JP2013196768A - Method of manufacturing oxide superconducting wire - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide technology capable of surely reducing an amount of dross which is about to adhere the back side of a base material when fusing a tape-like oxide superconductor by a lase beam, and capable of fusing the oxide superconductor while improving dimensional accuracy in the thickness direction of the base material.SOLUTION: The oxide superconductor includes a tape-like base material, an intermediate layer provided above the surface of the base material, an oxide superconducting layer provided on the intermediate layer, and a stabilization layer provided on the oxide superconducting layer. The oxide superconductor is fused by irradiating the laser beam from the outside of the stabilization layer forming side along the longitudinal direction of the base material, and the oxide superconductor is thereby divided into a plurality of pieces in the width direction thereof to manufacture the oxide superconducting wires. In this case, before fusion by the laser beam, a dross draining groove is formed in advance along the positions where the superconductor is fused by irradiating the laser beam, and when fusing the superconductor by the laser beam, fusion is performed along the dross draining groove.

Description

  The present invention relates to a method for producing an oxide superconducting wire.

The RE-123 oxide superconductor (REBa ₂ Cu ₃ O _x : RE is one or more elements selected from rare earth elements) exhibits superconductivity at a liquid nitrogen temperature and has a low current loss. Is processed into a superconducting wire to produce a superconducting conductor or a superconducting coil for supplying power. As a method for processing this oxide superconductor into a wire, a method of forming an oxide superconducting thin film on a metal base tape via an intermediate layer and forming a stabilization layer on the oxide superconducting thin film Has been implemented.
In addition, since the oxide superconductor crystals have electrical anisotropy, it is necessary to control the crystal orientation when forming the oxide superconducting layer on the base tape. A technique of laminating an oxide superconducting layer on a base tape via an intermediate layer has been implemented. As an example of a technique using this intermediate layer, an ion beam assisted film formation method (IBAD method: Ion Beam Assisted Deposition) is known. By this IBAD method, an intermediate layer exhibiting high biaxial orientation is formed on a base tape. An oxide superconducting conductor having excellent superconducting properties can be obtained by forming an oxide superconducting layer on the intermediate layer.

  In order to obtain the target line width in this kind of oxide superconductor, prepare a base tape of the target line width from the start of production, and then form an intermediate layer and an oxide superconducting layer thereon, A method of forming an oxide superconducting wire by forming a stabilizing layer is employed. Alternatively, a base tape having a certain line width is prepared in advance, an intermediate layer and an oxide superconducting layer are formed thereon, and a stabilization layer is formed to form an oxide superconducting conductor. A method of cutting so as to become is also studied. In addition, considering the ease of manufacturing and the ability to handle various line widths among these manufacturing methods, an oxide superconducting conductor is prepared in advance with a constant line width, and then cut to the target line width. It is considered that the method of using an oxide superconducting wire is advantageous in terms of production efficiency.

The dimensions (width, length, thickness) of oxide superconducting wires are determined according to the purpose of use. Currently, when manufacturing an oxide superconducting conductor with a constant line width, generally 10 An oxide superconducting wire is obtained by producing a superconducting conductor with a width of ˜30 mm and cutting it into a line width according to the purpose of use.
Conventionally, as an example of a method for cutting an oxide superconductor, using a cutter bit having a plurality of sets of two cutting portions, the tape-shaped oxide superconducting conductor is mechanically sandwiched by the cutting edge of the cutting portion of the cutter bit, A method of cutting a plurality of oxide superconducting wires along the width direction of the oxide superconducting conductor has been proposed. (See Patent Document 1)
In addition, a laser beam is irradiated along the length direction of the tape-shaped oxide superconducting conductor, and the oxide superconducting layer is divided by fusing in the width direction, and a plurality of oxide superconducting layers are provided on the substrate. A method of manufacturing an oxide superconducting wire having a structure has also been proposed.

JP 2007-287296 A

However, in the method of cutting an oxide superconductor by irradiating a laser beam, the laser beam is usually irradiated from above the stabilizing layer, and the oxide superconducting layer, the intermediate layer, and the base tape under the stabilizing layer are irradiated. Although it melts, there is a problem that dross is generated from these melts. Dross generated from these melts sticks to the back side of the base material at the cutting position and becomes an irregular foreign material, which may affect the dimensional accuracy in the thickness direction of the base tape. For example, when the thickness of the base tape is 100 μm, the dross may adhere to the back side of the base tape as a lump with a thickness of about 100 μm.
As an example of the main application, oxide superconducting wire is used to form a superconducting coil by winding it around a winding drum. Therefore, when it is wound around a winding drum to form a coil, dross adheres to the back side of the base tape. If this is the case, there is a problem that turbulence is likely to occur.
In addition, when the oxide superconductor is melted by a laser beam, a technique of blowing an inert gas to the irradiation position of the laser beam and blowing the dross is also known. There is a problem that the dross that tries to adhere to the surface cannot be removed satisfactorily.

  The present invention has been made in view of such conventional circumstances, and reliably reduces the amount of dross that tends to adhere to the back side of the substrate when the tape-shaped oxide superconducting conductor is melted by a laser beam. An object of the present invention is to provide a technique capable of fusing while improving the dimensional accuracy in the thickness direction of the substrate.

  In order to solve the above problems, the present invention provides a tape-shaped substrate, an intermediate layer provided above the surface of the substrate, an oxide superconducting layer provided on the intermediate layer, and the oxide superconducting material. A laser beam is irradiated along the length direction of the substrate from the outside on the stabilization layer forming side to the oxide superconducting conductor configured to include the stabilization layer provided on the layer, and the stabilization layer and When manufacturing the oxide superconducting wire by fusing the oxide superconducting layer, the intermediate layer, and the base material into a plurality of the oxide superconducting conductors in the width direction, the oxide superconducting wire is irradiated with a laser beam. A groove is formed on the back surface side of the base material before fusing with a laser beam along a position where the conductor is fusing, and fusing with the laser beam is performed along the groove when fusing with the laser beam. .

Since the groove was formed on the back side of the substrate in accordance with the position to be melted by the laser beam, when the stabilization layer, the oxide superconducting layer, the intermediate layer, and the substrate were fused together, the dross generated by the melting of the groove Decrease volume. For this reason, the amount of dross generated due to fusing is reduced, and the amount of dross deposited on the back side of the base material is reduced.Therefore, no dross is attached to the back side of the base material. A high oxide superconducting wire can be obtained.
In addition, since an oxide superconducting wire with high dimensional accuracy can be obtained in the thickness direction of the base material, when the oxide superconducting wire is wound around a winding drum to form a coil, it is possible to provide a superconducting coil that hardly causes turbulence.

In the present invention, the groove width of the groove can be equal to or greater than the beam diameter of the laser beam.
By making the groove width equal to or greater than the beam diameter of the laser beam, the amount of dross generated due to fusing can be reliably reduced.
In the present invention, the depth of the groove can be 50% or more and 75% or less of the thickness of the substrate.
By setting the depth of the groove to 50% or more and 75% or less of the thickness of the base material, the amount of dross generated due to fusing can be surely reduced. In addition, since the base material strength is not lowered more than necessary, when the intermediate layer, the oxide superconducting layer, and the stabilizing layer are formed on the base material, the base material strength is not lowered, thereby preventing film formation.

In the present invention, when irradiating the laser beam from the surface side of the stabilization layer to melt the oxide superconductor, the oxide superconductor is blown while jetting an inert gas along the irradiation direction of the laser beam. can do.
By fusing while injecting an inert gas, the melt generated by fusing the base material etc. can be blown away in a direction away from the back surface of the base material through the groove, coupled with the presence of the groove. The amount of dross attached to the back side of the material can be reduced.

In the present invention, the tape-shaped oxide superconducting conductor is formed with a groove on the back side of the substrate in accordance with the position to be melted by the laser beam. Therefore, the stabilization layer, the oxide superconducting layer, the intermediate layer, and the substrate are combined. When melted, dross generated by melting these can reduce the volume of the groove.
For this reason, the amount of dross generated due to fusing is reduced, and the amount of dross deposited on the back side of the base material is reduced.Therefore, no dross is attached to the back side of the base material. A high oxide superconducting wire can be obtained.

FIG. 1 is a view for explaining a state in which an oxide superconducting conductor is blown by a laser. FIG. 1 (a) is a partial cross-sectional perspective view before fusing, and FIG. 1 (b) is a partial cross-sectional perspective view after fusing. 2A and 2B are diagrams for explaining the fusing state. FIG. 2A is a partially enlarged cross-sectional view before fusing, and FIG. 2B is a partially enlarged cross-sectional view after fusing. FIG. 3 is an explanatory view showing an example of a state where an oxide superconducting conductor is melted by a laser by a laser device. FIG. 4 is a perspective view showing a state in which an insulating coating with an insulating tape is formed on the oxide superconducting wire after fusing. FIG. 5 is a view for explaining another example of a state in which an oxide superconductor is melted by a laser. FIG. 1 (a) is a perspective view of a partial cross section before fusing, and FIG. 1 (b) is a partial cross section after fusing. Perspective view.

Hereinafter, an embodiment of a method for producing an oxide superconducting wire according to the present invention will be described with reference to the drawings.
1 and 2 are diagrams for explaining a state in which a tape-shaped oxide superconductor is cut by a laser beam based on the method according to the present invention, and FIG. 3 is an apparatus for generating a laser beam. It is a figure for demonstrating the state which irradiates a laser beam.
The oxide superconducting conductor 1 to be cut in the present invention has an intermediate layer 5, an oxide superconducting layer 6 and a stabilizing layer 7 on a metal tape-like substrate 3 as shown in FIG. By laminating the oxide superconductor 1 with a laser beam as will be described later, a plurality of oxide superconductors 1 narrower than the oxide superconductor 1 as shown in FIG. 1 (b) (FIG. 1 (b)). 4) oxide superconducting wire 10 can be obtained.
Since this oxide superconducting wire 10 is formed by cutting the oxide superconducting conductor 1 in its width direction, the oxide superconducting wire 10 has exactly the same structure except for its narrow width. The intermediate layer 5a, the oxide superconducting layer 6a, and the stabilizing layer 7a are laminated on the tape-like base material 3a made of the product.

In more detail, the oxide superconducting wire 10 has an intermediate layer 5 comprising a diffusion prevention layer 11, a bed layer 12, an orientation layer 15 and a cap layer 16 laminated on the upper surface of the base material 3, as shown in FIG. The oxide superconducting layer 6a and the stabilizing layer 7a are laminated thereon, but in FIG. 1, the intermediate layer 5 is drawn as one layer for the sake of simplicity. Note that the diffusion preventing layer 11, the bed layer 12, and the cap layer 16 are not essential and may be omitted in some cases.
The oxide superconducting wire 10 shown in FIG. 4 shows a state in which a thicker stabilizing layer 8 is laminated on the stabilizing layer 7a, and the entire circumference of the laminate composed of the oxide superconducting wire 10 and the stabilizing layer 8 is shown. An insulating layer 18 is formed by winding the resin tape 17 around the insulating tape 18.
The stabilization layer 8 is formed by attaching or plating after obtaining the superconducting wire 10 as shown in FIG. 1B by cutting with a laser beam.
As the structure shown in FIG. 4, the oxide superconducting wire 10 insulated with the insulating layer 18 can be coiled to be used for a superconducting coil or the like, and the oxide superconducting wire 10 insulated with the insulating layer 18 is used. It can be used for applications such as superconducting cables for power transmission.
Hereinafter, each element of the oxide superconducting wire 10 will be described.

  The base material 3 (3a) can be used as a base material for a normal superconducting wire, has only to be high strength, is in the form of a tape to make a long cable, and is made of a heat-resistant metal. Is preferred. For example, various high-strength and heat-resistant metal materials such as nickel alloys such as stainless steel and Hastelloy are listed. Among various heat-resistant metals, Hastelloy (trade name, manufactured by Haynes, USA) is suitable for commercial products. What is necessary is just to adjust the thickness of the base material 3 (3a) suitably according to the objective, Usually, it can be set as the range of 10-500 micrometers. Further, an oriented substrate such as a Ni—W alloy in which a texture is introduced into a nickel alloy or the like may be used as the substrate 1.

The diffusion prevention layer 11 is formed for the purpose of preventing the diffusion of the constituent elements of the base material 3 (3a), and silicon nitride (Si ₃ N ₄ ), aluminum oxide (Al ₂ O ₃ , also referred to as “alumina”). Alternatively, it is made of GZO (Gd ₂ Zr ₂ O ₇ ) or the like, and is formed by a film forming method such as a sputtering method, and the thickness thereof is, for example, 10 to 400 nm.
The bed layer 12 has high heat resistance and is intended to reduce interfacial reactivity, and is used to obtain the orientation of a film disposed thereon. Such a bed layer 12 is, for example, a rare earth oxide such as yttria (Y ₂ O ₃ ), and is represented by a composition formula (α ₁ O ₂ ) _2x (β ₂ O ₃ ) _(1-x). It can be illustrated. More _{specifically, Er 2 O 3, CeO 2} , Dy 2 O 3, Er 2 O 3, Eu 2 O 3, Ho 2 O 3, can be exemplified _La 2 _{O 3} and the like. The bed layer 12 has a thickness of 10 to 100 nm, for example.

The alignment layer 15 may have either a single layer structure or a multi-layer structure, and is selected from materials that are biaxially aligned in order to control the crystal orientation of the cap layer 16 laminated thereon. Specifically, preferred materials for the alignment layer 15 are Gd ₂ Zr ₂ O ₇ , MgO, ZrO ₂ —Y ₂ O ₃ (YSZ), SrTiO ₃ , CeO ₂ , Y ₂ O ₃ , Al ₂ O ₃ , Gd _2. Examples thereof include metal oxides such as O ₃ , Zr ₂ O ₃ , Ho ₂ O ₃ , and Nd ₂ O ₃ .
If the orientation layer 15 is formed with a good crystal orientation (for example, a crystal orientation degree of 15 ° or less) by an IBAD (Ion-Beam-Assisted Deposition) method, the crystal orientation of the cap layer 16 formed thereon is increased. The oxide superconducting layer 6 can be made to have a good value, and as a result, the oxide superconducting layer 6 formed on the cap layer 16 has a good crystal orientation and can exhibit excellent superconducting characteristics. it can.

The cap layer 16 is epitaxially grown by being formed on the surface of the orientation layer 15 in which the in-plane crystal axes are oriented as described above, and then grows laterally, so that the crystal grains are self-oriented in the in-plane direction. may material, a is not particularly limited as long as it, specifically as _{preferred, CeO 2, Y 2 O 3} , Al 2 O 3, Gd 2 O 3, ZrO 2, Ho 2 O 3, Nd 2 O 3 Etc. can be illustrated. When the material of the cap layer is CeO ₂ , the cap layer may contain a Ce—M—O-based oxide in which part of Ce is substituted with another metal atom or metal ion. For example, the thickness of the CeO ₂ layer is preferably 100 nm or more in order to obtain sufficient orientation, but if it is too thick, the crystal orientation deteriorates, so that it can be in the range of 50 to 5000 nm.
The oxide superconducting layer 6 (6a) may be a known one, and specifically, is a material made of REBa ₂ Cu ₃ O _y (RE represents a rare earth element such as Y, La, Nd, Sm, Er, Gd). The thing can be illustrated. Examples of the oxide superconducting layer 6 include Y123 (YBa ₂ Cu ₃ O _7-X ) or Gd123 (GdBa ₂ Cu ₃ O _7-X ).

The stabilizing layer 7a laminated on the oxide superconducting layer 6 is formed as a layer made of a metal material having good conductivity such as Ag and low contact resistance with the oxide superconducting layer 6. The thickness of the Ag stabilizing layer 7 can be formed to about 1 to 30 μm.
The second stabilization layer 8 is provided for stabilization of the oxide superconducting layer 6a, and is made of a highly conductive metal material such as Cu or Cu alloy. When the oxide superconducting wire 10 is applied for the purpose of a current limiting device or the like, it is preferable to use a high resistance material as the stabilization layer 8, and therefore, it can be made of a metal material having a high resistance to Cu or Ag such as NiCr. . The stabilization layer 8 can be formed to a thickness of about 100 to 300 μm.

In this embodiment, before the thick stabilization layer 8 is provided, this is cut from the state of the oxide superconducting conductor 1 shown in FIG. 1A in which the Ag stabilizing layer 7 is formed on the oxide superconducting layer 6. In the case of manufacturing the oxide superconducting wire 10 having a narrow width, a case of cutting using a laser beam of a continuous wave laser described below will be described. The continuous wave laser is used in this embodiment, and it is needless to say that other laser beams such as a pulse laser may be used.
FIG. 3 shows a schematic configuration of a cutting device 20 used for generating a continuous wave laser to cut the oxide superconducting conductor 1. The cutting device 20 of this example includes a plurality of (three in the example of FIG. 3) excitation laser light emitting devices 21 and a coupler 22 as a beam combiner that combines the excitation lasers from the plurality of light sources 21. And an amplification fiber 23 composed of a double clad fiber connected to the coupler 22, a transmission fiber 24 connected to the amplification fiber 23, and an output section 25 connected to the tip of the transmission fiber 24. Is the main constituent.

The output unit 25 is connected to a cylindrical guide unit 26 for introducing a laser output from the transmission fiber 24, an optical device 27 accommodated on the upper side of the guide unit 26, and a lower side of the guide unit 26. The nozzle body 28 and the gas supply source 29 connected to the lower side of the nozzle body 28 are mainly configured.
The optical device 27 includes a plurality of optical lenses, and by adjusting the mutual position of these optical lenses, the diameter of the laser light incident from the transmission fiber 24 is reduced to the outside of the tip of the nozzle body 28. The laser beam can be focused and irradiated so as to obtain an appropriate beam diameter. As an example, the beam diameter can be set to about 20 μm.
A gas introduction part 30 is formed on the upper side wall of the nozzle body 28, and a gas supply source 29 such as an inert gas is connected to the gas introduction part 30. By sending a shielding gas such as an inert gas from the gas supply source 29 to the inside of the nozzle body 28, the shielding gas can be ejected from the opening at the tip of the nozzle body 28.

  Before the oxide superconducting conductor 1 is cut into a plurality of pieces using the cutting device 20, a cutting tool such as a cutting tool is used along the cutting position in advance on the back surface side of the substrate 3 to the same extent as the beam diameter of the laser beam. The number of grooves 3 </ b> A having a width required for cutting is formed over the entire length of the back surface of the substrate 3. The cross-sectional shape of the groove 3A may be a rectangular shape as shown in FIG. 1A, but may be a triangular groove or a round groove, and the cross-sectional shape is not particularly limited. Further, the depth of the groove 3A is preferably in the range of 50 to 75% of the thickness of the substrate 3. If the depth of the groove 3A exceeds 75% of the thickness of the base material 3, the strength of the base material 3 itself tends to decrease. Therefore, the base layer 5 and the oxide superconducting layer 6 are formed at the time of film formation. The strength required for the material 3 is insufficient, and there is a risk of disconnection during film formation. Moreover, when it is less than 50%, there is a concern that the amount of dross attached to the back surface side of the base material 3 increases. The width of the groove 3A is preferably about the same as or larger than the beam diameter of the laser beam of 20 μm. However, increasing the groove width increases the fusing width and increases the width of the single superconducting conductor 1. It means that the proportion of the portion that is wasted when manufacturing a plurality of oxide superconducting wires 10 is large. Considering that the width of the base material 3 that is normally used is about 10 to 30 mm, the beam diameter corresponding to the fusing width is desirably about 500 μm at the maximum.

Next, as shown in FIG. 1, the tip of the nozzle body 28 is positioned at a position along, for example, the first groove 3A of the oxide superconducting conductor 1 installed horizontally, and the laser beam B of the continuous wave laser is irradiated. The oxide superconductor 1 is moved in the length direction at a predetermined speed.
In the cutting device 20, the excitation light from the light emitting device 21 is amplified in wavelength and output in the amplification fiber 23, and is output as a continuous wave laser through the transmission fiber 24.
For the laser beam B, the optical device 27 is adjusted to reduce the laser beam diameter to about 20 μm, and when the surface of the oxide superconductor 1 is irradiated from the tip of the nozzle body 28 as described above, the stabilization of the oxide superconductor 1 is stabilized. The layer 7, the oxide superconducting layer 6, the intermediate layer 5, and the base material 3 can be fused by the laser beam B along the groove 3 </ b> A.

Further, since the laser beam is irradiated from the outside of the stabilization layer 7, the laser beam irradiation portion is sequentially formed in the order of the stabilization layer 7, the oxide superconducting layer 6, the intermediate layer 5, and the substrate 3 in the oxide superconductor 1. Although it can be melted sequentially, the shield gas G ejected from the tip of the nozzle body 28 removes the melt of the stabilization layer 7, the oxide superconducting layer 6, the intermediate layer 5, and the substrate 3 by blowing off the grooves 3A.
Here, since the groove 3A is formed below the irradiation position of the laser beam B, the melt of the stabilization layer 7, the oxide superconducting layer 6, the intermediate layer 5, and the substrate 3 is formed along the groove 3A. The material 3 can be passed through and blown downward to be discharged. In addition, it is conceivable that a part of the melt remains on the inner peripheral surface of the groove 3A. However, since the groove 3A is formed in the base 3 in advance, and the melt generated by melting the base 3 can be reduced, The dross 3D associated with the melt remaining on the inner peripheral surface of the slag is only a small amount attached to the inner side surface 3c of the groove 3A as shown in FIG. For this reason, the dross which wraps around the back surface side of the base material 3 and hardly remains is generated, or even if it occurs, only a small amount is required.
1 and 2 show an example in which the width of the groove 3A and the laser fusing width are substantially equal to each other. Therefore, as shown in FIGS. The inner surface 3c remains as a removal portion 3E, and dross 3D adheres to the inner surface 3c and remains.

In order to reduce the amount of dross remaining around the back surface side of the base material 3 as much as possible, the groove width of the groove 3A should be approximately the same as the beam diameter of the laser beam B or be made somewhat larger than the beam diameter. desirable. If the beam diameter is too large, the fusing width of the base material 3 is increased and the oxide superconducting layer 6 is lost with a large width. Therefore, the beam diameter is preferably set to about 500 μm at the largest. . The fusing state when the groove width is sufficiently larger than the beam diameter will be described in a later example.
Moreover, about the depth of the groove | channel 3A, it can prevent that the rigidity of the oxide superconducting conductor 1 falls more than necessary in the range of 50 to 75% with respect to the thickness of the base material 3, and oxide superconductivity. It is unlikely to become an obstacle when forming each layer for manufacturing the conductor 1. Further, if the depth of the groove 3A is in the above-mentioned range, it is effective for blowing and eliminating the melt, and even if the dross 3D of the melt remains on the inner peripheral surface of the groove 3A, the residual amount is small, It does not adhere to the back side of the substrate 3 as a foreign substance.
As an example, when the thickness of the base material 3 is 100 μm, the strength of the base material 3 during the film formation of the intermediate layer 5, the oxide superconducting layer 6, the stabilization layer 7, etc. is required unless a thickness of about 25 μm is left. There may be a shortage.

By performing the fusing process with the laser beam described above a plurality of times along the groove 3A shown in FIG. 1A, a plurality of oxide superconducting conductors 1 are provided over the entire length in the length direction, and four in the example of FIG. The oxide superconducting wire 10 can be divided.
When the oxide superconducting conductor 1 is long, it takes time to scan the laser beam over its entire length, so four output units 25 are provided in parallel and four laser beams are provided. By adopting a configuration that allows simultaneous irradiation, the entire length of the oxide superconducting conductor 1 can be divided into four simultaneously by one laser beam scanning.

FIG. 5 is a diagram for explaining another example of a state in which a tape-shaped oxide superconducting conductor is cut by a laser beam based on the method according to the present invention.
In the example shown in FIG. 5, the same parts as those in the example shown in FIG.
In the example shown in FIG. 5, what differs from the embodiment shown in FIG. 1, the width of the groove 3A ₂ is slightly larger width than the groove 3A shown in FIG. 1 in that a narrow width of the laser fusing than the groove width is there.
If laser fusing width is narrower than the groove width, when the laser blown from the state shown in FIG. 5 (a), a part of the grooves 3A ₂ to leave the shape of the inner bottom surface 3d ₂ and the inner surface 3c ₂ of the groove 3A ₂ It is blown to leave a removal unit 3E _2. That, is blown along the groove 3A ₂ in a state where the dross generated during blown was deposited residue on the inner bottom surface 3d ₂ and the inner surface 3c ₂ as shown in Figure 5 (b).
Even when laser cutting is performed as shown in FIG. 5, the same effects as those of the previous embodiment can be obtained.

That is, if the groove 3A ₂ is provided, and laser cutting is performed with a width narrower than the width of the groove 3A ₂ and the removal portion 3E ₂ is left, it is effective for blowing and eliminating the melt, and the inner surface of the groove 3A ₂ Even if dross of the melt remains, the residual amount is small, and there is an effect that it does not adhere to the back surface side of the substrate 3 as a foreign substance.

1 ... oxide superconductor, 3, 3a ... substrate, 3A ... groove, 3c, 3c 2 _... inner surface, 3E, 3E 2 _... removal unit, 5, 5a ... intermediate layer, 6, 6a ... oxide superconducting layer, 7, 7a: Stabilization layer, 10: Oxide superconducting wire, 11: Diffusion prevention layer, 12 ... Bed layer, 15 ... Orientation layer, 16 ... Cap layer, 20 ... Cutting device, 21 ... Light source, 23 ... Amplifying fiber 24 ... Transmission fiber, 25 ... Output unit, 27 ... Optical device, 28 ... Nozzle body, 29 ... Gas supply source, 30 ... Gas introduction unit, B ... Laser beam.

Claims (4)

  A tape-like base material, an intermediate layer provided above the base material surface, an oxide superconducting layer provided on the intermediate layer, and a stabilization layer provided on the oxide superconducting layer The oxide superconducting conductor configured as described above is irradiated with a laser beam from the outside on the stabilization layer forming side along the length direction of the base material to thereby apply the stabilization layer, the oxide superconducting layer, the intermediate layer, and the base material. When an oxide superconducting wire is manufactured by dividing the oxide superconducting conductor into a plurality of parts in the width direction by fusing, the laser beam is irradiated along the position where the oxide superconducting conductor is blown by irradiation with a laser beam. A method for producing an oxide superconducting wire, comprising: forming a groove on the back side of the base material before fusing, and performing fusing with a laser beam along the groove when fusing with the laser beam.   2. The method of manufacturing an oxide superconducting wire according to claim 1, wherein a groove width of the groove is equal to or larger than a beam diameter of the laser beam.   3. The method of manufacturing an oxide superconducting wire according to claim 1, wherein the depth of the groove is 50% or more and 75% or less of the thickness of the base material.   When the oxide superconductor is blown by irradiating the laser beam from the surface side of the stabilization layer, the oxide superconductor is blown while jetting an inert gas along the irradiation direction of the laser beam. The manufacturing method of the oxide superconducting wire as described in any one of Claims 1-3.

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