JP2013088160A - Fixing structure for detection chip of flow-through cell - Google Patents

Fixing structure for detection chip of flow-through cell Download PDF

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JP2013088160A
JP2013088160A JP2011226538A JP2011226538A JP2013088160A JP 2013088160 A JP2013088160 A JP 2013088160A JP 2011226538 A JP2011226538 A JP 2011226538A JP 2011226538 A JP2011226538 A JP 2011226538A JP 2013088160 A JP2013088160 A JP 2013088160A
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cell
detection chip
substrate
flow
fixing structure
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Tomomi Mizutani
友海 水谷
Takashi Tanaka
俊 田中
Ryota Take
良太 嶽
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Ulvac Inc
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Ulvac Inc
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Abstract

PROBLEM TO BE SOLVED: To provide a structure in which compressibility of an elastic member can be fixed by preventing a detection chip which is mounted to a flow-through cell from being deposited to a counter surface.SOLUTION: A fixing structure for a detection chip is constituted by providing, on a substrate, a piezoelectric element of which both the sides or one side is immersed in a solution. In the fixing structure, the substrate is fixed by vertically holding a terminal portion of the substrate, excluding the piezoelectric element on the substrate.

Description

本発明は、溶液中の物質検知又は測定に用いるためのフロースルーセルに関し、特に検出方式が水晶振動子マイクロバランス法(以下、「QCM」とする。)であるフロースルーセルの検出チップの固定構造及びこれを使用したフロースルーセルに関する。   The present invention relates to a flow-through cell for use in detecting or measuring a substance in a solution, and in particular, fixing a detection chip of a flow-through cell whose detection method is a quartz crystal microbalance method (hereinafter referred to as “QCM”). The present invention relates to a structure and a flow-through cell using the same.

従来、試料溶液中に特異な分子の存在を検出するための検出素子を基板上に設けて検出チップを構成し、これをフロースルーセルとして使用することが特許文献1〜2に提案されている。
特許文献1には、正方形状の基板上に円形状の水晶振動子を配置し、その周囲をシーリングして構成される検出チップが記載されている。
特許文献2には、水晶振動子を下部部材の円形凹部に配置し、水晶振動子の外形よりも一回り小さい四角形状のセル室シール部材を水晶振動子上に配置し、その上から上部部材を配置し、上部部材と下部部材とを両側に設けられた金具により押圧して固定する構造のフロースルーセルが記載されている。
また、特願2009-295923には、検出チップをフロースルーセルに配置し、蓋を下方に移動させるだけで簡単に検出チップをセルに取り付けるための構造が開示されている。
特願2009-295923に記載されているフロースルーセルの詳細な構造を図1を用いて説明する。
図示されるように、下型1に上型2が重なることができるように蝶番3により開閉自在となるように構成される。
下型1の上面には、平面視四角形状の凹部1aが設けられ、この凹部1a内の対角する位置にピン4が計2本立設される。この凹部1a内には、図2に示す支持部材5が配置される。この支持部材5は、略四角形状の板材により構成され、前記ピン4,4が挿通される貫通孔5h,5hが設けられる。また、支持部材5の上下面方向には、貫通孔5aが設けられており下面側で検出チップ6の底面を支持するための貫通孔5a中心に向かってフランジ5bが形成されている。尚、検出チップ6は、プリント配線基板等の基板6b上面に、基板6bの外形寸法よりも一回りほど小さい凹部を設け、水晶振動子等の検出素子6aを配置することにより構成される。そして、検出素子6aの外周にリング状のシール部材13を設けて上型1及び下型2間に挟持される。
Conventionally, Patent Documents 1 and 2 propose that a detection chip for detecting the presence of a specific molecule in a sample solution is provided on a substrate to constitute a detection chip and used as a flow-through cell. .
Patent Document 1 describes a detection chip configured by arranging a circular crystal resonator on a square substrate and sealing the periphery thereof.
In Patent Document 2, a crystal resonator is disposed in a circular concave portion of a lower member, a rectangular cell chamber seal member that is slightly smaller than the outer shape of the crystal resonator is disposed on the crystal resonator, and an upper member is disposed thereon. A flow-through cell having a structure in which the upper member and the lower member are pressed and fixed by metal fittings provided on both sides is described.
Japanese Patent Application No. 2009-295923 discloses a structure for easily attaching a detection chip to a cell simply by disposing the detection chip in a flow-through cell and moving a lid downward.
The detailed structure of the flow-through cell described in Japanese Patent Application No. 2009-295923 will be described with reference to FIG.
As shown in the figure, the upper mold 2 can be opened and closed by a hinge 3 so that the upper mold 2 can overlap the lower mold 1.
A concave portion 1a having a square shape in plan view is provided on the upper surface of the lower mold 1, and a total of two pins 4 are erected at diagonal positions in the concave portion 1a. A support member 5 shown in FIG. 2 is disposed in the recess 1a. The support member 5 is formed of a substantially rectangular plate material, and is provided with through holes 5h and 5h through which the pins 4 and 4 are inserted. Further, a through hole 5a is provided in the upper and lower surface direction of the support member 5, and a flange 5b is formed toward the center of the through hole 5a for supporting the bottom surface of the detection chip 6 on the lower surface side. The detection chip 6 is configured by providing a concave portion that is slightly smaller than the outer dimension of the substrate 6b on the upper surface of the substrate 6b such as a printed wiring board, and arranging a detection element 6a such as a crystal resonator. Then, a ring-shaped seal member 13 is provided on the outer periphery of the detection element 6 a and is sandwiched between the upper mold 1 and the lower mold 2.

しかしながら、上記した特許文献1の構造では、検出素子の上面側がセルの内壁天井に貼り付き、検出素子下側から上側に向かって押圧される際に、検出素子の周囲に設けられたシーリング材の圧縮率が変化してセル容量が一定にならないという問題がある。
また、特許文献2の構造では、検出素子を上下の部材で押圧して固定するため、固定する際の押圧力の度合いによりシール部材の圧縮率が変化してセル容量が一定にならないという問題がある。
また、特願2009-295923に開示の構造でも、検出チップ6がシール部材13により導入口および排出口を備えたセル構成部材10(セル上部部材)の底面に貼り付くという問題がある。
However, in the structure of Patent Document 1 described above, when the upper surface side of the detection element sticks to the inner wall ceiling of the cell and is pressed from the lower side to the upper side of the detection element, the sealing material provided around the detection element There is a problem that the compression rate changes and the cell capacity does not become constant.
Further, in the structure of Patent Document 2, since the detection element is pressed and fixed by the upper and lower members, there is a problem in that the compression rate of the seal member changes depending on the pressing force at the time of fixing and the cell capacity is not constant. is there.
The structure disclosed in Japanese Patent Application No. 2009-295923 also has a problem that the detection chip 6 sticks to the bottom surface of the cell constituent member 10 (cell upper member) provided with the introduction port and the discharge port by the seal member 13.

特表2004-523150号公報(図4、図5)Special Table 2004-523150 Publication (Figs. 4 and 5) 特開平8-75628号公報(図3、図13)JP-A-8-75628 (FIGS. 3 and 13)

そこで、本発明は、フロースルーセルに装着される検出チップの対向面への貼り付きを防止し、弾性部材の圧縮率を一定にすることが可能な構造を提供することを目的とする。   Therefore, an object of the present invention is to provide a structure capable of preventing the detection chip attached to the flow-through cell from sticking to the opposing surface and making the compression rate of the elastic member constant.

本発明のフロースルーセルの検出チップの固定構造は、請求項1に記載の通り、溶液に両側又は片側が浸される圧電素子を基板上に設けることにより構成される検出チップの固定構造であって、前記基板上の前記圧電素子を除く前記基板の端部を上下から挟持して固定するようにしたことを特徴とする。
請求項2に記載の本発明は、請求項1に記載のフロースルーセルの検出チップの固定構造において、前記基板の端部上面に圧縮調整部材を備えたことを特徴とする。
また、本発明のフロースルーセルは、請求項3に記載の通り、請求項1又は2に記載の検出チップの固定構造を備えたものである。
The detection chip fixing structure of the flow-through cell according to the present invention is a detection chip fixing structure configured by providing, on a substrate, a piezoelectric element that is immersed in a solution on both sides or one side. In addition, the end portion of the substrate excluding the piezoelectric element on the substrate is sandwiched and fixed from above and below.
According to a second aspect of the present invention, in the fixing structure for the detection chip of the flow-through cell according to the first aspect, a compression adjusting member is provided on the upper surface of the end of the substrate.
According to a third aspect of the present invention, a flow-through cell includes the detection chip fixing structure according to the first or second aspect.

本発明によれば、圧電素子を除く基板の端部が上下から挟持されて固定されるため、検出チップの上面側に配設されたシール部材が対向面であるセル上部部材に貼り付くことがなく、検出チップの脱離が簡便になる。
また、基板の端部上面に圧縮調整部材を備えているため、上型2が下型1に重なり合った際のバネ等の弾性部材による押圧に係わらずシール部材が一定に圧縮され、流路がシール部材で塞がれて遮断されるのを防ぐことができ、セル容量を常に一定にすることができる。
According to the present invention, since the end portion of the substrate excluding the piezoelectric element is sandwiched and fixed from above and below, the seal member disposed on the upper surface side of the detection chip can be attached to the cell upper member which is the opposing surface. Therefore, the detection chip can be easily detached.
In addition, since the compression adjustment member is provided on the upper surface of the end portion of the substrate, the seal member is uniformly compressed regardless of the pressure by the elastic member such as a spring when the upper mold 2 overlaps the lower mold 1, and the flow path is It can be prevented from being blocked by the sealing member and the cell capacity can be kept constant.

フロースルーセルの従来構造の説明図Illustration of conventional structure of flow-through cell フロースルーセルに配置される支持部材の説明図Explanatory drawing of the support member arranged in the flow-through cell 本発明の一実施の形態の説明図Explanatory drawing of one embodiment of the present invention 同実施の形態の基板6bの平面図Plan view of substrate 6b of the same embodiment

図3に示されるフロースルーセルは、下型1に上型2が重なることができるように蝶番3により開閉自在となるように構成される。
下型1の上面には、平面視四角形状の凹部1aが設けられ、この凹部1a内の対角する位置にピン4が計2本立設される。この凹部1a内には、図2に示す支持部材5が配置される。この支持部材5は、略四角形状の板材により構成され、前記ピン4,4が挿通される貫通孔5h,5hが設けられる。また、支持部材5の上下面方向には、貫通孔5aが設けられており下面側には貫通孔5a中心に向かってフランジ5bが形成され、このフランジ5bにより検出チップ6の底面が支持される。従って、本発明における凹部とは有底の凹部と貫通孔により得られる凹部の両方が含まれることになる。また、検出チップ6は、プリント配線基板等の基板6b上面に凹部を設け、凹部内に水晶振動子等の検出素子6aを配置することにより構成される。そして、図4に示すように、基板6b上面の凹部よりも外側の外周端部には把持部14(A又はB)が設けられており、図3に示すように、フランジ部5bとシール部材13とで基板6bを上下から挟持するようになっている。この把持部14は、例えばポリメチルメタクリレート、フッ素樹脂、ポリエーテルエーテルケトン、ポリジメチルシロキサン等からなり、シール部材が必要以上に圧縮されるのを防いでシール部材の圧縮を一定に保つ圧縮調整部材としての役割も果たす。尚、把持部14は基板6bと一体として構成してもよい。
また、基板を構成する材料は特に制限はないが、ガラスエポキシ樹脂、紙フェノール、紙エポキシ、紙ベークライト、テフロン(登録商標)、セラミックス等で構成することができる。
上型2は、本実施の第1形態では、上型2本体の下面に、バネ等の弾性部材7を介して下型1方向に付勢された溶液の導入口8及び排出口9を備えた部材10を設けて構成される。尚、部材10の飛び出しを防ぐために、上型2本体の下面に設けられた凹部の内周には、フランジ2aが設けられている。また、下型1は、下型1本体の上面に、バネ等の弾性部材7を介して上型2方向に付勢された支持部材5を設ける構成としてもよい。導入口8及び排出口9が下面に備えられた部材10の内部には、セルの外部から溶液を導入口8に導くための導入路11と、排出口9からの溶液をセルの外部に排出するための排出路12とが形成されている。
そして、上型2が下型1に重なりあった際に、検出チップ6の検出部上方をシールするために、上型2側の導入口8及び排出口9の外周部に検出部を開口したシール部材13が設けられている。シール部材は圧縮されて溶液の漏洩を防止するものであればその材料に特に制限は無いが、例えばシリコーンゴム、フッ素樹脂系パッキン材、天然ゴム、合成ゴム、ゲル状シール材、防水スポンジ材などを用いることが出来る。
導入口8及び排出口9を備えた部材10の材質は、例えば、PMMA、フッ素樹脂、PEEKなどの樹脂等を使用することができる。
The flow-through cell shown in FIG. 3 is configured to be opened and closed by a hinge 3 so that the upper mold 2 can overlap the lower mold 1.
A concave portion 1a having a square shape in plan view is provided on the upper surface of the lower mold 1, and a total of two pins 4 are erected at diagonal positions in the concave portion 1a. A support member 5 shown in FIG. 2 is disposed in the recess 1a. The support member 5 is formed of a substantially rectangular plate material, and is provided with through holes 5h and 5h through which the pins 4 and 4 are inserted. Further, a through hole 5a is provided in the upper and lower surface direction of the support member 5, and a flange 5b is formed on the lower surface side toward the center of the through hole 5a, and the bottom surface of the detection chip 6 is supported by the flange 5b. . Accordingly, the concave portion in the present invention includes both a bottomed concave portion and a concave portion obtained by a through hole. The detection chip 6 is configured by providing a concave portion on the upper surface of a substrate 6b such as a printed wiring board and disposing a detection element 6a such as a crystal resonator in the concave portion. As shown in FIG. 4, a grip portion 14 (A or B) is provided at the outer peripheral end portion of the upper surface of the substrate 6b outside the concave portion. As shown in FIG. 3, the flange portion 5b and the seal member are provided. 13, the substrate 6b is sandwiched from above and below. The gripping portion 14 is made of, for example, polymethyl methacrylate, fluororesin, polyether ether ketone, polydimethylsiloxane, or the like, and is a compression adjusting member that prevents the seal member from being compressed more than necessary and keeps the compression of the seal member constant. Also plays a role as. In addition, you may comprise the holding | grip part 14 integrally with the board | substrate 6b.
The material constituting the substrate is not particularly limited, but can be composed of glass epoxy resin, paper phenol, paper epoxy, paper bakelite, Teflon (registered trademark), ceramics, or the like.
In the first embodiment, the upper die 2 is provided with a solution introduction port 8 and a discharge port 9 urged toward the lower die 1 via an elastic member 7 such as a spring on the lower surface of the upper die 2 main body. The member 10 is provided. In order to prevent the member 10 from popping out, a flange 2a is provided on the inner periphery of the concave portion provided in the lower surface of the upper die 2 main body. The lower mold 1 may have a configuration in which a support member 5 biased in the direction of the upper mold 2 via an elastic member 7 such as a spring is provided on the upper surface of the lower mold 1 main body. Inside the member 10 provided with the introduction port 8 and the discharge port 9 on the lower surface, an introduction path 11 for guiding the solution from the outside of the cell to the introduction port 8 and the solution from the discharge port 9 are discharged to the outside of the cell. A discharge path 12 is formed.
When the upper mold 2 is overlapped with the lower mold 1, a detection unit is opened at the outer periphery of the introduction port 8 and the discharge port 9 on the upper mold 2 side in order to seal the upper part of the detection unit of the detection chip 6. A seal member 13 is provided. The material of the seal member is not particularly limited as long as it is compressed and prevents leakage of the solution. For example, silicone rubber, fluororesin packing material, natural rubber, synthetic rubber, gel seal material, waterproof sponge material, etc. Can be used.
As the material of the member 10 provided with the introduction port 8 and the discharge port 9, for example, a resin such as PMMA, fluororesin, or PEEK can be used.

上記の構造により、支持部材5の上面に検出チップ6を配置した状態で下型1の凹部1aのピン4により支持部材5を固定し、上型2を閉じることにより、導入口8及び排出口9が設けられた部材10が検出チップ6の上方に溶液を溜めるべく、その外周をシール部材13によりシールされた空間を形成することができる。従って、導入口8及び排出口9を検出部上方に位置合わせする作業が容易となる。また、通常は外形寸法が単体での取扱が困難な数mm程度の検出チップ6を交換する際に、下型1から直接検出チップ6を取り外すことなく、支持部材5ごと取り外すことで極めて迅速に作業が可能となる。   With the above structure, the support member 5 is fixed by the pin 4 of the recess 1a of the lower mold 1 in a state where the detection chip 6 is disposed on the upper surface of the support member 5, and the upper mold 2 is closed. In order for the member 10 provided with 9 to store the solution above the detection chip 6, a space whose outer periphery is sealed by the seal member 13 can be formed. Therefore, the operation of aligning the introduction port 8 and the discharge port 9 above the detection unit becomes easy. In addition, when replacing the detection chip 6 having an outer dimension of about several millimeters, which is difficult to handle by itself, it is extremely quick to remove the support member 5 without removing the detection chip 6 directly from the lower mold 1. Work becomes possible.

上記説明した構造では、下型1の凹部1a内にピン4を立設し、支持部材5にピン4を挿通させるための貫通孔5h、5hを設けているが、これらの構造については、支持部材5が導入口及び排出口を備えた部材10に接合した際に、実用上流路条件に支障ない精度があれば必ずしも必要なものではない。
また、上型2又は下型1には、図示しないが検出チップ6へ通電するための配線を設ける必要がある。
また、本実施の形態では、下型1と上型2とを蝶番3により接続したが、必ずしも、この接続方法に限定されるものではなく、下型1の上方位置において、下型1から離間自在のスライダにより上型2を支持するようにしてもよい。
上記説明では、シール部材13を検出チップ6の外周に設けるようにしたが、導入口及び排出口を備えた部材10に設けるようにしてもよい。また、シール部材13を構成する材料については特に制限はないが、例えば、高分子弾性材料を使用することができる。
また、本発明の測定装置は、フロースルーセル用に使用されている公知のポンプや水晶発振回路やネットワークアナライザー等から構成することができる。
In the structure described above, the pin 4 is erected in the recess 1a of the lower mold 1 and the through holes 5h and 5h for allowing the pin 4 to be inserted through the support member 5 are provided. When the member 5 is joined to the member 10 having the introduction port and the discharge port, it is not always necessary if there is an accuracy that does not hinder the flow path condition in practice.
Further, although not shown, the upper die 2 or the lower die 1 needs to be provided with wiring for energizing the detection chip 6.
Further, in the present embodiment, the lower mold 1 and the upper mold 2 are connected by the hinge 3, but the present invention is not necessarily limited to this connection method, and is separated from the lower mold 1 at a position above the lower mold 1. The upper mold 2 may be supported by a free slider.
In the above description, the seal member 13 is provided on the outer periphery of the detection chip 6. However, the seal member 13 may be provided on the member 10 having the introduction port and the discharge port. Moreover, there is no restriction | limiting in particular about the material which comprises the sealing member 13, For example, a polymeric elastic material can be used.
In addition, the measuring apparatus of the present invention can be composed of a known pump, a crystal oscillation circuit, a network analyzer, etc. used for a flow-through cell.

1 下型
2 上型
3 蝶番
4 ピン
5 支持部材(セル下部部材1)
6 検出チップ
7 弾性部材
8 導入口
9 排出口
10 導入口及び排出口を備えたセル構成部材(セル上部部材)
11 導入路
12 排出路
13 シール部材
14 把持部(圧縮調整部材;セル下部部材2)
1 Lower mold 2 Upper mold 3 Hinge 4 Pin 5 Support member (cell lower member 1)
6 Detection Chip 7 Elastic Member 8 Introduction Port 9 Discharge Port 10 Cell Constituent Member (Cell Upper Member) With Inlet and Discharge Port
DESCRIPTION OF SYMBOLS 11 Introduction path 12 Discharge path 13 Seal member 14 Gripping part (compression adjustment member; cell lower member 2)

Claims (3)

溶液に両側又は片側が浸される圧電素子を基板上に設けることにより構成される検出チップの固定構造であって、前記基板上の前記圧電素子を除く前記基板の端部を上下から挟持して固定するようにしたことを特徴とするフロースルーセルの検出チップの固定構造。   A detection chip fixing structure configured by providing on a substrate a piezoelectric element immersed on both sides or one side in a solution, and sandwiching an end of the substrate excluding the piezoelectric element on the substrate from above and below A structure for fixing a detection chip of a flow-through cell, characterized by being fixed. 前記基板の端部上面に圧縮調整部材を備えたことを特徴とする請求項1に記載のフロースルーセルの検出チップの固定構造。   2. The detection structure for fixing a flow-through cell detection chip according to claim 1, wherein a compression adjusting member is provided on an upper surface of an end of the substrate. 請求項1又は2に記載の検出チップの固定構造を備えたことを特徴とするフロースルーセル。   A flow-through cell comprising the detection chip fixing structure according to claim 1.
JP2011226538A 2011-10-14 2011-10-14 Fixing structure for detection chip of flow-through cell Pending JP2013088160A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108637416A (en) * 2018-04-09 2018-10-12 洛阳隆盛科技有限责任公司 A kind of provision for disengagement after power module welding
CN110118724A (en) * 2018-02-06 2019-08-13 中国科学院大连化学物理研究所 A kind of pressure resistance light detection flow cell
CN116047126A (en) * 2023-03-06 2023-05-02 长鑫存储技术有限公司 Test seat, circuit board and burn-in test device

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JP2011137639A (en) * 2009-12-25 2011-07-14 Ulvac Japan Ltd Flow-through cell and measuring instrument using the same

Patent Citations (1)

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JP2011137639A (en) * 2009-12-25 2011-07-14 Ulvac Japan Ltd Flow-through cell and measuring instrument using the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110118724A (en) * 2018-02-06 2019-08-13 中国科学院大连化学物理研究所 A kind of pressure resistance light detection flow cell
CN110118724B (en) * 2018-02-06 2021-10-29 中国科学院大连化学物理研究所 Withstand voltage light detects flow-through cell
CN108637416A (en) * 2018-04-09 2018-10-12 洛阳隆盛科技有限责任公司 A kind of provision for disengagement after power module welding
CN116047126A (en) * 2023-03-06 2023-05-02 长鑫存储技术有限公司 Test seat, circuit board and burn-in test device
CN116047126B (en) * 2023-03-06 2024-04-19 长鑫存储技术有限公司 Test seat, circuit board and burn-in test device

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