JP2013086315A - Screen plate for screen printer - Google Patents

Screen plate for screen printer Download PDF

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JP2013086315A
JP2013086315A JP2011227512A JP2011227512A JP2013086315A JP 2013086315 A JP2013086315 A JP 2013086315A JP 2011227512 A JP2011227512 A JP 2011227512A JP 2011227512 A JP2011227512 A JP 2011227512A JP 2013086315 A JP2013086315 A JP 2013086315A
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screen plate
screen
screen printing
paste
printing machine
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JP5615788B2 (en
JP2013086315A5 (en
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Yutaka Shinoda
豊 篠田
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Tokai Shoji Co Ltd
Tokai Seiki Co Ltd
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Tokai Shoji Co Ltd
Tokai Seiki Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a screen plate for a screen printer making a printed product and the screen plate hard to break and enabling automatization of carry-in/carry-out of the printed product onto a table.SOLUTION: A photo-sensitive emulsion part of the screen plate 1 includes a first member part 5 formed in abutment on a mesh part 3, and a second member part 8 formed in abutment on the first member part 5. The first member part 5 has the same area as a solar cell semiconductor substrate and includes a paste transmission part 6 to which an image of a photomask is transferred, and an outer peripheral part 7 formed on an outer periphery of the paste transmission part 6. The second member part 8 has the same thickness D as the solar cell semiconductor substrate and is formed in abutment on the outer peripheral part 7.

Description

本発明は、スクリーン印刷機に用いられるスクリーン版に関する。   The present invention relates to a screen plate used in a screen printing machine.

スクリーン印刷機を用いた被印刷物への印刷は、特許文献１に記載されたスクリーン印刷機のように、スキージによりスクリーン版を通してテーブル上の被印刷物にペーストが刷り写される。この際、図６に示すように、一様にペースト８１が塗布されたスクリーン版８０にスキージ８２を力Ｆ１で押圧することによりペースト８１がテーブル８５上の被印刷物Ｗに刷り写されるため、スクリーン版８０及び被印刷物Ｗには力Ｆ２が加わることになる。そのため、図７に示すように、スキージ８２が被印刷物Ｗの縁を通過する際に、被印刷物Ｗのみならずスクリーン版８０も損傷する虞がある。特に、被印刷物Ｗが太陽電池用半導体基板である場合は、この傾向が強い。   In printing on a printing material using a screen printer, the paste is imprinted on the printing material on a table through a screen plate by a squeegee as in the screen printing machine described in Patent Document 1. At this time, as shown in FIG. 6, the paste 81 is imprinted on the substrate W on the table 85 by pressing the squeegee 82 with the force F1 on the screen plate 80 on which the paste 81 is uniformly applied. A force F2 is applied to the screen plate 80 and the substrate W. Therefore, as shown in FIG. 7, when the squeegee 82 passes the edge of the substrate W, not only the substrate W but also the screen plate 80 may be damaged. This tendency is particularly strong when the substrate W is a semiconductor substrate for solar cells.

これを回避するため、図８に示すように、テーブル８５上に当て板８６を置くことにより太陽電池用半導体基板の縁の段差をなくして、太陽電池用半導体基板の破損を防ぐのが一般的であった。   In order to avoid this, as shown in FIG. 8, it is common to prevent the solar cell semiconductor substrate from being damaged by placing a contact plate 86 on the table 85 so as to eliminate the step of the edge of the solar cell semiconductor substrate. Met.

特開２０１０−２０８３１７号公報JP 2010-208317 A

しかし、上記従来のように、テーブル上に当て板を置くことにより太陽電池用半導体基板の縁の段差をなくすのでは、この当て板が邪魔になりテーブル上への太陽電池用半導体基板の搬入、搬出が自動で行えない場合が生じ得る。   However, as in the conventional case, by removing the step on the edge of the solar cell semiconductor substrate by placing the contact plate on the table, the contact of the contact plate on the solar cell semiconductor substrate into the table, There are cases where unloading cannot be performed automatically.

本発明はかかる従来の問題点に鑑みてなされたものであり、被印刷物及びスクリーン版が破損し難いとともに、テーブル上への被印刷物の搬入、搬出の自動化が可能なスクリーン印刷機用スクリーン版を提供するものである。   The present invention has been made in view of such conventional problems, and a screen plate for a screen printing machine capable of automating loading and unloading of a printed material on a table while preventing the printed material and the screen plate from being damaged. It is to provide.

上記の課題を解決するために、請求項１に係るスクリーン印刷機用スクリーン版の特徴は、スキージによりスクリーン版を通してテーブル上の被印刷物にペーストを刷り写すスクリーン印刷機に用いられるスクリーン版において、枠部と、該枠部内に張られたメッシュ部と、該メッシュ部の一面に設けられ、感光性乳剤が塗布された感光性乳剤部と、を有するスクリーン版であって、前記感光性乳剤部は、前記メッシュ部に当接して形成される第１部材部と、該第１部材部に当接して形成される第２部材部と、からなり、前記第１部材部は感光性乳剤が塗布され、前記被印刷物と同じ面積であってフォトマスクの画像が転写されるペースト透過部と、該ペースト透過部の外周に形成される外周部と、からなり、前記第２部材部の厚さは、前記被印刷物の厚さ以下であって、該外周部に当接して形成されることである。   In order to solve the above-mentioned problem, the screen plate for a screen printing machine according to claim 1 is characterized in that a screen plate used in a screen printing machine that prints a paste on a printing material on a table through a screen plate with a squeegee, A photosensitive emulsion part coated with a photosensitive emulsion provided on one surface of the mesh part, the photosensitive emulsion part comprising: a mesh part stretched within the frame part; A first member portion formed in contact with the mesh portion and a second member portion formed in contact with the first member portion, wherein the first member portion is coated with a photosensitive emulsion. A paste transmission part having the same area as the substrate to be printed and an image of the photomask transferred thereon, and an outer peripheral part formed on the outer periphery of the paste transmission part, and the thickness of the second member part is Above A less prints thickness is to be formed in contact with the outer peripheral portion.

請求項２に係るスクリーン印刷機用スクリーン版の特徴は、請求項１において、前記第２部材部は、前記第１部材部と同じ材質であり、樹脂フィルム又は樹脂テープであることである。   The screen plate for a screen printing machine according to claim 2 is characterized in that, in claim 1, the second member portion is made of the same material as the first member portion, and is a resin film or a resin tape.

請求項３に係るスクリーン印刷機用スクリーン版の特徴は、請求項１において、前記第２部材部は、前記第１部材部と異なる材質であり、樹脂フィルム、樹脂テープ、金属箔、金属テープのうちのいずれか１つであることである。   The screen plate for a screen printing machine according to claim 3 is characterized in that, in claim 1, the second member portion is made of a material different from the first member portion, and is made of a resin film, a resin tape, a metal foil, or a metal tape. One of them.

請求項４に係るスクリーン印刷機用スクリーン版の特徴は、請求項１乃至３のいずれか1項記載のスクリーン印刷機用スクリーン版において、前記被印刷物は太陽電池用半導体基板であることである。   A screen plate for a screen printer according to claim 4 is characterized in that in the screen plate for a screen printer according to any one of claims 1 to 3, the substrate is a semiconductor substrate for solar cells.

請求項１に係るスクリーン印刷機用スクリーン版においては、印刷時には、被印刷物が第１部材部のペースト透過部に当接される。そして、第２部材部の厚さが被印刷物の厚さ以下であるため、被印刷物の縁の段差が少なくなる。また、このスクリーン印刷機用スクリーン版では、第１部材部と第２部材部とは一体であるため、印刷終了時に第２部材部がテーブル上に残されることはない。したがって、このスクリーン印刷機用スクリーン版によれば、被印刷物及びスクリーン版が破損し難いとともに、テーブル上への被印刷物の搬入、搬出の自動化が可能になる。   In the screen plate for a screen printing machine according to the first aspect, at the time of printing, the substrate is brought into contact with the paste transmitting portion of the first member portion. And since the thickness of the 2nd member part is below the thickness of a printing material, the level | step difference of the edge of a printing material decreases. In this screen printing machine screen plate, since the first member portion and the second member portion are integrated, the second member portion is not left on the table at the end of printing. Therefore, according to the screen plate for a screen printing machine, the printed material and the screen plate are not easily damaged, and the loading and unloading of the printed material on the table can be automated.

請求項２に係るスクリーン印刷機用スクリーン版においては、第２部材部が第１部材部と同じ材質であり、樹脂フィルム又は樹脂テープであるため、材料の数の増加を防止することができる。   In the screen plate for a screen printing machine according to claim 2, since the second member portion is made of the same material as the first member portion and is a resin film or a resin tape, an increase in the number of materials can be prevented.

請求項３に係るスクリーン印刷機用スクリーン版においては、第２部材部が第１部材部と異なる材質であり、樹脂フィルム、樹脂テープ、金属箔、金属テープのうちのいずれか１つであるため、状況に応じて第２部材部を選択することができる。   In the screen plate for a screen printing machine according to claim 3, the second member portion is made of a material different from the first member portion, and is any one of a resin film, a resin tape, a metal foil, and a metal tape. The second member part can be selected according to the situation.

請求項４に係るスクリーン印刷機用スクリーン版においては、被印刷物が太陽電池用半導体基板であり、被印刷物が破損し難いという効果が特に大きい。   In the screen plate for a screen printing machine according to claim 4, the printed material is a semiconductor substrate for solar cells, and the effect that the printed material is hardly damaged is particularly great.

実施形態のスクリーン印刷機用スクリーン版を用いたスクリーン印刷機の概要図。1 is a schematic diagram of a screen printing machine using a screen plate for a screen printing machine according to an embodiment. 実施形態のスクリーン印刷機用スクリーン版の正面図。The front view of the screen plate for screen printing machines of embodiment. 実施形態のスクリーン印刷機用スクリーン版の底面図。The bottom view of the screen plate for screen printing machines of embodiment. 実施形態のスクリーン印刷機用スクリーン版に係り、段差加工の例を示す図。The figure which shows the example of a level | step difference process in connection with the screen plate for screen printing machines of embodiment. 実施形態のスクリーン印刷機用スクリーン版に係り、段差加工の例を示す図。The figure which shows the example of a level | step difference process in connection with the screen plate for screen printing machines of embodiment. 従来のスクリーン印刷機の概要図Overview of conventional screen printer 従来のスクリーン印刷機の拡大概要図Overview of conventional screen printing machine 従来のスクリーン印刷機に係り、当て板を使用した概要図Overview of a conventional screen printing machine using a backing plate

本発明に係るスクリーン印刷機用スクリーン版を具体化した実施形態を図面に基づいて以下に説明する。図１は、このスクリーン版を用いたスクリーン印刷機の概要図である。なお、実施形態のスクリーン印刷機の主な構成は、図１に示すように、図６に示したものと同様であり、同一の構成については同一の符号を用いるものとする。   DESCRIPTION OF EMBODIMENTS Embodiments embodying a screen plate for a screen printing machine according to the present invention will be described below with reference to the drawings. FIG. 1 is a schematic view of a screen printing machine using this screen plate. The main configuration of the screen printing machine of the embodiment is the same as that shown in FIG. 6 as shown in FIG. 1, and the same reference numerals are used for the same configuration.

このスクリーン印刷機では、スキージ８２によりスクリーン版１を通してテーブル８５上の被印刷物である太陽電池用半導体基板Ｗにペースト８１が刷り写される。この際、一様にペースト８１が塗布されたスクリーン版１にスキージ８２を力Ｆ１で押圧することによりペースト８１が太陽電池用半導体基板Ｗに刷り写されるため、スクリーン版１及び太陽電池用半導体基板Ｗには力Ｆ２が加わることになる。また、スクリーン版１は、枠部２と、枠部２内に張られたメッシュ部３と、メッシュ部３の一面に感光性乳剤が塗布された感光性乳剤部４とを有している。なお、感光性乳剤としては、ジアゾ系感光乳剤、ＳＢＱ系感光乳剤などがある。   In this screen printing machine, the paste 81 is imprinted on the semiconductor substrate W for solar cells, which is a printed material on the table 85, through the screen plate 1 by the squeegee 82. At this time, since the paste 81 is printed on the solar cell semiconductor substrate W by pressing the squeegee 82 with the force F1 on the screen plate 1 on which the paste 81 is uniformly applied, the screen plate 1 and the solar cell semiconductor. A force F2 is applied to the substrate W. Further, the screen plate 1 has a frame portion 2, a mesh portion 3 stretched in the frame portion 2, and a photosensitive emulsion portion 4 in which a photosensitive emulsion is coated on one surface of the mesh portion 3. Examples of the photosensitive emulsion include diazo photosensitive emulsion and SBQ photosensitive emulsion.

図２及び図３に示すように、感光性乳剤部４は、メッシュ部３に当接して形成される第１部材部５と、第１部材部５に当接して形成される第２部材部８とから構成される。第１部材部５は、太陽電池用半導体基板Ｗと同じ面積であってフォトマスクの画像が転写されるペースト透過部６と、ペースト透過部６の外周に形成される外周部７とから構成される。また、第２部材部８は外周部７に当接して形成される。この第２部材部８は太陽電池用半導体基板Ｗと同じ厚さＤを有しており、第２部材部８の中央には、ペースト透過部６と同じ面積を有し、太陽電池用半導体基板Ｗが嵌入される凹部８ａが形成される。   As shown in FIGS. 2 and 3, the photosensitive emulsion portion 4 includes a first member portion 5 formed in contact with the mesh portion 3 and a second member portion formed in contact with the first member portion 5. 8. The first member portion 5 is composed of a paste transmission portion 6 having the same area as the solar cell semiconductor substrate W and to which an image of the photomask is transferred, and an outer peripheral portion 7 formed on the outer periphery of the paste transmission portion 6. The The second member portion 8 is formed in contact with the outer peripheral portion 7. The second member portion 8 has the same thickness D as the solar cell semiconductor substrate W, and has the same area as the paste transmission portion 6 at the center of the second member portion 8. A recess 8a into which W is inserted is formed.

このように、第１部材部５と第２部材部８との間は段差を有しており、この段差加工の例として図４及び図５に示すものがある。図４は、穴あけ加工された樹脂フィルムや金属箔を用いるものである。まず、図４（１）に示すように、枠部２内に張られたメッシュ部３に感光性乳剤からなる第１部材部５が当接して形成される。次に、図４（２）に示す穴あけ加工された第２部材部８を貼付して、図４（３）に示すスクリーン版１が得られる。ここで、第２部材部８として、樹脂フィルム又は金属箔を用いることができる。樹脂フィルムとしては、ポリエチレン系フィルム、ポリエステル系フィルム、ポリイミド系フィルムなどがあり、金属箔としては、ニッケル箔、ステンレス箔などがある。また、樹脂フィルムは、第１部材部５と同じ材質の感光性乳剤であってもよいし、異なる材質の樹脂であってもよい。   Thus, there is a step between the first member portion 5 and the second member portion 8, and examples of this step processing include those shown in FIGS. 4 and 5. FIG. 4 uses a resin film or metal foil that has been punched. First, as shown in FIG. 4 (1), a first member portion 5 made of a photosensitive emulsion is formed in contact with a mesh portion 3 stretched in the frame portion 2. Next, the 2nd member part 8 by which the drilling process shown to FIG. 4 (2) was stuck, and the screen plate 1 shown to FIG. 4 (3) is obtained. Here, as the second member portion 8, a resin film or a metal foil can be used. Examples of the resin film include a polyethylene film, a polyester film, and a polyimide film, and examples of the metal foil include a nickel foil and a stainless steel foil. The resin film may be a photosensitive emulsion made of the same material as that of the first member portion 5 or may be a resin made of a different material.

図５は、厚手の樹脂テープを用いるものである。まず、図５（１）に示すように、枠部２内に張られたメッシュ部３に感光性乳剤からなる第１部材部５が当接して形成される。次に、図５（２）に示す４分割された第２部材部８を貼付して、図５（３）に示すスクリーン版１が得られる。ここで、第２部材部８として、樹脂テープ又は金属テープを用いることができる。樹脂テープとしては、ポリエチレン系テープ、ポリエステル系テープ、ポリイミド系テープなどがあり、金属テープとしては、ニッケルテープ、ステンレステープなどがある。また、樹脂テープは、第１部材部５と同じ材質の感光性乳剤であってもよいし、異なる材質の樹脂であってもよい。   FIG. 5 uses a thick resin tape. First, as shown in FIG. 5A, the first member portion 5 made of a photosensitive emulsion is formed in contact with the mesh portion 3 stretched in the frame portion 2. Next, the second member 8 divided into four parts shown in FIG. 5 (2) is pasted to obtain the screen plate 1 shown in FIG. 5 (3). Here, a resin tape or a metal tape can be used as the second member portion 8. Examples of the resin tape include polyethylene tape, polyester tape, polyimide tape, and the metal tape includes nickel tape and stainless steel tape. The resin tape may be a photosensitive emulsion made of the same material as that of the first member portion 5 or may be a resin made of a different material.

以上の構成をしたスクリーン印刷機を用いて、太陽電池用半導体基板Ｗにペースト８１を刷り写す場合について説明する。図１〜３に示すように、テーブル８５上に搬入された太陽電池用半導体基板Ｗにスクリーン版１が覆い被される。この際、太陽電池用半導体基板Ｗは、第２部材部８の凹部８ａに嵌入され、第１部材部５のペースト透過部６に当接される。この第２部材部８は太陽電池用半導体基板Ｗと同じ厚さＤであるため、第２部材部８と太陽電池用半導体基板Ｗとは、テーブル８５面に対して面一となり、太陽電池用半導体基板Ｗの縁の段差が少なくなる。   The case where the paste 81 is imprinted on the semiconductor substrate W for solar cells using the screen printing machine having the above configuration will be described. As shown in FIGS. 1 to 3, the screen plate 1 is covered with the solar cell semiconductor substrate W carried on the table 85. At this time, the solar cell semiconductor substrate W is fitted into the recess 8 a of the second member portion 8 and is brought into contact with the paste transmitting portion 6 of the first member portion 5. Since the second member portion 8 has the same thickness D as the solar cell semiconductor substrate W, the second member portion 8 and the solar cell semiconductor substrate W are flush with the surface of the table 85 and are for the solar cell. The step at the edge of the semiconductor substrate W is reduced.

そして、スキージ８２が矢印で示される印刷方向に移動され、ペースト透過部６を通してテーブル８５上の太陽電池用半導体基板Ｗにペースト８１が刷り写される。この際、一様にペースト８１が塗布されたスクリーン版１にスキージ８２を力Ｆ１で押圧することによりペースト８１が太陽電池用半導体基板Ｗに刷り写されるため、スクリーン版１及び太陽電池用半導体基板Ｗには力Ｆ２が加わることになる。   Then, the squeegee 82 is moved in the printing direction indicated by the arrow, and the paste 81 is imprinted on the solar cell semiconductor substrate W on the table 85 through the paste transmitting portion 6. At this time, since the paste 81 is printed on the solar cell semiconductor substrate W by pressing the squeegee 82 with the force F1 on the screen plate 1 on which the paste 81 is uniformly applied, the screen plate 1 and the solar cell semiconductor. A force F2 is applied to the substrate W.

実施形態に係るスクリーン印刷機用スクリーン版においては、印刷時には、太陽電池用半導体基板Ｗが第１部材部５のペースト透過部６に当接される。そして、第２部材部８の厚さＤが太陽電池用半導体基板Ｗと同じ厚さであるため、感光性乳剤部４と太陽電池用半導体基板Ｗとは、テーブル８５面に対して面一となり、太陽電池用半導体基板Ｗの縁の段差が少なくなる。また、このスクリーン印刷機用スクリーン版では、第１部材部５と第２部材部８とは一体であるため、印刷終了時に第２部材部８がテーブル８５上に残されることはない。したがって、このスクリーン印刷機用スクリーン版によれは、太陽電池用半導体基板Ｗ及びスクリーン版１が破損し難いとともに、テーブル８５上への太陽電池用半導体基板Ｗの搬入、搬出の自動化が可能になる。   In the screen plate for a screen printing machine according to the embodiment, the semiconductor substrate W for solar cells is brought into contact with the paste transmission part 6 of the first member part 5 at the time of printing. And since the thickness D of the 2nd member part 8 is the same thickness as the semiconductor substrate W for solar cells, the photosensitive emulsion part 4 and the semiconductor substrate W for solar cells become flush with the table 85 surface. The step difference at the edge of the semiconductor substrate W for solar cells is reduced. Further, in this screen plate for a screen printing machine, the first member portion 5 and the second member portion 8 are integrated, so that the second member portion 8 is not left on the table 85 at the end of printing. Therefore, according to this screen plate for a screen printing machine, the solar cell semiconductor substrate W and the screen plate 1 are not easily damaged, and it is possible to automatically carry in and carry out the solar cell semiconductor substrate W on the table 85. .

また、このスクリーン印刷機用スクリーン版においては、第２部材部８を第１部材部５と同じ材質の樹脂フィルム又は樹脂テープとすれば、材料の数の増加を防止することができる。さらに、第２部材部８を第１部材部５と異なる材質の樹脂フィルム、樹脂テープ、金属箔、金属テープのうちのいずれか１つとすれば、状況に応じて第２部材部８を選択することができる。   In this screen printing machine screen plate, if the second member portion 8 is a resin film or resin tape made of the same material as that of the first member portion 5, an increase in the number of materials can be prevented. Furthermore, if the 2nd member part 8 is made into any one of the resin film of the material different from the 1st member part 5, a resin tape, metal foil, and a metal tape, the 2nd member part 8 will be selected according to a condition. be able to.

また、このスクリーン印刷機用スクリーン版においては、被印刷物が太陽電池用半導体基板Ｗであり、特に上記効果が大きい。   Further, in the screen plate for a screen printing machine, the printed material is the semiconductor substrate W for solar cells, and the above effect is particularly great.

以上、本発明のスクリーン印刷機用スクリーン版を実施形態に即して説明したが、本発明はこれらに制限されるものではなく、本発明の技術的思想に反しない限り、適宜変更して適用できることはいうまでもない。   The screen plate for a screen printing machine according to the present invention has been described above according to the embodiments. However, the present invention is not limited to these embodiments, and may be appropriately modified and applied as long as the technical idea of the present invention is not violated. Needless to say, it can be done.

１…スクリーン版、２…枠部、３…メッシュ部、４…感光性乳剤部、５…第１部材部、６…ペースト透過部、７…外周部、８…第２部材部、８１…ペースト、８２…スキージ、８５…テーブル、Ｗ…太陽電池用半導体基板、Ｄ…厚さ。   DESCRIPTION OF SYMBOLS 1 ... Screen plate, 2 ... Frame part, 3 ... Mesh part, 4 ... Photosensitive emulsion part, 5 ... 1st member part, 6 ... Paste transmission part, 7 ... Outer peripheral part, 8 ... 2nd member part, 81 ... Paste , 82 ... Squeegee, 85 ... Table, W ... Semiconductor substrate for solar cell, D ... Thickness.

Claims (4)

スキージによりスクリーン版を通してテーブル上の被印刷物にペーストを刷り写すスクリーン印刷機に用いられるスクリーン版において、 枠部と、該枠部内に張られたメッシュ部と、該メッシュ部の一面に設けられ、感光性乳剤が塗布された感光性乳剤部と、を有するスクリーン版であって、 前記感光性乳剤部は、前記メッシュ部に当接して形成される第１部材部と、該第１部材部に当接して形成される第２部材部と、からなり、 前記第１部材部は感光性乳剤が塗布され、前記被印刷物と同じ面積であってフォトマスクの画像が転写されるペースト透過部と、該ペースト透過部の外周に形成される外周部と、からなり、 前記第２部材部の厚さは、前記被印刷物の厚さ以下であって、該外周部に当接して形成されることを特徴とするスクリーン印刷機用スクリーン版。 In a screen plate used in a screen printing machine that prints a paste on a printed material on a table through a screen plate by a squeegee, a frame portion, a mesh portion stretched in the frame portion, and provided on one surface of the mesh portion are photosensitive. A photosensitive emulsion portion coated with a photosensitive emulsion, wherein the photosensitive emulsion portion is in contact with the first member portion formed in contact with the mesh portion. A second member portion formed in contact therewith, wherein the first member portion is coated with a photosensitive emulsion, has the same area as the substrate, and has a paste transmission portion to which an image of a photomask is transferred, And an outer peripheral portion formed on an outer periphery of the paste transmitting portion, wherein the thickness of the second member portion is equal to or less than the thickness of the printed material and is formed in contact with the outer peripheral portion. Scoring Over screen printing machine screen plate. 請求項１において、 前記第２部材部は、前記第１部材部と同じ材質であり、樹脂フィルム又は樹脂テープであることを特徴とするスクリーン印刷機用スクリーン版。 In Claim 1, The said 2nd member part is the same material as the said 1st member part, and is a resin film or a resin tape, The screen plate for screen printing machines characterized by the above-mentioned. 請求項１において、 前記第２部材部は、前記第１部材部と異なる材質であり、樹脂フィルム、樹脂テープ、金属箔、金属テープのうちのいずれか１つであることを特徴とするスクリーン印刷機用スクリーン版。 In Claim 1, The said 2nd member part is a different material from the said 1st member part, and is any one of a resin film, a resin tape, metal foil, and a metal tape, The screen printing characterized by the above-mentioned. Screen version for machine. 請求項１乃至３のいずれか1項記載のスクリーン印刷機用スクリーン版において、 前記被印刷物は太陽電池用半導体基板であることを特徴とするスクリーン印刷機用スクリーン版。 The screen plate for a screen printing machine according to any one of claims 1 to 3, wherein the substrate is a solar cell semiconductor substrate.
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Publication number Priority date Publication date Assignee Title
JP2013116586A (en) * 2011-12-02 2013-06-13 Micro-Tec Co Ltd Screen print making
JP2017100367A (en) * 2015-12-02 2017-06-08 ミタニマイクロニクス九州株式会社 Screen mask and method for producing screen mask
JP2017185682A (en) * 2016-04-05 2017-10-12 株式会社ムラカミ Screen mask and method for producing the same
CN112519392A (en) * 2019-09-17 2021-03-19 富来宝米可龙股份有限公司 Screen printing plate and method for manufacturing the same

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JPS54110201U (en) * 1978-01-20 1979-08-03
JPH04212162A (en) * 1990-10-01 1992-08-03 Murakami Screen Kk Production of photosensitive film for screen printing plate
JPH11170719A (en) * 1997-12-10 1999-06-29 Tokyo Process Service Kk Directly sticking mask and combination mask
WO2007060742A1 (en) * 2005-11-28 2007-05-31 Mitsubishi Denki Kabushiki Kaisha Printing mask and solar cell, and flat panel display ad chip capacitor
JP2008162197A (en) * 2006-12-28 2008-07-17 Murakami:Kk Screen mask and its manufacturing method

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Publication number Priority date Publication date Assignee Title
JPS54110201U (en) * 1978-01-20 1979-08-03
JPH04212162A (en) * 1990-10-01 1992-08-03 Murakami Screen Kk Production of photosensitive film for screen printing plate
JPH11170719A (en) * 1997-12-10 1999-06-29 Tokyo Process Service Kk Directly sticking mask and combination mask
WO2007060742A1 (en) * 2005-11-28 2007-05-31 Mitsubishi Denki Kabushiki Kaisha Printing mask and solar cell, and flat panel display ad chip capacitor
JP2008162197A (en) * 2006-12-28 2008-07-17 Murakami:Kk Screen mask and its manufacturing method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013116586A (en) * 2011-12-02 2013-06-13 Micro-Tec Co Ltd Screen print making
JP2017100367A (en) * 2015-12-02 2017-06-08 ミタニマイクロニクス九州株式会社 Screen mask and method for producing screen mask
JP2017185682A (en) * 2016-04-05 2017-10-12 株式会社ムラカミ Screen mask and method for producing the same
CN112519392A (en) * 2019-09-17 2021-03-19 富来宝米可龙股份有限公司 Screen printing plate and method for manufacturing the same

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