JP2013184479A5 - - Google Patents

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Publication number
JP2013184479A5
JP2013184479A5 JP2013028528A JP2013028528A JP2013184479A5 JP 2013184479 A5 JP2013184479 A5 JP 2013184479A5 JP 2013028528 A JP2013028528 A JP 2013028528A JP 2013028528 A JP2013028528 A JP 2013028528A JP 2013184479 A5 JP2013184479 A5 JP 2013184479A5
Authority
JP
Japan
Prior art keywords
slab
diaphragm
dicing
depth
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013028528A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013184479A (ja
JP6059035B2 (ja
Filing date
Publication date
Priority claimed from US13/412,516 external-priority patent/US9139004B2/en
Application filed filed Critical
Publication of JP2013184479A publication Critical patent/JP2013184479A/ja
Publication of JP2013184479A5 publication Critical patent/JP2013184479A5/ja
Application granted granted Critical
Publication of JP6059035B2 publication Critical patent/JP6059035B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013028528A 2012-03-05 2013-02-18 直接ダイアフラムへ行う印刷ヘッドトランデューサのダイシング Expired - Fee Related JP6059035B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/412,516 US9139004B2 (en) 2012-03-05 2012-03-05 Print head transducer dicing directly on diaphragm
US13/412,516 2012-03-05

Publications (3)

Publication Number Publication Date
JP2013184479A JP2013184479A (ja) 2013-09-19
JP2013184479A5 true JP2013184479A5 (enExample) 2016-03-24
JP6059035B2 JP6059035B2 (ja) 2017-01-11

Family

ID=49041994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013028528A Expired - Fee Related JP6059035B2 (ja) 2012-03-05 2013-02-18 直接ダイアフラムへ行う印刷ヘッドトランデューサのダイシング

Country Status (4)

Country Link
US (1) US9139004B2 (enExample)
JP (1) JP6059035B2 (enExample)
KR (1) KR101959572B1 (enExample)
CN (1) CN103302978B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9139004B2 (en) * 2012-03-05 2015-09-22 Xerox Corporation Print head transducer dicing directly on diaphragm
US10166777B2 (en) 2016-04-21 2019-01-01 Xerox Corporation Method of forming piezo driver electrodes
US10252525B2 (en) 2017-06-01 2019-04-09 Xerox Corporation Lead-free piezo printhead using thinned bulk material

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3723223A (en) * 1971-01-11 1973-03-27 Nat Starch Chem Corp Heat curing adhesive
US4730197A (en) * 1985-11-06 1988-03-08 Pitney Bowes Inc. Impulse ink jet system
DE3804165A1 (de) * 1988-02-11 1989-08-24 Olympia Aeg Verfahren zum bestuecken eines tintenstrahldruckkopfes mit piezokristallen
JPH02187352A (ja) * 1989-07-24 1990-07-23 Seiko Epson Corp インクジェットヘッド
US5825382A (en) * 1992-07-31 1998-10-20 Francotyp-Postalia Ag & Co. Edge-shooter ink jet print head and method for its manufacture
JP3152260B2 (ja) * 1992-10-02 2001-04-03 セイコーエプソン株式会社 インクジェットヘッド及びインクジェットヘッド製造方法
JPH06171097A (ja) * 1992-12-07 1994-06-21 Fujitsu Isotec Ltd インクジェットヘッドの製造方法
EP0830945B1 (en) * 1996-04-04 2002-07-10 Sony Corporation Printer device and method of manufacturing same
JPH11334066A (ja) * 1998-05-22 1999-12-07 Sony Corp インクジェット記録ヘッド及びその製造方法
US6530652B1 (en) * 1998-12-30 2003-03-11 Samsung Electronics Co., Ltd. Micro actuator and ink jet printer head manufactured using the same
ES2206290T3 (es) * 1999-08-14 2004-05-16 Xaar Technology Limited Aparato de deposicion de gotitas.
GB2368123A (en) * 2000-10-14 2002-04-24 Jomed Imaging Ltd Electrostrictive ultrasonic transducer array suitable for catheter
US6505917B1 (en) * 2001-07-13 2003-01-14 Illinois Tool Works Inc. Electrode patterns for piezo-electric ink jet printer
US7070674B2 (en) * 2002-12-20 2006-07-04 Caterpillar Method of manufacturing a multi-layered piezoelectric actuator
US20050045272A1 (en) * 2003-08-28 2005-03-03 Xerox Corporation Laser removal of adhesive
JP4265576B2 (ja) * 2004-06-29 2009-05-20 ブラザー工業株式会社 液体移送装置
JP2006096034A (ja) * 2004-08-31 2006-04-13 Brother Ind Ltd 溝付き振動板及び圧電層を有する圧電アクチュエータ、液体移送装置及びその製造方法
US7388319B2 (en) * 2004-10-15 2008-06-17 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
JP4548169B2 (ja) * 2005-03-23 2010-09-22 ブラザー工業株式会社 インクジェットヘッドの製造方法
US7862678B2 (en) * 2006-04-05 2011-01-04 Xerox Corporation Drop generator
JP2009083262A (ja) * 2007-09-28 2009-04-23 Brother Ind Ltd 液体移送装置。
JP5112889B2 (ja) * 2008-01-11 2013-01-09 エスアイアイ・プリンテック株式会社 インクジェットヘッドチップ、インクジェットヘッドチップの製造方法、インクジェットヘッド、及びインクジェット記録装置
KR20100047973A (ko) * 2008-10-30 2010-05-11 삼성전기주식회사 잉크젯 헤드 제조방법
KR101024013B1 (ko) * 2008-12-03 2011-03-29 삼성전기주식회사 잉크젯 헤드 제조방법
KR101024015B1 (ko) * 2008-12-04 2011-03-29 삼성전기주식회사 잉크젯 헤드 및 그 제조방법
US8608293B2 (en) * 2011-10-24 2013-12-17 Xerox Corporation Process for adding thermoset layer to piezoelectric printhead
US8602523B2 (en) * 2011-11-11 2013-12-10 Xerox Corporation Fluorinated poly(amide-imide) copolymer printhead coatings
US9139004B2 (en) * 2012-03-05 2015-09-22 Xerox Corporation Print head transducer dicing directly on diaphragm

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