JP2013072930A5 - - Google Patents
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- JP2013072930A5 JP2013072930A5 JP2011210326A JP2011210326A JP2013072930A5 JP 2013072930 A5 JP2013072930 A5 JP 2013072930A5 JP 2011210326 A JP2011210326 A JP 2011210326A JP 2011210326 A JP2011210326 A JP 2011210326A JP 2013072930 A5 JP2013072930 A5 JP 2013072930A5
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Claims (11)
前記第一基板に対向する第二基板と、
前記第一基板に設けられた第一反射膜と、
前記第二基板に設けられ、前記第一反射膜と反射膜間ギャップを介して対向する第二反射膜と、
前記反射膜間ギャップを変化させるギャップ変更部と、
前記第一基板に設けられた第一電極と、を備え、
前記第一電極は、前記第一基板及び前記第二基板を基板厚み方向から見た平面視において、前記第一反射膜及び前記第二反射膜が互いに対向して設けられた光干渉領域を含む領域に設けられ、
前記第一反射膜は、前記第一電極を介して前記第一基板に設けられ、
前記第二反射膜は、前記第一電極に電気的に接続されている
ことを特徴とする波長可変干渉フィルター。 A first substrate;
A second substrate facing the first substrate;
A first reflective film provided on the first substrate;
A second reflective film provided on the second substrate and facing the first reflective film via a gap between the reflective films;
A gap changing section for changing the gap between the reflection films;
A first electrode provided on the first substrate,
The first electrode includes a light interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. Provided in the area,
The first reflective film is provided on the first substrate via the first electrode,
The wavelength tunable interference filter, wherein the second reflective film is electrically connected to the first electrode.
前記第二基板には、前記第二基板を基板厚み方向から見た平面視において、前記光干渉領域と重なる位置に第二電極が設けられ、
前記第二反射膜は、前記第二電極を介して前記第二基板に設けられ、
前記第一電極は、前記第二電極に電気的に接続されている
ことを特徴とする波長可変干渉フィルター。 The tunable interference filter according to claim 1,
The second substrate is provided with a second electrode at a position overlapping the light interference region in a plan view when the second substrate is viewed from the substrate thickness direction.
The second reflective film is provided on the second substrate via the second electrode,
The wavelength variable interference filter, wherein the first electrode is electrically connected to the second electrode.
前記第一基板は、形状変化が発生しない固定基板であり、
前記第二基板は、前記第二反射膜が設けられた可動部と、前記可動部を保持する保持部と、を備え、前記保持部の形状変化により前記可動部が前記第一基板に対して進退可能となる可動基板であり、
前記ギャップ変更部は、前記可動部を前記第一基板に対して進退させることで、前記反射膜間ギャップを変動させる
ことを特徴とする波長可変干渉フィルター。 The tunable interference filter according to claim 1,
The first substrate is a fixed substrate that does not change shape,
The second substrate includes a movable part provided with the second reflective film, and a holding part that holds the movable part, and the movable part is changed with respect to the first substrate by a shape change of the holding part. It is a movable substrate that can be advanced and retracted,
The variable wavelength interference filter according to claim 1, wherein the gap changing unit changes the gap between the reflection films by moving the movable unit forward and backward with respect to the first substrate.
前記第一電極は、透光性を有する
ことを特徴とする波長可変干渉フィルター。 In the wavelength variable interference filter according to any one of claims 1 to 3,
The wavelength variable interference filter, wherein the first electrode has translucency.
前記第二基板には、前記第二基板を基板厚み方向から見た平面視において、前記光干渉領域外に、駆動用電極を備え、
前記第一電極は、前記第一基板を基板厚み方向から見た平面視において、前記光干渉領域と、前記駆動用電極に対向する駆動用電極対向領域とを含む領域に設けられ、
前記ギャップ変更部は、前記駆動用電極、及び前記第一電極の前記駆動用電極対向領域により構成される
ことを特徴とする波長可変干渉フィルター。 In the wavelength variable interference filter according to any one of claims 1 to 4,
The second substrate includes a driving electrode outside the optical interference region in a plan view of the second substrate viewed from the substrate thickness direction.
The first electrode is provided in a region including the optical interference region and a driving electrode facing region facing the driving electrode in a plan view of the first substrate viewed from the substrate thickness direction.
The gap changing unit includes the driving electrode and the driving electrode facing region of the first electrode.
前記駆動用電極は、内側駆動用電極と、この内側駆動用電極よりも前記光干渉領域から遠ざかる位置に設けられた外側駆動用電極と、を備える
ことを特徴とする波長可変干渉フィルター。 The tunable interference filter according to claim 5,
The driving electrode includes an inner driving electrode and an outer driving electrode provided at a position farther from the optical interference region than the inner driving electrode.
前記駆動用電極と前記第一電極の前記駆動用電極対向領域との間の電極間ギャップの寸法は、前記反射膜間ギャップの寸法よりも大きい
ことを特徴とする波長可変干渉フィルター。 In the wavelength variable interference filter according to claim 5 or 6,
The variable wavelength interference filter, wherein a dimension of an interelectrode gap between the driving electrode and the driving electrode facing region of the first electrode is larger than a dimension of the gap between the reflection films.
前記第一電極は、前記内側駆動用電極に対向する内側駆動用電極対向領域と、前記外側駆動用電極に対向する外側駆動用電極対向領域とを備え、
前記外側駆動用電極と前記外側駆動用電極対向領域との間の外側電極間ギャップの寸法は、前記内側駆動用電極と前記内側駆動用電極対向領域との間の内側電極間ギャップの寸法よりも小さく、かつ前記反射膜間ギャップの寸法よりも大きい
ことを特徴とする波長可変干渉フィルター。 The tunable interference filter according to claim 6,
The first electrode includes an inner driving electrode facing region facing the inner driving electrode and an outer driving electrode facing region facing the outer driving electrode,
The dimension of the outer electrode gap between the outer driving electrode and the outer driving electrode facing area is larger than the dimension of the inner electrode gap between the inner driving electrode and the inner driving electrode facing area. A wavelength tunable interference filter which is small and larger than the size of the gap between the reflection films.
前記波長可変干渉フィルターを収納する筐体と、を備え、
前記第一電極は、前記第一基板及び前記第二基板を基板厚み方向から見た平面視において、前記第一反射膜及び前記第二反射膜が互いに対向して設けられた光干渉領域を含む領域に設けられ、
前記第一反射膜は、前記第一電極を介して前記第一基板に設けられ、前記第二反射膜は、前記第一電極に電気的に接続された
ことを特徴とする光学フィルターデバイス。 A first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate, provided on the second substrate, and opposed to the first reflective film via a gap between the reflective films A second reflective film, a gap changing unit for changing the gap between the reflective films, and a wavelength variable interference filter including a first electrode provided on the first substrate,
A housing for housing the variable wavelength interference filter,
The first electrode includes a light interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. Provided in the area,
The optical filter device, wherein the first reflective film is provided on the first substrate via the first electrode, and the second reflective film is electrically connected to the first electrode.
前記第一基板に対向する第二基板と、
前記第一基板に設けられた第一反射膜と、
前記第二基板に設けられ、前記第一反射膜と反射膜間ギャップを介して対向する第二反射膜と、
前記反射膜間ギャップを変化させるギャップ変更部と、
前記第一基板に設けられた第一電極と、
前記第一反射膜及び前記第二反射膜により取り出された光を検出する検出部と、を備え、
前記第一電極は、前記第一基板及び前記第二基板を基板厚み方向から見た平面視において、前記第一反射膜及び前記第二反射膜が互いに対向して設けられた光干渉領域を含む領域に設けられ、
前記第一反射膜は、前記第一電極を介して前記第一基板に設けられ、
前記第二反射膜は、前記第一電極に電気的に接続されている
ことを特徴とする光学モジュール。 A first substrate;
A second substrate facing the first substrate;
A first reflective film provided on the first substrate;
A second reflective film provided on the second substrate and facing the first reflective film via a gap between the reflective films;
A gap changing section for changing the gap between the reflection films;
A first electrode provided on the first substrate;
A detection unit for detecting light extracted by the first reflective film and the second reflective film,
The first electrode includes a light interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. Provided in the area,
The first reflective film is provided on the first substrate via the first electrode,
The optical module, wherein the second reflective film is electrically connected to the first electrode.
前記第一基板に対向する第二基板と、
前記第一基板に設けられた第一反射膜と、
前記第二基板に設けられ、前記第一反射膜と反射膜間ギャップを介して対向する第二反射膜と、
前記反射膜間ギャップを変化させるギャップ変更部と、
前記第一基板に設けられた第一電極と、を備え、
前記第一電極は、前記第一基板及び前記第二基板を基板厚み方向から見た平面視において、前記第一反射膜及び前記第二反射膜が互いに対向して設けられた光干渉領域を含む領域に設けられ、
前記第一反射膜は、前記第一電極を介して前記第一基板に設けられ、
前記第二反射膜は、前記第一電極に電気的に接続されている
ことを特徴とする電子機器。 A first substrate;
A second substrate facing the first substrate;
A first reflective film provided on the first substrate;
A second reflective film provided on the second substrate and facing the first reflective film via a gap between the reflective films;
A gap changing section for changing the gap between the reflection films;
A first electrode provided on the first substrate,
The first electrode includes a light interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. Provided in the area,
The first reflective film is provided on the first substrate via the first electrode,
The second reflection film is electrically connected to the first electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011210326A JP5874271B2 (en) | 2011-09-27 | 2011-09-27 | Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011210326A JP5874271B2 (en) | 2011-09-27 | 2011-09-27 | Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013072930A JP2013072930A (en) | 2013-04-22 |
| JP2013072930A5 true JP2013072930A5 (en) | 2014-10-23 |
| JP5874271B2 JP5874271B2 (en) | 2016-03-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011210326A Expired - Fee Related JP5874271B2 (en) | 2011-09-27 | 2011-09-27 | Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5874271B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013238755A (en) | 2012-05-16 | 2013-11-28 | Seiko Epson Corp | Optical module, electronic equipment, food analyzer, spectroscopic camera, and method for driving wavelength variable interference filter |
| JP6107186B2 (en) | 2013-02-05 | 2017-04-05 | セイコーエプソン株式会社 | Optical module, electronic device, and spectroscopic camera |
| JP2015066611A (en) | 2013-09-27 | 2015-04-13 | セイコーエプソン株式会社 | Actuator drive system, optical module, and electronic equipment |
| JP6264838B2 (en) | 2013-10-29 | 2018-01-24 | セイコーエプソン株式会社 | Optical element |
| JP6543884B2 (en) | 2014-01-27 | 2019-07-17 | セイコーエプソン株式会社 | Actuator control device, optical module, electronic device, and actuator control method |
| JP6413325B2 (en) | 2014-05-01 | 2018-10-31 | セイコーエプソン株式会社 | Actuator device, electronic device, and control method |
| CN105704267B (en) * | 2016-01-27 | 2019-03-29 | Oppo广东移动通信有限公司 | Mobile terminal |
| WO2018124814A1 (en) * | 2017-01-02 | 2018-07-05 | 엘지이노텍(주) | Light sensing device and particle sensing device |
| JP7351610B2 (en) * | 2018-10-30 | 2023-09-27 | 浜松ホトニクス株式会社 | light detection device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001221913A (en) * | 2000-02-08 | 2001-08-17 | Yokogawa Electric Corp | Fabry-perot filter and ir gas analyzer |
| JP2003233016A (en) * | 2002-02-12 | 2003-08-22 | Dainippon Printing Co Ltd | Film member of display part, and method for manufacturing the same |
| US7734131B2 (en) * | 2006-04-18 | 2010-06-08 | Xerox Corporation | Fabry-Perot tunable filter using a bonded pair of transparent substrates |
| US20080198457A1 (en) * | 2007-02-20 | 2008-08-21 | Pentax Corporation | Dust-proof, reflecting mirror and optical apparatus comprising same |
| JP5370246B2 (en) * | 2009-05-27 | 2013-12-18 | セイコーエプソン株式会社 | Optical filter, optical filter device, analytical instrument, and optical filter manufacturing method |
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2011
- 2011-09-27 JP JP2011210326A patent/JP5874271B2/en not_active Expired - Fee Related
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