JP2013195054A - Swirl flow premixing low-pollution combustion device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a high-efficiency, low-pollution (Low NOx, Low CO) waste gas combustion device for a waste gas cleaning processing device.SOLUTION: A swirl flow premixing low-pollution combustion device is a waste gas combustion device 100 which processes waste gas discharged in a chemical process, processes of manufacturing semiconductors and LCDs, etc. The swirl flow premixing low-pollution combustion device includes a combustion gas supply part 130 having a primary combustion region in which fuel-lean gas is pre-mixed and supplied for primary combustion of exhaust gas and a secondary combustion region in which combustion supporting gas is supplied for complete combustion of fuel having not reacted in the primary combustion region.

Description

  The present invention relates to a waste gas purification treatment apparatus, and more particularly to a waste gas combustion apparatus that burns and processes waste gas.

  Waste gas generated in the manufacturing process or chemical process of semiconductors and LCDs is highly toxic, explosive and corrosive. Therefore, if it is discharged into the atmosphere as it is, it will cause environmental pollution. Therefore, such waste gas always undergoes a purification process that lowers the content of harmful components to an allowable concentration or less.

  As a method for treating the waste gas generated in the semiconductor manufacturing process, etc., burning is mainly performed by decomposing, reacting or burning an ignitable gas containing hydrogen radical in a high-temperature combustion chamber. Wetting, in which water-soluble gas is dissolved and processed in water while passing water stored in the water tank, physical to adsorbent while harmful gas that is not ignitable or not water-soluble passes through the adsorbent There are adsorption methods that are purified by chemical or chemical adsorption.

In the burning method, a combustion apparatus for burning waste gas is used. However, in the conventional combustion apparatus, waste gas generated in the semiconductor manufacturing process and N ₂ gas used in a dry vacuum pump are oxidized at a high temperature when introduced into the combustion apparatus, and nitrogen oxides are generated. There is a problem that many of them are generated rapidly.

JP 2007-162959 A

An object of the present invention is to solve the above-described conventional problems, and to provide a high efficiency, low pollution (Low NO _x , Low CO) waste gas combustion apparatus.

In order to achieve the above object, according to one aspect of the present invention,
As a waste gas combustion apparatus that processes waste gas discharged in the manufacturing process of chemical processes, semiconductors, LCDs, etc., a premixed combustion gas preliminarily mixed with a lean fuel gas and an auxiliary combustion gas are supplied and a frame is provided. A combustion gas supply unit having a primary combustion zone which is a space to be formed and an ignition device, and a secondary combustion zone which is a space in which a frame formed in the primary combustion zone is diffused There is provided a pre-flow premixed low-pollution combustion apparatus characterized by comprising an ignition part formed.

  The combustion gas supply unit includes a premixed fuel gas nozzle for injecting the premixed fuel gas into the primary combustion zone and an auxiliary combustion gas nozzle for injecting the auxiliary combustion gas. A member may be further provided.

  The premixed fuel gas nozzle is composed of a plurality of premixed fuel gas nozzles arranged to be inclined in one direction with respect to a radial direction so that the premixed fuel gas rotates in the primary combustion zone. The auxiliary combustion gas may be constituted by a plurality of auxiliary combustion gas nozzles arranged to be inclined in one direction with respect to the radial direction so that the auxiliary combustion gas rotates in the primary combustion zone.

  The combustion apparatus further includes a waste gas supply unit including a guide pipe that is at least partially inserted into the primary combustion zone and supplies waste gas, and the guide pipe includes a plurality of separated waste gas guide passages. May be formed.

  The combustion apparatus may further include a by-product processing unit for removing powder fixed to the waste gas guide passage.

  The combustion apparatus may further include a tertiary combustion zone adjacent to the secondary combustion zone, and air may be introduced from the outside into the tertiary combustion zone.

  According to the present invention, all the objects of the present invention described above can be achieved. Specifically, a high-efficiency, low-pollution combustion apparatus is provided by premixing fuel with auxiliary combustion gas in a lean fuel state.

1 is a perspective view of a waste gas combustion apparatus according to an embodiment of the present invention. FIG. 2 is a side view of the waste gas combustion apparatus illustrated in FIG. 1. FIG. 1 is a side view of the waste gas combustion apparatus shown in FIG. 1 with one side cut so that the inside can be partially seen. FIG. 2 is a longitudinal sectional view of the waste gas combustion apparatus illustrated in FIG. 1. FIG. 5 is a cross-sectional view illustrating an enlarged portion A in FIG. 4. FIG. 6 is a side view of the gas nozzle member illustrated in FIG. 5. It is a top view explaining the fuel gas supply structure illustrated in FIG. It is a top view explaining the waste gas inflow structure of the waste gas combustion apparatus illustrated in FIG.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.
1 is a perspective view of a waste gas combustion apparatus according to an embodiment of the present invention, FIG. 2 is a side view of the waste gas combustion apparatus shown in FIG. 1, and FIG. 3 is a waste gas shown in FIG. FIG. 4 is a longitudinal sectional view of the waste gas combustion apparatus shown in FIG. 1 as a side view of the combustion apparatus. 1 to 4, a waste gas combustion apparatus (100) includes a waste gas supply unit (110), a by-product processing unit (120), a combustion gas supply unit (130), and an ignition unit (140). And a body (150).

  The waste gas supply unit (110) includes a guide pipe (111) and first to fourth injection pipes (112a, 112b, 112c, 112d). A waste gas supply unit (110) supplies waste gas generated in a semiconductor manufacturing process or a chemical process, which is a processing target, to a combustion region formed in the waste gas combustion apparatus (100).

  The guide pipe (111) has a cylindrical shape extending in the vertical direction. Referring to FIG. 8 together, the guide pipe (111) extends in the vertical direction, is open at both ends, and is separated from each other. Gas guide passages (111a, 111b, 111c, 111d) are provided. Each waste gas guide passage (111a, 111b, 111c, 111d) is individually formed for each type of waste gas to be introduced, and the waste gas reaction problem is solved.

  The first to fourth injection pipes (112a, 112b, 112c, 112d) are arranged so as to be surrounded by the side of the guide pipe (111) so as to protrude outward in the radial direction along the cylindrical direction. . The first injection pipe (112a) is connected to the first waste gas guide passage (111a), the second injection pipe (112b) is connected to the second waste gas guide passage (111b), and the third injection pipe (112c) is connected to the first injection pipe (112c). The third waste gas guide passage (111c) is connected, and the fourth injection pipe (112d) is connected to the fourth waste gas guide passage (111d). Waste gas flows into each waste gas guide passage (111a, 111b, 111c, 111d) through each injection pipe (112a, 112b, 112c, 112d).

  In this embodiment, the waste gas supply unit (110) includes four individual waste gas guide passages (111a, 111b, 111c, 111d) and four corresponding injection pipes (112a, 112b, 112c, 112d) is provided, but unlike this, three or less or five or more individual waste gas guide passages and corresponding injection pipes are used depending on the type of waste gas to be treated. May be. Moreover, it is possible to use a single integrated waste gas guide passage.

  The by-product processing unit (120) includes first to fourth cylinders (121a, 121b, 121c, 121d) and piston rods (piston rods) prepared for the respective cylinders (121a, 121b, 121c, 121d) ( 122a, 122d, only two are shown in the drawing). The by-product processing unit (120) removes powder (dust powder) adhering to the inner wall of the waste gas guide passage (111a, 111b, 111c, 111d) of the waste gas supply unit (110) during the combustion process.

  The first to fourth cylinders (121a, 121b, 121c, 121d) are coupled to the upper stage (1111) of the guide pipe (111) of the waste gas supply unit (110). The first cylinder (121a) is positioned to correspond to the first waste gas guide passage (111a), and the second cylinder (121b) is positioned to correspond to the second waste gas guide passage (111b). The third cylinder 121c is positioned so as to correspond to the third waste gas guide passage 111c, and the fourth cylinder 121d is positioned so as to correspond to the fourth waste gas guide passage 111d. Piston rods (122a, 122d) prepared corresponding to the respective cylinders (121a, 121b, 121c, 121d) are respectively moved (straight and / or straight) in the corresponding waste gas guide passages (111a, 111b, 111c, 111d). Or rotational movement). The end of each piston rod (122a, 122d) is coupled with a removal member (123a, 123d) that can scrape and remove the powder fixed to the inner wall of the waste gas guide passage (111a, 111b, 111c, 111d).

In the present embodiment, the by-product processing unit (120) that removes the powder adhered to the inner wall of the waste gas guide passage while the piston rod moves is described. However, unlike this, the nitrogen heated to each waste gas guide passage is explained. The fixed powder can be removed by purging (N ₂ ) or the like.

  The combustion gas supply unit (130) includes a case (131), a gas nozzle member (132), a premixed fuel gas injection unit (136), and an auxiliary combustion gas injection unit (137). The combustion gas supply unit (130) supplies fuel gas and auxiliary combustion gas necessary for burning the waste gas.

  The case (131) has a hollow cylindrical shape and is located at the upper part of the ignition part (140). The case (131) includes an upper wall (131a), an outer wall (131b), and an inner wall (131c). A through hole (131a1) through which the gas nozzle member (132) passes is formed at the center of the upper wall (131a). The outer wall (131b) extends downward from the upper wall (131a), and the lower end is coupled to the upper stage of the ignition unit (140). The inner wall (131c) extends downward from the upper wall (131a), and the lower end is coupled to the upper stage of the ignition unit (140). The inner wall (131c) is located inside the outer wall (131b). An independent space (1311) is prepared between the outer wall (131b) and the inner wall (131c). This space (1311) functions as a cooling water circulation space.

The gas nozzle member (132) has a cylindrical shape extending vertically, and an internal space (1313) extending in the vertical direction along the center line and penetrating therethrough is prepared. This internal space (1313) functions as a primary combustion zone that is a space in which a frame (flame) is formed. The lower part of the gas nozzle member (132) is received in the inner space of the inner wall (131c), and the upper part of the gas nozzle member (132) protrudes on the upper wall (131a) through the through hole (131a1) of the upper wall (131a). . The lower end of the gas nozzle member (132) is in contact with the upper end of the ignition unit (140). On the outer wall of the gas nozzle member (132), a separation flange (133) protruding in the radial direction outward in an annular shape is prepared. An annular groove (133a) formed along the separation flange (133) is prepared in the separation flange (133). A sealing ring (133b) is sandwiched between the annular grooves (133a). The space (1312) formed between the inner wall (131c) and the outer wall of the gas nozzle member (132) is in contact with the inner wall (131c) of the sealing ring (133b), and the upper first gas space (1312a). It isolate | separates into the lower 2nd gas space (1312b). The outer wall of the gas nozzle member (132) has a plurality of premixed fuel gas nozzles (134) communicating the first gas space (1312a) and the internal space (1313) of the gas nozzle member (132), and a second gas space (1312b). And a plurality of auxiliary combustion gas nozzles (135) for communicating the internal space (1313) of the gas nozzle member (132). The premixed fuel gas is supplied to the internal space (1313) of the gas nozzle member (132) through the plurality of premixed fuel gas nozzles (134). The plurality of premixed fuel gas nozzles (134) are arranged to be inclined to one side with respect to the radial direction. Accordingly, the premixed fuel supplied to the internal space (1313) of the gas nozzle member (132) is rotated and supplied through the plurality of premixed fuel gas nozzles (134), thereby facilitating the mixing and the thermal NO _x and CO. Reduce the amount of generation. The plurality of auxiliary combustion gas nozzles (135) are arranged to be inclined to one side with respect to the radial direction. Accordingly, the auxiliary combustion gas supplied to the internal space (1313) of the gas nozzle member (132) through the plurality of auxiliary combustion gas nozzles (135) is rotated and supplied to perform appropriate diffusion combustion to maintain a uniform temperature band. The lower part of the guide pipe (111) of the waste gas supply unit (110) is inserted and received in the internal space (1313) of the gas nozzle member (132). The lower end (1112) of the guide tube (111) is positioned below the auxiliary combustion gas nozzle (135).

  The premixed fuel gas injection part (136) passes through the outer wall (131b) and the inner wall (131c) of the case (131) and is connected to the first gas space (1312a). The fuel gas injection unit (136) mixes the combustible gas and the auxiliary combustion gas to create a lean fuel state, and then injects the premixed fuel gas into the first gas space (1312a). As the fuel gas, liquefied natural gas, liquefied petroleum gas, hydrogen gas and the like are used.

  The auxiliary combustion gas injection part (137) passes through the outer wall (131b) and the inner wall (131c) of the case (131) and is connected to the second gas space (1312b). The auxiliary combustion gas injection part (137) injects auxiliary combustion gas such as oxygen gas into the second gas space (1312b).

  The ignition unit (140) includes a case (141), an ignition device (142), a display window (143), and first and second combustion detection sensors (144a, 144b).

  The case (141) has a generally hollow cylindrical shape and is located at the top of the body (150). The case (141) is opposed to the upper wall (141a), the outer wall (141b), the inner wall (141c), the frame guide wall (141d), and the upper wall (141a), and penetrates through the center portion. A bottom plate (141e) having a hole (141el) is provided. A through hole (141al) communicating with the internal space (1313) of the gas nozzle member (132) is formed at the center of the upper wall (141a). The outer wall (141b) extends downward from the upper wall (141a), and the lower end is coupled to the bottom plate (141e). The inner wall (141c) extends below the upper wall (141a), and the lower end is coupled to the bottom plate (141e). The inner wall (141c) is located inside the outer wall (141b). An independent space (1411b) is prepared between the outer wall (141b) and the inner wall (141c). A space (1411c) is formed between the frame guide wall (141d) and the inner wall (141c). Inside the frame guide wall (141d), there are an internal space (1313) of the gas nozzle member (132), an inside of the body (150), and a space (1411c) between the frame guide wall (141d) and the inner wall (141c). A space (1411d) connected to is formed. This space (1411d) forms a secondary combustion zone which is a space where the frame is diffused. The frame guide wall (141d) is properly diffused in an attempt to prevent the flame generated in the primary combustion zone (1313) from forming too much swirl and thereby reducing contact with waste gas. In order to ensure smooth contact with the waste gas, high processing efficiency of the waste gas is induced.

  The ignition device (142) passes through the outer wall (141b), the inner wall (141c), and the frame guide wall (141d) of the case (141) and is connected to the space inside the frame guide wall (141d). The ignition device (142) supplies an ignition source to the space inside the frame guide wall (141d). The ignition device (142) includes a spark plug and supplies dry compressed air (CDA) to keep the burner portion dry. When moisture is generated in the burner portion, powder fixation is actively performed.

  The display window (143) passes through the outer wall (141b), the inner wall (141c), and the frame guide wall (141d) of the case (141) and is connected to the space inside the frame guide wall (141d). Through the display window (143), the phenomenon of ignition and the phenomenon of combustion can be observed with the naked eye. Since the display window (143) may be affected by high temperature, it has a purging function.

  The first and second combustion detection sensors (144a, 144b) pass through the outer wall (141b), the inner wall (141c), and the frame guide wall (141d) of the case (141) to the inside of the frame guide wall (141d). Connected with the space. The first and second combustion detection sensors 144a and 144b detect frames generated in the primary combustion zone 1313a and the secondary combustion zone 1313b.

  A space for circulating the cooling water formed while surrounding the through hole (141e1) is prepared inside the bottom plate (141e).

  The body (150) includes an outer case member (151), an inner wall member (152), and a plurality of air inflow portions (153a, 153b).

  The case member (151) has a generally hollow cylindrical shape and includes an upper wall (151a), a bottom plate (151b), and a side wall (151c). The upper wall (151a) is coupled to the lower surface of the bottom plate (141e) of the ignition unit (140).

  A through hole (151a1) is prepared at the center of the upper wall (151a). The through hole (151a1) is formed larger than the through hole (141e1) of the bottom plate (141e) of the ignition unit (140). The bottom plate (151b) faces the upper wall (151a), and a through hole (1511b) is prepared at the center. The side wall (151c) extends between the top wall (151a) and the bottom plate (151b).

  The inner wall member (152) has a hollow cylindrical shape with both steps open, and is coupled to the inside of the case member (151). The open upper stage of the inner wall member (152) is connected to the through hole (151a1) of the upper wall (151a), and the lower stage of the inner wall member (152) is connected to the through hole (1511b) of the bottom plate (151b). The wall of the inner wall member (152) is provided with a large number of through holes (1521) for communicating the inside and outside of the inner wall member (152). The space inside the inner wall member (152) forms a tertiary combustion zone (1522).

The plurality of air inflow portions (153a, 153b) are installed in the case member (151) to allow outside air to flow into the case member (151). The air that has flowed in through the air inlets (153a, 153b) is supplied to the tertiary combustion zone (1522), and the heat generated in the tertiary combustion zone (1522) is uniformly distributed to generate Thermal NO _x . Reduce.

  Although not shown, it is possible to prevent adhesion of powder generated during combustion of waste gas by circulating circulating water or the like along the wall surface of the inner wall member (152).

The operation of the above embodiment will be described below with reference to FIGS.
A waste gas guide passage (in which a waste gas discharged in a chemical process, a manufacturing process of a semiconductor and an LCD, etc. and N ₂ used in a dry vacuum pump, etc. is formed in a guide pipe (111) of a waste gas supply unit (110) ( 111a, 111b, 111c, 111d) and individually supplied to the internal space (1313) of the gas nozzle member (132) which is a primary combustion zone along each waste gas. In this case, the fuel is rotated and supplied to the primary combustion zone (1313), which is a space that forms a frame by the reaction between the fuel and the oxidant, so that the mixing becomes smooth, the lean fuel is premixed, and Thermal NO _The amount of _x and CO generated is reduced. Further, in the secondary combustion zone (1411d), which is a zone where the unreacted fuel is completely burned in the primary combustion zone, the generation of Thermal NO _x is reduced by maintaining a uniform temperature zone by performing appropriate diffusion combustion. The Thereafter, tertiary combustion is performed on the waste gas in the tertiary combustion zone (1522). At this time, heat is uniformly distributed by the air flowing in through the plurality of air inflow portions (153a, 153b), and Thermal NO Generation of _x and CO is reduced. Waste gas treated by combustion can be discharged to the outside through a through hole (1511b) formed in the bottom plate (151b).

  While the present invention has been described with reference to the embodiments, the present invention is not limited to this. The above embodiments can be modified or changed without departing from the spirit and scope of the present invention, and those skilled in the art will recognize that such modifications and changes also belong to the present invention.

  From the above, according to the swirling flow premixed low pollution combustion apparatus according to the present invention, waste gas can be burned and processed, which is useful as an apparatus for processing waste gas.

DESCRIPTION OF SYMBOLS 100: Waste gas combustion apparatus 110: Waste gas supply part 120: By-product process part 130: Gas supply part for combustion 132: Gas nozzle member 140: Ignition part 150: Body 1313: Primary combustion area 1411: Secondary combustion area 1522: 3 Next combustion zone

Claims (6)

A waste gas combustion apparatus for treating waste gas discharged in a chemical process, a manufacturing process of semiconductors and LCDs, etc.
A combustion gas supply unit provided with a primary combustion zone that is a space in which a flame is formed by supplying a premixed combustion gas and a supplementary combustion gas premixed with a lean fuel gas;
A swirl flow premixing low pollution comprising an ignition device and an ignition part formed with a secondary combustion zone which is a space in which a frame formed in the primary combustion zone is diffused Combustion device. The swirl flow premixed low pollution combustion apparatus according to claim 1,
The combustion gas supply unit has the primary combustion zone formed therein, and includes a premixed fuel gas nozzle for injecting the premixed fuel gas into the primary combustion zone and an auxiliary combustion gas nozzle for injecting the auxiliary combustion gas. A swirl flow premixing low pollution combustion apparatus further comprising a gas nozzle member. The swirl flow premixed low pollution combustion apparatus according to claim 2,
The premixed fuel gas nozzle is constituted by a plurality of premixed fuel gas nozzles arranged to be inclined to one side with respect to the radial direction so that the premixed fuel gas rotates in the primary combustion zone,
The auxiliary combustion gas nozzle is composed of a plurality of auxiliary combustion gas nozzles arranged to be inclined to one side with respect to the radial direction so that the auxiliary combustion gas rotates in the primary combustion zone. Pollution combustion equipment. The swirl flow premixed low pollution combustion apparatus according to claim 2,
A waste gas supply unit comprising a guide tube that is at least partially inserted into the primary combustion zone to supply waste gas;
A swirling premixed low-pollution combustion apparatus characterized in that a plurality of separated waste gas guide passages are formed in the guide pipe. The swirl flow premixed low pollution combustion apparatus according to claim 4,
A swirling premixed low-pollution combustion apparatus, further comprising a by-product processing unit for removing powder adhered to the waste gas guide passage. The swirl flow premixed low pollution combustion apparatus according to claim 1,
A tertiary combustion zone adjacent to the secondary combustion zone;
A swirling premixed low-pollution combustion apparatus characterized in that air flows into the tertiary combustion zone from the outside.

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