JP2013082074A - Valve unit, liquid supply device and liquid injection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To further stabilize a negative pressure property in a valve unit.SOLUTION: The valve unit 23 includes: a pressure chamber 46 communicating with a liquid passage via a communication hole; a valve body 51 for closing the communication hole by closing the valve; a pressure receiving part configuring one surface of the pressure chamber and warped and deformed depending on a pressure change in the pressure chamber; and a pressure receiving plate 57 provided at the side of the pressure chamber of the pressure receiving part where the pressure receiving plate 57 further has an axial part 57c configured to rotate when the pressure receiving plate 57 on which the deforming receiving part is pressed is moved.

Description

  The present invention relates to a valve unit, a liquid supply device, and a liquid ejection device.

  As a liquid ejecting apparatus that ejects liquid (ink) from a liquid ejecting head (recording head) to a target, for example, an ink jet printer is known. In such a printer, since it is desirable to stably supply ink to the recording head, a printer having a valve unit for adjusting the fluid pressure of ink in the middle of the ink flow path has been proposed. . Further, as the valve unit, a pressure chamber communicating with the ink flow path, the ink supply chamber, and the communication hole, a valve body that closes the communication hole when the valve is closed, and one wall surface of the pressure chamber are configured. A configuration is known that includes a pressure receiving portion that bends and displaces based on pressure fluctuation in the pressure chamber, and a pressure receiving plate that is fixed to one surface side of the pressure receiving portion in a state where the center position is eccentric to one side with respect to the pressure receiving portion. (See Patent Document 1).

JP 2010-228238 A

  In Document 1, the pressure receiving plate is displaced (tilted) as the vicinity of the center of the pressure receiving portion is displaced inward of the pressure chamber to open the valve body. However, in such a configuration, the fulcrum position of the tilting pressure receiving plate is not clearly determined due to the slack of the pressure receiving portion itself, and as a result, the negative pressure characteristics of the pressure receiving plate (when a constant negative pressure is generated in the pressure chamber) The amount of displacement of the pressure receiving plate according to the negative pressure may vary. Such variations in negative pressure characteristics affect the amount of ink in the ink flow path, and as a result, variations in the amount of ink ejected from the recording head can occur. For this reason, in order to improve the quality of the product (liquid ejecting apparatus), there has been a demand for further contrivance for suppressing variations in the negative pressure characteristics.

  SUMMARY An advantage of some aspects of the invention is to provide a valve unit, a liquid supply apparatus, and a liquid ejecting apparatus that can realize negative pressure characteristics that are more stable than those in the past.

  One aspect of the present invention is that the valve unit includes a pressure chamber that communicates with the liquid flow path via the communication hole, a valve body that closes the communication hole when the valve unit is closed, and one surface of the pressure chamber. And a pressure receiving part that bends and displaces in response to pressure fluctuations in the pressure chamber, and a pressure receiving plate provided on the pressure chamber side of the pressure receiving part, and the pressure receiving plate further includes a shaft part, The displacement of the pressure receiving portion is pressed against the pressure receiving plate, and the shaft portion rotates when the pressure receiving plate moves.

  According to this configuration, since the pressure receiving plate rotates at the shaft portion, the fulcrum position of the tilting pressure receiving plate is easily determined even when the pressure receiving portion has slack, and the negative pressure characteristic is stabilized.

One aspect of the present invention may be configured such that the valve unit includes a plate member fixed to the wall surface of the pressure chamber and in contact with the shaft portion of the pressure receiving plate.
According to this configuration, since the position of the shaft portion of the pressure receiving portion is regulated by the plate material, even if there is slack in the pressure receiving portion, the fulcrum position of the tilting pressure receiving plate is determined, and the negative pressure characteristics are more stable. To do.

One aspect of the present invention may be configured such that the valve unit includes a plate material disposed at a position corresponding to the shaft portion of the pressure receiving plate and outside the pressure chamber of the pressure receiving portion.
Even in this configuration, since the position of the shaft portion of the pressure receiving portion is regulated by the plate material, even if there is slack in the pressure receiving portion, the fulcrum position of the tilting pressure receiving plate is determined, and the negative pressure characteristics are further stabilized. .

  The technical idea according to the present invention is not realized only in the form of a valve unit. For example, a liquid flow path for supplying liquid from the upstream side to the downstream side, and any one of the valve units described above. A liquid supply apparatus including the above can also be grasped as one invention. Further, a liquid container that contains a liquid, a liquid ejecting head that can eject the liquid, a liquid flow path for supplying the liquid from the liquid container to the liquid ejecting head, and any of the above-mentioned A liquid ejecting apparatus including the valve unit can also be grasped as one invention. Furthermore, various categories of inventions such as the above-described manufacturing method of the valve unit can be grasped.

1 is a plan view of an ink jet printer according to an embodiment. The disassembled perspective view for demonstrating the structure of the valve unit in one Embodiment. The side view of the valve unit in one embodiment. The partial sectional view of the valve unit (valve closed state) in one embodiment. The partial sectional view of the valve unit (valve open state) in one embodiment. The partial sectional view of the valve unit in other embodiments. The side view of the partial range of the valve unit in other embodiment. The partial sectional view of the valve unit in other embodiments.

  An embodiment in which the liquid ejecting apparatus of the invention is embodied in an ink jet printer (hereinafter referred to as a printer) will be described with reference to the drawings. In the following description, when referring to “front-rear direction”, “left-right direction”, and “up-down direction”, the direction indicated by the arrow in the figure is used as a reference.

  FIG. 1 is a plan view of a printer 11 according to an embodiment. As shown in FIG. 1, the printer 11 includes a main body case 12 having a substantially rectangular box shape, and a longitudinal direction (in the longitudinal direction of the main body case 12 in which the platen 13 is the main scanning direction) in the lower front portion of the main body case 12. It is arranged along the left-right direction in FIG. The platen 13 is a support base that supports a recording medium P such as recording paper, and the recording medium P is placed on the platen 13 by a paper feed mechanism (not shown) in the sub-scanning direction (forward direction) perpendicular to the main scanning direction. To be fed to.

  A rod-shaped guide shaft 14 extending in the main scanning direction is installed above the rear portion of the platen 13 in the main body case 12, and a carriage 15 is supported on the guide shaft 14 in a state of being movable in the main scanning direction. A driving pulley 16 and a driven pulley 17 are rotatably supported at positions corresponding to both end portions of the guide shaft 14 on the rear side surface in the main body case 12. A carriage motor 18 is connected to the drive pulley 16, and an endless timing belt 19 is hung between the pair of pulleys 16 and 17. Since the rear end side of the carriage 15 is connected to the timing belt 19, the carriage 15 reciprocates in the main scanning direction along the guide shaft 14 by driving the carriage motor 18.

  A box-shaped cartridge holder 20 is provided on one end side (the right end side in FIG. 1) in the main body case 12. In the cartridge holder 20, a plurality of ink cartridges 21 (four in this embodiment) are detachably mounted for each ink color as a liquid container containing ink as a liquid.

  Each ink cartridge 21 is connected to the upstream end of the ink supply tube 22 by being attached to the cartridge holder 20. The downstream end of each ink supply tube 22 is connected to the upstream side of the valve unit 23 mounted on the carriage 15, and the downstream side of the valve unit 23 is a liquid jet head provided on the lower surface side of the carriage 15. Are connected to the recording head 24. A plurality of nozzle openings (not shown) are formed on a nozzle forming surface (not shown) formed on the lower surface of the recording head 24.

  The valve unit 23 is provided with a fluid pressure adjusting mechanism for stably supplying ink of each color to the recording head 24, and ink is ejected from the nozzle opening to generate a negative pressure downstream of the valve unit 23. In such a case, the ink flow pressure is adjusted by supplying an amount of ink for eliminating the negative pressure to the recording head 24 side. In the present embodiment, two flow pressure adjusting mechanisms are built in one valve unit 23 so that each valve unit 23 can adjust the flow pressure of ink for two colors.

  In the non-printing area between the cartridge holder 20 and the platen 13, that is, the non-printing area where the recording medium P does not reach, the home position HP serving as the standby position for the carriage 15 when the printer 11 is powered off or when the recording head 24 is maintained. Is provided. In addition, a maintenance unit 25 for performing maintenance of the recording head 24 is provided at a lower position when the carriage 15 is disposed at the home position HP.

  The maintenance unit 25 includes a cap 26, a suction pump 27, and the like as components. When the carriage 15 is disposed at the home position HP, the cap 26 contacts the recording head 24 so as to surround the nozzle opening, The nozzle opening is protected. In addition, by driving the suction pump 27 in a state where the cap 26 is in contact with the recording head 24, cleaning for discharging thickened ink or bubbles in the recording head 24 is performed.

  A pressurizing pump 28 is disposed on the upper side of the cartridge holder 20. An upstream end of an air supply path 29 is connected to the pressurizing pump 28, and a pressure detector 30 and an atmosphere release valve 31 are connected to a midway position of the air supply path 29. In addition, the air supply path 29 is branched into the same number as the number of ink cartridges 21 with a distributor 32 disposed downstream of the atmosphere release valve 31 as a boundary.

  Each branched air supply path 29 is connected to the corresponding ink cartridge 21 at each downstream end. Pressurized air generated by driving the pressurizing pump 28 is pumped into the ink cartridge 21 through the air supply path 29, and the ink contained in the ink cartridge 21 is moved by the pressurizing force of the pressurized air to the recording head. The pressure is supplied to the 24 side.

  Then, by alternately performing a conveyance process for conveying the recording medium P in the sub-scanning direction by a predetermined distance and a printing process for ejecting ink from the nozzle openings of the recording head 24 that moves along the main scanning direction together with the carriage 15, A recording process for the recording medium P is executed.

Next, the configuration of the valve unit 23 will be described.
FIG. 2 is an exploded perspective view for explaining the configuration of the valve unit 23 in the embodiment. As shown in FIG. 2, the valve unit 23 includes a regular flow path forming member 40 made of a resin material. On the upper surface of the flow path forming member 40, a connection portion 40a to which the downstream end of the ink supply tube 22 is connected is provided for each ink color. A recess 41 positioned on the front side and a recess 42 positioned on the rear side are formed on the right surface of the flow path forming member 40. Moreover, although illustration is abbreviate | omitted, the recessed part 42 is formed in the front side at the left side of the flow-path formation member 40, and the recessed part 41 is formed in the back side by the aspect which reversed the arrangement | positioning in the front side direction. That is, the left and right side surfaces of the flow path forming member 40 are formed so that the concave portions 41 and the concave portions 42 are arranged in the front-rear direction and the left-right direction.

  FIG. 3 is a side view of the valve unit 23 according to the embodiment. As shown in FIG. 3, the recess 41 includes a pressure chamber forming recess 41 a and a flow path forming recess 41 b extending in a direction from the pressure chamber forming recess 41 a toward the recess 42. The opening of the recess 42 is smaller than the pressure chamber forming recess 41 a of the recess 41. In the present embodiment, the pressure chamber forming recess 41a has an arc-shaped lower wall, a planar upper wall, a side wall 41d having a D shape in side view corresponding to the bottom surface of the recess 41, and an opening having the same shape as the side wall 41d. doing.

  The ink supply chamber 44 is enclosed and formed by sealing the opening of each recess 42 with a sealing member 43 (FIG. 2). In addition, the flexible film member 45 (FIG. 2) is thermally welded to the flow path forming member 40, so that the opening of each recess 41 is covered with the film member 45, and the pressure chamber 46 and the liquid flow path are provided. An ink flow path 47 is enclosed and formed. The film member 45 corresponds to a pressure receiving part. A pressure receiving plate 57 is disposed in the pressure chamber 46. The pressure receiving plate 57 is generally composed of a main body portion that is a substantially disk-shaped member, a shaft portion, and a connection portion that connects the main body portion and the shaft portion. Both sides of the connecting portion are sandwiched between wall portions 72, 72 standing from the bottom surface (side wall 41d) of the pressure chamber 46, and the shaft portion is connected to the wall portions 72, 72 and the upper wall of the pressure chamber forming recess 41a. It is sandwiched between. In FIG. 2, the pressure receiving plate 57 and the walls 72 and 72 are not shown, and the film member 45 is not shown in FIG.

  In the present embodiment, the flow pressure adjusting mechanism corresponding to one color ink includes one ink supply chamber 44 and one pressure chamber 46 connected to the connection portion 40a described above. In the following description, the thickness direction of the flow path forming member 40 which is the left-right direction in FIGS. 1 to 3 is the X direction, the upward direction is the Z direction, and the direction orthogonal to the X and Z directions is the Y direction (FIGS. The configuration of the fluid pressure adjusting mechanism and the like will be described as the direction in the front-rear direction in FIG.

  FIG. 4 simply shows a partial cross section of the valve unit 23 taken along the line AA of FIG. As shown in FIG. 4, the connecting portion 40a and the ink supply chamber 44 are connected by an ink flow path 49 as a liquid flow path. Further, one pressure chamber 46 formed on one surface side of the flow path forming member 40 communicates with an ink supply chamber 44 formed on the other surface side of the flow path forming member 40 through the communication hole 50. That is, the ink supplied through the ink supply tube 22 sequentially flows from the ink flow path 49 on the upstream side of the flow path forming member 40 through the ink supply chamber 44, the communication hole 50, the pressure chamber 46, and the ink flow path 47. The recording head 24 is supplied to the downstream side of the recording head 24. In the present embodiment, the valve unit 23 constitutes a liquid supply device.

  A valve element 51 is disposed between the ink supply chamber 44 and the pressure chamber 46 to close the communication hole 50 when the valve is closed. The valve body 51 includes a plate-like portion 52 disposed on the ink supply chamber 44 side, and a rod portion 53 that protrudes from the plate-like portion 52 and that protrudes into the pressure chamber 46 through the communication hole 50. Yes. In addition, an urging member 54 (coil spring) that urges the valve body 51 in the valve closing state is disposed in the ink supply chamber 44 and is opposed to the communication hole 50 of the plate-like portion 52. A sealing member 55 is fixed on one surface side so as to surround the rod portion 53.

  A pressure receiving plate 57 is accommodated in the pressure chamber 46 (on the pressure chamber 46 side of the film member 45). As described above, the pressure receiving plate 57 includes the main body portion 57a, the shaft portion 57c, and the connection portion 57b that connects the main body portion 57a and the shaft portion 57c. The main body 57a is disposed so as to cover the opening of the communication hole 50 on the pressure chamber 46 side, and the tip of the rod 53 is in contact with the surface of the main body 57a facing the communication hole 50. Yes. The cylindrical shaft portion 57c is accommodated in a space sandwiched between the wall portion 72 and the upper wall of the pressure chamber forming recess 41a, and the pressure chamber 46 including the space is sealed by the film member 45. Yes.

Next, the operation of the valve unit 23 configured as described above will be described.
When the ink cartridge 21 is attached to the printer 11 and the pressure pump 28 is driven, ink is filled into the ink supply chamber 44 through the ink supply tube 22 and the ink flow path 49. Subsequently, when the suction pump 27 is driven in a state where the cap 26 is in contact with the recording head 24, a negative pressure is generated in the pressure chamber 46, so that the pressure receiving portion 45 is pushed to the atmospheric pressure and the inside of the pressure chamber 46. Displaces by bending in the direction. The displaced pressure receiving portion 45 is pressed against the pressure receiving plate 57, the shaft portion 57 c of the pressure receiving plate 57 rotates, and the pressure receiving plate 57 tilts inward of the pressure chamber 46. Then, the main body portion 57a of the pressure receiving plate 57 presses the valve body 51 in the direction in which the valve body 51 is opened against the urging force of the urging member 54. As a result, the pressure chamber 46 and the ink supply chamber 44 are communicated with each other, and the communication hole 50, the pressure chamber 46, and the ink flow path 47 are filled with ink.
FIG. 5 is a partial cross section of the valve unit 23 taken along the line AA in the same manner as FIG. 4 and shows a state in which the valve body 51 is opened.

  Then, when the driving of the suction pump 27 is stopped, the ink filling into the valve unit 23 is finished, and the valve body 51 is brought into the closed state by the urging force of the urging member 54 as shown in FIG. Is done. Thereafter, printing is started, and when the ink is ejected from the nozzle opening and consumed, the pressure receiving portion 45 moves inward of the pressure chamber 46 by the negative pressure generated in the pressure chamber 46 as shown in FIG. Along with the displacement, the shaft portion 57 c rotates and the pressure receiving plate 57 tilts inward of the pressure chamber 46. Then, the pressure receiving plate 57 presses the valve body 51 against the urging force of the urging member 54 and separates it from the communication hole 50.

  As a result, the ink is again supplied from the ink supply chamber 44 into the pressure chamber 46, and the negative pressure in the pressure chamber 46 is eliminated. Then, as the pressure receiving portion 45 is displaced outward of the pressure chamber 46, the pressure receiving plate 57 is also displaced outward. At the time of printing in the printer 11, the valve unit 23 repeats the valve opening state and the valve closing state in this manner, so that an appropriate amount of ink is stably stabilized according to the amount of ink ejected from the nozzle opening. To be supplied. In particular, according to the present embodiment, the pressure receiving plate 57 has the shaft portion 57c that is accommodated in the space sandwiched between the wall portion 72 and the upper wall of the pressure chamber forming recess 41a and rotates in the space. The tilt fulcrum position is stabilized, and variations in negative pressure characteristics are suppressed. As a result, the amount of ink supplied from the pressure chamber 46 to the recording head 24 is stabilized, and variation in the amount of ink ejected from the recording head 24 (when a constant drive voltage is applied to the piezoelectric element included in the recording head 24). Variation in the amount of ink actually ejected) is suppressed, and high-quality printing results can be obtained.

The present invention is not limited to the above-described embodiment, and can be implemented in various modes without departing from the gist thereof. For example, the following embodiments are also possible. The contents obtained by appropriately combining the embodiments are also within the scope of disclosure of the present invention.
Hereinafter, the embodiment described with reference to FIGS. 1 to 5 will be referred to as a first embodiment, and the embodiment described with reference to FIGS. 6 to 8 will be referred to as a second embodiment. However, below, a different point from 1st Embodiment is demonstrated and description is abbreviate | omitted about the structure and effect | action common to 1st Embodiment.

FIG. 6 shows the configuration according to the second embodiment in a simplified manner by a partial cross section of the valve unit 23 as in FIGS. 4 and 5. However, when compared with the configuration of FIGS. It differs by the point provided with the board | plate material 73 which touches the axial part 57c. The plate material 73 is a rigid member.
FIG. 7 illustrates a partial range of the valve unit 23 including the plate material 73 from the same viewpoint as FIG.
As can be seen from FIGS. 6 and 7, in the second embodiment, the plate member 73 is fixed to the wall portion 72 and the upper wall of the pressure chamber forming recess 41 a, and from the outside of the plate member 73, The member 45 is thermally welded to the flow path forming member 40 (however, the film member 45 is not shown in FIG. 7). That is, the shaft portion 57c is accommodated in a space surrounded by the wall portion 72 and the upper wall of the pressure chamber forming recess 41a and the plate material 73, and the plate material 73 functions as a lid for the shaft portion 57c.

  Recesses for accommodating the respective end portions of the plate material 73 are formed in advance at the front end portions of the wall portion 72 and the upper wall of the pressure chamber forming recess 41a. When it spans between the said upper wall of the chamber formation recessed part 41a, it will be in the state by which each edge part of the board | plate material 73 was engage | inserted by these each recessed part. Then, when the film member 45 is thermally welded to the flow path forming member 40 with the plate material 73 fitted in this manner, the film member in the flow path forming member 40 (for example, made of polypropylene resin) is heated by the heat at the time of the welding. A portion in contact with the portion 45 (such as the tip of the wall 72 or the tip of the upper wall of the pressure chamber forming recess 41a) is partially melted. Therefore, when the melted member cools and hardens, not only the film member 45 but also the plate material 73 is fixed to the tip of the wall 72 and the tip of the upper wall of the pressure chamber forming recess 41a. However, in the state where the plate material 73 is simply bridged between the two end portions without forming the respective concave portions as described above at the respective tip portions of the wall portion 72 and the upper wall of the pressure chamber forming recess portion 41a. It may be placed and the plate material 73 may be welded to both tip portions.

  Here, the case where the board | plate material 73 does not exist is assumed. In such a case, if there is a slack in the range of the film member 45 adjacent to the shaft portion 57c in the X direction, the shaft portion 57c can move freely in the X direction to some extent. Thus, if the position of the shaft part 57c is not stabilized due to the slack of the film member 45, for example, the situation that the shaft part 57c does not contact the film member 45 and the connection part 57b contacts the film member 45 is present. (The range of the film member 45 adjacent to the connecting portion 57b in the X direction is welded to the end portions of the wall portions 72 and 72, and there is no slack, so the position of the shaft portion 57c is not as described above. If it is stable, the connecting portion 57b can easily come into contact with the film member 45). When there is slack in the film member 45 and the connecting portion 57b is in contact with the film member 45, the contacted position becomes a fulcrum (rotation center) of the pressure receiving plate 57 that tilts (rotates). The original fulcrum position of the pressure receiving plate 57 is the shaft portion 57c. However, if the fulcrum position changes in this way, the rotational radius of the pressure receiving plate 57 also changes, and as a result, the negative pressure characteristic is not stable.

  Therefore, in the second embodiment, by providing the plate 73, the movement of the shaft portion 57c in the X direction is prohibited, and the fulcrum of the pressure receiving plate 57 that tilts regardless of whether the film member 45 is slack as described above. The position is surely constant. As a result, variations in the negative pressure characteristics of the pressure receiving plate 57 are reduced as much as possible, which greatly contributes to high quality printing results.

  FIG. 8 simply shows another example of the configuration according to the second embodiment with a partial cross section of the valve unit 23 as in FIGS. In FIG. 8, the plate member 73 is disposed (fixed) at a position corresponding to the shaft portion 57 c on the outside of the film member 45 thermally welded to the flow path forming member 40. The fixing method of the plate material 73 is not particularly limited. That is, the shaft portion 57 c may be configured to be pressed by the plate material 73 from the outside of the film member 45. Even when the configuration of FIG. 8 is adopted, the positional relationship between the plate member 73 and the shaft portion 57c when the valve unit 23 is viewed from the X direction is the positional relationship shown in FIG.

  In addition, for example, the urging member 54 may be realized by the pressure receiving plate 57 itself, instead of the coil spring disposed in the ink supply chamber 44. That is, the pressure receiving plate 57 is configured as a leaf spring, and the pressure receiving plate 57 and the tip of the rod portion 53 are connected. In this way, the valve body 51 is urged in the direction to close the communication hole 50 by the leaf spring (pressure receiving plate 57), and when the negative pressure is generated in the pressure chamber 46, the valve body 51 is pressed against the pressure receiving portion 45 that is deflected and displaced. Then, it is displaced together with the tilting leaf spring (pressure receiving plate 57), and the valve is opened.

The valve unit 23 may be provided for each ink color. The method of fixing the film member 45 to the flow path forming member 40 is not limited to heat welding, and can be fixed by any method such as vibration welding.
In the above description, the liquid ejecting apparatus is embodied as an ink jet printer. However, a liquid ejecting apparatus that ejects or ejects liquid other than ink may be employed, and a liquid ejecting apparatus that ejects a minute amount of liquid droplets. The present invention can be used for various liquid ejecting apparatuses including a head or the like. In addition, a droplet means the state of the liquid discharged from the said liquid ejecting apparatus, and shall also include what pulls a tail in granular shape, tear shape, and thread shape. The liquid here may be any material that can be ejected by the liquid ejecting apparatus. For example, it may be in the state when the substance is in a liquid phase, such as a liquid state with high or low viscosity, sol, gel water, other inorganic solvents, organic solvents, solutions, liquid resins, liquid metals (metal melts ) And a liquid as one state of a substance, as well as a material in which particles of a functional material made of a solid such as a pigment or metal particles are dissolved, dispersed or mixed in a solvent. Further, representative examples of the liquid include ink and liquid crystal as described in the above embodiment. Here, the ink includes general water-based inks and oil-based inks, and various liquid compositions such as gel inks and hot melt inks. As a specific example of the liquid ejecting apparatus, for example, a liquid containing a material such as an electrode material or a color material used for manufacturing a liquid crystal display, an EL (electroluminescence) display, a surface emitting display, a color filter, or the like in a dispersed or dissolved state. It may be a liquid ejecting apparatus for ejecting, a liquid ejecting apparatus for ejecting a bio-organic material used for biochip manufacturing, a liquid ejecting apparatus for ejecting a liquid as a sample used as a precision pipette, a textile printing apparatus, a microdispenser, or the like. In addition, transparent resin liquids such as UV curable resin to form liquid injection devices that pinpoint lubricant oil onto precision machines such as watches and cameras, and micro hemispherical lenses (optical lenses) used in optical communication elements. A liquid ejecting apparatus that ejects a liquid onto the substrate or a liquid ejecting apparatus that ejects an etching solution such as an acid or an alkali to etch the substrate may be employed. The present invention can be applied to any one of these injection devices.

  DESCRIPTION OF SYMBOLS 11 ... Printer, 21 ... Ink cartridge, 23 ... Valve unit, 24 ... Recording head, 40 ... Channel formation member, 41a ... Pressure chamber formation recessed part, 44 ... Ink supply chamber, 45 ... Film member (pressure receiving part), 46 ... Pressure chamber, 47, 49 ... ink flow path, 50 ... communication hole, 51 ... valve body, 54 ... urging member, 57 ... pressure receiving plate, 57a ... main body portion, 57b ... connection portion, 57c ... shaft portion, 72 ... wall Part 73 ... Plate material

Claims (5)

A pressure chamber communicating with the liquid channel via the communication hole;
A valve body that closes the communication hole when the valve is closed;
A pressure receiving portion that constitutes one surface of the pressure chamber, and is deflected and displaced in accordance with pressure fluctuation in the pressure chamber;
A pressure receiving plate provided on the pressure chamber side of the pressure receiving portion,
The valve unit, further comprising a shaft portion, wherein the shaft portion rotates when the pressure receiving plate that is displaced is pressed against the pressure receiving plate to move the pressure receiving plate.   The valve unit according to claim 1, further comprising a plate member fixed to a wall surface of the pressure chamber and in contact with a shaft portion of the pressure receiving plate.   2. The valve unit according to claim 1, further comprising a plate member disposed at a position outside the pressure chamber of the pressure receiving portion and corresponding to a shaft portion of the pressure receiving plate.   A liquid supply apparatus comprising: a liquid flow path for supplying a liquid from the upstream side toward the downstream side; and the valve unit according to any one of claims 1 to 3.   A liquid container that contains a liquid, a liquid ejecting head that can eject the liquid, a liquid channel that supplies the liquid from the liquid container toward the liquid ejecting head, and claim 1. A liquid ejecting apparatus comprising the valve unit according to claim 3.

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