JP2013121622A - Method of manufacturing liquid-cooled jacket - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid-cooled jacket, configured to prevent deformation of a sealing body.SOLUTION: A sealing body 30 is placed on a support surface 15a which is formed in an opening periphery 12a of a recess 11 of a jacket body 10 and formed of a step difference bottom surface lower than the surface of the jacket body 10. A step difference side surface 15b of the jacket body 10 is brought into contact with an outer periphery 30b of the sealing body 30. A rotating tool 50 with an agitation pin 52 of a length L1 larger than the thickness T1 of the sealing body 30 is caused to make one revolution along an abutment part 40 between the step difference side surface 15b of the jacket body 10 and the outer periphery 30b of the sealing body 30, to form a plasticized region 41. When the sealing body 30 is welded to the jacket body 10, a cooling plate 70 in which a cooling medium flows is attached on the surface opposite the surface of the jacket body 10 where friction stir welding is performed. The rotating tool 50 is moved, while the jacket body 10 is cooled, to perform friction stir welding.

Description

  The present invention relates to a manufacturing method of a liquid cooling jacket configured by fixing a sealing body to an opening of a recess of a jacket body by friction stir welding.

  Friction stir welding (FSW = Friction Stir Welding) is known as a method for joining metal members. Friction stir welding is a technique in which metal members are fixed to each other by causing the metal at the abutting portion to plastically flow by frictional heat between the rotating tool and the metal member by moving the rotating tool along the abutting portion while rotating the rotating tool. Phase joining is performed.

  By the way, in recent years, as the performance of an electronic device typified by a personal computer is improved, the amount of heat generated by a CPU (heat generating body) to be mounted has increased, and cooling of the CPU has become increasingly important. Conventionally, air-cooled fan type heat sinks have been used to cool CPUs, but problems such as fan noise and cooling limit in air-cooled systems have come to be highlighted. The jacket is drawing attention.

  In such a liquid cooling jacket, Patent Document 1 discloses a technique in which constituent members are joined by friction stir welding. This liquid cooling jacket includes, for example, a jacket body having a fin housing chamber for housing metal fins, and a sealing body for sealing the fin housing chamber, and seals the peripheral wall of the jacket body surrounding the fin housing chamber. A liquid cooling jacket is manufactured by rotating the rotating tool around the abutting portion with the outer peripheral surface of the stationary body and performing friction stir welding. The sealing body is formed thinner than the jacket main body, and is placed on a support surface including a bottom surface of a step formed in the jacket main body. The rotating tool moves along the abutting portion so that the center thereof is located on the abutting portion, and joins the jacket body and the sealing body.

  By the way, as described above, when a thin sealing body is placed on the support surface of the jacket main body and the abutting portion is friction stir welded, the friction shrinking is performed from the surface of the jacket main body. Therefore, there is a problem that the sealing body warps and bends.

  Therefore, in order to solve such a problem, Patent Document 2 discloses a technique in which water is sprayed by a cooling nozzle to a place where friction stir welding is performed and a joint portion after friction stir welding is pressed with a roller. ing.

JP 2006-324647 A JP 2001-87871 A

  However, in the invention according to Patent Document 2, since water is injected to the place where friction stir welding is performed, water enters the friction stirrer, which may adversely affect the drive system and the like. In addition, since water is jetted to the joint portion, there is a problem that water is scattered around due to the rotation of the rotary tool, and water management becomes complicated.

  From such a viewpoint, an object of the present invention is to provide a method for manufacturing a liquid cooling jacket capable of easily suppressing deformation of a sealing body.

  As means for solving the above-mentioned problems, the present invention provides a seal for sealing the opening of the recess to the jacket main body having a recess as the heat transport fluid that transports the heat generated by the heat generator flows to the outside. In the manufacturing method of the liquid cooling jacket constituted by fixing the body by friction stir welding, on the support surface consisting of the step bottom surface formed at the peripheral edge of the opening of the recess of the jacket body and lowering the surface of the jacket body, Putting the sealing body, butting the stepped side surface of the jacket body and the outer peripheral surface of the sealing body, the rotary tool provided with a stirring pin having a length dimension larger than the thickness dimension of the sealing body, When the sealing body is joined to the jacket body by making a round along the abutting portion between the step side surface of the jacket body and the outer peripheral surface of the sealing body, the plastic body is formed. A cooling plate in which a cooling medium flows is attached to the surface opposite to the surface on which the friction stir welding of the ket body is performed, and the friction stir welding is performed by moving the rotating tool while cooling the jacket body. It is a manufacturing method of a liquid cooling jacket.

  According to such a method, since the stirring pin of the rotary tool is inserted into the jacket body from the support surface, the plasticized region enters into a deep portion inside the jacket body. As a result, stress due to thermal contraction in the plasticized region can be distributed to the jacket body, and deformation of the sealing body can be suppressed. Furthermore, since heat generated by friction stir welding can be absorbed by the cooling plate, thermal shrinkage of the plasticized region can be reduced, and deformation of the sealing body can be suppressed.

  And this invention is characterized by the width dimension of the said support surface being larger than the radial dimension of the shoulder part of the said rotation tool.

  According to such a method, the plasticizing region can be formed in the support surface when the rotary tool is moved directly above the abutting portion, and the pushing force of the rotary tool is reliably supported by the support surface. be able to.

  In the present invention, a flange having a surface flush with the support surface is formed inside the recess, and the rotating tool is moved along the flange on the surface of the sealing body. And forming a plasticized region, and bonding the sealing body to the flange portion.

  According to such a method, even when the concave portion has a large area, the jacket main body and the sealing body can be joined with the flange portion having the same surface as the supporting surface in the inner portion of the concave portion. Can be suppressed.

  Furthermore, the present invention is characterized in that a width dimension of the collar part is larger than a diameter dimension of a shoulder part of the rotary tool.

  According to such a method, since the plasticizing region can be formed in the buttock when the rotary tool is moved directly above the buttock, the pushing force of the rotary tool is reliably supported by the buttock. be able to.

  Further, the present invention is characterized in that the jacket body and the sealing body are made of aluminum or an aluminum alloy.

  According to such a method, the liquid cooling jacket can be reduced in weight and can be easily handled.

  Furthermore, the present invention is characterized in that the cooling flow path through which the cooling medium of the cooling plate flows is formed so as to have a planar shape at least along the movement locus of the rotary tool.

  According to such a method, the heat generated in the friction stir welding can be efficiently absorbed at a position close to the generation position, so that the effect of suppressing deformation of the sealing body is enhanced.

  Further, the present invention is characterized in that the cooling flow path through which the cooling medium of the cooling plate flows is constituted by a cooling pipe embedded in the cooling plate.

  According to such a method, it is possible to easily form a cooling flow path that allows the cooling medium to easily flow and does not leak.

  Furthermore, the present invention provides a friction stir by moving the rotating tool while cooling the jacket body and the sealing body by flowing a cooling medium inside the recess where the opening is sealed by the sealing body. It is characterized by performing bonding.

  According to such a method, since the heat of friction stir welding can be absorbed by the cooling medium without providing a cooling plate, the thermal shrinkage of the plasticized region can be reduced and the deformation of the sealing body is suppressed. And simplification of the machining process.

  Further, in the present invention, when the rotation tool is moved clockwise with respect to the opening, the rotation tool is rotated clockwise, and when the rotation tool is moved counterclockwise with respect to the opening, The rotation tool is rotated leftward.

  According to such a method, even if a cavity defect occurs, it occurs at a position away from the abutting portion and at a position away from the flow path of the heat transport fluid. Therefore, it is difficult for the heat transport fluid to leak from the flow path to the outside, and the sealing performance of the joint is not adversely affected.

  Further, in the present invention, after the rotating tool makes a round along the abutting portion, the rotating tool is shifted to the outer peripheral side of the plasticizing region formed in the first round, and the rotating tool is moved to the abutting portion. The outer peripheral side of the plasticized region is re-stirred by further making a round along the line.

  According to such a method, even if a cavity defect occurs in the first round, it is possible to reduce the cavity defect by stirring in the second round of movement, and in the unlikely event that a cavity defect occurs in the second round However, the heat transport fluid is less likely to leak to the outside, and the sealing performance of the joint is greatly improved because it occurs in a portion that is greatly separated from the abutting portion between the opening peripheral edge of the jacket body and the peripheral edge of the sealing body. Can do.

  Further, the present invention is characterized in that, prior to the step of forming the plasticized region with the rotary tool, a part of the abutting portion is temporarily joined using a rotary tool for temporary joining smaller than the rotary tool. And

  According to such a method, by temporarily joining the jacket body and the sealing body, the sealing body does not move during friction stir welding (hereinafter sometimes referred to as “main joining”). And it becomes easy to join and the positioning accuracy of a sealing body improves. Further, since the temporary welding rotary tool is smaller than the main welding rotary tool, the main welding can be completed only by moving the main welding rotary tool on the temporary bonding portion and performing frictional stirring.

  Further, according to the present invention, the abutting portion has a rectangular frame shape, and in the step of temporarily joining the abutting portion with the temporary joining rotary tool, one diagonal of the abutting portion is temporarily joined first. Later, the other diagonals are temporarily joined together.

  Further, according to the present invention, the abutting portion has a rectangular frame shape, and in the step of temporarily joining the abutting portion with the temporary joining rotary tool, an intermediate portion of one opposite side of the abutting portion is temporarily placed. After joining, the intermediate part of the other opposite side is temporarily joined.

  According to such a method, the sealing body can be temporarily joined with a good balance, and the positioning accuracy of the sealing body with respect to the jacket body is improved.

  According to this invention, the outstanding effect that the deformation | transformation of a sealing body can be suppressed easily is exhibited.

It is the disassembled perspective view which showed the liquid cooling jacket which concerns on 1st Embodiment of this invention. It is the perspective view which showed the sealing body of the liquid cooling jacket which concerns on 1st Embodiment of this invention from diagonally downward. It is a figure for demonstrating the manufacturing method of the liquid cooling jacket which concerns on 1st Embodiment of this invention, Comprising: (a) is sectional drawing which showed the friction stirring joining process of the 1st round, (b) is the 2nd round. It is sectional drawing which showed the friction stir welding process. It is a figure for demonstrating the manufacturing method of the liquid cooling jacket which concerns on 1st Embodiment of this invention, Comprising: It is sectional drawing which showed the friction stir welding process in a collar part. It is a figure for demonstrating the friction stirring process of the manufacturing method of the liquid cooling jacket which concerns on 1st Embodiment of this invention, Comprising: (a) is the top view which showed the temporary joining process, (b) is this joining process. It is the shown top view. (A), (b) is a figure for demonstrating the friction stirring process of the manufacturing method of the liquid cooling jacket which concerns on 1st Embodiment of this invention, Comprising: The friction stirring process (main joining process) following FIG. It is the top view which showed. (A), (b) is a figure for demonstrating the friction stirring process of the manufacturing method of the liquid cooling jacket which concerns on 1st Embodiment of this invention, Comprising: The top view which showed the friction stirring process following FIG. It is. It is the figure which showed the cooling plate used with the manufacturing method of the liquid cooling jacket which concerns on 2nd Embodiment of this invention, Comprising: (a) is a use condition, (b) is the perspective view which showed the exploded perspective view. It is a figure for demonstrating the friction stirring process of the manufacturing method of the liquid cooling jacket which concerns on 3rd Embodiment of this invention, Comprising: (a) is the top view which showed the temporary joining process, (b) is this joining process. It is the shown top view.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings as appropriate.

  First, the liquid cooling jacket formed by the method for manufacturing a liquid cooling jacket according to the present invention will be described. The liquid cooling jacket is a component of a cooling system mounted on an electronic device such as a personal computer, for example, and is a component that cools a CPU (heat generating body) and the like. The liquid cooling system includes a liquid cooling jacket in which a CPU is mounted at a predetermined position, a radiator (heat dissipating means) that discharges heat transported by cooling water (heat transport fluid) to the outside, and a micropump (heat transport) that circulates the cooling water. Fluid supply means), a reserve tank that absorbs expansion / contraction of cooling water due to temperature change, a flexible tube that connects these, and cooling water that transports heat. The cooling water is a heat transport fluid that transports heat generated by a CPU (not shown), which is a heat generator, to the outside. For example, an ethylene glycol antifreeze is used as the cooling water. And if a micropump act | operates, cooling water will circulate through these apparatuses.

  As shown in FIG. 1, a liquid cooling jacket 1 is a sealing body that seals an opening 12 of a recess 11 in a jacket body 10 having a recess 11 that is partially opened while cooling water (not shown) flows. 30 is fixed by friction stir welding (see FIGS. 5 to 7).

  The liquid cooling jacket 1 is configured such that a CPU (not shown) is attached to the lower center of the liquid cooling jacket 1 via a heat diffusion sheet (not shown), and receives the heat generated by the CPU. Heat exchange with the circulating water. Thereby, the liquid cooling jacket 1 transmits the heat received from the CPU to the cooling water, and as a result, the CPU is efficiently cooled. The heat diffusion sheet is a sheet for efficiently transferring the heat of the CPU to the jacket body 10 and is formed of a metal having high thermal conductivity such as copper, for example.

  The jacket main body 10 is a shallow box body that is open on one side (in this embodiment, the upper side in FIG. 1), and has a rectangular shape in plan view in this embodiment. The jacket main body 10 is formed with a recess 11 having an opening at the inside thereof, and has a bottom wall 13 and a peripheral wall 14 of the recess 11. Such a jacket main body 10 is produced by die casting, casting, forging or the like, for example. The jacket body 10 is formed from aluminum or an aluminum alloy. Thereby, the liquid cooling jacket 1 has been reduced in weight and is easy to handle.

  The opening 12 of the concave portion 11 of the jacket body 10 has a substantially rectangular shape with four corners chamfered in an arc shape. A support surface 15 a is formed on the opening peripheral edge 12 a of the concave portion 11 of the jacket body 10, which is a stepped bottom surface that is lowered by one step on the bottom surface side of the concave portion 11. In the present embodiment, the flange portion 17 is formed in the recess portion 11. However, it is described that the opening portion 12 of the recess portion 11 has a substantially rectangular shape, assuming that the flange portion 17 is also a part of the recess portion 11. Moreover, the opening peripheral part 12a of the recessed part 11 is taken as the peripheral part of the recessed part 11 also including the collar part 17. FIG.

  As shown in FIG. 3A, the height difference dimension H <b> 1 between the upper surface of the jacket body 10 and the support surface 15 a is the same length as the thickness dimension T <b> 1 of the sealing body 30. The support surface 15a is a surface which supports the sealing body 30, Comprising: The peripheral part 30a of the sealing body 30 is mounted on the support surface 15a. Further, the width W1 of the support surface 15a (the width of the portion on which the peripheral edge 30a of the sealing body 30 is placed) dimension W1 is set larger than the radial dimension R2 of the shoulder 51 of the rotary tool 50 used for friction stir welding. Has been.

  As shown in FIG. 1, the peripheral wall 14 around the recess 11 includes a pair of wall portions 14 a and 14 b positioned at both ends in the longitudinal direction (X-axis direction in FIG. 1) of the jacket body 10, and a short direction (see FIG. 1). 1 and a pair of wall portions 14c and 14d located at both ends in the Y-axis direction). The pair of wall portions 14a and 14b both extend in the Y-axis direction and are formed in parallel to each other with a predetermined distance in the X-axis direction. The pair of wall portions 14c and 14d both extend in the X-axis direction and are formed in parallel to each other at a predetermined distance in the Y-axis direction.

  A flange portion 17 is formed inside the recess 11. The flange portion 17 is configured by a wall body raised from the bottom wall 13 of the recess 11. The height of the flange portion 17 from the bottom wall 13 is the same as the height of the support surface 15a from the bottom wall 13. That is, the upper end surface (surface of the flange portion 17) 17 a of the flange portion 17 is flush with the support surface 15 a formed on the opening peripheral edge portion 12 a of the recess 11. The flange portion 17 extends from the central portion of the length in the Y-axis direction of the inner wall surface (the inner peripheral side surface on the concave portion 11 side) of one of the wall portions 14a and 14b toward the other wall portion 14b. Extending in the X-axis direction. The distal end of the flange portion 17 in the extending direction (X-axis direction) is separated from the inner wall surface (the inner peripheral side surface on the concave portion 11 side) of the wall portion 14b by a predetermined distance, and the distal end of the flange portion 17 and the inner wall portion 14b A space through which the coolant flows is formed between the wall surfaces. That is, by forming the flange portion 17 inside the recess 11, a U-shaped groove (substantially recessed portion) is formed in a plan view, and the coolant flows along this U-shape. Through holes 16 and 16 are formed in the wall portions 14a located at both ends of the U-shaped channel in a plan view, respectively, for allowing cooling water to flow through the recess 11. In the present embodiment, the through holes 16, 16 extend in the X-axis direction, have a circular cross section, and are formed in the intermediate portion in the depth direction of the recess 11. In addition, the shape, number, and formation position of the through-hole 16 are not restricted to this, It can change suitably according to the kind and flow volume of cooling water.

  As shown in FIGS. 1 and 2, the sealing body 30 has an outer peripheral shape having the same shape as the step side surface 15b (see FIG. 1) of the jacket body 10 (in this embodiment, a substantially rectangular shape with four corners chamfered in an arc shape). And a plurality of fins 32, 32... Provided on the lower surface of the lid plate portion 31.

  The fins 32 are provided to increase the surface area of the sealing body 30. The plurality of fins 32, 32... Are arranged parallel to each other and orthogonal to the lid plate portion 31, and are configured integrally with the lid plate portion 31. Thereby, heat is transmitted favorably between the cover plate portion 31 and the fins 32, 32. As shown in FIG. 1, the fins 32, 32... Are arranged so as to extend in a direction (X-axis direction in FIG. 1) orthogonal to the wall portion 14a of the peripheral wall 14 in which the through holes 16, 16 are formed. ing. Since the collar part 17 is located in the center part of the Y-axis direction of the cover board part 31 at the time of mounting to the jacket main body 10, the fin is not provided. The fin 32 has a height (depth) dimension (length in the Z-axis direction in FIG. 1) equivalent to the depth dimension of the recess 11, and the tip thereof has a bottom surface (the bottom wall 13 of the bottom wall 13). The surface). Thus, in a state where the sealing body 30 is attached to the jacket body 10, a cylindrical space is partitioned by the cover plate portion 31 of the sealing body 30, the adjacent fins 32 and 32, and the bottom surface of the recess 11. The space functions as a flow path 33 (see FIG. 5A) through which cooling water flows.

  Further, the fins 32, 32... Have a length dimension (length in the X-axis direction in FIG. 1) shorter than the extension length dimension of the flange portion 17, and one end thereof (the wall portion 14a side) is The inner wall surface of the wall portion 14a is separated from the inner wall surface by a predetermined distance. A space between one end of the fins 32, 32... And the wall 14a is a flow path header section 34 (see FIG. 5) that connects the flow path 33 defined by the fins 32, 32 and the through hole 16. (See (a)). Further, the other end (on the wall 14b side) of the fins 32, 32... Is located at a portion corresponding to the tip of the flange part 17, and the other end of the fins 32, 32. The space between the wall portion 14b constitutes a communication flow channel 35 (see FIG. 5A) that connects the flow channels 33, 33 located on both sides of the flange portion 17.

  The sealing body 30 is also made of aluminum or an aluminum alloy, like the jacket body 10. Thereby, the liquid cooling jacket 1 has been reduced in weight and is easy to handle. The sealing body 30 is manufactured by forming a cover plate portion 31 and fins 32 by cutting a block formed of aluminum or an aluminum alloy. Note that the manufacturing method is not limited to this, and for example, it may be manufactured by die casting, casting, forging, or the like, or a member having a cross-sectional shape composed of a lid plate portion 31 and a plurality of fins 32, 32. May be formed by extruding or grooving and removing both ends of the fin 32.

  Next, a method for fixing the sealing body 30 to the jacket body 10 by friction stir welding will be described with reference to FIGS.

  First, as shown in FIG. 5A, the sealing body 30 is inserted into the concave portion 11 of the jacket body 10 with the fins 32 on the lower side, and the peripheral portion 30 a of the sealing body 30 is moved. Then, it is placed on the support surface 15a. Then, the step side surface 15b of the jacket main body 10 and the outer peripheral surface 30b of the sealing body 30 are abutted to form the abutting portion 40.

  By the way, in this embodiment, a part of the abutting portion 40 between the jacket body 10 and the sealing body 30 prior to the step of performing the main joining (forming the plasticized region 41) with the rotary tool 50 shown in FIG. Are temporarily joined using a rotary tool 60 for temporary joining which is smaller than the rotary tool 50 (only the planar shape is shown in FIG. 5A).

  The temporary bonding rotary tool 60 includes a shoulder portion and a stirring pin (not shown) that are smaller in diameter than the rotary tool 50, and the plasticizing region 45 formed by the temporary bonding rotary tool 60 is a later process. Thus, the width of the plasticized region 41 (see FIG. 5B) formed by the rotary tool 50 is smaller. And the plasticization area | region 45 is formed in the position (The position where the center of the width direction of the plasticization area | region 45 becomes the butt | matching part 40) which does not protrude from the position where the plasticization area | region 41 is formed in a next process. Is done. As a result, the plasticizing region 45 in the temporary joining is completely covered with the plasticizing region 41, so that the trace of the extraction of the temporary joining rotary tool 60 remaining in the plasticizing region 45 and the trace of the plasticizing region 45 are present. Does not remain.

  In the present embodiment, the abutting portion 40 has a substantially rectangular shape (rectangular frame shape) with four corners chamfered in an arc shape. In the step of temporarily joining the abutting portion 40 with the temporary joining rotary tool 60, after diagonally joining the one chamfered diagonals 44a and 44b of the abutting portion 40 first, the other chamfered diagonal 44c, 44d is temporarily joined. By temporarily joining in such an order, the sealing body 30 can be temporarily joined to the jacket body 10 in a well-balanced manner, and the positioning accuracy of the sealing body 30 with respect to the jacket body 10 is improved. Deformation can be prevented. In addition, after temporarily joining with each diagonal 44a, 44b, 44c, and 44d, when the rotary tool 60 for temporary joining is extracted, the extraction trace 61 (refer FIG.5 (b)) remains, but it leaves in this embodiment. Keep it.

  Next, the main joining with the rotary tool 50 is performed. In this step, first, as shown in FIG. 5B, after inserting the rotary tool 50 for friction stir welding while rotating it to the insertion position 53, it is moved onto the abutting portion 40, and this abutting portion 40. Move along. At this time, it is preferable that a jig (not shown) surrounding the jacket body 10 from four directions is applied in advance to the outer peripheral surface of the peripheral wall 14 of the jacket body 10. According to this, the thickness of the peripheral wall 14 is thin, and the distance (gap) between the outer peripheral surface of the shoulder 51 (see FIG. 3A) of the rotary tool 50 and the outer peripheral surface of the peripheral wall 14 is, for example, 2 Even if it is 0.0 mm or less, the peripheral wall 14 is hardly deformed to the outside by the pushing force of the rotary tool 50. In addition, when the thickness of the surrounding wall 14 is thick, the said jig | tool does not need to be installed.

  The rotary tool 50 is made of a metal material that is harder than the jacket body 10 and the sealing body 30, and has a columnar shoulder 51 and a lower end surface of the shoulder 51, as shown in FIG. A projecting stirring pin (probe) 52 is provided. The dimensions and shape of the rotary tool 50 are set according to the material and thickness of the jacket body 10 and the sealing body 30. In the present embodiment, the stirring pin 52 has a truncated cone shape with a reduced diameter at the lower portion, and the protruding length dimension L1 is equal to or greater than the thickness dimension T1 of the lid plate portion 31 of the sealing body 30. . At the time of friction stir welding, the tip of the shoulder portion 51 of the rotary tool 50 is pushed a predetermined depth from the surfaces of the jacket body 10 and the sealing body 30, and the tip of the stirring pin 52 penetrates the support surface 15a. Further, the radial dimension R2 of the shoulder portion 51 is smaller than the width dimension H1 of the support surface 15a. The rotational speed of the rotary tool 50 is 500 to 15000 (rpm), the feed rate is 0.05 to 2 (m / min), and the pushing force for pressing the abutting portion 40 is about 1 to 20 (kN). The sealing body 30 is appropriately selected according to the material, plate thickness, and shape.

  Hereinafter, the movement of the rotary tool 50 will be specifically described. First, the rotary tool 50 is inserted into the insertion position 53 while rotating. As shown in FIG. 5B, the insertion position 53 of the rotary tool 50 is the upper surface of the peripheral wall 14 that is outside the abutting portion 40. A pilot hole (not shown) may be formed in advance at the insertion position 53 of the rotary tool 50. If it does in this way, the insertion time (pressing time) of the rotation tool 50 can be shortened.

  Thereafter, the rotary tool 50 is moved while being rotated from the insertion position 53 to a position directly above the abutting portion 40 (a position where the axis of the rotating tool 50 is on the abutting portion 40). When the rotary tool 50 has moved to a position directly above the abutting portion 40, the moving direction is changed so that the center (axial center) of the rotating tool 50 moves along the abutting portion 40, and the rotating tool 50 is moved. At this time, the rotary tool 50 is positioned so that the sealing body 30 is positioned on the flow side 50a where the rotary tool 50 rotates in the direction opposite to the moving direction of the rotary tool 50 (see arrow Y1 in FIGS. 5 and 6). Rotate and move Specifically, the rotation direction (spinning direction) of the rotary tool 50 in the abutting portion 40 is set to be the same direction as the moving direction (revolution direction). That is, in the present embodiment, as shown in FIG. 5B, the rotation tool 50 is moved clockwise with respect to the opening 12 of the recess 11 (see FIG. 5A). The tool 50 is rotated clockwise (see arrow Y2 in FIGS. 5 and 6). When the rotary tool 50 is moved counterclockwise with respect to the opening 12 of the recess 11, the rotary tool 50 is rotated counterclockwise.

  By doing in this way, the relative speed of the outer periphery of the rotary tool 50 with respect to the sealing body 30 is a value obtained by subtracting the magnitude of the moving speed from the magnitude of the tangential speed on the outer periphery of the rotary tool 50 (sealing body). 30 is the flow side 50a), the speed is lower than the shear side 50b in which the rotary tool 50 rotates in the same direction as the moving direction of the rotary tool 50. As a result, a cavity defect hardly occurs on the sealing body 30 side. Moreover, since the shear side 50b is located in the thick part of the jacket main body 10 near the outer side of the abutting part 40, it does not fall into a metal shortage.

  At this time, as shown in FIG. 3A, the stirring pin 52 of the rotary tool 50 has a length dimension L1 longer than the thickness dimension T1 of the sealing body 30. The leading end penetrates through the support surface 15 a and enters the inner side of the jacket body 10. As a result, the distal end portion (lower end portion) of the plasticizing region 41 formed by the rotary tool 50 is formed so as to penetrate deeply into the inner side of the jacket main body 10. Here, the “plasticization region” includes both a state in which the rotary tool 50 is heated by frictional heat and is actually plasticized, and a state in which the rotary tool 50 passes and returns to room temperature.

  Then, the rotation tool 50 continues to rotate and move, and as shown in FIG. 6A, the rotation tool 50 is rotated around the opening portion 12 along the abutting portion 40 to form the plasticized region 41. Form. After rotating the rotary tool 50 once, the rotary tool along the start end including the start end 54a of the first turn (a portion from the start end 54a to a position advanced by a predetermined length in the moving direction of the rotary tool 50 (the same position as the end end 54b)). 50 is moved by a predetermined length. Accordingly, the start end 54a and the end end 54b in the circumferential movement of the rotary tool 50 overlap each other, and a part of the plasticizing region 41 is configured to overlap.

  Then, as shown in FIG. 6B, after the movement of the first round of the rotary tool 50 is completed, the rotary tool 50 is further rotated once to be referred to as a plasticization region (hereinafter referred to as “second plasticization region”). 43). In the second round, the rotary tool 50 is shifted to the outer peripheral side of the plasticizing region 41 formed by the movement in the first round from the end 54b of the first round.

  At this time, the shift of the rotary tool 50 moves diagonally so as to move outward in the moving direction, and the inner end of the second movement trajectory (plasticization region 43) of the rotary tool 50 The first movement trajectory (plasticization region 41) is located on the center line (butting portion 40) or slightly outside the center line. Thereafter, as shown in FIG. 6B, the rotary tool 50 moves in parallel while maintaining a certain positional relationship with the movement locus (plasticization region 41) of the first round. Therefore, the outer peripheral side portion of the movement track of the first round is re-stirred by the movement of the second round of the rotary tool 50 (see FIGS. 6 and 7). As a result, even if a cavity defect occurs in the outer peripheral side portion of the plasticized region 41 that becomes the shear side 50b of the rotary tool 50, the cavity defect is eliminated because it is re-stirred.

  Further, since the shear side 50b of the rotary tool 50 in the second movement is located in the thick part of the jacket body 10 near the outside of the abutting part 40, there is no shortage of metal. Furthermore, even if a cavity defect occurs, there is no problem because the position is away from the abutting portion 40. Here, the second round movement of the rotary tool 50 is the same as the first round rotation direction, rotation speed, movement direction, movement speed, and pushing amount (see arrows Y3 and Y4 in FIGS. 6 and 7). . Note that the rotation speed, movement speed, push-in amount, and the like of the second rotation tool 50 may be changed as appropriate according to the shape and material of the jacket body 10 and the sealing body 30.

  Furthermore, at this time, as shown in FIG. 3B, the stirring pin 52 of the rotary tool 50 has a length dimension L1 (see FIG. 3A) that is a thickness dimension T1 of the sealing body 30. Since the length is longer than that (see (a) of FIG. 3), the tip of the stirring pin 52 enters the inner side of the jacket body 10. As a result, the distal end portion (lower end portion) of the second plasticizing region 43 formed by the second movement of the rotary tool 50 is formed so as to penetrate deeply into the interior of the jacket body 10.

  Then, as shown in FIG. 6A, when the circumferential movement of the rotary tool 50 is completed, the rotary tool 50 is moved to the upper surface of the peripheral wall 14 outside the plasticizing region 43, and the position At the (drawing position 55), the rotary tool 50 is pulled out. In this way, the extraction position 55 of the rotary tool 50 is located outside the abutting portion 40, so that the extraction trace (not shown) of the stirring pin 52 (see FIG. 4A) abuts. The portion 40 is not formed. Thereby, the joining property of the jacket main body 10 and the sealing body 30 can further be improved. In addition, you may make it repair the drawing trace of the upper surface of the surrounding wall 14 by processing, such as filling a weld metal.

  Thereafter, using the same rotary tool 50, the flange portion 17 and the sealing body 30 are joined by friction stir welding. In this step, as shown in FIG. 7B, the rotary tool 50 is inserted into the insertion position 56 at the distal end portion of the collar portion 17 while rotating. A pilot hole (not shown) may be formed in advance at the insertion position 56 of the rotary tool 50. If it does in this way, the insertion time (pressing time) of the rotation tool 50 can be shortened.

  The rotating tool 50 is moved from the insertion position 56 to the outside of the abutting portion 40 while being rotated along the flange portion 17 to form the plasticized region 49. When the rotation of the rotary tool 50 advances and frictional stirring is performed up to the inner peripheral side end of the plasticizing region 41, the rotary tool 50 enters the plasticizing region 41 as it is, and then continues from the plasticizing region 41 to the second plasticizing region 43. Move to. Thereafter, the rotary tool 50 is moved from the outer peripheral side end of the second plasticizing region 43 to the upper surface of the peripheral wall 14 that is outside, and the rotary tool 50 is pulled out at that position (pulling position 57). In this way, the extraction position 57 of the rotary tool 50 is located outside the abutting portion 40, so that the extraction trace (not shown) of the stirring pin 52 (see FIG. 4A) abuts. The portion 40 is not formed. Thereby, the joining property of the jacket main body 10 and the sealing body 30 can be improved. In addition, you may make it repair the drawing trace of the upper surface of the surrounding wall 14 by processing, such as filling a weld metal.

  As described above, the rotary tool 50 moves linearly (see the arrow Y5 in FIG. 7B) from the insertion position 56 to the extraction position 57 along the flange portion 17. At this time, the rotation direction (autorotation direction), the rotation speed, the movement direction (revolution direction), the movement direction, and the pushing amount are constant. The rotation direction may be either left rotation or right rotation.

  At this time, as shown in FIG. 4, since the length dimension L1 of the stirring pin 52 of the rotary tool 50 is longer than the thickness dimension T1 of the sealing body 30, the tip of the stirring pin 52 is the flange portion 17. The inside of the jacket body 10 (the inside of the flange portion 17) enters the back side. As a result, the distal end portion (lower end portion) of the plasticizing region 49 formed by the rotary tool 50 is formed so as to enter the inner back side of the jacket main body 10.

  As described above, the rotary tool 50 is rotated around the opening 12 of the recess 11 along the abutting portion 40 and friction stir welding is performed to form the plasticized region 41 and the second plasticized region 43. Furthermore, after the rotary tool 50 is moved along the flange portion 17 and friction stir welding is performed to form the plasticized region 49 and the sealing body 30 is fixed to the jacket body 10, the burrs generated by the friction stirrer are formed. The liquid cooling jacket 1 is formed.

  According to the method for manufacturing the liquid cooling jacket 1 and the friction stir welding method according to the present embodiment, the rotary tool 50 including the stirring pin 52 having the length L1 larger than the thickness T1 of the sealing body 30 is used. Since the friction stir welding is performed, the tip portions of the plasticized regions 41, 43, 46 are formed so as to penetrate into a deep portion on the inner side of the jacket main body 10. As a result, the stress due to the heat shrinkage of the plasticized regions 41, 43, 46 can be distributed to the jacket body 10. Since the jacket body 10 is thick, the jacket body 10 is hardly deformed even when subjected to stress, and the stress transmitted to the sealing body 30 can be reduced, so that the deformation of the sealing body 30 can be suppressed.

  Further, since the width dimension W1 of the support surface 15a is larger than the radius dimension R2 of the shoulder portion 51 of the rotary tool 50, when the first rotation of the rotary tool 50 is moved directly above the abutting portion 40, A plasticized region 41 can be formed in the support surface 15a. Accordingly, since the plasticized region 41 is not exposed on the inner side surface of the concave portion 11, the support surface 15a is not lowered toward the bottom wall 13 of the concave portion 11, and the pushing force of the rotary tool 50 is reliably supported by the support surface 15a. be able to. Therefore, since the sealing body 30 is supported by the support surface 15a, the pressing force of the rotary tool 50 is not applied downward to the sealing body 30, and the sealing body 30 is not deformed.

  In addition, a flange 17 having a surface 17a flush with the support surface 15a is formed inside the recess 11, and a plasticized region 49 is formed along the flange 17, so that the sealing body 30 is By joining to the part 17, even when the recessed part 11 is large area, the sealing body 30 is supported planarly on the support surface 15a and the surface 17a of the collar part 17. FIG. Thereby, the planarity of the sealing body 30 is maintained, and deformation of the sealing body 30 can be suppressed. Furthermore, even if the sealing body 30 is deformed by friction stir welding around the opening 12 of the jacket body 10, the sealing body 30 and the flange portion 17 are joined in a later step. Thereby, the deformation | transformation of the sealing body 30 can be eliminated.

  At this time, since the width dimension W2 of the flange part 17 is larger than the diameter dimension R1 of the shoulder part 51 of the rotary tool 50, when the rotary tool 50 is moved directly above the flange part 17, the plasticizing region 49 is formed. It can be formed in the surface 17 a of the flange 15. Accordingly, since the plasticized region 49 is not exposed on the side surface of the flange portion 17, the surface 17 a of the flange portion 17 does not fall to the bottom wall 13 side of the recess 11, and the pushing force of the rotary tool 50 is surely secured by the flange portion 17. Can be supported. Therefore, since the sealing body 30 is supported by the surface 17a of the flange portion 17, the pressing force of the rotary tool 50 is not applied downward to the sealing body 30, and the sealing body 30 is not deformed.

  Moreover, in this embodiment, since the rotation tool 50 is moved clockwise with respect to the opening part 12 and rotated to the right, the thin sealing body 30 becomes the flow side 50a, and the sealing body 30 side Is difficult to generate cavity defects. Although the jacket main body 10 becomes the shear side 50b, since the jacket main body 10 is thick, even if the relative speed of the outer periphery of the rotary tool 50 with respect to the jacket main body 10 is fast, there is no shortage of metal. Therefore, it is possible to prevent the occurrence of cavity defects due to lack of metal in the abutting portion, and it is possible to prevent the bonding strength of the abutting portion 40 from being lowered. And even if a cavity defect should occur, it will occur at a position away from the abutment 40 and away from the flow path of the heat transport fluid. It hardly leaks from the flow path to the outside and does not affect the sealing performance of the joint.

  Furthermore, in this embodiment, even if a cavity defect occurs in the first round movement of the rotary tool 50, the portion that was the shear side 50b in the first round is re-stirred by the second round movement of the rotary tool 50. , Cavity defects can be eliminated.

  In this embodiment, prior to the step of forming the plasticized region 41 with the rotary tool 50, a part of the abutting portion 40 is temporarily joined using the temporary joining rotary tool 60. When the friction stir welding is performed, the sealing body 30 does not move, it becomes easy to join, and the positioning accuracy of the sealing body 30 with respect to the jacket body 10 is improved. In addition, since the temporary joining rotary tool 60 is smaller than the main joining rotary tool 50, the main joining rotary tool 50 is merely moved and frictionally stirred on the plasticized region 45 formed by the temporary joining. Thus, the extraction traces of the plasticized region 45 and the rotary tool 60 are covered, and the main joining is finished.

  Furthermore, the abutting portion 40 has a rectangular frame shape, and after temporarily joining one diagonal 44a, 44b of the abutting portion 40 in the step of temporarily joining the abutting portion 40 with the temporary joining rotary tool 60, Since the other diagonals 44c and 44d are temporarily joined together, the sealing body 30 can be temporarily joined with good balance, and the positioning accuracy of the sealing body 30 with respect to the jacket body 10 is further improved.

  Further, in the present embodiment, since the plasticizing region 41 partially overlaps at the start end 54a and the terminal end 54b in the circumferential movement of the rotary tool 50, the plasticizing region is formed in the opening peripheral portion 12a of the recess 11. There is no portion where 41 is interrupted. Therefore, the peripheral wall 14 of the jacket main body 10 and the sealing body 30 can be favorably joined, and the heat transport fluid does not leak to the outside, so that the sealing performance of the joint can be improved.

(Second Embodiment)
Next, the manufacturing method of the liquid cooling jacket which concerns on 2nd Embodiment is demonstrated with reference to FIG.

  In this embodiment, as shown in FIG. 8A, in the step of forming the plasticized regions 41, 53, and 49 with the rotary tool 50 of the first embodiment, the surface on which the friction stir welding of the jacket body 10 is performed ( A cooling plate 70 in which a cooling medium flows is attached to the surface opposite to the surface on which the concave portion 11 is opened), and the rotary tool 50 (see FIG. 3) is moved while cooling the jacket body 10 to perform friction stir welding. It is characterized by.

  As shown in FIG. 8B, the cooling plate 70 is configured by embedding a cooling pipe 72 constituting a cooling flow path therein. Specifically, the cooling plate 70 is configured by sandwiching and fixing a cooling pipe 72 between a pair of cooling plate bodies 71, 71. The cooling pipe 72 has a planar shape along the movement trajectory of the rotary tool 50, and includes an outer peripheral portion 72 a along the plasticizing region 41 and the second plasticizing region 43, and a plasticizing region 49 of the flange portion 17. , An inflow portion 72c through which the cooling medium flows in, and an outflow portion 72d through which the cooling medium flows out. The cooling pipe 72 is composed of, for example, a cylindrical copper pipe, and an outer peripheral portion 72a, an intermediate portion 72b, an inflow portion 72c, and an outflow portion 72d are integrally formed.

  The cooling plate bodies 71 and 71 are made of aluminum or an aluminum alloy. The cooling plate main bodies 71 and 71 are vertically symmetrical with each other, and a groove 73 for accommodating the cooling pipe 72 is formed on the inner surface (cooling pipe 72 side). The groove 73 is formed in a semicircular cross section, and the inner peripheral surface of the groove 73 and the outer peripheral surface of the cooling pipe 72 are brought into close contact with each other by sandwiching the cooling pipe 72 between the cooling plate bodies 71 and 71. . The groove 73 is formed on the surface of the cooling plate body 71 by cutting or the like, for example. The cooling plate bodies 71 and 71 are bonded to each other with, for example, an adhesive having heat conductivity. The joining of the cooling plate bodies 71 and 71 is not limited to an adhesive, and may be other methods such as welding or friction stir welding.

  After fixing the jacket main body 10 with the sealing body 30 attached to the upper part of the cooling plate 70 having such a configuration, friction stir welding is performed while flowing a cooling medium into the cooling pipe 72.

  According to such a liquid cooling jacket manufacturing method, the heat generated by the friction stir welding can be efficiently absorbed by the cooling plate 70, so that the thermal contraction of the plasticized region can be reduced, and the sealing body 30 Deformation such as warping and bending can be suppressed.

  Moreover, in this embodiment, since the cooling flow path (cooling pipe 72) is provided with a planar shape at least along the movement trajectory of the rotary tool 50, the heat generated in the friction stir welding is efficiently at a position close to the generation position. Therefore, the effect of suppressing the deformation of the sealing body 30 is enhanced. Furthermore, since the cooling flow path is constituted by the cooling pipes 72 embedded in the cooling plate 70, it is possible to easily form a cooling flow path that allows the cooling medium to flow easily and does not leak. Furthermore, since the cooling plate 70 is provided, the joining portion can be cooled without spraying water to the joining portion with a nozzle as in the conventional case, so that management of water (cooling medium) is facilitated.

  In the present embodiment, the cooling medium is passed through the cooling plate 70 to cool the jacket body 10 and the sealing body 30, but the present invention is not limited to this. For example, friction stir welding may be performed while cooling the jacket main body 10 and the sealing body 30 by flowing a cooling medium into the recess 11 in which the opening 12 is sealed by the sealing body 30.

  By doing so, the heat of friction stir welding can be absorbed by the cooling medium without providing the cooling plate 70, so that the thermal contraction of the plasticized regions 41, 43, 49 can be reduced, and the sealing body The deformation of 30 can be suppressed and the simplification of the machining process can be achieved.

(Third embodiment)
Next, a method for manufacturing a liquid cooling jacket and a friction stir welding method according to a third embodiment will be described with reference to FIG.

  In this embodiment, as shown in FIG. 9A, the abutting portion 40 between the jacket body 10 and the sealing body 30 prior to the step of forming the plasticized region 41 with the rotary tool 50 of the first embodiment. Is temporarily joined using a rotary tool 60 for temporary joining which is smaller than the rotary tool 50. Temporary joining here is performed linearly by friction stir welding at the middle part of each side, whereas the first embodiment is friction stir welding the corners of the rectangular abutting portion 40. ing. Specifically, the abutting portion 40 has a substantially rectangular shape (rectangular frame shape), and in the step of temporarily joining the abutting portion 40 with the temporary joining rotary tool 60, an intermediate between one opposite side 46, 46 of the abutting portion 40. After the parts 46a and 46b are temporarily joined together, the intermediate parts 47a and 47b of the other opposite sides 47 and 47 are temporarily joined. At this time, the plasticizing regions 48 formed by the temporary bonding rotary tool 60 are linearly formed with the same length. Moreover, the plasticization area | region 48 is formed in the position which does not protrude from the position where the plasticization area | region 41 is formed in a next process, as shown in FIG.9 (b). In addition, since the process of this joining which forms the plasticization area | regions 41, 43, and 49 with the rotary tool 50 is the same as that of 1st Embodiment, the description is abbreviate | omitted.

  In this embodiment, by temporarily joining in the order as described above, the sealing body 30 can be temporarily joined to the jacket body 10 in a balanced manner, and the positioning accuracy of the sealing body 30 with respect to the jacket body 10 is improved. The deformation of the sealing body 30 can be prevented. Further, by performing temporary bonding of the sealing body 30, it is possible to prevent the sealing body 30 from being displaced during the main bonding by the rotary tool 50. Furthermore, according to this embodiment, since the friction stir welding of the temporary bonding is linear, it is only necessary to move the temporary bonding rotary tool 60 linearly and the processing is easy.

  As mentioned above, although embodiment of this invention was described, embodiment of this invention is not limited to this, In the range which does not deviate from the meaning of this invention, it can change suitably, For example, in the said embodiment, Although the sealing body 30 is substantially rectangular in plan view, the shape is not limited to this, and may be other shapes such as a square, a polygon, and a circle. Furthermore, the fin 32 provided in the sealing body 30 may be a separate body from the lid plate portion. For example, the fin 32 may be separately housed in the recess 11 or provided integrally with the jacket body. Yes.

  Moreover, in each said embodiment, although the collar part 17 is extended from the one wall part 14a to the other wall part 14b and formed in one place, it is not limited to this, A plurality is formed. You may do it. In this case, a plurality of ridges extending from one wall portion to the other wall portion may be formed, or at least one ridge portion may be formed on each of a pair of wall portions facing each other to cool the ridge portion. You may comprise so that the flow path through which water flows may meander.

DESCRIPTION OF SYMBOLS 1 Liquid cooling jacket 10 Jacket main body 11 Recessed part 12 Opening part 12a Opening peripheral part 15a Support surface (step bottom)
15b Step side surface 17 Ridge part 17a (Ring part) surface 30 Sealing body 30b Outer peripheral surface 40 Abutting part 41 Plasticization area 43 (Second) Plasticization area 50 Rotating tool 51 Shoulder part 52 Stirring pin 60 Rotating tool for temporary joining H1 (Difference in height between the upper surface of the jacket body and the support surface) Dimensions L1 Length dimension of the stirring pin R1 Diameter dimension of the shoulder part R2 Radius dimension of the shoulder part T1 Thickness dimension of the sealing body W1 (of the support surface) Width dimension W2 (of the buttocks) width dimension

Claims (13)

A liquid cooling system in which a heat transport fluid that transports heat generated by a heat generating body flows to the outside and a sealing body that seals the opening of the recess is fixed to the jacket body having the recess by friction stir welding. In the manufacturing method of the jacket,
The sealing body is placed on a support surface formed of a step bottom surface that is formed at the opening peripheral edge of the recess of the jacket body and is lower than the surface of the jacket body, and the step side surface of the jacket body and the sealing body Match the outer surface,
A rotating tool provided with a stirring pin having a length dimension larger than the thickness dimension of the sealing body is caused to make a round along the abutting portion between the step side surface of the jacket body and the outer peripheral surface of the sealing body, When forming the plasticized region and joining the sealing body to the jacket body,
A cooling plate through which a cooling medium flows is attached to the surface opposite to the surface of the jacket body where friction stir welding is performed, and the rotating tool is moved while cooling the jacket body to perform friction stir welding. Manufacturing method for liquid cooling jacket. The method for manufacturing a liquid cooling jacket according to claim 1, wherein a width dimension of the support surface is larger than a radial dimension of a shoulder portion of the rotary tool. Inside the recess, a flange having a surface flush with the support surface is formed,
The rotary tool is moved along the flange on the surface of the sealing body to form a plasticized region, and the sealing body is joined to the flange. Item 3. A method for producing a liquid cooling jacket according to Item 2. The manufacturing method of the liquid cooling jacket according to claim 3, wherein a width dimension of the collar part is larger than a diameter dimension of a shoulder part of the rotary tool. The said jacket main body and the said sealing body are formed from aluminum or aluminum alloy. The manufacturing method of the liquid cooling jacket of any one of the Claims 1 thru | or 4 characterized by the above-mentioned. The cooling flow path through which the cooling medium of the cooling plate flows is formed so as to have at least a planar shape along the movement trajectory of the rotary tool. The manufacturing method of the liquid cooling jacket as described in 1 .. The liquid cooling according to any one of claims 1 to 6, wherein the cooling flow path through which the cooling medium of the cooling plate flows is configured by a cooling pipe embedded in the cooling plate. The manufacturing method of a jacket. Friction stir welding is performed by causing a cooling medium to flow inside the recess in which the opening is sealed by the sealing body, and moving the rotary tool while cooling the jacket body and the sealing body. The manufacturing method of the liquid cooling jacket of any one of Claim 1 thru | or 4. When moving the rotary tool clockwise with respect to the opening, rotate the rotary tool clockwise,
The liquid cooling jacket according to any one of claims 1 to 8, wherein when the rotary tool is moved counterclockwise with respect to the opening, the rotary tool is rotated counterclockwise. Method. After the rotating tool makes a round along the abutting portion, the rotating tool is shifted to the outer peripheral side of the plasticizing region formed in the first round, and the rotating tool is further made a round along the abutting portion. The method of manufacturing a liquid cooling jacket according to claim 9, wherein the outer peripheral side of the plasticized region is re-stirred. Prior to the step of forming the plasticized region with the rotary tool, a part of the abutting portion is temporarily joined using a rotary tool for temporary joining that is smaller than the rotary tool. The manufacturing method of the liquid cooling jacket of any one of Claims 10. The abutting portion has a rectangular frame shape,
In the step of temporarily joining the abutting portion with the temporary tool for temporary joining, after temporarily joining one diagonal of the abutting portion first, the other diagonal is temporarily joined. The manufacturing method of the liquid cooling jacket of 11. The abutting portion has a rectangular frame shape,
In the step of temporarily joining the abutting portion with the temporary tool for temporary joining, the intermediate portions of one opposite side of the abutting portion are temporarily joined first, and then the intermediate portions of the other opposite side are temporarily joined. The manufacturing method of the liquid cooling jacket of Claim 11.

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