JP2013218831A - Conductive metal paste - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conductive metal paste capable of suppressing generation of dripping and bleeding even when the conductive metal paste is thickly coated on a substrate surface having fine irregularities.SOLUTION: A conductive metal paste of the present invention includes: a low polar solvent comprising hydrocarbon; a metal fine particle having a surface coated with a dispersant; and a polyimide varnish for bleeding prevention. The conductive metal paste includes silica having at least one of an OH group and an alkyl group, as a rheology control agent.

Description

  The present invention relates to a conductive metal paste, and particularly relates to a paste used for forming a metal wiring by a screen printing method.

  Conventionally, it is known to use a so-called screen printing method for forming a metal wiring or a conductive film in a manufacturing process of an electronic device. In the screen printing method, a screen plate is placed facing a substrate made of glass, silicon, or the like, and a conductive metal paste is applied to the substrate surface through an opening pattern formed in the screen plate. A conductive metal paste corresponding to the opening pattern is printed. Then, by firing the printed conductive metal paste, the dispersing agent that covers the surface of the metal fine particles of the conductive metal paste is detached, and the metal fine particles are sintered together to obtain a conductive metal wiring.

  By the way, in recent years, in order to improve the performance of electronic devices, further reduction in resistance of metal wiring is required. A method for further reducing the resistance of metal wiring is known, for example, from Patent Document 1. In this case, a conductive metal paste containing both metal fine particles and a metal filler as a metal solid content and further containing a varnish-like resin that prevents dripping and bleeding is used, and this conductive metal paste is applied to the substrate surface, for example, 1 μm. It is made to apply with the above thickness. When the conductive metal paste is applied with a thickness of 1 μm or more, depending on the substrate surface condition, for example, when there are fine irregularities such as steps or grooves of about several μm, dripping and bleeding are completely eliminated. Cannot be prevented. From this, it is conceivable to increase the amount of additive such as the varnish-like resin.

  Here, generally, when a polar solvent having a high viscosity is used and the amount of additive added is increased, the viscosity of the conductive metal paste increases, and the conductive metal paste cannot be uniformly applied to the substrate surface. On the other hand, if the metal solid content concentration is lowered, the viscosity of the conductive metal paste can be lowered, but the thickness of the metal wiring after firing is reduced. Therefore, in order to increase the additive amount while maintaining the metal solid content concentration high, it is effective to use a low polarity solvent having a viscosity lower than that of the polar solvent. However, many additives such as the varnish-like resin are usually polar, and it is difficult to sufficiently dissolve such polar additives in a low-polar solvent. For this reason, there is a problem that dripping and bleeding cannot be reliably suppressed when the conductive metal paste is thickly applied to the substrate surface having fine irregularities.

International Publication No. 2002/035554

  In view of the above points, the present invention has an object to provide a conductive metal paste that can reliably suppress the occurrence of sagging and bleeding even when the conductive metal paste is thickly applied to a substrate surface having fine irregularities. To do.

  In order to solve the above problems, the conductive metal paste of the present invention is a hydrophilic metal as a rheology control agent in a conductive metal paste comprising a low polarity solvent, metal fine particles coated with a dispersant on the surface, and a polyimide varnish. And silica having at least one of a group and a hydrophobic group.

  According to the present invention, a low polarity solvent having a lower viscosity than that of a polar solvent is used as a solvent. Therefore, even when the amount of added polyimide varnish is increased while maintaining a high concentration of metal fine particles as a metal solid, a conductive metal The paste can be applied uniformly. Here, since the polyimide varnish has polarity, it is difficult to sufficiently dissolve the polyimide varnish in the low polarity solvent.

  Therefore, the conductive metal paste of the present invention further contains silica having at least one of an OH group and an alkyl group as a rheology control agent. A part of the alkyl group of the silica forms an oxygen group and an alkoxy group of the silica, and easily reacts with moisture in the air to become an OH group. Silica molecules having an OH group form a network network by hydrogen bonding in a low polarity solvent. Thereby, thixotropic property is imparted to the conductive metal paste, and precipitation of the metal fine particles is prevented (high dispersion stability of the metal fine particles is obtained). A polar polyimide varnish enters between the silica molecules forming the network. If a network of silica molecules is formed in a low-polarity solvent, the polyimide varnish can be sufficiently dissolved. Therefore, even if a conductive metal paste is applied thickly on a substrate surface with fine irregularities, dripping or bleeding may occur. Generation | occurrence | production can be suppressed reliably. Further, combined with the effect that the concentration of the metal fine particles can be kept high as described above, a thick metal wiring can be formed, and the resistance of the metal wiring can be reduced.

  As the metal fine particles, those having an average particle diameter in the range of 1 nm to 50 nm can be used. When the average particle size is less than 1 nm, the specific surface area increases, and the amount of the dispersant covering the surface of the metal fine particles increases. The trouble that a value becomes high arises. On the other hand, when the average particle diameter exceeds 50 nm, there is a problem that the dispersibility of the metal fine particles in the conductive metal paste is lowered.

  In the present invention, if the polyimide varnish is imide ring-closed, the solubility of the polyimide varnish in the low polarity solvent may be further enhanced.

  In the present invention, it is preferable to further include polyamide. According to this, the polyamide crosslinks to the metal fine particles, and the thixotropic property can be further enhanced. Even when the conductive metal paste is applied at high speed, dripping and bleeding can be prevented.

  In addition, as a dispersing agent which coat | covers the metal fine particle surface, it is preferable to use at least any one among a C6-C18 fatty acid and a C6-C18 aliphatic amine of a fatty-acid part. In the case of fatty acids having less than 6 carbon atoms or aliphatic amines having less than 6 carbon atoms in the fatty acid portion, there is a problem that the dispersibility of the metal fine particles in the conductive metal paste is reduced. On the other hand, in fatty acids having 19 or more carbon atoms and aliphatic amines having 19 or more carbon atoms in the fatty acid portion, the elimination of fatty acids and aliphatic amines from the surface of the metal fine particles becomes insufficient during firing, and the resistance of the metal wiring after firing is reduced. There is a problem that it becomes high (conductivity decreases).

  In the present invention, as the low polarity solvent, at least one liquid hydrocarbon selected from octane, nonane, decane, undecane, dodecane, tridecane, tetradecane, toluene, xylene, cyclododecane, cyclododecene, octylbenzene, and dodecylbenzene is used alone. Or in combination.

  In the present invention, a metal filler having an average particle diameter of 1 to 20 μm may be further included. In this case, when the total of the metal filler and the metal fine particles is 100% by weight, the ratio of the metal filler is preferably in the range of 50 to 95% by weight. If the ratio of the metal filler is less than 50% by weight, it is difficult to increase the thickness of the metal wiring obtained by screen printing. Furthermore, even if the thickness of the metal wiring can be increased, firing is performed. Occasionally, the detachment of the dispersant from the surface of the metal fine particles becomes insufficient, resulting in a problem that the resistance of the metal wiring after firing becomes high. On the other hand, if the ratio of the metal filler exceeds 95% by weight, there is a problem that the sintering of the metal fillers through the metal fine particles becomes insufficient and the resistance of the metal wiring after firing becomes high.

  In the present invention, it is preferable to adsorb a silane coupling agent on the surface of the metal fine particles. As the silane coupling agent, aminoalkyltrialkoxysilane can be used. According to this, the adhesiveness between the metal wiring after baking and the substrate surface can be further improved.

  The metal used in the present invention is composed of at least one metal selected from Ag, Au, Cu, Ni, Pd, In, Sn, Rh, Ru, Pt, In, and Sn, or at least two of these metals. It is an alloy and can be appropriately selected depending on the purpose and application.

  Hereinafter, the conductive metal paste according to the embodiment of the present invention will be described using an Ag paste as an example. The Ag paste of this embodiment comprises a low polarity solvent, Ag fine particles coated with a dispersant on the surface, a polyimide varnish as an additive for preventing sagging and bleeding, and an OH group and an alkyl group as a rheology control agent. And silica having at least one of them.

  As the Ag fine particles, those having an average particle diameter in the range of 1 nm to 50 nm can be used. As a brand name of a commercial product, Ag1T (made by ULVAC, Inc.) can be mentioned, for example. When the average particle diameter is less than 1 nm, the specific surface area increases and the amount of the dispersant covering the surface of the Ag fine particles increases, so that the detachment of the dispersant becomes insufficient during firing, and the resistance value of the Ag wiring is high. The trouble that becomes. On the other hand, when the average particle diameter exceeds 50 nm, there arises a problem that the dispersibility of Ag fine particles in the Ag paste is lowered.

  As the dispersant for coating the Ag fine particle surface, it is preferable to use at least one of a fatty acid having 6 to 18 carbon atoms and an aliphatic amine having 6 to 18 carbon atoms in the fatty acid portion. In the case of fatty acids having less than 6 carbon atoms or aliphatic amines having less than 6 carbon atoms in the fatty acid portion, there is a problem that the dispersibility of Ag fine particles in the Ag paste is lowered. On the other hand, in fatty acids having 19 or more carbon atoms and aliphatic amines having 19 or more carbon atoms in the fatty acid portion, the elimination of fatty acids and aliphatic amines from the surface of Ag fine particles becomes insufficient during firing, and the resistance value of the Ag wiring film is high. The trouble that becomes.

  As the fatty acid, for example, carboxylic acid can be used. Specifically, C6 hexanoic acid, neohexanoic acid, 2-ethylbutyric acid; C7 heptanoic acid, 2-methylhexanoic acid, cyclohexanecarboxylic acid; C8 octanoic acid, neooctanoic acid; 9 nonanoic acids; 10 decanoic acids, neodecanoic acids; 11 carbon undecanoic acids; 12 carbons dodecanoic acids; 14 carbons tetradecanoic acids; 16 carbons palmitic acid; and 18 carbons stearic acid It is preferable to use at least one selected from oleic acid, linoleic acid, and linolenic acid.

  Examples of aliphatic amines include hexylamine, cyclohexylamine, and aniline having 6 carbon atoms; heptylamine having 7 carbon atoms; octylamine having 8 carbon atoms; 2-ethylhexylamine; nonylamine having 9 carbon atoms; decylamine having 10 carbon atoms; At least one selected from dodecylamine having 12 carbon atoms and tetradodecylamine having 14 carbon atoms can be preferably used.

  As the polyimide varnish, it is preferable to use a imide ring closed ring (for example, a ring closing rate of 40% or more). According to this, the solubility of the polyimide varnish with respect to a low polarity solvent can further be improved. Moreover, since the polyimide varnish is excellent in heat resistance, it does not deteriorate even if the applied Ag paste is baked at a temperature of 200 ° C. or higher, for example.

  As the silica, for example, at least one selected from hydrophilic silica having an OH group, hydrophobic silica having an alkyl group, and silica having both an OH group and an alkyl group can be used alone or in combination. A part of the alkyl group of silica forms an oxygen group and an alkoxy group of silica, and easily reacts with moisture in the air to form an OH group. Silica molecules having OH groups form a network network by hydrogen bonding as described later in a low polarity solvent, and impart thixotropic properties to the conductive metal paste.

  Moreover, it is preferable to adsorb | suck a silane coupling agent to the surface of Ag microparticles | fine-particles. As the silane coupling agent, for example, those having an amino group and an alkoxy group such as aminopropyltriethoxysilane such as aminopropyltrimethoxysilane can be used. According to this, when the applied Ag paste is baked, the alkoxy group is hydrolyzed to become an OH group, and the dehydration condensation of the OH group provides excellent adhesion to the substrate surface, while the amino group is a metal Bonds strongly with the surface. As a result, excellent adhesion can be obtained between the metal wiring after firing and the substrate surface. Furthermore, since the amino group is strongly bonded to the metal surface in this way, it is possible to effectively prevent dripping and bleeding of the Ag paste in combination with the action of the polyimide varnish.

  As the low polarity solvent, at least one liquid hydrocarbon selected from octane, nonane, decane, undecane, dodecane, tridecane, tetradecane, toluene, xylene, cyclododecane, cyclododecene, octylbenzene, and dodecylbenzene can be used.

  The Ag paste of the present embodiment can further include an Ag filler having an average particle diameter in the range of 1 μm to 20 μm. In this case, when the total of the Ag fine particles and the Ag filler is 100% by weight, the ratio of the Ag filler is preferably in the range of 50 to 95% by weight. If the Ag filler ratio is less than 50 wt% (the Ag fine particle ratio is 50 wt% or more), it may be difficult to increase the thickness of the Ag wiring obtained by screen printing to, for example, 10 μm or more. Further, even if the thickness of the Ag wiring can be increased, desorption of the dispersant from the surface of the Ag fine particles becomes insufficient during firing, and the resistance of the Ag wiring after firing may increase. On the other hand, when the ratio of Ag filler exceeds 95% by weight (when the ratio of Ag fine particles is 5% by weight or less), the sintering of Ag fillers through Ag fine particles becomes insufficient, and the resistance of Ag wiring after firing becomes low. The trouble of becoming high arises.

  Polyamide can further be included in the Ag paste of this embodiment. This polyamide crosslinks to the Ag fine particles to impart thixotropic properties to the Ag paste. Therefore, combined with the action of the silica, the thixotropic properties of the Ag paste can be enhanced. As the polyamide, for example, at least one kind of polyamide wax synthesized by a known method such as polycondensation of dibasic acid and diamine, polycondensation of dibasic acid derivative or dimer acid and diamine, ring-opening polymerization of lactam, etc. Can be used alone or in combination. As a brand name of a commercial product, DISPARLON 3900EF (made by Enomoto Kasei Co., Ltd.) can be mentioned, for example.

  As the metal, in addition to the above Ag, for example, at least one metal selected from Au, Cu, Ni, Pd, Rh, Ru, Pt, In and Sn, or an alloy composed of at least two of these metals is used. Depending on the purpose and application, it can be appropriately selected. Hereinafter, a method for producing a conductive metal paste will be described by taking an example of producing an Ag paste as an example.

  First, a dispersion liquid of Ag fine particles having an average particle diameter of 1 nm to 50 nm is placed in a glass container, and a solvent such as toluene is removed using an evaporator. As a result, Ag fine particles whose surface is coated with at least one of the fatty acid having 6 to 18 carbon atoms and the aliphatic amine having 6 to 18 carbon atoms in the fatty acid portion are obtained.

  In addition, when making a silane coupling agent adsorb | suck to Ag fine particle surface, a silane coupling agent is added and stirred to Ag fine particle with an average particle diameter of 1 nm-50 nm. Then, a polar solvent such as acetone is added to the agitated material to precipitate Ag fine particles, and the supernatant liquid is discharged by decantation or the like (hereinafter, this operation is referred to as “cleaning step”). This washing process is repeated a plurality of times, the solvent is removed, and Ag fine particles having the silane coupling agent adsorbed on the surface are obtained.

  Next, the Ag fine particles, silica having an OH group or alkyl group, polyimide varnish with imide ring closure, and a low polarity solvent made of hydrocarbon are blended at a predetermined ratio. In this case, the proportion of Ag fine particles is 60 to 90% by weight, the proportion of silica is 0.2 to 1% by weight, the proportion of polyimide varnish is 0.5 to 3% by weight, and the proportion of low polarity solvent is 5 to 30% by weight. It is preferable to be within the range. Then, an Ag paste is obtained by kneading the above blended material with a three-roll mill.

  In addition, you may mix | blend Ag filler with an average particle diameter of 1-20 micrometers with said Ag microparticles | fine-particles as Ag solid content. In this case, when the total of the Ag filler and the Ag fine particles is 100% by weight, the ratio of the Ag filler is preferably in the range of 50 to 95% by weight. Further, polyamide may be blended at a ratio of 0.3 to 4% by weight to further enhance the thixotropic property of the Ag paste.

  Since the Ag paste of the embodiment described above uses a low polarity solvent having a viscosity lower than that of the polar solvent as a solvent, the addition amount of the polyimide varnish while keeping the Ag solid content concentration (concentration of Ag fine particles and Ag filler) high. Even if it increases, the printability of Ag paste does not fall. Here, since the polyimide varnish has polarity, it is difficult to dissolve in a low-polarity solvent an amount of the polyimide varnish that can provide a sufficient bleeding prevention effect when thickly applied to a substrate surface having fine irregularities.

  Therefore, the Ag paste of this embodiment further contains silica having at least one of an OH group and an alkyl group as a rheology control agent. A part of the alkyl group of silica forms an alkoxy group with oxygen of silica, and easily reacts with moisture in the air to become an OH group. Silica molecules having an OH group form a network network by hydrogen bonding in a low polarity solvent. As a result, thixotropic properties are imparted to the Ag paste, and settling of Ag fine particles is prevented (the dispersion stability of Ag fine particles is high). Since the polyimide varnish has polarity, it does not exist in a low-polarity solvent in isolation, but enters between silica molecules forming a network network. If a sufficient amount of silica molecule network is formed in the low polarity solvent (if the space between the silica molecules is secured), the amount of the polyimide varnish added to the low polarity solvent can be increased. Even if the conductive metal paste is applied thickly on the uneven substrate surface, the occurrence of dripping or bleeding can be suppressed. Combined with the effect of increasing the amount of addition of the polyimide varnish while keeping the Ag solid content concentration high, the thickness of the Ag wiring after firing can be increased, and the Ag wiring having a narrow wiring width can be reduced. Resistance can be realized.

Examples of the present invention will be described below.
Example 1
10 g of aminoalkyltrialkoxysilane was added to 100 g of Ag fine particles having an average particle diameter of 4 nm (trade name “Ag nanometal ink” manufactured by ULVAC, Inc.), and the mixture was stirred at 25 ° C. for 12 hours. To this, 500 g of acetone is added to precipitate the Ag fine particles, and the “washing step” in which the supernatant is discharged by decantation or the like is repeated a plurality of times to obtain Ag fine particles with aminoalkyltrialkoxysilane adsorbed on the surface (hereinafter “Ag fine particles 1”). I got). 10 parts by weight of Ag fine particles 1, 90 parts by weight of Ag filler having an average particle diameter of 3 μm (trade name “Silcoat” manufactured by Fukuda Metal Foil Powder Industries), and hydrophobic silica having an alkyl group (trade name “AEROSIL” manufactured by Nippon Aerosil) R972 ") was mixed with 0.4 parts by weight, imide ring-closed polyimide varnish (trade name" COMPOCERAN H802 "manufactured by Arakawa Chemical Co., Ltd.) 2.66 parts by weight, and dodecylbenzene 17 parts by weight. And what was mix | blended was knead | mixed with a 3 roll mill, and Ag paste was obtained. The obtained Ag paste was applied onto a glass substrate surface having fine irregularities (having steps and grooves of about several μm) with a line width of 100 μm by screen printing, printed, and baked at 230 ° C. for 30 minutes. No sagging or bleeding was observed in the printed Ag paste. As a result of performing a grid eye tape peeling test on the fired Ag wiring, it was confirmed that no peeling of the Ag wiring was seen and excellent adhesion to the glass substrate was obtained. The thickness of the Ag wiring after firing was 24.6 μm, the line width was 124 μm, and the specific resistance was 7.9 μΩ · cm. According to this, it was confirmed that the resistance of the Ag wiring can be reduced.

(Example 2)
10 parts by weight of the Ag fine particles 1 obtained in Example 1 above, 90 parts by weight of Ag filler having an average particle diameter of 3 μm (trade name “Silcoat” manufactured by Fukuda Metal Foil Powder Industry), and hydrophobic silica having at least an alkyl group ( 0.4 parts by weight of Nippon Aerosil brand name “AEROSIL R976”), 2.66 parts by weight of polyimide varnish with imide ring closure (trade name “Composeran H802” by Arakawa Chemical) and 17 parts by weight of dodecylbenzene did. Then, in the same manner as in Example 1 above, the blended material was kneaded by a three-roll mill to obtain an Ag paste, and this Ag paste was applied to a glass substrate surface having fine irregularities by a screen printing method with a line width of 100 μm. Printed and baked at 230 ° C. for 30 minutes. No sagging or bleeding was observed in the printed Ag paste. After firing, the Ag wiring has excellent adhesion to the glass substrate, with a film thickness of 23.2 μm, line width of 128 μm, and specific resistance of 7.9 μΩ · cm, realizing low resistance of the Ag wiring. It was confirmed that it was possible.

(Example 3)
10 parts by weight of the Ag fine particles 1 obtained in Example 1 above, 90 parts by weight of an Ag filler (trade name “Silcoat” manufactured by Fukuda Metal Foil Powder Industry) having an average particle diameter of 3 μm, and hydrophilic silica having at least OH groups ( 0.4 parts by weight of Nippon Aerosil brand name “AEROSIL 200”, 2.66 parts by weight of polyimide varnish with imide ring closure (composeran H802 manufactured by Arakawa Chemical) and 17 parts by weight of dodecylbenzene were blended. Then, in the same manner as in Example 1 above, the blended material was kneaded by a three-roll mill to obtain an Ag paste, and this Ag paste was applied to a glass substrate surface having fine irregularities by a screen printing method with a line width of 100 μm. Printed and baked at 230 ° C. for 30 minutes. No sagging or bleeding was observed in the printed Ag paste. The Ag wiring after firing has excellent adhesion to the glass substrate, the film thickness is 21.0μm, the line width is 130μm, and the specific resistance is 8.3μΩ · cm, which realizes low resistance of Ag wiring. It was confirmed that it was possible.

Example 4
10 parts by weight of Ag fine particles 1 obtained in Example 1 above, 90 parts by weight of Ag filler (trade name “Silcoat” manufactured by Fukuda Metal Foil Powder Industry) with an average particle diameter of 3 μm, and hydrophobic silica having an alkyl group (Japan) 0.4 part by weight of Aerosil product name “AEROSIL R976”, 0.4 part by weight of hydrophilic silica having an OH group (trade name “AEROSIL 200” made by Nippon Aerosil), imide ring-closed polyimide varnish (Arakawa) 2.66 parts by weight of chemical trade name “COMPOCELAN H802”) and 17 parts by weight of dodecylbenzene were blended. Then, in the same manner as in Example 1 above, the blended material was kneaded by a three-roll mill to obtain an Ag paste, and this Ag paste was applied to a glass substrate surface having fine irregularities by a screen printing method with a line width of 100 μm. Printed and baked at 230 ° C. for 30 minutes. No sagging or bleeding was observed in the printed Ag paste. The fired Ag wiring has excellent adhesion to the glass substrate, the film thickness is 20.0 μm, the line width is 129 μm, the specific resistance is 13.3 μΩ · cm, and the Ag wiring with a narrow wiring width is low. It was confirmed that resistance can be realized.

Next, a comparative example for the above embodiment will be described.
(Comparative Example 1)
Repeated “cleaning step” multiple times, adding 500 g of acetone to 100 g of Ag fine particles with an average particle size of 4 nm (trade name “Ag Nanometal Ink” manufactured by ULVAC) to precipitate the Ag fine particles and draining the supernatant liquid by decantation or the like. , Ag fine particles (hereinafter referred to as “Ag fine particles 2”) were obtained. 10 parts by weight of Ag fine particles 2, 90 parts by weight of an Ag filler having an average particle diameter of 3 μm (trade name “Silcoat” manufactured by Fukuda Metal Foil Powder Industry), and 19 parts by weight of dodecylbenzene were blended. And what was mix | blended was knead | mixed with a 3 roll mill, and Ag paste was obtained. The obtained Ag paste was applied onto a glass substrate surface having fine irregularities by screen printing with a line width of 100 μm, printed, and baked at 230 ° C. for 30 minutes. Unlike the above examples, the printed Ag paste had noticeably dripping and bleeding. When the Ag tape after firing was subjected to a grid tape peeling test on the grid, the entire surface of the Ag wiring was peeled off. The film thickness of the Ag wiring after firing was 11 μm, the line width was 180 μm, and the specific resistance was 23 μΩ · cm. According to this, it has been found that the specific resistance of the Ag wiring is significantly increased as compared with the above-described embodiment, so that the low resistance cannot be realized.

Claims (7)

A conductive metal paste comprising a low polarity solvent, metal fine particles coated with a dispersant on the surface, and a polyimide varnish,
A conductive metal paste comprising silica having at least one of an OH group and an alkyl group as a rheology control agent.   The conductive metal paste according to claim 1, wherein the polyimide varnish is imide ring-closed.   The conductive metal paste according to claim 1, further comprising polyamide.   The low-polarity solvent is composed of at least one liquid hydrocarbon selected from octane, nonane, decane, undecane, dodecane, tridecane, tetradecane, toluene, xylene, cyclododecane, cyclododecene, octylbenzene, and dodecylbenzene. The conductive metal paste according to any one of claims 1 to 3.   The conductive metal paste according to claim 1, further comprising a metal filler having an average particle diameter of 1 to 20 μm.   The conductive metal paste according to claim 5, wherein the metal filler is in the range of 50 to 95% by weight when the total of the metal filler and the metal fine particles is 100% by weight. The conductive metal paste according to any one of claims 1 to 6, wherein a silane coupling agent is adsorbed on the surface of the metal fine particles.