm, the effect is maximum when _nm = 5. Also, the number n _m is any value of the magnetic body 31 of the movable element 3, the average thrust when driven by the vertical magnetic flux acting drive state S _V and the parallel magnetic flux acting driving state S _P is the vertical magnetic flux acting drive state S _V the average thrust when driven only by, has a sum of the average thrust when driven by magnetic flux parallel action driving state S _P, it can be seen that the greater. The effect of FIG. 14 is also applicable to the single-phase type of FIG. 1 having a single mover.

FIG. 15 shows an average thrust when the number n _{L of the} movers 3 is changed from 1 to 3 using the optimum shape parameter of FIG. 10 in the EM type actuator of FIG. That is, the average thrust when driven only by the vertical magnetic flux action drive state S _V, the average thrust when driven only by the parallel magnetic flux action drive state S _P , and the vertical magnetic flux action drive state S _V and the parallel magnetic flux action drive state S _P the average thrust when driven by the are both increases with increase in the number n _L of the movable element 3. That is, there is a stacking effect of the number n _L of the movers 3. Also, the number n _L is any value of the movable element 3, the average thrust when driven by the vertical magnetic flux acting drive state S _V and the parallel magnetic flux acting driving state S _P was driven only by the vertical magnetic flux acting drive state S _V the average thrust of the case, has a sum of the average thrust when driven by magnetic flux parallel action driving state S _P, it can be seen that the greater.

  FIG. 16 is an overall perspective view showing a second embodiment of the EM actuator according to the present invention. The EM type actuator shown in FIG. 16 has a three-phase type, and each A-phase, B-phase, and C-phase mover has two structures, and the mover 3 can be driven in the X direction. Further, the mover 3 can be easily moved in the Y direction. Thereby, it is applicable also to a planar motor.

Also in the EM type actuator of FIG. 16, the nine stators 1 and the eight movers 3 adopt the optimum shape parameters of FIG. In this case, the three A-phase stators 1 are connected to the D-phase (Da layer) on both sides of the stator 1 (coil) on both sides of the center stator 1 (coil) to which the A-phase current I _A is supplied. ) A current I _D (I _Da ) is supplied. The same applies to the three stators 1 of each B phase and C phase.

Referring to FIG. 17 will be described where only the right of the vertical magnetic flux acting driving state S _V as a reference driving state of the EM-type actuator of FIG. 16. In FIG. 17, in order to simplify the explanation, the number of movers 3 for each A phase, B phase, and C phase is one.

In FIG. 17, the A-phase, B-phase, and C-phase movers 3 move to the plus side in the X direction, that is, to the right, and the mover current position x changes from x = 0 mm to x = 1 mm. In this case, when x = 0 mm is, A-phase, B-phase only the vertical magnetic flux acting drive state S _V becomes, C phase becomes dormant, also, the, A-phase only the vertical magnetic flux acting drive state when x = 0.33 mm S _V becomes, B phase, C phase becomes dormant, further when x = 0.67 mm is, a-phase, C phase only the vertical magnetic flux acting drive state S _V becomes, B-phase becomes a dormant, furthermore, x When = 1.0 mm, only the C phase is in the vertical magnetic flux action driving state _SV , and the A phase and the B phase are in a resting state. As a result, the thrust T, which is the combined force of the one-phase thrust T _V or the two-phase thrust T _V , is relatively small due to the existence of the suspension period, but the thrust T _V itself is large. The total average thrust of Phase C and Phase C is about 20N. The current of each A phase, B phase, C phase is 4A, for example, there is no phase change of each Da phase, Db phase, Dc phase corresponding to this, only the amplitude is A phase, B phase, C Same as phase current.

Referring to FIG. 18 will be described when only was performed parallel flux acting drive state S _P output rightward reference driving state of the EM-type actuator of FIG. 16. In FIG. 18 as well, for the sake of simplicity, it is assumed that there is one mover 3 for each of the A phase, the B phase, and the C phase.

Also in FIG. 18, the A-phase, B-phase, and C-phase movers 3 move to the plus side in the X direction, that is, the right direction, and the mover current position x changes from x = 0 mm to x = 1 mm. In this case, when x = 0 mm, only the C phase is in the parallel magnetic flux action drive state _SP , and the A phase and the B phase are in a dormant state, and when x = 0.33 mm, only the B phase and the C phase are in the parallel magnetic flux. It becomes the action drive state S _P , the A phase is in a quiescent state, and when x = 0.67 mm, only the B phase is in the parallel magnetic flux action drive state S _P , the A phase and the C phase are in a quiescent state, and x When = 1.0 mm, only the A phase and the B phase are in the parallel magnetic flux action drive state _SP , and the C phase is in a resting state. As a result, the thrust T, which is the combined force of the one-phase thrust T _P or the two-phase thrust T _P , becomes relatively small due to the existence of the suspension period, and the thrust T _P itself is also small. The average thrust of the total of B phase and C phase is about 3N. The current of each A phase, B phase, and C phase is -4A, for example, and the corresponding current of each Da phase, Db phase, and Dc phase is opposite to the current of A phase, B phase, and C phase. Current.

Referring to FIG. 19 will be described the case of performing both as a driving condition of the right of the vertical magnetic flux acting drive state S _V and rightward parallel flux acting drive state S _P output present invention EM-shaped actuator of FIG. 16. Also in FIG. 19, for the sake of simplification of explanation, the number of movers 3 for each A phase, B phase, and C phase is one.

In FIG. 19, the A-phase, B-phase, and C-phase mover 3 moves to the plus side in the X direction, that is, to the right, and the mover current position x changes from x = 0 mm to x = 1 mm. In this case, when x = 0 mm, the A phase and the B phase are in the vertical magnetic flux action driving state S _V , the C phase is in the parallel magnetic flux action driving state SP, and when x = 0.33 mm, the A phase is the vertical magnetic flux action driving state S _P. action drive state S _V becomes, B phase, C phase parallel flux acting drive state S _P, and the further, x = at the 0.67 mm, a-phase, C-phase vertical magnetic flux acting drive state S _V becomes, B-phase parallel flux acting drive state S _P becomes, furthermore, when x = 1.0 mm is, C-phase vertical magnetic flux acting drive state S _V, and the a-phase, B-phase are parallel flux acting drive state S _P. As a result, the combined force of the three phases, that is, the combined force of the one-phase thrust T _V and the two-phase thrust T _P or the combined force of the two-phase thrust T _V and the one-phase thrust T _P is very high. Furthermore, since there is no rest period, the total average thrust of the A phase, the B phase, and the C phase is about 25N. In this case, the A-phase, B-phase, C-phase current, as shown in FIG. 20, a vertical magnetic flux acting drive state S _V In example 4A, a in parallel flux acting drive state S _P eg -4A, D-phase current _ID is always 4A.

FIG. 21 shows a modification of FIG. 19, and it is assumed that two movers 3 are provided for each A phase, B phase, and C phase. In this case as well, as in the case of FIG. 19, there is no pause period based on the currents _{A A} , I _B , I _C , and I _D of the A phase, B phase, C phase, and D phase of FIG. be either a working drive state S _V and the parallel magnetic flux acting drive state S _P, the thrust T is a combined force of the thrust T _V and the thrust T _P is very large. For example, it becomes about twice as large as the thrust in the case of FIG.

  FIG. 22 is an overall perspective view showing a modified example of the EM type actuator of FIG. In FIG. 16, three stators 1 are provided for each of the A phase, the B phase, and the C phase, that is, a total of nine stators 1 are provided. Three stators 1 are provided for each of the B phase and the C phase, but the D phase stator 1 between the A phase and the B phase is shared, and the D phase stator 1 between the B phase and the C phase. Are shared, that is, a total of seven stators 1 are provided. Therefore, the EM actuator shown in FIG. 22 can be made smaller than the EM actuator shown in FIG. 16, and the manufacturing cost can be reduced.

Figure 23 is a diagram illustrating a case of performing both parallel flux acting drive state S _P output right direction of the vertical magnetic flux acting drive state S _V and rightward as the driving state of the EM-type actuator of FIG. 22, FIG. 21 Corresponding to That is, the same thrust T as in the case of FIG. 21 is obtained.

In general, when 2n (n = 2, 3,...) Layers of the mover 3 are stacked, for example, when 4 movers 3 of each A phase, B phase, and C phase are stacked,
D-phase stator core (coil)
A phase stator core (coil)
D-phase stator core (coil)
A phase stator core (coil)
D-phase stator core (coil)
A phase stator core (coil)
D-phase stator core (coil)
A phase stator core (coil)
D-phase stator core (coil)
B-phase stator core (coil)
D-phase stator core (coil)
B-phase stator core (coil)
D-phase stator core (coil)
B-phase stator core (coil)
D-phase stator core (coil)
B-phase stator core (coil)
D-phase stator core (coil)
C-phase stator core (coil)
D-phase stator core (coil)
C-phase stator core (coil)
D-phase stator core (coil)
C-phase stator core (coil)
D-phase stator core (coil)
C-phase stator core (coil)
D-phase stator core (coil)
As in the case of, it may be laminated. That is, the D-phase stator core (coil), the A-phase stator core (coil), the B-phase stator core (coil), and the C-phase stator core (coil) with the D-phase stator core outside One may be arranged alternately.

  24 shows a first example of the coils, for example, 2a and 2b, shown in FIGS. 1, 13, 16, and 22. FIG. 24A is a plan view before assembly, and FIG. 24B is a perspective view for explaining assembly. It is. That is, as shown in FIG. 24A, a plurality of conductors 241 arranged in parallel in the width direction are bundled in an L shape and covered with an insulator 242 like a flat cable. In this case, a conductor surface layer 241 a or 241 b is formed at each end of the conductor 241, and the conductor surface layers 241 a and 241 b are not covered with the insulator 242. Therefore, as shown in FIG. 24B, the coil of FIG. 24A is wound around the slot of the stator core 1a (1b) to bend the portion where the conductor surface layer 241b is formed. The face layer 241a and the conductor face layer 241b are connected in correspondence. In this case, the entire conductor surface layer 241a and the entire conductor surface layer 241b are connected by being shifted by one conductor to obtain one electrically connected conductor. Wiring is drawn out from one conductor surface layer 241a and one conductor surface layer 241b that are not connected. Thereby, the time and labor of coil winding work can be reduced. If necessary, a plurality of coils shown in FIG. 24 can be stacked.

  FIG. 25A shows a second example of the coils of FIGS. 1, 13, 16, and 22, for example 2a and 2b. That is, as shown in FIG. 25A, a plurality of conductors 251 arranged in parallel in the width direction are bundled in a U shape and covered with an insulator 252 like a flat cable. In this case, conductor surface layers 251 a and 251 b are formed at the ends of the conductor 251, and the conductor surface layers 251 a and 251 b are not covered with the insulator 252. Therefore, the coil of FIG. 25A is fitted into the two slots of the stator core 1a (1b), and the other coil of FIG. 25A is turned over and wound around the two slots adjacent to the stator core 1a (1b) Then, if the conductor surface layer 251a (251b) of one coil and the conductor surface layer 251b (251a) of the other coil are made to correspond, the connection can be easily made. In this case, the wiring is drawn out from the leftmost conductor surface layer 251a (251b) and the rightmost conductor surface layer 251a (251b). Thereby, the time and labor of coil winding work can be reduced. If necessary, a plurality of coils shown in FIG. 25A can be stacked. The coil of FIG. 25A is suitable when the number of slots of the stator core of the EM actuator is an even number, but when the number of slots of the stator core is an odd number, the coils of FIG. 24 may be combined. As shown in FIG. 25B, the same applies when the conductor surface layers 251a and 251b in FIG. 25A are replaced with conductor surface layers 251a 'and 251b'.

  FIG. 26 shows a third example of the coils, for example, 2a and 2b, shown in FIGS. 1, 13, 16, and 22, wherein (A) is an overall perspective view, (B) is an enlarged plan view of part B of (A), (C) is the C section enlarged plan view of (A). When viewed on the XY plane of FIGS. 2 and 4, the current directions of the coils are always alternately reversed. That is, as shown in FIG. 26A, in the coil 26, a plurality of conductors 261 arranged in parallel in the width direction are bundled in a meandering shape and covered with an insulator 262 like a flat cable. In this case, as shown in FIGS. 26B and 26C, the end portions 261b and 261c of the conductor 261 are not covered with the insulator 262. Accordingly, as shown in FIG. 27, the coil of FIG. 26 is fitted into the five slots of the stator core 1a (1b). In this case, the wiring is drawn out from the conductor 261b and the conductor 261c that are not covered with the insulator 262. Thereby, the time and labor of coil winding work can be reduced. Moreover, the coil 26 of FIG. 26 can also be laminated | stacked as needed. For example, when the coils 26 ′, 26 ″, 26 ′ ″ are further laminated, the end portions 261 b, 261 c of the coil 26 are turned by turning the coils 26 ′, 26 ″ ″ with respect to the coils 26, 26 ″. And the ends 261c and 261b of the coil 26 ′ are connected, the ends 261b and 261c of the coil 26 ″ and the ends 261c and 261b of the coil 26 ′ ″ are connected, and the coils 26, 26 ′, 26 ″, 26 '' 'is one coil.

  26 and 27, the entire end portion of the conductor 261 is not covered with the insulator 262. However, as shown in FIG. 28, the short circuit can be prevented by exposing only the necessary minimum of the conductor 261. Can do.

  In the EM type actuators of FIGS. 1, 13, 16, and 22, core teeth are provided on both sides of the stator core, and coils are provided in the core tooth slots on both sides of these stator cores. However, in the case of providing the coil shown in FIG. 25, FIG. 26, or FIG. 27 in the EM type actuator shown in FIG. 1, FIG. 13, FIG. 16, or FIG. ), As shown in (B), it may be provided only on the surface of the stator core on the side where the mover exists. As a result, the size of the EM actuator can be reduced.

  30 shows a planar motor using the EM type actuator of FIGS. 16 and 22 as a linear actuator, where (A) is a perspective view and (B) is a plan view. The size of the planar motor in FIG. 30 is, for example, horizontal × vertical × height = 276 mm × 276 mm × 59.2 mm.

  As shown in FIG. 30, the planar motor includes a stage 51 having an encoder scale 51a, a mover 51X fixed to both ends of the stage 51 in the X direction, a mover 51Y fixed to both ends of the stage 51 in the Y direction, At least one linear actuator 53X that acts as a stator for the mover 51X and at least one linear actuator 53Y that acts as a stator for the mover 51Y are provided. Here, the mover 52X (52Y) and the linear actuator 53X (53Y) are combined to form the EM actuator shown in FIGS.

  FIG. 31 is a diagram for explaining an example of the size of the linear actuator 53X (53Y) in FIG. 30, (A) is a longitudinal sectional view, and (B) is a side view.

As shown in FIG. 31, the linear actuator 53X (53Y) is composed of a stator core 1 and a coil 2 composed of 24 core teeth having a width t _c = 1.2 mm and a slot width t _s = 2.8 mm. The length is 114.8mm. Each of the A-phase, B-phase, and C-phase stator cores 1 has a thickness of 5 mm, and the stator core 1 is bonded by an adhesive layer 4 having a thickness of 0.7 mm. Therefore, the total thickness of the stator core is 59.2 mm.

  FIG. 32 shows a modified example of FIG. 31, in which the D phase among the A phase, the B phase, and the C phase is unified as in the case of FIGS. As a result, the total thickness of the stator core is 50.6 mm, and the planar motor can be miniaturized.

  The planar motor shown in FIG. 30, FIG. 31 or FIG. 32 is driven as shown in FIG. For example, as shown in FIG. 33A, when the thrust T is generated on the mover 52Y in the plus direction in the Y direction, that is, in the right direction by the two linear actuators 53Y, as shown in FIG. 33B, the linear actuator 53X. At the same time, the stage 51 moves to the right. In this way, the stage 51 can move on the XY plane.

As shown in FIG. 30, FIG. 31 or FIG.
Stage stroke: ± 19.6mm
Average thrust: about 144N
Stage thrust density: Approximately 191.7N / kg
Was achieved.

1a, 1b, 1: Stator core 11, 12: Core teeth 2a, 2b, 2: Coil 3: Movable element 31: Magnetic body 32: Nonmagnetic body 4: Control circuit 51: Stage 52X, 52Y: Movable element 53X , 53Y: Linear actuator

Claims (16)

A first stator core having a plurality of first core teeth arranged in a first direction and extending in a second direction substantially perpendicular to the first direction;
A second stator core having a plurality of second core teeth arranged in the first direction and extending in the second direction and facing the first core teeth;
The second stator core is movably provided in the first direction between the first core teeth of the first stator core and the second core teeth of the second stator core. A mover having a magnetic body and a non-magnetic body extending in an alternating manner, and
First and second coils for generating first and second magnetic fluxes with respect to the first and second stator cores;
A vertical magnetic flux that supplies first and second drive currents to the first and second coils so that the first and second magnetic fluxes flow in the third direction of the magnetic body of the mover. An electromagnet type comprising: an action driving state; and a control circuit that alternately repeats the first and second magnetic fluxes in a parallel magnetic flux action driving state that causes the magnetic body of the mover to flow in the first direction. Actuator.   2. The electromagnet according to claim 1, wherein the control circuit controls the first and second drive signals according to a current position of the mover with respect to the first and second stator cores and a moving position of the mover. Actuator.   The electromagnet actuator according to claim 1, wherein the first and second core teeth are provided on both surfaces of the first and second stator cores. The first coil is provided in a slot of the first core teeth on both sides of the first stator core;
The electromagnet actuator according to claim 3, wherein the second coil is provided in a slot of the second core tooth on both surfaces of the second stator core.   Each of the first and second coils includes a plurality of conductors arranged in parallel in the width direction, and an insulator for covering the plurality of conductors except for ends of the plurality of conductors and bundling them in an L-shape. The electromagnetic actuator according to claim 4, wherein the electromagnetic actuator is fitted in a slot of the first and second core teeth.   Each of the first and second coils includes a plurality of conductors arranged in parallel in the width direction, and an insulator for covering the plurality of conductors except for ends of the plurality of conductors and bundling them in a U-shape. The electromagnetic actuator according to claim 4, wherein the electromagnetic actuator is fitted in a slot of the first and second core teeth.   Each of the first and second coils includes a plurality of conductors arranged in parallel in the width direction, and covers the plurality of conductors except for ends of the plurality of conductors. 5. The electromagnetic actuator according to claim 4, further comprising an insulator for bundling in the shape of the slot, and being fitted into the slots of the first and second core teeth.   2. The electromagnet actuator according to claim 1, wherein the first and second core teeth are provided only on the surfaces of the first and second stator cores on the side where the mover exists. The first coil is provided in a slot of the first core tooth on the surface of the first stator core on the side where the mover exists,
The electromagnetic actuator according to claim 8, wherein the second coil is provided in a slot of the second core tooth on the surface of the second stator core on the side where the mover exists.   Each of the first and second coils includes a plurality of conductors arranged in parallel in the width direction, and an insulator for covering the plurality of conductors except for ends of the plurality of conductors and bundling them in a U-shape. The electromagnetic actuator according to claim 9, wherein the electromagnet actuator is fitted in a slot of the first and second core teeth.   Each of the first and second coils includes a plurality of conductors arranged in parallel in the width direction, and covers the plurality of conductors except for ends of the plurality of conductors. The electromagnetic actuator according to claim 9, further comprising an insulator for bundling into the shape of the slot of the first and second core teeth.   The electromagnet type actuator which provided the electromagnet type actuator in any one of Claims 1-11 in each phase of A phase, B phase, and C phase. Supplying A phase drive current, B phase drive current and C phase drive current to the first coil of the first stator core of the A phase, B phase and C phase;
The electromagnetic actuator according to claim 12, wherein a constant D-phase driving current is supplied to the second coil of the second stator core of the A phase, the B phase, and the C phase. Each of the A-phase, B-phase and C-phase movers has a structure consisting of two,
The second stator core to which the D-phase drive current is supplied, the first stator core to which the A-phase drive current is supplied, and the second stator core to which the D-phase drive current is supplied The first stator core to which the B-phase drive current is supplied, the second stator core to which the D-phase drive current is supplied, and the first stator to which the C-phase drive current is supplied The electromagnet actuator according to claim 13, wherein a core and the second stator core to which the D-phase driving current is supplied are stacked in this order. When the number of movers of each A phase, B phase and C phase is 2n (n = 1, 2,...)
With the second stator core to which the D-phase drive current is supplied as the outside, the second stator core to which the D-phase drive current is supplied, the A-phase drive current, the B-phase drive current, The electromagnet actuator according to claim 13, wherein any one of the first stator cores supplied with the C-phase drive current is alternately arranged. Stage,
A first mover fixed to both ends of the stage in the first direction;
A second mover fixed to both ends of a second direction substantially orthogonal to the first direction of the stage;
At least one first linear actuator acting as a stator core with respect to the first mover;
Comprising at least one second linear actuator acting as a stator core with respect to the second mover;
The planar motor comprising the electromagnetic actuator according to any one of claims 1 to 15, wherein the first movable element and the first linear actuator, and the second movable element and the second linear actuator are included.