JP2013245155A - Crucible holding tool and method for producing crucible holding tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a crucible holding tool having high purity, high strength and light weight and easily producible at a low cost.SOLUTION: There is provided a crucible holding tool 1 having a hollow body part 2 capable of holding a crucible in the body and a bottom part 3. The hollow body part 2 is produced by stacking a plurality of hole-opened plates 2a-2o made of a carbon fiber-reinforced carbon composite material and having a hole at the center while bonding the plates with each other, and the bottom part 3 is produced by bonding flat plates 3a-3c made of a carbon fiber-reinforced carbon composite material to the bottom of the hollow body part 2.

Description

  The present invention relates to a crucible holder and a method for manufacturing a crucible holder.

  Conventionally, a crystal manufacturing apparatus has been used as an apparatus for growing an ingot by growing single crystals and polycrystals. For example, a single crystal using the Czochralski method (CZ method) for manufacturing a single crystal ingot of silicon is used. Examples include a crystal pulling apparatus, a crystal manufacturing apparatus using a casting method for manufacturing a silicon polycrystalline ingot, and the like (for example, Patent Document 1 (Japanese Patent Laid-Open No. 2012-1386)). The manufactured ingot is sliced into a wafer, which is used for semiconductors, solar cells, and the like.

  In the crystal manufacturing apparatus, a heat-resistant crucible such as a quartz crucible is suitably used as a container for storing a melt. This is because silicon required for semiconductors is required to have eleven nines (99.99999999999%) and extremely high purity is required, and silicon required for solar cells is required to be as high as six nines (99.9999%). Therefore, the crucible is preferably made of quartz having heat resistance and high purity (low impurity content).

By the way, in manufacturing an ingot using the above crystal manufacturing apparatus, silicon is heated to a melting point (1400 ° C.) or higher, but since the softening point of the quartz crucible is 1600 to 1700 ° C., the quartz crucible is Some softening is inevitable.
For this reason, in the crystal manufacturing apparatus, it has been performed to hold a quartz crucible by placing a graphite holder outside the quartz crucible. This graphite holder is suitable as a holder for a quartz crucible because of its high purity (low impurity content) and high strength even at temperatures of 1600 ° C. or higher.

JP 2012-1386 A

However, with the recent increase in the size of crystal manufacturing apparatuses, the above-mentioned graphite holders are also increased in size and incurred weight, and this has led to a decrease in handling properties and the need to cope with weight increases. The price of the equipment has increased.
Under such circumstances, in recent years, a carbon fiber reinforced carbon composite material (CC material) has attracted attention as a constituent material of the holder.
CC material has a high purity like graphite, and has a higher strength per bulk density than graphite, that is, a specific strength, and has a “light and strong” property. It is expected to achieve both strength and weight reduction.

By the way, as a crucible holder used in a crystal manufacturing apparatus for a single crystal, a bowl-shaped one is generally known.
When trying to manufacture this bowl-shaped crucible holder from CC material, first, for example, by “hand lay-up method”, a prepreg made of carbon fiber cloth is attached to a mold and laminated, or “filament winding method ( By wrapping carbon fiber impregnated with resin around a molding die, it is molded into a near net shape (shape approximating the shape of the final product) made of carbon fiber with resin (binder) attached. Subsequently, a firing process and a purification process are performed, and further, machining is performed as necessary.
However, a series of processes such as forming into the near net shape, baking process, high-purification process, and machining are complicated and require a very long production period.

  In addition, it is possible to improve the dimensional accuracy of the product finally obtained by machining, but in order to increase the degree of freedom of processing, it is necessary to produce a thick molded body when forming into a near net shape In the case of a thick molded body, there is a technique that (1) the amount of expensive carbon fiber used increases, or (2) there is a greater possibility that delamination or the like will occur not only at the time of molding but also in the subsequent processes. Has a problem.

On the other hand, in a crystal manufacturing apparatus for polycrystals, a quadrangular prism-type ingot is suitably produced, so that many crucibles are used as crucibles. The shape is often used.
When the box-shaped crucible holder is manufactured by assembling a flat plate member made of CC material, the structural strength of the obtained crucible holder depends on the strength of the weakest member among the members, It depends on the strength of bolts and pins, which are the joint location and joint parts.
For this reason, depending on the structure of the assembled holder, although it is made of CC material, it may not be able to exhibit the desired strength, for example, its strength stops at the same level as that of graphite of the same shape.

  Therefore, the present invention provides a crucible holder that is high purity, high strength and light weight and can be manufactured easily and at low cost, and a crucible holder that is high purity, high strength and light weight is simple and low cost. It is an object to provide a method for producing the same.

  In order to achieve the above object, as a result of intensive studies by the present inventors, a crucible holder having a hollow body portion and a bottom portion that can accommodate a crucible therein, wherein the hollow body portion is A plurality of aperture plates made of carbon fiber reinforced carbon composite material having an opening at the center and laminated while adhering to each other, and the bottom is a flat plate made of carbon fiber reinforced carbon composite material The present inventors have found that the above object can be achieved by a crucible holder that is formed by adhering a material to the bottom of the body, and have completed the present invention based on this finding.

That is, the present invention
(1) A crucible holder provided with a hollow body portion and a bottom portion capable of accommodating a crucible inside,
The hollow body is formed by laminating a plurality of opening plate-like materials made of carbon fiber reinforced carbon composite material having an opening at the center,
The bottom part is formed by adhering a flat plate made of a carbon fiber reinforced carbon composite material to the bottom of the hollow body part,
(2) The plurality of aperture plates are aperture discs having a circular opening at the center and the flat plate is a disc or the plurality of aperture plates The crucible holder as described in (1) above, wherein the plate-shaped object is a square plate-shaped object, and the plate-shaped object is a square plate-shaped object having a rectangular opening provided in the center.
(3) The crucible holder according to (1) or (2) above, wherein the thickness of the opening plate and the plate is 5 to 15 mm,
(4) The crucible holder according to any one of the above (1) to (3), wherein the distance from the outer periphery of the opening plate to the opening is 5 mm or more,
(5) The crucible holder according to any one of the above (1) to (4), wherein the surface of the adhesive between the opening plate and the flat plate is smoothed.
(6) A method for producing a crucible holder having a hollow body portion and a bottom portion capable of accommodating a crucible inside,
A step of laminating and bonding a plurality of opening plate-like materials made of carbon fiber reinforced carbon composite material having an opening in the center, and an opening plate shape arranged at the bottom of the plurality of opening plate-like materials The manufacturing method of the crucible holder characterized by including the process of adhere | attaching a thing and the flat-plate-like object made from a carbon fiber reinforced carbon composite material is provided.

  According to the present invention, a high-purity, high-strength and lightweight crucible holder that can be manufactured easily and at low cost is provided, and a high-purity, high-strength and lightweight crucible holder is simple and low-cost. A method of manufacturing can be provided.

It is (i) front view, (ii) top view, and (iii) vertical sectional view showing an example of the crucible holder of the present invention. It is (i) front view, (ii) top view, and (iii) vertical sectional view showing an example of the crucible holder of the present invention. It is a sectional view before smoothing and (ii) a sectional view after smoothing which shows an example of a crucible holder of the present invention. It is explanatory drawing of the shaping | molding die used by the comparative example of this invention. It is explanatory drawing of the shaping | molding die used by the comparative example of this invention.

First, the crucible holder of the present invention will be described.
The crucible holder of the present invention is a crucible holder having a hollow body portion and a bottom portion that can accommodate a crucible therein, and the hollow body portion is a carbon fiber reinforced with an opening provided in the center. A plurality of aperture plates made of carbon composite material are laminated while being bonded to each other, and the bottom portion is bonded to a flat plate made of carbon fiber reinforced carbon composite material to the bottom of the hollow body portion. It is characterized by being made.

In the crucible holder of the present invention, the opening plate-like material and the flat plate-like material are made of a CC material (carbon fiber reinforced carbon composite material).
Although it does not restrict | limit especially as CC material, The thing formed by carbonizing various CFRP (carbon fiber reinforced plastics) which uses PAN (polyacrylonitrile) or pitch-type carbon fiber as a starting material can be mentioned.

  Examples of the CFRP include CFRP obtained by laminating a prepreg prepared by impregnating a resin in a UD (unidirectionally aligned) carbon fiber or 2D (two-dimensional woven) carbon fiber woven fabric, and 3D (three-dimensional woven) carbon fiber. Examples thereof include CFRP in which a woven fabric is impregnated with a resin and heated and cured, and CFRP in which a mixture of chopped fibers and resin pellets is subjected to pressure heat treatment.

  The CC material is preferably obtained by carbonizing CFRP by firing treatment for a desired time under a desired temperature condition in an inert atmosphere. In addition, the CC material may be obtained by performing a purification treatment in which CFRP is reacted with a halogen gas at a high temperature to remove impurities as necessary. Further, the CC material may be obtained by carbonizing CFRP as necessary, then impregnating with pitch or resin, performing carbonization again, and densifying.

  Since the crucible holder of the present invention is made of CC material, it can easily exhibit high purity, high strength and light weight.

Hereinafter, the preferable form of the crucible holder of the present invention will be described with reference to the drawings.
1 and 2 illustrate a specific form of the crucible holder of the present invention.
FIG. 1 is a view showing one embodiment of the crucible holder according to the present invention. FIG. 1 (i) is a front view of the crucible holder 1, FIG. 1 (ii) is a top view of the crucible holder 1, and FIG. 1 (iii) is a vertical sectional view taken along line XX ′ of the crucible holder 1 shown in FIG. 1 (ii).
FIG. 2 is also a view showing an embodiment of the crucible holder according to the present invention. FIG. 2 (i) is a front view of the crucible holder 1, and FIG. 2 (ii) is a top view of the crucible holder 1. FIG. 2 (iii) is a vertical cross-sectional view taken along line YY ′ of the crucible holder 1 shown in FIG. 2 (ii).

As shown in FIGS. 1 and 2, in the present invention, a crucible holder 1 includes a hollow body 2 and a bottom 3, and the hollow body 2 is a carbon fiber having an opening at the center. A plurality of aperture plate-like objects 2a to 2o made of a reinforced carbon composite material are laminated while being bonded to each other.
In the crucible holder of the present invention, the shape of the crucible holder 1 can be appropriately selected according to the shape of the crucible to be held, and when the shape of the crucible to be held is bowl-shaped, the crucible holder The shape of the crucible is preferably a bowl shape as shown in FIG. 1, and when the shape of the crucible to be held is a box shape, the shape of the crucible holder may be a box shape as shown in FIG. preferable.

  As shown in FIG. 1, when the shape of the crucible holder 1 to be obtained is bowl-shaped, the shape of the hollow body 2 is also preferably bowl-shaped. In this case, as shown in FIG. The shape of the opening plate-shaped object constituting the hollow body 2 is preferably an opening disk-shaped object (opening disk-shaped objects 2a to 2o) in which a circular opening is provided at the center. When a bowl-shaped hollow body is formed using an opening disk-like object having a circular opening at the center, as shown in FIG. 1 (iii), an opening disk disposed on the lower side The diameters of the circular openings of the shaped objects 2a to 2e are enlarged stepwise from the opened disk-shaped object 2a arranged at the lowermost part toward the opened disk-shaped object 2e, and the upper part of the opened disk-shaped object 2e. By making the diameter of the openings of the open disk-shaped objects 2f to 2o constant while increasing the diameter of the openings of the open disk-shaped objects 2f to 2o to be larger than that of the open plate-shaped object 2e, Can be formed.

  Moreover, as shown in FIG. 1, when the shape of the crucible holder 1 to be obtained is bowl-shaped, the plate-like objects constituting the bottom 3 are disk-like objects (disk-like objects 3a to 3c). It is preferable. The disk-shaped object which comprises the bottom part 3 may be one, and may be multiple sheets (as shown in FIG. 1).

  On the other hand, as shown in FIG. 2, when the shape of the crucible holder to be obtained is a box shape, the shape of the hollow body portion 2 is also preferably a square frame shape. In this case, as shown in FIG. In addition, the shape of the opening plate-like material constituting the hollow body 2 is preferably an opening square plate-like material (opening square plate-like materials 2a to 2o) in which a square opening is provided at the center. . When a box-shaped hollow body is formed using an open square plate having a square opening at the center, as shown in FIG. 2 (iii), the open square plate has the same size. A rectangular frame-shaped hollow body can be formed by stacking the objects 2a to 2o.

  Moreover, as shown in FIG. 2, when the shape of the crucible holder 1 to be obtained is a box shape, the flat plate-like material constituting the bottom portion 3 is a square plate-like material (square plate-like material 3a to 3a- 3c) is preferred. The square plate-like object constituting the bottom 3 may be a single sheet or a plurality of sheets (as shown in FIG. 2).

  In the crucible holder of the present invention, the opening plate-like material and the flat plate-like material may be surface-treated by grinding or the like, or may be unprocessed.

In the crucible holder of the present invention, the thickness of the opening plate or flat plate is preferably 5 to 15 mm, more preferably 8 to 15 mm, and further preferably 10 to 15 mm.
It is difficult to produce large-sized open plate or flat plate with a thickness exceeding 15 mm, and open plate or flat plate with a thickness of less than 5 mm constitutes a crucible holder. In order to increase the number of open plate-like objects and flat plate-like objects used, the production becomes complicated.
In the present application documents, the thickness of the aperture plate or plate can be measured with a caliper or the like.

  In the crucible holder of the present invention, the length in the vertical direction or the horizontal direction that defines the main surface of the opening plate-like object or the flat plate-like object may be appropriately determined according to the size of the crucible holder to be obtained. When the crucible holder of the present invention is formed by smoothing the surface of the laminated adhesive product of the opening plate and flat plate, select the opening plate and flat plate considering the processing allowance in advance. do it.

In the crucible holder according to the present invention, the width of the opening plate-like material constituting the crucible holder (the distance from the outer periphery of the opening plate-like material to the opening) is suitably 5 mm or more, and is 10 to 15 mm. Is more appropriate.
If the width of the aperture plate or flat plate is less than 5 mm, it may be thinner than the bundle of carbon fibers constituting the CFRP that is the raw material of the CC material, so the strength per 1 mm width is low. This is because there may be cases.
In this application document, the width of the aperture plate can be measured with calipers or the like.

In the crucible holder according to the present invention, the opening plate-like object includes a division of the opening plate-like object, and the flat plate-like object includes a division of the flat plate-like object.
There are no particular limitations on the shape of the opening plate-like object or the flat plate-like object, as long as it can form an opening plate-like object or a plate-like object having a desired shape when the divided object is assembled.

  In the crucible holder of the present invention, the opening plate or flat plate may be subjected to holes or spot facings for attaching positioning pins during bonding as required. Although the constituent material of the said pin is not restrict | limited in particular, It is preferable that it is the same material as the constituent material of an opening plate-shaped object and a flat plate-shaped object.

The crucible holder of the present invention is formed by adhering an opening plate and a flat plate. As the adhesive for bonding the opening plate and flat plate, a thermosetting resin or carbon powder is used. Can be mentioned as appropriate.
When the opening plate or flat plate has a positioning pin, the crucible holder of the present invention is about the pin, the hole for attaching the pin, or the spot facing together with the opening plate or flat plate. Also, it is preferable that these are also bonded.

In addition, the crucible holder of the present invention may be one obtained by bonding an aperture plate-like material, a flat plate-like material or the like with an adhesive, followed by firing treatment. The firing treatment is preferably performed by heating and holding at a temperature of 600 to 1400 ° C. for 1 to 24 hours in an inert gas atmosphere such as nitrogen gas.
Furthermore, the crucible holder of the present invention may be a product obtained by subjecting an adhesive such as the above-mentioned open plate or flat plate to a halogen gas at a high temperature to remove impurities to perform a purification treatment. Good.

The crucible holder according to the present invention may be one in which the surface of the adhesive between the opening plate and the flat plate is smoothed. Smoothing can be performed by cutting or the like.
3 (i) is a vertical sectional view taken along line XX ′ of the crucible holder 1 shown in FIG. 1 (ii), and FIG. 3 (ii) is a diagram showing the smoothing of the surface of the crucible holder shown in FIG. FIG. 4 is a vertical sectional view corresponding to FIG.

  Since the crucible holder of the present invention is formed by adhering an opening plate or flat plate, it can be manufactured easily and at low cost.

Next, the manufacturing method of the crucible holder of the present invention will be described.
The method for producing a crucible holder according to the present invention is a method for producing a crucible holder having a hollow body portion and a bottom portion that can accommodate a crucible therein, and is reinforced with carbon fiber having an opening at the center. A step of laminating and bonding a plurality of apertured plate-like materials made of carbon composite material to each other, and an apertured plate-like material arranged at the bottom of the plurality of apertured plate-like materials and a flat plate made of carbon fiber reinforced carbon composite material And a step of adhering the object.

  In the crucible holder manufacturing method of the present invention, the details of the opening plate-like material constituting the hollow body, the flat plate-like material constituting the bottom, and the adhesive for bonding the opening plate-like material and the plate-like material, As described above.

In the method for manufacturing a crucible holder according to the present invention, the method of adhering the opening plate-like material or the flat plate-like material and the order of adhering are not particularly limited.
For example, a plurality of aperture plate-like objects 2a to 2o shown in FIG. 1 and FIG. 2 are sequentially laminated and bonded in advance to produce the hollow barrel portion 2, and then disposed at the lowermost portion of the hollow barrel portion 2. A method of laminating and bonding the flat plate 3c, the flat plate 3b, and the flat plate 3a sequentially to the opening plate may be mentioned.

  In addition, for example, a plurality of aperture plate-like objects 2a to 2o shown in FIG. 1 and FIG. 2 are sequentially laminated and bonded in advance to produce the hollow body 2, and the plate-like object 3a to the plate-like object 3c. Are bonded together in order to produce the bottom 3, and then the opening plate 2 a disposed at the bottom of the hollow body 2 and the flat plate 3 c disposed at the top of the bottom 3 are bonded together. Can be mentioned.

  Further, for example, after the flat plate 3b and the flat plate 3c are sequentially bonded to the flat plate 3a shown in FIGS. 1 and 2 to form the bottom 3, the flat plate 3c constituting the bottom 3 is formed. In addition, a method of forming the hollow body 2 by sequentially bonding the opening plate-like object 2a, the opening plate-like object 2b, the opening plate-like object 2c,...

  After the aperture plate-like object 2a and the flat plate-like object 3c shown in FIGS. 1 and 2 are bonded, the aperture plate-like object 2b, the aperture plate-like object 2c, the aperture plate-like object 2d,. ························································································································· You may form the bottom part 3 in the lower part.

Moreover, in the manufacturing method of the crucible holder of this invention, you may perform a baking process, after adhere | attaching an opening plate-shaped object, a flat plate object, etc. with an adhesive agent. The firing treatment is preferably performed by heating and holding in an inert atmosphere at a temperature of 600 to 1400 ° C. for 1 to 24 hours.
Furthermore, in the method for manufacturing a crucible holder according to the present invention, a high-purity treatment may be performed in which an adhesive such as the above-mentioned opening plate or flat plate is reacted with a halogen gas at a high temperature to remove impurities. .

In the crucible holder manufacturing method of the present invention, the surface of the adhesive between the opening plate and the flat plate may be further smoothed. Smoothing can be performed by cutting or the like.
By performing the smoothing process, for example, the surface of the crucible holder 1 shown in a cross-sectional view in FIG. 3 (i) can be smoothed as shown in the cross-sectional view in FIG. 3 (ii).

  The details of the crucible holder obtained by the production method of the present invention are as described in the description of the crucible holder of the present invention.

  In the manufacturing method of the present invention, an open plate or flat plate made of CC material is bonded, and thus a high-purity, high-strength and lightweight crucible holder is produced simply and at low cost. can do.

  EXAMPLES Hereinafter, although an Example and a comparative example demonstrate this invention further in detail, this invention is not limited at all by the following examples.

Example 1
(1) Preparation of an open disk-shaped object and a disk-shaped object After a laminated adhesive of an open disk-shaped object and a disk-shaped object having the form shown in FIGS. 1 (i) to (iii), smoothing is performed. Was applied to produce a bowl-shaped crucible holder shown in FIG. 3 (ii).
First, the surface of a 13 mm thick CC material flat plate (CC28NF manufactured by Tokai Carbon Co., Ltd.) was ground to a thickness of 10 mm, and then a disk-shaped product having the sizes shown in Table 1 and Table 2, respectively. (Circular flat plates) 3a to 3c and open discs (ring-shaped flat plates) 2a to 2o each having a circular opening at the center were cut out.

(2) Preparation of adhesive An isotropic graphite material (G347 manufactured by Tokai Carbon Co., Ltd.) was pulverized in an agate mortar for 10 minutes to obtain a powdery graphite material, and a liquid phenol resin (Sumitomo Bakelite) After adding 100 g of (PR-51107), an adhesive was prepared by grinding again in an agate mortar for 3 minutes.

(3) Opening disk-shaped object and adhesion of disk-shaped object To disk-shaped object 3a obtained in (1), disk-shaped object 3b and disk using the adhesive prepared in (2) The bottom 3 was formed by adhering sequentially the laminates 3c.
The opening disk-shaped object 2a is bonded onto the disk-shaped object 3c constituting the bottom 3 using the adhesive prepared in (2), and then the opening disk-shaped object 2a is subjected to (2) A laminated adhesive formed by forming the hollow body 2 on the bottom 3 is obtained by adhering the open disc 2b to the open disc 2o in order by using the adhesive prepared in the above. It was.
The obtained laminated adhesive is heated to 2000 ° C. in an electric furnace while introducing a halogen gas and subjected to a purification treatment, whereby a crucible holder having the form shown in FIGS. 1 (i) to (iii) is obtained. It was.

(4) Smoothing treatment The crucible holder formed by subjecting the inner surface and the outer surface of the crucible holder obtained in (3) to a smoothing process by grinding the inner surface and the outer surface. Got.
By the grinding process, the portions corresponding to the opening disk-shaped object 2o and the disk-shaped object 3a used for forming the laminated adhesive disappear, and correspond to the opening disk-shaped object 2f to the opening disk-shaped object 2o. The outer diameter of the part was 250 mm and the inner diameter was 230 mm.
The construction period required for the processes (1) to (4) was 2 months.

(Comparative Example 1)
A prepreg was prepared by impregnating 100 g of a commercially available carbon fiber woven fabric (W-6E01 manufactured by Toho Tenax Co., Ltd.) with 50 g of liquid phenol resin (PR-51107 manufactured by Sumitomo Durez Co., Ltd.).
The prepreg was attached to the outer surface of the aluminum mold shown in FIG. 4 (diameter φ: 230 mm, length L: 400 mm, radius of R portion: 115 mm) until the thickness reached 10 mm. After demolding the above prepreg laminate, heat and hold at 1000 ° C. for 5 hours in an electric furnace while introducing nitrogen gas, and further heat at 2000 ° C. for 5 hours in an electric furnace while introducing halogen gas. A purification treatment was performed by holding.
A crucible holder having a bowl shape was obtained by cutting so that the length of the prepreg laminate subjected to the purification treatment was 160 mm.
The construction period required for producing the crucible holder was 10 months.

(Comparative Example 2)
A prepreg was prepared by impregnating 100 g of commercially available carbon fiber yarn (IMS 60 (24K product) manufactured by Toho Tenax Co., Ltd.) with 50 g of liquid phenolic resin (PR-51107 manufactured by Sumitomo Durez Co., Ltd.). .
On the outer surface of the aluminum mold shown in FIG. 5 (diameter φ: 230 mm, length L: 600 mm, radius of radius R: 115 mm), the filament winding device (IHI) is used until the thickness of the prepreg reaches 10 mm. Wound using IFW-4401).
The above wound product is cut at the center and divided into two 300 mm long wound products, then demolded and carbonized by heating and holding at 1000 ° C. for 5 hours in an electric furnace while introducing nitrogen gas. Further, a purification treatment was performed by heating and holding at 2000 ° C. for 5 hours in an electric furnace while introducing a halogen gas.
A crucible holder having a bowl shape was obtained by cutting so that the length of the prepreg laminate subjected to the purification treatment was 160 mm.
The construction period required for producing the crucible holder was 10 months.

The crucible holders produced in Example 1, Comparative Example 1 and Comparative Example 2 were attached to a crystal growth apparatus to repeatedly produce a silicon single crystal, and the number of times of production of silicon single crystals until each crucible holder reached the end of life. Was measured.
In this measurement, whether or not the crucible holder has reached the end of life is whether or not there is an appearance abnormality that is determined to be unusable, that is, whether or not the appearance is cracked or delaminated. This was confirmed. The results are shown in Table 3.
In Table 3, the manufacturing period of each crucible holder is also shown.

From the results in Table 3, in Example 1, a crucible holder made of a high-purity and lightweight CC material can be easily produced in a short period of time, and the obtained crucible holder is used until reaching the life end. Since the number of times is as long as 70, it can be seen that high strength can be exhibited.
On the other hand, in Comparative Example 1 and Comparative Example 2, it is understood that a complicated process is required to manufacture the crucible holder, and a long manufacturing period of 10 months is required.

  According to the present invention, a high-purity, high-strength and lightweight crucible holder that can be manufactured easily and at low cost is provided, and a high-purity, high-strength and lightweight crucible holder is simple and low-cost. A method of manufacturing can be provided.

DESCRIPTION OF SYMBOLS 1 Crucible holder 2 Hollow body part 2a-2o Open plate-like thing 3 Bottom part 3a-3c Flat-like thing

Claims (6)

A crucible holder having a hollow body portion and a bottom portion capable of accommodating a crucible therein,
The hollow body is formed by laminating a plurality of opening plate-like materials made of carbon fiber reinforced carbon composite material having an opening at the center,
The crucible holder, wherein the bottom part is formed by bonding a flat plate made of carbon fiber reinforced carbon composite material to the bottom of the hollow body part.   The plurality of opening plate-like objects are opening disk-like objects in which a circular opening is provided in the center and the flat plate-like object is a disk-like object, or the plurality of opening plate-like objects are The crucible holder according to claim 1, wherein the crucible holder is an open square plate having a quadrangular opening at the center and the flat plate is a square plate.   The crucible holder according to claim 1 or 2, wherein the opening plate and the flat plate have a thickness of 5 to 15 mm.   The crucible holder according to any one of claims 1 to 3, wherein a distance from an outer periphery of the opening plate-like object to the opening is 5 mm or more.   The crucible holder according to any one of claims 1 to 4, wherein a surface of an adhesive between the opening plate and the flat plate is smoothed. A method for producing a crucible holder having a hollow body and a bottom that can accommodate a crucible therein,
A step of laminating and bonding a plurality of opening plate-like materials made of carbon fiber reinforced carbon composite material having an opening in the center, and an opening plate shape arranged at the bottom of the plurality of opening plate-like materials A method for manufacturing a crucible holder, comprising a step of bonding a product and a flat plate made of a carbon fiber reinforced carbon composite material.

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