JP2013249889A - Flow control valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a flow control valve capable of easily performing flow rate control.SOLUTION: In a flow control valve 10, a direct-acting support hole 28 for supporting a first valve element 40 for opening and closing a first valve port 30 of a relatively-large opening area in a direct-acting manner is demarcated into a first pressure chamber 28A and a second pressure chamber 28B by a piston 41. When a pilot pressing part 81 of a direct-acting shaft 80 presses and moves a pilot valve element 61 to open a valve port 60, differential pressure is generated between the first pressure chamber 28A and the second pressure chamber 28B, the first valve element 40 is moved to a valve opening position, and the first valve port 30 is opened. A second valve element 51 for opening and closing a second valve port 50 having a relatively-small opening area is provided on a tip of the direct-acting shaft 80.

Description

  The present invention relates to a flow control valve having two valve ports having different opening areas in the middle of a flow path through which a pressurized fluid flows and having two valve bodies that open and close the two valve ports.

  Conventionally, as this type of flow control valve, as shown in FIG. 20, a valve having a small valve port 1 having a relatively small opening area and a large valve port 2 having a relatively large opening area is known. In this flow control valve, a valve body housing chamber 6 that supports the large valve body 4 so as to be able to move linearly includes a front pressure chamber 6A that communicates with the inflow port by a piston portion 4A provided in the large valve body 4, and a rear pressure chamber. 6B. The front pressure chamber 6 </ b> A and the rear pressure chamber 6 </ b> B are always in communication with each other through an orifice 8 provided in the large valve body 4. The large valve port 2 opens at the surface facing the large valve body 4 in the front pressure chamber 6A and communicates with the outlet, and the small valve port 1 communicates with the large valve body 4 in the rear pressure chamber 6B. It opens at the facing surface and communicates with the outlet through the detour 7. A direct acting member 5 is disposed on the opposite side of the large valve body 4 with respect to the small valve opening 1, and the small valve opening 1 is opened and closed by the small valve body 3 provided integrally with the direct acting member 5. It is the composition which becomes. When the front end position of the movable stroke of the linear motion member 5 is arranged, both the small valve port 1 and the large valve port 2 are closed, and when the small valve body 3 is moved backward together with the linear motion member 5, the small valve Only mouth 1 opens. When the small valve port 1 is opened, a differential pressure is generated in the front pressure chamber 6A and the rear pressure chamber 6B by the orifice 8, and when the differential pressure increases to some extent, the large valve body 4 moves to the rear pressure chamber 6B side, Valve port 2 opens. Thereby, in this flow control valve, as shown in FIG. 21, when the linear motion member 5 is arranged on the front end side of the movable stroke, a relatively small flow rate of fluid is caused to flow according to the position of the linear motion member 5. When the linear motion member 5 is positioned on the rear end side of the movable stroke, a relatively large flow rate of fluid can be flowed (see, for example, Patent Document 1).

Japanese Patent No. 2645854 (2nd page, right column, lines 35-50, FIG. 4, FIG. 5 and FIG. 6)

  However, the flow rate control valve described above has a problem that when the small valve body 3 is moved backward, the opening timing of the large valve port 2 varies (see FIG. 21), which makes it difficult to control the flow rate.

  This invention is made | formed in view of the said situation, and aims at provision of the flow control valve which can perform flow control easily.

  In order to achieve the above object, the flow rate control valve (10) according to the first aspect of the present invention comprises an inlet (26) for taking in pressurized fluid inside and an outlet (27) for discharging it outside. A first valve body (40) for opening and closing a first valve port (30) having a relatively large opening area through which the pressurized fluid can pass, and a pressurized fluid. In the flow control valve (10) provided with the second valve body (51) for opening and closing the second valve port (50) having a relatively small opening area that can pass through, the flow control valve (10) is formed inside the support base (20). A linear motion support hole (28) extending linearly and having an inflow port (26) communicated with one end of the linear motion support hole (28), and the linear motion support hole (28) is assembled so as to be linearly movable. A front pressure chamber (28A) communicating with the inlet (26) on one end side, and a rear pressure chamber (28B) on the other end side And a piston part (41) partitioned into a piston part (41) and projecting from the piston part (41) to the front pressure chamber (28A) side, or a part of the piston part (41) facing the front pressure chamber (28A). The first valve body (40) having one valve body (42) and the front pressure chamber (28A) are opened at a surface (28AM) facing the first valve body (42), and the outlet ( A first valve port (30) that communicates with or serves as an outflow port (27), and a first valve body biasing means (43) that biases the first valve body (40) to the closed position. A central hole (40A) formed through the central portion of the first valve body (40) and one end of the central hole (40A), and a rear pressure chamber (28B) of the first valve body (40). ) And the second valve port (50) opened on the surface (42M) facing the opposite side, and formed in the first valve body (40), and an intermediate portion of the center hole (40A) A communication hole (40B) communicating with the pressure chamber (28A), and a linear motion shaft (80) which receives power from the drive source (13) and linearly moves and has a tip portion accommodated in the center hole (40A). And the second valve body (51) provided at the tip of the linear motion shaft (80) and the rear hole (28B) side of the communication hole (40B) in the center hole (40A), and the orifice (44 ) Between the front pressure chamber (28A) and the rear pressure chamber (28B), and the first valve body (40) in the rear pressure chamber (28B). A pilot valve port (60) that opens at the opposing surface (28B), is coaxially arranged with the linear motion support hole (28), and has an opening area smaller than that of the first valve port (30), and an outlet port (27) A second pressure introduction path (65) capable of communicating with the rear pressure chamber (28BM) through the pilot valve port (60); A pilot valve body (61) capable of opening and closing the pilot valve port (60) and a pilot valve body (61) having a ring shape that is fitted in an intermediate portion of the linear motion shaft (80) so as to be linearly movable; The pilot valve body urging means (62) for urging the valve closed position and the space between the outer surface of the linear motion shaft (80) and the inner surface of the pilot valve body (61) are narrowed or sealed by the orifice (44). And a fluid movement restricting means (63) for restricting the movement of the pressurized fluid between the outlet (27) and the rear pressure chamber (28B) when the pilot valve port (60) is closed, and a linear motion shaft. (80) projecting laterally from the intermediate portion, and the linear motion shaft (80) abuts the pilot valve body (61) on the way from one end to the other end of the linear motion range to bring the pilot valve body (61) Pilot pressing part that moves from the valve closing position to the valve opening position ( Characterized in place with 1) and, the.

  The flow rate control valve (10V) according to the invention of claim 2 is a support base having an inflow port (26) for taking in pressurized fluid inside and an outflow port (27) for discharging the pressurized fluid to the outside. 20), the first valve body (40V) for opening and closing the first valve port (30) having a relatively large opening area through which the pressurized fluid can pass, and the opening area through which the pressurized fluid can pass is relatively In a flow control valve (10V) having a second valve body (51) for opening and closing a small second valve port (50V), it is formed inside the support base (20) and extends linearly, A linear motion support hole (28) with which the inflow port (26) communicates, and a linear motion support hole (28) are assembled so as to be capable of direct motion, and the linear motion support hole (28) communicates with the inflow port at one end side thereof. A piston portion (41) that partitions the front pressure chamber (28A) and the rear pressure chamber (28B) on the other end side; A first valve body portion (42) that protrudes from the piston portion (41) to the front pressure chamber (28A) side or is disposed in a portion of the piston portion that faces the front pressure chamber (28A). The valve body (40V) and the front pressure chamber (28A) open at the surface (28AM) facing the first valve body (42) and communicate with the outlet (27) or the outlet (27). The first valve port (30) serving as the first valve body, the first valve body urging means (43) for urging the first valve body (40V) to the closed position, the front pressure chamber (28A) and the rear pressure chamber (28B) ) Between the outlet (27) and the rear pressure chamber (28B) smaller than the first valve opening (30). A second pressure introduction path (65) capable of communicating through the pilot valve port (60) having an open area and the pilot valve port (60) are opened and closed. The pilot valve body (61), the pilot valve body biasing means (62) for biasing the pilot valve body (61) to the closed position, and the linear motion receiving power from the drive source (13). A pilot pressing portion (81) that abuts the pilot valve body (61) on the way from one end to the other end of the possible range to press and move the pilot valve body (61) from the valve closing position to the valve opening position, and a second valve The linear drive member (80) having the body (51) and the introduction formed on the support base (20) and opened at a position different from the first valve port (30) on the inner surface of the front pressure chamber (28A). A valve body accommodating portion (56) having an opening (55A) at one end and the other end forming an outlet (27) and accommodating the second valve body (51) in an intermediate portion so as to be capable of direct movement, and the valve body A small flow discharge having a second valve port (50V) arranged at the end of the housing part (56) It is characterized in that it is provided with a path (55).

  According to a third aspect of the present invention, in the flow control valve (10V) according to the second aspect, the linear movable member (80B) having the second valve body (51) is linearly driven having the pilot pressing portion (81). The member main body (80A) supports the linear drive member (80) so as to be linearly movable in the same direction of the linear motion, and the linear movable member urging means (82) linearly moves the linear movable member (80B). A linear drive member (80) having a structure biased toward the second valve port (50) with respect to the drive member main body (80A) is provided, and the linear movable member (80B) is integrated with the linear drive member main body (80A). The pilot pressing portion (81) is moved to the pilot valve body (61) while the second valve body (51) is moved from the valve opening position to the valve closing position. The second valve body (51) is placed in the closed position while maintaining a separated state. When the second valve port (50) and the pilot valve port (60) are both closed, the second valve body (51) reaches the valve closing position, and only the linear drive member main body (80A) is in the second state. While moving to the valve port (50) side, the pilot pressing part (81) contacts the pilot valve body (61) so that the pilot valve body (61) is pressed and moved from the valve closing position to the valve opening position. It has the characteristics in the structure.

  According to a fourth aspect of the present invention, in the flow control valve (10) according to the first or second aspect, the second valve body (51) from the closed state to a position where the second valve port (50) reaches a constant valve opening degree. ) Is moved, the pilot pressing part (81) approaches the pilot valve body (61) while maintaining a separated state, and the second valve port (50) opens further than a certain valve opening degree. During the movement of the second valve body (51), the pilot pressing portion (81) contacts the pilot valve body (61), and the pilot valve body (61) is pressed and moved from the valve closing position to the valve opening position. It has the characteristic in the place comprised in this way.

  According to a fifth aspect of the present invention, in the flow rate control valve (10V) according to the second aspect, the power source (13) receives power from the drive source (13) and linearly moves and extends in the direction of linear movement, and the second valve body (51 ) And a linear drive member (80) as a linear drive member (80) having a pilot pressing portion (81) projecting laterally from the intermediate portion, and provided in the middle of the second pressure introduction path (65). A sub-rear pressure chamber (66) through which the linear motion shaft (80) passes, a pilot valve port (60) disposed at one end of the sub-rear pressure chamber (66), and an intermediate portion of the linear motion shaft (80). A pilot valve body (61) capable of opening and closing the pilot valve port (60) in a ring shape that is fitted so as to be linearly movable, an outer surface of the linear motion shaft (80), and the pilot valve body (61) The gap between the sides is squeezed from or sealed with the orifice (44). It is characterized in that it is provided with a fluid movement restricting means (63) for restricting the movement of the pressurized fluid between the outlet (27) and the rear pressure chamber (28B) when the lot valve port (60) is closed. Have.

  According to a sixth aspect of the present invention, in the flow control valve (10) according to the first or fifth aspect, the second valve port (50) side is configured from the axial intermediate portion of the linear motion shaft (80). The pilot shaft has a tip shaft portion (80B) having a two-valve body (51) at the tip and an intermediate portion in the axial direction of the linear motion shaft (80) opposite to the second valve port (50). A proximal end shaft portion (80A) having a support shaft (80B) so that the distal end shaft portion (80B) can move linearly, and a second valve port (50) with respect to the proximal end shaft (80A). ) Side urging means (82), and the distal end shaft portion (80B) is integrated with the proximal end shaft portion (80A) to move toward the second valve port (50) side. While the two-valve body (51) moves from the valve-opening position to the valve-closing position, the pilot pressing portion (81 When the second valve body (51) is placed in the closed position while maintaining a state of being separated from the pilot valve body (61), the second valve port (50) and the pilot valve port ( 60) is closed, and only the proximal shaft portion (80A) moves to the second valve port (50) side after the second valve body (51) reaches the valve closing position, and the pilot pressing portion (81 ) Comes into contact with the pilot valve body (61), and the pilot valve body (61) is configured to be pressed and moved from the valve closing position to the valve opening position.

  According to a seventh aspect of the present invention, in the flow control valve (10) according to any one of the first to sixth aspects, the front pressure chamber (28A) is stretched in an intermediate portion of the linear motion support hole (28). ) And the rear pressure chamber (28B) are separated from each other in an airtight state, and the piston portion (41) includes a diaphragm (29) fixed in a state in which direct movement is allowed.

  The invention according to claim 8 is the flow rate control valve (10V) according to claim 2, wherein the outlet port (27A) for discharging the pressurized fluid that has passed through the first valve port (30), and the second valve port It is characterized in that an outlet (27B) for discharging the pressurized fluid that has passed through (50V) is provided separately.

  The invention of claim 9 is the flow rate control valve (10V) according to claim 2, wherein the pressurized fluid that has passed through the first valve port (30) and the pressurized fluid that has passed through the second valve port (50V) Is discharged from the common outlet (27).

  In the flow control valve (10, 10V) of the present invention, the front pressure chamber (28A) and the rear pressure chamber (28B) partitioned by the piston portion (41) of the first valve body (40) are the first pressure introduction. Since the passages (46, 46V) are always in communication, when the pilot valve port (60) is closed, the internal pressures of the front pressure chamber (28A) and the rear pressure chamber (28B) become equal, and the first valve body The first valve body (40) is disposed at the valve closing position by the biasing means (43). Then, when the pilot pressing portion (81) presses and moves the pilot valve body (61) by moving the linear motion shaft (80) or the linear motion drive member (80), the pilot valve port (60) opens, The pressurized fluid in the pressure chamber (28B) escapes to the outlet (27) through the second pressure introduction path (65). Here, since the front pressure chamber (28A) and the rear pressure chamber (28B) communicate with each other through the orifices (44, 44V), the internal pressure of the rear pressure chamber (28B) is greater than the internal pressure of the front pressure chamber (28A). The first valve body (40) is pushed to the valve opening position by this differential pressure, and the first valve port (30) is opened. That is, the first valve port (30) having a relatively large opening area is opened and closed due to the opening and closing of the pilot valve port (40). The second valve port (50) having a relatively small opening area is disposed so as to communicate with the front pressure chamber (28A) and the outlet (27), and is connected to the linear motion shaft (80) or the linear motion drive member (80). ) Is opened and closed by the second valve body (51) provided. As described above, in the flow control valve (10, 10V) of the present invention, in addition to the pilot valve port (60) for opening and closing the first valve port (30), a relatively small flow rate of pressurized fluid is allowed to flow. The second valve port (50) is provided, and the orifice (44) is not included in the flow path through which the pressurized fluid flows when the second valve port (50) is opened. According to this configuration, the orifice (44) can be made small without affecting the flow rate when the second valve port (50) is opened, so at the moment when the pilot valve body (61) is slightly opened. By moving the first valve body (40), it is possible to easily control the flow rate while suppressing variations in the opening timing of the first valve port (30). Moreover, according to the structure of this invention, since the opening area of a pilot valve opening (60) can be made small in connection with making an orifice (44) small, it accompanies valve opening operation of a pilot valve opening (40). The driving force can be reduced.

  Moreover, according to the structure of this invention, a 2nd valve body (51) and a pilot valve body (61) can be moved with a common drive source (13). Here, the second valve body (51) and the pilot valve body (61) are configured to move the second valve body (51) from the valve opening position to the valve closing position as in the inventions of claims 3 and 6. When the pilot valve port (60) is maintained in the closed state and the second valve port (51) is disposed at the valve-closed position, the second valve port (50, 50V) and the pilot valve port (60) are both The pilot valve body (61) is moved from the closed position while only the linear motion shaft (80) or the linear motion drive member (80) moves after the second valve body (51) reaches the closed position. The second valve body (51) may be configured to be pushed and moved to the valve opening position, and the second valve port (50, 50V) may be opened from the valve closing position to the constant valve opening as in the invention of claim 4. The pilot valve body (61) is pushed and moved from the closed position to the open position after being moved to a position where It may be. According to the configuration of claims 3 and 6, only one of the first valve port (30) and the second valve port (50, 50V) having different opening areas can be opened, and two kinds of flow rate changes can be made. It becomes possible to control the flow rate by arbitrarily selecting the characteristics. Moreover, according to the structure of Claim 4, only the valve opening degree of a 2nd valve port (50, 50V) is adjusted and compared until the 2nd valve port (50, 50V) becomes a fixed valve opening degree. After controlling the small flow rate and the second valve port (50, 50V) reaches a certain valve opening, the first valve port (30) can be opened to allow a relatively large flow rate of fluid to flow.

  Here, the linear motion support hole (28) and the piston portion (41) of the first valve body (40) reduce the gap between the inner surface of the linear motion support hole (28) and the piston portion (41). Or a configuration in which a piston ring slidably contacting the inner surface of the linear motion support hole (28) may be provided on the outer peripheral portion of the piston portion (41). As in the seventh aspect of the present invention, the piston portion (41) is stretched between the front pressure chamber (28A) and the rear pressure chamber (28B) so as to be sealed in an airtight state. May have a configuration including a diaphragm (29) that is fixed in a state in which linear motion is allowed. In addition, according to the structure of Claim 7, a piston part (41) can be linearly moved smoothly, without impairing the airtightness of a front pressure chamber (28A) and a back pressure chamber (28B).

  Further, the second valve port (50, 50V) is provided in the center hole (40A) formed through the central portion of the first valve body (40) as in the first aspect of the invention. (40) may be configured to open on the surface facing the first valve port (30), or the first valve port on the inner surface of the pre-pressure chamber (28A) as in the invention of claim 2. A small flow rate discharge path (55) having an introduction opening (55A) opened at a position different from that of (30) at one end and the other end forming an outlet (27); The structure arrange | positioned at the edge part of the valve body accommodating part (56) which accommodated the 2nd valve body (51) in the part so that linear movement was possible may be sufficient. Here, in the first aspect of the present invention, the pilot valve body (61) further has a ring shape that is movably fitted in the intermediate portion of the linear motion shaft (80), and the first valve body (40) The center hole (40A) accommodates the tip of the linear motion shaft (80), that is, the first valve body (40), the second valve body (51) and the pilot valve body (61) are linear motion shafts. (80) Since it is the structure arrange | positioned coaxially, the flow control valve (10) can be made compact.

  In the invention of claim 2 as in the invention of claim 5, a sub post pressure chamber (66) through which the linear motion shaft (80) passes is provided in the middle of the second pressure introduction path (65). The pilot valve port (60) is disposed at one end of the sub post-pressure chamber (66), the second valve body (51) is provided at the tip of the linear motion shaft (80), and the pilot valve body (61) is directly A ring-shaped configuration that is fitted in an intermediate portion of the moving shaft (80) so that it can move directly, that is, the second valve body (51) and the pilot valve body (61) are coaxial with the linear moving shaft (80). If it is set as the structure arrange | positioned in, the flow control valve (10V) will be made compact.

  Further, according to the invention of claim 2, as in the invention of claim 8, the outlet (27) for discharging the pressurized fluid that has passed through the first valve port (30), and the second valve port ( 50) and the outlet (27) for discharging the pressurized fluid that has passed through may be provided separately, or the first valve port (30) may be provided as in the configuration of claim 9. The pressurized fluid that has passed through and the pressurized fluid that has passed through the second valve port (50) can also be discharged from the common outlet (27).

1 is a side sectional view of a flow control valve according to a first embodiment of the present invention. Side sectional view of the flow control valve with both the first valve port and the second valve port closed Side sectional view of the flow control valve with the second valve port open Side sectional view of flow control valve with pilot valve open Side sectional view of the flow control valve with the first valve port open Side sectional view around the first valve element (A) Side sectional view around pilot valve body, (B) Enlarged side sectional view of pilot valve body Graph showing flow rate change characteristics Side sectional view of the flow control valve according to the second embodiment Side sectional view around the front end of the linear shaft Side cross-sectional view around the pilot valve Side sectional view of the flow control valve according to the third embodiment Graph showing flow rate change characteristics Side sectional view of the flow control valve according to the fourth embodiment Side sectional view of flow control valve according to modification Side sectional view of flow control valve according to modification Side sectional view of the first valve body according to the modification. Side sectional view of the first valve body according to the modification. (A) Side sectional view around pilot valve body according to modification, (B) Enlarged view Side sectional view of a conventional flow control valve Graph showing flow rate change characteristics of conventional flow control valve

[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 1, the flow control valve 10 of this embodiment includes a stepping motor 13 as a drive source at one end of a columnar support base 20 extending vertically. In the following description, the side of the flow control valve 10 that includes the stepping motor 13 is referred to as “rear side”, and the opposite side is referred to as “front side”.

  The stepping motor 13 is provided with a ring-shaped stator side field portion 15 fitted and fixed to the outside of a cylindrical case 14 that extends coaxially with the support base 20, while the rotor side field portion 16 is provided inside the cylindrical case 14. (Permanent magnet) is rotatably accommodated. The linear motion shaft 80 is fixed in a state of passing through the center of the rotor-side field magnet portion 16 and extends coaxially with the support base 20.

  A helical guide 17 formed by winding a wire in a spiral shape is fixed to the rear portion of the linear shaft 80 from the rotor side field portion 16 so as to be integrally rotatable, and an engagement ring 18 is engaged with the helical guide 17. Match. The engagement ring 18 has a ring shape that fits in a part of a gap between adjacent wires in the axial direction of the spiral guide 17, and includes a contact arm 18 </ b> A projecting laterally. A stopper shaft 19 is suspended from the lid body 14 </ b> A that closes the rear end portion of the cylindrical case 14 in parallel with the linear motion shaft 80. Then, in a state where the contact arm 18A of the engagement ring 18 is in contact with the stopper shaft 19, the rotor side field portion 16 rotates, so that the engagement ring 18 rotates relative to the spiral guide 17, The linear movement shaft 80 linearly moves in the front-rear direction with respect to the cylindrical case 14. The linear motion shaft 80 enters a central portion inside the support base 20, and moves forward and backward in the support base 20 by driving the stepping motor 13.

  As shown in FIG. 2, one side of the support base 20 is provided with an inlet 26 for introducing a pressurized fluid and an outlet 27 for discharging. Further, a linear motion support hole 28 extending linearly on the central axis of the support base 20 is provided inside the support base 20, and the inlet 26 communicates with the front end portion of the linear motion support hole 28 from the side. doing.

  The linear motion support hole 28 supports the first valve body 40 so as to be linearly movable along the central axis of the support base 20. The first valve body 40 includes a piston portion 41 fitted to the inner surface of the linear motion support hole 28, and a first valve main body portion 42 that protrudes forward from the center portion of the piston portion 41 and has a front end portion that extends laterally. The piston portion 41 divides the linear motion support hole 28 into a front pressure chamber 28A located on the front side and communicating with the inflow port 26 and a rear pressure chamber 28B located on the rear side.

  As shown in FIG. 5, a first valve port 30 communicating with the outflow port 27 is opened in the facing surface 28AM facing the first valve body 42 in the pre-pressure chamber 28A. And the 1st valve body 40 opens and closes the 1st valve port 30 because the front-end part of the 1st valve main-body part 42 contacts / separates the opening edge part of the 1st valve port 30 (FIG. 4). And FIG. 5). Further, a first compression coil spring 43 (corresponding to the “first valve body urging means” of the present invention) is provided between the piston portion 41 and the opposed surface 28BM of the rear pressure chamber 28B facing the piston portion 41. Accordingly, the first valve body 40 is biased to the valve closing position.

  Specifically, the rear end portion of the rear pressure chamber 28B has a diameter-reduced portion near the center in the radial direction of the support base 20, and the piston portion 41 has a central protrusion 41A that protrudes rearward from the center portion. I have. The first compression coil spring 43 is positioned by fitting one end inside the reduced diameter portion of the rear pressure chamber 28B and fitting the other end outside the central protrusion 41A. ing.

  As shown in FIG. 4, a pilot valve port 60 having an opening area smaller than that of the first valve port 30 is opened in a portion of the opposing surface 28BM of the rear pressure chamber 28B disposed on the central axis of the support base 20. The rear pressure chamber 28B communicates with the outflow port 27 through the pilot valve port 60. Specifically, in the support base 20, a pressure relief channel 65 (the “first” in the present invention) communicates with the outlet 27 through the side of the linear motion support hole 28 from the rear side of the linear motion support hole 28. The pilot valve port 60 is formed through the partition wall 65H between the decompression flow path 65 and the rear pressure chamber 28B. The linear motion shaft 80 described above penetrates the pressure relief passage 65 and the pilot valve port 60 and enters the linear motion support hole 28.

  A pilot valve body 61 is provided in the rear pressure chamber 28B. The pilot valve body 61 has an annular shape and is fitted to the intermediate portion of the linear motion shaft 80 so as to be linearly movable. The pilot valve body 61 is urged toward the pilot valve port 60 by a second compression coil spring 62 (corresponding to the “pilot valve urging means” of the present invention) provided between the piston portion 41. Specifically, the second compression coil spring 62 is fitted at one end to a center protrusion 61T formed at the end of the pilot valve body 61 opposite to the pilot valve port 60, and the center protrusion of the piston portion 41. Positioning is performed by fitting the other end to a positioning protrusion 41B formed to protrude from 41A.

  Further, the linear movement shaft 80 is provided with a pilot pressing portion 81 that protrudes laterally and can be brought into contact with the rear end portion of the pilot valve body 61. As shown in the change from FIG. 2 to FIG. The pilot valve body 61 is pressed by the pilot pressing portion 81 and can move forward while the shaft 80 is moving toward the front end position of the linear movement range. The pilot valve port 60 is opened and closed by the rear end portion of the pilot valve body 61 coming into contact with and separating from the opening edge of the pilot valve port 60.

  As shown in FIG. 7 (A), the pilot valve body 61 is provided with a packing 63 (corresponding to “fluid movement restricting means”) that forms an annular shape and seals the outer surface of the linear motion shaft 80. When the pilot valve port 60 is closed, the pressurized fluid in the rear pressure chamber 28 </ b> B does not escape to the decompression flow path 65.

  Specifically, the pilot valve body 61 has a structure in which a packing 63 is sandwiched between a valve body portion 61A constituting the pilot valve port 60 side and a valve body support portion 61B constituting the side opposite to the pilot valve port 60. It has become. As shown in an enlarged view in FIG. 7B, the valve body 61A and the valve body support 61B have a gap between the linear motion shaft 80 and the packing 63 has an inner diameter outside the linear motion shaft 80. The inner edge portion is slidable on the outer surface of the linear motion shaft 80. Thereby, even if the linear motion shaft 80 moves in a state where the pilot valve body 61 is disposed at the valve closing position, the space between the rear pressure chamber 28B and the pressure relief passage 65 is sealed.

  As shown in FIG. 6, the distal end portion of the linear motion shaft 80 is accommodated in a central hole 40 </ b> A that penetrates the central portion of the first valve body 40. The rear end portion of the center hole 40 </ b> A is an orifice 44 that narrows the gap with the outer surface of the linear motion shaft 80. Further, the first valve body 40 is provided with a side hole 40B (corresponding to the “communication hole” of the present invention) extending laterally from an intermediate portion of the center hole 40A, and through the side hole 40B. The central hole 40A communicates with the pre-pressure chamber 28A. That is, the rear pressure chamber 28B communicates with the front pressure chamber 28A via the orifice 44.

  Specifically, the inner surface of the center hole 40A is provided with collars 45 and 45 for guiding the linear motion shaft 80 at two positions, the rear end position and the front end position. Side holes 40 </ b> B and 40 </ b> B extend laterally from the sandwiched region and the region disposed in front of the front collar 45. In the center hole 40A, the gap between the rear collar 45 and the linear movement shaft 80 is the orifice 44 described above. Further, a portion of the center hole 40A on the rear side of the side hole 40B disposed on the rear side is the first pressure introduction path 46 according to the present invention.

  Further, in the present embodiment, the front pressure chamber 28A and the rear pressure chamber 28B are isolated in an airtight state by a diaphragm 29 stretched at an intermediate portion of the linear motion support hole 28. Specifically, the diaphragm 29 has an annular shape, and an outer portion thereof is fixed to a wall portion constituting the inner surface of the linear motion support hole 28 in the support base 20, and an inner portion thereof is fixed to the piston portion 41. Is fixed to the central portion through an annular gap formed from the outer side surface toward the center, so that the pressurized fluid in the front pressure chamber 28A is placed between the inner side surface of the linear motion support hole 28 and the piston portion 41. Through this gap, it does not leak into the rear pressure chamber 28B.

  A second valve port 50 opened at the front end surface 42M of the first valve main body 42 is provided at the front end portion of the center hole 40A, and the center hole 40A passes through the second valve port 50 and the outlet 27 (see FIG. 1). Communicate with. The opening area of the second valve port 50 is smaller than the opening area of the pilot valve port 60, and is opened and closed by a second valve body 51 provided at the tip of the linear motion shaft 80 (FIG. 2 and FIG. 3).

  Specifically, as shown in FIG. 2, the linear motion shaft 80 includes a proximal shaft portion 80A having the pilot pressing portion 81 and a distal shaft portion supported by the proximal shaft portion 80A so as to be linearly movable. 80B and a third compression coil spring 82 that urges the distal shaft portion 80B forward with respect to the proximal shaft portion 80A, and a second valve body 51 is provided at the distal end of the distal shaft 80B.

  Specifically, the front end portion of the proximal shaft 80A has a cylindrical shape and accommodates the rear end portion of the distal shaft 80B. A flange projecting laterally is provided at the rear end portion of the distal shaft 80B, and a third compression coil spring 82 is disposed between the flange and the inner surface of the cylindrical portion of the proximal shaft 80A. Further, as shown in FIG. 6, a locking collar 83 is press-fitted into the front end of the cylindrical portion of the proximal shaft 80A to prevent the distal shaft 80B from coming off.

  The second valve body 51 has a conical shape, and the center hole 40A is narrowed in a tapered shape on the front side from the position where the front collar 45 is disposed. A portion of the center hole 40 </ b> A in front of the tapered portion is the second valve port 50.

  This completes the description of the configuration of the flow control valve 10 of the present embodiment. Next, the effect of the flow control valve 10 of this embodiment is demonstrated. The flow rate control valve 10 can connect a pipe or the like to the inlet 26 to allow the pressurized fluid to flow into the support base 20, and can connect the pipe or the like to the outlet 27 to discharge the pressurized fluid to the outside. Leave it in a state. Then, by applying a pulse signal to the stepping motor 13 (see FIG. 1) of the flow control valve 10, the valve opening degree is changed to control the flow rate of the fluid flowing from the pipe to the other pipe. Specifically, when a pulse signal is applied to the stepping motor 13, the linear motion shaft 80 rotates according to the number of pulses of the pulse signal and moves forward or backward in the support base 20. Thereby, the position of the linear motion shaft 80 can be controlled to an arbitrary linear motion position.

  When the linear movement shaft 80 is disposed at an intermediate position within the linear movement possible range, as shown in FIG. 2, the pilot pressing portion 81 of the linear movement shaft 80 is separated rearward from the pilot valve body 61, and is represented in FIG. However, the locking collar 83 of the proximal shaft portion 80A of the linear motion shaft 80 is in a state of being separated forward from the flange of the distal shaft portion 80B. Then, the pilot valve body 61 is biased rearward by the second compression coil spring 62, the pilot valve port 60 is closed, and the second valve body 50 is biased forward by the third compression coil spring 82 (see FIG. 6). Thus, the second valve port 50 is closed.

  Here, pressurized fluid is introduced into the front pressure chamber 28A from the inlet 26, and the pressurized fluid in the front pressure chamber 28A passes through the side hole 40B, the center hole 40A, and the orifice 44 of the first valve body 40. It passes through and is introduced into the rear pressure chamber 28B. When the pilot valve port 60 is closed, the internal pressure of the front pressure chamber 28A is equal to the internal pressure of the rear pressure chamber 28A, and the portion of the first valve body 40 away from the central portion has a front pressure chamber. The internal pressure received from the pressurized fluid in 28A and the internal pressure received from the pressurized fluid in the back pressure chamber 28B cancel each other. As a result, the first valve body 40 is urged forward by the differential pressure between the internal pressure received from the pressurized fluid in the rear pressure chamber 28B at the center and the internal pressure received from the pressurized fluid on the outlet 27 side. . Further, the first valve body 40 is also urged forward by the first compression coil spring 43, thereby closing the first valve port 30. That is, when the linear motion shaft 80 is disposed at the intermediate position, the flow rate of the fluid passing through the flow rate control valve 10 becomes “0” (see R2 portion in FIG. 8). In the present embodiment, in addition to the first compression coil spring 43, the first valve body 40 is caused by a differential pressure between the front pressure chamber 28A and the rear pressure chamber 28B and a differential pressure between the outlet 27 and the front pressure chamber 28A. Since the valve is pressed to the valve closing position, the sealing performance of the first valve port 30 is increased. These differential pressures also correspond to the “first valve body urging means” of the present invention.

  When the linear motion shaft 80 is retracted from the intermediate position, as shown in FIG. 3, the proximal shaft portion 80A (locking collar 83) of the linear motion shaft 80 is locked to the distal shaft portion 80B, and the second The valve body 51 is pulled backward. As a result, the second valve body 51 is separated from the opening edge of the second valve port 50, the second valve port 50 is opened, and the fluid flows from the inflow path 26 to the outflow port 27. In this state, the internal pressure of the front pressure chamber 28A is lower than the internal pressure of the rear pressure chamber 28B, the first valve body 41 is pushed forward, and the first valve port 30 remains closed. When the linear motion shaft 80 is further retracted, the valve opening of the second valve port 50 increases, and the flow rate of the fluid discharged from the outlet 27 increases as the valve opening increases. (Refer to section R1 in FIG. 8). That is, when the linear motion shaft 80 is advanced from the intermediate position, a relatively small amount of fluid flows according to the linear motion position of the linear motion shaft 80.

  When the linear motion shaft 80 is advanced from the intermediate position, the rear end portion of the distal end shaft portion 80B is received on the back side of the cylindrical portion of the proximal end shaft portion 80A, and in the middle, the pilot pressing portion 81 is piloted. The pilot valve body 61 is pushed forward in contact with the rear end portion of the valve body 61. As a result, as shown in FIG. 4, the pilot valve body 61 is separated from the opening edge of the pilot valve port 60, the pilot valve port 60 is opened, and the outlet port 27 passes from the rear pressure chamber 28 </ b> B through the decompression channel 65. Pressurized fluid flows to Here, since the front pressure chamber 28A and the rear pressure chamber 28B communicate with each other via the orifice 44, the internal pressure of the rear pressure chamber 28B is reduced while the internal pressure of the front pressure chamber 28A is maintained high. Due to the differential pressure, the first valve body 40 is pushed rearward against the urging force of the first compression coil spring 43, and the first valve port 30 is opened (see FIG. 5). As described above, in the flow control valve 10 of the present embodiment, when the linear motion shaft 80 advances from the intermediate position, the first valve port 30 is also opened along with the opening of the pilot valve port 60, and a relatively large flow rate of fluid is generated. It flows (see R3 part in FIG. 8).

  In addition, when the 1st valve body 40 is pushed back, the 2nd valve body 51 which the 1st valve main-body part 42 is contact | abutting will also be pushed back. Here, the distal shaft portion 50B provided with the second shaft 51 can be received by the third compression coil spring 82 to the further back side of the tubular portion of the proximal shaft portion 80A, thereby the first valve body 40. And the 2nd valve body 51 can move back integrally.

  When the drive shaft 80 is retracted from the state where the first valve port 30 and the pilot valve port 60 are open, the valve opening degree of the pilot valve port 60 gradually decreases, and the linear motion shaft 80 is in the middle of the linear motion possible range. When the position is reached, the pilot valve port 60 is closed. Then, the internal pressure of the rear pressure chamber 28B becomes equal to the internal pressure of the front pressure chamber 28A, and the force by which the pressurized fluid pushes the first valve body 40 forward and the force by which the pressurized fluid pushes the first valve body 40 backward. Are balanced. The first valve body 40 moves forward by the urging force of the first compression coil spring 43, and the first valve port 30 is closed.

  Thus, in the flow control valve 10 of the present embodiment, the first valve port 30 having a relatively large opening area is opened and closed due to the valve opening degree of the pilot valve port 60, and the second opening area having a relatively small opening area. The valve port 50 is opened and closed by a second valve body 51 provided in the direct acting shaft 80. In this embodiment, a pilot valve port 60 for opening and closing the first valve port and a second valve port 50 for flowing a pressurized fluid having a relatively small flow rate are separately provided. The orifice 44 is not included in the flow path through which the pressurized fluid flows when the valve is opened. This point is when the small valve port 1 is also used as the pilot valve port and the small valve port 1 is opened. This is different from the conventional flow control valve (see FIG. 20) in which the orifice 8 is included in the flow path. According to the configuration of the present embodiment, the orifice 44 can be made small without affecting the flow rate when the second valve port 50 is opened, so the first valve is momentarily opened when the pilot valve body 61 is slightly opened. By moving the body 40, it is possible to easily control the flow rate while suppressing variations in the opening timing of the first valve port 30. Further, according to the configuration of the present embodiment, the opening area of the pilot valve port 60 can be reduced as the orifice 44 is reduced, and the stepping motor 13 can be downsized. Furthermore, since the opening area of the second valve port 50 can be reduced regardless of the orifice 44, minute flow rate control is possible.

  Moreover, in the flow control valve 10 of this embodiment, since the 1st valve body 40, the 2nd valve body 51, and the pilot valve body 61 are the structures arrange | positioned coaxially with the linear motion shaft 80, flow control The valve 10 can be made compact.

[Second Embodiment]
Hereinafter, a second embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 9, the flow control valve 10V according to the present embodiment is greatly different from the flow control valve 10 of the first embodiment in that the first valve body 40V is not arranged coaxially with the linear motion shaft 80. Is different.

  Specifically, in the flow control valve 10V of the present embodiment, the support base 20V is longer in the lateral direction (left-right direction in FIG. 9) than the support base 20 of the first embodiment, and is connected to the inlet 26. A linear motion support hole 28 is disposed on the near side, and a cylindrical case 14 housing the stepping motor 13 and a linear motion shaft 80 (corresponding to the “linear motion drive member” of the present invention) are disposed on the side away from the inlet 26. Has been. The first valve body 40V is different from the first valve body 40 of the first embodiment in that the center hole 40A and the side holes 40B are not provided, and the other configurations are the first valve body 40. Is the same.

  Also, the support base 20V is provided with two outlets 27 communicating with the pre-pressure chamber 28A. One outlet 27 is disposed on the side surface of the support base 20V as in the first embodiment, and the other outlet 27 is provided on the other side. Outflow port 27 is disposed on the central axis of linear motion shaft 80 on the front surface of support base 20V. Hereinafter, the outlet 27 arranged on the side surface of the support base 20V is referred to as “first outlet 27A”, and the outlet 27 arranged on the front surface of the support base 20V is referred to as “second outlet 27B”. I will call it separately.

  In the flow control valve 10V, the depressurization flow path 65 extends laterally from the rear pressure chamber 28B, crosses the central axis of the linear motion shaft 80, and communicates with the first outlet 27A through the lateral side of the linear motion shaft 80. doing. Specifically, the portion of the depressurization flow path 65 through which the linear motion shaft 80 passes is linear along the central axis of the linear motion shaft 80, and is defined by the partition wall 66 </ b> H having the pilot valve port 60 in the front-rear direction ( It is partitioned in the direction of the central axis of the linear movement shaft 80. A front portion partitioned by the partition wall 66H serves as a sub rear pressure chamber 66 that communicates with the rear pressure chamber 28B and accommodates the pilot valve body 61 (see FIG. 11).

  Further, the support base 20V is provided with a small flow rate discharge passage 55 that extends from the pre-pressure chamber 28A to the side opposite to the inlet 26 and opens at the front surface of the support base 20V to form the above-described second outlet 27B. ing.

  As shown in FIG. 10, a valve body accommodating portion 56 that is coaxial with the linear motion shaft 80 and extends linearly is provided at an intermediate portion of the small flow rate discharge path 55. The valve body accommodating portion 56 is disposed on the front side of the above-described sub rear pressure chamber 66 (see FIG. 9), and the linear motion shaft 80 passes through the partition wall 56H between the valve body accommodating portion 56 and the sub rear pressure chamber 66. And the 2nd valve body 51 is accommodated in the valve body accommodating part 56 so that direct movement is possible. In addition, an orifice 44V is provided between the valve body accommodating portion 56 and the sub rear pressure chamber 66 so as to narrow a gap between the outer surface of the linear motion shaft 80 and the partition wall 56H. 28A and the back pressure chamber 28B are always in communication.

  A second valve port 50 </ b> V that is opened and closed by the second valve body 51 is provided at the front end portion of the valve body housing portion 56. Specifically, a cylindrical support sleeve 58 protrudes from the central portion of the valve body accommodating portion 56 facing the second valve body 51, and the axial hole 58A of the support sleeve 58 is positioned closer to the front side. The second valve hole 50V which is a circular hole having an inner diameter smaller than the front end portion of the shaft center hole 58A is formed so as to be narrowed in a taper shape so as to communicate between the tapered portion and the front end portion of the shaft center hole 58A. ing. The opening area of the second valve port 50V is the same as that of the second valve port 50 of the first embodiment.

  Since the other structure of the flow control valve 10V is the same as that of the first embodiment, a duplicate description is omitted. Note that the end opening 55A on the front pressure chamber 28A side of the small flow rate discharge passage 55 corresponds to the “introduction opening” of the present invention. In the present embodiment, the portion from the end opening 55 </ b> A to the valve body accommodating portion 56 in the small flow rate discharge passage 55, the orifice 44 </ b> V, and the sub-rear pressure chamber 66 to the rear pressure chamber 28 </ b> B in the depressurization passage 65. Thus, the first pressure introduction path 46V according to the present invention is configured.

  According to the flow control valve 10V of the present embodiment, the same effects as those of the first embodiment can be obtained. Further, since the second valve body 51 and the pilot valve body 61 are arranged coaxially with the linear motion shaft 80, the flow control valve can be made compact.

[Third Embodiment]
Hereinafter, a third embodiment of the present invention will be described with reference to FIGS. The flow control valve 10W of this embodiment is a modification of the flow control valve 10 of the first embodiment, and as shown in FIG. 12, the arrangement of the pilot valve body 60 and the pilot pressing portion 81 is opposite. . Specifically, the pilot valve body 61 is disposed in the reverse direction from the first embodiment, and is accommodated in the rear portion of the rear pressure chamber 28 </ b> B in the pressure release passage 65. And it is urged | biased ahead by the 2nd compression coil spring 62 arrange | positioned between the opposing surface with the pilot valve body 61 of the decompression flow path 65, and the pilot valve body 61. FIG. Moreover, the pilot pressing part 81 is arrange | positioned ahead of the pilot valve body. About another structure, description is abbreviate | omitted by attaching | subjecting the same code | symbol as 1st Embodiment.

  In the flow control valve 10W of the present embodiment, when the linear motion shaft 80 is disposed at the front end position, the pilot valve body 61 is biased forward by the second compression coil spring 62, the pilot valve port 60 is closed, and the third compression is performed. The second valve body 50 is biased forward by the coil spring 82, and the second valve port is closed. At this time, as described in the first embodiment, the internal pressures of the front pressure chamber 28A and the rear pressure chamber 28B are equal, and the first valve port 30 is also closed. That is, when the linear motion shaft 80 is disposed at the front end position, the flow rate of the fluid passing through the flow rate control valve 10V becomes “0” (see FIG. 13).

  When the linear movement shaft 80 is retracted from the front end position, the proximal end shaft portion 80A is locked to the distal end shaft portion 80B, and the second valve body 50 is pulled rearward. Then, the second valve body 51 is separated from the opening edge of the second valve port 50, the second valve port 50 is opened, and the pressurized fluid is discharged from the outlet 27. When the linear motion shaft 80 is further retracted, the valve opening of the second valve port 50 increases, and the flow rate of the fluid discharged from the outlet 27 increases in accordance with the valve opening (FIG. 13). S1 part). And if the linear motion shaft 80 is arrange | positioned in the intermediate position of the linear motion possible range, the valve opening degree of the 2nd valve port 50 will become fixed (refer S2 part of FIG. 13).

  When the linear movement shaft 80 is retracted from the intermediate position, the pilot pressing portion 81 presses and moves the pilot valve body 61 rearward, and the pilot valve port 60 opens. Then, in the same manner as described in the first embodiment, the first valve port 30 is opened, and a fluid having a relatively large flow rate is discharged from the flow control valve 10W (see S3 part in FIG. 13).

  Thus, in the flow control valve 10W of this embodiment, until the second valve port 50 reaches a constant valve opening, only the valve opening of the second valve port 50 is adjusted to control a relatively small flow rate. And after the 2nd valve opening 50 becomes a fixed valve opening degree, the 1st valve opening 30 can be opened and the fluid of a comparatively big flow volume can be flowed.

[Fourth Embodiment]
Hereinafter, a fourth embodiment of the present invention will be described with reference to FIG. As shown in FIG. 14, the flow control valve 10X of the present embodiment is similar to the third embodiment in that the arrangement of the pilot valve body 60 and the pilot pressing portion 81 in the flow control valve 10V is reversed in the second embodiment. It is a thing.

  According to the flow control valve 10X of the present embodiment, the same effects as those of the second embodiment can be obtained. The flow rate control valve 10X exhibits the same flow rate change characteristic as the flow rate control valve 10W of the third embodiment (see FIG. 13 for the flow rate change characteristic of the flow rate control valve 10W).

[Other Embodiments]
The present invention is not limited to the above-described embodiment. For example, the embodiments described below are also included in the technical scope of the present invention, and various other than the following can be made without departing from the scope of the invention. It can be changed and implemented.

  (1) In the second and fourth embodiments, the first outlet 27A for discharging the pressurized fluid that has passed through the first valve port 30 and the pressurized fluid that has passed through the second valve port 50V are discharged. However, as shown in FIG. 15, the pressurized fluid that has passed through the first valve port 30 and the pressurized fluid that has passed through the second valve port 50V are common. It is good also as a structure discharged | emitted from the outflow port 27 of this.

  (2) In the second and fourth embodiments, the second valve body 50V and the pilot valve body 60 are arranged on the same axis as the linear motion shaft 80, but may not be arranged on the same axis. Specifically, as shown in FIG. 16, the linear drive member 180 is provided with a second valve body pressing portion 185 and a pilot pressing portion 181 that extend laterally, and the second valve body pressing portion 185 and The pilot pressing unit 181 may be configured to press and move the second valve body 151 that opens and closes the second valve port 150 and the pilot valve body 161 that opens and closes the pilot valve port 160.

  (3) In the flow rate control valve of the third and fourth embodiments, when the linear motion shaft 80 is moved backward, the first valve port is set after the valve openings of the second valve ports 50 and 50V become constant. Although 30 is the structure which opens, the 1st valve port 30 may open before the valve opening degree of the 2nd valve ports 50 and 50V becomes fixed. In this case, the flow rate change characteristic is the same as the flow rate change characteristic of the conventional flow rate control valve (see FIG. 21).

  (4) The first valve port 30 of the first and third embodiments or the second valve port 50V of the second and fourth embodiments may be an outflow port.

  (5) In the above embodiment, the first compression coil spring 43, the differential pressure between the front pressure chamber 28A and the rear pressure chamber 28B, and the differential pressure between the outlet 27 and the front pressure chamber 28A “Valve urging means” is configured, but it may be configured only by differential pressure.

  (6) As shown in FIG. 17, the piston portion 141 of the first valve body 140 is provided with a concave portion 141A opened on the front surface thereof, and the first valve port 30 is opened in the front pressure chamber 28A. The part 28T may be provided, and the protrusion 28T may be abutted against the inner surface of the recess 141A. In this configuration, the inner surface 141M of the recess 141A corresponds to the “first valve body” of the present invention.

  (7) In the first and third embodiments, the second valve port 50 is disposed on the rear side of the first valve port 30, but the same front-rear position as the first valve port 30 or on the front side of the first valve port. It may be arranged. Specifically, as shown in FIG. 18, the first valve main body 142 of the first valve body 140V has a protrusion 142T that protrudes into the first valve port 30, and at the tip surface of the protrusion 142T. The structure which the 2nd valve opening 50 opened may be sufficient.

  (8) In the above embodiment, the space between the inner side surface of the pilot valve body 61 and the outer side surface of the linear motion shaft 80 is sealed by the packing 63, but FIG. 19 (A) and FIG. As shown in FIG. 4, a configuration in which a gap 163V (corresponding to the “fluid movement restricting means” of the present invention) smaller than the orifice 144V is provided between the inner surface of the pilot valve body 161V and the outer surface of the linear motion shaft 80 It may be. FIG. 19B shows an example in which the orifice 144V is formed between the first valve body 140V and the linear motion shaft 80, but the partition wall is the same as in the second and fourth embodiments. An orifice 144V may be formed between 56H and the linear motion shaft 80.

  (9) Although the opening area of the second valve port 50 is smaller than the opening area of the pilot valve port 60 in the above embodiment, the pilot valve port 60 is smaller than the opening area of the first valve port 30. The opening area may be the same as or larger than the opening area.

10, 10V, 10W, 10X Flow control valve 13 Stepping motor (drive source)
26 inflow port 27 outflow port 28 linear motion support hole 28A front pressure chamber 28B rear pressure chamber 29 diaphragm 30 first valve port 40, 40V, 140, 140V first valve body 40A central hole 40B side hole (communication hole)
41, 141 Piston part 42, 142 First valve body part 43 First compression coil spring (first valve body urging means)
44,44V Orifice 46,46V 1st pressure introduction path 50,50V, 150 2nd valve port 51,151 2nd valve body 55 Small flow volume discharge path 56 Valve body accommodating part 60,160 Pilot valve port 61,161 Pilot valve Body 62 Second compression coil spring (pilot valve body biasing means)
63 Packing (fluid movement restricting means)
65 Pressure release passage (second pressure introduction passage)
66 Sub-rear pressure chamber 80 Linear motion shaft (linear motion drive member)
80A Base shaft portion 80B Tip shaft portion 81,181 Pilot pressing portion 82 Third compression coil spring (shaft biasing means)
180 Linear motion drive member

Claims (9)

An opening through which the pressurized fluid can be passed inside a support base (20) having an inlet (26) for taking in the pressurized fluid inside and an outlet (27) for discharging the pressurized fluid outside. A first valve body (40) for opening and closing a first valve port (30) having a relatively large area and a second valve port (50) for opening and closing a second valve port (50) having a relatively small opening area through which the pressurized fluid can pass. In the flow control valve (10) provided with the valve body (51),
A linear motion support hole (28) formed in the support base (20) and extending linearly, and having the inflow port (26) communicated with one end thereof;
A front pressure chamber (28A) which is assembled to the linear motion support hole (28) so as to be linearly movable and communicates the linear motion support hole (28) with the inlet (26) at one end thereof; A piston part (41) partitioned into a rear pressure chamber (28B) on the part side, and protrudes from the piston part (41) to the front pressure chamber (28A) side or the front part of the piston part (41) A first valve body (40) having a first valve body (42) disposed in a portion facing the pressure chamber (28A);
The front pressure chamber (28A) has an opening (28AM) facing the first valve body (42) and communicates with the outlet (27) or serves as the outlet (27). A first valve port (30);
First valve body urging means (43) for urging the first valve body (40) to a closed position;
A center hole (40A) formed through the center of the first valve body (40);
A second valve port (50) provided at one end of the central hole (40A) and opened at a surface (42M) facing the opposite side to the rear pressure chamber (28B);
A communication hole (40B) formed in the first valve body (40) and communicating between an intermediate portion of the center hole (40A) and the pre-pressure chamber (28A);
A linear motion shaft (80) that receives power from the drive source (13) and linearly moves, and has a tip portion accommodated in the central hole (40A);
The second valve body (51) provided at the tip of the linear motion shaft (80);
The central hole (40A) is disposed closer to the rear pressure chamber (28B) than the communication hole (40B), and between the front pressure chamber (28A) and the rear pressure chamber (28B) through the orifice (44). A first pressure introduction path (46) that always communicates with
The rear pressure chamber (28B) is opened at a surface (28BM) facing the first valve body (40), and is disposed coaxially with the linear motion support hole (28). A pilot valve port (60) smaller than the valve port (30);
A second pressure introduction path (65) capable of communicating between the outlet (27) and the rear pressure chamber (28B) through the pilot valve port (60);
A pilot valve body (61) capable of opening and closing the pilot valve port (60) in the form of an annulus fitted to the intermediate portion of the linear motion shaft (80) so as to be linearly movable;
Pilot valve body urging means (62) for urging the pilot valve body (61) to the closed position;
When the pilot valve port (60) is closed by sealing or sealing between the outer surface of the linear motion shaft (80) and the inner surface of the pilot valve body (61) from the orifice (44). Fluid movement restricting means (63) for restricting movement of the pressurized fluid between the outlet (27) and the rear pressure chamber (28B);
The intermediate shaft of the linear motion shaft (80) projects laterally, and the linear motion shaft (80) abuts the pilot valve body (61) on the way from one end to the other end of the linear motion range. A flow rate control valve (10), comprising: a pilot pressing portion (81) for pressing and moving the pilot valve body (61) from the valve closing position to the valve opening position. An opening through which the pressurized fluid can be passed inside a support base (20) having an inlet (26) for taking in the pressurized fluid inside and an outlet (27) for discharging the pressurized fluid outside. A first valve body (40V) that opens and closes a first valve port (30) having a relatively large area, and a second valve port (50V) that opens and closes a relatively small opening area through which the pressurized fluid can pass. In the flow control valve (10V) provided with the valve body (51),
A linear motion support hole (28) formed in the support base (20) and extending linearly, and having the inflow port (26) communicated with one end thereof;
The linear motion support hole (28) is assembled so as to be linearly movable, and the linear motion support hole (28) is communicated with the inlet at one end portion thereof and the rear side of the other end portion with the front pressure chamber (28A). A piston part (41) partitioned into a pressure chamber (28B), and projects from the piston part (41) to the front pressure chamber (28A) side, or the front pressure chamber (28A) of the piston part (41) The first valve body (40V) having the first valve body (42) disposed in the portion facing the
The front pressure chamber (28A) has an opening (28AM) facing the first valve body (42) and communicates with the outlet (27) or serves as the outlet (27). A first valve port (30);
First valve body urging means (43) for urging the first valve body (40V) to a valve closing position;
A first pressure introduction path (46V) constantly communicating between the front pressure chamber (28A) and the rear pressure chamber (28B) through an orifice (44V);
A second pressure introduction path (65) capable of communicating between the outlet (27) and the rear pressure chamber (28B) through a pilot valve port (60) having an opening area smaller than that of the first valve port (30). )When,
A pilot valve body (61) for opening and closing the pilot valve port (60);
Pilot valve body urging means (62) for urging the pilot valve body (61) to the closed position;
Directly receives power from the drive source (13), and abuts the pilot valve body (61) on the way from one end to the other end of the linearly movable range to close the pilot valve body (61). A linear driving member (80) having a pilot pressing part (81) for pressing and moving from a valve opening position to the valve opening position, and the second valve body (51);
An inlet opening (55A) formed at the support base (20) and opened at a position different from the first valve port (30) in the inner surface of the pre-pressure chamber (28A) at one end and the other end at the other end An outlet port (27) is formed, and is disposed in an intermediate portion at a valve body housing portion (56) housing the second valve body (51) so as to be capable of direct movement, and an end portion of the valve body housing portion (56). A flow rate control valve (10V) comprising a small flow rate discharge passage (55) having the second valve port (50V). The linearly movable member (80B) having the second valve body (51) and the linear drive member main body (80A) having the pilot pressing portion (81) are linearly moved in the linear motion direction of the entire linear drive member (80). The linear movable member urging means (82) supports the linear movable member (80B) with respect to the linear drive member main body (80A) by the second valve port (80A). 50) the linear drive member (80) having a structure biased to the side,
The linear movable member (80B) moves integrally with the linear drive member main body (80A) to the second valve port (50) side, and the second valve body (51) is closed from the valve open position. While moving to the position, the pilot pressing portion (81) approaches the pilot valve body (61) while maintaining a separated state, and the second valve body (51) is disposed at the valve closing position. When the second valve port (50) and the pilot valve port (60) are both closed and the second valve body (51) reaches the valve closing position, the linear drive member main body (80A) While only the valve moves toward the second valve port (50), the pilot pressing portion (81) contacts the pilot valve body (61) to open the pilot valve body (61) from the closed position. The structure according to claim 2, wherein the valve is configured to be pressed and moved to the valve position. Of the flow control valve (10V).   While the second valve body (51) moves from the closed state to the position where the second valve port (50) has a constant valve opening, the pilot pressing portion (81) is moved to the pilot valve body (61). While the second valve body (51) moves in a direction in which the second valve port (50) opens further than the predetermined valve opening degree while maintaining a separated state. The pressing portion (81) contacts the pilot valve body (61), and is configured to press and move the pilot valve body (61) from the valve closing position to the valve opening position. 2. The flow control valve (10) according to 2. The pilot pressing portion (81) that receives power from the drive source (13) and moves linearly and extends in the direction of linear motion, has the second valve body (51) at the tip, and protrudes laterally from the intermediate portion. A linear motion shaft (80) as the linear drive member (80),
A sub rear pressure chamber (66) provided in the middle of the second pressure introduction path (65) and through which the linear motion shaft (80) passes;
The pilot valve port (60) disposed at one end of the sub post-pressure chamber (66);
The pilot valve body (61) capable of opening and closing the pilot valve port (60) in the form of an annulus fitted in an intermediate portion of the linear motion shaft (80) so as to be linearly movable;
When the pilot valve port (60) is closed by sealing or sealing between the outer surface of the linear motion shaft (80) and the inner surface of the pilot valve body (61) from the orifice (44). The flow rate according to claim 2, further comprising a fluid movement restricting means (63) for restricting the movement of the pressurized fluid between the outlet (27) and the rear pressure chamber (28B). Control valve (10V). A tip shaft portion (80B) having the second valve port (50) side from the intermediate portion in the axial direction of the linear motion shaft (80) and having the second valve body (51) at the tip,
A portion opposite to the second valve port (50) is formed from an axial intermediate portion of the linear motion shaft (80), and has the pilot pressing portion (81) to directly connect the tip shaft portion (80B). A proximal shaft portion (80A) that is movably supported;
Shaft urging means (82) for urging the distal shaft (80B) toward the second valve port (50) with respect to the proximal shaft (80A);
The distal end shaft portion (80B) is integrated with the proximal end shaft portion (80A) and moves toward the second valve port (50), and the second valve body (51) is moved from the valve opening position to the valve closing position. During the movement, the pilot pressing portion (81) approaches the pilot valve body (61) while maintaining a separated state, and the second valve body (51) is disposed at the valve closing position. When both the second valve port (50) and the pilot valve port (60) are closed and the second valve body (51) reaches the valve closing position, only the proximal shaft portion (80A) is While moving to the second valve port (50) side, the pilot pressing portion (81) contacts the pilot valve body (61), and the pilot valve body (61) is moved from the closed position to the open position. The structure according to claim 1 or 5, wherein the apparatus is configured so as to be pressed and moved. Of the flow control valve (10).   Stretched in the middle of the linear motion support hole (28), the front pressure chamber (28A) and the rear pressure chamber (28B) are isolated in an airtight state, and the piston portion (41) is linearly moved. The flow control valve (10) according to any one of claims 1 to 6, further comprising a diaphragm (29) fixed in a permitted state.   The outlet (27A) for discharging the pressurized fluid that has passed through the first valve port (30), and the outlet (27A) for discharging the pressurized fluid that has passed through the second valve port (50V). 27B) is provided separately from the flow control valve (10V) according to claim 2.   The pressurized fluid that has passed through the first valve port (30) and the pressurized fluid that has passed through the second valve port (50V) are discharged from the common outlet (27). The flow control valve (10V) according to claim 2.