JP2013180835A - Sheet-like member conveying device, frequency adjusting device including sheet-like member conveying device, and conveying method using sheet-like member conveying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet-like member conveying device which can convey a sheet-like member while appropriately positioning it, and a frequency adjusting device including the sheet-like member conveying device, and a conveying method using the sheet-like member conveying device.SOLUTION: A sheet-like member conveying device includes: a conveying part to convey the sheet-like member in a predetermined conveying direction; a plurality of positioning members arranged along the predetermined conveying direction and having apexes abutting on one side of the conveyed sheet-like member; a pressurizing member provided in a position opposed to the positions where the plurality of positioning members are arranged, and to pressurize the sheet-like member toward the direction of the pair of positioning members. The pressurizing member is arranged between the extensions extending from the respective apexes of the pair of positioning members toward the pressurizing member side and vertical to the sheet-like member conveying direction.

Description

  The present invention relates to a plate-shaped member conveying device that conveys a plate-shaped member, a frequency adjusting device including the plate-shaped member conveying device, and a conveying method using the plate-shaped member conveying device.

  In an apparatus for conveying a plate-like member, particularly in an apparatus for conveying a plate-like member on which an electronic component such as a semiconductor substrate or a crystal resonator is mounted, positioning of the conveyed plate-like member is important. For example, in Patent Document 1, in a frequency adjusting apparatus that handles a piezoelectric vibration device such as a crystal resonator, an ion beam is irradiated to the plurality of substrates while conveying the plurality of substrates mounted on a carrier on a guide rail. It is disclosed. The carrier is transported with one end in the carrier transport direction held by a chuck mechanism and a pair of sides parallel to the carrier transport direction supported by a corresponding pair of guide rails.

JP 2010-208831 A

In the carrier of Patent Document 1, a side perpendicular to the transport direction is positioned by a chuck mechanism, and a pair of sides parallel to the transport direction is positioned by a bearing provided on one of the pair of guide rails. The bearing presses the carrier against the other guide rail and positions the carrier in parallel with the guide rail.
However, the other guide rail is not provided with a bearing, and the carrier and the other guide rail are in line contact or surface contact. When such a transport method is used, an imbalance occurs in the pressing force received from the bearing toward the other guide rail, and a state in which the contact between the carrier and the guide rail cannot be maintained in parallel occurs. This state causes the carrier to be conveyed while being inclined with respect to the guide rail. When the carrier is transported in an inclined state, there has been a problem in that the ion beam irradiation position and the position of the substrate receiving the ion beam are shifted, and accurate processing cannot be performed.

  The present invention is to solve the above-described problems, and a plate-shaped member conveying device that can convey a plate-shaped member while appropriately positioning the plate-shaped member conveying device, a frequency adjusting device including the plate-shaped member conveying device, and a plate shape It aims at providing the conveying method which uses a member conveying apparatus.

  In order to achieve the above object, a plate-shaped member conveyance device according to a first aspect of the present invention is arranged along a conveyance unit that conveys a plate-shaped member in a predetermined conveyance direction and the predetermined conveyance direction. And a plurality of positioning members each having a vertex that contacts one side of the plate-like member, and a position opposite to the position where the plurality of positioning members are disposed, and is conveyed between the plurality of positioning members. A pressing member provided at a position where the plate-like member is arranged, the pressing member pressing the plate-like member in a direction in which a pair of positioning members are arranged. The pressing member is disposed between the apexes of the pair of positioning members on an extension line that is perpendicular to the direction in which the plate-like member is conveyed and extends to the side where the pressing member is provided. It is characterized by that.

  The plurality of positioning members and the pressing member may be arranged at positions that form an isosceles triangle having the pressing member as a vertex.

  The positioning member may be a positioning member having a vertex that slides with one side of the plate-like member to be conveyed.

The pressing member includes a first roller that applies a pressing force, the plurality of positioning members include a pair of second rollers, and the plate-shaped member includes the first roller and the pair of second rollers. It may be sandwiched and conveyed between these rollers.
The said conveyance part may perform pitch feed conveyance which repeats the movement of a predetermined distance, and a stop.

  A guide portion that guides the plate-shaped member toward the plurality of positioning members may be provided.

In order to achieve the above object, a frequency adjusting device according to a second aspect of the present invention includes a plate-like member conveying device and a crystal vibration placed on the plate-like member conveyed by the plate-like member conveying device. A frequency measurement unit that measures the oscillation frequency of the child, and an ion gun that irradiates the ion beam to the quartz crystal vibrator whose measured oscillation frequency deviates from a desired oscillation frequency.
The measurement probe of the frequency measurement unit may be arranged on a straight line connecting the midpoint of the pair of positioning members and the pressing member. Further, the transfer unit may perform pitch feed transfer that repeats movement and stop for a predetermined distance, and irradiates the ion beam during the stop to adjust the frequency of the matrix-arranged crystal resonators in units of columns. .

  In order to achieve the above object, a transport method using a plate-shaped member transport device according to a third aspect of the present invention includes a transport step of transporting a plate-shaped member in a predetermined transport direction by a transport unit, and the predetermined transport A step of positioning with a plurality of positioning members each having a vertex abutting against one side of the plate-like member that is arranged and conveyed along the direction, and a position facing the position where the plurality of positioning members are arranged, A step of pressing the plate-shaped member in a direction in which the pair of positioning members are disposed, with a pressing member provided at a position where the plate-shaped member conveyed between the plurality of positioning members is disposed; The pressing method is provided with a plate-shaped member conveying device, wherein the pressing member is arranged such that the apex of each of the pair of positioning members is perpendicular to the direction in which the plate-shaped member is conveyed, and the pressing member is provided. Side Disposed between the extended extension, characterized in that.

  According to the present invention, it is possible to provide a plate-shaped member conveyance device that can convey a plate-shaped member while appropriately positioning it, a frequency adjusting device that includes the plate-shaped member conveyance device, and a conveyance method that uses the plate-shaped member conveyance device. Can do.

It is a figure which shows typically the frequency adjusting device provided with the plate-shaped member conveying apparatus which concerns on embodiment of this invention. It is a perspective view of the plate-shaped member conveyance apparatus which concerns on this Embodiment. It is a top view of the plate-shaped member conveyance apparatus which concerns on this Embodiment. It is a perspective view which shows the principal part of the plate-shaped member conveying apparatus which concerns on this Embodiment. (A)-(d) is a perspective view which shows the conveyance method of the plate-shaped member conveying apparatus concerning this Embodiment in time series. It is a figure which shows the principle of the plate-shaped member conveying apparatus which concerns on this Embodiment. It is a figure which shows the modification of this Embodiment.

Hereinafter, a plate-shaped member conveyance device according to an embodiment of the present invention and a frequency adjusting device including the plate-shaped member conveyance device will be described with reference to the drawings.
In the following, for ease of understanding, an embodiment in which the present invention is realized using a plate-shaped member conveyance device will be described. However, the embodiment described below is for explanation, and this application It is not intended to limit the scope of the invention. Accordingly, those skilled in the art can employ embodiments in which each or all of these elements are replaced with equivalent ones, and these embodiments are also included in the scope of the present invention.

  FIG. 1 is a diagram conceptually showing a frequency adjusting device provided with a plate-shaped member conveying device of the present invention. In order to facilitate understanding, the transport direction of the carrier to be transported is the X axis, the direction perpendicular to the carrier surface is the Y axis, and the depth direction of the carrier is the Z axis. Further, in the present embodiment, a description will be given taking a carrier having a quartz resonator placed on the upper surface as an example of the plate-like member.

The frequency adjusting device 1 is disposed in the etching chamber 3, and the etching chamber 3 is connected to the preparation chamber 2 through a gate valve 5a, and is connected to the take-out chamber 4 through a gate valve 5b.
The frequency adjusting device 1 includes a contact 10, an ion gun 11, a shutter 12, a control unit 13, and a plate-shaped member transport device 14. Details of the configuration of the plate-shaped member conveyance device 14 will be described later.

  The contact 10 is for measuring the oscillation frequency of the crystal resonator 7. The crystal resonator 7 whose oscillation frequency is measured is accommodated in the accommodating portion 9 of the tray 6, and the tray 6 is mounted on the carrier 8 and carried into the etching chamber 3. Positioning pins 8 a are formed on the carrier 8, and the tray 6 is positioned by fitting the positioning pins 8 a into the positioning holes 6 a and 6 b formed in the tray 6. One of the positioning holes 6a or 6b substantially matches the shape of the positioning pin 8a, and the other is formed in a long hole larger than the shape of the positioning pin 8a. The positioning means for the carrier 8 and the tray 6 is not limited to this. In FIG. 1, the carrier 8 is not shown for easy understanding. In FIG. 2 and FIGS. 4 to 7, illustration of the positioning pins and the positioning holes is omitted.

  As shown in FIG. 3 or 4, the carrier 8 is preferably rectangular and is made of a metal material, plastic, or the like. The carrier 8 is provided with a recess 41 for accommodating the tray 6 on which a plurality of crystal resonators 7 are mounted. In the present embodiment, the tray 6 is mounted on the carrier 8, but the tray may be omitted and the crystal unit 7 may be mounted directly on the carrier.

  In the tray 6, a plurality of accommodating portions 9 for accommodating a plurality of crystal resonators 7 are formed in a matrix. In the present embodiment, the tray 6 is formed with individual storage portions 9 in seven rows in the Z-axis direction perpendicular to the transport direction and in six rows in the X-axis direction parallel to the transport direction. That is, on the tray 6, six accommodating portions 9 are formed in one row, and since there are seven such rows, 42 accommodating portions 9 are formed in total. As shown in FIG. 1, each accommodating portion 9 is formed as a through-hole, the upper portion is greatly opened to receive the crystal resonator 7, and the lower portion is small to pass an ion beam irradiated from the ion gun 11. It is open.

  The contacts 10 are arranged above the tray 6 in parallel with the rows in the transport direction of the storage units 9. As shown in FIGS. 1 to 4, the contact 10 has a length longer than one row of the accommodating portions 9 formed on the tray 6, and the probe pin main body 15 projects toward the tray 6. The probe pin main body 15 includes a pair of probe pins 15a and 15b. The number of probe pin main bodies 15 is the same as the number of accommodating portions provided in one row of the tray 6, that is, six in the present embodiment.

  The contact 10 having the probe pin main body 15 is moved up and down in the Y-axis direction by a driving device (not shown), and comes into contact with the crystal resonator 7 to be measured for oscillation frequency to measure the oscillation frequency. Further, the contact 10 is driven in the X-axis direction and the Y-axis direction by the XY stage 10a shown in FIG. 2, and is aligned so that the probe pin is brought into contact with the electrode formed on the crystal resonator 7 accurately. Is done.

  The control unit 13 controls the vertical movement of the contact 10 and the presence / absence and amount of ion gun irradiation. The control unit 13 determines whether or not the oscillation frequency of the crystal resonator 7 measured by the contact 10 is a desired oscillation frequency. When the oscillation frequency is not a desired value, the crystal resonator 7 is irradiated with an ion beam from the ion gun 11 to instruct the crystal resonator 7 to be etched until the desired oscillation frequency is reached.

  The ion gun 11 is disposed below the tray 6 and is controlled by the control unit 13 so as to irradiate the crystal beam 7 with an ion beam until it matches the target oscillation frequency.

  The shutter 12 is disposed on the side of the tray 6 where the ion beam is irradiated, and controls the irradiation amount of the ion beam to the crystal resonator 7 by opening and closing the shutter 12. In this embodiment, the shutter 12 is arranged in one row, that is, six in one-to-one correspondence with the crystal resonator 7 mounted on the carrier 8. The shutters 12 are connected to independent drive sources (not shown) and open and close corresponding to the individual crystal resonators 7.

Next, with reference to FIG. 2, 3 and 4, the plate-shaped member conveying apparatus according to the present embodiment will be described.
FIG. 2 is a perspective view of the plate-shaped member conveyance device according to the present embodiment, FIG. 3 is a top view of the plate-shaped member conveyance device, and FIG. 4 is a main part of the plate-shaped member conveyance device. FIG.
The plate-shaped member conveyance device according to the present embodiment includes a guide rail 21, a pressing unit 22, a positioning member 23, and a conveyance unit 24.

  The guide rail 21 includes a pair of rails 21a and 21b. The carrier 8 is disposed and transported between the pair of rails 21a and 21b.

  The pressing portion 22 is provided on one rail 21 a of the guide rail 21 and applies a pressing force to one side of the carrier 8 to be conveyed. The pressing part 22 includes, for example, a roller 25, a holding part 26, and an elastic member 27. The roller 25 is made of, for example, a cylindrical member such as a bearing, and is in line contact with one side surface of the carrier 8 on the outer peripheral surface of the column. The roller 25 rotates around the rotation axis while applying a pressing force to the carrier 8 being conveyed.

  The holding portion 26 is made of a plate-like member, a projection portion 26a is formed at one end portion, and the other end portion is rotatably fixed on the rail 21a. The roller 25 is rotatably held by the protrusion 26a. One end of an elastic member 27 is connected to the side of the holding unit 26 that faces the side where the roller 25 is held. The other end of the elastic member 27 is connected to a wall surface or the like (not shown). The elastic member 27 is formed by, for example, a spring spring. The elastic member 27 generates a force that presses the roller 25 in the direction of the carrier 8.

  In the pressing portion 22 having such a configuration, the roller 25 held by the protruding portion 26a can swing around a portion of the holding portion 26 fixed to the rail 21a. In the present embodiment, the rotary shaft 26b is a fulcrum and can be rotated by a drive source (not shown). When the carrier 8 is transported between the pair of guide rails 21, the elastic member 27 generates a pressing force against the carrier 8 via the roller 25.

  The positioning member 23 is provided on the rail 21b opposite to the rail 21a on which the pressing portion 22 is provided. The positioning member 23 is made of a rotating member such as a roller and contacts one side of the carrier 8 to be conveyed. The positioning member 23 preferably includes a first positioning member 23a and a second positioning member 23b.

  The positional relationship between the first positioning member 23a and the second positioning member 23b and the pressing portion 22 preferably has a positional relationship as shown in FIG. FIG. 6 is a top view schematically showing the positional relationship between the first positioning member 23 a and the second positioning member 23 b and the pressing portion 22.

  The roller 25 of the pressing part 22 includes an extension line B extending from the contact point x with the carrier 8 of the first positioning member 23a toward the pressing part 22 in the Z-axis direction perpendicular to the conveying direction A, and a second line B. The contact point y of the positioning member 23b with the carrier 8 is disposed between an extension line C extending in the Z-axis direction perpendicular to the transport direction A toward the pressing portion 22 side.

The contact point x of the first positioning member 23a with the carrier 8, the contact point y of the second positioning member 23b with the carrier 8, and the line connecting the contact point z between the roller 25 and the carrier 8 are the contact point z. It is placed at a position where it becomes an isosceles triangle with the vertex at.
The roller 25 is arranged such that the center line 61 passing through the diameter of the roller 25 and the contact point z passes through an intermediate point w of the line segment C connecting the contact point x and the contact point y.

With such an arrangement, when the pressing force by the elastic member 27 is applied to the roller 25, the pressing force applied from the roller 25 to the carrier 8 is the first positioning member 23a provided on the other rail 21b, the first positioning member 23a. The two positioning members 23b are equally supported.
The surface of the carrier 8 facing the rail 21b is positioned in parallel with the line segment C connecting the contact point x of the first positioning member 23a and the contact point y of the second positioning member 23b.

  Further, the guide rail 21 is provided with a guide portion 33 for guiding the carrier 8 on which the tray 6 is placed to the first positioning member 23a and the second positioning member 23b. The guide part 33 is provided in the side which carries the carrier 8 of the guide rail 21, Preferably, two are provided in each of the rails 21a and 21b.

  The transport unit 24 transports the carrier 8 in the X-axis direction that is the transport direction. As shown in FIGS. 2 and 3, the transport unit 24 includes a ball screw shaft 28, a ball screw nut 29, and a chuck mechanism 30 that are arranged in parallel with the guide rail 21.

The ball screw shaft 28 has a thread groove formed on the surface of the cylindrical shaft, and is screwed into a thread groove formed on the inner surface of the ball screw nut 29. When the ball screw shaft 28 is rotated, the screwed ball screw nut 29 is translated in the X-axis direction. The ball screw shaft 28 is fixedly attached to the guide rail 21b. Since the ball screw shaft 28, the first positioning means 23a, and the second positioning means 23b are integrally attached and fixed with reference to the guide rail 21a, the carrier transport direction and the guide and positioning mechanism are kept parallel. It is.
A chuck mechanism 30 is fixed to the ball screw nut 29 so as to be arranged perpendicular to the conveying direction (X-axis A direction).

  The chuck mechanism 30 includes an arm base 31 and a magnet unit 32. The arm base 31 is disposed perpendicular to the carrier 8 conveyance direction (A direction of the X axis), and has a magnet portion 32 on the carrier 8 side. A magnetic body (not shown) is formed at the end of the carrier 8 facing the chuck mechanism 30, and the magnet section 32 on the chuck mechanism 30 side and the magnetic body on the carrier 8 side are coupled by magnetic force. The carrier 8 is positioned in the Z-axis direction by coupling with the chuck mechanism 30.

  A processing method in the frequency adjusting device using the plate-shaped member conveying device having such a configuration will be described with reference to FIGS.

  First, as shown in FIG. 1, the tray 6 in which the crystal resonator 7 is accommodated in the accommodating portion 9 is placed on the carrier 8 and carried into the preparation chamber 2. When the charging chamber 2 is evacuated so as to be in a predetermined vacuum state, and the predetermined vacuum state is reached, the gate valve 5a is released, and the carrier 8 is carried into the etching chamber 3 in a predetermined vacuum state. At this time, the XY stage 10a of the contact 10 has been adjusted in advance, and the positioning of the probe pin with respect to the transport apparatus has been performed.

  When the carrier 8 is carried in, the carrier 8 is guided by the guide portion 33 provided on the plate-like member carry-in side of the guide rail 21 and is arranged in the guide rail 21. The guide portion 33 has an auxiliary role of smoothly carrying the carrier 8 to the positions of the first positioning member 23a and the second positioning member 23b of the guide rail 21.

  A magnetic body provided at one end of the carrier 8 carried into the guide rail 21 is coupled to the magnet portion 32 of the chuck mechanism 30. As shown in FIG. 3, the ball screw shaft 28 is rotationally driven by the drive unit, and the ball screw nut 29 screwed into the ball screw shaft 28 translates in the X-axis direction. The chuck mechanism 30 fixed to the ball screw nut 29 and the carrier 8 coupled to the chuck mechanism are conveyed in the same direction as the translation direction of the ball screw nut 29.

  The ball screw shaft 28 is arranged in parallel with the guide rail 21, and the carrier 8 arranged perpendicular to the guide rail 21 translates together with the ball screw nut 29, so that the carrier 8 is Z-axis with respect to the guide rail 21. Directional positioning is performed.

The carrier 8 guided by the guide 33 and coupled to the chuck mechanism 30 is moved in the X-axis direction by a predetermined distance as the ball screw shaft 28 rotates by a predetermined amount. Until the leading end of the carrier 8 enters the position of the positioning member 23, the holding unit 26 is rotated about the rotation shaft 26b as a fulcrum in a direction to increase the distance between the positioning member 23 and the pressing unit 22 by a driving source (not shown). (See FIG. 5 (a)).
After the leading end of the carrier 8 enters the position of the positioning member 23 and further moves in the X-axis direction, the holding portion 26 is rotationally driven in a direction to reduce the distance between the positioning member 23 and the pressing portion 22, and the elastic member 27 is a roller. 25 is urged in the z-axis direction, and the position of the carrier 8 in the z-axis direction is positioned by the positioning member 23 and the roller 25. Then, the carrier 8 is moved to a position where the first row in the transport direction (A direction of the X axis) of the crystal unit 7 accommodated in the tray 6 faces the ion gun 11 and the contact 10 and stopped ( (Refer FIG.5 (b)). While the carrier 8 moves and stops, the elastic member 27 continues to bias the roller 25 in the direction of the positioning member 23 (z-axis direction).

  As shown in FIG. 1, when the movement of the carrier 8 is stopped, the oscillation frequency of the crystal resonator 7 accommodated in the tray 6 is measured. The oscillation frequency is measured simultaneously with the irradiation of the ion beam from the ion gun 11, and when the desired oscillation frequency is reached, the shutter 12 is closed and the frequency adjustment is terminated. The oscillation frequency is measured by a pair of probe pins 15 a and 15 b provided on the contact 10. Data of the measured oscillation frequency is transmitted to the control unit 13. When the control unit 13 determines that the adjustment of the oscillation frequency is necessary, the shutter 12 may be opened for a predetermined time and the ion beam may be irradiated from the ion gun 11 to the crystal resonator 7.

  The ion beams are collectively irradiated in units of columns, and the frequency of the crystal resonators 7 in all the columns is adjusted simultaneously and individually by independent opening / closing control of the shutters 12 provided in each row. The ion beam may be sequentially irradiated from the first column to the last row to the last row to the quartz crystal unit 7 accommodated in the accommodating portion 9 of the tray 6. In this case, since the ion beam irradiation does not need to be performed on the crystal resonator 7 that does not require adjustment of the oscillation frequency, the ion gun 11 can be used only for the crystal resonator 7 that requires the ion beam irradiation. Move intermittently up. In the present embodiment, the crystal unit 7 that does not require adjustment of the oscillation frequency may be left with the corresponding shutter 12 closed. The shutter 12 does not have to have a one-to-one correspondence with the crystal unit 7, and the opening / closing control may be set freely.

  When the measurement and adjustment of the oscillation frequency of the first row of the crystal resonators 7 on the tray 6 are completed, the carrier 8 on which the tray 6 is placed moves to a preset moving distance, that is, the second row of crystal oscillations. It is transported by the transport unit 14 so that the contact 10 comes on the child 7. The transport unit 14 performs pitch feed transport with an integer multiple of the matrix column interval as a pitch interval (a preset movement distance). In the present embodiment, the row interval and the pitch interval coincide with each other. However, for example, when frequency adjustment is performed simultaneously for two rows, the pitch may be transported with a distance twice as long as the row interval. Similarly to the case where the contact 10 is disposed on the first row of crystal resonators 7, the oscillation frequency is measured for the second row of crystal resonators 7, and the ion beam is irradiated. FIG. 5C shows a state in which the carrier 8 is moved until the contact 10 is positioned above the position of the middle fourth row of the housing portions 9 among the housing portions 9 composed of seven rows. It is.

  Finally, the carrier 8 is moved until the contact 10 is positioned on the upper part of the accommodating portions 9 in the seventh row (FIG. 5D), and the oscillation frequency is measured and adjusted. When all the processes in the etching chamber 3 are completed, the urging force of the pressing portion 22 is released, the gate valve 5b is opened, and the carrier 8 (tray 6) is taken out from the etching chamber 3 into the take-out chamber 4.

  Next, the operation of the pressing portion 22 and the positioning member 23 when the plate-like member is conveyed using the plate-like member conveyance device according to the present embodiment will be described in detail with reference to FIGS.

  The carrier 8 is intermittently moved on the guide rail 21 in the transport direction (X-axis A direction) for each row of the crystal resonators 7 on the tray 6. When the carrier 8 moves by one row of the crystal resonator 7, one side surface of the carrier 8 moves while being pushed toward the positioning member 23 by the roller 25 of the pressing portion 22. At this time, since the other end of the holding portion 26 is fixed to the rail 21a, the holding portion 26 is configured to perform a swinging motion around a place where the other end is fixed. Therefore, the roller 25 held by the protruding portion 26a of the holding portion 26 can apply a pressing force to the carrier 8 while smoothly following the movement of the carrier 8 intermittently moved in the transport direction A.

  Furthermore, the roller which is the 1st positioning member 23a and the 2nd positioning member 23b is provided on the rail 21b. Therefore, when the carrier 8 is intermittently moved in the transport direction, the roller can receive the pressing force from the pressing portion 22 and can sandwich the carrier 8 with the pressing portion 22.

  Further, the pressing portion 22, the positioning member 23a, and the positioning member 23b are preferably arranged so that lines connecting contact points x, y, z with the carrier 8 form an isosceles triangle. Specifically, the contact point z between the roller 25 of the pressing portion 22 and the carrier 8 is a vertex, the contact point x between the first positioning member 23 a and the carrier 8, and the contact between the second positioning member 23 b and the carrier 8. With the point y, an isosceles triangle is formed. Therefore, the force applied to each of the first positioning member 23a and the second positioning member 23b from the pressing portion 22 via the carrier 8 is transmitted equally. By having such a positional relationship, the surface of the carrier 8 that contacts the positioning member is conveyed while being positioned so as to be parallel to the line segment C connecting the contact point x and the contact point y.

  Further, when measuring the oscillation frequency of the crystal unit 7, the line of the crystal unit 7 and the probe of the contact 10 for measuring the oscillation frequency are the contact point z between the roller 25 and the carrier 8, and the first The pressing portion 22 so as to overlap the center line 61 connecting the center point of the line connecting the contact point x of the positioning member 23a with the carrier 8 and the contact point y of the second positioning member 23b with the carrier 8; The positioning member 23 is disposed. Therefore, when the oscillation frequency is measured, the contact 10 and the crystal unit 7 are positioned in the Z-axis direction. The probe pin main body 15 provided on the contact 10 cannot measure the frequency unless it accurately contacts the electrode surface formed on the crystal resonator 7. In recent years, crystal resonators have been miniaturized and the electrode area is extremely small. Therefore, a slight misalignment between the crystal resonator 7 and the contact 10 causes measurement failure. By placing the probe pin main body 15 on the center line 61 of an isosceles triangle formed by the pressing portion 22 and the positioning member 23 and positioning the carrier 8 directly below the probe pin main body 15, Since positioning of the formed electrode and the probe pin main body 15 can be performed with high accuracy, it becomes possible to reduce measurement failures due to contact displacement.

  Moreover, since the conveyance part is comprised by the ball screw mechanism arrange | positioned in parallel with the guide rail 21, the carrier 8 can be positioned and conveyed with respect to the conveyance direction X-axis.

  Thus, according to the present embodiment, the pressing portion 22 is formed by extending the contact point between the first positioning member 23a and the carrier 8 toward the pressing portion 22 and the carrier of the second positioning member 23b. By arranging the contact point between the contact point and the extension line toward the pressing portion 22, the carrier can be appropriately positioned with respect to the transport direction.

  Further, by positioning the positional relationship among the pressing portion 22, the first positioning member 23a, and the second positioning member 23b preferably as an isosceles triangle, the force applied to the positioning member can be made uniform. Further, since the ball screw shaft and the guide rail are arranged in parallel, the contact 10 and the crystal oscillator row on the carrier 8 can be accurately positioned.

  In the present embodiment, the positioning member is described as the first positioning member and the second positioning member. However, the present embodiment is not limited to this. For example, there may be three positioning members. Another positioning member may be provided at an intermediate point between the first positioning member and the second positioning member in FIG.

  Further, in the present embodiment, the positional relationship among the pressing portion 22, the first positioning member 23a, and the second positioning member 23b is preferably positioned as an isosceles triangle. It is not limited to this. As long as it is between the extension line of the contact point of the 1st positioning member 23a and a carrier, and the extension line of the contact point of the 2nd positioning member 23b and a carrier, you may arrange | position in any position.

  Moreover, although the press part 22, the 1st positioning member 23a, and the 2nd positioning member 23b demonstrated using the example which is a roller, this Embodiment is not limited to this. For example, by using an elastic member such as rubber, the carrier 8 may be slid and conveyed between the carrier 8 and the pressing portion 22, the first positioning member 23a, and the second positioning member 23b. . However, when an elastic member such as rubber is used, the carrier 8 is moved after the pressure is released, and the carrier 8 is stopped and then pressed again for positioning. In order to prepare the next row, the releasing and pressing operations are repeated, and there is a problem that the operating time of the pressing unit 22 affects the tact time. On the other hand, in the case of pressing by a roller, it is not necessary to release the pressing during the movement of the carrier 8, which contributes to shortening of the processing time. It is particularly advantageous to use a roller for the positioning member in a pitch feed manufacturing process in which stop and conveyance are sequentially repeated, such as frequency adjustment in units of rows. Furthermore, since the carrier 8 can be conveyed while being pressed by using a roller, it is also possible to convey the material continuously (not stopped) instead of pitch feeding.

  In this embodiment, a crystal resonator has been described as an example of an object to be processed. However, this embodiment is not limited to this. Circuit boards equipped with electronic circuits are also targeted.

  Further, in the present embodiment, it has been described by way of example that the matrix-shaped accommodating portions 9 of 7 columns and 6 rows are formed on the tray 6, but the present embodiment is not limited to this. The number of the accommodating portions 9 varies depending on the stage and scale of the manufacturing process of semiconductors and the like, and what capacity of the accommodating portions 9 is provided on the tray is appropriately selected. Similarly, the size and shape of the tray can be arbitrarily selected.

(Modification)
In the present embodiment, the example in which the positioning member is provided on the rail has been described, but the present embodiment is not limited to this. FIG. 7 is a top view showing a modification.

  The plate-like member transport device in this modification includes a first positioning member 71a, a second positioning member 71b, a rail 73a, a rail 73b, and a pressing portion 72. One rail 73 a is formed with a notch 74, and the first positioning member 71 a and the second positioning member 71 b are provided in the notch 74. The contact point x between the carrier 8 and the first positioning member 71a and the contact point y between the carrier 8 and the second positioning member 71b are arranged so as to be on the same plane as the wall surface of the rail 73a.

  By adopting such a configuration, the carrier 8 comes into contact with and holds the respective wall surfaces between the rail 73a and the rail 73b. Therefore, the carrier 8 is more reliably positioned with respect to the transport direction A.

  The pressing portion 72 is formed of a member having a plurality of rack-shaped grooves 72a, and the carrier 8 is engaged with an engaging portion (not shown) provided on the side of the carrier 8 that contacts the rail 73b. Then, the carrier 8 is pressed toward the first positioning member 71a and the second positioning member 71b. As the engaging portion, a plurality of rack-shaped grooves that mesh with the rack-shaped grooves 72b can be formed.

  By setting it as such a structure, the pressing force from the press part 72 can be applied to the carrier 8 reliably.

  In this modification, an example in which the pressing portion 72 is formed by a plurality of rack-shaped grooves has been described, but the plurality of rack-shaped groove portions may be formed only on the carrier 8 side, and the pressing portion 72 may be a roller. By adopting such a configuration, the frictional force with the groove can be reduced.

  As described above, the present invention provides a plate-shaped member conveying device that can convey a plate-shaped member while appropriately positioning it, a frequency adjusting device including the plate-shaped member conveying device, and a conveying method using the plate-shaped member conveying device. Can be provided.

DESCRIPTION OF SYMBOLS 1 Frequency adjusting device 2 Preparation chamber 3 Etching chamber 4 Extraction chamber 5a Gate valve 5b Gate valve 6 Tray 6a Positioning hole 7 Crystal oscillator 8 Carrier 8a Positioning pin 9 Housing part 10 Contact 10a XY stage 11 Ion gun 12 Shutter 13 Control unit
14 Plate-shaped member conveying device 15 Probe pin main body 15a Probe pin 15b Probe pin 21 Guide rail 21a Rail 21b rail 22 Pressing portion 23 Positioning member 23a First positioning member 23b Second positioning member 24 Conveying portion 25 Roller 26 Holding portion 26a Protrusion 27 Elastic member 28 Ball screw shaft 29 Ball screw nut 30 Chuck mechanism 31 Arm base
32 Magnet part 33 Guide part 41 Recess 61 Center line 71a First positioning member 71b Second positioning member 73a Rail 73b Rail 72 Press part 72a Groove 74 Notch

Claims (10)

A transport unit that transports the plate-shaped member in a predetermined transport direction;
A plurality of positioning members arranged along the predetermined conveying direction and each having a vertex that contacts one side of the plate-like member to be conveyed;
A pressing member provided at a position opposite to a position where the plurality of positioning members are disposed, at a position where the plate-shaped member conveyed between the plurality of positioning members is disposed, A pressing member that presses the member in the direction in which the pair of positioning members are disposed; and
A plate-shaped member conveying device comprising:
The pressing member is disposed between the apexes of the pair of positioning members on an extension line that is perpendicular to the direction in which the plate-like member is conveyed and extends to the side where the pressing member is provided.
A plate-shaped member conveyance device. The plurality of positioning members and the pressing member are arranged at positions forming an isosceles triangle having the pressing member as an apex,
The plate-shaped member conveyance device according to claim 1. The positioning member is a positioning member having a vertex that slides with one side of the plate-like member to be conveyed.
The plate-shaped member conveying device according to claim 1 or 2. The pressing member includes a first roller that applies a pressing force, the plurality of positioning members include a pair of second rollers, and the plate-shaped member includes the first roller and the pair of second rollers. Nipped and conveyed between the rollers,
The plate-shaped member conveyance device according to any one of claims 1 to 3. The transport unit performs pitch feed transport that repeats a predetermined distance of movement and stop,
The plate-shaped member conveyance device according to any one of claims 1 to 4. A guide portion for guiding the plate-shaped member toward the plurality of positioning members is provided.
The plate-shaped member conveyance device according to any one of claims 1 to 5. The plate-like member transport device according to any one of claims 1 to 6,
A frequency measuring unit for measuring an oscillation frequency of a crystal resonator placed on the plate-like member conveyed by the plate-like member conveyance device;
An ion gun that irradiates an ion beam to the crystal resonator whose measured oscillation frequency is out of a desired oscillation frequency;
A frequency adjustment device comprising: On the straight line connecting the midpoint of the pair of positioning members and the pressing member, the measurement probe of the frequency measurement unit is arranged,
The frequency adjusting device according to claim 7. The transport unit performs pitch feed transport that repeats movement and stop for a predetermined distance, irradiates the ion beam during the stop, and adjusts the frequency of the matrix-arranged crystal resonators in units of columns.
The frequency adjusting device according to claim 7. A transport step of transporting the plate-like member in a predetermined transport direction by a transport unit;
A step of positioning with a plurality of positioning members that are arranged along the predetermined transport direction and each have a vertex that contacts one side of the plate member to be transported;
A pressing member provided at a position where the plate-like member conveyed between the plurality of positioning members is arranged at a position opposite to the position where the plurality of positioning members are arranged. Pressing in the direction in which the pair of positioning members are disposed;
A transport method using a plate-shaped member transport device comprising:
The pressing member is disposed between the apexes of the pair of positioning members on an extension line that is perpendicular to the direction in which the plate-like member is conveyed and extends to the side where the pressing member is provided.
The conveyance method using the plate-shaped member conveyance apparatus characterized by the above-mentioned.

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