JP2013071337A - Printing device and method of producing organic functional element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a printing device having a means for removing foreign matters which may cause uneven brightness of pixels, short circuit and a lighting failure when an organic functional layer is printed, and a method of producing an organic functional element by using the printing device.SOLUTION: The printing device for printing minute patterns on a printed substrate includes: a first rotating plate cylinder 201 having a relief printing plate 202; a first foreign matter removal plate 302 installed on the first rotating plate cylinder 201 to remove foreign matters on a printed substrate surface 207; a second rotating plate cylinder 401 which is installed opposite the first rotating plate cylinder 201 having the relief printing plate 202 and has a second foreign matter removal plate 402 for removing foreign matters on the surface of the relief printing plate 202; a first cleaning chamber 303 for cleaning the relief printing plate 202 and the first foreign matter removal plate 302; and a second cleaning chamber 304 for cleaning the second foreign matter removal plate 402.

Description

  The present invention relates to a printing apparatus for forming a high-definition pattern by printing ink dissolved in a solvent on a substrate to be printed, and a method for producing an organic functional element using the printing apparatus.

  In recent years, as a display element in a mobile phone, a tablet PC, a mobile PC, an in-vehicle navigation system, etc., an organic EL element having features such as thinness, low power, high luminance display, and organic used for driving an organic EL element TFT is attracting attention.

  In the organic EL element, a hole transport layer made of a hole transport material and an organic light emitting layer made of an organic light emitting material are formed between two opposing electrodes. Here, these layers are collectively referred to as an organic light emitting medium layer. However, the organic EL element emits light by passing a current through these organic light emitting medium layers. In order to emit light efficiently, the thickness of the organic light emitting medium layer is important, and it is necessary to form a thin film of about 100 nm. Furthermore, in order to make this a display panel, it is necessary to pattern it with high definition.

  The hole transport material and the organic light emitting material for forming the organic light emitting medium layer include a low molecular material and a high molecular material. In general, a low molecular material is formed into a thin film by a vacuum deposition method or the like. Although this method is used for patterning, there is a problem that the patterning accuracy is less likely to be obtained as the substrate becomes larger, and the throughput is poor because the film is formed in a vacuum.

  Therefore, recently, a method in which a polymer material is dissolved in a solvent to form a coating solution and a thin film is formed by a wet coating method has been tried. In the case of forming an organic light emitting medium layer including an organic light emitting layer by a wet coating method using a coating material of a polymer material, the layer structure is generally a two-layer structure in which a hole transport layer and an organic light emitting layer are laminated from the anode side. Is. At this time, the organic light emitting layer is formed by dissolving or stably dispersing organic light emitting materials having respective emission colors of red (R), green (G), and blue (B) in a solvent in order to form a color panel. It is necessary to paint with organic luminescent ink.

  Examples of the wet coating method include an inkjet method and a relief printing method. The relief printing method has a characteristic that the throughput is better than that of the ink jet method.

  FIG. 1 is a diagram showing an outline of a conventionally used relief printing apparatus. The letterpress printing apparatus shown in FIG. 1 supplies ink from the ink tank 605 to the ink chamber 604, and then inks the letterpress printing plate 602 mounted on the peripheral surface of the plate cylinder 601 by the anilox roll 603, and then the surface plate The ink 606 is moved in the direction indicated by the arrow 606a, and the ink attached to the printing relief plate 602 is transferred to the printing plate 607 placed on the surface plate 606 for printing.

JP 2011-65081 A JP 2011-113733 A

However, until now, the printing method repeats printing several times in the atmosphere, which makes it easier for foreign objects to enter compared to the vacuum deposition method, causing uneven brightness of pixels, short-circuiting, non-lighting, When foreign matter adheres, the same printing failure occurs, which causes a problem of luminance unevenness, chromaticity variation, and short circuit due to variations in the printed film thickness. As a method for solving this problem, a method for removing foreign matter has been proposed. For example, in Patent Document 1, in a relief printing method, metallic foreign matter generated during doctoring when transferring ink to a printing plate is magnetically attracted by a magnetic roller to remove the magnetic metallic foreign matter. ing. However, this method has a drawback that only magnetic metal foreign matter and only foreign matter in ink can be removed.
As another method, Patent Document 2 proposes a method of detecting a foreign substance after forming an organic film and removing the foreign substance by laser irradiation. However, this method can remove organic substances, but it is difficult to remove metallic foreign matters, and there is a problem that the organic layer is deteriorated by irradiating the organic layer with a laser, and it takes time to detect.

  Accordingly, the present invention relates to a printing apparatus having means for removing foreign matters that cause uneven brightness of pixels, short circuits, and non-lighting when printing an organic functional layer, and an organic functional element using the printing apparatus. An object of the present invention is to provide a method of producing

In order to achieve the above object, an invention according to claim 1 of the present invention is a printing apparatus for printing a fine pattern on a substrate to be printed,
A first rotary plate cylinder with a relief printing plate;
A first foreign matter removing plate provided on the first rotary plate cylinder for removing foreign matter on the surface of the substrate to be printed;
A second rotary plate cylinder provided with a second rotary plate cylinder provided with a printing relief plate and provided with a second foreign material removal plate for removing foreign matter on the surface of the printing relief plate;
A first cleaning chamber for cleaning the printing relief plate and the first foreign matter removal plate;
And a second cleaning chamber for cleaning the second foreign material removal plate.

  According to a second aspect of the present invention, the first foreign matter removal plate and the second foreign matter removal plate include a magnet layer for removing metallic foreign matter and a rubber layer for removing organic foreign matter or non-magnetic metallic foreign matter. The printing apparatus according to claim 1, comprising two or more layers.

  The invention according to claim 3 is the printing apparatus according to claim 2, wherein the magnet layer is made of a rubber magnet containing either ferrite or neodymium.

In the invention according to claim 4, the rubber layer is made of any one of silicone, urethane, butyl, and fluorine, and has a hardness of 10 to 30 degrees and an adhesive strength of 50 to 500 g / cm ^2. The printing apparatus according to claim 2, wherein:

  In the invention according to claim 5, the first foreign matter removing plate and the second foreign matter removing plate are fixed to the first rotary plate cylinder and the second rotary plate cylinder by the magnetic force of the magnet layer. The printing apparatus according to claim 2, wherein the printing apparatus is a printing apparatus.

  The invention according to claim 6 uses the printing apparatus according to any one of claims 1 to 5 to remove foreign matter on the printed substrate with the first foreign matter removal plate and at the same time with the second foreign matter removal plate. An organic functional element manufacturing method comprising: a foreign matter removing process for removing foreign substances on a printing relief plate; and a film forming process for printing an organic functional layer.

  The invention according to claim 7 is the organic functional element manufacturing method according to claim 6, wherein the organic functional element is an organic EL element.

  The invention according to claim 8 is the organic functional element manufacturing method according to claim 6, wherein the organic functional layer comprises one or more layers and is printed a plurality of times.

  According to the printing apparatus and the organic functional element manufacturing method of the present invention, it is possible to remove the foreign matter without detecting the foreign matter regardless of the organic matter and metal foreign matter on the substrate and the printing plate. There is an effect that an organic EL element with few variations and non-lighting pixels can be obtained.

The figure which shows the outline | summary of the conventional relief printing apparatus. The figure which shows the cross section which shows the structure of the organic EL element in the organic EL panel by embodiment of this invention. It is sectional drawing which shows the outline | summary of the relief printing apparatus in embodiment of this invention. It is sectional drawing of the printing cylinder of the relief plate in this invention. It is a figure which shows the structure of the foreign material removal plate in this invention. The operation | movement flowchart which shows the printing method of this invention.

  Hereinafter, embodiments of a printing apparatus and an organic EL element manufacturing method according to the present invention will be described with reference to the drawings. The printing apparatus according to the present invention is not limited to the embodiment described below.

  FIG. 2 is a cross-sectional view showing the structure of the organic EL element produced by the printing apparatus and organic EL element manufacturing method according to the present invention. FIG. 3 is a schematic diagram showing the overall configuration of a flexographic printing apparatus when the printing apparatus according to the present invention is applied to light emitting layer printing of an organic EL element.

  Hereinafter, an example in which the embodiment of the present invention is applied to a passive matrix type organic EL element will be described. There are a passive matrix type and an active matrix type as a driving method of the organic EL element, but the organic EL element of the present invention can be applied to both a passive matrix type organic EL element and an active matrix type organic EL element. . The passive matrix method is a method in which stripe-shaped electrodes are opposed to each other so as to be orthogonal to each other, and light is emitted at the intersection, whereas the active matrix method uses a so-called thin film transistor (TFT) substrate in which a transistor is formed for each pixel. Thus, the light is emitted independently for each pixel. When this organic EL element is a bottom emission type organic EL element that extracts light from the substrate side, it is necessary to use a transparent substrate, but in the case of the top emission type that extracts light from the opposite side of the substrate The substrate does not have to be translucent.

As the substrate 101, a glass substrate or a plastic film or sheet can be used. If a plastic film is used, a polymer EL element can be produced by winding, and a display panel can be provided at a low cost. In addition, as the plastic in that case, for example, polyethylene terephthalate, polypropylene, cycloolefin polymer, polyamide, polyethersulfone, polymethyl methacrylate, polycarbonate, or the like can be used. Further, these films are barrier layers made of metal oxide such as silicon oxide showing water vapor barrier property and oxygen barrier property, oxynitride such as silicon nitride, polyvinylidene chloride, polyvinyl chloride, saponified ethylene-vinyl acetate copolymer. Is provided as necessary.

  A pixel electrode 102 patterned as an anode is provided on the substrate 101. As the material of the pixel electrode 102, transparent electrode materials such as ITO (indium tin composite oxide), IZO (indium zinc composite oxide), tin oxide, zinc oxide, indium oxide, and aluminum oxide composite oxide can be used. ITO is preferred because of its low resistance, solvent resistance, transparency, and the like. ITO is formed on the substrate by a sputtering method and patterned by a photolithography method to form a line-shaped pixel electrode 102. Then, after the line-shaped pixel electrode 102 is formed, a partition wall 103 is formed by a photolithography method using a photosensitive material between adjacent pixel electrodes.

  The partition wall 103 in this embodiment preferably has a thickness in the range of 0.5 μm to 5.0 μm. Further, by providing the partition wall 103 between the adjacent pixel electrodes 102, the spread of the hole transport ink printed on each pixel electrode 102 is suppressed, and the hole transport layer 104 is on the partition wall 103 when the display is made. It is possible to prevent the occurrence of leak current. If the partition wall 103 is too low, ink spreading cannot be prevented and the hole transport layer 104 is formed on the partition wall 103.

  Further, for example, in a passive matrix type organic EL element, when a partition is provided between pixel electrodes, the cathode layer is formed by directing the partition. When the cathode layer is formed in such a manner as to straddle the partition wall, if the insulating layer is too high, the cathode layer is disconnected, resulting in a display defect. When the height of the insulating layer exceeds 5.0 μm, disconnection of the cathode tends to occur.

  The photosensitive material for forming the partition wall 103 may be either a positive type resist or a negative type resist, and may be a commercially available one, but it must have insulating properties. Note that if the partition does not have sufficient insulating properties, current flows through the partition to the adjacent pixel electrode 102, resulting in display failure. Specific examples thereof include polyimide, acrylic resin, novolac resin, and fluorene, but are not limited thereto. Further, for the purpose of improving the display quality of the organic EL element, a light shielding material may be included in the photosensitive material.

  The photosensitive resin forming the partition wall 103 is applied using a coating method such as a spin coater, a bar coater, a roll coater, a die coater, or a gravure coater, and is patterned by a photolithography method. Alternatively, the partition walls may be formed using a gravure offset printing method, a reverse printing method, a flexographic printing method, or the like without using a photosensitive resin.

After forming the partition wall 103 as described above, the hole transport layer 104 is formed next. Examples of the hole transport material forming the hole transport layer 104 include polyaniline derivatives, polythiophene derivatives, polyvinylcarbazole (PVK) derivatives, poly (3,4-ethylenedioxythiophene) (PEDOT), and the like. These materials are dissolved or dispersed in a solvent to form a hole transport material ink, which is formed using the printing method apparatus according to the present embodiment. In that case, it is important that the selected hole transport material has compatibility with the light emitting material, and the hole transport material has an ionization potential (IP) difference of 0.2 eV or less with respect to the light emitting material. is there. In addition, the volume resistivity of the formed hole transport layer is preferably 1 × 10 ⁶ Ω · cm or less from the viewpoint of luminous efficiency. When an inorganic material is used as the hole transport material, examples of the inorganic material include Cu ₂ O, Cr ₂ O ₃ , Mn ₂ O ₃ , FeO _3, NiO, CoO, and Pr ₂ O _3.
, Ag ₂ O, MoO ₂ , Bi ₂ O ₃ , ZnO, TiO ₂ , SnO ₂ , ThO ₂ , V ₂ O ₅ , Nb ₂ O ₅ , Ta ₂ O ₅ , MoO ₃ , WO ₃ , MnO _2, etc. The material is formed using a vapor deposition method or a sputtering method. However, the material is not limited to these.

  Examples of the solvent for dissolving or dispersing the hole transport material include toluene, xylene, acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, methanol, ethanol, isopropanol, ethylene glycol, propylene glycol, polyethylene glycol, glycerin, and ethyl acetate. , Butyl acetate, isopropyl acetate, methyl cellosolve, ethyl cellosolve, methyl cellosolve, ethyl cellosolve, butyl cellosolve, ethyl lactate, ethylene glycol diethyl ether, 1-propanol, methoxypropanol, ethoxypropanol, water alone or a mixed solvent thereof Etc. Moreover, surfactant, antioxidant, a viscosity modifier, a ultraviolet absorber, etc. may be added as needed.

  Moreover, when printing, it is preferable that it is 5-100 mPa * s as a viscosity of hole transport layer ink. In the relief printing method used in the present embodiment, the ink is first transferred from the anilox to the relief plate. However, at a viscosity of 100 mPa · s or more, after the ink is transferred from the anilox to the relief plate, Insufficient ink leveling causes unevenness. In addition, when the pressure is 5 mPa · s or less, the mottling unevenness is likely to occur in the pixel, causing the unevenness.

  The solid content concentration of the hole transport layer ink is preferably 0.5 to 4.0%. In the hole transport ink used in the present embodiment, if the concentration is 4.0% or more, the stability of the ink is deteriorated, which causes ink aggregation and unevenness of the hole transport layer.

  Next, after forming the hole transport layer 104 as described above, the interlayer 105 is formed. Examples of materials used for the interlayer 105 include polymers containing aromatic amines such as polyvinyl carbazole or derivatives thereof, polyarylene derivatives having aromatic amines in the side chain or main chain, arylamine derivatives, and triphenyldiamine derivatives. .

  These interlayer materials are dissolved or stably dispersed in a solvent to form an organic light emitting ink. Examples of the solvent for dissolving or dispersing the organic light-emitting material include toluene, xylene, acetone, anisole, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, or a mixed solvent thereof. Among these, aromatic organic solvents such as toluene, xylene, and anisole are preferable from the viewpoint of solubility of the organic light emitting material.

  As a method for forming the interlayer 105, when using a letterpress printing method, a resin letterpress suitable for an organic light-emitting ink can be used, and a water-developable photosensitive resin letterpress is particularly preferable.

  Next, the organic light emitting layer 106 is formed. The organic light emitting layer 106 is a layer that emits light by passing a current. Examples of the organic light emitting material that forms the organic light emitting layer 106 include coumarin, perylene, pyran, anthrone, porphyrene, quinacridone, N, N'-dialkyl-substituted quinacridone-based, naphthalimide-based, N, N'-diaryl-substituted pyrrolopyrrole-based, iridium complex-based luminescent dyes dispersed in polymers such as polystyrene, polymethylmethacrylate, polyvinylcarbazole, etc. And polyarylene-based, polyarylene vinylene-based, and polyfluorene-based polymer materials.

These organic light emitting materials are dissolved or stably dispersed in a solvent to form an organic light emitting ink. Examples of the solvent for dissolving or dispersing the organic light-emitting material include toluene, xylene, acetone, anisole, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, or a mixed solvent thereof. Among these, aromatic organic solvents such as toluene, xylene, and anisole are preferable from the viewpoint of solubility of the organic light emitting material. Moreover, surfactant, antioxidant, a viscosity modifier, a ultraviolet absorber, etc. may be added to organic luminescent ink as needed.

  As a method for forming the organic light emitting layer 106, when using a letterpress printing method, a resin letterpress suitable for organic light emitting ink can be used, and among these, a water developing type photosensitive resin letterpress is preferable.

  The viscosity of the organic light emitting ink is preferably 5 to 100 mPa · s. In the relief printing method used in the present embodiment, the ink is first transferred from the anilox to the relief plate. However, at a viscosity of 100 mPa · s or more, after the ink is transferred from the anilox to the relief plate, Insufficient ink leveling causes unevenness. In addition, when the pressure is 5 mPa · s or less, the mottling unevenness is likely to occur in the pixel, causing the unevenness.

  Next, after forming the organic light emitting layer 106 as described above, the cathode layer 107 is formed in a line pattern orthogonal to the line pattern of the pixel electrode 102. As the material of the cathode layer 6, a material corresponding to the light emission characteristics of the organic light emitting layer 106 can be used. For example, a simple metal such as lithium, magnesium, calcium, ytterbium, or aluminum or a stable metal such as gold or silver can be used. And alloys thereof. Alternatively, a conductive oxide such as indium, zinc, or tin can be used. Examples of the method for forming the cathode layer include a method using a vacuum vapor deposition method using a mask.

  Note that the organic EL element of the present embodiment has a configuration in which the hole transport layer 104, the interlayer 105, and the organic light emitting layer 106 are stacked from the anode layer side between the pixel electrode 102 as the anode and the cathode layer 107. In addition to the hole transport layer 104 and the organic light emitting layer 106, a layered structure in which layers such as a hole block layer, an electron transport layer, and an electron injection layer are selected as necessary can be adopted between the anode layer and the cathode layer. Moreover, the manufacturing method of this invention can be used also when forming these layers.

  Finally, in order to protect these organic EL constituents from external oxygen and moisture, a glass cap 108 and an adhesive 109 are hermetically sealed to obtain an organic EL element. In the case where the substrate 101 has flexibility, sealing may be performed using a sealing agent and a flexible film.

  Hereinafter, a printing apparatus according to an embodiment of the present invention will be described. As shown in FIG. 3, the flexographic printing apparatus shown in this embodiment is mounted on a first rotary plate cylinder 201 that is rotatably supported at a fixed position, and a peripheral surface of the first rotary plate cylinder 201. The direction indicated by the arrow 401a facing the first printing plate (flexographic printing plate) 202 for forming the light emitting pattern, the first foreign matter removal plate 302 for removing foreign matter on the substrate, and the first rotary plate cylinder 201. The second rotary plate cylinder 401 having the second foreign matter removing plate 402 for removing foreign matter from the printing relief plate 202 movably installed in the printer, and the printing relief plate 202 and the first foreign matter removing plate are washed. A first cleaning chamber 303 for cleaning, and a second cleaning chamber 304 for cleaning the second foreign matter removal plate 402. In addition, a surface plate 206 movably installed in a direction indicated by an arrow 206 a below the first rotary plate cylinder 201, a printed substrate 207 placed on the surface plate 206, and a printing relief plate 202. An anilox roll 203 for supplying ink for the light emitting layer to the surface of the ink, an ink chamber 204 for supplying ink to the anilox roll 203, and an ink tank 205 for periodically supplying ink to the ink chamber 204. Yes.

  FIG. 4 is a diagram showing a printing relief plate 202 for forming a light emitting pattern mounted on the peripheral surface of the first rotary plate cylinder 201 and a first foreign matter removing plate 302 for removing foreign matter on the substrate. On the same peripheral surface of the first rotary plate cylinder 201, a printing relief plate 202 and a first foreign matter removal plate 302 for removing foreign matter on the substrate are provided adjacent to each other. Further, the surface plate 206 is movable in the direction indicated by the arrow 201a, and the foreign matter removal of the printing relief plate 207 is performed by the first foreign matter removal plate 302, and then the printing plate is moved in the direction indicated by the arrow 201a. Printing can be performed according to 202.

  Each of the first foreign matter removal plate 302 and the second foreign matter removal plate 402 includes a magnet layer that magnetically adsorbs magnetic metal foreign matters and a rubber layer that adsorbs other foreign matters with adhesive. That is, as shown in FIG. 5A, the first foreign substance removal plate 302 is composed of a magnet layer 302a and a rubber layer 302b. Further, as shown in FIG. 5B, the second foreign matter removing plate 402 is composed of a magnet layer 402a and a rubber layer 402b. The first foreign matter removing plate 302 and the second foreign matter removing plate 402 have the rubber layer as the outermost surface.

  As a material of the magnet layers 302a and 402a, for example, a rubber magnet containing either ferrite or neodymium is preferable. The magnetic field does not depend on isotropic or anisotropy.

As a material of the rubber layer 302b and 402b, hardness, 10-30 degrees, in adhesive strength is 50 to 500 g / cm ^2, a silicone with adhesive strength to the rubber itself, urethane, butyl-based, fluorine-based synthetic rubber However, it is not limited to this. Further, it is preferably antistatic processed and processed so that no component of the rubber layer remains, or is patterned according to the pixel so as to be in contact with the pixel surface.

  The first foreign matter removal plate 302 is provided in the vicinity of the printing relief plate 202. At the same time as the foreign matter on the printing substrate 207 is removed by the first foreign matter removal plate, the second foreign matter removal plate 402 is used. Foreign matter on the printing relief plate 202 is removed.

  In addition, the first and second foreign substance removal plates 302 and 402 are fixed by the magnetic force of the magnet, and no special fixing portion is provided, so that interference of the fixing portion does not become a problem.

  Hereinafter, a printing method of the printing apparatus according to the embodiment of the present invention will be described. The printing method of the present invention will be described with reference to the operation flowchart shown in FIG. The printing method of the present invention goes through a foreign matter removing process for removing foreign matter and a film forming process for printing an organic functional film. After the start (S1), in the foreign matter removal process, the first plate is formed by a method (not shown) so that the surface plate on which the printing substrate 207 is placed can move under the first foreign matter removal plate 302 and remove the foreign matter. The second rotary plate cylinder 301 provided with the second foreign material removing plate installed opposite to the plate cylinder 201 simultaneously moves in the horizontal direction with the axis of the rotary plate cylinder 201 (S2). The plate is moved horizontally in the vertical direction in the axial direction of the plate cylinder 201 until the printing plate comes into contact with the printing method (S3). When the first foreign matter removing plate 302 is on the extension of the printing relief plate 201, it is not necessary to move the surface plate 206.

  Thereafter, the first substrate for removing the foreign matter between pixels is removed from the printing substrate 207 with the first foreign matter removing plate 302 (S4), and at the same time, the first rotary plate provided with the foreign matter removing plate in contact with the printing plate cylinder 201. By rotating the cylinder 301 in the opposite directions at the same rotational speed, foreign matter adhering to the printing relief plate 201 is removed (S5).

  After completion of the foreign matter removal process, the surface plate 206 moves below the printing relief plate 202 (S6), and then performs film formation (film formation process) by printing (S7). During the film formation process, the ink layer supplied on the surface of the anilox roll 203 is rotated along with the rotation of the anilox roll 204, and the printing relief plate 202 mounted on the driven plate cylinder 201 that rotates in the vicinity of the anilox roll 203. Transition to the convex part. The ink on the convex portion of the printing relief plate 202 is printed on the printing substrate 207, and an organic film is formed on the printing substrate 207 through a drying process as necessary.

  After the printing is finished, the second rotary plate cylinder 401 is moved to the second cleaning chamber 304 in which the cleaning liquid is stored by a method (not shown), and the second rotary plate cylinder 401 is rotated to rotate the second rotary plate cylinder 401. The foreign matter removing plate 402 is cleaned. At the same time, similarly, the first rotary plate cylinder 201 is moved to the first cleaning chamber 303 in which the cleaning liquid is stored by a method not shown, and the first rotary plate cylinder 201 is rotated. Thus, the printing relief plate 202 and the first foreign matter removal plate 302 are cleaned.

  Next, examples of the present invention will be described.

<Example>
As the substrate, an active matrix substrate provided with a thin film transistor functioning as a switching element provided on a support was used. The size of the substrate is 200 mm × 200 mm and the diagonal is 5 inches.

  A partition wall 103 was formed in such a shape as to cover the end portion of the first electrode provided on the substrate and partition the pixels. The partition wall 103 is formed by using a positive resist, a product name “ZWD6216-6” manufactured by Nippon Zeon Co., Ltd., with a thickness of 2 μm on the entire surface of the substrate by a spin coater method, and then using a photolithography method to a width of 40 μm. A partition wall 103 was formed by patterning. As a result, a pixel area of 960 × 240 dots and a pitch of 0.12 mm × 0.36 mm was defined.

  On the first electrode 102, molybdenum oxide having a thickness of 20 nm was formed as a hole transport layer 104 by a sputtering method.

Next, using the printing apparatus of the present invention, the foreign matter on the substrate is removed with the first foreign matter removing plate, and the foreign matter on the printing relief plate is simultaneously removed with the second foreign matter removing plate, and then the density is 2% with the printing relief plate. The interlayer 105 inked with toluene was printed to form a film. The first foreign matter removal plate 302 and the second foreign matter removal plate 402 used at that time have a rubber layer hardness of 15 degrees, an adhesive strength of 200 g / cm ^2, and a magnet layer adsorption force of 440 g / cm ^2. Neodymium rubber magnet was used. The film thickness after printing and drying was 30 nm. After printing, the first foreign matter removing plate and the relief printing plate were washed in the first washing chamber provided in the printing apparatus, and the second foreign matter removing plate was washed in the second washing chamber.

  Next, in the same manner as the interlayer 105, the light-emitting layer 106, which was inked with toluene to a concentration of 2%, was printed and dried, and the film thickness was 60 nm.

  On top of this, a cathode layer 107 made of Ca and Al was formed by mask vapor deposition using a resistance heating vapor deposition method in a line pattern perpendicular to the pixel electrode line pattern. Finally, in order to protect these organic EL constituents from external oxygen and moisture, a glass cap 108 and an adhesive 109 were hermetically sealed to produce an organic EL display panel.

In the periphery of the display portion of the organic EL display panel obtained in this way, there are an extraction electrode on the anode side connected to each pixel electrode and an extraction electrode on the cathode side, which are obtained by connecting them to a power source. The lighting display of the organic EL display panel was confirmed, and the light emission state was checked.
<Comparative Example 1>

Except for the magnet layer of the foreign substance removal plate, the same as the example except for only one rubber layer.
<Comparative interest 2>

Except for the rubber layer of the foreign substance removal plate, the same as the example except for only one magnet layer.
<Comparative Example 3>

  Except for using the conventional printing apparatus (FIG. 1) that does not have a mechanism for removing foreign matter on the substrate with a foreign matter removal plate and removing the foreign matter on the printing relief plate to remove foreign matter, the same as the embodiment .

  Table 1 shows the evaluation results of Examples and Comparative Examples 1 to 3. Evaluation of the number of foreign matters in the organic EL panel produced as in the example and the comparative example 1, and a pixel having an abnormal light emission shape in a display state or a pixel having extremely low luminance is evaluated as an abnormal light emission pixel. As shown in Table 1, it can be seen that the example provides good results because the number of foreign matters is 1/10 or less than that of the comparative example and the number of short pixels due to the foreign matters is remarkably small. In addition, the number of foreign matters is reduced in a single layer consisting of only a rubber layer, but there are many short pixels. Conversely, in a single layer consisting only of a magnet layer, the number of short pixels is reduced, but there are a large number of foreign matters and abnormal light emission. It can be seen that there are many pixels. This is because the rubber layer alone has a high foreign matter removing ability, but lacks removal of metallic foreign matters that cause a short circuit. In comparison, the magnet layer alone has a high ability to remove metallic foreign matters that cause a short circuit, but the number of foreign matters is large because other foreign matters such as organic matter cannot be removed. Therefore, as in the embodiment, a two-layer structure having both the rubber layer and magnet layer foreign matter removing ability is desirable.

DESCRIPTION OF SYMBOLS 101 ... Substrate 102 ... Pixel electrode 103 ... Partition 104 ... Hole transport layer 105 ... Interlayer 106 ... Organic light emitting layer 107・ ・ ・ ・ ・ Cathode layer 108 ...... Glass cap 109 ...... Adhesive 201 ...... First rotary plate cylinder (printing plate cylinder)
201a... Arrow 202 indicating the direction of movement of the platen... Printing relief plate 203... Anilox roll 204... Ink chamber 205. ... Surface plate 206a .... Arrow 207 indicating the direction in which the surface plate moves .... Printing substrate 302 ... First foreign material removal plate 302a .... Magnet layer 302b ... .. Rubber layer 303... Cleaning chamber for printing 304. Cleaning chamber for foreign matter removal plate 401... Plate cylinder 402 for foreign matter removal plate. 402a ··· Magnet layer 402b ··· Rubber layer 501 ··· Magnet layer 502 · · · Rubber layer 601 · · · Plate cylinder 602 · · · Printing relief plate 603 ··· ... Anilox roll 604 ... arrow indicating the direction in which the ink chamber 605 ----- ink tank 606 ----- plate 606a · · · · platen moved 607 ----- printing plate

Claims (8)

A printing apparatus for printing a fine pattern on a substrate to be printed,
A first rotary plate cylinder with a relief printing plate;
A first foreign matter removing plate provided on the first rotary plate cylinder for removing foreign matter on the surface of the substrate to be printed;
A second rotary plate cylinder provided with a second rotary plate cylinder provided with a printing relief plate and provided with a second foreign material removal plate for removing foreign matter on the surface of the printing relief plate;
A first cleaning chamber for cleaning the printing relief plate and the first foreign matter removal plate;
And a second cleaning chamber for cleaning the second foreign substance removal plate.   The first foreign matter removing plate and the second foreign matter removing plate are composed of two or more layers of a magnet layer for removing metallic foreign matter and a rubber layer for removing organic foreign matter or non-magnetic metallic foreign matter. The printing apparatus according to claim 1.   The printing apparatus according to claim 2, wherein the magnet layer is made of a rubber magnet containing either ferrite or neodymium. The rubber layer is a silicone, urethane, butyl-based, consists either of a fluorine-based, the hardness of 10 to 30 degrees, according to claim 2 adhesive force is characterized by a 50 to 500 g / cm ² or The printing apparatus according to 3.   3. The first foreign matter removing plate and the second foreign matter removing plate are fixed to the first rotary plate cylinder and the second rotary plate cylinder by the magnetic force of the magnet layer. 5. The printing apparatus according to any one of 4. to 4.   Using the printing apparatus according to any one of claims 1 to 5, the foreign matter on the printing substrate is removed with the first foreign matter removing plate, and at the same time, the foreign matter on the printing relief plate is removed with the second foreign matter removing plate. A method for producing an organic functional element, comprising a foreign matter removing process and a film forming process for printing an organic functional layer.   The organic functional element manufacturing method according to claim 6, wherein the organic functional element is an organic EL element.   The organic functional element manufacturing method according to claim 6, wherein the organic functional layer comprises one or more layers and is printed a plurality of times.