CN100491895C - Three-coordinate calibrating and inspection instrument - Google Patents
Three-coordinate calibrating and inspection instrument Download PDFInfo
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- CN100491895C CN100491895C CNB2005100222154A CN200510022215A CN100491895C CN 100491895 C CN100491895 C CN 100491895C CN B2005100222154 A CNB2005100222154 A CN B2005100222154A CN 200510022215 A CN200510022215 A CN 200510022215A CN 100491895 C CN100491895 C CN 100491895C
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Abstract
The invention discloses a three-coordinate system gauge calibrator, which is characterized by the following: adapting rotatable four-angle rhombic geometry in the measured three-coordinate system space; observing and controlling the system through three-coordinate measuring machine; providing finite space length datum and true value of the measured coordinate; complicating the generated finite factor of simple spatial structure again; generating quantity according to the index growing coordinate true value and error vector factor; finishing the universal spatial gauge and compensation of three different coordinate structures. The invention is fit for active and new-making numeral control three-coordinate manufacturing and detecting equipment, which elevates and gauges the precision grade after compensating the spatial error.
Description
Technical field
The invention belongs to numerically controlled processing equipment and the perfect calibrating of volume coordinate of three coordinate measuring machine and the instrument of space error compensation made by the three-coordinate of quadrature.
Technical background
Becoming with the boring and milling class numerical control machining center of the three-coordinate structure of quadrature and three coordinate measuring machine and to popularize and the target of development, at present, the recoverable amount of three coordinate machine is more than 50,000, boring and milling class numerical control machining center is 100 times of three coordinate measuring machine at least, this is because in the three-coordinate of quadrature, by static state and Kinematic Positioning to coordinate points, can form straight line, line segment, angle, curve and the arbitrary curve of coordinate space and the entity profile and the fictitious outline of curved surface, finish the desired target of any geometrical body, have extremely strong versatility.
But because it is very complicated to constitute the error structure of three-coordinate, foozle, force deformation, thermal strain shape, environment temperature and vibration, material standard and detecting error all make the location of the theoretical correct point of volume coordinate position depart from, these errors are summed up as the operation linearity and the verticality of three on coordinate, be that single coordinate axis three is rotated and three translation 6DOFs add a verticality, totally 7, totally 21 errors in three space adds detecting error and material standard gauging error composition.Because the complicacy of error is promptly used same equipment, the space zones of different has different precision.This makes the uncertainty of calibrating coordinate system all become very difficult, and therefore, the measurement of space length is difficult to reach the level of one-dimensional measurement, and between this, the internal and international three-dimensional standard verification of formulating all reduces the method for precision to spatial accuracy evaluation employing.In one-dimensional measurement, can execute and detect the selection principle of error by workpiece error 1/10th, accuracy assessment adopts ± 3 σ, and error is unidirectional distribution; And can adopt 1/3 principle, precision property to evaluate ± 2 σ in the three-coordinate, error is bi-directional distributed and allows the limited imperfection calibrating in space, carries out the precision property evaluation.
At present, equal precision prescribed of the developing goal of three-dimensional equipment and value orientation and speed in order to improve precision, are effectively with the simple method that improves manufacturing accuracy, but have the limitation and the limit in epoch.Near the precision of the limit, high economic cost is all paid in every small step raising.Another approach adopts error compensation calibration exactly, and the compensation calibration to the single shaft of one dimension can reach the Subnano-class level now, has become ripe.But the space compensation difficulty is big, must satisfy the north source property of accuracy, consistance, integrality, simplification, error simultaneously, these five conditions again all with general row, economy, reliability, convenience, and the applicability of production scene be consistent.These conditions have plenty of conflicting, so all there is such or such defective in present volume coordinate calibrating, the check of coordinate space is imperfect, confidence level is poor, the method of inspection of some moulding only limits to the evaluation of uncertainty, more can not finish error compensation, up to now, still lacking to provide space error calibrating or the compensation of satisfying above-mentioned condition to the user.
Summary of the invention
The objective of the invention is to satisfy boring and milling class machining center and the three coordinate measuring machine that above-mentioned condition is given just in use or all kinds of three-coordinates of coming of new constitute simultaneously, provide the space error compensation to finish the three-coordinate calibrating and measuring instrument that former accuracy class promotes and examine and determine in the space.
Technical scheme of the present invention is as Fig. 1～shown in Figure 6, use four jiaos of rotating rhombus geometrical bodies, place and examined the three-coordinate space, be equipped with existing three coordinate measuring machine TT﹠C software, make the step pitch measurement of coordinates, utilize the rhombus geometric properties, indicating value to angular vertex relative motion location, can not influenced by steering error, provide serial orthogonal plane coordinate system being examined the stable length standard of space distribution with one-dimensional measurement precision, obtain coordinate true value and error vector that n coordinate space point position and sphere 2n point position, a center distribute, finish after 21 errors in space are traced to the source, in accordance with regulations with (n/4)
3The coordinate figure of the error vector of the space networks lattice point position rectangle cube distribution of individual expansion, and, finally finish the complete compensation and the calibrating by level of resolution of the three-coordinate of each class formation by interpolation and relevant space real-Time Compensation.
Among the present invention, four jiaos of rhombus geometrical body are equipped with on the 60 degree reference center hole conical surfaces of revolving shaft of accurate hinge 2 and respectively are fixed with a precise sphere 1, rhombus limit 3 is connected with accurate hinge 2, four rhombus limits 3 that precise sphere 1 center is determined are isometric, four precise spheres 1 are in same plane, and each axis of rotation is parallel, and the accurate hinge 2 of A, C is connected with guide rail 4 in four jiaos the precise sphere 1, grating scale 5 is installed on the guide rail 4, and guide rail 4 is fixed on the mount pad 6.
The present invention as shown in Figure 2, the diamond of serial connection is formed in two diamond structures and optional separately single-revolution deads in line.Install for four diagonal line of the different coffins that guarantee to be fit to all kinds of three-coordinate specifications, can select to install the attitude rigidity and accurately locate, distribute to satisfy the required measuring point of operation program, installation should have Three dimensional rotation and fine motion adjustment to reach installation accuracy.Structure after the serial connection should make 7 centre ofs sphere be in same plane, fixedly the slide block that moves below of diagonal angle revolution fulcrum A can be manually or servo driving, the position and lock that total keeps high rigidity to do the step pitch displacement is measured, support central rotating shaft point C to be fixed on the mount pad, support point G under another revolving shaft is applied to reverse elasticity power and structure gravitational equilibrium, unsteady relative fixed, the power of avoiding structural failure to cause is disturbed.Serial connection rhombogen G point for minor structure is not established support, measures minimum point position and the as far as possible little mounting distance of work top to guarantee rhombogen.Such structure is four diagonal line at the coordinate space of being examined coordinate system S installs, and does step pitch coordinate setting such as the centre of sphere at every turn respectively and measures, and the step pitch location drives can be manually, servo operation.As shown in Figure 4, obtain 8 diagonal line measuring points and 8 by the position of the identical location of step pitch number is that 8 measurement points of sphere of radius distribute with adjacent side length at every turn, is increased to n/8 with step pitch location sequence number.8 each points shrink to the center, obtain altogether and contain a diagonal angle n measuring point and a sphere 2n measuring point.Selecting serial connection diamond structure plane coordinate system U and S during measurement is the regulation that meets as shown in Figure 1, the result that gained n is ordered, utilize the related operation function program of existing three coordinate machine Survey Software, comprise the position coordinate detection, point-point, point-line, the distance of point-face, intersection point, intersection, the angle value of displacement of the lines, vector coordinate transform, coordinate translation, rotational transform, straight line, the plane, the least square of sphere multi-measuring point is found the solution, the match of curve and curved surface, the straight line of some position, the plane, the equation expression of sphere etc. are no longer distinguished hereinafter with the newly-increased supporting computing of operation program, directly narration.
The present invention has simple general-purpose, and is accurate, consistent, reliable, economic and practical, is suitable for the lifting and the calibrating of the space error compensation back accuracy class of all kinds of numerical control three-dimensional processing just under arms and coming of new and checkout equipment.
Description of drawings
Fig. 1, rhombus geometrical body schematic diagram
Fig. 2, serial connection rhombogen structural scheme of mechanism
Fig. 3, serial connection rhombogen space mounting synoptic diagram
Fig. 4, space diagonal line are measured the measurement point synoptic diagram
Fig. 5, space networks trrellis diagram
Fig. 6, grid are mended the some synoptic diagram
Wherein: 1, precise sphere; 2, accurate hinge; 3, rhombus limit;
4, guide rail; 5, grating scale; 6, mount pad.
Embodiment
Precise sphere of the present invention can be steel ball, glass bead, wimet and jewel ball etc.Here the preferential steel ball that hardens that selects, its advantage is the precision height, available permanent magnet pieces is fixed, and is simple and reliable.The selection of rotary axis system should guarantee that each parallel axes can be slip, rolling, air supporting.But preferentially select the axis of rolling system formation precision rotating hinge that radially all forms the interference combination with end face for use, do not have the gap because of interference and have high rigidity stability, the high rigid material of lightweight can be used in rhombus limit 3, as carbon fiber, and pottery etc.But premium casting is still selection, because of it has the identical linear expansion coefficient of casting structure with common three-dimensional process equipment.And the matrix that scale is installed should be consistent with the material that constitutes rhombus four limits, and scale to keep the grating indicating value consistent with the polar expansion on rhombus four limits, is convenient to site work after laser interferometer calibration indicating value.At present, with the closely-related basic component of precision, be the precision that basic component can reach 0.5 μ m as spheroid, grating scale, the axis of rolling, in addition higher.Datum length precision after the combination depends on the calibration accuracy of one dimension, mention unquestionable in front, the position length of the combination back centre of sphere and flatness carry out on the flat board of high plane precision, and rhombus are in foursquare position correction in the method for taking the technology calibration and regulating.When carrying out the sphere centre coordinate detection mode, use 5 detections of quadrature a bit that comprise the sphere top.This not only makes to measure simplifies, eliminate the deflection error of three-dimensional detection and the Global Error of reference sphere simultaneously, thereby, whole detection examined three-dimensional s system for providing reliable benchmark element to place, the rhombus diagonal line is formed the orthogonal plane coordinate system, constituting a kind of straightness error that do not led influences, the selected arbitrarily length standard of quantity available with one dimension calibration accuracy, the true value coordinate and the error vector of given centre of sphere point position, supporting by the three coordinate measuring machine operation program, finish space error compensation calibration and the calibrating of being examined three-coordinate.
It is as follows with the solution procedure of the computing of compensation that the present invention finishes the space calibrating:
1, finds the solution error vector and the true value coordinate indicating value of n measurement point position in three-coordinate, with Fig. 1 is example, rhombus y indicating value is provided by benchmark grating indicating value in S system, ball center's four water chestnut limit R length standard calibratings are known, the coordinate figure of A, B, C, 4 centre ofs sphere of D is measured indicating value and is found the solution distance A B, BC, CD, AD, BD totally 7 known numbers in being examined coordinate S system, the measurement coordinate system of S system is all met selection shown in Figure 1 by each step pitch, and using A, B, C, D rhombus planimetric coordinates U is zero point.C (0,0,0) overlaps with measurement true origin in the S system, and optional again D point S overlaps with the x or the y of U system, and the z of S system is zero in plane U is, then D (x+ Δ x, y/2+0) B (X+ Δ x
1, y/2+ Δ Y) and A (Δ x
2, y+ Δ Y
1, Δ z), wherein Δ z be according to BDC three point selection U tie up to the measuring error that z is ordered to A in the S system, x, Δ x, Δ x are arranged like this
1, Δ x
2, Δ Y, Δ Y
1, Δ z totally 7 unknown numbers.
According to the quadratic sum of the right-angle triangle two right angle length of sides equal hypotenuse square, 7 system of equations of simultaneous, utilize foregoing 7 known numbers, (system of equations with find the solution be omitted), obtain 4 true value and the error vector of plane U system after finding the solution, in like manner tried to achieve other three the some true value and the error vector of serial connection.The step pitch displacement such as passing through carries out the layout ordering of 4 linea angulata points position and measures, loop computation, obtain in the whole variation U system true value and the error vector of n point respectively, transform in the S system through coordinate vector, because rhombus guide rail operation linearity and diagonal line are installed and had error,, each does not impact each true value point offset theoretical position though being measured true value, find the solution for following each point and make troubles, adopt following way:
(1) the diagonal line installation site is controlled the registration accuracy of four installation sites respectively, when mounted pass through detection to the centre of sphere, at first adjust the C point that mount pad guarantees each time installation and overlap, first measures the indicating value of step pitch location survey point on the some position of rectangle position;
(2) select coordinate space S system to overlap, get custom coordinate orientation as shown in Figure 4, survey,, make up the coordinate S` system of calculating used theory by the least square fitting plane by work top being carried out flatness with the initial point of coordinates computed system;
(3) will be because of each measuring point true value and the error vector in the S system that various alignment error caused, respectively by single diagonal line gained each point true value through the theoretical position of four coordinate transforms in the S`, the result of conversion produces the relative error generation error of the physical location variation of measurement of coordinates point by this neighborhood like this, as getting 1/100 relative error that 0.0001mm arranged in the each point displacement 0.01mm,, this error of control installation accuracy cast out as long as can be used as arithmetic eror.
2, coordinate space forms a cube grid expansion according to four cornerwise n measuring points.
Distribute by four diagonal line measuring points, 8 identical lines of each measuring point step pitch location sequence number, measurement space is thought of as the equidistant cuboid at x, y, the equidistant suit of z direction, and forms (n/4) after further imagining six extensions of each cuboid
3Individual grid intersection point.As shown in Figure 5, except an original n known point, (n/4) that increases newly
3The point position that-n true value point position and corresponding error vector are found the solution, each single shaft coordinate distribution number n/4 of the net point position of space lattice x, y, z, grid Subspace Distribution number (n/4-1)
3Distribute according to these some positions and to determine principle of ordering,, utilize the footmark of point should comprise following content so that accurately call during the calculation procedure operation.For example any S
nThe point expression,
s
n[x
i+Δx
i，y
j+Δy
j，z
k+Δz
k]
x
i, y
j, z
iThe coordinate true value of this point of some expression
Δ x
i, Δ y
j, Δ z
kRepresent this point tolerance phasor coordinate value
The newly-increased Δ x that adds some points
i(δ
I1+ ...+δ
I4+ b
I1+ ...+b
I4)
Δy
i(δ
j1+......+δ
j4+b
j1+......+b
j4)
Δz
k(δ
k1+......+δ
k4+b
k1+......+b
k4)
s
n(i, j k) are respectively 1,2,3 ... n/4
N is 1,2,3 ... (n/4)
3
Wherein: δ is for constituting Δ rotational line value error source, and b is the translational error source of Δ.
In diagonal line and since survey the sphere diameter of ball add the pivot structure size exist with worktable on minimum setting height(from bottom) h, be the integrality that guarantees space compensation, grid extends to worktable and increases to (n/4)
3+ (n/4)
2Individual net point position.
3, error is traced to the source
In the above-mentioned volume coordinate net point, the coordinate of its indicating value point position need pass through known point, by finding the solution after 21 error separating, obtains newly-increased some position Δ x
i, Δ y
i, Δ z
kBe reduced into true value point position behind the error vector.It is as follows to find the solution scheme:
(1) as shown in Figure 6, S, be coordinate zero point and coordinate orientation, and S system and S` are overlapped;
(2) correctly distinguish geometric meaning and the error orientation that 21 errors distribute at this diamond structure measuring point, each measurement point s
n(x
i, y
i, z
k) represent coordinate true value distance to equal (x respectively
i, y
i, z
k) the intersection point of three intersections that constitute of three orthogonal planes, set up computing identification, on each plane on the back plane of swing location the corner of each point identical.Each intersection can leave plane rocking, the angular oscillation error is determined by abbe ' s principle, and the angular oscillation of plane two parallel intersections and another plane are rotated and be unidirectional, and only the numerical value difference needn't be separated.It is 0 that each error is rotated what can investigate that a position do not have influence, and translation is the correlationship of adjacent measuring point measured value.Rotation is the error angle relation of distance fixed point between two intersection points, independently finds the solution respectively;
(3) three-coordinate device coordinate operating structure is a lot of, and different combinations has different error alignment modes.For making operation program general, reduce gauge head type and work bench-type at this, it can be x, y, z, xy, xz, yz or xyz that the coordinate of work bench-type drives.The gauge head type its objective is dissimilar coordinate structural plannings is become to adapt to the general orientation criterion of calculation procedure too.
The work bench-type, the left-handed system criterion is allly made the use left-handed system of coordinate motion to drive worktable, and the indicating value orientation of the coordinate traffic direction of worktable is consistent with S` direction forward just, otherwise is to bear.
Left-handed thumb, the palm of the hand, four refer to that finger tip points to the forward of each axial coordinate operation, investigate 2 rotation direction with coordinate figure little be initial point, switch-back value forward increases consistent with coordinate traffic direction forward, angular errors is just got, otherwise get negative, forward is consistent just gets for translational error and axial operation, otherwise gets negative.
The gauge head type, the right-handed system criterion is allly made the use right-handed system of coordinate motion to drive gauge head, and the coordinate traffic direction indicating value orientation of gauge head is consistent with S` direction forward just, otherwise is to bear.
Right-handed thumb, the palm of the hand, four refer to that finger tip points to the forward of each axial coordinate operation, investigate 2 rotation direction with coordinate figure little be initial point, switch-back value forward increases consistent with coordinate traffic direction forward, angular errors is just got, otherwise get negative, forward is consistent just gets for translational error and axial operation, otherwise gets negative;
(4), the error vector of mesh space unknown point finds the solution, when outwards mending point to the coordinate space middle part one by one, the corner stitch value of calculating rotation error is shorter and shorter, the precision that Abbe error converts reduces.Detecting error is totally amplified, and 8 at center outwards augments a precedence number and controls respectively≤and 2.When outwards augmenting a some position again, utilize the distribution of center sphere n point tolerance vector to find the solution least square sphere and true value sphere, on least square sphere and central network ruling intersection point, the line of centres in the true value sphere, obtain the two direction distances of taking advantage of on the sphere with the intersection point of proper sphere face, be transformed into S` and make to mend point processing as Abbe error conversion infrastructure elements as the error vector of reference point position;
(5), 21 error separating
For adapting to the each point positioning sorting of space lattice, s
n[x
i+ Δ x
i, y
j+ Δ y
j, z
k+ Δ z
k].Referring to Fig. 5, the listed net point figure place of this figure is 8 to the maximum, totally 512 some positions.According to above-mentioned resolution principle, be that narration simplifies, with s wherein
nPoint Δ x
i(δ
I1+ ...+δ
I4+ b
I1+ ...+b
I4) be example, need measurement point position outer 8 and the simple ordering numbering of 8 implementations of adjacent inner layer.Referring to Fig. 6, to S
17Point tolerance is traced to the source and is found the solution for example.
Constitute coordinate indicating value two planes of grid x coordinate 1,8 position, and constitute coordinate indicating value two planes and coordinate indicating value two planes that constitute z coordinate 1,8 position of y coordinate 1,8, totally 12 intersections, 8 intersection points.
Δ x
1,8The error source of x axle:
A) δ that swings of 1,8 position of x
1`, δ
2`
B) swing 0,0 of 1,8 position of x
C) the horizontal hunting δ of 1,8 position of x
3`, δ
4`
Δ x
1,8The error source of y axle:
The δ that swings of 1,8 position of i.y
5`, δ
6`
The swing 0,0 of 1,8 position of ii.y
The horizontal hunting δ of 1,8 position of iii.y
7`, δ
8`
Δ x
1,8The error source of y axle:
1. the δ that swings of 1,8 position of z
9`, δ
10`
2. the swing 0,0 of 1,8 position of z
3. the horizontal hunting δ of 1,8 position of z
11`, δ
12`
X ⊥ y error source δ
13`
X ⊥ z error source δ
14`
Y ⊥ z error source δ
15`
By above-mentioned operation rule, promptly needn't separate the error merging that does not influence operation result, the row following formula is found the solution:
(δ
1`+δ
9`+δ
14`) δ
1
(δ
2`+δ
10`+δ
14`) δ
2
(δ
3`+δ
7`+δ
13`) δ
3
(δ
4`+δ
8`+δ
13`) δ
4
(δ
5`+δ
13`) δ
5
(δ
6`+δ
13`) δ
6
(δ
11`+δ
15`) δ
7
(δ
12`+δ
15`) δ
8
8 known 1,8 known Δ x
1,8The error of indication of point is respectively with δ
1,8Substitution is obtained 8 systems of linear equations of per four δ parameters respectively and is found the solution, and (system of equations with find the solution be omitted) in like manner, can obtain δ
9,168 δ values.According to 16 angle swing momentum being asked, obtain 48 points that 8 of internal layers expand outwardly grid, with a S
17(1,7,7) are example, are described, and find the solution by abbe ' s principle:
δ``
1＝δ
1×7/8
δ``
3＝δ
3×7/8
δ``
6＝δ
8×7/8
δ``
8＝δ
8×7/8
In like manner can obtain 48 some positions of newly-increased net point.Ask the translation composition of each adjacent known point position to add the angular oscillation composition again, ask the error vector coordinate of augmenting a position.
Can only pass through known point S
11And S
3Ask the direct and indirect relation of error source, the angle amount of spin that wherein each adjacent sequence number is identical is followed a translation amount that sequence number is identical, and solution point 11 is formed to the error source of each translation amount of point 17.
Direct relation represents that a little 11 to 17 have the angular oscillation that equates and translation correlationship promptly on same angular oscillation face to point 3, S with point 11
nError source be that superscript is represented with this point, then have
δ
17 1＝(δ
11 1—δ
3 1)+b
1
According to known δ
17 1, δ
11 1, δ
3 1Find the solution:
b
1＝δ
17 1—(δ
11 1—δ
3 1)
Indirect relation represents that a little 11 to 3 and 11 to 17 angle swing momentum not in one plane do not change it to 11 planes of oscillation by putting 18, makes and 11 coexistence one swinging planes at 17, has identical b
3, following formula is arranged:
δ
11 3＝(δ
18 3—δ
3 3)+b
3
According to known δ
18 3, δ
3 3, δ
11 3Find the solution:
b
3＝δ
11 3—(δ
18 3—δ
3 3)
In like manner try to achieve: b
6, b
8And whole S
17Δ
X17, try to achieve by that analogy:
Δ
x17＝(δ
1+δ
3+δ
6+δ
8+b
1+b
3+b
6+b
8)、
Δ
y17＝( )
Δ
z17＝( )
The coordinate and the error vector coordinate figure of reduction true value point, S
17(x
17+ Δ x
17, y
17+ Δ y
17, z
17+ Δ z
17) mend to put and finish to this.Again by that analogy, loop computation, implement each point from inside to outside one by one, finish n point true value coordinate and error vector, should observe during the focal point position, utilize sphere to mend the point selection computing, reduce error accumulation and try to achieve (n/4)
3+ (n/4)
2Whole coordinate space points position and lower floor's plane net lattice point position true value coordinate and error vector.
Press the xy plane to Δ x by each internal layer at last
i, Δ y
jThe layering surface fitting of same aspect, subspace number (n/4-1) is pressed by system to space lattice
3+ (n/4-1)
2The interpolation compensation is implemented in ordering.
Volume coordinate after the compensation, owing to also exist detecting error, rhombus material standard error, calculation error and residual error that above-mentioned coordinate measuring point distributes and adjusts and produce, compensation precision can increasing and improve with measurement point, also will be restricted simultaneously, theory and practice by the periodicity stationary stochastic process, mesh coordinate is counted between 8 and 20, systematic error and stochastic error under general condition reduce 1～2 times behind grid error frequency division after compensating, and the maximum dispersion degree appears at the pi/2 place in frequency division cycle.When examine and determine the compensation back, coordinate measuring machine is the consistance of assurance with actual detected, should comprises the deflection error of detection, the detection mode of sphere centre coordinate is found the solution in employing, should adopt the random direction more than 5 to survey, only need to change cornerwise installation, each translation 1/4 grid distance, and adjustment pi/2, make maximum error after the error compensation with discovering device, detect the error of indication of each point, the indicating value of compensation point of the same name position, the comparison length difference, getting maximum difference is uncertainty.The maximum error of indication is accuracy with the error of indication difference of minimum, presses coordinate space accuracy assessment standard, and the conversion confidence factor respectively takes advantage of 2/3 to above-mentioned uncertainty and accuracy, as the coordinate space verification result.
Real-Time Compensation should comprise also z axis error action length and center are worth compensation partially that the elongation and the deflection of the axis tilt of NC cutting tool and the variation of tool length, three coordinate machine measuring staff all belong to this type of.This will cause by the measurement data of measuring the gauge head fixed length and carry out the space error compensating distortion, the way of real-Time Compensation is, utilize diagonal line to measure, use adjustable elongation and deflection that gauge head is installed, consistent gauge head when detect measuring with compensation, the repeatedly difference of carrying out coordinate points by the measurement pattern of ball's dead center compares, and each elongation and amount of bias are pressed the step pitch adjustment when surveying.Select two differing heights to differ bigger ball center in each the adjustment, each offset change with at x, do measurement more than 5 times respectively on the y direction with on the short transverse, equal value difference is got in each time, the difference tabulation stores according to a position correlationship and supplies the real-Time Compensation computing.
Serial connection rhombus device is four linea angulatas and installs, can do the expansion of being examined the space of diamond-shaped body structure size restrictions, to guarantee the complete space rectangular distribution of measuring point after the serial connection rhombus installation translation, the measuring point step pitch is constant, each time installs and measures, and use to regulate the spatial attitude of mount pad, keep each time installation after, at least investigate in conplane three measurement points coincidence, finish space error compensation or calibrating.
Claims (3)
1. three-coordinate calibrating and measuring instrument that utilizes the three-dimensional coordinates measurement machine observe and control system, it is characterized in that: use four jiaos of rotating rhombus geometrical bodies, place and examined the three-coordinate space, make the step pitch measurement of coordinates, utilize the rhombus geometric properties, indicating value to angular vertex relative motion location, provide serial orthogonal plane coordinate system being examined the stable length standard of space distribution with one-dimensional measurement precision, obtain coordinate true value and error vector that n coordinate space point position and sphere 2n point position, a center distribute, after 21 errors in space are traced to the source, finish in accordance with regulations with (n/4)
3The coordinate figure of the error vector of the space networks lattice point position rectangle cube distribution of individual expansion and by interpolation and relevant space real-Time Compensation is finally finished the complete compensation and the calibrating by level of resolution of the three-coordinate of each class formation.
2. three-coordinate calibrating and measuring instrument according to claim 1, it is characterized in that: four jiaos of rhombus geometrical body are equipped with on the 60 degree reference center hole conical surfaces of revolving shaft of accurate hinge (2) and respectively are fixed with a precise sphere (1), rhombus limit (3) is connected with accurate hinge (2), four rhombus limits (3) that precise sphere (1) center is determined are isometric, four precise spheres (1) are in same plane, each axis of rotation is parallel, A in four jiaos the precise sphere (1), the accurate hinge (2) of C is connected with guide rail (4), grating scale (5) is installed on the guide rail (4), and guide rail (4) is fixed on the mount pad (6).
3. three-coordinate calibrating and measuring instrument according to claim 1 is characterized in that: the rhombus geometrical body adopts two serial connection combinations, and an optional axis of rotation overlaps and forms, and A, C, G are on same straight line.
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|---|---|---|---|---|
| CN101424525B (en) * | 2007-10-31 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | Detection capability verification device for three-coordinate measuring machine |
| CN103438800B (en) * | 2013-08-29 | 2016-04-06 | 厦门大学 | For the space error calculation method of large-aperture optical element precision detection platform |
| CN107727051B (en) * | 2017-11-28 | 2024-02-13 | 中国工程物理研究院机械制造工艺研究所 | Inversion method straightness measuring device based on six-dimensional adjustment |
| CN108534676B (en) * | 2018-04-20 | 2020-12-29 | 西京学院 | Method for detecting spatial error in measurement space of coordinate measuring machine |
| CN109341471A (en) * | 2018-10-22 | 2019-02-15 | 天津大学 | The identification method of three axis lathe geometric errors detection is realized based on ball row |
| CN109405779A (en) * | 2018-11-20 | 2019-03-01 | 天津大学 | The three coordinate measuring machine error of perpendicularity detection device and method of L-type ball row |
| CN110319746B (en) * | 2019-06-10 | 2022-04-15 | 西安爱德华测量设备股份有限公司 | Measuring method of machine tool external working condition simulator based on automatic machine precision machining |
| CN111060050B (en) * | 2019-12-31 | 2021-10-15 | 广西玉柴机器股份有限公司 | Method for comprehensively verifying detection software of three-coordinate measuring machine |
| CN113712696B (en) * | 2021-08-27 | 2022-12-06 | 广东中科安齿生物科技有限公司 | Finish machining method for planting fixed bridge connector |
| CN115112052B (en) * | 2022-07-13 | 2023-11-24 | 哈尔滨工业大学 | Synchronous monitoring device and compensation method for turntable measurement rotation reference angle pendulum errors |
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2005
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