JP2013113786A - Physical quantity detection device, physical quantity detector, and electronic equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a physical quantity detection device having high detection sensitivity.SOLUTION: A physical quantity detection device 100 relating to this invention includes a base 10, a detection part 35 provided on the base 10 through a joint 20 and including a movable part 30 displacing in accordance with a change in a physical quantity, and a frame 50 extending from the base 10 and provided around the movable part 30 through a gap from and to the movable part 30. The base 10 includes a first leg 12 provided with a first fixing part 80, and a second leg 16 provided with a second fixing part 82, the frame 50 is provided with a frame fixing part 84, and a center of gravity G exists within a range A surrounded with the first fixing part 80, the second fixing part 82 and the frame fixing part 84 in a planar view.

Description

  The present invention relates to a physical quantity detection device, a physical quantity detector, and an electronic apparatus.

  Conventionally, a physical quantity detection device (for example, an acceleration sensor) using a physical quantity detection element such as a vibrator is known. Such a physical quantity detection device detects a force (acceleration) applied to the physical quantity detection device from the change in the resonance frequency when the resonance frequency of the physical quantity detection element changes due to a force acting in the detection axis direction. It is configured as follows.

  Patent Document 1 discloses a sensor in which both ends of a double-ended crystal tuning fork transducer (physical quantity detection element) are fixed to a support structure having a base assembly, deflection, and proof mass.

Japanese National Patent Publication No. 4-505509 US Pat. No. 5,331,854

  However, in the technique disclosed in Patent Document 1, when the support structure is fixed to the package, stress is generated in the support structure due to a difference in linear expansion coefficient between the support structure and the package, and the stress causes the support structure to May be transmitted to the physical quantity detection element. Thereby, the resonance frequency of the physical quantity detection element may fluctuate, and the detection sensitivity of the physical quantity detection device may decrease.

  As a method for suppressing the transmission of such stress, as disclosed in Patent Document 2, the support structure that supports the physical quantity detection element is provided with a beam-shaped bent portion (leg portion) that sandwiches the proof mass, It is conceivable to relieve stress by the support portion.

  However, in the technique disclosed in Patent Document 2, the support structure is supported by two bent portions. Therefore, for example, when the proof mass is displaced by the application of acceleration, the base of the bent portion may be twisted or bent. When such twisting or bending occurs, the sensitivity for detecting the acceleration may decrease.

  An object of some aspects of the present invention is to provide a physical quantity detection device having high detection sensitivity. Another object of some aspects of the present invention is to provide a physical quantity detector and electronic apparatus having the physical quantity detection device.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following aspects or application examples.

[Application Example 1]
The physical quantity detection device according to the present invention is:
The base,
A detection unit that is provided on the base via a joint, and includes a movable unit that is displaced according to a change in physical quantity;
A frame portion extending from the base portion and provided around the movable portion via a gap with the movable portion;
Including
The base is
A first leg having a first fixing part;
A second leg portion having a second fixing portion,
The frame part includes a frame fixing part,
In plan view, the center of gravity is within a range surrounded by the first fixing portion, the second fixing portion, and the frame fixing portion.

  According to such a physical quantity detection device, the center of gravity of the physical quantity detection device is in a range surrounded by the first fixing portion, the second fixing portion, and the frame fixing portion in plan view. Thereby, for example, when the movable part is displaced, the first leg part and the second leg part are not provided with the frame fixing part and are fixed to the external member only by the first fixing part and the second fixing part. It can suppress that a leg twists or bends. As a result, such a physical quantity detection device can have high detection sensitivity.

  Further, according to such a physical quantity detection device, the base includes the first leg and the second leg, the first leg includes the first fixing unit, and the second leg includes the second fixing unit. ing. Therefore, for example, the first fixing portion and the second fixing portion are fixed to an external member such as a package as compared with a case where the fixing portion is provided in the first portion of the base where the physical quantity detection element is fixed. It can suppress that the stress which generate | occur | produces in 1st fixing | fixed part and 2nd fixing | fixed part resulting from is transmitted to a detection part. Therefore, such a physical quantity detection device can have higher detection sensitivity.

[Application Example 2]
In the physical quantity detection device according to the present invention,
The frame includes a third leg;
The third leg portion may include the frame fixing portion.

  Such a physical quantity detection device can have high detection sensitivity.

[Application Example 3]
In the physical quantity detection device according to the present invention,
The frame portion includes a plurality of the frame fixing portions,
The frame is
A fourth leg having at least one frame fixing part;
And a fifth leg portion including at least one other frame fixing portion.

  Such a physical quantity detection device can have high detection sensitivity.

[Application Example 4]
In the physical quantity detection device according to the present invention,
The frame portion may be bent while extending from the fourth leg portion to the fifth leg portion.

  According to such a physical quantity detection device, the stress generated in the fourth fixed portion and the fifth fixed portion due to the fourth fixed portion and the fifth fixed portion being fixed to an external member such as a package is detected. It can be relaxed before being transmitted to the department.

[Application Example 5]
In the physical quantity detection device according to the present invention,
The first leg portion is bent while extending from the base portion of the first leg portion to the first fixing portion,
The second leg portion may be bent while extending from a base portion of the second leg portion to the second fixing portion.

  According to such a physical quantity detection device, the stress generated in the first fixed portion and the second fixed portion due to the first fixed portion and the second fixed portion being fixed to an external member such as a package is detected. Can be relaxed before being transmitted to the department.

[Application Example 6]
In the physical quantity detection device according to the present invention,
The detection unit may further include a physical quantity detection element spanned between the base and the movable unit.

  Such a physical quantity detection device can have high detection sensitivity.

[Application Example 7]
The physical quantity detector according to the present invention is:
A physical quantity detection device according to the present invention;
A package containing the physical quantity detection device;
including.

  Since such a physical quantity detection device includes the physical quantity detection device according to the present invention, it can have high detection sensitivity.

[Application Example 8]
The electronic device according to the present invention is
The physical quantity detection device according to the present invention is included.

  Since such an electronic device includes the physical quantity detection device according to the present invention, it can have high detection sensitivity.

The perspective view which shows typically the physical quantity detection device which concerns on 1st Embodiment. The top view which shows typically the physical quantity detection device which concerns on 1st Embodiment. FIG. 3 is a cross-sectional view schematically showing the physical quantity detection device according to the first embodiment. Sectional drawing for demonstrating operation | movement of the physical quantity detection device which concerns on 1st Embodiment. Sectional drawing for demonstrating operation | movement of the physical quantity detection device which concerns on 1st Embodiment. The top view which shows typically the physical quantity detection device which concerns on the modification of 1st Embodiment. The perspective view which shows typically the physical quantity detection device which concerns on 2nd Embodiment. The top view which shows typically the physical quantity detection device which concerns on 2nd Embodiment. The top view which shows typically the physical quantity detection device which concerns on the 1st modification of 2nd Embodiment. The top view which shows typically the physical quantity detection device which concerns on the 2nd modification of 2nd Embodiment. The top view which shows typically the physical quantity detector which concerns on 3rd Embodiment. Sectional drawing which shows typically the physical quantity detector which concerns on 3rd Embodiment. The perspective view which shows typically the electronic device which concerns on 4th Embodiment.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

1. 1. First embodiment 1.1. Physical Quantity Detection Device First, a physical quantity detection device according to the first embodiment will be described with reference to the drawings. FIG. 1 is a perspective view schematically showing a physical quantity detection device 100 according to the first embodiment. FIG. 2 is a plan view schematically showing the physical quantity detection device 100 according to the first embodiment. 3 is a cross-sectional view taken along the line III-III in FIG. 2 schematically showing the physical quantity detection device 100 according to the first embodiment. For convenience, in FIGS. 1 to 3 and FIGS. 4 to 10 described later, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other.

  As shown in FIGS. 1 to 3, the physical quantity detection device 100 can include a base 10, a joint part 20, and a detection part 35 including a movable part 30 and a physical quantity detection element 40. Furthermore, the physical quantity detection device 100 can include, for example, mass units 60, 62, 64, 66. In FIG. 2, the mass parts 60 and 62 are seen through, and the mass parts 64 and 66 are omitted.

  The base 10 includes a first portion 11, a second portion 12 (also referred to as a first leg portion 12), and a third portion (also referred to as a second leg portion 16).

  The first portion 11 is a portion to which the joint portion 20 is connected and the base portion 42a of the physical quantity detection element 40 is fixed. The planar shape of the first portion 11 is not particularly limited, but is rectangular in the example shown in FIG.

  The first leg portion 12 extends from the first portion 11. The first leg portion 12 can support the first portion 11.

  The first leg portion 12 includes a first fixing portion 80. The first fixing portion 80 is provided in the vicinity of the tip of the first leg portion 12. The first leg portion 12 can be fixed to an external member such as a package or a circuit board in the first fixing portion 80. That is, the 1st fixing | fixed part 80 is a part for fixing the 1st leg part 12 to an external member. The first fixing portion 80 may be a portion that overlaps with a joining member provided to fix the first leg portion 12 to the external member in plan view. The planar shape of the first fixing portion 80 is not particularly limited, but is circular in the example shown in FIG.

  The first leg portion 12 includes, for example, an extending portion 13a extending from the first portion 11 in the −X direction and an extending portion 13b extending from the extending portion 13a in the + Y direction. . The extending part 13 b can include a first fixing part 80.

  In the example shown in the drawing, the first leg portion 12 is provided with a bent portion 14 formed by connecting the extending portion 13a and the extending portion 13b, and has a bent structure. That is, the first leg portion 12 is bent while extending from the first portion 11 to the first fixing portion 80. That is, the first leg portion 12 is bent while extending from the base portion 15 of the first leg portion 12 to the first fixing portion 80. A bent structure means a shape that is not straight, such as a bent shape or a curved shape.

  The second leg portion 16 extends from the first portion 11. The second leg portion 16 can support the first portion 11.

  The second leg portion 16 includes a second fixing portion 82. The second fixing portion 82 is provided in the vicinity of the tip of the second leg portion 16. The second leg portion 16 can be fixed to an external member such as a package or a circuit board at the second fixing portion 82. That is, the second fixing portion 82 is a portion for fixing the second leg portion 16 to the external member. The second fixing portion 82 may be a portion that overlaps with a joining member provided to fix the second leg portion 16 to the external member in plan view. The planar shape of the second fixing portion 82 is not particularly limited, but is circular in the example shown in FIG.

  The second leg portion 16 includes, for example, an extension portion 17a extending from the first portion 11 in the + X direction and an extension portion 17b extending from the extension portion 17a in the + Y direction. The extending portion 17b can include a second fixing portion 82.

  In the illustrated example, the second leg portion 16 includes a bent portion 18 formed by connecting the extending portion 17a and the extending portion 17b, and has a bent structure. That is, the second leg portion 16 is bent while extending from the first portion 11 to the second fixing portion 82. That is, the second leg portion 16 is bent while extending from the base portion 19 of the second leg portion 16 to the second fixing portion 82.

  In the illustrated example, the legs 12 and 16 are provided symmetrically with respect to a central axis (not shown) which is an axis parallel to the Y axis passing through the center of gravity G of the physical quantity detection device 100. The fixed portions 80 and 82 are provided symmetrically with respect to a central axis (not shown) that is an axis parallel to the Y axis passing through the center of gravity G.

  The joint portion 20 is provided between the first portion 11 of the base portion 10 and the movable portion 30, and is connected to the first portion 11 and the movable portion 30. The thickness of the joint portion 20 is smaller than the thickness of the base portion 10 and the thickness of the movable portion 30. For example, the groove portions 20a and 20b (see FIG. 3) can be formed by half-etching from both main surface sides of the quartz substrate to form the joint portion 20. In the illustrated example, the groove portions 20a and 20b are formed along the X axis. The joint portion 20 can serve as a rotation axis along the X axis as a fulcrum (intermediate hinge) when the movable portion 30 is displaced (rotated) with respect to the base portion 10.

  The movable portion 30 is connected to the first portion 11 of the base portion 10 via the joint portion 20. That is, the movable portion 30 is provided on the first portion 11 of the base portion 10 via the joint portion 20. In the illustrated example, the movable portion 30 extends from the first portion 11 of the base portion 10 via the joint portion 20 along the Y axis (in the + Y direction). The planar shape of the movable part 30 is, for example, a quadrangle. The movable portion 30 is plate-shaped and includes main surfaces 30a and 30b facing (opposing) to each other. The movable portion 30 intersects the main surface 30a with the joint portion 20 as a fulcrum (rotation axis) in accordance with a change in physical quantity (acceleration) applied in the direction intersecting the main surface 30a (30b) (Z-axis direction) ( It can be displaced (rotated) in the Z-axis direction).

  The frame part 50 extends from the base part 10 and is provided around the movable part 30 through a gap with the movable part 30. In the illustrated example, the frame portion 50 extends from the leg portions 12 and 16.

  More specifically, the frame part 50 includes an extension part 51a extending in the + Y direction from the first leg part 12, an extension part 51b extending in the + X direction from the extension part 51a, and an extension. An extending portion 51c extending in the −Y direction from the portion 51b and connected to the second leg portion 16. The movable portion 30 is disposed between the first portion 11 of the base 10 and the extending portion 51b, and the movable portion 30 is disposed between the extending portion 51a and the extending portion 51c.

  The frame portion 50 can include bent portions 52a and 52b that are bent as a bent structure. In the illustrated example, the bent portion 52a is formed by connecting an extending portion 51a and an extending portion 51b. The bent portion 52b is formed by connecting the extending portion 51b and the extending portion 51c.

  The frame part 50 includes a third fixing part (frame fixing part) 84. In the illustrated example, the third fixing portion 84 is provided in the extending portion 51 b of the frame portion 50. The third fixing portion 84 may be provided on a central axis (not shown) that is an axis parallel to the Y axis passing through the center of gravity G of the physical quantity detection device 100.

  The frame portion 50 can be fixed to an external member such as a package or a circuit board at the third fixing portion 84. In other words, the third fixing portion 84 is a portion for fixing the frame portion 50 to the external member. The third fixing portion 84 may be a portion that overlaps with a joining member provided to fix the frame portion 50 to the external member in plan view. The planar shape of the third fixing portion 84 is not particularly limited, but is circular in the example shown in FIG.

  The shape of the frame portion 50 is not particularly limited as long as it extends from the base portion 10 and surrounds the movable portion 30. For example, although not shown, the frame portion 50 extends from the first portion 11 of the base portion 10. It may be.

  The center of gravity G of the physical quantity detection device 100 is within a range A surrounded by the fixing portions 80, 82, and 84 in plan view as shown in FIG. More specifically, the center of gravity G is a straight line connecting the center of the first fixed part 80 and the center of the second fixed part 82 in the plan view, and connects the center of the second fixed part 82 and the center of the third fixed part 84. It is located within a range A (region A) surrounded by a straight line and a straight line connecting the center of the third fixing portion 84 and the center of the first fixing portion 80. In the example illustrated in FIG. 2, the shape of the region A is an isosceles triangle, and the center of gravity G overlaps the movable portion 30 (more specifically, the base portion 42 b of the physical quantity detection element 40). The center of gravity G may be provided on an axis (not shown) parallel to the Y axis passing through the center of the movable part 30 in plan view.

  As long as the center of gravity G of the physical quantity detection device 100 is located within the range A, the shape of the legs 12 and 16 and the positions of the fixing portions 80, 82, and 84 are not particularly limited.

  Although not shown, the first leg portion 12 may include a plurality of first fixing portions 80, and the second leg portion 16 may include a plurality of second fixing portions 82. In such a form, a plurality of the center of gravity G of the physical quantity detection device 100 are positioned within a range surrounded by the plurality of first fixing parts 80, the plurality of second fixing parts 82, and the third fixing part 84. The fixed part can be arranged. In such a form, for example, by providing the mass units 60, 62, 64, 66, the physical quantity detection device 100 that is required to be configured to be heavier on the movable unit 30 side is fixed to an external member. The strength can be increased, and for example, it is effective in reliability such as impact resistance.

  The base portion 10, the joint portion 20, the movable portion 30, and the frame portion 50 are integrally formed, for example, by patterning a quartz substrate cut out from a raw quartz or the like at a predetermined angle by a photolithography technique and an etching technique. Is formed. The material of the base part 10, the joint part 20, the movable part 30, and the frame part 50 is not limited to quartz, but may be a semiconductor material such as glass or silicon.

  The physical quantity detection element 40 is provided across the base 10 and the movable part 30. More specifically, the physical quantity detection element 40 is provided across the first portion 11 of the base portion 10 and the movable portion 30. The physical quantity detection element 40 and the movable unit 30 can constitute a detection unit 35. The detection unit 35 is not particularly limited as long as the physical detection information generated in the detection unit 35 is changed by application of acceleration, for example.

  For example, the physical quantity detection element 40 can include at least vibration beam portions 41a and 41b and base portions 42a and 42b. For example, when the movable unit 30 is displaced, force is generated in the vibrating beam portions 41a and 41b, and physical detection information generated in the vibrating beam portions 41a and 41b is changed.

  In the illustrated example, for example, the vibrating beam portions 41a and 41b extend from the base portion 42a to the base portion 42b along the extending direction of the movable portion 30 (along the Y axis). The shape of the vibrating beam portions 41a and 41b is, for example, a prismatic shape. When a driving signal (AC voltage) is applied to excitation electrodes (not shown) provided on the vibrating beam portions 41a and 41b, the vibrating beam portions 41a and 41b are separated from or close to each other along the X axis. Can bend and vibrate.

  The base portions 42a and 42b are connected to both ends of the vibrating beam portions 41a and 41b. In the illustrated example, the base portion 42 a is fixed to the main surface 10 a of the base portion 10 (more specifically, the main surface of the first portion 11) via the joining member 70, and the base portion 42 b is the main portion of the movable portion 30. It is fixed to the surface 30 a (the main surface on the same side as the main surface 10 a of the base 10) via the joining member 70. As the joining member 70, for example, a low melting point glass or an Au / Sn alloy film capable of eutectic joining is used.

  In addition, when the movable part 30 is displaced, the vibrating beam parts 41a and 41b and the base 10 and the movable part 30 are not in contact with each other between the vibrating beam parts 41a and 41b and the base part 10 and the movable part 30. In addition, a predetermined gap is provided. The gap may be managed by the thickness of the joining member 70, for example.

  Although not shown, it is formed by half-etching the movable portion 30 at a position between the joining member 70 and the vibrating beam portions 41a and 41b in the plan view, which is the main surface 30a of the movable portion 30. A concave portion may be formed. For example, when the joining member 70 protrudes from a predetermined position, the joining member 70 can be received by the concave portion, and adhesion of the joining member 70 to the vibrating beam portions 41a and 41b can be suppressed.

  As described above, the physical quantity detection element 40 includes the two vibrating beam portions 41a and 41b and the pair of base portions 42a and 42b. That is, the physical quantity detection element 40 is a double tuning fork element (a double tuning fork type vibration element).

  The physical quantity detection element 40 is formed, for example, by patterning a quartz substrate cut out from a raw quartz or the like at a predetermined angle by a photolithography technique and an etching technique. Thereby, the vibrating beam portions 41a and 41b and the base portions 42a and 42b can be integrally formed.

The material of the physical quantity detection element 40 is not limited to quartz, but lithium tantalate (LiTaO ₃ ), lithium tetraborate (Li ₂ B ₄ O ₇ ), lithium niobate (LiNbO ₃ ), titanate A piezoelectric material such as lead zirconate (PZT), zinc oxide (ZnO), aluminum nitride (AlN), or a semiconductor material such as silicon provided with a piezoelectric material such as zinc oxide (ZnO) or aluminum nitride (AlN) as a film. There may be. However, the physical quantity detection element 40 is preferably made of the same material as that of the base 10 and the movable part 30 in consideration of reducing the difference between the linear expansion coefficient between the base 10 and the movable part 30.

  For example, lead electrodes 44 a and 44 b are provided on the base portion 42 a of the physical quantity detection element 40. The lead electrodes 44a and 44b are electrically connected to excitation electrodes (not shown) provided on the vibrating beam portions 41a and 41b.

  The lead electrodes 44 a and 44 b are electrically connected to connection terminals 46 a and 46 b provided on the main surface 10 a of the first portion 11 by a metal wire 48 such as Au or Al. More specifically, the lead electrode 44a is electrically connected to the connection terminal 46a, and the lead electrode 44b is electrically connected to the connection terminal 46b. The connection terminals 46a and 46b are electrically connected to the external connection terminals 49a and 49b by wiring (not shown). More specifically, the connection terminal 46a is electrically connected to the external connection terminal 49a, and the connection terminal 46b is electrically connected to the connection terminal 49b. The external connection terminals 49a and 49b are, for example, surfaces on the side mounted on the package of the leg portions 12 and 16 (surfaces on the main surface 10b side of the base 10 opposite to the main surface 10a), and in plan view Are provided at positions overlapping the fixing portions 80 and 82, respectively.

  As the excitation electrode, the extraction electrodes 44a and 44b, the connection terminal portions 46a and 46b, and the external connection terminals 49a and 49b, for example, a laminate in which a Cr layer is used as a base and an Au layer is stacked thereon is used. For the excitation electrode, the extraction electrodes 44a and 44b, the connection terminal portions 46a and 46b, and the external connection terminals 49a and 49b, for example, a conductive layer (not shown) is formed by sputtering or the like, and the conductive layer is patterned. Formed by.

  The mass parts 60, 62, 64, 66 are provided on the main surfaces 30 a, 30 b of the movable part 30, for example, via the joining member 72. More specifically, the mass parts 60 and 62 are provided on the main surface 30a, and the mass parts 64 and 66 are provided on the main surface 30b. Examples of the material of the mass parts 60, 62, 64, 66 include metals such as Cu and Au. For convenience, in FIG. 2, the bonding member 72 is shown through.

  In plan view, for example, the mass portions 60, 62, 64, 66 have a rectangular shape, and the mass portions 60, 62, 64, 66 and the fixing portions 80, 82, 84 do not overlap. The mass parts 60, 62, 64 and 66 can improve the detection sensitivity of acceleration applied to the physical quantity detection device 100.

  As the joining member 72, for example, a silicone resin thermosetting adhesive is used. It is preferable that the joining member 72 is applied so as to adhere a part of the movable portion 30 and the mass portions 60, 62, 64, and 66 from the viewpoint of suppressing thermal stress.

  In addition, although not shown in figure, the mass parts 60 and 62 may form one mass part by being formed integrally. Similarly, the mass parts 64 and 66 may be integrally formed to constitute one mass part. Moreover, the mass part may be provided only in any one main surface among main surfaces 30a and 30b.

  Next, the operation of the physical quantity detection device 100 will be described. 4 and 5 are cross-sectional views for explaining the operation of the physical quantity detection device 100. FIG.

  As shown in FIG. 4, when acceleration in the direction of arrow α <b> 1 (+ Z direction) is applied to the physical quantity detection device 100, a force acts on the movable unit 30 in the −Z direction, and the movable unit 30 is connected to the joint unit 20. Is displaced in the -Z direction using as a fulcrum. Thereby, a force in a direction in which the base portion 42a and the base portion 42b are separated from each other along the Y axis is applied to the physical quantity detection element 40, and tensile stress is generated in the vibration beam portions 41a and 41b. Therefore, the vibration frequency (resonance frequency) of the vibration beam portions 41a and 41b is increased.

  On the other hand, as shown in FIG. 5, when an acceleration in the direction of arrow α <b> 2 (−Z direction) is applied to the physical quantity detection device 100, a force acts on the movable unit 30 in the + Z direction, The joint 20 is displaced in the + Z direction with the fulcrum as a fulcrum. As a result, a force in a direction in which the base 42a and the base 42b approach each other along the Y axis is applied to the physical quantity detection element 40, and compressive stress is generated in the vibrating beam portions 41a and 41b. Therefore, the resonance frequency of the vibrating beam portions 41a and 41b is lowered.

  The physical quantity detection device 100 detects a change in the resonance frequency of the physical quantity detection element 40 as described above. More specifically, the acceleration applied to the physical quantity detection device 100 is derived by converting it into a numerical value determined by a look-up table or the like according to the detected change rate of the resonance frequency.

  When the physical quantity detection device 100 is used for an inclinometer, the direction in which the gravitational acceleration is applied to the inclinometer changes according to the change in the inclination posture, and tensile stress or compressive stress is applied to the vibrating beam portions 41a and 41b. Arise. Then, the resonance frequency of the vibrating beam portions 41a and 41b changes.

  In the above example, an example using a so-called double tuning fork element as the physical quantity detection element 40 has been described. However, if the resonance frequency changes according to the displacement of the movable part 30, the form of the physical quantity detection element 40 is particularly It is not limited.

  The physical quantity detection device 100 has the following features, for example.

  According to the physical quantity detection device 100, the center of gravity G of the physical quantity detection device 100 is in a range A surrounded by the first fixing portion 80, the second fixing portion 82, and the third fixing portion 84 in plan view. Thereby, for example, when the movable part 30 is displaced, the physical quantity detection device 100 is compared with the case where the third fixed part is not provided and the first fixed part and the second fixed part are fixed to the external member. Further, it is possible to suppress the twisting and bending of the leg portions 12 and 16. As a result, the physical quantity detection device 100 can have high detection sensitivity. Further, for example, since the leg portions 12 and 16 can be prevented from being twisted, the leg portion can be prevented from being damaged by the twisting, and the physical quantity detection device 100 can have high reliability. Further, the physical quantity detection device 100 can be fixed to an external member such as a package in a stable posture without inclining in any direction, for example.

  Furthermore, in the physical quantity detection device 100, the base 10 includes the first leg 12 and the second leg 16, the first leg 12 includes the first fixing part 80, and the second leg 16 is the second fixing part. 82. Therefore, for example, compared to the case where the fixed portion is provided in the first portion of the base where the physical quantity detection element is fixed, the fixed portions 80 and 82 are fixed to an external member such as a package. Stress generated in the fixing portions 80 and 82 (stress due to a difference in linear expansion coefficient between the fixing portions 80 and 82 and the package, or stress caused by an adhesive that bonds the fixing portions 80 and 82 and the package) is detected by the detecting portion 35 ( More specifically, transmission to the physical quantity detection element 40) can be suppressed. Therefore, the physical quantity detection device 100 can have higher detection sensitivity.

  According to the physical quantity detection device 100, the first leg portion 12 includes the bent portion 14, and the portion extending from the base portion 15 of the first leg portion 12 to the first fixing portion 80 is bent. Further, the second leg portion 16 includes a bent portion 18, and the portion extending from the base portion 19 of the second leg portion 16 to the second fixing portion 82 is bent. Therefore, in the physical quantity detection device 100, the stress generated in the fixing parts 80 and 82 due to the fixing parts 80 and 82 being fixed to an external member such as a package is detected by the detection part 35 (more specifically, the physical quantity detection). It can be relaxed before being transmitted to the element 40).

  According to the physical quantity detection device 100, the extending part 51 b of the frame part 50 includes the third fixing part 84, and the frame part 50 is bent between the base part 10 and the third fixing part 84. 52a or a bent portion 52b is provided. Therefore, in the physical quantity detection device 100, the stress generated in the third fixing part 84 due to the third fixing part 84 being fixed to an external member such as a package is relaxed before being transmitted to the physical quantity detection element 40. can do.

  Although not shown, the center of gravity G of the physical quantity detection device 100 may be provided within a range A and at a position where the distance from the center of gravity G to each of the fixed portions 80, 82, and 84 is equal. Thereby, when the movable part 30 displaces more reliably, it can suppress that the leg parts 12 and 16 produce a twist and a bending, for example.

1.2. Modified Example Next, a physical quantity detection device according to a modified example of the first embodiment will be described with reference to the drawings. FIG. 6 is a plan view schematically showing a physical quantity detection device 110 according to a modification of the first embodiment. For convenience, in FIG. 6, the mass parts 60 and 62 and the joining member 72 are seen through, and the mass parts 64 and 66 are omitted.

  Hereinafter, in the physical quantity detection device 110, members having the same functions as the constituent members of the physical quantity detection device 100 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the physical quantity detection device 100, as illustrated in FIG. 2, the extending portion 51b of the frame portion 50 includes the third fixing portion 84. On the other hand, in the physical quantity detection device 110, as shown in FIG. 6, the frame part 50 includes the third leg part 53 extending from the extension part 51b, and the third leg part 53 is the third fixing part 84. It has.

  In the illustrated example, the third leg portion 53 extends in the + Y direction from the extending portion 51 b of the frame portion 50. The frame part 50 is provided with a bent part 54 formed by connecting the extending part 51b and the third leg part 53, and has a bent structure. The planar shape of the third leg portion 53 is, for example, a rectangle in the illustrated example.

  Note that the shape of the third leg portion 53 and the position of the third fixing portion 84 are not particularly limited as long as the center of gravity G of the physical quantity detection device 110 is located within the range A. For example, the third leg portion 53 may extend from the extending portion 51a or the extending portion 51c.

  According to the physical quantity detection device 200, similarly to the physical quantity detection device 100, when the movable part 30 is displaced, it is possible to prevent the legs 12 and 16 from being twisted or bent.

  According to the physical quantity detection device 200, the frame portion 50 includes the bent portion 54. Therefore, in the physical quantity detection device 200, compared to the physical quantity detection device 100, the stress generated in the third fixed part 84 due to the third fixed part 84 being fixed to an external member such as a package is represented by the physical quantity detection element. It can be more relaxed before being transmitted to 40.

2. Second Embodiment 2.1. Physical Quantity Detection Device Next, a physical quantity detection device according to the second embodiment will be described with reference to the drawings. FIG. 7 is a perspective view schematically showing a physical quantity detection device 200 according to the second embodiment. FIG. 8 is a plan view schematically showing a physical quantity detection device 200 according to the second embodiment. For the sake of convenience, in FIG. 8, the mass parts 60 and 62 and the joining member 72 are seen through, and the mass parts 64 and 66 are omitted.

  Hereinafter, in the physical quantity detection device 200, members having the same functions as the constituent members of the physical quantity detection device 100 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the physical quantity detection device 100, as illustrated in FIG. 2, the extending portion 51b of the frame portion 50 includes the third fixing portion 84. On the other hand, in the physical quantity detection device 300, as shown in FIG. 8 and FIG. 9, the frame part 50 includes a fourth leg part 90 and a fifth leg part 94, and the fourth leg part 90 is a fourth fixing part ( The fifth leg portion (frame fixing portion) 94 includes a fifth fixing portion 88.

  The fourth leg 90 includes, for example, an extending portion 91a extending in the −X direction from the bent portion 52a of the frame portion 50, and an extending portion 91b extending in the −Y direction from the extending portion 91a. It has. The extending portion 91 b can include a fourth fixing portion 86. The fourth fixing portion 86 is provided in the vicinity of the tip end of the fourth leg portion 90.

  In the illustrated example, the fourth leg 90 has a bent structure including a bent portion 92 formed by connecting the extending portion 91a and the extending portion 91b. That is, the fourth leg portion 90 is bent while extending from the bent portion 52 a to the fourth fixing portion 86. That is, the fourth leg portion 90 is bent while extending from the base portion 93 of the fourth leg portion 90 to the fourth fixing portion 86.

  The fourth fixing portion 86 is provided in the vicinity of the tip end of the fourth leg portion 90. The fourth leg portion 90 can be fixed to an external member such as a package or a circuit board at the fourth fixing portion 86. That is, the fourth fixing portion 86 is a portion for fixing the fourth leg portion 90 to the external member. The fourth fixing portion 86 may be a portion that overlaps with a joining member provided to fix the fourth leg portion 90 to the external member in plan view. The planar shape of the fourth fixing portion 86 is not particularly limited, but is circular in the example shown in FIG.

  The fifth leg portion 94 includes, for example, an extension portion 95a extending in the + X direction from the bent portion 52b of the frame portion 50, and an extension portion 95b extending in the −Y direction from the extension portion 95a. I have. The extension part 95 b can include a fifth fixing part 88. The fifth fixing portion 88 is provided in the vicinity of the tip of the fifth leg portion 94.

  In the illustrated example, the fifth leg portion 94 includes a bent portion 96 formed by connecting the extending portion 95a and the extending portion 95b, and has a bent structure. That is, the fifth leg portion 94 is bent while extending from the bent portion 52b to the fifth fixing portion 88. That is, the fifth leg portion 94 is bent while extending from the base portion 97 of the fifth leg portion 94 to the fifth fixing portion 88.

  The fifth fixing portion 88 is provided in the vicinity of the tip of the fifth leg portion 94. The fifth leg portion 94 can be fixed to an external member such as a package or a circuit board at the fifth fixing portion 88. That is, the fifth fixing portion 88 is a portion for fixing the fifth leg portion 94 to the external member. The fifth fixing portion 88 may be a portion that overlaps with a joining member provided to fix the fifth leg portion 94 to the external member in plan view. The planar shape of the fifth fixing portion 88 is not particularly limited, but is circular in the example shown in FIG.

  In the illustrated example, the legs 90 and 94 are provided symmetrically with respect to a central axis (not shown) that is an axis parallel to the Y axis passing through the center of gravity G of the physical quantity detection device 200. The fixed portions 86 and 88 are provided symmetrically with respect to a central axis (not shown) that is an axis parallel to the Y axis passing through the center of gravity G.

  The center of gravity G of the physical quantity detection device 200 is within a range A surrounded by the fixing portions 80, 82, 86, and 88 in plan view as shown in FIG. More specifically, the center of gravity G is a straight line connecting the center of the first fixed portion 80 and the center of the second fixed portion 82 in plan view, and connects the center of the second fixed portion 82 and the center of the fifth fixed portion 88 in plan view. Range A (region A) surrounded by a straight line, a straight line connecting the center of the fifth fixing portion 88 and the center of the fourth fixing portion 86, and a straight line connecting the center of the fourth fixing portion 86 and the center of the first fixing portion 80 Located in. In the example illustrated in FIG. 8, the shape of the region A is a rectangle, and the center of gravity G overlaps the movable portion 30 (more specifically, the base portion 42 b of the physical quantity detection element 40).

  As long as the center of gravity G of the physical quantity detection device 200 is located within the range A, the shapes of the leg portions 90 and 94 and the positions of the fixing portions 86 and 88 are not particularly limited. For example, the fourth leg portion 90 may extend from the extension portion 51a or the extension portion 51b, and the fifth leg portion 94 may extend from the extension portion 51b or the extension portion 51c. .

  Moreover, although not shown, the frame part 50 may include a plurality of frame fixing parts. In such a form, the plurality of fixing units are arranged such that the center of gravity G of the physical quantity detection device 200 is located within the range surrounded by the first fixing unit 80, the second fixing unit 82, and the plurality of frame fixing units. Can be arranged. Moreover, the extension part (for example, extension part 51b) of the frame part 50 may be provided with the frame fixing | fixed part.

  The physical quantity detection device 200 has the following characteristics, for example.

  According to the physical quantity detection device 200, the center of gravity G of the physical quantity detection device 200 is a range surrounded by the first fixed portion 80, the second fixed portion 82, the fourth fixed portion 86, and the fifth fixed portion 88 in plan view. It is in A. Thereby, for example, the physical quantity detection device 200 includes the movable portion 30 as compared with the case where the fourth fixed portion and the fifth fixed portion are not provided and the first fixed portion and the second fixed portion are fixed to the external member. It is possible to prevent the legs 12 and 16 from being twisted or bent when the is displaced. As a result, the physical quantity detection device 200 can have high detection sensitivity. In particular, since the physical quantity detection device 200 has a larger number of fixed parts than the physical quantity detection device 100, it is possible to more reliably prevent the legs 12 and 16 from being twisted. Further, for example, the physical quantity detection device 200 includes the movable unit 30 as compared with the case where the first fixed unit and the second fixed unit are not provided and the fixed member is fixed to the external member only by the fourth fixed unit and the fifth fixed unit. It is possible to prevent the legs 90 and 94 from being twisted or bent when displaced.

  According to the physical quantity detection device 200, the fourth leg portion 90 includes the bent portion 92, and the portion extending from the base portion 93 of the fourth leg portion 90 to the fourth fixing portion 86 is bent. Further, the fifth leg portion 94 includes a bent portion 96, and the portion extending from the base portion 97 of the fifth leg portion 94 to the fifth fixing portion 88 is bent. Therefore, in the physical quantity detection device 200, the stress generated in the fixing parts 86 and 88 due to the fixing parts 86 and 88 being fixed to an external member such as a package is detected by the detection part 35 (more specifically, the physical quantity detection). It can be relaxed before being transmitted to the element 40).

  Although not shown, the center of gravity G of the physical quantity detection device 200 may be provided in a range A where the distance from the center of gravity G to each of the fixed portions 80, 82, 86, 88 is equal. . Thereby, when the movable part 30 displaces more reliably, it can suppress that the leg parts 12 and 16 produce a twist and a bending, for example.

  Further, in the illustrated example, the fourth fixing portion 86 and the fifth fixing portion 88 are connected by the frame portion 50, but the frame portion 50 is between the fourth fixing portion 86 and the fifth fixing portion 88. The structure which is not connected by may be sufficient. That is, the frame part connected to the fourth support part 90 and the frame part connected to the fifth support part 94 may be separated.

  However, as shown in FIG. 8, if the fourth support portion 90 and the fifth support portion 94 are connected by the frame portion 50, the fourth fixing portion 86 and the fifth fixing portion 88 are externally connected. Since the positional relationship between the fourth fixing portion 86 and the fifth fixing portion 88 is unlikely to occur when fixing to the member, the physical quantity detection device 200 is less likely to be stressed due to assembly accuracy. It is easy to be done.

2.2. Modification 2.2.1. First Modification Next, a physical quantity detection device according to a first modification of the second embodiment will be described with reference to the drawings. FIG. 9 is a plan view schematically showing a physical quantity detection device 210 according to a first modification of the second embodiment. For the sake of convenience, in FIG. 9, the mass parts 60 and 62 and the joining member 72 are seen through, and the mass parts 64 and 66 are omitted.

  Hereinafter, in the physical quantity detection device 210, members having the same functions as the constituent members of the physical quantity detection device 200 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the physical quantity detection device 200, as illustrated in FIG. 8, the extending portion 51b of the frame portion 50 extends linearly along the X axis. On the other hand, in the physical quantity detection device 210, as shown in FIG. 9, the extending portion 51b of the frame portion 50 extends from the fourth leg portion 90 (from the root portion 93) to the fifth leg portion 94 (the root portion). 97) The extension is bent.

  In the illustrated example, the extending part 51 b of the frame part 50 includes a reciprocating structure part 55. For example, the reciprocating structure 55 extends along the X axis while reciprocating along the Y axis. In the reciprocating structure 55, the first portion 56a extending along the X axis, the second portion 56b extending along the Y axis, and the first portion 56a and the second portion 56b are connected. And a bent portion 57 formed by the above. A plurality of first portions 56a and second portions 56b are provided, and therefore a plurality of bent portions 57 are also provided. In the illustrated example, four first portions 56a are provided, three second portions 56b are provided, and six bent portions 57 are provided.

  According to the physical quantity detection device 210, the extending part 51 b of the frame part 50 is bent while extending from the fourth leg part 90 to the fifth leg part 94. Therefore, the stress generated in the fixing portions 86 and 88 due to the fixing portions 86 and 88 being fixed to an external member such as a package can be relaxed before being transmitted to the physical quantity detection element 40. For example, the reciprocating structure portion 54 can have elasticity, and thereby, stress generated in the fixing portions 86 and 88 can be further relaxed before being transmitted to the physical quantity detection element 40.

2.2.2. Second Modification Example Next, a physical quantity detection device according to a second modification example of the second embodiment will be described with reference to the drawings. FIG. 10 is a plan view schematically showing a physical quantity detection device 220 according to a second modification of the second embodiment.

  Hereinafter, in the physical quantity detection device 220, members having the same functions as the constituent members of the physical quantity detection device 200 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the physical quantity detection device 200, the frame portion 50 extends from the leg portions 12 and 16 of the base portion 10 as shown in FIG. 8. Further, in the physical quantity detection device 200, the leg portions 90 and 94 of the frame portion 50 extend from the bent portions 52a and 52b of the frame portion 50, respectively.

  On the other hand, in the physical quantity detection device 220, the frame part 50 extends from the first part 11 of the base part 10 as shown in FIG. 10. In the physical quantity detection device 220, the leg portions 90 and 94 extend from the extending portion 51 b of the frame portion 50.

  In the illustrated example, the first portion 11 of the base portion 10 includes a wide portion 211 having a width wider than the width of the extending portions 51 a and 51 c of the frame portion 50, and the leg portions 12 and 16 extend from the wide portion 211. I'm out. The extending part 51b of the frame part 50 includes a wide part 251 having a width larger than the widths of the extending parts 51a and 51c of the frame part 50, and the leg parts 90 and 94 extend from the wide part 251. Yes.

  The widths of the extending portions 51a and 51c are the sizes of the extending portions 51a and 51c in the X-axis direction, and the widths of the first portion 11 and the extending portion 51b are the sizes in the Y-axis direction. That's it. That is, the size of the wide portions 211 and 251 in the Y-axis direction is larger than the size of the extending portions 51a and 51c in the X-axis direction.

  Further, in the physical quantity detection device 200, the mass parts 60 and 62 are fixed to the main surface 30a of the movable part 30, as shown in FIG. On the other hand, in the physical quantity detection device 220, as shown in FIG. 10, the mass part 60 is fixed to the main surface 30a of the movable part 30, and the mass part 62 is not provided.

  In FIG. 10, for the sake of convenience, the mass portion 60 and the joining member 72 are shown through. Although not shown in FIG. 10, in the physical quantity detection device 220, for example, the mass portion 64 (see FIG. 7) is fixed to the main surface 30 b (the main surface opposite to the main surface 30 a) of the movable portion 30. The mass portion 66 (see FIG. 7) is not provided.

  According to the physical quantity detection device 220, like the physical quantity detection device 200, when the movable part 30 is displaced, the leg parts 12 and 16 can be prevented from being twisted or bent.

3. Third Embodiment Next, a physical quantity detector according to a third embodiment will be described with reference to the drawings. FIG. 11 is a plan view schematically showing a physical quantity detector 300 according to the third embodiment. FIG. 12 is a cross-sectional view taken along line XII-XII in FIG. 11 schematically showing a physical quantity detector 300 according to the third embodiment. For the sake of convenience, in FIG. 11, the mass parts 60 and 62 and the joining member 72 are seen through, and the mass parts 64 and 66 are omitted.

  As shown in FIGS. 11 and 12, the physical quantity detector 300 includes a physical quantity detection device according to the present invention and a package 310. Hereinafter, an example in which the physical quantity detection device 100 is used as a physical quantity detection device according to the present invention will be described.

  The package 310 contains the physical quantity detection device 100. The package 310 can include a package base 320 and a lid 330. In FIG. 11, the lid 330 is not shown for convenience.

  A recess 321 is formed in the package base 320, and the physical quantity detection device 100 is disposed in the recess 321. The planar shape of the package base 320 is not particularly limited as long as the physical quantity detection device 100 can be disposed in the recess 321. As the package base 320, for example, a material such as an aluminum oxide sintered body, crystal, glass, silicon, or the like obtained by forming, laminating and firing ceramic green sheets is used.

  The package base 320 can include a step 323 that protrudes from the inner bottom surface (bottom surface inside the recess) 322 of the package base 320 toward the lid 330. The step portion 323 is provided at a position overlapping with the fixing portions 80, 82, 84, and in the illustrated example, three step portions 323 are provided. For example, the internal terminal 340 is provided in the step portion 323 that overlaps the first fixing portion 80 in plan view. In addition, an internal terminal 342 is provided in the step portion 323 that overlaps the second fixing portion 82 in plan view.

  Although not shown, for example, when a physical quantity detection device (for example, the physical quantity detection device 200) having four fixed parts is accommodated in the package 310, four step parts 323 can be provided.

  Although not shown, the plurality of stepped portions 323 may be provided continuously so as not to overlap the mass portions 60, 62, 64, 66 and the movable portion 30 in plan view.

  The internal terminals 340 and 342 are provided at positions facing the external connection terminals 49a and 49b provided on the fixed portions 80 and 82 of the physical quantity detection device 100 (positions overlapping in plan view). For example, the external connection terminal 49 a is electrically connected to the internal terminal 340, and the external connection terminal 49 b is electrically connected to the internal terminal 342.

  External terminals 344 and 346 used when mounted on an external member such as an electronic device are provided on the outer bottom surface (surface opposite to the inner bottom surface 322) 324 of the package base 320. The external terminals 344 and 346 are electrically connected to the internal terminals 340 and 342 via internal wiring (not shown). For example, the external terminal 344 is electrically connected to the internal terminal 340, and the external terminal 346 is electrically connected to the internal terminal 342.

  The internal terminals 340 and 342 and the external terminals 344 and 346 are made of a metal film in which a film such as Ni or Au is laminated on a metallized layer such as W by a method such as plating.

  The package base 320 is provided with a sealing portion 350 that seals the inside (cavity) of the package 310 at the bottom of the recess 321. The sealing part 350 is disposed in a through hole 325 formed in the package base 320. The through hole 325 penetrates from the outer bottom surface 324 to the inner bottom surface 322. In the illustrated example, the through hole 325 has a stepped shape in which the hole diameter on the outer bottom surface 324 side is larger than the hole diameter on the inner bottom surface 322 side. The sealing portion 350 is formed by disposing a sealing material made of, for example, Au / Ge alloy or solder in the through hole 325, and solidifying after heating and melting. The sealing unit 350 is configured to hermetically seal the inside of the package 310.

  The fixing portions 80, 82, and 84 are fixed to the step portion 323 of the package base 320 through the joining member 74. Thereby, the physical quantity detection device 100 is mounted on the package base 320 and accommodated in the package 310.

  By fixing the fixing portions 80 and 82 to the stepped portion 323, the external connection terminals 49a and 49b provided in the fixing portions 80 and 82 and the internal terminals 340 and 342 provided in the stepped portion 323 are joined members. Electrical connection is established via 74. As the joining member 74, for example, a silicone resin-based conductive adhesive mixed with a conductive material such as a metal filler is used.

  The lid 330 is provided so as to cover the recess 321 of the package base 320. The shape of the lid 330 is, for example, a plate shape. As the lid 330, for example, the same material as the package base 320, or a metal such as Kovar, 42 alloy, stainless steel, or the like is used. The lid 330 is bonded to the package base 310 via a bonding member 332 such as a seam ring, low-melting glass, or adhesive.

  After the lid 330 is bonded to the package base 310, a sealing material is disposed in the through-hole 325 in a state where the inside of the package 310 is decompressed (high vacuum state), heated and melted, solidified, and sealed. By forming 350, the inside of the package 310 can be hermetically sealed. The interior of the package 310 may be filled with an inert gas such as nitrogen, helium, or argon.

  In the physical quantity detector 300, when a drive signal is applied to the excitation electrode of the physical quantity detection element 40 via the external terminals 344 and 346, the internal terminals 340 and 342, the external connection terminals 49a and 49b, the connection terminals 46a and 46b, and the like. The vibrating beam portions 41a and 41b of the physical quantity detection element 40 vibrate (resonate) at a predetermined frequency. The physical quantity detector 300 can output, as an output signal, the resonance frequency of the physical quantity detection element 40 that changes according to the applied acceleration.

  The physical quantity detector 300 includes the physical quantity detection device 100 having high detection sensitivity as described above. Therefore, the physical quantity detector 300 can have high detection sensitivity.

  Although not illustrated, the concave portion in which the physical quantity detection device 100 is disposed may be formed in both the package base 320 and the lid 330, or may be formed only in the lid 330.

4). Fourth Embodiment Next, an electronic apparatus according to a fourth embodiment will be described. Hereinafter, as an electronic apparatus according to the fourth embodiment, an inclinometer including a physical detection device according to the present invention (physical detection device 100 in the following example) will be described with reference to the drawings. FIG. 13 is a perspective view schematically showing an inclinometer 400 according to the fourth embodiment.

  As shown in FIG. 13, the inclinometer 400 includes the physical quantity detection device 100 as an inclination sensor.

  The inclinometer 400 is installed at a place to be measured such as a mountain slope, a road slope, or a retaining wall of embankment, for example. The inclinometer 400 is supplied with power from the outside via a cable 410 or has a built-in power supply, and a drive signal is sent to the physical quantity detection device 100 by a drive circuit (not shown).

  Then, the inclinometer 400 changes the attitude of the inclinometer 400 (change in the direction in which the gravitational acceleration is applied to the inclinometer 400) from the resonance frequency that changes according to the gravitational acceleration applied to the physical quantity detection device 100 by a detection circuit (not shown). Is converted into an angle, and data is transferred to the base station by radio, for example. Thereby, the inclinometer 400 can contribute to the early detection of abnormality.

  The inclinometer 400 includes the physical quantity detection device 100 with high detection sensitivity as described above. Therefore, the inclinometer 400 can have high detection sensitivity.

  The physical quantity detection device according to the present invention is not limited to the inclinometer, but can be suitably used as an acceleration sensor, an inclination sensor, etc. for a seismometer, a navigation device, an attitude control device, a game controller, a mobile phone, etc. Even in this case, it is possible to provide an electronic apparatus that exhibits the effects described in the embodiment and the modification.

  The above-described embodiments and modifications are merely examples, and the present invention is not limited to these. For example, it is possible to appropriately combine each embodiment and each modification.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

10 base, 10a, 10b main surface, 11 1st part, 12 1st leg,
13a, 13b Extension part, 14 Bending part, 15 Root part, 16 2nd leg part,
17a, 17b extension part, 18 bent part, 19 root part, 20 joint part,
20a, 20b groove part, 30 movable part, 30a, 30b main surface, 35 detection part,
40 physical quantity detection element, 41a, 41b vibrating beam part, 42a, 42b base part,
44a, 44b Lead electrode, 46a, 46b Connection terminal, 48 wires,
49a, 49b external connection terminal, 50 frame part, 51a, 51b, 51c extension part,
52a, 52b bent part, 53 third leg part, 54 bent part, 55 reciprocating structure,
56a 1st part, 56b 2nd part, 57 bending part, 60-66 mass part,
70-74 joining member, 80 1st fixing | fixed part, 82 2nd fixing | fixed part, 84 3rd fixing | fixed part,
86 4th fixed part, 88 5th fixed part, 100,110 physical quantity detection device,
200, 210 Physical quantity detection device, 211 Wide part, 220 Physical quantity detection device,
251 Wide part, 300 physical quantity detector, 310 package,
320 package base, 321 recess, 322 inner bottom, 323 step,
324 outer bottom surface, 325 through hole, 330 lid, 332 bonding member,
340, 342 Internal terminal, 344, 346 External terminal, 350 Sealing part,
400 inclinometer, 410 cable

Claims (8)

The base,
A detection unit that is provided on the base via a joint, and includes a movable unit that is displaced according to a change in physical quantity;
A frame portion extending from the base portion and provided around the movable portion via a gap with the movable portion;
Including
The base is
A first leg having a first fixing part;
A second leg portion having a second fixing portion,
The frame part includes a frame fixing part,
A physical quantity detection device having a center of gravity within a range surrounded by the first fixing portion, the second fixing portion, and the frame fixing portion in plan view. In claim 1,
The frame includes a third leg;
The third leg part is a physical quantity detection device provided with the frame fixing part. In claim 1,
The frame portion includes a plurality of the frame fixing portions,
The frame is
A fourth leg having at least one frame fixing part;
A physical quantity detection device comprising: a fifth leg portion including at least one other frame fixing portion. In claim 3,
The physical quantity detection device, wherein the frame portion is bent while extending from the fourth leg portion to the fifth leg portion. In any one of Claims 1 thru | or 4,
The first leg portion is bent while extending from the base portion of the first leg portion to the first fixing portion,
The physical quantity detection device, wherein the second leg portion is bent while extending from a base portion of the second leg portion to the second fixing portion. In any one of Claims 1 thru | or 5,
The physical quantity detection device, wherein the detection unit further includes a physical quantity detection element spanned between the base and the movable part. The physical quantity detection device according to any one of claims 1 to 6,
A package containing the physical quantity detection device;
Including a physical quantity detector.   An electronic apparatus comprising the physical quantity detection device according to claim 1.

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