JP5727347B2 - Flow control valve - Google Patents

Description

  In the present invention, when the linearly moving member moving forward or backward moves to one side from the intermediate position of the movable stroke, the valve hole is locked with the closed valve body and the valve hole is opened. More specifically, the present invention relates to a flow control valve in which, when moved to the other side, the locking of the linear motion member and the valve body is released, and the state in which the valve hole is closed by the valve body urging means is maintained.

  Conventionally, as this type of flow control valve, as shown in FIG. 13, a valve having a small valve hole 1 and a large valve hole 2 having different opening areas is known. In this flow control valve, the small valve hole 1 is provided at the center of the large valve body 4 that opens and closes the large valve hole 2, and the small valve hole 1 is opened and closed by the small valve body 3 that is integrally provided with the direct acting member 5. It has become. The small valve hole 1 and the large valve hole 2 are both closed at the front end position of the movable stroke of the linear motion member 5, and the small valve body 3 is retracted together with the linear motion member 5 from there. Only the hole 1 is opened first, and the locking projection 6 provided in the linear motion member 5 is locked to the large valve body 4 in the middle, and the large valve body 4 is also retracted. The valve hole 2 is also opened. Further, the fluid that has passed through the small valve hole 1 and the large valve hole 2 is discharged from the same fluid discharge port 7. Thereby, in this flow control valve, as shown in FIG. 14, the flow rate change relative to the change in the position of the linear motion member 5 is relatively small under the first flow rate change characteristic (see “L part” in FIG. 14). The flow rate control and the flow rate control under the second flow rate change characteristic (see “H part” in FIG. 14) in which the flow rate change with respect to the change in position of the linear motion member 5 is relatively large can be performed (for example, patent Reference 1).

Japanese Utility Model Publication No. 6-024282 (FIGS. 1 and 2)

  However, in the conventional flow rate control valve described above, the flow rate control can be performed only under the first flow rate change characteristic when the flow rate is in a range from 0 to a constant value. There was a problem that flow control could only be performed under the characteristics. That is, the conventional flow control valve cannot perform flow control by arbitrarily selecting two types of flow rate change characteristics.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a flow rate control valve capable of performing flow rate control by arbitrarily selecting two types of flow rate change characteristics.

The flow rate control valve (10) according to the invention of claim 1 made to achieve the above object is such that when the linearly moving member (80) moving forward or backward moves to one side from the intermediate position of the movable stroke, The valve hole (40A, 51A, 52A) is locked with the closed valve body (40, 51, 52) to open the valve hole (40A, 51A, 52A), and the linear motion member (80) is on the other side from the intermediate position. When the linear movement member (80) and the valve body (40, 51, 52) are released, the valve hole (40A, 51A, 52A) is a flow control valve (10) in which the closed state is maintained, and is formed in the first valve body (40) and the second valve body (51, 52) as the valve body and the support body (20). And disposed on the forward side of the linear motion member (80) with respect to the first valve body (40). A first valve hole (40A) as a valve hole opened and closed by the first valve body (40), and a direct acting member formed on the support body (20) and with respect to the second valve body (51, 52) The second valve hole (51A, 52A) as a valve hole disposed on the retreat side of (80), opened and closed by the second valve body (51, 52) and having a different opening area from the first valve hole (40A). And an inflow passage formed in the support body (20) from which fluid flows from the outside of the support body (20) and having a first valve hole (40A) and a second valve hole (51A, 52A) on the inner surface ( 26), a first outflow passage (29) formed in the support body (20) and communicated with the inflow passage (26) through the first valve hole (40A), and formed in the support body (20), A second outflow passage (2 that can communicate with the inflow passage (26) through the second valve holes (51A, 52A) ) And the linear motion member (80) with a valve body that holds both the first valve body (40) and the second valve body (51, 52) in a closed state when the linear motion member (80) is disposed at an intermediate position of the movable stroke. The biasing means (42, 54) and the linear motion member (80) are provided to the second valve body (51, 52) to apply a forward axial force when the linear motion member (80) advances from an intermediate position of the movable stroke. The second valve body (51, 52) is separated from the valve seat (51B, 52B) of the second valve hole (51A, 52A), while the linear motion member (80) is moved from the intermediate position of the movable stroke. Axial force transmission part (for applying a backward axial force to the first valve body (40) when retreating, and separating the first valve body (40) from the valve seat (40B) of the first valve hole (40A)) 80F, 82) and the flow rate control valve (10) having a linear motion member (80 extending linearly in the driving direction ), A first outflow path (29) disposed coaxially with the linear motion member (80), and an inflow path (26), and the linear motion member (80) with respect to the first outflow path (29) A front inflow region (23) disposed on the retreat side of the second outflow passage (27) disposed on the retreat side of the linear motion member (80) with respect to the front inflow region (23), and an inflow passage (26 ) And the rear inflow region (21) disposed on the receding side of the linear motion member (80) with respect to the second outflow passage (27), and the first outflow passage (29) of the support body (20). ) And the front inflow region (23) between the first valve hole (40A) that is formed through the partition wall (24W) and positioned coaxially with the linear motion member (80), and the support body (20) A second penetrating through the partition wall (63) between the front inflow region (23) and the second outflow passage (27) through which the linear motion member (80) penetrates. A front side second valve hole (52A) as a hole and a partition wall (32) between the rear inflow region (21) and the second outflow path (27) of the support body (20) are formed to pass through. A rear second valve hole (51A) as a second valve hole through which the moving member (80) passes, and a cylindrical gap between the linear member (80) and the inner surface of the front second valve hole (52A) A movable cylinder (50) having a cylindrical shape penetrating through the front end, the front end portion being disposed in the front inflow region (23), and the rear end portion being disposed in the second outflow passage (27). A front second valve body (52) as a second valve body provided at the front end of the movable cylinder (50) and capable of opening and closing the front second valve hole (52A); and a rear of the movable cylinder (50) The second valve body is provided at the end and opens and closes the rear second valve hole (51A) simultaneously with the operation of the front second valve body (52) opening and closing the front second valve hole (52A). By providing the rear second valve body (51) and the linear motion member (80) and pressing the movable cylinder (50) when the linear motion member (80) advances from an intermediate position of the movable stroke. As an axial force transmission unit for separating the front second valve body (52) and the rear second valve body (51) from the respective valve seats of the front second valve hole (52A) and the rear second valve hole (51A). The second axial force transmission portion (80F) and the linear motion member (80) are provided on the rear end portion of the first valve body (40) when the linear motion member (80) is retracted from the intermediate position of the movable stroke. And a first axial force transmission part (82) as an axial force transmission part for separating the first valve body (40) from the valve seat of the first valve hole (40A). Have

According to a second aspect of the invention, the flow control valve (10) according to claim 1, the annular contact portion between the valve seat of the front second valve body (52) and the front second valve hole (52A) (52B) ( 69) and the inner area of the annular contact portion (68) between the rear second valve body (51) and the valve seat (51B) of the rear second valve hole (51A) are made the same. However, it has characteristics.

The invention according to claim 3, in the flow control valve (10) according to claim 2, the contact portion of the front side second valve body (52) a valve seat of the front second valve hole (52A) and (52B) It is made of a dissimilar metal and the front second valve body (52) is formed in a tapered shape, and the valve seat (52B) of the front second valve hole (52A) can be crushed and sealed by the front second valve body (52). The front metal seal (52, 52B), the rear second valve body (51) and the rear second valve hole (51A) contact portion of the valve seat (51B) are made of different metals and the rear second The two-valve body (51) has a tapered shape with a different taper angle from the front-side second valve body (52), and the valve seat (51B) of the rear-side second valve hole (51A) is connected to the rear-side second valve body ( 51) and a rear metal seal portion (51, 51B) that can be crushed and sealed.

The invention according to claim 4, in the flow control valve (10) according to claim 2, the contact portion of the front side second valve body (52) a valve seat of the front second valve hole (52A) and (52B) It is made of a dissimilar metal and the front second valve body (52) is formed in a tapered shape, and the valve seat (52B) of the front second valve hole (52A) can be crushed and sealed by the front second valve body (52). The front metal seal (52, 52B), the rear second valve body (51) and the rear second valve hole (51A) contact portion of the valve seat (51B) are made of different metals and the rear second The two-valve element (51) has a tapered shape with a larger taper angle than the front second valve element (52), and the valve seat of the rear second valve hole (51A) is pushed by the rear second valve element (51). The rear metal seal portion (51, 51B) that can be crushed and sealed, and the front inflow region (2 of the support body (20)) ) And the second outflow passage (27), the partition wall (63) is formed in a ring shape and press-fitted into the inner surface of the through hole (25) formed in the support body (20). The valve seat (52B) of (52A) is characterized in that it is provided with a position adjustment mechanism that can adjust the position in the axial direction of the movable cylinder (50).

According to a fifth aspect of the present invention, in the flow control valve (10) according to any one of the first to fourth aspects, the valve body urging means (42, 54) that urges the first valve body (40). ) As a first valve body pressing spring (42) provided in a state of being sandwiched between the first valve body (40) and the linear motion member (80).

According to a sixth aspect of the present invention, in the flow control valve (10) according to any one of the first to fourth aspects, the front end cylinder portion (81) formed at the front end portion of the linear motion member (80); A rear end shaft portion (40S) formed at the rear end portion of the first valve body (40) and fitted to the front end cylinder portion (81) so as to be capable of linear movement, and a rear end portion of the rear end shaft portion (40S) The rear end flange (41) projecting laterally from the front end and protrudes inward from the front end of the front end cylindrical portion (81), and comes into contact with the rear end flange (41) from the front side to exert axial force on the first valve body (40). Between the 1st axial force transmission part (82) as an axial force transmission part which can be provided, and the back surface of a rear end shaft part (40S), or the rear end flange (41) of a front end cylinder part (81). And a first valve body pressing coil spring (42) as a valve body biasing means that is sandwiched and biases the first valve body (40). To have the feature.

A seventh aspect of the present invention is the flow control valve (10) according to the sixth aspect , wherein the flow rate control valve (10) is provided on the support body (20) and supports the linear member (80) or the rear end shaft portion (40S) so as to be linearly movable. A linear motion support wall ( 35) that is sandwiched between the linear motion support wall (35) and the movable cylinder (50), and is inserted outside the linear motion member (80), so that the front second valve body (52) and a second valve body pressing coil spring (54) as a valve body urging means for urging the rear second valve body (51).

The invention according to claim 8 is the flow control valve (10) according to any one of claims 1 to 7 , wherein the fluid flowing through the first outflow passage (29) and the second outflow passage (27) are provided. It is characterized in that an outflow port (70) that can be discharged to the outside of the support body (20) without being distinguished from the flowing fluid is provided.

The invention according to claim 9 is the flow rate control valve (10) according to any one of claims 1 to 7 , wherein the fluid flowing through the first outflow path (29) and the second outflow path (27) are arranged. It is characterized in that it has a first outlet (29A) and a second outlet (27A) that can be distinguished from the flowing fluid and discharged to the outside of the support body (20).

[Inventions of Claims 1, 8 , 9 ]
In the flow control valve (10) according to claim 1, the first valve hole (40A) and the second valve hole (51A, 52A) having different opening areas are provided, and the linear motion member (80) is provided in the longitudinal direction of the linear motion. The arrangement before and after the first valve element (40) and the first valve hole (40A) and the arrangement before and after the second valve element (51, 52) and the second valve hole (51A, 52A) are reversed. ing. Thus, when the linear motion member (80) is retracted from the intermediate position of the movable stroke, an axial force is applied from the linear motion member (80) to the first valve body (40), and the first valve hole (40A) On the other hand, when the linear motion member (80) is advanced from the intermediate position of the movable stroke, an axial force is applied from the linear motion member (80) to the second valve body (51, 52). Only the second valve holes (51A, 52A) can be opened. Further, when the linear motion member (80) is disposed at an intermediate position of the movable stroke, the first valve body (40) and the second valve body (51, 52) are attached to the valve body urging means (42, 54). The valve is kept closed by the force. That is, according to the present invention, the first valve hole (40A) and the second valve hole (40A) and the second valve hole (51A, 52A) having different opening areas are closed together. Since only one of (51A, 52A) can be opened, it is possible to perform flow control by arbitrarily selecting two types of flow rate change characteristics.

According to the present invention, as in the configuration of the eighth aspect , the support body (20) without distinguishing between the fluid flowing through the first outflow passage (29) and the fluid flowing through the second outflow passage (27). ) Can be configured to have a discharge outlet that can be discharged to the outside, and as in the configuration of claim 9 , the fluid that has flowed through the first outflow passage (29) and the second outflow passage (27) The first outlet (29A) and the second outlet (27A) that can be distinguished from the fluid and discharged to the outside of the support body (20) can also be provided.

Furthermore, in the flow control valve (10) of the present invention , the first outflow passage (29) and the front side of the inflow passage (26) are arranged in order from the front side on the same axis as the linear motion member (80) extending linearly. The inflow region (23), the second outflow channel (27), and the rear inflow region (21) of the inflow channel (26) are arranged. Further, the front second valve hole (52A) between the front inflow region (23) and the second outflow passage (27), and the rear between the rear inflow region (21) and the second outflow passage (27). The linear movement member (80) passes through the second side valve hole (51A) and is movable through the cylindrical gap between the linear movement member (80) and the inner surface of the front second valve hole (52A). The front second valve hole (52A) and the rear second valve hole (52A) are formed by the front second valve body (52) at the front end of the cylinder (50) and the rear second valve body (51) at the rear end. 51A) is closed. Thereby, the internal pressure which the front side 2nd valve body (52) receives from the fluid in an inflow path (26), and the internal pressure which a back side 2nd valve body (51) receives from the fluid in an inflow path (26) are reverse direction Thus, part or all of the internal pressure received by the front second valve body (52) and the rear second valve body (51) is canceled (cancelled), and the front second valve body (52) and the rear second valve body (52) It becomes possible to suppress the power for directly moving the two-valve body (51). Further, when the linear motion member (80) is further retracted in a state where the front side second valve hole (52A) and the rear side second valve hole (51A) are closed, the linear motion member (80) becomes the first valve body ( 40) The rear end portion is pulled rearward, and the first valve hole (40A) between the first outflow passage (29) and the front inflow region (23) is opened.

  In the present invention, “the first outflow path (29), the front inflow area (23), the second outflow path (27), and the rear inflow area (21 on the same axis of the linear motion member (80)”. ) Is disposed ”, which requires that the first outflow passage (29), the front inflow region (23), and the like extend in the axial direction of the linear motion member (80). Rather than the above, it is a requirement that a part of the central axis of the linear motion member (80) is located inside the first outflow passage (29), the front inflow region (23), and the like. .

[Invention of claim 2 ]
In the configuration of claim 2 , the area inside the annular contact portion (69) between the front second valve body (52) and the valve seat (52B) of the front second valve hole (52A), and the rear second valve body (51) and the inner area of the annular contact portion (68) between the valve seat (51B) of the rear second valve hole (51A) and the front second valve body (52) and the rear second All of the pressure received from the fluid between the two valve bodies (51) can be offset.

[Invention of claim 3 ]
According to the configuration of claim 3 , the front second valve hole (52A) and the rear second valve hole (51A) are closed by the front second valve body (52) and the rear second valve body (51). When the movable cylinder (50) is pressed rearward with a tool or the like in this state, the metal of the valve seat (52B) in the front metal seal portion (52, 52B) is pushed by the metal of the front second valve body (52). While being crushed, the metal of the valve seat (51B) in the rear metal seal part (51, 51B) is crushed by the metal of the rear second valve body (51), and the movable cylinder (50) in the valve-closed state is closed. The stop position with respect to the support body (20) is slightly shifted backward. Here, in the present invention, since the taper angles of the front second valve body (52) and the rear second valve body (51) are different, the front metal with respect to the shift amount of the stop position of the movable cylinder (50). The area change amount inside the annular contact portion (69) in the seal portion (52, 52B) is different from the area change amount inside the annular contact portion (68) in the rear metal seal portion (51, 51B). To do. Thereby, in the initial state, the area inside the annular contact portion (69) in the front metal seal portion (52, 52B) and the inside area of the annular contact portion (68) in the rear metal seal portion (51, 51B). The difference between the areas inside the annular contact portions (68, 69) in both metal seal portions is reduced while the metal of the valve seats (51B, 52B) of both metal seal portions is crushed. Can be adjusted as follows.

[Invention of claim 4 ]
According to the configuration of claim 4 , the front second valve hole (52A) and the rear second valve hole (51A) are closed by the front second valve body (52) and the rear second valve body (51). When the movable cylinder (50) is pressed rearward with a tool or the like in this state, the metal of the valve seat (52B) of the front second valve hole (52A) in the front metal seal portion (52, 52B) is the front second. While being crushed by the metal of the valve body (52), the metal of the valve seat (51B) of the rear second valve hole (51A) in the rear metal seal portion (51, 51B) is rear second valve body (51 ) Is crushed by metal. Here, when the taper angle of the rear second valve body (51) is made larger than the taper angle of the front second valve body (52), the metal seal portion (51, 51B) provided with the valve body (51) having a large taper angle. ) Increases the amount of area change inside the annular contact portion (68, 69) with respect to the amount of metal crushing of the valve seat (52B) in the axial direction of the movable cylinder (50). On the other hand, in the present invention, the partition wall (63) between the front inflow region (23) and the second outflow passage (27) of the support body (20) is formed in a ring shape in the support body (20). The inner side of the through-hole (25) is press-fitted and the position of the movable cylinder (50) can be adjusted in the axial direction, so that the front second valve hole (52A) and the rear second valve hole (51A) When the movable cylinder (50) is pressurized rearward with a tool or the like while the valve is closed by the front second valve body (52) and the rear second valve body (51), the front side with a small taper angle The valve seat (52B) of the front second valve hole (52A) opened and closed by the second valve body (52) is displaced in the axial direction of the movable cylinder (50), and the annular contact with respect to the amount of metal crushing of the valve seat. The inner area of the part (69) does not increase, and is opened by the rear second valve body (51) having a large taper angle. The valve seat side the second valve hole (51A) (51B) after which proceeds in the squash the metal of the valve seat without misalignment in the axial direction of the movable cylindrical member (50). Thereby, in the initial state, the area inside the annular contact portion (69) in the front metal seal portion (52, 52B) and the inside area of the annular contact portion (68) in the rear metal seal portion (51, 51B). The difference between the areas inside the annular contact portions (68, 69) in both metal seal portions is reduced while the metal of the valve seats (51B, 52B) of both metal seal portions is crushed. Can be adjusted as follows.

[Invention of claim 5 ]
According to the configuration of the fifth aspect , as the linear motion member (80) moves forward and the opening degree of the second valve hole (51A, 52A) increases, the amount of compressive deformation of the first valve body pressing spring (42) increases. As a result, the pressing force of the first valve body (40) against the valve seat (40B) of the first valve body (40) by the urging force of the first valve body pressing spring (42) also increases, and the first valve hole (40A) ) The degree of sealing increases.

[Invention of claim 6 ]
According to the configuration of the sixth aspect , as the linear motion member (80) advances and the opening degree of the front second valve hole (52A) and the rear second valve hole (51A) increases, the linear motion member (80 ), The rear end shaft portion (40S) of the first valve body (40) is pushed into the back side of the front end cylinder portion (81) formed at the front end portion of the front end portion, and the first valve body pressing coil spring (42) is compressed. The amount of deformation increases. Thereby, the pressing force with respect to the valve seat of the 1st valve hole (40A) of the 1st valve body (40) by the urging | biasing force of a 1st valve body press coil spring (42) also increases, and the sealing degree of a 1st valve hole (40A) Will increase. Further, when the linear motion member (80) is retracted with the front second valve hole (52A) and the rear second valve hole (51A) closed, the rear end flange (40S) of the rear end flange ( 41) is engaged with the first axial force transmission portion (82) protruding inward from the front end of the front end cylindrical portion (81) of the linear motion member (80), and the first valve body (40) is pulled rearward. The first valve hole (40A) opens.

[Invention of Claim 7 ]
According to the structure of Claim 7 , it is clamped between the linear motion support wall (35) and the movable cylinder (50) which support the linear motion member (80) or the rear-end shaft part (40S) so that linear motion is possible. And the second valve body pressing coil spring (54) inserted outside the linear motion member (80) urges the front second valve body (52) toward the front second valve hole (52A) and the rear side. The second valve body (51) can be biased toward the rear second valve hole (51A).

1 is a side sectional view of a flow control valve according to an embodiment of the present invention . Side sectional view of the flow control valve in the closed state Side sectional view of the flow control valve with the front and rear second valve holes opened Side sectional view of the flow control valve with the first valve hole opened Side sectional view around the front end of the linear shaft Side cross-sectional view of movable cylinder Cross-sectional side view of the front metal seal and the rear metal seal Graph showing flow rate change characteristics Side sectional view of flow control valve according to modification Side sectional view of flow control valve according to reference example Side sectional view of the first valve body and the second valve body according to the reference example Side sectional view of flow control valve according to reference example Side sectional view of a conventional flow control valve Graph showing flow rate change characteristics of conventional flow control valve

Below it is described with reference to an embodiment of the present invention in FIGS. 1-8. As shown in FIG. 1, the flow control valve 10 of this embodiment is provided with a stepping motor 13 as a drive source at one end of a columnar support body 20 extending vertically in the figure. In the following description, the side of the flow control valve 10 that includes the stepping motor 13 is referred to as “rear side”, and the opposite side is referred to as “front side”.

  The stepping motor 13 is provided with a ring-shaped stator side field portion 15 fitted and fixed to the outside of a cylindrical case 14 that extends coaxially with the support body 20, while the rotor side field portion 16 is provided inside the cylindrical case 14. (Permanent magnet) is rotatably accommodated. The drive shaft 80 as the “linear motion member” according to the present invention is fixed in a state of passing through the center of the rotor-side field portion 16 and extends coaxially with the support body 20.

  A spiral guide 17 formed by winding a wire in a spiral shape is fixed to the rear portion of the drive shaft 80 from the rotor side field portion 16 so as to be integrally rotatable, and a stopper ring 18 is engaged with the spiral guide 17. ing. The engagement ring 18 is formed in a ring shape that fits in a part of the gap between the wire rods adjacent in the axial direction in the spiral guide 17, and is provided with a contact arm 18 </ b> A projecting laterally. A stopper shaft 19 is suspended from the lid body 14 </ b> A that closes the rear end portion of the cylindrical case 14 in parallel with the drive shaft 80. Then, in a state where the contact arm 18A of the engagement ring 18 is in contact with the stopper shaft 19, the rotor side field portion 16 rotates, so that the engagement ring 18 rotates relative to the spiral guide 17, The drive shaft 80 moves linearly in the front-rear direction with respect to the cylindrical case 14.

  A cylindrical base 14 </ b> B is fitted and fixed to the front end portion of the cylindrical case 14. The cylindrical base 14B is screwed into a fixing hole 20A formed at the center of the rear end surface of the support body 20, and a gap between the front end outer surface of the cylindrical base 14B and the inner surface of the fixing hole 20A is formed. Sealed with 0-ring 21A. The drive shaft 80 enters the center of the support body 20, and moves forward and backward in the support body 20 by driving the stepping motor 13.

  The flow control valve 10 of this embodiment includes one inflow port for introducing a fluid, and includes two outflow ports for discharging the fluid. Specifically, a first outlet 29A is provided on the front end surface of the support body 20, and a second outlet 27A and an inlet 26A are provided on the side surface. The first outlet 29 </ b> A is disposed on the central axis of the support body 20. The first outflow passage 29 extends from the first outlet 29 </ b> A along the axial direction of the support body 20 to a position near the front end of the support body 20. Further, the second outlet 27 </ b> A is disposed slightly behind the center in the front-rear direction on the side surface of the support body 20. The second outflow path 27 extends from the second outlet 27 </ b> A to a position crossing the central axis of the support body 20. Further, the inflow port 26 </ b> A is disposed on the rear side of the side surface of the support body 20 with respect to the second outflow port 27 </ b> A. Then, on the rear side of the second outflow path 27, the inflow path 26 extends from the inflow port 26A to a position passing through the central axis of the support body 20, and then passes through the side of the second outflow path 27 and extends to the front side. A terminal portion of the inflow path 26 is disposed between the second outflow path 27 and the first outflow path 29. That is, the inflow path 26 includes a rear inflow area 21 on the rear side of the second outflow path 27, a front inflow area 23 on the front side of the second outflow path 27, and an intermediate area 28 that connects them. . The first outflow passage 29, the front inflow region 23, the second outflow passage 27, and the rear inflow region 21 are arranged in this order from the front side on the central axis of the support body 20.

  The internal space of the cylindrical case 14 and the rear inflow region 21 in the stepping motor 13 communicate with each other. However, since the cylindrical case 14 has a sealed structure, fluid does not leak outside through the stepping motor 13. . Further, in order to form the front side inflow region 23, the front side portion of the support body 20 from the intermediate portion in the axial direction is a cylindrical portion 20 </ b> B, and the front end opening of the cylindrical portion 20 </ b> B is closed by the front lid portion 24. The space between the front lid portion 24 and the cylindrical portion 20B is sealed with an O-ring 23A.

  As shown in FIG. 2, the first valve hole 40 </ b> A is formed on the partition wall 24 </ b> W between the first outflow path 29 and the front inflow region 23 on the central axis of the support body 20 (that is, on the coaxial axis of the drive shaft 80). Is formed, a front second valve hole 52A is formed in the partition wall 63 between the first outflow passage 29 and the second outflow passage 27, and the partition wall between the second outflow passage 27 and the rear inflow region 21 is formed. A rear second valve hole 51 </ b> A is formed in 32. The drive shaft 80 passes through the rear second valve hole 51 </ b> A and the front second valve hole 52 </ b> A and enters the front inflow region 23, and is connected to the front end portion of the drive shaft 80. Is abutted against the first valve hole 40A.

  Specifically, as shown in FIG. 5, a cylindrical support sleeve 35 protrudes from the center of the inner surface of the front inflow region 23 of the front lid 24 and is coaxial with the first outflow passage 29 (that is, driven). The shaft hole 35B of the support sleeve 35 is constricted in a tapered shape at a position near the inner surface of the front inflow region 23 in the front lid 24 to form a tapered portion 35T. A first valve hole 40A, which is a circular hole having an inner diameter smaller than the first outflow path 29, is formed so as to communicate between the tip of the tapered portion 35T and the first outflow path 29, and the first valve hole A crossing portion between the inner surface of 40A and the tapered portion 35T is a valve seat 40B.

  Further, the support sleeve 35 is formed with a side through hole 35A that opens the axial center hole 35B to the side next to the tapered portion 35T, and above the side through hole 35A, on the inner surface of the axial center hole 35B. A cylindrical linear motion bearing metal 35C is press-fitted. And the 1st valve body 40 is supported by the linear motion bearing metal 35C so that a linear motion is possible. The first valve body 40 is a so-called needle valve, and has a structure in which a tip end portion of a shaft having a circular cross section is sharpened while a rear end flange 41 is protruded laterally from a position near the rear end. . And the taper part of the front-end | tip is the valve main body 40V which has the taper surface 40T, The back side has comprised the back end shaft part 40S which concerns on this invention from the valve main body 40V. In addition, the inclination angle (ie, taper angle) of the tapered surface 40T with respect to the central axis of the valve body 40V is smaller than the taper angle of the tapered portion 35T, whereby the first valve body 40 is brought into the first valve hole 40A. As it advances forward, the tapered surface of the valve body 40V comes into line contact with the valve seat 40B, and an annular seal portion is formed between the first valve body 40 and the valve seat 40B. Further, the range from the position near the front end of the drive shaft 80 to the front end is the front end cylinder part 81 according to the present invention, and the iron ball 43 and the first compression coil spring 42 are inward from the front end opening of the front end cylinder part 81. After being accommodated in order, the rear end portion of the rear end shaft portion 40 </ b> S is accommodated, and then the locking collar 82 is press-fitted inside the front end cylindrical portion 81. The locking collar 82 is integrated with the drive shaft 80 by the above press-fitting to constitute a “first axial force transmission portion” according to the present invention. The first compression coil spring 42 corresponds to a “valve body biasing means”, a “first valve body pressing spring”, and a “first valve body pressing coil spring” according to the present invention. The first compression coil spring 42 is sandwiched between the rear end flange 41 and the rear surface of the front end cylindrical portion 81 together with the iron ball 43 to urge the first valve body 40 forward, and the first valve body 40 is The rear end flange 41 is pressed against the locking collar 82 in a state of being separated from the valve seat 40B. The iron ball 43 is provided so as not to transmit the rotation of the drive shaft 80 to the first valve body 40.

  Next, the detailed shapes around the front second valve hole 52A and the rear second valve hole 51A will be described. As shown in FIG. 2, both the front second valve hole 52A and the rear second valve hole 51A are circular holes having an inner diameter larger than that of the first valve hole 40A. Then, an intersection portion of the partition wall 63 between the front inflow region 23 and the second outflow passage 27 where the surface on the front inflow region 23 side intersects with the inner surface of the front second valve hole 52A forms the valve seat 52B, A crossing portion of the partition wall 32 between the side inflow region 21 and the second outflow passage 27 where the inner surface of the second outflow passage 27 side and the inner surface of the rear second valve hole 51A are orthogonal to each other is a valve seat 51B. .

  Moreover, the movable cylinder 50 penetrates through a cylindrical gap between the drive shaft 80 and the inner surface of the front second valve hole 52A so as to be able to move linearly. And the front side 2nd valve body 52 is provided in the front-end part arrange | positioned in the front inflow area | region 23 among the movable cylinders 50, On the other hand, the rear end part arrange | positioned in the 2nd outflow path 27 among the movable cylinders 50. A rear second valve body 51 is provided. An intermediate portion in the axial direction of the movable cylinder 50 is an intermediate small diameter portion 50B having a smaller diameter than the rear second valve body 51 and the front second valve body 52, and the intermediate small diameter portion 50B is a front second portion. It is loosely fitted to the inner surface of the valve hole 52A with a gap. Furthermore, the movable cylinder 50 is fitted to the drive shaft 80 so as to be linearly movable and rotatable.

  The front-side second valve body 52 has a truncated cone shape that gradually increases in diameter from the intermediate small diameter portion 50B of the movable cylinder 50 toward the front, and includes a tapered surface 52T. A central protrusion 50T protrudes from the center portion in a stepped manner on the front end surface of the movable cylindrical body 50 corresponding to the bottom surface of the truncated cone shape in the front second valve body 52. Correspondingly, a rear end small diameter portion 35E is formed at the rear end portion of the support sleeve 35 by reducing the outer diameter in a stepped shape, and a step surface 35D on the front end side of the rear end small diameter portion 35E. And a second compression coil spring 54 corresponding to the “valve element urging means” and the “second valve element pressing coil spring” of the present invention are disposed between the first compression coil spring 54 and the front end surface of the movable cylinder 50. Both end portions are fitted to the outside of the intermediate small diameter portion 50B and the rear end small diameter portion 35E. The movable cylinder 50 is urged rearward by the elastic force of the second compression coil spring 54, and the tapered surface 52T of the front second valve body 52 is pressed against the valve seat 52B of the front second valve hole 52A. The front second valve hole 52A is closed.

  Further, the rear second valve body 51 gradually reduces the diameter of the rear end side of the disk body that protrudes laterally in a stepped manner from the rear side of the intermediate small diameter portion 50B in the movable cylinder 50 toward the rear. It is formed in a truncated cone shape, and has a tapered surface 51T at the rear end. Further, the inclination angle (ie, taper angle) of the tapered surface 51T of the rear second valve body 51 with respect to the central axis of the rear second valve body 51 is larger than the taper angle of the tapered surface 52T of the front second valve body 52. It has become. Then, the movable cylinder 50 is biased rearward by the elastic force of the second compression coil spring 54 described above, so that the tapered surface 51T of the rear second valve body 51 becomes the valve of the rear second valve hole 51A. The rear second valve hole 51A is closed by being pressed against the seat 51B.

  A pressing flange 80 </ b> F corresponding to the “axial force transmitting portion” and the “second axial force transmitting portion” of the present invention is provided at an intermediate portion in the axial direction of the drive shaft 80. As shown in FIG. 2, the pressing flange 80 </ b> F is disposed at a position spaced upward from the movable cylinder 50 with the first valve body 40 closing the first valve hole 40 </ b> A, and advances the drive shaft 80. Sometimes, the movable cylinder 50 can be pressed against the rear end surface of the movable cylinder 50.

  By the way, the front second valve body 52 and the valve seat 52B of the front second valve hole 52A are made of metals having different hardnesses in contact with each other when the valve is closed, so that the front metal seal portion according to the present invention is used. Thus, when the front second valve body 52 is pressed against the valve seat 52B, the metal of the valve seat 52B is crushed and the front annular contact portion 69 is formed between the front second valve body 52 and the valve seat 52B. Formed and sealed (see FIG. 7). Similarly, the rear second valve body 51 and the valve seat 51B of the rear second valve hole 51A are made of metals having different hardnesses in contact with each other when the valve is closed, and the rear side according to the present invention. It is a metal seal part. In this embodiment, since the taper angles of the tapered surfaces 51T and 52T in the front and rear metal seal portions are different, the inside of the front end edge 69A of the front annular contact portion 69 in the front metal seal portion is as follows. The difference between the area and the area inside the front end edge 68A of the rear annular contact portion 68 in the rear metal seal portion can be adjusted to be small.

  That is, with the front second valve hole 52A and the rear second valve hole 51A closed by the front second valve body 52 and the rear second valve body 51, the movable cylinder 50 is added to the rear side with a tool or the like. When pressed, the metal of the valve seat 52B of the front metal seal portion is crushed by the metal of the front second valve body 52, and the metal of the valve seat 51B in the rear metal seal portion is pushed by the metal of the rear second valve body 51. The position where the movable cylinder 50 is closed with respect to the support body 20 in the valve-closed state is slightly shifted rearward.

  Here, in the present invention, as described above, the taper angle of the taper surface 51T of the rear second valve body 51 is larger than the taper angle of the taper surface 52T of the front second valve body 52, so that the movable cylinder 50 is stopped. Compared to the amount of change in the area inside the front end edge 69A of the front annular contact portion 69 in the front metal seal portion with respect to the positional deviation amount, the area inside the front end edge 68A of the rear annular contact portion 68 in the rear metal seal portion. The amount of change is greater. Thereby, in the initial state, the area inside the front end edge 69A of the front annular contact portion 69 in the front metal seal portion is slightly smaller than the area inside the front end edge 68A of the rear annular contact portion 68 in the rear metal seal portion. The annular contact portion 68, between the front metal seal portion and the rear metal seal portion, while pressing the movable cylinder 50 rearward to crush the metal of the valve seats 51B, 52B. It is possible to adjust so that the difference in the area inside 69 becomes small.

  In the flow control valve 10 of the present embodiment, the first valve body 40 and the valve seat 40B of the first valve hole 40A are also made of metals having different hardnesses to form a metal seal portion.

  This completes the description of the configuration of the flow control valve 10 of the present embodiment. Next, the effect of the flow control valve 10 of this embodiment is demonstrated. In the following description, when the rear second valve body 51 and the second valve body 52 are not distinguished from each other, they are appropriately referred to as “second valve bodies 51, 52”, and the rear second When the valve hole 51A and the front second valve hole 52A are not distinguished from each other, they will be appropriately referred to as “second valve holes 51A, 52A”.

  The flow control valve 10 connects a pipe or the like to the inflow port 26A so that the fluid can flow into the inflow path 26, and connects the pipe or the like to the first outflow port 29A and the second outflow port 27A to connect the first outflow path. 29 and the second outflow passage 27 are set in a state in which fluid can be discharged to the outside. Then, by applying a pulse signal to the stepping motor 13 (see FIG. 1) of the flow control valve 10, the valve opening degree is changed to control the flow rate of the fluid flowing from the pipe to the other pipe. Specifically, when a pulse signal is applied to the stepping motor 13, the drive shaft 80 rotates in an arbitrary direction by an arbitrary amount of rotation together with the rotor-side field portion 16 according to the number of pulses of the pulse signal. When the rotor side field portion 16 is rotated in one direction, the drive shaft 80 moves forward while rotating the drive shaft 80, and when the rotor side field portion 16 is rotated in the other direction, the drive shaft 80 rotates. Then, the inside of the support body 20 is retracted. Thereby, the position of the drive shaft 80 can be controlled to an arbitrary linear movement position. When the drive shaft 80 is disposed at an intermediate position of the movable stroke, as shown in FIG. 2, the pressing flange 80F of the drive shaft 80 is separated from the rear of the movable cylinder 50, although not shown in FIG. The locking collar 82 of the drive shaft 80 is in a state of being separated forward from the rear end flange 41 of the first valve body 40. Then, the movable cylinder 50 is urged rearward by the second compression coil spring 54, and the front second valve body 52 and the rear second valve body 51 are replaced by the front second valve hole 52A and the rear second valve hole 51A. The front second valve hole 52A and the rear second valve hole 51A are closed in contact with the valve seats 52B and 51B, and the first valve body 40 is attached to the front by the first compression coil spring 42 (see FIG. 5). The first valve hole 40A is closed by being abutted against the valve seat 40B of the first valve hole 40A. As a result, the flow rate of the fluid passing through the flow control valve 10 becomes “0”.

  When the drive shaft 80 is advanced from the intermediate position of the movable stroke, the rear end portion of the first valve body 40 is received in the back side of the front end cylinder portion 81 with the advance operation, and the drive shaft is in the middle of the drive shaft 80. The 80 pressing flange 80F comes into contact with the rear end surface of the movable cylinder 50, and the movable cylinder 50 is pushed forward. Thereby, as shown in FIG. 3, the front second valve body 52 and the rear second valve body 51 are simultaneously separated from the valve seats 52B and 51B of the front second valve hole 52A and the rear second valve hole 51A. Thus, the front second valve hole 52A and the rear second valve hole 51A are opened simultaneously, fluid flows from the inflow path 26 to the second outflow path 27, and is discharged from the second outlet 27A to the outside of the flow control valve 10. The Further, when the drive shaft 80 is further advanced, the opening degree of the front second valve hole 52A and the rear second valve hole 51A increases, and the second outflow from the inflow passage 26 according to the increase of the opening degree. The flow rate of the fluid flowing into the passage 27 increases.

  In addition, as the opening degree of the front second valve hole 52A and the rear second valve hole 51A increases, the compression deformation of the first compression coil spring 42 between the rear end flange 41 of the first valve body 40 and the drive shaft 80 is increased. As the amount increases, the pressing force of the first valve body 40 against the valve seat 40B by the first compression coil spring 42 also increases, and the sealing degree of the first valve hole 40A increases.

  When the drive shaft 80 is retracted from the state in which the front second valve hole 52A and the rear second valve hole 51A are open, the opening degree of the front second valve hole 52A and the rear second valve hole 51A gradually decreases. The front second valve hole 52A and the rear second valve hole 51A are closed when the drive shaft 80 reaches the middle position of the movable stroke, and the flow rate of the fluid passing through the flow control valve 10 becomes “0” ( (See FIG. 2). When the drive shaft 80 is further retracted from the intermediate position of the movable stroke, the locking collar 82 of the drive shaft 80 is engaged with the rear end flange 41 of the first valve body 40 as shown in FIGS. The first valve body 40 is pulled rearward and moved rearward. As a result, the first valve hole 40A opens away from the valve seat 40B of the first valve hole 40A, the fluid flows from the inflow path 26 to the first outflow path 29, and the flow control valve 10 from the first outflow port 29A. Is discharged outside. When the drive shaft 80 is further retracted, the opening degree of the first valve hole 40A increases, and the flow rate of the fluid flowing from the inflow path 26 to the first outflow path 29 in accordance with the increase in the opening degree. It will increase.

  Here, since the opening area of the first valve hole 40A is different from the total opening area of the second valve holes 51A, 52A, the fluid is allowed to pass through either the first valve hole 40A or the second valve holes 51A, 52A. Depending on how the flow rate of the fluid that can pass through the flow rate control valve 10 with respect to the change in position of the drive shaft 80 varies. Specifically, since the opening area of the first valve hole 40A is relatively small and the total opening area of the second valve holes 51A and 52A is relatively large, the drive shaft 80 is moved back and forth behind the intermediate position of the movable stroke. When the fluid flows straight from the inflow path 26 to the first outflow path 29 through the first outflow path 29A, the flow rate change with respect to the change in the position of the drive shaft 80 is relatively small as shown by the graph of g1 in FIG. When the first flow rate change characteristic is established and the drive shaft 80 is linearly moved forward and backward from the middle position of the movable stroke to flow the fluid from the inflow passage 26 to the second outflow passage 27 through the second valve holes 51A and 52A, As indicated by g2 in FIG. 8, a second flow rate change characteristic is obtained in which the flow rate change with respect to the position change of the drive shaft 80 is relatively large.

  In the flow control valve 10 of the present embodiment, the first valve body 40 is disposed on the rear side with respect to the first valve hole 40A in the front-rear direction of the linear movement of the linear movement shaft 80. Since the second valve bodies 51, 52 are disposed on the front side with respect to the two valve holes 51A, 52A, the first valve body 40 is moved directly on the rear side from the intermediate position of the movable stroke as described above. The flow rate control can be performed under the first flow rate change characteristic from the state where the flow rate is “0”, and the linear motion shaft 80 is linearly moved in front of the intermediate position of the movable stroke to perform the second control. It is also possible to operate only the valve bodies 51 and 52 and perform flow rate control under the second flow rate change characteristic from the state where the flow rate is “0”. That is, according to the flow control valve 10 of the present embodiment, it is possible to perform flow control by arbitrarily selecting two types of flow rate change characteristics.

  Moreover, in the flow control valve 10 of the present embodiment, as shown in FIG. 6, the internal pressure that the front second valve body 52 receives from the fluid in the inflow path 26 and the rear second valve body 51 in the inflow path 26 The internal pressure received from the fluid is reversed and the front second valve body 52 and the rear second valve body 51 cancel (cancel) the internal pressure of the inflow passage 26, and the second valve bodies 51 and 52 are moved directly. It becomes possible to suppress the power for making it. Further, as described above, by changing the taper angles of the front second valve body 52 and the rear second valve body 51, the inner side of the front annular contact portion 69 between the front second valve body 52 and the valve seat 52B. And the area inside the rear annular contact portion 68 of the rear second valve body 51 and the valve seat 51B can be brought close to 0, whereby the front second valve body 52 and the rear side It is possible to substantially reduce the power that causes the front second valve body 52 and the rear second valve body 51 to move directly by canceling out substantially all of the pressure received by the second valve body 51 from the fluid.

[Other Embodiments]
The present invention is not limited to the above-described embodiment. For example, the embodiments described below are also included in the technical scope of the present invention, and various modifications are possible within the scope of the invention other than the following. It can be changed and implemented.

(1) In the flow control valve 10 of the above you facilities embodiment, and the partition wall 63 in a ring shape, is press-fitted into the through hole 25 formed in the support body 20, the position of the valve seat 52B in the axial direction of the movable cylindrical member 50 It may be adjustable. According to this configuration, the movable cylinder 50 is moved with a tool or the like with the front second valve hole 52A and the rear second valve hole 51A closed by the front second valve body 52 and the rear second valve body 51. When pressure is applied to the rear side, the valve seat 52B of the front second valve hole 52A that is opened and closed by the front second valve body 52 having a small taper angle shifts in the axial direction with respect to the press-fitted portion of the movable cylinder 50. The area inside the front annular contact portion 69 does not increase with respect to the metal crushing amount of the valve seat 52B, and the valve seat of the rear second valve hole 51A that is opened and closed by the rear second valve body 51 having a large taper angle. In 51B, the metal crushing of the valve seat 51B proceeds without shifting in the axial direction of the movable cylinder 50. Thereby, in the initial state, the inner area of the front annular contact portion 69 in the front metal seal portion is different from the inner area of the rear annular contact portion 68 in the rear metal seal portion. While crushing the metal of the valve seats 51B and 52B, it is possible to adjust so that the difference between the inner areas of the annular contact portions 68 and 69 in both metal seal portions becomes small.

(2) In the above you facilities embodiment, although smaller than the taper angle of the front second taper angle is rear the second valve body 51 of the valve body 52, it may be large and small reversed. That is, the taper angle of the front second valve body 52 may be larger than the taper angle of the rear second valve body 51. In this configuration, in the initial state, the area inside the front annular contact portion 69 in the front metal seal portion is made smaller than the area inside the rear annular contact portion 68 in the rear metal seal portion. While crushing the metal of the valve seats 51B and 52B of the metal seal portion, it is possible to adjust so that the difference between the areas inside the annular contact portions 68 and 69 in both metal seal portions becomes small. At that time, similarly to the above-described embodiment (1), the partition wall 32 is ring-shaped and press-fitted into the through hole 25 formed in the support body 20, and the valve seat 51 </ b> B is axially moved in the movable cylinder 50. It may be possible to adjust the position.

(3) In the above embodiment, the fluid that has flowed through the first outflow passage 29 and the fluid that has flowed through the second outflow passage 27 are distinguished and discharged from the first outlet 29A and the second outlet 27A to the outside of the support body 20. As shown in FIG. 9 , the fluid flowing through the first outflow path 29 and the fluid flowing through the second outflow path 27 are not distinguished from each other from the common outlet 70. The structure discharged | emitted outside may be sufficient.

  (4) The opening areas of the front second valve hole 52A and the rear second valve hole 51A may be different. Even in this configuration, the front side second valve body 52 and the rear side second valve body 51 cancel the pressure received from the fluid, and the front side second valve body 52 and the rear side second valve body 51 are moved directly. It becomes possible to reduce the power of the.

(5) The area inside the front annular contact portion 69 in the front metal seal portion is made slightly smaller than the area inside the rear annular contact portion 68 in the rear metal seal portion, and the front second valve body The angle between the tapered surface of 52 and the central axis of the linear member 80 may be smaller than the angle between the tapered surface of the rear second valve body 51 and the central axis of the linear member 80. With this configuration, similarly to the above you facilities embodiment, the difference of the inner area of the inner area and the rear contact ring 68 of the front contact ring 69 between the front metal seal portion and the rear metal seal portion It can be adjusted to be smaller.

[Reference example]
  Hereinafter, reference examples (1) to (3) that do not belong to the technical scope of the present invention but can solve the problems of the present invention will be shown.

(1) The flow control valve 10V of the present reference example is shown in FIG. 10, and the second valve body 50V has only the rear second valve body 51, and the first outflow path 29 and the second outflow path 27. The front second valve hole 52A is not formed in the partition wall 63V between the first and second embodiments. Further, a central protrusion 150T similar to the central protrusion 50T of the above embodiment is formed on the front end surface of the second valve body 50V, and a step protrusion 63T is formed on the second outflow path 27 side of the partition wall 63V. The second compression coil spring 54 is disposed between the step surface 150D on the rear end side of the central protrusion 150T and the step surface 63D on the front end side of the step protrusion 63T. About another structure, it is the same as the flow control valve 10 of the said embodiment. The partition wall 63V of this reference example corresponds to the “linear motion support wall” in the present invention.

(2) This reference example has a configuration in which the second valve body 50W and the first valve body 40W are urged by a common compression coil spring 71, as shown in FIG. The compression coil spring 71 of this reference example corresponds to the “first compression coil spring” and the “second compression coil spring” of the present invention.

(3) In the above embodiment, the second valve hole (the front second valve hole 52B, the rear second valve hole 51A) and the first valve hole 40A are arranged on the same axis of the linear motion shaft 80. However, in the flow control valve 110 of the present reference example, as shown in FIG. 12, the central axis of the linear motion member 180, the central axis of the first valve port 140A, and the central axis of the second valve hole 151A are parallel to each other. However, they are not arranged on the same axis. Also with this configuration, the same effects as those of the above embodiment can be obtained.

DESCRIPTION OF SYMBOLS 10 Flow control valve 20 Support body 21 Rear inflow area 23 Front inflow area 24W, 32, 63 Partition wall 26 Inflow path 27 2nd outflow path 27A 2nd outflow port 29 1st outflow path 29A 1st outflow path 35 Support sleeve ( Linear motion support wall)
40 1st valve body 40A 1st valve hole 40B, 51B, 52B Valve seat 40S Rear end shaft part 41 Rear end flange 42 1st compression coil spring (Valve body biasing means, 1st valve body press coil spring, 1st valve body press Spring)
50 movable cylinder 51 rear second valve body 51A rear second valve hole 52 front second valve body 52A front second valve hole 54 second compression coil spring (valve body biasing means, second valve body pressing coil spring)
70 Outlet 80 Drive shaft (linear motion member)
80F pressing flange (axial force transmission part, second axial force transmission part)
81 Front end cylinder part 82 Locking collar (Axial force transmission part, 1st axial force transmission part)

Claims (9)

When the linearly moving member (80) that moves forward or backward moves to one side from the intermediate position of the movable stroke, it locks with the valve body (40, 51, 52) that closes the valve hole (40A, 51A, 52A). Then, when the valve hole (40A, 51A, 52A) is opened and the linear motion member (80) moves to the other side from the intermediate position, the linear motion member (80) and the valve body (40, 51). , together with the engagement of the 52) is released, the flow control valve (10, wherein the valve hole (40A by the valve body urging means (42 and 54), 51A, 52A) closed state to be maintained) met And
A first valve body (40) and a second valve body (51, 52) as the valve body;
The valve formed on the support body (20) and disposed on the forward side of the linear motion member (80) with respect to the first valve body (40) and opened and closed by the first valve body (40) A first valve hole (40A) as a hole;
Formed on the support body (20) and disposed on the retreating side of the linear motion member (80) with respect to the second valve body (51, 52), the second valve body (51, 52) A second valve hole (51A, 52A) as the valve hole that is opened and closed and has a different opening area from the first valve hole (40A);
An inflow formed in the support body (20) so that fluid flows from the outside of the support body (20) and has the first valve hole (40A) and the second valve hole (51A, 52A) on the inner surface. Road (26),
A first outflow passage (29) formed in the support body (20) and capable of communicating with the inflow passage (26) through the first valve hole (40A);
A second outflow passage (27) formed in the support body (20) and capable of communicating with the inflow passage (26) through the second valve hole (51A, 52A);
The valve body that holds both the first valve body (40) and the second valve body (51, 52) in a closed state when the linear motion member (80) is disposed at an intermediate position of the movable stroke. Biasing means (42, 54);
Provided to the linear motion member (80), and when the linear motion member (80) advances from an intermediate position of the movable stroke, a forward axial force is applied to the second valve body (51, 52); The second valve body (51, 52) is separated from the valve seat (51B, 52B) of the second valve hole (51A, 52A), while the linear motion member (80) is retracted from an intermediate position of the movable stroke. Axial force transmission is applied to the first valve body (40) to separate the first valve body (40) from the valve seat (40B) of the first valve hole (40A). in section (80F, 82) and a flow control valve having a (10),
The linear motion member (80) extending linearly in the driving direction;
The first outflow passage (29) disposed coaxially with the linear motion member (80);
A front inflow region (23) provided in the inflow passage (26) and disposed on the receding side of the linear motion member (80) with respect to the first outflow passage (29);
The second outflow passage (27) disposed on the receding side of the linear motion member (80) with respect to the front inflow region (23);
A rear inflow region (21) provided in the inflow passage (26) and disposed on the backward side of the linear motion member (80) with respect to the second outflow passage (27);
The support body (20) is formed through a partition wall (24W) between the first outflow path (29) and the front inflow region (23), and is positioned coaxially with the linear motion member (80). Said first valve hole (40A),
The support body (20) is formed through the partition wall (63) between the front inflow region (23) and the second outflow passage (27), and the linear motion member (80) penetrates the first body. A front second valve hole (52A) as two valve holes;
The support body (20) is formed through a partition wall (32) between the rear inflow region (21) and the second outflow passage (27), and the linear motion member (80) is penetrated through the support body (20). A rear second valve hole (51A) as a second valve hole;
It forms a cylindrical shape that penetrates a cylindrical gap between the linear motion member (80) and the inner surface of the front second valve hole (52A) so that the linear movement is possible, and the front end portion is the front inflow region (23). A movable cylinder (50) whose rear end is disposed in the second outflow passage (27),
A front second valve body (52) as the second valve body provided at the front end of the movable cylinder (50) and capable of opening and closing the front second valve hole (52A);
The rear second valve hole (51A) is provided at the rear end portion of the movable cylinder (50), and the front second valve body (52) opens and closes the front second valve hole (52A). A rear second valve body (51) as the second valve body for opening and closing
The front second valve body (50) is provided on the linear motion member (80), and presses the movable cylinder (50) when the linear motion member (80) advances from an intermediate position of the movable stroke. 52) and the second second valve body (51) as the axial force transmitting portion that separates the front second valve hole (52A) and the rear second valve hole (51A) from the respective valve seats. A transmission section (80F);
Provided on the linear motion member (80), and when the linear motion member (80) is retracted from an intermediate position of the movable stroke, it is engaged with a rear end of the first valve body (40) and pulled, A flow control valve comprising: a first axial force transmission portion (82) as the axial force transmission portion for separating the first valve body (40) from the valve seat of the first valve hole (40A). (10). The area inside the annular contact portion (69) between the front second valve body (52) and the valve seat (52B) of the front second valve hole (52A), and the rear second valve body (51) The flow control valve (10) according to claim 1, characterized in that the inner area of the annular contact portion (68) with the valve seat (51B) of the rear second valve hole (51A) is the same. . A contact portion between the front second valve body (52) and the valve seat (52B) of the front second valve hole (52A) is made of a dissimilar metal, and the front second valve body (52) is formed in a tapered shape. A front metal seal portion (52, 52B) capable of crushing and sealing the valve seat (52B) of the front second valve hole (52A) with the front second valve body (52);
  A contact portion between the rear second valve body (51) and the valve seat (51B) of the rear second valve hole (51A) is made of a different metal, and the rear second valve body (51) is the front side. The second valve body (52) has a tapered shape with a different taper angle, and the valve seat (51B) of the rear second valve hole (51A) is crushed by the rear second valve body (51). The flow control valve (10) according to claim 2, further comprising a sealable rear metal seal (51, 51B). A contact portion between the front second valve body (52) and the valve seat (52B) of the front second valve hole (52A) is made of a dissimilar metal, and the front second valve body (52) is formed in a tapered shape. A front metal seal portion (52, 52B) capable of crushing and sealing the valve seat (52B) of the front second valve hole (52A) with the front second valve body (52);
  A contact portion between the rear second valve body (51) and the valve seat (51B) of the rear second valve hole (51A) is made of a different metal, and the rear second valve body (51) is the front side. After the second valve body (52) has a taper shape with a larger taper angle, the valve seat of the rear second valve hole (51A) can be crushed and sealed by the rear second valve body (51). Side metal seal (51, 51B);
  A through hole formed in the support body (20) with a partition wall (63) between the front inflow region (23) and the second outflow passage (27) in the support body (20) having a ring shape. And a position adjusting mechanism that allows the valve seat (52B) of the second valve hole (52A) to be adjusted in the axial direction of the movable cylinder (50) by press-fitting into the inner surface of (25). The flow control valve (10) according to claim 2, characterized by: The valve body urging means (42, 54) for urging the first valve body (40) is provided between the first valve body (40) and the linear motion member (80). The flow control valve (10) according to any one of claims 1 to 4, further comprising a first valve body pressing spring (42). A front end cylinder part (81) formed at the front end part of the linear motion member (80);
  A rear end shaft portion (40S) formed at a rear end portion of the first valve body (40) and fitted to the front end cylinder portion (81) so as to be capable of linear movement;
  A rear end flange (41) projecting laterally from the rear end portion of the rear end shaft portion (40S);
  A first axial force transmitting portion that protrudes inward from the front end of the front end cylindrical portion (81) and abuts against the rear end flange (41) from the front side to apply an axial force to the first valve body (40). A uniaxial force transmission portion (82);
  The valve that is sandwiched between the rear surface of the front end tube portion (81) and the rear surface of the rear end shaft portion (40S) or the rear end flange (41) and biases the first valve body (40). The flow control valve (10) according to any one of claims 1 to 4, further comprising a first valve body pressing coil spring (42) as a body biasing means. A linear motion support wall (35) provided on the support body (20) and supporting the linear motion member (80) or the rear end shaft portion (40S) so as to be linearly movable;
  It is sandwiched between the linear motion support wall (35) and the movable cylinder (50) and is inserted outside the linear motion member (80), and the front second valve body (52) and the rear The flow control valve (10) according to claim 6, further comprising a second valve body pressing coil spring (54) as the valve body urging means for urging the second side valve body (51). . An outlet (70) that can be discharged to the outside of the support body (20) without distinguishing between the fluid that has flowed through the first outlet channel (29) and the fluid that has flowed through the second outlet channel (27). A flow control valve (10) according to any one of claims 1 to 7, characterized in that it is characterized in that A first outlet (29A) and a second outlet that are capable of distinguishing between the fluid that has flowed through the first outlet channel (29) and the fluid that has flowed through the second outlet channel (27) to the outside of the support body (20). The flow control valve (10) according to any one of claims 1 to 7, further comprising two outlets (27A).