JP2013094816A - 焦点調整装置およびレーザ加工装置 - Google Patents

焦点調整装置およびレーザ加工装置 Download PDF

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Publication number
JP2013094816A
JP2013094816A JP2011240193A JP2011240193A JP2013094816A JP 2013094816 A JP2013094816 A JP 2013094816A JP 2011240193 A JP2011240193 A JP 2011240193A JP 2011240193 A JP2011240193 A JP 2011240193A JP 2013094816 A JP2013094816 A JP 2013094816A
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JP
Japan
Prior art keywords
displacement sensor
workpiece
objective lens
focus adjustment
diffuse reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011240193A
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English (en)
Japanese (ja)
Inventor
Yukio Kudokoro
之夫 久所
Taisuke Miura
泰祐 三浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Priority to JP2011240193A priority Critical patent/JP2013094816A/ja
Priority to CN2012104048833A priority patent/CN103093767A/zh
Priority to TW101139239A priority patent/TW201321107A/zh
Publication of JP2013094816A publication Critical patent/JP2013094816A/ja
Pending legal-status Critical Current

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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

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  • Laser Beam Processing (AREA)
  • Measurement Of Optical Distance (AREA)
  • Photovoltaic Devices (AREA)
JP2011240193A 2011-11-01 2011-11-01 焦点調整装置およびレーザ加工装置 Pending JP2013094816A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011240193A JP2013094816A (ja) 2011-11-01 2011-11-01 焦点調整装置およびレーザ加工装置
CN2012104048833A CN103093767A (zh) 2011-11-01 2012-10-22 聚焦装置和激光加工设备
TW101139239A TW201321107A (zh) 2011-11-01 2012-10-24 聚焦裝置和雷射加工設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011240193A JP2013094816A (ja) 2011-11-01 2011-11-01 焦点調整装置およびレーザ加工装置

Publications (1)

Publication Number Publication Date
JP2013094816A true JP2013094816A (ja) 2013-05-20

Family

ID=48206269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011240193A Pending JP2013094816A (ja) 2011-11-01 2011-11-01 焦点調整装置およびレーザ加工装置

Country Status (3)

Country Link
JP (1) JP2013094816A (zh)
CN (1) CN103093767A (zh)
TW (1) TW201321107A (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180099989A (ko) * 2017-02-28 2018-09-06 계명대학교 산학협력단 노이즈 저감을 위한 레이저 출력 펄스 연동 거리센서 및 이를 구비한 레이저 장치
CN108803680A (zh) * 2018-07-25 2018-11-13 方焕辉 一种mems传感器的控制装置及方法
KR20190068039A (ko) * 2017-12-08 2019-06-18 주식회사 탑 엔지니어링 변위센서를 이용한 스크라이브 장치 및 그것의 동작 방법

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104133177B (zh) * 2014-08-19 2017-01-11 深圳市世尊科技有限公司 一种测量微型音圈马达运动特性的装置
CN104197845B (zh) * 2014-09-18 2017-12-12 海宁科海光电科技有限公司 可提示聚焦方向的高精度激光位移传感器
CN107598361A (zh) * 2017-09-21 2018-01-19 武汉华星光电技术有限公司 用于激光退火设备的焦点调整系统及方法
US20210197312A1 (en) * 2017-10-25 2021-07-01 Nikon Corporation Processing apparatus, processing system, and manufacturing method of movable body
CN215658430U (zh) * 2021-09-24 2022-01-28 宁德时代新能源科技股份有限公司 一种焊接装置及焊接设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3809803B2 (ja) * 2002-02-15 2006-08-16 オムロン株式会社 変位センサ
JP4173797B2 (ja) * 2002-12-13 2008-10-29 松下電器産業株式会社 光ディスク装置
US7903531B2 (en) * 2003-12-16 2011-03-08 Panasonic Corporation Optical disk apparatus for detecting tilt of an optical disk, and an optical disk for tilt detection
KR101365446B1 (ko) * 2006-12-28 2014-02-20 삼성전자주식회사 광픽업 장치 및 광기록 및 재생장치

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180099989A (ko) * 2017-02-28 2018-09-06 계명대학교 산학협력단 노이즈 저감을 위한 레이저 출력 펄스 연동 거리센서 및 이를 구비한 레이저 장치
KR102014917B1 (ko) * 2017-02-28 2019-08-29 계명대학교 산학협력단 노이즈 저감을 위한 레이저 출력 펄스 연동 거리센서 및 이를 구비한 레이저 장치
KR20190068039A (ko) * 2017-12-08 2019-06-18 주식회사 탑 엔지니어링 변위센서를 이용한 스크라이브 장치 및 그것의 동작 방법
KR102551322B1 (ko) 2017-12-08 2023-07-04 주식회사 탑 엔지니어링 변위센서를 이용한 스크라이브 장치 및 그것의 동작 방법
CN108803680A (zh) * 2018-07-25 2018-11-13 方焕辉 一种mems传感器的控制装置及方法

Also Published As

Publication number Publication date
CN103093767A (zh) 2013-05-08
TW201321107A (zh) 2013-06-01

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