JP2005184877A - Flat surface actuator moving member portion and flat surface actuator with moving member portion - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive flat surface actuator having simple structure and free from thrust force variation. <P>SOLUTION: The flat surface actuator moving member portion comprises a case 13 consisting of a bottom part and a sidewall part standing therefrom, one set or more of armatures arranged in the case 13 each consisting of a core 14 formed by laminating E-shaped electromagnetic steel plates, a coil 16 wound around each teeth 17 of the E-shaped core 14 and a permanent magnet 15 provided at the forward end of each teeth 17. A plurality of holes having the same shape as that at the forward end of each teeth 17 or that of the permanent magnet 15 are provided in the bottom part of the case 13 and the forward end of each teeth 17 or the permanent magnet 15 is arranged in each hole. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a planar actuator movable element required for small size, high accuracy, and low cost in the fields of semiconductor manufacturing equipment, FA equipment, medical equipment, and the like, and a planar actuator provided with the same.

2. Description of the Related Art A three-phase linear planar actuator having an armature core having an armature winding and a permanent magnet on a mover and an inductor tooth on a stator has been known (see, for example, Patent Document 1 and Patent Document 2). .)
FIG. 6 is a top view of these known planar actuators.
In the figure, 111 is a Y-axis linear guide, 112 is an X-axis linear guide, 119 is a platen, 120 is an X-direction moving plate, and 121 is a Y-direction moving plate. Since the Y-direction moving plate 121 is fixed to the Y-axis linear guide 111, it moves in the Y direction. Since the X-direction moving plate 120 is fixed to the X-axis linear guide 112, it moves in the X-axis direction, and since it is mounted on the Y-direction moving plate 121, it can also move in the Y-axis direction. Therefore, the X-direction moving plate 120 can freely move in the X direction and the Y direction.
FIG. 7 is a front view of FIG.
In FIG. 7, 113 is an armature, 116 is a permanent magnet, 118 is a case, and 118a is a screw. The same reference numerals as those in FIG. 6 denote the same components as those in FIG. The armature 113 is fastened to the top plate portion of the case 118 by a fastening screw 118a. Since the case 118 is attached to the X-direction moving plate 120, the case 118 moves freely in the X direction and the Y direction while maintaining a minute gap with the platen 119 surface as described above.
FIG. 8 is a front view of the case 118.
In the figure, 114 is a core, 115 is a tooth, and 117 is a coil.
The case 118 has a configuration including a side wall portion and a top plate, and a core 114 in which an E-shaped electromagnetic steel plate is laminated on the top plate is fastened by a fastening screw 118a. A coil 117 is wound around the teeth 115 of the core 114, and a permanent magnet 116 is disposed at the tip of the teeth 115.
FIG. 9 is a bottom view of the planar actuator.
In the figure, an armature 113 is composed of four armatures 113a to 113d. As shown in the figure, an armature 113a and 113b that gives thrust in the X direction and one armature that gives thrust in the Y direction. One set of 113c and 113d is arranged in a rectangular case 118.
The principle of thrust generation of such a planar actuator is as follows.
In the planar actuator, the magnetic fluxes of the permanent magnets 116 having U, V, and W poles flow through each other by the inductor teeth of the platen 119. Further, since the phase difference between the magnetic poles of each phase is 120 ° in electrical angle, when the moving plate 120 or 121 (FIG. 6) is moved, magnetic fluxes of 120 ° difference are linked to each phase coil 117, and a three-phase induced voltage is generated. Conversely, if a three-phase current is applied to each phase coil 117 (FIG. 8), thrust is generated as a three-phase synchronous motor, and the moving plate 120 or 121 moves linearly on the platen 119 in the longitudinal direction. Become.
As described above, the conventional ones use the linear guides 111 and 112 (FIGS. 6 and 7) in order to secure a minute gap between the armature portion 113 (FIG. 7) and the platen 119.
JP 61-161952 A JP 2001-45736 A

The conventional planar actuator has a structure in which the armature core is screwed to the case and a permanent magnet is bonded to the tip of the teeth. Therefore, the height to the permanent magnet is the length of the core teeth and the core mounting surface of the case. There is a problem that the thrust is fluctuated due to variations in minute gaps with the platen surface, which are determined by manufacturing errors.
In addition, since the permanent magnet protrudes from the case, there is a problem that the end face of the permanent magnet is lost due to contact with surrounding objects during handling, and the characteristics change in each armature, resulting in non-uniform thrust.
Further, since the linear guide is used for the movement of the plane, the structure is complicated, and it is necessary to manufacture parts with high accuracy, and it takes time and effort to assemble and adjust, resulting in an increase in manufacturing cost.
The present invention has been made in view of such problems, and provides a planar actuator that can make a minute gap from a permanent magnet to a platen surface uniform, has a simple structure, and can be manufactured at low cost. For the purpose.

In order to solve the above-mentioned problem, an invention according to claim 1 relates to a planar actuator mover part, and comprises a case comprising a bottom part and a side wall part standing from the bottom part, and an electric machine disposed in the case. One or more sets of electric machines comprising a core in which E-shaped electromagnetic steel plates are laminated, a coil wound around each tooth of the E-shaped core, and a permanent magnet provided at the tip of each tooth. A plurality of holes having the same shape as the shape of the tip of each tooth or the shape of the permanent magnet, and the tip of each tooth or the permanent magnet in the hole. Is provided.
According to a second aspect of the present invention, in the planar actuator movable element according to the first aspect, the hole is a square hole, and the tip of the teeth or the permanent magnet is disposed in the square hole without a gap. To do.
According to a third aspect of the present invention, in the planar actuator movable element according to the first or second aspect, the plurality of armatures are arranged in the case so that the thrust directions of the armatures are orthogonal to each other. It is characterized by that.
According to a fourth aspect of the present invention, there is provided a planar actuator comprising: a magnetic platen having planar portions formed in a lattice shape; and the permanent magnet disposed on the platen so as to maintain a minute gap with the platen. The planar actuator movable element according to any one of Items 1 to 3, and the planar actuator movable element.
According to a fifth aspect of the present invention, in the planar actuator according to the fourth aspect, protrusions are provided at a plurality of locations on the surface of the bottom portion of the case facing the platen surface, and the protrusions and the platen surface are in contact with each other. .
According to a sixth aspect of the present invention, in the planar actuator according to the fifth aspect, the protrusion is a protrusion having a round tip.
According to a seventh aspect of the present invention, in the planar actuator according to the sixth aspect, the round tip protrusion is a protrusion that rotatably incorporates a ball.
According to an eighth aspect of the present invention, in the planar actuator according to any one of the fifth to seventh aspects, the protrusion is replaceable.

  With the above configuration, an armature core manufacturing error and a permanent magnet misalignment error can be allowed, and thrust fluctuations can be eliminated. In addition, the permanent magnets are eliminated, the assembly accuracy is improved, the characteristics of the armatures are constant, and smooth movement can be achieved. Furthermore, an expensive and highly accurate device such as a linear guide that has been conventionally used is not necessary, and an inexpensive and easy-to-manufacture actuator can be manufactured. Then, by changing the material of the round projection, the thrust can be increased or decreased, and a single actuator can be used for many purposes.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional side view of a planar actuator according to a first embodiment of the present invention.
In the figure, 13 is a case, 14 is a core, 15 is a permanent magnet, 16 is a coil, 17 is a tooth, 18 is a protrusion, and 19 is a platen.
The case 13 is a square heavy box-like case composed of a bottom portion and a side wall portion standing from the bottom portion, and a square hole (a square hole in FIG. 3) having the same shape as the shape of the teeth 17 and the shape of the permanent magnet 15 on the bottom portion. 20), and the core 14 and the permanent magnet 15 are attached in alignment so that there is no gap in the square hole.
Further, projections 18 (see FIG. 3) are provided at the four corners of the bottom surface of the case 13, and the projections 18 are in contact with the platen 19 surface. Moreover, since the projection 18 is screwed to the case 13 as shown in FIG. 4, it can be freely replaced.
The concave surface of the platen 19 is filled with, for example, an epoxy resin so that the flat surface is uniform. In this way, as shown in FIG. 1, the linear guide used in the prior art is not necessary because the projection 18 is in contact with the platen 19 surface.
FIG. 2 is a plan view of FIG. 1, and among the plurality of armatures, the X-axis armatures 11a and 11b and the Y-axis armatures 12a and 12b generate thrust in the same direction. Can move in the direction.

  In the conventional planar actuator, the variation in the minute gap between the permanent magnet and the platen was large, but in the present invention, as described above, the teeth 17 shape and the permanent magnet 15 shape which are the same as the square holes of the case 13 are inserted, Since the surface facing the platen 19 surface of the permanent magnet 15 is the same as the bottom surface of the case 13, the minute gap between the permanent magnet 15 and the platen 19 surface can be kept constant, and the fluctuation of thrust is eliminated.

FIG. 3 is a bottom view of the case of the planar actuator according to the present invention.
As shown in the figure, the permanent magnet 15 can be easily aligned with the square hole 20 without gaps, and the permanent magnet 15 can be easily positioned, and the permanent magnet 15 does not protrude from the bottom surface of the case 13. Easy to carry.

FIG. 4 is an enlarged sectional view showing the protrusion 18 of the planar actuator.
In the figure, the protrusions 18 are provided at the four corners (FIG. 4) of the case 13 according to the present invention, the tips are tapered, and the contact friction resistance is reduced so that it can be moved with a slight thrust. Yes.
However, this has a limit, and this is solved by the protrusion according to the second embodiment. FIG. 5 is an enlarged cross-sectional view showing the protrusion of the planar actuator according to the second embodiment of the present invention. The protrusion 18 has a round tip protrusion, and further, a protrusion that rotatably incorporates a ball. In this way, if the tip of the protrusion 18 is configured as a ball (which can be freely rotated), the friction with the platen 19 surface is reduced and the thrust is not reduced. 7 and 111) are not required, and an actuator that is inexpensive and easy to manufacture can be manufactured.
Then, by changing the material of the round projection, the thrust can be increased or decreased, and a single actuator can be used for many purposes.

With the above configuration, an armature core manufacturing error and a permanent magnet misalignment error can be allowed, and thrust fluctuations can be eliminated. In addition, the permanent magnets are eliminated, the assembly accuracy is improved, the characteristics of the armatures are constant, and smooth movement can be achieved. Furthermore, an expensive and highly accurate device such as a linear guide that has been conventionally used is not necessary, and an inexpensive and easy-to-manufacture actuator can be manufactured. Then, by changing the material of the round projection, the thrust can be increased or decreased, and a single actuator can be used for many purposes.
Therefore, since a large support mechanism is not required, and it is small and inexpensive, it can be applied to a demonstration device for business use or a demonstration for an exhibition.

It is a sectional side view of the planar actuator which concerns on 1st Example of this invention. It is a top view of the planar actuator of this invention. It is a case bottom view of the plane actuator of the present invention. It is a fragmentary sectional view of the plane actuator of the present invention. It is a fragmentary sectional view of the plane actuator concerning the 2nd example of the present invention. It is a top view of the conventional planar actuator. It is a side view of the conventional planar actuator. It is an expanded sectional side view of the conventional planar actuator. It is a bottom view of the conventional planar actuator.

Explanation of symbols

11a, 11b X-axis armature 12a, 12b Y-axis armature 13 Case 14 Core 15 Permanent magnet 16 Coil 17 Teeth 18 Protrusion 19 Platen 20 Square hole

Claims (8)

A case composed of a bottom portion and a side wall portion standing from the bottom portion, and an armature disposed in the case, wherein the core is formed by laminating a core of E-shaped electromagnetic steel plates and teeth around the E-shaped core. In the plane actuator mover portion having one or more sets of armatures each including a rotated coil and a permanent magnet provided at the tip of each tooth,
A flat surface in which a plurality of holes having the same shape as the shape of the tips of the teeth or the shape of the permanent magnets are provided in the bottom of the case, and the tips of the teeth or the permanent magnets are disposed in the holes. Actuator mover.   The planar actuator movable part according to claim 1, wherein the hole is a square hole, and the tip of the tooth or the permanent magnet is disposed in the square hole without a gap.   The planar actuator movable part according to claim 1 or 2, wherein a plurality of the armatures are arranged in the case in a direction in which thrust directions of the armatures are orthogonal to each other.   The planar actuator according to any one of claims 1 to 3, wherein a planar platen having a planar portion formed in a lattice shape and the permanent magnet disposed on the platen so as to maintain a minute gap with the platen. A planar actuator comprising a movable part.   5. The planar actuator according to claim 4, wherein projections are provided at a plurality of locations on a surface of the bottom portion of the case facing the platen surface, and the projections are in contact with the platen surface.   6. The planar actuator according to claim 5, wherein the protrusion is a round tip protrusion.   The planar actuator according to claim 6, wherein the round tip protrusion is a protrusion that incorporates a ball rotatably.   The planar actuator according to claim 5, wherein the protrusion is replaceable.

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