JP2013071066A - Method and apparatus for washing packing bag - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a means which can surely wash the inner surface of a packing bag without causing a bad influence.SOLUTION: The packing bag made of a resin film which is formed with closed peripheral parts excluding one side to be an opening is set in a high cleaning space which discharges high cleaning air from not below while the opening is directed downward. The air in the packing bag is replaced with the air in the high cleaning space outside the packing bag, and the dust in the packing bag is removed. The air in the packing bag is sucked by a suction tube which is passed through the opening of the packing bag, and the air in the high cleaning space is made to flow in naturally through the opening outside the suction tube, so that the air in the packing bag is washed with the air in the high cleaning space outside the packing bag.

Description

  The present invention relates to a packing bag cleaning method used for packaging electronic parts and the like that prevent adhesion of dust and the like, and a packing bag cleaning apparatus.

  Precision electronic products and components such as semiconductor devices such as IC (integrated circuits), display devices such as liquid crystal display devices, and storage devices such as hard disks, and the above-mentioned precision electronic products and components thereof are produced by photolithography. In various electronic parts including process jigs such as photomasks, various defects are required unless it is possible to prevent fine particles such as dust and ionic impurities from adhering to the surface. Cause. Therefore, cleaning technology has been developed as an important technical element for handling the above-mentioned various electronic components.

  In addition, when packaging or protecting the above-mentioned various electronic components and protecting them from the outside contamination environment, the containers used for packaging the components and the packaging bags that wrap the entire containers are clean and free from foreign matter. It is desirable that In particular, the packaging bag that wraps the entire container is cut into a necessary size of a material made of a resin film or sheet, and after being processed into a bag shape through a process of thermocompression bonding of the peripheral portion with a heat sealer or the like, in a flexible form Since it is often used and it is often difficult to clean the inner surface of the packaging bag, countermeasures are desired.

  For cleaning the inner surface of the packaging bag, as shown in Patent Document 1, it has been proposed that cleaning can be performed by blowing clean air through a cleaning jig. In this proposal, a strong cleaning effect is expected by pulsating the supply of clean air into the sealed packaging bag or by providing a structure for sucking and discharging air to the outside of the packaging bag.

JP 2003-117506 A

  According to the method shown in Patent Document 1 described above, the inner surface of the packaging bag can be cleaned. However, when clean air to be introduced with an increased pressure is generated by a compressor, oil mist is easily mixed and not removed. Leftover may cause contamination.

  The present invention is proposed in view of the above problems, and the problem to be solved by the present invention is to provide means for reliably cleaning the inner surface of a packaging bag without causing any adverse effects. It is.

  As means for solving the above-mentioned problems, the invention according to claim 1 is characterized in that a packaging bag made of a resin film formed by closing other peripheral portions except for one side as an opening is highly clean from other than the lower side. In the highly clean space where the air is sent out, the opening is opened downward, the air inside the packing bag is replaced with the air in the highly clean space outside the packing bag, and the dust inside the packing bag is removed. This is a method for cleaning a packaging bag.

Further, in the invention according to claim 2, the method of replacing the internal air of the packing bag with the air in the highly clean space outside the packing bag is to suck the internal air with a suction pipe through the opening of the packing bag, 2. The method for cleaning a packaging bag according to claim 1, wherein the air in the highly clean space naturally flows in through the opening outside the suction pipe.

  The invention according to claim 3 is the method for cleaning a packing bag according to claim 2, wherein the cleaning degree inside the packing bag is measured simultaneously with the cleaning of the packing bag.

  The invention according to claim 4 is characterized in that the packing bag in the highly clean space is installed in a movable state over a plurality of opposing sides of the packing bag. A method for cleaning a packaging bag according to claim 1.

  The invention according to claim 5 is characterized in that the internal volume of the packing bag is changed by giving opposing movement from the lateral direction to the packing bag installed in a movable state. This is a method for cleaning a packaging bag.

  The invention described in claim 6 is a cleaning device for carrying out the method for cleaning a packaging bag according to any one of claims 1 to 5, wherein the size of the packaging bag is set as a local highly clean space. A cleaning device for a packing bag, characterized in that a highly clean space is provided in an adapted size, and a clamp arm for moving the packing bag in an opposite direction from the lateral direction and a movable mechanism thereof are provided.

  The invention described in claim 7 is characterized in that a suction mechanism for sucking air inside through the opening of the packing bag and a particle counter for measuring the cleanliness of the sucked air are connected. It is a cleaning apparatus of the packaging bag of Claim 6.

  The invention described in claim 8 is the packaging bag cleaning apparatus according to claim 6 or 7, wherein an ionizer is provided in a local highly clean space.

  The present invention installs the packing bag in a highly clean space that sends highly clean air from other than the bottom with the opening opened downward, and the air inside the packing bag is air in the highly clean space outside the packing bag. And cleaning the inner surface of the packing bag without causing any adverse effects on the packing bag itself. Can be provided.

  According to claim 3 or 7 of the present invention, the cleanliness inside the packing bag can be measured simultaneously while cleaning the packing bag, so that the inner surface of the packing bag can be further cleaned by simple measurement. It can be done reliably.

It is a schematic cross section for demonstrating embodiment of this invention. It is a schematic cross section for demonstrating the method to change the internal volume of a packaging bag, Comprising: The method of taking two states (a) and (b) alternately is shown. It is a graph which shows an example which verified the effect of packing bag washing in the present invention by simultaneous measurement of particle measurement.

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.
FIG. 1 is a schematic cross-sectional view for explaining an embodiment of the present invention.
The packaging bag 1 can be formed by, for example, stacking a plurality of resin films and pasting other peripheral portions except one side as an opening. In addition, except for the lower side, in the drawing, a highly clean space 2 for sending highly clean air 21 from above is prepared. A general clean bench or small clean booth can be used as the highly clean space 2, but when preparing a highly clean space dedicated as a cleaning device for packing bags, it fits the size of the target packing bag. It is preferable to use a mini-environment container 23 having a size as described above. The mini-environment container 23 is a container that creates a local clean environment with low energy consumption and low cost without incurring a large load like downflow in clean room technology, and has been generalized as one direction of clean room technology. . In addition, unlike the figure, the highly purified air 21 can be supplied from the side surface of the mini-environment container 23.

  In the high clean space 2, the opening 11 is opened downward and the packaging bag 1 is installed. In order to keep the opening 11 in an open state, it can be supported using an appropriate jig as required. The packaging bag 1 is held by the clamp arm 3 at two opposite positions in the lateral direction. In addition, as will be described later, the movable mechanism 31 connected to each clamp arm can change the inner volume of the packing bag by imparting opposing movement from the lateral direction.

  Further, the suction mechanism 4 is provided outside the mini-environment container 23, and the other end of the suction pipe 41 connected to the suction mechanism 4 is inserted through the opening 11 into the inside of the packaging bag 1 installed in the mini-environment container 23. It is possible to take. The air inside the packaging bag 1 provided with the discharge path by the suction pipe 41 can be quantitatively discharged by the suction mechanism 4 connected to the filter 42, the suction speed adjusting device 43 and the timer 44 as necessary.

  Instead of the air discharged through the suction pipe 41, highly clean air can be taken into the inside of the packaging bag from the outside of the packaging bag through the opened opening of the packaging bag. If the suction speed is adjusted so that the suction speed is not too high by the suction speed adjusting device 43, a stable air current does not cause the foreign matter to rise. In addition, the air taken into the packing bag is not clean air that is introduced with increased pressure and oil mist is likely to be mixed in as in the past, but it is highly purified that naturally flows in from the highly clean space of the present invention according to the pressure difference. Air. As described above, the air inside the packaging bag can be replaced with the air in the highly clean space outside the packaging bag. In addition, the inside of the packing bag said here refers to the whole inside of a packing bag from the surface which the opening part of the opening of a packing bag makes, and means the concept expanded rather than the normal meaning of the inside of a closed packing bag. .

  The present invention can also measure the cleanliness inside the packing bag simultaneously with the cleaning of the packing bag by sucking the air inside through the opening of the packing bag. By introducing a part of the air sucked from the inside of the packing bag through the suction pipe 41 by the external suction mechanism 4 to the particle counter 5 from the middle of the suction pipe 41, By the same method, the cleanliness inside the packaging bag can be measured in-line in real time, and the effect of evaluating the cleaning state inside the packaging bag in product management is great.

  The conventional cleaning method cannot directly measure the effect of cleaning the target packaging bag. The only evaluation method for the cleaning effect is to destroy a part of the cleaned packaging bag and perform sampling measurement using a liquid particle counter. In the conventional method in which a part of the measurement object is immersed in a weighed ultrapure water and the particles flowing into the pure water are measured using a submerged particle counter, microbubbles are generated during sample collection or processing. Since the measurement is based on a light scattering method using a general semiconductor laser, it is difficult to distinguish between foreign substances and bubbles, and measurement errors are likely to occur, and stable measurement is difficult. Moreover, since it is a kind of sampling inspection that is not direct measurement, the cleaning state of the packing bag cannot be evaluated in a timely manner, and the effect of evaluating the cleaning state inside the packing bag in product management is small.

FIG. 3 is a graph showing an example in which the effect of cleaning the packaging bag in the present invention is verified by simultaneous measurement of particle measurement. In this example, the suction tube 41 is inserted into a packing bag having an internal volume of about 5 liters and sucked and discharged for 5 minutes, and highly clean air naturally flows into the packing bag according to the pressure difference from the high clean space. This is the result of performing air substitution and simultaneously measuring with a particle counter. The number of particles on the vertical axis represents the number per unit volume of fine particles having a major axis exceeding 0.1 μm. The result of the graph shows that the inside of the packing bag is rapidly cleaned with suction for 1 to 2 minutes, and that no particulate foreign matter is detected after 5 minutes.

  In the present invention, as described above, the packing bag 1 is held by the clamp arms 3 at two opposite positions in the lateral direction, and the movable mechanism 31 is connected to each of the clamp arms. The packaging bag 1 is installed in a movable state over a plurality of opposing sides of the packaging bag. By the mechanism described above, it is possible to impart opposing movement from the lateral direction to the installed packaging bag, and it is possible to change the internal volume of the packaging bag.

  Packing by changing the internal volume of the packing bag by the above-described mechanism, separately from the method of cleaning the packing bag and replacing the air inside the packing bag through the opening 11 other than the suction tube 41 and the suction tube 41 It is also possible to replace the air inside the bag. That is, most of the air inside the packaging bag is discharged to the outside of the packaging bag while the inner volume of the packaging bag is reduced, and the outside of the packaging bag through which highly clean air 21 flows while the inner volume of the packaging bag is increased. The clean air can be taken into the inside of the packing bag from the highly clean space 2 and by repeating the above movement, the air inside the packing bag is replaced with the air in the highly clean space outside the packing bag. Internal dust removal can be promoted.

  FIG. 2 is a schematic cross-sectional view for explaining a method of changing the internal volume of the packing bag described above, and shows a method of alternately taking two states (a) and (b). In (a), by moving the two clamp arms 3 in the direction approaching as shown by the straight arrows, in the state 1a in which the inner volume of the packing bag is reduced, much of the air inside the packing bag is removed from the lower opening 11. As indicated by the curved block arrow, it is discharged out of the packaging bag. Further, in (b), the two clamp arms 3 move in the direction away from each other as indicated by the straight arrows, and in the state 1b in which the inner volume of the packing bag is increased, highly clean air is passed from the outside of the packing bag to the lower opening. 11, it is taken into the packing bag as indicated by the curved block arrow.

  The opposing movement in the lateral direction by the movable mechanism 31 connected to the clamp arm 3 not only changes the internal volume of the packaging bag 1 as described above, but also gives vibration to the film constituting the packaging bag, thereby packaging the packaging bag 1. There is an effect of detaching foreign matter adhering to the inner surface of the bag 1. In the highly clean space 2 in which the desorbed foreign matter, particles larger than a certain level pass through the opening 11 of the packing bag 1 by gravity and reach the lower surface of the mini-environment container 23, and highly purified air 21 flows. In this case, the foreign matter that has reached the lower surface can be discharged without rising again. In addition, the fine particles floating in the packing bag internal space due to the minutely separated foreign matter can be removed by discharge accompanying air replacement due to the change in the internal volume of the packing bag.

  As described above, in the present invention, as a method for purifying the air inside the packing bag, that is, the air in and near the inner surface of the packing bag, the air in the highly clean space naturally flows into the packing bag or the contents of the packing bag. A method of replacement by naturally replacing in accordance with the product change is adopted. Clean air introduced from the compressor is not forcibly discharged from the cylinder tip into the packing bag, so the inside of the packing bag can be cleaned without causing any adverse effects without greatly disturbing the high-purity air. It can be carried out.

The present invention can also prevent the surface of the packaging bag to be cleaned from being charged by providing the ionizer 22 in a locally highly clean space. In many cases, the packaging bag is formed of a resin film, and static electricity is easily charged on the surface. Therefore, there is a problem that adhesion of foreign matters is promoted or foreign matters once attached are difficult to be detached. It is possible to take measures to prevent electrification by depositing a metal film such as aluminum on the surface. However, in the cleaning method of the present invention, the highly purified air itself replaced by the ionizer is made difficult to be charged. Use is particularly effective.

DESCRIPTION OF SYMBOLS 1, 1a, 1b ... Packing bag 11 ... Opening part 2 ... Highly clean space 21 ... Highly clean air 22 ... Ionizer 23 ... Mini-environment container 3 ... Clamp arm 31 ... Movable mechanism 4 ... Suction mechanism 41 ... Suction tube 42 ... Filter 43 ... Suction speed adjusting device 44 ... Timer 5 ... Particle counter

Claims (8)

  A packaging bag made of a resin film formed by closing the other peripheral part except for one side as the opening part is installed with the opening part opened downward in a highly clean space that sends highly clean air from other than the lower part. A method for cleaning a packaging bag, wherein the air inside the packaging bag is replaced with air in a highly clean space outside the packaging bag to remove dust inside the packaging bag.   The method of replacing the internal air of the packing bag with the air in the highly clean space outside the packing bag is to suck the internal air with the suction pipe through the opening of the packing bag and into the highly clean space through the opening outside the suction pipe. 2. The method for cleaning a packaging bag according to claim 1, wherein the air naturally flows in.   The cleaning method for a packing bag according to claim 2, wherein the cleanliness of the packing bag is measured simultaneously with the cleaning of the packing bag.   The packaging bag cleaning method according to any one of claims 1 to 3, wherein the packaging bag in the highly clean space is installed in a movable state over a plurality of opposing sides of the packaging bag.   The method for cleaning a packing bag according to claim 4, wherein the packing bag installed in a movable state is subjected to an opposing movement from the lateral direction to change the inner volume of the packing bag.   A cleaning device for carrying out the packaging bag cleaning method according to any one of claims 1 to 5, wherein a highly clean space is provided in a size adapted to the size of the packaging bag as a local highly clean space, A packaging bag cleaning device comprising: a clamp arm for imparting opposing movement from a lateral direction to a packaging bag; and a movable mechanism thereof.   The apparatus for cleaning a packaging bag according to claim 6, further comprising a suction mechanism for sucking the air inside through the opening of the packaging bag and a particle counter for measuring the cleanliness of the sucked air. .   The packing bag cleaning apparatus according to claim 6 or 7, wherein an ionizer is provided in a local highly clean space.