JP2013077843A - Substrate processing device and substrate processing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate processing device capable of enhancing in-plane uniformity of an etching amount of a substrate to be processed at the time of etching of the substrate to be processed.SOLUTION: A substrate processing device comprises: a processing chamber having a gas supplying section and a gas discharging section; a holding member that is disposed in the processing chamber and holds a substrate to be processed in a rotatable and vertically movable manner; a first temperature regulator for performing temperature regulation of gas supplied to the processing chamber; an etching liquid supplying member for supplying etching liquid to the substrate to be processed and performing an etching process; an etching liquid supplying tank connected to the etching liquid supplying member outside the processing chamber; a second temperature regulator for performing temperature regulation of the etching liquid in the etching liquid supplying tank; and a controlling mechanism for controlling the temperature regulation of the gas and the temperature regulation of the etching liquid performed by first and second temperature regulators such that a temperature in the processing chamber becomes higher than a temperature of the etching liquid in the etching liquid supplying tank and a difference between the temperatures becomes constant.

Description

  The present invention relates to an apparatus for processing a substrate such as a semiconductor wafer or a glass substrate, and a substrate processing method.

  2. Description of the Related Art A conventional substrate processing apparatus such as a semiconductor wafer or a glass substrate is disposed in a processing chamber having a gas supply unit and an exhaust unit, and holds the substrate to be processed in a rotatable and vertically movable manner. An etching solution supply nozzle for supplying an etching solution to the substrate to be processed and performing an etching process is provided. A substrate to be processed (for example, a wafer) is held in a processing chamber so as to be rotatable and vertically movable, and while rotating the substrate to be processed, an etching solution heated at normal temperature or warm is supplied to etch an oxide film on the surface of the wafer, for example. To do. It is also possible to scan the supply nozzle radially while the wafer rotates. Thereafter, the wafer is transferred to the same chamber or another chamber, rinsed with pure water, and dried by a drying means such as a rotary or air knife.

JP 2009-224514 A Japanese Patent Laid-Open No. 07-074140 Japanese Unexamined Patent Publication No. 2000-119874

  However, in the conventional processing apparatus and processing method, a temperature difference occurs in the surface of the substrate to be processed during etching with the etchant. Specifically, since the substrate to be processed is rotated, the temperature at the center of the substrate to be processed is the highest, and the temperature decreases toward the outer peripheral edge. As a result, since the etching has temperature dependence, the etching amount at the center of the substrate to be processed is the largest, and the etching amount is decreased toward the outer peripheral edge. This tendency becomes more prominent as the etching solution is heated for the purpose of increasing the etching rate.

  An object of the present invention is to provide a substrate processing apparatus and a processing method capable of improving the in-plane uniformity of the etching amount of a substrate to be processed during etching of the substrate to be processed.

In order to solve the above problems, according to the first aspect of the present invention, a processing chamber having a gas supply unit and an exhaust unit;
A holding member which is disposed in the processing chamber and holds the substrate to be processed so as to be rotatable and vertically movable;
A first temperature controller for adjusting the temperature of the gas supplied to the processing chamber;
An etching solution supply member for performing an etching process by supplying an etching solution to the substrate to be processed;
An etchant supply tank connected to the etchant supply member outside the processing chamber;
A second temperature regulator for adjusting the temperature of the etching solution in the tank; and a gas temperature adjustment and an etching solution temperature adjustment by the first and second temperature regulators when the temperature in the processing chamber is A control mechanism for controlling the temperature difference between the etching solutions to be higher than the temperature of the etching solution in the tank and to be constant;
An apparatus for processing a substrate is provided.

According to the second aspect of the present invention, the step of holding the substrate to be processed in the processing chamber so as to be rotatable and vertically movable, the step of performing the etching process by supplying the etching solution while rotating the substrate to be processed, Including
The substrate processing method is characterized in that the etching process is performed under a condition that the temperature in the processing chamber is higher than the temperature of the etching solution and the temperature difference between them is constant.

According to a third aspect of the present invention, a processing chamber having a gas supply and an exhaust;
A holding member which is disposed in the processing chamber and holds the substrate to be processed so as to be rotatable and vertically movable;
A heater built-in shielding member which is disposed in the processing chamber so as to be detachable from the substrate to be processed, and has an area equivalent to or larger than the substrate to be processed;
An etching solution supply member for performing an etching process by supplying an etching solution to the substrate to be processed;
An etchant supply tank connected to the etchant supply member outside the processing chamber;
A temperature regulator for adjusting the temperature of the etchant in the tank; and a control so that the heating temperature of the heater is equal to or higher than the temperature of the etchant in the tank by the temperature regulator. Control mechanism to do;
An apparatus for processing a substrate is provided.

  ADVANTAGE OF THE INVENTION According to this invention, the substrate processing apparatus and processing method which can improve the in-plane uniformity of the etching amount of a to-be-processed substrate at the time of etching of a to-be-processed substrate can be provided.

1 is a schematic view showing a substrate processing apparatus according to a first embodiment of the present invention. It is the schematic which shows the processing apparatus of the board | substrate which concerns on 2nd Embodiment of this invention. It is a figure which shows the temperature distribution of the radial direction of a wafer when chamber temperature is made constant and the temperature of etching liquid is changed.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(First embodiment)
FIG. 1 is a schematic view showing a substrate processing apparatus according to the first embodiment.

  For example, a columnar block 2 is disposed at the bottom of the rectangular processing chamber 1 so as to be rotatable and vertically movable. The cylindrical rotating shaft 3 is attached to the block 2 and rotated by a motor (not shown). The suction chuck 4 is provided on the block 2 and sucks and holds a substrate to be processed, for example, a semiconductor wafer. An inner cup 5 and an outer cup 6 which are cylindrical and bent in the vicinity of the upper part are erected on the bottom of the chamber 1 concentrically so as to surround the columnar block 2. The annular space between the cylindrical block 2 and the inner cup 5 functions as a region for collecting the etching solution scattered from the surface of the wafer 41 rotating during etching, and the etching solution discharged into the annular space is placed at the bottom of the chamber 1. It collects through the connected collection line 7. The annular space between the inner cup 5 and the outer cup 6 functions as a liquid receiving portion that receives pure water scattered from the surface of the wafer 41 that rotates during the rinsing process, and the pure water discharged into the annular space is placed at the bottom of the chamber 1. It is discharged through the connected drain line 8.

  The first temperature controller 9 has a humidifying function in addition to the heating of gas (for example, air). The first temperature controller 9 is connected to the HEPA filter 10 at the upper part of the processing chamber 1 through a supply line 11, and a part of the air in the chamber 1 is circulated through the return line 12 to heat and humidify the air in the chamber 1. Make adjustments. As the first temperature adjuster 9, an existing air conditioner, for example, a water-cooled precision air conditioner can be used. In the heating adjustment, the temperature of the air is detected by the first temperature sensor 13 inserted in the chamber 1, the detection signal is fed back to a controller (not shown), and the detected temperature is compared with the set temperature by the controller. A control signal is output to the first temperature regulator 9 based on the comparison result, and the temperature of the air by the heater (or cooling system) of the first temperature regulator 9 is controlled. In humidification adjustment, the humidity sensor 14 inserted in the chamber 1 detects the humidity of the air, feeds back this detection signal to a controller (not shown), compares the detected humidity with the set humidity, and compares the results. The control signal is output to the first temperature regulator 9 based on the above, and the humidity of the air by the humidifier of the first temperature regulator 9 is controlled.

  The etching solution discharge nozzle 15 is disposed in the processing chamber 1 so as to be positioned above the center of the wafer held by the suction chuck 4. The discharge nozzle 15 can be scanned in the radial direction of the wafer. The etchant tank 16 is connected to the discharge nozzle 15 through the first supply line 17. As the etchant, a hydrofluoric acid-based or hydrofluoric acid-based one can be used. The tank 16 is connected to the cylindrical rotary shaft 3 through the second supply line 18 and the main line 19. A valve 20 is interposed in the second supply line 18. A pump (not shown) is interposed in each of the first and second supply lines 17 and 18 located near the tank 16. The second temperature regulator 21 is connected to the tank 16 through circulation lines 22 and 23 and adjusts the temperature of the etching solution in the tank 16. As the second temperature regulator 21, for example, an existing air-cooled or water-cooled Peltier circulating fluid temperature regulator can be used. In the temperature adjustment, the temperature of the etching solution is detected by the second temperature sensor 24 inserted in the etching solution in the tank 16, and this detection signal is fed back to a controller (not shown), and the detected temperature and the set temperature are detected by the controller. The comparison is performed by outputting a control signal to the second temperature regulator 21 based on the comparison result and controlling the temperature of the etching solution by the heater (or the cooling system) of the second temperature regulator 21.

  The pure water discharge nozzle 25 is disposed in the processing chamber 1 so as to be positioned above the center of the wafer held by the suction chuck 4. The discharge nozzle 25 can be scanned in the radial direction of the wafer. The pure water tank 26 is connected to the discharge nozzle 25 through the first supply line 27. The tank 26 is connected to the cylindrical rotary shaft 3 through the second supply line 28 and the main line 19. A valve 29 is inserted in the second supply line 28. A pump (not shown) is interposed in each of the first and second supply lines 27 and 28 located near the tank 26. The third temperature regulator 30 is connected to the tank 26 through circulation lines 31 and 32 and adjusts the temperature of pure water in the tank 26. As the third temperature regulator 30, for example, an existing air-cooled or water-cooled Peltier circulating fluid temperature regulator can be used. In the temperature adjustment, the temperature of pure water is detected by the third temperature sensor 33 inserted in the pure water in the tank 26, the detection signal is fed back to a controller (not shown), and the detected temperature and the set temperature are detected by the controller. The comparison is performed by outputting a control signal to the third temperature regulator 30 based on the comparison result and controlling the temperature of pure water by the heater (or cooling system) of the third temperature regulator 30.

  A spray nozzle 34 for a dry gas (for example, dry nitrogen) is disposed in the processing chamber 1 so as to be inclined and positioned above the center of the wafer held by the suction chuck 4. The dry gas supply line 35 extends from the outside into the chamber 1 and is connected to the spray nozzle 34.

  Next, a substrate processing method according to the first embodiment will be described using the processing apparatus described above.

  First, a substrate to be processed, for example, a semiconductor wafer 41 is held on the suction chuck 4 of the block 2 in the processing chamber 1 so as to be rotatable and vertically movable. The first temperature regulator 9 having a humidifying function is operated to supply warming / humidified air into the chamber 1 through the supply line 11 and the HEPA filter 10, and a part of the air in the chamber 1 is supplied through the return line 12 to the first. Return to the temperature regulator 9.

  At this time, the temperature in the chamber 1 is controlled by the first temperature regulator 9, the first temperature sensor 13 and the controller (not shown) as described above, and the etching solution in the etching solution tank 16 is set to the second temperature. Control is performed by the regulator 21, the second temperature sensor 24, and the controller (not shown) as described above, and the temperature in the chamber 1 is set higher than the temperature of the etching solution, and the temperature difference between them is constant. To do. The temperature in the chamber 1 is controlled depending on the temperature of the etching solution. For example, when the temperature of the etching solution is in the range of 22 to 24 ° C., the temperature in the chamber 1 is 1.5 times higher than the temperature of the etching solution. The temperature is set to -8 ° C higher and the temperature difference is controlled to be constant. Further, when the temperature of the etching solution is set to 25 ° C. or more, preferably 27 to 35 ° C. in order to increase the etching rate, the temperature in the chamber 1 is set to 1 to 15 ° C. higher than this temperature, And the temperature difference between them is controlled to be constant. If the difference between the temperature in the chamber 1 and the temperature of the etching solution is small, it becomes difficult to improve the uniformity of etching within the wafer surface.

  Moreover, it is preferable to control the humidity in the chamber 1 to, for example, 90 to 100% by the first temperature controller 9, the humidity sensor 14, and a controller (not shown) by the method described above.

  Next, the block 2 is rotated by the rotating shaft 3 to rotate the wafer 41 held on the suction chuck 4 and a pump (not shown) is driven to cause a predetermined temperature difference from the temperature in the chamber 1 from the etching solution tank 16. The controlled etching solution is discharged from the discharge nozzle 15 toward the wafer 41 through the first supply line 17, and the oxide film on the surface of the wafer 41 is removed by etching. At this time, the etching solution discharge nozzle 15 is scanned in the radial direction of the wafer 41. The etching solution scattered from the surface of the rotating wafer 41 is discharged into an annular space between the cylindrical block 2 and the inner cup 5 and is collected through a collection line 7 connected to the bottom of the chamber 1.

  In such etching, the temperature distribution generated in the process of removing the latent heat of evaporation on the surface of the wafer 41 by setting the temperature in the chamber 1 to be higher than the temperature of the etchant and making the temperature difference constant. (Temperature difference between the center and the outer peripheral edge of the wafer 41) can be relaxed, and the uniformity of etching within the wafer 41 surface can be improved.

  In particular, when the etching rate is increased using a heated etching solution, the temperature distribution generated in the process of removing latent heat of evaporation on the surface of the wafer 41 becomes remarkable, but the temperature in the chamber 1 is higher than the temperature of the etching solution. In addition, by setting the temperature difference to be constant, the temperature distribution can be effectively relaxed, and the etching uniformity within the surface of the wafer 41 can be improved.

  However, when the temperature in the chamber 1 is increased, moisture evaporation (vaporization) of the etching solution on the surface of the wafer 41 is also accelerated at the same time. For this reason, by raising not only the heating in the chamber 1 but also the humidity, the moisture concentration of the etching solution can be suppressed and the concentration of the etching solution on the surface of the wafer 41 can be made constant. As a result, the etching rate can be improved to increase the throughput, and at the same time, the etching uniformity within the wafer 41 surface can be further improved.

  In the etching of the wafer 41, the valve 29 of the second supply line 28 on the pure water side is closed, the valve 20 of the second supply line 18 on the etchant side is opened, and a pump (not shown) is actuated to start the etching from the etchant tank 16. The etching solution controlled to a predetermined temperature difference from the temperature in the chamber 1 is supplied to the cylindrical rotary shaft 3 through the second supply line 18 and the main line 19, and the etching solution is discharged from the front end to the back surface of the wafer 41. Good. Such supply of the etching solution to the back surface of the wafer 41 prevents the etching solution discharged on the surface of the wafer 41 from flowing around to the back surface side, thereby avoiding unnecessary etching of the outer periphery of the back surface of the wafer 41.

  Next, the supply of the etching solution to the front surface of the wafer 41 (in some cases, the back surface of the wafer 41) is stopped. The block 2 is moved upward, and the wafer 41 held by the suction chuck 4 is positioned above the time of etching. While continuing the rotation of the wafer 41 by the rotary shaft 3 and the block 2, a pump (not shown) is operated to discharge pure water from the pure water tank 26 through the first supply line 27 toward the wafer 41 from the pure water discharge nozzle 25. Then, the surface of the wafer 41 is rinsed. The pure water scattered from the surface of the rotating wafer 41 is discharged to the annular space between the inner cup 5 and the outer cup 6 because the wafer 41 is positioned above the time of etching, and the drain line connected to the bottom of the chamber 1 8 is discharged.

  In such a rinsing process, the pure water in the pure water tank 26 is controlled as described above by the third temperature regulator 30, the third temperature sensor 33, and a controller (not shown), and the temperature of the pure water is set to Set to be equal to or higher than the temperature of the etching solution. That is, in the rinse process with pure water performed after the etching process, the surface of the wafer 41 is transiently etched by the remaining etching solution. If the temperature of the pure water is lower than the temperature of the etching solution, the etching solution remaining on the surface of the wafer 41 at the initial stage of the rinsing process is cooled to cause non-uniform temperature in the surface, resulting in variations in transient etching. As described above, the temperature of the pure water is set to be equal to or higher than the temperature of the etching solution, thereby preventing the cooling of the etching solution remaining on the surface of the wafer 41 at the initial stage of the rinsing process and making the temperature in the surface uniform. The transitional etching can be made to proceed uniformly.

  In the rinsing process of the wafer 41, the valve 20 of the second supply line 18 on the etching solution side is closed, the valve 29 of the second supply line 28 on the pure water side is opened, and a pump (not shown) is operated to start from the pure water tank 26. As described above, pure water having a temperature equal to or higher than the temperature of the etching solution is supplied to the cylindrical rotary shaft 3 through the second supply line 28 and the main line 19, and pure water is discharged from the front end to the back surface of the wafer 41. May be. In this way, by discharging pure water having a temperature equal to or higher than the temperature of the etching solution to the back surface of the wafer 41, the etching solution remaining on the surface of the wafer 41 in the initial rinsing process is also cooled from the back surface side of the wafer 41. Therefore, it is possible to keep the temperature in the surface uniform and to make the transitional etching proceed more uniformly.

  Next, the supply of pure water is stopped, and while the rotation of the wafer 41 by the rotating shaft 3 and the block 2 is continued, the dry gas (for example, dry nitrogen) is supplied to the wafer 41 rotating from the spray nozzle 34 through the dry gas supply line 35. Then, the spray wafer 41 is dried.

  By spraying the dry gas on the surface of the wafer 41 in this way, the humidity in the vicinity of the wafer 41 can be greatly reduced, so that the drying speed can be increased and the drying time can be shortened.

  According to the first embodiment described above, the substrate to be processed is relaxed by reducing the temperature distribution in the surface of the substrate to be processed, that is, the temperature variation between the center and the outer periphery of the substrate to be processed. In-plane uniformity can be improved.

  Further, the etching rate can be increased by increasing the temperature of the etching solution. At this time, the temperature in the chamber is increased as the temperature of the etching solution increases. When the temperature in the chamber is raised, the moisture evaporation (vaporization) of the etching solution on the surface of the substrate to be processed is accelerated at the same time. For this reason, by raising not only the heating in the chamber but also the humidity, it is possible to suppress the evaporation of moisture in the etching solution and to keep the concentration of the etching solution on the surface of the substrate to be processed. As a result, the etching rate can be improved to increase the throughput, and at the same time, the etching uniformity within the substrate to be processed can be further improved.

  Further, when the temperature of the etching solution is raised, the temperature of pure water used at the time of rinsing is set to be equal to or higher than the temperature of the etching solution, so that it remains on the surface of the substrate to be processed at the initial stage of the rinsing process. It is possible to keep the temperature in the surface uniform by preventing the cooling of the etching solution, and to allow the transient etching to proceed uniformly.

(Second Embodiment)
FIG. 2 is a schematic view showing a substrate processing apparatus according to the second embodiment. In FIG. 2, the same members as those in FIG.

  The substrate processing apparatus according to the second embodiment is, for example, a disk having a thickness of 5 to 10 mm having a built-in heater 36 instead of the first temperature controller 9 having the humidifying function of the substrate processing apparatus shown in FIG. A shielding member 37 made of tetrafluoroethylene is disposed in the processing chamber 1. That is, the shielding member 37 is disposed so as to face the wafer 41 with the same dimensions as the wafer 41 that is the substrate to be processed, and to be movable up and down above the wafer 41, that is, to be able to come in contact with the wafer 41. The heater 36 built in the shielding member 37 is set to a temperature equal to or higher than the temperature of the etching solution in the etching solution tank 16 by the heater (or the cooling system) of the second temperature regulator 21 which is a temperature regulator. It is controlled by a controller (not shown).

  The shielding member 37 is provided with through holes through which the discharge nozzles 15 and 25 are inserted, and an annular insulating material (not shown) is provided on the inner surface of each through hole. The spray nozzle 34 is disposed in the processing chamber 1 so as to be movable in the horizontal direction and the vertical direction. Such a spray nozzle 34 is positioned between the wafer 41 and the shielding member 37 when the shielding member 37 moves upward and sprays dry gas (for example, dry nitrogen).

  Next, a substrate processing method according to the second embodiment will be described using the processing apparatus described above.

  First, a substrate to be processed, for example, a semiconductor wafer 41 is held on the suction chuck 4 of the block 2 in the processing chamber 1 so as to be rotatable and vertically movable.

  At this time, the shielding member 37 is lowered and brought close to the wafer 41 to control the heating temperature of the heater 36, and the etching solution in the etching solution tank 16 is controlled by the second temperature regulator 21, the second temperature sensor 24 and the control. A heater (not shown) is controlled in the same manner as in the first embodiment, and the temperature of the heater 36 is set to be equal to the temperature of the etching solution.

  Next, the block 2 is rotated by the rotating shaft 3 to rotate the wafer 41 held on the suction chuck 4 and the pump (not shown) is driven to discharge the etching solution from the etching solution tank 16 through the first supply line 17 to the discharge nozzle 15. Is discharged toward the wafer 41, and the oxide film on the surface of the wafer 41 is removed by etching. At this time, the etching solution discharge nozzle 15 is scanned in the radial direction of the wafer 41. The etching solution scattered from the surface of the rotating wafer 41 is discharged into an annular space between the cylindrical block 2 and the inner cup 5 and is collected through a collection line 7 connected to the bottom of the chamber 1.

  In such etching, by setting the heating temperature of the shielding member 37 by the heater 36 to be equal to the temperature of the etching solution, it is possible to prevent the latent heat of evaporation from being taken away on the surface of the wafer 41, and the temperature distribution in the wafer 41 (wafer The occurrence of a temperature difference between the center of 41 and the outer peripheral edge can be avoided. As a result, the uniformity of etching within the wafer 41 surface can be improved.

  Thereafter, similarly to the first embodiment, the wafer 41 is rinsed with pure water and dried by blowing dry nitrogen.

  According to the second embodiment described above, the substrate to be processed is avoided by avoiding the temperature distribution in the surface of the substrate to be processed, that is, the temperature variation between the center and the outer periphery of the substrate to be processed in the etching of the substrate to be processed. In-plane uniformity can be improved.

  In the first and second embodiments, a semiconductor wafer is used as the substrate to be processed, but a glass substrate can also be used.

  Embodiments of the present invention will be described below with reference to the processing apparatus described above.

(Example 1 to Example 3)
In the processing apparatus shown in FIG. 1, when the block 2 is rotated by the rotating shaft 3 in the processing chamber 1 and pure water simulating an etching solution is discharged from the discharge nozzle 15 onto the wafer 41 held by the suction chuck 4, the following is performed. When the conditions were set, the temperature distribution from the center of the wafer to the outer periphery was measured. The temperature distribution of the wafer was measured with a temperature detection chip embedded in the radial direction of the wafer.

Radius of wafer 41: 150 mm,
The rotation speed of the wafer 41: 500 rpm,
Etching solution discharge amount: 1.5 to 2.0 L / min,
Temperature in chamber 1: 24.1 ° C.
Temperature of pure water: 22.5 ° C, 24.5 ° C and 26.5 ° C,
Discharge time of pure water per wafer: 20 seconds.

  The results are shown in FIG. In FIG. 3, Example 1 shows a temperature distribution when the temperature of the etching solution is controlled to 22.5 ° C., Example 2 shows a temperature distribution when the temperature of the etching solution is controlled to 24.5 ° C., and Example 3 Indicates the temperature distribution when the temperature of the etching solution is controlled to 26.5 ° C.

  As apparent from FIG. 3, in Example 1 in which the temperature in the chamber 1 was set higher (24.1 ° C.) than the temperature of the etchant (22.5 ° C.), the temperature of the etchant (24.5 ° C., 26.5 ° C.). It can be seen that the temperature in the wafer surface can be made uniform as compared with Example 2 and Example 3 in which the temperature in the chamber 1 is set lower (24.1 ° C.) than in the case of (° C.).

In addition, under the above conditions (instead of pure water, an aqueous solution of ammonium hydrogen fluoride having a concentration of 3 wt% and an aqueous solution of ammonium fluoride of 34 wt%, a surfactant of 0.1 wt% or less, and the other uses an etching solution made of pure water). The etching amount in the diameter direction of the wafer was measured. Measure the amount of etching in the four different diameter directions of the wafer, the average value of the etching amount 20 seconds after the start of etching, and the difference in the etching amount in the diameter direction of the wafer divided by the maximum etching amount, multiplied by 100 Was calculated as an average value (%) of four times, and the etching uniformity within the surface of the wafer was obtained. The etching amount was obtained by measuring the thickness of the thermal oxide film on the wafer before and after etching with an optical interference spectroscopic ellipsometer. The results are shown in Table 1 below.

  As apparent from Table 1, in Example 1 in which the temperature in the chamber 1 was set higher (24.1 ° C.) than the temperature of the etchant (22.5 ° C.), the temperature of the etchant (24.5 ° C., 26.26 ° C.). It can be seen that in-plane etching uniformity within the wafer surface can be improved as compared with Example 2 and Example 3 in which the temperature in the chamber 1 is set lower (24.1 ° C.) than 5 ° C.).

  DESCRIPTION OF SYMBOLS 1 ... Processing chamber, 3 ... Rotating shaft, 4 ... Adsorption chuck, 9 ... 1st temperature regulator which has a humidification function, 15 ... Etching liquid discharge nozzle, 16 ... Etching liquid tank, 21 ... 2nd temperature regulator, 25 DESCRIPTION OF SYMBOLS ... Pure water discharge nozzle, 26 ... Pure water tank, 30 ... 3rd temperature regulator, 34 ... Spray nozzle, 36 ... Heater, 37 ... Shielding member, 41 ... Semiconductor wafer.

Claims (12)

A processing chamber having a gas supply and an exhaust;
A holding member which is disposed in the processing chamber and holds the substrate to be processed so as to be rotatable and vertically movable;
A first temperature controller for adjusting the temperature of the gas supplied to the processing chamber;
An etching solution supply member for performing an etching process by supplying an etching solution to the substrate to be processed;
An etchant supply tank connected to the etchant supply member outside the processing chamber;
A second temperature regulator for adjusting the temperature of the etching solution in the tank; and a gas temperature adjustment and an etching solution temperature adjustment by the first and second temperature regulators when the temperature in the processing chamber is A control mechanism for controlling the temperature difference between the etching solutions to be higher than the temperature of the etching solution in the tank and to be constant;
An apparatus for processing a substrate, comprising:   The substrate processing apparatus according to claim 1, wherein the first temperature controller is an air conditioner.   The substrate processing apparatus according to claim 1, further comprising a humidifying mechanism for humidifying the inside of the processing chamber.   The substrate processing apparatus according to claim 3, wherein the first temperature controller also has a humidifying function.   A pure water supply member for supplying pure water to the substrate to be treated to perform a rinsing process; a pure water supply tank connected to the pure water supply member outside the processing chamber; and pure water in the tank 5. The substrate processing apparatus according to claim 1, further comprising a third temperature controller for adjusting the temperature of the substrate to a temperature equal to or higher than the temperature of the etching solution.   The substrate processing apparatus according to claim 1, further comprising a dry gas spraying member for spraying a dry gas to the substrate to be processed. Holding the substrate to be processed in a processing chamber so as to be rotatable and vertically movable, and supplying an etching solution while rotating the substrate to be processed to perform an etching process,
The substrate processing method, wherein the etching process is performed under a condition that a temperature in the processing chamber is higher than a temperature of the etching solution and a temperature difference between them is constant.   8. The substrate processing method according to claim 7, wherein the etching process is performed by heating the etching solution.   9. The substrate processing method according to claim 7, wherein the etching process is performed by humidifying the inside of the processing chamber.   10. The method according to claim 7, further comprising a step of supplying a pure water having a temperature equal to or higher than the liquid temperature of the etching to the substrate to be processed after the etching process. A method for treating a substrate according to the item.   11. The substrate processing method according to claim 10, further comprising a step of spraying a dry gas on the substrate to be processed after the rinsing process. A processing chamber having a gas supply and an exhaust;
A holding member which is disposed in the processing chamber and holds the substrate to be processed so as to be rotatable and vertically movable;
A heater built-in shielding member which is disposed in the processing chamber so as to be detachable from the substrate to be processed, and has an area equivalent to or larger than the substrate to be processed;
An etching solution supply member for performing an etching process by supplying an etching solution to the substrate to be processed;
An etchant supply tank connected to the etchant supply member outside the processing chamber;
A temperature regulator for adjusting the temperature of the etchant in the tank; and a control so that the heating temperature of the heater is equal to or higher than the temperature of the etchant in the tank by the temperature regulator. Control mechanism to do;
An apparatus for processing a substrate, comprising:

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