JP2013203056A - Method for manufacturing hollow molded body, hollow molded body, and manufacturing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hollow molded body excellent in hermetic properties, a method for manufacturing the hollow molded body excellent in hermetic properties, and a manufacturing apparatus capable of manufacturing the hollow molded body.SOLUTION: A method for manufacturing a hollow molded body 1 includes the steps of: using a container 2 made by molding a forming material including a thermoplastic resin and a lid 3 made by molding a light transmitting material; laser-furing a contact part of the top part of the sidewall and the lid 3 while decompressing a storing space S surrounded by a sidewall and a bottom part of the container 2; and sealing the decompressed storing space S.

Description

  The present invention relates to a method for manufacturing a hollow molded body, a hollow molded body, and a manufacturing apparatus.

  2. Description of the Related Art Conventionally, a resin molded body (hereinafter sometimes referred to as a hollow molded body) that has a housing space and is hermetically sealed is known. As a specific example of such a molded body, a hollow package in which a component such as an electronic circuit is enclosed in an insulating container and sealed with a cap (lid) can be mentioned.

  As a method for producing such a hollow molded body, a method of integrating a container and a cap by laser welding is known (for example, see Patent Document 1).

JP 2004-235484 A

  In such a hollow molded body, high airtightness may be required in order to prevent damage to the parts to be sealed due to moisture and oxygen in the atmosphere. Therefore, a method for producing a highly airtight hollow molded body has been demanded. There has also been a demand for a production apparatus that can easily produce a highly airtight hollow molded body.

  This invention is made | formed in view of such a situation, Comprising: It aims at providing the manufacturing method of the hollow molded object excellent in airtightness. Another object of the present invention is to provide a hollow molded body produced by such a method for producing a hollow molded body. Another object of the present invention is to provide a production apparatus capable of producing a hollow molded article having excellent airtightness.

  In order to solve the above-described problems, one embodiment of the present invention uses a container formed by molding a forming material containing a thermoplastic resin and a lid formed by molding a light-transmitting material, and includes a side wall and a bottom portion of the container. A method for producing a hollow molded body, comprising: a step of laser welding a contact portion between the top of the side wall and the lid in a state where the housing space surrounded by the pressure is reduced, and sealing in a state where the housing space is decompressed. provide.

  In one aspect of the present invention, after the container is closed by the lid, the work space in which the container and the lid are placed is depressurized to depressurize the storage space, and then laser welding is performed. desirable.

  In one embodiment of the present invention, it is desirable to perform laser welding after the container is sealed with the lid in a previously decompressed environment.

  In one aspect of the present invention, the thermoplastic resin is preferably a liquid crystal polyester.

  In one aspect of the present invention, it is desirable that the light transmissive material is a forming material containing liquid crystal polyester.

  Moreover, one aspect of the present invention provides a hollow molded body produced by a method for producing a hollow molded body.

  Further, one embodiment of the present invention is a mounting table on which an object to be laser-welded is mounted, a laser light source that irradiates the object with laser light, and a distance from the mounting table that faces the mounting table. A region in which the object of the mounting table is placed between the mounting table and the facing member, which is formed by forming a facing member that can be relatively changed, and a forming material including an elastic material into a closed ring shape. And the counter member is provided with a laser beam transmitting portion that is at least planarly overlapped with the opening of the wall member and transmits the laser beam, and is opposed to the mounting table. When the separation distance is narrowed, the member sandwiches the wall material to form a sealed work space surrounded by the mounting table, the opposing member, and the wall material, and the separation distance increases. The mounting table or the counter member described above The wall member is spaced apart, and the mounting table, the opposing member, or the wall member is provided with a through hole connected to the work space, and the pressure is reduced through the through hole. A manufacturing apparatus further comprising the apparatus is provided.

  In one aspect of the present invention, it is preferable that the facing member includes a heat radiating member made of a light transmissive material and provided in the laser light transmitting portion, and a support that supports the heat radiating member.

  In one aspect of the present invention, it is preferable that the facing member has a jig for holding the object on a surface facing the mounting table.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the hollow molded object excellent in airtightness can be provided. Moreover, the hollow molded object manufactured with such a manufacturing method of a hollow molded object can be provided. Moreover, the manufacturing apparatus which can manufacture the hollow molded object excellent in airtightness can be provided.

It is a schematic diagram which shows an example of the hollow molded object manufactured with the manufacturing method of this embodiment. It is a schematic diagram explaining the manufacturing apparatus of this embodiment. It is process drawing of the manufacturing method of the hollow molded object of this embodiment. It is process drawing of the manufacturing method of the hollow molded object of this embodiment.

  The method for producing a hollow molded body of the present embodiment uses a container formed by molding a forming material containing a thermoplastic resin and a lid formed by molding a light transmissive material, and is surrounded by the side wall and the bottom of the container. In a state where the storage space is decompressed, a contact portion between the top of the side wall and the lid is laser-welded, and the housing space is sealed in a decompressed state.

  Moreover, the hollow molded object of this embodiment is manufactured with the manufacturing method of the above-mentioned hollow molded object.

In addition, the manufacturing apparatus of the present embodiment includes a mounting table on which an object to be laser-welded is mounted, a laser light source that irradiates the object with laser light, a front surface of the mounting table, and a distance from the mounting table. A facing member capable of relatively changing the distance and a forming material including an elastic material are formed in a closed ring shape, and the object of the mounting table is placed between the mounting table and the facing member. A wall material surrounding the periphery of the region, and the opposing member is provided with a laser beam transmitting portion that overlaps at least the opening of the wall material and transmits the laser beam, With the facing member, when the separation distance is narrowed, the wall material is sandwiched to form a sealed work space surrounded by the mounting table, the facing member, and the wall material, and the separation distance is widened. By the mounting table or the pair The member and the wall material are separated from each other, and the mounting table, the opposing member, or the wall material is provided with a through hole connected to the work space, and the work space is decompressed through the through hole. It further has a pressure reducing device.
Hereinafter, it demonstrates in order.

[Hollow molding]
1A and 1B are schematic views showing an example of a hollow molded body manufactured by the manufacturing method of the present embodiment, in which FIG. 1A is an exploded perspective view and FIG. 1B is a schematic cross-sectional view. As shown in FIGS. 1 (a) and 1 (b), the hollow molded body 1 has a container 2 and a lid 3 molded by a known method such as injection molding. In the hollow molded body 1 of the present embodiment, the container 2 and the lid 3 are joined using a laser welding method.

  The container 2 is a molded body having a housing space S surrounded by a bottom 21 and a side wall 22 intersecting the bottom 21 and having an opening 23 formed on one surface. The shape of the container 2 can be set as appropriate according to the shape of the components housed in the housing space S. For example, when a semiconductor element having a generally rectangular parallelepiped shape is accommodated in the accommodating space S, as shown in FIGS. 1A and 1B, the rectangular parallelepiped bottom 21 and the side wall 22 orthogonal to the accommodating space S are provided. Is preferably a rectangular parallelepiped shape. In addition, a hollow molded body having a cylindrical outer shape or a polygonal columnar outer shape may be used. Furthermore, a hollow molded body having an outer shape of a truncated cone or a polygonal truncated cone may be used.

  The container 2 contains a colorant that absorbs laser light and converts energy into heat. As this colorant, carbon black, monoazo dye, anthraquinone dye, perylene dye, phthalocyanine dye, nigrosine dye, titanium black, black iron oxide, yellow iron oxide, red iron oxide, cadmium yellow, nickel titanium yellow, strontium yellow, water content Examples thereof include chromium oxide, chromium oxide, cobalt aluminate, and ultramarine blue, and one or more kinds may be used. Among these, carbon black, titanium black, and black iron oxide are preferable because of high heat resistance.

  Such a colorant is preferably contained in an amount of 0.01 parts by mass or more and 10 parts by mass or less, and 0.05 parts by mass or more and 5 parts by mass or less with respect to the total amount (100 parts by mass) of the container 2. More preferably.

  Moreover, the container 2 may contain an inorganic filler, various additives, etc. in the range which does not impair the effect of this invention.

  Note that a terminal for connecting the accommodation space S and the outside of the container 2 can be embedded in the side wall 22 at the time of injection molding of the container 2. For example, it is possible to obtain a container 2 having external connection terminals by inserting a lead frame that has been processed into a terminal shape in advance into a mold and then performing injection molding.

  The lid 3 is a plate-like molded body having the same shape as the container 2 in plan view and made of a light transmissive material.

  Here, in the present specification, “light transmittance” of “light transmissive material” means that laser light for laser welding is used to weld the container 2 and the lid 3 using a laser welding method. It refers to having a certain degree of light transmittance so that the container 2 can be irradiated with laser light. Therefore, even if a certain material is not a transparent material having a high light transmittance in the entire wavelength region, it shows a high light transmittance with respect to the light of the wavelength in relation to the wavelength of the laser light to be used. In the case where the lid 3 capable of irradiating laser light can be formed, the material is assumed to be a “light transmissive material” in the present specification.

  In the figure, the lid 3 has a rectangular shape in plan view, like the rectangular container 2 in plan view. Further, on the side of the lid 3 facing the container 2, a convex portion 31 that fits into the opening 23 of the container 2 is provided at the center. In the figure, in accordance with the shape of the opening 23 of the container 2, the convex portion 31 also has a rectangular shape in plan view.

  In the present embodiment, the shape of the lid 3 is the same as the planar view shape of the container 2 and the shape of the opening 23, but the planar view shape of the container 2 and the lid 3. May be different. Moreover, the center part of the lid | cover 3 may be rising up and it may be depressed. Of course, a flat lid that does not have the convex portion 31 like the lid 3 shown in the figure may be used.

  The thickness TF around the convex portion 31 (peripheral portion 32) is preferably 0.2 ≦ TF / LA ≦ 1 with respect to the width LA of the top portion 24 of the side wall 22, and 0.2 ≦ TF / LA ≦. More preferably, it is 0.5. When TF / LA ≧ 0.2, the strength of the obtained hollow molded article is sufficient. When TF / LA ≦ 1, attenuation of the amount of light reaching the top 24 of the side wall 22 can be suppressed. This is because TF / LA ≦ 1 when the laser light transmitted through the peripheral portion 32 at the time of laser welding has a component that is partially scattered at the peripheral portion 32 and irradiated in a direction intersecting the beam axis of the laser light. This is because even if the light is scattered, the top portion 24 is likely to be irradiated before the laser light spreads.

  The lid 3 may contain an inorganic filler, various additives, and the like as long as the effects of the present invention are not impaired.

  The container 2 and the lid 3 are brought into contact with the top 24 and the peripheral edge 32 in a state in which the convex portion 31 of the lid 3 is fitted to the opening 23 of the container 2, and the contact portion is joined using a laser welding method. ing. That is, in the manufacturing method of the hollow molded body of this embodiment, the contact portion between the container 2 and the lid 3 is an overlapping portion of the top 24 and the peripheral edge portion 32 when the hollow molded body 1 is viewed in plan. Since both the upper surface of the top portion 24 and the lower surface of the peripheral edge portion 32 are horizontal surfaces (surfaces parallel to each other), the size and shape of the contact portion coincide with the size and shape of the top portion 24.

  As a material for forming the container 2 and the lid 3, polystyrene resin, acrylic resin, polycarbonate resin, polyester resin, polyamide resin, polyacetal resin, polyphenylene ether resin, fluororesin, polyphenylene sulfide resin, polysulfone, which are resin materials having optical transparency, are used. Examples include resins, polyarylate resins, polyetherimide resins, polyethersulfone resins, polyetherketone resins, liquid crystal polyesters, polyamideimide resins, polyimide resins, etc. Among these, fluidity, heat resistance, rigidity Liquid crystal polyester is preferred because of its good gas barrier properties.

(Liquid crystal polyester)
The liquid crystalline polyester that can be used as a material for forming the hollow molded body of the present embodiment is a liquid crystalline polyester that exhibits liquid crystallinity in a molten state, and is preferably melted at a temperature of 450 ° C. or lower. The liquid crystal polyester may be a liquid crystal polyester amide, a liquid crystal polyester ether, a liquid crystal polyester carbonate, or a liquid crystal polyester imide. The liquid crystal polyester is preferably a wholly aromatic liquid crystal polyester using only an aromatic compound as a raw material monomer.

As a typical example of liquid crystal polyester,
(I) An aromatic hydroxycarboxylic acid, an aromatic dicarboxylic acid, and at least one compound selected from the group consisting of an aromatic diol, an aromatic hydroxyamine, and an aromatic diamine are polymerized (polycondensed). (II) Polymerized from plural kinds of aromatic hydroxycarboxylic acids (III) At least one compound selected from the group consisting of aromatic dicarboxylic acids and aromatic diols, aromatic hydroxyamines and aromatic diamines (IV) Polyesters such as polyethylene terephthalate and aromatic hydroxycarboxylic acids are polymerized. Here, the aromatic hydroxycarboxylic acid, the aromatic dicarboxylic acid, the aromatic diol, the aromatic hydroxyamine, and the aromatic diamine are each independently replaced with a part or all of the polymerizable derivative. Also good.

Examples of polymerizable derivatives of a compound having a carboxy group such as an aromatic hydroxycarboxylic acid and an aromatic dicarboxylic acid include those obtained by converting a carboxy group into an alkoxycarbonyl group or an aryloxycarbonyl group (ester), carboxy Examples include those obtained by converting a group into a haloformyl group (acid halide), and those obtained by converting a carboxy group into an acyloxycarbonyl group (acid anhydride).
Examples of polymerizable derivatives of compounds having a hydroxy group such as aromatic hydroxycarboxylic acids, aromatic diols and aromatic hydroxyamines include those obtained by acylating a hydroxy group and converting it to an acyloxyl group (acylated product) ).
Examples of polymerizable derivatives of amino group-containing compounds such as aromatic hydroxyamines and aromatic diamines include those obtained by acylating an amino group and converting it to an acylamino group (acylated product).

  The liquid crystalline polyester preferably has a repeating unit represented by the following general formula (1) (hereinafter sometimes referred to as “repeating unit (1)”). The repeating unit (1) and the following general formula (2) ) (Hereinafter sometimes referred to as “repeat unit (2)”) and a repeat unit represented by the following general formula (3) (hereinafter referred to as “repeat unit (3)”). More preferably).

(1) —O—Ar ¹ —CO—
(2) —CO—Ar ² —CO—
(3) ^-X-Ar 3 -Y-
(In the formula, Ar ¹ is a phenylene group, a naphthylene group or a biphenylylene group; Ar ² and Ar ³ are each independently a phenylene group, a naphthylene group, a biphenylylene group or a group represented by the following general formula (4): Yes; X and Y are each independently an oxygen atom or imino group; one or more hydrogen atoms in Ar ¹ , Ar ² and Ar ³ are each independently substituted with a halogen atom, an alkyl group or an aryl group May be.)
(4) -Ar ⁴ -Z-Ar ^5-
(In the formula, Ar ⁴ and Ar ⁵ are each independently a phenylene group or a naphthylene group; Z is an oxygen atom, a sulfur atom, a carbonyl group, a sulfonyl group, or an alkylidene group.)

Examples of the halogen atom that can be substituted for the hydrogen atom in the group represented by Ar ¹ , Ar ^2, or Ar ³ include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

Examples of the alkyl group that can be substituted for the hydrogen atom in the group represented by Ar ¹ , Ar ^2, or Ar ³ include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and an isobutyl group. , S-butyl group, t-butyl group, n-hexyl group, n-heptyl group, 2-ethylhexyl group, n-octyl group, nonyl group, n-decyl group, etc. 10 is preferable.

Examples of the aryl group that can be substituted for the hydrogen atom in the group represented by Ar ¹ , Ar ^2, or Ar ³ include a phenyl group, an o-tolyl group, an m-tolyl group, a p-tolyl group, and the like. Examples thereof include condensed aromatic groups such as a monocyclic aromatic group, 1-naphthyl group and 2-naphthyl group, and the carbon number thereof is preferably 6-20.

When the hydrogen atom of the group represented by Ar ¹ , Ar ² or Ar ³ is substituted with these groups, the number of each group is represented by Ar ¹ , Ar ² or Ar ³ , respectively. Independently, it is preferably one or two, more preferably one.

  Examples of the alkylidene group include a methylene group, an ethylidene group, an isopropylidene group, an n-butylidene group, and a 2-ethylhexylidene group, and the number of carbon atoms is preferably 1 to 10.

The repeating unit (1) is a repeating unit derived from a predetermined aromatic hydroxycarboxylic acid. As the repeating unit (1), Ar ¹ is a p-phenylene group (repeating unit derived from p-hydroxybenzoic acid), and Ar ¹ is a 2,6-naphthylene group (6-hydroxy-2). -Repeating units derived from naphthoic acid) are preferred.

The repeating unit (2) is a repeating unit derived from a predetermined aromatic dicarboxylic acid. As the repeating unit (2), Ar ² is a p-phenylene group (a repeating unit derived from terephthalic acid), Ar ² is an m-phenylene group (a repeating unit derived from isophthalic acid), Ar ² Is a 2,6-naphthylene group (a repeating unit derived from 2,6-naphthalenedicarboxylic acid), and Ar ² is a diphenyl ether-4,4′-diyl group (diphenyl ether- 4,4′-dicarboxylic acid-derived repeating units) are preferred.

The repeating unit (3) is a repeating unit derived from a predetermined aromatic diol, aromatic hydroxylamine or aromatic diamine. As the repeating unit (3), Ar ³ is a p-phenylene group (a repeating unit derived from hydroquinone, p-aminophenol or p-phenylenediamine), and Ar ³ is a 4,4′-biphenylylene group. Those (4,4′-dihydroxybiphenyl, 4-amino-4′-hydroxybiphenyl or repeating units derived from 4,4′-diaminobiphenyl) are preferred.

  The content of the repeating unit (1) is the total amount of all repeating units constituting the liquid crystal polyester (the substance of each repeating unit is obtained by dividing the mass of each repeating unit constituting the liquid crystal polyester by the formula weight of each repeating unit). The equivalent amount (mole) is obtained, and the total value thereof) is preferably 30 mol% or more, more preferably 30 to 80 mol%, still more preferably 40 to 70 mol%, particularly preferably 45 to 65. Mol%.

  The content of the repeating unit (2) is preferably 35 mol% or less, more preferably 10 to 35 mol%, still more preferably 15 to 30 mol%, based on the total amount of all repeating units constituting the liquid crystal polyester. Most preferably, it is 17.5-27.5 mol%.

  The content of the repeating unit (3) is preferably 35 mol% or less, more preferably 10 to 35 mol%, still more preferably 15 to 30 mol%, based on the total amount of all repeating units constituting the liquid crystal polyester. Most preferably, it is 17.5-27.5 mol%.

  For example, when the liquid crystalline polyester is composed of the repeating unit (1), the repeating unit (2), and the repeating unit (3), the content of the repeating unit (1) is 30 mol% or more and 80 mol% or less. The content of (2) is preferably 10 mol% or more and 35 mol% or less, and the content of the repeating unit (3) is preferably 10 mol% or more and 35 mol% or less.

  As the content of the repeating unit (1) increases, the liquid crystalline polyester tends to improve the melt fluidity, heat resistance, strength and rigidity. However, if the content is too large, the melting temperature and the melt viscosity tend to increase, which is necessary for molding. Temperature tends to be high.

  The ratio between the content of the repeating unit (2) and the content of the repeating unit (3) is expressed as [content of repeating unit (2)] / [content of repeating unit (3)] (mol / mol). The ratio is preferably 0.9 / 1 to 1 / 0.9, more preferably 0.95 / 1 to 1 / 0.95, and still more preferably 0.98 / 1 to 1 / 0.98.

  In addition, liquid crystalline polyester may have 2 or more types of repeating units (1)-(3) each independently. The liquid crystal polyester may have a repeating unit other than the repeating units (1) to (3), and the content thereof is preferably 10 with respect to the total amount of all repeating units constituting the liquid crystal polyester. The mol% or less, more preferably 5 mol% or less.

  The liquid crystal polyester preferably has, as the repeating unit (3), X and Y each having an oxygen atom, that is, a repeating unit derived from a predetermined aromatic diol. As the repeating unit (3), More preferably, X and Y each have only an oxygen atom. By doing in this way, liquid crystalline polyester tends to become low in melt viscosity.

  The liquid crystal polyester is preferably produced by melt polymerization of raw material monomers corresponding to the repeating units constituting the liquid crystal polyester and solid-phase polymerization of the obtained polymer (prepolymer). Thereby, high molecular weight liquid crystal polyester having high heat resistance, strength and rigidity can be produced with good operability. Melt polymerization may be carried out in the presence of a catalyst. Examples of the catalyst in this case include metals such as magnesium acetate, stannous acetate, tetrabutyl titanate, lead acetate, sodium acetate, potassium acetate, and antimony trioxide. Compounds, nitrogen-containing heterocyclic compounds such as 4- (dimethylamino) pyridine, 1-methylimidazole and the like can be mentioned, and nitrogen-containing heterocyclic compounds are preferably used.

  The liquid crystal polyester has a flow initiation temperature of preferably 270 ° C. or higher, more preferably 270 ° C. or higher and 400 ° C. or lower, and further preferably 280 ° C. or higher and 380 ° C. or lower. The higher the flow start temperature, the easier it is to improve heat resistance, strength and rigidity. However, if the flow start temperature is too high, a high temperature is required for melting, heat deterioration during molding is likely, and viscosity during melting increases. The sex will be reduced.

The flow start temperature is also called the flow temperature or flow temperature, and the liquid crystal polyester is heated at a rate of 4 ° C./min under a load of 9.8 MPa (100 kgf / cm ² ) using a capillary rheometer. Is a temperature showing a viscosity of 4800 Pa · s (48000 poise) when extruded from a nozzle having an inner diameter of 1 mm and a length of 10 mm, and is a measure of the molecular weight of the liquid crystalline polyester (Naide Koide, “ “Liquid Crystal Polymer—Synthesis / Molding / Application—”, CMC Co., Ltd., June 5, 1987, p. 95).

  In addition, as a material for forming the lid 3, an optically transparent inorganic material can be used. Examples of the material for forming the lid 3 include soda lime glass, quartz glass, phosphosilicate glass, fluoride glass, lead glass, lanthanum glass, barium glass, borosilicate glass, and aluminosilicate glass.

  When the forming material of the lid 3 is an inorganic material such as glass, the peripheral edge 32 is at least one selected from the group consisting of magnesium fluoride, zirconia, and aluminum oxide as long as the effects of the present invention are not impaired. It is preferable that the surface is treated with a treatment agent. The surface treatment can be performed, for example, by preparing a solution or dispersion in which the treatment agent is dissolved or dispersed in an appropriate solvent and applying the solution by spin coating or the like. Moreover, the peripheral part 32 can also be surface-treated by performing the sputtering process and the vapor deposition process using the target which consists of a substance which comprises a processing agent.

  Specifically, as the surface treatment using magnesium fluoride, for example, argon gas is used as a sputtering gas, and fluorine gas diluted with argon is used as a reaction gas. A method of depositing on the surface of the substrate, using magnesium fluoride as a deposition material, irradiating it with an electron beam and heating and vapor-depositing it, evaporating an evaporation gas on the surface of the peripheral portion 32, and adjusting with hydrofluoric acid and magnesium acetate For example, a method of applying the sol solution to the surface of the peripheral portion 32 by spin coating or the like.

  As the surface treatment with zirconia, for example, zirconia is used as a vapor deposition material, it is heated and evaporated by irradiating it with an electron beam, and vaporized gas is vapor-deposited on the surface of the peripheral portion 32. The method of crafting is mentioned.

  As the surface treatment with aluminum oxide, for example, argon gas is used as a sputtering gas, oxygen is used as a reactive gas, an aluminum target is sputtered, and a gas generated by sputtering is deposited on the surface of the peripheral portion 32, and metal aluminum is used as a vapor deposition material. And a method of evaporating the generated evaporating gas together with oxygen gas on the surface of the peripheral portion 32, a method of coating by spin coating using an aluminum oxide sol, and the like. .

  Moreover, when the forming material of the lid | cover 3 is an inorganic material like glass, it is good also as performing the roughening process for improving the welding strength. This roughening treatment can be performed, for example, by a method of etching with an etching solution such as a mixed aqueous solution of chromic acid and sulfuric acid or hydrofluoric acid, or a sand blast method.

  The surface treatment and the roughening treatment of the peripheral edge portion 32 described above may be performed in combination with each other.

When the laser welding method is used, at least a part of the container 2 is melted to weld the container 2 and the lid 3. However, in order to obtain higher welding strength, both of the forming materials of the container 2 and the lid 3 are used. A thermoplastic resin is preferred. In this case, it is preferable to use a forming material having the same melting point or flow start temperature for the container 2 and the lid 3, and it is more preferable to use the same material except for the presence or absence of the addition of a colorant.
The hollow molded body of the present embodiment is configured as described above.

[Method for producing hollow molded body]
FIG. 2 is a schematic diagram for explaining the manufacturing apparatus of the present embodiment.
A manufacturing apparatus 100A shown in the figure includes a mounting table 101 on which a container (object) 2 and a lid (object) 3 to be laser-welded are mounted, and a heat sink that holds the container 2 and the lid 3 between the mounting table 101. (A heat radiating member, a laser beam transmitting portion) 102 and a frame body (supporting body) 103 that has an opening 103 a and suppresses the heat sink 102. The heat sink 102 and the frame 103 correspond to opposing members in the present invention. A transparent member made of a light transmissive material may be fitted in the opening 103a of the frame 103.

  The mounting table 101 is a plate-like member formed using a material having a low air permeability such as a metal material or an inorganic material or a material having no air permeability.

  The heat sink 102 has a laser light transmittance of 50% or more, which will be described later, and a thermal conductivity of 1 W / mK or more. The heat sink 102 preferably has a laser light transmittance of 90% or more. Moreover, it is preferable in thermal conductivity being 5 W / mK or more. Examples of the material for forming the heat sink 102 include transparent alumina, transparent beryllia, transparent magnesium, quartz glass, sapphire, and silicon.

  The mounting table 101 is provided so as to be movable up and down by an elevator 104 such as a spring or a hydraulic cylinder, and the distance between the mounting table 101, the heat sink 102, and the frame body 103 (opposing member) can be relatively changed. It has become. The mounting table 101 and the frame body 103 are connected by a plurality of (four in the figure) support columns 105. In the figure, the elevator 104 is shown as a hydraulic cylinder.

  The laser light source 106 that emits laser light is provided so as to be able to scan in the horizontal direction, and is provided so that laser light can be emitted in the direction of the mounting table 101 (downward). The laser light source 106 uses an optical mirror, an optical fiber, a lens, or the like to selectively irradiate a laser beam to a minute region or to irradiate the laser beam with a different focal length. It is preferable that the transmission path can be changed.

  Examples of the type of laser light emitted from the laser light source 106 include gas lasers such as dye lasers, excimer lasers, argon lasers, krypton lasers, helium-neon lasers, solid lasers such as ruby lasers and YAG lasers, and semiconductor lasers. . Among these, laser light having a wavelength in the range of 800 to 1200 nm is preferable because the container 2 and the lid 3 can be stably welded without deteriorating the container 2 and the lid 3.

  On the mounting table 101, a wall material 107 is provided that surrounds the area where the container 2 and the lid 3 are mounted on the mounting table 101 in a closed ring shape. The wall material 107 opens toward the heat sink 102, and the opening of the wall material 107 overlaps the heat sink 102 in a planar manner.

The wall material 107 is formed using an elastic material such as synthetic rubber such as silicone rubber or natural rubber. The wall material 107 is sandwiched between the mounting table 101, the heat sink 102, and the wall material 107 by forming a working space surrounded by the mounting table 101, the heat sink 102, and the wall material 107 by reducing the distance between the mounting table 101 and the opposing member.
Further, the wall material 107 is separated from the heat sink 102 by increasing the separation distance between the mounting table 101 and the heat sink 102, and the container 2 and the lid 3 that are objects of laser welding from the opening above the wall material 107. Can be taken in and out.

The height of the wall material 107 is determined in consideration of the height when the container 2 and the lid 3 that are objects of laser welding are overlapped (hereinafter, this height is referred to as “reference height”). Set.
When the height of the wall material 107 is set higher than the reference height, the wall material 107 is deformed by the pressure with which the wall material 107 is sandwiched between the mounting table 101 and the heat sink 102, and the mounting table 101 and the heat sink. It adheres to 102. As a result, it is easy to form a sealed work space.
Further, when the container 2 and the lid 3 are deformed by the pressure sandwiched between the mounting table 101 and the heat sink 102, the gap between the mounting table 101 and the heat sink 102 becomes a reference height or less. It is also possible to set the height of the wall material 107 lower than the reference height. In this case, since the pressure between the mounting table 101 and the heat sink 102 is first applied to the container 2 and the lid 3, the container 2 and the lid 3 can easily be firmly adhered to each other.

  Note that the wall material 107 does not have to be formed entirely of an elastic material. For example, the portion in contact with the mounting table 101 may be formed of the same material (for example, a metal material) as the mounting table 101, and only the upper end side of the wall material 107 in contact with the heat sink 102 may be formed of an elastic material.

  The mounting table 101 is provided with a through hole 108 a that faces a work space surrounded by the mounting table 101, the heat sink 102, and the wall material 107 and connects to the work space. A decompression device 109 is connected to the through hole 108a via a pipe 108. As the decompression device 109, a generally known vacuum pump can be used.

  In the manufacturing apparatus 100A shown in the figure, the mounting table 101 to which the elevator 104 is connected is moved up and down. However, if the separation distance between the mounting table 101 and the heat sink 102 can be relatively changed, Other configurations can also be employed. For example, the mounting table 101 may be fixed and the heat sink 102 and the frame 103 may be moved up and down.

FIG. 3 is a process diagram of laser welding.
First, as shown in FIG. 3A, a semiconductor element or the like is accommodated in the accommodation space S of the container 2 as needed, and then the container 2 and the lid 3 are overlapped and placed on the placing table 101.

  Next, the mounting table 101 is raised by the elevator 104. As the mounting table 101 rises, the lid 3 comes into contact with the heat sink 102, and the container 2 and the lid 3 are sandwiched and pressed between the mounting table 101 and the frame body 103. Thereby, the container 2 and the lid | cover 3 contact | adhere and are fixed. At the same time, the wall material 107 comes into contact with the heat sink 102 to form a work space surrounded by the mounting table 101, the heat sink 102, and the wall material 107.

  At this time, the pressure applied to the container 2, the lid 3, and the wall material 107 by raising the mounting table 101 does not impair the shapes of the container 2 and the lid 3, and the work space to be formed (shown in FIG. 3B). In order to improve the airtightness of the material, 10 MPa or less is preferable. An elastic member such as a base made of silicone rubber or the like may be sandwiched between the mounting table 101 and the container 2. With such an elastic member, even when the pressure applied to the container 2 and the lid 3 is too high, the pressure can be relieved and damage to the container 2 and the lid 3 can be suppressed.

  Next, as shown in FIG. 3B, the work space α surrounded by the mounting table 101, the heat sink 102, and the wall material 107 is removed using a decompression device (not shown) through the through hole 108a and the pipe 108. I care. In the figure, the discharged gas is indicated by an arrow G. As a result, the working space α is depressurized. Furthermore, the inside of the accommodation space S of the container 2 is also evacuated and depressurized from a slight gap generated at the contact portion between the container 2 and the lid 3.

  Thereafter, a laser beam LB is irradiated from the laser light source 106 to the contact portion between the container 2 and the lid 3. The energy of the laser beam LB is preferably 100 W or less in order to suppress decomposition / deterioration and deformation of the container 2. The scanning speed of the laser light source 106 is preferably 2 mm / second or more.

  The laser beam LB passes through the lid 3 and is irradiated to the container 2. Since the container 2 contains a colorant that absorbs the laser beam LB and generates heat, the contact portion is heated when the contact portion of the container 2 with the lid 3 is irradiated with the laser beam LB. 3 melt together.

After the laser beam is irradiated and the container 2 and the lid 3 are laser-welded as described above, the molten resin is cooled and solidified to obtain the hollow molded body 1 in which the container 2 is sealed with the lid 3. it can.
The manufacturing method of the hollow molded object of this embodiment becomes the above structures.

  The hollow molded body 1 thus obtained is sealed in a state in which the accommodation space S is depressurized. Therefore, compared with a hollow molded body in which the accommodation space S is not depressurized, annealing is performed in a later manufacturing process. Even if heat treatment such as reflow is performed, the accommodation space S is unlikely to become positive pressure and is not easily damaged. Therefore, according to the method for producing a hollow molded body as described above, it is possible to easily produce a hollow molded body that is excellent in airtightness and that can maintain high airtightness even when heat treatment is performed.

  Moreover, according to the hollow molded object of the above structures, since it is manufactured using the manufacturing method of the above-mentioned hollow molded object, the hollow molded object excellent in airtightness can be provided.

  Moreover, according to the manufacturing apparatus having the above configuration, a hollow molded body having excellent airtightness can be manufactured.

(Modification)
In the state shown in FIG. 3B, when the gap between the container 2 and the lid 3 where the container 2 and the lid 3 can be degassed from the inside of the accommodation space S is not formed, as shown in FIG. A suitable manufacturing apparatus 100B may be used. FIG. 4 is a process diagram of laser welding using the manufacturing apparatus 100B, corresponding to FIG.

  The manufacturing apparatus 100B shown in the figure includes a jig 110 that holds the lid 3 on the surface of the heat sink 102 that faces the mounting table 101. The jig 110 is, for example, a leaf spring-like member bent in a bowl shape, supports the peripheral edge of the lid 3 from below, and the pressure applied from the container 2 when the container 2 comes into contact with the container 2 ascending. Therefore, it is possible to adopt a configuration in which the lid 3 is released by retracting outside the apparatus. Moreover, the structure which supports the side surface of the lid | cover 3 from a side may be sufficient.

  When using the manufacturing apparatus 100B, first, as shown in FIG. 4A, the mounting table 101 is lifted in a state where the lid 3 is held on the jig 110, and the wall material 107 and the heat sink 102 are brought into contact with each other. A work space α surrounded by the mounting table 101, the heat sink 102, and the wall material 107 is formed. In the manufacturing apparatus 100 </ b> B, the height of the wall material 107 is set higher than the combined height of the container 2 and the lid 3. Therefore, the lid 3 held by the heat sink 102 can form the work space α in a state where the lid 3 is not in contact with the container 2.

  In this state, the work space α is deaerated using a decompression device (not shown) through the through hole 108 a and the pipe 108. In the figure, the discharged air is indicated by arrows. Thereby, the inside of the work space α is depressurized, and at the same time, the inside of the storage space S of the container 2 is also deaerated and depressurized.

  Thereafter, as shown in FIG. 4B, by further raising the mounting table 101, the container 2 and the lid 3 are sandwiched and pressed between the mounting table 101 and the frame body 103. Thereby, the container 2 and the lid 3 are brought into close contact and fixed in a state where the inside of the accommodation space S is decompressed.

  Next, the laser light source 106 irradiates the contact portion between the container 2 and the lid 3 with the laser beam LB to perform laser welding. Thereby, the hollow molded object 1 sealed in the state by which the storage space S was pressure-reduced can be manufactured.

  Also by the manufacturing method of the above hollow molded objects, the hollow molded object excellent in airtightness which can maintain high airtightness even if it heat-processes can be manufactured easily.

  In addition, the hollow molded object manufactured with the manufacturing method of this embodiment can be used as a case for a semiconductor element accommodation by enclosing a semiconductor element in an internal accommodation space. In addition to the semiconductor element, it can also be used as a case for storing an electronic component in which a sensor such as an image sensor or an acceleration sensor, a vibrator, or the like is enclosed.

  Examples of the present invention will be described below. In addition, this invention is not limited to an Example.

[Example 1]
Liquid crystalline polyester containing a colorant (Sumitomo Chemical, Sumika Super LCP E6808THF BZ, flow start temperature 306 ° C., decomposition start temperature 499 ° C.) is injection molded to form a container, and liquid crystal polyester containing no colorant (Sumitomo Chemical) Manufactured by Sumika Super LCP E6808THF Z, flow start temperature 306 ° C., decomposition start temperature 499 ° C.) was injection molded to form a lid. The shape of the container and the lid is the same as that shown in FIG.

  The molded container had an outer size of 8.6 mm × 8.6 mm × 1.44 mm and a hollow portion inner size of 6.8 mm × 6.8 mm × 0.94 mm.

  The molded lid had a plan view of 9 mm × 9 mm square, a peripheral width of 1.2 mm, a peripheral thickness of 0.3 mm, and a convex thickness of 0.35 mm.

  As the manufacturing apparatus, an apparatus similar to the manufacturing apparatus 100A shown in FIG. 2 was used. The difference from the manufacturing apparatus 100A shown in FIG. 2 is that the mounting table is urged upward using a spring instead of the elevator 104. In the following description, the same reference numerals as those shown in FIG.

  In the manufacturing apparatus used in the examples, a wall material 107 made of silicone rubber (hardness 50 °) is formed on the mounting table 101 with an adhesive. The height of the wall material 107 was 3 mm.

  A base made of silicone rubber (not shown in FIG. 2) is placed on the mounting base 101, and the convex portion 31 is fitted to the container 2 on the base and the container 2 is closed by the lid 3. The container 2 and the lid 3 were placed. The total height of the stacked base, container 2 and lid 3 was 3.7 mm.

  A heat sink 102 made of quartz glass was placed on the lid 3 and biased by a spring to bring the pedestal, the container 2, the lid 3 and the heat sink 102 into close contact with each other. At the same time, the upper end of the wall material 107 and the heat sink 102 were brought into close contact with each other to form a work space surrounded by the mounting table 101, the heat sink 102 and the wall material 107.

  Then, the decompression device (dry pump) connected through the through hole 108a of the mounting table 101 was operated, and the work space was decompressed to 20 KPa.

While operating the dry pump, a laser beam (scanning at a speed of 10 mm / second from a laser light source 106 (manufactured by Fine Devices, FD-200-50) is applied to the contact portion between the container 2 and the lid 3 with a laser beam ( Irradiation was conducted at a wavelength of 940 nm, a laser diameter of 0.2 mm at the focal point, and a laser output of 9.7 W).
Thereafter, the container and the lid were cooled to obtain a hollow molded body. A total of 10 hollow molded articles were produced.

The hollow molded body was confirmed to be airtight by the following bubble leak test.
Moreover, about the hollow molded object which passed the bubble leak test, the change of the airtightness after a heating was confirmed with the following reflow tests.

(Bubble leak test)
The hollow molded body was immersed in Fluorinert heated to 125 ° C., and the presence or absence of bubbles was confirmed in 1 minute. Those with a pass number of 0-3 are evaluated as “×”, those with a pass number of 4-6 are evaluated as “△”, those with a pass number of 7-10 are evaluated as “◯”, and those with a “×” are rejected. It was evaluated.

(Reflow test)
Under a nitrogen atmosphere, the hollow molded body was heated from room temperature (23 ° C.) to 280 ° C. in 200 seconds, held at 280 ° C. for 10 seconds, and further cooled to 50 ° C. in 330 seconds. Thereafter, the bubble leak test was performed again.

[Example 2]
Except that the laser welding was performed in an environment where the pressure was reduced to 50 KPa, a hollow molded body was produced in the same manner as in Example 1, and hermeticity was evaluated.

[Comparative Example 1]
A hollow molded body was produced in the same manner as in Example 1 except that laser welding was performed at normal pressure (101.3 KPa), and hermeticity was evaluated.

  Table 1 shows the results of the bubble leak test and the reflow test for the hollow molded bodies obtained in Examples 1 and 2 and Comparative Example 1.

  As a result of the evaluation, the hollow molded body in which the housing space S was decompressed by the production method of Examples 1 and 2 passed all the bubble leak tests before heating, passed all the reflow tests, and after the heating Even airtightness was maintained.

  On the other hand, the hollow molded body with the accommodation space S obtained at the normal pressure obtained by the manufacturing method of Comparative Example 1 passed all bubble leak tests before heating, but the number of passes decreased in the reflow test, and after heating, Hermeticity was reduced. Moreover, the lid of each hollow molded body that passed the reflow test was swollen. This is considered to be a result of deformation as a result of an increase in internal pressure during the reflow test.

  From these results, it was confirmed that the hollow molded body of the present invention can provide a highly airtight hollow molded body.

DESCRIPTION OF SYMBOLS 1 ... Hollow molded object, 2 ... Container, 21 ... Bottom part, 22 ... Side wall, 23 ... Opening part, 24 ... Top part, 3 ... Cover, 31 ... Convex part, 32 ... Peripheral part, 100 ... Welding apparatus, 101 ... Mounting stand DESCRIPTION OF SYMBOLS 102 ... Heat sink, 103a ... Opening part, 103 ... Frame, 104 ... Elevator, 105 ... Strut, 106 ... Laser light source, 107 ... Wall material, 108 ... Piping, 108a ... Through-hole, 109 ... Decompression device, 110 ... Oji Tools, S ... accommodation space, α ... work space

Claims (9)

  Using a container formed by molding a forming material containing a thermoplastic resin and a lid formed by molding a light transmissive material, the side wall in a state where the housing space surrounded by the side wall and the bottom of the container is decompressed A method for producing a hollow molded body comprising a step of laser-welding a contact portion between a top portion of the substrate and the lid and sealing the housing space in a decompressed state.   2. The hollow molded body according to claim 1, wherein after closing the container with the lid, laser welding is performed after decompressing the storage space by decompressing a work space in which the container and the lid are placed. Production method.   The manufacturing method of the hollow molded object of Claim 1 which performs laser welding, after sealing the said container with the said lid | cover in the environment pressure-reduced beforehand.   The method for producing a hollow molded body according to any one of claims 1 to 3, wherein the thermoplastic resin is a liquid crystal polyester.   The method for producing a hollow molded body according to any one of claims 1 to 4, wherein the light transmissive material is a forming material containing liquid crystal polyester.   The hollow molded object manufactured by the manufacturing method of the hollow molded object of Claim 1 to 5. A mounting table for mounting an object to be laser welded;
A laser light source for irradiating the object with laser light;
An opposing member that faces the mounting table and is capable of relatively changing a separation distance from the mounting table;
A forming material including an elastic material is formed in a closed ring shape, and includes a wall material surrounding a region on which the object of the mounting table is placed between the mounting table and the facing member. ,
The facing member is provided with a laser beam transmitting portion that overlaps at least the opening of the wall material and transmits the laser beam,
The mounting table and the opposing member form a sealed work space sandwiched between the mounting table, the opposing member, and the wall material by sandwiching the wall material by reducing the separation distance; and By spreading the separation distance, the mounting table or the facing member and the wall material are separated,
The manufacturing apparatus further comprising a decompression device in which a through hole connected to the work space is provided in the mounting table, the facing member, or the wall material, and the work space is decompressed through the through hole.   The manufacturing apparatus according to claim 7, wherein the facing member includes a heat radiating member made of a light transmissive material and provided in the laser light transmitting portion, and a support body that supports the heat radiating member.   The manufacturing apparatus according to claim 7 or 8, wherein the facing member has a jig for holding the object on a surface facing the mounting table.

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