JP2013065876A - Multilayer substrate and manufacturing method of the same - Google Patents

Multilayer substrate and manufacturing method of the same Download PDF

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JP2013065876A
JP2013065876A JP2012255910A JP2012255910A JP2013065876A JP 2013065876 A JP2013065876 A JP 2013065876A JP 2012255910 A JP2012255910 A JP 2012255910A JP 2012255910 A JP2012255910 A JP 2012255910A JP 2013065876 A JP2013065876 A JP 2013065876A
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layer
multilayer substrate
dielectric layer
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pad layer
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Chih-Kuang Yang
楊之光
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Princo Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation

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  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a multilayer substrate which further reduces bump heights, improves the density of a package, and improves the reliability of the package in a flip chip or other packages having high density and multiple contacts, which has a planarized surface.SOLUTION: A multilayer substrate includes: a surface dielectric layer 404 and at least one pad layer 402. The surface dielectric layer 404 is provided at one surface layer of the multilayer substrate, and the pad layer 402 is buried in the surface dielectric layer 404. The surface dielectric layer 404 and the pad layer 402 form the multilayer substrate of this invention. The at least one pad layer 402 is formed on a surface of a flat carrier, and the surface dielectric layer 404 covering the pad layer 402 is formed to allow the pad layer 402 to be buried in the surface dielectric layer 404. The multilayer substrate is separated from the surface of the carrier, and the surface dielectric layer 404 and the pad 402 form the multilayer substrate having a flat surface.

Description

本発明は、多層基板及びその製造方法に関し、特に平坦な多層基板及びその製造方法に関する。 The present invention relates to a multilayer substrate and a manufacturing method thereof, and more particularly to a flat multilayer substrate and a manufacturing method thereof.

近年、いかなる電子製品の小型化も必然的な傾向であり、半導体製造工程寸法の不断の小型化に伴い、後段パッケージに関する技術も必然的に小型化の方向へ進む必要がある。従って、近年、集積回路の集積度が不断に向上する時、集積度が高い多層基板を使用してチップ又は素子に対してパッケージをして、高密度システムに組み込むことも必然な傾向である。 In recent years, downsizing of any electronic product has been an inevitable trend, and with the continuous downsizing of the semiconductor manufacturing process dimensions, it is necessary for the technology relating to the subsequent package to inevitably progress toward downsizing. Therefore, in recent years, when the integration degree of an integrated circuit is constantly improved, it is inevitable that a chip or an element is packaged using a multilayer board having a high integration degree and incorporated into a high-density system.

図１を参照すると、従来の技術における多層基板の簡単な概略図である。いわゆる多層基板の表面は、即ち、後続にチップ又は素子とパッケージを行うために用いられる表面であり、多層基板はパッド層１０２と、表面誘電層１０４と、はんだマスク層１０６とを含む。パッド層１０２の下側はそれと電気的に接続した金属ライン層１０８である。従来の技術はたいていラミネート法、ビルドアップ法などによって多層基板の数層のライン層と数層の誘電層(未図示)を製造する。しかし、表面誘電層１０４の厚さはパッド層１０２、金属ライン層１０８の厚さに比べてかなり大きくなる。例えば、一般的に従来の多層基板のパッド層１０２、金属ライン層１０８の厚さが僅かな約数μmから約数十μmでも、表面誘電層１０４の厚さは約数十μmから約２００μmになる。従って、パッド層１０２下側に金属ライン層１０８が存在するために、ラミネート法でも又はビルドアップ法でも多層基板を製造する時は、固定した厚さの誘電層材料で表面誘電層１０４を製造するため、多層基板の表面にパッド層１０２を形成する時、必然的に図１に示すように表面の不平坦を生み出すが、上記表面誘電層１０４のように厚さが約数十μmから約２００μmであれば、下側金属ライン層１０８の厚さは約数μmから約数十μmである。誘電層の厚さは金属層よりずっと厚くて、ラミネート法又はビルドアップ法の工程中で、プロセスパラメータの調整を利用して誘電層を少し変形するようにして、表面の不平坦を補償して適切な範囲に入るようにする。 Referring to FIG. 1, a simplified schematic diagram of a multilayer substrate in the prior art. The surface of the so-called multilayer substrate is the surface used for subsequent packaging with chips or elements, and the multilayer substrate includes a pad layer 102, a surface dielectric layer 104, and a solder mask layer 106. Below the pad layer 102 is a metal line layer 108 electrically connected thereto. Conventional techniques usually produce several line layers and several dielectric layers (not shown) of a multilayer substrate by a laminate method, a build-up method or the like. However, the thickness of the surface dielectric layer 104 is considerably larger than the thickness of the pad layer 102 and the metal line layer 108. For example, even if the thickness of the pad layer 102 and the metal line layer 108 of the conventional multilayer substrate is generally only about several μm to about several tens μm, the thickness of the surface dielectric layer 104 is about several tens μm to about 200 μm. Become. Accordingly, since the metal line layer 108 exists under the pad layer 102, the surface dielectric layer 104 is manufactured with a fixed thickness dielectric layer material when the multilayer substrate is manufactured by either the laminate method or the build-up method. Therefore, when the pad layer 102 is formed on the surface of the multi-layer substrate, the surface unevenness is inevitably produced as shown in FIG. 1, but the thickness is about several tens μm to about 200 μm like the surface dielectric layer 104. Then, the thickness of the lower metal line layer 108 is about several μm to about several tens μm. The dielectric layer is much thicker than the metal layer and compensates for surface irregularities by adjusting the process parameters slightly during the laminating or build-up process to modify the dielectric layer. Try to be in the proper range.

しかしながら、集積回路の集積度が不断に向上するため、体積縮小と電気的特性の検討に基づいて、パッド層１０２と、金属ライン層１０８と、表面誘電層１０４との厚さも伴って減小する。信号の伝送を維持するための電気的特性から検討すると、パッド層１０２、金属ライン層１０８の厚さの減小の幅には制限があるが、表面誘電層１０４の厚さは大幅に減小することができて、当即に業界では更に厚さが約１０μmに達する表面誘電層１０４の製造を試している。例えば、上記表面誘電層１０４の厚さは約１０μmであり、下側の金属ライン層１０８の厚さは約数μmから約１０μmである。表面誘電層１０４の厚さと金属ライン層１０８の厚さとの寸法が近づいて同じくらいになると、誘電層１０４を変形する上記手段は、表面の不平坦に対しての補償が足らなくなり、必然的に、さらに多層基板の表面の不平坦の問題が目立ってくる。 However, since the integration degree of the integrated circuit is constantly improved, the thickness of the pad layer 102, the metal line layer 108, and the surface dielectric layer 104 is also reduced based on the volume reduction and the examination of the electrical characteristics. . Considering the electrical characteristics for maintaining signal transmission, the thickness of the pad dielectric layer 102 and the metal line layer 108 is limited, but the thickness of the surface dielectric layer 104 is significantly reduced. The industry is immediately trying to produce a surface dielectric layer 104 with a thickness of about 10 μm. For example, the thickness of the surface dielectric layer 104 is about 10 μm, and the thickness of the lower metal line layer 108 is about several μm to about 10 μm. As the thickness of the surface dielectric layer 104 and the thickness of the metal line layer 108 approach and are about the same, the means for deforming the dielectric layer 104 is not sufficient to compensate for surface unevenness and inevitably. Furthermore, the problem of unevenness of the surface of the multilayer substrate becomes conspicuous.

図２は、従来の技術における、フリップチップ(Flip Chip)工程によってチップに対してパッケージを行うことを例とする簡単な概略図である。従来の技術によって製造した多層基板は、誘電層１０３と、対応する金属ライン層１０７-１、１０７-２と、表面誘電層１０４と、対応する金属ライン層１０８-１、１０８-２、１０８-３とを備える。且つ多層基板は金属ライン層１０８-１、１０８-２、１０８-３の上にパッド層１０２-１、１０２-２、１０２-３を備える。 FIG. 2 is a simple schematic diagram illustrating an example in which a chip is packaged by a flip chip process in the prior art. A multilayer substrate manufactured according to the prior art includes a dielectric layer 103, corresponding metal line layers 107-1, 107-2, a surface dielectric layer 104, and corresponding metal line layers 108-1, 108-2, 108-. 3. In addition, the multilayer substrate includes pad layers 102-1, 102-2, and 102-3 on the metal line layers 108-1, 108-2, and 108-3.

図２に示すように、従来のパッケージ技術はフリップチップ(Flip Chip)実装の技術を主流とするが、フリップチップ実装は、チップ１１０の表面を下側に向かうようにして、金属バンプ１２０-１、１２０-２、１２０-３を通してチップ表面の接点１１２-１、１１２-２、１１２-３と多層基板のパッド層１０２-１、１０２-２、１０２-３とを結合接続する技術である。また、多層基板パッド層１０２-１、１０２-２、１０２-３とチップ表面の接点１１２-１、１１２-２、１１２-３ (電極)との間は、必然的に一対一にマッチし、且つ極めて正確に結合しなければならない。このフリップチップ実装は、まず前記多層基板を事前にパッケージブロックに固定し、チップの上のバンプ１２０-１、１２０-２、１２０-３ (bump)と多層基板のパッド層１０２-１、１０２-２、１０２-３との位置を合わせた後、また熱圧方式でフリップチップを行う。しかしながら、必然的にチップ表面の接点１１２-１、１１２-２、１１２-３のバンプ１２０-１、１２０-２、１２０-３が全部パッド層１０２-１、１０２-２、１０２-３に合わせられ、且つそれと結合(Bonding)すると、フリップチップが成功したと見える。しかし多層基板の表面は、回路設計の都合で、金属ライン層１０８-１、１０８-３の下側は金属ライン層１０７-１、１０７-２を備えるが、金属ライン層１０８-２の下側には対応する金属層がなくて、パッド層１０２-２高さは他のパッド層１０２-１、１０２-３の高さより低くて、上記フリップチップを行う時、バンプ１２０-２がパッド層１０２-２とチップ表面の接点１１２-２とを接続できないことを引き起こす。 As shown in FIG. 2, the conventional packaging technology is mainly flip chip mounting technology. In flip chip mounting, the surface of the chip 110 faces downward and the metal bump 120-1 is placed. , 120-2, 120-3, and the contacts 112-1, 112-2, 112-3 on the chip surface and the pad layers 102-1, 102-2, 102-3 of the multilayer substrate are coupled and connected. In addition, the multilayer substrate pad layers 102-1, 102-2, and 102-3 and the contacts 112-1, 112-2, and 112-3 (electrodes) on the chip surface inevitably match one-to-one, And must be very accurately coupled. In this flip chip mounting, the multilayer substrate is first fixed to a package block in advance, and bumps 120-1, 120-2, 120-3 (bump) on the chip and pad layers 102-1, 102- of the multilayer substrate are mounted. 2. After aligning the position with 102-3, flip chip is performed again by a hot press method. However, the bumps 120-1, 120-2, and 120-3 of the contacts 112-1, 112-2, and 112-3 on the chip surface are necessarily aligned with the pad layers 102-1, 102-2, and 102-3. And when bonded to it, the flip chip appears to be successful. However, the surface of the multilayer substrate is provided with metal line layers 107-1 and 107-2 on the lower side of the metal line layers 108-1 and 108-3 for the sake of circuit design. Has no corresponding metal layer, and the height of the pad layer 102-2 is lower than the height of the other pad layers 102-1 and 102-3. -2 and the contact 112-2 on the chip surface cannot be connected.

なお、フリップチップだけでなく、他の高密度で多接点なパッケージ、例えば、ボール・グリッド・アレイ（BGA）パッケージ、ランド・グリッド・アレイ(LGA)及びウェハレベルパッケージ(CSP)においても、たとえ一つの金属バンプがパッド層とチップ又は素子の表面の接点とを接続できなかったら、パッケージは失敗になる。従って、多層基板の表面において、チップ１１０表面又は素子の表面の平坦性の要求は以前よりさらに高い。 Not only flip-chip, but also other high-density and multi-contact packages such as ball grid array (BGA) package, land grid array (LGA) and wafer level package (CSP). If two metal bumps fail to connect the pad layer and chip or device surface contacts, the package fails. Therefore, the flatness requirement of the surface of the chip 110 or the surface of the element on the surface of the multilayer substrate is higher than before.

一般なフリップチップでバンプの高さ(bump Height)が１００μmであるバンプを使用する場合、参考用の高さの許容誤差値は大略±１０μm前後である。しかし、集積回路の集積度が向上するため、単位面積あたりのパッド層密度も向上し、バンプ高さ(bump Height)はさらに縮小して、高さの許容誤差値も当然にさらに小さくなる。従って、一層に多層基板の表面の平坦性(即ち、パッド層と誘電層との共平面性)、又は任意のパッド層自身の平坦性に対しての要求はさらに高くなる。一般に業界で製造する金属ライン層の厚さは概ね数十μmであり、更には数μmほど小さくて、従って多層基板の表面の平坦化が有效でなかったら、フリップチップの良率と信頼度にひどく影響する。 When a bump having a bump height of 100 μm is used in a general flip chip, a reference height tolerance is approximately ± 10 μm. However, since the degree of integration of the integrated circuit is improved, the pad layer density per unit area is also improved, the bump height is further reduced, and the allowable error value of the height is naturally further reduced. Therefore, the demand for the flatness of the surface of the multilayer substrate (that is, the coplanarity between the pad layer and the dielectric layer) or the flatness of any pad layer itself is further increased. In general, the thickness of the metal line layer manufactured in the industry is about several tens of μm, and is about several μm smaller. Therefore, if flattening of the surface of the multilayer substrate is not effective, the flip chip has a good rate and reliability. Badly affected.

従って、表面の平坦な多層基板を製造することができたら、上記フリップチップ又は他の高密度で多接点なパッケージにおいては、パッケージの信頼度を向上することができる。且つ更にバンプ高さ(bump height)を一層縮小することができて、さらに全体パッケージの密度の向上に有利である。 Therefore, if a multilayer substrate with a flat surface can be manufactured, the reliability of the package can be improved in the flip chip or other high-density and multi-contact packages. In addition, the bump height can be further reduced, which is advantageous for improving the density of the entire package.

本発明の主な目的は、パッケージに用する多層基板のパッド層と誘電層の平坦度を改善することができ、パッケージの良率と信頼度を向上して、全体パッケージの密度をさらに向上する多層基板及びその製造方法を提供することを課題とする。 The main object of the present invention is to improve the flatness of the pad layer and the dielectric layer of the multilayer substrate used for the package, improve the package yield and reliability, and further improve the density of the entire package. It is an object to provide a multilayer substrate and a method for manufacturing the same.

本発明の上記目的を達成するために、本発明の多層基板は表面誘電層及び少なくとも一つのパッド層を含む。表面誘電層は多層基板の一つの表層に設けられ、パッド層は表面誘電層に埋め込まれ、表面誘電層とパッド層とは多層基板を形成する。 In order to achieve the above object of the present invention, the multilayer substrate of the present invention includes a surface dielectric layer and at least one pad layer. The surface dielectric layer is provided on one surface layer of the multilayer substrate, the pad layer is embedded in the surface dielectric layer, and the surface dielectric layer and the pad layer form a multilayer substrate.

本発明の多層基板は、パッド層の側面と表面誘電層とが密接に接合し、且つ、パッド層の一つの表面と表面誘電層の表面とは一つの共通面を備えて、パッケージブロックに固定された多層基板のパッド層と表面誘電層の平坦度を良好にする。素子の表面とパッケージするために使用する時には、パッケージの良率と信頼度を向上する。 In the multilayer substrate of the present invention, the side surface of the pad layer and the surface dielectric layer are intimately bonded, and one surface of the pad layer and the surface of the surface dielectric layer have one common surface, and are fixed to the package block. The flatness of the pad layer and the surface dielectric layer of the formed multilayer substrate is improved. When used for packaging with the surface of an element, the package yield rate and reliability are improved.

本発明の上記目的を達成するために、本発明における多層基板の製造方法は平坦なキャリアの表面に少なくとも一つのパッド層を形成するステップと、パッド層を覆う表面誘電層を形成して、パッド層が表面誘電層に埋め込まれるようにするステップと、表面誘電層及びパッド層をキャリアの表面から分離し、表面誘電層とパッド層が平坦な多層基板を形成するステップとを含む。 In order to achieve the above object of the present invention, a method of manufacturing a multilayer substrate according to the present invention includes a step of forming at least one pad layer on the surface of a flat carrier, a surface dielectric layer covering the pad layer, and a pad. Allowing the layer to be embedded in the surface dielectric layer, and separating the surface dielectric layer and the pad layer from the surface of the carrier to form a multilayer substrate in which the surface dielectric layer and the pad layer are flat.

この平坦な多層基板を形成して、素子の表面とパッケージ、即ち、多層基板のパッド層とパッケージ素子の表面との一つの接点に対してパッケージするために使用するが、その中の前記素子はチップで、前記パッケージの型式はフリップチップ実装であることが好ましい。 This flat multilayer substrate is formed and used to package against one contact between the device surface and the package, i.e., the pad layer of the multilayer substrate and the surface of the package device, wherein the device therein is In the chip, the package type is preferably flip-chip mounting.

従来の技術に比べ、本発明は平坦なキャリアの表面を利用して、パッド層及び表面誘電層を形成して、パッド層が表面誘電層に埋め込まれて、一つの共通面を備えるため、本発明の多層基板表面の平坦性を向上する。集積回路の集積度の向上に伴って、バンプピッチ(bump pitch)は必然的に縮小し、バンプ高さ(bump height)も伴って縮小する必要がある。従って本発明の多層基板は後続するフリップチップ実装又は他の高密度で多接点なパッケージの時に、バンプ高さ(bump height)がさらに小さいバンプを使用することができ、同時に本発明の多層基板の表面平坦性のために、パッケージの時の多層基板とチップ又は素子の表面との間の平行距離の一致を確保することができて、パッケージの信頼度を向上し、さらに全体パッケージの密度を一層向上する。 Compared with the prior art, the present invention uses a flat carrier surface to form a pad layer and a surface dielectric layer, and the pad layer is embedded in the surface dielectric layer and has a common surface. The flatness of the multilayer substrate surface of the invention is improved. As the degree of integration of an integrated circuit increases, the bump pitch inevitably decreases, and the bump height needs to decrease. Thus, the multilayer substrate of the present invention can use bumps having a smaller bump height when the flip-chip mounting or other high-density multi-contact package is performed, and at the same time, the multilayer substrate of the present invention can be used. Due to the surface flatness, it is possible to ensure the coincidence of the parallel distance between the multilayer substrate and the surface of the chip or the device at the time of the package, thereby improving the reliability of the package and further increasing the density of the entire package. improves.

従来の技術における多層基板の簡単な概略図である。It is the simple schematic of the multilayer substrate in a prior art. 従来の技術における、フリップチップ(Flip Chip)工程によってチップに対してパッケージを行うことを例とする簡単な概略図である。FIG. 9 is a simple schematic diagram illustrating an example in which packaging is performed on a chip by a flip chip process in the prior art. 本発明における多層基板の表面の簡単な概略図である。It is the simple schematic of the surface of the multilayer substrate in this invention. 本発明における表面の平坦な多層基板を製造する方法フローチャートである。It is a method flowchart which manufactures the multilayer substrate with the flat surface in this invention. 本発明における表面の平坦な多層基板を利用して、フリップチップ(Flip Chip)プロセスを行う簡単な概略図である。FIG. 2 is a schematic diagram for performing a flip chip process using a multilayer substrate having a flat surface according to the present invention.

図３は、本発明における多層基板の表面の簡単な概略図である。本発明の多層基板は少なくとも一つのパッド層３０２及び一つの表面誘電層３０４を含む。且つ、多層基板はさらにはんだマスク層３０６を含むことができる。パッド層３０２の下側は多層基板の金属ライン層３０８である。本発明のパッド層３０２は表面誘電層３０４に埋め込まれ、且つパッド層３０２の側面と表面誘電層３０４とが密接に接合して、両者の間の付着強度を強める。また、パッド層３０２の表面と表面誘電層３０４の表面とは一つの共通面を備え、本発明の多層基板の表面の平坦性を高め、そのため、パッド層３０２の表面と表面誘電層３０４の表面との間に段差がない。 FIG. 3 is a simple schematic view of the surface of the multilayer substrate in the present invention. The multilayer substrate of the present invention includes at least one pad layer 302 and one surface dielectric layer 304. In addition, the multilayer substrate may further include a solder mask layer 306. Below the pad layer 302 is the metal line layer 308 of the multilayer substrate. The pad layer 302 of the present invention is embedded in the surface dielectric layer 304, and the side surface of the pad layer 302 and the surface dielectric layer 304 are intimately bonded to increase the adhesion strength between them. In addition, the surface of the pad layer 302 and the surface of the surface dielectric layer 304 have a common surface to improve the flatness of the surface of the multilayer substrate of the present invention. Therefore, the surface of the pad layer 302 and the surface of the surface dielectric layer 304 There is no step between.

次いで、図４Aから図４Cは、本発明における表面の平坦な多層基板を製造する方法フローチャートである。先ず、図４Aは、本発明の製造方法において、平坦なキャリア４００の表面にまずはんだマスク層４０１を形成した後に、パッド層４０２を含む複数のパッド層を形成することを示す。例えば、表面の平坦度がよいシリコンウェハをこのキャリア４００として、塗布方式ではんだマスク層４０１を形成し、エッチング、電鋳又はリトグラフィーなどの方式ではんだマスク層４０１の表面にパッド層４０２を形成することができる。図４Bは、パッド層４０２などを形成した後に、パッド層４０２などを覆う表面誘電層４０４を形成して、パッド層４０２などが表面誘電層４０４に埋め込まれるようにすることを示す。さらに多層基板の設計の必要によって、表面誘電層４０４を形成した後、金属ライン層の予定位置で表面誘電層４０４を開孔することができ、図３のように金属ライン層３０８、及び更に多くの誘電層と、金属ライン層など(図４Bは、多層基板を製造する部分だけを示す) を形成して、多層基板の内部線路構造を完成する。図４Cは、はんだマスク層４０１をキャリア４００の表面から分離して、上下に反転した後、またパッド層４０２などの位置ではんだマスク層４０１を開孔し、又は、はんだマスク層４０１は、表面誘電層４０４と埋め込まれたパッド層４０２等とがキャリア４００表面から剥離して、上下に反転した後に、またパッド層４０２及び表面誘電層４０４の表面に形成することもできることを示す。それで、はんだマスク層４０１と、パッド層４０２などと、表面誘電層４０４とが本発明の多層基板を構成する。本発明の多層基板をキャリア４００の表面から分離する方法は、例えば、犠牲層法または基板表面の付着強度減少法等が好ましい。 4A to 4C are flowcharts of a method for manufacturing a flat substrate having a flat surface according to the present invention. 4A shows that in the manufacturing method of the present invention, a solder mask layer 401 is first formed on the surface of a flat carrier 400, and then a plurality of pad layers including a pad layer 402 are formed. For example, using a silicon wafer having a good surface flatness as the carrier 400, a solder mask layer 401 is formed by a coating method, and a pad layer 402 is formed on the surface of the solder mask layer 401 by a method such as etching, electroforming, or lithography. can do. FIG. 4B shows that after the pad layer 402 and the like are formed, a surface dielectric layer 404 that covers the pad layer 402 and the like is formed so that the pad layer 402 and the like are embedded in the surface dielectric layer 404. Further, depending on the design requirement of the multilayer substrate, after the surface dielectric layer 404 is formed, the surface dielectric layer 404 can be opened at a predetermined position of the metal line layer, and the metal line layer 308 as shown in FIG. A dielectric layer, a metal line layer, and the like (FIG. 4B shows only a portion for manufacturing the multilayer substrate) are completed to complete the internal line structure of the multilayer substrate. 4C shows that the solder mask layer 401 is separated from the surface of the carrier 400 and turned upside down, and then the solder mask layer 401 is opened at a position such as the pad layer 402, or the solder mask layer 401 It shows that the dielectric layer 404 and the embedded pad layer 402 and the like can be formed on the surface of the pad layer 402 and the surface dielectric layer 404 after being peeled off from the surface of the carrier 400 and turned upside down. Therefore, the solder mask layer 401, the pad layer 402, etc., and the surface dielectric layer 404 constitute the multilayer substrate of the present invention. The method for separating the multilayer substrate of the present invention from the surface of the carrier 400 is preferably, for example, a sacrificial layer method or a method for reducing the adhesion strength of the substrate surface.

従来のラミネート方式の技術と違う多層基板の製造方法は、後続するフリップチップ又は他の高密度で多接点なパッケージの信頼度を向上するように、全体パッケージの密度を向上し、多層基板は必然的に相当な平坦度を備える必要があるが、しかしながら、従来の技術はラミネート法、ビルドアップ法を使用して多層基板を製造して、多層基板の表面構造は必然的に下層の金属ライン層の影響を受けて表層に起伏を生成する。しかし、本発明は表面の平坦度がよいキャリア４００を利用して、パッド層４０２を表面誘電層４０４の内に埋め込んで、平坦な表層を備えた多層基板の表面構造を製造し、ICパッケージの集積度が不断に向上しても、体積の縮小と電気的特性の検討によれば、多層基板の誘電層４０４の厚さは伴って減らすことになり、本発明によって製造する多層基板はやはり表面の平坦度がよい表面構造を備える。従って、後続するフリップチップ又は他の高密度で多接点なパッケージを行う時、パッケージの良率と信頼度をさらに向上することができる。 Different from conventional laminate technology, the method of manufacturing a multilayer board increases the density of the whole package so that the reliability of the subsequent flip chip or other high-density multi-contact package is improved, and the multilayer board is inevitable. However, in the conventional technique, a multilayer substrate is manufactured using a laminate method or a build-up method, and the surface structure of the multilayer substrate inevitably has a lower metal line layer. Generates undulations on the surface under the influence of However, the present invention uses a carrier 400 having a good surface flatness to embed a pad layer 402 in a surface dielectric layer 404 to produce a surface structure of a multi-layer substrate having a flat surface layer. Even if the integration degree is constantly improved, according to the examination of the volume reduction and the electrical characteristics, the thickness of the dielectric layer 404 of the multilayer substrate is reduced along with the surface of the multilayer substrate manufactured by the present invention. It has a surface structure with good flatness. Thus, when performing subsequent flip chip or other high density multi-contact packages, the package yield and reliability can be further improved.

図５を参照すると、本発明における表面の平坦な多層基板を利用して、フリップチップ(Flip Chip)プロセスを行うことを例とする簡単な概略図を図示する。フリップチップはパッド層４０２と表面誘電層４０４とを備えた多層基板を表面(はんだマスク層４０１を備えた面)が上側に向うようにしてパッケージブロックに固定放置する(未図示)。その後、チップ４１０の表面を下側に向けて、図面に示すようにバンプ４２０等をパッド層４０２等の位置に合わせた後、熱圧方式で結合(Bonding)すると、フリップチップを完成することができる。 Referring to FIG. 5, a simple schematic diagram illustrating an example of performing a flip chip process using a flat substrate having a flat surface according to the present invention is shown. In the flip chip, the multilayer substrate including the pad layer 402 and the surface dielectric layer 404 is fixedly left on the package block (the surface including the solder mask layer 401) facing upward (not shown). Thereafter, with the surface of the chip 410 facing downward, as shown in the drawing, the bump 420 and the like are aligned with the position of the pad layer 402 and the like, and then bonded by hot-pressure method, the flip chip can be completed. it can.

本発明の長所は、表面の平坦度がよいキャリア４００を利用して多層基板を製造するため、図２に示す従来の技術によって製造する多層基板に比べ、平坦度の高い表面を備え、フリップチップ又は他の型式の高密度で多接点なパッケージ、例えば、ボール・グリッド・アレイ(BGA)パッケージ、ランド・グリッド・アレイ(LGA)及びウェハレベルパッケージ(CSP)においては、集積回路の集積度の向上に従って、バンプ４２０のピッチ(bump pitch)が必然的に縮小するため、バンプ４２０の高さ(bump height)もこれに伴って縮小する必要がある。本発明の多層基板を使用すれば、バンプ高さ(bump height)がさらに小さいバンプ４２０を使用することができ、同時に本発明の多層基板の平坦性のために、パッケージの時の多層基板の表面と素子又はチップ４１０表面との間の平行距離の一致を確保することができ、パッケージプロセスの時、バンプ４２０などがあらゆるパッド層４０２と素子又はチップ表面の電極(接点)４１２とを旨く接続することを確保して、パッケージの信頼度を向上し、更に全体パッケージの密度を一層向上することができる。 The advantage of the present invention is that the multi-layer substrate is manufactured using the carrier 400 having a good surface flatness, and therefore, the flip-chip has a surface having a higher flatness than the multi-layer substrate manufactured by the conventional technique shown in FIG. Or other types of high-density, multi-contact packages, such as ball grid array (BGA) packages, land grid arrays (LGA), and wafer level packages (CSP), increasing the degree of integration of integrated circuits Accordingly, since the bump pitch of the bump 420 is inevitably reduced, the bump height of the bump 420 needs to be reduced accordingly. If the multilayer substrate of the present invention is used, bumps 420 having a smaller bump height can be used, and at the same time, due to the flatness of the multilayer substrate of the present invention, the surface of the multilayer substrate at the time of packaging. And a parallel distance between the surface of the device or the chip 410 can be ensured, and the bump 420 or the like can connect any pad layer 402 and the electrode (contact) 412 on the surface of the device or the chip. This can ensure the reliability of the package and further improve the density of the entire package.

１０２、１０２-１、１０２-２、１０２-３、３０２、４０２： パッド層
１０４、３０４： 表面誘電層
１０６、３０６、４０１： はんだマスク層
１０３： 誘電層
１０７-１、１０７-２、１０８、１０８-１、１０８-２、１０８-３： 金属ライン層
１１０、４１０： チップ
１２０-１、１２０-２、１２０-３： 金属バンプ
１１２-１、１１２-２、１１２-３： 接点
４００： キャリア
４０４： 表面誘電層
３０８： 金属ライン層
４２０： バンプ
４１２： 電極 102, 102-1, 102-2, 102-3, 302, 402: Pad layer 104, 304: Surface dielectric layer 106, 306, 401: Solder mask layer 103: Dielectric layer 107-1, 107-2, 108, 108-1, 108-2, 108-3: Metal line layer 110, 410: Chip 120-1, 120-2, 120-3: Metal bump 112-1, 112-2, 112-3: Contact 400: Carrier 404: Surface dielectric layer 308: Metal line layer 420: Bump 412: Electrode

Claims (8)

多層基板の製造方法であって、
平坦なキャリアの表面に少なくとも一つのパッド層を形成するステップと、
前記パッド層を覆う表面誘電層を形成して、前記パッド層が前記表面誘電層に埋め込まれるようにして、前記多層基板を形成するステップと、
前記多層基板を前記キャリアの表面から分離するステップとを含むことを特徴とする多層基板の製造方法。 A method of manufacturing a multilayer substrate,
Forming at least one pad layer on a flat carrier surface;
Forming a surface dielectric layer covering the pad layer, and forming the multilayer substrate such that the pad layer is embedded in the surface dielectric layer;
Separating the multilayer substrate from the surface of the carrier. 前記パッド層を覆う表面誘電層を形成するステップは、前記パッド層の側面と前記表面誘電層とを密接に接合することを特徴とする請求項１に記載の方法。 The method of claim 1, wherein forming a surface dielectric layer covering the pad layer closely bonds a side surface of the pad layer and the surface dielectric layer. 前記パッド層を覆う前記表面誘電層を形成するステップは、前記キャリアの表面に接触する前記パッド層の表面と前記表面誘電層の表面とが一つの共通面を備えるようにすることを特徴とする請求項１に記載の方法。 The step of forming the surface dielectric layer covering the pad layer is characterized in that the surface of the pad layer contacting the surface of the carrier and the surface of the surface dielectric layer have a common surface. The method of claim 1. 前記パッド層を形成するステップの前に、前記キャリアの表面にはんだマスク層を形成するステップをさらに含んで、前記多層基板が前記はんだマスク層をさらに含むことを特徴とする請求項１に記載の方法。 The method according to claim 1, further comprising forming a solder mask layer on a surface of the carrier before forming the pad layer, wherein the multilayer substrate further includes the solder mask layer. Method. 前記多層基板を前記キャリアの表面から分離するステップは、前記はんだマスク層を前記キャリアの表面から分離することを特徴とする請求項４に記載の方法。 The method of claim 4, wherein separating the multilayer substrate from the surface of the carrier separates the solder mask layer from the surface of the carrier. 前記はんだマスク層を前記キャリアの表面から分離するステップの後に、前記パッド層の位置で前記はんだマスク層を開孔するステップをさらに含むことを特徴とする請求項５に記載の方法。 6. The method of claim 5, further comprising the step of opening the solder mask layer at the pad layer after the step of separating the solder mask layer from the surface of the carrier. 前記多層基板を前記基板の表面から分離するステップの後に、前記多層基板の表面にはんだマスク層を形成するステップをさらに含むことを特徴とする請求項１に記載の方法。 The method of claim 1, further comprising forming a solder mask layer on a surface of the multilayer substrate after separating the multilayer substrate from the surface of the substrate. 前記多層基板を前記基板の表面から分離するステップの後に、前記多層基板の前記パッド層と素子の表面の接点に対してパッケージするステップをさらに含むことを特徴とする請求項１に記載の方法。 The method of claim 1, further comprising the step of packaging the contact between the pad layer of the multilayer substrate and the surface of the device after the step of separating the multilayer substrate from the surface of the substrate.
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