TWI499571B - Scribing process system - Google Patents

Description

Line processing system

The present invention relates to a scribing system for the cutting of a substrate of a brittle material, and more particularly to the management of a rotating blade used in a scribing system.

A scribing device is widely known as a device for cutting a brittle material substrate (hereinafter also referred to as a substrate) such as a glass substrate (see, for example, Patent Document 1, Patent Document 2, and Patent Document 3). The scribing device is used to cut a bonded substrate formed by bonding two mother glass substrates into a predetermined size, for example, in a process of manufacturing a flat panel display (FPD) such as a liquid crystal display panel or a liquid crystal projector substrate. Steps, etc.

In general, the scribing device is a predetermined pre-determined pre-determined path along the surface of the substrate by a rotating blade (a scribing wheel or a blade) which is a disc-shaped tool having a V-shaped blade tip at the outer peripheral end. A device in which the cutting line is crimped and rotated to perform scribing to expand the crack. Further, there is a case where the substrate is cut only by the above-described scribe line, and there is a case where the substrate is cut by applying stress to the substrate which has been scribed in the break step.

Further, as the scribing device, a plurality of scribing devices having various configurations are known, and an appropriate configuration can be selected and used depending on the application. For example, there is a scribing device having a configuration in which only one side of a brittle material substrate is scribed as disclosed in Patent Document 1 and Patent Document 2, or both sides of a brittle material substrate can be simultaneously simultaneously disclosed as disclosed in Patent Document 3. A scribing device constructed of scribing. In addition, the scribing device disclosed in Patent Document 1 and Patent Document 2 has a configuration in which the brittle material substrate can be rotated in the horizontal plane. On the other hand, the scribing device disclosed in Patent Document 3 can transport the brittle material substrate only in one direction. .

[Background literature] [Patent Literature]

[Patent Document 1] International Publication No. 2007/063979

[Patent Document 2] International Publication No. 2008/149515

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2010-52995

In many factories and the like where FPD is manufactured, in many cases, a plurality of scribing devices are simultaneously operated in parallel in the same facility, and each scribing device cuts substrates of different materials or varieties. In general, when the substrate is cut, different types of rotary blades are selected depending on the material of the target substrate or the cutting method. Therefore, in the above-described facility, a plurality of types of rotary blades are used in parallel. In the case as described above, it is necessary to correctly mount the rotary blade to be used for each scribing device.

Further, although the tip of the rotary blade is made of a hard material such as diamond, it is a consumable that causes wear due to use, and must be replaced at an appropriate timing before reaching the service life. However, the rotary blade is a minute member having a diameter of at most several millimeters, and it is difficult to visually recognize the state of the blade edge. Moreover, it is not easy to mark its type or lot number on the side to distinguish or even manage each rotary blade. Therefore, conventionally, the quality of the scribing is judged based on the product obtained after the actual cutting, and it is judged whether or not the rotating blade has reached the service life (use limit). However, in the above aspect, the replacement of the rotary blade is started after the occurrence of the defective product (defective scribe line), and therefore there is a limit in the improvement of the yield of the product.

Patent Document 1 and Patent Document 2 disclose a technique of integrating a rotary blade with a blade holder and replacing it with a blade holder when it is necessary to replace the rotary blade, thereby improving the operability of the rotary blade. And by using the type of the rotating blade or the initial setting data for eliminating the mounting error of the rotating blade, etc., by barcode or two-dimensional The form of the code is stamped on the blade holder to achieve improved management of the rotary blade and efficiency of initial processing with replacement.

Patent Document 2 further discloses a configuration in which a management number is assigned to each blade holder and a record is prepared. The management platform that updates the management number and the travel distance of the rotary blade integrated with the blade holder determines that it is necessary to replace the rotary blade when the travel distance of the rotary blade to be used for scribing exceeds a predetermined value.

However, in the form disclosed in Patent Document 1 and Patent Document 2, it is possible to distinguish between the respective rotary blades, but it is not possible to prohibit the execution of the scribing of the rotary blade that should not be used originally or the rotary blade that has reached the service life.

Moreover, the service life of the rotary blade is not limited only by the travel distance, but also depending on the use form of the rotary blade, that is, the cutting method of the brittle material.

The present invention has been made in view of the above problems, and an object thereof is to provide a scribing processing system which can more reliably avoid the use of a rotary blade which may cause a product defect.

In order to solve the above problems, the invention of claim 1 is a scribing system including a scribing head including a holder joint to which a rotary blade having a peripheral portion having a blade portion is attached a blade holder that is rotatable freely, and the scribe head is relatively movable with respect to a brittle material substrate held by a specific holding device, and the blade holder is mounted on the scribing head while being The scribing processing system further includes a scribing of the brittle material substrate while the rotating blade held on the blade holder contacts the brittle material substrate to move the scribing head relative to the brittle material substrate; the scribing processing system further includes a decoding device that, when the information including the management number of the rotating blade held by the blade holder is uniquely recognized as a code on the blade holder, is performed by the code from the above-mentioned rotary blade Management number decoding; use history data to hold the device, which will rotate when the above line is crossed The action pattern of the blade gives the feature, and its value is marked accordingly. When the parameter added during the operation is set as the blade parameter, the history of the value of at least one of the above-mentioned blade parameters of each rotary blade is maintained as the usage history data; the process recipe data holding device holds at least one process recipe data, The process recipe data includes a content of the scribing process performed by the scribing system, and a recommended replacement value that is individually determined for the at least one of the blade parameters; and an input device that can be input for the scribing process a plurality of indications of the system, wherein the indication includes an indication for selecting, by the at least one process recipe material, a process recipe data to be executed by the scribing processing system; wherein the above-mentioned scribing head is mounted with the above-mentioned blade holder The holder joint is freely rotatable in a horizontal plane, and the rotation center of the rotary blade is offset from the horizontal position of the rotation axis of the holder joint; the scribing in the first direction is performed based on the scribing process of the above-described one-process recipe data After the situation in which the scribe line in the second direction is different from the first direction described above, the The forced posture change of the rotary blade which is generated immediately after the scribing in the second direction and is in contact with the brittle material substrate is regarded as being performed during the scribing process during the twisting of the rotary blade. The number of twists is determined as the blade parameter, and the rotary blade that has been read by using the code performs the scribing process according to the process recipe data selected by the input device, thereby using the blade on a rotary blade. When the accumulated value of the parameter exceeds the above-mentioned recommended replacement value, it is notified that the above-mentioned rotating blade is in the recommended replacement state.

The invention of claim 2 is characterized in that, in order to perform a scribing process, when the above-mentioned process recipe data is selected by the input device, it is recorded according to the above-mentioned process recipe data. The added value of the blade parameter calculated by the execution of the scribing process is added to the previous integrated value of the blade parameter recorded in the use history data, thereby obtaining the one-line process The estimated arrival value of the blade parameter is to notify the rotating blade that the rotating blade is in the recommended replacement state when the expected arrival value exceeds the recommended replacement value.

The invention of claim 3 is the scribing system of claim 1 or 2, characterized in that The rotating blade is configured integrally with the blade holder.

According to the inventions of the first aspect to the third aspect, it is possible to reliably prevent the scribing defect from being caused by the use of the rotary blade that has been twisted a plurality of times until the execution of the process recipe set based on the process recipe data. Further, since the recommended replacement value is determined according to the setting contents of the process recipe, the rotary blade can be effectively used within the usable range.

1‧‧‧Rotating blade

2‧‧‧ (rotating blade) blade

3‧‧‧through holes

10‧‧‧ blade holder

11a‧‧‧ (blade holder) flat

11b‧‧‧ (blade holder) flat

12‧‧‧ gap

13‧‧‧ pin slot

14‧‧‧ Code

15‧‧ ‧ sales

16‧‧‧Installation Department

16a‧‧‧ inclined section

16b‧‧‧flat

20‧‧‧Retaining joints

21a‧‧‧ Bearing

21b‧‧‧ Bearing

22‧‧‧ Keeping Department

23‧‧‧ openings

24‧‧‧ magnet

25‧‧‧Locating pin

30‧‧‧Scribe head

30A‧‧‧Upper side scribing head

30B‧‧‧ underline head

31‧‧‧ (dash head) lifting section

100‧‧‧ scribe device

101‧‧‧Mobile Station

102a‧‧‧rail

102b‧‧‧rail

103‧‧‧Rolling screw

104‧‧‧Transport motor

105‧‧‧Rotating mechanism

106‧‧‧ platform

107a‧‧‧Locating pin

107b‧‧‧Locating pin

108a‧‧‧CCD camera

108b‧‧‧CCD camera

110‧‧ ‧Bridge

111a‧‧‧ pillar

111b‧‧‧ pillar

112‧‧‧Linear motor

120‧‧‧ Controller

121‧‧‧Control Department

122‧‧‧Image Processing Department

123‧‧‧ Input Department

124‧‧‧Code Processing Department

125‧‧‧Transportation Mechanism Drive Department

126‧‧‧Rotary Mechanism Drive Department

127‧‧‧Scribe head drive

128‧‧‧ monitor

129‧‧‧Process Formula Data Maintenance Department

130‧‧‧Use History Maintenance Department

140‧‧‧Reader

200‧‧‧ scribe device

210‧‧‧Substrate support mechanism

211‧‧‧Support unit

212‧‧‧ timing belt

220‧‧‧Clamping mechanism

221L‧‧‧Clamping parts

221R‧‧‧Clamping parts

230‧‧‧Chaining agency

231‧‧‧Upper side scribing mechanism

232‧‧‧Bottom line mechanism

240a‧‧‧CCD camera

240b‧‧‧CCD camera

250‧‧‧ Controller

251‧‧‧Control Department

252‧‧‧Image Processing Department

253‧‧‧ Input Department

254‧‧‧Code Processing Department

255‧‧‧Clamping mechanism drive unit

256‧‧‧1st scribing head drive

257‧‧‧2nd scribing head drive

258‧‧‧ monitor

259‧‧‧Process Formula Data Maintenance Department

260‧‧‧Use History Maintenance Department

270‧‧ ‧ barcode reader

D1‧‧‧Process recipe data

D2‧‧‧Use history data

OH1‧‧‧ distance

OH2‧‧‧ distance

P‧‧‧Battery substrate

V1‧‧‧Recommended replacement value

Fig. 1 is a perspective view of the blade holder 10 in a state in which the rotary blade 1 is held.

Fig. 2 is a side view showing the blade holder 10 in a state in which the rotary blade 1 is mounted.

3 is a side cross-sectional view of the holder joint 20 in a state in which the blade holder 10 is mounted.

4 is an external perspective view showing main mechanical components of the scribing device 100 of the first configuration.

FIG. 5 is a block diagram showing the functional configuration of the controller 120 provided on the scribing device 100.

Fig. 6 is a view showing the use history data D2 in the present embodiment.

Fig. 7 is an external perspective view showing main mechanical components of the scribing device 200 of the second configuration.

FIG. 8 is a block diagram showing the functional configuration of the controller 250 provided on the scribing device 200.

Fig. 9 is a schematic view showing a state of circumscribing.

Fig. 10 is a view showing an example of twisting of a rotary blade.

FIG. 11 is a view showing a flow of processing until the scribing process is completed after the blade holder 10 is attached to the scribing device 100 or 200 in the first embodiment.

FIG. 12 is a view showing a flow of processing until the scribing process is completed after the blade holder 10 is attached to the scribing device 100 or 200 in the first embodiment.

Fig. 13 is a view for explaining calculation of an added value of a blade parameter based on a process recipe.

FIG. 14 is a view showing a flow of processing until the scribing process is completed after the blade holder 10 is attached to the scribing device 100 or 200 in the second embodiment.

FIG. 15 is a view showing a flow of processing until the scribing process is completed after the blade holder 10 is attached to the scribing device 100 or 200 in the second embodiment.

<First embodiment> <Rotating blade and its surrounding structure>

First, in the first embodiment of the present invention, a rotary blade (also referred to as a blade) used in a scribing device, a blade holder as a holder thereof, and a mounting end of a blade holder in a scribing device are used. Hold the connector for instructions. 1 is a perspective view of the blade holder 10 in a state in which the rotary blade 1 is held, and FIG. 2 is a side view showing the blade holder 10 in a state in which the rotary blade 1 is mounted. 3 is a side cross-sectional view of the holder joint 20 in a state in which the blade holder 10 is mounted.

The rotary blade 1 has a disk-shaped tool whose outer peripheral end portion is a V-shaped blade portion 2, and has a through hole 3 at the center. At least the portion of the rotary blade 1 whose blade portion 2 is made of a hard material such as diamond. The rotary blade 1 is attached to a scribing device in a state of being held on the blade holder 10 for scribing. As the rotary blade 1, a rotary blade having an outer diameter (wheel diameter) of about 1.0 mm to 6.0 mm and a thickness of about 0.4 mm to 1.1 mm is usually used.

The blade holder 10 is a substantially cylindrical member that holds the rotary blade 1. In the blade holder 10, at one end portion in the longitudinal direction, there are substantially flat flat portions 11a and 11b which are provided in parallel with the longitudinal direction. On the other hand, the other end portion in the longitudinal direction is a mounting portion 16 for attaching the blade holder 10 to the scribing device. Further, at least the vicinity of the mounting portion 16 of the blade holder 10 is made of a magnetic metal.

The flat portions 11a and 11b are provided symmetrically with respect to the central axis of the longitudinal direction of the blade holder 10, and the flat portions 11a and 11b are formed as notches 12 along the central axis. Further, pin holes 13 penetrating in the direction perpendicular to the respective faces are provided at the lower ends of the flat portions 11a and 11b.

In the blade holder 10, in a state where the rotary blade 1 is placed in the notch portion 12, the pin 15 is inserted into the through hole 3 formed at the center of the rotary blade 1, and the flat portions 11a, 11b on both sides thereof. In the pin groove 13, the rotary blade 1 is rotatably held by the pin 15 as an axis. Further, in the case of the present embodiment, after the pin 15 is inserted into the pin groove 13 to hold the rotary blade 1 on the blade holder 10, the rotary blade 1 is not removed from the blade holder 10. For example, the replacement of the rotary blade 1 used in the scribing device is performed by replacing the blade holder 10 itself. Therefore, in the following description, the blade holder 10 refers to the blade holder in a state in which the rotary blade 1 is mounted, unless otherwise specified.

On the flat portion 11a, the code 14 is marked (although the illustration is omitted in Fig. 3). The code 14 is related to the individual identification information such as the type or management number of the rotary blade 1 held on the blade holder 10, and the initial correction (offset) information and the like, which are related to the rotary blade 1 mounted on the blade holder 10. The code of the text information is encoded and recorded. As a code 14, a preferred example is to use a QR code (registered trademark). The format of the text information as the metadata can be appropriately determined, for example, it can be determined as the following format.

(indicating the type string) / (indicating the string of the management number) / (indicating the string of the initial correction information)

Here, the type is a string of the size (outer diameter, inner diameter, thickness, tool nose angle, etc.) or material of the rotary blade 1 in accordance with a specific rule. The management number refers to the number uniquely assigned to each of the rotary blades 1. Moreover, the initial correction (compensation) information refers to a correction specified in advance for each rotary blade 1 in order to eliminate (compensate) the offset of the scribe line position due to the mounting error of the rotary blade 1 with respect to the blade holder 10. Use information.

The code 14 is marked after the rotary blade 1 is mounted on the blade holder 10, and after the initial correction (compensation) information has been specified, by a known laser marking device or the like. Moreover, as described below, the code 14 is read and decoded by the code reader 140 (refer to FIG. 5) before scribing.

The mounting portion 16 is formed in a shape in which one portion of the cylinder is cut away, and includes an inclined portion 16a and a flat portion 16b parallel to the longitudinal direction of the blade holder 10. The flat portion 16b is provided perpendicular to the flat portions 11a, 11b on the side holding the rotary blade 1. The state in which the rotary blade 1 is attached to the scribing device is realized by inserting the mounting portion 16 having the shape into the holder joint 20 included in the scribing device.

Although not shown in FIG. 3, the holder joint 20 is a member constituting one of the following scribing devices, and is a mounting end of the blade holder 10 in the scribing device. The holder joint 20 includes a retaining portion 22 that mounts and holds the blade holder 10. Further, the holder joint 20 includes bearings 21a and 21b that allow the holder joint 20 to freely rotate about a rotation axis AX1 extending in the Z-axis direction.

A bottomed cylindrical opening 23 is formed in the holding portion 22, and a magnet 24 is embedded in the deepest end portion thereof. Further, on the side of the opening 23, a positioning pin 25 for determining the insertion position of the blade holder 10 is provided perpendicular to the extending direction of the opening 23.

Mounting of the blade holder 10 relative to the holder joint 20 can be performed by inserting the mounting portion 16 of the blade holder 10 into the opening 23 of the holder joint 20. That is, when the mounting portion 16 of the blade holder 10 is inserted into the opening 23, the mounting portion 16 of the blade holder 10 made of a magnetic material is attracted by the magnet 24, whereby the blade holder 10 is pulled toward the opening. 23, in this process, if somewhere of the inclined portion 16a is in contact with the positioning pin 25, then the mounting portion 16 will rotate with the opening direction of the opening 23 as an axis, and as shown in FIG. The extending direction of 25 is stationary with the state in which the inclined portions 16a abut each other in parallel. At this time, the blade holder 10 is prevented from moving in the rotational direction by the action of the positioning pin 25, and receives the attraction force from the magnet 24, and as a result, is formed to be fixedly attached to the holder. The state on the head 20.

On the other hand, in the state of being mounted on the holder joint 20, the force acting on the longitudinal direction of the blade holder 10 is only a magnetic force, so that the removal of the blade holder 10 from the holder joint 20 can be performed by flatness. The sides of the portions 11a and 11b are pulled and easily performed.

Further, the opening 23 of the holder joint 20 is such that the horizontal position of the pin 15 of the rotary blade 1 and the horizontal position of the rotation axis AX1 which is the rotation center of the bearings 21a and 21b are shifted in a state in which the blade holder 10 is attached. Settings. The purpose is to cause the rotating blade 1 to generate a so-called caster caster effect when the scribing action is performed. The post-stabilization effect of the kingpin will be described below.

<Main components of the scribing system>

Next, a configuration of a scribing device constituting the scribing processing system of the present embodiment and a controller for controlling the operation thereof will be described. In addition, although the scribe line apparatus can be variously configured, it is common in the following aspects, that is, the holder joint 20 is included, and the blade holder 10 is attached to the holder joint 20, and the blade holder 10 is attached. line. Hereinafter, a scribing device 100 including a mechanism for rotating a brittle material substrate but only one side of a brittle material substrate, and a double-sided scribe line, which does not contain a brittle material substrate, may be used as a typical configuration example. The scribing device 200 of the rotating mechanism will be described in order. Further, it is a matter of course that the scribing device which can perform the single-sided scribing without rotating the brittle material substrate or the scribing device which can perform the double-sided scribing or the substrate rotation can also be the object of the present invention.

(first structure)

4 is an external perspective view showing main mechanical components of the scribing device 100 of the first configuration. Roughly speaking, the scribing device 100 is a device for scribing the brittle material substrate P by moving the mobile station 101 on which the brittle material substrate P is placed and fixed to the scribing head 30 including the rotary blade 1 . In addition, in FIG. 4, the XYZ coordinates of the right-handed system are drawn, wherein the moving direction of the moving table 101 is set to the Y-axis direction, and the moving direction of the scribing head 30 in the horizontal plane is set to the X-axis direction, and the vertical direction will be vertical. The direction is set to the Z axis direction.

The moving table 101 is held along the pair of guide rails 102a, 102b so as to be freely movable in the Y-axis direction, and is screwed to the ball screw 103. The ball screw 103 is rotated by the driving of the conveying motor 104, and the moving table 101 is moved in the Y-axis direction along the guide rails 102a and 102b.

Further, on the mobile station 101, a rotating mechanism 105 and a stage 106 are provided. The rotating mechanism 105 includes a motor that rotates the platform 106 in the xy plane. Locating pins 107a and 107b for determining the placement position of the brittle material substrate P on the two sides of the brittle material substrate are provided on the platform 106 in a pair. When the scribing is performed, the brittle material substrate P is placed on the stage 106 in a state of being in contact with the positioning pins 107a and 107b, and a vacuum suction device (not shown) included in the inside of the stage 106 is used. Keep it fixed on the platform. That is, in the scribing device 100, the stage 106 functions as a holding device for the brittle material substrate P.

Further, two CCD (Charge Coupled Device) cameras 108 for capturing positioning alignment marks provided on the upper surface (line surface) of the brittle material substrate P are provided on the upper portion of the scribing apparatus 100.

Further, in the scribing device 100, the bridge portion 110 is erected by the pillars 111a and 111b. The bridge portion 110 is provided along the X-axis direction in a form of a movement path that straddles the movement table 101 extending in the Y-axis direction. Further, the bridge portion 110 includes a scribing head 30. The scribing head 30 is freely movable in the X-axis direction by a known linear motor 112 provided in the bridge portion 110 along the X-axis direction in which the writing direction is extended. Further, in the present embodiment, the moving speed of the scribing head 30 when the linear motor 112 is driven is the scribing speed at the time of the scribing in the X-axis direction.

The holder joint 20 is provided on the scribing head 30 in a posture in which the opening 23 faces vertically downward. In a state where the blade holder 10 is attached to the holder joint 20 in this posture, the rotary blade 1 is located at the lowermost end. In this state, the pin 15 is horizontal on the blade holder 10, and therefore the rotary blade 1 is freely rotatable in the horizontal direction as an axis orthogonal to the horizontal plane.

Further, since the bearings 21a and 21b are included as described above, in the scribing device 100, the holder joint 20 is rotatable in the horizontal plane. Thereby, when the blade holder 10 is mounted on the holder joint 20, the rotary blade 1 is free to rotate in the horizontal plane.

The scribing head 30 further includes a lifting portion 31 that can perform the lifting operation of the holder joint 20. The lifting unit 31 is realized by, for example, a servo motor, a linear motor, or an air cylinder that uses air pressure control.

In the scribing apparatus 100 having the above configuration, it is roughly configured such that the brittle material substrate P is placed and fixed on the stage 106 while the blade holder 10 is attached to the holder joint 20 The stage 101 is disposed directly below the bridge portion 110, and the rotary blade 1 at the lower end of the blade holder 10 is brought into contact with the brittle material substrate P, and the scribing head 30 is moved in the X-axis direction by the linear motor 112. The rotary blade 1 is pressed against the brittle material substrate P, and the brittle material substrate P is scribed along the X-axis direction. In this case, by appropriately changing the arrangement position of the mobile station 101, the scribe line along the X-axis direction can be performed at any position in the Y-axis direction.

Further, the rotary blade 1 at the lower end of the blade holder 10 may be moved in the Y-axis direction while being in contact with the brittle material substrate P placed on the stage 106. The blade 1 is relatively pressed against the brittle material substrate P, and the brittle material substrate P is scribed along the Y-axis direction. In this case, by appropriately changing the arrangement position of the scribing head 30 on the bridge portion 110, the scribing along the Y-axis direction can be performed at any position in the X-axis direction.

FIG. 5 is a block diagram showing a functional configuration of the controller 120 included in the scribing device 100. The controller 120 mainly includes a control unit 121, an image processing unit 122, an input unit 123, a code processing unit 124, a transport mechanism drive unit 125, a rotation mechanism drive unit 126, a scribing head drive unit 127, a monitor 128, and a process recipe data. The holding unit 129 and the use history holding unit 130. Further, a preferred example of the controller 120 is realized by a general-purpose personal computer, but may be constructed by being incorporated into the scribing apparatus 100.

The control unit 121 includes a CPU (Central Processing Unit), a ROM (Read-Only Memory), a RAM (Random Access Memory), and the like, and controls the scribing device 100 in an integrated manner. The part of each part of the action.

The image processing unit 122 processes the portions of the image signals from the CCD cameras 108a and 108b. For example, when the position correction (alignment) of the brittle material substrate P to be scribing or the initial correction of the scribing position is performed, the image signals from the CCD cameras 108a and 108b are appropriately applied to the image processing unit 122. After the processing, it is supplied to the correction arithmetic processing of the control unit 121.

The input unit 123 is an input device such as a touch panel, a keyboard, or a mouse. The operation instruction to the scribing device 100 is given by the input unit 123.

The code processing unit 124 is responsible for decoding (decode) text information such as the type or management number of the rotary blade 1 based on the result of reading the code 14 by the code reader 140, and giving the decoded content to the control unit 121. In the present embodiment, as described below, by comparing the decoded version or the management number with the description of the use history or the recipe, it is determined whether or not the scribing can be performed using the rotary blade 1 having the type and the management number. .

The transport mechanism drive unit 125 drives the transport motor 104 that is responsible for the transport operation of the mobile station 101 based on the drive signal from the control unit 121. Further, the rotation mechanism drive unit 126 drives the rotation mechanism 105 responsible for the rotation operation of the movement table 101 based on the drive signal from the control unit 121.

The scribing head driving unit 127 drives the linear motor 112 responsible for the horizontal movement operation of the scribing head 30 and the lifting and lowering of the lifting and lowering operation of the holder joint 20 provided in the scribing head 30 based on the driving signal from the control unit 121. Part 31.

The monitor 128 displays display devices such as various setting menus or operation menus (process recipes) of the scribing device 100, operation states of the respective units, and captured images of the CCD cameras 108a and 108b. In addition, the monitor 128 itself may be a touch panel and have an input portion 123. The shape of the function.

The process recipe data holding unit 129 holds (stores) a portion (storage medium) of the process recipe data D1 in which the operation contents of the respective portions of the scribing device 100 at the time of scribing are described. In the scribing apparatus 100, from the plurality of process recipe materials D1 held in the process recipe data holding unit 129, the process recipe data D1 matching the content of the desired scribing process is selected and called, and the control unit 121 follows In the description, an operation instruction is given to each unit, and the scribing process is executed in accordance with the content of the process recipe data D1.

In each of the process recipe materials D1, there are described the following, for example, the type of the rotary blade 1 suitable for the content of the scribe line to be executed, the size (planar size and thickness) of the brittle material substrate P to be scribed, and the brittle material. The position at which the scribe line is performed on the substrate P (or the position at which the scribe head is lowered and raised), the downward distance of the scribe head 30 at the time of scribe, or the scribe line speed, and the like.

Further, in the process recipe data D1, a recommended replacement value V1 is further described. It is recommended that the replacement value V1 be a rotary blade 1 (blade holder 10) and other rotary blades 1 (other blade holders 10) that are recommended to be used when scribing according to the process recipe set based on the process recipe data D1. ) The value of the baseline at the time of replacement. Details of the proposed replacement value V1 will be described below.

The format of the process recipe data D1 is not particularly limited, and can be described in any format that can be processed by the scribing device 100.

Further, in the scribing device 100, the input portion 123 can be operated by following the setting menu displayed on the monitor 128, and a new process recipe data D1 can be created and held in the process recipe data holding portion 129. in.

The use history holding unit 130 holds (stores) a portion (storage medium) on which the history data D2 of the use history of each rotary blade is recorded, for all the rotary blades 1 used (or used in the future) in the scribing device 100. Specifically, at least one blade parameter is set in advance, and the blade parameter assigns an action form of the rotary blade 1 in the scribe line to the feature and A parameter that affects the service life of the rotary blade 1. The blade parameter is incremented every time the corresponding scribing action is performed, and the added value of each blade parameter in the scribing line is obtained each time the scribing process is performed, and is used as the usage history data D2 together with the previous accumulated value. Recorded.

Fig. 6 is a view showing the use history data D2 in the present embodiment. In FIG. 6, the case where the number of collisions of the rotary blade 1 and the brittle material substrate P, the number of circumcisions, the number of times of twisting occurred by the rotary blade 1, and the rotation from the start to the end of the scribing are exemplified The travel distance (unit: m) of the blade 1 in the X-axis direction, the travel distance (unit: m) in the Y-axis direction, and the total travel distance (unit: m) are set as the blade parameters, and the date on which the rotary blade 1 is used is recorded. The added value of each blade parameter (a ₁ ~ a _n , b ₁ ~ b _n , c ₁ ~ c _n , d ₁ ~ d _n , e ₁ ~ e _n , d ₁ + e ₁ ~ d _n + e _n ) And the cumulative value of each blade parameter (a, b, c, d, e, d+e). In addition, details regarding the parameters of each blade will be described below.

Further, as shown in FIG. 6, in the use history data D2, the use limit values (A, B, C, D, E, and F) for each blade parameter are described, and the latest parameter is described for each blade parameter. Whether the accumulated value has reached the limit mark of the use limit value. The use limit value means that if the rotary blade 1 is used in a state where the latest integrated value of the blade parameter exceeds the value, the value of the product defect (defective line defect) is almost surely generated. The use limit value is a value inherent to each of the rotary blades 1.

In the present embodiment, the limit flag is set to "1" for the blade parameter whose latest integrated value exceeds the use limit value, and the limit flag is set to "0" for the blade parameter whose latest integrated value does not exceed the use limit value. . In FIG. 6, the case where the blade parameter which becomes "X-axis direction transition distance" exceeds the use limit value (d>D) is illustrated. As described below, in the present embodiment, even if only one blade parameter having the limit flag of "1" exists in the rotary blade 1, it is prohibited to use the blade parameter, and if the blade parameter is not replaced, the scribing operation cannot be performed. That is, by checking the value of the limit flag, it is possible to specify whether or not the rotary blade 1 is unusable.

Alternatively, the method may be such that only the individual identification information of the rotary blade 1 having the blade parameter whose limit flag is "1" in the corresponding use history data D2 is obtained. The data can be used to determine whether the rotary blade 1 can be used based on whether or not the individual identification information is recorded in the blade non-use data.

Further, the blade parameters shown in FIG. 6 are merely examples, and the type of the blade parameter to be set or the description format of the use history data D2 is not limited to that shown in FIG. 6. Further, as the use limit value, an appropriate value can be determined based on experience or experiment.

Alternatively, in the present embodiment, it is not necessary that the scribing device 100 itself includes the reader 140 and even the code processing unit 124. For example, the scribing processing system connects a plurality of scribing apparatuses 100 to a common management server that collectively manages the scribing apparatuses via a communication network such as a LAN (Local Area Network) (not shown). In the case of the configuration, the code reader 140 or the code processing unit 124 may be provided only in the management server, and the decoded content may be transmitted from the management server to each of the scribing devices 100 via the network. Alternatively, in principle, the operator of the scribing processing system (hereinafter simply referred to as an operator) may input the decoded content via the input unit 123.

Further, in the case where the scribing processing system has the network configuration as described above, it is preferable that the process recipe data holding unit 129 or the usage history holding unit 130 is also provided in the management server. In this case, the process recipe data D1, the usage history data D2, and the blade non-use data are shared among the plurality of scribing devices 100, and can be referred to or updated by any of the scribing devices 100.

(second structure)

Fig. 7 is an external perspective view showing main mechanical components of the scribing device 200 of the second configuration. Roughly speaking, the scribing device 200 moves between the upper and lower scribe heads 30 (the upper scribe head 30A and the lower scribe head 30B) by including the brittle material substrate P on the upper and lower sides of the rotary blade 1 respectively. A device for scribing the brittle material substrate P simultaneously from the upper and lower directions. In addition, in FIG. 7, the XYZ coordinates of the right-handed system are drawn, in which the moving direction of the brittle material substrate is set to the Y-axis direction, and the moving direction of the scribing heads 30A and 30B in the horizontal plane is set to the X-axis direction, and The vertical direction is set to the Z-axis direction. Moreover, in Figure 7, in order to simplify the diagram The holder joint 20 provided on the scribing heads 30A and 30B, the blade holder 10 attached to the holder joint 20, or the rotary blade 1 held by the blade holder 10 are omitted.

The scribing device 200 mainly includes a substrate supporting mechanism 210, a clamping mechanism 220, and a scribing mechanism 230 as mechanical components thereof. Further, although not shown in FIG. 7, two CCD cameras 240a for locating positioning alignment marks provided on the upper surface (line surface) of the brittle material substrate P are provided on the upper portion of the scribing device 200. 240b (refer to Figure 8).

The substrate supporting mechanism 210 includes a first substrate supporting portion 210A and a second substrate supporting portion 210B. The first substrate supporting portion 210A and the second substrate supporting portion 210B are disposed to face each other with the scribing mechanism 230 interposed therebetween. The first substrate supporting portion 210A is responsible for transporting the brittle material substrate P before scribing, and the second substrate supporting portion 210B is responsible for transporting the brittle material substrate P after scribing.

Each of the first substrate supporting portion 210A and the second substrate supporting portion 210B is composed of a plurality of (five in FIG. 7) supporting units 211 which are arranged along the X-axis direction. Each of the support units 211 has a longitudinal direction in the Y-axis direction, and a timing belt 212 is placed along the Y-axis direction. The timing belt 212 is configured such that when the brittle material substrate P is supported on the upper surface thereof, the force in the Y-axis direction is applied to the brittle material substrate P, and the timing belt 212 is driven by the brittle material substrate P. The movement is rotated to accelerate the movement of the brittle material substrate P in the Y-axis direction.

The clamp mechanism 220 is configured to clamp (hold) the rear end portion of the brittle material substrate P placed on the timing belt 212 by one of the clamp members 221L, 221R disposed in the X-axis direction, and to hold In the clamped state, the clamps 221L and 221R are moved in the Y-axis direction. The movement of the clamping mechanism 220 is achieved by a linear motor. Further, the clamps 221L, 221R are provided so as not to interfere with the support unit 211 when moving in the Y-axis direction.

The scribing mechanism 230 is configured to simultaneously and simultaneously align the upper and lower sides of the brittle material substrate P The part of the line. In the scribing mechanism 230, the upper scribing head 30A and the lower scribing head 30B are included at positions between the first substrate supporting portion 210A and the second substrate supporting portion 210B in the Y-axis direction. The upper scribing head 30A is provided on the upper scribing mechanism 231, and the lower scribing head 30B is provided on the lower scribing mechanism 232, and is movable in the X-axis direction by a linear motor (not shown). Further, in the present embodiment, when the linear motor is driven, the moving speeds of the upper scribing head 30A and the lower scribing head 30B are scribed in the X-axis direction on the upper surface and the lower surface of the brittle material substrate P. The speed of the line.

More specifically, the upper scribing head 30A includes the holder joint 20 in such a manner that the rotary blade 1 is located at the lowermost end portion in a state in which the blade holder 10 is attached. On the other hand, the lower scribing head 30B includes the holder joint 20 in such a manner that the rotary blade 1 is located at the uppermost end in a state in which the blade holder 10 is attached. Further, each of the upper scribing head 30A and the lower scribing head 30B includes elevating portions 31A and 31B that can perform the lifting operation of the holder joint 20, respectively. The lifting portions 31A and 31B are realized by, for example, a servo motor, a linear motor, or an air cylinder controlled by air pressure.

In the scribing device 200 having the above configuration, the clamping mechanism 220 is brought into a state in which the rear end portion side of the brittle material substrate P placed on the first substrate supporting portion 210A is clamped by the clamping mechanism 220. When moving in the Y-axis direction, the brittle material substrate P supported by the supporting unit 211 of the first substrate supporting portion 210A is supported by the supporting unit 211 while being driven and rotated by the timing belt 212. The mechanism 220 is moved and transported along the Y-axis direction. In the middle, after the brittle material substrate P is scribed by the upper scribe line mechanism 231 and the lower scribe line mechanism 232, the brittle material substrate P is gradually supported by the support unit of the second substrate support portion 210B from the front end portion side. 211. Similarly to the first substrate supporting portion 210A, the second substrate supporting portion 210B is conveyed by the movement of the clamping mechanism 220 and the driven rotation of the timing belt 212 provided in the supporting unit 211. Therefore, in the scribing device 200, the substrate supporting mechanism 210 and the clamping mechanism 220 function as a holding device of the brittle material substrate P.

In this case, if the position of the upper side scribing head 30A and the lower side scribing head 30B in the Z-axis direction is adjusted in advance, the rotating blade 1 at the front end of the separately mounted blade holder 10 and the lower side scribing mechanism 231 and the lower side are drawn. When the brittle material substrate P is in contact with each other between the wire mechanisms 232, the rotary blades 1 are pressed and rotated on the upper and lower surfaces of the brittle material substrate P during transportation. Thereby, the lower surface of the brittle material substrate P can be scribed along the Y-axis direction. In this case, by appropriately changing the arrangement position of the upper scribing head 30A and the lower scribing head 30B in the X-axis direction, the scribing along the Y-axis direction can be performed at any position in the X-axis direction.

Further, when the brittle material substrate P is placed between the upper scribing mechanism 231 and the lower scribing mechanism 232, the blade holders are attached to the upper scribing head 30A and the lower scribing head 30B, respectively. When the rotating blade 1 at the distal end is in contact with the brittle material substrate P, the upper scribing head 30A and the lower scribing head 30B are moved in the X-axis direction, whereby the rotary blade 1 is pressed against the brittle material substrate P by pressure. Then, the brittle material substrate P can be scribed along the X-axis direction.

Further, with respect to the attachment form of the blade holder 10 with respect to the holder joint 20, the scribing device 200 is also the same as the scribing device 100. Therefore, when the scribing device 200 is scribing, the caster stabilization effect also functions in the same manner. .

FIG. 8 is a block diagram showing the functional configuration of the controller 250 included in the scribing device 200. The controller 250 mainly includes a control unit 251, an image processing unit 252, an input unit 253, a code processing unit 254, a clamp mechanism drive unit 255, a first scribing head drive unit 256, a second scribing head drive unit 257, and monitoring. The device 258, the process recipe data holding unit 259, and the use history holding unit 260. Further, the controller 250 is also the same as the controller 120. A preferred example is realized by a conventional personal computer or by being assembled in the scribing device 200.

The control unit 251, the image processing unit 252, the input unit 253, the code processing unit 254, the monitor 258, the recipe recipe data holding unit 259, and the use history holding unit 260 are substantially included in the scribing device 100, respectively. Control unit 121, image processing unit 122, Since the input unit 123, the code processing unit 124, the monitor 128, the recipe recipe data holding unit 129, and the use history holding unit 130 have the same functions, the detailed description thereof will be omitted.

The clamp mechanism drive unit 255 operates the clamps 221L and 221R of the clamp mechanism 220 in accordance with a drive signal from the control unit 251, and moves the clamp mechanism 220 in the Y-axis direction.

The first scribing head driving unit 256 and the second scribing head driving unit 257 move the upper scribing head 30A and the lower scribing head 30B in the X-axis direction based on the driving signal from the control unit 251, respectively, and drive the same. The elevating portions 31A and 31B of the respective scribing heads of the upper scribing head 30A and the lower scribing head 30B are responsible for holding the lifting operation of the joint 20 .

In the scribing apparatus 200, similarly to the scribing apparatus 100, a process corresponding to the content of the desired scribing process is selected and called from a plurality of process recipe materials D1 held in the process recipe data holding section 259. In the recipe data D1, the control unit 251 gives an operation instruction to each unit in accordance with the description, and performs the scribing process in accordance with the content of the process recipe data D1.

<Details of blade parameters>

Next, the blade parameters indicating the state of use of the rotary blade 1 illustrated in Fig. 6 will be described in detail.

(number of collisions)

In the present embodiment, the number of collisions between the rotary blade 1 and the brittle material substrate P means that the scribing head 30 including the rotary blade 1 is lowered to perform scribing, and the blade portion 2 of the rotary blade 1 and the brittle material substrate P are caused. The number of contacts. When the contact occurs each time, the blade portion 2 is subjected to an impact, and therefore, the blade portion 2 is worn by repeated contact. The use of the worn blade portion 2 is a major factor that deteriorates the quality of the scribing. Therefore, in the present embodiment, the number of collisions between the rotary blade 1 and the brittle material substrate P is set as the blade parameter, and based on the integrated value, it is determined whether or not the rotary blade 1 has reached the use limit.

(external cut)

The outer cut is generally referred to as a position where the upper surface of the brittle material substrate P is a lined surface, and the rotary blade 1 is lowered to a brittle position at a position outside the edge portion of the brittle material substrate P. A method in which the height position of the scribing surface of the material substrate P is slightly lower than the height of the scribe line, and the end portion of the brittle material substrate P is scribed to the other end portion. Fig. 9 is a schematic view showing the state of the outer cutting. In the case shown in FIG. 9, the case where the rotational blade 1 is lowered to the lower side of the brittle material substrate P by the distance OH1 in the X-axis direction is exemplified. The scribe line height is circumscribed until it is separated from the brittle material substrate P by a distance OH2 in the X-axis direction.

Further, with respect to the outer cutting, a method of lowering the rotary blade 1 at the position where the brittle material substrate P is located and performing scribing is referred to as inscribed.

Since the scribe line reaches both ends of the substrate, the break after the scribe line is easy, and there is an advantage that the rotary blade 1 slips at the start position of the scribe line when the inner cut does not occur. . However, the rotary blade 1 is apt to be consumed as compared with the case of the inner cut, so the more the number of circumcisions, the easier the rotary blade 1 reaches the use limit. On the other hand, in the present embodiment, the number of circumcisions is set as the blade parameter, and based on the integrated value, it is determined whether or not the rotary blade 1 has reached the use limit.

(rotation of the rotating blade)

Next, in the description of the twist of the rotary blade 1, first, the kingpin backward tilting effect which occurs at the time of scribing will be described. As described above, the holder joint 20 is freely rotatable about the rotation axis AX1, and does not have a mechanism for directly adjusting the posture of the rotary blade 1. Therefore, when the scribing is started, the blade portion 2 of the rotary blade 1 does not necessarily face the scribing direction. On the other hand, in the state in which the blade holder 10 is attached to the holder joint 20, the horizontal position of the pin 15 of the rotary blade 1 is shifted from the horizontal position of the rotation axis AX1 which is the rotation center of the bearings 21a, 21b. Therefore, if the rotary blade 1 is in contact with the brittle material substrate P, When the wire head 30 starts to move in a certain direction in a horizontal direction, the torque acts on the holder joint 20 immediately, and the rotary blade 1 is opposed to the brittle material in a state parallel to the relative moving direction of the scribing head 30. The substrate P is pressed and rotated. This phenomenon is called the kingpin backward tilting effect.

However, when the king pin back tilting effect occurs, the rotary blade 1 forcibly changes its posture in a state where the blade portion 2 is in contact with the brittle material substrate P. In the present embodiment, the mandatory posture change occurring on the rotary blade 1 in response to the occurrence of the caster stabilizing effect is referred to as "twisting" of the rotary blade 1.

Fig. 10 is a view showing an example of twisting of a rotary blade. In FIG. 10, the scribing head 30 is moved in the X-axis direction, and the brittle material substrate P is subjected to a plurality of times of scribing in the X-axis direction indicated by the arrow AR1, and then rotated. The blade 1 is temporarily separated from the brittle material substrate P, and then, after the rotary blade 1 is brought into contact with a scribe start position below the brittle material substrate P, the scribe head 30 is relatively moved in the Y-axis direction, thereby the arrow The Y-axis direction indicated by AR2 is scribed. In this case, the rotary blade 1 in the state in which the first scribe line has been completed is held in a posture in the substantially X-axis direction and supplied to the scribe line in the next Y-axis direction. Therefore, when the rotary blade 1 is brought into contact with the brittle material substrate P again and the scribing in the Y-axis direction is started, as shown in the circle of FIG. 10, the direction is slightly slightly different from the Y-axis. Soon, the rotary blade 1 is twisted with the relative movement of the scribing head 30, so that the rotary blade 1 is formed in a posture parallel to the Y-axis direction, and as a result, a desired scribing in the Y-axis direction can be realized.

The twisting of the rotary blade 1 is one of the main factors that cause the blade portion 2 of the rotary blade 1 to wear. Therefore, if the twist is repeated, the quality of the scribe line of the rotary blade 1 is deteriorated. On the other hand, in the present embodiment, the number of occurrences of the twist is set as the blade parameter, and based on the integrated value, it is determined whether or not the rotary blade 1 has reached the use limit.

(transition distance)

The travel distance of the rotary blade 1 refers to the blade portion 2 of the rotary blade 1 and the brittle material. The distance that the rotary blade 1 relatively moves with respect to the brittle material substrate P in a state where the material substrate P is in contact. Since the scribing is achieved by pressing the blade portion 2 against the brittle material substrate P by pressure, it is understood that when the traveling distance of the rotary blade 1 is long, the abrasion of the blade portion 2 progresses, and the scribing quality is deteriorated. Therefore, in the present embodiment, the travel distance of the rotary blade 1 is set as the blade parameter, and based on the integrated value of the blade parameters, it is judged whether or not the rotary blade 1 has reached the use limit.

In addition, in FIG. 6, the moving distance in the X-axis direction, the moving distance in the Y-axis direction, and the cumulative value of the equal distances, that is, the total moving distance are treated as individual blade parameters, but they correspond to the moving distance to be focused. It will vary depending on the content of the recipe recipe set at the time of scribing.

As an example, it is considered that the second scribing in the Y-axis direction is performed without rotating the brittle material substrate P after the first scribing in the X-axis direction is completed. In this case, when the second scribing line is performed, the rotary blade 1 crosses the scribe line previously formed by the first scribe line, so that the rotary blade 1 is more susceptible than the case where the cross traverse is not performed. Shock. In this case, by setting the recommended replacement value V1 regarding the travel distance in the Y-axis direction to be shorter than the recommended replacement value V1 with respect to the travel distance in the X-axis direction, the division by the Y-axis direction can be more reliably suppressed. The occurrence of line defects due to deterioration of line quality.

<Replacement of rotary blade based on recommended replacement value>

As described above, in the present embodiment, the recommended replacement value V1 is described in the process recipe data D1. The recommended replacement value V1 is, in a nutshell, a value set for each blade parameter to be a reference for recommending replacement of the rotary blade 1. In other words, the recommended replacement value V1 is a standard value, which means that if the rotary blade 1 is not replaced and the scribing process is continued based on the process recipe, the possibility of occurrence of scribing defects becomes high, so that generation is prevented. It is preferable to replace it in the case of poor scribing. Therefore, it is generally set such that even if the rotary blade 1 is continuously used in a state where the blade parameter exceeds the above value, the rotary blade 1 does not reach the service life immediately. In addition, regarding the recommended replacement value V1, it is also related to the use limit value. Similarly, appropriate values can be determined empirically or experimentally. Also, hereinafter, the case where the rotary blade 1 that satisfies the recommended replacement is referred to as being in the recommended replacement state.

In the present embodiment, it is determined whether or not the rotary blade 1 can be used for scribing (whether or not replacement is required) based on the recommended replacement value V1 determined for each process recipe and the use history data D2 unique to each rotary blade 1. Thereby, it is possible to surely prevent occurrence of defects in the scribing process of the brittle material substrate P, and it is possible to improve the yield.

Although it is called a scribing process, the method of using the rotary blade 1 is completely different depending on the setting of the process recipe. For example, the scribing process in which the scribing is performed in only one direction, or the scribing process in which the scribing head 30 is moved up and down, the dashing process in which the moving distance is short, or the scribing process in which the twisting is repeated is performed by changing the process recipe setting. Although various sorting processes can be performed, the wear mode of the rotary blade 1 varies depending on various scribing processes. This means that if the setting contents of the process recipe are different, the cumulative value of the blade parameters until the occurrence of the scribing failure or the cumulative value of the blade parameters of the rotary blade 1 that can be used when the scribing defect does not occur is obtained. The upper limit is different. In the present embodiment, in view of this, by setting the recommended replacement value V1 for each blade parameter for each process recipe data D1, it is determined whether or not there is a usable rotary blade based on the criterion most suitable for each process recipe.

For example, under the process recipe in which the scribing head 30 is raised and lowered a lot, the blade portion 2 is easily worn by the collision between the rotating blade 1 and the brittle material substrate P, so that the blade parameters are related to the rotating blade 1 and the brittleness. The recommended replacement value V1 of the number of collisions of the material substrate P is set to be low, and it is possible to surely prevent occurrence of a scribe defect.

On the other hand, even if the blade parameter of the rotary blade 1 has accumulated to a value recommended to be replaced according to the recommended replacement value V1 described in the certain process recipe data D1, the accumulated value is smaller than the recommended replacement value V1 described in the other process recipe data D1. In the case of the case, the rotary blade 1 can also be used for scribing under the process recipe of the process recipe data D1. Thereby, the rotary blade 1 can be effectively used within the usable range.

In addition, as long as the rotary blade 1 is replaced based on the recommended replacement value V1, it will be used in addition to The blade parameters should not reach the service limit values except when the limit value and the recommended replacement value V1 are set to the same value. Therefore, although it seems that there is no need to set the use limit value, there is actually a case where the rotary blade 1 exceeding the recommended replacement value V1 is hard to be used, or the possibility of using the rotary blade 1 that has reached the service life is misused. Therefore, it is effective to set the use limit value in order to prevent the scribe line from being bad in such a case.

<Line processing>

Next, a flow of processing in the case of scribing in the scribing processing system having the above configuration will be described. In the following description, the scribing devices 100 and 200, which are mechanical constituent elements for the actual scribing operation, are also referred to as "device main bodies". Moreover, for the sake of convenience, the following description is based on the assumption that the scribing devices 100 and 200 are underlined, and the description can also be applied to other scribing devices having the same configuration.

FIGS. 11 and 12 are views showing a flow of processing up to the completion of the scribing process after the blade holder 10 is mounted on the scribing device 100 or 200.

First, the blade holder 10 of the rotary blade 1 is prepared to be held (step S1). Further, when the process recipe to be used in the scribing is selected and set in advance (step S0), and the content of the scribing to be performed later is known, it is preferable to prepare a pattern suitable for the scribing. The blade holder 10 of the rotary blade 1 is rotated. In the case of the scribing device 200, since both the upper scribing head 30A and the lower scribing head 30B are provided, two blade holders 10 are prepared. In addition, hereinafter, unless otherwise specified, in the case of the scribing apparatus 200, when the rotary blade 1 held by at least one of the blade holders 10 is unusable or is intended to be replaced, Corresponding processing.

Then, the code reader 140 or 270 is used to read the code 14 stamped on the flat portion 11a of the prepared blade holder 10 (step S2). The read code 14 is immediately decoded into text information in the code processing section 124 or 254 (step S3). Text information such as a pattern, a management number, and initial correction information decoded from the code 14 is supplied to the control unit 121 or 251.

Then, the control unit 121 or 251 reads out the use history data D2 of the rotary blade 1 with the management number from the use history holding unit 130 or 260 based on the management number decoded from the code 14 (step S4), according to the It is judged whether or not the rotary blade 1 is a usable rotary blade that has not reached the use limit by using the content of the history data D2 (step S5). Specifically, when there is no blade parameter in which the limit flag is "1" in the use history data D2, it is judged that it is usable (YES in step S5). On the other hand, if there is one of the blade parameters whose limit flag is "1" in the use history data D2, it is judged that it is not usable (NO in step S5). In addition, when the blade non-useable data has been generated, it can also be judged by referring to the data whether or not the rotary blade 1 is a usable rotary blade that has not reached the use limit.

When it is judged that the rotary blade 1 is unuserable (NO in step S5), the control section 121 or 251 causes the monitor 128 or 258 to display that the rotary blade 1 of the read code 14 to be used is unusable. The warning is displayed, and a signal for prohibiting the use of the rotary blade 1 to perform the scribing action (lock scribing action) is issued (step S6). Thereby, in the scribing device 100 or 200, it is notified that the rotary blade 1 is unusable, and the rotary blade 1 cannot be used for scribing, so that it is possible to surely prevent, for example, the rotary blade 1 that has reached the end of its useful life due to misuse. This leads to poor scribing and the like.

When the warning display of the unusable warning has been performed, the operator removes the blade holder 10 while the blade holder 10 holding the rotary blade 1 is mounted on the holder joint 20, in the case of being removed After confirming the state of the blade holder 10 (step S7), another blade holder 10 is prepared (step S8). Further, the newly prepared blade holder 10 is again read by the code 14 (step S2). Further, by performing the re-reading of the code 14, the prohibition state of the scribing operation of the scribing device 100 or 200 is released.

When it is judged that the prepared rotary blade 1 is a user-possible (YES in step S5), the operator then operates according to the menu displayed in the monitor 128 or 258, thereby maintaining from the recipe recipe data. Select one of the sections 129 or 259 for the line The process recipe data D1, in turn, inputs the information required for the number of blocks of the brittle material substrate P to be processed. Thereby, the process recipe required for the scribing is set (step S9). Further, as described above, there is also a case where the process recipe is previously selected and set before the blade holder 10 is prepared.

When the process recipe is set, the control unit 121 or 251 performs the pattern decoded from the code 14 and the type of the rotary blade 1 which can be used in the scribe line performed by executing the process recipe described in the process recipe data D1. In contrast, it is judged whether or not the prepared rotary blade 1 is suitable for executing the process recipe (step S10).

When it is determined that the rotary blade 1 is not suitable for executing the set process recipe (NO in step S10), as in the case described above, the monitor 128 or 258 is caused to display a warning display that the rotary blade 1 is not usable, and A signal for prohibiting the use of the rotary blade 1 to perform the scribing operation (locking the scribing operation) is issued (step S6). Accordingly, in the scribing device 100 or 200, the rotary blade 1 is notified that the rotary blade 1 is unusable, and the rotary blade 1 cannot be used for scribing. Therefore, it is possible to surely prevent, for example, misuse due to misuse of the process recipe based on the set process recipe. The generation of a scribe defect or the like caused by the scribing of the rotary blade 1. Further, in this case, the rotary blade 1 judged to be unusable cannot be used only in the scribe line based on the set process recipe, and is not an unusable item that has reached the end of its service life. Therefore, there are cases where it can be used when setting another process recipe.

As described above, when it is determined that the rotary blade 1 is not suitable for executing the set process recipe, it is necessary to prepare another blade holder and re-read the code (steps S7, S8, S2).

On the other hand, when it is determined that the rotary blade 1 is suitable for executing the set process recipe (YES in step S10), the control unit 121 or 251 performs the following arithmetic processing, that is, according to the setting contents of the process recipe, The added value of each blade parameter when the scribing based on the process recipe is performed until the end is calculated, and the added value is added to the integrated value of each blade parameter described in the use history data D2 (step S11) . The value thus obtained becomes the cumulative value of the blade parameters that may be reached after the end of the scribe line (referred to as the estimated arrival value).

Further, the control unit 121 or 251 compares the estimated arrival value with the recommended replacement value V1 described in the process recipe data D1, and determines whether the rotary blade 1 to be used has reached the recommended replacement state in the scribing process (step S12).

More specifically, in terms of scribing based on the process recipe, in other words, the specific action content of the scribing can be specified according to the setting content of the process recipe, that is, the scribing head 30 is lowered. The number of times the rotary blade 1 is in contact with the brittle material substrate P, or the travel distance of the rotary blade 1, and the like. That is, by analyzing the contents of the process recipe, even if the scribing is not actually performed, the added value of each blade parameter when scribing according to the process recipe can be calculated. When the added value is obtained, as described above, the estimated arrival value of each blade parameter after the scribing process can be obtained before the scribing is actually performed.

Fig. 13 is a view for explaining a manner of calculating an added value of a blade parameter based on a process recipe. For example, as shown in FIG. 13, it is considered that the following process recipes are set: six pieces of brittle material substrate P are subjected to end-cutting in six portions (transition distance L1) of X1 to X6 in the X-axis direction, and then in Y. In the axial direction, six portions of Y1 to Y6 (transition distance L2) are also subjected to scribing by inscribed.

In this case, since there are 12 collisions for each of the 100 brittle material substrates P, the number of collisions between the rotary blade 1 and the brittle material substrate P is 1200 times; since all are inscribed, the number of external cuts is 0 times. Since the twisting of the next brittle material substrate P by X1 is performed only after the scribing of Y1 after the X6 scribing, and the X1 scribing of the next brittle material substrate P is performed, the number of twisting is 200 times. The X-axis travel distance becomes 600L1 (m), the Y-axis travel distance becomes 600L2 (m), and the total travel distance becomes 600 (L1 + L2) (m).

In this case, if the cumulative value described in the usage history data D2 shown in FIG. 6 is applied to the calculation of the estimated arrival value, when it is determined whether or not the rotary blade 1 has reached the recommended replacement state, the following parameters are determined for each blade parameter. The two values are compared.

Number of collisions between the rotating blade 1 and the brittle material substrate P: Estimated arrival value = a ₁ +... + a _n + 1200, recommended replacement value V1 = V1a; number of external cuts: estimated arrival value = b ₁ +... +b _n , recommended replacement value V1=V1b; number of twists: estimated arrival value = c ₁ +...+c _n +200, recommended replacement value V1=V1c; X-axis direction travel distance: estimated arrival value = d ₁ +...+d _n +600L1, recommended replacement value V1=V1d; Y-axis direction travel distance: estimated arrival value = e ₁ +...+e _n +600L2, recommended replacement value V1=V1e; total travel distance: The expected arrival value = (d ₁ + e ₁ ) ... + (d _n + e _n ) + 600 (L1 + L2), it is recommended to replace the value V1 = V1f.

As a result of the comparison, even if there is only one blade parameter whose estimated arrival value is larger than the recommended replacement value V1, the control unit 121 or 251 determines that the rotary blade 1 as the object of use has reached the recommended replacement state in the scribing process. (YES in step S12), the monitor 128 or 258 is caused to display the display of the rotary blade 1 suggesting replacement of the read code 14 (recommended replacement display) (step S13). Thereby, the rotary blade 1 is informed that it is in the recommended replacement state.

When the recommended replacement display has been made, the operator usually judges that it is necessary to replace the rotary blade 1 (YES in step S14), prepare another blade holder and reread the code (steps S7, S8, S2). Thereby, it is possible to surely avoid occurrence of scribing defects.

On the other hand, when it is determined that the rotary blade 1 as the object of use does not reach the recommended replacement state in the scribing process (NO in step S12), the blade holder 10 holding the rotary blade 1 is mounted on the hold. The connector 20 is provided (step S15). In addition, this case is confirmed when the blade holder 10 has been mounted on the holder joint 20.

Further, there is a case where the replacement display is performed but the replacement is not performed according to the judgment of the operator (NO in step S14), and in this case, the blade is also held. The device 10 is mounted on a holder joint. For example, the cumulative value obtained by the above calculation is only slightly larger than the recommended replacement value V1, and it is determined that the possibility that the scribe line defect is low is the same.

If the blade holder 10 is mounted on the holder joint 20, the control unit 121 or 251 issues a signal indicating that the scribing process is performed based on the set process recipe after the well-known alignment process or initial processing in which the details are omitted. (Step S16). The scribing device 100 or 200 starts scribing based on the process recipe in response to the execution instruction signal (step S17).

Specifically, in the case of the scribing apparatus 100, the transport mechanism drive unit 125, the rotation mechanism drive unit 126, and the scribing head drive unit 127 transfer the respective transport motors of the mobile station 101 in accordance with the contents of the process recipe. 104. The rotating mechanism 105 and the linear motor 112 operate with the lifting portion 31, thereby implementing a scribing action based on a series of process recipes. In the case of the scribing device 200, the clamp mechanism drive unit 255, the first scribing head drive unit 256, and the second scribing head drive unit 257 each have a corresponding clamp mechanism 220 according to the description of the process recipe. The upper side scribing mechanism 231 and the lower side scribing mechanism 232 are operated, thereby realizing a scribing action based on a series of process recipes.

Further, in the case of the scribing device 200, in the lower scribing mechanism 232, the lower scribing head 30B is raised in order to bring the rotary blade 1 into contact with the brittle material substrate P, but the brittle material substrate P and the rotating blade are used. The relative positional relationship of 1 is the same as that of the scribing head 30 of the scribing apparatus 100 or the upper scribing head 30A of the upper scribing mechanism 231. Therefore, in the present embodiment, the lower scribing head is used for the sake of convenience. The contact form of the brittle material substrate P of 30B with the rotary blade 1 also appears as "decreasing the scribing head 30".

When the scribing process is completed by completing all the scribing operations set by the process recipe (step S18), the use history is updated based on the content of the scribing process (step S19). Specifically, for the use history data D2, the added value of each blade parameter generated by the scribing process and the date of the scribing which are calculated before the start of scribing is added, and the previously described cumulative value is rewritten. The estimated arrival value obtained by using the above operation.

If the usage history is updated, the control section 121 or 251 causes the monitor 128 or 258 to display a menu for inputting whether or not to execute a scribing based on another recipe (step S20). When the selection of the scribing with another process recipe is selected (YES in step S20), the process returns to step S5, and the same processing as described above is repeated. When the case where the scribing is not performed with another process recipe is selected (NO in step S20), a series of processing ends.

As described above, in the scribing processing system of the present embodiment, the code stamped on the blade holder is read by the code reader before the scribing is performed, and is held by the blade holder. The management number and pattern of the rotating blade are decoded, and the decoded management number is compared with the usage history. As a result of the comparison, when the rotary blade of the management number has been pre-recorded as a rotating blade that is not usable to reach the use limit, the scribing device performs display prohibiting the use of the rotary blade, and prohibits the operation until another blade is prepared. Keep it up. Thereby, it is possible to prevent the occurrence of the scribe line defect due to the use of the rotary blade that has reached the use limit.

Further, the decoded pattern and the pattern described in the process recipe data of the content of the scribing process to be performed later are compared. As a result of the comparison, when the type of the rotary blade is not described as a type of the rotary blade that can be used in the process recipe data, the scribing device prohibits the display of the rotary blade and prohibits the operation until another one is prepared. The blade is held until now. Thereby, it is possible to prevent the generation of the scribing defect caused by the use of the rotary blade whose type is not suitable for executing the process recipe set based on the process recipe data.

In addition, regarding each rotary blade, a feature is given to its use form, and a parameter affecting the service life, that is, a history of the chip parameters is recorded in advance, and on the other hand, in the process recipe data, each blade parameter is recorded according to the process recipe data. The value of the scribing content is set in advance as a value for the replacement of the rotary blade, that is, a recommended replacement value. Moreover, regarding each blade parameter, the cumulative value (estimated arrival value) that may have been reached when the line is drawn according to the process recipe is compared with the recommended replacement value, and when there is a larger blade parameter of the former When prompted, it is recommended to replace the display of the rotating blade. Thereby, it is possible to surely prevent the occurrence of the scribing defect when the process recipe set based on the process recipe data is executed. Further, since the recommended replacement value is determined according to the setting contents of the process recipe, the rotary blade can be effectively used within the usable range.

<Second embodiment>

In the first embodiment described above, the integration of the blade parameters is performed by the arithmetic processing based on the set process recipe, but the integrated form of the blade parameters is not limited to the above embodiment. In the present embodiment, the flow of the scribing process in the case where the blade parameters are accumulated based on the actual measurement values will be described. However, for the sake of simplicity, in the present embodiment, only the number of collisions between the rotary blade 1 and the brittle material substrate P in the blade parameters exemplified above and the travel distance of the rotary blade 1 are used to determine whether or not the rotary blade 1 needs to be replaced. .

FIG. 14 and FIG. 15 are views showing a flow of processing until the scribing process is completed after the blade holder 10 is attached to the scribing device 100 or 200 in the present embodiment.

As shown in FIG. 14, in the front portion of the scribing process of the present embodiment, specifically, after the blade holder 10 is prepared, it is determined whether or not the rotary blade 1 is usable based on the management number or pattern decoded from the code 14. The steps (steps S1 to S10) are the same as in the first embodiment.

However, in the case of the present embodiment, when it is determined by the comparison pattern that the rotary blade 1 is adapted to execute the set process recipe (YES in step S10), the blade holder 10 is mounted on the holder joint. 20 is on (step S15). In addition, this case is confirmed when the blade holder 10 has been mounted on the holder joint 20. Further, if the blade holder 10 is mounted on the holder joint 20, after performing the well-known alignment processing or initial processing, the control portion 121 or 251 issues a signal indicating that the scribing processing is executed based on the set recipe recipe (step S16). ).

The scribing device 100 or 200 starts scribing based on the process recipe in response to the execution instruction signal (step S17), but in the present embodiment, at the same time as starting the scribing, the scribing device 100 or 200 The line device 100 or 200 measures the blade parameters, and further, the measured value (parameter measured value) of the blade parameter is sequentially transmitted to the control portion 121 or 251. The control unit 121 or 251 adds the parameter actual value to the integrated value before each blade parameter described in the use history data D2 each time the parameter actual value is acquired (step S101).

For example, when the number of collisions between the rotary blade 1 and the brittle material substrate P is such that the rotary blade 1 is brought into contact with the brittle material substrate P by the lifting operation of the scribing head, "1" is added to the previous integrated value. "." Further, regarding the traveling distance of the rotary blade 1, each time the scribing operation in the X-axis direction or the Y-axis direction is performed, the moving distance of the rotary blade 1 at this time is added to the previous integrated value.

During the scribing operation, the control unit 121 or 251 compares the values of the respective blade parameters with the recommended replacement value V1 recorded in the process recipe data D1 each time the blade parameters are added. Whether or not the rotary blade 1 has reached the recommended replacement state is judged based on whether any of the blade parameters is larger than the recommended replacement value V1 (step S102).

If the recommended replacement state has not been reached (NO in step S102), and the scribing period is performed (NO in step S103), the addition of the parameters and the comparison with the recommended replacement value V1 are repeated.

On the other hand, during the execution of the scribing, when either of the blade parameters is larger than the recommended replacement value V1 and becomes the recommended replacement state (YES in step S102), the control section 121 or 251 causes the monitor 128 or 258 to display the suggestion. The display of the rotary blade 1 used in the scribing is replaced (recommended replacement display) (step S104). Thereby, the rotary blade 1 is informed that it is in the recommended replacement state. However, the dash action continues at this point in time.

When the recommended replacement display is performed, the operator determines whether or not to replace the rotary blade 1 (step S105). When the replacement is performed (YES in step S105), the scribing is stopped (step S106), another blade holder is prepared and the code is re-read (steps S7, S8, S2). Thereby, it is avoided to cause poor scribing.

In the case where the recommended replacement of the display has been made but the rotary blade 1 has not been replaced (in step) If NO in step S105, or when the rotary blade 1 is not in the recommended replacement state, if the scribing operations set in the process recipe are all completed, the scribing process ends (YES in steps S18 and S103). ). Moreover, the accumulated value of the usage history data D2 is updated by adding the blade parameters at this point of time (step S19).

In addition, in the case where the replacement of the rotary blade 1 has not been performed, the replacement of the rotary blade 1 is not performed, and the cumulative value of the blade parameter at the time point when the completion of the scribing process is determined due to the fact that the number of remaining batches is small is satisfied. When it is larger than the recommended replacement value V1, it is judged that the possibility of occurrence of a scribe defect is low.

If the usage history is updated, the control section 121 or 251 causes the monitor 128 or 258 to display a menu for inputting whether or not to perform scribing based on another recipe (step S20). When the selection of the scribing by another process recipe is selected (YES in step S20), the process returns to step S5, and the same processing as described above is repeated. When the case where the scribing is not performed in accordance with another process recipe is selected (NO in step S20), a series of processing ends.

As described above, in the present embodiment, the first embodiment in which the blade parameter is calculated based on the description of the process recipe and the rotary blade 1 is in the recommended replacement state based on the calculation result is based on the actual situation. The scribing action determines whether the rotary blade 1 is in the recommended replacement state. In the first embodiment, if the setting content of the process recipe is complicated, it takes time to calculate the arrival value, and thus the processing efficiency may be lowered. However, in the present embodiment, it is repeated only in the scribing process. Since the addition processing is performed, the scribing process can be performed without lowering the processing efficiency, and the occurrence of the scribing defect can be surely prevented.

Further, in the first embodiment, there is a case where even if the rotary blade 1 that does not actually reach the recommended replacement state is compared, the estimated arrival value is compared with the recommended replacement value, and as a result, the recommended replacement state is reached at the next use. In this case, the replacement is performed at this point of time; however, in the present embodiment, the rotary blade 1 is replaced only after the recommended replacement state is actually reached, so that the rotary blade 1 can be used more effectively.

In addition, the actual measurement of the blade parameters can be performed using well-known techniques. The number of collisions between the rotary blade 1 and the brittle material substrate P may be, for example, a configuration in which a relay (electrical connection) that is turned on or off each time the rotary blade 1 comes into contact with the brittle material substrate P is provided on the scribing head 30. Point), "1" is added every time the control unit 121 or 251 detects the ON/OFF signal; it may be in the form that the servo motor constitutes the lifting portion 31 of the scribing head 30, and whenever the rotation is detected When the blade 1 comes into contact with the brittle material substrate P, the torque generated by the servo motor rises by "1".

Further, when the traveling distance of the rotary blade 1 is realized by the scribing operation in the Y-axis direction of the scribing device 100, when the relative movement of the rotary blade 1 with respect to the brittle material substrate P is realized by using the ball screw 103, A rotary encoder (not shown) converts the number of revolutions of the rotary shaft of the motor into a pulse signal, and counts the pulse signal output by the encoder counter to calculate the travel distance. Alternatively, when the relative movement of the rotary blade 1 is realized by using a linear motor, a linear scale along the moving direction of the rotor portion provided in the scribing head 30 is provided in the stator portion thereof, and if it is moved at the scribing head 30 When the scale portion is scanned, one pulse signal is generated per unit length, and the travel distance can be calculated from the number of pulse signals outputted.

As described above, even in the present embodiment, as in the first embodiment, the management number of the rotary blade held by the blade holder can be decoded based on the code decoded from the blade holder. Type to determine whether the rotary blade can be used.

Further, with respect to each of the rotary blades, a feature is given to the use form thereof, and a parameter which affects the service life, that is, a blade parameter is accumulated based on the actual measurement value, and based on each process recipe for the content in which the scribing process is described. The determined replacement value of each blade parameter is determined, and it is determined whether or not the rotary blade for scribing has reached the recommended replacement state, so that it is possible to surely prevent the occurrence of the scribing defect in the case of executing the process recipe. Further, since the recommended replacement value is determined according to the setting contents of the process recipe, the rotary blade can be effectively used within the usable range.

<variation>

In the above description, the scribing process of the first embodiment and the scribing process of the second embodiment have been independently described. However, the scribing processes are not reversed, but can be performed simultaneously in parallel. In this case, it is also possible to distinguish between the respective scribing processes depending on the type of the blade parameters. For example, it is also possible to apply the scribing process according to the second embodiment to the determination based on the recommended replacement state of the number of collisions or the travel distance of the rotary blade 1 and the brittle material substrate P, based on actual measurement, and on the other hand, The determination of the recommended replacement state based on the number of times of the circumcision or the number of times of twisting is performed by applying the scribing process of the first embodiment based on the estimated arrival value.

In the second embodiment described above, the blade parameter is actually measured during the scribing process, but the blade parameter can be actually measured during the alignment process or during the test scribing by manual operation. In this case, since the cumulative value of the blade parameters recorded in the usage history data D2 is close to the value of the actual blade parameter, it is possible to judge more strictly whether or not the rotary blade needs to be replaced. Further, in the case of the first embodiment, such a response is not impossible, but it is not necessarily realistic.

In the case of the second embodiment, the cumulative value of the blade parameters is almost instantaneously updated. The accumulated value can also be instantly displayed on the monitor 128 or 258 in this manner. In this case, since the operator can recognize that the blade parameter is close to the recommended replacement value V1, the replacement can be prepared in advance. In this case, the form of the value of the blade parameter before the recommended replacement value V1 is displayed in a countdown manner.

In the above case, it is also possible to use a scribing device in which only one rotating blade is scribed on one surface of the brittle material substrate P, and a plurality of scribing heads are provided on the same surface. A plurality of portions of the surface are simultaneously scribed. In this case, the judgment of whether or not the above-described use can be judged or replaced is performed separately according to the rotary blades attached to the respective scribing heads.

The scribing system can also include means for automatically replacing the blade holder 10 mounted on the holder joint 20 (holding device). In this case, it is preferable to notify the control portion 121 or 251 in response to the unusable or in the recommended replacement state of the rotary blade 1, and the blade holder 10 is replaced by the holder automatic change device.

1‧‧‧Rotating blade

10‧‧‧ blade holder

11a‧‧‧ (blade holder) flat

12‧‧‧ gap

13‧‧‧ pin slot

14‧‧‧ Code

15‧‧ ‧ sales

16a‧‧‧ inclined section

16b‧‧‧flat

Claims (3)

A scribing processing system, comprising: a scribing head, wherein the scribing head includes a holder joint, and the holder joint is mounted with a blade holder that holds a rotating blade having a blade portion on the outer peripheral surface to be rotatable, and The scribing head may be disposed to be relatively movable with respect to the brittle material substrate held by the specific holding means, and the rotating blade held by the blade holder is contacted while the blade holder is mounted on the scribing head And secant the brittle material substrate by moving the scribing head relative to the brittle material substrate on the brittle material substrate; and the scribing processing system further comprises: a decoding device, wherein the inclusion is uniquely identifiable When the information of the management number of the rotary blade held by the blade holder is marked as a code on the blade holder, the management number of the rotary blade is decoded from the code; and the history data holding device is used. The action pattern of the rotary blade at the time of the scribing is given a feature, and the value thereof is entered every time. When the parameter added during the corresponding scribing action is set as the blade parameter, the history of the value of at least one of the above-mentioned blade parameters of each rotating blade is maintained as the usage history data; the process recipe data holding device maintains at least one process a recipe data, wherein the content of the scribing process performed by the scribing processing system and the recommended replacement value individually determined for the at least one of the blade parameters are collectively included in the process recipe data; and an input device that can be input to a plurality of indications of the scribing processing system, the indication comprising an indication for selecting, from the at least one process recipe material, the execution of the recipe recipe data by the scribing processing system; In the above scribing head, the holder joint on which the blade holder is mounted is freely rotatable in a horizontal plane, and a center of rotation of the rotating blade is offset from a horizontal position of a rotating shaft of the holder joint; When the scribing process of the recipe data is performed in the first direction, when the scribing in the second direction different from the first direction is performed, the scribing in the second direction is started immediately after the scribing in the second direction. The forced posture change of the rotary blade in a state of being in contact with the brittle material substrate is considered to be the blade parameter during the twisting process, and the number of the torsion performed during the scribing process is determined as the blade parameter. The rotary blade whose code has been read performs the above-mentioned scribing process according to the above-described one-process recipe data selected by the input device, whereby the cumulative value of the blade parameter with respect to any one of the rotary blades exceeds the above recommended replacement In the case of a value, it is notified that any of the above rotating blades is in a recommended replacement state. The scribe processing system of claim 1, wherein when the process recipe data is selected by the input device in order to perform a scribing process, the execution content of the scribing process described in the process recipe data is calculated. And adding the value of the blade parameter to the previous accumulated value of the blade parameter recorded in the use history data, thereby obtaining an estimated arrival value of the blade parameter after the one-line process, When it is expected that the arrival value exceeds the above-mentioned recommended replacement value, it is notified that any of the above-mentioned rotating blades is in the recommended replacement state. A scribing system according to claim 1 or 2, wherein said rotary blade is integrally formed with said blade holder.