JP2013181940A - Gyro sensor and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration element capable of detecting angular velocities of two axes intersecting with each other around respective axes.SOLUTION: A gyro sensor 2 includes: a base portion 41; a first coupling arm 44 and a second coupling arm 45 that are extended along an X axis with the base portion 41 interposed therebetween; a first detection vibrating arm 421 and a second detection vibrating arm 422 that are extended along a Y axis with the base portion 41 interposed therebetween; a first drive vibrating arm 46 extended from the first coupling arm 44 along the Y axis; and a second drive vibrating arm 47 extended from the second coupling arm 45 along the Y axis. Each of the first drive vibrating arm 46 and the second drive vibrating arm 47 vibrates in a Z axis direction. Each of the first coupling arm 44, the second coupling arm 45, the first detection vibration arm 421, and the second detection vibration arm 422 is provided with detecting means and vibrates in a plane including the X axis and the Y axis when an angular velocity is applied around a detection axis.

Description

  The present invention relates to a gyro sensor and an electronic device.

Conventionally, the gyro sensor of patent document 1 is known as a vibration piece for detecting angular velocity.
The gyro sensor of Patent Document 1 includes a base, first and second detection vibrating arms extending from the base to both sides in the Y-axis direction, and first and second connecting arms extending from the base to both sides in the X-axis direction. And first and second drive vibrating arms extending in the Y-axis direction from the tip of the first connecting arm to both sides, and third and third extending from the tip of the second connecting arm to the both sides in the Y-axis direction. 4 drive vibration arms. Further, drive electrodes are formed on the first to fourth drive vibrating arms, and detection electrodes are formed on the first and second detection vibrating arms.

  Such a gyro sensor detects angular velocity as follows. First, the first to fourth drive vibrating arms are vibrated so that the first and second drive vibrating arms and the third and fourth drive vibrating arms are plane-symmetric with respect to the YZ plane. When an angular velocity is applied around the Z axis in this state, a Coriolis force acts on the gyro sensor, and detection vibration in the X axis direction is excited on the first and second detection vibrating arms. Then, the detection electrode detects the distortion of the first and second detection vibrating arms caused by this vibration, whereby the angular velocity around the Z axis can be obtained.

  However, the gyro sensor of Patent Document 1 can only detect the angular velocity around the Z axis. That is, the angular velocity around the X axis and the angular velocity around the Y axis cannot be detected. For this reason, for example, when it is desired to detect angular velocities generated around the X axis and the Y axis, it is necessary to place the gyro sensor in a vertical position, which increases the thickness of the sensor device. If it is desired to detect angular velocities for a plurality of axes, it is necessary to arrange a plurality of gyro sensors. Therefore, there is a problem that the apparatus becomes large.

JP 2006-201011 A

  An object of the present invention is to provide a gyro sensor that can detect angular velocities around two axes intersecting each other, and to provide a highly reliable electronic device including the gyro sensor. .

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The gyro sensor of the present invention has three axes intersecting each other as a first axis, a second axis, and a third axis.
The base,
A first connecting arm and a second connecting arm extending along the first axis across the base,
A first detection vibrating arm and a second detection vibrating arm extending along the second axis across the base;
A first drive vibrating arm extending from the first connecting arm along the second axis;
A second drive vibrating arm extending from the second connecting arm along the second axis,
Each of the first drive vibrating arm and the second drive vibrating arm vibrates in the direction of the third axis,
Each of the first connection arm, the second connection arm, the first detection vibration arm, and the second detection vibration arm includes a strain detection unit, and the first connection arm, the second detection arm, and the second detection vibration arm, when an angular velocity is applied around the detection axis. It vibrates in a plane including one axis and the second axis.
Accordingly, it is possible to provide a gyro sensor that can detect angular velocities around the two axes that intersect each other.

[Application Example 2]
In the gyro sensor of the present invention, when an angular velocity is applied around the second axis, each of the first detection vibrating arm and the second detection vibrating arm vibrates in the same direction of the first axis. Features.
Thereby, the angular velocity around the second axis can be detected.

[Application Example 3]
The gyro sensor according to the present invention is characterized in that when an angular velocity is applied around the first axis, each of the first connecting arm and the second connecting arm vibrates in the same direction of the second axis. To do.
Thereby, the angular velocity around the first axis can be detected.

[Application Example 4]
The gyro sensor of the present invention detects an angular velocity around the second axis based on output signals of the first detection vibrating arm and the second detection vibrating arm,
An angular velocity about the first axis is detected based on output signals of the first connecting arm and the second connecting arm.
Thereby, the angular velocity around the first axis and the angular velocity around the second axis can be detected independently.

[Application Example 5]
The gyro sensor of the present invention includes a third drive vibrating arm extending in a direction opposite to a direction in which the first drive vibrating arm extends,
And a fourth drive vibrating arm extending in a direction opposite to the direction in which the second drive vibrating arm extends.
As a result, the number of drive vibrating arms is increased, and the angular velocity detection accuracy is improved. In addition, the first to fourth drive vibrating arms can be vibrated with good balance.

[Application Example 6]
The gyro sensor of the present invention has three axes intersecting each other as a first axis, a second axis, and a third axis.
The base,
A first connecting arm and a second connecting arm extending oppositely from each other along the first axis from the base;
A first drive vibrating arm extending from the first connecting arm along the second axis;
A second drive vibrating arm extending from the second connecting arm along the second axis;
A first detection vibrating arm and a second detection vibrating arm extending from one end of the base in a direction intersecting both the first axis and the second axis and opposite to each other in the first axis direction;
A third detection vibration arm and a fourth detection vibration arm that extend from the other end of the base in a direction intersecting both the first axis and the second axis and to the opposite sides of the first axis direction,
Each of the first drive vibrating arm and the second drive vibrating arm vibrates in the direction of the third axis,
Each of the first detection vibration arm, the second detection vibration arm, the third detection vibration arm, and the fourth detection vibration arm includes a strain detection unit, and an angular velocity is applied around the detection axis. It vibrates in a plane including the first axis and the second axis.
Accordingly, it is possible to provide a gyro sensor that can detect angular velocities around the two axes that intersect each other.

[Application Example 7]
The gyro sensor of the present invention has three axes intersecting each other as a first axis, a second axis, and a third axis.
The base,
A first detection vibrating arm and a second detection vibrating arm extending from one end of the base in a direction intersecting both the first axis and the second axis and opposite to each other in the first axis direction;
A third detection vibrating arm and a fourth detection vibrating arm extending from the other end of the base in a direction intersecting both the first axis and the second axis and to the opposite sides of the first axis direction,
A first drive vibration arm located between the first detection vibration arm and the second detection vibration arm and extending from one end of the base portion along the first axis;
A second drive vibration arm located between the third detection vibration arm and the fourth detection vibration arm and extending from the other end of the base portion along the first axis;
The distal ends of the first drive vibrating arm and the second drive vibrating arm branch into at least two branches extending in a direction inclined with respect to both the first axis and the second axis,
Each of the first drive vibrating arm and the second drive vibrating arm vibrates in the direction of the third axis,
Each of the first detection vibration arm, the second detection vibration arm, the third detection vibration arm, and the fourth detection vibration arm includes a strain detection unit, and an angular velocity is applied around the detection axis. It vibrates in a plane including the first axis and the second axis.
Accordingly, it is possible to provide a gyro sensor that can detect angular velocities around the two axes that intersect each other.

[Application Example 8]
In the gyro sensor of the present invention, when an angular velocity is applied around the second axis, each of the first detection vibration arm, the second detection vibration arm, the third detection vibration arm, and the fourth detection vibration arm Vibrates in the same direction of the first axis.
Thereby, the angular velocity around the second axis can be detected.

[Application Example 9]
In the gyro sensor of the present invention, each of the first detection vibrating arm, the second detection vibrating arm, the third detection vibrating arm, and the fourth detection vibrating arm when an angular velocity is applied around the first axis. Preferably vibrate in the same direction of the second axis.
Thereby, the angular velocity around the first axis can be detected.

[Application Example 10]
The gyro sensor of the present invention includes an angular velocity around the first axis and an output of the first detection vibrating arm, the second detection vibrating arm, the third detection vibrating arm, and the fourth detection vibrating arm. It is characterized in that at least one of the angular velocities around the second axis is detected.
Thereby, the angular velocity around the first axis and the angular velocity around the second axis can be detected independently.
[Application Example 11]
An electronic apparatus according to the present invention includes the gyro sensor according to the present invention.
Thereby, an electronic device having excellent reliability can be obtained.

It is a top view which shows 1st Embodiment of the gyro sensor of this invention. It is the sectional view on the AA line in FIG. 1, and the BB sectional drawing. It is CC sectional view taken on the line in FIG. It is sectional drawing explaining the drive of the gyro sensor shown in FIG. It is a top view which shows the vibration of a gyro sensor when the angular velocity around a Y-axis is added. It is a top view which shows the vibration of a gyro sensor when the angular velocity around an X-axis is added. It is a top view of the gyro sensor concerning a 2nd embodiment of the present invention. It is the DD sectional view taken on the line in FIG. 7, and the EE sectional view taken on the line. It is a top view which shows the vibration of a gyro sensor when the angular velocity around a Y-axis is added. It is a top view which shows the vibration of a gyro sensor when the angular velocity around an X-axis is added. It is a top view of the gyro sensor concerning a 3rd embodiment of the present invention. It is the FF sectional view taken on the line in FIG. 11, the GG sectional view, the HH sectional view, and the II sectional view. It is an electronic device (notebook type personal computer) provided with the gyro sensor of this invention. It is an electronic device (cellular phone) provided with the gyro sensor of the present invention. It is an electronic device (digital still camera) provided with the gyro sensor of the present invention.

Hereinafter, a gyro sensor and an electronic device according to the present invention will be described in detail based on embodiments shown in the accompanying drawings.
1 is a plan view showing a first embodiment of a gyro sensor according to the present invention, FIG. 2 is a cross-sectional view taken along line AA and BB in FIG. 1, and FIG. 3 is a cross-sectional view taken along line C--B in FIG. FIG. 4 is a sectional view for explaining driving of the gyro sensor shown in FIG. 1, FIG. 5 is a plan view showing vibration of the gyro sensor when an angular velocity around the Y axis is applied, and FIG. It is a top view which shows the vibration of a gyro sensor when the angular velocity around an X-axis is added.

  In the following, as shown in FIG. 1, the three axes orthogonal to each other are referred to as an X axis (first axis), a Y axis (second axis), and a Z axis (third axis). A direction parallel to the X axis is also referred to as an “X axis direction”, a direction parallel to the Y axis is also referred to as a “Y axis direction”, and a direction parallel to the Z axis is referred to as a “Z axis direction”. A plane defined by the X axis and the Y axis is also referred to as an “XY plane”, a plane defined by the Y axis and the Z axis is also referred to as a “YZ plane”, and a plane defined by the Z axis and the X axis is represented by “ It is also called “XZ plane”.

A gyro sensor 2 shown in FIG. 1 is a gyro sensor capable of detecting an angular velocity ωx around the X axis and an angular velocity ωy around the Y axis. The gyro sensor 2 includes a vibrating piece 3 and a plurality of electrodes formed on the vibrating piece 3.
The vibrating piece 3 is made of a piezoelectric material. Examples of the piezoelectric material include crystal, lithium tantalate, lithium niobate, lithium borate, and barium titanate. In particular, the piezoelectric material constituting the resonator element 3 is preferably quartz. If the resonator element 3 is made of quartz, the vibration characteristics (particularly frequency temperature characteristics) of the resonator element 3 can be made excellent. Further, the resonator element 3 can be formed with high dimensional accuracy by etching.

  Such a resonator element 3 has a spread in the XY plane and a thickness in the Z-axis direction. The resonator element 3 includes a base 41, first and second detection vibrating arms 421 and 422, first and second connecting arms 44 and 45, and first, second, third and fourth driving vibrating arms. 46, 47, 48, 49.

  The base 41 is located at the center of the resonator element 3. Further, the first detection vibrating arm 421 and the second detection vibrating arm 422 respectively extend from the base portion 41 in the Y axis direction opposite to each other. The first connecting arm 44 and the second connecting arm 45 extend from the base portion 41 in the X-axis direction opposite to each other. Further, the first drive vibrating arm 46 and the third drive vibrating arm 48 extend in the Y-axis direction opposite to each other from the distal end portion of the first connecting arm 44. The second and fourth drive vibrating arms 47 and 49 extend in the Y-axis direction opposite to each other from the distal end portion of the second connecting arm 45.

  In the configuration shown in the figure, the widths of the first connecting arm 44 and the second connecting arm 45 are narrower than the width of the base 41, but may be formed integrally with the base 41. The first and third drive vibrating arms 46 and 48 may extend from the middle of the extending direction of the first connecting arm 44. Similarly, the second and fourth drive vibrating arms 47 and 49 You may extend from the middle of the extension direction of the 2 connection arms 45. FIG.

The first and second detection vibrating arms 421 and 422 are provided symmetrically with respect to the XZ plane intersecting with the center of gravity (center) G. The first and second detection vibrating arms 421 and 422 have a substantially rectangular cross-sectional shape.
In addition, the distal ends of the first, second, third, and fourth drive vibrating arms 46, 47, 48, and 49 and the first, second, and detection vibrating arms 421 and 422 are wider or thicker than the root portion. Meat (so-called hammerhead shape) may be used. By making the tip of the vibrating arm into a hammerhead shape in this way, the drive displacement or detection displacement can be increased.

As shown in FIG. 2, first detection signal electrodes (electrodes) 710 a are formed on the upper and lower surfaces of the first detection vibrating arm 421, and the second detection signals are formed on the upper and lower surfaces of the second detection vibrating arm 422. An electrode (electrode) 710b is formed.
The first detection ground electrode (electrode) 720a is formed on both side surfaces of the first detection vibrating arm 421, and the second detection ground electrode (electrode) 720b is formed on both side surfaces of the second detection vibration arm 422. Yes. Such first and second detection ground electrodes 720a and 720b have a potential to be ground with respect to the first and second detection signal electrodes 710a and 710b.

  In the configuration shown in the figure, the first detection vibrating arm 421 and the second detection vibrating arm 422 have a rectangular cross-sectional shape. However, the first detection vibrating arm 421 and the second detection vibrating arm 421 are provided on at least one of the upper and lower surfaces. A groove may be provided. In that case, it is desirable to form the first detection signal electrode 710a (second detection signal electrode 710b) along the inner wall of the groove. By adopting such a form, the interval between the first detection signal electrode 710a (second detection signal electrode 710b) and the first detection ground electrode 720a (second detection ground electrode 720b) formed on the side surface is reduced, Electric field efficiency is improved, and a large amount of charge can be generated between the electrodes with a small amount of strain, contributing to high sensitivity.

  By forming the first and second detection signal electrodes 710a and 710b and the first and second detection ground electrodes 720a and 720b in such an arrangement, the detection vibration generated in the first detection vibration arm 421 is the first detection. It appears as a charge between the signal electrode 710a and the first detection ground electrode 720a, and the charge can be taken out as a signal (output signal). The detection vibration generated in the second detection vibration arm 422 is the second detection signal electrode. It appears as a charge between 710b and the second detection ground electrode 720b, and the charge can be taken out as a signal. That is, the first detection signal electrode 710a and the first detection ground electrode 720a constitute detection means for detecting distortion of the first detection vibrating arm 421, and the second detection signal electrode 710b and the first detection ground electrode 720b The detection means for detecting the distortion of the 2-detection vibrating arm 422 is configured.

The first and second connecting arms 44 and 45 are provided symmetrically with respect to the YZ plane intersecting with the center of gravity (center) G. The first and second connecting arms 44 and 45 have a substantially rectangular cross-sectional shape.
As shown in FIG. 3, two piezoelectric elements (detecting means) 55 and 56 that are spaced apart in the Y-axis direction are provided on the upper surface of the first connecting arm 44. The piezoelectric element 55, 56 extends in the X-axis direction, and is provided symmetrically with respect to the axis 44a of the first connecting arm 44 in the XY plane.

The piezoelectric element 55 is configured by a laminated body in which the first electrode layer 551, the piezoelectric layer 552, and the second electrode layer 553 are laminated from the upper surface side of the first connecting arm 44. In addition, the piezoelectric element 56 is configured by a laminated body in which the first electrode layer 561, the piezoelectric layer 562, and the second electrode layer 563 are laminated from the upper surface side of the first connecting arm 44.
The first electrode layers 551 and 561 and the second electrode layers 553 and 553 are made of gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver alloy, chromium (Cr). , Chromium alloy, copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), zinc (Zn), zirconium (Zr), etc. A conductive material such as a metal material or indium tin oxide (ITO) can be used.

Examples of constituent materials of the piezoelectric layers 552 and 562 include zinc oxide (ZnO), aluminum nitride (AlN), lithium tantalate (LiTaO ₃ ), lithium niobate (LiNbO ₃ ), potassium niobate (KNbO ₃ ), Examples thereof include lithium tetraborate (Li ₂ B ₄ O ₇ ), barium titanate (BaTiO ₃ ), and PZT (lead zirconate titanate), but it is preferable to use AIN or ZnO.

  In such a piezoelectric element 55, the distortion of the piezoelectric layer 552 appears as a charge between the first electrode layer 551 and the second electrode layer 553, and signals from the first electrode layer 551 and the second electrode layer 553. It can be taken out. Similarly, in the piezoelectric element 56, the distortion of the piezoelectric layer 562 appears as a charge between the first electrode layer 561 and the second electrode layer 563, and as a signal from the first electrode layer 561 and the second electrode layer 563, It can be taken out.

  Here, when the first connecting arm 44 is curved and deformed in the Y-axis direction, the piezoelectric element 55 (piezoelectric layer 552) contracts and the piezoelectric element 56 (piezoelectric layer 562) expands according to the deformation. As the piezoelectric element 55 (piezoelectric layer 552) expands and the piezoelectric element 56 (piezoelectric layer 562) contracts, an electrical signal corresponding to the generated strain can be obtained.

  Similarly, two piezoelectric elements (strain detection elements) 57 and 58 provided apart from each other in the Y-axis direction are provided on the upper surface of the second connecting arm 45. The piezoelectric element elements 57 and 58 are provided symmetrically with respect to the axis of the second connecting arm 45 in the xy plane. The piezoelectric elements 57 and 58 are formed in contrast to the piezoelectric elements 55 and 56 with respect to the yz plane passing through the center of gravity G. In addition, since the structure and function of the piezoelectric elements 57 and 58 are the same as those of the piezoelectric elements 55 and 56 described above, description thereof is omitted.

  The first drive vibrating arm 46 and the third drive vibrating arm 48 extend opposite to each other from the distal end portion of the first connecting arm 44. Further, the second drive vibrating arm 47 and the fourth drive vibrating arm 49 extend in the opposite directions from the tip of the second connecting arm 45. The first and third drive vibrating arms 46 and 48 and the second and fourth drive vibrating arms 47 and 49 are formed symmetrically with respect to the YZ plane passing through the center of gravity G. The first and second drive vibrating arms 46 and 47 and the third and fourth drive vibrating arms 48 and 49 are formed symmetrically with respect to the XZ plane passing through the center of gravity G. Each of the first to fourth drive vibrating arms 46 to 49 has a substantially rectangular cross-sectional shape.

  A pair of drive signal electrodes 730 and a pair of drive ground electrodes 740 are formed on the first drive vibrating arm 46. Specifically, one of the drive signal electrodes 730 is formed on the upper surface side of the side surface 461, and the other is formed on the lower surface side of the side surface 462. One of the drive ground electrodes 740 is formed on the lower surface side of the side surface 461 so as to face the drive signal electrode 730 formed on the side surface 462, and the other is on the upper surface side of the side surface 462. It is formed so as to face the drive signal electrode 730 formed at 461.

  Similarly, a pair of drive signal electrodes 730 and a pair of drive ground electrodes 740 are also formed on the third drive vibrating arm 48. Specifically, one of the drive signal electrodes 730 is formed on the upper surface side of the side surface 481, and the other is formed on the lower surface side of the side surface 482. One of the drive ground electrodes 740 is formed on the lower surface side of the side surface 481 so as to face the drive signal electrode 730 formed on the side surface 482, and the other is the upper surface side of the side surface 482, It is formed to face the drive signal electrode 730 formed at 481.

  Similarly, a pair of drive signal electrodes 730 and a pair of drive ground electrodes 740 are also formed on the second drive vibrating arm 47. Specifically, one of the drive signal electrodes 730 is formed on the upper surface side of the side surface 472 and the other is formed on the lower surface side of the side surface 471. One of the drive ground electrodes 740 is formed on the lower surface side of the side surface 472 so as to face the drive signal electrode 730 formed on the side surface 471, and the other is the upper surface side of the side surface 471, It is formed so as to face the drive signal electrode 730 formed at 472.

  Similarly, a pair of drive signal electrodes 730 and a pair of drive ground electrodes 740 are also formed on the fourth drive vibrating arm 49. Specifically, one of the drive signal electrodes 730 is formed on the upper surface side of the side surface 492, and the other is formed on the lower surface side of the side surface 491. One of the drive ground electrodes 740 is formed on the lower surface side of the side surface 492 so as to face the drive signal electrode 730 formed on the side surface 491, and the other is the upper surface side of the side surface 491, It is formed so as to face the drive signal electrode 730 formed at 492.

When the drive signal electrode 730 and the drive ground electrode 740 are formed in such an arrangement, by applying a drive signal between the drive signal electrode 730 and the drive ground electrode 740, the first to fourth drive vibrating arms 46 to 49 are applied. Can be bent and vibrated in the Z-axis direction and on the same side.
The configuration of the gyro sensor 2 has been described above. The gyro sensor 2 detects the angular velocity ωx around the X axis and the angular velocity ωy around the Y axis as follows. Hereinafter, although description will be made based on FIGS. 4 to 6, for convenience of description, illustration of various electrodes and piezoelectric elements is omitted in FIG. 4. 4A is a cross-sectional view corresponding to the cross-sectional view taken along the line AA in FIG. 1, and FIG. 4B is a cross-sectional view corresponding to the cross-sectional view taken along the line BB in FIG.

  When an alternating voltage is applied between the drive signal electrode 730 and the drive ground electrode 740 in a state where the angular velocity is not applied, the first to fourth drive vibrating arms 46 to 49 bend and vibrate in the Z-axis direction and to the same side, respectively. To do. At this time, as shown in FIG. 4, the first and second detection vibrating arms 421 and 422 are arranged in the Z-axis direction and in the first direction so as to be balanced with the first to fourth driving vibrating arms 46 to 49, respectively. Bend and vibrate in the opposite direction to the first to fourth drive vibrating arms 46 to 49. Such vibrations of the first and second detection vibrating arms 421 and 422 cancel out vibrations in the Z-axis direction, so that vibration leakage can be prevented or suppressed.

  In this state, when an angular velocity ωy about the Y axis is applied to the gyro sensor 2, a Coriolis force A acts as shown in FIG. 5, and this Coriolis force A is used as a driving force to cause vibrations (around the Y axis). The angular velocity detection vibration mode) is excited. At this time, the deformation generated in the first and second detection vibrating arms 421 and 422 is in the same direction with respect to the X axis. The detection vibration mode is preferably a frequency within ± 10% of the drive frequency.

  In addition, regarding the vibration direction of the first and second detection vibrating arms 421 and 422, it can be said that the first and second detection vibrating arms 421 and 422 are vibrating in the same direction with respect to the X axis. This is because the first to fourth drive vibrating arms 46 to 49 vibrate as shown in FIG. 5 due to the action of the Coriolis force, and the first and second detection vibrating arms 421 and 422 are located on the upper side across the base 41. Since each of the first detection vibrating arms 421 extends downward, the first detection vibrating arm 421 is deformed corresponding to the first and second drive vibrating arms 46 and 47, and the second detection vibrating arm 422 is third and fourth driven. This is for performing deformation corresponding to the vibrating arms 48 and 49.

The distortion of the first detection vibrating arm 421 generated in such a detection vibration mode is taken out as a signal from the first detection signal electrode 710a and the first detection ground electrode 720a, and the distortion of the second detection vibration arm 422 is taken as the second detection signal. A signal is extracted from the electrode 710b and the second detection ground electrode 720b, and an angular velocity ωy about the Y axis is obtained based on these two signals.
In particular, since the first and second detection vibrating arms 421 and 422 extend along the Y-axis, when the angular velocity ωy is applied, the first and second detection vibrating arms 421 and 422 vibrate more efficiently (largely) in the X-axis direction. Therefore, the intensity of the signal is increased, and the angular velocity ωy can be detected more accurately.

  On the other hand, when an angular velocity ωx around the X axis is applied to the gyro sensor 2, a Coriolis force A acts as shown in FIG. 6, and this Coriolis force A is used as a driving force to cause vibration indicated by an arrow B (detection of angular velocity around the X axis). Vibration mode) is excited. At this time, the deformation generated in the first and second connecting arms 44 and 45 is in the same direction with respect to the Y axis. The detection vibration mode is preferably a frequency within ± 10% of the drive frequency.

  In addition, regarding the vibration direction of the first and second connecting arms 44 and 45, it can be said that the first and second connecting arms 44 and 45 vibrate in the same direction with respect to the Y axis. This is because the first to fourth drive vibrating arms 46 to 49 vibrate as shown in FIG. 6 due to the action of the Coriolis force, and the first and second connecting arms 44 and 45 are located on the left and right sides with the base 41 interposed therebetween. Therefore, the first connecting arm 44 is deformed corresponding to the first and third driving vibrating arms 46 and 48, and the second connecting arm 45 is changed to the second and fourth driving vibrating arms 47, 48, respectively. This is because the deformation corresponding to 49 is performed.

  The distortion of the first connecting arm 44 generated in such a detection vibration mode is taken out as a signal from the pair of piezoelectric elements 55 and 56, and the distortion of the second connecting arm 45 is taken as a signal from the pair of piezoelectric elements 57 and 58. Based on these four signals, the angular velocity ωx around the X axis is obtained.

In particular, since the first and second connecting arms 44 and 45 extend along the X axis, when the angular velocity ωx is applied, the first and second connecting arms 44 and 45 vibrate more efficiently (largely) in the Y axis direction. Therefore, the intensity of the signal is increased, and the angular velocity ωx can be detected more accurately.
When the angular velocity ωxy about the axis inclined with respect to both the X axis and the Y axis is added to the gyro sensor 2, the vibration mode when the angular velocity ωy is added and the angular velocity ωx are added. Vibration mode occurs at the same time. Even in such a case, the angular velocity ωy can be detected independently from the distortion of the first and second detection vibrating arms 412, 422, and the angular velocity ωx can be detected independently from the distortion of the first and second connecting arms 44, 45. it can.

  In addition, since the first and second detection vibrating arms 421 and 422 extend in the Y-axis direction, no new vibration is substantially excited by the angular velocity ωx. Since the two connecting portions 44 and 45 extend in the x-axis direction, new vibrations are not substantially excited by the angular velocity ωy. Therefore, even if the angular velocity ωxy around the axis inclined with respect to both the X axis and the Y axis is added, the angular velocities ωy and ωy are not synthesized, and the angular velocity ωy is obtained from the first and second detection vibrating arms 421 and 422. Can be detected independently from the first and second connecting arms 44 and 45, respectively.

Second Embodiment
Next, a second embodiment of the gyro sensor of the present invention will be described.
7 is a plan view of a gyro sensor according to a second embodiment of the present invention, FIG. 8 is a cross-sectional view taken along line DD and EE in FIG. 7, and FIG. 9 is an angular velocity around the Y axis. FIG. 10 is a plan view showing the vibration of the gyro sensor when an angular velocity around the X axis is applied.

Hereinafter, the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.
The gyro sensor according to the second embodiment of the present invention is substantially the same as the first embodiment except that the configuration of the detection vibration system is different. 7-10, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above.

As shown in FIG. 7, the detection vibration system of the gyro sensor 2A of the present embodiment includes four detection vibration arms, that is, first, second, third, and fourth detection vibration arms 421A, 422A, 423A, and 424A. doing.
The first and second detection vibrating arms 421A and 422A and the third and fourth detection vibrating arms 423A and 424A extend from the base 41 opposite to each other in the Y-axis direction.

  The first detection vibrating arm 421A and the second detection vibrating arm 422A each extend from one end of the base 41 (the upper end in FIG. 7) to one side in the Y-axis direction. Further, the first detection vibrating arm 421A and the second detection vibrating arm 422A extend in directions inclined to both the X-axis and the Y-axis, respectively, and the distance between them gradually increases toward the tip side. (That is, they extend toward opposite sides in the X-axis direction). Further, the first detection vibrating arm 421A and the second detection vibrating arm 422A are formed symmetrically with respect to the YZ plane passing through the center of gravity (center) G of the vibrating piece 3.

  Similarly, the third detection vibrating arm 423A and the fourth detection vibrating arm 424A each extend from the other end of the base 41 to the other side in the Y-axis direction. Further, the third detection vibrating arm 423A and the fourth detection vibrating arm 424A extend in directions inclined to both the X-axis and the Y-axis, respectively, and the separation distance from each other gradually increases toward the tip side. ing. (That is, they extend toward the opposite sides in the X-axis direction). Further, the third detection vibrating arm 423A and the fourth detection vibrating arm 424A are formed symmetrically with respect to the YZ plane passing through the center of gravity G.

  The first and second detection vibrating arms 421A and 422A and the third and fourth detection vibrating arms 423A and 424A are formed symmetrically with respect to the XZ plane passing through the center of gravity G, and the first and third detection vibrating arms 421A and 423A and the second and fourth detection vibrating arms 422A and 424A are formed symmetrically with respect to the YZ plane passing through the center of gravity G. Each of the first to fourth detection vibrating arms 421A to 424A has a substantially rectangular cross-sectional shape.

Here, when the resonator element 3 is made of quartz, it is preferable that the extending directions of the first to fourth detection vibrating arms 421A to 422A coincide with the direction orthogonal to the polarization direction of the quartz. Thereby, excellent detection accuracy can be exhibited.
As shown in FIG. 8, the first detection signal electrode 710a is formed on the upper and lower surfaces of the first detection vibrating arm 421A. Similarly, the second detection signal electrode 710b is formed on the upper and lower surfaces of the second detection vibrating arm 422A, and the third detection signal electrode 710c is formed on the upper and lower surfaces of the third detection vibrating arm 423A. A fourth detection signal electrode 710d is formed on the upper and lower surfaces of the fourth detection vibrating arm 424A.

In addition, first detection ground electrodes 720a are formed on both side surfaces of the first detection vibrating arm 421A. Similarly, the second detection ground electrode 720b is formed on both side surfaces of the second detection vibrating arm 422A, and the third detection ground electrode 720c is formed on both side surfaces of the third detection vibration arm 423A. A fourth detection ground electrode 720d is formed on both side surfaces of the fourth detection vibrating arm 424A.
Such a gyro sensor 2A detects the angular velocity ωx around the X axis and the angular velocity ωy around the Y axis as follows.

  When an alternating voltage is applied between the drive signal electrode 730 and the drive ground electrode 740 in a state where the angular velocity is not applied, the first to fourth drive vibrating arms 46 to 49 bend and vibrate in the Z-axis direction and to the same side, respectively. To do. At this time, the first to fourth detection vibrating arms 421A to 424A are arranged in the Z-axis direction and the first to fourth driving vibration arms so as to balance the first to fourth driving vibration arms 46 to 49, respectively. Bends and vibrates in the direction opposite to 46-49.

  In this state, when an angular velocity ωy about the Y axis is applied to the gyro sensor 2A, a Coriolis force A acts as shown in FIG. Angular velocity detection vibration mode) is excited. At this time, the deformation generated in the first to fourth detection vibrating arms 421A to 424A is in the same direction with respect to the X axis. The detection vibration mode is preferably a frequency within ± 10% of the drive frequency.

  Regarding the vibration direction of the first to fourth detection vibrating arms 421A to 424A, the first to fourth detection vibrating arms 421A to 424A vibrate in the same direction with respect to the X axis, and the first and second detection vibrating arms 421A. In other words, 422A and the third and fourth detection vibrating arms 423A and 424A vibrate in the opposite direction with respect to the Y-axis direction. This is because the Coriolis force in the same direction with respect to the X axis acts on the first to fourth drive vibrating arms 46 to 49 and vibrates in the same direction with respect to the X axis direction, but the first and second detection vibrating arms 421A and 422A This is because the third and fourth detection vibrating arms 423A and 424A extend in the opposite direction with respect to the Y axis with the base interposed therebetween, and thus vibrate in the opposite direction with respect to the Y axis direction.

  Further, when an angular velocity ωx around the X axis is applied to the gyro sensor 2A, as shown in FIG. 10, a Coriolis force A acts, and the Coriolis force A is driven to vibrate as indicated by an arrow B (angular velocity detection around the X axis). Vibration mode) is excited. At this time, the deformation generated in the first to fourth detection vibrating arms 421A to 424A is in the same direction with respect to the Y axis. The detection vibration mode is preferably a frequency within ± 10% of the drive frequency.

  Regarding the vibration direction of the first to fourth detection vibrating arms 421A to 424A, the first to fourth detection vibrating arms 421A to 424A vibrate in the same direction with respect to the Y axis, and the first and second detection vibrating arms 421A. In other words, 422A and the third and fourth detection vibrating arms 423A and 424A vibrate in the opposite direction with respect to the X-axis direction. This is because the Coriolis force in the same direction with respect to the Y axis acts on the first to fourth detection vibrating arms 421A to 424A and vibrates in the same direction with respect to the Y axis, but the first and second detection vibrating arms 421A and 422A 3, because the fourth detection vibrating arms 423A and 424A extend in the reverse direction with the base interposed therebetween with respect to the X axis, and thus vibrate in the reverse direction with respect to the X axis direction.

The gyro sensor 2A uses the difference in vibration direction of the first to fourth detection vibrating arms 421A to 424A when the angular velocity ωx around the X axis is added and when the angular velocity ωy around the Y axis is added. Thus, the angular velocity ωx and the angular velocity ωy can be detected independently.
More specifically, when the angular velocity ωy is added, the signal V1 extracted from the first detection signal electrode 710a and the first detection ground electrode 720a is a signal + Vy resulting from the angular velocity ωy, and the second detection signal electrode The signal V2 extracted from the 710b and the second detection ground electrode 720b is a signal + Vy resulting from the angular velocity ωy, and the signal V3 extracted from the third detection signal electrode 710c and the third detection ground electrode 720c has the angular velocity ωy. The signal + Vy resulting from the fourth detection signal electrode 710d and the fourth detection ground electrode 720d is the signal + Vy resulting from the angular velocity ωy. That is, the strain detection means is provided so that V1 = + Vy, V2 = + Vy, V3 = + Vy, and V4 = + Vy.

  Further, when the angular velocity ωx is added, the signal V1 extracted from the first detection signal electrode 710a and the first detection ground electrode 720a is a signal + Vx resulting from the angular velocity ωx, and the second detection signal electrode 710b and the second detection signal electrode 710b. The signal V2 extracted from the detection ground electrode 720b is a signal −Vx caused by the angular velocity ωx, and the signal V3 extracted from the third detection signal electrode 710c and the third detection ground electrode 720c is a signal caused by the angular velocity ωx. −Vx, and the signal V4 extracted from the fourth detection signal electrode 710d and the fourth detection ground electrode 720d is a signal + Vx caused by the angular velocity ωx. That is, V1 = + Vx, V2 = −Vx, V3 = −Vx, V4 = + Vx. The reason why the signs differ between the signals V1 to V4 at this time is that, as described above, the distortion detecting means is configured to generate a signal having the same sign for the angular velocity around the Y axis.

Therefore, when the angular velocity ωxy about the axis inclined with respect to both the X axis and the Y axis is applied to the gyro sensor 2A, the signal V1 taken out from the first detection signal electrode 710a and the first detection ground electrode 720a. Is a synthesis of signals taken out when the angular velocities about the axes described above are added, that is, (+ Vx) + (+ Vy). Similarly, the signal V2 extracted from the second detection signal electrode 710b and the second detection ground electrode 720b is (−Vx) + (+ Vy), and from the third detection signal electrode 710c and the third detection ground electrode 720c. The extracted signal V3 is (−Vx) + (+ Vy), and the signal V4 extracted from the fourth detection signal electrode 710d and the fourth detection ground electrode 720d is (+ Vx) + (+ Vy). That is, the signals V1 to V4 can be expressed by the following equations.
V1 = Vx + Vy (1)
V2 = −Vx + Vy (2)
V3 = −Vx + Vy (3)
V4 = Vx + Vy (4)

By adding or subtracting (adding or subtracting) a plurality of expressions selected from the signals V1 to V4 (expressions (1) to (4)) obtained in this way, an angular velocity around the X axis is obtained from the angular velocity ωxy. ωx and the angular velocity ωy around the Y axis can be separated, and the angular velocity ωx and the angular velocity ωy can be detected independently.
Specifically, for example, V1−V2 = 2Vx, and the signal Vy resulting from the angular velocity ωy can be excluded from the angular velocity ωxy. Thereby, the angular velocity ωx around the X axis is separated and the angular velocity ωx is obtained. Similarly, V4−V3 = 2Vx, and the angular velocity ωx can be obtained from this equation. In order to detect the angular velocity ωx, either one of the above two formulas may be used. However, the angular velocity ωx can be obtained with higher accuracy by obtaining the angular velocity ωx using both of them. When the gyro sensor 2A is functioning normally, the value of (V1-V2) is equal to the value of (V4-V3). Therefore, when the value of (V1-V2) and the value of (V4-V3) are different from each other by an allowable range or more, the gyro sensor 2A can be suspected of being damaged or broken, and the reliability is improved. Also, the difference between these values can be used for quality inspection before shipment.

Similarly, for example, V1 + V2 = 2Vy, and the signal Vx resulting from the angular velocity ωx can be excluded from the angular velocity ωxy. Thereby, the angular velocity ωy around the Y axis is separated and the angular velocity ωy is obtained. Similarly, V4 + V3 = 2Vy, and the angular velocity ωy can be obtained from this equation. In order to detect the angular velocity ωy, either one of the above two formulas may be used. However, by obtaining the angular velocity ωy using both of them, the angular velocity ωy can be obtained more accurately.
According to such a gyro sensor 2A, the angular velocity ωx around the X axis and the angular velocity ωy around the Y axis can be easily detected independently.
Also according to the second embodiment, the same effects as those of the first embodiment described above can be exhibited.

<Third Embodiment>
Next, a third embodiment of the gyro sensor of the present invention will be described.
FIG. 11 is a plan view of a gyro sensor according to a third embodiment of the present invention, and FIG. 12 is a cross-sectional view taken along line FF, GG, cross-sectional view taken along line H-H, and I-- It is I line sectional drawing.
Hereinafter, the third embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The gyro sensor according to the third embodiment of the present invention is substantially the same as the second embodiment except that the configuration of the drive vibration system is different. In FIG. 11 and FIG. 12, the same reference numerals are given to the same configurations as those in the above-described embodiment.
As shown in FIG. 11, the gyro sensor 2B of the present embodiment has two drive vibration arms, that is, a first drive vibration arm 46B and a second drive vibration arm 47B.

  The first drive vibrating arm 46B and the second drive vibrating arm 47B extend from the base 41 opposite to each other in the Y-axis direction. The first drive vibration arm 46B is located between the first detection vibration arm 421A and the second detection vibration arm 422A, and the second drive vibration arm 47B is the third detection vibration arm 423A and the fourth detection vibration arm. It is located between 424A. Such first and second drive vibrating arms 46B and 47B are provided symmetrically with respect to the XZ plane passing through the center of gravity G.

  The first drive vibrating arm 46B has a main body 461B extending from the base 41 and extending in the Y-axis direction, and two branch portions 462B and 463B branched from the tip of the main body 461B. Each branch portion 462B, 463B extends in a direction inclined with respect to both the X axis and the Y axis. When the resonator element 3 is formed of a Z-cut quartz plate, the main body 461B and the branch portions 462B and 463B all extend in a direction orthogonal to the polarization direction.

  Similarly, the second drive vibrating arm 47B has a main body 471B extending from the base portion 41 and extending in the Y-axis direction, and two branch portions 472B and 473B branched from the tip of the main body 471B. Each branch part 472B, 473B extends in a direction inclined with respect to both the X axis and the Y axis. When the resonator element 3 is formed of a Z-cut quartz plate, the main body 471B and the branch portions 472B and 473B all extend in a direction orthogonal to the polarization direction.

By configuring the first and second drive vibrating arms 46B and 47B as described above, the overall length of the first and second drive vibrating arms 46B and 47B (the main body and each branch) is suppressed while suppressing an increase in the size of the gyro sensor 2B. The sum of the lengths of the portions) can be made longer, and the CI value can be lowered.
As shown in FIG. 12, a plurality of drive signal electrodes 730 and a plurality of drive ground electrodes 740 are formed on the first drive vibrating arm 46B. Specifically, the drive signal electrode 730 includes the upper surface side of the side surface 461Ba of the main body 461B, the lower surface side of the side surface 461Bb of the main body 461B, the lower surface side of the side surface 462Ba of the branch portion 462B, the upper surface side of the side surface 462Bb of the branch portion 462B. It is formed on the lower surface side of the side surface 462Ba of the portion 463B and the upper surface side of the side surface 463Bb of the branch portion 463B. The drive ground electrode 740 includes a lower surface side of the side surface 461Ba of the main body 461B, an upper surface side of the side surface 461Bb of the main body 461B, an upper surface side of the side surface 462Ba of the branch portion 462B, a lower surface side of the side surface 462Bb of the branch portion 462B, It is formed on the upper surface side of the side surface 462Ba and on the lower surface side of the side surface 463Bb of the branch portion 463B.

  Similarly, a plurality of drive signal electrodes 730 and a plurality of drive ground electrodes 740 are also formed on the second drive vibrating arm 47B. Specifically, the drive signal electrode 730 includes the upper surface side of the side surface 471Ba of the main body 471B, the lower surface side of the side surface 471Bb of the main body 471B, the lower surface side of the side surface 472Ba of the branch portion 472B, the upper surface side of the side surface 472Bb of the branch portion 472B. It is formed on the lower surface side of the side surface 472Ba of the portion 473B and the upper surface side of the side surface 473Bb of the branch portion 473B. The driving ground electrode 740 includes a lower surface side of the side surface 471Ba of the main body 471B, an upper surface side of the side surface 471Bb of the main body 471B, an upper surface side of the side surface 472Ba of the branch portion 472B, a lower surface side of the side surface 472Bb of the branch portion 472B, It is formed on the upper surface side of the side surface 472Ba and the lower surface side of the side surface 473Bb of the branch portion 473B.

When an alternating voltage is applied between the drive signal electrode 730 and the drive ground electrode 740, the first and second drive vibrating arms 46B and 47B bend and vibrate in the Z-axis direction and on the same side.
The configuration of the gyro sensor 2B has been described above.
The detection method of the angular velocity ωx around the X axis and the angular velocity ωy around the Y axis by the gyro sensor 2B is the same as that of the gyro sensor 2A of the second embodiment described above, and the description thereof is omitted.
Also according to the third embodiment, the same effects as those of the first embodiment described above can be exhibited.

Next, an electronic device including the gyro sensor of the present invention will be described in detail based on FIGS.
FIG. 13 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic device including the gyro sensor of the present invention is applied. In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 100. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 has a built-in gyro sensor 2.

  FIG. 14 is a perspective view illustrating a configuration of a mobile phone (including PHS) to which an electronic device including the gyro sensor of the present invention is applied. In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and the display unit 100 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 has a built-in gyro sensor 2.

FIG. 15 is a perspective view illustrating a configuration of a digital still camera to which an electronic device including the gyro sensor of the present invention is applied. In this figure, connection with an external device is also simply shown.
Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD. The display unit is a finder that displays an object as an electronic image. Function. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302. When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308.

In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.
Such a digital still camera 1300 incorporates a gyro sensor 2.

  In addition to the personal computer (mobile personal computer) shown in FIG. 13, the mobile phone shown in FIG. 14, and the digital still camera shown in FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, televisions Telephone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments Type (for example, vehicle Aircraft, gauges of a ship), can be applied to a flight simulator or the like.

  As described above, the gyro sensor and the electronic device according to the present invention have been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each unit is an arbitrary configuration having the same function. Can be substituted.

In the above-described embodiment, the vibration piece is made of a material having piezoelectricity. However, the present invention is not limited to this, and the vibration piece may be made of a silicon substrate, for example. In this case, each drive vibrating arm can be vibrated using, for example, a piezoelectric film.
In the above-described embodiment, the first to fourth drive vibrating arms have been described. However, the number of the drive vibrating arms is not particularly limited. For example, the third drive vibrating arm and the fourth drive vibrating arm are provided. The second drive vibration arm and the fourth drive vibration arm may be omitted (in this case, the remaining third drive vibration arm functions as a “second drive vibration arm”).

Further, in the above-described embodiment, the configuration in which two piezoelectric elements are provided on each connecting arm as the strain detection means has been described. However, the number of piezoelectric elements is not particularly limited. Good.
In the above-described embodiment, the case where the X axis, the Y axis, and the Z axis are orthogonal to each other has been described. However, the X axis, the Y axis, and the Z axis need only intersect with each other, and are not necessarily orthogonal. Also good.

  2, 2A, 2B ... Gyro sensor 3 ... Vibrating piece 41 ... Base 421 ... First detection driving arm 421A ... First detection driving arm 422 ... Second detection vibrating arm 422A ... Second detection vibrating arm 423A …… Third detection vibrating arm 424A …… Fourth detection vibrating arm 44 …… First connecting arm 45 …… Second connecting arm 46 …… First driving vibrating arm 461, 462 …… Side surface 46B …… First driving Vibration arm 461B …… Main body 461Ba, 461Bb …… Side surface 462B …… Branch part 462Ba, 462Bb …… Side face 463B …… Branch part 463Ba, 463Bb …… Side face 47 …… Second drive vibration arm 471, 472 …… Side face 47B… ... Second drive vibrating arm 471B ... Main body 471Ba, 471Bb ... Side 472B ... Branch 472Ba, 472Bb ... Side 473B ... Branch 73Ba, 473Bb: Side surface 48: Third drive vibration arm 481, 482 ... Side surface 49 ... Fourth drive vibration arm 491, 492 ... Side surface 55, 56, 57, 58 ... Piezoelectric element 551, 561 ... First electrode layer 552, 562 ... Piezoelectric layer 553, 563 ... Second electrode layer 710a ... First detection signal electrode 710b ... Second detection signal electrode 710c ... Third detection signal electrode 710d ... Fourth Detection signal electrode 720a... First detection ground electrode 720b... Second detection ground electrode 720c... Third detection ground electrode 720d ... Fourth detection ground electrode 730... Drive signal electrode 740. Display unit 1100 ... Personal computer 1102 ... Keyboard 1104 ... Main unit 1106 ... Display unit 1200 ... Mobile phone Speaker 1202 ... Operation button 1204 ... Earpiece 1206 ... Mouthpiece 1300 ... Digital still camera 1302 ... Case 1304 ... Light receiving unit 1306 ... Shutter button 1308 ... Memory 1312 ... Video signal output terminal 1314 ... Input / output terminal 1430 Television monitor 1440 Personal computer G Center of gravity (center)

Claims (11)

When three axes intersecting each other are defined as a first axis, a second axis, and a third axis,
The base,
A first connecting arm and a second connecting arm extending along the first axis across the base,
A first detection vibrating arm and a second detection vibrating arm extending along the second axis across the base;
A first drive vibrating arm extending from the first connecting arm along the second axis;
A second drive vibrating arm extending from the second connecting arm along the second axis,
Each of the first drive vibrating arm and the second drive vibrating arm vibrates in the direction of the third axis,
Each of the first connection arm, the second connection arm, the first detection vibration arm, and the second detection vibration arm includes a strain detection unit, and the first connection arm, the second detection arm, and the second detection vibration arm, when an angular velocity is applied around the detection axis. A gyro sensor that vibrates in a plane including one axis and the second axis.   The first detection vibrating arm and the second detection vibrating arm each vibrate in the same direction of the first axis when an angular velocity is applied around the second axis. The gyro sensor described.   The said 1st connection arm and the said 2nd connection arm each vibrate in the same direction of the said 2nd axis | shaft when an angular velocity is applied around the said 1st axis | shaft, The said 1st axis | shaft is characterized by the above-mentioned. Gyro sensor. Detecting an angular velocity around the second axis based on output signals of the first detection vibrating arm and the second detection vibrating arm;
4. The gyro sensor according to claim 1, wherein an angular velocity around the first axis is detected based on output signals of the first connecting arm and the second connecting arm. 5. A third drive vibration arm extending in a direction opposite to a direction in which the first drive vibration arm extends;
5. The gyro sensor according to claim 1, further comprising: a fourth drive vibrating arm extending in a direction opposite to a direction in which the second drive vibrating arm extends. When three axes intersecting each other are defined as a first axis, a second axis, and a third axis,
The base,
A first connecting arm and a second connecting arm extending oppositely from each other along the first axis from the base;
A first drive vibrating arm extending from the first connecting arm along the second axis;
A second drive vibrating arm extending from the second connecting arm along the second axis;
A first detection vibrating arm and a second detection vibrating arm extending from one end of the base in a direction intersecting both the first axis and the second axis and opposite to each other in the first axis direction;
A third detection vibration arm and a fourth detection vibration arm that extend from the other end of the base in a direction intersecting both the first axis and the second axis and to the opposite sides of the first axis direction,
Each of the first drive vibrating arm and the second drive vibrating arm vibrates in the direction of the third axis,
Each of the first detection vibration arm, the second detection vibration arm, the third detection vibration arm, and the fourth detection vibration arm includes a strain detection unit, and an angular velocity is applied around the detection axis. A gyro sensor that vibrates in a plane including the first axis and the second axis. When three axes intersecting each other are defined as a first axis, a second axis, and a third axis,
The base,
A first detection vibrating arm and a second detection vibrating arm extending from one end of the base in a direction intersecting both the first axis and the second axis and opposite to each other in the first axis direction;
A third detection vibrating arm and a fourth detection vibrating arm extending from the other end of the base in a direction intersecting both the first axis and the second axis and to the opposite sides of the first axis direction,
A first drive vibration arm located between the first detection vibration arm and the second detection vibration arm and extending from one end of the base portion along the first axis;
A second drive vibration arm located between the third detection vibration arm and the fourth detection vibration arm and extending from the other end of the base portion along the first axis;
The distal ends of the first drive vibrating arm and the second drive vibrating arm branch into at least two branches extending in a direction inclined with respect to both the first axis and the second axis,
Each of the first drive vibrating arm and the second drive vibrating arm vibrates in the direction of the third axis,
Each of the first detection vibration arm, the second detection vibration arm, the third detection vibration arm, and the fourth detection vibration arm includes a strain detection unit, and an angular velocity is applied around the detection axis. A gyro sensor that vibrates in a plane including the first axis and the second axis.   When an angular velocity is applied around the second axis, each of the first detection vibrating arm, the second detection vibrating arm, the third detection vibrating arm, and the fourth detection vibrating arm is The gyro sensor according to claim 6 or 7, wherein the gyro sensor vibrates in the same direction.   When an angular velocity is applied around the first axis, each of the first detection vibrating arm, the second detection vibrating arm, the third detection vibrating arm, and the fourth detection vibrating arm is The gyro sensor according to claim 6 or 7, wherein the gyro sensor vibrates in the same direction.   Based on the output signals of the first detection vibrating arm, the second detection vibrating arm, the third detection vibrating arm, and the fourth detection vibrating arm, the angular velocity around the first axis and the angular velocity around the second axis The gyro sensor according to any one of claims 6 to 9, wherein at least one of them is detected.   An electronic apparatus comprising the gyro sensor according to any one of claims 1 to 10.

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