JP2013059907A - Inkjet head, inkjet recording device, and method for manufacturing inkjet head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inkjet head that maintains head strength, and prevents the upsizing of a head and a cost increase, while preventing the deterioration of a wiring member.SOLUTION: The inkjet head includes: a first plate-like member 10; a second plate-like member 20 having a main surface, which is smaller than a main surface 11 of the first plate-like member 10, and laminated on a first region 15 of the first plate-like member 10; the wiring member 50 supplying a driving power supply for an electric mechanical transducer element 27; a connection terminal 29 formed in an edge 24 located the inner side from an edge 14 of the first plate-like member 10 in an edge of the second plate-like member 20, and electrically connected to the wiring member 50; a first joint surface 42 jointed with a third plate-like member 30 laminated above the first plate-like member 10; and a frame member 40 having a second joint surface jointed with a second region 16 where the second plate-like member 20 is laminated in the first plate-like member 10.

Description

  The present invention relates to an inkjet head, an inkjet recording apparatus, and an inkjet head manufacturing method.

  Conventionally, by laminating a number of plate-like members having approximately the same size, a nozzle, a pressure chamber, an ink supply path, etc. are constructed, and a wiring member electrically connected to the actuator is similarly laminated, and the wiring is drawn out from the side. An ink jet head is known (see, for example, Patent Document 1).

  Furthermore, in recent years, inkjet heads using thin electromechanical transducers created by printing, film formation, etc., and electromechanical transducer drive circuits have been mounted on plate-like members that make up the head. An inkjet head is known (for example, see Patent Document 2).

  By the way, since an ink jet printer discharges many fine ink droplets, many mists of ink are easily generated. Further, in an ink jet printer, mist drifts around, so that it may adhere to the wiring member, or ink may scatter and adhere to the wiring member during ink jet maintenance. At that time, if a material that transmits moisture such as polyimide, which is generally used, is used as the wiring member, or if the ink contains a chemical, there is a problem that the wiring member is deteriorated.

  In order to prevent such a problem, in order to prevent ink from adhering to the wiring member, a method is known in which the wiring member is drawn into the frame of the inkjet head and the wiring member is covered. However, there is a problem that the size of the plate-like member constituting the head is increased by the amount of adhesion with the frame, leading to an increase in cost. In order to reduce the size of the inkjet head, Japanese Patent Application Laid-Open No. H10-228959 discloses a method of reducing the size of the upper half of the stacked plate-like members and reducing the size of the lower half of the plate-like member. A configuration for joining with a frame is disclosed.

  However, as disclosed in Patent Document 3, if the number of plate members having large dimensions is reduced or the plate members are thinned, the head cannot be firmly supported by the frame. For this reason, the strength and rigidity of the ink-jet head are insufficient, and there is a problem that the print quality is deteriorated and the life of the head is shortened.

  Further, as described above, in the inkjet head in which the drive circuit of the electromechanical conversion element is mounted on the plate-like member, wiring cannot be three-dimensionally performed on the plate-like member. A location where the wiring member is drawn out to the circuit must be provided at the edge of the plate-like member. For this reason, in order to cover the wiring member with the frame, it is necessary to provide an extra portion for joining with the frame on the outer side of the end portion of the plate-like member. Therefore, there is a problem that the head is enlarged and the cost is increased.

  The present invention has been made in view of the above, and an ink jet head, an ink jet recording apparatus, and an ink jet head capable of preventing the deterioration of the wiring member, maintaining the head strength, and preventing the increase in size and cost of the head. An object is to provide a manufacturing method.

  In order to solve the above-described problems and achieve the object, the present invention provides an inkjet head that ejects ink droplets from a plurality of nozzle holes, the first plate-like member having an ink flow path formed thereon, A flow path is formed, has a main surface with a smaller area than the area of the main surface of the first plate-like member, and is stacked in a first region that is a part of the main surface of the first plate-like member. An electromechanical conversion element that is provided corresponding to each of a plurality of liquid chambers communicating with the second plate member and the plurality of nozzle holes, and that drives the electromechanical conversion element to discharge ink droplets from the nozzle holes; A wiring member that supplies power, and a connection that is formed on an edge located inside the edge of the first plate member among the edges of the second plate member and is electrically connected to the wiring member A terminal and a third plate-like member laminated above the first plate-like member A first bonding surface bonded to an upper surface, which is a main surface located above in the stacking direction, and a second region where the second plate-shaped member is not stacked among the main surfaces of the first plate-shaped member. And a frame member that covers and protects the first plate member, the second plate member, the third plate member, and the wiring member. .

  The present invention is also an inkjet recording apparatus, an inkjet head that ejects ink droplets from a plurality of nozzle holes, wherein a first plate-like member having an ink flow path formed therein and the flow path formed therein. The second plate-shaped member having a main surface with a smaller area than the area of the main surface of the first plate-shaped member and stacked in a first region that is a part of the main surface of the first plate-shaped member And an electromechanical conversion element that is provided corresponding to each of the plurality of liquid chambers that communicate with each of the plurality of nozzle holes, and that discharges ink droplets from the nozzle holes, and wiring that supplies driving power to the electromechanical conversion elements A connection terminal that is formed on an edge located on the inner side of the edge of the first plate-like member and electrically connected to the wiring member, among the edges of the member and the second plate-like member; The product of the third plate-like members stacked above the one plate-like member A first joint surface joined to an upper surface, which is a main surface located upward in the direction, and a second region joined to the second region of the principal surfaces of the first plate member where the second plate member is not stacked. And an ink jet head having a frame member that covers and protects the first plate member, the second plate member, the third plate member, and the wiring member. Features.

  In addition, the present invention is a plurality of plate-like members including a plate-like member in which a plurality of nozzle holes for discharging ink droplets are formed, and includes a plurality of laminated plate-like members, each of the plurality of nozzle holes. A plurality of liquid chambers that communicate with each other, an electromechanical conversion element that is provided corresponding to each of the liquid chambers and that ejects ink droplets from the nozzle holes, and a wiring member that supplies driving power to the electromechanical conversion element An ink-jet head manufacturing method for manufacturing an ink-jet head, comprising: a first region that is a part of an upper surface that is a main surface located above in a stacking direction of a first plate-like member in which an ink flow path is formed; The second plate-like member having a connection terminal electrically connected to the wiring member at the edge, the main surface having a smaller area than the area of the main surface of the first plate-like member The second plate-like member is connected to the connection The second plate-like member is laminated among the upper surfaces of the first plate-like member when the edge portion on which the child is formed is laminated so as to be located inside the edge portion of the first plate-like member. Bending for positioning the second region that is not present and the upper surface, which is the main surface located above in the stacking direction, of the third plate member stacked above the first plate member on the same plane Forming the portion on the first plate-like member, and joining the upper surface of the third plate-like member and the joining surface of the frame member simultaneously with joining the second region and the joining surface of the frame member By doing so, it has a joining process which covers and protects the 1st plate member, the 2nd plate member, the 3rd plate member, and the wiring member.

  According to the present invention, the second plate member having the relatively small principal surface is laminated on the first plate member having the relatively large principal surface, and more than the end of the first plate member. Wiring is provided by covering the wiring member and the connecting terminal by arranging the connecting terminal at the end arranged on the inner side and bonding the frame member to the first plate-like member and the third plate-like member laminated on the uppermost layer. While preventing the deterioration of the member, the strength of the head can be maintained, and the head can be increased in size and cost can be prevented.

FIG. 1 is an exploded perspective view showing the configuration of the inkjet head 1 according to the first embodiment. FIG. 2 is a diagram showing a part of a cross section of the inkjet head 1 cut along the line IV-IV in FIG. It is a figure which shows a part of cross section of the inkjet head 1 cut | disconnected by the VV line | wire in FIG. FIG. 4 is a cross-sectional view of the inkjet head 2 according to the second embodiment. FIG. 5 is a cross-sectional view of the inkjet head 3 according to the third embodiment. FIG. 6 is a cross-sectional view of the inkjet head 4 according to the fourth embodiment. FIGS. 7-1 is a figure for demonstrating the bending part formation process concerning 4th Embodiment. FIGS. FIG. 7-2 is a diagram for explaining the stacking process. 7-3 is a figure for demonstrating a joining process. FIGS. 8-1 is a figure for demonstrating the bending part formation process and lamination | stacking process concerning 5th Embodiment. FIGS. 8-2 is a figure for demonstrating the joining process concerning 5th Embodiment. FIG. 9 is a perspective view of an image recording apparatus 100 according to the sixth embodiment.

  Exemplary embodiments of an inkjet head, an inkjet recording apparatus, and an inkjet head manufacturing method according to the present invention are explained in detail below with reference to the accompanying drawings.

(First embodiment)
FIG. 1 is an exploded perspective view showing the configuration of the inkjet head 1 according to the first embodiment. FIG. 2 is a diagram showing a part of a cross section of the inkjet head 1 cut along the line IV-IV in FIG. FIG. 3 is a view showing a part of a cross section of the inkjet head 1 cut along the line V-V in FIG.

  As shown in FIG. 1, the inkjet head 1 includes a plurality of plate-like members 10 to 30, a frame member 40, and a wiring member 50. The plate-like member 10, the plate-like member 20, and the plate-like member 30 are laminated in this order to form a laminated structure. Here, the plate-shaped member 10 functions as a first plate-shaped member, the plate-shaped members 20 and 30 function as a second plate-shaped member, and the plate-shaped member 30 is a third plate stacked on the top. It functions as a member. That is, in the inkjet head 1 in the present embodiment, the plate member 30 as the second plate member also functions as the third plate member. In the embodiment, for convenience of explanation, the stacking direction A, that is, the direction from the plate member 10 toward the frame member 40 is defined as the upward direction.

  The plate-like member 10 has a plurality of nozzle holes 17 that eject ink droplets. The plate-like member 20 has a plurality of individual ink supply ports 25. As shown in FIG. 2, a plurality of individual liquid chambers 26 are formed on the lower main surface 22 of the plate-like member 20 so as to correspond to the plurality of individual ink supply ports 25, respectively. Each individual liquid chamber 26 communicates with the nozzle hole 17. The plate-like member 30 has a common ink flow path 35. The common ink channel 35 supplies ink to the individual ink supply port 25.

  As shown in FIG. 1, the frame member 40 is provided with an ink supply port 44 that supplies ink from an ink tank (not shown) to the common ink flow path 35 in the thickness direction of the frame member 40. The frame member 40 is joined directly or indirectly to the stacked plate-like members 10 to 30 on the first joining surface 42 and the second joining surface 43. As a result, an ink channel that reaches the nozzle hole 17 from the ink tank via the ink supply port 44, the common ink channel 35, and the individual ink supply port 25 is formed. That is, an ink flow path is formed in the plate-like members 10 to 30. Moreover, the frame member 40 covers and protects the plate-like members 10 to 30 and a wiring member described later by being joined to the plate-like members 10 to 30.

  The plate-like member 20 is made of silicon. Furthermore, the structure such as the individual liquid chamber 26 is processed and formed by applying a method such as dry etching or anisotropic wet etching to the plate member 20. Thereby, a highly accurate process can be performed.

  The plate-like member 20 is provided with an electromechanical conversion element 27, a driver IC 28, and a connection terminal 29. The electromechanical conversion element 27 is composed of a thin piezoelectric body or resistor that is difficult to wire in three dimensions. The electromechanical conversion element 27 is formed by a method such as printing, coating, film formation, or pasting. The drive voltage output of the driver IC 28 is connected to the electromechanical conversion element 27.

  In addition to the I / O of the driver IC 28, wiring drawn from the drive power input or the like is connected to the connection terminal 29. The connection terminal 29 is disposed in a plane on the edge 24 that forms a predetermined side of the plate-like member 20. The connection terminal 29 is connected to the wiring member 50. The wiring member 50 is, for example, FPC (Flexible Printed Circuit) or FFC (Flexible Flat Cable). The driver IC 28 is connected to a host controller (not shown) via the connection terminal 29 and the wiring member 50. The driver IC 28 selects the electromechanical transducer 27 to be driven according to the print data sent from the host controller.

  The frame member 40 further has an outlet 45 for pulling out the wiring member 50 to the outside. In the wiring member 50, a part of the region including the edge 51 is included in the frame member 40, and the edge 52 is drawn out of the inkjet head 1 from the outlet 45. Here, the edge 51 is an edge connected to the connection terminal 29, and the edge 52 is an edge facing the edge 51.

  In the above configuration, driving power is supplied from the wiring member 50 to the driver IC 28. The driver IC 28 applies a drive voltage to the selected electromechanical conversion element 27. As a result, the selected electromechanical conversion element 27 is driven, and a pressure change in the individual liquid chamber 26 corresponding to the driven electromechanical conversion element 27 is generated, whereby an ink droplet is ejected from the corresponding nozzle hole 17.

  As shown in FIGS. 1 and 3, the area of the main surface 21 of the plate-like member 20 is smaller than the area of the main surface 11 of the plate-like member 10. More specifically, the plate-like member 20 is formed such that the length of the edge 23 that forms a side substantially perpendicular to the edge 24 is shorter than the length of the corresponding edge 13 of the plate-like member 10. Has been. In the laminated structure, the edge portion 24 of the plate-like member 20 where the connection terminal 29 is formed is arranged inside the corresponding edge portion 14 of the plate-like member 10. That is, the outer dimension of the plate-like member 20 where the wiring member 50 is drawn out is smaller than the outer dimension of the corresponding part of the plate-like member 10.

  As described above, the plate-like member 20 has the area of the main surface 21 smaller than the area of the main surface 11 of the plate-like member 10, and the length of the edge 23 is the length of the edge 13 of the plate-like member 10. Shorter than that. For this reason, the plate-like member 20 is not laminated on the entire main surface 11 of the plate-like member 10, but only on the first region 15 that is a part thereof. That is, in the state where the plate-like member 20 is laminated on the plate-like member 10, the second region which is a region where the plate-like member is not laminated on the outer side of the edge portion 24 where the connection terminal 29 is formed. 16 exists. Here, the first region 15 of the plate-like member 10 is a region where the nozzle holes 17 are formed, and the second region 16 is a region where the nozzle holes 17 are not formed.

  The plate-like member 30 is the same as the plate-like member 20. That is, the area of the main surface 31 of the plate-like member 30 is smaller than the main surface 11 of the plate-like member 10, and the length of the edge 33 substantially parallel to the edge 13 of the plate-like member 10 is the length of the edge 13. It is formed to be shorter than that. In the laminated structure, the edge portion 34 of the plate-like member 30 is disposed inside the corresponding edge portion 14 of the plate-like member 10. Here, the edge 34 forms a side substantially perpendicular to the edge 33. In addition, in the plate-shaped member 30 concerning this Embodiment, the length of the edge part 33 is formed so that it may become still shorter than the edge part 23 of the plate-shaped member 20. FIG.

  A first joint surface 42 and a second joint surface 43 are formed below the frame member 40. Both the first joint surface 42 and the second joint surface 43 are formed in a planar shape. In this way, by forming the first bonding surface 42 and the second bonding surface 43 into a flat shape, the first bonding surface 42 and the second bonding surface 43 can be easily formed. The first joint surface 42 and the second joint surface 43 are not formed on the same plane, and the length in the stacking direction A from the main surface 41 on the frame member 40 to the first joint surface 42, that is, the first joint surface. The height of 42 is shorter than the length in the stacking direction A from the main surface 41 to the second bonding surface 43, that is, the height of the second bonding surface 43. Here, the difference in height between the first bonding surface 42 and the second bonding surface 43 is the stacking direction of the main surface 11 of the plate-like member 10 and the main surface 31 above the plate-like member 30 forming the uppermost layer. Equal to the height difference in A.

  With the above configuration, the second joining surface 43 of the frame member 40 is joined to the second region 16 of the plate-like member 10, and the first joining surface 42 of the frame member 40 is a plate-shaped plate that is the uppermost layer in the laminated structure. It can be joined to the main surface 32 above the member 30.

  As described above, since the frame member 40 includes at least a part of the wiring member 50, it is possible to prevent the ink mist from adhering to the wiring member 50 and the electrical joint portion of the wiring member 50. Further, in a part of the laminated structure of the plurality of plate-like members 10 to 30, the area of the main surfaces 21 and 32 of the plate-like members 20 and 30 laminated on the plate-like member 10 is at least the second of the frame member 40. The plate-like members 20 and 30 are formed so as to be reduced by the area of the joint surface 43, and the plate-like members are formed such that the edge portion 24 and the edge portion 34 on which the connection terminals 29 are formed are located inside the edge portion 14. 20 and 30 are laminated, and the frame member 40 is arranged in the space generated by this, so that the inkjet head 1 can be compared with the case where the frame member 40 is arranged outside the edge portion 14 of the plate-like member 10. Miniaturization can be achieved and cost increase can be prevented.

  Further, the frame member 40 is joined to the plate-like member 10 at the second joining surface 43 and also joined to the plate-like member 30 of the uppermost layer at the first joining surface 42. That is, the frame member 40 can be joined to a region where a plurality of layers are laminated. Therefore, the laminated structure of the plate-like members 10 to 30 can be firmly supported by the frame member 40, and the strength and rigidity of the inkjet head 1 can be sufficiently ensured. That is, the highly reliable inkjet head 1 can be provided.

  The first joint surface 42 of the frame member 40 is formed so that the area and shape thereof are substantially the same as the area and shape of the main surface 21 of the second plate-like member 20, and the first joint surface 42 is plate-shaped. Not only the main surface 32 of the member 30 but also the upper part of the connection terminal 29 is covered. The gap between the upper part of the wiring member 50 and the first bonding surface 42 is sealed with an adhesive 46. Thus, by covering the upper part of the connection terminal 29 with the frame member 40, the joint between the connection terminal 29 and the wiring member 50 can be reinforced.

  The plate-like member 20 is made of silicon. Since the plate-like member formed of silicon is cut out from a silicon wafer having a predetermined size, the plate-like member from one silicon wafer is formed by making the area of the plate-like member 20 smaller than that of the plate-like member 10. The number of members 20 can be increased. Therefore, significant cost reduction can be achieved.

  The number of first plate-like members and second plate-like members is not limited to the embodiment. For example, as a first modification, the inkjet head 1 may include two or more first plate-like members stacked. The inkjet head 1 may include three or more second plate members that are stacked. In this case, the second plate-like member laminated at the top of the plurality of second plate-like members also functions as the third plate-like member laminated at the highest level in the laminated structure. Moreover, the inkjet head 1 is good also as providing one 2nd plate-shaped member. In this case, the second plate-like member also functions as a third plate-like member laminated on the top in the laminated structure.

  The plate-like member 20 according to the first embodiment is formed such that the entire side as the edge 24 where the connection terminal 29 is formed is located inside the edge 14 of the corresponding plate-like member 10. However, only the portion of the edge portion 24 where the connection terminal 29 is formed needs to be disposed inside the edge portion 14 of the plate-like member 10, and the shape and outer dimensions of the edge portion 24 are the same as those of the embodiment. The form is not limited. For example, as a second modification, a recess may be formed in the edge 24, and the connection terminal 29 may be formed in this recess. In this case, only the concave portion of the edge portion 24 is disposed inside the edge portion 14 of the plate-like member 10, and the other portion of the edge portion 24 is disposed on the edge portion 14.

  Furthermore, as a third modification, the shape of the plate-shaped members 10 to 30 is not limited to a substantially rectangular shape, and may be other shapes such as a trapezoidal shape or a circular shape. The edge part in which the connection terminal 29 was formed among the edge parts of the plate-shaped member 20 should just be arrange | positioned inside the edge part of the plate-shaped member 10, and the shape of the plate-shaped members 10-30 is embodiment. It is not limited to.

  Thus, the outer dimension of the plate-like member 20 is reduced in the portion where the wiring member 50 is drawn out, and the frame member 40 and the plate-like member 10 having a large area may be joined in the region where the dimensional difference has occurred. Strength and rigidity can be secured while realizing miniaturization of the inkjet head 1.

  It is preferable to connect the wiring member to a connection terminal arranged in a plane with respect to the plate-like member. Instead, as a third modification, a connection arranged three-dimensionally to the plate-like member. It is good also as connecting to a terminal. Further, the connection between the driver IC 28 and the electromechanical conversion element 27 may be a three-dimensional wiring by wire bonding. As another example, as in the configuration disclosed in Japanese Patent Application Laid-Open No. 2009-056662, the driver IC 28 May not be mounted on the plate-like member, and may be configured to be wired directly from the wiring member to the electromechanical conversion element.

(Second Embodiment)
FIG. 4 is a cross-sectional view of the inkjet head 2 according to the second embodiment. FIG. 4 shows a part of a cross section of the inkjet head 2 cut along a line corresponding to the line VV shown in FIG. The inkjet head 2 according to the second embodiment further includes a plate member 60 in addition to the plate members 10 to 30. The plate member 60 functions as a first plate member. That is, the inkjet head 2 according to the present embodiment includes a two-layer first plate member and a two-layer second plate member.

  The plate member 60 is laminated on the main surface 11 of the plate member 10. The plate member 20 is laminated on the main surface 61 of the plate member 60. The area and shape of the main surface 61 of the plate-like member 60 are the same as the area and shape of the main surface 11 of the plate-like member 10.

  According to the inkjet head 2 according to the second embodiment, when the shape of the ink flow path is complicated, the plate member having a large area as the first plate member is insufficient with only the plate member 10. However, by adding the plate-like member 60 as the first plate-like member, the plate-like member 60 is laminated on the second region 16 of the plate-like member 10 and the strength is increased, so that the reliability is higher. An ink jet head 2 can be provided.

  The remaining configuration of the inkjet head 2 according to the second embodiment is the same as the configuration of the inkjet head 1 according to the first embodiment.

(Third embodiment)
FIG. 5 is a cross-sectional view of the inkjet head 3 according to the third embodiment. FIG. 5 shows a part of a cross section of the inkjet head 3 cut along a line corresponding to the line VV shown in FIG. The plate-like member 10 of the ink jet head 3 according to the third embodiment has an area of the main surface 11 compared to the area of the main surface 11 of the plate-like member 10 of the ink jet head 2 according to the second embodiment. The edge portion 14 is stacked so that the edge portion 14 is located on the inner side of the edge portion 64 of the plate-like member 60 and is smaller by at least the second region 16.

  From the viewpoint of preventing ink from entering the inside of the frame member 40, the strength of the region where the nozzle hole 17 is formed is required, but the strength of other regions is not so required. Therefore, as shown in FIG. 5, in the third embodiment, the main part of the plate-like member 10 is arranged such that the edge 14 of the plate-like member 10 is located inside the edge 64 of the plate-like member 60. The length of the edge 13 of the surface 11 is made shorter than the edge 13 according to the second embodiment shown in FIG. 4, and the area of the main surface 11 is reduced. Thereby, cost can be reduced compared with the inkjet head 2 concerning 2nd Embodiment.

  The remaining configuration of the inkjet head 3 according to the third embodiment is the same as the configuration of the inkjet head 2 according to the second embodiment.

  In the plate-like member 10 according to the third embodiment, the area of the main surface 11 is smaller than the area of the main surface 21 of the plate-like member 20, and the edge portion 14 is larger than the edge portion 24 of the plate-like member 20. Although laminated so as to be located inside, the relationship between the size of the plate-like member 10 and the plate-like member 20 is not limited to this. In other words, the plate-like member 10 only needs to have a region where the nozzle holes 17 are formed and be smaller than the plate-like member 60. As a first modification, for example, the plate-like member 10 may be larger than the plate-like member 20, and the edge portion 14 may be located outside the edge portion 24 of the plate-like member 20.

(Fourth embodiment)
FIG. 6 is a cross-sectional view of the inkjet head 4 according to the fourth embodiment. FIG. 6 shows a part of a cross section of the inkjet head 4 cut along a line corresponding to the line VV shown in FIG.

  In the frame member 40 of the inkjet head 4 according to the fourth embodiment, the first joint surface 42 and the second joint surface 43 are formed so as to be located on the same plane. Further, the plate-like member 10 includes a bent portion 60 in the second region 15. Due to the bent portion 60, a step is generated in the plate-shaped member 10, and the plate-shaped member 30 bonded to the first bonding surface 42 and the bonding region 18 bonded to the second bonding surface 43 in the main surface 11 of the plate-shaped member 10. The main surfaces 31 are located on the same plane. With the above configuration, the frame member 40 and the plate-like members 10 to 30 are joined on the same plane.

  7A to 7C are diagrams for explaining a method of manufacturing the inkjet head 4. 7A to 7C illustrate a part of a cross section of the inkjet head 4 cut along a line corresponding to the VV line illustrated in FIG.

  First, in the bending part forming step shown in FIG. 7A, the bending part 60 is formed on the plate-like member 10. At this time, when the plate-like members 20 and 30 are stacked on the plate-like member 10, the bent portion is arranged so that the joining region 18 of the plate-like member 10 and the main surface 31 of the plate-like member 30 are located on the same plane. 60 is formed.

  The bending part 60 is formed by press work. Thereby, the bending part 60 can be formed cheaply. As another example, as described above, of the main surface 11 of the plate-shaped member 10, the bonding region 18 bonded to the second bonding surface 43, and the main of the plate-shaped member 30 bonded to the first bonding surface 42. The bent portion 60 may be formed by nickel electroforming using an electrode provided with a prototype of the bent portion such that the surface 31 is located on the same plane. Thus, by forming by electrocasting, the bending part 60 can be formed at low cost and with high accuracy.

  Next, in the laminating process shown in FIG. 7B, the plate-like members 20 and 30 are laminated on the first region 15 in the main surface 11 of the plate-like member 10 on which the bent portion 60 is formed. Next, in the joining step shown in FIG. 7C, the frame member 40 including the first joining surface 42 and the second joining surface 43 formed on the same plane is replaced with the main surface 31 of the plate-like member 30 and the plate-like member, respectively. It joins with the 2nd field 16 of 10 principal surfaces 11.

  Thus, the frame member 40 is formed by forming the first joint surface 42 and the second joint surface 43 of the frame member 40 on the same plane and joining the frame member 40 and the plate-like members 10 to 30 on the same plane. The joint surfaces can be lapped together, and lapping can be facilitated. Further, the surface of the frame member 40 can be facilitated.

  The remaining configuration of the inkjet 4 according to the fourth embodiment is the same as that of the inkjet according to the other embodiments.

  When two or more first plate-like members stacked like the inkjet 2 according to the second embodiment shown in FIG. 4 are provided, the plate-like shape that joins the frame member among the first plate-like members. A bent portion may be formed in each of the two or more first plate-like members so that the upper main surface of the member and the upper main surface of the uppermost plate-like member are located on the same plane.

(Fifth embodiment)
Next, an inkjet head 4 according to a fifth embodiment will be described. The inkjet head 4 according to the fifth embodiment is different from the inkjet head 4 according to the fourth embodiment in the manufacturing method. The structure of the inkjet head 4 according to the fifth embodiment is the same as the structure of the inkjet head 4 according to the fourth embodiment.

  FIGS. 8-1 and FIGS. 8-2 are figures for demonstrating the manufacturing method of the inkjet head 4 concerning 5th Embodiment. 8A and 8B show a part of a cross section of the inkjet head 4 cut along a line corresponding to the VV line shown in FIG.

  First, the bending part 61 is formed in the plate-shaped member 10 in the bending part formation process shown to FIGS. At this time, when the plate-like members 20 and 30 are stacked on the plate-like member 10, the second region 18 of the plate-like member 10 is positioned above the main surface 31 above the plate-like member 30. A bent portion 61 is formed. By forming the bent portion 60 in this way, the second region 18 has elasticity in the vertical direction.

  Next, in the joining step shown in FIG. 8B, when the frame member 40 is joined to the plate-like members 10 to 30, the second joining surface 43 of the frame member 40 is pressed down on the joining region 18, thereby The second joint surface 43 and the joint region 18 are joined while absorbing the elasticity of the region 18.

  Thereby, even when the processing accuracy of the bent portion 60 of the plate-like member 10 is low or the processing accuracy of the first joint surface 42 and the second joint surface 43 of the frame member 40 is low, the frame member 40 and the plate The shaped members 10 to 30 can be reliably bonded. Thereby, cost reduction can be achieved.

(Sixth embodiment)
FIG. 9 is a perspective view of an image recording apparatus 100 according to the sixth embodiment. The ink jet head according to the first to fifth embodiments can be applied to an image forming apparatus as an ink jet recording apparatus. Hereinafter, the image forming apparatus 100 equipped with the ink jet head according to the first to fifth embodiments will be described.

  A carriage 101 is provided inside the image forming apparatus 100, and is configured to be movable left and right along the column 102. The carriage 101 is connected to a belt 103, and the belt 103 is connected to a motor 104. As the motor 104 rotates, the belt 103 moves left and right, and simultaneously the carriage 101 moves left and right. The carriage 101 is provided with an inkjet head 105. As described above, the inkjet head 105 is the inkjet head described in the first to fifth embodiments, and a large number of nozzles (not shown) are formed in a plurality of rows. The inkjet head 105 moves to the left and right as the carriage 101 moves. Thus, by providing the ink jet head described in the first to fifth embodiments, the image forming apparatus 100 can be reduced in size and cost.

  Further, the image forming apparatus 100 is provided with a platen 107 that supports the medium 106 and a paper feed roller 112. While supporting the medium 106 by the platen 107, the medium 106 is conveyed forward by moving the paper feed roller 112 by the motor 109.

  In accordance with image data sent from a control device (not shown), droplets are ejected from the inkjet head 105 to the medium 106 while moving the carriage 101 to the left, and the medium 106 is moved forward by a desired distance. Then, droplets are ejected from the inkjet head 105 onto the medium 106 while moving the carriage 101 to the right. By repeating the above operations, a desired image can be obtained on the entire surface of the medium 106.

  The carriage 101 stands by on the maintenance device 110 when printing is not performed. Here, the ink is sucked from the ink jet head 105 to recover the nozzles that are no longer ejected, or the ink jet head 105 is capped. Thus, it is possible to seal the nozzle and prevent the ink from drying and not being discharged from the nozzle.

  As described above, since the image forming apparatus 100 according to the present embodiment is equipped with the ink jet head according to the first to fifth embodiments, the cost of the apparatus can be reduced. In addition, the image forming apparatus 100 with high reliability can be provided.

1-4 Inkjet head 10, 20, 30 Plate member 17 Nozzle hole 25 Individual ink supply port 26 Individual liquid chamber 27 Electromechanical conversion element 28 Driver IC
29 Connection terminal 35 Common ink flow path 40 Frame member 50 Wiring member 60 Bending portion

JP 2005-254616 A JP 2006-256029 A JP 2010-094880 A

Claims (10)

An inkjet head that ejects ink droplets from a plurality of nozzle holes,
A first plate-like member having an ink flow path formed thereon;
The flow path is formed, has a main surface with a smaller area than the area of the main surface of the first plate-like member, and is stacked in a first region that is a part of the main surface of the first plate-like member. A second plate member;
An electromechanical conversion element that is provided corresponding to each of a plurality of liquid chambers communicating with each of the plurality of nozzle holes, and that ejects ink droplets from the nozzle holes;
A wiring member for supplying driving power for the electromechanical transducer;
Of the edges of the second plate-like member, a connection terminal that is formed on an edge located inside the edge of the first plate-like member and is electrically connected to the wiring member;
A first bonding surface that is bonded to an upper surface, which is a main surface positioned above in the stacking direction, of the third plate member that is stacked above the first plate member, and the main plate of the first plate member. A second joining surface joined to a second region of the surface where the second plate-like member is not laminated, and the first plate-like member, the second plate-like member, the third plate-like member, and An ink jet head comprising: a frame member that covers and protects the wiring member. The second plate member is the third plate member,
2. The inkjet head according to claim 1, wherein the first joint surface of the frame member is connected to the upper surface of the second plate member as the third plate member. The first joint surface and the second joint surface of the frame member are formed to be located on the same plane,
The inkjet according to claim 1 or 2, wherein the first plate-like member has a bent portion for positioning the first region and the upper surface of the third plate-like member on the same plane. head.   The inkjet head according to claim 1, wherein the second plate-shaped member is a silicon substrate.   The inkjet head according to any one of claims 1 to 4, wherein the first joint surface and the second joint surface are formed in a flat shape.   An ink jet recording apparatus comprising the ink jet head according to claim 1. A plurality of plate-like members including a plate-like member in which a plurality of nozzle holes for discharging ink droplets are formed, the plurality of liquids comprising a plurality of stacked plate-like members and communicating with each of the plurality of nozzle holes An inkjet head comprising a chamber, an electromechanical conversion element provided corresponding to each of the liquid chambers, for discharging ink droplets from the nozzle holes, and a wiring member for supplying driving power to the electromechanical conversion element An inkjet head manufacturing method comprising:
A connection terminal that is electrically connected to the wiring member at an edge portion in a first region that is a part of an upper surface that is a main surface located above in the stacking direction of the first plate-like member in which the ink flow path is formed. The second plate member having a main surface whose area is smaller than the area of the main surface of the first plate member is the second plate member in which the connection terminal is formed. A second region in which the second plate-like member is not laminated on the upper surface of the first plate-like member when the edge portion is laminated so as to be located inside the edge portion of the first plate-like member; The first plate has a bent portion for positioning the upper surface, which is the main surface located above in the stacking direction, of the third plate member stacked above the first plate member on the same plane. Forming step to form on the member,
By simultaneously joining the upper surface of the third plate-like member and the joining surface of the frame member, the first plate-like member and the second plate are obtained by joining the second region and the joining surface of the frame member. And a joining step of covering and protecting the member, the third plate member, and the wiring member. In the forming step, the bent portion is formed such that at least a part of the second region is positioned above the upper surface of the third plate-like member in the stacking direction,
In the joining step, by pressing the second region of the first plate member with the frame member, the second region and the upper surface of the third plate member are positioned on the same plane. Simultaneously with processing the bent portion, the upper surface of the third plate member and the joint surface of the frame member are joined, and the second region of the first plate member and the joint surface of the frame member are joined. The method of manufacturing an ink jet head according to claim 7, wherein:   The inkjet head manufacturing method according to claim 7, wherein the bent portion is formed by a bending process.   8. The ink jet head manufacturing method according to claim 7, wherein the bent portion is formed by electroforming using an electrode provided with a prototype corresponding to the bent portion.

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