JP2013237236A - Scribe treatment system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To avoid use of a wheel tip having the possibility of causing product failures.SOLUTION: A scribe treatment system scribes a brittle material substrate by relatively moving a scribe head to the brittle material substrate while bringing a wheel tip into contact with the brittle material substrate, includes: a restoration means for restoring a control number of the wheel tip by using a code printed on a tip holder; a use history data holding means for holding a history of twist frequencies of the wheel tip when scribe treatment has been performed; and a recipe data holding means for holding recipe data in each of which scribe treatment contents, the twist frequencies and an exchange recommendation value are described. The scribe treatment according with one of the recipe data selected through an input means is performed by using the code-read wheel tip. When an integrated value of the twist frequencies exceeds the exchange recommendation value, it is reported that the wheel tip is in an exchange-recommended state.

Description

  The present invention relates to a scribe processing system used for dividing a brittle material substrate, and more particularly to management of wheel chips used in the scribe processing system.

  A scribing apparatus is widely known as an apparatus used for dividing a brittle material substrate (hereinafter also simply referred to as a substrate) such as a glass substrate (see, for example, Patent Document 1, Patent Document 2, and Patent Document 3). The scribing device, for example, in a process of manufacturing a flat panel display (FPD) such as a liquid crystal display panel or a liquid crystal projector substrate, a process of dividing a bonded substrate formed by bonding two mother glass substrates into a predetermined size, etc. Is used.

  The scribing device is roughly a predetermined cutting line that is predetermined on the substrate surface of a wheel tip (scribing wheel or simply called a tip) that is a disk-shaped tool whose outer peripheral end is a V-shaped cutting edge. It is an apparatus which scribes and rolls along a press-contact rolling along. Note that the substrate may be divided only by the scribe, or the substrate may be divided by applying stress to the scribed substrate in a breaking process.

  In addition, the thing of various structures is well-known as a scribe apparatus, and a suitable structure is selected and used according to a use. For example, a configuration in which only one side of a brittle material substrate is scribed as disclosed in Patent Literature 1 and Patent Literature 2, or both sides of a brittle material substrate as disclosed in Patent Literature 3 are simultaneously scribed. Some configurations are possible. Note that the scribing devices disclosed in Patent Document 1 and Patent Document 2 have a configuration in which the brittle material substrate can be rotated in a horizontal plane, whereas the scribing device disclosed in Patent Document 3 has a brittle material substrate. It can be transported only in the direction.

International Publication No. 2007/063979 International Publication No. 2008/149515 JP 2010-52995 A

  In factories or the like that manufacture FPDs, a plurality of scribing apparatuses are operated simultaneously in the same facility, and different scribing apparatuses are often divided into substrates of different materials and types. Generally, when dividing a substrate, different types of wheel chips are selected and used depending on the material of the target substrate and the method of dividing, and therefore, in such a facility, multiple types of wheel chips are simultaneously used in parallel. Situations may occur that are used regularly. In such a case, the wheel chip to be used needs to be correctly attached to each scribe device.

  Further, although the blade tip of the wheel tip is made of a hard material such as diamond, it is a consumable item that wears with use and needs to be replaced at an appropriate timing before reaching the service life. However, the wheel tip is a very small member having an overall diameter of about several millimeters at most, and it is difficult to determine the state of the cutting edge with the naked eye. Also, it is not easy to print the model type, lot number, etc. on the side surface in order to distinguish and manage individual wheel chips. Therefore, conventionally, the scribing quality is determined from the result of actual segmentation, and the presence / absence of the service life (use limit) of the wheel chip is determined. However, in this aspect, the wheel chip is replaced only after a product failure (scribing failure) occurs, and thus there is a limit to improving the product yield.

  In Patent Document 1 and Patent Document 2, the wheel chip is integrated with the chip holder, and when the wheel chip needs to be replaced, the entire chip holder is replaced, thereby improving the handleability of the wheel chip, Initializing the wheel chip management and replacement by printing the wheel chip type and initial setting data to eliminate the wheel chip mounting error as a bar code or two-dimensional code on the chip holder. A technique for realizing efficient processing is disclosed.

  Patent Document 2 further provides a management table that assigns a management number to each chip holder and records and updates the management number and the travel distance of the wheel chip integrated with the chip holder. There is also disclosed an aspect in which it is determined that the wheel chip needs to be replaced when the travel distance of the wheel chip to be used exceeds a predetermined value.

  However, in the modes disclosed in Patent Document 1 and Patent Document 2, although it is possible to distinguish individual wheel chips, a wheel chip that should not be used originally or a wheel chip that has reached the end of its service life has been mistakenly used. You can't do that until you ban the scribe you used.

  In addition, the service life of the wheel chip is not only determined by the travel distance, but also varies depending on the use mode of the wheel chip, that is, how the brittle material is divided.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a scribe processing system that can more reliably avoid the use of a wheel chip that may cause a product defect.

  In order to solve the above-mentioned problem, the invention of claim 1 includes a holder joint to which a tip holder for rotatably holding a wheel tip having a blade portion on an outer peripheral surface is attached, and a brittle material held by a predetermined holding means. A scribing head provided so as to be relatively movable with respect to the substrate, and while the tip holder is attached to the scribing head, the wheel tip held by the tip holder is in contact with the brittle material substrate. A scribing system for scribing the brittle material substrate by moving a scribe head relative to the brittle material substrate, the information including a management number capable of uniquely identifying the wheel chip held by the chip holder Is printed on the chip holder as a code, Restoring means for restoring the management number of the wheel chip from the code, and a parameter characterizing the operation mode of the wheel chip at the time of the scribing, and a parameter that increases every time the corresponding scribing operation is performed as the chip parameter A history of at least one tip parameter value for each wheel chip, and a history of use history data holding means for holding the history of at least one of the tip parameters, and a scribing process executed by the scribing system. A recipe data holding unit for holding at least one recipe data described with a recommended replacement value determined individually for each parameter, and one recipe data to be executed by the scribe processing system is selected from the at least one recipe data Input means capable of inputting various instructions to the scribe processing system, including instructions for the scribe head, wherein the holder joint to which the tip holder is attached is rotatable in a horizontal plane in the scribe head. And the horizontal position of the rotation center of the wheel chip and the rotation axis of the holder joint is shifted, and the scribing process based on the one recipe data is performed after scribing in the first direction, In the case where scribing is performed in a second direction different from the first direction, the wheel in contact with the brittle material substrate is generated immediately after the scribing in the second direction is started. When the forcing change of the tip is a twist of the wheel tip, the scribe The number of twists performed during processing is determined as the chip parameter, and the scribing process according to the one recipe data selected through the input means is performed using a wheel chip from which the code has been read. Thus, when the integrated value of the tip parameter for one wheel chip exceeds the recommended replacement value, it is notified that the one wheel chip is in a recommended replacement state.

  The invention of claim 2 is the scribe processing system according to claim 1, wherein when the one recipe data is selected through the input means for execution of one scribe process, the one recipe data By adding the increment value of the chip parameter calculated from the execution contents of the described scribing process and the previous integrated value of the chip parameter recorded in the use history data, the one scribe is performed. An expected arrival value of the tip parameter after processing is obtained, and when the expected arrival value exceeds the recommended replacement value, it is notified that the one wheel chip is in a recommended replacement state.

  A third aspect of the present invention is the scribe processing system according to the first or second aspect, wherein the wheel chip and the chip holder are integrally formed.

  According to the first to third aspects of the invention, when a recipe set based on the recipe data is executed, a scribe failure caused by using a wheel chip that has been twisted until then occurs. Can be surely prevented. In addition, since the recommended replacement value is determined according to the setting contents of the recipe, the wheel chip can be used effectively within the usable range.

1 is a perspective view of a chip holder 10 in a state where a wheel chip 1 is held. It is a side view of the chip holder 10 which shows a mode that the wheel chip | tip 1 is attached. It is side sectional drawing of the holder joint 20 in the state in which the chip | tip holder 10 was attached. It is an external appearance perspective view which shows the main mechanical components of the scribing apparatus 100 which concerns on a 1st structure. 2 is a block diagram showing a functional configuration of a controller 120 provided in the scribe device 100. FIG. It is a figure which illustrates the usage log data D2 in this Embodiment. It is an external appearance perspective view which shows the main mechanical components of the scribing apparatus 200 which concerns on a 2nd structure. 3 is a block diagram showing a functional configuration of a controller 250 provided in the scribe device 200. FIG. It is the schematic which shows the mode of an outer cutting. It is a figure illustrated about twist of a wheel tip. It is a figure which shows the flow of a process until the scribing process is completed after the chip holder 10 is attached to the scribing apparatus 100 or 200 in the first embodiment. It is a figure which shows the flow of a process until the scribing process is completed after the chip holder 10 is attached to the scribing apparatus 100 or 200 in the first embodiment. It is a figure for demonstrating calculation of the increment value of the chip parameter based on a recipe. It is a figure which shows the flow of a process after the tip holder 10 is attached to the scribe apparatus 100 or 200 in 2nd Embodiment until a scribe process is completed. It is a figure which shows the flow of a process after the tip holder 10 is attached to the scribe apparatus 100 or 200 in 2nd Embodiment until a scribe process is completed.

<First Embodiment>
<Wheel tip and its peripheral configuration>
First, a wheel chip (also simply referred to as a chip) used in a scribing apparatus in the first embodiment of the present invention, a chip holder that is a holder thereof, and a holder joint that is a mounting destination of the chip holder in the scribing apparatus explain. FIG. 1 is a perspective view of the chip holder 10 in a state where the wheel chip 1 is held, and FIG. 2 is a side view of the chip holder 10 showing how the wheel chip 1 is attached. FIG. 3 is a side sectional view of the holder joint 20 in a state in which the chip holder 10 is attached.

  The wheel chip 1 is a disk-shaped tool whose outer peripheral end is a V-shaped blade 2 and has a through-hole 3 in the center. As for the wheel chip | tip 1, the part of the blade part 2 is comprised from hard materials, such as a diamond. The wheel chip 1 is attached to a scribing device, which will be described later, while being held by the chip holder 10 and used for the scribing process. As the wheel chip 1, one having an outer diameter (wheel diameter) of about 1.0 mm to 6.0 mm and a thickness of about 0.4 mm to 1.1 mm is usually used.

  The chip holder 10 is a substantially cylindrical member that holds the wheel chip 1. The tip holder 10 has substantially square flat portions 11a and 11b provided in parallel with the longitudinal direction at one end in the longitudinal direction. On the other hand, the other end portion in the longitudinal direction is an attachment portion 16 for attaching the chip holder 10 to the scribe device. Further, the tip holder 10 is formed of a magnetic metal at least in the vicinity of the mounting portion 16.

  The flat portions 11a and 11b are provided symmetrically with respect to the central axis in the longitudinal direction of the chip holder 10, and a notch 12 along the central axis is formed between the flat portions 11a and 11b. . Furthermore, pin grooves 13 are provided at the lower ends of the flat portions 11a and 11b so as to penetrate in the direction perpendicular to the respective surfaces.

  In the tip holder 10, the pin 15 is inserted into the through hole 3 provided at the center of the wheel tip 1 and the pin grooves 13 of the flat portions 11 a and 11 b located on both sides thereof with the wheel tip 1 positioned at the notch 12. The wheel chip 1 is rotatably held around the pin 15 as an axis. In the present embodiment, the wheel chip 1 is not removed from the chip holder 10 after the pin 15 is inserted into the pin groove 13 and the wheel chip 1 is held by the chip holder 10. For example, the wheel chip 1 used in the scribing device is replaced by replacing the chip holder 10 itself. Therefore, in the following description, unless otherwise specified, the tip holder 10 indicates a state in which the wheel tip 1 is attached.

  A code 14 is printed on the flat portion 11a (not shown in FIG. 3). The code 14 is a text relating to the wheel chip 1 attached to the chip holder 10 such as individual identification information such as the type and management number of the wheel chip 1 held in the chip holder 10 and initial correction (offset) information. Information is pre-coded and recorded. As a code 14, a QR code (registered trademark) is preferably used. The format of the original text information may be determined as appropriate. For example, it may be determined in the following format.

(Character string representing model) / (character string representing management number) / (character string representing initial correction information)
Here, the model is obtained by characterizing the size (outer diameter, inner diameter, thickness, blade edge angle, etc.) and material of the wheel chip 1 according to a specific rule. The management number is a number uniquely given to each wheel chip 1. The initial correction (offset) information is used for calibration specified in advance for each wheel chip 1 in order to cancel (offset) the scribe position shift caused by the mounting error of the wheel chip 1 with respect to the chip holder 10. Information.

  The code 14 is printed by a known laser marking device or the like after the wheel chip 1 is attached to the chip holder 10 and the initial correction (offset) information is specified. Further, as will be described later, the code 14 is read and restored (decoded) by the code reader 140 (see FIG. 5) prior to scribing.

  The attachment portion 16 has a shape in which a part of the cylinder is cut out, and includes an inclined portion 16 a and a flat portion 16 b parallel to the longitudinal direction of the chip holder 10. The flat portion 16b is provided perpendicular to the flat portions 11a and 11b on the side where the wheel chip 1 is held. The state where the wheel chip 1 is attached to the scribe device is realized by inserting the attachment portion 16 having such a shape into the holder joint 20 provided in the scribe device.

  Although not shown in FIG. 3, the holder joint 20 is a member that forms a part of a scribe device described later, and is an attachment destination of the chip holder 10 in the scribe device. The holder joint 20 has a holding portion 22 to which the chip holder 10 is attached and held. Further, the holder joint 20 is provided with bearings 21a and 21b that allow the holder joint 20 to rotate around a rotation axis AX1 extending in the Z-axis direction.

  The holding portion 22 is formed with a bottomed cylindrical opening 23, and a magnet 24 is embedded in the innermost end thereof. Furthermore, a positioning pin 25 for determining the insertion position of the chip holder 10 is provided on the side surface of the opening 23 perpendicular to the extending direction of the opening 23.

  The tip holder 10 can be attached to the holder joint 20 by inserting the attachment portion 16 of the tip holder 10 into the opening 23 of the holder joint 20. That is, when the mounting portion 16 of the chip holder 10 is inserted into the opening 23, the mounting portion 16 of the chip holder 10 made of a magnetic material is attracted by the magnet 24, whereby the chip holder 10 is drawn into the opening 23. If any part of the inclined portion 16a contacts the positioning pin 25 in the process, the mounting portion 16 is rotated about the extending direction of the opening 23 as an axis, and the extending direction of the positioning pin 25 as shown in FIG. The inclined portion 16a stops in a state where the inclined portions 16a abut against each other in parallel. At this time, since the tip holder 10 is inhibited from moving in the rotational direction by the positioning pin 25 and receives the attractive force from the magnet 24, as a result, the chip holder 10 is fixedly attached to the holder joint 20. It has become.

  On the other hand, in the state where it is attached to the holder joint 20, the force acting in the longitudinal direction of the chip holder 10 is only a magnetic force, so that the chip holder 10 can be detached from the holder joint 20 from the flat portions 11a and 11b. It can be easily done by pulling.

  It should be noted that the opening 23 of the holder joint 20 is such that the horizontal position of the pin 15 of the wheel chip 1 and the horizontal position of the rotation axis AX1, which is the rotation center of the bearings 21a and 21b, are shifted in a state where the chip holder 10 is attached. It is provided. This is to cause a so-called caster effect in the wheel chip 1 when the scribe operation is performed. The caster effect will be described later.

<Main configuration of scribe processing system>
Next, the configuration of the scribing device that constitutes the scribing processing system according to the present embodiment and the controller that controls the operation thereof will be described. The scribing device can take various structural variations, but is common in that scribing is performed with the holder joint 20 and the chip holder 10 attached to the holder joint 20. In the following, there is a mechanism that rotates the brittle material substrate, which is a typical configuration example, but the scribing device 100 that performs scribing on only one side of the brittle material substrate and double-sided scribing is possible, but the brittle material substrate is rotated. The scribing apparatus 200 having no mechanism will be described sequentially. Needless to say, a scribing device that cannot rotate the brittle material substrate and that can only perform single-sided scribing, or a scribing device that can perform double-sided scribing and capable of rotating the substrate can also be an object of the present invention.

(First configuration)
FIG. 4 is an external perspective view showing main mechanical components of the scribing apparatus 100 according to the first configuration. The scribing device 100 is a device for scribing the brittle material substrate P by relatively moving a moving base 101 on which the brittle material substrate P is placed and fixed and a scribe head 30 including the wheel chip 1. . In FIG. 4, right-handed XYZ coordinates are attached, in which the moving direction of the moving base 101 is the Y-axis direction, the moving direction of the scribe head 30 in the horizontal plane is the X-axis direction, and the vertical direction is the Z-axis direction. ing.

  The moving table 101 is held so as to be movable in the Y-axis direction along the pair of guide rails 102 a and 102 b and is screwed with the ball screw 103. The ball screw 103 is rotated by driving the conveyance motor 104 to move the movable table 101 in the Y-axis direction along the guide rails 102a and 102b.

  In addition, a rotation mechanism 105 and a table 106 are provided on the movable table 101. The rotation mechanism 105 includes a motor that rotates the table 106 in the xy plane. On the table 106, two positioning pins 107a and 107b for determining the mounting positions of two orthogonal sides of the brittle material substrate P are provided. When scribing, the brittle material substrate P is placed on the table 106 in contact with the positioning pins 107a and 107b, and is held and fixed to the table by a vacuum suction means (not shown) provided inside the table 106. . That is, in the scribing apparatus 100, the table 106 functions as a holding unit for the brittle material substrate P.

  In addition, two CCD cameras 108 that image the alignment marks for positioning formed on the upper surface (scribe surface) of the brittle material substrate P are provided on the upper part of the scribe device 100.

  Further, in the scribing apparatus 100, a bridge 110 is constructed by support columns 111a and 111b. The bridge 110 is provided along the X-axis direction in such a manner as to straddle the movement path of the moving table 101 extending in the Y-axis direction. The bridge 110 is provided with a scribe head 30. The scribe head 30 is movable in the X-axis direction by a known linear motor 112 provided along the X-axis direction that is the extending direction of the bridge 110. In the present embodiment, the moving speed of the scribe head 30 when the linear motor 112 is driven is the scribe speed in the X-axis direction scribe.

  The scribe head 30 is provided with the holder joint 20 described above in such a posture that the opening 23 faces vertically downward. In a state where the tip holder 10 is attached to the holder joint 20 in such a posture, the wheel tip 1 is positioned at the lowermost end portion. In this state, since the pin 15 is horizontal in the chip holder 10, the wheel chip 1 is rotatable about the horizontal direction in an attitude perpendicular to the horizontal plane.

  In addition, by providing the bearings 21 a and 21 b as described above, the holder joint 20 is rotatable in the horizontal plane in the scribe device 100. Thereby, when the tip holder 10 is attached to the holder joint 20, the wheel tip 1 is also rotatable in a horizontal plane.

  The scribe head 30 further includes an elevating unit 31 that enables the holder joint 20 to elevate. The elevating unit 31 is realized by, for example, a servo motor, a linear motor, an air cylinder using air pressure control, or the like.

  In the scribing apparatus 100 having the above-described configuration, the moving table 101 formed by mounting and fixing the brittle material substrate P on the table 106 is roughly bridged with the chip holder 10 attached to the holder joint 20. 110. The wheel chip 1 is moved with respect to the brittle material substrate P by moving the scribe head 30 in the X-axis direction by the linear motor 112 while placing the wheel chip 1 at the lower end of the chip holder 10 in contact with the brittle material substrate P. Thus, scribing along the X-axis direction can be performed with respect to the brittle material substrate P. In such a case, scribing along the X-axis direction can be performed at an arbitrary position in the Y-axis direction by appropriately changing the arrangement position of the movable table 101.

  Further, the movable table 101 is moved in the Y-axis direction while bringing the wheel chip 1 at the lower end of the chip holder 10 into contact with the brittle material substrate P that is placed and fixed on the table 106, whereby the wheel chip 1 is made brittle. By pressing and rolling relative to the substrate P, the brittle material substrate P can be scribed along the Y-axis direction. In such a case, scribing along the Y-axis direction can be performed at an arbitrary position in the X-axis direction by appropriately changing the arrangement position of the scribe head 30 in the bridge 110.

  FIG. 5 is a block diagram showing a functional configuration of the controller 120 provided in the scribe device 100. The controller 120 includes a control unit 121, an image processing unit 122, an input unit 123, a code processing unit 124, a transport mechanism driving unit 125, a rotation mechanism driving unit 126, a scribe head driving unit 127, and a monitor 128. A recipe data holding unit 129 and a use history holding unit 130 are mainly provided. Note that the controller 120 is preferably realized by a general-purpose personal computer, but may be configured by being incorporated in the scribe device 100.

  The control unit 121 includes a CPU, a ROM, a RAM, and the like, and is a part that comprehensively controls the operation of each unit of the scribe device 100.

  The image processing unit 122 is a part that processes image signals from the CCD cameras 108a and 108b. For example, when the position correction (alignment) of the brittle material substrate P to be scribed or the initial correction of the scribe position, image signals from the CCD cameras 108a and 108b are appropriately processed in the image processing unit 122. The control unit 121 is subjected to correction calculation processing.

  The input unit 123 is an input device such as a touch panel, a keyboard, or a mouse. Operation instructions for the scribing apparatus 100 are given through the input unit 123.

  The code processing unit 124 restores (decodes) text information such as the model and management number of the wheel chip 1 based on the reading result of the code 14 by the code reader 140, and performs processing for giving the restored content to the control unit 121. . In this embodiment, as will be described later, the restored model and management number are collated with the usage history and the description contents of the recipe, thereby executing scribing using the wheel chip 1 having the model and management number. It is determined whether or not to do so.

  The transport mechanism driving unit 125 drives the transport motor 104 that is responsible for the transport operation of the movable table 101 in accordance with a drive signal from the control unit 121. In addition, the rotation mechanism driving unit 126 drives the rotation mechanism 105 responsible for the rotation operation of the movable table 101 in accordance with a drive signal from the control unit 121.

  The scribing head driving unit 127 includes a linear motor 112 responsible for the horizontal movement operation of the scribing head 30 and a lifting unit 31 provided inside the scribing head 30 and responsible for the lifting operation of the holder joint 20 in accordance with a drive signal from the control unit 121. To drive.

  The monitor 128 is a display unit that displays various setting menus and operation menus (recipes) of the scribing apparatus 100, operation states of each unit, captured images of the CCD cameras 108a and 108b, and the like. Note that the monitor 128 itself may be a touch panel, and may also function as the input unit 123.

  The recipe data holding unit 129 is a part (storage medium) that holds (stores) recipe data D1 that describes the operation content of each unit of the scribing apparatus 100 when scribing. In the scribing apparatus 100, recipe data D1 that matches the content of the desired scribing process is selected from a plurality of recipe data D1 held in the recipe data holding unit 129 and called, and the control unit 121 follows the description content. By giving an operation instruction to each unit, a scribing process according to the description content of the recipe data D1 is executed.

  Each recipe data D1 includes, for example, the type of wheel chip 1 suitable for the contents of the scribe to be executed, the size (planar size and thickness) of the brittle material substrate P to be scribed, and the brittle material substrate P. A position where scribe is executed (or a position where the scribe head is lowered and raised), a descending distance of the scribe head 30 during scribe, a scribe speed, and the like are described.

  Further, the recommended replacement value V1 is described in the recipe data D1. When the scribing is performed according to the recipe set based on the recipe data D1, the recommended replacement value V1 is obtained by changing the used wheel chip 1 (with the chip holder 10) to another wheel chip 1 (with another chip holder 10). And) a standard value for recommending replacement. Details of the recommended replacement value V1 will be described later.

  The description format of the recipe data D1 is not particularly limited, and may be described in any format that can be processed by the scribe device 100.

  In the scribing apparatus 100, it is also possible to create new recipe data D1 by operating the input unit 123 according to the setting menu displayed on the monitor 128 and hold it in the recipe data holding unit 129.

  The use history holding unit 130 holds (stores) use history data D2 obtained by recording each use history for all wheel chips 1 used in the scribing apparatus 100 (or may be used in the future). (Storage medium). Specifically, at least one tip parameter, which is a parameter that characterizes the operation mode of the wheel tip 1 in scribing and affects the service life of the wheel tip 1, is set in advance. The chip parameter is a value that increases each time the corresponding scribe operation is performed, and each time the scribe process is performed, the increment value of each chip parameter in the scribe is obtained, and the usage history data together with the accumulated value up to that time is obtained. Described as D2.

FIG. 6 is a diagram illustrating usage history data D2 in the present embodiment. In FIG. 6, the number of collisions between the wheel chip 1 and the brittle material substrate P, the number of outer cuts, the number of twists generated in the wheel chip 1, X-axis direction travel distance (unit: m), Y-axis direction travel distance (unit: m), and total travel distance (unit: m) are set as chip parameters, and wheel chip 1 is used. It has been increment of each chip parameter in the day _{(a 1 ~a n, b 1} ~b n, c 1 ~c n, d 1 ~d n, e 1 ~e n, d 1 + e 1 ~d n + e n ) And the integrated values (a, b, c, d, e, d + e) of the respective chip parameters are illustrated. Details of each chip parameter will be described later.

  Further, as shown in FIG. 6, the usage history data D2 includes usage limit values (A, B, C, D, E, F) for each chip parameter, and for each chip parameter. A limit flag indicating whether or not the latest integrated value has reached the use limit value is described. The use limit value is a value that a product failure (scribing failure) occurs almost certainly when the wheel tip 1 is used in a state where the latest integrated value of the tip parameter exceeds the value. The use limit value is a value unique to each wheel chip 1.

  In the present embodiment, the limit flag is set to “1” for the chip parameter for which the latest integrated value exceeds the use limit value, and for the chip parameter for which the latest integration value does not exceed the use limit value, The limit flag is set to “0”. FIG. 6 illustrates a case where the chip parameter “X-axis direction travel distance” exceeds the use limit value (d> D). As will be described later, in the present embodiment, the wheel chip 1 having at least one chip parameter with the limit flag “1” is prohibited from being used, and the scribing operation cannot be performed without replacement. ing. That is, by checking the value of the limit flag, it is possible to specify whether or not the wheel chip 1 is unusable.

  Alternatively, unusable chip data obtained by extracting only the individual identification information of the wheel chip 1 in which the chip parameter whose limit flag is “1” in the corresponding use history data D2 is generated, and whether or not the wheel chip 1 can be used is determined. A mode may be employed in which individual identification information is described in the unusable chip data.

  Further, the chip parameters shown in FIG. 6 are merely examples, and the types of chip parameters to be set and the description format of the usage history data D2 are not limited to those shown in FIG. Further, as the use limit value, an appropriate value may be determined empirically or experimentally.

  Alternatively, in the present embodiment, it is not an essential aspect that the scribe device 100 itself includes the code reader 140 and the code processing unit 124. For example, if the scribe processing system is configured by connecting a plurality of scribe devices 100 and a common management server that collectively manages them through a communication network such as a LAN (not shown), the code The reader 140 and the code processing unit 124 may be provided only in the management server, and the restoration content may be given from the management server to each scribe device 100 through the network. Alternatively, in principle, an operator of the scribe processing system (hereinafter simply referred to as an operator) can input the restoration content via the input unit 123.

  When the scribe processing system has the network configuration as described above, the recipe data holding unit 129 and the usage history holding unit 130 are preferably provided in the management server. In such a case, the recipe data D1, the usage history data D2, and the unusable chip data are shared among the plurality of scribe devices 100, and can be referred to or updated from any of the scribe devices 100.

(Second configuration)
FIG. 7 is an external perspective view showing main mechanical components of the scribing apparatus 200 according to the second configuration. The scribing apparatus 200 generally moves the brittle material substrate P between a pair of upper and lower scribe heads 30 (an upper scribe head 30A and a lower scribe head 30B) each having a wheel chip 1 to each of the brittle material substrates P. It is a device that simultaneously scribes from the top and bottom two directions. In FIG. 7, the right-handed XYZ coordinates in which the movement direction of the brittle material substrate is the Y-axis direction, the movement direction of the scribing heads 30A and 30B in the horizontal plane is the X-axis direction, and the vertical direction is the Z-axis direction. It is attached. In FIG. 7, for simplicity of illustration, the holder joint 20 provided in each of the scribe heads 30 </ b> A and 30 </ b> B, the chip holder 10 attached to the holder joint 20, and the wheel chip 1 held by the chip holder 10. Is omitted.

  The scribe device 200 mainly includes a substrate support mechanism 210, a clamp mechanism 220, and a scribe mechanism 230 as mechanical components. Although not shown in FIG. 7, two CCD cameras 240a for imaging a positioning alignment mark provided on the upper surface (scribe surface) of the brittle material substrate P are provided above the scribe device 200. 240b is provided (see FIG. 8).

  The substrate support mechanism 210 includes a first substrate support portion 210A and a second substrate support portion 210B. The first substrate support portion 210A and the second substrate support portion 210B are disposed to face each other with the scribe mechanism 230 interposed therebetween. 210A of 1st board | substrate support parts bears conveyance of the brittle material board | substrate P before being scribed, and 2nd board | substrate support part 210B bears conveyance of the brittle material board | substrate P after being scribed.

  Each of the first substrate support portion 210A and the second substrate support portion 210B includes a plurality of (five in FIG. 7) support units 211 that are spaced apart from each other in the X-axis direction. Each support unit 211 has a longitudinal direction in the Y-axis direction, and a timing belt 212 is stretched along the Y-axis direction. When the force in the Y-axis direction is applied to the brittle material substrate P in a state where the brittle material substrate P is supported on the upper surface of the timing belt 212, the timing belt 212 rotates following the movement of the brittle material substrate P. The movement of the material substrate P in the Y-axis direction can be assisted.

  The clamp mechanism 220 clamps (holds) the rear end portion of the brittle material substrate P placed on the timing belt 212 with a pair of clamp tools 221L and 221R which are disposed apart from each other in the X-axis direction. This is a mechanism for moving the clamp tools 221L and 221R in the Y-axis direction while maintaining such a clamped state. The moving operation of the clamp mechanism 220 is realized by a linear motor. The clamp tools 221L and 221R are provided so as not to interfere with the support unit 211 when moving in the Y-axis direction.

  The scribing mechanism 230 is a part that performs scribing simultaneously on both upper and lower surfaces of the brittle material substrate P. The scribe mechanism 30 includes an upper scribe head 30A and a lower scribe head 30B at a position between the first substrate support portion 210A and the second substrate support portion 210B in the Y-axis direction. The upper scribe head 30A is provided in the upper scribe mechanism 231 and the lower scribe head 30B is provided in the lower scribe mechanism 232, and each can be moved in the X-axis direction by a linear motor (not shown). Being done. In the present embodiment, the moving speed of the upper scribe head 30A and the lower scribe head 30B when the linear motor is driven performs scribing in the X-axis direction on the upper and lower surfaces of the brittle material substrate P. It becomes the scribe speed at the time.

  More specifically, the upper scribe head 30A includes the holder joint 20 so that the wheel chip 1 is located at the lowermost end in a state where the chip holder 10 is attached. On the other hand, the lower scribe head 30B includes a holder joint 20 so that the wheel chip 1 is positioned at the uppermost end in a state where the chip holder 10 is attached. Further, the upper scribe head 30 </ b> A and the lower scribe head 30 </ b> B each include elevating parts 31 </ b> A and 31 </ b> B that enable the holder joint 20 to elevate and lower. The elevating parts 31A and 31B are realized by, for example, a servo motor, a linear motor, an air cylinder using air pressure control, or the like.

  In the scribing apparatus 200 having the above-described configuration, the clamp mechanism 220 is moved in the Y-axis direction in a state where the rear end side of the brittle material substrate P placed on the first substrate support portion 210A is clamped by the clamp mechanism 220. , The brittle material substrate P supported by the support unit 211 of the first substrate support part 210A is supported by the support unit 211 while the driven rotation of the timing belt 212 and the movement of the clamp mechanism 220 are performed. Are conveyed in the Y-axis direction. On the way, after the brittle material substrate P is scribed by passing between the upper scribe mechanism 231 and the lower scribe mechanism 232, the brittle material substrate P is gradually supported from the front end side by the support unit of the second substrate support portion 210B. 211 is supported. Also in the second substrate support part 210B, as in the first substrate support part 210A, the brittle material substrate P is transported by the movement of the clamp mechanism 220 and the driven rotation of the timing belt 212 provided in the support unit 211. Therefore, in the scribing apparatus 200, the substrate support mechanism 210 and the clamp mechanism 220 function as holding means for the brittle material substrate P.

  In such a case, the Z-axis direction positions of the upper scribe head 30A and the lower scribe head 30B are adjusted in advance, and the wheel chip 1 at the tip of the tip holder 10 attached to each of the upper scribe head 30A and the lower scribe mechanism 232 If it is made to contact the brittle material substrate P passing between the two, the wheel chip 1 is pressed and rolled on the upper and lower surfaces of the brittle material substrate P in the middle of conveyance. Thus, scribing along the Y-axis direction can be performed on the upper and lower surfaces of the brittle material substrate P. In such a case, scribing along the Y-axis direction can be performed at an arbitrary position in the X-axis direction by appropriately changing the arrangement positions of the upper scribe head 30A and the lower scribe head 30B in the X-axis direction.

  Further, the wheel chip at the tip of the tip holder 10 attached to each of the upper scribe head 30A and the lower scribe head 30B with the brittle material substrate P positioned between the upper scribe mechanism 231 and the lower scribe mechanism 232. When the wheel chip 1 is pressed and rolled with respect to the brittle material substrate P by moving the upper scribe head 30A and the lower scribe head 30B in the X-axis direction while bringing 1 into contact with the brittle material substrate P, the brittle material Scribing along the X-axis direction can be performed on the substrate P.

  In addition, about the attachment aspect of the chip holder 10 with respect to the holder joint 20, since the scribing apparatus 200 is the same as that of the scribing apparatus 100, also when scribing in the scribing apparatus 200, the caster effect acts similarly.

  FIG. 8 is a block diagram showing a functional configuration of the controller 250 provided in the scribe device 200. The controller 250 includes a control unit 251, an image processing unit 252, an input unit 253, a code processing unit 254, a clamp mechanism driving unit 255, a first scribe head driving unit 256, and a second scribe head driving unit 257. The monitor 258, the recipe data holding unit 259, and the use history holding unit 260 are mainly provided. The controller 250 is also preferably realized by a general-purpose personal computer, like the controller 120, but may be configured by being incorporated in the scribe device 200.

  Among these, the control unit 251, the image processing unit 252, the input unit 253, the code processing unit 254, the monitor 258, the recipe data holding unit 259, and the usage history holding unit 260 are respectively a control unit 121 and an image provided in the scribe device 100. Since it is a component having substantially the same function as the processing unit 122, the input unit 123, the code processing unit 124, the monitor 128, the recipe data holding unit 129, and the usage history holding unit 130, detailed description thereof is omitted. .

  The clamp mechanism drive unit 255 operates the clamp tools 221L and 221R of the clamp mechanism 220 according to the drive signal from the control unit 251, and moves the clamp mechanism 220 in the Y-axis direction.

  The first scribe head drive unit 256 and the second scribe head drive unit 257 move the upper scribe head 30A and the lower scribe head 30B in the X-axis direction according to the drive signal from the control unit 251, respectively. The elevating parts 31A and 31B responsible for the elevating operation of the holder joint 20 are driven in each of the upper scribe head 30A and the lower scribe head 30B.

  In the scribing apparatus 200, as in the scribing apparatus 100, the recipe data D1 that matches the content of the desired scribing process is selected from a plurality of recipe data D1 held in the recipe data holding unit 259 and called up, and the control unit When 251 gives an operation instruction to each unit according to the description content, the scribing process according to the description content of the recipe data D1 is executed.

<Details of chip parameters>
Next, the details of the chip parameters representing the usage state of the wheel chip 1 illustrated in FIG. 6 will be described.

(Number of collisions)
In the present embodiment, the number of collisions between the wheel chip 1 and the brittle material substrate P means that the scribe head 30 provided with the wheel chip 1 is lowered to execute scribing and the blade part 2 of the wheel chip 1 is brittle. The number of times of contact with the material substrate P. Since the blade part 2 receives an impact at every contact, the blade part 2 is worn as the contact is repeated. Use of the worn blade portion 2 is a factor that degrades the scribe quality. Therefore, in the present embodiment, the number of collisions between the wheel chip 1 and the brittle material substrate P is set as a chip parameter, and it is determined whether the wheel chip 1 has reached the use limit based on the integrated value. Shall.

(External cut)
In general, the outer cutting means that if the upper surface of the brittle material substrate P is a scribed surface, the wheel chip 1 is placed at a position outside the edge portion of the brittle material substrate P. This is a technique of lowering the scribe height slightly below the height position of the scribe surface of P and scribing from one end to the other end of the brittle material substrate P. FIG. 9 is a schematic view showing a state of outer cutting. In the case shown in FIG. 9, the wheel chip 1 is lowered to a scribe height below the scribed surface of the brittle material substrate P at a position before the distance OH1 in the X-axis direction from the brittle material substrate P, and the brittle material substrate Similarly, the case of cutting off from P to the position ahead by a distance OH2 in the X-axis direction is illustrated.

  Note that a technique of scribing by lowering the wheel chip 1 at a position where the brittle material substrate P exists is referred to as inner cutting.

  Since the scribe line reaches both ends of the substrate, the outer cutting is easy to break after the scribe, and the wheel chip 1 slips at the scribe start position, which is a problem in the case of the inner cutting. There is an advantage of not. However, since the wheel chip 1 is easily consumed compared to the case of the inner cutting, the wheel chip 1 is likely to reach the use limit as the number of outer cuttings increases. Therefore, in the present embodiment, the number of times of outer cutting is set as a chip parameter, and it is determined whether or not the wheel chip 1 has reached the use limit based on the integrated value.

(Twist of wheel tip)
Subsequently, in describing the twist of the wheel chip 1, first, the caster effect that occurs during scribing will be described. As described above, the holder joint 20 is rotatable around the rotation axis AX1, and does not include a mechanism for directly adjusting the posture of the wheel chip 1. Therefore, when starting scribing, the blade part 2 of the wheel chip 1 does not necessarily face the scribing direction. However, on the other hand, in the state where the tip holder 10 is attached to the holder joint 20, the horizontal position of the pin 15 of the wheel chip 1 is shifted from the horizontal position of the rotation axis AX1 which is the rotation center of the bearings 21a and 21b. Therefore, when the scribe head 30 starts to move relatively in a certain direction in the horizontal plane while the wheel chip 1 is in contact with the brittle material substrate P, torque immediately acts on the holder joint 20, and the wheel chip 1 moves relative to the scribe head 30. It is pressed against the brittle material substrate P in a state parallel to the moving direction. This phenomenon is called the caster effect.

  However, when the caster effect occurs, the posture of the wheel chip 1 is forcibly changed while the blade portion 2 is in contact with the brittle material substrate P. In the present embodiment, the forced attitude change that occurs in the wheel chip 1 with the appearance of the caster effect is referred to as “twisting” of the wheel chip 1.

  FIG. 10 is a diagram illustrating the twist of the wheel tip. In FIG. 10, after scribing the brittle material substrate P a plurality of times in the X-axis direction indicated by the arrow AR1 by moving the scribe head 30 relative to the X-axis direction, the wheel chip 1 is once replaced with the brittle material. The Y-axis indicated by the arrow AR2 is moved away from the substrate P, and then the wheel chip 1 is brought into contact with the next scribe start position of the brittle material substrate P, and the scribe head 30 is relatively moved in the Y-axis direction. The case where the scribe to the direction is performed is shown. In such a case, the wheel chip 1 in a state where the first scribe is completed is subjected to the next scribe in the Y-axis direction while maintaining the posture substantially along the X-axis direction. Therefore, when the wheel chip 1 is brought into contact with the brittle material substrate P again and the scribe in the Y-axis direction is started, the scribe is once slightly different from the Y-axis as shown in the circle of FIG. However, as soon as the scribing head 30 is relatively moved, the wheel chip 1 is twisted, and the wheel chip 1 takes a posture parallel to the Y-axis direction. As a result, the desired scribing in the Y-axis direction is achieved. Realized.

  Since the twist of the wheel tip 1 is one of the factors that cause the blade portion 2 of the wheel tip 1 to wear, the quality of the scribe by the wheel tip 1 deteriorates when this is repeated. Therefore, in the present embodiment, the number of times that the twist has occurred is set as a chip parameter, and it is determined whether or not the wheel chip 1 has reached the use limit based on the integrated value.

(Mileage)
The traveling distance of the wheel chip 1 means a distance that the wheel chip 1 moves relative to the brittle material substrate P in a state where the blade portion 2 of the wheel chip 1 is in contact with the brittle material substrate P. Since scribing is realized by pressing and rolling the blade portion 2 against the brittle material substrate P, it is clear that the wear of the blade portion 2 proceeds and the scribing quality deteriorates as the traveling distance of the wheel chip 1 increases. It is. Therefore, in the present embodiment, the travel distance of the wheel chip 1 is set as a chip parameter, and it is determined whether the wheel chip 1 has reached the use limit based on the integrated value.

  In FIG. 6, the travel distance in the X-axis direction, the travel distance in the Y-axis direction, and the total travel distance, which is the sum of these travel distances, are handled as separate chip parameters. This corresponds to the fact that the travel distance to be noticed may differ depending on the contents of the set recipe.

  As an example, let us consider a case in which the first scribe in the X-axis direction is completed and the recipe is set so that the second scribe in the Y-axis direction is performed without rotating the brittle material substrate P. In such a case, since the wheel chip 1 crosses the scribe line formed by the first scribe prior to the second scribe, the wheel chip 1 is compared with the case where there is no such crossing. 1 becomes more susceptible to impact. In this case, by setting the recommended replacement value V1 for the travel distance in the Y-axis direction to be shorter than the recommended replacement value V1 for the travel distance in the X-axis direction, scribing due to deterioration in the scribing quality in the Y-axis direction. It becomes possible to more reliably suppress the occurrence of defects.

<Replacement of wheel tip based on recommended replacement value>
As described above, in the present embodiment, the recommended replacement value V1 is described in the recipe data D1. Generally speaking, the recommended replacement value V1 is a value that is set for each chip parameter and serves as a reference when recommending replacement of the wheel chip 1. In other words, the recommended replacement value V1 means that if the scribing process based on the recipe is continued without exchanging the wheel chip 1, the possibility of the occurrence of a scribing fault increases. It is a guideline value that should be done. Therefore, normally, even if the wheel chip 1 is continuously used in a state where the chip parameter exceeds the value, the wheel chip 1 is set so as not to reach the service life immediately. As for the recommended replacement value V1, an appropriate value may be determined empirically or experimentally, similarly to the use limit value. Further, hereinafter, the wheel chip 1 that meets the standard for which replacement is recommended is referred to as being in the recommended replacement state.

  In the present embodiment, whether or not the wheel chip 1 is used (whether or not to be replaced) when performing scribing is determined based on the recommended replacement value V1 determined for each recipe and the usage history specific to each wheel chip 1. By making a determination based on the data D2, it is possible to reliably prevent the occurrence of defects in the scribing process of the brittle material substrate P, and to increase the yield.

  Even if it is called a scribing process, how to use the wheel chip 1 is completely different depending on the setting contents of the recipe. For example, a variety of recipe settings such as a scribing process in which only scribing in one direction is repeated, a scribing process in which the scribing head 30 is frequently moved up and down while the traveling distance is short, and a scribing process in which twisting is repeated are variously changed. Although the scribing process is performed, the wear mode of the wheel chip 1 is different depending on each scribing process. This means that if the recipe setting is different, the method of integrating each chip parameter until the scribe failure is performed, and the upper limit of the integrated value of the chip parameter that can be used by the wheel chip 1 without causing the scribe failure is different. It means that. In the present embodiment, paying attention to this point, the recommended replacement value V1 for each chip parameter is set for each recipe data D1, thereby determining the presence or absence of a wheel chip on the basis of the most suitable for each recipe. To do.

  For example, in the case of a recipe in which the scribing head 30 is frequently moved up and down, the blade portion 2 is likely to be worn due to the collision between the wheel chip 1 and the brittle material substrate P. By setting the recommended replacement value V1 relating to the number of collisions to a low value, the occurrence of a scribe failure is reliably prevented.

  On the other hand, even if the wheel chip 1 is obtained by integrating the chip parameters to a value recommended for replacement according to the recommended replacement value V1 described in a certain recipe data D1, the integrated value is added to the other recipe data D1. When it is smaller than the recommended replacement value V1, it can be used for scribing in a recipe based on the recipe data D1. Thereby, the wheel chip 1 can be effectively used within a usable range.

  As long as the wheel tip 1 is replaced based on the recommended replacement value V1, the tip parameter reaches the use limit value unless the use limit value and the recommended replacement value V1 are set as the same value. There should be no. Therefore, at first glance, it seems unnecessary to set the use limit value, but actually, when the wheel chip 1 exceeding the recommended replacement value V1 is used intentionally or the service life has been reached. Since there is a possibility that the wheel chip 1 is erroneously used, the setting of the use limit value is effective in preventing the scribing failure in such a case.

<Scribe processing>
Next, a flow of processing when scribing is performed in the scribing processing system having the above-described configuration will be described. In the following description, the scribing apparatuses 100 and 200 that are mechanical components responsible for the actual scribing operation are also referred to as “apparatus main body”. Further, the following description is made on the premise that the scribing is performed by the scribing apparatuses 100 and 200 for the sake of convenience, but the description can be applied to other scribing apparatuses having the same configuration.

  FIG. 11 and FIG. 12 are diagrams showing the flow of processing from when the chip holder 10 is attached to the scribing apparatus 100 or 200 until the scribing process is completed.

  First, a tip holder 10 that holds the wheel tip 1 is prepared (step S1). If the recipe to be used for scribe is selected and set in advance (step S0), and the contents of the scribe to be performed are already known, a chip provided with a wheel chip 1 of a type suitable for the scribe. It is preferable to prepare the holder 10. In the case of the scribe device 200, two chip holders 10 are prepared for both the upper scribe head 30A and the lower scribe head 30B. Unless otherwise specified, in the case of the scribing device 200, if the wheel chip 1 held by at least one of the chip holders 10 is unusable or is recommended for replacement, the corresponding change is made accordingly. Processing shall be performed.

  Next, the code 14 printed on the flat portion 11a of the prepared chip holder 10 is read by the code reader 140 or 270 (step S2). The read code 14 is immediately restored to text information in the code processing unit 124 or 254 (step S3). Text information such as the model, management number, and initial correction information restored from the code 14 is given to the control unit 121 or 251.

  Subsequently, based on the management number restored from the code 14, the control unit 121 or 251 reads the usage history data D2 related to the wheel chip 1 with the management number from the usage history holding unit 130 or 260 (step S4) According to the description, it is determined whether or not the wheel chip 1 can be used without reaching the use limit (step S5). Specifically, when there is no chip parameter in which the limit flag is described as “1” in the usage history data D2, it is determined that it can be used (YES in step S5). On the other hand, if there is even one chip parameter whose limit flag is described as “1” in the usage history data D2, it is determined that the usage is not possible (NO in step S5). When unusable chip data is generated, it may be determined whether or not the wheel chip 1 is usable and has not reached the use limit by referring to this.

  When it is determined that the wheel chip 1 is unusable (NO in step S5), the control unit 121 or 251 determines that the wheel chip 1 that has read the code 14 to be used is unusable. Is displayed on the monitor 128 or 258, and a signal for prohibiting the scribing operation using the wheel chip 1 (locking the scribing operation) is issued (step S6). Thereby, in the scribing apparatus 100 or 200, it is notified that the wheel chip 1 cannot be used, and scribing using the wheel chip 1 cannot be performed. Generation | occurrence | production of the scribe defect etc. resulting from using the wheel chip 1 accidentally is prevented reliably.

  When an unusable warning is displayed, the operator removes the tip holder 10 holding the wheel tip 1 when it is attached to the holder joint 20, and checks the state when it is removed. After that (step S7), another chip holder 10 is prepared (step S8). Then, the code 14 is read again for the newly prepared chip holder 10 (step S2). Note that the re-reading of the code 14 cancels the scribe operation prohibited state in the scribe device 100 or 200.

  When it is determined that the prepared wheel chip 1 is usable (YES in step S5), the operator applies an operation corresponding to the menu displayed on the monitor 128 or 258 to the scribe. Recipe data D1 is selected from the recipe data holding unit 129 or 259, and further necessary information such as the number of brittle material substrates P to be processed is input. As a result, a recipe necessary for scribing is set (step S9). As described above, there is a case where a recipe is selected and set in advance prior to the preparation of the chip holder 10.

  When the recipe is set, the control unit 121 or 251 compares the model restored from the code 14 with the model of the wheel chip 1 that can be used in the scribe by executing the recipe described in the recipe data D1. Then, it is determined whether the prepared wheel chip 1 is suitable for execution of the recipe (step S10).

  When it is determined that the wheel chip 1 is not suitable for execution of the set recipe (NO in step S10), a warning display indicating that the wheel chip 1 cannot be used is displayed on the monitor 128 as in the above case. Alternatively, a signal for prohibiting the scribing operation using the wheel chip 1 (locking the scribing operation) is issued (step S6). Thereby, in the scribing apparatus 100 or 200, it is notified that the wheel chip 1 cannot be used, and scribing using the wheel chip 1 cannot be performed. Occurrence of scribe failure due to erroneous use of the wheel chip 1 inappropriate for scribing is reliably prevented. In this case, the wheel chip 1 determined to be unusable can only be used for scribing based on the set recipe, and is not an unusable product with an expired service life. Therefore, it may be possible to use if another recipe is set.

  As described above, when it is determined that the wheel chip 1 is not suitable for executing the set recipe, it is necessary to prepare another chip holder and read the code again (steps S7, S8, S2). .

  On the other hand, when it is determined that the wheel chip 1 is suitable for execution of the set recipe (YES in step S10), the control unit 121 or 251 performs the scribe by the recipe based on the recipe setting content. The increment value of each chip parameter when it is performed to the end is calculated, and further, the calculation process of adding the increment value to the integrated value of each chip parameter described in the usage history data D2 is performed (step S11). The value obtained as a result is an integrated value (referred to as an expected arrival value) of chip parameters that will be reached after the scribing is completed.

  Then, the control unit 121 or 251 compares the predicted arrival value with the recommended replacement value V1 described in the recipe data D1, and the wheel chip 1 to be used is in the recommended replacement state during the scribe process. It is judged whether or not (step S12).

  More specifically, the scribing according to the recipe means, in other words, the specific operation of the scribe, that is, the scribe head 30 is lowered to bring the wheel chip 1 into contact with the brittle material substrate P. This means that the number of times to be used and the travel distance of the wheel chip 1 can be specified from the setting contents of the recipe. That is, by analyzing the description contents of the recipe, it is possible to calculate the increment value of each chip parameter when the scribing is performed according to the recipe without actually performing the scribing. If such an increment value is obtained, as described above, it is possible to obtain the expected reaching value of each chip parameter after the scribing process before actually performing the scribing.

  FIG. 13 is a diagram for explaining the calculation of the increment value of the chip parameter based on the recipe. For example, as shown in FIG. 13, after scribing six locations X1 to X6 (travel distance L1) in the X-axis direction, the six locations Y1 to Y6 (travel distance L2) are also defined in the Y-axis direction. Consider a case where a recipe is set in which the process of scribing by inner cutting is performed on 100 brittle material substrates P.

  In this case, the number of collisions between the wheel chip 1 and the brittle material substrate P is 1200 times because there are 12 collisions for each of the 100 brittle material substrates P. The twist occurs only when the Y1 scribe is performed after the X6 scribe and when the X1 scribe is performed on the next brittle material substrate P after the Y6 scribe is completed. The X-axis travel distance is 600L1 (m), the Y-axis travel distance is 600L2 (m), and the total travel distance is 600 (L1 + L2) (m).

  In such a case, if the integrated value described in the usage history data D2 shown in FIG. 6 is applied to the calculation of the predicted arrival value, it is determined whether or not the wheel chip 1 reaches the recommended replacement state. At that time, the following two numerical values are compared for each chip parameter.

Number of collisions between the wheel chip 1 and the brittle material substrate P:
Expected reaching value = a ₁ +... + A _n +1200, recommended replacement value V1 = V1a;
Number of cuts:
Expected reaching value = b ₁ +... + B _n , recommended replacement value V 1 = V ₁ b;
Number of twists:
Expected reaching value = c ₁ +... + C _n +200, recommended replacement value V 1 = V ₁ c;
X-axis travel distance:
Expected reaching value = d ₁ +... + D _n + 600L1, recommended replacement value V1 = V1d;
Y-axis travel distance:
Expected reaching value = e ₁ +... + E _n + 600L2, recommended replacement value V1 = V1e;
Total mileage:
Expected reaching value = (d ₁ + e ₁ )... + (D _n + e _n ) +600 (L 1 + L 2), recommended replacement value V 1 = V 1 f.

  As a result of the comparison, when there is even one chip parameter whose predicted arrival value exceeds the recommended replacement value V1, the control unit 121 or 251 reaches the recommended replacement state during the scribing process of the wheel chip 1 to be used. It is determined that it is to be performed (YES in step S12), and a display for recommending replacement of the wheel chip 1 that has read the code 14 (replacement recommendation display) is displayed on the monitor 128 or 258 (step S13). Thereby, it is notified that the wheel chip 1 is in a replacement recommended state.

  When the replacement recommendation display is made, the operator usually determines that the wheel chip 1 needs to be replaced (YES in step S14), prepares another chip holder, and rereads the code (steps S7, S8, S2). . This reliably prevents the occurrence of scribe failure.

  On the other hand, when it is determined that the wheel tip 1 to be used does not reach the recommended replacement state during the scribing process (NO in step S12), the tip holder 10 that holds the wheel tip 1 is attached to the holder joint 20. (Step S15). In addition, when the said chip holder 10 is already attached to the holder joint 20, it confirms that.

  In addition, even though the replacement recommendation display is made, there is a case where the replacement is not performed at the operator's judgment (NO in step S14). In such a case, the chip holder 10 is attached to the holder joint. For example, this is the case when the integrated value calculated as described above is slightly higher than the recommended replacement value V1, and it is determined that the possibility of occurrence of a scribe failure is low.

  When the chip holder 10 is attached to the holder joint 20, a well-known alignment process and initial process, which are not described in detail, are performed, and the control unit 121 or 251 instructs execution of a scribe process according to a set recipe. A signal is issued (step S16). The scribing apparatus 100 or 200 starts scribing according to the recipe in response to the execution instruction signal (step S17).

  Specifically, in the case of the scribing apparatus 100, the transport mechanism drive unit 125, the rotation mechanism drive unit 126, and the scribe head drive unit 127 are respectively connected to the transport motor 104, the rotation mechanism 105, In addition, by operating the linear motor 112 and the elevating unit 31 according to the description contents of the recipe, a series of scribe operations according to the recipe is realized. In the case of the scribe device 200, the clamp mechanism drive unit 255, the first scribe head drive unit 256, and the second scribe head drive unit 257 are respectively associated with the clamp mechanism 220, the upper scribe mechanism 231 and the lower scribe mechanism. By operating 232 according to the description contents of the recipe, a series of scribe operations according to the recipe is realized.

  In the case of the scribing device 200, in order to bring the wheel chip 1 into contact with the brittle material substrate P in the lower scribing mechanism 232, the lower scribing head 30B is raised, but the brittle material substrate P and the wheel chip 1 Are the same as those in the case of the scribe head 30 of the scribe device 100 and the upper scribe head 30A provided in the upper scribe mechanism 231. Therefore, in the present embodiment, the lower scribe head 30B is brittle for convenience. The contact mode between the material substrate P and the wheel chip 1 is also expressed as “lowering the scribe head 30”.

  When the scribing process is completed by completing all the scribing operations set in the recipe (step S18), the use history is updated based on the contents of the scribing process (step S19). Specifically, the increment value of each chip parameter calculated by performing the scribing process is added to the usage history data D2 together with the date when the scribing is performed. The integrated value described is rewritten with the expected arrival value obtained by the above calculation.

  When the use history is updated, the control unit 121 or 251 causes the monitor 128 or 258 to display a menu for inputting the presence or absence of execution of scribing by another recipe (step S20). When execution of scribing with another recipe is selected (YES in step S20), the process returns to step S5, and thereafter, the same processing as described above is repeated. If it is selected not to perform scribing in another recipe (NO in step S20), the series of processes ends.

  As described above, in the scribe processing system according to the present embodiment, before scribing, the wheel chip formed by reading the code printed on the chip holder with the code reader and holding the code on the chip holder. The management number and model are restored, and the restored management number is compared with the usage history. As a result of such verification, if the wheel chip with the control number has already been recorded as an unusable wheel chip that has reached the use limit, the scribing device displays a display prohibiting the use of the wheel chip, and The operation is prohibited until the tip holder is prepared. As a result, it is possible to prevent the occurrence of scribing failure due to the use of a wheel tip that has already reached the use limit.

  Further, the restored model is collated with the model described in the recipe data that defines the content of the scribe process to be performed. As a result of the collation, when the type of the wheel chip is not described in the recipe data as the type of the wheel chip that can be used, the scribing device displays a display prohibiting the use of the wheel chip and another chip holder. The operation is prohibited until is prepared. Thereby, it is possible to prevent the occurrence of a scribe failure caused by using a wheel chip of a type inappropriate for execution of a recipe set based on the recipe data.

  In addition, for each wheel chip, the usage of the wheel chip is characterized and the history of the chip parameter, which is a parameter that affects the service life, is recorded. A certain recommended replacement value is set for each chip parameter according to the scribe contents described in the recipe data. Then, for each chip parameter, the integrated value (expected arrival value) that will be reached when scribing according to the recipe is compared with the recommended replacement value, and if the former has a larger chip parameter Displays a recommendation to replace the wheel tip. Thereby, when a recipe set based on the recipe data is executed, it is possible to reliably prevent a scribe failure from occurring. In addition, since the recommended replacement value is determined according to the setting contents of the recipe, the wheel chip can be used effectively within the usable range.

<Second Embodiment>
In the first embodiment described above, the integration of the chip parameters is performed by the arithmetic processing based on the set recipe, but the mode of integration of the chip parameters is not limited to this. In the present embodiment, the flow of the scribing process in the case where chip parameters are integrated based on actual measurement values will be described. However, for simplicity of explanation, in the present embodiment, among the tip parameters exemplified above, only the number of collisions between the wheel tip 1 and the brittle material substrate P and the travel distance of the wheel tip 1 are the wheel tip 1. Shall be used to determine whether or not replacement is required.

  FIG. 14 and FIG. 15 are diagrams showing the flow of processing from when the chip holder 10 is attached to the scribing apparatus 100 or 200 until the scribing process is completed in the present embodiment.

  As shown in FIG. 14, the wheel chip 1 can be used based on the management number and model restored from the code 14 after preparing the tip holder 10, specifically the tip holder 10, of the scribing process of the present embodiment. The process (steps S1 to S10) until it is determined whether or not the same is the same as that of the first embodiment.

  However, in the case of the present embodiment, the tip holder 10 is attached to the holder joint 20 when it is determined by matching of the model that the wheel tip 1 is suitable for execution of the recipe (YES in step S10). Attach (step S15). In addition, when the said chip holder 10 is already attached to the holder joint 20, it confirms that. When the chip holder 10 is attached to the holder joint 20, a known alignment process or initial process is performed, and then the control unit 121 or 251 instructs the execution of the scribe process according to the set recipe. Is issued (step S16).

  The scribing apparatus 100 or 200 starts scribing according to the recipe in response to the execution instruction signal (step S17). In the present embodiment, the scribing apparatus 100 or 200 starts the chip when the scribing starts. The parameters are actually measured, and the actual measurement values (parameter actual measurement values) are sequentially transferred to the control unit 121 or 251. Each time the control unit 121 or 251 acquires the parameter actual measurement value, the control unit 121 or 251 adds this to the integrated value up to immediately before each chip parameter described in the usage history data D2 (step S101).

  For example, regarding the number of collisions between the wheel chip 1 and the brittle material substrate P, every time the wheel chip 1 comes into contact with the brittle material substrate P by the lifting and lowering operation of the scribe head, “1” is added to the integrated value so far. . As for the travel distance of the wheel chip 1, every time the scribing operation in the X-axis direction or the Y-axis direction is performed, the travel distance of the wheel chip 1 at that time is added to the integrated value so far.

  While the scribing operation is being performed, each time the chip parameter is added, the control unit 121 or 251 compares the added value for each chip parameter with the recommended replacement value V1 described in the recipe data D1. Then, it is determined whether or not the wheel tip 1 has reached the recommended replacement state when any of the tip parameters exceeds the recommended replacement value V1 (step S102).

  While the recommended replacement state has not been reached (NO in step S102), and while scribing is being performed (NO in step S103), the addition of these parameters and the comparison with the recommended replacement value V1 are repeated.

  On the other hand, if any of the chip parameters exceeds the recommended replacement value V1 and is in the recommended replacement state while executing the scribe (YES in step S102), the control unit 121 or 251 uses the scribe for the scribe. A display for recommending replacement of the wheel tip 1 (replacement recommendation display) is displayed on the monitor 128 or 258 (step S104). Thereby, it is notified that the wheel chip 1 is in a replacement recommended state. However, the scribe operation is still continued at this point.

  When the replacement recommendation display is made, the operator determines whether or not to replace the wheel chip 1 (step S105). When exchanging (YES in step S105), the scribing is stopped (step S106), another chip holder is prepared, and the code is read again (steps S7, S8, S2). This avoids the occurrence of scribe failure.

  If the wheel tip 1 is not replaced despite the replacement recommendation display being made (NO in step S105), or if the wheel chip 1 is not in the recommended replacement state in the first place, all the scribing operations set in the recipe are completed. Then, the scribing process ends (YES in steps S18 and S103). Then, the integrated value of the usage history data D2 is updated by adding each chip parameter at that time (step S19).

  Note that the case where the wheel tip 1 is not replaced even though the replacement recommendation is displayed means that the integrated value of the chip parameter at the time when the scribing process is completed is replaced because the number of remaining lots is small. This is the case when it is determined that the possibility of occurrence of a scribe failure is low, such as when it is determined that the recommended value V1 is only slightly exceeded.

  When the use history is updated, the control unit 121 or 251 causes the monitor 128 or 258 to display a menu for inputting the presence or absence of execution of scribing by another recipe (step S20). When execution of scribing with another recipe is selected (YES in step S20), the process returns to step S5, and thereafter, the same processing as described above is repeated. If it is selected not to perform scribing in another recipe (NO in step S20), the series of processes ends.

  As described above, in the present embodiment, the chip parameter is calculated from the description content of the recipe in that it is determined whether or not the wheel chip 1 is in the recommended replacement state based on the actual scribe operation. This is different from the first embodiment in which it is determined whether or not the wheel chip 1 is in a replacement recommended state based on the calculation result. In the case of the first embodiment, if the setting contents of the recipe are complicated, it takes time to calculate the expected arrival value, so the processing efficiency may be reduced. In the case of the present embodiment, Since only a simple addition process is repeated during the scribe process, the scribe process can be performed without reducing the processing efficiency, and the occurrence of a scribe failure can be reliably prevented.

  Further, in the first embodiment, even if the wheel chip 1 has not actually reached the recommended replacement state, as a result of comparing the expected reaching value and the recommended replacement value, the recommended replacement state is required for the next use. However, in this embodiment, since the wheel chip 1 is replaced only after actually reaching the recommended replacement state, the wheel chip 1 is more effective. Can be used.

  Note that the actual measurement of the chip parameters can be performed using a known technique. Regarding the number of collisions between the wheel chip 1 and the brittle material substrate P, for example, a relay (electrical contact) that is turned on or off every time the wheel chip 1 contacts the brittle material substrate P is provided in the scribe head 30. 121 or 251 may add “1” every time the ON / OFF signal is detected, or the lifting / lowering portion 31 of the scribe head 30 may be configured by a servo motor, and the wheel chip 1 may be formed of the brittle material substrate P. A mode in which “1” is added to the degree of detection of an increase in torque generated in the servo motor when it is contacted with the servo motor.

  Further, regarding the travel distance of the wheel chip 1, even when the relative movement of the wheel chip 1 with respect to the brittle material substrate P is realized using the ball screw 103, as in the scribing operation in the Y-axis direction of the scribing device 100. For example, the number of rotations of the rotating shaft of the motor can be calculated by converting and outputting a pulse signal with a rotary encoder (not shown), and counting the output pulse signal with an encoder counter. Alternatively, if the relative movement of the wheel chip 1 is realized using a linear motor, the stator portion is provided with a linear scale along the moving direction of the mover portion provided with the scribe head 30, and When the scale portion is scanned when the scribe head 30 moves, one pulse signal is generated per unit length, and the travel distance may be calculated from the number of output pulse signals.

  As described above, also in the present embodiment, as in the first embodiment, the wheel chip management number held in the chip holder and restored from the code printed on the chip holder Based on the model, it is possible to determine whether or not the wheel tip can be used.

  In addition, for each wheel chip, the usage parameters are characterized and the chip parameters, which are parameters that affect the service life, are accumulated based on the actual measured values, and the wheel chips used for scribing reach the recommended replacement state. Is determined based on the recommended replacement value for each chip parameter defined for each recipe that describes the contents of the scribing process, so that it is ensured that a scribe failure will occur when the recipe is executed. Can be prevented. In addition, since the recommended replacement value is determined according to the setting contents of the recipe, the wheel chip can be used effectively within the usable range.

<Modification>
In the above description, the scribing process in the first embodiment and the scribing process in the second embodiment are described independently. However, these scribing processes are not contradictory and are performed simultaneously in parallel. Is possible. In such a case, each scribe process may be used properly depending on the type of chip parameter. For example, regarding the determination of the recommended replacement state based on the number of collisions between the wheel chip 1 and the brittle material substrate P and the travel distance, the scribing process according to the second embodiment is applied, and the determination is made based on the actual measurement. The determination of the recommended replacement state based on the number of times of cutting and the number of times of twisting may be performed based on the expected arrival value by applying the scribe process according to the first embodiment.

  In the second embodiment described above, the chip parameter is actually measured at the time of the scribe process. However, the chip parameter is actually measured at the time of the alignment process or the test scribe performed manually. It may be. In such a case, since the integrated value of the chip parameter recorded in the usage history data D2 is closer to the actual value of the chip parameter, it is possible to more severely determine whether or not the wheel chip needs to be replaced. . In the case of the first embodiment, such a correspondence is not impossible, but is not always realistic.

  In the case of the second embodiment, the integrated value of the chip parameter is updated almost in real time. Using this fact, the integrated value may be displayed on the monitor 128 or 258 in real time. In this case, since the operator can visually recognize how the chip parameter approaches the recommended replacement value V1, it is possible to prepare for replacement in advance. In such a case, the chip parameter value until the replacement recommended value V1 is reached may be displayed in a countdown manner.

  In the above case, there is only one wheel chip that scribes one surface of the brittle material substrate P, but by providing a plurality of scribe heads on the same surface, scribing can be performed simultaneously on a plurality of locations on the surface. An embodiment using a scribing device may be used. In such a case, the above-described determination of availability or replacement is performed for each wheel chip attached to each scribe head.

  The scribe processing system may have means for automatically exchanging the chip holder 10 attached to the holder joint 20 (holder automatic exchanging means). In such a case, the automatic holder exchanging means replaces the tip holder 10 in response to the notification to the controller 121 or 251 that the wheel tip 1 is unusable or in a recommended replacement state. preferable.

DESCRIPTION OF SYMBOLS 1 Wheel tip 2 Blade part (wheel tip) 10 Tip holder 11a, 11b Flat part (Chip holder) 14 Code 20 Holder joint 30 Scribe head 30A Upper scribe head 30B Lower scribe head 31 (Scribe head) elevating part 100 200 Scribing device 101 Moving table 103 Ball screw 104 Transport motor 105 Rotating mechanism 106 Table 120, 250 Controller 210 Substrate support mechanism 211 Support unit 212 Timing belt 220 Clamp mechanism 221L, 221R Clamp 231 Upper scribe mechanism 232 Lower scribe mechanism 256 First scribe head drive unit 257 Second scribe head drive unit

Claims (3)

A scribing head having a holder joint to which a tip holder for rotatably holding a wheel tip having a blade portion on an outer peripheral surface is attached, and being relatively movable with respect to a brittle material substrate held by a predetermined holding means;
With
The brittle material by moving the scribe head relative to the brittle material substrate while the wheel chip held by the chip holder is in contact with the brittle material substrate with the chip holder attached to the scribe head. A scribing system for scribing a material substrate,
A restoring means for restoring the management number of the wheel chip from the code when information including a management number capable of uniquely identifying the wheel chip held by the chip holder is printed on the chip holder as a code; ,
When the parameter that characterizes the operation mode of the wheel chip at the time of the scribe and increases when the corresponding scribe operation is performed is the chip parameter, at least one of the chip parameters for each wheel chip Usage history data holding means for holding a history of values as usage history data;
Recipe data holding means for holding at least one recipe data in which the contents of the scribe process to be executed by the scribe processing system are described together with recommended replacement values individually determined for the at least one chip parameter;
Input means capable of inputting various instructions to the scribe processing system, including instructions for selecting one recipe data to be executed by the scribe processing system from the at least one recipe data;
Further comprising
In the scribe head, the holder joint to which the tip holder is attached is rotatable in a horizontal plane, and the horizontal position of the rotation center of the wheel tip and the rotation axis of the holder joint is shifted,
In the case where the scribing process based on the one recipe data is performed in a second direction different from the first direction after the scribing in the first direction, When the forcible posture change of the wheel tip in a state in contact with the brittle material substrate that occurs immediately after the start of scribing in the second direction is torsion of the wheel tip,
The number of twists performed during the scribe process is defined as the tip parameter,
By performing the scribing process according to the one recipe data selected through the input means using the wheel chip from which the code is read, the integrated value of the chip parameter for the one wheel chip becomes the recommended replacement value. If exceeded, notify that the one wheel tip is in a recommended replacement state,
A scribing system characterized by that. The scribe processing system according to claim 1,
When the one recipe data is selected through the input means for executing one scribe process, an increment value of the chip parameter calculated from the execution contents of the scribe process described in the one recipe data; Adding the previous integrated value of the chip parameter recorded in the usage history data to obtain an expected arrival value of the chip parameter after the one scribing process, and the expected arrival value is the exchange If the recommended value is exceeded, the fact that the one wheel tip is in a recommended replacement state is notified.
A scribing system characterized by that. The scribe processing system according to claim 1 or 2,
The wheel chip and the chip holder are configured integrally.
A scribing system characterized by that.

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