JP2013098411A - Inspection method and inspection apparatus for solar battery - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection apparatus and inspection method for a solar battery in which inspection accuracy for a defect in a solar battery cell can be improved and a solder connection defect which may occur in the step of manufacturing a string can be inspected.SOLUTION: An inspection apparatus which determines the propriety of a solar battery having one or more solar battery cells comprises a first inspection device and a second inspection device. The first inspection device includes power supply means which electrifies a current to a solar battery subjected to the inspection, emitted light imaging means which images emitted light from the solar battery electrified by the power supply means, and EL image analysis means which analyzes a captured image of the solar battery imaged by the emitted light imaging means. The second inspection device includes heating means which heats the solar battery subjected to the inspection, thermo-image capturing means which measures a temperature of the solar battery heated by the heating means, and thermo-image analysis means which analyzes a captured image of the solar battery imaged by the thermo-image capturing means.

Description

  The present invention relates to a solar battery inspection apparatus and inspection method for inspecting a solar battery including at least one solar battery cell.

  As a method of utilizing solar energy, a silicon type solar cell is known. In the production of solar cells, it is important to evaluate the performance of whether the solar cells have the desired power generation capability. As a general performance evaluation method, output characteristics are measured by a solar simulator (for example, see Patent Document 1).

  As a method different from the above solar simulator, there is a method of Patent Document 2. In this method, by applying a voltage in the forward direction to a polycrystalline silicon solar cell of silicon, an electric current is caused to flow in the forward direction to cause an electroluminescence (EL) action. We propose a method to determine By observing the EL light emitted from the solar battery cell, the current density distribution is known, and the non-light emitting part of the solar battery cell is determined as a defective part due to the nonuniform current density distribution. Then, the amount of light emitted from one solar cell was measured, and if there was a predetermined amount of light, it was judged as a good product, and if it did not reach this amount of light, it was judged as a defective product.

  However, in the method of Patent Document 2, the quality is judged only based on the brightness of the emitted light from the solar battery cell. For example, even if there is a large crack, it is acceptable if the brightness is not less than a predetermined value. It is judged. However, if there is a large crack, there is a high possibility that the capability as a solar cell will suddenly decline, so it should be judged as a defective product.

  Moreover, in patent document 3, the defect of a solar cell is caused by defects caused by external factors such as substrate cracks, electrode breakage, and contact failure, and internal factors such as crystal defects, transitions, and grain boundaries caused by physical properties of the substrate material. It is divided into defects. The internal defects are affected by temperature changes, and the solar cells are heated when the emitted light is observed. In this way, the internal defect is reduced to facilitate the determination of the external defect, and the external defect and the type of the internal defect are easily determined.

  Patent Document 4 describes a technique for identifying a defective portion by flowing a forward current through a solar cell and photographing a temperature distribution. When a current is passed through the solar cell, a large amount of current flows through the electrical short-circuit portion, thereby causing the short-circuit portion to generate heat. However, since this method has poor sensitivity and resolution, it cannot accurately detect solar cell defects.

  Further, in Patent Document 5, a current is applied to a solar cell in a solar cell to be inspected by a power supply means, the solar battery cell is caused to emit light by energization, and emitted light for each solar cell is photographed by an imaging means. Yes. Then, with respect to the photographed image of the solar battery cell, a threshold is determined from the average brightness in the portion where the light and dark in the photographed image are mixed, and the photographed image is divided into a bright part and a dark part by this threshold, and the bright part and the dark part. And emphasizing by binary display, and determining whether or not there is a defect for each solar battery cell.

According to the defect determination method of Patent Document 5, defect determination is performed in a short time by dividing the defect pattern into types such as dark areas, substrate cracks, and finger breaks, and comparing them with thresholds for each type. Is possible.
In addition to the above problems, in the process of manufacturing a string in which solar cells are connected in series with lead wires, cracking or finger breakage occurs in the solar cells, or power is generated due to defective connections between the lead wires and the solar cells. There is a problem that efficiency decreases.
Until now, there is no inspection device having a function of simultaneously inspecting defects of solar cells and poor connection with lead wires.

JP2007-88419 WO2006 / 059615 WO2007 / 129585 JP-A-8-37317 Japanese Patent No. 4235685

  The present invention has been made in view of such circumstances, and inspects cell defects such as cracks and finger breakage and solder connection failures that occur in the process of manufacturing a string while increasing the inspection accuracy of defects in solar cells. It is an object of the present invention to provide a solar cell inspection apparatus and inspection method that can be used.

  In order to achieve the above object, a solar cell inspection apparatus according to the present invention is characterized by the following configuration.

  The inspection apparatus for solar cells of the first invention is an inspection apparatus for determining the quality of a solar battery having one or more solar cells, and includes a first inspection apparatus and a second inspection apparatus, The first inspection apparatus includes a power source means for energizing a solar cell to be inspected, a light emission light imaging means for photographing emitted light from the solar cell energized by the power supply means, and the light emission light imaging means. An EL image analyzing means for analyzing a photographed image of the solar cell photographed in Step 2, wherein the second inspection device is heated by the heating means and the heating means for heating the solar cell to be inspected. A thermo image photographing means for measuring the temperature of the solar cell, and a thermo image analyzing means for analyzing a photographed image of the solar battery photographed by the thermo image photographing means.

  The inspection apparatus of the first invention has a first inspection apparatus using EL inspection means and a second inspection apparatus using thermo inspection means. In the present invention, first, EL light is emitted by passing a current through each solar battery cell constituting the solar battery in the first inspection device. A good portion of the solar battery emits light, but the defective portion is weakened or does not emit light, so that the defective portion can be estimated. Next, when the solar cell is energized with the second inspection device, the wiring defect portion of the solar cell is heated. Therefore, a thermographic image of the solar cell is obtained by the thermo image photographing means, and a portion having a high temperature is estimated as a wiring defect.

  From the above, it is possible to accurately grasp the defects (finger disconnection, chipping, and cracking) of the solar cell. Furthermore, it is possible to inspect cell defects such as cracks in the photovoltaic cells and finger breakage that occur in the string manufacturing process, and defects in the solder connection portions. By using such an inspection apparatus, since any defect in the state of the string and the cause of the occurrence are known, the occurrence of the defect can be prevented and the yield can be improved. In addition, since the solder connection failure part generates heat, the deterioration of the solar cell member is promoted, the power generation efficiency of the cell is reduced, and a predetermined current-voltage characteristic cannot be obtained. In addition, depending on the defect, it may be possible to determine whether or not the future defect will be large, and it is possible to determine not only the current defective part but also a part that may become a defective part in the future. Thereby, the reliability of the test | inspection in the case of using a solar cell for a long term can be improved.

  According to a solar cell inspection apparatus of a second invention, in the first invention, the emitted light photographing means of the first inspection apparatus is disposed on the surface side of the solar cell, and the thermo image photographing means of the second inspection apparatus is the above-mentioned It is arranged on either the front side or the back side of the solar cell.

  According to the second aspect of the present invention, it is possible to improve the detection accuracy of defects in solar cells and to make the structure of the inspection apparatus of the present invention simple and inexpensive. Particularly, the emitted light photographing means of the first inspection device is arranged on the surface side of the solar cell, and the thermo image photographing means of the second inspection device is arranged on the surface side of the solar cell, thereby reducing the size of the inspection device. It is possible to save more space.

  The solar cell inspection apparatus according to a third aspect of the present invention is the solar cell inspection device according to the first or second aspect, wherein the solar cell electrically connects a plurality of solar cells and is arranged in a plane, and is transparent via a sealing resin. The solar cell panel has a laminate structure in which the front and back surfaces are sandwiched between a protective layer and a back sheet.

  According to the third invention, not only a defect of a solar cell having a structure in which a transparent substrate, a filler, a solar cell (including a string and a matrix), a filler, and a back material are stacked in this order, but also a string is manufactured. Can be inspected for cell defects such as cracks, finger breaks, and poor solder connections.

  According to a fourth aspect of the present invention, there is provided the solar cell inspection apparatus according to any one of the first to third aspects, wherein the heating means of the second inspection apparatus supplies current to the solar cell to be inspected. It is a feature.

  According to the 4th invention, since it heats by sending an electric current through a solar cell, it can heat to predetermined temperature early and can test the defect of a solar cell in a short time.

In order to achieve the above object, a solar cell inspection method according to the present invention is characterized by the following configuration.

  According to a fifth aspect of the present invention, there is provided a method for inspecting a solar cell, the step of energizing a solar cell to be inspected by a power source means, the light emission of the solar cell by the energization, and the emitted light photographing means for each solar cell , A step of identifying a location estimated as a defect position by an EL image analysis unit from a captured image of the solar cell imaged by the emitted light imaging unit, a step of heating the solar cell by a heating unit, A step of photographing the temperature distribution of the solar cell by heating with a thermo image photographing means, and a step of identifying a location estimated as a defect position by the thermo image analyzing means from a photographed image of the solar cell photographed by the thermo image photographing means; The type and position of solar cell defects are identified by the EL image analysis means. And a step of specifying a defective portion of the solder connection of the solar battery cell by the thermo image analysis means.

  According to the fifth aspect, the same effect as in the first aspect can be obtained.

  According to a sixth aspect of the present invention, there is provided a solar cell inspection method according to the fifth aspect, wherein the emitted light photographing means is photographed from the front surface side of the solar cell, and the thermo image photographing means is from either the front surface side or the back surface side of the solar cell. It is characterized by shooting.

  According to the sixth aspect, the same effect as in the second aspect can be obtained.

  According to a seventh aspect of the present invention, there is provided a solar cell inspection method according to the fifth aspect or the sixth aspect, wherein the solar cell is arranged in a plane by electrically connecting a plurality of solar cells and transparently protected through a sealing resin. It is a solar cell panel having a laminate structure in which the front and back are sandwiched between a layer and a back sheet.

  According to the seventh aspect, the same effect as in the third aspect can be obtained.

  An inspection method for a solar cell according to an eighth invention is characterized in that, in any one of the fifth to seventh inventions, the step of heating the solar cell by a heating means is performed by energizing the solar cell.

  According to the eighth aspect, the same effect as in the fourth aspect can be obtained.

It is the figure which showed typically the solar cell panel as a test object, (a) is a top view, (b) is an exploded sectional view which shows a laminated structure. It is the top view which looked at one photovoltaic cell from the light-receiving surface. It is a figure which shows the whole structure of the inspection apparatus of the solar cell which concerns on this invention. It is a figure which shows schematic structure of the inspection apparatus of the solar cell which concerns on this invention of FIG. It is a figure which shows the whole structure of another form of the inspection apparatus of the solar cell which concerns on this invention. It is EL picked-up image of the finger wire breakage | disconnection of a photovoltaic cell. It is an EL captured image of a crack of a solar battery cell. It is an EL photographed image of chipped solar cells. It is a thermography image of the soldering part of a photovoltaic cell. It is a thermographic image of a soldering defective part of a photovoltaic cell.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
<1> Configuration of Solar Cell Panel First, the solar cell panel 10 as an inspection target handled by the inspection apparatus of the present embodiment will be described. FIGS. 1A and 1B are diagrams showing the structure of a solar cell panel 10 as an inspection object, where FIG. 1A is a plan view and FIG. 1B is a cross-sectional view before lamination.

  As shown in the plan view of FIG. 1A, a plurality of rectangular solar cells 18 are connected in series by lead wires 19 to form a string 15. And what connected the string 15 by the multi-column lead wire 19 and connected the electrodes 16 and 17 to both ends becomes the solar cell panel 10 as a test object.

  The solar cell panel 10 is molded as follows. First, as shown in FIG. 1 (b), a filler 13 is placed on a cover glass 11 serving as a transparent protective layer disposed on the lower side, and a plurality of strings 15 connected in series are placed thereon, and a top thereof. A filler material 14 is disposed, and finally a back material 12 made of an opaque material is placed. As the fillers 13 and 14, EVA resin (ethylene vinyl acetate) is used. Thereafter, the constituent members are laminated as described above, and pressure is applied under a vacuum heating condition by a laminating apparatus or the like to cause the EVA resin to undergo a cross-linking reaction to perform lamination.

  The solar cell to be inspected according to the present invention is not limited to the solar cell panel 10 described above, but only one solar cell 18 before lamination, or a string in which a plurality of solar cells 18 are linearly connected. A matrix with 15 states and a matrix in which a plurality of strings are connected is also included. Moreover, it can be set as the inspection object in any state before and after the lamination process.

  When the object to be measured is the laminated solar cell panel of FIG. 1, this inspection apparatus is installed and used as follows. That is, this inspection apparatus is installed in the subsequent process of the laminating apparatus to inspect the laminated solar cell panel. Or when installing this test | inspection apparatus out of a line, it is also possible to use the form which carries in and inject | throws in the solar cell panel after lamination into this test | inspection apparatus, and inspects.

  If the object to be measured is a single solar cell 18 before lamination, or a string 15 in which a plurality of solar cells 18 are linearly connected, this inspection apparatus is installed as follows. use. That is, this inspection apparatus is installed in a post process of the stringer device (solder connection device) of the solar battery cell to inspect the object to be measured after the solder connection. Alternatively, when the inspection apparatus is installed outside the line, it is also possible to use a form in which the object to be measured after soldering is brought into the inspection apparatus and put in and inspected.

  FIG. 2 is a plan view of one solar battery cell 18 as viewed from the light receiving surface. In the solar battery cell 18, a bus bar 18 a which is an electrode for taking out electricity is printed on the surface of a thin plate-like silicon semiconductor. In addition, thin conductors called fingers 18b are printed on the surface of the silicon semiconductor in a direction perpendicular to the bus bar in order to efficiently collect current in the bus bar.

  In the embodiment of the present invention shown in FIG. 2, a solar cell generally called a polycrystalline silicon type is illustrated as an inspection target. However, the inspection apparatus and inspection method of the present invention are not limited to the polycrystalline type, and can be applied to a single crystal type solar cell.

<2> Description of Solar Cell Inspection Device Next, the configuration of the solar cell inspection device 100 of the present invention will be described. FIG. 3 is a diagram showing an overall configuration of a solar cell inspection apparatus according to the present invention. As shown in FIG. 3, the solar cell inspection device of the present invention includes a first inspection device 30, a second inspection device 40, and an overall control unit 50. Although not shown in FIG. 3, the overall control unit 50 is housed in an appropriate place in the apparatus. In the inspection apparatus of FIG. 3, the first inspection apparatus 30 is on the upper side with respect to the solar cell panel 10 to be measured, and the second inspection apparatus 40 is disposed on the lower side. Therefore, the solar cell panel 10 of the object to be measured is placed on the inspection apparatus such that the object to be measured in the form of FIG. FIG. 4 shows a schematic configuration of the solar cell inspection apparatus according to the present invention shown in FIG. Hereinafter, the configuration of the inspection apparatus of the present invention will be described with reference to FIG.

  The first inspection device 30 is an inspection device using EL (electroluminescence) light emission. The inspection apparatus includes a power source means 31 for energizing a solar cell panel 10 to be inspected, a light emission light imaging means 32 for photographing EL emitted light from solar cells energized by the power source means, and light emission. EL image analyzing means 33 for analyzing a photographed image of the solar battery panel 10 photographed by the photographing means 32.

  The second inspection device 40 is an inspection device using a thermograph. This inspection apparatus photographs the temperature distribution of the solar cell panel 10 heated by the heating unit 41 and the heating unit 41 that heats the defective portion in the solar cell by energizing the solar cell panel 10 to be inspected. It has a thermo image photographing means 42 and a thermo image analyzing means 43 for analyzing a photographed image of the solar battery panel 10 photographed by the thermo image photographing means 42. As the heating means 41, the power supply means 31 used for the second inspection apparatus 30 may be shared.

  The overall control unit 50 causes the first and second inspection devices 30 and 40 to operate as a single inspection device. This includes a personal computer, the interval between the solar cells 18, the number of solar cells 18 in the case of a string / matrix (vertical, horizontal), dimensional information of the solar cells 18 (position and number of bus bars 18a, corner chamfering) The setting information of the finger 18b, the dip position, etc.) is input, and the first and second inspection devices 30 and 40 are driven by the installed program. Further, the emitted light photographing means 32 of the first inspection device 30 and the thermo image photographing means 42 of the second inspection device 40 are each provided with a moving device, and move and measure each solar cell of the object to be measured. Configuration is also possible. The overall control unit 50 can also control the moving device.

  In the inspection apparatus 100 configured as shown in FIGS. 3 and 4, the emitted light photographing means 32 is arranged in a dark room together with the solar cell panel of the object to be measured. Since one set of EL light emission light photographing means 32 and thermo image photographing means 42 is provided, they are moved by moving means 33 and 34 to perform inspection measurement. Accordingly, although the space for the inspection apparatus is increased, the EL light emission light photographing means 32 and the thermo image photographing means 42 can be operated simultaneously in parallel, and the inspection time can be shortened. Further, in order to shorten the inspection measurement time, it is possible to provide a plurality of EL emission light photographing means 32 and thermo image photographing means 42 without providing the moving means 33 and 34.

  Moreover, the 1st inspection apparatus 30 and the 2nd inspection apparatus 40 are arrange | positioned with respect to the solar cell panel 10 of a to-be-measured object on the upper side, and the 1st inspection apparatus 30 is on the lower side. It is good also as a structure to arrange. In this case, the solar cell panel 10 of the object to be measured is placed on the inspection apparatus so that the cover glass 11 of the object to be measured is on the lower side.

  The inspection apparatus of the present invention can be configured as shown in FIG. In FIG. 5, EL light emission light photographing means 32 and thermo image photographing means 42 are arranged in a dark room together with a solar cell module as an object to be measured. Both the EL light emission light photographing means 32 and the thermo image photographing means 42 are installed below the solar cell module of the object to be measured. Alternatively, the solar cell module as the object to be measured can be placed on the upper part of the dark room and the light shielding means 60 can prevent the light from entering. As a result, the inspection apparatus is space-saving, has a simple structure, and is inexpensive. In the configuration of FIG. 5 as well, the EL emission light photographing means 32 and the thermo image photographing means 42 are each provided with a moving means to perform inspection and measurement. Further, in order to shorten the inspection / measurement time, it is possible to employ a configuration in which a plurality of EL emission light photographing means 32 and thermo image photographing means 42 are provided without providing a moving means.

<3> Outline of Inspection by EL Luminescence Method Since the inspection method by the first inspection apparatus 30 is described in detail in the above-mentioned Patent Document 5, it will be briefly described here. When a predetermined current is supplied in the forward direction to the solar cell panel 10 to be inspected, the solar cell 18 in the solar cell panel 10 becomes an EL (electroluminescence) light source and emits light. However, since the defect portion does not emit light, the defect of each solar battery cell 18 can be known by photographing the light emission state with the emitted light photographing means 32. The amount of light emitted by the EL emission that is photographed by the emitted light photographing means 32 is weak, and the weak light is photographed by emitting light in the dark room. For this reason, a camera with good trace sensitivity is used as the emitted light photographing means 32. By this EL emission method, chipping, cracking, finger breakage, and the like are detected, and each position can be specified.

<4> Outline of Inspection Using Thermograph Since inspection using a thermograph is described in Patent Document 4, it will be briefly described. When a voltage is applied between the electrode layers of the solar cell, the electric field is usually more uneven and larger in the portion including the defect than in the surrounding region. Due to the locally non-uniform and large electric field, more current flows between the electrode layers in this part of the device than in the surrounding part. Since current flow leads to heat generation, use thermographic techniques such as IR thermography, liquid crystal microscopy, fluorescence microthermal imaging or schlieren imaging to identify the part containing the defect as a local heat source can do. In the present application, an infrared camera is used as the thermo image capturing means 42 and images are taken from the back material 12 side (lower side) of the solar cell panel 10. The position estimated as the defective portion can be identified from the image of the thermo image photographing means 42.

<5> Inspection Method According to the Present Invention The inspection method of the present invention is intended to inspect the stoig after the solar battery cell 18 is soldered with a stringer device. For this reason, after soldering with a stringer device, the cells are cracked or broken by heating and pressing during soldering. Such cell defects are inspected by the EL emission method with the first inspection apparatus. On the other hand, after soldering with a stringer device, there is a location where the connection between the cell and the lead wire is insufficient (the portion where the lead wire is lifted with respect to the cell). Such a portion with insufficient solder connection tends to generate heat when energized due to increased contact resistance. Such a defective portion of solder connection is inspected by a thermograph method. In the inspection method of the present invention, the object to be measured is carried into the inspection apparatus of the present invention, and the defective portion of the solar cell is detected by the emitted light image capturing means 32 of the first inspection apparatus and the thermo image capturing means 42 of the second inspection apparatus. The person inspects the defective soldering part by photographing. Based on the photographing result, it is determined that the portion is a defective portion or a poorly soldered portion.

  6 to 8 are images taken from the front side by the emitted light photographing means 32 in a state in which the solar battery cell 18 in a state where the solder connection is completed using the first inspection apparatus 30 is caused to emit EL light. In the image of FIG. 6, finger disconnection, which is a typical defect, appears as a rectangular dark part in parallel along the finger. Other cracks and chippings also appear as shown in FIGS. Regarding the defect of these cells, since the quantitative evaluation method is described in Patent Document 5, the description of the method for determining whether the defect is a good product or a defective product is omitted.

The thermo image photographing means 42 may be disposed on the transparent cover glass 11 side with respect to the solar battery cell 18 or may be disposed on the back surface material 12 side. For example, in the temperature range from room temperature to the highest temperature of a heated cell, if the low temperature portion is displayed in blue and the high temperature portion is displayed in red, the high temperature portion is displayed in red or yellow, and the solar cell A junction between the lead 18 and the lead wire 19 is a portion that generates a large amount of heat. In FIG. 9, the solar cells are soldered almost normally, and a relatively high temperature portion (hatched portion in the figure) exists with a uniform width (shaded portion in the figure) along the soldered lead wire. . On the other hand, when there is a poorly soldered portion, the photographed image by the thermo image photographing means 42 has a “high gourd” shape (hatched portion in the figure) as shown in FIG. In particular, heat generation is observed at the portion joined to the cell adjacent to the negative electrode wiring on the surface. It demonstrates, referring the side view which shows the state with which the photovoltaic cell and the lead wire were connected. The side where the lead wire enters the lower side of the adjacent solar battery cell is wider in the high temperature portion (shaded portion in the figure) than the lead wire, and the width of the high temperature portion becomes narrower toward the cell end along the lead wire. There is a tendency.
Based on the tendency of the image obtained by such a thermographic means, a defective soldering portion of the solar battery cell is specified, and the wiring conditions are optimized to generate uniform heat. As a result, the wiring state can be determined.

  As described above, according to the present invention, it is possible to specify a defect of a cell after soldering a solar battery cell or a defective part of soldering connection using an EL inspection function and a thermography inspection function. If such a defect or a defective soldering portion can be confirmed in the state of the string of solar cells, such a defective product will not flow out to the subsequent process. In addition, when a defective product is generated, it is possible to correct the manufacturing conditions of the stringer device and confirm that there is no defect of the solar battery cell and no defective solder connection portion by the inspection device of the present invention again.

  The inspection apparatus of the present invention can also be used for inspecting a product that has been laminated as shown in FIG. Needless to say, it can be used to check for cracks in the solar cells in the product that has undergone the laminating process or the like, or for the defectively connected parts. Furthermore, when troubles such as a decrease in power generation efficiency occur when the completed solar cell module is actually used outdoors for a long period of time, it can also be used for grasping and confirming problems in the manufacturing process. That is, the solar cell module can be confirmed by the inspection device of the present invention for the state of defects of the solar cell or the defective state of the solder connection portion, and the manufacturing conditions of the solar cell module can be reviewed based on the result.

10 Solar cell panel 11 Cover glass (transparent protective layer)
DESCRIPTION OF SYMBOLS 12 Back material 13, 14 Filler 15 String 18 Solar cell 100 Inspection apparatus 30 of this invention 1st inspection apparatus 31 Power supply means 32 Emission light imaging means 33 EL image analysis means 34, 44 Moving means 40 2nd inspection apparatus 41 Heating means 42 Thermo image photographing means 43 Thermo image analyzing means 50 Overall control unit 60 Light shielding means

Claims (8)

An inspection device for determining the quality of a solar cell having one or more solar cells, comprising a first inspection device and a second inspection device,
The first inspection apparatus includes:
Power supply means for energizing a solar cell to be inspected,
Emitted light photographing means for photographing emitted light from the solar cell energized by the power supply means;
EL image analyzing means for analyzing a photographed image of the solar cell photographed by the emitted light photographing means,
The second inspection device comprises:
Heating means for heating the solar cell to be inspected;
Thermo image photographing means for measuring the temperature of the solar cell heated by the heating means;
And a thermo image analyzing means for analyzing a photographed image of the solar cell photographed by the thermo image photographing means.   The emitted light photographing means of the first inspection device is arranged on the surface side of the solar cell, and the thermo image photographing means of the second inspection device is arranged on either the front surface side or the back surface side of the solar cell. The solar cell inspection apparatus according to claim 1.   The solar cell is a solar cell panel having a laminate structure in which a plurality of solar cells are electrically connected and arranged in a plane, and the front and back are sandwiched between a transparent protective layer and a back sheet via a sealing resin. The solar cell inspection apparatus according to claim 1, wherein the solar cell inspection apparatus is a solar cell inspection apparatus.   The solar cell inspection device according to any one of claims 1 to 3, wherein the heating means of the second inspection device supplies current to the solar cell to be inspected. Supplying a current to a solar cell to be inspected by a power supply means;
The step of causing the solar cell to emit light by the energization and photographing the emitted light of each solar cell by emitted light photographing means;
A step of identifying a position estimated as a defect position by an EL image analyzing means from a photographed image of a solar cell photographed by the emitted light photographing means;
Heating the solar cell by a heating means;
The step of photographing the temperature distribution of the solar cell by the thermo image photographing means by the heating,
Identifying a position estimated as a defect position by a thermo image analysis means from a photographed image of a solar cell photographed by the thermo image photographing means;
The type and position of defects in the solar cell are specified by the EL image analysis means. A step of identifying a defective location of solder connection of the solar battery cell by the thermo image analysis means;
A method for inspecting a solar cell, comprising:   6. The solar cell according to claim 5, wherein the emitted light photographing unit photographs from the front side of the solar cell, and the thermo image photographing unit photographs from either the front side or the back side of the solar cell. Inspection method.   The solar cell is a solar cell panel having a laminate structure in which a plurality of solar cells are electrically connected and arranged in a plane, and the front and back are sandwiched between a transparent protective layer and a back sheet via a sealing resin. The method for inspecting a solar cell according to claim 5 or 6, characterized in that:   The method for inspecting a solar cell according to claim 5, wherein the step of heating the solar cell by a heating unit is performed by energizing the solar cell.

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