JP2013121917A - Burning setter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a burning setter which can suppress the deterioration of the performance of an object such as piezoelectric ceramics, and can also suppress the deterioration of the quality of a placing face.SOLUTION: The burning setter 1 is formed of a ceramic calcined body having the placing face 10 on which the object 100, formed of a ceramic molded body, to be calcined is placed. The burning setter 1 has a salient protrusion engagement part 2 formed at the side of the placing face 10, and a recess 3 formed at the rear face 12 of the burning setter 1 so as to correspond to the protrusion engagement part 2. The setter is constituted so as to be laminated in a plurality of pieces in the vertical direction by the engagement of the protrusion engagement part 2 of one burning setter 1 and the recess 3 of another burning setter 1 located above the one burning setter 1. The ceramic burnt body uses a cerium oxide as a base material. The cerium oxide is reduced in chemical reaction performance with the object placed on the placing face 10.

Description

  The present invention relates to a setter for firing that is used when an object such as a ceramic-based electronic material component is placed and fired.

The prior art will be described by taking the firing of piezoelectric ceramics as an example. Piezoelectric ceramics using PZT (PbZrTiO ₃ ) or the like as a raw material are formed as follows. That is, the raw material powder is molded to form an object made of an unfired ceramic molded body, and the unfired object is placed on the placement surface of the firing setter. And the setter for baking which mounted the target object is inserted into a baking furnace, and it heats and hold | maintains for a predetermined time at baking temperature (for example, 800-1400 degreeC). Thereby, the piezoelectric ceramic is manufactured. The firing setter described above is formed of a fired ceramic body having a mounting surface on which an object made of an unfired ceramic molded body is placed.

  In the industry, when firing the above-mentioned target piezoelectric ceramics, the firing temperature at which the piezoelectric ceramics are fired is quite high, so diffusion and reaction between the target piezoelectric ceramics and the setter mounting surface. May occur. In this case, there is a possibility that the performance of the piezoelectric ceramic that is the object is lowered. Furthermore, the setting surface of the setter may be deteriorated.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a firing setter that can suppress a decrease in performance of an object such as piezoelectric ceramics and can also suppress deterioration of a mounting surface.

  The setter for firing according to the present invention is a setter for firing formed of a ceramic fired body having a mounting surface on which an object formed of an unfired or semi-fired ceramic molded body to be fired is placed. A convex protrusion engaging portion provided on the placement surface side, and a concave portion provided on the back surface side of the setter for firing corresponding to the protrusion engaging portion, A plurality of layers can be stacked in the vertical direction by engagement of the protruding engagement portion of the setter for firing and the concave portion of another setter for firing above the one setter for firing, and the ceramic firing The body is characterized in that it is based on cerium oxide. This cerium oxide has little chemical reactivity with the object mounted on the mounting surface. In particular, in an oxidizing atmosphere, there is little chemical reactivity with the object mounted on the mounting surface.

Since cerium oxide is used as the base material, the reactivity between the object such as piezoelectric ceramics and the setting surface of the setter for firing is reduced. Furthermore, the deterioration in the mounting surface of the setter for baking can also be suppressed.
In addition, the plurality of firing setters can be moved up and down in a state where an object is placed on the mounting surface by engagement of the convex projecting engagement portion of one firing setter and the recessed portion of the other firing setter. Can be stacked stably in the direction. Thus, if a plurality of firing setters are used one above the other, the upper firing setter is in a state where the space on the placement surface of the lower firing setter is capped, and the transpiration of the object is prevented. Can be suppressed.

It is sectional drawing which shows the principal part of the state which laminated | stacked the setter which concerns on Example 1. FIG. It is explanatory drawing which shows the measurement form of the average crystal grain diameter of a setter. It is sectional drawing which shows the principal part of the state which laminated | stacked the setter which concerns on Example 3. FIG. It is sectional drawing which shows the principal part of the state which shape | molds the compacting body of the setter which concerns on Example 5. FIG. It is sectional drawing which shows the state which laminated | stacked the setter which concerns on the reference example 1. FIG.

Cerium oxide has a melting point of 1950 ° C. or higher, is chemically stable, and is extremely stable even in an oxidizing atmosphere. Furthermore, the hardness is high. The cerium oxide is CeO ₂ , but Ce ₂ O ₃ may be contained. Here, when the cerium oxide is 100 mol%, CeO ₂ can be 90% or more, 95% or more, or 98% or more. When the entire setter is 100% by mass, the cerium oxide (CeO ₂ ) can be 80 to 100% by molar ratio. In a molar _{ratio, Al 2 O 3, Cr 2} O 3, Fe 3 O 4, CaO, MgO, Mn 3 O 4, La 2 O 3, Nd 2 O 3, SiO 2, B 2 O 3, ZrO 2, TiO ₂ , at least one of Y ₂ O ₃ may be contained in an amount of 0.1 to 30%. In this case, the above-described compound is expected to serve as a sintering aid, and the setter sinterability is ensured.

When the entire setter is 100% by mass, the cerium oxide (CeO ₂ ) can be 85 to 98% and 90 to 95% in molar ratio. In this case, Al ₂ O ₃ , Cr ₂ O ₃ , Fe ₃ O ₄ , CaO, MgO, Mn ₃ O ₄ , La ₂ O ₃ , Nd ₂ O are used in molar ratios depending on the properties required for the setter. ₃ , SiO ₂ , B ₂ O ₃ , ZrO ₂ , TiO ₂ , Y ₂ O ₃ with an upper limit of 25%, 20%, 15%, 10%, 5%, 3%, 2% Can be included.

  When the average crystal grain size on the placement surface is fine, the frequency of occurrence of crystal grain boundaries increases, and the exposed area and / or the probability of appearing of the crystal grain boundaries on the placement surface increases. Since the crystal grain boundary often has a composition other than cerium oxide, the reaction with the target object is promoted, and the components of the crystal grain boundary may diffuse into the target object, thereby reducing the original performance of the target object. is there. Here, the average crystal grain size on the mounting surface can be in the range of 10 to 300 micrometers. It can be in the range of 20-200 micrometers and in the range of 30-100 micrometers. Or it can be in the range of 50-300 micrometers, the range of 50-200 micrometers, and the range of 50-100 micrometers.

  Here, examples of the upper limit value of the average crystal grain size on the mounting surface include 300 micrometers, 200 micrometers, 100 micrometers, and 50 micrometers. Examples of the lower limit value of the average crystal grain size that can be combined with any of the above upper limit values include 10 micrometers, 20 micrometers, 30 micrometers, 40 micrometers, and 50 micrometers. The average crystal grain size can be adjusted by the composition of the starting material, the crystal grain size of the starting material, the firing temperature, and the like.

  The object to be placed on the placement surface may be oxide-based, nitride-based, carbide-based, or boride-based. The atmosphere at the time of firing the object can be appropriately washed, and examples thereof include an oxidizing atmosphere, a non-oxidizing atmosphere, and a vacuum atmosphere, but an oxidizing atmosphere is preferable.

[Reference Example 1]
Hereinafter, Reference Example 1 of the present invention will be described with reference to FIG. The firing setter 1 is a ceramic fired body having a flat plate shape having a placement surface 10 on which an object 100 formed of a ceramic molded body to be fired is placed and a back surface 12 facing away from the placement surface 10. And the thickness is in the range of 1 to 3 millimeters. The mounting surface 10 and the back surface 12 have a flat planar shape and are parallel to each other. The setter 1 for baking has the protrusion engaging part 2 which can be laminated | stacked. Using the projecting engagement portion 2, the setter 1 can be stacked in multiple stages by placing the object 100 on the placement surface 10. The setter 1 for firing is based on cerium oxide (CeO ₂ ), and the firing temperature when the setter compacted body is fired to form a setter sintered body is 1400 to 1600 ° C., particularly 1450 to 1550 ° C. It is. When the entire setter 1 for firing is 100% by mass, the cerium oxide (CeO ₂ ) is 99.90% or more by molar ratio. The mounting surface 10 and the back surface 12 are polished surfaces, but may be natural surfaces that are not polished.

  When the average crystal grain size on the mounting surface 10 is fine, the exposed area and / or the exposure probability that the crystal grain boundary appears on the mounting surface 10 increases. Since the crystal grain boundary often has a composition other than cerium oxide, the reaction with the target object 100 is promoted, the components of the crystal grain boundary diffuse into the target object, and the original performance of the target object 100 is reduced. There is a fear. Therefore, the average crystal grain size on the mounting surface 10 is set within a range of 10 to 300 micrometers. In particular, it is set within the range of 10 to 200 micrometers and within the range of 30 to 100 micrometers. Here, the upper limit value of the average crystal grain size on the mounting surface 10 is exemplified by 300 μm and 200 μm, and 100 μm and 50 μm, although it varies depending on the application of the setter 1 for firing. Is done. Examples of the lower limit of the average crystal grain size that can be combined with the above upper limit include 10 micrometers, 20 micrometers, 30 micrometers, 40 micrometers, and 50 micrometers. The average crystal grain size can be adjusted by the crystal grain size of the starting material, the firing temperature, and the like.

  As shown in FIG. 2, the average crystal grain size is defined as one diagonal line in an electron micrograph (SEM), the length of the diagonal line is L micrometers, and the particle diameter passing through the diagonal line is as follows. When the number was N, L / N was determined as an average crystal grain size micrometer.

  In use, the object 100 formed of an unfired ceramic molded body (PZT or the like) to be fired is placed on the placement surface 10 of the firing setter 1 in an air atmosphere (oxidizing atmosphere). The object 100 is fired by charging in a firing furnace.

(Test example)
A description will be given of test examples. First, 99.9 parts by mass of a cerium oxide (CeO ₂ ) powder, 1 part by mass of a dispersant (polycarboxylic acid type), 1 part by mass of an organic binder (PVA), and a solvent (distillation) Water) 20 parts by mass were prepared. These were kneaded by a ball mill for a predetermined time (6 hours) to form a slurry as a kneaded product. In this case, 1/3 of the mill capacity was used for the grinding balls.

Next, a spray dryer was used as a drier, granulation was performed at a slurry supply rate of 1 liter / hour, an atomizer speed of 10,000 rpm, an inlet temperature of heated air of 150 ° C., and an outlet temperature of heated air of 90 ° C. The granulated size averaged 50 micrometers. Next, the granulated particles are put into a mold cavity and pressed at room temperature (1 tonf / cm ² ) to form a plate-like compact (size: 130 mm × 130 mm × 2 mm). Formed. In this case, the projected shape of the mold cavity is 120 mm × 120 mm.

  Next, in an air atmosphere, the compacted body was degreased at a temperature of 20 ° C./hour from room temperature to 500 ° C. to remove the binder. Next, in an air atmosphere, the compacted body was heated to 500-1500 ° C. at 50 ° C./hour. Thereafter, the compacted body was heated and held at 1500 ° C. for 2 hours in an oxidizing atmosphere and fired to form a fired body. Thereafter, the fired body was cooled to near room temperature at 100 ° C./hour. The average crystal grain size on the mounting surface 10 of the setter 1 for firing was in the range of 10 to 50 micrometers.

Furthermore, as a comparative example, a setter 1 for firing was formed using zirconia (PSZ), which is considered to have higher chemical stability than conventional ones, as a base material. About the setter 1 for baking which concerns on the reference example 1, and the setter 1 for baking which concerns on a comparative example, the reactivity of the setter 1 for baking in the high temperature area | region and the target object 100 was measured. In the comparative example, the average crystal grain size on the mounting surface 10 of zirconia (PSZ) was 1 micrometer. Then, PZT is used as the object 100, and the object 100 (piezoelectric ceramics) is used at 1000 to 1200 ° C. for 5 hours in a state where the object 100 is placed on the placement surface 10 of the setter 1 for firing in an atmosphere-atmosphere firing furnace. Was fired. In Reference Example 1, even when the number of firings of the object 100 (piezoelectric ceramics) exceeded 10, the color of the mounting surface 10 of the firing setter 1 did not change. On the other hand, in the comparative example, when the number of firings exceeded 10, the color change of the mounting surface 10 of the firing setter 1 was recognized. Thereby, it turns out that the setter 1 for baking which concerns on this reference example has low reactivity. In this case, since the setter 1 for firing according to this reference example uses cerium oxide (CeO ₂ ) as a base material, even when the target object 100 is heated and fired in a high temperature region, Reactivity with the mounting surface 10 of the setter 1 for firing is reduced.

  Embodiment 1 of the present invention will be described below with reference to FIG. The present embodiment basically has the same configuration and function as Reference Example 1. The firing setter 1 includes a flat placing surface 10 on which an object 100 (for example, a PZT shaped body) formed of an unfired or semi-fired ceramic shaped body is placed, and a flat surface facing the placing surface 10. A rear surface 12. The firing setter 1 has a flat plate shape formed of a sintered ceramic body having a placement surface 10 on which the object 100 is placed, and a convex protruding engagement portion 2 provided on the placement surface 10. (Protrusion height in the stacking direction of the setter 1 for firing: H1) and a concave shape provided on the back surface 12 of the setter 1 for firing and engaged with the tip end portions of the projecting engaging portions 22 of the other setters 1 for firing. Part 3 (depth: M1). A plurality of projecting engaging portions 2 and recessed portions 3 are integrally formed on the firing setter 1 and are formed so as to be back to back with each other. A plurality of (at least three) protruding engaging portions 2 are formed on the edge of the firing setter 1 in the length direction. A plurality of (at least three) concave portions 3 are also formed on the edge of the setter 1 for firing in the length direction.

  As shown in FIG. 1, the plurality of firing setters 1 are moved up and down by the engagement of the projecting protrusion engaging portion 2 of one firing setter 1 and the recessed portion 3 of another firing setter 1. It can be stacked in the direction. And the some setter 1 for baking is laminated | stacked on the up-down direction in the state which mounted the target object 100, such as a PZT molded object, on the mounting surface 10 of the setter 1 for baking. And the target object 100 on the setter 1 for baking is heated to a high temperature area | region with the baking furnace which has an atmospheric condition, and is baked. As described above, by using a plurality of firing setters 1 stacked on top and bottom, the space 200 on the placement surface 10 of the lower firing setter 1 is covered with the upper firing setter 1. Since the object 100 is a closed space or close to a closed space, even if the object 100 is a ceramic molded body (for example, an unfired PZT molded body) containing an element that easily evaporates such as Pb, the amount of transpiration of the element is suppressed. The benefits are expected. That is, since the space 200 above the mounting surface 10 is narrow, the interior of the space 200 above the mounting surface 10 easily reaches a saturated vapor pressure due to slight evaporation from the object 100 when the object 100 is baked. Since the above transpiration is suppressed, the fired target object 100 (PZT) has a small composition change, which is advantageous for exhibiting good piezoelectric characteristics.

  In the present embodiment, the distal end portion of the projecting engagement portion 2 in the projecting direction (that is, the stacking direction of the firing setter 1) has a smaller cross-sectional area (that is, a cross-sectional area along the direction perpendicular to the stacking direction) toward the distal end. It is set to be. Specifically, the projecting engagement portion 2 has an outer wall surface 20 that is inclined so as to become narrower toward the distal end (upper end), and is provided with a convex roundness provided at the distal end of the outer wall surface 20. Part 21. The outer wall surface 20 has a shape along a conical shape or a pseudo-conical shape. The concave portion 3 includes a flat concave bottom surface 3x having a concave space having a circular shape in bottom view that can be engaged with the distal end portion of the projecting engagement portion 2 in the setter 1 for firing. It is formed to be back to back. In manufacturing the protruding engagement portion 22, a compacted body that becomes a setter main body having a portion that becomes the protruding engagement portion 2 may be integrally formed and then fired. Or the compacted body used as a setter main body and the compacted body used as the protrusion engagement part 2 may be separately formed beforehand, and both may be pressure-bonded integrally and then fired.

  Further, since the tip rounded portion 21 is formed at the tip of the projecting engagement portion 22, the contact area between the tip rounded portion 21 of the projecting engagement portion 2 and the other setter 1 for firing can be kept small. Therefore, even when the temperature of the firing process for firing the object 100 is quite high, and the projecting engagement portion 2 and the other setter 1 for firing are bound by heat, the firing is completed. Later, the projecting engagement portion 2 can be easily separated from the other setters 1 for firing.

  As shown in FIG. 1, since the inner diameter D1 of the concave portion is considerably larger than the outer diameter D2 of the tip rounded portion 21 formed at the tip of the projecting engagement portion 2, the tip rounded portion 21 is used as the setter 1 for firing. The position can be positively adjusted along the surface direction of the mounting surface 10 (two-dimensional direction including the X1 and X2 directions). In addition, according to the present Example, since the protrusion engaging part 2 and the recessed part 3 are formed back to back so as to face each other, the firing setter 1 is turned upside down and laminated as necessary. It can also be made.

Embodiment 2 of the present invention will be described below with reference to FIG. The present embodiment basically has the same configuration and operational effects as the first embodiment. The setter 1 for firing uses, as a base material, a ceramic fired body having a mounting surface 10 and a back surface 12 on which an object 100 formed of a ceramic molded body to be fired is placed. The base material is cerium oxide (CeO ₂ ). In a molar _{ratio, Al 2 O 3, Cr 2} O 3, Fe 3 O 4, CaO, MgO, Mn 3 O 4, La 2 O 3, Nd 2 O 3, SiO 2, B 2 O 3, ZrO 2, TiO ₂ and at least one of Y ₂ O ₃ is contained in an amount of 0.1 to 30%. A role can be expected as a sintering aid. The firing temperature when the setter compacted body is fired at a high temperature to form a setter sintered body is in the range of 1450 to 1550 ° C. When the entire setter 1 for firing is 100% by mass, the cerium oxide (CeO ₂ ) is 99.90% or more by molar ratio. The average crystal grain size on the mounting surface 10 can be the same as in Reference Example 1.

A third embodiment of the present invention will be described below with reference to FIG. The third embodiment has basically the same configuration and function as the first and second embodiments. The firing setter 1 has a flat sheet shape or a film shape, has flexibility, and a placement surface on which an object 100 formed of a ceramic molded body to be fired is placed. A ceramic fired body having 10 and a back surface 12 is used as a base material. The base material is cerium oxide (CeO ₂ ). As a sintering aid, a molar _{ratio, Al 2 O 3, Cr 2} O 3, Fe 3 O 4, CaO, MgO, Mn 3 O 4, La 2 O 3, Nd 2 O 3, SiO 2, B 2 O ₃ , ZrO ₂ , TiO ₂ , Y ₂ O ₃ at least one of 0.1 to 30% is included.

  The average crystal grain size on the mounting surface 10 can be the same as in Reference Example 1, and can be in the range of 2 to 30 micrometers, particularly in the range of 6 to 20 micrometers. The thickness t1 of the firing setter 1 is set to be thinner than the thickness t2 of the object 100. However, in some cases, the thickness t1 of the firing setter 1 is set to be thicker than the thickness t2 of the object 100. Naturally, the thickness t1 of the setter 1 for firing is larger than the average crystal grain size.

  In the vicinity of 700 to 1700 ° C., the thermal conductivity of the firing setter 1 is as low as 0.03 cal / cm · sec · ° C. or less, particularly 0.02 cal / cm · sec · ° C. or less. Thus, when the thermal conductivity of the firing setter 1 is low, if the firing setter 1 is thick, it takes time to equalize the firing setter 1, and the firing setter 1 is mounted during the temperature rising process. There is a possibility that temperature unevenness may occur on the mounting surface 10. In this case, when firing the object 100 placed on the placement surface 10 of the firing setter 1, temperature unevenness of the object 100 is induced, and there is a limit to further improving the quality of the object 100.

  Therefore, according to the present embodiment, the thickness of the setter 1 for firing is set thin within a range of 10 to 300 micrometers, within a range of 20 to 200 micrometers, and particularly within a range of 30 to 150 micrometers. . Such a firing setter 1 can be formed by reducing the gap between the tip of the blade and the slurry conveying surface by the doctor blade method. Since the setter 1 for firing is thin as described above, the material cost can be reduced. In addition, when the subject 100 is placed on the placement surface 10 of the setter 1 for firing and the subject 100 is fired, The temperature unevenness is easily suppressed, and thus the temperature unevenness of the object 100 is easily suppressed, and the quality of the object 100 can be further improved. Furthermore, since the setter 1 for baking is very thin, the setter 1 for baking has high flexibility. For this reason, it is effective to adhere the surface of the target object 100 and the mounting surface 10 of the setter 1 for baking while adapting to the shape of the target object 100. The thermal conductivity of the firing setter 1 can be adjusted by the composition, pore size, porosity, etc. of the firing setter 1, and the thermal conductivity of the firing setter 1 is about 0.005 cal / cm · It can also be made as low as sec.

  Embodiment 4 of the present invention will be described below with reference to FIGS. The present embodiment basically has the same configuration and effect as the first, second, and third embodiments. The object 100 to be fired on the flat mounting surface 10 of the firing setter 1 is oxide-based. In this case, when the object 100 is placed on the placement surface 10 of the firing setter 1 and fired, if the surface of the object 100 and the placement surface 10 of the firing setter 1 are in close contact, the object 100 is Contact with the air in the firing atmosphere is restricted, and there may be a portion of the object 100 that is deficient in oxygen. In this regard, according to the present embodiment, since the firing setter 1 has high oxygen ion conductivity in a high temperature region corresponding to the firing temperature of the object 100, diffusion of oxygen ions is expected in the firing setter 1. The part which becomes oxygen-deficient in the thing 100 is reduced. For this reason, it can contribute to raising the baking quality of the target object 100 which is an oxide type.

  Embodiment 5 of the present invention will be described below with reference to FIG. The present embodiment basically has the same configuration and effect as the first to fourth embodiments. The compacted body to be the setter 1 for firing is pressure-molded by the press die 40. The press die 40 includes a female die 42 having a molding cavity 41 and a male die 43 inserted into the molding cavity 41. Due to commercially available starting materials and the like, cerium oxides tend not to be dense. Therefore, the bottom surface 41a of the molding cavity 41 of the female mold 42 and the pressing surface 43a facing the bottom surface 41a of the male mold 43 are roughened to form an uneven rough surface. When the compacted body is pressure-molded, the air discharge performance is increased due to the unevenness, which is advantageous for increasing the compressibility and density ratio of the compacted body. As a result, the setter 1 for firing can be densified and fired. The strength of the setter 1 can be further increased. By adjusting the size of such irregularities, the pore size and / or the porosity of the firing setter 1 can be adjusted, and the thermal conductivity of the firing setter 1 can also be expected. Therefore, in the firing setter 1 in which the compacted body is fired, uneven portions 18 having a large number of uneven portions are formed on the mounting surface 10 and the back surface 12. The surface roughness of the concavo-convex portion 18 of the firing setter 1 can be 10 to 300 micrometers, 20 to 200 micrometers, or 20 to 100 micrometers in terms of Ra, although it depends on the thickness of the firing setter 1. The thickness of the setter 1 for baking can be about 1 to 10 millimeters and about 2 to 5 millimeters.

Example 6 will be described below. Since the present embodiment basically has the same configuration and operation effects as the above-described embodiments, the description will be given with reference to FIGS. Although cerium oxide is chemically extremely stable in an oxidizing atmosphere, its thermal shock resistance is not always sufficient. In addition, cerium oxide (CeO ₂ ) has a low specific resistance at 500 to 1900 ° C., and tends to be an electrical conductor. For this reason, while setting one electrode in the one end part of the setter 1 for baking and setting the other electrode in the other end part of the setter 1 for baking, it supplies with electricity between electrodes in an oxidizing atmosphere, and the setter for baking 1 can generate heat. For this reason, when setting the firing setter 1 on which the object 100 is placed in the firing furnace and firing the object 100, the firing setter 1 itself can be preheated to a predetermined temperature by energization heating. Can reduce thermal shock. The object 100 may be placed on the mounting surface 10 of the firing setter 1 preheated to a certain temperature and fired in a firing furnace having an oxidizing atmosphere. According to the literature (Sintered ceramics detailed 4, fine ceramics, page 548, Gihodo Shuppan, first printing on January 25, 1951), the specific resistance of the ceria pressure body is 5 × 10 at 500 ° C. in the air. ⁷ Ω · cm, and 240 Ω · cm at 1200 ° C.

Hereinafter, Example 7 will be described. Since the present embodiment basically has the same configuration and operation effects as the above-described embodiments, the description will be given with reference to FIGS. The setter 1 for firing according to the present embodiment is a porous body having a large number of pores. The porosity can be set as appropriate, but the volume ratio is 1 to 10%. When a compacted body based on CeO ₂ is fired near 1950 ° C. to form the setter 1 for firing, CeO ₂ may be partially dissociated to become Ce ₂ O ₃ and free oxygen. In this case, the escaped oxygen may cause pores. In this case, when the target object 100 is placed on the firing setter 1 and the target object 100 is fired, it can be expected to improve the exhaustability of the gas discharged from the target object 100 or the like.

  (Others) The present invention is not limited to the embodiments described above, and can be implemented with appropriate modifications within the scope not departing from the gist. For example, in the vicinity of 700 to 1700 ° C., the thermal conductivity of the firing setter 1 may be 0.01 cal / cm · sec · ° C. or less.

  In the figure, 1 is a setter for firing, 2 is a projecting engagement portion, 3 is a concave portion, 10 is a placement surface, 12 is a back surface, and 100 is an object.

Claims (4)

A firing setter formed of a ceramic fired body having a mounting surface on which an object formed of an unfired or semi-fired ceramic molded body on which a firing process is performed,
A convex protrusion engaging portion provided on the placement surface side, and a concave portion provided on the back surface side of the setter for baking corresponding to the protruding engagement portion; A plurality of vertically engaging layers can be stacked by engaging the protruding engagement portion of the setter with the concave portion of another setter for firing above the one setter for firing,
The ceramic fired body is made of cerium oxide as a base material. According to claim 1, in a molar _{ratio, Al 2 O 3, Cr 2} O 3, Fe 3 O 4, CaO, MgO, Mn 3 O 4, La 2 O 3, Nd 2 O 3, at least one of SiO ₂ A setter for firing comprising 0.1 to 30% of seeds.   The setter for firing according to claim 1 or 2, wherein the average crystal grain size on the mounting surface is in the range of 10 to 300 micrometers.   4. The firing setter according to claim 1, wherein the thermal conductivity is about 0.03 cal / cm · sec · ° C. or less in the vicinity of 700 to 1700 ° C. 5.

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