JP2013152103A - Optical liquid leakage detection apparatus and method - Google Patents
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- 239000007788 liquid Substances 0.000 title claims abstract description 91
- 238000001514 detection method Methods 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 title abstract description 7
- 230000003287 optical effect Effects 0.000 title description 10
- 239000013307 optical fiber Substances 0.000 claims abstract description 79
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 15
- 239000000126 substance Substances 0.000 abstract description 5
- 239000000835 fiber Substances 0.000 abstract description 3
- 230000001681 protective effect Effects 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 238000009434 installation Methods 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000013056 hazardous product Substances 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 230000009972 noncorrosive effect Effects 0.000 description 1
- 239000013308 plastic optical fiber Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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Abstract
Description
本発明は、少量の液漏れであっても正確に検知出来、かつ設置スペースに制限がある装置に設置出来る光学的液漏れ検知に関する。 The present invention relates to optical liquid leakage detection that can be accurately detected even with a small amount of liquid leakage and can be installed in an apparatus having a limited installation space.
マイクロ化学装置は微小流量を扱う反応装置であり、構成するポンプや配管から液漏れが発生すると例え微少流量であっても、送液不足あるいは２液以上の流量比変化が起こり反応性能に大きな影響を及ぼす。また、装置からの液漏れは装置環境や安全性にとって基本的に好ましくない。 A micro chemical device is a reaction device that handles very small flow rates. If liquid leakage occurs from the pumps and pipes that make up the device, even if the flow rate is very small, there is a shortage of liquid delivery or a change in the flow rate ratio of two or more liquids, greatly affecting the reaction performance. Effect. Further, liquid leakage from the apparatus is basically undesirable for the apparatus environment and safety.
したがって、少量の液漏れであってもこれを確実に検知する必要がある。液漏れ量は毎分当り数ミリリットル以下であり、従来の漏液サンサ、光ファイバセンサなどを用いた検知装置だとこの微量な液漏れは検知出来なかった。また、設置スペースも限られており従来のセンサでは設置が出来ない事もあった。このため、微小面積に設置出き、微小液量でも検知出き、超小型機器における液漏れを検知する液漏れ検知装置が必要とされてきた。 Therefore, it is necessary to reliably detect even a small amount of liquid leakage. The amount of liquid leakage was less than a few milliliters per minute, and this small amount of liquid leakage could not be detected with a conventional detection device using a liquid leakage sensor or an optical fiber sensor. Also, the installation space is limited, and there are cases where the conventional sensor cannot be installed. For this reason, there has been a need for a liquid leak detection device that can be installed in a small area, can detect even a small amount of liquid, and can detect a liquid leak in a micro device.
また、測定対象が化学薬品である場合もあり、測定する薬剤・溶媒等々によって液漏れ検知装置の材質を選定する必要がある。また、漏れ液を受ける受け皿を使用することがあるが、受け皿の材質を選ばず液漏れが検知出来る必要がある。 In some cases, the measurement target is a chemical, and it is necessary to select the material of the liquid leak detection device according to the drug / solvent to be measured. Moreover, although a saucer that receives leaked liquid may be used, it is necessary to detect the liquid leak regardless of the material of the saucer.
さらに、測定対象が危険物の液漏れ検知を行うにあたっては、スパークによる発火や爆発未然に防ぐため、液漏れを発生したことを検知する場所に電気的な装置を置くことなく、検出する液漏れ検知装置が必要である。 In addition, when the measurement target detects a leak of a hazardous material, the leak is detected without placing an electrical device in the place where the occurrence of the leak is detected in order to prevent ignition or explosion due to sparks. A detection device is required.
そこで光を利用した、危険物でも安全に検知することが出来る液漏れ検知装置が考案されてきた。 Accordingly, liquid leak detection devices that use light and can safely detect even dangerous materials have been devised.
光を用いた検知装置の例として、液漏れの有無を検知するセンサには、従来から種々の提案がなされている。例えば、発光源と光センサを有し、発光源の光がセンサに導かれる量を電気信号に変換する光センサ部と、前記センサ部光源の制御及び信号が閾値より大きいか、小さいかを判定する判定回路を有するセンサ回路により構成され、漏れた溶剤の有無を光センサ部により検出することを特徴とする光式液漏れ検出器が考案されている。 As an example of a detection device using light, various proposals have conventionally been made for sensors that detect the presence or absence of liquid leakage. For example, an optical sensor unit having a light source and an optical sensor and converting the amount of light emitted from the light source to the sensor into an electrical signal, and determining whether the control and signal of the sensor unit light source is larger or smaller than a threshold value An optical liquid leak detector has been devised that includes a sensor circuit having a determination circuit that detects the presence or absence of a leaked solvent by an optical sensor unit.
図７に示すように、併設された送光用光ファイバと受光用光ファイバと、該送光及び受光用光ファイバの端部に配設されたセンサヘッドからなる液面センサである。センサヘッドはプリズム状の先端部を有し、該センサヘッドのプリズム状の先端部の内側面において２回反射させ、送光用光ファイバから出射した直接光が、対象液体に接触していないときといるときとの受光用光ファイバに入射する光量の違いにより、液面を検知する液面センサが考案されている。 As shown in FIG. 7, the liquid level sensor includes a light transmitting optical fiber and a light receiving optical fiber which are provided side by side, and a sensor head disposed at an end of the light transmitting and light receiving optical fiber. The sensor head has a prism-shaped tip, and is reflected twice on the inner surface of the prism-shaped tip of the sensor head, and the direct light emitted from the light transmitting optical fiber is not in contact with the target liquid A liquid level sensor has been devised for detecting the liquid level due to the difference in the amount of light incident on the light receiving optical fiber from the time when the light is received.
さらにセンサヘッドを透明フッ素樹脂で構成することにより、耐薬品腐食性、検出効率の向上を図る光式液面センサも考案されている。 Furthermore, an optical liquid level sensor has been devised that improves the chemical corrosion resistance and detection efficiency by configuring the sensor head with a transparent fluororesin.
しかしながら、従来の液漏れ検知装置は収納管に送光用光ファイバと受光用光ファイバを収納した形態であり、またプリズム状の先端部を有するため、センサ自体が大きく、設置する面積が必要というに問題があった。また、漏れ液を受ける受け皿が設置された場合、受け皿からの反射光量が漏れ液の測定に影響があるが、受け皿の材質による反射光量についても考慮されて居らず、受け皿の材質に制限が有る等の問題があった。また、従来の液漏れ検知装置はセンサヘッドの形状を特定の形状（例えばプリズム状）に加工する必要があり、加工精度、製作コスト等に問題があった。 However, the conventional liquid leak detection device has a configuration in which the optical fiber for light transmission and the optical fiber for light reception are accommodated in a storage tube, and since it has a prism-shaped tip, the sensor itself is large and requires an installation area. There was a problem. In addition, when a saucer that receives leaked liquid is installed, the amount of reflected light from the saucer affects the measurement of leaked liquid, but the amount of reflected light due to the material of the saucer is not considered, and the material of the saucer is limited. There was a problem such as. In addition, the conventional liquid leak detection device needs to process the shape of the sensor head into a specific shape (for example, a prism shape), which causes problems in processing accuracy, manufacturing cost, and the like.
本発明は、前記課題に基づいてなされたものであり、省スペースで、耐薬品性に優れ、受け皿の材質による反射光量の変化を受けず、かつ低コストの液漏れ検知装置および方法を提供することにある。 The present invention has been made based on the above problems, and provides a low-cost liquid leakage detection apparatus and method that is space-saving, excellent in chemical resistance, not affected by changes in the amount of reflected light due to the material of the tray. There is.
本発明は、前記課題の解決を図るものであり、請求項１の発明は、
併設された送光用光ファイバと受光用光ファイバと、
前記送光及び前記受光用光ファイバの端部に配設されたセンサヘッドからなる液漏れ検知装置であって、
前記センサヘッドは、前記光ファイバの長手方向に対して垂直な平面をなす円柱状の透光性部材からなり、
前記透光性部材の底面もしくは側面において、
前記送光用光ファイバから出射した送光が、前記透光性部材に液滴が付着していないときに拡散反射して前記受光用光ファイバに入射する受光量と、
前記送光用光ファイバから出射した光が、前記透光性部材に液滴が付着しているときに拡散反射して前記受光用光ファイバに入射する受光量との
光量の違いによって前記液滴の有無を検知することを特徴とする液漏れ検知装置である。
また、請求項２の発明は、
前記センサヘッドの先端をなす底面に光反射板を装着したことを特徴とする請求項１の液漏れ検知装置である。
また、請求項３の発明は、
請求項１乃至２の液漏れ検知装置を備えた液漏れ検知装置であって、液滴の受け皿を備え、前記液漏れ検知装置のセンサヘッドの側面もしくは底面を前記液滴の受け皿に密着させて、前記液滴の有無を検知することを特徴とする液漏れ検知装置である。
また、請求項４の発明は、併設された送光用光ファイバと受光用光ファイバと、
前記送光及び前記受光用光ファイバの端部に配設されたセンサヘッドを用いた液漏れ検知方法であって、
前記センサヘッドは、前記光ファイバの長手方向に対して垂直な平面をなす円柱状の透光性部材からなり、
前記透光性部材の底面もしくは側面において、
前記送光用光ファイバから出射した送光が、前記透光性部材に液滴が付着していないときに拡散反射して前記受光用光ファイバに入射する受光量と、
前記送光用光ファイバから出射した送光が、前記透光性部材に液滴が付着しているときに拡散反射して前記受光用光ファイバに入射する受光量との
光量の違いによって前記液滴の有無を検知することを特徴とする液漏れ検知方法である。
また、請求項５の発明は、
前記センサヘッドの先端をなす底面に光反射板を装着したことを特徴とする請求項４の液漏れ検知方法である。
また、請求項６の発明は、
請求項４乃至５の液漏れ検知方法を用いた液漏れ検知方法であって、液滴の受け皿を用い、前記液漏れ検知装置のセンサヘッドの側面もしくは底面を前記液滴の受け皿に密着させて、前記液滴の有無を検知することを特徴とする液漏れ検知方法である。
The present invention is intended to solve the above problems, and the invention of claim 1
An optical fiber for transmitting and receiving light and an optical fiber for receiving light;
A liquid leakage detection device comprising a sensor head disposed at an end of the light transmitting and receiving optical fibers,
The sensor head is composed of a cylindrical translucent member that forms a plane perpendicular to the longitudinal direction of the optical fiber,
In the bottom or side of the translucent member,
The amount of light received from the light transmitting optical fiber is diffusely reflected and incident on the light receiving optical fiber when no droplet is attached to the light transmitting member; and
The light emitted from the light transmitting optical fiber is diffused and reflected by the difference in the amount of light received when the liquid droplet is attached to the translucent member and is incident on the light receiving optical fiber. It is a liquid leak detection apparatus characterized by detecting the presence or absence of water.
The invention of claim 2
The liquid leakage detection device according to claim 1, wherein a light reflection plate is attached to a bottom surface forming a tip of the sensor head.
The invention of claim 3
A liquid leakage detection device comprising the liquid leakage detection device according to claim 1, further comprising a droplet tray, wherein a side surface or a bottom surface of a sensor head of the liquid leakage detection device is brought into close contact with the droplet tray. , A liquid leak detection device for detecting the presence or absence of the droplet.
Further, the invention of claim 4 is provided with an optical fiber for light transmission and an optical fiber for light reception provided together,
A liquid leakage detection method using a sensor head disposed at an end of the light transmitting and receiving optical fiber,
The sensor head is composed of a cylindrical translucent member that forms a plane perpendicular to the longitudinal direction of the optical fiber,
In the bottom or side of the translucent member,
The amount of light received from the light transmitting optical fiber is diffusely reflected and incident on the light receiving optical fiber when no droplet is attached to the light transmitting member; and
The light transmitted from the light transmitting optical fiber is diffused and reflected when a droplet is attached to the light transmissive member, and the amount of light received differs from the amount of received light that enters the light receiving optical fiber. A liquid leakage detection method characterized by detecting the presence or absence of a droplet.
The invention of claim 5
5. The liquid leakage detection method according to claim 4, wherein a light reflection plate is attached to a bottom surface that forms a tip of the sensor head.
The invention of claim 6
A liquid leakage detection method using the liquid leakage detection method according to claim 4, wherein a droplet receiving tray is used, and a side surface or a bottom surface of a sensor head of the liquid leakage detection device is brought into close contact with the droplet receiving tray. The liquid leak detection method is characterized by detecting the presence or absence of the droplet.
以上示したように、本発明ではセンサヘッドに透明な円柱状の樹脂と反射板を装着した構造であるため構造が単純であるので製作が容易で有り加工精度に優れている。 As described above, according to the present invention, the sensor head has a structure in which a transparent columnar resin and a reflecting plate are mounted. Therefore, the structure is simple, so that the manufacturing is easy and the processing accuracy is excellent.
また、センサヘッドに電気的な回路を設けないので安全性に優れており、省スペースである。 Further, since no electrical circuit is provided in the sensor head, safety is excellent and space is saved.
また、センサヘッドの先端をなす底面に光反射板を装着しているので、漏れ液の受け皿が設置された場合でも、受け皿からの反射光量が漏れ液の測定に影響を受けない。 In addition, since the light reflecting plate is mounted on the bottom surface that forms the tip of the sensor head, the amount of light reflected from the saucer is not affected by the measurement of the leaked fluid even when a saucer for leaking fluid is installed.
さらにセンサヘッドは透明な樹脂であること、反射板は光反射板であることのみが必要であるため、材質の選択の自由度があり、低コストの液漏れ検知装置および方法が提供出来る。 Furthermore, since it is only necessary that the sensor head is a transparent resin and the reflecting plate is a light reflecting plate, there is a degree of freedom in selecting the material, and a low-cost liquid leak detection device and method can be provided.
以下、本発明に係る液漏れ検知装置および方法の実施形態について、図面を参照して説明する。 Hereinafter, embodiments of a liquid leakage detection apparatus and method according to the present invention will be described with reference to the drawings.
図１に、この発明による一実施例の概略図を示す。図１（Ａ）概略縦断図、図１（Ｂ）は概略横断図を示す。本実施例のこの態様の液漏れ検知装置は、保護チューブ１４内に併設されている送光用光ファイバ１１、受光用光ファイバ１２、送光用光ファイバ１１および受光用光ファイバ１２を保護するシ−ス１７と、端部に配設されたセンサヘッド１３からなる。センサヘッド１３は、透明な円筒状の形状の樹脂、ガラス、などで形成されている。センサヘッド１３とシース１７、および保護チューブ１４とは、例えば接着剤で接合されている。 FIG. 1 shows a schematic diagram of an embodiment according to the present invention. FIG. 1A is a schematic longitudinal sectional view, and FIG. 1B is a schematic cross-sectional view. The liquid leakage detection device of this aspect of the present embodiment protects the light transmission optical fiber 11, the light reception optical fiber 12, the light transmission optical fiber 11, and the light reception optical fiber 12 provided in the protective tube 14. It consists of a sheath 17 and a sensor head 13 disposed at the end. The sensor head 13 is formed of a transparent cylindrical resin, glass, or the like. The sensor head 13, the sheath 17, and the protective tube 14 are joined with, for example, an adhesive.
送光用光ファイバ１１と受光用光ファイバ１２（以下光ファイバと記す）はコアと呼ばれる芯とその外側のクラッドと呼ばれる部分、それらを覆う被覆の三重構造になっている(図示せず)。クラッドよりもコアの屈折率を高めることで全反射や屈折により出来るだけ光を中心部のコアに伝搬させる構造になっている。本発明において使用される光ファイバとは光ファイバ素線をシース１７で被覆したものを指す。 The optical fiber 11 for light transmission and the optical fiber 12 for light reception (hereinafter referred to as optical fiber) have a triple structure of a core called a core, a part called a clad outside thereof, and a coating covering them (not shown). By increasing the refractive index of the core rather than the cladding, the light is propagated as much as possible to the core in the central part by total reflection and refraction. The optical fiber used in the present invention refers to an optical fiber that is covered with a sheath 17.
光ファイバとして使用する材質は、プラスチック・ガラスのどちらであっても良い。石英ガラス（シリカガラス）はプラスチック光ファイバよりも伝送損失が少ないため長距離での計測に好適である。また、短距離でのファイバである場合は好適にはプラスチック製を用いる。 The material used as the optical fiber may be plastic or glass. Quartz glass (silica glass) has less transmission loss than plastic optical fiber and is suitable for measurement over long distances. Further, in the case of a short distance fiber, plastic is preferably used.
光ファイバとして使用する材質は、さらにフッ素径ポリマ・ポリメタクリル酸メチル系物質・ポリカーボネート・ポリスチレン・含重水素化ポリマ等のどの材質であってもよい。 The material used as the optical fiber may be any material such as a fluorine-diameter polymer, a polymethyl methacrylate-based material, polycarbonate, polystyrene, or a deuterated polymer.
また、送光用光ファイバ１１と受光用光ファイバ１２の２本の光ファイバに夫々保護用のシース１７で被覆をし、保護チューブ１４でまとめたものが尚良い。これはまとめた形態にすることで送光と受光のファイバ間の距離が一定で変わらないため拡散反射波が安定して得られるためである。また、光ファイバ素線の単線を２本並列に装着しても、測定に必要な拡散反射波は得られない。 Further, it is more preferable that the two optical fibers of the light transmitting optical fiber 11 and the light receiving optical fiber 12 are each covered with a protective sheath 17 and are collected by a protective tube 14. This is because the diffused reflected wave can be stably obtained because the distance between the light transmitting and receiving fibers is constant and does not change by adopting a combined form. Further, even if two single optical fiber strands are mounted in parallel, the diffuse reflected wave necessary for measurement cannot be obtained.
また、光ファイバ径は保護用シースを含め直径４ｍｍ以下であることが望ましい。液滴の漏れを検知するにはこの直径は特に問題とはならないが、コア径が細くなれば曲げに弱くなる。微小スペースに設置するには光ファイバを曲げて設置する必要があるため微小スペースに設置するには不向きである為である。 The optical fiber diameter including the protective sheath is desirably 4 mm or less. This diameter is not particularly problematic for detecting liquid droplet leakage, but it becomes weaker to bend as the core diameter becomes smaller. This is because it is not suitable for installation in a minute space because it is necessary to bend the optical fiber to install in a minute space.
センサヘッド１３に関しては光ファイバを収納した保護被覆を装着した光ファイバの先端に好適には２ｍｍ（０．５ｍｍ〜５ｍｍ）の厚みを持たせたフッ素樹脂製の透明樹脂を用いる。この２ｍｍの厚みは液滴の有無を確認するための光の拡散反射波を生じさせる部分である。 As for the sensor head 13, a transparent resin made of a fluororesin having a thickness of 2 mm (0.5 mm to 5 mm) is preferably used at the tip of the optical fiber on which a protective coating containing the optical fiber is mounted. The thickness of 2 mm is a portion that generates a diffuse reflection wave of light for confirming the presence or absence of a droplet.
このセンサヘッド１３が無い場合、液滴による光の拡散反射波は生じない。センサヘッド１３は必ず必要になる。 When this sensor head 13 is not provided, the diffuse reflection wave of the light by the droplet does not occur. The sensor head 13 is indispensable.
センサヘッド１３は、接液する液種によっては光ファイバ（プラスチック製）を溶解させ光の反射に影響を与える可能性が有るため、これを防ぐためにはフッ素樹脂を使う。腐食性がない液体の場合はフッ素樹脂でなくとも透明樹脂であっても問題は無い。 Since the sensor head 13 may affect the reflection of light by dissolving an optical fiber (made of plastic) depending on the type of liquid in contact with the liquid, a fluororesin is used to prevent this. In the case of a non-corrosive liquid, there is no problem even if it is not a fluororesin but a transparent resin.
本実施例の液漏れ検知装置の動作を説明する。図３、図４は本発明の液漏れ検知装置のセンサヘッドが検知対象となる反射面を持つ液漏れの受け皿の側面、底面などに接触し、液滴がセンサヘッド３３に付着した状態図３と付着しない状態図４を示す。発光素子など（図示せず）から出射された光は、送光用光ファイバ３１内を伝播し、その端部から矢印として図示するように、出射し、センサヘッド３３に光が入射して、センサヘッド３３の外部との境界面で、拡散反射して、拡散反射光は、受光用光ファイバ３２に入射しその内部を伝播して、受光素子（図示せず）で光量を検出する。センサヘッド３３に液滴が付着していないときと液滴が付着しているときの受光用光ファイバへの入射光量は、センサヘッド３３の境界面での光の透過率、屈折率が異なるため変化するので、拡散反射光量が異なる。このようにして液滴付着の有無による拡散反射光量の違いにより、受光用光ファイバ３２への入射光量が変化するので、入射光量の変化を検出して液滴の有無を検知することが出来る。したがって液漏れの受け皿に溜まった液漏れを検知出来る。 The operation of the liquid leakage detection apparatus of this embodiment will be described. 3 and 4 show a state in which the sensor head of the liquid leakage detection apparatus of the present invention is in contact with the side surface, bottom surface, etc. of a liquid leakage receiving tray having a reflection surface to be detected, and droplets adhere to the sensor head 33. FIG. 4 shows a state where no adhesion occurs. Light emitted from a light emitting element or the like (not shown) propagates in the optical fiber 31 for light transmission, exits from the end as shown by an arrow, and light enters the sensor head 33, The diffusely reflected light is diffusely reflected at the boundary surface with the outside of the sensor head 33, and the diffusely reflected light enters the light receiving optical fiber 32 and propagates therethrough, and the light quantity is detected by a light receiving element (not shown). The amount of light incident on the light receiving optical fiber when no droplet is attached to the sensor head 33 and when the droplet is attached are different in light transmittance and refractive index at the boundary surface of the sensor head 33. Since it changes, the amount of diffusely reflected light is different. In this way, the amount of incident light on the light receiving optical fiber 32 changes due to the difference in the amount of diffusely reflected light depending on the presence or absence of droplets, so that the presence or absence of droplets can be detected by detecting the change in the amount of incident light. Therefore, it is possible to detect the liquid leakage accumulated in the liquid leakage tray.
ここで本発明の光源は光信号（ダイオード）を用い、好適には赤色４元素ＬＥＤ波長６４０ｎｍを送光用光ファイバから出力し、反射面からの信号を受光用光ファイバから取り出す。 Here, the light source of the present invention uses an optical signal (diode), preferably outputs a red four-element LED wavelength of 640 nm from the light transmitting optical fiber, and extracts a signal from the reflecting surface from the light receiving optical fiber.
光信号はその出力を光ファイバでの損失を考慮する必要が有るが、液滴を検知出来る拡散反射波を得られる信号強度に調整する。液漏れを検知出来る状態（センサヘッドに液滴がある）で信号レベルを最小値として設定する。 Although it is necessary to consider the loss in the optical fiber, the output of the optical signal is adjusted to a signal intensity that can obtain a diffuse reflection wave that can detect a droplet. The signal level is set as the minimum value in a state where liquid leakage can be detected (there is a droplet on the sensor head).
また、好適にはこのセンサヘッド１３の先端部（反射面）に白色のフッ素樹脂を貼り付ける事で測定面の状態に関わらず測定が可能となる。 Further, it is possible to perform measurement irrespective of the state of the measurement surface by preferably attaching a white fluororesin to the tip (reflection surface) of the sensor head 13.
図２に、この発明による別の実施例の概略図を示す。この態様の液漏れ検知装置は、被覆であるシース２７内に併設されている送光用光ファイバ２１、受光用光ファイバ２２、シース２７、保護チューブ２４と、送光及び受光用光ファイバの端部に配設されたセンサヘッド２３および反射板２６からなる。センサヘッド２３は、透明な円筒状の形状の樹脂、ガラス、などで形成されている。センサヘッド２３と保護用のシース２７、保護チューブ２４および反射板２６とは、例えば接着剤で接合されている。 FIG. 2 shows a schematic diagram of another embodiment according to the present invention. The liquid leakage detection device of this aspect includes a light transmission optical fiber 21, a light reception optical fiber 22, a sheath 27, a protective tube 24 provided in a sheath 27 as a coating, and ends of the light transmission and light reception optical fibers. It consists of a sensor head 23 and a reflector 26 arranged in the section. The sensor head 23 is formed of a transparent cylindrical resin, glass, or the like. The sensor head 23, the protective sheath 27, the protective tube 24, and the reflecting plate 26 are joined together with, for example, an adhesive.
この態様の液漏れ検知装置の動作を説明する。図５は本実施例の液漏れ検知装置のセンサヘッド５３に、液滴が付着した状態を示す。発光素子など（図示せず）から出射された光は、送光用光ファイバ５１内を伝播し、その端部から矢印として図示するように、出射し、センサヘッド５３に光が入射して、センサヘッド５３の外部との境界面で、拡散反射して、拡散反射光は、受光用光ファイバ５２に入射しその内部を伝播して、受光素子（図示せず）で光量を検出する。センサヘッド５３に液滴が付着していないときと液滴が付着しているときの受光用光ファイバへの入射光量は、センサヘッド５３の境界面での光の透過率、屈折率が異なるため変化するので、拡散反射光量が異なる。このようにして液滴付着の有無による拡散反射光量の違いにより、受光用光ファイバ５２への入射光量が変化するので入射光量の変化を検出して液滴の有無を検知することが出来る。したがって液漏れの受け皿に溜まった液漏れを検知出来る。 The operation of the liquid leakage detection device of this aspect will be described. FIG. 5 shows a state in which droplets adhere to the sensor head 53 of the liquid leakage detection apparatus of this embodiment. Light emitted from a light emitting element or the like (not shown) propagates through the light transmitting optical fiber 51 and exits from the end as shown by an arrow, and light enters the sensor head 53. The diffusely reflected light is diffused and reflected at the boundary surface with the outside of the sensor head 53, and the diffused reflected light enters the light receiving optical fiber 52 and propagates through the inside, and the light amount is detected by a light receiving element (not shown). The amount of light incident on the optical fiber for receiving light when no droplet is attached to the sensor head 53 and when the droplet is attached are different in light transmittance and refractive index at the boundary surface of the sensor head 53. Since it changes, the amount of diffusely reflected light is different. In this way, the amount of incident light to the light receiving optical fiber 52 changes due to the difference in the amount of diffusely reflected light depending on the presence or absence of droplets, so that the presence or absence of droplets can be detected by detecting the change in the amount of incident light. Therefore, it is possible to detect the liquid leakage accumulated in the liquid leakage tray.
本実施例では反射板５５をセンサヘッド５３に取り付けているため検知対象に接触する受け皿がない場合、もしくは接触する底面、側面の形状、材質によらず液漏れの検出が容易に出来る。 In the present embodiment, since the reflecting plate 55 is attached to the sensor head 53, it is possible to easily detect liquid leakage when there is no tray that contacts the detection target, or regardless of the bottom surface, the shape of the side surface, and the material.
なお本実施例における、光ファイバ、センサヘッド、シース、保護チューブ等の材質は実施例１で述べたものと同様である。センサヘッドの先端をなす底面（反射面）に貼り付ける反射板は白色のフッ素樹脂を用いる。 The materials for the optical fiber, sensor head, sheath, protective tube, etc. in this embodiment are the same as those described in the first embodiment. A white fluororesin is used for the reflector attached to the bottom surface (reflective surface) forming the tip of the sensor head.
図６に、この発明による別の実施例の概略図を示す。この態様の液漏れ検知装置は、シリンジポンプ、マイクロ反応器および配管類から構成されるマイクロ化学装置６０の底面に設置されたドレンパン６６で、構成装置類から漏洩された液の検知装置である。本実施例では、ドレンパン６６に接するように本発明の液漏れ検査装置６３を装着している。マイクロ化学装置６０からの液漏れが有った場合、液漏れがドレンパン６６に溜まり、液漏れ検査装置６３に付着することにより、液漏れが検出出来る。 FIG. 6 shows a schematic diagram of another embodiment according to the present invention. The liquid leakage detection device of this aspect is a detection device for liquid leaked from the component devices by the drain pan 66 installed on the bottom surface of the microchemical device 60 including a syringe pump, a microreactor, and piping. In the present embodiment, the liquid leakage inspection device 63 of the present invention is attached so as to contact the drain pan 66. When there is a liquid leak from the microchemical device 60, the liquid leak accumulates in the drain pan 66 and adheres to the liquid leak inspection device 63 so that the liquid leak can be detected.
本発明は、光学式液漏れ検知装置および方法に関し、特にマイクロ化学プラントにおける液漏れを検知する装置、結露防止が要求される電気回路を装備した電気ＢＯＸや盤において、内部結露を検知する装置、クリーン管理エリア内にある配管・機器材料表面での結露を検知する装置などに利用可能である。 The present invention relates to an optical liquid leakage detection apparatus and method, and more particularly to an apparatus for detecting liquid leakage in a microchemical plant, an apparatus for detecting internal dew condensation in an electric BOX or panel equipped with an electrical circuit that requires prevention of condensation, It can be used for devices that detect dew condensation on the surface of piping and equipment materials in the clean management area.
１１，２１，３１，４１，５１，６１ 送光用光ファイバ
１２，２２，３２，４２，５２，６２ 受光用光ファイバ
１３，２３，３３，４３，５３，６３ センサヘッド
１４，２４ 保護チューブ
１７，２７ シース
２５ 反射板
11, 21, 31, 41, 51, 61 Transmitting optical fibers 12, 22, 32, 42, 52, 62 Receiving optical fibers 13, 23, 33, 43, 53, 63 Sensor head 14, 24 Protective tube 17 27 Sheath 25 Reflector
Claims (6)
前記送光及び前記受光用光ファイバの端部に配設されたセンサヘッドからなる液漏れ検知装置であって、
前記センサヘッドは、前記光ファイバの長手方向に対して垂直な平面をなす円柱状の透光性部材からなり、
前記透光性部材の底面もしくは側面において、
前記送光用光ファイバから出射した送光が、前記透光性部材に液滴が付着していないときに拡散反射して前記受光用光ファイバに入射する受光量と、
前記送光用光ファイバから出射した光が、前記透光性部材に液滴が付着しているときに拡散反射して前記受光用光ファイバに入射する受光量との
光量の違いによって前記液滴の有無を検知することを特徴とする液漏れ検知装置。 An optical fiber for transmitting and receiving light and an optical fiber for receiving light;
A liquid leakage detection device comprising a sensor head disposed at an end of the light transmitting and receiving optical fibers,
The sensor head is composed of a cylindrical translucent member that forms a plane perpendicular to the longitudinal direction of the optical fiber,
In the bottom or side of the translucent member,
The amount of light received from the light transmitting optical fiber is diffusely reflected and incident on the light receiving optical fiber when no droplet is attached to the light transmitting member; and
The light emitted from the light transmitting optical fiber is diffused and reflected by the difference in the amount of light received when the liquid droplet is attached to the translucent member and is incident on the light receiving optical fiber. A liquid leak detection device characterized by detecting the presence or absence of water.
前記送光及び前記受光用光ファイバの端部に配設されたセンサヘッドを用いた液漏れ検知方法であって、
前記センサヘッドは、前記光ファイバの長手方向に対して垂直な平面をなす円柱状の透光性部材からなり、
前記透光性部材の底面もしくは側面において、
前記送光用光ファイバから出射した送光が、前記透光性部材に液滴が付着していないときに拡散反射して前記受光用光ファイバに入射する受光量と、
前記送光用光ファイバから出射した送光が、前記透光性部材に液滴が付着しているときに拡散反射して前記受光用光ファイバに入射する受光量との
光量の違いによって前記液滴の有無を検知することを特徴とする液漏れ検知方法。 An optical fiber for transmitting and receiving light and an optical fiber for receiving light;
A liquid leakage detection method using a sensor head disposed at an end of the light transmitting and receiving optical fiber,
The sensor head is composed of a cylindrical translucent member that forms a plane perpendicular to the longitudinal direction of the optical fiber,
In the bottom or side of the translucent member,
The amount of light received from the light transmitting optical fiber is diffusely reflected and incident on the light receiving optical fiber when no droplet is attached to the light transmitting member; and
The light transmitted from the light transmitting optical fiber is diffused and reflected when a droplet is attached to the light transmissive member, and the amount of light received differs from the amount of received light that enters the light receiving optical fiber. A liquid leak detection method comprising detecting the presence or absence of a droplet.
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| WO2022009443A1 (en) * | 2020-07-10 | 2022-01-13 | 日本電信電話株式会社 | Ultraviolet light radiation system |
| CN115414975A (en) * | 2022-08-30 | 2022-12-02 | 苏州大学 | Application of anisotropic material in blockage or leakage detection of pipelines and flow channels and method for detecting leakage and blockage of microfluidic chip |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20150107665A (en) * | 2014-03-14 | 2015-09-23 | 사파스고교 가부시키가이샤 | Pressure sensor |
| KR102191756B1 (en) * | 2014-03-14 | 2020-12-16 | 사파스고교 가부시키가이샤 | Pressure sensor |
| WO2022009443A1 (en) * | 2020-07-10 | 2022-01-13 | 日本電信電話株式会社 | Ultraviolet light radiation system |
| WO2022009406A1 (en) * | 2020-07-10 | 2022-01-13 | 日本電信電話株式会社 | Uv light irradiation system |
| CN115414975A (en) * | 2022-08-30 | 2022-12-02 | 苏州大学 | Application of anisotropic material in blockage or leakage detection of pipelines and flow channels and method for detecting leakage and blockage of microfluidic chip |
| CN115414975B (en) * | 2022-08-30 | 2023-11-28 | 苏州大学 | Application of anisotropic material in pipeline and runner blockage or leakage detection and method for detecting micro-fluidic chip leakage and blockage |
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