JP2013032922A - Three-dimensional measurement method - Google Patents
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本発明は、タービンロータ、タービンケーシングの３次元形状を計測し、その計測情報に基づいて設計データを作成したり、据え付け状態を確認したりする際に使用される、３次元寸法測定方法に関する。 The present invention relates to a three-dimensional dimension measuring method used when measuring a three-dimensional shape of a turbine rotor and a turbine casing, creating design data based on the measurement information, and confirming an installation state.
タービンロータやタービンケーシングは経年劣化するため、定期的に取り換え工事が行われる。このような工事を行うに際しては、タービンロータやタービンケーシングの設計図面が必要であるが、既設置のタービンロータやタービンケーシングが他社製の場合、図面がないことから、タービンロータやタービンケーシングを交換するためには、現品にて既設置品の形状測定データを取得し、設計図を起こす必要があった（リバースエンジニアリング、レトロフィット）。 Since the turbine rotor and the turbine casing deteriorate over time, replacement work is regularly performed. When performing such construction, design drawings of the turbine rotor and turbine casing are required. However, if the existing turbine rotor or turbine casing is made by another company, there is no drawing, so the turbine rotor and turbine casing must be replaced. In order to do this, it was necessary to obtain the shape measurement data of the existing product in the actual product and generate a design drawing (reverse engineering, retrofit).
これらの課題に対し、特開２０１０−１６０１３５号公報（特許文献１）において鯉沼らは、タービン発電機におけるステータコイル接続組立の３次元形状を測定するに際して、レーザ非接触式３次元形状測定装置により予め設定された測定範囲におけるステータコイル接続組立の測定部位の３次元形状を測定する第１のステップと、エンコーダが内蔵された関節により複数本のアームを連結してなる多関節接触式３次元形状測定装置により予め設定された測定範囲におけるステータコイル接続組立の測定部位の３次元形状を測定する第２のステップと、前記第１の測定ステップで測定された３次元形状データと前記第２の測定ステップで測定された３次元形状データ及び手計測による局所的な部位の形状測定データを総合的に合成して最終的にステータコイル接続組立の設計図を起こすための方法について述べている。 In response to these problems, Kakinuma et al. In JP 2010-160135 A (Patent Document 1) uses a laser non-contact type three-dimensional shape measuring apparatus when measuring a three-dimensional shape of a stator coil connection assembly in a turbine generator. A first step of measuring a three-dimensional shape of a measurement part of a stator coil connection assembly in a preset measurement range, and a multi-joint contact type three-dimensional shape formed by connecting a plurality of arms by a joint having an encoder built therein A second step of measuring a three-dimensional shape of a measurement part of the stator coil connection assembly in a measurement range set in advance by a measuring device; the three-dimensional shape data measured in the first measurement step; and the second measurement Comprehensive synthesis of 3D shape data measured in steps and local site shape measurement data by hand measurement It describes a method for causing a blueprint for the stator coil connection assembly to.
しかしながら、特許文献１で述べられている技術では、表面形状を容易に高精度に測定するために、多関節接触式３次元形状測定装置を用いているため、一度に測定できる範囲が狭く、多関節接触式３次元形状測定装置の位置を何回も変更する必要があった。 However, in the technique described in Patent Document 1, an articulated contact type three-dimensional shape measuring apparatus is used in order to easily measure the surface shape with high accuracy. It was necessary to change the position of the joint contact type three-dimensional shape measuring apparatus many times.
そこで、本発明の目的は、一回の設置で広範囲を高い精度で算出可能な方法を提供することにある。 Accordingly, an object of the present invention is to provide a method capable of calculating a wide range with high accuracy by a single installation.
上記目的を達成するために、本発明は、主に、平面、円筒、曲面からなる計測対象の寸法を測定する際に、非接触式三次元測定機により全体形状を測定し、全体形状の三次元形状データを生成する第１のステップと、計測対象を平面、円筒、曲面部に分割し、レーザ追尾式非接触測定機とレーザ追尾式接触測定機で測定する第２のステップと、上記第２のステップでレーザ追尾式非接触測定機から得られたデータに基づき曲面部の三次元形状データを生成する第３のステップと、上記第２のステップでレーザ追尾式接触測定機から得られたデータに基づき平面、および、円筒を算出する第４のステップと、手計測により得られた主要部寸法の入力を受け付ける第５のステップと、上記、第１、第３、第４、および、第５のステップで得られたデータを合成する第６のステップと、該第６のステップで得られたデータに基づき設計データを作成する第７のステップと、上記第７のステップで得られた設計データに基づき計測対象同等品を新規に製作するステップを備えたことを特徴とする。 In order to achieve the above object, the present invention mainly measures the overall shape with a non-contact type three-dimensional measuring machine when measuring the dimensions of a measurement object consisting of a plane, a cylinder, and a curved surface. A first step of generating original shape data; a second step of dividing a measurement object into a plane, a cylinder, and a curved surface, and measuring with a laser tracking non-contact measuring machine and a laser tracking contact measuring machine; The third step of generating the three-dimensional shape data of the curved surface portion based on the data obtained from the laser tracking non-contact measuring machine in step 2, and the laser tracking contact measuring machine obtained in the second step. A fourth step for calculating a plane and a cylinder based on the data; a fifth step for receiving input of main part dimensions obtained by manual measurement; and the first, third, fourth, and Obtained in 5 steps A sixth step for synthesizing the data, a seventh step for creating design data based on the data obtained in the sixth step, and an object to be measured based on the design data obtained in the seventh step It is characterized by comprising a step of newly producing a product.
本発明によれば、少ない作業量で、短時間に、高い精度で寸法を求めることが可能となる。 According to the present invention, it is possible to obtain dimensions with high accuracy in a short time with a small amount of work.
本発明は、測定対象の寸法を測定する際に、非接触３Ｄ測定器で全体形状を測定し、また、高い計測精度が求められる部分は、主に平面と円筒形状であることに着目し、測定対象を平面と円筒の集合体に分解し、分解した平面と円筒をレーザ追尾式接触測定機でＮ点計測し、取得されたＮ点の座標データから当てはめにより平面や円筒を求めることで、高い計測精度が求められる主要部分に寸法をもとめ、平面と円筒では表現できない曲面部のうち、高い精度が求められる部位については、レーザ追尾式非接触測定機を用いて計測することで、一回のセッティングで広い範囲を、短時間に計測することを特徴とする。 The present invention measures the overall shape with a non-contact 3D measuring instrument when measuring the dimensions of the measurement object, and pays attention to the fact that the parts that require high measurement accuracy are mainly flat and cylindrical, By disassembling the measurement object into an assembly of a plane and a cylinder, measuring the decomposed plane and cylinder with N points using a laser tracking contact measuring machine, and obtaining the plane and cylinder by fitting from the obtained coordinate data of N points, Measure the dimensions of the main parts that require high measurement accuracy, and measure the parts that require high accuracy among the curved parts that cannot be represented by planes and cylinders by using a laser tracking non-contact measuring machine. It is characterized by measuring a wide range in a short time with this setting.
以下、本発明の実施形態を図１から図３３を用いて説明する。 Hereinafter, embodiments of the present invention will be described with reference to FIGS.
図１に本発明で用いる計測システムの全体構成について示す。先ず、非接触式三次元測定機６により計測対象全体にわたり、計測対象表面に対応した座標情報を得る。非接触式三次元測定機は、図９に示すように、二つのエンコーダ付き回転モータ２７ａ、２７ｂと、レーザ測距システム２８から構成され、図１０に示すように、上記エンコーダで二つの角度φ、θを計測するとともに、上記レーザ測距システムにより計測対象までの距離を測定することで、計測点の座標情報１１を得る。そして、該得られた座標情報に基づき、計測対象全体形状の三次元形状データ１５を生成する。 FIG. 1 shows the overall configuration of a measurement system used in the present invention. First, coordinate information corresponding to the measurement target surface is obtained over the entire measurement target by the non-contact type three-dimensional measuring machine 6. As shown in FIG. 9, the non-contact type coordinate measuring machine is composed of two rotary motors 27a and 27b with encoders and a laser ranging system 28. As shown in FIG. , Θ is measured, and the distance information to the measurement target is measured by the laser ranging system, thereby obtaining coordinate information 11 of the measurement point. Then, based on the obtained coordinate information, three-dimensional shape data 15 of the entire shape to be measured is generated.
次に、計測対象を平面、円筒、曲面部に分割し（ステップ２）、該分割された部位ごとにレーザ追尾式非接触測定機３とレーザ追尾式接触測定機４で測定する。具体的な計測対象としては、図３、図４に示すようなタービンケーシングやタービンロータが挙げられる。タービンケーシングやタービンロータは、簡略化すると、図５、図６に示されるような、平面と円筒の集合体として表すことができる。このとき、レーザ追尾式非接触測定機とレーザ追尾式接触測定機は、図１１、図１２に示すように、各々、レーザトラッカシステム５ａとカメラシステム５ｂで監視されている。上記レーザ追尾式非接触測定機とレーザ追尾式接触測定機は、各々、レトロリフレクタ３２が取り付けられており、上記レーザトラッカシステム５ａにて、該レトロリフレクタまでの距離を測定することで、レーザトラッカシステムの座標系における該レトロリフレクタの座標を計測する。また、上記レーザ追尾式非接触測定機とレーザ追尾式接触測定機は、各々、複数のＬＥＤが取り付けられており、上記カメラシステムにて、該ＬＥＤを撮像する。該ＬＥＤの位置関係は予め定められているため、取得された画像を解析することで、上記レーザ追尾式非接触測定機とレーザ追尾式接触測定機の姿勢を算出する。以上の情報に基づき、レーザ追尾式非接触測定機とレーザ追尾式接触測定機で得られたデータは、レーザトラッカシステムの座標系に変換される。 Next, the measurement object is divided into a plane, a cylinder, and a curved surface (step 2), and measurement is performed by the laser tracking non-contact measuring device 3 and the laser tracking contact measuring device 4 for each of the divided portions. Specific measurement objects include turbine casings and turbine rotors as shown in FIGS. When simplified, the turbine casing and the turbine rotor can be represented as an assembly of a plane and a cylinder as shown in FIGS. At this time, the laser tracking non-contact measuring machine and the laser tracking contact measuring machine are monitored by a laser tracker system 5a and a camera system 5b, respectively, as shown in FIGS. The laser tracking type non-contact measuring machine and the laser tracking type contact measuring machine each have a retro reflector 32 attached thereto, and the laser tracker system 5a measures the distance to the retro reflector so that a laser tracker can be obtained. The coordinates of the retro reflector in the system coordinate system are measured. Each of the laser tracking non-contact measuring machine and the laser tracking contact measuring machine is provided with a plurality of LEDs, and the LEDs are imaged by the camera system. Since the positional relationship between the LEDs is determined in advance, the attitudes of the laser tracking non-contact measuring device and the laser tracking contact measuring device are calculated by analyzing the acquired image. Based on the above information, data obtained by the laser tracking non-contact measuring machine and the laser tracking contact measuring machine is converted into the coordinate system of the laser tracker system.
次に、レーザ追尾式非接触測定機で得られたデータから曲面の三次元形状データ１４を生成する。曲面の具体例としては、図７に示すような、タービンケーシングのホールダウンボルト部などが挙げられる。レーザ追尾式非接触測定機では、図８に示すように曲面部表面の多くの座標データを取得する。測定原理は、例えば、図１３に示すレーザ光切断方式などがある、すなわち、レーザ３ａから発振されたレーザ光りは、コリメータレンズ３ｃで一旦拡大され、シリンドリカルレンズ３ｄで扇状に広げられる。該扇状の光りは、計測対象に当たり散乱光が発生する。該発生した散乱光は、結像レンズ３ｅで集光され、エリアセンサ３ｂ上に結像される。このとき、計測対象の位置（サイズ、すなわち座標）がレーザ輝線３６、３７、３８と変化すると、画像上の結像位置も計測面３６ａ、３６ｂ、３６ｃといった具合に変化する。この画像上での結像位置（レーザ輝線の位置）を画像処理で算出し（例えば、輝度分布の重心を求め）、三角測量の原理で計測対象までの距離が求まる。 Next, the three-dimensional shape data 14 of the curved surface is generated from the data obtained by the laser tracking non-contact measuring machine. Specific examples of the curved surface include a hole down bolt portion of a turbine casing as shown in FIG. In the laser tracking type non-contact measuring machine, as shown in FIG. 8, a lot of coordinate data on the curved surface is acquired. The principle of measurement is, for example, the laser beam cutting method shown in FIG. The fan-shaped light hits a measurement target and generates scattered light. The generated scattered light is collected by the imaging lens 3e and imaged on the area sensor 3b. At this time, when the position (size, that is, coordinates) of the measurement object changes to the laser emission lines 36, 37, and 38, the imaging position on the image also changes to the measurement surfaces 36a, 36b, and 36c. The image formation position (the position of the laser emission line) on this image is calculated by image processing (for example, the center of gravity of the luminance distribution is obtained), and the distance to the measurement object is obtained by the principle of triangulation.
一方、レーザ追尾式接触測定機では、図１７、図１８に示すように、上記分割された各々の平面、および、円筒をＮ点計測する。そして、Ｎ点計測されたデータから、平面、および、円筒形状を求める。さらに、計測対象の主要部１６では、ノギスやパイテープ、コンベックスなどを用いて計測される。一般に、図１５、図１６に示すように、平面と円筒は３点の座標データがあると一意に求まる。しかしながら、計測データには必ず誤差が含まれるため、３点の計測データから平面や円筒は正しく求まらない。そこで、最低でも５点から８点の計測データを取得することが望ましい。４点以上の計測データから平面や円筒を求める方法としては、最小二乗法や擬似逆行列を使えばよい。ここで、タービンケーシングやタービンロータの場合、一般的に、平面や円筒は各々平行になっている。ところが、最小二乗法や擬似逆行列で求まる平面や円筒は、計測誤差のため、平面の法線と円筒の軸は、一致しない。すなわち、図１９に示すように、計測データの誤差により、円筒面が投影される平面が、計算のたびに変わる。逆に、投影する平面を予め定めておけば、円筒の中心軸は一致する。そこで、例えば、タービンケーシングを計測する場合には、図２０に示すように、機械加工面を基準面４６とし、先ず、図２１に示すように、該基準面をＮ点計測する。そして、図２２に示すように、該基準面を含む平面４６ｂを求める。次に、計測したい円筒面４７をＮ点計測し、得られた計測データを該平面４６ｂに投影し、投影されたデータに円を当てはめることで円筒を算出する。 On the other hand, in the laser tracking type contact measuring machine, as shown in FIGS. 17 and 18, N points are measured for each of the divided planes and cylinders. Then, a plane and a cylindrical shape are obtained from the data measured at N points. Further, the main part 16 to be measured is measured using calipers, pie tapes, convexes, and the like. In general, as shown in FIGS. 15 and 16, a plane and a cylinder are uniquely obtained when there are three points of coordinate data. However, since the measurement data always includes an error, a plane and a cylinder cannot be obtained correctly from the three measurement data. Therefore, it is desirable to acquire at least 5 to 8 measurement data. As a method for obtaining a plane or a cylinder from four or more points of measurement data, a least square method or a pseudo inverse matrix may be used. Here, in the case of a turbine casing and a turbine rotor, generally, the plane and the cylinder are parallel to each other. However, the plane normal and the cylinder axis obtained by the least square method or the pseudo inverse matrix do not coincide with each other because of the measurement error. That is, as shown in FIG. 19, the plane on which the cylindrical surface is projected changes every time due to an error in measurement data. On the contrary, if the plane to project is determined in advance, the central axes of the cylinders coincide. Therefore, for example, when measuring a turbine casing, the machined surface is used as a reference surface 46 as shown in FIG. 20, and first, the reference surface is measured at N points as shown in FIG. Then, as shown in FIG. 22, a plane 46b including the reference plane is obtained. Next, N points of the cylindrical surface 47 to be measured are measured, the obtained measurement data is projected onto the plane 46b, and a cylinder is calculated by fitting a circle to the projected data.
このようにして求められた形状データは、共通の座標系で合成され（ステップ１７）、該得られた合成形状データに基づき設計データ（ＣＡＤデータ）を生成し（ステップ１８）、該生成された設計データに基づき、計測対象相当品が新規に製作される（ステップ１９）。 The shape data thus obtained is synthesized in a common coordinate system (step 17), and design data (CAD data) is generated based on the obtained synthesized shape data (step 18). Based on the design data, a measurement target equivalent product is newly produced (step 19).
図２に本発明で用いる計測システムの別の構成について示す。先ず、非接触式三次元測定機６により計測対象全体にわたり、計測対象表面に対応した座標情報１１を得る。そして、該得られた座標情報に基づき、計測対象全体形状の三次元形状データ１５を生成する。 FIG. 2 shows another configuration of the measurement system used in the present invention. First, coordinate information 11 corresponding to the measurement target surface is obtained over the entire measurement target by the non-contact type three-dimensional measuring machine 6. Then, based on the obtained coordinate information, three-dimensional shape data 15 of the entire shape to be measured is generated.
次に、計測対象を平面、円筒、曲面部に分割し（ステップ２）、該分割された部位ごとにレーザ追尾式非接触測定機３とレーザ追尾式接触測定機４で測定する。このとき、レーザ追尾式非接触測定機とレーザ追尾式接触測定機は、各々、レーザトラッカシステム５ａとカメラシステム５ｂで監視されている。上記レーザ追尾式非接触測定機とレーザ追尾式接触測定機は、各々、レトロリフレクタが取り付けられており、上記レーザトラッカシステムにて、該レトロリフレクタまでの距離を測定することで、レーザトラッカシステムの座標系における該レトロリフレクタの座標を計測する。また、上記レーザ追尾式非接触測定機とレーザ追尾式接触測定機は、各々、複数のＬＥＤが取り付けられており、上記カメラシステムにて、該ＬＥＤを撮像する。該ＬＥＤの位置関係は予め定められているため、取得された画像を解析することで、上記レーザ追尾式非接触測定機とレーザ追尾式接触測定機の姿勢を算出する。以上の情報に基づき、レーザ追尾式非接触測定機とレーザ追尾式接触測定機でえられたデータは、レーザトラッカシステムの座標系に変換される。次に、レーザ追尾式非接触測定機で得られたデータから曲面の三次元形状データ１４を生成する。一方、レーザ追尾式接触測定機では、上記分割された各々の平面、および、円筒をＮ点計測する。そして、Ｎ点計測されたデータから、平面、および、円筒形状を求める。さらに、計測対象の主要部１６では、ノギスやパイテープ、コンベックスなどを用いて計測される。このようにして求められた形状データは、共通の座標系で合成される（ステップ１７）。 Next, the measurement object is divided into a plane, a cylinder, and a curved surface (step 2), and measurement is performed by the laser tracking non-contact measuring device 3 and the laser tracking contact measuring device 4 for each of the divided portions. At this time, the laser tracking non-contact measuring machine and the laser tracking contact measuring machine are monitored by the laser tracker system 5a and the camera system 5b, respectively. Each of the laser tracking non-contact measuring machine and the laser tracking contact measuring machine has a retro reflector attached thereto, and the laser tracker system measures the distance to the retro reflector, thereby The coordinates of the retro reflector in the coordinate system are measured. Each of the laser tracking non-contact measuring machine and the laser tracking contact measuring machine is provided with a plurality of LEDs, and the LEDs are imaged by the camera system. Since the positional relationship between the LEDs is determined in advance, the attitudes of the laser tracking non-contact measuring device and the laser tracking contact measuring device are calculated by analyzing the acquired image. Based on the above information, the data obtained by the laser tracking non-contact measuring machine and the laser tracking contact measuring machine is converted into the coordinate system of the laser tracker system. Next, the three-dimensional shape data 14 of the curved surface is generated from the data obtained by the laser tracking non-contact measuring machine. On the other hand, in the laser tracking type contact measuring machine, N points are measured for each of the divided planes and cylinders. Then, a plane and a cylindrical shape are obtained from the data measured at N points. Further, the main part 16 to be measured is measured using calipers, pie tapes, convexes, and the like. The shape data obtained in this way is synthesized in a common coordinate system (step 17).
次に、該得られた形状データと、別の計測対象を同様の手順で計測した得られた形状データとを比較し（ステップ２０）、据付前の干渉チェック（ステップ２１）を三次元データ上で行う。具体的には、タービンケーシングと該タービンケーシング内部に配置されるタービンロータの形状データを比較し、接触の有無を確認する。接触部位が認められた場合は、当該部位を追加工し（ステップ２２）、接触部位が認められない場合には、そのまま据付作業（ステップ２３）を行う。 Next, the obtained shape data is compared with the shape data obtained by measuring another measurement object in the same procedure (step 20), and the interference check before installation (step 21) is performed on the three-dimensional data. To do. Specifically, the shape data of the turbine casing and the turbine rotor disposed inside the turbine casing is compared to check for contact. If the contact part is recognized, the part is additionally processed (step 22). If the contact part is not recognized, the installation work (step 23) is performed as it is.
ここで、図２３に示すホールダウンボルトの穴位置間隔を求めようとした場合、レーザ追尾式非接触測定機では光がホールダウンボルト穴の内部まで届かず、レーザ追尾式接触測定機ではプローブが届かない場合がある。このような場合には、図２３に示すように、ホールダウンボルト穴に真球４８を置き、該真球４８を図２４に示すようにレーザ追尾式非接触測定機で測定し、もしくは、図３３に示すようにレーザ追尾式接触測定機でＮ点計測して、真球４８の中心を算出し、真球４８の中心間距離を求めればよい。 Here, when trying to obtain the hole position interval of the hole down bolt shown in FIG. 23, the light does not reach the inside of the hole down bolt hole in the laser tracking type non-contact measuring machine, and the probe is not used in the laser tracking type contact measuring machine. May not reach. In such a case, as shown in FIG. 23, a true sphere 48 is placed in the hole down bolt hole, and the true sphere 48 is measured with a laser tracking non-contact measuring machine as shown in FIG. As shown at 33, N points are measured with a laser tracking contact measuring machine, the center of the true sphere 48 is calculated, and the distance between the centers of the true spheres 48 is obtained.
同様に、図２５に示すように、タービンケーシングの円筒面にあけられたボルト穴位置を求めたい場合も、レーザ追尾式非接触測定機では光がボルト穴の内部まで届かず、レーザ追尾式接触測定機ではプローブが届かない場合がある。さらに、仮に、レーザ追尾式非接触測定機で光がボルト穴の内部まで届いたり、レーザ追尾式接触測定機でプローブがボルト穴の内部まで届いたりした場合でも、タップ溝の影響でボルト穴位置が正しく算出されない場合もある。このような場合には、図２６に示すように、中心軸の精度が正しく求められているボルト５２を差込み、該ボルトの中心軸を算出すればよい。具体的には、図２７に示すように、ボルト５２の上部の円筒５２ａの外径をレーザ追尾式接触測定機でＮ点計測したり、図２８のように、ボルト５２の上部の円筒５２ｂの外径をレーザ追尾式接触測定機でＮ点計測したりすればよい。図２８に示す方法の場合、レーザ追尾式接触測定機のプローブ先端球を保持（停止）しやすいため、計測が安定する。また、図２９のように、ボルト５２の上部円筒に円錐溝を設け、レーザ追尾式接触測定機のプローブ先端球を該円錐溝に落とし込むことで、直接ボルトの中心位置を算出してもよい。 Similarly, as shown in FIG. 25, when it is desired to determine the position of a bolt hole drilled in the cylindrical surface of the turbine casing, the laser tracking non-contact measuring machine does not allow light to reach the inside of the bolt hole. The probe may not reach the measuring machine. Furthermore, even if the light reaches the inside of the bolt hole with a laser tracking non-contact measuring machine or the probe reaches the inside of the bolt hole with a laser tracking contact measuring machine, the position of the bolt hole is affected by the tap groove. May not be calculated correctly. In such a case, as shown in FIG. 26, a bolt 52 whose center axis accuracy is correctly calculated may be inserted, and the center axis of the bolt may be calculated. Specifically, as shown in FIG. 27, the outer diameter of the cylinder 52a at the top of the bolt 52 is measured at N points with a laser tracking contact measuring machine, or as shown in FIG. The outer diameter may be measured at N points with a laser tracking contact measuring machine. In the case of the method shown in FIG. 28, since the probe tip sphere of the laser tracking contact measuring machine can be easily held (stopped), the measurement is stabilized. In addition, as shown in FIG. 29, a conical groove may be provided in the upper cylinder of the bolt 52, and the center position of the bolt may be directly calculated by dropping the probe tip sphere of the laser tracking contact measuring machine into the conical groove.
ここで、タービンケーシングやタービンロータのような大きな計測対象を計測する場合、必ずしも、一回の計測で所望の形状を全て取得できる訳ではない。そのような場合には、非接触式三次元測定機６や、レーザトラッカシステム５の位置を変える必要がある。一旦、非接触式三次元測定機６や、レーザトラッカシステム５の位置を変更してしまうと、計測データの合成（共通の座標系に計測データを置き換える）ができなくなってしまう。そこで、図１４に示すように、予め計測対象全体にわたり、計測対象３個以上のターゲット（４０ａ、４０ｂ、４０ｃ）を配置しておき（全ての計測が終了するまで動かしてはいけない）、非接触式三次元測定機６や、レーザトラッカシステム５の位置を変えるたびに、該ターゲットを測定して座標を求めて置き、求まった３点以上の座標データに基づき、計測データを座標変換すれば、非接触式三次元測定機６や、レーザトラッカシステム５の位置を変えた場合でも、全てのデータを共通の座標系で表すことが可能となる。 Here, when measuring a large measurement object such as a turbine casing or a turbine rotor, it is not always possible to acquire all the desired shapes by a single measurement. In such a case, it is necessary to change the positions of the non-contact type coordinate measuring machine 6 and the laser tracker system 5. Once the positions of the non-contact type coordinate measuring machine 6 and the laser tracker system 5 are changed, measurement data cannot be combined (measurement data is replaced with a common coordinate system). Therefore, as shown in FIG. 14, three or more targets (40a, 40b, 40c) to be measured are arranged in advance over the entire measurement target (do not move until all measurements are completed), and contactless Whenever the position of the coordinate measuring machine 6 or the laser tracker system 5 is changed, the target is measured and coordinates are obtained, and the measurement data is coordinate-converted based on the obtained coordinate data of three or more points. Even when the positions of the non-contact type coordinate measuring machine 6 and the laser tracker system 5 are changed, it is possible to represent all data in a common coordinate system.
ここで、タービンケーシングやタービンロータのような大きな計測対象を計測する場合、計測時間が数時間以上にわたる場合がある。さらに、レーザ追尾式非接触測定機３やレーザ追尾式接触測定機４は、計測作業者が持ち歩くため、ぶつけたりする場合がある。最悪の場合、ＬＥＤの位置関係が変わったりする。そのような場合、最終的に合成されたデータにずれが生じる。そこで、図３０に示す対向面間距離が予め高精度で測定された平板５５や、図３１に示すリングゲージ（円筒）５６などを定期的に計測し、得られた対向面間距離や、リングゲージ径に変化が無いか調べればよい。但し、対向面間距離やリングゲージ径（いずれも、相対位置関係）に変化がなかったとしても、絶対座標が変化している場合がある。すなわち、非接触式三次元測定機６や、レーザトラッカシステム５の位置が変わっている場合がある。このような場合、上記リングゲージ（円筒）５６を３個以上固定しておき、定期的に該リングゲージ（円筒）５６を測定し、その中心座標を求めておけば、仮に、非接触式三次元測定機６や、レーザトラッカシステム５の絶対位置や、レーザ追尾式非接触測定機３やレーザ追尾式接触測定機４の測定精度が変化した場合にも、回転、平行移動、拡大、縮小を含む座標変換により、計測データを補正することが可能となる。図３２に示すように、３個のリングゲージ（円筒）５６を平板５５上に固定した簡易校正治具５７を用意し、予め、該リングゲージ（円筒）５６の中心座標と対向面間距離を予め高精度で求めておいて、該簡易校正治具５７を固定しておけば、用意に座標補正用データを取得することができる。 Here, when measuring a large measurement target such as a turbine casing or a turbine rotor, the measurement time may take several hours or more. Furthermore, the laser tracking non-contact measuring device 3 and the laser tracking contact measuring device 4 may be bumped because they are carried by the measurement operator. In the worst case, the positional relationship of the LEDs changes. In such a case, a deviation occurs in the finally synthesized data. Therefore, the flat plate 55 in which the distance between the opposed surfaces shown in FIG. 30 is measured with high accuracy in advance, the ring gauge (cylinder) 56 shown in FIG. What is necessary is to check whether there is any change in the gauge diameter. However, even if there is no change in the distance between the opposing surfaces and the ring gauge diameter (both are relative positional relationships), the absolute coordinates may change. That is, the positions of the non-contact type coordinate measuring machine 6 and the laser tracker system 5 may be changed. In such a case, if three or more ring gauges (cylinders) 56 are fixed, the ring gauges (cylinders) 56 are periodically measured, and the center coordinates thereof are obtained, the non-contact type tertiary Even when the absolute position of the original measuring machine 6 or the laser tracker system 5 or the measurement accuracy of the laser tracking non-contact measuring machine 3 or the laser tracking contact measuring machine 4 changes, rotation, translation, enlargement and reduction are possible. Measurement data can be corrected by the coordinate conversion including. As shown in FIG. 32, a simple calibration jig 57 in which three ring gauges (cylinders) 56 are fixed on a flat plate 55 is prepared, and the center coordinates of the ring gauges (cylinders) 56 and the distance between the opposing surfaces are set in advance. If the simple calibration jig 57 is fixed in advance with high accuracy, the coordinate correction data can be acquired in advance.
タービンロータやタービンケーシングの寸法計測方法および装置に関する。 The present invention relates to a method and an apparatus for measuring dimensions of a turbine rotor and a turbine casing.
１ 計測対象
２ 計測対象を平面部、円筒部、曲面部に分割
３ レーザ追尾式非接触測定機
３ａ レーザ
３ｂ エリアセンサ
３ｃ コリメートレンズ
３ｄ シリンドリカルレンズ
３ｅ 結像レンズ
４ レーザ追尾式接触測定機
５、５ａ レーザトラッカシステム
５ｂ カメラシステム
６ 非接触式三次元測定機
７ 手計測
８ レーザ追尾式非接触測定機、または、レーザ追尾式接触測定機までの距離
９ レーザ追尾式非接触測定機、または、レーザ追尾式接触測定機の姿勢
１０ レーザ追尾式非接触測定機、または、レーザ追尾式接触測定機で測定した計測点の座標
１１ 計測点の座標情報
１２ 平面の算出
１３ 円筒形状の算出
１４ 曲面の三次元形状データ
１５ 計測対象全体形状の三次元形状データ
１７ 計測データの合成
１８ 設計データ（ＣＡＤデータ）の作成
２４ タービンケーシング
２５ タービンロータ
２６ 面と円筒の集合体で表現したタービンケーシング
２７ 面と円筒の集合体で表現したタービンロータ
２７ａ、２７ｂ、２９ａ、２９ｂ、３０ａ、３０ｂ エンコーダ付き回転モータ
２８、３１ レーザ測距システム
３２ レトロリフレクタ
３３ａ、３３ｂ、３３ｃ、３３ｄ ＬＥＤ
３６、３７、３８ 計測面
３６ａ、３７ａ、３８ａ エリアセンサで得られた各計測面に対応するレーザ輝線
４１ ３点で定義される平面
４１′ Ｎ点の計測データから求めた平面
４２ 円筒
４３ 投影面に投影された計測データにフィッティングされた円
４３′ Ｎ点の計測データから求めた円
４６ タービンケーシングの基準面
４６ａ Ｎ点の計測データから求めたタービンケーシングの基準面
４６ｂ Ｎ点の計測データから求めたタービンケーシングの基準面を含む平面
４７ 計測したいタービンケーシングの円筒溝
４７ａ 算出したい円筒
４７ｂ Ｎ点の計測データを、Ｎ点の計測データから求めたタービンケーシングの基準面に投影した結果から求めた円
４８ 真球
４９ 真球の中心間隔から求めたホールダウンボルトの中心間距離
４９ａ、４９ｂ 真球の中心座標
５０ レーザ追尾式非接触測定機による真球の形状計測結果
５１ タービンケーシングの円筒面にあけられたボルト穴
５２ 軸中心がタービンケーシングの円筒面にあけられたボルト穴中心と一致するボルト
５５ 簡易校正治具（平板）
５６ 簡易校正治具（円筒）
５７ 平板と円筒が一体化された簡易校正治具
DESCRIPTION OF SYMBOLS 1 Measurement object 2 Measurement object is divided | segmented into a plane part, a cylindrical part, and a curved surface part 3 Laser tracking type non-contact measuring machine 3a Laser 3b Area sensor 3c Collimating lens 3d Cylindrical lens 3e Imaging lens 4 Laser tracking type contact measuring machine 5, 5a Laser tracker system 5b Camera system 6 Non-contact type coordinate measuring machine 7 Manual measurement 8 Distance to laser tracking type non-contact measuring machine or laser tracking type contact measuring machine 9 Laser tracking type non-contact measuring machine or laser tracking Position of the contact type measuring machine 10 Measurement point coordinates measured with a laser tracking type non-contact measuring machine or laser tracking type contact measuring machine 11 Measurement point coordinate information 12 Calculation of a plane 13 Calculation of a cylindrical shape 14 Calculation of a curved surface 3D Shape data 15 Three-dimensional shape data 17 of the entire shape to be measured 17 Measurement data synthesis 18 Creation of design data (CAD data) 2 Turbine casing 25 Turbine rotor 26 Turbine casing 27 expressed by an assembly of surfaces and cylinders Turbine rotors 27a, 27b, 29a, 29b, 30a, 30b expressed by an assembly of surfaces and cylinders Rotary motors with encoders 28, 31 Laser ranging System 32 Retro reflector 33a, 33b, 33c, 33d LED
36, 37, 38 Measurement planes 36a, 37a, 38a A plane 41 'defined by 3 laser emission lines 41 corresponding to each measurement plane obtained by the area sensor 42' plane 42 Cylinder 43 Projection plane Circle 43 'fitted to measurement data projected onto circle 46' Circle 46 obtained from N point measurement data Turbine casing reference plane 46a Turbine casing reference plane 46b Obtained from N point measurement data Obtained from N point measurement data The plane 47 including the reference plane of the turbine casing The cylindrical groove 47a of the turbine casing to be measured The cylinder 47b to be calculated The circle obtained from the result of projecting the measurement data of the N point on the reference plane of the turbine casing obtained from the measurement data of the N point 48 True sphere 49 Distance between center 49a and 49b of hole down bolt calculated from center distance of true sphere Center coordinate 50 of the ball shape measurement result 51 with a laser tracking non-contact measuring machine 51 Bolt hole drilled in the cylindrical surface of the turbine casing 52 Bolt whose axis center matches the bolt hole center drilled in the cylindrical surface of the turbine casing 55 Simple calibration jig (flat plate)
56 Simple calibration jig (cylindrical)
57 Simple calibration jig with flat plate and cylinder integrated
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