JP2013131537A - Method of determining cracking of plate-like work - Google Patents

Abstract

PROBLEM TO BE SOLVED: To determine whether a plate-like work cracks in grinding, and the plate and cause thereof.SOLUTION: A peeling tape 5 is stuck on a protective tape T stuck on a plate-like work W having been ground, the protective tape T is peeled off the plate-like work W together with the peeling tape 5, and it is determined whether the plate-like work W has a crack 31 from a rugged shape of a corresponding trace 30 transferred to a pressure-sensitive adhesive T2 of the protective tape T.

Description

  The present invention relates to a method for detecting a crack generated in a plate-like workpiece by grinding.

  In a grinding machine that holds a plate-like workpiece in the holding means and performs grinding by bringing a grinding wheel into contact with the exposed surface (surface to be ground), a protective tape is applied to the surface held by the holding means (surface to be held). The surface to be held is protected by sticking. Further, after the grinding of the surface to be ground, the protective tape is peeled off from the surface to be held (see, for example, Patent Document 1).

JP 2010-137346 A

  However, if the protective tape is peeled off after the grinding is finished, it may be found that the plate-like workpiece is cracked later. As described above, when a crack is found in the plate-like workpiece, depending on the cause, the subsequent plate-like workpiece may be cracked one after another, so that it is necessary to find the crack early. Further, if the place where the crack occurs can be found and the cause can be determined, there is a possibility that the subsequent crack of the plate-like workpiece can be avoided.

  There is a method to check the cracks by X-raying the plate-like work with the protective tape attached, but if it is incorporated in the grinding machine, it will increase the size of the machine and increase the cost. It is difficult.

  The present invention has been considered in view of such problems, and it is an object of the present invention to make it possible to determine the presence / absence, location, and cause of a crack when a plate-shaped workpiece is cracked by grinding.

  The present invention is a grinding comprising at least a holding means for holding a protective tape attached to one surface of a plate-like work and a grinding means for grinding the other surface of the plate-like work held by the holding means. A peeling tape pasting process that affixes a peeling tape to a protective tape affixed to a plate-shaped workpiece ground by a grinding machine, and a protective tape peeling step that peels the protective tape from the plate-shaped workpiece together with the peeling tape The work crack judgment method which judges the place where the plate-shaped work was cracked or the cause of the crack of the plate-shaped work by the uneven shape transferred to the adhesive of the protective tape that was affixed to the plate-shaped work It is about.

  In the above work crack judgment method, by marking the peeling tape and managing the correspondence between the plate workpiece and the protective tape peeled from the plate workpiece, the cause of the crack of the plate workpiece is investigated, By marking the protective tape and managing the relationship between the plate-like workpiece and the protective tape peeled off from the plate-like workpiece, the cause of the cracking of the plate-like workpiece was investigated, and the protective tape peeled off from the plate-like workpiece It is possible to either investigate the cause of the crack of the plate-like work by managing the relationship between the plate-like work and the protective tape peeled off from the plate-like work desirable.

  In the present invention, based on the corresponding trace transferred to the adhesive of the protective tape that was affixed to the plate workpiece during grinding, the presence or absence and location of the plate workpiece and the cracks occurred during grinding or occurred during conveyance. Can be determined. It is also possible to determine the cause of the crack depending on whether the corresponding trace is concave or convex.

It is a perspective view which shows the state which sticks a protective tape on a plate-shaped workpiece. It is a front view which shows the state which sticks a protective tape on a plate-shaped workpiece. It is a perspective view which shows an example of a grinding device. It is a front view which shows the state which affixed the tape for peeling on the protective tape. It is a front view which shows the state which peels a protective tape from a plate-shaped workpiece. It is a perspective view which shows the state which peeled the protective tape from the plate-shaped workpiece. It is a top view which shows the state to which the mark was attached | subjected to the tape for peeling. It is a top view which shows the state in which the mark was attached | subjected to the protective tape. It is a front view which shows the state by which the plate-shaped workpiece | work was accommodated in two or more by the cassette, and the protective tape peeled off from the plate-shaped workpiece was put in order.

  In the plate-like workpiece W shown in FIG. 1, a plurality of devices D are formed on the surface W <b> 1, and the devices D are formed in regions partitioned by streets S. The device D is not formed on the back surface W2, which is the back surface of the front surface W1, and the plate-like workpiece W is formed to a desired thickness by grinding the back surface W2.

  Prior to grinding of the back surface W2, the protective tape T is attached to the front surface W1. As shown in FIG. 2, the protective tape T is composed of a sheet-like base material T1 and an adhesive T2 applied to one surface of the base material T1, and the adhesive T2 is attached to the plate-like workpiece W. The plate-like workpiece W and the protective tape T are integrated with each other by facing the surface W1 and attaching the adhesive T2 to the surface W1.

  The grinding apparatus 1 shown in FIG. 3 is an apparatus that can grind the back surface W2 of the plate-like workpiece W. In the cassette placement areas 10a and 10b, a cassette 100a that houses the plate-like workpiece W to be ground and A cassette 100b that accommodates the ground plate-like workpiece W is placed thereon. In the cassettes 100a and 100b, the plate-like workpiece W having the protective tape T attached to the surface W1 is accommodated.

  A loading / unloading means 11 for loading / unloading the plate-like workpiece W to / from the cassettes 100a, 100b is disposed in the vicinity of the cassette placement areas 10a, 10b. The plate-like workpiece W carried out from the plate-like workpiece W cassette 100a by the carry-in / out means 11 is placed on the alignment table 12, where the plate-like workpiece W is aligned at a fixed position.

  A first conveying means 13a is disposed in the vicinity of the alignment table 12, and the plate-like workpiece W aligned on the alignment table 12 is moved by the first conveying means 13a into three holding means 14a and 14b. , 14c. Each holding means includes a holding portion 140 that holds the plate-like workpiece W by suction. Further, the three holding means 14 a, 14 b and 14 c move as the turntable 15 rotates.

  In the grinding apparatus 1, a first grinding feed means 17 and a second grinding feed means 18 are disposed on a wall portion 16 erected from one end portion. The first grinding feed means 17 includes a pair of guide rails 170 arranged in the vertical direction, a ball screw 171 arranged in parallel to the guide rail 170, a motor 172 connected to the tip of the ball screw 171, and a guide The elevating unit 173 is slidably engaged with the rail 170 and has an inner nut screwed into the ball screw 171. The elevating unit 173 is moved up and down as the ball screw 171 is rotated by being driven by the motor 172. It has a configuration. Similarly, the second grinding feed means 18 includes a pair of guide rails 180 arranged in the vertical direction, a ball screw 181 arranged in parallel with the guide rail 180, and a motor 182 connected to the tip of the ball screw 181. And an elevating part 183 slidably engaged with the guide rail 180 and having an internal nut screwed into the ball screw 181. The elevating part 183 is driven by the motor 182 to rotate the ball screw 181. Is configured to move up and down.

  The elevating part 173 constituting the first grinding feed means 17 supports the first grinding means 3a for grinding the plate-like workpiece held by any holding means. In the first grinding means 3a, the spindle housing 190 supports the spindle 200 in a rotatable manner. A wheel mount 210 is fixed to the tip of the spindle 200, and a motor 200a for driving the spindle 200 is connected to the other tip.

  Similarly, the elevating part 183 constituting the second grinding feed means 18 supports the second grinding means 3b for grinding the plate-like workpiece held by any holding means. In the second grinding means 3b, the spindle housing 191 supports the spindle 201 in a rotatable manner. A wheel mount 211 is fixed to the tip of the spindle 201, and a motor 201a for driving the spindle 201 is connected to the other tip.

  A grinding wheel 230 is attached to the wheel mount 210. The grinding wheel 230 is configured by a grindstone 230a being fixed to the lower surface of a wheel base formed in a ring shape. Similarly, a grinding wheel 231 is attached to the wheel mount 211. The grinding wheel 231 is configured by a grindstone 231a fixed to a lower surface of a wheel base formed in a ring shape.

  In the movable range of the carry-in / out means 11, a cleaning means 25 for cleaning the plate-like workpiece W after grinding is disposed. In the vicinity of the cleaning means 25, a second transfer means 13b for transferring the plate-like workpiece W from any holding means to the cleaning means is disposed.

  The plate-like workpiece W accommodated in the cassette 100 a is unloaded from the cassette 100 a by the loading / unloading means 11 and placed on the alignment table 12. Then, after the plate-like workpiece W is aligned at a certain position, the plate-like workpiece W is conveyed to, for example, the holding means 14a by the first conveying means 13a. In the holding means 14a, the protective tape T attached to the plate-like workpiece W is held by the holding unit 140, and the back surface W2 is exposed.

  Next, the plate-like workpiece W moves immediately below the grindstone 230a by the rotation of the turntable 15. Then, while the holding means 14a rotates, the grinding wheel 230 is ground and fed by the first grinding feed means 17 while the grinding wheel 230a rotates as the spindle 200 rotates, and the grinding wheel 230a descends, and the rotating grinding stone 230a becomes a plate. The back surface W2b of the workpiece W is contacted and the back surface W2b is ground. Here, for example, rough grinding is performed.

  After the rough grinding is finished, the plate-like workpiece W is moved directly below the grindstone 231a by the rotation of the turntable 15. Then, while the holding means 14a is rotated, the wheel mount 211 is ground and fed by the second grinding feed means 18 (see FIG. 1) while the grindstone 231a is rotated with the rotation of the spindle 201, and the grindstone 231a is lowered and rotated. The grindstone 231a to be brought into contact with the back surface W2 of the plate-like workpiece W, and the back surface W2 is ground. Here, finish grinding is performed.

  The plate-like workpiece W thus ground is moved to the vicinity of the second conveying means 13b by the rotation of the turntable 15, and is conveyed to the cleaning means 25 by the second conveying means 13b, where the grinding dust is removed. Later, it is accommodated in the cassette 100b by the loading / unloading means 11. Such grinding is sequentially performed on the plurality of plate-like workpieces W accommodated in the cassette 100a.

  After the grinding is finished, the plate-like workpiece W to which the protective tape T is stuck is taken out from the cassette 100b. And as shown in FIG. 4, the peeling tape 5 is affixed on the base material T1 of the protective tape T stuck to the plate-shaped workpiece W. As shown in FIG. The peeling tape 5 is composed of a base material 50 and an adhesive layer 51, and the adhesive layer 51 side is attached to the base material T1 of the protective tape T (peeling tape attaching process).

  Then, as shown in FIG. 5, the protective tape T is peeled from the surface W <b> 1 of the plate-like workpiece W together with the peeling tape 5 by lifting the peeling tape 5 and turning up the protective tape T. The plate-like workpiece W from which the protective tape T has been peeled off is accommodated in a predetermined stage of the cassette 100b shown in FIG. 1, and is transferred to the next step together with the cassette (protective tape peeling step).

  As shown in FIG. 6, when there is a corresponding trace 30 such as a line in the adhesive T <b> 2 of the peeled protective tape T, the position facing the corresponding trace 30 in the plate-like workpiece W during grinding. When the crack 31 is generated, and the crack 31 is generated, it can be determined that the corresponding mark 30 corresponding to the crack is also transferred to the adhesive T2. In this way, the presence and location of the crack 31 can be specified based on the correspondence trace 30.

  On the other hand, even if cracks have occurred in the plate-like workpiece W, if the adhesive T2 has no corresponding trace corresponding to the cracks, it is a crack that has occurred during conveyance after peeling of the protective tape T, for example, other than during grinding. It can be judged that there is.

  Moreover, as shown in FIG. 6, when the crack 31 was produced in the plate-shaped workpiece W and the corresponding trace 30 was formed in the adhesive T2 of the protective tape T, it was formed in the adhesive T2. The cause of the crack can also be determined according to the shape of the corresponding mark 30. For example, when the corresponding trace 30 has a concave shape, dust such as grinding dust is mixed in that portion, and a force is partially applied to the plate-like workpiece W from the dust during grinding due to the crack 31. It can be judged that there is. On the other hand, when the corresponding trace 30 has a convex shape, it can be determined that the adhesive T2 has entered the cracked portion of the plate-like workpiece W and the crack has progressed.

  Since the peeling tape 5 remains adhered to the protective tape T even after the protective tape T is peeled off from the plate-like workpiece W, as shown in FIG. , 60 becomes an identification mark of the protective tape T. As the mark 60, for example, a bar code can be used, the number of the cassette 100b (see FIG. 1) in which the plate-like workpiece W adhered to the protective tape T is accommodated, the number of accommodating stages in the cassette 100b, By including information such as date and time in the barcode, the correspondence between the protective tape T and the plate-like workpiece W can be managed. If a crack is found in the plate-like workpiece W after grinding, the corresponding protective tape T is found from the cassette and stage number in which the plate-like workpiece is accommodated and using the mark 60 attached to the peeling tape 5 as an index. By looking at the state of the corresponding marks formed on the adhesive T2 of the protective tape T, the cause of the crack of the plate-like workpiece W can be investigated.

  Further, as shown in FIG. 8, the protective tape T may be marked 61. In this case as well, when a crack is found in the plate-like workpiece W after grinding, the corresponding protective tape T corresponding to the mark 61 affixed to the protective tape T as an index from the cassette and the number of stages in which the plate-like workpiece is accommodated. The cause of the crack of the plate-like workpiece W can be investigated by finding the state of the corresponding trace formed on the adhesive T2 of the protective tape T.

  Note that the marks 60 and 61 in the examples of FIGS. 7 and 8 are barcodes, but the method of displaying the marks is not limited to this.

  In addition, even when the peeling tape 5 or the protective tape T is not marked, the protective tape peeled off from the plate-like workpiece was placed on the plate-like workpiece W and stuck to it in the order of peeling. Management can be performed in a state where the correspondence with the protective tape T is clear. For example, as shown in FIG. 9, when the plate-like workpieces Wa, Wb, Wc,... Are accommodated in order from the upper stage of the cassette 100b, the protective tape Ta attached to the plate-like workpiece Wa, The protective tape Tb attached to the plate-like workpiece Wb, the protective tape Tc attached to the plate-like workpiece Wc,... Since it can grasp | ascertained whether it was affixed, the presence or absence of a crack of a plate-shaped workpiece, a place, and a cause can be investigated.

W: plate-like workpiece W1: surface D: device S: street W2: back surface T: protective tape T1: base material T2: adhesive 30: corresponding trace 31: crack 5: peeling tape 50: base material 51: adhesive layer 60 61: Mark 1: Grinding device 3a: First grinding means 3b: Second grinding means 10a, 10b: Cassette mounting area 100a, 100b: Wafer cassette 11: Loading / unloading means 12: Positioning table 13a: First Conveying means 13b: second conveying means 14a, 14b, 14c: holding means 140: holding part 15: turntable 16: wall part 17: first grinding feed means 170: guide rail 171: ball screw 172: motor 173: Lifting part 18: Second grinding feed means 180: Guide rail 181: Ball screw 182: Motor 183: Lifting part 3a: First grinding means 3 : Second grinding means 190, 191: spindle housing 200, 201: spindle 200a, 201a: Motor 210, 211: wheel mounts 230 and 231: grinding wheels 230a, 231a: grindstone 25: cleaning means

Claims (4)

A grinding device comprising at least holding means for holding a protective tape attached to one surface of a plate-like workpiece and grinding means for grinding the other surface of the plate-like workpiece held by the holding means. Use
A peeling tape affixing step for affixing a peeling tape to the protective tape affixed to the plate workpiece ground by the grinding device;
A protective tape peeling step for peeling the protective tape from the plate workpiece together with the peeling tape;
At least,
A work crack judgment method for judging a location where the plate-like work is broken or a cause of the crack of the plate-like work by a concavo-convex shape transferred to the adhesive of the protective tape attached to the plate-like work.   Claim 1 to investigate the cause of cracking of the plate-shaped workpiece by marking the stripping tape and managing the correspondence between the plate-shaped workpiece and the protective tape peeled from the plate-shaped workpiece. The work crack judgment method described.   The mark on the protective tape, and managing the relationship between the plate-shaped workpiece and the protective tape peeled off from the plate-shaped workpiece, to determine the cause of the crack of the plate-shaped workpiece. How to crack a workpiece.   By superposing the protective tapes peeled off from the plate-like workpieces in the order of peeling, by managing the relationship between the plate-like workpieces and the protective tape peeled off from the plate-like workpieces, the plate-like workpieces are cracked. 2. The work crack judgment method according to claim 1, wherein the cause is investigated.

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