JP2013210405A - Photosensitive resin composition - Google Patents
Photosensitive resin composition Download PDFInfo
- Publication number
- JP2013210405A JP2013210405A JP2012078500A JP2012078500A JP2013210405A JP 2013210405 A JP2013210405 A JP 2013210405A JP 2012078500 A JP2012078500 A JP 2012078500A JP 2012078500 A JP2012078500 A JP 2012078500A JP 2013210405 A JP2013210405 A JP 2013210405A
- Authority
- JP
- Japan
- Prior art keywords
- group
- photosensitive resin
- bis
- compound
- hydroxyphenyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 65
- 229920005989 resin Polymers 0.000 claims abstract description 137
- 239000011347 resin Substances 0.000 claims abstract description 137
- 150000001875 compounds Chemical class 0.000 claims abstract description 105
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 75
- -1 isocyanate compound Chemical class 0.000 claims abstract description 75
- 125000003700 epoxy group Chemical group 0.000 claims abstract description 56
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 55
- 150000008065 acid anhydrides Chemical class 0.000 claims abstract description 40
- 239000004593 Epoxy Substances 0.000 claims abstract description 32
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims abstract description 25
- 125000003566 oxetanyl group Chemical group 0.000 claims abstract description 24
- 150000007519 polyprotic acids Polymers 0.000 claims abstract description 23
- 125000004018 acid anhydride group Chemical group 0.000 claims abstract description 21
- KFJDQPJLANOOOB-UHFFFAOYSA-N 2h-benzotriazole-4-carboxylic acid Chemical class OC(=O)C1=CC=CC2=NNN=C12 KFJDQPJLANOOOB-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 18
- 239000012948 isocyanate Substances 0.000 claims abstract description 12
- 239000003999 initiator Substances 0.000 claims abstract description 7
- 229910000679 solder Inorganic materials 0.000 claims description 40
- 239000007787 solid Substances 0.000 claims description 27
- 239000002253 acid Substances 0.000 claims description 25
- 239000003063 flame retardant Substances 0.000 claims description 22
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 claims description 15
- 150000001565 benzotriazoles Chemical class 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 3
- 238000005476 soldering Methods 0.000 claims description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 abstract description 9
- 230000036211 photosensitivity Effects 0.000 abstract description 9
- 230000015572 biosynthetic process Effects 0.000 abstract description 8
- 239000010408 film Substances 0.000 description 95
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 50
- 239000011248 coating agent Substances 0.000 description 42
- 238000000576 coating method Methods 0.000 description 42
- 229910052757 nitrogen Inorganic materials 0.000 description 37
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical group C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 36
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 34
- 238000006243 chemical reaction Methods 0.000 description 34
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 28
- 239000002904 solvent Substances 0.000 description 28
- 239000003822 epoxy resin Substances 0.000 description 26
- 229920000647 polyepoxide Polymers 0.000 description 26
- 238000001723 curing Methods 0.000 description 21
- 238000003756 stirring Methods 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 19
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 18
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 18
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 17
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 17
- 239000000976 ink Substances 0.000 description 17
- 238000006116 polymerization reaction Methods 0.000 description 17
- 239000000126 substance Substances 0.000 description 17
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 16
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 16
- 239000010949 copper Substances 0.000 description 16
- 229930185605 Bisphenol Natural products 0.000 description 15
- 238000005259 measurement Methods 0.000 description 15
- 239000000758 substrate Substances 0.000 description 15
- 229920001187 thermosetting polymer Polymers 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 14
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 13
- 238000011156 evaluation Methods 0.000 description 13
- 238000009413 insulation Methods 0.000 description 13
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 13
- 229910052753 mercury Inorganic materials 0.000 description 13
- 239000000047 product Substances 0.000 description 13
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 12
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 12
- AOBIOSPNXBMOAT-UHFFFAOYSA-N 2-[2-(oxiran-2-ylmethoxy)ethoxymethyl]oxirane Chemical compound C1OC1COCCOCC1CO1 AOBIOSPNXBMOAT-UHFFFAOYSA-N 0.000 description 12
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 12
- 229910052802 copper Inorganic materials 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 239000000243 solution Substances 0.000 description 12
- 229940014800 succinic anhydride Drugs 0.000 description 12
- 238000011161 development Methods 0.000 description 11
- 238000009826 distribution Methods 0.000 description 11
- 229920000139 polyethylene terephthalate Polymers 0.000 description 11
- 239000005020 polyethylene terephthalate Substances 0.000 description 11
- 229920002799 BoPET Polymers 0.000 description 10
- 239000005041 Mylar™ Substances 0.000 description 10
- 239000003112 inhibitor Substances 0.000 description 10
- 239000010410 layer Substances 0.000 description 10
- 239000000203 mixture Substances 0.000 description 10
- 229920001721 polyimide Polymers 0.000 description 10
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 238000004132 cross linking Methods 0.000 description 9
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 9
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 8
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 8
- 239000004020 conductor Substances 0.000 description 8
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 8
- 238000002845 discoloration Methods 0.000 description 8
- 238000001035 drying Methods 0.000 description 8
- 238000003847 radiation curing Methods 0.000 description 8
- 238000010992 reflux Methods 0.000 description 8
- 125000004203 4-hydroxyphenyl group Chemical group [H]OC1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 7
- 239000002202 Polyethylene glycol Substances 0.000 description 7
- 239000004793 Polystyrene Substances 0.000 description 7
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 7
- 238000013461 design Methods 0.000 description 7
- 238000003475 lamination Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 229920001223 polyethylene glycol Polymers 0.000 description 7
- 229920002223 polystyrene Polymers 0.000 description 7
- 238000003786 synthesis reaction Methods 0.000 description 7
- 229960000834 vinyl ether Drugs 0.000 description 7
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 6
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000009835 boiling Methods 0.000 description 6
- 125000005442 diisocyanate group Chemical group 0.000 description 6
- KZTYYGOKRVBIMI-UHFFFAOYSA-N diphenyl sulfone Chemical compound C=1C=CC=CC=1S(=O)(=O)C1=CC=CC=C1 KZTYYGOKRVBIMI-UHFFFAOYSA-N 0.000 description 6
- 238000013007 heat curing Methods 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 239000000178 monomer Substances 0.000 description 6
- 230000000704 physical effect Effects 0.000 description 6
- 239000011241 protective layer Substances 0.000 description 6
- 238000005070 sampling Methods 0.000 description 6
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 6
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 5
- GUOVBFFLXKJFEE-UHFFFAOYSA-N 2h-benzotriazole-5-carboxylic acid Chemical compound C1=C(C(=O)O)C=CC2=NNN=C21 GUOVBFFLXKJFEE-UHFFFAOYSA-N 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 5
- 229920000877 Melamine resin Polymers 0.000 description 5
- 229920000388 Polyphosphate Polymers 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 239000003054 catalyst Substances 0.000 description 5
- 229920006026 co-polymeric resin Polymers 0.000 description 5
- 229930003836 cresol Natural products 0.000 description 5
- 238000005227 gel permeation chromatography Methods 0.000 description 5
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 5
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 5
- 229920003986 novolac Polymers 0.000 description 5
- 239000005056 polyisocyanate Substances 0.000 description 5
- 229920001228 polyisocyanate Polymers 0.000 description 5
- 239000001205 polyphosphate Substances 0.000 description 5
- 235000011176 polyphosphates Nutrition 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 5
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 4
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- 239000005058 Isophorone diisocyanate Substances 0.000 description 4
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 4
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 150000008064 anhydrides Chemical class 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- CZZYITDELCSZES-UHFFFAOYSA-N diphenylmethane Chemical compound C=1C=CC=CC=1CC1=CC=CC=C1 CZZYITDELCSZES-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010292 electrical insulation Methods 0.000 description 4
- JBKVHLHDHHXQEQ-UHFFFAOYSA-N epsilon-caprolactam Chemical compound O=C1CCCCCN1 JBKVHLHDHHXQEQ-UHFFFAOYSA-N 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 4
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 230000008961 swelling Effects 0.000 description 4
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 4
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 3
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 3
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 3
- 239000004114 Ammonium polyphosphate Substances 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 3
- 125000001931 aliphatic group Chemical group 0.000 description 3
- 235000019826 ammonium polyphosphate Nutrition 0.000 description 3
- 229920001276 ammonium polyphosphate Polymers 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 150000001244 carboxylic acid anhydrides Chemical group 0.000 description 3
- 239000012787 coverlay film Substances 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 238000005886 esterification reaction Methods 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- NWVVVBRKAWDGAB-UHFFFAOYSA-N hydroquinone methyl ether Natural products COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 150000002513 isocyanates Chemical class 0.000 description 3
- 239000004843 novolac epoxy resin Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 229920001451 polypropylene glycol Polymers 0.000 description 3
- 238000011417 postcuring Methods 0.000 description 3
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 125000001302 tertiary amino group Chemical group 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- DEQUKPCANKRTPZ-UHFFFAOYSA-N (2,3-dihydroxyphenyl)-phenylmethanone Chemical compound OC1=CC=CC(C(=O)C=2C=CC=CC=2)=C1O DEQUKPCANKRTPZ-UHFFFAOYSA-N 0.000 description 2
- FKTHNVSLHLHISI-UHFFFAOYSA-N 1,2-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC=C1CN=C=O FKTHNVSLHLHISI-UHFFFAOYSA-N 0.000 description 2
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 2
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Landscapes
- Materials For Photolithography (AREA)
- Epoxy Resins (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Abstract
Description
本発明は、プリント配線板用等に有用な感光性樹脂を含む感光性樹脂組成物及びその硬化物と、前記感光性樹脂の製造方法に関する。更に詳細には、フレキシブルプリント配線板用ソルダーレジスト、多層プリント配線板用層間電気絶縁材料として有用な、現像性に優れ、その硬化皮膜が、密着性、可撓性(屈曲性)、半田耐熱性、電気絶縁性等に優れた硬化物を与える、特定の感光性樹脂を含む感光性樹脂組成物及びその硬化物と、前記感光性樹脂の製造方法に関する。 The present invention relates to a photosensitive resin composition containing a photosensitive resin useful for printed wiring boards and the like, a cured product thereof, and a method for producing the photosensitive resin. More specifically, it is useful as a solder resist for flexible printed wiring boards and an interlayer electrical insulating material for multilayer printed wiring boards, and has excellent developability, and its cured film has adhesiveness, flexibility (flexibility), and solder heat resistance. The present invention relates to a photosensitive resin composition containing a specific photosensitive resin that gives a cured product excellent in electrical insulation and the like, a cured product thereof, and a method for producing the photosensitive resin.
基板上に形成された配線(回路)パターンを外部環境から保護したり、電子部品をプリント配線板に表面実装したりする際に行われる半田付け工程において、不必要な部分に半田が付着しないように保護するために、カバーレイもしくはソルダーマスクと呼ばれる保護層をプリント配線板上に被覆することが行われている。これまでは、硬質プリント配線板が主流であったため、硬化後のレジスト塗膜には、パターン精度の外、基板との密着性や耐熱性が主に要求されていた。ところが近年は、フレキシブルプリント配線板の利用が大幅に増え、ポリイミドフィルム上に形成された配線パターンに用いられる保護層には、ポリイミドとの密着性、可撓性、耐折性、難燃性等が求められている。 In the soldering process that is performed when protecting the wiring (circuit) pattern formed on the board from the external environment or when mounting electronic components on the printed wiring board, solder does not adhere to unnecessary parts. In order to protect the printed wiring board, a protective layer called a coverlay or a solder mask is coated on the printed wiring board. Until now, since hard printed wiring boards have been the mainstream, the resist coating after curing mainly requires adhesion to the substrate and heat resistance in addition to pattern accuracy. However, in recent years, the use of flexible printed wiring boards has greatly increased, and the protective layer used for the wiring pattern formed on the polyimide film has adhesiveness with polyimide, flexibility, folding resistance, flame resistance, etc. Is required.
従来、フレキシブルプリント配線板用保護層としては、カバーレイフィルムと呼ばれるポリイミドフィルムをパターンに合わせた金型をつくり打ち抜いた後、接着剤を用いて貼り付けるタイプや、スクリーン印刷により塗付する熱硬化型のインキなどがあるが、近年のエレクトロニクスの進歩に伴う高密度・高精細化のため、より高精度でパターニングが可能な紫外線硬化型フォトレジストタイプのソルダーレジストインキ、又はドライフィルム型ソルダーレジストが検討されている。 Conventionally, as a protective layer for flexible printed wiring boards, a polyimide film called a coverlay film is made by punching a mold that matches the pattern and then pasted using an adhesive, or by thermosetting applied by screen printing There are various types of inks, but for high density and high definition accompanying recent advances in electronics, UV curable photoresist type solder resist ink or dry film type solder resist that can be patterned with higher precision is available. It is being considered.
一般的に、フレキシブルプリント配線板用フォトソルダーレジストにおいて、従来、リジッド基板用に使用されてきたフォトソルダーレジストでは、パターン精度は得られるものの、硬化後の塗膜が硬く、ポリイミドとの密着性が悪く、充分な可撓性、屈曲性、耐折性が得られないという問題があった。 In general, in the photo solder resist for flexible printed wiring boards, the photo solder resist conventionally used for rigid substrates can provide pattern accuracy, but the cured coating film is hard and has good adhesion to polyimide. Unfortunately, there was a problem that sufficient flexibility, flexibility and folding resistance could not be obtained.
前記のような事情から、近年、可撓性を有するフォトソルダーレジストとして数多くの提案がなされている。例えば、主鎖にビスフェノールA骨格を有するエポキシ樹脂と不飽和基含有モノカルボン酸との付加生成物に、無水コハク酸を反応させた樹脂を含むレジストインキ組成物が開示されている(特許文献1)。これは、現像性、光感度、密着性、耐熱性等に優れるものの、可撓性・耐折性についてはまだまだ不充分であるという問題があった。又、感光性熱硬化性組成物として、クレゾールノボラック型エポキシ化合物と不飽和モノカルボン酸とのエステル化反応によって生成する2級水酸基と、飽和又は不飽和多塩基酸無水物との反応生成物、同2級水酸基と、不飽和基含有イソシアネート化合物との反応生成物などが提案されている(特許文献2)。これらは、密着性、半田耐熱性、塗膜耐性には非常に優れるものの、可撓性・耐折性については、やはり不充分であるという問題があった。 In recent years, many proposals have been made as flexible photo solder resists. For example, a resist ink composition is disclosed that includes a resin obtained by reacting succinic anhydride with an addition product of an epoxy resin having a bisphenol A skeleton in the main chain and an unsaturated group-containing monocarboxylic acid (Patent Document 1). ). Although this is excellent in developability, photosensitivity, adhesion, heat resistance, etc., there is a problem that flexibility and folding resistance are still insufficient. In addition, as a photosensitive thermosetting composition, a reaction product of a secondary hydroxyl group generated by an esterification reaction of a cresol novolak type epoxy compound and an unsaturated monocarboxylic acid, and a saturated or unsaturated polybasic acid anhydride, A reaction product of the secondary hydroxyl group and an unsaturated group-containing isocyanate compound has been proposed (Patent Document 2). Although these are very excellent in adhesion, solder heat resistance, and coating film resistance, there is a problem that flexibility and folding resistance are still insufficient.
又、(メタ)アクリル酸及び(メタ)アクリル酸エステルを含むモノマーを共重合させて得られるポリマーをバインダー成分として含有させた感光性エレメントが提案されている(特許文献3)。これらは、現像性、解像性に優れているが、フレキシブルプリント配線板用途で使用する場合は、充分な密着性・可撓性・耐折性が得られない。 There has also been proposed a photosensitive element containing a polymer obtained by copolymerizing a monomer containing (meth) acrylic acid and (meth) acrylic acid ester as a binder component (Patent Document 3). These are excellent in developability and resolution, but when used in flexible printed wiring board applications, sufficient adhesion, flexibility and folding resistance cannot be obtained.
又、ポリオール化合物と、分子中に2個の酸無水物基を有する多塩基酸無水物と、ポリイソシアネート化合物とを反応させた重合物に、更に分子中に1個のエポキシ基を有する(メタ)アクリレートを反応させて得られる、カルボキシル基含有ウレタンオリゴマーを含有する感光性樹脂組成物が提案されている(特許文献4)。これらは、充分な可撓性が得られるものの、主鎖中に二塩基酸無水物によるハーフエステル化由来のエステル結合を有するため、高温では脱水反応がおこり主鎖が切断されやすいなど、化学的に不安定な構造であり、又、カルボキシル基が主鎖に直結しているため、カルボキシル基の運動性が抑制されているといった理由から、現像性や種々の塗膜耐性、及び半田耐熱性において、充分なものではなかった。 In addition, a polymer obtained by reacting a polyol compound, a polybasic acid anhydride having two acid anhydride groups in the molecule, and a polyisocyanate compound further has one epoxy group in the molecule (meta ) A photosensitive resin composition containing a carboxyl group-containing urethane oligomer obtained by reacting an acrylate has been proposed (Patent Document 4). Although these have sufficient flexibility, they have an ester bond derived from half-esterification with a dibasic acid anhydride in the main chain, so that dehydration occurs at high temperatures and the main chain is easily cleaved. In addition, because the carboxyl group is directly linked to the main chain, the mobility of the carboxyl group is suppressed, so that the developability, various coating film resistance, and solder heat resistance It was not enough.
又、リン系難燃剤を添加した感光性樹脂組成物が開示されている(特許文献5)。これらは、環境への負荷を低減するため、ノンハロゲンの難燃剤を使用することで、難燃化を行っている。しかし、ノンハロゲンの難燃剤で充分な難燃性を付与するためには、多量の難燃剤を添加する必要があり、それが原因で、近年求められている数十μmオーダーでの現像性や種々の塗膜耐性、及び半田耐熱性において、充分なものではなかった。するなど、レジストに要求される難燃性以外の物性を低下させてしまうため、難燃性とそれ以外の物性を両立させるためには充分なものではなかった。 Moreover, the photosensitive resin composition which added the phosphorus type flame retardant is disclosed (patent document 5). In order to reduce the burden on the environment, these are made flame retardant by using a non-halogen flame retardant. However, in order to impart sufficient flame retardancy with a non-halogen flame retardant, it is necessary to add a large amount of flame retardant. In terms of coating film resistance and solder heat resistance, it was not sufficient. In other words, physical properties other than the flame retardancy required for the resist are deteriorated, so that it is not sufficient to achieve both the flame retardancy and other physical properties.
又、本発明の感光性樹脂と同様に、主鎖がエポキシ化合物とフェノール化合物から合成される樹脂についても開示されている。例えば、ビスフェノール型エポキシ化合物とビスフェノール化合物から合成されるポリヒドロキシエーテル樹脂中の水酸基に対してアルキレンオキシドを付加させた後、酸無水物と分子中に1個のエポキシ基を有する(メタ)アクリレートを反応させて得られるカルボキシル基含有不飽和ポリヒドロキシエーテル化合物が開示されている(特許文献6)。これは、アルキレンオキシドを付加させたことにより、アルカリ水溶液による良好な現像性と解像性を発現し、可撓性、屈曲性についても優れるものの、半田耐熱性、耐薬品性を低下させる傾向があった。 Further, as with the photosensitive resin of the present invention, a resin whose main chain is synthesized from an epoxy compound and a phenol compound is also disclosed. For example, after adding an alkylene oxide to a hydroxyl group in a polyhydroxy ether resin synthesized from a bisphenol type epoxy compound and a bisphenol compound, an acid anhydride and a (meth) acrylate having one epoxy group in the molecule are added. A carboxyl group-containing unsaturated polyhydroxy ether compound obtained by reaction is disclosed (Patent Document 6). This is due to the addition of alkylene oxide, which develops good developability and resolution with an alkaline aqueous solution and has excellent flexibility and flexibility, but tends to decrease solder heat resistance and chemical resistance. there were.
又、ビスフェノール型エポキシ化合物とビスフェノール化合物と不飽和カルボン酸または分子中に1個のエポキシ基を有する(メタ)アクリレートとから合成されるビニルエステルを、多塩基酸無水物で酸変性した酸変性ビニルエステルが開示されている。(特許文献7)。これは、主鎖末端に二重結合が導入されるため二重結合間距離が大きくなり、硬化塗膜の可撓性・耐折性について優れるものの、アルカリ現像液に対する溶解性に乏しく、現像性、解像性についてはまだまだ不充分であるという問題があった。同様な例として、フェノール化合物、エポキシ化合物、不飽和カルボン酸、多塩基酸無水物から合成される酸変性ビニルエステルも報告されている(特許文献8)。これも二重結合間距離が大きいため、硬化塗膜に可撓性を付与でき、屈曲性や耐冷熱サイクルクラック性に優れるものの、タックフリー性、現像性、解像性といった、相反する特性をバランス良く満足することができていなかった。 In addition, acid-modified vinyl obtained by acid-modifying vinyl ester synthesized from bisphenol-type epoxy compound, bisphenol compound and unsaturated carboxylic acid or (meth) acrylate having one epoxy group in the molecule with polybasic acid anhydride Esters are disclosed. (Patent Document 7). This is because the double bond is introduced at the end of the main chain, so the distance between the double bonds is large, and the flexibility and folding resistance of the cured coating film are excellent, but the solubility in an alkaline developer is poor and the developability is high. There was a problem that the resolution was still insufficient. As a similar example, an acid-modified vinyl ester synthesized from a phenol compound, an epoxy compound, an unsaturated carboxylic acid, and a polybasic acid anhydride has also been reported (Patent Document 8). This also has a large distance between double bonds, so it can give flexibility to the cured coating film and has excellent flexibility and cold cycle crack resistance, but has conflicting properties such as tack-free properties, developability, and resolution. I was not satisfied with the balance.
フェノール性水酸基を有する化合物と分子中に1個のエポキシ基を有する(メタ)アクリレートと酸無水物とを反応させて得られる光重合性不飽和化合物と多官能ジヒドロキシベンゾオキサジンを含有することを特徴とした感光性樹脂組成物が開示されている(特許文献9)。これは、主鎖がフェノール性水酸基を有する化合物からなること、硬化塗膜にベンゾオキサジン骨格を有することから、確かに耐熱性には優れているものの、硬化時の収縮が大きく、伸びが少なく強靭性に欠けるため、熱衝撃によるクラックが発生しやすいという欠点があった。 It contains a photopolymerizable unsaturated compound obtained by reacting a compound having a phenolic hydroxyl group, a (meth) acrylate having one epoxy group in the molecule and an acid anhydride, and a polyfunctional dihydroxybenzoxazine. A photosensitive resin composition is disclosed (Patent Document 9). This is because the main chain is composed of a compound having a phenolic hydroxyl group, and the cured coating film has a benzoxazine skeleton. Due to the lack of properties, cracks due to thermal shock are likely to occur.
アクリル酸ブチルを共重合成分として含有するバインダーポリマーを含む感光性樹脂組成物にカルボキシベンゾトリアゾール誘導体を含む感光性レジストの例はあるが、カルボキシベンゾトリアゾールは既に感光性レジストの分野では既に公知であり、本発明のように耐熱性と現像性に関して記述はあるものの、耐折性の向上に言及しているものはない(特許文献10、11)。 There is an example of a photosensitive resist containing a carboxybenzotriazole derivative in a photosensitive resin composition containing a binder polymer containing butyl acrylate as a copolymerization component. However, carboxybenzotriazole is already known in the field of photosensitive resist. Although there is a description regarding heat resistance and developability as in the present invention, there is no mention of improvement in folding resistance (Patent Documents 10 and 11).
このように、従来の技術ではフレキシブルプリント配線板用保護層として要求される充分な可撓性・耐折性と、高精度なパターニングを実現できる現像性や半田耐熱性とを両立し、かつ、回路の保護層として必要な電気絶縁性、耐薬品性、難燃性等の諸物性すべてを満足し得る樹脂組成物およびその硬化物は得られていなかった。 As described above, the conventional technology has both sufficient flexibility and folding resistance required as a protective layer for a flexible printed wiring board and developability and solder heat resistance capable of realizing high-precision patterning, and A resin composition that can satisfy all physical properties such as electrical insulation, chemical resistance, and flame retardancy necessary as a protective layer for a circuit and a cured product thereof have not been obtained.
プリント配線板には、携帯機器としての小型軽量化や通信速度の向上を目指して、高精度、高密度化が求められており、主に機器の屈曲部や接続部周辺に用いられるフレキシブルプリント配線板についても、その傾向は同じである。こういった背景から、フレキシブルプリント配線板用保護層に求められる要求も益々高度となってきており、レジストパターンの高精細化を実現しうる現像性と、従来の要求よりも、より高い可撓性・耐折性を保ちながら、半田耐熱性、基板密着性、高絶縁性、塗膜耐性、難燃性等を満足する性能が要求されている。現在市販されているフォトソルダーレジストでは、これらの要求に充分に対応できていない。
本発明は、活性エネルギー線に対する感光性を損なうことなく、希アルカリ水溶液による現像性が向上し、より微細なパターンが形成できるとともに、後硬化(ポストキュア)工程を経て得られる硬化塗膜がフレキシブル性、絶縁性、密着性、半田耐熱性、塗膜耐性等に優れたフォトソルダーレジストに好適に使用される感光性樹脂組成物及びその硬化物更には感光性樹脂の製造方法を提供することを目的とする。 The present invention improves the developability with a dilute alkaline aqueous solution without impairing the photosensitivity to active energy rays, can form a finer pattern, and the cured coating obtained through a post-curing (post-cure) step is flexible. Providing a photosensitive resin composition suitably used for a photo solder resist having excellent properties, insulating properties, adhesion, solder heat resistance, coating film resistance, and the like, and a cured product thereof, as well as a method for producing a photosensitive resin. Objective.
本発明者らは前記の課題を解決するため、鋭意検討の結果、特定のる感光性樹脂組成物が前記課題を解決するものであることを見出し、本発明を完成させるに至った。
第一の発明は感光性樹脂(A)と、エポキシ基含有化合物、非ブロック化イソシアネート化合物、ブロック化イソシアネート化合物から選ばれる少なくとも一種である硬化剤(B)と、光重合開始剤(C)と、カルボキシベンゾトリアゾール誘導体(D)とを含む感光性樹脂組成物であって、
感光性樹脂(A)が、
1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物(a)と1分子中に少なくとも2個のフェノール性水酸基を有するフェノール化合物(b)とを反応させて側鎖ヒドロキシル基含有樹脂(c)を生成し、
前記側鎖ヒドロキシル基含有樹脂(c)と多塩基酸無水物(d)とを反応させてカルボキシル基含有樹脂(e)を生成し、
前記カルボキシル基含有樹脂(e)と、エポキシ基またはオキセタン基とエチレン性不飽和基とを有する化合物(f)中のエポキシ基又はオキセタン基とを反応させてなる、ヒドロキシル基含有感光性樹脂(A−1)であるか、
前記ヒドロキシル基含有樹脂(A−1)中のヒドロキシル基と、多塩基酸無水物(d)中の酸無水物基とを反応させてなるカルボキシル基含有感光性樹脂(A−2)である、
ことを特徴とする感光性樹脂組成物に関する。
第二の発明はカルボキシベンゾトリアゾール誘導体(D)が、ベンゼン環にカルボキシル基を有するベンゾトリアゾール誘導体である、前記感光性樹脂組成物に関する。
第三の発明は、カルボキシベンゾトリアゾール誘導体(D)の含有量が、感光性樹脂(A)の固形分100重量部に対し1〜20重量部である前記感光性樹脂組成物に関する。
第四の発明は感光性樹脂(A)の酸価が、10〜200mgKOH/gで前記感光性樹脂組成物に関する。
第五の発明は感光性樹脂(A)のエチレン性不飽和基当量が、200〜5000g/eqである前記感光性樹脂組成物に関する。
第六の発明は感光性樹脂(A)の重量平均分子量が、1000〜100000である前記感光性樹脂組成物に関する。
第七の発明は前記感光性樹脂組成物を硬化してなる硬化物に関する。
第八の発明は前記感光性樹脂組成物と、難燃剤とを含む、感光性ソルダーレジストインキに関する。
第九の発明は前記感光性樹脂組成物と、難燃剤とを含む、ドライフィルム型感光性ソルダーレジストに関する。
As a result of intensive studies, the present inventors have found that a specific photosensitive resin composition can solve the above problems, and have completed the present invention.
1st invention is photosensitive resin (A), the hardening | curing agent (B) which is at least 1 type chosen from an epoxy-group containing compound, a non-blocked isocyanate compound, and a blocked isocyanate compound, and a photoinitiator (C). A photosensitive resin composition comprising a carboxybenzotriazole derivative (D),
The photosensitive resin (A) is
Resin (c) containing a side chain hydroxyl group by reacting an epoxy compound (a) having at least two epoxy groups in one molecule with a phenol compound (b) having at least two phenolic hydroxyl groups in one molecule. Produces
Reacting the side chain hydroxyl group-containing resin (c) with the polybasic acid anhydride (d) to produce a carboxyl group-containing resin (e);
Hydroxyl group-containing photosensitive resin (A) obtained by reacting the carboxyl group-containing resin (e) with an epoxy group or oxetane group in the compound (f) having an epoxy group or oxetane group and an ethylenically unsaturated group -1) or
It is a carboxyl group-containing photosensitive resin (A-2) obtained by reacting a hydroxyl group in the hydroxyl group-containing resin (A-1) with an acid anhydride group in the polybasic acid anhydride (d).
The present invention relates to a photosensitive resin composition.
The second invention relates to the photosensitive resin composition, wherein the carboxybenzotriazole derivative (D) is a benzotriazole derivative having a carboxyl group on a benzene ring.
3rd invention is related with the said photosensitive resin composition whose content of a carboxy benzotriazole derivative (D) is 1-20 weight part with respect to 100 weight part of solid content of the photosensitive resin (A).
4th invention is related with the said photosensitive resin composition whose acid value of photosensitive resin (A) is 10-200 mgKOH / g.
5th invention is related with the said photosensitive resin composition whose ethylenically unsaturated group equivalent of the photosensitive resin (A) is 200-5000 g / eq.
6th invention is related with the said photosensitive resin composition whose weight average molecular weights of the photosensitive resin (A) are 1000-100,000.
The seventh invention relates to a cured product obtained by curing the photosensitive resin composition.
The eighth invention relates to a photosensitive solder resist ink comprising the photosensitive resin composition and a flame retardant.
A ninth invention relates to a dry film type photosensitive solder resist containing the photosensitive resin composition and a flame retardant.
本発明により、活性エネルギー線に対する感光性に優れ、希アルカリ水溶液による現像により微細なパターンが形成できるとともに、後硬化(ポストキュア)工程を経て得られる硬化塗膜がフレキシブル性、絶縁性、密着性、半田耐熱性、塗膜耐性等に優れており、フォトソルダーレジストに好適に使用される感光性樹脂組成物及びその硬化物、更には感光性樹脂の製造方法を提供することができるようになった。本発明の感光性樹脂組成物は、フレキシブルプリント配線板用ソルダーレジスト、感光性カバーレイフィルム、メッキレジスト、線板用層間電気絶縁材料、感光性光導波路、更には、ポリエチレンテレフタレートフィルム上に銀ペーストやカーボンペースト等の導電性インクを印刷して回路形成されたフレキシブルプリント基板用のカバーレイレジスト等として好適に用いることができる。 According to the present invention, it has excellent photosensitivity to active energy rays, and can form a fine pattern by development with a dilute alkaline aqueous solution, and a cured coating film obtained through a post-curing (post-cure) process is flexible, insulating, and adhesive. It is excellent in solder heat resistance, coating film resistance, etc., and can now provide a photosensitive resin composition suitably used for a photo solder resist and its cured product, and further a method for producing a photosensitive resin. It was. The photosensitive resin composition of the present invention includes a solder resist for flexible printed wiring boards, a photosensitive coverlay film, a plating resist, an interlayer electrical insulating material for wiring boards, a photosensitive optical waveguide, and a silver paste on a polyethylene terephthalate film. It can be suitably used as a coverlay resist for a flexible printed circuit board formed with a circuit by printing a conductive ink such as carbon paste.
感光性樹脂(A)は主鎖中に二塩基酸無水物によるハーフエステル化由来のエステル結合やイソシアネート基と水酸基の反応由来のウレタン結合を有しないため、主鎖が化学的に安定であることから、得られる硬化塗膜は種々の塗膜耐性に優れ、半田浴等の高温条件下にさらされた場合でも優れた耐熱性を発揮し、又、高温多湿下でも優れた電気絶縁性を発揮するために更に好ましい。更には、以下の感光性樹脂(A)は、側鎖に感光性基及びカルボキシル基を有しているため、含有する感光性基およびカルボキシル基の量が少ない場合でも、非常に優れた解像性および現像性を示す。これら側鎖に導入された官能基は、主鎖に直結した場合に比べ反応性に富み、又主鎖末端のみに導入されている場合に比べると導入量を任意に調整できるため、優れた光硬化性、現像性、解像性及び塗膜耐性を発揮することができる。以下、本発明の感光性樹脂(A)、及び感光性樹脂組成物について説明する。
Since the photosensitive resin (A) does not have an ester bond derived from half esterification with a dibasic acid anhydride or a urethane bond derived from the reaction of an isocyanate group and a hydroxyl group in the main chain, the main chain is chemically stable. Therefore, the resulting cured coating film has excellent resistance to various coating films, exhibits excellent heat resistance even when exposed to high temperature conditions such as a solder bath, and exhibits excellent electrical insulation even under high temperature and high humidity. It is further preferable to do this. Furthermore, since the following photosensitive resin (A) has a photosensitive group and a carboxyl group in the side chain, even if the amount of the photosensitive group and carboxyl group contained is small, very excellent resolution And developability. The functional groups introduced into these side chains are more reactive than when directly connected to the main chain, and the amount of introduction can be adjusted arbitrarily compared to the case where they are introduced only at the ends of the main chain. Curability, developability, resolution and coating film resistance can be exhibited. Hereinafter, the photosensitive resin (A) and the photosensitive resin composition of the present invention will be described.
本発明の感光性樹脂(A)は、以下に示すように、ヒドロキシル基含有感光性樹脂(A−1)またはカルボキシル基含有感光性樹脂(A−2)であることを特徴とする。本発明のヒドロキシル基含有感光性樹脂(A−1)は、第一の工程として、1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物(a)と1分子中に少なくとも2個のフェノール性水酸基を有するフェノール化合物(b)とを反応させて側鎖ヒドロキシル基含有樹脂(c)を作製する。次に、第二の工程として、前記側鎖ヒドロキシル基含有樹脂(c)と多塩基酸無水物(d)とを反応させてカルボキシル基含有樹脂(e)を作製する。更に、第三の工程として、前記カルボキシル基含有樹脂(e)と、エポキシ基またはオキセタン基とエチレン性不飽和基とを有する化合物(f)中のエポキシ基又はオキセタン基とを反応させることにより得ることができる。更に、本発明のカルボキシル基含有感光性樹脂(A−2)は、第四の工程として、前記ヒドロキシル基含有樹脂(A−1)中の水酸基多塩基酸無水物(d)中の酸無水物基により得ることができる。以下、感光性樹脂(A)の製造方法について詳細に説明する。 As shown below, the photosensitive resin (A) of the present invention is a hydroxyl group-containing photosensitive resin (A-1) or a carboxyl group-containing photosensitive resin (A-2). The hydroxyl group-containing photosensitive resin (A-1) of the present invention comprises, as a first step, an epoxy compound (a) having at least two epoxy groups in one molecule and at least two phenolic compounds in one molecule. A side chain hydroxyl group-containing resin (c) is prepared by reacting with a phenol compound (b) having a hydroxyl group. Next, as a second step, the side chain hydroxyl group-containing resin (c) and the polybasic acid anhydride (d) are reacted to produce a carboxyl group-containing resin (e). Furthermore, as a third step, the carboxyl group-containing resin (e) is obtained by reacting the epoxy group or oxetane group in the compound (f) having an epoxy group or oxetane group and an ethylenically unsaturated group. be able to. Furthermore, the carboxyl group-containing photosensitive resin (A-2) of the present invention comprises, as the fourth step, an acid anhydride in the hydroxyl group polybasic acid anhydride (d) in the hydroxyl group-containing resin (A-1). It can be obtained by the group. Hereinafter, the manufacturing method of photosensitive resin (A) is demonstrated in detail.
まず、本発明の第一の工程で得られる側鎖ヒドロキシル基含有樹脂(c)について説明する。側鎖ヒドロキシル基含有樹脂(c)は、1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物(a)と1分子中に少なくとも2個のフェノール性水酸基を有するフェノール化合物(b)とを反応させることで得ることができ、1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物(a)中のエポキシ基と1分子中に少なくとも2個のフェノール性水酸基を有するフェノール化合物(b)中のフェノール性水酸基とを、エポキシ基/フェノール性水酸基=1/1〜1/2.5のモル比で反応させて作製することが好ましい。上記モル比の範囲よりフェノール性水酸基が少ないと、残存する余剰のエポキシ基が後の合成工程で反応してゲル化する場合がある。また、上記モル比の範囲よりフェノール性水酸基が多い場合、最終的に得られる感光性樹脂(A)の分子量が低くなり、所望の塗膜耐性や成膜性が得られにくくなる。更には、余剰の1分子中に少なくとも2個のフェノール性水酸基を有するフェノール化合物(b)が半田耐熱性や電気絶縁性などの物性に悪影響を及ぼす場合がある。 First, the side chain hydroxyl group-containing resin (c) obtained in the first step of the present invention will be described. The side chain hydroxyl group-containing resin (c) reacts an epoxy compound (a) having at least two epoxy groups in one molecule with a phenol compound (b) having at least two phenolic hydroxyl groups in one molecule. In the epoxy compound (a) having at least two epoxy groups in one molecule and in the phenol compound (b) having at least two phenolic hydroxyl groups in one molecule. It is preferable to prepare a phenolic hydroxyl group by reacting with a molar ratio of epoxy group / phenolic hydroxyl group = 1/1 to 1 / 2.5. If the phenolic hydroxyl group is less than the above molar ratio range, the remaining excess epoxy group may react and gel in the subsequent synthesis step. Moreover, when there are more phenolic hydroxyl groups than the range of the said molar ratio, the molecular weight of the photosensitive resin (A) finally obtained becomes low, and it becomes difficult to obtain desired coating-film resistance and film formability. Furthermore, the phenol compound (b) having at least two phenolic hydroxyl groups in one excess molecule may adversely affect physical properties such as solder heat resistance and electrical insulation.
なお、本発明でいう、モル比とは、実際に官能基同士が反応するモル比であり、各種出発材料は、前記モル比での反応を可能にする量を使用する。従って、例えば、「1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物(a)」と、「1分子中に少なくとも2個のフェノール性水酸基を有するフェノール化合物(b)」との反応において各出発材料を仕込む際、「1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物(a)」中のエポキシ基1.0モルに対して「1分子中に少なくとも2個のフェノール性水酸基を有するフェノール化合物(b)」中のフェノール性水酸基が2.5モルを超える量で仕込んで(好ましくは2.7モルを上限として仕込んで)反応させることがある。 In addition, the molar ratio as used in the field of this invention is a molar ratio with which functional groups actually react, and various starting materials use the quantity which enables reaction by the said molar ratio. Therefore, for example, in the reaction of “epoxy compound (a) having at least two epoxy groups in one molecule” and “phenol compound (b) having at least two phenolic hydroxyl groups in one molecule”, When the starting material is charged, “having at least two phenolic hydroxyl groups in one molecule” with respect to 1.0 mol of epoxy groups in “epoxy compound (a) having at least two epoxy groups in one molecule”. The phenolic hydroxyl group in the “phenolic compound (b)” may be charged in an amount exceeding 2.5 mol (preferably charged at an upper limit of 2.7 mol).
本発明で用いる1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物(a)は、好ましくはエポキシ基を分子内に2個含有する化合物であればよく、特に限定されるものではない。具体的には、例えば、エチレングリコールジグリシジルエーテル、ポリエチレングリコールジグリシジルエーテル、プロピレングリコールジグリシジルエーテル、ポリプロピレングリコールジグリシジルエーテル、テトラメチレングリコールジグリシジルエーテル、ポリテトラメチレングリコールジグリシジルエーテル、1,6-ヘキサンジオールジグリシジルエーテル、ビスフェノールA・エピクロロヒドリン型エポキシ樹脂、ビスフェノールF・エピクロロヒドリン型エポキシ樹脂、ビフェノール・エピクロロヒドリン型エポキシ樹脂、グリセリン・エピクロロヒドリン付加物のポリグリシジルエーテル、レゾルシノールジグリシジルエーテル、ポリブタジエンジグリシジルエーテル、ヒドロキノンジグリシジルエーテル、ジブロモネオペンチルグリコールジグリシジルエーテル、ネオペンチルグリコールジグリシジルエーテル、ヘキサヒドロフタル酸ジグリシジルエステル、水添ビスフェノールA型ジグリシジルエーテル、ジヒドロキシアントラセン型エポキシ樹脂、ポリプロピレングリコールジグリシジルエーテル、ジフェニルスルホンジグリシジルエーテル、ジヒドロキシベンゾフェノンジグリシジルエーテル、ビフェノールジグリシジルエーテル、ジフェニルメタンジグリシジルエーテル、ビスフェノールフルオレンジグリシジルエーテル、ビスクレゾールフルオレンジグリシジルエーテル、ビスフェノキシエタノールフルオレンジグリシジルエーテル、1,3−ビス(N,N−ジグリシジルアミノメチル)シクロヘキサン、N,N−ジグリシジルアニリン、N,N−ジグリシジルトルイジン、特開2004−156024号公報、特開2004−315595号公報、特開2004−323777号公報に開示されている柔軟性に優れたエポキシ化合物や、下記式(1)−(3)で表される構造のエポキシ化合物等が挙げられる。 The epoxy compound (a) having at least two epoxy groups in one molecule used in the present invention is not particularly limited as long as it is preferably a compound containing two epoxy groups in the molecule. Specifically, for example, ethylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, tetramethylene glycol diglycidyl ether, polytetramethylene glycol diglycidyl ether, 1,6- Hexanediol diglycidyl ether, bisphenol A / epichlorohydrin type epoxy resin, bisphenol F / epichlorohydrin type epoxy resin, biphenol / epichlorohydrin type epoxy resin, polyglycidyl ether of glycerin / epichlorohydrin adduct , Resorcinol diglycidyl ether, polybutadiene diglycidyl ether, hydroquinone diglycidyl ether, dibromoneope Tyl glycol diglycidyl ether, neopentyl glycol diglycidyl ether, hexahydrophthalic acid diglycidyl ester, hydrogenated bisphenol A type diglycidyl ether, dihydroxyanthracene type epoxy resin, polypropylene glycol diglycidyl ether, diphenylsulfone diglycidyl ether, dihydroxybenzophenone Diglycidyl ether, biphenol diglycidyl ether, diphenylmethane diglycidyl ether, bisphenol fluorenediglycidyl ether, biscresol fluorenediglycidyl ether, bisphenoxyethanol fluorenediglycidyl ether, 1,3-bis (N, N-diglycidylaminomethyl) cyclohexane N, N-diglycidylaniline, N, N-dig Ricidyl toluidine, an epoxy compound having excellent flexibility disclosed in JP-A No. 2004-156024, JP-A No. 2004-315595, and JP-A No. 2004-323777, and the following formulas (1) to (3) An epoxy compound having a structure represented by:
式(1)
式(2)
式(3)
中でも、ポリエチレングリコールジグリシジルエーテルは、最終的に得られるヒドロキシル基含有感光性樹脂(A−1)に柔軟性やアルカリ現像液に対する溶解性を付与させる場合に好ましく、ビスフェノールA・エピクロロヒドリン型エポキシ樹脂は、最終的に得られるカルボキシル基含有変性エステル樹脂(A)に耐熱性を付与させる場合に好ましい。このように本発明において、1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物(d)は目的に応じて選択することが可能であり、これらは単独で使用しても良いし、複数を併用することも好ましい。 Among them, polyethylene glycol diglycidyl ether is preferable in the case where the finally obtained hydroxyl group-containing photosensitive resin (A-1) is provided with flexibility and solubility in an alkaline developer, and is preferably a bisphenol A / epichlorohydrin type. The epoxy resin is preferable in the case where heat resistance is imparted to the finally obtained carboxyl group-containing modified ester resin (A). Thus, in the present invention, the epoxy compound (d) having at least two epoxy groups in one molecule can be selected according to the purpose, and these may be used alone or in combination. Use in combination is also preferred.
本発明で用いる1分子中に少なくとも2個のフェノール性水酸基を有するフェノール化合物(b)としては、フェノール性水酸基を分子内に2個含有する化合物であればよく、特に限定されるものではない。例えば、2,2−ビス(4−ヒドロキシフェニル)プロパン (別名:ビスフェノールA)が代表例であり、その他にも、ビス(4−ヒドロキシフェノル)メタン、1,1−ビス(4−ヒドロキシフェニル)エタン、 1,1−ビス(4−ヒドロキシフェニル)−n−プロパン、1,1−ビス(4−ヒドロキシフェニル)−n−ブタン、1,1−ビス(4−ヒドロキシフェニ ル)−n−ペンタン、1,1−ビス(4−ヒドロキシフェニル)−n−ヘキサン、1,1−ビス(4−ヒドロキシフェニル)−n−ヘプタン、1,1−ビス (4−ヒドロキシフェニル)−n−オクタン、1,1−ビス(4−ヒドロキシフェニル)−n−ノナン、1,1−ビス(4−ヒドロキシフェニル)−n−デカ ン、ビス(4−ヒドロキシフェニル)フェニルメタン、ビス(4−ヒドロキシフェニル)ナフチルメタン、ビス(4−ヒドロキシフェニル)トルイルメタン、ビ ス(4−ヒドロキシフェニル)−(4−エチルフェニル)メタン、ビス(4−ヒドロキシフェニル)−(4−n−プロピルフェニル)メタン、ビス(4−ヒドロ キシフェニル)−(4−イソプロピルフェニル)メタン、ビス(4−ヒドロキシフェニル)−(4−n−ブチルフェニル)メタン、ビス(4−ヒドロキシフェニ ル)−(4−ペンチルフェニル)メタン、ビス(4−ヒドロキシフェニル)−(4−ヘキシルフェニル)メタン、ビス(4−ヒドロキシフェニル)−(4−フル オロフェニル)メタン、ビス(4−ヒドロキシフェニル)−(4−クロロフェニル)メタン、ビス(4−ヒドロキシフェニル)−(2−フルオロフェニル)メタ ン、ビス(4−ヒドロキシフェニル)−(2−クロロフェニル)メタン、ビス(4−ヒドロキシフェニル)テトラフルオロフェニルメタン、ビス(4−ヒドロキ シフェニル)テトラクロロフェニルメタン、ビス(3−メチル−4−ヒドロキシフェニル)メタン、ビス(3,5−ジメチル−4−ヒドロキシフェニル)メタ ン、ビス(3−エチル−4−ヒドロキシフェニル)メタン、ビス(3−イソブチル−4−ヒドロキシフェニル)メタン、ビス(3−t−ブチル−4−ヒドロキシ フェニル)−1−フェニルメタン、ビス(3−フェニル−4−ヒドロキシフェニル)−1−フェニルメタン、ビス(3−フルオロ−4−ヒドロキシフェニル)メ タン、ビス(3,5−ジフルオロ−4−ヒドロキシフェニル)メタン、ビス(3−クロロ−4−ヒドロキシフェニル)メタン、ビス(3,5−ジクロロ−4−ヒ ドロキシフェニル)メタン、1,1−ビス(3−メチル−4−ヒドロキシフェニル)エタン、1,1−ビス(3,5−ジメチル−4−ヒドロキシフェニル)エタ ン、1,1−ビス(3−エチル−4−ヒドロキシフェニル)エタン、1,1−ビス(3−イソブチル−4−ヒドロキシフェニル)エタン、1,1−ビス(3−フ ルオロ−4−ヒドロキシフェニル)エタン、1,1−ビス(3,5−ジフルオロ−4−ヒドロキシフェニル)エタン、1,1−ビス(3−クロロ−4−ヒドロキ シフェニル)エタン、1,1−ビス(3,5−ジクロロ−4−ヒドロキシフェニル)エタン等の中心炭素に水素原子が結合しているビスフェノール類;
2,2−ビス(4−ヒドロキシフェニル)−n−ブタン、2,2−ビス(4−ヒドロキシフェニル)−n−ペンタン、2,2−ビス(4−ヒドロキシフェニ ル)−n−ヘキサン、2,2−ビス(4−ヒドロキシフェニル)−n−ヘプタン、2,2−ビス(4−ヒドロキシフェニル)−n−オクタン、2,2−ビス (4−ヒドロキシフェニル)−n−ノナン、2,2−ビス(4−ヒドロキシフェニル)−n−デカン、1,1−ビス(4−ヒドロキシフェニル)−1−フェニル エタン(通称ビスフェノールP)、1,1−ビス(4−ヒドロキシフェニル)−1−ナフチルエタン、1,1−ビス(4−ヒドロキシフェニル)−1−トルイル エタン、1,1−ビス(4−ヒドロキシフェニル)−1−(4−エチルフェニル)エタン、1,1−ビス(4−ヒドロキシフェニル)−1−(4−n−プロピル フェニル)エタン、1,1−ビス(4−ヒドロキシフェニル)−1−(4−イソプロピルフェニル)エタン、1,1−ビス(4−ヒドロキシフェニ ル)−1−(4−n−ブチルフェニル)エタン、1,1−ビス(4−ヒドロキシフェニル)−1−(4−ペンチルフェニル)エタン、1,1−ビス(4−ヒドロ キシフェニル)−1−(4−ヘキシルフェニル)エタン、1,1−ビス(3−t−ブチル−4−ヒドロキシフェニル)−1−フェニルエタン、1,1−ビス (3−フェニル−4−ヒドロキシフェニル)−1−フェニルエタン、1,1−ビス(4−ヒドロキシフェニル)−1−(4−フルオロフェニル)エタン、 1,1−ビス(4−ヒドロキシフェニル)−1−(4−クロロフェニル)エタン、1,1−ビス(4−ヒドロキシフェニル)−1−(2−フルオロフェニル)エ タン、1,1−ビス(4−ヒドロキシフェニル)−1−(2−クロロフェニル)エタン、1,1−ビス(4−ヒドロキシフェニル)−1−テトラフルオロフェニ ルエタン、1,1−ビス(4−ヒドロキシフェニル)−1−テトラクロロフェニルエタン等の中心炭素に1つのメチル基が結合しているビスフェノール類;
2,2−ビス(3−メチル−4−ヒドロキシフェニル)プロパン(通称ビスフェノールC)、2,2−ビス(3,5−ジメチル−4−ヒドロキシフェニル)プロ パン、2,2−ビス(3−エチル−4−ヒドロキシフェニル)プロパン、2,2−ビス(3−イソブチル−4−ヒドロキシフェニル)プロパン、2,2−ビス (3−フルオロ−4−ヒドロキシフェニル)プロパン、2,2−ビス(3,5−ジフルオロ−4−ヒドロキシフェニル)プロパン、2,2−ビス(3−クロロ −4−ヒドロキシフェニル)プロパン、2,2−ビス(3,5−ジクロロ−4−ヒドロキシフェニル)プロパン等の中心炭素に2つのメチル基が結合しているビ スフェノール類;
ビス(4−ヒドロキシフェニル)−1,1−ジフェニルメタン、ビス(3−メチル−4−ヒドロキシフェニル)−1,1−ジフェニルメタン、ビス(3−t−ブ チル−4−ヒドロキシフェニル)−1,1−ジフェニルメタン、ビス(3−フェニル−4−ヒドロキシフェニル)−1,1−ジフェニルメタン、ビス(3−クロ ロ−4−ヒドロキシフェニル)−1,1−ジフェニルメタン等のジフェニルメタン誘導体であるビスフェノール類;
1,1−ビス(4−ヒドロキシフェニル)シクロヘキサン(通称ビスフェノールZ)、1,1−ビス(3−メチル−4−ヒドロキシフェニル)シクロヘキサン、 1,1−ビス(3,5−ジメチル−4−ヒドロキシフェニル)シクロヘキサン、1,1−ビス(3−エチル−4−ヒドロキシフェニル)シクロヘキサン、 1,1−ビス(3−イソブチル−4−ヒドロキシフェニル)シクロヘキサン、1,1−ビス(3−フルオロ−4−ヒドロキシフェニル)シクロヘキサン、 1,1−ビス(3,5−ジフルオロ−4−ヒドロキシフェニル)シクロヘキサン、1,1−ビス(3−クロロ−4−ヒドロキシフェニル)シクロヘキサン、 1,1−ビス(3,5−ジクロロ−4−ヒドロキシフェニル)シクロヘキサン等のシクロヘキサン誘導体であるビスフェノール類;
1,1−ビス(4−ヒドロキシフェニル)−3,3,5−トリメチルシクロヘキサン、1,1−ビス(3−メチル−4−ヒドロキシフェニル)−3,3,5−ト リメチルシクロヘキサン、1,1−ビス(3,5−ジメチル−4−ヒドロキシフェニル)−3,3,5−トリメチルシクロヘキサン、1,1−ビス(3−エチル −4−ヒドロキシフェニル)−3,3,5−トリメチルシクロヘキサン、1,1−ビス(3−イソブチル−4−ヒドロキシフェニル)−3,3,5−トリメチル シクロヘキサン、1,1−ビス(3−フルオロ−4−ヒドロキシフェニル)−3,3,5−トリメチルシクロヘキサン、1,1−ビス(3,5−ジフルオロ −4−ヒドロキシフェニル)−3,3,5−トリメチルシクロヘキサン等の−3,3,5−トリメチルシクロヘキサン誘導体であるビスフェノール類;
9,9−ビス(4−ヒドロキシフェニル)フルオレン、9,9−ビス(3−メチル−4−ヒドロキシフェニル)フルオレン、1,1−ビス(3,5−ジメチル −4−ヒドロキシフェニル)フルオレン、9,9−ビス(3−エチル−4−ヒドロキシフェニル)フルオレン、9,9−ビス(3−イソブチル−4−ヒドロキシ フェニル)フルオレン、1,1−ビス(3−フルオロ−4−ヒドロキシフェニル)フルオレン、9,9−ビス(3,5−ジフルオロ−4−ヒドロキシフェニル) フルオレン等のフルオレン誘導体であるビスフェノール類;
1,1−ビス(4−ヒドロキシフェニル)−シクロペンタン、1,1−ビス(4−ヒドロキシフェニル)シクロペンタン、1,1−ビス(4−ヒドロキシフェニ ル)シクロオクタン、1,1−ビス(4−ヒドロキシフェニル)シクロノナン、1,1−ビス(4−ヒドロキシフェニル)シクロデカン等のシクロアルカン誘導 体であるビスフェノール類;
4,4’−ビフェノール等の芳香族環が直接結合したビフェノール類;
ビス(4−ヒドロキシフェニル)スルホン、ビス(3−メチル−4−ヒドロキシフェニル)スルホン、ビス(3,5−ジメチル−4−ヒドロキシフェニル)スル ホン、ビス(3−エチル−4−ヒドロキシフェニル)スルホン、ビス(3−イソブチル−4−ヒドロキシフェニル)スルホン、ビス(3−フルオロ−4−ヒドロ キシフェニル)スルホン、ビス(3,5−ジフルオロ−4−ヒドロキシフェニル)スルホン等のスルホン誘導体であるビスフェノール類;
ビス(4−ヒドロキシフェニル)エーテル、ビス(3−メチル−4−ヒドロキシフェニル)エーテル、ビス(3,5−ジメチル−4−ヒドロキシフェニル)エー テル、ビス(3−エチル−4−ヒドロキシフェニル)エーテル、ビス(3−イソブチル−4−ヒドロキシフェニル)エーテル、ビス(3−フルオロ−4−ヒドロ キシフェニル)エーテル、ビス(3,5−ジフルオロ−4−ヒドロキシフェニル)エーテル等のエーテル結合を有するビスフェノール類;
ビス(4−ヒドロキシフェニル)スルフィド、ビス(3−メチル−4−ヒドロキシフェニル)スルフィド、ビス(3,5−ジメチル−4−ヒドロキシフェニル) スルフィド、ビス(3−エチル−4−ヒドロキシフェニル)スルフィド、ビス(3−イソブチル−4−ヒドロキシフェニル)スルフィド、ビス(3−フルオロ −4−ヒドロキシフェニル)スルフィド、ビス(3,5−ジフルオロ−4−ヒドロキシフェニル)スルフィド等のスルフィド結合を有するビスフェノール類;
ビス(4−ヒドロキシフェニル)スルホキシド、ビス(3−メチル−4−ヒドロキシフェニル)スルホキシド、ビス(3,5−ジメチル−4−ヒドロキシフェニ ル)スルホキシド、ビス(3−エチル−4−ヒドロキシフェニル)スルホキシド、ビス(3−イソブチル−4−ヒドロキシフェニル)スルホキシド、ビス(3− フルオロ−4−ヒドロキシフェニル)スルホキシド、ビス(3,5−ジフルオロ−4−ヒドロキシフェニル)スルホキシド等のスルホキシド誘導体であるビス フェノール類;
フェノールフタレイン等のヘテロ原子含有脂肪族環を有するビスフェノール類;
ビス(2,3,5,6−テトラフルオロ−4−ヒドロキシフェニル)ジフルオロメタン、1,1−ビス(2,3,5,6−テトラフルオロ−4−ヒドロキシフェ ニル)パーフルオロエタン、2,2−ビス(2,3,5,6−テトラフルオロ−4−ヒドロキシフェニル)パーフルオロプロパン等の炭素−水素結合のないビス フェノール類等を挙げることができる。
The phenol compound (b) having at least two phenolic hydroxyl groups in one molecule used in the present invention is not particularly limited as long as it is a compound containing two phenolic hydroxyl groups in the molecule. For example, 2,2-bis (4-hydroxyphenyl) propane (also known as bisphenol A) is a representative example, and other examples include bis (4-hydroxyphenol) methane, 1,1-bis (4-hydroxyphenyl). ) Ethane, 1,1-bis (4-hydroxyphenyl) -n-propane, 1,1-bis (4-hydroxyphenyl) -n-butane, 1,1-bis (4-hydroxyphenyl) -n- Pentane, 1,1-bis (4-hydroxyphenyl) -n-hexane, 1,1-bis (4-hydroxyphenyl) -n-heptane, 1,1-bis (4-hydroxyphenyl) -n-octane, 1,1-bis (4-hydroxyphenyl) -n-nonane, 1,1-bis (4-hydroxyphenyl) -n-decane, bis (4-hydroxyphenyl) phenylmethane Bis (4-hydroxyphenyl) naphthylmethane, bis (4-hydroxyphenyl) toluylmethane, bis (4-hydroxyphenyl)-(4-ethylphenyl) methane, bis (4-hydroxyphenyl)-(4-n- Propylphenyl) methane, bis (4-hydroxyphenyl)-(4-isopropylphenyl) methane, bis (4-hydroxyphenyl)-(4-n-butylphenyl) methane, bis (4-hydroxyphenyl)-(4 -Pentylphenyl) methane, bis (4-hydroxyphenyl)-(4-hexylphenyl) methane, bis (4-hydroxyphenyl)-(4-fluorophenyl) methane, bis (4-hydroxyphenyl)-(4-chlorophenyl) ) Methane, bis (4-hydroxyphenyl)-(2-fluoropheny) ) Methane, bis (4-hydroxyphenyl)-(2-chlorophenyl) methane, bis (4-hydroxyphenyl) tetrafluorophenylmethane, bis (4-hydroxyphenyl) tetrachlorophenylmethane, bis (3-methyl-4-) Hydroxyphenyl) methane, bis (3,5-dimethyl-4-hydroxyphenyl) methane, bis (3-ethyl-4-hydroxyphenyl) methane, bis (3-isobutyl-4-hydroxyphenyl) methane, bis (3 -T-butyl-4-hydroxyphenyl) -1-phenylmethane, bis (3-phenyl-4-hydroxyphenyl) -1-phenylmethane, bis (3-fluoro-4-hydroxyphenyl) methane, bis (3 , 5-Difluoro-4-hydroxyphenyl) methane, bis (3-chloro- -Hydroxyphenyl) methane, bis (3,5-dichloro-4-hydroxyphenyl) methane, 1,1-bis (3-methyl-4-hydroxyphenyl) ethane, 1,1-bis (3,5- Dimethyl-4-hydroxyphenyl) ethane, 1,1-bis (3-ethyl-4-hydroxyphenyl) ethane, 1,1-bis (3-isobutyl-4-hydroxyphenyl) ethane, 1,1-bis ( 3-fluoro-4-hydroxyphenyl) ethane, 1,1-bis (3,5-difluoro-4-hydroxyphenyl) ethane, 1,1-bis (3-chloro-4-hydroxyphenyl) ethane, 1, Bisphenols in which a hydrogen atom is bonded to a central carbon such as 1-bis (3,5-dichloro-4-hydroxyphenyl) ethane;
2,2-bis (4-hydroxyphenyl) -n-butane, 2,2-bis (4-hydroxyphenyl) -n-pentane, 2,2-bis (4-hydroxyphenyl) -n-hexane, 2 , 2-bis (4-hydroxyphenyl) -n-heptane, 2,2-bis (4-hydroxyphenyl) -n-octane, 2,2-bis (4-hydroxyphenyl) -n-nonane, 2,2 -Bis (4-hydroxyphenyl) -n-decane, 1,1-bis (4-hydroxyphenyl) -1-phenylethane (commonly called bisphenol P), 1,1-bis (4-hydroxyphenyl) -1-naphthyl Ethane, 1,1-bis (4-hydroxyphenyl) -1-toluyl ethane, 1,1-bis (4-hydroxyphenyl) -1- (4-ethylphenyl) ethane, 1,1-bis ( 4-hydroxyphenyl) -1- (4-n-propylphenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1- (4-isopropylphenyl) ethane, 1,1-bis (4-hydroxyphenyl) L) -1- (4-n-butylphenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1- (4-pentylphenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1 -(4-hexylphenyl) ethane, 1,1-bis (3-tert-butyl-4-hydroxyphenyl) -1-phenylethane, 1,1-bis (3-phenyl-4-hydroxyphenyl) -1- Phenylethane, 1,1-bis (4-hydroxyphenyl) -1- (4-fluorophenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1- (4-chlorophene) L) ethane, 1,1-bis (4-hydroxyphenyl) -1- (2-fluorophenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1- (2-chlorophenyl) ethane, Bisphenols in which one methyl group is bonded to the central carbon such as 1-bis (4-hydroxyphenyl) -1-tetrafluorophenylethane and 1,1-bis (4-hydroxyphenyl) -1-tetrachlorophenylethane ;
2,2-bis (3-methyl-4-hydroxyphenyl) propane (commonly called bisphenol C), 2,2-bis (3,5-dimethyl-4-hydroxyphenyl) propan, 2,2-bis (3- Ethyl-4-hydroxyphenyl) propane, 2,2-bis (3-isobutyl-4-hydroxyphenyl) propane, 2,2-bis (3-fluoro-4-hydroxyphenyl) propane, 2,2-bis (3 , 5-Difluoro-4-hydroxyphenyl) propane, 2,2-bis (3-chloro-4-hydroxyphenyl) propane, 2,2-bis (3,5-dichloro-4-hydroxyphenyl) propane, etc. Bisphenols with two methyl groups attached to the carbon;
Bis (4-hydroxyphenyl) -1,1-diphenylmethane, bis (3-methyl-4-hydroxyphenyl) -1,1-diphenylmethane, bis (3-t-butyl-4-hydroxyphenyl) -1,1 -Bisphenols that are diphenylmethane derivatives such as diphenylmethane, bis (3-phenyl-4-hydroxyphenyl) -1,1-diphenylmethane, bis (3-chloro-4-hydroxyphenyl) -1,1-diphenylmethane;
1,1-bis (4-hydroxyphenyl) cyclohexane (commonly known as bisphenol Z), 1,1-bis (3-methyl-4-hydroxyphenyl) cyclohexane, 1,1-bis (3,5-dimethyl-4-hydroxy) Phenyl) cyclohexane, 1,1-bis (3-ethyl-4-hydroxyphenyl) cyclohexane, 1,1-bis (3-isobutyl-4-hydroxyphenyl) cyclohexane, 1,1-bis (3-fluoro-4-) Hydroxyphenyl) cyclohexane, 1,1-bis (3,5-difluoro-4-hydroxyphenyl) cyclohexane, 1,1-bis (3-chloro-4-hydroxyphenyl) cyclohexane, 1,1-bis (3,5 -Bis, which is a cyclohexane derivative such as -dichloro-4-hydroxyphenyl) cyclohexane Phenols;
1,1-bis (4-hydroxyphenyl) -3,3,5-trimethylcyclohexane, 1,1-bis (3-methyl-4-hydroxyphenyl) -3,3,5-trimethylcyclohexane, 1, 1-bis (3,5-dimethyl-4-hydroxyphenyl) -3,3,5-trimethylcyclohexane, 1,1-bis (3-ethyl-4-hydroxyphenyl) -3,3,5-trimethylcyclohexane, 1,1-bis (3-isobutyl-4-hydroxyphenyl) -3,3,5-trimethylcyclohexane, 1,1-bis (3-fluoro-4-hydroxyphenyl) -3,3,5-trimethylcyclohexane, -3,3,5-trimethyl such as 1,1-bis (3,5-difluoro-4-hydroxyphenyl) -3,3,5-trimethylcyclohexane Bisphenols which are cyclohexane derivatives;
9,9-bis (4-hydroxyphenyl) fluorene, 9,9-bis (3-methyl-4-hydroxyphenyl) fluorene, 1,1-bis (3,5-dimethyl-4-hydroxyphenyl) fluorene, 9 , 9-bis (3-ethyl-4-hydroxyphenyl) fluorene, 9,9-bis (3-isobutyl-4-hydroxyphenyl) fluorene, 1,1-bis (3-fluoro-4-hydroxyphenyl) fluorene, Bisphenols which are fluorene derivatives such as 9,9-bis (3,5-difluoro-4-hydroxyphenyl) fluorene;
1,1-bis (4-hydroxyphenyl) -cyclopentane, 1,1-bis (4-hydroxyphenyl) cyclopentane, 1,1-bis (4-hydroxyphenyl) cyclooctane, 1,1-bis ( Bisphenols which are cycloalkane derivatives such as 4-hydroxyphenyl) cyclononane and 1,1-bis (4-hydroxyphenyl) cyclodecane;
Biphenols directly linked with aromatic rings such as 4,4′-biphenol;
Bis (4-hydroxyphenyl) sulfone, bis (3-methyl-4-hydroxyphenyl) sulfone, bis (3,5-dimethyl-4-hydroxyphenyl) sulfone, bis (3-ethyl-4-hydroxyphenyl) sulfone Bisphenols which are sulfone derivatives such as bis (3-isobutyl-4-hydroxyphenyl) sulfone, bis (3-fluoro-4-hydroxyphenyl) sulfone, bis (3,5-difluoro-4-hydroxyphenyl) sulfone;
Bis (4-hydroxyphenyl) ether, bis (3-methyl-4-hydroxyphenyl) ether, bis (3,5-dimethyl-4-hydroxyphenyl) ether, bis (3-ethyl-4-hydroxyphenyl) ether Bisphenols having an ether bond such as bis (3-isobutyl-4-hydroxyphenyl) ether, bis (3-fluoro-4-hydroxyphenyl) ether, bis (3,5-difluoro-4-hydroxyphenyl) ether;
Bis (4-hydroxyphenyl) sulfide, bis (3-methyl-4-hydroxyphenyl) sulfide, bis (3,5-dimethyl-4-hydroxyphenyl) sulfide, bis (3-ethyl-4-hydroxyphenyl) sulfide, Bisphenols having a sulfide bond such as bis (3-isobutyl-4-hydroxyphenyl) sulfide, bis (3-fluoro-4-hydroxyphenyl) sulfide, bis (3,5-difluoro-4-hydroxyphenyl) sulfide;
Bis (4-hydroxyphenyl) sulfoxide, bis (3-methyl-4-hydroxyphenyl) sulfoxide, bis (3,5-dimethyl-4-hydroxyphenyl) sulfoxide, bis (3-ethyl-4-hydroxyphenyl) sulfoxide Bisphenols which are sulfoxide derivatives such as bis (3-isobutyl-4-hydroxyphenyl) sulfoxide, bis (3-fluoro-4-hydroxyphenyl) sulfoxide, bis (3,5-difluoro-4-hydroxyphenyl) sulfoxide ;
Bisphenols having a heteroatom-containing aliphatic ring such as phenolphthalein;
Bis (2,3,5,6-tetrafluoro-4-hydroxyphenyl) difluoromethane, 1,1-bis (2,3,5,6-tetrafluoro-4-hydroxyphenyl) perfluoroethane, 2, Examples thereof include bisphenols having no carbon-hydrogen bond such as 2-bis (2,3,5,6-tetrafluoro-4-hydroxyphenyl) perfluoropropane.
さらに、ヒドロキノン、レゾルシノール、カテコール、メチルヒドロキノン等のジヒドロキシベンゼン類;
1,5−ジヒドロキシナフタレン、2,6−ジヒドロキシナフタレン等のジヒドロキシナフタレン類等を挙げることができる。
And dihydroxybenzenes such as hydroquinone, resorcinol, catechol, methylhydroquinone;
Examples thereof include dihydroxynaphthalenes such as 1,5-dihydroxynaphthalene and 2,6-dihydroxynaphthalene.
本発明において、側鎖ヒドロキシル基含有樹脂(c)の合成条件は特に限定されるものではなく、公知の条件で行うことができる。例えば、フラスコに、1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物(a)、1分子中に少なくとも2個のフェノール性水酸基を有するフェノール化合物(b)、および溶剤を仕込み、撹拌しながら100〜150℃で加熱することで側鎖ヒドロキシル基含有樹脂(c)を得ることができる。この際、必要に応じてトリフェニルホスフィンや、3級アミノ基含有化合物等の触媒を使用してもよい。
In the present invention, the conditions for synthesizing the side chain hydroxyl group-containing resin (c) are not particularly limited, and can be performed under known conditions. For example, an epoxy compound (a) having at least two epoxy groups in one molecule, a phenol compound (b) having at least two phenolic hydroxyl groups in one molecule, and a solvent are charged into a flask while stirring. The side chain hydroxyl group-containing resin (c) can be obtained by heating at 100 to 150 ° C. At this time, a catalyst such as triphenylphosphine or a tertiary amino group-containing compound may be used as necessary.
次に、本発明の第二の工程で得られるカルボキシル基含有樹脂(e)について説明する。カルボキシル基含有樹脂(e)は、前記側鎖ヒドロキシル基含有樹脂(c)と多塩基酸無水物(d)とを反応させて得ることができ、側鎖ヒドロキシル基含有樹脂(c)中の水酸基と多塩基酸無水物(d)中の酸無水物基とを、水酸基/酸無水物基=1/0.1〜1/1のモル比で反応させて作製することが好ましい。上記モル比の範囲より酸無水物基が少ないと、最終的に得られる感光性樹脂(A)中で架橋点として機能するカルボキシル基濃度が少なくなるため所望の耐熱性やアルカリ現像液に対する溶解性が得られにくくなる。また、上記モル比の範囲より酸無水物基が多い場合、余剰の多塩基酸無水物(d)が後の合成工程において副生成物を生じさせるため最終塗膜のフレキシブル性や半田耐熱性、絶縁信頼性が低下する傾向にある。 Next, the carboxyl group-containing resin (e) obtained in the second step of the present invention will be described. The carboxyl group-containing resin (e) can be obtained by reacting the side chain hydroxyl group-containing resin (c) with the polybasic acid anhydride (d), and the hydroxyl group in the side chain hydroxyl group-containing resin (c). And an acid anhydride group in the polybasic acid anhydride (d) are preferably reacted at a molar ratio of hydroxyl group / acid anhydride group = 1 / 0.1 to 1/1. If there are less acid anhydride groups than the above molar ratio range, the concentration of carboxyl groups that function as crosslinking points in the finally obtained photosensitive resin (A) will decrease, so the desired heat resistance and solubility in alkaline developer Is difficult to obtain. In addition, when there are more acid anhydride groups than the above molar ratio range, excess polybasic acid anhydride (d) generates a by-product in a later synthesis step, so the flexibility and solder heat resistance of the final coating film, Insulation reliability tends to decrease.
本発明で用いる多塩基酸無水物(d)は、酸無水物基を分子内に1個以上含有する化合物であればよく、特に限定されるものではない。例えば、無水フタル酸、無水トリメリット酸、メチルテトラヒドロ無水フタル酸、無水メチルハイミック酸、ヘキサヒドロ無水フタル酸、テトラヒドロ無水フタル酸、メチルペンタヒドロ無水フタル酸、メチルトリヒドロ無水フタル酸、トリアルキルテトラヒドロ無水フタル酸、メチルシクロへキセンジカルボン酸無水物、無水ヘット酸、テトラブロモ無水フタル酸などの脂環構造、又は芳香環構造を有する、酸無水物基を含む化合物が挙げられる。その他の化合物としては、無水コハク酸、無水マレイン酸、無水グルタル酸、ブチルコハク酸無水物、ヘキシルコハク酸無水物、オクチルコハク酸無水物、ドデシルコハク酸無水物、ブチルマレイン酸無水物、ペンチルマレイン酸無水物、ヘキシルマレイン酸無水物、オクチルマレイン酸無水物、デシルマレイン酸無水物、ドデシルマレイン酸無水物、ブチルグルタミン酸無水物、ヘキシルグルタミン酸無水物、ヘプチルグルタミン酸無水物、オクチルグルタミン酸無水物、デシルグルタミン酸無水物、ドデシルグルタミン酸無水物などが挙げられる。本発明において、多塩基酸無水物(d)は、一種のみを単独で用いても良いし、複数を併用しても良い。 The polybasic acid anhydride (d) used in the present invention is not particularly limited as long as it is a compound containing at least one acid anhydride group in the molecule. For example, phthalic anhydride, trimellitic anhydride, methyltetrahydrophthalic anhydride, methylhymic anhydride, hexahydrophthalic anhydride, tetrahydrophthalic anhydride, methylpentahydrophthalic anhydride, methyltrihydrophthalic anhydride, trialkyltetrahydro Examples thereof include compounds containing an acid anhydride group having an alicyclic structure such as phthalic anhydride, methylcyclohexene dicarboxylic acid anhydride, het acid anhydride, tetrabromophthalic anhydride, or an aromatic ring structure. Other compounds include succinic anhydride, maleic anhydride, glutaric anhydride, butyl succinic anhydride, hexyl succinic anhydride, octyl succinic anhydride, dodecyl succinic anhydride, butyl maleic anhydride, pentyl maleic acid Anhydride, hexylmaleic anhydride, octylmaleic anhydride, decylmaleic anhydride, dodecylmaleic anhydride, butylglutamic anhydride, hexylglutamic anhydride, heptylglutamic anhydride, octylglutamic anhydride, decylglutamic anhydride Products, dodecylglutamic acid anhydride, and the like. In the present invention, the polybasic acid anhydride (d) may be used alone or in combination.
なかでも、無水コハク酸、テトラヒドロ無水フタル酸などは、本発明において、現像性、パターン形成性および塗膜耐性が非常に優れるため特に好ましい。 Of these, succinic anhydride, tetrahydrophthalic anhydride, and the like are particularly preferable in the present invention because of their excellent developability, pattern formability, and coating film resistance.
本発明において、カルボキシル基含有樹脂(e)の合成条件は特に限定されるものではなく、公知の条件で行うことができる。例えば、フラスコに、側鎖ヒドロキシル基含有樹脂(c)、多塩基酸無水物(d)、および溶剤を仕込み、撹拌しながら25〜150℃で加熱することで側鎖ヒドロキシル基含有樹脂(c)を得ることができる。この反応は無触媒下でも進行するが、必要に応じて、3級アミノ基含有化合物等の触媒を使用してもよい。
In the present invention, the synthesis conditions of the carboxyl group-containing resin (e) are not particularly limited, and can be performed under known conditions. For example, a side chain hydroxyl group-containing resin (c) is prepared by charging a flask with a side chain hydroxyl group-containing resin (c), a polybasic acid anhydride (d), and a solvent, and heating at 25 to 150 ° C. with stirring. Can be obtained. This reaction proceeds even in the absence of a catalyst, but a catalyst such as a tertiary amino group-containing compound may be used if necessary.
次に、本発明の第三の工程で得られるヒドロキシル基含有樹脂(A−1)について説明する。本発明のヒドロキシル基含有樹脂(A−1)は、前記カルボキシル基含有樹脂(e)とエポキシ基又はオキセタン基とエチレン性不飽和基とを有する化合物(f)とを反応させて得ることができ、カルボキシル基含有樹脂(e)中のカルボキシル基と、エポキシ基又はオキセタン基とエチレン性不飽和基とを有する化合物(f)中のエポキシ基又はオキセタン基とを、カルボキシル基/エポキシ基又はオキセタン基=1/0.1〜1/1のモル比で反応させて作製することが好ましい。上記モル比の範囲よりエポキシ基又はオキセタン基が少ないと、最終的に得られる感光性樹脂(A)中で光架橋点として機能する二重結合当量が高くなるため、所望の耐熱性や塗膜耐性が得られにくくなる。また、上記モル比の範囲よりエポキシ基又はオキセタン基が多い場合、余剰のエポキシ基又はオキセタン基とエチレン性不飽和基とを有する化合物(f)により最終塗膜のフレキシブル性が低下する傾向にある。 Next, the hydroxyl group-containing resin (A-1) obtained in the third step of the present invention will be described. The hydroxyl group-containing resin (A-1) of the present invention can be obtained by reacting the carboxyl group-containing resin (e) with a compound (f) having an epoxy group or oxetane group and an ethylenically unsaturated group. The carboxyl group in the carboxyl group-containing resin (e) and the epoxy group or oxetane group in the compound (f) having an epoxy group or oxetane group and an ethylenically unsaturated group are converted into a carboxyl group / epoxy group or oxetane group. It is preferable to prepare it by reacting at a molar ratio of 1 / 0.1 to 1/1. When the epoxy group or oxetane group is less than the above molar ratio range, the double bond equivalent functioning as a photo-crosslinking point in the finally obtained photosensitive resin (A) becomes high. It becomes difficult to obtain resistance. Moreover, when there are more epoxy groups or oxetane groups than the range of the said molar ratio, it exists in the tendency for the flexibility of a final coating film to fall with the compound (f) which has an excess epoxy group or oxetane group, and an ethylenically unsaturated group. .
本発明で用いるエポキシ基又はオキセタン基とエチレン性不飽和基とを有する化合物(f)は、エポキシ基又はオキセタン基とエチレン性不飽和基とを分子内に1個以上含有する化合物であればよく、特に限定されるものではない。例えば、グリシジル(メタ)アクリレート、グリシジル桂皮酸、4−ヒドロキシブチル(メタ)アクリレートグリシジルエーテル、グリシジルアリルエーテル、2,3−エポキシ−2−メチルプロピル(メタ)アクリレート、(3,4−エポキシシクロヘキシル)メチル(メタ)アクリレート、4−ビニル−1−シクロヘキセン−1,2−エポキシド、1,3−ブタジエンモノエポキシド、オキセタニル(メタ)アクリレート、オキセタニル桂皮酸、又、ペンタエリスリトールトリアクリレートなどの、水酸基含有多官能アクリルモノマーの水酸基に、エピクロルヒドリンを反応させた多官能アクリレート基含有モノエポキシドや、フェノールノボラック型エポキシ樹脂のエポキシ基の大半をアクリル酸などでアクリレート基に変性することで得られる、平均で1分子中に1つのエポキシ基を残した多官能アクリレート基含有モノエポキシド、カルボキシル基含有多官能アクリルモノマーのカルボキシル基に、分子内に2個以上のエポキシ基を有する化合物のエポキシ基の一部を反応させることで得られる多官能アクリレート基含有モノエポキシド等が挙げられ、これらのエポキシ基又はオキセタン基を、カルボキシル基含有樹脂(e)中のカルボキシル基と反応させることで、ヒドロキシル基含有樹脂(A−1)が得られる。本発明において、エポキシ基又はオキセタン基とエチレン性不飽和基とを有する化合物(f)は、一種のみを単独で用いても良いし、複数を併用しても良い。 The compound (f) having an epoxy group or oxetane group and an ethylenically unsaturated group used in the present invention may be any compound containing at least one epoxy group or oxetane group and an ethylenically unsaturated group in the molecule. There is no particular limitation. For example, glycidyl (meth) acrylate, glycidyl cinnamic acid, 4-hydroxybutyl (meth) acrylate glycidyl ether, glycidyl allyl ether, 2,3-epoxy-2-methylpropyl (meth) acrylate, (3,4-epoxycyclohexyl) Many hydroxyl-containing groups such as methyl (meth) acrylate, 4-vinyl-1-cyclohexene-1,2-epoxide, 1,3-butadiene monoepoxide, oxetanyl (meth) acrylate, oxetanylcinnamic acid, and pentaerythritol triacrylate Modification of most epoxide groups of polyfunctional acrylate groups by reacting epichlorohydrin with hydroxyl groups of functional acrylic monomers, and phenol novolac epoxy resins to acrylate groups with acrylic acid, etc. Epoxy of the compound which has two or more epoxy groups in the molecule to the carboxyl group of the polyfunctional acrylate group-containing monoepoxide and carboxyl group-containing polyfunctional acrylic monomer, in which one epoxy group remains in one molecule on average Polyfunctional acrylate group-containing monoepoxide obtained by reacting a part of the group, and the like. By reacting these epoxy group or oxetane group with the carboxyl group in the carboxyl group-containing resin (e), hydroxyl group is obtained. A group-containing resin (A-1) is obtained. In the present invention, the compound (f) having an epoxy group or oxetane group and an ethylenically unsaturated group may be used alone or in combination.
なかでも、グリシジル(メタ)アクリレート、4−ヒドロキシブチル(メタ)アクリレートグリシジルエーテルなどは、本発明において、カルボキシル基と反応性に富み、又、感光性が非常に優れるため特に好ましい。 Among them, glycidyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate glycidyl ether, and the like are particularly preferable in the present invention because they are highly reactive with carboxyl groups and are very excellent in photosensitivity.
又、本発明において、エチレン性不飽和基を有さず、エポキシ基又はオキセタン基を有する化合物を、エポキシ基又はオキセタン基とエチレン性不飽和基とを有する化合物(b)と併用して用いることもできる。この場合、本発明のカルボキシル基含有感光性ウレタン樹脂(A)の感光性をより幅広く制御することが可能である。本発明の、エチレン性不飽和基を有さず、エポキシ基又はオキセタン基を有する化合物としては、例えば、スチレンオキシド、フェニルグリシジルエーテル、o−フェニルフェノールグリシジルエーテル、p−フェニルフェノールグリシジルエーテル、グリシジルシンナメート、メチルグリシジルエーテル、ブチルグリシジルエーテル、2−エチルヘキシルグリシジルエーテル、デシルグリシジルエーテル、ステアリルグリシジルエーテル、アリルグリシジルエーテル、グリシドール、N−グリシジルフタルイミド、1,3−ジブロモフェニルグリシジルエーテル、セロキサイド2000(ダイセル化学工業株式会社製)、オキセタンアルコール等が挙げられる。 In the present invention, a compound having no ethylenically unsaturated group and having an epoxy group or oxetane group is used in combination with the compound (b) having an epoxy group or oxetane group and an ethylenically unsaturated group. You can also. In this case, it is possible to control the photosensitivity of the carboxyl group-containing photosensitive urethane resin (A) of the present invention more broadly. Examples of the compound having no ethylenically unsaturated group and having an epoxy group or oxetane group of the present invention include styrene oxide, phenyl glycidyl ether, o-phenylphenol glycidyl ether, p-phenylphenol glycidyl ether, glycidyl cinnamon. Mate, methyl glycidyl ether, butyl glycidyl ether, 2-ethylhexyl glycidyl ether, decyl glycidyl ether, stearyl glycidyl ether, allyl glycidyl ether, glycidol, N-glycidyl phthalimide, 1,3-dibromophenyl glycidyl ether, Celoxide 2000 (Daicel Chemical Industries) And oxetane alcohol).
本発明において、ヒドロキシル基含有樹脂(A−1)の合成条件は特に限定されるものではなく、公知の条件で行うことができる。例えば、フラスコに、酸素存在下、前記カルボキシル基含有樹脂(e)、エポキシ基又はオキセタン基とエチレン性不飽和基とを有する化合物(f)、および溶剤を仕込み、撹拌しながら25〜150℃で加熱することでヒドロキシル基含有樹脂(A−1)を得ることができる。この際、反応促進のために必要に応じて3級アミノ基含有化合物等の反応触媒を添加したり、あるいは、重合反応や重合進行によるゲル化等を起こすことのないよう、エチレン性不飽和基の重合禁止剤や分子状酸素を用いたりすることもできる。 In the present invention, the synthesis conditions of the hydroxyl group-containing resin (A-1) are not particularly limited, and can be performed under known conditions. For example, in the presence of oxygen, the flask is charged with the carboxyl group-containing resin (e), the compound (f) having an epoxy group or oxetane group and an ethylenically unsaturated group, and a solvent at 25 to 150 ° C. with stirring. The hydroxyl group-containing resin (A-1) can be obtained by heating. At this time, an ethylenically unsaturated group may be added so as not to add a reaction catalyst such as a tertiary amino group-containing compound or the like to promote the reaction, or to cause gelation due to polymerization reaction or progress of polymerization. It is also possible to use a polymerization inhibitor or molecular oxygen.
重合禁止剤としては、ハイドロキノン、メチルハイドロキノン、p−t−ブチルカテコール、2−t−ブチルハイドロキノン、2,5−ジ−t−ブチルハイドロキノン、トリメチルハイドロキノン、メトキシハイドロキノン、p−ベンゾキノン、2,5−ジ−t−ブチルベンゾキノン、ナフトキノン、フェノチアジン、N−オキシル化合物等を用いることができる。また、分子状酸素を反応容器内に存在させても重合禁止効果があり、例えば空気、あるいは空気と窒素等の不活性ガスとの混合ガス等を反応容器に吹き込む、いわゆるバブリングを行えばよい。重合禁止効果を高めるには、重合禁止剤と分子状酸素とを併用することが好ましい。
As the polymerization inhibitor, hydroquinone, methylhydroquinone, pt-butylcatechol, 2-t-butylhydroquinone, 2,5-di-t-butylhydroquinone, trimethylhydroquinone, methoxyhydroquinone, p-benzoquinone, 2,5- Di-t-butylbenzoquinone, naphthoquinone, phenothiazine, N-oxyl compound and the like can be used. Further, even if molecular oxygen is present in the reaction vessel, there is an effect of inhibiting polymerization. For example, air or a mixed gas of air and an inert gas such as nitrogen may be blown into the reaction vessel so-called bubbling. In order to enhance the polymerization inhibition effect, it is preferable to use a polymerization inhibitor and molecular oxygen in combination.
次に、本発明の第四の工程で得られるカルボキシル基含有感光性樹脂(A−2)について説明する。本発明のカルボキシル基含有感光性樹脂(A−2)は、前記ヒドロキシル基含有樹脂(A−1)と多塩基酸無水物(d)とを反応させて得ることができ、ヒドロキシル基含有樹脂(A−1)中の水酸基と、多塩基酸無水物(d)中の酸無水物基とを、水酸基/酸無水物基=1/0.01〜1/1のモル比で反応させて作製することが好ましい。上記モル比の範囲より酸無水物基が少ないと、最終的に得られる感光性樹脂(A)中で架橋点として機能するカルボキシル基濃度が少なくなるため所望の耐熱性やアルカリ現像液に対する溶解性が得られにくくなる。また、上記モル比の範囲より酸無水物基が多い場合、余剰の多塩基酸無水物(d)により最終塗膜のフレキシブル性や半田耐熱性、絶縁信頼性が低下する傾向にある。 Next, the carboxyl group-containing photosensitive resin (A-2) obtained in the fourth step of the present invention will be described. The carboxyl group-containing photosensitive resin (A-2) of the present invention can be obtained by reacting the hydroxyl group-containing resin (A-1) with the polybasic acid anhydride (d). Prepared by reacting the hydroxyl group in A-1) with the acid anhydride group in the polybasic acid anhydride (d) at a molar ratio of hydroxyl group / acid anhydride group = 1 / 0.01 to 1/1. It is preferable to do. If there are less acid anhydride groups than the above molar ratio range, the concentration of carboxyl groups that function as crosslinking points in the finally obtained photosensitive resin (A) will decrease, so the desired heat resistance and solubility in alkaline developer Is difficult to obtain. Moreover, when there are more acid anhydride groups than the said molar ratio range, it exists in the tendency for the flexibility of a final coating film, solder heat resistance, and insulation reliability to fall with an excess polybasic acid anhydride (d).
本発明で用いる多塩基酸無水物(d)は、前述の通り、酸無水物基を分子内に1個以上含有する化合物であればよく、特に限定されるものではなく、一種のみを単独で用いても良いし、複数を併用しても良い。なかでも、無水コハク酸、テトラヒドロ無水フタル酸などは、本発明において、現像性、パターン形成性および塗膜耐性が非常に優れるため特に好ましい。 As described above, the polybasic acid anhydride (d) used in the present invention is not particularly limited as long as it is a compound containing at least one acid anhydride group in the molecule. You may use and you may use multiple together. Of these, succinic anhydride, tetrahydrophthalic anhydride, and the like are particularly preferable in the present invention because of their excellent developability, pattern formability, and coating film resistance.
本発明において、カルボキシル基含有感光性樹脂(A−2)の合成条件は特に限定されるものではなく、第三の工程と同様、フラスコに、酸素存在下、前記ヒドロキシル基含有樹脂(A−1)、多塩基酸無水物(d)、および溶剤を仕込み、25〜150℃で加熱撹拌しながら加熱することで反応させることが好ましく、必要に応じて適した反応触媒及びエチレン性不飽和基の重合禁止剤を新たに追加することもできる。
In the present invention, the synthesis condition of the carboxyl group-containing photosensitive resin (A-2) is not particularly limited, and the hydroxyl group-containing resin (A-1) is added to the flask in the presence of oxygen in the same manner as in the third step. ), A polybasic acid anhydride (d), and a solvent are charged, and the reaction is preferably performed by heating and stirring at 25 to 150 ° C., and if necessary, a suitable reaction catalyst and an ethylenically unsaturated group A polymerization inhibitor can be newly added.
以上の工程により得られる本発明の感光性樹脂(A)の酸価は、10〜200mgKOH/gであることが好ましく、より好ましくは30〜150mgKOH/gである。酸価が10mgKOH/g未満の場合、充分な現像性が得られにくいことがあり、例えば、現像時に皮膜を溶解させて取り除きたい部分に、残渣として皮膜が残る場合がある。又、酸価が200mgKOH/gを超える場合、現像液に対する塗膜の溶解性が高くなり、光硬化させてパターンとして残したい部分までもが溶解し、パターンの形状が悪化する場合がある。 It is preferable that the acid value of the photosensitive resin (A) of this invention obtained by the above process is 10-200 mgKOH / g, More preferably, it is 30-150 mgKOH / g. When the acid value is less than 10 mg KOH / g, sufficient developability may be difficult to obtain. For example, the film may remain as a residue in a portion where the film is dissolved and removed during development. On the other hand, when the acid value exceeds 200 mgKOH / g, the solubility of the coating film in the developer increases, and even the portion that is desired to be photocured and left as a pattern is dissolved, and the shape of the pattern may deteriorate.
本発明の感光性樹脂(A)のエチレン性不飽和基当量は、200〜5000g/eqであることが好ましく、より好ましくは、300〜3000g/eqである。エチレン性不飽和基当量が200g/eq未満の場合、光感度が高すぎることがあり、現像時に皮膜を溶解させて取り除きたい部分までもが光で硬化してしまい、良好なパターン形状が得られない場合がある。エチレン性不飽和基当量が5000g/eqを超える場合、光感度が低すぎることがあり、光硬化させたい部分が充分硬化せず、現像時にパターンが溶解することで、良好なパターン形状が得られない場合がある。なお、本発明でいう「エチレン性不飽和基当量」とは、樹脂の合成時に使用した原材料の重量から算出される理論値であって、樹脂の重量を、樹脂中に存在するエチレン性不飽和基の数で除したものであり、エチレン性不飽和基1モルあたりの樹脂の重量、すなわち、エチレン性不飽和基濃度の逆数に相当するものである。 It is preferable that the ethylenically unsaturated group equivalent of the photosensitive resin (A) of this invention is 200-5000 g / eq, More preferably, it is 300-3000 g / eq. When the ethylenically unsaturated group equivalent is less than 200 g / eq, the photosensitivity may be too high, and even the part to be removed by dissolving the film during development is cured by light, and a good pattern shape is obtained. There may not be. When the ethylenically unsaturated group equivalent exceeds 5000 g / eq, the photosensitivity may be too low, the portion to be photocured may not be sufficiently cured, and the pattern dissolves during development, thereby obtaining a good pattern shape. There may not be. The “ethylenically unsaturated group equivalent” as used in the present invention is a theoretical value calculated from the weight of raw materials used during the synthesis of the resin, and the weight of the resin is the ethylenically unsaturated group present in the resin. It is divided by the number of groups and corresponds to the weight of the resin per mole of ethylenically unsaturated groups, ie, the reciprocal of the ethylenically unsaturated group concentration.
本発明の感光性樹脂(A)の重量平均分子量は、1000〜100000であることが好ましく、より好ましくは、3000〜60000である。重量平均分子量が1000未満の場合、充分な半田耐熱性および可撓性が得られない可能性がある。又、重量平均分子量が100000を超える場合は、半田耐熱性に優れるものの、現像性が悪化する可能性があり、又、塗工時の粘度やハンドリングが課題となる場合がある。
It is preferable that the weight average molecular weights of the photosensitive resin (A) of this invention are 1000-100000, More preferably, it is 3000-60000. If the weight average molecular weight is less than 1000, sufficient solder heat resistance and flexibility may not be obtained. On the other hand, when the weight average molecular weight exceeds 100,000, the solder heat resistance is excellent, but the developability may be deteriorated, and the viscosity and handling at the time of coating may be problems.
感光性樹脂(A)の合成に使用する溶剤は、最終用途や、反応物の溶解性に応じて適宜選択することができる。例えば、ドライフィルム型感光性ソルダーレジストを最終用途とする場合、ドライフィルム作成工程において、溶剤をすばやく乾燥させる必要があるため、低沸点の溶剤を用いることが好ましい。この場合の低沸点溶剤としては、メチルエチルケトン、メチルイソブチルケトン、酢酸エチル、酢酸ブチル、テトラヒドロフラン、トルエン、イソプロピルアルコール等が挙げられる。又、液状ソルダーレジストインキを最終用途とする場合、インキ作成工程において、フィラーや顔料等をロールで混錬する過程や、インキとしての保存安定性を考慮すると、極力溶剤の揮発を抑制する必要があるため、高沸点の溶剤を用いることが好ましい。この場合の高沸点溶剤としては、カルビトールアセテート、メトキシプロピルアセテート、シクロヘキサノン、ジイソブチルケトン等が挙げられる。 The solvent used for the synthesis of the photosensitive resin (A) can be appropriately selected according to the end use and the solubility of the reactant. For example, when a dry film type photosensitive solder resist is used as the final application, it is preferable to use a low-boiling solvent because the solvent needs to be quickly dried in the dry film preparation step. Examples of the low boiling point solvent in this case include methyl ethyl ketone, methyl isobutyl ketone, ethyl acetate, butyl acetate, tetrahydrofuran, toluene, isopropyl alcohol and the like. In addition, when liquid solder resist ink is used as the final application, it is necessary to suppress the volatilization of the solvent as much as possible in consideration of the process of kneading fillers and pigments with rolls in the ink preparation process and the storage stability as ink. Therefore, it is preferable to use a high boiling point solvent. Examples of the high boiling point solvent in this case include carbitol acetate, methoxypropyl acetate, cyclohexanone, diisobutyl ketone and the like.
本発明において、これらの溶剤は、必要に応じて一種のみを単独で用いても良いし、複数を併用しても良く、又、反応過程で脱溶剤を行ったり、脱溶剤後、新たに別の溶剤を添加したりしても良い。 In the present invention, these solvents may be used alone or in combination, if necessary, and may be used in combination. Or a solvent may be added.
本発明の感光性樹脂組成物は、上記感光性樹脂(A)と、エポキシ基含有化合物、イソシアネート基含有化合物、およびブロック化イソシアネート基含有化合物からなる群より選ばれる少なくとも一種である硬化剤(B)および光重合開始剤(C)を含むものである。ここで、エポキシ基含有化合物、イソシアネート基含有化合物、およびブロック化イソシアネート基含有化合物からなる群より選ばれる少なくとも一種である硬化剤(B)〔以下、単に「硬化剤(B)」とも表記する。〕について説明する。本発明の感光性樹脂組成物は、上述した感光性樹脂(A)の硬化剤として、硬化剤(B)を使用することを特徴とする。
The photosensitive resin composition of the present invention is a curing agent (B) selected from the group consisting of the photosensitive resin (A), an epoxy group-containing compound, an isocyanate group-containing compound, and a blocked isocyanate group-containing compound. ) And a photopolymerization initiator (C). Here, the curing agent (B) that is at least one selected from the group consisting of an epoxy group-containing compound, an isocyanate group-containing compound, and a blocked isocyanate group-containing compound [hereinafter also simply referred to as “curing agent (B)”. ] Will be described. The photosensitive resin composition of the present invention is characterized by using a curing agent (B) as a curing agent for the above-described photosensitive resin (A).
本発明におけるエポキシ基含有化合物としては、分子内にエポキシ基を含有する化合物であればよく、特に限定されるものではない。例えば、分子内にエポキシ基を1個有する化合物としては、N−グリシジルフタルイミド、グリシドール、グリシジル(メタ)アクリレート等の化合物が挙げられる。これらは、次に例示する分子内にエポキシ基を2個以上有する化合物と、必要に応じて併用することで、硬化物の架橋密度を制御する目的で好適に用いることができる。また、エポキシ基を分子内に2個以上含有する化合物としては、エチレングリコールジグリシジルエーテル、ポリエチレングリコールジグリシジルエーテル、1,6−ヘキサンジオールジグリシジルエーテル、ビスフェノールA・エピクロロヒドリン型エポキシ樹脂、ビスフェノールF・エピクロロヒドリン型エポキシ樹脂、ビスフェノールS・エピクロロヒドリン型エポキシ樹脂、ビスフェノールAD・エピクロロヒドリン型エポキシ樹脂、ビフェノール・エピクロロヒドリン型エポキシ樹脂、ビスフェノールAのエチレンオキシド付加体もしくはプロピレンオキシド付加体のエピクロロヒドリン型エポキシ樹脂、グリセリン・エピクロロヒドリン付加物のポリグリシジルエーテル、ナフタレンジオールジグリシジルエーテル、レゾルシノールジグリシジルエーテル、ポリブタジエンジグリシジルエーテル、ヒドロキノンジグリシジルエーテル、ジブロモネオペンチルグリコールジグリシジルエーテル、ネオペンチルグリコールジグリシジルエーテル、ヘキサヒドロフタル酸ジグリシジルエステル、水添ビスフェノールA型ジグリシジルエーテル、ポリプロピレングリコールジグリシジルエーテル、ジフェニルスルホンジグリシジルエーテル、ジヒドロキシベンゾフェノンジグリシジルエーテル、ビフェノールジグリシジルエーテル、ジフェニルメタンジグリシジルエーテル、ビスフェノールフルオレンジグリシジルエーテル、ビスクレゾールフルオレンジグリシジルエーテル、ビスフェノキシエタノールフルオレンジグリシジルエーテル、1,3−ビス(N,N−ジグリシジルアミノメチル)シクロヘキサン、N,N−ジグリシジルアニリン、N,N−ジグリシジルトルイジン、特開2004−156024号公報、特開2004−315595号公報、特開2004−323777号公報に開示されている柔軟性に優れたエポキシ化合物や、下記式(4)〜(6)で表される構造のエポキシ化合物等が挙げられる。 The epoxy group-containing compound in the present invention is not particularly limited as long as it is a compound containing an epoxy group in the molecule. For example, examples of the compound having one epoxy group in the molecule include compounds such as N-glycidylphthalimide, glycidol, and glycidyl (meth) acrylate. These can be suitably used for the purpose of controlling the crosslink density of the cured product by using together with a compound having two or more epoxy groups in the molecule exemplified below as needed. Examples of the compound containing two or more epoxy groups in the molecule include ethylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, 1,6-hexanediol diglycidyl ether, bisphenol A / epichlorohydrin type epoxy resin, Bisphenol F / epichlorohydrin type epoxy resin, bisphenol S / epichlorohydrin type epoxy resin, bisphenol AD / epichlorohydrin type epoxy resin, biphenol / epichlorohydrin type epoxy resin, ethylene oxide adduct of bisphenol A or Propylene oxide adduct epichlorohydrin type epoxy resin, glycerin / epichlorohydrin adduct polyglycidyl ether, naphthalenediol diglycidyl ether, resorcino Rudiglycidyl ether, polybutadiene diglycidyl ether, hydroquinone diglycidyl ether, dibromoneopentyl glycol diglycidyl ether, neopentyl glycol diglycidyl ether, hexahydrophthalic acid diglycidyl ester, hydrogenated bisphenol A type diglycidyl ether, polypropylene glycol diglycidyl Ether, diphenylsulfone diglycidyl ether, dihydroxybenzophenone diglycidyl ether, biphenol diglycidyl ether, diphenylmethane diglycidyl ether, bisphenol full orange glycidyl ether, biscresol full orange glycidyl ether, bisphenoxyethanol full orange glycidyl ether, 1,3-bis ( N, N-diglycidyl Minomethyl) cyclohexane, N, N-diglycidylaniline, N, N-diglycidyltoluidine, Japanese Patent Application Laid-Open Nos. 2004-156024, 2004-315595, and 2004-323777. And an epoxy compound having a structure represented by the following formulas (4) to (6).
式(4)
式(5)
式(6)
さらに、トリスヒドロキシエチルイソシアヌレートトリグリシジルエーテル、トリグリシジルイソシアヌレート、三菱化学株式会社製「エピコート1031S」、「エピコート1032H60」、「エピコート604」、「エピコート630」の他、フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、特開2001-240654号公報に開示されているジシクロペンタジエン型エポキシ樹脂、ナフタレン型エポキシ樹脂、エチレングリコール・エピクロルヒドリン付加物のポリグリシジルエーテル、ペンタエリスリトールポリグリシジルエーテル、トリメチロールプロパンポリグリシジルエーテル、N,N,N’,N’−テトラグリシジル−m−キシレンジアミン、等が挙げられる。また、エポキシ基以外の他の熱硬化性基を併有する化合物も使用できる。例えば、特開2001−59011号公報や、2003−48953号公報に開示されているシラン変性エポキシ樹脂が挙げられる。 Further, trishydroxyethyl isocyanurate triglycidyl ether, triglycidyl isocyanurate, “Epicoat 1031S”, “Epicoat 1032H60”, “Epicoat 604”, “Epicoat 630” manufactured by Mitsubishi Chemical Corporation, phenol novolac epoxy resin, cresol Novolac type epoxy resin, dicyclopentadiene type epoxy resin, naphthalene type epoxy resin, polyglycidyl ether of ethylene glycol / epichlorohydrin adduct, pentaerythritol polyglycidyl ether, trimethylol propane poly, disclosed in JP-A-2001-240654 Examples thereof include glycidyl ether, N, N, N ′, N′-tetraglycidyl-m-xylenediamine, and the like. Moreover, the compound which has other thermosetting groups other than an epoxy group can also be used. For example, the silane modified epoxy resin currently disclosed by Unexamined-Japanese-Patent No. 2001-59011 and 2003-48953 is mentioned.
特に、トリスヒドロキシエチルイソシアヌレートトリグリシジルエーテル、トリグリシジルイソシアヌレート等のイソシアヌレート環含有エポキシ化合物は、本発明に使用した場合、ポリイミドや銅に対して接着強度が向上する傾向があり、好ましい。また、三菱化学株式会社製「エピコート1031S」、「エピコート1032H60」、「エピコート604」、「エピコート630」は、多官能であり、かつ、耐熱性に優れるため、本発明において非常に好ましく、また、脂肪族系のエポキシ化合物や、特開2004−156024号公報、特開2004−315595号公報、特開2004−323777号公報記載のエポキシ化合物は、硬化塗膜の柔軟性に優れるため、好ましい。また、特開2001−240654号公報記載のジシクロペンタジエン型エポキシ化合物や、フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、ビフェノール・エピクロロヒドリン型エポキシ樹脂、などは、本発明において、熱硬化性および吸湿性や耐熱性をはじめとする硬化塗膜の耐久性の面で優れており好ましい。 In particular, isocyanurate ring-containing epoxy compounds such as trishydroxyethyl isocyanurate triglycidyl ether and triglycidyl isocyanurate are preferred because they tend to improve the adhesion strength to polyimide and copper when used in the present invention. Also, “Epicoat 1031S”, “Epicoat 1032H60”, “Epicoat 604”, and “Epicoat 630” manufactured by Mitsubishi Chemical Corporation are highly functional in the present invention because they are multifunctional and have excellent heat resistance. Aliphatic epoxy compounds and epoxy compounds described in JP-A Nos. 2004-156024, 2004-315595, and 2004-323777 are preferable because they are excellent in flexibility of a cured coating film. In addition, the dicyclopentadiene type epoxy compound, the phenol novolak type epoxy resin, the cresol novolak type epoxy resin, the biphenol / epichlorohydrin type epoxy resin, etc. described in JP-A No. 2001-240654 are thermally cured in the present invention. It is excellent in terms of durability of a cured coating film including properties, hygroscopicity and heat resistance, and is preferable.
イソシアネート基含有化合物としては、イソシアネート基を分子内に有する化合物であればよく、特に限定されるものではない。具体的には、ジイソシアネート化合物としては、例えば、炭素数4〜50の芳香族ジイソシアネート、脂肪族ジイソシアネート、芳香脂肪族ジイソシアネート、脂環族ジイソシアネート等を挙げることができる。 The isocyanate group-containing compound is not particularly limited as long as it is a compound having an isocyanate group in the molecule. Specific examples of the diisocyanate compound include aromatic diisocyanates having 4 to 50 carbon atoms, aliphatic diisocyanates, araliphatic diisocyanates, and alicyclic diisocyanates.
芳香族ジイソシアネートとしては、例えば、1,3−フェニレンジイソシアネート、4,4’−ジフェニルジイソシアネート、1,4−フェニレンジイソシアネート、4,4’−ジフェニルメタンジイソシアネート、2,4−トリレンジイソシアネート、2,6−トリレンジイソシアネート、4,4’−トルイジンジイソシアネート、2,4,6−トリイソシアネートトルエン、1,3,5−トリイソシアネートベンゼン、ジアニシジンジイソシアネート、4,4’−ジフェニルエーテルジイソシアネート、4,4’,4”−トリフェニルメタントリイソシアネート等を挙げることができる。 Examples of the aromatic diisocyanate include 1,3-phenylene diisocyanate, 4,4′-diphenyl diisocyanate, 1,4-phenylene diisocyanate, 4,4′-diphenylmethane diisocyanate, 2,4-tolylene diisocyanate, 2,6- Tolylene diisocyanate, 4,4'-toluidine diisocyanate, 2,4,6-triisocyanate toluene, 1,3,5-triisocyanate benzene, dianisidine diisocyanate, 4,4'-diphenyl ether diisocyanate, 4,4 ', 4 "-Triphenylmethane triisocyanate etc. can be mentioned.
脂肪族ジイソシアネートとしては、例えば、トリメチレンジイソシアネート、テトラメチレンジイソシアネート、ヘキサメチレンジイソシアネート、ペンタメチレンジイソシアネート、1,2−プロピレンジイソシアネート、2,3−ブチレンジイソシアネート、1,3−ブチレンジイソシアネート、ドデカメチレンジイソシアネート、2,4,4−トリメチルヘキサメチレンジイソシアネート等を挙げることができる。 Examples of the aliphatic diisocyanate include trimethylene diisocyanate, tetramethylene diisocyanate, hexamethylene diisocyanate, pentamethylene diisocyanate, 1,2-propylene diisocyanate, 2,3-butylene diisocyanate, 1,3-butylene diisocyanate, dodecamethylene diisocyanate, 2 4,4-trimethylhexamethylene diisocyanate and the like.
芳香脂肪族ジイソシアネートとしては、例えばω,ω’−ジイソシアネート−1,3−ジメチルベンゼン、ω,ω’−ジイソシアネート−1,4−ジメチルベンゼン、ω,ω’−ジイソシアネート−1,4−ジエチルベンゼン、1,4−テトラメチルキシリレンジイソシアネート、1,3−テトラメチルキシリレンジイソシアネート等を挙げることができる。 Examples of the araliphatic diisocyanate include ω, ω′-diisocyanate-1,3-dimethylbenzene, ω, ω′-diisocyanate-1,4-dimethylbenzene, ω, ω′-diisocyanate-1,4-diethylbenzene, 1 , 4-tetramethylxylylene diisocyanate, 1,3-tetramethylxylylene diisocyanate, and the like.
脂環族ジイソシアネートとしては、例えば3−イソシアネートメチル−3,5,5−トリメチルシクロヘキシルイソシアネート[別名:イソホロンジイソシアネート]、1,3−シクロペンタンジイソシアネート、1,3−シクロヘキサンジイソシアネート、1,4−シクロヘキサンジイソシアネート、メチル−2,4−シクロヘキサンジイソシアネート、メチル−2,6−シクロヘキサンジイソシアネート、4,4’−メチレンビス(シクロヘキシルイソシアネート)、1,3−ビス(イソシアネートメチル)シクロヘキサン、1,4−ビス(イソシアネートメチル)シクロヘキサン等を挙げることができる。 Examples of the alicyclic diisocyanate include 3-isocyanate methyl-3,5,5-trimethylcyclohexyl isocyanate [also known as isophorone diisocyanate], 1,3-cyclopentane diisocyanate, 1,3-cyclohexane diisocyanate, and 1,4-cyclohexane diisocyanate. , Methyl-2,4-cyclohexane diisocyanate, methyl-2,6-cyclohexane diisocyanate, 4,4′-methylenebis (cyclohexyl isocyanate), 1,3-bis (isocyanatomethyl) cyclohexane, 1,4-bis (isocyanate methyl) A cyclohexane etc. can be mentioned.
分子中にイソシアネート基を1個または3個以上有するイソシアネート基含有化合物としては、具体的には、1分子中に1個のイソシアネート基を有する単官能イソシアネートとして、(メタ)アクリロイルオキシエチルイソシアネート、1,1−ビス[(メタ)アクリロイルオキシメチル]エチルイソシアネート、ビニルイソシアネート、アリルイソシアネート、(メタ)アクリロイルイソシアネート、イソプロペニル−α,α−ジメチルベンジルイソシアネート等が挙げられる。また、1,6−ジイソシアナトヘキサン、ジイソシアン酸イソホロン、ジイソシアン酸4,4’−ジフェニルメタン、ポリメリックジフェニルメタンジイソシアネート、キシリレンジイソシアネート、2,4−ジイソシアン酸トリレン、ジイソシアン酸トルエン、2,4−ジイソシアン酸トルエン、ジイソシアン酸ヘキサメチレン、ジイソシアン酸4−メチル−m−フェニレン、ナフチレンジイソシアネート、パラフェニレンジイソシアネート、テトラメチルキシリレンジイソシアネート、シクロヘキシルメタンジイソシアネート、水添キシリレンジイソシアネート、シクロヘキシルジイソシアネート、トリジンジイソシアネート、2,2,4−トリメチルヘキサメチレンジイソシアネート、2,4,4−トリメチルヘキサメチレンジイソシアネート、m−テトラメチルキシリレンジイソシアネート、p−テトラメチルキシリレンジイソシアネート、ダイマー酸ジイソシアネート等のジイソシアン酸エステル化合物と水酸基、カルボキシル基、アミド基含有ビニルモノマーとを等モルで反応せしめた化合物もイソシアン酸エステル化合物として使用することができる。 Specific examples of the isocyanate group-containing compound having one or more isocyanate groups in the molecule include (meth) acryloyloxyethyl isocyanate, monofunctional isocyanate having one isocyanate group in one molecule, , 1-bis [(meth) acryloyloxymethyl] ethyl isocyanate, vinyl isocyanate, allyl isocyanate, (meth) acryloyl isocyanate, isopropenyl-α, α-dimethylbenzyl isocyanate, and the like. In addition, 1,6-diisocyanatohexane, isophorone diisocyanate, 4,4′-diphenylmethane diisocyanate, polymeric diphenylmethane diisocyanate, xylylene diisocyanate, tolylene 2,4-diisocyanate, toluene diisocyanate, 2,4-diisocyanic acid Toluene, hexamethylene diisocyanate, 4-methyl-m-phenylene diisocyanate, naphthylene diisocyanate, paraphenylene diisocyanate, tetramethylxylylene diisocyanate, cyclohexylmethane diisocyanate, hydrogenated xylylene diisocyanate, cyclohexyl diisocyanate, tolidine diisocyanate, 2,2 , 4-Trimethylhexamethylene diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate Nitrate, m-tetramethylxylylene diisocyanate, p-tetramethylxylylene diisocyanate, diisocyanate ester compounds such as dimer acid diisocyanate and hydroxyl group, carboxyl group, and amide group-containing vinyl monomers are reacted in equimolar amounts. It can be used as an ester compound.
また、1分子中に3個以上のイソシアネート基を有する多官能イソシアネートとしては、例えば、芳香族ポリイソシアネート、リジントリイソシアネートなどの脂肪族ポリイソシアネート、芳香脂肪族ポリイソシアネート、脂環族ポリイソシアネート等が挙げられ、前述したジイソシアネートのトリメチロールプロパンアダクト体、水と反応したビュウレット体、イソシアヌレート環を有する3量体が挙げられる。 Examples of the polyfunctional isocyanate having 3 or more isocyanate groups in one molecule include aliphatic polyisocyanates such as aromatic polyisocyanates and lysine triisocyanates, araliphatic polyisocyanates, and alicyclic polyisocyanates. Examples thereof include trimethylolpropane adducts of diisocyanate described above, burettes reacted with water, and trimers having an isocyanurate ring.
ブロック化イソシアネート基含有化合物としては、イソシアネート基がε−カプロラクタムやMEKオキシム等で保護されたイソシアネート基含有化合物であればよく、特に限定されるものではない。具体的には、上記イソシアネート基含有化合物のイソシアネート基を、ε−カプロラクタム、MEKオキシム、シクロヘキサノンオキシム、ピラゾール、フェノール等でブロックしたものなどが挙げられる。 The blocked isocyanate group-containing compound is not particularly limited as long as the isocyanate group is an isocyanate group-containing compound protected with ε-caprolactam, MEK oxime, or the like. Specific examples include those obtained by blocking the isocyanate group of the isocyanate group-containing compound with ε-caprolactam, MEK oxime, cyclohexanone oxime, pyrazole, phenol and the like.
本発明において、硬化剤(B)は、一種のみを単独で用いてもよいし、複数を併用しても良い。硬化剤(B)の使用量は、本発明の硬化性樹脂組成物の用途等を考慮して決定すればよく、特に限定されるものではないが、感光性樹脂(A)100重量部に対して、0.5重量部〜100重量部の割合で加えることが好ましく、1重量部〜80重量部の割合で加えることがより好ましい。硬化剤(B)を使用することにより、本発明の感光性樹脂組成物の架橋密度を適度な値に調節することができるので、硬化後の塗膜の各種物性をより一層向上させることができる。硬化剤(B)の使用量が0.5重量部よりも少ないと、加熱硬化後の塗膜の架橋密度が低くなり過ぎ、所望の接着強度や耐熱性が不充分となる場合がある。また、該使用量が100重量部よりも多いと、加熱硬化後の架橋密度が高くなり過ぎ、その結果、塗膜の屈曲性、可撓性が低下し、接着強度をも著しく悪化させる場合がある。
In this invention, a hardening | curing agent (B) may be used individually by 1 type, and may use multiple together. The amount of the curing agent (B) used may be determined in consideration of the use of the curable resin composition of the present invention, and is not particularly limited, but is 100 parts by weight of the photosensitive resin (A). Thus, it is preferably added at a ratio of 0.5 to 100 parts by weight, more preferably 1 to 80 parts by weight. Since the crosslinking density of the photosensitive resin composition of the present invention can be adjusted to an appropriate value by using the curing agent (B), various physical properties of the cured coating film can be further improved. . If the amount of the curing agent (B) used is less than 0.5 parts by weight, the crosslinking density of the coating after heat curing becomes too low, and the desired adhesive strength and heat resistance may be insufficient. Further, if the amount used is more than 100 parts by weight, the crosslinking density after heat curing becomes too high, and as a result, the flexibility and flexibility of the coating film may be lowered, and the adhesive strength may be significantly deteriorated. is there.
次に、光重合開始剤(C)について説明する。光重合開始剤(C)は、紫外線により感光性化合物を硬化させる場合に添加される。光重合開始剤としては、光励起によってビニル重合を開始できる機能を有するものであれば特に限定はなく、例えばモノカルボニル化合物、ジカルボニル化合物、アセトフェノン化合物、ベンゾインエーテル化合物、アシルフォスフィンオキシド化合物、アミノカルボニル化合物等が使用できる。 Next, the photopolymerization initiator (C) will be described. The photopolymerization initiator (C) is added when the photosensitive compound is cured by ultraviolet rays. The photopolymerization initiator is not particularly limited as long as it has a function capable of initiating vinyl polymerization by photoexcitation. For example, a monocarbonyl compound, a dicarbonyl compound, an acetophenone compound, a benzoin ether compound, an acylphosphine oxide compound, an aminocarbonyl A compound etc. can be used.
具体的にモノカルボニル化合物としては、ベンゾフェノン、4−メチル−ベンゾフェノン、2,4,6−トリメチルベンゾフェノン、メチル−o−ベンゾイルベンゾエート、4−フェニルベンゾフェノン、4−(4−メチルフェニルチオ)フェニル−エネタノン、3,3’−ジメチル−4−メトキシベンゾフェノン、4−(1,3−アクリロイル−1,4,7,10,13−ペンタオキソトリデシル)ベンゾフェノン、3,3’4,4’−テトラ(t−ブチルペルオキシカルボニル)ベンゾフェノン、4−ベンゾイル−N,N,N−トリメチルベンゼンメタアンモニウムクロリド、2−ヒドロキシ−3−(4−ベンゾイル−フェノキシ)−N,N,N−トリメチル−1−プロパンアミン塩酸塩、4−ベンゾイル−N,N−ジメチル−n−[2−(1−オキソ−2−プロペニルオキシエチル)]メタアンモニウム臭酸塩、2−/4−iso−プロピルチオキサントン、2,4−ジエチルチオキサントン、2,4−ジクロロチオキサントン、1−クロロ−4−プロポキシチオキサントン、2−ヒドロキシ−3−(3,4−ジメチル−9−オキソ−9Hチオキサントン−2−イロキシ)−N,N,N−トリメチル−1−プロパンアミン塩酸塩、ベンゾイルメチレン−3−メチルナフト(1,2−d)チアゾリン等が挙げられる。 Specific examples of monocarbonyl compounds include benzophenone, 4-methyl-benzophenone, 2,4,6-trimethylbenzophenone, methyl-o-benzoylbenzoate, 4-phenylbenzophenone, 4- (4-methylphenylthio) phenyl-enetanone. 3,3′-dimethyl-4-methoxybenzophenone, 4- (1,3-acryloyl-1,4,7,10,13-pentaoxotridecyl) benzophenone, 3,3′4,4′-tetra ( t-butylperoxycarbonyl) benzophenone, 4-benzoyl-N, N, N-trimethylbenzenemethammonium chloride, 2-hydroxy-3- (4-benzoyl-phenoxy) -N, N, N-trimethyl-1-propanamine Hydrochloride, 4-benzoyl-N, N-dimethyl-n- [2 (1-Oxo-2-propenyloxyethyl)] metaammonium bromide, 2- / 4-iso-propylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 1-chloro-4-propoxythioxanthone 2-hydroxy-3- (3,4-dimethyl-9-oxo-9Hthioxanthone-2-yloxy) -N, N, N-trimethyl-1-propanamine hydrochloride, benzoylmethylene-3-methylnaphtho (1, 2-d) thiazoline and the like.
ジカルボニル化合物としては、1,7,7−トリメチル-ビシクロ[2.1.1]ヘプタン−2,3−ジオン、ベンザイル、2−エチルアントラキノン、9,10−フェナントレンキノン、メチル−α−オキソベンゼンアセテート、4−フェニルベンザイル等が挙げられる。 Examples of the dicarbonyl compound include 1,7,7-trimethyl-bicyclo [2.1.1] heptane-2,3-dione, benzyl, 2-ethylanthraquinone, 9,10-phenanthrenequinone, and methyl-α-oxobenzene. Examples include acetate and 4-phenylbenzyl.
アセトフェノン化合物としては、2−ヒドロキシ−2−メチル−1−フェニルプロパン−1−オン、1−(4−イソプロピルフェニル)2−ヒドロキシ−2−メチル−1−フェニルプロパン−1−オン、1−(4−イソプロピルフェニル)2−ヒドロキシ−ジ−2−メチル−1−フェニルプロパン−1−オン、1−ヒドロキシ−シクロヘキシル−フェニルケトン、2−ヒドロキシ−2−メチル−1−スチリルプロパン−1−オン重合物、ジエトキシアセトフェノン、ジブトキシアセトフェノン、2,2−ジメトキシ−1,2−ジフェニルエタン−1−オン、2,2−ジエトキシ−1,2−ジフェニルエタン−1−オン、2−メチル−1−[4−(メチルチオ)フェニル]−2−モルホリノプロパン−1−オン、2−ベンジル−2−ジメチルアミノ−1−(4−モルホリノ−フェニル)ブタン−1−オン、1−フェニル−1,2−プロパンジオン−2−(o−エトキシカルボニル)オキシム、3,6−ビス(2−メチル−2−モルホリノ−プロパノニル)−9−ブチルカルバゾール等が挙げられる。 Examples of the acetophenone compound include 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1- (4-isopropylphenyl) 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1- ( 4-Isopropylphenyl) 2-hydroxy-di-2-methyl-1-phenylpropan-1-one, 1-hydroxy-cyclohexyl-phenyl ketone, 2-hydroxy-2-methyl-1-styrylpropan-1-one polymerization , Diethoxyacetophenone, dibutoxyacetophenone, 2,2-dimethoxy-1,2-diphenylethane-1-one, 2,2-diethoxy-1,2-diphenylethane-1-one, 2-methyl-1- [4- (Methylthio) phenyl] -2-morpholinopropan-1-one, 2-benzyl-2-dimethyla No-1- (4-morpholino-phenyl) butan-1-one, 1-phenyl-1,2-propanedione-2- (o-ethoxycarbonyl) oxime, 3,6-bis (2-methyl-2- Morpholino-propanonyl) -9-butylcarbazole and the like.
ベンゾインエーテル化合物としては、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、ベンゾインイソブチルエーテル、ベンゾインノルマルブチルエーテル等が挙げられる。 Examples of the benzoin ether compound include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, and benzoin normal butyl ether.
アシルフォスフィンオキシド化合物としては、2,4,6−トリメチルベンゾイルジフェニルホスフィンオキシド、4−n−プロピルフェニル-ジ(2,6−ジクロロベンゾイル)ホスフィンオキシド等が挙げられる。 Examples of the acylphosphine oxide compound include 2,4,6-trimethylbenzoyldiphenylphosphine oxide and 4-n-propylphenyl-di (2,6-dichlorobenzoyl) phosphine oxide.
アミノカルボニル化合物としては、メチル−4−(ジメチルアミノ)ベンゾエート、エチル−4−(ジメチルアミノ)ベンゾエート、2−nブトキシエチル−4−(ジメチルアミノ)ベンゾエート、イソアミル−4−(ジメチルアミノ)ベンゾエート、2−(ジメチルアミノ)エチルベンゾエート、4,4’−ビス−4−ジメチルアミノベンゾフェノン、4,4’−ビス−4−ジエチルアミノベンゾフェノン、2,5’−ビス−(4−ジエチルアミノベンザル)シクロペンタノン等が挙げられる。 Examples of aminocarbonyl compounds include methyl-4- (dimethylamino) benzoate, ethyl-4- (dimethylamino) benzoate, 2-nbutoxyethyl-4- (dimethylamino) benzoate, isoamyl-4- (dimethylamino) benzoate, 2- (dimethylamino) ethyl benzoate, 4,4′-bis-4-dimethylaminobenzophenone, 4,4′-bis-4-diethylaminobenzophenone, 2,5′-bis- (4-diethylaminobenzal) cyclopenta Non etc. are mentioned.
なかでも、本発明において、2−メチル−1−[4−(メチルチオ)フェニル]−2−モルホリノプロパン−1−オンとチオキサントン類とを組み合わせて使用する場合は、安価でありながら感光性が非常に優れるため、特に好ましい。 In particular, in the present invention, when 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one and thioxanthones are used in combination, the photosensitivity is extremely low but the cost is very low. This is particularly preferable.
これらは上記化合物に限定されず、紫外線により重合を開始させる能力があればどのようなものでも構わない。これらは単独使用または併用することができ、使用量に制限はないが、感光性樹脂(A)の乾燥重量の合計100重量部に対して1〜20重量部の範囲で添加されるのが好ましい。又、増感剤として公知の有機アミンを加えることもできる。
These are not limited to the above compounds, and any compounds can be used as long as they have the ability to initiate polymerization by ultraviolet rays. These can be used alone or in combination, and the amount used is not limited, but is preferably added in the range of 1 to 20 parts by weight with respect to 100 parts by weight as the total dry weight of the photosensitive resin (A). . Moreover, a well-known organic amine can also be added as a sensitizer.
次に本発明で耐熱性と現像性、折り曲げ性を改善する目的で添加するカルボキシベンゾトリアゾール誘導体(D)について説明する。本発明のカルボキシルベンゾトリアゾール誘導体(D)とは、置換または無置換のカルボキシルベンゾトリアゾールのことを示し、カルボキシル基がエステル化されたものも含む。カルボキシルベンゾトリアゾール誘導体(D)は特に限定されないが、好ましくは一般式(7)で表されるカルボキシベンゾトリアゾール誘導体である。
一般式(7)
また、添加量は樹脂100重量部に対して1〜30重量部が好ましい。1重量部未満では耐熱性、現像性、折り曲げ性の改善が不十分であり、また30重量部以上になると回路への密着性の低下や耐熱性が低下するため望ましくない。
Next, the carboxybenzotriazole derivative (D) added for the purpose of improving heat resistance, developability and bendability in the present invention will be described. The carboxyl benzotriazole derivative (D) of the present invention refers to a substituted or unsubstituted carboxyl benzotriazole, and includes those in which a carboxyl group is esterified. The carboxyl benzotriazole derivative (D) is not particularly limited, but is preferably a carboxybenzotriazole derivative represented by the general formula (7).
General formula (7)
Moreover, the addition amount is preferably 1 to 30 parts by weight with respect to 100 parts by weight of the resin. If the amount is less than 1 part by weight, the heat resistance, developability and bendability are insufficiently improved. If the amount is more than 30 parts by weight, the adhesion to the circuit is deteriorated and the heat resistance is not desirable.
本発明の感光性樹脂組成物は、更に熱硬化助剤を含んでもよい。熱硬化助剤とは、熱硬化時に硬化反応に直接又は触媒的に寄与する化合物を表す。 The photosensitive resin composition of the present invention may further contain a thermosetting aid. The thermosetting aid represents a compound that contributes directly or catalytically to the curing reaction during thermosetting.
熱硬化時に硬化反応に直接的に寄与する化合物としては、アミノ樹脂、フェノール樹脂、多官能ポリカルボン酸無水物、多官能ビニルエーテル化合物、高分子量ポリカルボジイミド類、アジリジン化合物等が挙げられる。 Examples of the compound that directly contributes to the curing reaction during thermosetting include amino resins, phenol resins, polyfunctional polycarboxylic acid anhydrides, polyfunctional vinyl ether compounds, high molecular weight polycarbodiimides, and aziridine compounds.
アミノ樹脂、フェノール樹脂としては、尿素、メラミン、ベンゾグアナミン、フェノール、クレゾール類、ビスフェノール類等の化合物とホルムアルデヒドとの付加化合物または、その部分縮合物が挙げられる。 Examples of amino resins and phenol resins include addition compounds of urea, melamine, benzoguanamine, phenol, cresols, bisphenols, and the like with formaldehyde, or partial condensates thereof.
多官能ポリカルボン酸無水物は、カルボン酸無水物基を2つ以上有する化合物であり特に限定されるものではないが、テトラカルボン酸二無水物、ヘキサカルボン酸三無水物、ヘキサカルボン酸二無水物、無水マレイン酸共重合樹脂などの多価カルボン酸無水物類等が挙げられる。又、反応中に脱水反応を経由して無水物と成りうるポリカルボン酸、ポリカルボン酸エステル、ポリカルボン酸ハーフエステルなどは、本発明でいう「2つ以上のカルボン酸無水物基を有する化合物」に含まれる。 The polyfunctional polycarboxylic acid anhydride is a compound having two or more carboxylic acid anhydride groups and is not particularly limited, but tetracarboxylic dianhydride, hexacarboxylic dianhydride, hexacarboxylic dianhydride And polyvalent carboxylic acid anhydrides such as maleic anhydride copolymer resins. In addition, polycarboxylic acid, polycarboxylic acid ester, polycarboxylic acid half ester, and the like that can be converted into an anhydride via a dehydration reaction during the reaction are “compounds having two or more carboxylic acid anhydride groups” in the present invention. "include.
更に詳しく例示すると、テトラカルボン酸二無水物としては、無水ピロメリット酸、ベンゾフェノンテトラカルボン酸二無水物、ビフェニルテトラカルボン酸二無水物、オキシジフタル酸二無水物、ジフェニルスルホンテトラカルボン酸二無水物、ジフェニルスルフィドテトラカルボン酸二無水物、ブタンテトラカルボン酸二無水物、ペリレンテトラカルボン酸二無水物、ナフタレンテトラカルボン酸二無水物、新日本理化株式会社製「リカシッドTMTA−C」、「リカシッドMTA−10」、「リカシッドMTA−15」、「リカシッドTMEGシリーズ」、「リカシッドTDA」などが挙げられる。 More specifically, as tetracarboxylic dianhydride, pyromellitic anhydride, benzophenone tetracarboxylic dianhydride, biphenyl tetracarboxylic dianhydride, oxydiphthalic dianhydride, diphenyl sulfone tetracarboxylic dianhydride, Diphenyl sulfide tetracarboxylic dianhydride, butane tetracarboxylic dianhydride, perylene tetracarboxylic dianhydride, naphthalene tetracarboxylic dianhydride, "Ricacid TMTA-C", "Ricacid MTA-" manufactured by Shin Nippon Chemical Co., Ltd. 10 ”,“ Licacid MTA-15 ”,“ Licacid TMEG series ”,“ Licacid TDA ”, and the like.
無水マレイン酸共重合樹脂としては、サートマー社製SMAレジンシリーズ、株式会社岐阜セラック製造所製GSMシリーズなどのスチレン−無水マレイン酸共重合樹脂、p−フェニルスチレン−無水マレイン酸共重合樹脂、ポリエチレン−無水マレイン酸などのα−オレフィン-無水マレイン酸共重合樹脂、ダイセル化学工業株式会社製「VEMA」(メチルビニルエ−テルと無水マレイン酸の共重合体)、無水マレイン酸アクリル変性ポリオレフィン(「アウローレンシリーズ」:日本製紙ケミカル株式会社製)、無水マレイン酸共重合アクリル樹脂などが挙げられる。 Examples of maleic anhydride copolymer resins include SMA resin series manufactured by Sartomer, GSM series manufactured by Gifu Shellac Co., Ltd., styrene-maleic anhydride copolymer resins, p-phenylstyrene-maleic anhydride copolymer resins, polyethylene- Α-olefin-maleic anhydride copolymer resin such as maleic anhydride, “VEMA” (copolymer of methyl vinyl ether and maleic anhydride) manufactured by Daicel Chemical Industries, Ltd., and acrylic anhydride modified maleic anhydride (“Aurolen series”) ": Nippon Paper Chemical Co., Ltd.), maleic anhydride copolymer acrylic resin, and the like.
多官能ビニルエーテル化合物の具体例としては、エチレングリコールジビニルエーテル、ジエチレングリコールジビニルエーテル、トリエチレングリコールジビニルエーテル、テトラエチレングリコールジビニルエーテル、ペンタエリスリトールジビニルエーテル、プロピレングリコールジビニルエーテル、ジプロピレングリコールジビニルエーテル、トリプロピレングリコールジビニルエーテル、ネオペンチルグリコールジビニルエーテル、1,4−ブタンジオールジビニルエーテル、1,6−ヘキサンジオールジビニルエーテル、グリセリンジビニルエーテル、トリメチロールプロパンジビニルエーテル、1,4−ジヒドロキシルシクロヘキサンジビニルエーテル、1,4−ジヒドロキシメチルシクロヘキサンジビニルエーテル、ハイドロキノンジビニルエーテル、エチレンオキサイド変性ハイドロキノンジビニルエーテル、エチレンオキサイド変性レゾルシンジビニルエーテル、エチレンオキサイド変性ビスフェノールAジビニルエーテル、エチレンオキサイド変性ビスフェノールSジビニルエーテル、グリセリントリビニルエーテル、ソルビトールテトラビニルエーテル、トリメチロールプロパントリビニルエーテル、ペンタエリスリトールトリビニルエーテル、ペンタエリスリトールテトラビニルエーテル、ジペンタエリスリトールヘキサビニルエーテル、ジペンタエリスリトールポリビニルエーテル、ジトリメチロールプロパンテトラビニルエーテル、ジトリメチロールプロパンポリビニルエーテルなどが挙げられる。 Specific examples of the polyfunctional vinyl ether compound include ethylene glycol divinyl ether, diethylene glycol divinyl ether, triethylene glycol divinyl ether, tetraethylene glycol divinyl ether, pentaerythritol divinyl ether, propylene glycol divinyl ether, dipropylene glycol divinyl ether, and tripropylene glycol. Divinyl ether, neopentyl glycol divinyl ether, 1,4-butanediol divinyl ether, 1,6-hexanediol divinyl ether, glycerin divinyl ether, trimethylolpropane divinyl ether, 1,4-dihydroxylcyclohexane divinyl ether, 1,4 -Dihydroxymethylcyclohexanedivinyl ether, Hyde Quinone divinyl ether, ethylene oxide modified hydroquinone divinyl ether, ethylene oxide modified resorcin divinyl ether, ethylene oxide modified bisphenol A divinyl ether, ethylene oxide modified bisphenol S divinyl ether, glycerin trivinyl ether, sorbitol tetravinyl ether, trimethylolpropane trivinyl ether, pentaerythritol Examples include trivinyl ether, pentaerythritol tetravinyl ether, dipentaerythritol hexavinyl ether, dipentaerythritol polyvinyl ether, ditrimethylolpropane tetravinyl ether, and ditrimethylolpropane polyvinyl ether.
高分子量ポリカルボジイミド類としては日清紡績株式会社のカルボジライトシリーズが挙げられる。その中でもカルボジライトV−01、03、05、07、09は有機溶剤との相溶性に優れており好ましい。 Examples of the high molecular weight polycarbodiimides include Nisshinbo's Carbodilite series. Among these, Carbodilite V-01, 03, 05, 07, and 09 are preferable because of excellent compatibility with organic solvents.
アジリジン化合物としては、例えば、2,2’−ビスヒドロキシメチルブタノールトリス[3−(1−アジリジニル)プロピオネート]、4,4’−ビス(エチレンイミノカルボニルアミノ)ジフェニルメタン等が挙げられる。 Examples of the aziridine compound include 2,2′-bishydroxymethylbutanol tris [3- (1-aziridinyl) propionate], 4,4′-bis (ethyleneiminocarbonylamino) diphenylmethane, and the like.
その他の熱硬化時に硬化反応に直接的に寄与する化合物としては、ベンゾオキサジン化合物、ベンゾシクロブテン化合物、マレイミド化合物、ナジイミド化合物、アリルナジイミド化合物、メラミン化合物、グアナミン化合物等、加熱によって硬化する化合物であればいずれも有効に用いることができる。これら光重合性基や、カルボキシル基と反応し得る官能基、水酸基と反応し得る官能基を有する化合物は、特に硬化後の塗膜の耐熱性を向上することができるため、より有効に使用することができる。 Other compounds that directly contribute to the curing reaction during thermal curing include benzoxazine compounds, benzocyclobutene compounds, maleimide compounds, nadiimide compounds, allyl nadiimide compounds, melamine compounds, and guanamine compounds, which are cured by heating. Any of them can be used effectively. These photopolymerizable groups, functional groups capable of reacting with carboxyl groups, and compounds having functional groups capable of reacting with hydroxyl groups can improve the heat resistance of the coating film after curing, and are therefore used more effectively. be able to.
熱硬化時に硬化反応に触媒的に寄与する化合物としては、例えば、トリエチルアミン、トリブチルアミン、ベンジルジメチルアミン、2,4,6−トリス(ジメチルアミノメチル)フェノール、N−メチルピペラジン等の3級アミン類、及びその塩類;
2−メチルイミダゾール、2−フェニルイミダゾール、2−ウンデシルイミダゾール、2−エチル−4−メチルイミダゾール、1−シアノエチル−2−メチルイミダゾール、2,4−ジシアノ−6−[2−メチルイミダゾリル−1]−エチル−S−トリアジン等のイミダゾール類、及びその塩類;
1,5−ジアザビシクロ[5,4,0]−7−ウンデカン、1,5−ジアザビシクロ[4,3,0]−5−ノネン、1,4−ジアビシクロ[2,2,2,]オクタン等のジアザビシクロ化合物類;
トリブチルホスフィン、トリフェニルホスフィン、トリス(ジメトキシフェニル)ホスフィン、トリス(ヒドロキシプロピル)ホスフィン、トリス(シアノエチル)ホスフィン等のホスフィン類;
テトラフェニルホスホニウムテトラフェニルボレート、メチルトリブチルホスホニウムテトラフェニルボレート、メチルトリシアノエチルホスホニウムテトラフェニルボレート等のホスホニウム塩類;
その他、触媒的かつ自らも直接硬化反応に寄与する化合物として、ジシアンジアミド、カルボン酸ヒドラジド等が挙げられる。カルボン酸ヒドラジドとしては、コハク酸ヒドラジド、アジピン酸ヒドラジド等が挙げられる。
Examples of compounds that contribute catalytically to the curing reaction during heat curing include tertiary amines such as triethylamine, tributylamine, benzyldimethylamine, 2,4,6-tris (dimethylaminomethyl) phenol, and N-methylpiperazine. And salts thereof;
2-methylimidazole, 2-phenylimidazole, 2-undecylimidazole, 2-ethyl-4-methylimidazole, 1-cyanoethyl-2-methylimidazole, 2,4-dicyano-6- [2-methylimidazolyl-1] -Imidazoles such as ethyl-S-triazine and salts thereof;
1,5-diazabicyclo [5,4,0] -7-undecane, 1,5-diazabicyclo [4,3,0] -5-nonene, 1,4-diabicyclo [2,2,2,] octane, etc. Diazabicyclo compounds;
Phosphines such as tributylphosphine, triphenylphosphine, tris (dimethoxyphenyl) phosphine, tris (hydroxypropyl) phosphine, tris (cyanoethyl) phosphine;
Phosphonium salts such as tetraphenylphosphonium tetraphenylborate, methyltributylphosphonium tetraphenylborate, methyltricyanoethylphosphonium tetraphenylborate;
In addition, dicyandiamide, carboxylic acid hydrazide, and the like can be cited as compounds that are catalytic and that directly contribute to the curing reaction. Examples of the carboxylic acid hydrazide include succinic acid hydrazide and adipic acid hydrazide.
これら熱硬化助剤は、一種類のみを用いてもよく、また、二種類以上を併用してもよい。熱硬化助剤の使用量は、感光性樹脂組成物の用途等を考慮して決定すればよく、特に限定されるものではないが、感光性樹脂(A)100重量部に対して、0.1重量部〜100重量部の範囲内がより好ましく、0.5重量部〜80重量部の範囲内が更に好ましい。これにより、感光性樹脂組成物の架橋密度を適度な値に調節することができるので、感光性樹脂組成物の各種物性をより一層向上させることができる。熱硬化助剤の使用量が0.1重量部よりも少ないと、加熱硬化後の塗膜の架橋密度が低くなり過ぎ、凝集力や耐久性が不充分となる場合がある。又、該使用量が100重量部よりも多いと、加熱硬化後の架橋密度が高くなり過ぎ、その結果、塗膜の屈曲性、可撓性が低下し、基板の反りをも著しく悪化させる場合がある。 Only one type of these thermosetting aids may be used, or two or more types may be used in combination. The amount of the thermosetting aid used may be determined in consideration of the application of the photosensitive resin composition and the like, and is not particularly limited. The range of 1 to 100 parts by weight is more preferable, and the range of 0.5 to 80 parts by weight is still more preferable. Thereby, since the crosslinking density of the photosensitive resin composition can be adjusted to an appropriate value, various physical properties of the photosensitive resin composition can be further improved. If the amount of the thermosetting aid used is less than 0.1 parts by weight, the cross-linking density of the coating film after heat curing becomes too low, and the cohesive strength and durability may be insufficient. Also, if the amount used is more than 100 parts by weight, the crosslinking density after heat curing becomes too high, and as a result, the flexibility and flexibility of the coating film are lowered and the warpage of the substrate is remarkably deteriorated. There is.
本発明の感光性樹脂組成物は、必要に応じて上記記載の(A)以外の樹脂を含有しても良い。(A)以外の樹脂としては、アクリル樹脂、ポリエステル樹脂、ウレタン樹脂、ウレア樹脂、ウレタンウレア樹脂、エポキシ樹脂、ポリアミド樹脂、ポリイミド樹脂などが挙げられる。これらは、現像性の観点から、カルボキシル基を含有しているものが好ましく、又、(A)との相溶性に優れるものが好ましい。本発明において、(A)以外の樹脂を含有する場合は、単独又は複数を併用して用いることができる。 The photosensitive resin composition of this invention may contain resin other than the above-mentioned (A) as needed. Examples of resins other than (A) include acrylic resins, polyester resins, urethane resins, urea resins, urethane urea resins, epoxy resins, polyamide resins, and polyimide resins. Those containing a carboxyl group are preferable from the viewpoint of developability, and those having excellent compatibility with (A) are preferable. In this invention, when it contains resin other than (A), it can be used individually or in combination.
この他、本発明の感光性樹脂組成物には目的を損なわない範囲で任意成分として、更に溶剤、染料、顔料、難燃剤、酸化防止剤、重合禁止剤、レベリング剤、保湿剤、粘度調整剤、防腐剤、抗菌剤、帯電防止剤、アンチブロッキング剤、紫外線吸収剤、赤外線吸収剤、電磁波シールド剤、フィラー等を添加することができる。特に電子材料用途で回路に直接接するような絶縁部材(例えば回路保護膜、カバーレイ層、層間絶縁材料など)や、回路周辺の高熱となりうる部材(プリント配線板接着剤、支持基板など)に使用する場合は、難燃剤を併用するのが好ましい。 In addition to the above, the photosensitive resin composition of the present invention may further include solvents, dyes, pigments, flame retardants, antioxidants, polymerization inhibitors, leveling agents, humectants, viscosity modifiers as optional components within a range not to impair the purpose. Preservatives, antibacterial agents, antistatic agents, anti-blocking agents, ultraviolet absorbers, infrared absorbers, electromagnetic shielding agents, fillers, and the like can be added. Especially used for insulating materials (such as circuit protection films, coverlay layers, interlayer insulating materials, etc.) that are in direct contact with the circuit for electronic materials, and for members that can become high heat around the circuit (printed wiring board adhesive, support substrate, etc.) When doing so, it is preferable to use a flame retardant together.
難燃剤としては、例えば、リン酸メラミン、ポリリン酸メラミン、リン酸グアニジン、ポリリン酸グアニジン、リン酸アンモニウム、ポリリン酸アンモニウム、リン酸アミドアンモニウム、ポリリン酸アミドアンモニウム、リン酸カルバメート、ポリリン酸カルバメートなどのリン酸塩系化合物やポリリン酸塩系化合物、赤リン、有機リン酸エステル化合物、ホスファゼン化合物、ホスホン酸化合物、ジエチルホスフィン酸アルミニウム、メチルエチルホスフィン酸アルミニウム、ジフェニルホスフィン酸アルミニウム、エチルブチルホスフィン酸アルミニウム、メチルブチルホスフィン酸アルミニウム、ポリエチレンホスフィン酸アルミニウムなどのホスフィン酸化合物、ホスフィンオキシド化合物、ホスホラン化合物、ホスホルアミド化合物などのリン系難燃剤、メラミン、メラム、メレム、メロン、メラミンシアヌレートなどのトリアジン系化合物、シアヌル酸化合物、イソシアヌル酸化合物、トリアゾール系化合物、テトラゾール化合物、ジアゾ化合物、尿素などの窒素系難燃剤、シリコーン化合物やシラン化合物などのケイ素系難燃剤、ハロゲン化ビスフェノールA、ハロゲン化エポキシ化合物、ハロゲン化フェノキシ化合物などの低分子ハロゲン含有化合物、ハロゲン化されたオリゴマーやポリマーなどのハロゲン系難燃剤、水酸化アルミニウム、水酸化マグネシウム、水酸化ジルコニウム、水酸化バリウム、水酸化カルシウムなどの金属水酸化物、酸化スズ、酸化アルミニウム、酸化マグネシウム、酸化ジルコニウム、酸化亜鉛、酸化モリブデン、酸化アンチモン、酸化ニッケル、炭酸亜鉛、炭酸マグネシウム、炭酸カルシウム、炭酸バリウム、ホウ酸亜鉛、水和ガラスなどの無機系難燃剤などが挙げられる。本発明において、近年取り沙汰されている、環境への影響を配慮すると、リン系難燃剤や窒素系難燃剤等のノンハロゲン系難燃剤を使用することが望ましく、中でも本発明の熱硬化性樹脂組成物との併用によって、難燃性により効果のあるホスファゼン化合物、ホスフィン化合物、ポリリン酸メラミン、ポリリン酸アンモニウム、メラミンシアヌレート等を用いることが好ましい。本発明において、これら難燃剤は、単独又は複数を併用して用いることができる。 Examples of the flame retardant include melamine phosphate, melamine polyphosphate, guanidine phosphate, guanidine polyphosphate, ammonium phosphate, ammonium polyphosphate, ammonium amidophosphate, ammonium polyphosphate, carbamate phosphate, and carbamate polyphosphate. Phosphate compounds and polyphosphate compounds, red phosphorus, organophosphate compounds, phosphazene compounds, phosphonic acid compounds, aluminum diethylphosphinate, aluminum methylethylphosphinate, aluminum diphenylphosphinate, aluminum ethylbutylphosphinate, Phosphinic acid compounds such as aluminum methylbutylphosphinate and aluminum aluminum phosphinate, phosphine oxide compounds, phosphorane compounds, phosphoramidation Phosphorus flame retardants such as products, triazine compounds such as melamine, melam, melem, melon and melamine cyanurate, cyanuric acid compounds, isocyanuric acid compounds, triazole compounds, tetrazole compounds, diazo compounds, urea and other nitrogen flame retardants , Silicon flame retardants such as silicone compounds and silane compounds, halogenated bisphenol A, halogenated epoxy compounds, halogenated flame retardants such as halogenated oligomers and polymers, halogenated flame retardants such as halogenated phenoxy compounds, water Metal hydroxides such as aluminum oxide, magnesium hydroxide, zirconium hydroxide, barium hydroxide, calcium hydroxide, tin oxide, aluminum oxide, magnesium oxide, zirconium oxide, zinc oxide, molybdenum oxide, antimony oxide, Nickel, zinc carbonate, magnesium carbonate, calcium carbonate, barium carbonate, zinc borate, and inorganic flame retardants such as hydrated glass. In the present invention, taking into consideration the influence on the environment, which has been recently taken into consideration, it is desirable to use a non-halogen flame retardant such as a phosphorus flame retardant or a nitrogen flame retardant, and in particular, the thermosetting resin composition of the present invention. It is preferable to use a phosphazene compound, a phosphine compound, melamine polyphosphate, ammonium polyphosphate, melamine cyanurate, or the like that is more effective in flame retardancy when used in combination. In the present invention, these flame retardants can be used alone or in combination.
本発明の感光性樹脂組成物及びその硬化物は、アルカリ現像性に優れるという特徴があるため、光硬化、アルカリ現像、ポストキュアを含む塗膜形成プロセスが用いられる用途に好適に用いることができる。更に、半田耐熱性、塗膜耐性に優れ、かつ、可撓性、屈曲性も同時に優れることから、特に、フレキシブルプリント配線板用ソルダーレジストインキや、感光性カバーレイフィルム用途で好適に用いることができる。 Since the photosensitive resin composition of the present invention and its cured product are characterized by excellent alkali developability, they can be suitably used for applications in which a film forming process including photocuring, alkali development, and post-cure is used. . Furthermore, since it is excellent in solder heat resistance and coating film resistance, and is also excellent in flexibility and flexibility, it is particularly suitable for use in solder resist inks for flexible printed wiring boards and photosensitive coverlay films. it can.
本発明の感光性樹脂組成物は、基材として、金属、セラミックス、ガラス、プラスチック、木材、スレート等に塗工することができ、特に制限されるものではない。具体的なプラスチックの種類としては、ポリエステル、ポリオレフィン、ポリカーボネート、ポリスチレン、ポリメチルメタクリレート、トリアセチルセルロース樹脂、ABS樹脂、AS樹脂、ポリアミド、エポキシ樹脂、メラミン樹脂等が挙げられる。又、基材の形状としてはフィルムシート、板状パネル、レンズ形状、ディスク形状、ファイバー状の物が挙げられるが、特に制限されるものではない。 The photosensitive resin composition of the present invention can be applied to a metal, ceramics, glass, plastic, wood, slate or the like as a substrate, and is not particularly limited. Specific types of plastic include polyester, polyolefin, polycarbonate, polystyrene, polymethyl methacrylate, triacetyl cellulose resin, ABS resin, AS resin, polyamide, epoxy resin, melamine resin, and the like. Examples of the shape of the substrate include a film sheet, a plate-like panel, a lens shape, a disk shape, and a fiber shape, but are not particularly limited.
本発明の感光性樹脂組成物は、公知のラジエーション硬化方法により硬化させ硬化物とすることができ、活性エネルギー線としては、電子線、紫外線、400〜500nmの可視光を使用することができる。照射する電子線の線源には熱電子放射銃、電界放射銃等が使用できる。又、紫外線および400〜500nmの可視光の線源(光源)には、例えば、高圧水銀ランプ、超高圧水銀ランプ、メタルハライドランプ、ガリウムランプ、キセノンランプ、カーボンアークランプ等を使用することができる。具体的には、点光源であること、輝度の安定性から、超高圧水銀ランプ、キセノン水銀ランプ、メタルハライドランプ、が用いられることが多い。照射する活性エネルギー線量は、5〜2000mJ/cm2の範囲で適時設定できるが、工程上管理しやすい50〜1000mJ/cm2の範囲であることが好ましい。又、これら活性エネルギー線と、赤外線、遠赤外線、熱風、高周波加熱等による熱の併用も可能である。 The photosensitive resin composition of the present invention can be cured by a known radiation curing method to obtain a cured product, and as active energy rays, electron beams, ultraviolet rays, and visible light of 400 to 500 nm can be used. A thermionic emission gun, a field emission gun, or the like can be used as the electron beam source to be irradiated. For example, a high-pressure mercury lamp, an ultrahigh-pressure mercury lamp, a metal halide lamp, a gallium lamp, a xenon lamp, a carbon arc lamp, or the like can be used as a source (light source) for ultraviolet light and visible light of 400 to 500 nm. Specifically, an ultra-high pressure mercury lamp, a xenon mercury lamp, or a metal halide lamp is often used because of the point light source and the stability of luminance. The active energy dose to be irradiated, can be set appropriately in the range of 5~2000mJ / cm 2, it is preferably in the range on the easy of 50~1000mJ / cm 2 management process. Further, these active energy rays can be used in combination with heat by infrared rays, far infrared rays, hot air, high-frequency heating or the like.
本発明の感光性樹脂組成物は、フォトソルダーレジストとして使用する場合、溶剤に溶解させた液状レジストインキや、予め溶剤を乾燥させたドライフィルム型レジストとして使用できる。 When used as a photo solder resist, the photosensitive resin composition of the present invention can be used as a liquid resist ink dissolved in a solvent or a dry film type resist obtained by previously drying the solvent.
液状レジストインキとして使用する場合、本発明の感光性樹脂組成物は、基材に塗工後、自然または強制乾燥によって溶剤を揮発させた後にラジエーション硬化を行っても良いし、塗工に続いてラジエーション硬化させた後に自然又は強制乾燥しても構わないが、自然又は強制乾燥後にラジエーション硬化した方が好ましい。又、液状レジストインキの場合、保存工程、塗工工程など、基材への塗工が完了するまでの間は、取扱い上、溶剤の揮発が起こらないことが好ましいため、樹脂合成時に用いる溶剤や、インキ作成時の希釈溶剤としては、高沸点のものが好ましい。例えば、カルビトールアセテート、メトキシプロピルアセテート、シクロヘキサノン、ジイソブチルケトン等を用いることが特に好ましい。又、液状レジストインキの場合、保存安定性やハンドリングを考慮して、予め硬化剤を別にして保存しておき、塗工前に必要に応じて硬化剤を混合して使用する2液型もある。本発明の場合も、エポキシ基含有化合物、イソシアネート基含有化合物、およびブロック化イソシアネート基含有化合物からなる群より選ばれる少なくとも一種である硬化剤(B)や、光重合開始剤(C)や、エチレン性不飽和基含有化合物(D)や、熱硬化助剤を、必要に応じて、それ以外のものと分けて保存するなど、2液型として使用することもできる。 When used as a liquid resist ink, the photosensitive resin composition of the present invention may be subjected to radiation curing after the solvent is volatilized by natural or forced drying after coating on the base material. Although natural or forced drying may be performed after the radiation curing, it is preferable that the radiation curing is performed after natural or forced drying. In the case of a liquid resist ink, it is preferable that the solvent does not evaporate during handling until the application to the substrate is completed, such as the storage step and the coating step. As the dilution solvent at the time of ink preparation, those having a high boiling point are preferable. For example, it is particularly preferable to use carbitol acetate, methoxypropyl acetate, cyclohexanone, diisobutyl ketone or the like. In addition, in the case of liquid resist inks, there are also two-component types that are stored in advance separately from the curing agent in consideration of storage stability and handling, and mixed with a curing agent as necessary before coating. is there. Also in the case of this invention, the hardening | curing agent (B) which is at least 1 type chosen from the group which consists of an epoxy group containing compound, an isocyanate group containing compound, and a blocked isocyanate group containing compound, a photoinitiator (C), ethylene The polymerizable unsaturated group-containing compound (D) and the thermosetting auxiliary agent can be used as a two-component type, for example, by storing separately from the others as necessary.
一方、ドライフィルム型レジストとして使用する場合、まずセパレートフィルム等の離形性の良いフィルム基材に、溶剤に溶解させた感光性組成物を塗工後、溶剤を乾燥させることにより、ドライフィルム型レジストを作成する。この場合、使用する溶剤としては、前記の液状レジストインキとは異なり、短時間で完全に溶剤を乾燥させる必要があるため、低沸点の溶剤が好ましい。例えば、メチルエチルケトン、メチルイソブチルケトン、酢酸エチル、酢酸ブチル、テトラヒドロフラン、トルエン、イソプロピルアルコール等を用いることが特に好ましい。セパレートフィルム上に作成したドライフィルムは、ポリイミド上に形成された銅回路等に張り合わせたのち、ラミネートや真空ラミネートによって、気泡等の除去および回路への密着が行われる。この張り合わせ工程の後、セパレートフィルムを介してラジエーション硬化が行われる場合や、セパレートフィルムを剥がしてから現像パターンを接触させてラジエーション硬化を行う場合がある。現像パターンを接触させてラジエーション硬化を行う場合、ドライフィルムにタックがあると、現像パターンを汚染する場合があるため、ドライフィルム型レジストとしては、乾燥塗膜のタックが少ないものが要求される。本発明の感光性樹脂組成物は、必要に応じてタックを低減できるため、ドライフィルムレジストとしても有用に使用できる。 On the other hand, when using as a dry film type resist, first, a dry film type is obtained by applying a photosensitive composition dissolved in a solvent to a film substrate having good releasability such as a separate film and then drying the solvent. Create a resist. In this case, unlike the above-described liquid resist ink, it is necessary to dry the solvent completely in a short time, and therefore a solvent having a low boiling point is preferable. For example, it is particularly preferable to use methyl ethyl ketone, methyl isobutyl ketone, ethyl acetate, butyl acetate, tetrahydrofuran, toluene, isopropyl alcohol, or the like. The dry film formed on the separate film is laminated on a copper circuit or the like formed on polyimide, and thereafter, bubbles and the like are removed and adhered to the circuit by lamination or vacuum lamination. After this pasting step, there may be a case where the radiation curing is performed through a separate film, or a case where the development pattern is brought into contact after the separation film is peeled to perform the radiation curing. When radiation curing is performed by bringing a development pattern into contact, if the dry film has a tack, the development pattern may be contaminated. Therefore, a dry film type resist is required to have a low dry film tack. Since the photosensitive resin composition of this invention can reduce a tack as needed, it can be usefully used also as a dry film resist.
更に、本発明の感光性樹脂組成物は、ラジエーション硬化後、現像することでパターンを形成し、ポストキュアとして熱硬化させることで耐性に優れる皮膜を形成する。ポストキュアは、100℃〜200℃で30分〜2時間が好ましい。又、更に塗膜の耐性を向上するために、ポストキュアの後にも必要に応じて活性エネルギー線を照射することができる。ポストキュアの後に活性エネルギー線を照射することで、半田耐熱性などを更に向上することができる。
Furthermore, the photosensitive resin composition of the present invention forms a pattern by developing after radiation curing, and forms a film having excellent resistance by thermosetting as post-cure. The post cure is preferably 30 to 2 hours at 100 to 200 ° C. Further, in order to further improve the resistance of the coating film, an active energy ray can be irradiated as necessary after post-curing. By irradiating the active energy ray after the post cure, the solder heat resistance and the like can be further improved.
以下に、実施例により、本発明をさらに詳細に説明するが、以下の実施例は本発明の権利範囲を何ら制限するものではない。なお、実施例における「部」は、「重量部」を表す。 EXAMPLES The present invention will be described in more detail with reference to the following examples. However, the following examples do not limit the scope of rights of the present invention. In the examples, “part” represents “part by weight”.
なお、GPCの測定条件は以下のとおりである。 The measurement conditions for GPC are as follows.
<重量平均分子量(Mw)の測定>
Mwの測定は東ソー株式会社製GPC(ゲルパーミエーションクロマトグラフィー)「HPC−8020」を用いた。GPCは溶媒(THF;テトラヒドロフラン)に溶解した物質をその分子サイズの差によって分離定量する液体クロマトグラフィーである。本発明における測定は、カラムに「LF−604」(昭和電工株式会社製:迅速分析用GPCカラム:6mmID×150mmサイズ)を直列に2本接続して用い、流量0.6ml/min、カラム温度40℃の条件で行い、重量平均分子量(Mw)の決定はポリスチレン換算で行った。
<Measurement of weight average molecular weight (Mw)>
For measurement of Mw, GPC (gel permeation chromatography) “HPC-8020” manufactured by Tosoh Corporation was used. GPC is liquid chromatography that separates and quantifies substances dissolved in a solvent (THF; tetrahydrofuran) based on the difference in molecular size. In the measurement of the present invention, “LF-604” (manufactured by Showa Denko KK: GPC column for rapid analysis: 6 mm ID × 150 mm size) is connected in series to the column, the flow rate is 0.6 ml / min, and the column temperature is 40. It carried out on the conditions of (degreeC) and the determination of the weight average molecular weight (Mw) was performed in polystyrene conversion.
<分子量分布(Mw/Mn)>
分子量の分散度をあらわし、本発明においては、上記分子量の測定結果より、重量平均分子量(Mw)/数平均分子量(Mn)により求めた。
<Molecular weight distribution (Mw / Mn)>
The degree of dispersion of the molecular weight is expressed. In the present invention, the weight average molecular weight (Mw) / number average molecular weight (Mn) was determined from the molecular weight measurement result.
[製造例1]
撹拌機、還流冷却管、窒素導入管、導入管、温度計を備えた4口フラスコに、ビスフェノールA64.8部、YD8125(新日鐵化学株式会社製、ビスフェノールA型エポキシ化合物)57.1部、EX861(ナガセケムテックス株式会社製:ポリエチレングリコールジグリシジルエーテル)128.1部、触媒としてトリフェニルホスフィン1.25部、N,N−ジメチルベンジルアミン1.25部、溶剤としてトルエン250部を仕込み、窒素気流下、撹拌しながら110℃に昇温し8時間反応させ、ヒドロキシル基含有樹脂を得た。次に、酸無水物としてリカシッドSA(新日本理化株式会社製:無水コハク酸)54.6部を投入し、110℃のまま4時間反応させた。FT−IR測定にて酸無水物基の吸収が消失しているのを確認後、室温まで冷却した。次に、このフラスコに、窒素導入管からの窒素を停止し乾燥空気の導入に切り替え、攪拌しながらGMA(日油株式会社製:グリシジルメタクリレート)26.0部、重合禁止剤としてヒドロキノン0.165部を投入し、80℃で8時間反応させた。反応終了後、この溶液にメチルエチルケトンを加えて固形分が50.0%になるように調整した。本設計によるヒドロキシル基含有感光性樹脂(A−1)のエチレン性不飽和基当量は1803g/eqであり、ポリスチレン換算の重量平均分子量が23500、実測による樹脂固形分の酸価は63mgKOH/gであった。
[Production Example 1]
In a four-necked flask equipped with a stirrer, reflux condenser, nitrogen inlet tube, inlet tube, and thermometer, 64.8 parts of bisphenol A, 57.1 parts of YD8125 (manufactured by Nippon Steel Chemical Co., Ltd., bisphenol A type epoxy compound) EX861 (manufactured by Nagase ChemteX Corporation: polyethylene glycol diglycidyl ether) 128.1 parts, 1.25 parts triphenylphosphine as catalyst, 1.25 parts N, N-dimethylbenzylamine, 250 parts toluene as solvent The mixture was heated to 110 ° C. with stirring under a nitrogen stream and reacted for 8 hours to obtain a hydroxyl group-containing resin. Next, 54.6 parts of Ricacid SA (manufactured by Shin Nippon Rika Co., Ltd .: succinic anhydride) was added as an acid anhydride and reacted at 110 ° C. for 4 hours. After confirming that the absorption of the acid anhydride group disappeared by FT-IR measurement, it was cooled to room temperature. Next, the nitrogen from the nitrogen introduction tube was stopped in this flask and switched to introduction of dry air. While stirring, 26.0 parts of GMA (manufactured by NOF Corporation: glycidyl methacrylate), hydroquinone 0.165 as a polymerization inhibitor. Part was added and reacted at 80 ° C. for 8 hours. After completion of the reaction, methyl ethyl ketone was added to this solution to adjust the solid content to 50.0%. The hydroxyl group-containing photosensitive resin (A-1) according to the present design has an ethylenically unsaturated group equivalent of 1803 g / eq, a polystyrene-equivalent weight average molecular weight of 23500, and an actually measured acid value of resin solids of 63 mgKOH / g. there were.
[製造例2]
撹拌機、還流冷却管、窒素導入管、導入管、温度計を備えた4口フラスコに、ビスフェノールA60.8部、YD8125(新日鐵化学株式会社製、ビスフェノールA型エポキシ化合物)43.4部、EX861(ナガセケムテックス株式会社製:ポリエチレングリコールジグリシジルエーテル)145.8部、触媒としてトリフェニルホスフィン1.25部、DMBA1.25部、溶剤としてトルエン250部を仕込み、窒素気流下、撹拌しながら110℃に昇温し8時間反応させ、ヒドロキシル基含有樹脂を得た。次に、酸無水物としてリカシッドSA(新日本理化株式会社製:無水コハク酸)49.8部を投入し、110℃のまま4時間反応させた。FT−IR測定にて酸無水物基の吸収が消失しているのを確認後、室温まで冷却した。次に、このフラスコに、窒素導入管からの窒素を停止し乾燥空気の導入に切り替え、攪拌しながらGMA(日油株式会社製:グリシジルメタクリレート)41.1部、重合禁止剤としてヒドロキノン0.17部を投入し、80℃で8時間反応させた。反応終了後、乾燥空気を導入した状態のフラスコに、酸無水物としてリカシッドSA(新日本理化株式会社製:無水コハク酸)26.0部を投入し、80℃のまま4時間反応させた。FT−IR測定にて酸無水物基の吸収が消失しているのを確認後、室温まで冷却した。この溶液にメチルエチルケトンを加えて固形分が50.0%になるように調整した。本設計によるカルボキシル基含有感光性樹脂(A−2)のエチレン性不飽和基当量は1269g/eqであり、ポリスチレン換算の重量平均分子量が20200、実測による樹脂固形分の酸価は73mgKOH/gであった。
[Production Example 2]
In a 4-neck flask equipped with a stirrer, reflux condenser, nitrogen inlet tube, inlet tube, and thermometer, 60.8 parts of bisphenol A, 43.4 parts of YD8125 (manufactured by Nippon Steel Chemical Co., Ltd., bisphenol A type epoxy compound) , EX861 (manufactured by Nagase ChemteX Corporation: polyethylene glycol diglycidyl ether) 145.8 parts, 1.25 parts of triphenylphosphine as a catalyst, 1.25 parts of DMBA, 250 parts of toluene as a solvent, and stirred under a nitrogen stream However, the temperature was raised to 110 ° C. and the reaction was performed for 8 hours to obtain a hydroxyl group-containing resin. Next, 49.8 parts of Ricacid SA (manufactured by Shin Nippon Rika Co., Ltd .: succinic anhydride) was added as an acid anhydride and reacted at 110 ° C. for 4 hours. After confirming that the absorption of the acid anhydride group disappeared by FT-IR measurement, it was cooled to room temperature. Next, the nitrogen from the nitrogen introduction tube was stopped in this flask and switched to introduction of dry air, while stirring, 41.1 parts of GMA (manufactured by NOF Corporation: glycidyl methacrylate), hydroquinone 0.17 as a polymerization inhibitor. Part was added and reacted at 80 ° C. for 8 hours. After completion of the reaction, 26.0 parts of Ricacid SA (manufactured by Shin Nippon Rika Co., Ltd .: succinic anhydride) was added as an acid anhydride to a flask in which dry air was introduced, and reacted at 80 ° C. for 4 hours. After confirming that the absorption of the acid anhydride group disappeared by FT-IR measurement, it was cooled to room temperature. Methyl ethyl ketone was added to this solution to adjust the solid content to 50.0%. The ethylenically unsaturated group equivalent of the carboxyl group-containing photosensitive resin (A-2) according to this design is 1269 g / eq, the polystyrene-equivalent weight average molecular weight is 20200, and the acid value of the resin solid content measured is 73 mgKOH / g. there were.
[製造例3〜4]
表2に示す原料を用い、製造例7と同様な操作を行うことにより、製造例3〜4のカルボキシル基含有感光性樹脂(A−2)を得た。
[Production Examples 3 to 4]
By performing the same operations as in Production Example 7 using the raw materials shown in Table 2, the carboxyl group-containing photosensitive resin (A-2) of Production Examples 3 to 4 was obtained.
製造例1〜4で得られた感光性樹脂のスペックを表1に示す。 Table 1 shows the specifications of the photosensitive resins obtained in Production Examples 1 to 4.
BisA:ビスフェノールA
YD8125:新日鐵化学株式会社製、ビスフェノールA型エポキシ化合物
EX861:ナガセケムテックス株式会社製、ポリエチレングリコールジグリシジルエーテル
SA:新日本理化株式会社製、無水コハク酸
GMA:日油株式会社製、グリシジルメタクリレート
EX830:ナガセケムテックス株式会社製、ポリエチレングリコールジグリシジルエーテル
YL7410:三菱化学株式会社製、ゴム弾性型エポキシ樹脂
BisA: Bisphenol A
YD8125: manufactured by Nippon Steel Chemical Co., Ltd., bisphenol A type epoxy compound EX861: manufactured by Nagase ChemteX Corporation, polyethylene glycol diglycidyl ether SA: manufactured by Nippon Nippon Chemical Co., Ltd., succinic anhydride GMA: manufactured by NOF Corporation, glycidyl Methacrylate EX830: manufactured by Nagase ChemteX Corporation, polyethylene glycol diglycidyl ether YL7410: manufactured by Mitsubishi Chemical Corporation, rubber elastic epoxy resin
[製造例5]
撹拌機、還流冷却管、窒素導入管、導入管、温度計を備えた4口フラスコに、エポキシ当量650、軟化点81.1℃、溶融粘度(150℃)12.5ポイズのビスフェノールA型エポキシ樹脂371部、エピクロルヒドリン925部、ジメチルスルホキシド463部を投入し、均一に溶解させた後、攪拌下70℃で98.5%水酸化ナトリウム水溶液52.8部を100分かけて添加した。添加後、更に70℃で3時間反応を行った。次いで、過剰の未反応エピクロルヒドリン及びジメチルスルホキシドの大半を減圧下に留去し、副生塩とジメチルスルホキシドを含む反応生成物をメチルイソブチルケトン750部に溶解させ、更に30%水酸化ナトリウム水溶液10部を加え、70℃で1時間反応させた。反応終了後、水200部で2回水洗を行った。油水分離後、油層よりメチルイソブチルケトンを蒸留回収して、エポキシ当量287、加水分解性塩素含有量0.07%、軟化点64.2℃、溶融粘度(150℃)7.1ポイズのエポキシ樹脂340部を得た。
[Production Example 5]
A 4-neck flask equipped with a stirrer, reflux condenser, nitrogen inlet tube, inlet tube, thermometer, bisphenol A type epoxy having an epoxy equivalent of 650, a softening point of 81.1 ° C, and a melt viscosity (150 ° C) of 12.5 poise 371 parts of resin, 925 parts of epichlorohydrin, and 463 parts of dimethyl sulfoxide were added and dissolved uniformly, and then 52.8 parts of 98.5% aqueous sodium hydroxide solution was added at 70 ° C. over 100 minutes with stirring. After the addition, the reaction was further performed at 70 ° C. for 3 hours. Subsequently, most of the excess unreacted epichlorohydrin and dimethyl sulfoxide are distilled off under reduced pressure, the reaction product containing by-product salt and dimethyl sulfoxide is dissolved in 750 parts of methyl isobutyl ketone, and further 10 parts of 30% aqueous sodium hydroxide solution. And reacted at 70 ° C. for 1 hour. After completion of the reaction, washing was performed twice with 200 parts of water. After separation of oil and water, methyl isobutyl ketone is recovered by distillation from the oil layer, and an epoxy resin having an epoxy equivalent of 287, a hydrolyzable chlorine content of 0.07%, a softening point of 64.2 ° C., and a melt viscosity (150 ° C.) of 7.1 poise. 340 parts were obtained.
このエポキシ樹脂287部を、別の撹拌機、還流冷却管、窒素導入管、導入管、温度計を備えた4口フラスコに投入し、更にアクリル酸72部、メチルハイドロキノン0.3部、シクロヘキサノン194部を仕込み、90℃に加熱、攪拌し、反応混合物を溶解した。次いで、反応液を60℃に冷却し、トリフェニルフォスフィン1.7部を仕込み、酸素存在下、100℃で約32時間反応し、実測酸価1mgKOH/gの反応物を得た。次に、これに無水コハク酸78部、シクロヘキサノン42部を仕込み、95℃で約6時間反応し、主骨格がビスフェノールA型エポキシ樹脂であるカルボキシル基含有感光性樹脂を得た。次いでこの溶液にシクロヘキサノンを加えて、固形分が50.0%になるように調整した。本設計による樹脂固形分のエチレン性不飽和基当量は450eq/gであり、ポリスチレン換算の重量平均分子量は7400、分子量分布2.23、実測による樹脂固形分の酸価は100mgKOH/g、であった。 287 parts of this epoxy resin was put into a four-necked flask equipped with another stirrer, reflux condenser, nitrogen inlet pipe, inlet pipe and thermometer, and further 72 parts of acrylic acid, 0.3 part of methylhydroquinone, cyclohexanone 194 The reaction mixture was dissolved by heating and stirring at 90 ° C. Subsequently, the reaction liquid was cooled to 60 ° C., 1.7 parts of triphenylphosphine was added, and the reaction was performed at 100 ° C. for about 32 hours in the presence of oxygen to obtain a reaction product having an actually measured acid value of 1 mgKOH / g. Next, 78 parts of succinic anhydride and 42 parts of cyclohexanone were added thereto and reacted at 95 ° C. for about 6 hours to obtain a carboxyl group-containing photosensitive resin whose main skeleton was a bisphenol A type epoxy resin. Next, cyclohexanone was added to this solution to adjust the solid content to 50.0%. The ethylenically unsaturated group equivalent of the resin solid content by this design is 450 eq / g, the weight average molecular weight in terms of polystyrene is 7400, the molecular weight distribution is 2.23, and the acid value of the resin solid content by actual measurement is 100 mgKOH / g. It was.
[製造例6]
撹拌機、還流冷却管、窒素導入管、導入管、温度計を備えた4口フラスコに、エポキシ当量が218g/eqのクレゾールノボラック型エポキシ樹脂(東都化成株式会社製:YDCN−702)330部を入れ、90〜100℃で加熱溶融し、攪拌した。次にアクリル酸120部、ハイドロキノン0.6部、ジメチルベンジルアミン5部を加え、酸素存在下、攪拌しながら115℃に昇温して12時間反応させた。次に、このフラスコにシクロヘキサノン400部を投入し、70℃に加温して溶解させた。次に、無水コハク酸を81部投入し、95℃に昇温し、8時間攪拌・反応させた。FT−IR測定にて酸無水物基の吸収が消失しているのを確認後、室温まで冷却し、主骨格がクレゾールノボラック骨格であるカルボキシル基含有感光性樹脂を得た。次いでこの溶液にシクロヘキサノンを加えて、固形分が50.0%になるように調整した。本設計による樹脂固形分のエチレン性不飽和基当量は319g/eqであり、ポリスチレン換算の重量平均分子量は11000、分子量分布2.90、実測による樹脂固形分の酸価は85mgKOH/g、であった。
[Production Example 6]
To a four-necked flask equipped with a stirrer, a reflux condenser, a nitrogen inlet tube, an inlet tube, and a thermometer, 330 parts of a cresol novolac epoxy resin having an epoxy equivalent of 218 g / eq (manufactured by Toto Kasei Co., Ltd .: YDCN-702). The mixture was melted by heating at 90 to 100 ° C. and stirred. Next, 120 parts of acrylic acid, 0.6 part of hydroquinone, and 5 parts of dimethylbenzylamine were added, and the mixture was heated to 115 ° C. with stirring in the presence of oxygen and reacted for 12 hours. Next, 400 parts of cyclohexanone was added to this flask and dissolved by heating to 70 ° C. Next, 81 parts of succinic anhydride was added, the temperature was raised to 95 ° C., and the mixture was stirred and reacted for 8 hours. After confirming that the absorption of the acid anhydride group disappeared by FT-IR measurement, the mixture was cooled to room temperature to obtain a carboxyl group-containing photosensitive resin whose main skeleton was a cresol novolak skeleton. Next, cyclohexanone was added to this solution to adjust the solid content to 50.0%. The ethylenically unsaturated group equivalent of the resin solid content by this design is 319 g / eq, the weight average molecular weight in terms of polystyrene is 11000, the molecular weight distribution is 2.90, and the acid value of the resin solid content by measurement is 85 mgKOH / g. It was.
[製造例7]
撹拌機、還流冷却管、窒素導入管、導入管、温度計を備えた4口フラスコに、滴下漏斗を設置し、フラスコにシクロヘキサノン400部を仕込み、窒素雰囲気下、攪拌しながら90℃に昇温した。別容器にメタクリル酸15部、メタクリル酸メチル30部、メタクリル酸ブチル30部、ベンジルメタクリレート25部、重合開始剤としてアゾビスイソブチロニトリル20部、シクロヘキサノン100部を仕込み、攪拌して均一に溶解した。このモノマー溶液を、フラスコに設置した滴下漏斗に仕込み、フラスコを窒素雰囲気下、90℃で攪拌しながら、滴下漏斗のモノマー溶液を2時間かけてフラスコに滴下した。滴下終了後も90℃のまま攪拌を続け、滴下終了から2時間後、アゾビスイソブチロニトリル0.5部をフラスコに投入した。1時間後、再びアゾビスイソブチロニトリル0.5部をフラスコに投入し、更に2時間攪拌を継続した。その後、フラスコを冷却して反応を停止した。少量サンプリングを行い、ポリスチレン換算の重量平均分子量が18700、分子量分布2.58、樹脂固形分の酸価98mgKOH/gのカルボキシル基含有アクリルプレポリマーを得た。
[Production Example 7]
A dropping funnel was placed in a four-necked flask equipped with a stirrer, reflux condenser, nitrogen inlet tube, inlet tube, and thermometer, and 400 parts of cyclohexanone was charged into the flask, and the temperature was raised to 90 ° C. with stirring in a nitrogen atmosphere. did. In a separate container, 15 parts of methacrylic acid, 30 parts of methyl methacrylate, 30 parts of butyl methacrylate, 25 parts of benzyl methacrylate, 20 parts of azobisisobutyronitrile as a polymerization initiator and 100 parts of cyclohexanone are stirred and dissolved uniformly. did. The monomer solution was charged into a dropping funnel installed in the flask, and the monomer solution in the dropping funnel was dropped into the flask over 2 hours while stirring the flask at 90 ° C. in a nitrogen atmosphere. Stirring was continued at 90 ° C. even after completion of the dropping, and 0.5 part of azobisisobutyronitrile was charged into the flask after 2 hours from the end of the dropping. After 1 hour, 0.5 part of azobisisobutyronitrile was again added to the flask, and stirring was continued for another 2 hours. Thereafter, the flask was cooled to stop the reaction. A small amount of sampling was performed to obtain a carboxyl group-containing acrylic prepolymer having a polystyrene-equivalent weight average molecular weight of 18700, a molecular weight distribution of 2.58, and an acid value of resin solid content of 98 mgKOH / g.
次に、このフラスコに窒素導入管からの窒素を停止し、乾燥空気の導入に切り替え、攪拌しながらグリシジルメタクリレート111部、ジメチルベンジルアミン6部、更に重合禁止剤としてヒドロキノン0.3部を投入し、90℃で8時間反応させた。反応終了後、少量サンプリングを行い、ポリスチレン換算の重量平均分子量が19900、分子量分布2.72、実測による樹脂固形分の酸価5mgKOH/gの水酸基含有アクリルプレポリマーを得た。 Next, the nitrogen from the nitrogen introduction tube was stopped in this flask, switched to introduction of dry air, and 111 parts of glycidyl methacrylate, 6 parts of dimethylbenzylamine and 0.3 part of hydroquinone as a polymerization inhibitor were added while stirring. , Reacted at 90 ° C. for 8 hours. After completion of the reaction, a small amount of sampling was performed to obtain a hydroxyl group-containing acrylic prepolymer having a polystyrene-equivalent weight average molecular weight of 19,900, a molecular weight distribution of 2.72, and an actually measured acid value of resin solids of 5 mgKOH / g.
次に、このフラスコに無水コハク酸63部を投入し、乾燥空気雰囲気下、90℃で攪拌しながら6時間反応させた。FT−IR測定にて酸無水物基の吸収が消失しているのを確認後、室温まで冷却し、主骨格がアクリル樹脂であるカルボキシル基含有感光性樹脂を得た。次いでこの溶液にシクロヘキサノンを加えて、固形分が50.0%になるように調整した。本設計による樹脂固形分のエチレン性不飽和基当量は863g/eqであり、ポリスチレン換算の重量平均分子量は22000、分子量分布2.81、実測による樹脂固形分の酸価は70mgKOH/g、であった。 Next, 63 parts of succinic anhydride was added to the flask and reacted for 6 hours with stirring at 90 ° C. in a dry air atmosphere. After confirming that absorption of the acid anhydride group disappeared by FT-IR measurement, the mixture was cooled to room temperature to obtain a carboxyl group-containing photosensitive resin whose main skeleton was an acrylic resin. Next, cyclohexanone was added to this solution to adjust the solid content to 50.0%. The ethylenically unsaturated group equivalent of the resin solid content by this design is 863 g / eq, the weight average molecular weight in terms of polystyrene is 22000, the molecular weight distribution is 2.81, and the acid value of the resin solid content by measurement is 70 mgKOH / g. It was.
[製造例8]
撹拌機、還流冷却管、窒素導入管、導入管、温度計を備えた4口フラスコに、PTG850(保土ヶ谷化学株式会社製:ポリテトラメチレングリコール、水酸基価=129mgKOH/g)212部、エチレングリコール75部、無水ピロメリット酸(ダイセル化学工業株式会社製)159部、ジメチルベンジルアミン2部、溶剤としてシクロヘキサノン375部を仕込み、窒素気流下、攪拌しながら100℃で10時間攪拌し、ハーフエステル化の反応を行った。続いてこのフラスコに、イソホロンジイソシアネート54部を投入し、90℃で8時間攪拌し、ウレタン化の反応を行った。反応終了後、少量サンプリングを行い、ポリスチレン換算の重量平均分子量が15200、分子量分布2.87、実測による樹脂固形分の酸価170mgKOH/gのカルボキシル基含有ウレタンプレポリマーを得た。
[Production Example 8]
In a 4-neck flask equipped with a stirrer, reflux condenser, nitrogen inlet tube, inlet tube, thermometer, 212 parts of PTG850 (Hodogaya Chemical Co., Ltd .: polytetramethylene glycol, hydroxyl value = 129 mgKOH / g), ethylene glycol 75 Part, pyromellitic anhydride (manufactured by Daicel Chemical Industries, Ltd.) 159 parts, dimethylbenzylamine 2 parts, cyclohexanone 375 parts as a solvent, stirred for 10 hours at 100 ° C. with stirring in a nitrogen stream, Reaction was performed. Subsequently, 54 parts of isophorone diisocyanate was added to the flask and stirred at 90 ° C. for 8 hours to carry out a urethanization reaction. After completion of the reaction, a small amount of sampling was performed to obtain a carboxyl group-containing urethane prepolymer having a polystyrene-equivalent weight average molecular weight of 15,200, a molecular weight distribution of 2.87, and an actually measured acid value of 170 mgKOH / g of resin solids.
次に、このフラスコに窒素導入管からの窒素を停止し、乾燥空気の導入に切り替え、攪拌しながらグリシジルメタクリレート110部、ジメチルベンジルアミン6部、更に重合禁止剤としてヒドロキノン0.3部を投入し、90℃のまま8時間反応させた。冷却後、少量サンプリングを行い、主骨格が酸無水物変性ウレタン骨格であるカルボキシル基含有感光性ウレタン樹脂を得た。次いでこの溶液にシクロヘキサノンを加えて、固形分が50.0%になるように調整した。本設計による樹脂固形分のエチレン性不飽和基当量は896g/eqであり、ポリスチレン換算の重量平均分子量が18800、分子量分布3.12、実測による樹脂固形分の酸価72mgKOH/gであった。 Next, the nitrogen from the nitrogen introduction tube was stopped in this flask, switched to introduction of dry air, 110 parts of glycidyl methacrylate, 6 parts of dimethylbenzylamine, and 0.3 part of hydroquinone as a polymerization inhibitor were added while stirring. The reaction was continued for 8 hours at 90 ° C. After cooling, a small amount of sampling was performed to obtain a carboxyl group-containing photosensitive urethane resin whose main skeleton is an acid anhydride-modified urethane skeleton. Next, cyclohexanone was added to this solution to adjust the solid content to 50.0%. The ethylenically unsaturated group equivalent of the resin solid content by this design was 896 g / eq, the weight average molecular weight in terms of polystyrene was 18,800, the molecular weight distribution was 3.12, and the acid value of the resin solid content was 72 mgKOH / g as measured.
[製造例9]
撹拌機、還流冷却管、窒素導入管、導入管、温度計を備えた4口フラスコに、PTG850(保土ヶ谷化学株式会社製:ポリテトラメチレングリコール、水酸基価=129mgKOH/g)218部、エチレングリコール47部、無水ピロメリット酸(ダイセル化学工業株式会社製)125部、ジメチルベンジルアミン2部、溶剤としてシクロヘキサノン375部を仕込み、窒素気流下、攪拌しながら100℃で10時間攪拌し、ハーフエステル化の反応を行った。続いてこのフラスコに、イソホロンジイソシアネート111部を投入し、90℃で8時間攪拌し、ウレタン化の反応を行った。反応終了後、少量サンプリングを行い、ポリスチレン換算の重量平均分子量が17000、分子量分布2.60、実測による樹脂固形分の酸価110mgKOH/gのカルボキシル基含有ウレタンプレポリマーを得た。
[Production Example 9]
In a 4-neck flask equipped with a stirrer, reflux condenser, nitrogen inlet tube, inlet tube, and thermometer, 218 parts of PTG850 (Hodogaya Chemical Co., Ltd .: polytetramethylene glycol, hydroxyl value = 129 mgKOH / g), ethylene glycol 47 Part, 125 parts of pyromellitic anhydride (manufactured by Daicel Chemical Industries, Ltd.), 2 parts of dimethylbenzylamine, and 375 parts of cyclohexanone as a solvent, stirred for 10 hours at 100 ° C. with stirring in a nitrogen stream, Reaction was performed. Subsequently, 111 parts of isophorone diisocyanate was added to the flask and stirred at 90 ° C. for 8 hours to carry out a urethanization reaction. After completion of the reaction, a small amount of sampling was performed to obtain a carboxyl group-containing urethane prepolymer having a polystyrene-equivalent weight average molecular weight of 17000, a molecular weight distribution of 2.60, and an actually measured acid value of 110 mgKOH / g of resin solids.
次に、このフラスコに窒素導入管からの窒素を停止し、乾燥空気の導入に切り替え、攪拌しながらグリシジルメタクリレート131部、ジメチルベンジルアミン6部、更に重合禁止剤としてヒドロキノン0.3部を投入し、90℃のまま8時間反応させた。反応終了後、少量サンプリングを行い、ポリスチレン換算の重量平均分子量が19200、分子量分布3.00、実測による樹脂固形分の酸価4mgKOH/gの水酸基含有ウレタンプレポリマーを得た。 Next, the nitrogen from the nitrogen introduction tube was stopped in this flask and switched to introduction of dry air. While stirring, 131 parts of glycidyl methacrylate, 6 parts of dimethylbenzylamine, and 0.3 part of hydroquinone as a polymerization inhibitor were added. The reaction was continued for 8 hours at 90 ° C. After completion of the reaction, a small amount of sampling was performed to obtain a hydroxyl group-containing urethane prepolymer having a polystyrene-equivalent weight average molecular weight of 19,200, a molecular weight distribution of 3.00, and an actually measured resin solid acid value of 4 mgKOH / g.
次に、このフラスコに無水コハク酸74部を投入し、乾燥空気雰囲気下、90℃のまま更に6時間反応させた。FT−IR測定にて酸無水物基の吸収が消失しているのを確認後、室温まで冷却し、主骨格が酸無水物変性ウレタン樹脂であるカルボキシル基含有ウレタン樹脂を得た。次いでこの溶液にシクロヘキサノンを加えて、固形分が50.0%になるように調整した。本設計による樹脂固形分のエチレン性不飽和基当量は765g/eqであり、ポリスチレン換算の重量平均分子量は21400、分子量分布3.20、実測による樹脂固形分の酸価は67mgKOH/g、であった。 Next, 74 parts of succinic anhydride was added to the flask, and the reaction was further continued for 6 hours at 90 ° C. in a dry air atmosphere. After confirming that absorption of the acid anhydride group disappeared by FT-IR measurement, the mixture was cooled to room temperature to obtain a carboxyl group-containing urethane resin whose main skeleton was an acid anhydride-modified urethane resin. Next, cyclohexanone was added to this solution to adjust the solid content to 50.0%. The ethylenically unsaturated group equivalent of the resin solid content by this design is 765 g / eq, the weight average molecular weight in terms of polystyrene is 21400, the molecular weight distribution is 3.20, and the acid value of the resin solid content by measurement is 67 mgKOH / g. It was.
製造例5〜9で得られた樹脂について、スペックをまとめたものを表2に示す。 Table 2 summarizes the specifications of the resins obtained in Production Examples 5 to 9.
以下の方法にて感光性樹脂組成物を作製し、感光性ドライフィルム並びに感光性レジストインキとして評価を行った。
<感光性樹脂組成物の作製>
[実施例1〜15]
製造例で得られた感光性樹脂溶液の固形分100部に対して表3に示す固形分比に従い、硬化剤(B)として、エピコート1031S(三菱化学株式会社製:多官能グリシジルエーテル型エポキシ樹脂)、BL3175(住化バイエルウレタン株式会社製:イソシアヌレート型ブロックイソシアネート)、難燃剤(E)としてホスフィン酸アルミニウムEXOLITOP−935(クラリアントジャパン製)とホスファゼンSPB−10(大塚化学(株)製およびシアノフェノキシホスファゼンFP−300((株)伏見製薬所製)、カルボキシベンゾトリアゾール誘導体(D)として城北化学工業製の5-カルボキシベンゾトリアゾール、5-カルボキシベンゾトリアゾールフェニルエステル、5-カルボキシベンゾトリアゾールメチルエステル、着色剤として銅フタロシアニン顔料LIONOL BLUE FG7350(トーヨー ケム(株))、光重合開始剤(C)としてイルガキュアー907(チバ・スペシャルティ・ケミカルズ株式会社製:2−メチル−1−[4−(メチルチオ)フェニル]−2−モルホリノ−1−プロパン)、光増感剤としてDETX−S(日本化薬株式会社製:2,4−ジエチルチオキサントン)を均一に溶解・混合し、横型サンドミルDYNO−MILL((株)シンマルエンタープライズ製)で分散し、グラインドゲージで粗粒子が10μ未満になるまで分散し、感光性樹脂組成物を得た。
A photosensitive resin composition was prepared by the following method and evaluated as a photosensitive dry film and a photosensitive resist ink.
<Preparation of photosensitive resin composition>
[Examples 1 to 15]
In accordance with the solid content ratio shown in Table 3 with respect to 100 parts of the solid content of the photosensitive resin solution obtained in the production example, Epicoat 1031S (manufactured by Mitsubishi Chemical Corporation: polyfunctional glycidyl ether type epoxy resin) ), BL3175 (manufactured by Sumika Bayer Urethane Co., Ltd .: isocyanurate type blocked isocyanate), aluminum phosphinate EXOLITOP-935 (manufactured by Clariant Japan) and phosphazene SPB-10 (manufactured by Otsuka Chemical Co., Ltd. and cyano) as flame retardant (E) Phenoxyphosphazene FP-300 (manufactured by Fushimi Pharmaceutical Co., Ltd.), 5-carboxybenzotriazole, 5-carboxybenzotriazole phenyl ester, 5-carboxybenzotriazole methyl ester manufactured by Johoku Chemical Industry as the carboxybenzotriazole derivative (D) Copper phthalocyanine pigment LIONOL BLUE FG7350 (Toyochem Co., Ltd.) as a colorant and Irgacure 907 (Ciba Specialty Chemicals Co., Ltd .: 2-methyl-1- [4- (methylthio) as a photopolymerization initiator (C) ) Phenyl] -2-morpholino-1-propane) and DETX-S (manufactured by Nippon Kayaku Co., Ltd .: 2,4-diethylthioxanthone) as a photosensitizer are uniformly dissolved and mixed, and a horizontal sand mill DYNO-MILL ( (Manufactured by Shinmaru Enterprise Co., Ltd.) and dispersed with a grind gauge until coarse particles were less than 10 μm to obtain a photosensitive resin composition.
[比較例1〜14]
表5に示す材料および使用量に変更した以外は実施例と同様にして感光性樹脂組成物を作製した。
[Comparative Examples 1-14]
Except having changed into the material and usage-amount shown in Table 5, the photosensitive resin composition was produced like the Example.
使用したカルボキシベンゾトリアゾール誘導体並びにベンゾトリアゾール誘導体の種類を以下に示す。 The types of carboxybenzotriazole derivatives and benzotriazole derivatives used are shown below.
カルボキシベンゾトリアゾール(CBT-1:城北化学工業製)
Carboxybenzotriazole (CBT-1: Johoku Chemical Industry)
5-カルボキシベンゾトリアゾールフェニルエステル(5−CBT−PE:城北化学工業製)
5-Carboxybenzotriazole phenyl ester (5-CBT-PE: manufactured by Johoku Chemical Industries)
2,6-ヒ゛ス〔(1H-ヘ゛ンソ゛トリアソ゛ール-1-yl)メチル〕4-メチルフ゜ロハ゜ノール(BT−3700:城北化学工業製)
2,6-bis [(1H-Benzotriazole-1-yl) methyl] 4-methylfluorophenol (BT-3700: Johoku Chemical Industry)
2,4-シ゛-ter-フ゛チル-6-〔(1H-ヘ゛ンソ゛トリアソ゛ール―1イル)メチル〕フェノール(BT−337:城北化学工業製)
2,4-di-ter-butyl-6-[(1H-benzotriazole-1-yl) methyl] phenol (BT-337: manufactured by Johoku Chemical Industry)
1-〔N,N-ヒ゛ス(2エチルヘキシル)アミノメチル〕ヘ゛ンソ゛トリアソ゛ール(BT−LX:城北化学工業製)
1- [N, N-bis (2-ethylhexyl) aminomethyl] benztriazole (BT-LX: Johoku Chemical Co., Ltd.)
<感光性ドライフィルムの作製、評価>
実施例1〜8と比較例1〜10で得られた感光性樹脂組成物を、12μPETフィルム(東レ・デュポン株式会社製S-12)上に乾燥膜厚が40μmとなるように均一塗工して100℃で5分乾燥させた後、室温まで冷却し、二軸延伸ポリプロピレンフィルム(OPPフィルム)を感光性樹脂組成物面にラミネートして感光性のドライフィルムを得た。以下の方法で評価し、評価結果を表3および表4に示す。
<Production and evaluation of photosensitive dry film>
The photosensitive resin compositions obtained in Examples 1 to 8 and Comparative Examples 1 to 10 were uniformly coated on a 12 μPET film (S-12 manufactured by Toray DuPont Co., Ltd.) so that the dry film thickness was 40 μm. The film was dried at 100 ° C. for 5 minutes, cooled to room temperature, and a biaxially stretched polypropylene film (OPP film) was laminated on the surface of the photosensitive resin composition to obtain a photosensitive dry film. Evaluation is performed by the following method, and the evaluation results are shown in Tables 3 and 4.
(1)基板反り
5cm×5cmのニッカン工業製3層銅貼り積層板(電解Cu18μm/接着剤20μm/PI25μm)上に2mmの銅の縁取りをして、その内側にパターン:線幅125μm/線間125μmのパターンを形成したものにドライフィルムレジストを真空ラミネートした。真空ラミネート条件は加熱温度60℃、真空時間60秒、真空到達圧2hPa、圧力0.4MPa、加圧時間60秒でおこなった。
真空ラミネートしたサンプルを12μPET上に120μmPETマイラーシート越しに水銀ショートアークアンプ( 5kW)にて300mJ露光後、12μPETフィルムを剥がし、150℃の熱風乾燥器で1時間熱硬化(ポストキュア)させた。260℃、10秒のピーク温度の半田リフロー炉に通した後、25℃、湿度50%の条件で、平坦な台の上に12時間静置した。静置後のサンプルについて、正方形の四隅が台から浮き上がっている高さを測定し、その平均値を算出し、以下の基準で評価した。この値が小さいほどサンプルの反りは少なく、良好であることを示す。
◎・・・2mm以下
○・・・5mm以下
△・・・6mm以上〜10mm以下
×・・・11mm以上
(1) A 2 mm copper border is placed on a Nikkan Kogyo 3 layer copper-clad laminate (electrolytic Cu 18 μm / adhesive 20 μm / PI 25 μm) with a substrate warpage of 5 cm × 5 cm, and a pattern: line width 125 μm / between lines A dry film resist was vacuum-laminated on a pattern having a 125 μm pattern. The vacuum lamination conditions were a heating temperature of 60 ° C., a vacuum time of 60 seconds, a vacuum ultimate pressure of 2 hPa, a pressure of 0.4 MPa, and a pressurization time of 60 seconds.
The vacuum-laminated sample was exposed to 300 mJ with a mercury short arc amplifier (5 kW) over a 120 μm PET Mylar sheet on 12 μPET, and then the 12 μPET film was peeled off, followed by thermosetting (post-cure) for 1 hour with a 150 ° C. hot air dryer. After passing through a solder reflow furnace at 260 ° C. and a peak temperature of 10 seconds, it was allowed to stand for 12 hours on a flat table at 25 ° C. and a humidity of 50%. For the sample after standing, the height at which the four corners of the square were lifted from the table was measured, the average value was calculated, and evaluated according to the following criteria. The smaller this value, the less the sample warps, indicating better.
◎ ・ ・ ・ 2mm or less ○ ・ ・ ・ 5mm or less △ ・ ・ ・ 6mm or more-10mm or less × ・ ・ ・ 11mm or more
(2)現像性
感光性ドライフィルムからOPPフィルムを剥がし、ポリアミドフィルム(東レ・デュポン株式会社;カプトン100H)に真空ラミネートした。真空ラミネート条件は加熱温度60℃、真空時間60秒、真空到達圧2hPa、圧力0.4MPa、加圧時間60秒でおこなった。真空ラミネートしたサンプルを12μPET上に120μmPETマイラーシート/ Stoufferステップタブレット21段越しに水銀ショートアークアンプ( 5kW)にて露光後、12μPETフィルムを剥がし、現像機で以下の現像条件(液温30℃の1% Na2CO3 水溶液を0.2 MPaのスプレー圧)で40秒現像した。現像後、150℃の熱風乾燥器で1時間熱硬化(ポストキュア)させた。得られた硬化膜を室温まで冷却し、現像性を評価した。
塗膜が現像液によってきれいに洗い流されている段数を剥離段数とし、剥離段数が6段となる露光量を求めて評価した。露光量は株式会社オーク製作所の積算露光量計UV−351を用いて測定した。
◎・・・200mJ/cm2未満
○・・・200〜400mJ/cm2
△・・・400〜600mJ/cm2
×・・・600mJ/cm2より大きい
(2) The OPP film was peeled off from the developable photosensitive dry film, and vacuum laminated to a polyamide film (Toray DuPont Co., Ltd .; Kapton 100H). The vacuum lamination conditions were a heating temperature of 60 ° C., a vacuum time of 60 seconds, a vacuum ultimate pressure of 2 hPa, a pressure of 0.4 MPa, and a pressurization time of 60 seconds. The vacuum-laminated sample was exposed to 120 μm PET Mylar sheet / Stouffer step tablet 21 steps on a 12 μPET with a mercury short arc amplifier (5 kW), and then the 12 μPET film was peeled off. % Na2CO3 aqueous solution was developed at a spray pressure of 0.2 MPa for 40 seconds. After development, the film was heat-cured (post-cured) for 1 hour in a hot air dryer at 150 ° C. The obtained cured film was cooled to room temperature, and developability was evaluated.
The number of steps at which the coating film was washed away with the developer was defined as the number of peeling steps, and the exposure amount at which the number of peeling steps was 6 was determined and evaluated. The exposure amount was measured using an integrated exposure meter UV-351 manufactured by Oak Manufacturing Co., Ltd.
◎ ・ ・ ・ less than 200 mJ / cm 2 ○ ・ ・ ・ 200 to 400 mJ / cm 2
Δ: 400 to 600 mJ / cm 2
× ・ ・ ・ greater than 600 mJ / cm 2
(3)解像性
現像性の評価で使用したものと同じ硬化膜について評価した。塗膜が現像液によって膨潤している段数を膨潤段数とし、現像性の評価で確認した剥離段数について、下記式により解像段差を求めた。
[解像段差]= [剥離段数]−[膨潤段数]
解像段差が小さいほど、実際のパターン形成工程において、よりシャープなパターンを形成することができ、解像性に優れることが言える。この解像段差を用いて、解像性を次の基準で判断した。
◎・・・解像段差≦1
○・・・解像段差 =2〜3
△・・・解像段差 = 4〜7
×・・・解像段差 ≧ 8
(3) Resolution The same cured film as used in the evaluation of developability was evaluated. The number of steps where the coating film was swollen by the developer was taken as the number of swelling steps, and the resolution step was determined by the following formula for the number of peeling steps confirmed by evaluation of developability.
[Resolution step] = [Number of peeling steps]-[Number of swelling steps]
It can be said that the smaller the resolution step, the sharper the pattern can be formed in the actual pattern forming process, and the better the resolution. Using this resolution step, the resolution was judged according to the following criteria.
◎ ・ ・ ・ Resolution step ≦ 1
○ ・ ・ ・ Resolution step = 2 ~ 3
△ ・ ・ ・ Resolution step = 4-7
× ・ ・ ・ Resolution step ≧ 8
(4)耐折性
感光性ドライフィルムからOPPフィルムを剥がし、の2cm×9cmの2層基板(新日鉄化学社製:エスパネックスMC-18-25-00FRM)上に感光性ドライフィルムを真空ラミネートした。真空ラミネート条件は加熱温度60℃、真空時間60秒、真空到達圧2hPa、圧力0.4MPa、加圧時間60秒で行った。真空ラミネートしたサンプルを12μPET上に120μmPETマイラーシート越しに水銀ショートアークアンプ( 5kW)にて紫外線露光装置で積算光量300mJ/cm2の紫外線を照射した後、150℃の熱風乾燥器で1時間熱硬化(ポストキュア)させた。
このサンプルを導体パターン幅/スペース幅=50/50の部分で180度折り曲げて、折り曲げ部位に500gの錘を5秒間乗せ、これを折り曲げ回数を1回とした。
2層基板の銅側に設けたドライフィルムにクラックが発生したかどうかを(株)キーエンス製マイクロスコープ「VHX−900」で観察し、クラックが発生しないで折り曲げられた回数を評価した。
◎・・・20回以上
○・・・11回以上
△・・・5〜10回
×・・・5回未満
(4) The OPP film is peeled off from the folding-resistant photosensitive dry film, and the photosensitive dry film is vacuum-laminated on a 2 cm × 9 cm two-layer substrate (Nippon Steel Chemical Co., Ltd .: Espanex MC-18-25-00FRM). . The vacuum lamination conditions were a heating temperature of 60 ° C., a vacuum time of 60 seconds, a vacuum ultimate pressure of 2 hPa, a pressure of 0.4 MPa, and a pressurization time of 60 seconds. A vacuum-laminated sample was irradiated on a 12μPET with a mercury short arc amplifier (5kW) through a 120μm PET Mylar sheet and irradiated with UV rays with an integrated light quantity of 300mJ / cm 2 , and then heat-cured for 1 hour in a 150 ° C hot air dryer. (Post cure).
This sample was bent 180 degrees at a portion of conductor pattern width / space width = 50/50, and a 500 g weight was placed on the bent portion for 5 seconds, and this was performed once.
Whether or not a crack was generated in the dry film provided on the copper side of the two-layer substrate was observed with a microscope “VHX-900” manufactured by Keyence Corporation, and the number of times of bending without cracks was evaluated.
◎ ・ ・ ・ 20 times or more ○ ・ ・ ・ 11 times or more Δ ・ ・ ・ 5-10 times × ・ ・ ・ less than 5 times
(5)絶縁信頼性
感光性ドライフィルムからOPPフィルムを剥がし、65mm×65mmの大きさのシートを、ポリイミド上に銅回路が形成された櫛型パターン(導体パターン幅/スペース幅=50μm/50μm)印刷回路基板に真空ラミネートした。真空ラミネート条件は加熱温度60℃、真空時間60秒、真空到達圧2hPa、圧力0.4MPa、加圧時間60秒で行った。真空ラミネートしたサンプルを12μPET上に120μmPETマイラーシート越しに水銀ショートアークアンプ(5kW)にて紫外線露光装置で積算光量300mJ/cm2の紫外線を照射した後、150℃の熱風乾燥器で1時間熱硬化(ポストキュア)させ、評価用試験片を作成した。この試験片の導体回路をプレッシャークッカー(平岡製作所製PC−422R8)に入れ、温度130℃、相対湿度85%、2気圧の雰囲気下で直流電圧50Vを連続的に100時間加え、100時間後の導体間の絶縁抵抗値を測定した。評価基準は以下の通りである。
○・・・絶縁抵抗値107以上
△・・・絶縁抵抗値106以上107Ω未満
×・・・絶縁抵抗値106Ω未満
(6)耐熱性
5cm×5cmのニッカン工業製3層銅貼り積層板(電解Cu18μm/接着剤20μm/PI25μm)上に2mmの銅の縁取りをして、その内側にパターン:線幅125μm/線間125μmのパターンを形成したものに感光性ドライフィルムレジストを真空ラミネートした。真空ラミネート条件は加熱温度60℃、真空時間60秒、真空到達圧2hPa、圧力0.4MPa、加圧時間60秒でおこなった。
真空ラミネートしたサンプルを12μPET上に120μmPETマイラーシート越しに水銀ショートアークアンプ( 5kW)にて300mJ露光後、12μPETフィルムを剥がし、150℃の熱風乾燥器で1時間熱硬化(ポストキュア)させた。その後、260℃、10秒のピーク温度の半田リフロー炉に通した。通した後の変色程度で評価した。
○・・・変色無し
△・・・若干変色
×・・・著しい変色
(5) Insulation reliability The OPP film is peeled off from the photosensitive dry film, and a 65 mm × 65 mm sheet is formed into a comb pattern in which a copper circuit is formed on a polyimide (conductor pattern width / space width = 50 μm / 50 μm). Vacuum laminated to the printed circuit board. The vacuum lamination conditions were a heating temperature of 60 ° C., a vacuum time of 60 seconds, a vacuum ultimate pressure of 2 hPa, a pressure of 0.4 MPa, and a pressurization time of 60 seconds. The vacuum-laminated sample was irradiated with ultraviolet light of 300mJ / cm 2 with a UV exposure device with a mercury short arc amplifier (5kW) over a 120μm PET Mylar sheet on 12μPET, and then heat cured for 1 hour with a 150 ° C hot air dryer. (Post-cure) to prepare a test piece for evaluation. The conductor circuit of this test piece was placed in a pressure cooker (PC-422R8 manufactured by Hiraoka Seisakusho), and a DC voltage of 50 V was continuously applied for 100 hours under an atmosphere of 130 ° C., 85% relative humidity and 2 atm. The insulation resistance value between the conductors was measured. The evaluation criteria are as follows.
○ ・ ・ ・ Insulation resistance value 10 7 or more △ ・ ・ ・ Insulation resistance value 10 6 or more and less than 10 7 Ω × ・ ・ ・ Insulation resistance value less than 10 6 Ω (6) Heat resistance 5 cm × 5 cm Nikkan Kogyo's 3-layer copper 2mm copper edging on the laminated laminate (electrolytic Cu 18μm / adhesive 20μm / PI 25μm), and the pattern: line width 125μm / line spacing 125μm pattern formed on the inside, vacuum photosensitive dry film resist Laminated. The vacuum lamination conditions were a heating temperature of 60 ° C., a vacuum time of 60 seconds, a vacuum ultimate pressure of 2 hPa, a pressure of 0.4 MPa, and a pressurization time of 60 seconds.
The vacuum-laminated sample was exposed to 300 mJ with a mercury short arc amplifier (5 kW) over a 120 μm PET Mylar sheet on 12 μPET, and then the 12 μPET film was peeled off, followed by thermosetting (post-cure) for 1 hour with a 150 ° C. hot air dryer. Thereafter, it was passed through a solder reflow furnace at 260 ° C. and a peak temperature of 10 seconds. The degree of discoloration after passing was evaluated.
○ ・ ・ ・ No discoloration △ ・ ・ ・ Slight discoloration × ・ ・ ・ Significant discoloration
<感光性レジストインキの評価>
実施例9〜15と比較例11〜14で得られた感光性樹脂組成物を以下の方法で評価し、評価結果を表3および表4に示す。
<Evaluation of photosensitive resist ink>
The photosensitive resin compositions obtained in Examples 9 to 15 and Comparative Examples 11 to 14 were evaluated by the following methods, and the evaluation results are shown in Table 3 and Table 4.
(1)基板反り
5cm×5cmのニッカン工業製3層銅貼り積層板(電解Cu18μm/接着剤20μm/PI25μm)上に2mmの銅の縁取りをして、その内側にパターン:線幅125μm/線間125μmのパターンを形成したものに感光性樹脂組成物を乾燥膜厚が40μmとなるように均一塗工して100℃で5分乾燥させた後、サンプル上に120μmPETマイラーシート越しに水銀ショートアークアンプ( 5kW)にて300mJ露光後、150℃の熱風乾燥器で1時間熱硬化(ポストキュア)させた。260℃、10秒のピーク温度の半田リフロー炉に通した後、25℃、湿度50%の条件で、平坦な台の上に12時間静置した。静置後のサンプルについて、正方形の四隅が台から浮き上がっている高さを測定し、その平均値を算出し、以下の基準で評価した。この値が小さいほどサンプルの反りは少なく、良好であることを示す。
◎・・・2mm以下
○・・・5mm以下
△・・・6mm以上〜10mm以下
×・・・11mm以上
(1) A 2 mm copper border is placed on a Nikkan Kogyo 3 layer copper-clad laminate (electrolytic Cu 18 μm / adhesive 20 μm / PI 25 μm) with a substrate warpage of 5 cm × 5 cm, and a pattern: line width 125 μm / between lines A photosensitive resin composition is uniformly applied on a 125 μm pattern so as to have a dry film thickness of 40 μm, dried at 100 ° C. for 5 minutes, and then a mercury short arc amplifier over a 120 μm PET Mylar sheet on the sample. After 300 mJ exposure at (5 kW), heat curing (post-cure) was performed for 1 hour with a 150 ° C. hot air dryer. After passing through a solder reflow furnace at 260 ° C. and a peak temperature of 10 seconds, it was allowed to stand for 12 hours on a flat table at 25 ° C. and a humidity of 50%. For the sample after standing, the height at which the four corners of the square were lifted from the table was measured, the average value was calculated, and evaluated according to the following criteria. The smaller this value, the less the sample warps, indicating better.
◎ ・ ・ ・ 2mm or less ○ ・ ・ ・ 5mm or less △ ・ ・ ・ 6mm or more-10mm or less × ・ ・ ・ 11mm or more
(2)現像性
ポリイミドフィルム(東レ・デュポン株式会社;カプトン100H)に感光性樹脂組成物を乾燥膜厚が40μmとなるように均一塗工して100℃で5分乾燥させた後、サンプル上に120μmPETマイラーシート/ Stoufferステップタブレット21段越しに水銀ショートアークアンプ( 5kW)にて露光後、現像機で以下の現像条件(液温30℃の1% Na2CO3 水溶液を0.2 MPaのスプレー圧)で40秒現像した。
現像後、150℃の熱風乾燥器で1時間熱硬化(ポストキュア)させた。得られた硬化膜を室温まで冷却し、現像性を評価した。塗膜が現像液によってきれいに洗い流されている段数を剥離段数とし、剥離段数が6段となる露光量を求めて評価した。露光量は株式会社オーク製作所の積算露光量計UV−351を用いて測定した。
◎・・・200mJ/cm2未満
○・・・200〜400mJ/cm2
△・・・400〜600mJ/cm2
×・・・600mJ/cm2より大きい
(2) The photosensitive resin composition is uniformly coated on a developable polyimide film (Toray DuPont Co., Ltd .; Kapton 100H) so that the dry film thickness is 40 μm and dried at 100 ° C. for 5 minutes, and then on the sample. 120μm PET Mylar sheet / Stouffer step tablet After exposure with 21 steps of mercury short arc amplifier (5kW), the following development conditions with a developing machine (1% Na2CO3 aqueous solution with a liquid temperature of 30 ° C, 0.2 MPa spray pressure) And developed for 40 seconds.
After development, the film was heat-cured (post-cured) for 1 hour in a hot air dryer at 150 ° C. The obtained cured film was cooled to room temperature, and developability was evaluated. The number of steps at which the coating film was washed away with the developer was defined as the number of peeling steps, and the exposure amount at which the number of peeling steps was 6 was determined and evaluated. The exposure amount was measured using an integrated exposure meter UV-351 manufactured by Oak Manufacturing Co., Ltd.
◎ ・ ・ ・ less than 200 mJ / cm 2 ○ ・ ・ ・ 200 to 400 mJ / cm 2
Δ: 400 to 600 mJ / cm 2
× ・ ・ ・ greater than 600 mJ / cm 2
(3)解像性
現像性の評価で使用したものと同じ硬化膜について評価した。塗膜が現像液によって膨潤している段数を膨潤段数とし、現像性の評価で確認した剥離段数について、下記式により解像段差を求めた。
[解像段差]= [剥離段数]−[膨潤段数]
解像段差が小さいほど、実際のパターン形成工程において、よりシャープなパターンを形成することができ、解像性に優れることが言える。この解像段差を用いて、解像性を次の基準で判断した。
◎・・・解像段差≦1
○・・・解像段差 =2〜3
△・・・解像段差 = 4〜7
×・・・解像段差 ≧ 8
(3) The same cured film as that used in the evaluation of resolution developability was evaluated. The number of steps where the coating film was swollen by the developer was taken as the number of swelling steps, and the resolution step was determined by the following formula for the number of peeling steps confirmed by evaluation of developability.
[Resolution step] = [Number of peeling steps]-[Number of swelling steps]
It can be said that the smaller the resolution step, the sharper the pattern can be formed in the actual pattern forming process, and the better the resolution. Using this resolution step, the resolution was judged according to the following criteria.
◎ ・ ・ ・ Resolution step ≦ 1
○ ・ ・ ・ Resolution step = 2 ~ 3
△ ・ ・ ・ Resolution step = 4-7
× ・ ・ ・ Resolution step ≧ 8
(4)耐折性
2cm×9cmの2層基板(新日鉄化学社製:エスパネックスMC-18-25-00FRM)上に感光性樹脂組成物を乾燥膜厚が40μmとなるように均一塗工して100℃で5分乾燥させた後、サンプル上に120μmPETマイラーシート越しに水銀ショートアークアンプ( 5kW)にて300mJ露光後、150℃の熱風乾燥器で1時間熱硬化(ポストキュア)させた。
このサンプルを導体パターン幅/スペース幅==50/50の部分で180度折り曲げて、折り曲げ部位に500gの錘を5秒間乗せ、これを折り曲げ回数を1回とした。
2層基板の銅側に設けたドライフィルムにクラックが発生したかどうかを(株)キーエンス製マイクロスコープ「VHX−900」で観察し、クラックが発生しないで折り曲げられた回数を評価した。
◎・・・20回以上
○・・・11〜19回
△・・・5〜10回
×・・・5回未満
(4) Folding resistance
A photosensitive resin composition is uniformly coated on a 2 cm × 9 cm two-layer substrate (Nippon Steel Chemical Co., Ltd .: Espanex MC-18-25-00FRM) to a dry film thickness of 40 μm, and then at 100 ° C. for 5 minutes. After drying, the sample was exposed to 300 mJ through a 120 μm PET Mylar sheet with a mercury short arc amplifier (5 kW) and then heat-cured (post-cured) with a hot air dryer at 150 ° C. for 1 hour.
This sample was bent 180 degrees at the portion of conductor pattern width / space width == 50/50, and a 500 g weight was placed on the bent portion for 5 seconds, and this was performed once.
Whether or not a crack was generated in the dry film provided on the copper side of the two-layer substrate was observed with a microscope “VHX-900” manufactured by Keyence Corporation, and the number of times of bending without cracks was evaluated.
◎ ・ ・ ・ 20 times or more ○ ・ ・ ・ 11-19 times Δ ・ ・ ・ 5-10 times × ・ ・ ・ less than 5 times
(5)絶縁信頼性
65mm×65mmの大きさのシートを、ポリイミド上に銅回路が形成された櫛型パターン(導体パターン幅/スペース幅=50μm/50μm)印刷回路基板に感光性樹脂組成物を乾燥膜厚が40μmとなるように均一塗工して100℃で5分乾燥させた後、サンプル上に120μmPETマイラーシート越しに水銀ショートアークアンプ( 5kW)にて300mJ露光後、150℃の熱風乾燥器で1時間熱硬化(ポストキュア)させた。この試験片の導体回路をプレッシャークッカー(平岡製作所製PC−422R8)に入れ、温度130℃、相対湿度85%、2気圧の雰囲気下で直流電圧50Vを連続的に100時間加え、100時間後の導体間の絶縁抵抗値を測定した。評価基準は以下の通りである。
○・・・絶縁抵抗値107以上
△・・・絶縁抵抗値106以上107Ω未満
×・・・絶縁抵抗値106Ω未満
(76)耐熱性
5cm×5cmのニッカン工業製3層銅貼り積層板(電解Cu18μm/接着剤20μm/PI25μm)上に2mmの銅の縁取りをして、その内側にパターン:線幅125μm/線間125μmのパターンを形成したものに、感光性樹脂組成物を乾燥膜厚が40μmとなるように均一塗工して100℃で5分乾燥させた後、サンプルを120μmPETマイラーシート越しに水銀ショートアークアンプ( 5kW)にて300mJ露光後、150℃の熱風乾燥器で1時間熱硬化(ポストキュア)させた。260℃、10秒のピーク温度の半田リフロー炉に通した。通した後の変色程度で評価した。
○・・・変色無し
△・・・若干変色
×・・・著しい変色
(5) Insulation reliability A sheet having a size of 65 mm × 65 mm is coated with a photosensitive resin composition on a printed circuit board having a comb pattern (conductor pattern width / space width = 50 μm / 50 μm) in which a copper circuit is formed on polyimide. After coating uniformly to a dry film thickness of 40 μm and drying at 100 ° C. for 5 minutes, the sample is exposed to 300 mJ through a 120 μm PET Mylar sheet with a mercury short arc amplifier (5 kW) and then dried with hot air at 150 ° C. It was heat-cured (post-cure) for 1 hour in a vessel. The conductor circuit of this test piece was placed in a pressure cooker (PC-422R8 manufactured by Hiraoka Seisakusho), and a DC voltage of 50 V was continuously applied for 100 hours under an atmosphere of 130 ° C., 85% relative humidity and 2 atm. The insulation resistance value between the conductors was measured. The evaluation criteria are as follows.
○ ・ ・ ・ Insulation resistance value 10 7 or more △ ・ ・ ・ Insulation resistance value 10 6 or more and less than 10 7 Ω × ・ ・ ・ Insulation resistance value less than 10 6 Ω (76) Heat resistance 5 cm × 5 cm Nikkan Kogyo's 3-layer copper A photosensitive resin composition is applied to a laminated laminate (electrolytic Cu 18 μm / adhesive 20 μm / PI 25 μm) with a 2 mm copper border and a pattern with a pattern width of 125 μm / line spacing of 125 μm formed inside. After coating uniformly to a dry film thickness of 40 μm and drying at 100 ° C. for 5 minutes, the sample was exposed to 300 mJ through a 120 μm PET Mylar sheet with a mercury short arc amplifier (5 kW), and then a hot air dryer at 150 ° C. For 1 hour. The sample was passed through a solder reflow furnace at 260 ° C. and a peak temperature of 10 seconds. The degree of discoloration after passing was evaluated.
○ ・ ・ ・ No discoloration △ ・ ・ ・ Slight discoloration × ・ ・ ・ Significant discoloration
実施例及び比較例の評価結果から、カルボキシベンゾトリアゾール誘導体(D)を添加することによって、現像性、解像性、耐折性、耐熱性が改善し、カルボキシベンゾトリアゾールを添加した場合が最も効果があることが分かった。
From the evaluation results of Examples and Comparative Examples, by adding the carboxybenzotriazole derivative (D), developability, resolution, folding resistance, and heat resistance are improved, and the effect is most effective when carboxybenzotriazole is added. I found out that
Claims (9)
感光性樹脂(A)が、
1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物(a)と1分子中に少なくとも2個のフェノール性水酸基を有するフェノール化合物(b)とを反応させて側鎖ヒドロキシル基含有樹脂(c)を生成し、
前記側鎖ヒドロキシル基含有樹脂(c)と多塩基酸無水物(d)とを反応させてカルボキシル基含有樹脂(e)を生成し、
前記カルボキシル基含有樹脂(e)と、エポキシ基またはオキセタン基とエチレン性不飽和基とを有する化合物(f)中のエポキシ基又はオキセタン基とを反応させてなる、ヒドロキシル基含有感光性樹脂(A−1)であるか、
前記ヒドロキシル基含有樹脂(A−1)中のヒドロキシル基と、多塩基酸無水物(d)中の酸無水物基とを反応させてなるカルボキシル基含有感光性樹脂(A−2)である、
ことを特徴とする感光性樹脂組成物。 Photosensitive resin (A), epoxy group-containing compound, unblocked isocyanate compound, at least one selected from blocked isocyanate compound, curing agent (B), photopolymerization initiator (C), and carboxybenzotriazole derivative A photosensitive resin composition comprising (D),
The photosensitive resin (A) is
Resin (c) containing a side chain hydroxyl group by reacting an epoxy compound (a) having at least two epoxy groups in one molecule with a phenol compound (b) having at least two phenolic hydroxyl groups in one molecule. Produces
Reacting the side chain hydroxyl group-containing resin (c) with the polybasic acid anhydride (d) to produce a carboxyl group-containing resin (e);
Hydroxyl group-containing photosensitive resin (A) obtained by reacting the carboxyl group-containing resin (e) with an epoxy group or oxetane group in the compound (f) having an epoxy group or oxetane group and an ethylenically unsaturated group -1) or
It is a carboxyl group-containing photosensitive resin (A-2) obtained by reacting a hydroxyl group in the hydroxyl group-containing resin (A-1) with an acid anhydride group in the polybasic acid anhydride (d).
The photosensitive resin composition characterized by the above-mentioned.
A dry film type photosensitive solder resist comprising the photosensitive resin composition according to claim 1 and a flame retardant.
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CN115461381A (en) * | 2020-05-01 | 2022-12-09 | Dic株式会社 | Acid group-containing (meth) acrylate resin, curable resin composition, insulating material, resin material for solder resist, and resist member |
JP7197055B2 (en) | 2020-05-01 | 2022-12-27 | Dic株式会社 | Acid group-containing (meth)acrylate resin, curable resin composition, insulating material, resin material for solder resist, and resist member |
JP7525348B2 (en) | 2020-09-23 | 2024-07-30 | 株式会社タムラ製作所 | Photosensitive resin composition |
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