JP2013526777A5 - - Google Patents

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Publication number
JP2013526777A5
JP2013526777A5 JP2013510126A JP2013510126A JP2013526777A5 JP 2013526777 A5 JP2013526777 A5 JP 2013526777A5 JP 2013510126 A JP2013510126 A JP 2013510126A JP 2013510126 A JP2013510126 A JP 2013510126A JP 2013526777 A5 JP2013526777 A5 JP 2013526777A5
Authority
JP
Japan
Prior art keywords
structured
polyether
nonionic surfactant
type nonionic
binder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013510126A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013526777A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2011/034439 external-priority patent/WO2011142986A1/en
Publication of JP2013526777A publication Critical patent/JP2013526777A/ja
Publication of JP2013526777A5 publication Critical patent/JP2013526777A5/ja
Pending legal-status Critical Current

Links

JP2013510126A 2010-05-11 2011-04-29 化学機械平坦化用の界面活性剤を含む固定研磨パッド Pending JP2013526777A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US33335110P 2010-05-11 2010-05-11
US61/333,351 2010-05-11
PCT/US2011/034439 WO2011142986A1 (en) 2010-05-11 2011-04-29 Fixed abrasive pad with surfactant for chemical mechanical planarization

Publications (2)

Publication Number Publication Date
JP2013526777A JP2013526777A (ja) 2013-06-24
JP2013526777A5 true JP2013526777A5 (pt) 2014-06-19

Family

ID=44383031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013510126A Pending JP2013526777A (ja) 2010-05-11 2011-04-29 化学機械平坦化用の界面活性剤を含む固定研磨パッド

Country Status (7)

Country Link
US (1) US20130059506A1 (pt)
JP (1) JP2013526777A (pt)
KR (1) KR20130081229A (pt)
CN (1) CN102892553B (pt)
SG (1) SG185523A1 (pt)
TW (1) TWI532597B (pt)
WO (1) WO2011142986A1 (pt)

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Publication number Priority date Publication date Assignee Title
CN104822495A (zh) * 2012-09-21 2015-08-05 3M创新有限公司 向固定磨料幅材中引入添加剂以改善cmp性能
WO2014189086A1 (ja) * 2013-05-24 2014-11-27 Jsr株式会社 化学機械研磨パッドおよびそれを用いた化学機械研磨方法
US20150104940A1 (en) * 2013-10-11 2015-04-16 Air Products And Chemicals Inc. Barrier chemical mechanical planarization composition and method thereof
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US10821573B2 (en) 2014-10-17 2020-11-03 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US10875145B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US10399201B2 (en) 2014-10-17 2019-09-03 Applied Materials, Inc. Advanced polishing pads having compositional gradients by use of an additive manufacturing process
KR102436416B1 (ko) 2014-10-17 2022-08-26 어플라이드 머티어리얼스, 인코포레이티드 애디티브 제조 프로세스들을 이용한 복합 재료 특성들을 갖는 ｃｍｐ 패드 구성
US11351654B2 (en) 2014-11-26 2022-06-07 3M Innovative Properties Company Abrasive articles, assemblies, and methods with gripping material
SI3237147T1 (sl) * 2014-12-23 2021-01-29 Saint-Gobain Ceramics&Plastics, Inc. Oblikovani abrazivni deli in metoda oblikovanja istih
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
WO2016172450A1 (en) 2015-04-23 2016-10-27 The University Of Florida Research Foundation, Inc. Hybrid tool with both fixed-abrasive and loose-abrasive phases
CN113103145B (zh) 2015-10-30 2023-04-11 应用材料公司 形成具有期望ζ电位的抛光制品的设备与方法
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
USD850041S1 (en) * 2017-07-31 2019-05-28 3M Innovative Properties Company Scouring pad
WO2019032286A1 (en) 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
KR20220062419A (ko) 2017-10-04 2022-05-16 생-고뱅 어브레이시브즈, 인코포레이티드 연마 물품 및 이의 형성 방법
KR20210042171A (ko) 2018-09-04 2021-04-16 어플라이드 머티어리얼스, 인코포레이티드 진보한 폴리싱 패드들을 위한 제형들
US11331767B2 (en) 2019-02-01 2022-05-17 Micron Technology, Inc. Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods
US11851570B2 (en) * 2019-04-12 2023-12-26 Applied Materials, Inc. Anionic polishing pads formed by printing processes
USD934573S1 (en) * 2019-12-19 2021-11-02 3M Innovative Properties Company Sponge with surface pattern
US11813712B2 (en) 2019-12-20 2023-11-14 Applied Materials, Inc. Polishing pads having selectively arranged porosity
US11806829B2 (en) 2020-06-19 2023-11-07 Applied Materials, Inc. Advanced polishing pads and related polishing pad manufacturing methods
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ

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US5152917B1 (en) * 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
SG64333A1 (en) 1993-09-13 1999-04-27 Minnesota Mining & Mfg Abrasive article method of manufacture of same method of using same for finishing and a production tool
US5454844A (en) 1993-10-29 1995-10-03 Minnesota Mining And Manufacturing Company Abrasive article, a process of making same, and a method of using same to finish a workpiece surface
DE69511068T2 (de) 1994-02-22 2000-04-06 Minnesota Mining And Mfg. Co. Schleifartikel, verfahren zum herstellen derselben, und verfahren zum anwenden desselben bei endbearbeitung
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
JP3732267B2 (ja) * 1996-01-29 2006-01-05 大日本印刷株式会社 研磨テープの製造方法
US5692950A (en) 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
US6475253B2 (en) * 1996-09-11 2002-11-05 3M Innovative Properties Company Abrasive article and method of making
US5876268A (en) * 1997-01-03 1999-03-02 Minnesota Mining And Manufacturing Company Method and article for the production of optical quality surfaces on glass
US5833724A (en) * 1997-01-07 1998-11-10 Norton Company Structured abrasives with adhered functional powders
US5851247A (en) 1997-02-24 1998-12-22 Minnesota Mining & Manufacturing Company Structured abrasive article adapted to abrade a mild steel workpiece
FR2766106B1 (fr) * 1997-07-18 2001-09-07 Coatex Sa Utilisation d'un copolymere a structure tensio-active comme agent dispersant et/ou d'aide au broyage
US6139594A (en) * 1998-04-13 2000-10-31 3M Innovative Properties Company Abrasive article with tie coat and method
US6458018B1 (en) * 1999-04-23 2002-10-01 3M Innovative Properties Company Abrasive article suitable for abrading glass and glass ceramic workpieces
US20030017797A1 (en) * 2001-03-28 2003-01-23 Kendall Philip E. Dual cured abrasive articles
US7150771B2 (en) * 2004-06-18 2006-12-19 3M Innovative Properties Company Coated abrasive article with composite tie layer, and method of making and using the same
DK1868770T3 (da) * 2005-04-14 2010-11-22 Saint Gobain Abrasives Inc Fremgangsmåde til dannelse af en struktureret slibeartikel
US7497885B2 (en) 2006-12-22 2009-03-03 3M Innovative Properties Company Abrasive articles with nanoparticulate fillers and method for making and using them
US8083820B2 (en) * 2006-12-22 2011-12-27 3M Innovative Properties Company Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same
US8348723B2 (en) * 2009-09-16 2013-01-08 3M Innovative Properties Company Structured abrasive article and method of using the same

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