JP2013505557A - 薄膜バッテリ製造の方法及びそのための設備 - Google Patents
薄膜バッテリ製造の方法及びそのための設備 Download PDFInfo
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Abstract
【選択図】図2
Description
本出願は、2009年9月22日出願の米国特許仮出願第61/244,800号の恩典を請求し、その全内容は、これにより本明細書に引用により組み込まれる。
202 層スタック
204 基板
210 カソード層
212 アノード層
Claims (15)
- リチウムベース薄膜バッテリ製造のための設備レイアウトであって、
金属層又は半導体層を堆積させるための第1の処理ツールと、
活性層を堆積させるための第2の処理ツールと、
急速熱処理のための第3の処理ツールと、
誘電体層を堆積させる第4の処理ツールと、
反応性イオンエッチングを行うための第5の処理ツールと、
薄膜バッテリのための特殊層を堆積させるための第6の処理ツールと、
を含むことを特徴とするレイアウト。 - 前記第6の処理ツールは、リチウム又はリチウム含有層と、保護コーティングの両方の堆積を同じ処理ツール内で行うよう構成されていることを特徴とする請求項1に記載の設備レイアウト。
- 前記リチウム層は、リチウムアノード層であり、前記保護コーティングは、ポリマー層であることを特徴とする請求項2に記載の設備レイアウト。
- 前記第1の処理ツールは、第1のリチウムチャンバを含み、前記第2の処理ツールは、第2のリチウムチャンバを含むことを特徴とする請求項1に記載の設備レイアウト。
- 前記第6の処理ツールは、ポリマー層の堆積を行うよう構成されていることを特徴とする請求項4に記載の設備レイアウト。
- リソグラフィ露光作業及びレジスト除去作業を行うよう構成された第7の処理ツールセットと、
エッチング作業及び洗浄作業を行うよう構成された第8の処理ツールセットと、
その上に薄膜バッテリが製作される、ウェーハ又は基板のレーザスクライビングを行うよう構成された第9の処理ツールと、
を更に含むことを特徴とする請求項5に記載の設備レイアウト。 - 前記第2の処理ツールは、
カソード層の堆積のための第1のクラスターツールと、
電解質層の堆積のための第2のクラスターツールと、
1つ又はそれよりも多くのグローブボックスを含むリチウム蒸発ツールであって、該グローブボックスが該リチウム蒸発ツールを前記第1のクラスターツールと前記第2のクラスターツールとに連結する前記リチウム蒸発ツールと、
を含む、
ことを特徴とする請求項1に記載の設備レイアウト。 - リチウムベース薄膜バッテリ製造のための設備レイアウトであって、
活性層を堆積させるためのインライン処理ツールである第1の処理ツールと、
金属層又は半導体層を堆積させる第2の処理ツールと、
を含むことを特徴とするレイアウト。 - 前記第1の処理ツールは、複数のリチウム堆積チャンバを含むことを特徴とする請求項8に記載の設備レイアウト。
- 急速熱処理を行うよう構成された第3の処理ツールと、
ポリマー層の堆積を行うよう構成された第4の処理ツールと、
リソグラフィ露光作業及びレジスト除去作業を行うよう構成された第5の処理ツールセットと、
エッチング作業及び洗浄作業を行うよう構成された第6の処理ツールセットと、
その上に薄膜バッテリが製作されたウェーハのレーザスクライビングを行うよう構成された第7の処理ツールと、
を更に含むことを特徴とする請求項9に記載の設備レイアウト。 - 前記第1の処理ツールは、電解質層及びアノード層の堆積を行うよう構成され、
前記第2の処理ツールは、インライン処理ツールであり、
設備レイアウトが、
インライン処理ツールであり、カソード層を堆積させるように構成された第3の処理ツール、
を更に含む、
ことを特徴とする請求項8に記載の設備レイアウト。 - 前記第2の処理ツールは、複数のリチウム堆積チャンバを含み、
設備レイアウトが、
急速熱処理を行うよう構成された第4の処理ツールと、
ポリマー層の堆積を行うよう構成された第5の処理ツールと、
リソグラフィ露光作業及びレジスト除去作業を行うよう構成された第6の処理ツールと、
エッチング作業及び洗浄作業を行うよう構成された第7の処理ツールと、
レーザ融除を行うよう構成された第8の処理ツールと、
誘電体層を堆積させるように構成された第9の処理ツールと、
を更に含む、
ことを特徴とする請求項11に記載の設備レイアウト。 - 前記第2の処理ツールは、リチウム又はリチウム含有層の堆積を行うよう構成されたチャンバを含むことを特徴とする請求項8に記載の設備レイアウト。
- 前記第2の処理ツールは、インライン処理ツールであり、かつ前記第1の処理ツールに直接に連結され、
設備レイアウトが、
保護コーティング層を堆積させるためのインライン処理ツールである第3の処理ツール、
を更に含む、
ことを特徴とする請求項8に記載の設備レイアウト。 - 前記第1の処理ツールは、カソード層を堆積させるように構成され、
前記第2の処理ツールは、インライン処理ツールであり、かつ接点層を堆積させるように構成され、
設備レイアウトが、
電解質層とリチウム又はリチウム含有層とを堆積させるためのインライン処理ツールである第3の処理ツール、
を更に含む、
ことを特徴とする請求項8に記載の設備レイアウト。
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US24480009P | 2009-09-22 | 2009-09-22 | |
US61/244,800 | 2009-09-22 | ||
US12/882,002 US8464419B2 (en) | 2009-09-22 | 2010-09-14 | Methods of and factories for thin-film battery manufacturing |
US12/882,002 | 2010-09-14 | ||
PCT/US2010/049536 WO2011037868A2 (en) | 2009-09-22 | 2010-09-20 | Methods of and factories for thin-film battery manufacturing |
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Cited By (4)
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JP2013016286A (ja) * | 2011-06-30 | 2013-01-24 | Ulvac Japan Ltd | 薄膜リチウム二次電池形成装置 |
JP2014526768A (ja) * | 2011-06-17 | 2014-10-06 | アプライド マテリアルズ インコーポレイテッド | マスクレス電解質堆積による薄膜バッテリ製造 |
JP2017107867A (ja) * | 2011-06-17 | 2017-06-15 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 薄膜電池のマスクレス製造 |
JP2018500721A (ja) * | 2014-10-31 | 2018-01-11 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 電気化学デバイス層の堆積とレーザ処理の統合 |
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US8464419B2 (en) | 2009-09-22 | 2013-06-18 | Applied Materials, Inc. | Methods of and factories for thin-film battery manufacturing |
US9130238B2 (en) * | 2011-06-10 | 2015-09-08 | Applied Materials, Inc. | Methods of and hybrid factories for thin-film battery manufacturing |
KR101786850B1 (ko) | 2011-08-08 | 2017-10-18 | 어플라이드 머티어리얼스, 인코포레이티드 | 레이저 패터닝을 위해 통합된 차광층들 및 차열층들을 구비한 박막 구조물들 및 디바이스들 |
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GB2548361B (en) | 2016-03-15 | 2020-12-02 | Dyson Technology Ltd | Method of fabricating an energy storage device |
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GB2566473B (en) | 2017-09-14 | 2020-03-04 | Dyson Technology Ltd | Magnesium salts |
GB2569388B (en) | 2017-12-18 | 2022-02-02 | Dyson Technology Ltd | Compound |
GB2569390A (en) | 2017-12-18 | 2019-06-19 | Dyson Technology Ltd | Compound |
GB2569392B (en) | 2017-12-18 | 2022-01-26 | Dyson Technology Ltd | Use of aluminium in a cathode material |
GB2569387B (en) | 2017-12-18 | 2022-02-02 | Dyson Technology Ltd | Electrode |
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JP2014526768A (ja) * | 2011-06-17 | 2014-10-06 | アプライド マテリアルズ インコーポレイテッド | マスクレス電解質堆積による薄膜バッテリ製造 |
JP2017107867A (ja) * | 2011-06-17 | 2017-06-15 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 薄膜電池のマスクレス製造 |
JP2013016286A (ja) * | 2011-06-30 | 2013-01-24 | Ulvac Japan Ltd | 薄膜リチウム二次電池形成装置 |
JP2018500721A (ja) * | 2014-10-31 | 2018-01-11 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 電気化学デバイス層の堆積とレーザ処理の統合 |
Also Published As
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KR20120088727A (ko) | 2012-08-08 |
KR101433336B1 (ko) | 2014-08-22 |
JP2015187988A (ja) | 2015-10-29 |
CN104852090B (zh) | 2017-04-12 |
CN104852090A (zh) | 2015-08-19 |
TW201419622A (zh) | 2014-05-16 |
TWI451612B (zh) | 2014-09-01 |
TWI506837B (zh) | 2015-11-01 |
EP2481121A4 (en) | 2017-03-22 |
US20130255076A1 (en) | 2013-10-03 |
WO2011037868A3 (en) | 2011-07-21 |
CN102576899B (zh) | 2015-06-03 |
EP2481121A2 (en) | 2012-08-01 |
CN102576899A (zh) | 2012-07-11 |
JP6164754B2 (ja) | 2017-07-19 |
WO2011037868A2 (en) | 2011-03-31 |
JP6213858B2 (ja) | 2017-10-18 |
KR101718395B1 (ko) | 2017-03-21 |
US9350040B2 (en) | 2016-05-24 |
TW201133982A (en) | 2011-10-01 |
US20110126402A1 (en) | 2011-06-02 |
KR20140013070A (ko) | 2014-02-04 |
US8464419B2 (en) | 2013-06-18 |
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