JP2013530911A5 - - Google Patents
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- Publication number
- JP2013530911A5 JP2013530911A5 JP2013509053A JP2013509053A JP2013530911A5 JP 2013530911 A5 JP2013530911 A5 JP 2013530911A5 JP 2013509053 A JP2013509053 A JP 2013509053A JP 2013509053 A JP2013509053 A JP 2013509053A JP 2013530911 A5 JP2013530911 A5 JP 2013530911A5
- Authority
- JP
- Japan
- Prior art keywords
- opening
- plenum
- sheet
- width
- gas jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US33207310P | 2010-05-06 | 2010-05-06 | |
| US61/332,073 | 2010-05-06 | ||
| US13/037,789 US8685162B2 (en) | 2010-05-06 | 2011-03-01 | Removing a sheet from the surface of a melt using gas jets |
| US13/037,789 | 2011-03-01 | ||
| PCT/US2011/026790 WO2011139402A1 (en) | 2010-05-06 | 2011-03-02 | Removing a sheet from the surface of a melt using gas jets |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015084457A Division JP5961303B2 (ja) | 2010-05-06 | 2015-04-16 | ガスジェットを用いる融液の表面からのシートの取り出し |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013530911A JP2013530911A (ja) | 2013-08-01 |
| JP2013530911A5 true JP2013530911A5 (enExample) | 2014-03-13 |
| JP5771271B2 JP5771271B2 (ja) | 2015-08-26 |
Family
ID=44901074
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013509053A Expired - Fee Related JP5771271B2 (ja) | 2010-05-06 | 2011-03-02 | ガスジェットを用いる融液の表面からのシートの取り出し |
| JP2015084457A Expired - Fee Related JP5961303B2 (ja) | 2010-05-06 | 2015-04-16 | ガスジェットを用いる融液の表面からのシートの取り出し |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015084457A Expired - Fee Related JP5961303B2 (ja) | 2010-05-06 | 2015-04-16 | ガスジェットを用いる融液の表面からのシートの取り出し |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8685162B2 (enExample) |
| EP (2) | EP3305946B1 (enExample) |
| JP (2) | JP5771271B2 (enExample) |
| KR (2) | KR101783226B1 (enExample) |
| CN (1) | CN103025926B (enExample) |
| TW (1) | TWI550142B (enExample) |
| WO (1) | WO2011139402A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9957636B2 (en) * | 2014-03-27 | 2018-05-01 | Varian Semiconductor Equipment Associates, Inc. | System and method for crystalline sheet growth using a cold block and gas jet |
| US10526720B2 (en) * | 2015-08-19 | 2020-01-07 | Varian Semiconductor Equipment Associates, Inc. | Apparatus for forming crystalline sheet from a melt |
| US10179958B2 (en) * | 2016-09-16 | 2019-01-15 | Varian Semiconductor Equipment Associates, Inc | Apparatus and method for crystalline sheet growth |
| US11661672B2 (en) * | 2018-08-06 | 2023-05-30 | Carnegie Mellon University | Method for producing a sheet from a melt by imposing a periodic change in the rate of pull |
| US20220145494A1 (en) * | 2019-05-13 | 2022-05-12 | Leading Edge Crystal Technologies, Inc. | Exposure of a silicon ribbon to gas in a furnace |
| AU2020328504A1 (en) | 2019-08-09 | 2022-02-17 | Leading Edge Equipment Technologies, Inc. | Producing a ribbon or wafer with regions of low oxygen concentration |
| TW202136596A (zh) * | 2020-02-19 | 2021-10-01 | 美商先鋒設備科技公司 | 利用表面冷卻和熔體加熱之組合來控制在熔體表面形成之結晶片材的厚度和寬度 |
| TW202136597A (zh) | 2020-02-19 | 2021-10-01 | 美商先鋒設備科技公司 | 在熔體表面形成之結晶片材的主動邊緣控制 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2633961C2 (de) * | 1975-07-28 | 1986-01-02 | Mitsubishi Kinzoku K.K. | Verfahren zum Ziehen eines dünnen Halbleiter-Einkristallbandes |
| JPS5215485A (en) * | 1975-07-28 | 1977-02-05 | Toyo Silicon Kk | Process for growth of ribbon crystals by lateral pulling |
| JPS5261180A (en) | 1975-11-14 | 1977-05-20 | Toyo Shirikon Kk | Horizontal growth of crystal ribbons |
| US4221754A (en) * | 1977-12-29 | 1980-09-09 | Nowak Welville B | Method for producing solid ribbons |
| US4289571A (en) | 1979-06-25 | 1981-09-15 | Energy Materials Corporation | Method and apparatus for producing crystalline ribbons |
| US4627887A (en) * | 1980-12-11 | 1986-12-09 | Sachs Emanuel M | Melt dumping in string stabilized ribbon growth |
| US6019576A (en) * | 1997-09-22 | 2000-02-01 | Thut; Bruno H. | Pumps for pumping molten metal with a stirring action |
| JP2001122696A (ja) | 1999-10-21 | 2001-05-08 | Matsushita Seiko Co Ltd | リボンシリコンウェハの製造方法 |
| JP2002114597A (ja) * | 2000-10-06 | 2002-04-16 | Sharp Corp | 結晶シートの製造方法およびその結晶シートを用いた太陽電池 |
| JP2010504905A (ja) | 2006-09-28 | 2010-02-18 | ビーピー・コーポレーション・ノース・アメリカ・インコーポレーテッド | 結晶シリコン基板を製造するための方法及び装置 |
| US7855087B2 (en) | 2008-03-14 | 2010-12-21 | Varian Semiconductor Equipment Associates, Inc. | Floating sheet production apparatus and method |
| US7816153B2 (en) | 2008-06-05 | 2010-10-19 | Varian Semiconductor Equipment Associates, Inc. | Method and apparatus for producing a dislocation-free crystalline sheet |
| US8475591B2 (en) | 2008-08-15 | 2013-07-02 | Varian Semiconductor Equipment Associates, Inc. | Method of controlling a thickness of a sheet formed from a melt |
| ES2425885T3 (es) * | 2008-08-18 | 2013-10-17 | Max Era, Inc. | Procedimiento y aparato para el desarrollo de una cinta cristalina mientras se controla el transporte de contaminantes en suspensión en un gas a través de una superficie de cinta |
| JP5715579B2 (ja) | 2009-03-09 | 2015-05-07 | １３６６ テクノロジーズ インク． | 薄い半導体本体を溶融物質から作成するための方法及び装置 |
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2011
- 2011-03-01 US US13/037,789 patent/US8685162B2/en active Active
- 2011-03-02 JP JP2013509053A patent/JP5771271B2/ja not_active Expired - Fee Related
- 2011-03-02 CN CN201180031762.2A patent/CN103025926B/zh not_active Expired - Fee Related
- 2011-03-02 EP EP17201509.1A patent/EP3305946B1/en active Active
- 2011-03-02 EP EP11710924.9A patent/EP2567003B1/en not_active Not-in-force
- 2011-03-02 KR KR1020127030651A patent/KR101783226B1/ko not_active Expired - Fee Related
- 2011-03-02 WO PCT/US2011/026790 patent/WO2011139402A1/en not_active Ceased
- 2011-03-02 KR KR1020177026816A patent/KR101898905B1/ko not_active Expired - Fee Related
- 2011-03-03 TW TW100107128A patent/TWI550142B/zh not_active IP Right Cessation
-
2014
- 2014-04-01 US US14/242,566 patent/US9677193B2/en active Active
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2015
- 2015-04-16 JP JP2015084457A patent/JP5961303B2/ja not_active Expired - Fee Related