JP2013205019A5 - - Google Patents

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Publication number
JP2013205019A5
JP2013205019A5 JP2012070583A JP2012070583A JP2013205019A5 JP 2013205019 A5 JP2013205019 A5 JP 2013205019A5 JP 2012070583 A JP2012070583 A JP 2012070583A JP 2012070583 A JP2012070583 A JP 2012070583A JP 2013205019 A5 JP2013205019 A5 JP 2013205019A5
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JP
Japan
Prior art keywords
extending
support
physical quantity
base
extension
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Application number
JP2012070583A
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English (en)
Japanese (ja)
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JP5950087B2 (ja
JP2013205019A (ja
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Priority to JP2012070583A priority Critical patent/JP5950087B2/ja
Priority claimed from JP2012070583A external-priority patent/JP5950087B2/ja
Publication of JP2013205019A publication Critical patent/JP2013205019A/ja
Publication of JP2013205019A5 publication Critical patent/JP2013205019A5/ja
Application granted granted Critical
Publication of JP5950087B2 publication Critical patent/JP5950087B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012070583A 2012-03-27 2012-03-27 物理量検出デバイス、物理量検出器、および電子機器 Expired - Fee Related JP5950087B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012070583A JP5950087B2 (ja) 2012-03-27 2012-03-27 物理量検出デバイス、物理量検出器、および電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012070583A JP5950087B2 (ja) 2012-03-27 2012-03-27 物理量検出デバイス、物理量検出器、および電子機器

Publications (3)

Publication Number Publication Date
JP2013205019A JP2013205019A (ja) 2013-10-07
JP2013205019A5 true JP2013205019A5 (cg-RX-API-DMAC10.html) 2015-05-07
JP5950087B2 JP5950087B2 (ja) 2016-07-13

Family

ID=49524279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012070583A Expired - Fee Related JP5950087B2 (ja) 2012-03-27 2012-03-27 物理量検出デバイス、物理量検出器、および電子機器

Country Status (1)

Country Link
JP (1) JP5950087B2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106771358A (zh) * 2016-11-30 2017-05-31 西安交通大学 一种微型差动式全石英谐振加速度计

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19719779A1 (de) * 1997-05-10 1998-11-12 Bosch Gmbh Robert Beschleunigungssensor
EP1395835B1 (en) * 2001-05-15 2006-08-16 Honeywell International Inc. Accelerometer strain relief structure
JP4905574B2 (ja) * 2010-03-25 2012-03-28 株式会社豊田中央研究所 可動部分を備えている積層構造体
CN102959403B (zh) * 2010-06-21 2015-11-25 大日本印刷株式会社 力学量传感器

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