JP2013032803A - Cylinder device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cylinder device that prevents increase in overall weight and can be portable with excellent handleability.SOLUTION: The cylinder device includes: a cylinder mechanism 1 having a drive means M, a cylinder 1a, and a rod 1b protruding outward from the cylinder 1a, to be extended/retracted axially; a guide mechanism 2 having a cylinder 2a and a shaft 2b movable with respect to the cylinder 2a and parallel to the rod 1b in the cylinder mechanism 1, to move in synchronization with the cylinder mechanism 1; and a connecting means 3 for connecting the cylinder mechanism 1 with the guide mechanism 2. A distal end of the rod 1b in the cylinder mechanism 1 is connected to the distal end of the shaft 2b in the guide mechanism 2, using a connecting member 4. The connecting means 3 has a tip-side frame body 31 formed of a plate body connected to a head end 1d of the cylinder 1a in the cylinder mechanism 1. The tip-side frame body 31 holds the cylinder 2a in the guide mechanism 2.

Description

  The present invention relates to a cylinder device, and more particularly to an improvement of a cylinder device having a cylinder mechanism that extends and contracts in an axial direction.

  As a cylinder device having a cylinder mechanism that expands and contracts in the axial direction, for example, there is a proposal disclosed in Patent Document 1, and in this proposal, the cylinder device is connected to a cylinder mechanism that expands and contracts in the axial direction via a connecting means. The guide mechanism is connected.

  At this time, in the cylinder mechanism, the rod protruding from the cylinder can be moved in and out of the cylinder by driving of the driving means held by the connecting means, and in the guide mechanism, the cylinder connected to the connecting means. The axis can be moved with respect to.

  The rod entry / exit direction in the cylinder mechanism and the shaft moving direction in the guide mechanism are parallel, and the tip end of the rod and the tip end of the shaft are integrally connected by a connecting member.

  Therefore, in the proposal disclosed in Patent Document 1, the forward and backward movement of the rod in the cylinder mechanism relative to the cylinder, that is, the expansion and contraction operation in the cylinder mechanism is ensured by the function of the guide mechanism with respect to the lateral force.

JP 2004-28169 A

  However, in the proposal disclosed in Patent Document 1 described above, there is basically no problem in that the extension and contraction operation in the cylinder mechanism can be ensured by the guide mechanism, but it may be pointed out that the weight in the cylinder device is increased. There is sex.

  That is, as disclosed in Patent Document 1 described above, the connecting means is formed in a block shape, and it is considered that the weight of the connecting means is increased.

  That is, the connecting means is connected in parallel to the cylinder mechanism and integrally connects the driving means for extending and retracting the cylinder mechanism and the guide mechanism.

  Further, in this connection means, a drive shaft in the drive means, a gear mechanism connected to the drive shaft, a nut meshing with the gear mechanism, that is, a ball screw structure constituting a cylinder mechanism, and a rod A nut that is externally fitted to the screw shaft that is formed is housed together with the screw shaft.

  Therefore, the connecting means does not cause distortion such as deformation between the screw shaft and the nut due to an external force acting on the connecting means, in particular, a lateral force that is a force transverse to the screw shaft that is a rod. In other words, it is made strong so as not to be easily deformed.

  Not only the guide mechanism but also the parallel driving means are integrally connected to the connecting means, so that the connecting means is formed robustly and increases the weight. Become a trend.

  As a result, the overall weight of the cylinder device is increased. For example, when the cylinder device is set to be portable, there is a concern that the transportability and the handleability may be deteriorated.

  The present invention was devised in view of the above-described circumstances, and can provide a cylinder device that can avoid an increase in the overall weight and does not deteriorate the transportability and handleability when set to a portable type, for example. With the goal.

  In order to achieve the above-described object, the configuration of the cylinder device according to the present invention includes a driving means, a cylinder mechanism connected in series to the driving means and extending and contracting in the axial direction by the driving of the driving means, and the operation of the cylinder mechanism. And a connecting means for connecting the cylinder mechanism and the guide mechanism. The cylinder mechanism has a cylinder and a rod protruding outward from the cylinder. The guide mechanism includes a cylinder and a shaft that is movable with respect to the cylinder and is parallel to the rod in the cylinder mechanism. The tip of the rod in the cylinder mechanism and the tip of the shaft in the guide mechanism In the cylinder device in which the portion is connected by a connecting member, the connecting means is connected to a head end portion of the cylinder in the cylinder mechanism. Have a tip-side frame body made of Jo body, the tip-side frame body and formed by holding the cylinder in the guide mechanism.

  Therefore, in the cylinder device according to the present invention, the connecting means for connecting the cylinder mechanism and the guide mechanism has a distal end side frame body made of a plate-like body connected to the head end portion of the cylinder in the cylinder mechanism, Since the cylinder in the guide mechanism is integrally held by the distal end side frame body, the weight of the connecting means can be reduced as compared with the case where the connecting means is formed in a block shape.

  As a result, according to the cylinder device of the present invention, the connecting means can be reduced in weight.

  This makes it possible to reduce the overall weight of the cylinder device. For example, when it is set to a portable type, it is possible to improve transportability and handleability.

It is the schematic which shows the cylinder apparatus by this invention. It is a figure which shows an example in which the cylinder mechanism which comprises a cylinder apparatus consists of an electric actuator. It is a partial side view which shows the cylinder apparatus by one Embodiment of this invention. It is a longitudinal cross-sectional view of the cylinder apparatus shown by the XX line position in FIG. It is a partial side view which shows the cylinder apparatus by other embodiment of this invention. It is a longitudinal cross-sectional view of the cylinder apparatus shown by the YY line position in FIG.

  Hereinafter, the present invention will be described based on the illustrated embodiment. As shown in FIG. 1, a cylinder device C according to the present invention includes a cylinder mechanism 1, a guide mechanism 2, a connecting means 3, and a connecting member. Although not shown, for example, it is used as an excitation source in a vibration testing machine.

  And in this cylinder apparatus C, after connecting the guide mechanism 2 to the cylinder mechanism 1 with the connection means 3, it connects the front-end | tip part of the rod 1b in the cylinder mechanism 1, and the front-end | tip part of the axis | shaft 2b in the guide mechanism 2. 4 is formed by connecting.

  In the cylinder device C, the connecting member 4 is, for example, a device under test (not shown) in a vibration test, or as shown by a two-dot chain diagram on the right side in FIG. It is connected to a connecting member J such as a clamping means for holding the device under test.

  Further, in this cylinder device C, the expansion / contraction operation direction in the cylinder mechanism 1 which is the left-right direction in FIG. 1, that is, the direction in which the rod 1b enters and exits the cylinder 1a in the cylinder mechanism 1 is the up-down direction, or the left-right direction. Therefore, the expansion / contraction operation direction of the cylinder device C may be inclined.

  In the cylinder device C, although not shown, for example, the cylinder 1a in the cylinder mechanism 1 is provided with wheels and rollers, and the cylinder device C can be transferred using the wheels and rollers. Alternatively, the wheel or roller may be removed or stored when used, and the cylinder device C may be fixed to a fixing surface such as a base surface or a floor surface in a fixed state, and a handle may be provided on the cylinder 1a. It may be a portable type that is provided and enables the cylinder device C to be conveyed by human power using the handle.

  Under this premise, in this cylinder device C, the cylinder mechanism 1 has a cylinder 1a and a rod 1b, and expands and contracts in the axial direction, that is, in the direction in which the rod 1b enters and exits the cylinder 1a. Configured as follows.

  In the present invention, the cylinder mechanism 1 may be formed in an arbitrary structure as long as it is configured to extend and contract in the axial direction, and although not shown, a working fluid represented by hydraulic oil is used. It may be formed into a fluid pressure cylinder structure that expands and contracts by using it, or may be formed into a screw cylinder structure having a screw shaft as the rod 1b or having a screw shaft as the rod 1b, although not shown in the figure.

  Further, in the present invention, considering that the cylinder device C is used as an excitation source in a portable vibration tester, for example, considering that it is easy to secure a so-called power supply for the cylinder mechanism 1. In this case, the cylinder mechanism 1 is preferably formed in a ball screw structure.

  In the case where the cylinder mechanism 1 is composed of an electric actuator, equipment such as a fluid pressure supply / discharge source is not required as compared with the case where the cylinder mechanism 1 is formed as a fluid pressure cylinder that expands and contracts using fluid pressure. This is advantageous in that the configuration of the entire apparatus C can be simplified.

  When the cylinder mechanism is formed in a ball screw structure, there is an advantage that the rod 1b can be expanded and contracted without a backlash with respect to the cylinder 1a and the rotational torque is increased.

  FIG. 2 shows an example of a cylinder mechanism 1 composed of an electric actuator formed in a ball screw structure. From the point shown in FIG. 2, the cylinder mechanism 1 has a servo motor M as a driving means in series.

  The servo motor M is held in a fixed state in which rotation with respect to the case portion 1c is prevented in a case portion 1c connected in series to the rear end which is the left end in the drawing of the cylinder 1a.

  An output shaft M1 that is a rotation shaft of the servo motor M is connected in series to a screw shaft 11 constituting the cylinder mechanism 1.

  As described above, when the servo motor M is provided in series with a so-called cylinder, the driving means is provided in parallel with the cylinder as described in the proposal disclosed in Patent Document 1 described later. This is advantageous in that it is possible not to unnecessarily increase the mass of the connecting means 3 of the present invention.

  That is, as described above, in the proposal disclosed in Patent Document 1, since the driving means is arranged in parallel with the cylinder, the guide mechanism is integrated in the connecting means for integrally connecting the driving means to the cylinder. In some cases, it is connected to the cylinder, and it is formed to be strong and unnecessarily increases the mass.

  On the other hand, in the present invention, the driving means is not connected to the connecting means 3 described later, but is connected in series to the cylinder, so that the connecting means 3 is formed to be strong, for example, formed in a box shape. Therefore, an increase in mass can be avoided.

  In the cylinder mechanism 1, the servo motor M freely controls so-called forward rotation and reverse rotation by control from a control means (not shown), but when other drive means replacing the servo motor M is selected, Needless to say, the drive means can freely rotate the screw shaft 11 in the forward and reverse directions.

  On the other hand, in the cylinder mechanism 1, a nut 12 is screwed on the screw shaft 11, and the nut 12 is held on the cylinder 1a side in a state in which rotation with respect to the cylinder 1a is prevented. It can be moved in the axial direction.

  Incidentally, since the nut 12 is held on the cylinder 1a side in a state in which the rotation with respect to the cylinder 1a is prevented, in the cylinder mechanism 1, the cylinder 1a does not have a circular inner periphery, for example. It is good to form so that it may become easy to prevent rotation with respect to the cylinder 1a of the nut 12. FIG.

  In the illustrated case, the cylinder 1a is formed of a rectangular cylinder, and although not illustrated, the inner periphery is formed in a square shape with rounded corners, and the rotation prevention of the nut 12 can be effectively realized. I am doing so.

  Also, as shown in the figure, since the cylinder 1a is formed of a rectangular cylinder, it is possible to avoid in advance the occurrence of problems such as the cylinder mechanism 1 rolling unnecessarily when the cylinder mechanism 1 is placed on an appropriate horizontal plane, for example.

  Although the rotation prevention of the nut 12 with respect to the cylinder 1a is not shown, a so-called deformed fitting structure may be used.

  Returning, in this cylinder mechanism 1, the rod 1b is connected to the nut 12. Therefore, the rod 1b allows the screw shaft 11 to be inserted into and removed from the shaft core portion.

  At this time, although not shown, the nut 12 has a plurality of balls made of steel balls that are fitted into recesses formed on the inner periphery and are fitted into thread grooves 11 a formed on the screw shaft 11.

  Therefore, in the ball screw structure including the screw shaft 11, the nut 12, and the ball, it is possible to suppress the so-called rattling between the ball and the thread groove 11a and between the ball and the recess as much as possible. Therefore, smooth movement of the nut 12 with respect to the screw shaft 11 without backlash can be realized.

  Since smooth movement of the nut 12 without backlash is realized, smooth movement without backlash of the rod 1b with respect to the cylinder 1a becomes possible. The rod 1b is driven by a servo motor M as driving means in the drawing. Thus, the cylinder 1a is movable in the axial direction of the cylinder 1a which is the left and right direction without rattling in the lateral direction which crosses the axial direction.

  At this time, the tip side of the rod 1b which is the right side in the drawing passes through the shaft core of the head end 1d, which is the open end of the cylinder 1a, and protrudes outside the cylinder 1a. Therefore, the head end 1d of the cylinder 1a also serves as a rod guide.

  Note that the bottom end 1e of the cylinder 1a allows the output shaft M1 of the servo motor M to pass through the shaft core, and thus functions as a bearing for the output shaft M1.

  The guide mechanism 2 operates in synchronism with the expansion / contraction operation of the cylinder mechanism 1 along the operation direction of the cylinder mechanism 1, that is, the axial direction of the cylinder mechanism 1, and has a basic function as a rod in the cylinder mechanism 1. Ensuring that the 1b moves in and out of the cylinder 1a, that is, the expansion and contraction operation in the cylinder mechanism 1.

  In other words, for example, when an external force in a direction crossing the axial direction of the rod 1b, that is, a lateral force acts on the rod 1b in the cylinder mechanism 1, the lateral force is not received only by the cylinder mechanism 1, but the guide mechanism 2 Receive at.

  Thereby, when the cylinder mechanism 1 is deformed due to the lateral force, particularly when the cylinder mechanism 1 is formed in a ball screw structure, no distortion occurs between the screw shaft 11 and the nut 12, and the screw shaft The rolling of a ball (not shown) between the nut 11 and the nut 12 is not hindered, and it is possible to permanently ensure the smooth expansion / contraction operation of the cylinder mechanism 1 without backlash in the lateral direction.

  Accordingly, providing the guide mechanism 2 in the cylinder mechanism 1 causes the guide mechanism 2 to partially bear the bending rigidity of the cylinder mechanism 1. From this, for example, the thickness of the cylinder 1 a is reduced. Thus, the mass of the cylinder mechanism 1 can be reduced by reducing the mass.

  From the above, as shown in FIG. 1 or FIG. 3, the guide mechanism 2 has a cylinder 2a and a shaft 2b that protrudes outward from the cylinder 2a in parallel with the rod 1b in the cylinder mechanism 1. For example, when the lateral force described above is applied to the shaft 2b, a so-called play is not generated in the lateral direction, which is the direction in which the lateral force is applied.

  In order not to generate this lateral play, the guide mechanism 2 may be composed of, for example, a general-purpose linear guide structure, but in the linear guide structure, a so-called lateral direction that is orthogonal to the axial direction that is the operation direction. It is well-known that it is difficult to eliminate or eliminate the backlash.

  Therefore, in the present invention, the guide mechanism 2 has a ball spline structure.

  Although this ball spline structure is not illustrated, in principle, a spline shaft extending in the axial direction, a cylindrical body fitted on the spline shaft, an axial groove provided on the outer periphery of the spline shaft, and a cylindrical body And a ball made of a steel ball fitted in the recess and the groove.

  For this reason, the guide mechanism 2 according to the present invention also includes the cylinder 2a that is a cylinder, the axis 2b that is a spline shaft, and a ball (not shown) made of a steel ball.

  Even in the guide mechanism 2, although not shown, one or a plurality of grooves are provided in the axial direction on the outer periphery of the shaft 2b, and the ball is inserted into the grooves.

  Even in this guide mechanism 2, although not shown, the inner periphery of the cylinder 2a has a recess for inserting the ball inserted into the groove of the shaft 2b, and the ball rolls between the cylinder 2a and the shaft 2b. Thus, the movement of the shaft 2b in the axial direction relative to the tube 2a is ensured.

  At this time, there is almost no so-called play between the concave portion provided on the inner periphery of the cylinder 2a and the ball and between the groove provided on the shaft 2b and the ball.

  Therefore, in this guide mechanism 2, even if an external force, that is, a lateral force acts in a direction crossing the operation direction of the guide mechanism 2, there is no play between the shaft 2b and the cylinder 2a. The smooth movement of the shaft 2b with respect to the cylinder 2a can be realized without occurrence.

  On the other hand, in the cylinder device C of the present invention, the cylinder mechanism 1 and the guide mechanism 2 formed as described above are integrally connected by the connecting means 3.

  That is, as described above, in the illustrated embodiment, the cylinder device C according to the present invention is configured such that when the cylinder mechanism 1 is formed in the ball screw structure, the guide mechanism 2 is formed in the ball spline structure. Therefore, it is possible to keep the rod 1b in and out of the cylinder mechanism 1 in the same direction as the moving direction of the shaft 2b in the guide mechanism 2.

  Therefore, the cylinder mechanism 1 and the guide mechanism 2 are integrally formed so as not to cause a so-called deviation between the direction in which the rod 1b enters and exits in the cylinder mechanism 1 always in the same direction and the movement direction of the shaft 2b in the guide mechanism 2. It is important to connect, and in this invention, the connecting means 3 plays the role.

  From this, the connecting means 3 may be formed in an arbitrary structure as long as the cylinder mechanism 1 and the guide mechanism 2 are integrally connected. However, as the mass thereof increases, the cylinder device C When the entire weight is increased and the cylinder device C is set to be portable, it is not suitable to increase the weight and form the portable device.

  Therefore, in the present invention, the connecting means 3 has the distal end side frame body 31 formed of a plate-like body so that the cylinder mechanism 1 and the guide mechanism 2 can be integrally connected with the required rigidity. Suppose that

  That is, in the cylinder device C according to the present invention, the connecting means 3 is, as shown in FIGS. 3 and 4, the front end side frame made of a plate-like body connected to the head end 1 d of the cylinder 1 a in the cylinder mechanism 1. The distal end side frame body 31 integrally holds the cylinder 2 a in the guide mechanism 2.

  At this time, the tip side frame body 31 is connected to the end of the cylinder 1a in the cylinder mechanism 1, that is, the head end 1d of the cylinder 1a, and the plurality of hexagon socket bolts 32 are provided. By the use of.

  3 and FIG. 4 and FIG. 5 and FIG. 6, the head end 1 d is connected to the cylinder 1 a by using a bolt and nut N.

  When the upper side portion of the front end side frame body 31 is connected to the head end portion 1d of the cylinder 1a by using the plurality of hexagon socket head cap bolts 32, the upper side portion of the front end side frame body 31 is connected to the cylinder 1a. Therefore, the cylinder 2a in the guide mechanism 2 connected to the distal end side frame body 31 can be in the same state as if directly connected to the cylinder 1a.

  From this, it can be said that the distal end side frame body 31 constituting the connecting means 3 may be integrally provided in advance with the cylinder 1a in the cylinder mechanism 1 and the cylinder 2a in the guide mechanism 2 may be connected.

  However, if the distal end side frame body 31 constituting the connecting means 3 is provided integrally with the cylinder 1a in the cylinder mechanism 1 in advance, the cylinder mechanism 1 is formed, leading to problems such as poor assembling. Is concerned.

  Therefore, the distal end side frame body 31 constituting the connecting means 3 is preferably composed of a plate-like body separated from the cylinder 1a in the cylinder mechanism 1 and the cylinder 2a in the guide mechanism 2.

  Returning, the tip side frame body 31 is connected to the cylinder 2 a in the guide mechanism 2 at the lower side.

  That is, as shown in the figure, the lower side portion of the distal end side frame body 31 is not so long as to cover the entire length of the cylinder 2a, but is formed thicker than the upper side portion so as to hold the cylinder 2a. If so.

  Thus, in the front end side frame body 31, the lower side portion is formed thicker than the upper side portion and connects the guide mechanism 2, so that the guide mechanism 2 is not inclined with respect to the connecting means 3. As a result, the shaft 2b in the guide mechanism 2 can be reliably maintained parallel to the rod 1b in the cylinder mechanism 1.

  The guide mechanism 2 is connected to the lower side portion of the distal end side frame body 31 which is the connecting means 3 of the cylinder 2a. The flange portion 2c provided integrally with the cylinder 2a is connected to a plurality of hexagon socket bolts (not shown). However, instead of this, the cylinder 2a may be connected to the lower side portion of the front end side frame body 31 by being screwed so as to penetrate the wall thickness. good.

  In the case of this screwing, it is necessary to form a so-called thread on the lower side portion of the cylinder 2a and the distal end side frame body 31, but since the use of a plurality of hexagon socket head bolts can be abolished, the number of parts is reduced. This is advantageous in that it can be reduced.

  And the connection means 3 in this invention only connects the cylinder 1a in the cylinder mechanism 1 and the cylinder 2a in the guide mechanism 2, and it expands and contracts the cylinder to the connection means as compared with the proposal disclosed in Patent Document 1 described above. Since the driving means to be operated is not connected, it is not necessary to form a so-called sturdy structure, the structure can be simplified, and the weight of the connecting means 3 can be reduced.

  As described above, in the cylinder mechanism 1 and the guide mechanism 2 that are integrally connected by the connecting means 3, the tip of the rod 1b in the cylinder mechanism 1 and the tip of the shaft 2b in the guide mechanism 2 are connected members. 4, the connecting member 4 is made of a plate-like body.

  That is, the connecting member 4 firstly maintains a constant distance between the tip of the rod 1b in the cylinder mechanism 1 and the tip of the shaft 2b in the guide mechanism 2, and secondly, Allows concatenation.

  The connecting member 4 keeps the distance between the tip of the rod 1b in the cylinder mechanism 1 and the tip of the shaft 2b in the guide mechanism 2 constant, so that the rod 1b in the cylinder mechanism 1 and the shaft 2b in the guide mechanism 2 The parallel state between them is maintained.

  By maintaining the parallel state between the rod 1b in the cylinder mechanism 1 and the shaft 2b in the guide mechanism 2 by the connecting member 4, it is ensured that the rod 1b in the cylinder mechanism 1 can enter and exit the cylinder 1a without any trouble. An unobstructed movement of the shaft 2b with respect to the cylinder 2a in the mechanism 2 is ensured.

  The connecting member 4 enables connection of the device under test so that the cylinder device C can be used for a testing machine, that is, a vibration testing machine.

  The connecting member 4 is connected to the shaft 2b in the guide mechanism 2 by a hexagon socket head bolt 41 and is similarly connected to the rod 1b in the cylinder mechanism 1 by a hexagon socket head bolt 42.

  Moreover, although not shown in figure, about said connection member 4, this may replace with a to-be-tested body, and may replace with connection members J (refer FIG. 3), such as a clamp means.

  5 and 6 show an embodiment in which the connecting means 3 according to the present invention includes a rear end side support body 33 in addition to the front end side frame body 31, and other configurations are as follows. The configuration is the same as that of the above-described embodiment.

  Therefore, in the following description, where the configuration is the same as that of the above-described embodiment, only the same reference numerals are given in the drawing, and the description is omitted.

  That is, in this embodiment, the rear end side support body 33 is provided on the outer periphery of the cylinder 1 a in the cylinder mechanism 1, and the rear end side support body 33 is connected to the cylinder 2 a in the guide mechanism 2 together with the front end side frame body 31. The cylinder mechanism 1 is held by a cylinder 1a.

  At this time, the rear end support 33 is between itself and the cylinder 1a in the cylinder mechanism 1 on the so-called upper side, and between the cylinder 1a in the cylinder mechanism 1 and the cylinder 2a in the guide mechanism 2 on the so-called lower side. When the axial direction of the rod 1b in the cylinder mechanism 1 and the axial direction of the shaft 2b in the guide mechanism 2 are not parallel to each other, the adjustment shim 34 is either It is supposed to be arranged selectively on one side or both above and below.

  On the other hand, the rear end side support body 33 suspends the upper body 33a formed and disposed in a gate shape in front view so as to straddle the cylinder 1a in the cylinder mechanism 1 and the cylinder 2a in the guide mechanism 2 from the side. And a lower body 33b.

  At this time, in the illustrated embodiment, it is assumed that the lower body 33b is welded to the cylinder 2b in the guide mechanism 2 (indicated by a symbol M in the drawing). In short, the cylinder 2b in the guide mechanism 2 is used in the cylinder mechanism 1. Any configuration that suffices to be brought into close contact with the cylinder 1a is sufficient, and as long as it is possible, any configuration can be selected, such as forming the lower body 33 integrally with the cylinder 2a in the guide mechanism 2.

  And in this rear end side support body 33, the lower body 33b is suspended by the upper body 33a by the screwing of the volt | bolt 35 penetrated by the upper body 33a.

  In the case of this embodiment, the cylinder 1a of the cylinder mechanism 1 and the cylinder of the guide mechanism 2 are connected by the front end side frame body 31 on the so-called front end side, and the cylinder in the guide mechanism 2 is connected on the so-called rear end side. Since the cylinder mechanism 1 is supported by the rear end side support body 33 on the cylinder 1a, the fixability of the guide mechanism 2 to the cylinder mechanism 1 is improved as compared with the case where the guide mechanism 2 is connected only by the front end side frame body 31. In addition, there is an advantage that a stable posture can be obtained when the image is fixed.

  As described above, in the cylinder device C, when the cylinder mechanism 1 is composed of an electric actuator, it is formed in a ball screw structure. When attempting to vibrate vibrations of a large frequency, it is preferable to use the above-described ball screw structure, that is, a direct-acting electric actuator, but it is desirable to vibrate the DUT to vibrations of a frequency with a small amplitude at a high speed. In this case, although not shown, the cylinder mechanism 1 is preferably formed in an electromagnetic type.

  Even if the cylinder mechanism 1 is formed as a direct acting type or an electromagnetic type, the cylinder mechanism 1 is connected to the guide mechanism 2 via the connecting member 3 so that the predetermined expansion and contraction operation of the cylinder mechanism 1 is smooth. Will be realized.

DESCRIPTION OF SYMBOLS 1 Cylinder mechanism 1a Cylinder 1b Rod 1c Case part 1d Head end part 1e Bottom end part 2 Guide mechanism 2a Cylinder 2b Shaft 2c Flange part 3 Connection means 4 Connecting member 11 Screw shaft 11a Screw groove 12 Nut 31 Tip side frame body 32, 41, 42 Hexagon socket head cap screw 33 Rear end support 33a Upper body 33b Lower body 34 Adjustment shim 35 Bolt C Cylinder device J Connecting member M Servo motor M1 output shaft N Bolt nut

Claims (6)

A driving mechanism; a cylinder mechanism connected in series to the driving mechanism and extending and contracting in the axial direction by driving of the driving mechanism; a guide mechanism that operates in synchronization with the operation of the cylinder mechanism; the cylinder mechanism; Connecting means for connecting to the guide mechanism, the cylinder mechanism having a cylinder and a rod projecting outward from the cylinder, the guide mechanism moving relative to the cylinder A cylinder device having a shaft parallel to the rod in the cylinder mechanism and having the tip of the rod in the cylinder mechanism and the tip of the shaft in the guide mechanism connected by a connecting member In
The connecting means has a distal end side frame body made of a plate-like body connected to a head end portion of the cylinder in the cylinder mechanism, and the distal end side frame body holds the cylinder in the guide mechanism. Cylinder device characterized by   The cylinder device according to claim 1, wherein the guide mechanism has a ball spline structure having a spline shaft that moves relative to the cylinder in parallel with the rod in the cylinder mechanism.   3. The cylinder according to claim 1, wherein the drive unit is connected in series to the cylinder mechanism, and the cylinder mechanism is extended and retracted to advance and retract the rod with respect to the cylinder by driving the drive unit. apparatus.   2. The ball screw structure according to claim 1, wherein the cylinder mechanism includes a screw shaft that is the rod, and a nut that is externally fitted to the screw shaft via a plurality of balls and that is coupled to the cylinder side of the cylinder mechanism. The cylinder device according to claim 2 or claim 3.   A rear end side frame body is provided on an outer periphery of the cylinder in the cylinder mechanism, and the rear end side frame body holds the cylinder in the guide mechanism together with the front end side frame body. The cylinder device according to claim 3 or claim 4.   6. The cylinder device according to claim 1, wherein an adjustment shim is disposed between the cylinder in the cylinder mechanism and the cylinder in the guide mechanism. .

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