JP2013059750A5 - - Google Patents
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- JP2013059750A5 JP2013059750A5 JP2011201395A JP2011201395A JP2013059750A5 JP 2013059750 A5 JP2013059750 A5 JP 2013059750A5 JP 2011201395 A JP2011201395 A JP 2011201395A JP 2011201395 A JP2011201395 A JP 2011201395A JP 2013059750 A5 JP2013059750 A5 JP 2013059750A5
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- JP
- Japan
- Prior art keywords
- unit
- crystal precipitation
- disposed adjacent
- same construction
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000013078 crystal Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011201395A JP5668988B2 (ja) | 2011-09-15 | 2011-09-15 | 昇華性物質の精製装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011201395A JP5668988B2 (ja) | 2011-09-15 | 2011-09-15 | 昇華性物質の精製装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013059750A JP2013059750A (ja) | 2013-04-04 |
| JP2013059750A5 true JP2013059750A5 (enExample) | 2013-05-16 |
| JP5668988B2 JP5668988B2 (ja) | 2015-02-12 |
Family
ID=48184934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011201395A Active JP5668988B2 (ja) | 2011-09-15 | 2011-09-15 | 昇華性物質の精製装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5668988B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109022052B (zh) * | 2018-08-16 | 2020-11-27 | 江苏永大化工机械有限公司 | 自热式净化炉 |
| KR102252302B1 (ko) * | 2018-11-09 | 2021-05-17 | 주식회사 레이크머티리얼즈 | 고순도 반도체용 승화장치 |
| JP7390703B2 (ja) * | 2019-10-07 | 2023-12-04 | 国立研究開発法人産業技術総合研究所 | 昇華装置及び昇華方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS563855B2 (enExample) * | 1972-09-14 | 1981-01-27 | ||
| JP2003144907A (ja) * | 2001-11-16 | 2003-05-20 | Ishikawajima Harima Heavy Ind Co Ltd | 粒子製造装置及び方法 |
| JP2009106917A (ja) * | 2007-10-29 | 2009-05-21 | Kiriyama Seisakusho:Kk | 昇華性物質の分離・精製装置 |
| JP5275213B2 (ja) * | 2009-12-25 | 2013-08-28 | コスモ石油株式会社 | 分離回収装置及び分離回収方法 |
-
2011
- 2011-09-15 JP JP2011201395A patent/JP5668988B2/ja active Active
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