JP2013195331A - Anisotropic conductive sheet and its application - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dispersion type anisotropic conductive sheet enabling expansion and contraction by bending and suitable for a large area sensor applicable to a flexible planar surface, and a device and an inspection equipment using the sheet.SOLUTION: The dispersion type anisotropic conductive sheet including an anisotropic conductive layer formed of a sheet forming material containing conductive particles and a polymeric material has a metal foil integrally formed with the sheet forming material on at least one side surface of the anisotropic conductive layer and can be reversibly deformed by a compression amount of 5 to 40% to the thickness. The dispersion type anisotropic conductive sheet including the anisotropic conductive layer formed of the sheet forming material containing the conductive particles and the polymeric material has a circuit pattern formed on at least one side surface of the anisotropic conductive layer and further has a flexible base laminated on the circuit pattern surface and can be reversibly deformed by a compression amount of 5 to 40% to the thickness.

Description

  The present invention relates to an anisotropic conductive sheet, and the use and use of the anisotropic conductive sheet. More particularly, the present invention relates to a distributed anisotropic conductive sheet suitable for a large area sensor, a device using the sheet, and an inspection apparatus.

  An anisotropic conductive sheet exhibits conductivity only in the thickness direction, or exhibits conductivity only in the thickness direction when pressed in the thickness direction. An anisotropic conductive sheet can be compactly connected without using means such as soldering or mechanical fitting, and has a soft connection by absorbing mechanical shocks and strains. Features such as being possible. For this reason, in the fields of electronic computers, electronic digital watches, electronic cameras, mobile phones, etc., the two electronic members are electrically connected by interposing an anisotropic conductive sheet between the two electronic members. Is widely practiced.

Conventionally, as an anisotropic conductive sheet having various configurations, a dispersion-type anisotropic conductive sheet obtained by uniformly dispersing conductive particles in a polymer material has been known.
It has been conventionally known that such a dispersion type anisotropic conductive sheet is applied to a planar contact (surface sensor). Recently, by adding flexibility, large area, light weight, and thinness to such a surface sensor, various applications such as sensors, actuators, batteries, and displays are expected.

  In order to achieve “large area”, further “thinning” is indispensable due to the demand for “lightweight”. In order to achieve both “thinning” and “large area”, as a macro mechanical function, The function of “flexibility” is required. When a “flexible” device is realized, functions such as “stretchable”, “bendable”, “windable”, “foldable” can be exhibited, and new applications that have never existed can be pioneered. For example, artificial skins for robots that can expand and contract, sensors attached to curved surfaces, rollable large-area solar cells, folding displays, and other devices that fit large-area objects and curved / complex three-dimensional shapes. An extremely wide range of application fields that can contribute to the changing society is conceivable.

  For example, JP 2006-90983 A (Patent Document 1) discloses a pressure sensor using an anisotropic conductive layer. In Patent Document 1, a conductive rubber sheet (non-oriented), a coating containing carbon nanotubes, and the like are used as a pressure conductive member (stretchable conductor) of a large area sensor.

  However, when non-oriented conductive rubber sheet is used, there are problems such as isotropic conductivity and low pressure conductive performance (low anisotropy). In order to improve the workability in the sensor manufacturing process, supply in the form of an anisotropic conductive sheet with a metal foil and a circuit pattern is desired.

  As for the anisotropic conductive sheet, the applicant of the present application has proposed JP-A-2009-259415, JP-A-2009-245745, JP-A-2007-225534 (Patent Documents 2 to 4), etc. Yes.

JP 2006-90983 JP JP 2009-259415 A JP 2009-245745 JP 2007-225534 A

  However, since the anisotropically conductive sheet that has been proposed in the past is the limit that can be reversibly deformed by 30% of the thickness, the thickness of the anisotropically conductive sheet is increased in order to increase the step absorption capacity. Must be increased. The anisotropic conductive sheet having a large thickness has a reduced resolution (occurrence of leakage current to an adjacent inspection point), so that it has been difficult to adapt to an inspection object having a minute and fine pitch.

  Therefore, the present inventor can bend and extend the circuit board itself by forming a copper foil integrated with the sheet or providing a flexible substrate, and the inspection contact can be bent and expanded while the anisotropic conductive sheet remains thin. As a result, it has been found that the step-absorbing ability can be improved, and it is possible to cope with fine and fine pitches, and the present invention has been completed. That is, the present invention is as follows.

[1] A dispersed anisotropic conductive sheet including an anisotropic conductive layer made of a sheet forming material containing conductive particles and a polymer material,
A metal foil integrated with a sheet forming material is formed on at least one side surface of the anisotropic conductive layer,
An anisotropic conductive sheet characterized in that the compression can be reversibly deformed by 5 to 40% of the thickness.
[2] A dispersion-type anisotropic conductive sheet including an anisotropic conductive layer made of a sheet-forming material containing conductive particles and a polymer material,
A circuit pattern is formed on at least one surface of the anisotropic conductive layer, and a flexible substrate is formed on the surface of the circuit pattern;
An anisotropic conductive sheet characterized in that the compression can be reversibly deformed by 5 to 40% of the thickness.
[3] A dispersive anisotropic conductive sheet including an anisotropic conductive layer made of a sheet forming material containing conductive particles and a polymer material,
A metal foil integrated with a sheet forming material is formed on at least one surface of the anisotropic conductive layer, and a flexible substrate is further laminated on the surface of the metal foil,
An anisotropic conductive sheet characterized in that the compression can be reversibly deformed by 5 to 40% of the thickness.
[4] The anisotropic conductive sheet according to any one of [1] to [3], wherein the anisotropic conductive layer has a thickness in the range of 10 to 300 μm.
[5] The anisotropic conductive sheet according to any one of [1] to [4], wherein the thickness of the metal foil is in the range of 1 to 35 μm.
[6] The anisotropic conductive sheet according to any one of [2] to [5], wherein the flexible substrate has a thickness in the range of 10 to 250 μm.
[7] The anisotropic conductive layer is characterized in that conductive particles exhibiting magnetism are dispersed in an insulating elastic polymer material in an aligned state in the thickness direction. The anisotropic conductive sheet according to any one of [1] to [6].
[8] A device using the anisotropic conductive sheet according to any one of [1] to [7].
[9] An electrical inspection apparatus using the anisotropic conductive sheet according to any one of [1] to [7].

  According to the present invention, since the configuration of the specific anisotropic conductive sheet is adopted, the circuit board can be bent and stretched, and the shape of the inspection contact portion can be easily deformed. For this reason, the step absorption capability is improved, and inspection on a curved surface is also possible.

1A to 1C are explanatory perspective views of the anisotropic conductive sheet of the present invention. It is sectional drawing for description which shows the material layer for electroconductive elastomers. It is sectional drawing for description which shows the state by which the magnetic field was acted on the thickness direction of the conductive elastomer material layer. It is sectional drawing for description which shows the state in which the electroconductive elastomer layer was formed on the releasable support plate. It is sectional drawing for description which shows the state by which the metal thin layer was formed on the conductive elastomer layer. It is a schematic sectional drawing which shows an example of a sensor element. The schematic diagram of the test | inspection contact in a test | inspection apparatus is shown.

Hereinafter, the anisotropic conductive sheet of the present invention and its application will be described in detail. In the following, the drawings are referred to as appropriate, but the present invention is not limited to the drawings.
[Anisotropic conductive sheet]
An anisotropic conductive sheet 10 of the present invention has an anisotropic conductive layer 20 as shown in FIGS. 1A to 1C, for example, and a sheet is formed on at least one side surface of each anisotropic conductive layer. A metal foil 30 integrated with the material is formed, a circuit pattern 31 is formed by etching the metal foil, and a flexible substrate 32 is formed on the circuit pattern or the metal foil surface.

The anisotropic conductive sheet of the present invention is a “dispersed anisotropic conductive sheet” in which conductive particles are uniformly dispersed in the surface direction of the sheet.
Such a dispersive anisotropic conductive sheet exhibits conductivity only in the thickness direction when pressed in the thickness direction. In the dispersed anisotropic conductive sheet of the present invention, it is preferable that the conductive particles are uniformly dispersed in the sheet surface direction and aligned in the sheet thickness direction. When an anisotropic conductive sheet is manufactured by magnetic field orientation using conductive ferromagnetic particles as the conductive particles, the conductive ferromagnetic particles can be aligned in the thickness direction by the magnetic field orientation. The directionally conductive sheet is highly anisotropic.
Anisotropic Conductive Layer The anisotropic conductive layer used in the present invention is made of a sheet forming material containing conductive particles and a polymer material.

  As the polymer material, a material having elasticity is used, and a polymer substance having a crosslinked structure is usually preferable. The polymer material is not particularly limited as long as the effects of the present invention are not impaired, but is preferably an insulating polymer material. Examples of the insulating polymer material include silicone rubber, ethylene-propylene rubber, urethane rubber, fluorine rubber, polyester rubber, styrene-butadiene rubber, styrene-butadiene-block copolymer rubber, and styrene-isopropylene-block copolymer. Examples include coalesced rubber, soft epoxy resin, and melamine resin.

  As the insulating polymer material, a material that is liquid or fluid at the temperature at the time of sheet production and is then cured is preferable. When the insulating polymer material has such properties, the conductive ferromagnetic particles can be oriented or assembled by applying a magnetic field during sheet production, and then the insulating polymer material is cured to be conductive. Ferromagnetic particles can be fixed.

  For example, thermosetting silicone rubber is preferable because it is in a liquid state at normal temperature and is cured by heating to become a solid rubber. For example, a soft liquid epoxy resin, a thermoplastic elastomer, a thermoplastic soft resin, and the like are preferable because they have fluidity at the temperature at the time of sheet production and become solid after the sheet is produced even if they are solid at room temperature. As the insulating polymer material, a material having a crosslinked structure is preferable in terms of heat resistance, durability, and the like.

The viscosity of the polymer material at 25 ° C. is preferably 10 to 400 Pa · s, and more preferably 100 to 300 Pa · s, from the viewpoint of productivity of the anisotropic conductive sheet.
Examples of the conductive particles P contained in the anisotropic conductive layer 20 include single metal particles, composite particles in which two or more metals are mixed, and a coating formed by coating an organic or inorganic material with a conductive substance. Examples thereof include particles, or two or more kinds of mixed particles selected from the single metal particles, composite particles, and coated particles. From the viewpoint of the orientation of particles by applying a magnetic field during sheet production, conductive particles exhibiting ferromagnetism (hereinafter also referred to as “conductive ferromagnetic particles”) are preferable.

  The conductive ferromagnetic particles do not need to be entirely formed of a conductive material or a ferromagnetic material, and at least the particle surface may be formed of a conductive material (eg, conductive metal). The means for coating the particle surface with a conductive substance is not particularly limited, and examples thereof include electroplating or electroless plating.

  As such conductive ferromagnetic particles, specifically, (1) particles of a ferromagnetic substance and particles of an alloy containing them, and (2) the surface of the particle (core particle) of (1) is a conductive substance. (3) Coated particles obtained by coating a part or all of the surface of an organic or inorganic material with a ferromagnetic substance and a conductive substance. Examples of the ferromagnetic material include nickel, iron, and cobalt. Examples of the conductive substance include gold, silver, copper, tin, palladium, and rhodium.

  As the conductive ferromagnetic particles, the coated particles of the above (2) are preferable because the electrical connection of the electronic member with a lower load becomes possible. From the viewpoint of obtaining good conductivity, the average coating amount of the conductive substance on the surface of the core particles is preferably 0.5 to 50% by weight, more preferably 1 to 30% by weight, More preferably, it is 3-25 weight%, Most preferably, it is 4-20 weight%. When the conductive material used for coating is gold, the coating amount is preferably 2 to 30% by weight, more preferably 3 to 20% by weight, and still more preferably 3. 5 to 17% by weight.

  From the viewpoint of reducing the manufacturing cost, the ferromagnetic material is preferably nickel, iron, or an alloy thereof. Further, in applications such as sockets and connectors that use electrical characteristics of low conduction resistance, particles whose surfaces are plated with gold are preferable.

  The median diameter (d50) measured by the light scattering method of the conductive particles is usually 5 to 100 μm, preferably 10 to 50 μm. When the median diameter is in the above range, the anisotropic conductive sheet is excellent in electrical connection stability. The median diameter is measured by, for example, a laser analysis / scattering particle size analyzer (trade name “Microtrack MT3300”).

  The shape of the conductive particles is not particularly limited, and examples thereof include a spherical shape, a flake shape, and a rod shape. From the viewpoint of connecting an electronic member with a low load using an anisotropic conductive sheet, the conductive particles are preferably spherical particles.

  As the conductive particles P, those whose surfaces are treated with a coupling agent such as a silane coupling agent or a lubricant can be appropriately used. By treating the particle surface with a coupling agent or a lubricant, the durability of the anisotropic conductive film is improved.

When such a conductive particle P has a volume fraction of 100% in the anisotropic conductive layer 20, the content ratio (volume fraction) of the conductive particles is usually 3 to 50%, preferably 5 to 5. 25%, more preferably 7 to 23%. When the content ratio is below the above range, an anisotropic conductive sheet having a sufficiently small electric resistance value may not be obtained. When the content ratio exceeds the above range, the obtained anisotropic conductive sheet tends to be fragile, and the deformation necessary for the anisotropic conductive sheet may not be obtained. Furthermore, electrical insulation between the connection terminal and other connection terminals may not be ensured.
Metal foil As the metal foil used in the present invention, any metal having conductivity such as copper foil, gold foil, silver foil, and aluminum foil can be used without particular limitation, and the method for forming the metal foil is not particularly limited. Various methods can be used, for example, electroless plating methods such as displacement plating methods and chemical reduction plating methods, wet methods such as electroplating methods, dry methods such as sputtering methods and vapor deposition methods can be used, A metal foil obtained by applying and drying a liquid metal material can also be used.
This metal foil may be etched into a predetermined circuit pattern. Those having a circuit pattern are suitable as inspection contacts, and others are suitable as flexible sensors. In the present specification, the metal foil and the metal thin film are substantially synonymous.
A flexible substrate that can be bent is used. Such a flexible substrate also functions as a protective layer because the wiring circuit and the metal foil are easily oxidized, and this protective layer is sometimes called a normal coverlay. As the flexible substrate, various polyimide films, polyester films, acrylic films, photo solder resist films and the like are generally used.
Manufacturing method of anisotropic conductive sheet An anisotropic conductive sheet according to the present invention is obtained by integrating and laminating metal foils on the surface of a sheet member of an anisotropic conductive sheet prepared in advance by electroplating or chemical plating. Can be made.

  For example, as described in Japanese Patent No. 3753145 by the applicant of the present application, such a sheet member can be produced using a molding material containing the above-described insulating polymer material and conductive particles.

  First, a conductive elastomer material is prepared by dispersing conductive particles exhibiting magnetism in an elastic polymer material, and the conductive elastomer material is applied onto the releasable support plate 15 to thereby form the conductive elastomer. A material layer 11A is formed. Here, in the conductive elastomer material layer 11A, as shown in FIG. 2, the conductive particles P exhibiting magnetism are contained in a dispersed state.

  Next, by applying a magnetic field in the thickness direction to the conductive elastomer material layer 11A, the conductive particles P dispersed in the conductive elastomer material layer 11A are made conductive as shown in FIG. The material layer 11A is oriented so as to be aligned in the thickness direction. Then, while continuing the action of the magnetic field on the conductive elastomer material layer 11A, or after stopping the action of the magnetic field, the conductive elastomer material layer 11A is cured, as shown in FIG. A conductive elastomer layer 11 </ b> B is formed in a state in which the conductive particles P are contained in the polymer material so that the conductive particles P are aligned in the thickness direction and supported on the releasable support plate 15.

  As a material constituting the releasable support plate 15, metals, ceramics, resins, composite materials thereof, and the like can be used. As a method for applying the conductive elastomer material, a printing method such as screen printing, a roll coating method, a blade coating method, or the like can be used. The thickness of the conductive elastomer material layer 11A is set according to the thickness of the conductive path forming portion to be formed. As a means for applying a magnetic field to the conductive elastomer material layer 11A, an electromagnet, a permanent magnet, or the like can be used.

The strength of the magnetic field applied to the conductive elastomer material layer 11A is preferably 0.2 to 2.5 Tesla.
The curing process of the conductive elastomer material layer 11A is usually performed by a heating process. The specific heating temperature and heating time are appropriately set in consideration of the type of elastomer material constituting the conductive elastomer material layer 11A, the time required to move the conductive particles, and the like.

The molding material may be cured during or after the action of the parallel magnetic field. A permanent magnet can be used instead of the electromagnet.
As shown in FIG. 5, a thin metal layer 16 is formed on the surface of the conductive elastomer layer 11B supported on the releasable support plate 15 by plating such as electrolytic plating or chemical plating.

  At this time, the surface of the sheet member may be masked with a resist layer so that a desired circuit pattern is obtained, and then a plating process may be performed. In this way, a circuit pattern can be formed on the surface of the conductive elastomer layer 11B.

  As another method, the anisotropic conductive sheet according to the present invention is obtained by applying a conductive paste containing an insulating polymer material, conductive particles and, if necessary, a solvent to the metal foil surface by the above method. After coating, it can also be produced by performing magnetic field orientation and heat curing treatment in the same manner as described above. In this case, if the produced conductive sheet is patterned by a method such as etching, a circuit pattern can be obtained.

Moreover, what is necessary is just to laminate | stack a flexible substrate on the said metal thin film (metal foil) surface by methods, such as sticking, when an anisotropic conductive sheet has a flexible substrate.
In addition, a flexible substrate is installed on the releasable support plate, a metal thin film is formed on the flexible substrate, patterning is performed as necessary, conductive paste is applied, and magnetic field orientation and heat curing treatment are performed in the same manner. It is also possible to produce by performing.

When laminating a metal foil (metal thin film) or a flexible substrate, an adhesive that does not affect anisotropic conductivity may be used as necessary. Examples of the adhesive include silicone rubber.
Properties of anisotropic conductive sheet The anisotropic conductive sheet of the present invention is characterized in that the compression can be reversibly deformed by 5 to 40% of the thickness. Thus, if it can be reversibly deformed, it is extremely flexible, can be expanded and contracted, and can be bent, wound, and further folded. For this reason, it has a high unevenness absorbing ability and is very useful as a large area device.

The total thickness of the anisotropic conductive sheet is not particularly limited in terms of configuration, but is usually 20 to 585 μm, preferably 55 to 165 μm.
Although the thickness of an anisotropic conductive layer is suitably selected according to the objective, Usually, 10-300 micrometers, Preferably it is 30-200 micrometers, More preferably, it is 50-100 micrometers.

  Moreover, although the thickness of each member is selected suitably, normally, the thickness of metal foil (metal thin film) exists in the range of 1-35 micrometers, Preferably it is 5-15 micrometers. The thickness of the flexible substrate is in the range of 10 to 250 μm, preferably 10 to 50 μm.

By providing the anisotropic conductive layer as described above and setting the thickness of each member within a specific range, it is possible to reversibly deform even with a compression of 5 to 40% with respect to the thickness, which has not existed conventionally.
In the anisotropic conductive sheet having such characteristics, the circuit board itself can be bent and expanded, and the inspection contact can be bent and expanded while the anisotropic conductive sheet remains thin. For this reason, the step-absorbing ability is improved, and it is possible to cope with fine and minute pitches.

[Devices and inspection equipment]
The device according to the present invention uses the anisotropic conductive sheet. Specifically, an electronic member is connected by interposing an anisotropic conductive sheet.

The electronic member is not particularly limited, and various electronic members can be used.
Examples thereof include printed wiring boards such as a rigid printed wiring board (PCB), a flexible printed wiring board (FPC), and a flex rigid printed wiring board. Examples of the printed wiring board include electronic members (first electronic members) such as a single-sided printed wiring board, a double-sided printed wiring board, and a multilayer printed wiring board. A first electronic member such as a printed wiring board has a substrate and a plurality of electrodes according to a pattern corresponding to the wiring formed on the substrate and the electrodes of the other electronic members.

  Composite materials such as glass fiber reinforced epoxy resin, glass fiber reinforced phenol resin, glass fiber reinforced polyimide resin, and glass fiber reinforced bismaleimide triazine resin; silicon dioxide, alumina And other ceramic materials. Examples of the material constituting the FPC flexible substrate include polyimide, polyamide, polyester, and polysulfone.

  Examples of the material of the wiring and the electrode included in the first electronic member include gold, silver, copper, nickel, palladium, carbon, aluminum, indium tin oxide (ITO), and the like. The pitch of the electrodes included in the first electronic member is usually 0.05 to 2.5 mm. The thickness of the board | substrate which a 1st electronic member has is 0.01-1.6 mm normally.

  Further, the other electronic member (second electronic member) to which the first electronic member is connected is not particularly limited, but in addition to the printed wiring board of the first electronic member, a transistor, a diode, a relay, Switches, IC chips or LSI chips or their packages; modules such as multi-chip modules (MCM); passive components such as resistors, capacitors, crystal units, speakers, microphones, transformers (coils), inductors, TFT liquid crystal displays Examples thereof include display panels such as panels, STN type liquid crystal display panels, plasma display panels, and electroluminescence panels. The second electronic member such as a printed wiring board has a substrate and a plurality of electrodes according to a pattern corresponding to the wiring formed on the substrate and the electrodes of the first electronic member.

Examples of the material of the wiring and the electrode included in the second electronic member include gold, silver, copper, nickel, palladium, carbon, aluminum, indium tin oxide (ITO), and the like. The pitch of the electrodes included in the second electronic member is usually 0.01 to 2.5 mm. The thickness of the board | substrate which a 2nd electronic member has is 0.01-1.6 mm normally.

  Specific examples of devices having such a configuration include pressure sensors, particularly large area sensors, humanoid robots, artificial skin, actuators, robot hands, touch panels, vehicle body curved solar cells, wearable devices, curved displays, rollable portable computers, folding It can be applied to large screen displays.

  As an example of the pressure sensor, for example, it can be applied to a pressure sensor element as shown in JP-A-2006-90983 [0026], and if the anisotropic conductive sheet of the present invention is used for a pressurized conductive rubber layer. Good. FIG. 6 shows a schematic sectional view of the flexible sensor 40 to which the anisotropic conductive sheet according to the present invention is applied. The sensor element mainly includes an organic field effect transistor 41 formed on the surface member 22 and an anisotropic conductive sheet 50 as a pressure sensor. The organic field effect transistor 41 is formed of, for example, an organic channel 45, three electrodes (a gate 42, a source 46, and a drain 47), a gate insulating film 43 disposed below the source 46 and the drain 47, and pentacene, for example. The gate insulating film 43 interposed between the organic channel 45 and the gate electrode 42 and a parylene protective film 48 for protecting the organic channel 45, the source 46, and the drain 47. The drain 47 is electrically connected to the anisotropic conductive sheet 50 through a via hole 49 formed in the parylene protective film 48 and electrically connected thereto, and an electrode pad 49 a attached to the via hole 49.

  The anisotropic conductive sheet according to the present invention can also be used in an inspection apparatus. For example, among the anisotropic conductive sheets according to the present invention, those having a circuit pattern formed thereon can be used as inspection contacts as shown in FIG.

  As an inspection apparatus according to the present invention, the anisotropic conductive sheet is disposed between a terminal of a device under test and an electrode pad of a tester side circuit, and the terminal of the device via the anisotropic conductive sheet. And the electrode pad of the tester side circuit are electrically connected.

  As a pusher that presses the anisotropic conductive sheet, it has a two-layer structure consisting of an elastic body and a rigid member. By increasing the thickness of the elastic body, the inspection contact can be easily deformed to accommodate inspected objects with complex shapes and large steps. It becomes. Further, it is sufficient that the rigid member also has a rigidity that can be pressed, and the deformation of the inspection contact is further facilitated by using a resin that can be bent and a metal member (for example, a leaf spring).

  When such an inspection apparatus is used, when the object to be inspected has a large step or a curved surface, the anisotropic conductive sheet has a large step absorption capability (compression), and an electrical inspection on the curved surface becomes possible. . Further, according to the present invention, since the anisotropic conductive sheet can be bent and stretched while the anisotropic conductive sheet is thin, the step-absorbing ability can be improved, and fine and minute pitches can be accommodated.

  In particular, by using a flexible printed circuit board (FPC) or a circuit board that can be bent and stretched as a tester side circuit, in addition to the bending elasticity of the anisotropic conductive sheet, the bending elasticity of the circuit board itself is shown. The contact can be greatly deformed, bent and stretched.

  In the case where the inspection object has a large step or a curved surface, the inspection contact is deformed according to the shape of the inspection object due to the bending elasticity of the circuit board itself and the bending elasticity of the anisotropic conductive sheet, and Since the contact material has elasticity, the occurrence of damage on the inspected object side during inspection is small even for a thin film substrate.

  By incorporating the anisotropic conductive sheet and electronic component of the present invention into a portable electronic device, a small or thin portable electronic device can be realized. Examples of portable electronic devices include mobile phones, cameras such as digital cameras and video cameras, portable audio players, portable DVD players, and portable laptop computers.

  The anisotropic conductive sheet of the present invention can be applied to a flexible planar pressure sensor that can be bent and stretched. If such a pressure sensor is used, it can be used for a large area sensor, such as a humanoid robot, an artificial skin, an actuator, a robot hand, a touch panel, a curved body solar cell, a wearable device, a curved display, a rollable portable computer, It can be applied to folding large screen displays.

DESCRIPTION OF SYMBOLS 10 ... Anisotropic conductive sheet 11A ... Material layer 15 for conductive elastomers ... Releasable support plate P ... Conductive particle 11B ... Conductive elastomer layer 16 ... Thin metal layer 20 ... anisotropic conductive layer 22 ... surface member 30 ... conductive particles 31 ... circuit pattern 32 ... flexible substrate 40 ... flexible sensor 41 ... organic field effect transistor 45 ... Organic channels 42, 46, 47 ... electrodes (gate 42, source 46, drain 47)
43 ... Gate insulating film 48 ... Parylene protective film 49 ... Via hole 49a ... Electrode pad 50 ... Anisotropic conductive sheet

Claims (9)

A dispersive anisotropic conductive sheet comprising an anisotropic conductive layer made of a sheet forming material containing conductive particles and a polymer material,
A metal foil integrated with a sheet forming material is formed on at least one side surface of the anisotropic conductive layer,
An anisotropic conductive sheet characterized in that the compression can be reversibly deformed by 5 to 40% of the thickness. A dispersive anisotropic conductive sheet comprising an anisotropic conductive layer made of a sheet forming material containing conductive particles and a polymer material,
A circuit pattern is formed on at least one surface of the anisotropic conductive layer, and a flexible substrate is further laminated on the surface of the circuit pattern.
An anisotropic conductive sheet characterized in that the compression can be reversibly deformed by 5 to 40% of the thickness. A dispersive anisotropic conductive sheet comprising an anisotropic conductive layer made of a sheet forming material containing conductive particles and a polymer material, and integrated with the sheet forming material on at least one surface of the anisotropic conductive layer A metal foil is formed, and further a flexible substrate is laminated on the surface of the metal foil,
An anisotropic conductive sheet characterized in that the compression can be reversibly deformed by 5 to 40% of the thickness.   The anisotropic conductive sheet according to any one of claims 1 to 3, wherein the anisotropic conductive layer has a thickness in a range of 10 to 300 µm.   The anisotropic conductive sheet according to any one of claims 1 to 4, wherein the thickness of the metal foil is in the range of 1 to 35 µm.   The anisotropic conductive sheet according to any one of claims 2 to 5, wherein the flexible substrate has a thickness in the range of 10 to 250 µm.   The anisotropic conductive layer is formed by dispersing conductive particles exhibiting magnetism in an insulating elastic polymer material in an aligned state in the thickness direction. The anisotropic conductive sheet according to any one of 6.   A device comprising the anisotropic conductive sheet according to claim 1.   An electrical inspection apparatus using the anisotropic conductive sheet according to claim 1.

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