JP2016084894A - Linear motion table device - Google Patents

Linear motion table device Download PDF

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JP2016084894A
JP2016084894A JP2014218872A JP2014218872A JP2016084894A JP 2016084894 A JP2016084894 A JP 2016084894A JP 2014218872 A JP2014218872 A JP 2014218872A JP 2014218872 A JP2014218872 A JP 2014218872A JP 2016084894 A JP2016084894 A JP 2016084894A
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screw shaft
bearing
feed screw
base
support portion
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和史 山本
Kazufumi Yamamoto
和史 山本
寛章 有住
Hiroaki Arisumi
寛章 有住
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NSK Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a linear motion table device which can be reduced in a manufacturing cost and size.SOLUTION: This device linearly moves a table on a base via a linear guide by the rotation of a feed screw shaft which is transmitted by a drive force of a drive motor. The device comprises: a drive nut and a fixed bracket which are screwed to a right screw part; a driven nut which is screwed to a left screw part; a first moving bracket which fixes the driven nut to the table, is engaged with the linear guide, and moves along the feed screw shaft; an intermediate support part; and a screw shaft support part. The intermediate support part and the screw shaft support part are different in structures, and arranged on the base. Then, a bearing is arranged between a bearing holding hole formed at a second moving bracket which moves along the feed screw shaft, and an intermediate cylinder part which penetrates the bearing holding hole is arranged at the intermediate support part. The bearing is fixed to the bearing holding hole by a bearing fixing member which fits a pair of tapering parts to the axial direction, and performs the diameter expansion of an outside diameter cylinder face and the diameter contraction of an inside diameter cylinder face.SELECTED DRAWING: Figure 1

Description

本発明は、工作機械や半導体製造装置などで用いられる直動テーブル装置に関する。   The present invention relates to a linear motion table device used in a machine tool, a semiconductor manufacturing apparatus, or the like.

工作機械や半導体製造装置などでは、ワークあるいは加工ツール等を所定位置に搬送するユニットとして、例えば、図5に示す直動テーブル装置が使用されている。この装置は、基台1の長手方向の両端に配置した軸受2a,2bに、ねじ軸3の長手方向両端が回転自在に支持され、ねじ軸3の外周にナット4が螺合している。基台1上には、紙面の奥行き方向に平行に一対のテーブルガイド5bが長手方向に延在して設けられおり、これら一対のテーブルガイド5bに、移動テーブル6に固定したテーブル取付部材6a,6bが係合している。移動テーブル6にはナットハウジング7が固定されており、このナットハウジング7に前述したナット4が回転不能に保持されている。そして、基台1上に固定したモータ8の回転駆動力がねじ軸3に伝達されると、ねじ軸3の回転力がナット4を介して移動テーブル6に直線駆動力として伝達され、移動テーブル6は、テーブルガイド5a,5bに支持されながら基台1の長手方向に移動するようになっている。   In machine tools, semiconductor manufacturing apparatuses, etc., for example, a linear motion table apparatus shown in FIG. In this device, both ends in the longitudinal direction of the screw shaft 3 are rotatably supported by bearings 2 a and 2 b disposed at both ends in the longitudinal direction of the base 1, and a nut 4 is screwed onto the outer periphery of the screw shaft 3. On the base 1, a pair of table guides 5 b are provided extending in the longitudinal direction in parallel with the depth direction of the paper surface. A table mounting member 6 a fixed to the movable table 6 is attached to the pair of table guides 5 b. 6b is engaged. A nut housing 7 is fixed to the moving table 6, and the nut 4 described above is held in the nut housing 7 so as not to rotate. Then, when the rotational driving force of the motor 8 fixed on the base 1 is transmitted to the screw shaft 3, the rotational force of the screw shaft 3 is transmitted as a linear driving force to the moving table 6 via the nut 4, and the moving table. 6 is adapted to move in the longitudinal direction of the base 1 while being supported by the table guides 5a and 5b.

この図5の直動テーブル装置は、高速で回転したねじ軸3の回転数がラジアル方向固有振動数(以下、固有振動数と称する)に近づくと、ねじ軸3が、回転振れ回り力により励振され、共振を起こして大きな振幅で激しく振動し、高速送りができなくなるおそれがある。
このため、ねじ軸の中間部を支持する中間サポートを設けて取付け間距離を短くし、共振を起こさないように固有振動数を高くすることで、高速送りを可能にする技術が知られている(例えば特許文献1)。
In the linear motion table device of FIG. 5, when the rotational speed of the screw shaft 3 rotated at a high speed approaches the radial natural frequency (hereinafter referred to as the natural frequency), the screw shaft 3 is excited by the rotational whirling force. Then, there is a possibility that resonance will occur and it vibrates vigorously with a large amplitude, making it impossible to feed at high speed.
For this reason, a technique is known that enables high-speed feeding by providing an intermediate support that supports the middle part of the screw shaft, shortening the distance between attachments, and increasing the natural frequency so as not to cause resonance. (For example, patent document 1).

この特許文献1の直動テーブル装置は、図6(a)、(b)に示すように、一端側に右ねじ溝からなる右ねじ部及び左ねじ溝からなる左ねじ部の一方10aが形成され、他端側に右ねじ部及び左ねじ部の他方10bが形成されているねじ軸10と、このねじ軸10の右ねじ部及び左ねじ部の一方10aに螺合している第1ナット11と、この第1ナット11を基台12に固定する第1ナットブラケット13と、ねじ軸10の右ねじ部及び左ねじ部の他方10bに螺合している第2ナット14と、第2ナット14を移動テーブル15に固定する第2ナットブラケット16と、ねじ軸10に回転駆動力を伝達する駆動モータ17と、ねじ軸10の長手方向の両端及び中央部を回転自在に支持するボールねじサポート部18とを備えている。   As shown in FIGS. 6 (a) and 6 (b), the linear motion table device of Patent Document 1 has one end 10a, which is a right-hand thread portion made of a right-hand thread groove and a left-hand thread portion made of a left-hand thread groove, on one end side. And a first nut that is screwed into one of the right and left screw portions of the screw shaft 10 and the other one of the right and left screw portions 10b. 11, a first nut bracket 13 that fixes the first nut 11 to the base 12, a second nut 14 that is screwed into the other 10 b of the right screw portion and the left screw portion of the screw shaft 10, and a second A second nut bracket 16 that fixes the nut 14 to the moving table 15, a drive motor 17 that transmits a rotational driving force to the screw shaft 10, and a ball screw that rotatably supports both ends and a center portion of the screw shaft 10 in the longitudinal direction. And a support unit 18.

ボールねじサポート部18は、基台12に設けたリニアガイド19に支持されながら基台13の長手方向に移動する直方体形状の部材であり、このボールねじサポート部18の上部には、移動テーブル15を長手方向に移動させるリニアガイド20が設けられている。また、ボールねじサポート部18には、ねじ軸10の右ねじ部及び左ねじ部の他方10b側の端部を回転自在に支持する軸受21と、ねじ軸10の右ねじ部及び左ねじ部の一方10a側の端部を回転自在に支持する軸受22と、ねじ軸10の長手方向の中央部のねじが形成されていない外周10cを回転自在に支持する中間サポートとしての軸受23とが配置されている。   The ball screw support portion 18 is a rectangular parallelepiped member that moves in the longitudinal direction of the base 13 while being supported by a linear guide 19 provided on the base 12, and a moving table 15 is disposed above the ball screw support portion 18. A linear guide 20 is provided for moving the guide in the longitudinal direction. Further, the ball screw support portion 18 includes a bearing 21 that rotatably supports an end portion of the right screw portion and the left screw portion of the screw shaft 10 on the other 10b side, and a right screw portion and a left screw portion of the screw shaft 10. On the other hand, a bearing 22 that rotatably supports the end portion on the side of 10a and a bearing 23 as an intermediate support that rotatably supports the outer periphery 10c that is not formed with a screw at the central portion in the longitudinal direction of the screw shaft 10 are disposed. ing.

この図6(a)、(b)の装置によると、駆動モータ17の回転駆動力がねじ軸10に伝達されると、ボールねじサポート部18の左方(或いは右方)移動と同時に移動テーブル15も左方(或いは右方)に移動し、図5で示した装置と比較して2倍のストロークで高速送りを行う。そして、ねじ軸10の長手方向中央部の外周10cを中間サポートとしての軸受23が支持しているので、共振を起こさない程度に固有振動数を高くすることができる。   6 (a) and 6 (b), when the rotational driving force of the drive motor 17 is transmitted to the screw shaft 10, the moving table is moved simultaneously with the left (or right) movement of the ball screw support portion 18. 15 also moves to the left (or right) and performs high-speed feed with a stroke twice that of the apparatus shown in FIG. And since the bearing 23 as an intermediate support is supporting the outer periphery 10c of the longitudinal center part of the screw shaft 10, the natural frequency can be increased to such an extent that resonance does not occur.

特開2003−127044号公報JP 2003-127044 A

ところで、図6(a)、(b)で示した直動テーブル装置の駆動モータ17は、重量が大きいボールねじサポート部18を移動させるので大きな駆動トルクを必要とする。そのため、大きな駆動トルクを発生する大型の駆動モータを備えなければならず、製造コストが増大し、大型の装置となるおそれがある。
そこで、本発明は、上記従来例の未解決の課題に着目してなされたものであり、製造コストの低減化及び装置の小型化を図ることができる直動テーブル装置を提供することを目的としている。
Incidentally, the drive motor 17 of the linear motion table device shown in FIGS. 6A and 6B requires a large drive torque because the ball screw support portion 18 having a large weight is moved. Therefore, a large drive motor that generates a large drive torque must be provided, which increases manufacturing costs and may result in a large apparatus.
Accordingly, the present invention has been made paying attention to the unsolved problems of the above-described conventional example, and an object thereof is to provide a linear motion table device capable of reducing the manufacturing cost and downsizing the device. Yes.

上記目的を達成するために、直動テーブル装置のある態様は、基台上にリニアガイドを介して設けたテーブルを、駆動モータの駆動力伝達による送りねじ軸の回転により直線移動させる直動テーブル装置であって、上記送りねじ軸を、軸方向中央部の中間円筒部を境として一端側に右ねじ溝を有する右ねじ部を形成し、他端側に左ねじ溝を有する左ねじ部の他方を形成した軸とし、上記右ねじ部及び上記左ねじ部の一方に螺合する駆動ナットと、この駆動ナットを上記基台上に固定する固定ブラケットと、上記右ねじ部及び上記左ねじ部の他方に螺合する従動ナットと、この従動ナットをテーブルに固定し、上記リニアガイドに係合して前送りねじ軸に沿って移動する第1移動ブラケットと、上記送りねじ軸の中間円筒部を回転自在に支持し、前送りねじ軸に沿って上記基台上に移動自在に設けた中間支持部と、上記送りねじ軸の両端部を回転自在に支持し、前送りねじ軸に沿って上記基台上に移動自在に設けたねじ軸支持部と、を備え、上記中間支持部及び上記ねじ軸支持部は、互いに別体構造で上記基台上に設けられている。また、上記中間支持部は、上記送りねじ軸に沿って移動する第2移動ブラケットに設けた軸受保持穴と、前記軸受保持穴と前記軸受との間に介装される軸受固定部材と、を備え、
前記軸受は、複数の内輪と複数の外輪と前記複数の内輪及び前記複数の外輪との間に転動自在に配置した複数の転動体とで構成されており、
前記軸受固定部材は、前記軸受保持穴の内径面に嵌合する外径円筒面と、前記軸受の外輪外径面に嵌合する内径円筒面を有し、且つ、相互に当接するテーパ面をそれぞれ備えた一対のテーパリングからなるテーパーリング部材より構成され、前記テーパーリング部材を互いに軸方向に嵌入して前記軸受固定部材の前記外径円筒面の拡径及び前記内径円筒面の縮径を行うことにより、前記軸受保持穴に前記軸受を固定する。
In order to achieve the above object, one aspect of the linear motion table device is a linear motion table in which a table provided on a base via a linear guide is linearly moved by rotation of a feed screw shaft by driving force transmission of a drive motor. The feed screw shaft is formed with a right-hand thread portion having a right-hand thread groove on one end side with an intermediate cylindrical portion at an axially central portion as a boundary, and a left-hand thread portion having a left-hand thread groove on the other end side. A drive nut that is screwed into one of the right screw portion and the left screw portion, a fixing bracket that fixes the drive nut on the base, the right screw portion, and the left screw portion. A driven nut that is screwed to the other of the first moving bracket, a first moving bracket that is fixed to the table, engages with the linear guide and moves along the front feed screw shaft, and an intermediate cylindrical portion of the feed screw shaft Is supported rotatably An intermediate support portion that is movably provided on the base along the front feed screw shaft and both ends of the feed screw shaft are rotatably supported, and can be moved on the base along the front feed screw shaft. A screw shaft support portion provided on the base, and the intermediate support portion and the screw shaft support portion are provided on the base in a separate structure. The intermediate support portion includes a bearing holding hole provided in a second moving bracket that moves along the feed screw shaft, and a bearing fixing member interposed between the bearing holding hole and the bearing. Prepared,
The bearing is composed of a plurality of rolling elements arranged to freely roll between a plurality of inner rings, a plurality of outer rings, the plurality of inner rings and the plurality of outer rings,
The bearing fixing member has an outer diameter cylindrical surface fitted to the inner diameter surface of the bearing holding hole, and an inner diameter cylindrical surface fitted to the outer ring outer diameter surface of the bearing, and has tapered surfaces that contact each other. Each of the taper ring members is composed of a pair of taper rings, and the taper ring members are fitted in the axial direction to increase the diameter of the outer cylindrical surface and the diameter of the inner cylindrical surface of the bearing fixing member. By performing, the said bearing is fixed to the said bearing holding hole.

また、上記直動テーブル装置は、上記ねじ軸支持部は、上記送りねじ軸の一端側の端部を支持する一端側支持部と、上記送りねじ軸の他端側の端部を支持する他端側支持部とからなる別体構造で上記基台上に設けられてもよい。   Further, in the linear motion table device, the screw shaft support portion includes one end side support portion that supports an end portion on one end side of the feed screw shaft, and another end portion on the other end side of the feed screw shaft. You may provide on the said base with the separate structure which consists of an end side support part.

本発明に係る直動テーブル装置によれば、中間支持部及びねじ軸支持部が、互いに別体構造で上記基台上に設けられており、送りねじ軸とともに移動する支持部材の軽量化を図って小さな駆動トルクの小型の駆動モータとすることができるので、製造コストの低減化及び装置の小型化を図ることができる。   According to the linear motion table device of the present invention, the intermediate support portion and the screw shaft support portion are provided on the base with separate structures, and the weight of the support member that moves together with the feed screw shaft is reduced. Therefore, the manufacturing cost can be reduced and the apparatus can be reduced in size.

本発明に係る直動テーブル装置を示すものであり、(a)は側面図、(b)は平面図である。BRIEF DESCRIPTION OF THE DRAWINGS The linear motion table apparatus which concerns on this invention is shown, (a) is a side view, (b) is a top view. 本発明に係る送りねじ軸の中間円筒部の構造を示す図である。It is a figure which shows the structure of the intermediate | middle cylindrical part of the feed screw shaft which concerns on this invention. 本発明に係る中間支持部の構造を示す図である。It is a figure which shows the structure of the intermediate support part which concerns on this invention. 図3の要部拡大図である。It is a principal part enlarged view of FIG. 従来の直動テーブル装置の構造を示す図である。It is a figure which shows the structure of the conventional linear motion table apparatus. 他の従来の直動テーブル装置の構造を示す図であり、(a)は側面図、(b)は(a)のA−A線矢視図である。It is a figure which shows the structure of the other conventional linear motion table apparatus, (a) is a side view, (b) is an AA arrow directional view of (a).

以下、本発明に係る直動テーブル装置の実施形態について、図面を参照しながら詳細に説明する。
図1は、本発明に係る直動テーブル装置の一実施形態を示すものであり、(a)が側面図、(b)は平面図を示すものである。
本実施形態の直動テーブル装置は、基台25上にリニアガイド26を介して設けた第1及び第2テーブル27,28を直線移動させる装置である。リニアガイド26は、基台25の長手方向に互いに平行に延在している一対のガイド壁29上にそれぞれ固定した一対のレール26aと、第1テーブル27の下面に固定されてレール26a上を摺動するスライダ26bと、第2テーブル28の下面に固定されてレール26a上を摺動するスライダ26cと、で構成されている。
Hereinafter, embodiments of a linear motion table apparatus according to the present invention will be described in detail with reference to the drawings.
1A and 1B show an embodiment of a linear motion table device according to the present invention, in which FIG. 1A is a side view and FIG. 1B is a plan view.
The linear motion table device according to the present embodiment is a device that linearly moves the first and second tables 27 and 28 provided on the base 25 via the linear guide 26. The linear guide 26 is fixed to a pair of guide walls 29 extending in parallel to each other in the longitudinal direction of the base 25 and a pair of rails 26a, and is fixed to the lower surface of the first table 27 so as to move on the rail 26a. The slider 26b slides and the slider 26c is fixed to the lower surface of the second table 28 and slides on the rail 26a.

本実施形態の直動テーブル装置は、ねじ軸30を備えている。このねじ軸30は、一端側の外周に右ねじ溝からなる右ねじ部30aが形成され、他端側の外周に、右ねじ部30aに対して同一外径で同一ねじピッチの左ねじ溝からなる左ねじ部30bが形成されている。
また、図2に示すように、右ねじ部30a及び左ねじ部30bの境界の長手方向中央部の外周には、右ねじ部30a及び左ねじ部30bより大きな外径の中間円筒部30cが形成されている。
The linear motion table device of this embodiment includes a screw shaft 30. The screw shaft 30 is formed with a right screw portion 30a formed of a right screw groove on the outer periphery on one end side, and on the outer periphery of the other end side from a left screw groove having the same outer diameter and the same screw pitch with respect to the right screw portion 30a. The left screw portion 30b is formed.
Further, as shown in FIG. 2, an intermediate cylindrical portion 30c having an outer diameter larger than that of the right screw portion 30a and the left screw portion 30b is formed on the outer periphery of the central portion in the longitudinal direction of the boundary between the right screw portion 30a and the left screw portion 30b. Has been.

そして、本実施形態の直動テーブル装置は、ねじ軸30の右ねじ部30a側の端部に連結した駆動モータ31と、ねじ軸30の長手方向中央側の右ねじ部30aを支持する第1支持部32と、ねじ軸30の右ねじ部30a側の端部を回転自在に支持する第2支持部33と、ねじ軸30の左ねじ部30b側の端部を回転自在に支持する第3支持部34と、ねじ軸30の中間円筒部30cを支持しながら第1テーブル27に固定されている第4支持部35と、ねじ軸30の長手方向中央側の左ねじ30bを支持しながら第2テーブル28に連結されている第5支持部36と、を備えている。   The linear motion table device of the present embodiment supports the drive motor 31 coupled to the end of the screw shaft 30 on the right screw portion 30a side and the right screw portion 30a on the center side in the longitudinal direction of the screw shaft 30. A support portion 32, a second support portion 33 that rotatably supports an end portion on the right screw portion 30a side of the screw shaft 30, and a third portion that rotatably supports an end portion on the left screw portion 30b side of the screw shaft 30. While supporting the support portion 34, the fourth support portion 35 fixed to the first table 27 while supporting the intermediate cylindrical portion 30 c of the screw shaft 30, and the left screw 30 b at the center in the longitudinal direction of the screw shaft 30, 2 and a fifth support portion 36 connected to the table 28.

第1支持部32は、基台25の上面の長手方向略中央に固定された第1ナットブラケット32aと、ねじ軸30の右ねじ部30aに螺合して第1ナットブラケット32aに配置されている第1ナット32bとで構成されている。
第2支持部33は、ねじ軸30の右ねじ部30a側(図1(a)の右側)の基台25上に長手方向に延在して配置した一対のレール33aと、これらレール33a上にスライダ33dを介して載置され、基台25の長手方向に移動自在とされている第2支持架台33bと、ねじ軸30の右ねじ部30a側の端部を回転自在に支持し、第2支持架台33bに配置されている軸受33cとを備えており、ねじ軸30の右ねじ部30a側の端部に連結されている駆動モータ31は、第2支持架台33b上に配置されている。
The first support portion 32 is disposed on the first nut bracket 32a by being screwed to the first nut bracket 32a fixed to the approximate center in the longitudinal direction of the upper surface of the base 25 and the right screw portion 30a of the screw shaft 30. And the first nut 32b.
The second support portion 33 includes a pair of rails 33a arranged in the longitudinal direction on the base 25 on the right screw portion 30a side (the right side in FIG. 1A) of the screw shaft 30, and the rails 33a. The second support frame 33b, which is placed on the slider 33d and is movable in the longitudinal direction of the base 25, and the end on the right screw portion 30a side of the screw shaft 30 are rotatably supported. The drive motor 31 connected to the end of the screw shaft 30 on the right screw portion 30a side is disposed on the second support frame 33b. .

第3支持部34は、ねじ軸30の左ねじ部30b側(図1(a)の左側)の基台25上に長手方向に延在して配置した一対のレール34aと、これらレール34a上にスライダ34dを介して載置され、基台25の長手方向に移動自在とされている第3支持架台34bと、ねじ軸30の左ねじ部30b側の端部を回転自在に支持し、第3支持架台34bに配置されている軸受34cとを備えている。   The third support portion 34 includes a pair of rails 34a extending in the longitudinal direction on the base 25 on the left screw portion 30b side (the left side in FIG. 1A) of the screw shaft 30, and the rails 34a. Are supported via a slider 34d, and are rotatably supported by a third support frame 34b that is movable in the longitudinal direction of the base 25 and the left screw 30b side end of the screw shaft 30. 3 and a bearing 34c disposed on the support frame 34b.

第5支持部36は、第2テーブル28の下面に固定された第5ナットブラケット36aと、ねじ軸30の長手方向中央側の左ねじ30bに螺合して第5ナットブラケット36aに配置されている第5ナット36bとで構成されている。
第4支持部35は、第1テーブル27の下面に固定されたブラケット37と、ねじ軸30の中間円筒部30cを回転自在に支持してブラケット37に配置されている軸受38とを備えている。
The fifth support portion 36 is disposed on the fifth nut bracket 36a by screwing into a fifth nut bracket 36a fixed to the lower surface of the second table 28 and a left screw 30b on the center side in the longitudinal direction of the screw shaft 30. And a fifth nut 36b.
The fourth support portion 35 includes a bracket 37 that is fixed to the lower surface of the first table 27, and a bearing 38 that is disposed on the bracket 37 so as to rotatably support the intermediate cylindrical portion 30 c of the screw shaft 30. .

図3は、第4支持部35の具体的な構造を示すものである。また、図4は、図3の要部拡大図である。
図3及び図4に示すように、軸受38は2列の玉軸受で構成されており、1つの外輪38aと、2つの内輪38bと、外輪38a及び内輪38bの間に転動自在に配置した複数の転動体38cとで構成されている。すなわち、軸受38は、2つの外輪38aと、2つの内輪38bと、複数の転動体38cとで構成された従来の2列の玉軸受に対して、外輪38aを一体にした構成をなしている。なお、本実施形態における軸受38は、内輪38bの数(軌道の数)は2つに限られず、1つの外輪38aと、複数の内輪38bと、外輪38a及び内輪38bの間に転動自在に配置した複数の転動体38cとで構成されていればよい。
ブラケット37には軸受保持穴39が形成されている。この軸受保持穴39は、内周面39aが軸受38の外輪38aの外周面に所定の隙間を有して対向するように形成されている。さらに、軸受保持穴39の内周面39aと外輪38aの外周面との間には、軸受固定部材45が介装される。
FIG. 3 shows a specific structure of the fourth support portion 35. FIG. 4 is an enlarged view of a main part of FIG.
As shown in FIG. 3 and FIG. 4, the bearing 38 is constituted by two rows of ball bearings, and is arranged between one outer ring 38 a, two inner rings 38 b, and between the outer ring 38 a and the inner ring 38 b so as to be able to roll. It comprises a plurality of rolling elements 38c. That is, the bearing 38 has a configuration in which the outer ring 38a is integrated with a conventional two-row ball bearing constituted by two outer rings 38a, two inner rings 38b, and a plurality of rolling elements 38c. . In the present embodiment, the number of inner rings 38b (the number of raceways) is not limited to two, and the bearings 38 can roll between one outer ring 38a, a plurality of inner rings 38b, and the outer ring 38a and the inner ring 38b. What is necessary is just to be comprised with the arrange | positioned several rolling element 38c.
A bearing holding hole 39 is formed in the bracket 37. The bearing holding hole 39 is formed so that the inner peripheral surface 39a faces the outer peripheral surface of the outer ring 38a of the bearing 38 with a predetermined gap. Further, a bearing fixing member 45 is interposed between the inner peripheral surface 39a of the bearing holding hole 39 and the outer peripheral surface of the outer ring 38a.

また、ブラケット37の軸受保持穴39に中間円筒部30cが位置するようにねじ軸30を挿通した後、軸受38は、外輪38aの外周面が軸受保持穴39の内周面39aに対向し、内輪38bの内周面が中間円筒部30cの外周面に当接するように配置されている。
そして軸受固定部材45の外周面45aが、軸受保持穴39の内周面39aと当接し、軸受固定部材45の内周面45bが軸受38の外輪38aの外周面に当接するように配置されている。軸受固定部材45は、図4に示すように、一対のテーパーリング46,47から構成されている。ねじ48でテーパリング46,47を軸方向に互いに引き寄せることで変形させ、軸受固定部材45の外径45aを拡径するとともに、内径45bを縮径することによりハウジング37に対して軸受38を固定する。これにより、軸受38をハウジング37の軸受固定穴39に確実に固定させることができる。また、軸受38の外輪は、軸受固定部材45により軸芯方向に押し付けられるため与圧が掛かるので、中間円筒部30cと軸受固定穴39との芯を精度良く合わせることができる。さらに、ハウジング37および軸受38の位置中間円筒部30cに対する軸方向の固定位置を容易に調整できる。
Further, after the screw shaft 30 is inserted so that the intermediate cylindrical portion 30 c is positioned in the bearing holding hole 39 of the bracket 37, the outer peripheral surface of the outer ring 38 a faces the inner peripheral surface 39 a of the bearing holding hole 39, It arrange | positions so that the internal peripheral surface of the inner ring | wheel 38b may contact | abut to the outer peripheral surface of the intermediate | middle cylindrical part 30c.
The outer peripheral surface 45a of the bearing fixing member 45 is disposed so as to contact the inner peripheral surface 39a of the bearing holding hole 39, and the inner peripheral surface 45b of the bearing fixing member 45 is disposed to contact the outer peripheral surface of the outer ring 38a of the bearing 38. Yes. As shown in FIG. 4, the bearing fixing member 45 includes a pair of tapered rings 46 and 47. The taper rings 46 and 47 are deformed by pulling them together in the axial direction with a screw 48, and the outer diameter 45a of the bearing fixing member 45 is expanded, and the inner diameter 45b is reduced, thereby fixing the bearing 38 to the housing 37. To do. Thereby, the bearing 38 can be reliably fixed to the bearing fixing hole 39 of the housing 37. Further, since the outer ring of the bearing 38 is pressed in the axial direction by the bearing fixing member 45, pressure is applied, so that the cores of the intermediate cylindrical portion 30c and the bearing fixing hole 39 can be accurately aligned. Further, the axial fixed positions of the housing 37 and the bearing 38 with respect to the position intermediate cylindrical portion 30c can be easily adjusted.

本実施形態の直動テーブル装置によると、駆動モータ31からねじ軸30に右回りの回転力が伝達されると、第1支持部32で右ねじ部30aが螺合しているねじ軸30が図1の左方向に送り駆動され、第2支持部33、第3支持部34及び第4支持部35も図1の左方向に移動する。また、ねじ軸30が図1の左方向に送り駆動されると、ねじ軸30の左ねじ部30bに螺合している第5支持部36の第5ナット36bが、ねじ軸30のストロークに対して2倍のストロークで左方向に移動し、この第5ナット36bに第5ナットブラケット36aを介して連結する第2テーブル28が高速で左方向に移動する。   According to the linear motion table device of the present embodiment, when a clockwise rotational force is transmitted from the drive motor 31 to the screw shaft 30, the screw shaft 30 in which the right screw portion 30 a is screwed with the first support portion 32. 1, the second support portion 33, the third support portion 34, and the fourth support portion 35 are also moved in the left direction of FIG. Further, when the screw shaft 30 is driven to feed in the left direction in FIG. 1, the fifth nut 36 b of the fifth support portion 36 screwed into the left screw portion 30 b of the screw shaft 30 is moved in the stroke of the screw shaft 30. On the other hand, the second table 28 that moves to the left with a double stroke and is connected to the fifth nut 36b via the fifth nut bracket 36a moves to the left at a high speed.

一方、駆動モータ31からねじ軸30に左回りの回転力が伝達されると、ねじ軸30が図1の右方向に送り駆動され、第2支持部33、第3支持部34及び第4支持部35も図1の右方向に移動する。また、ねじ軸30が図1の右方向に送り駆動されると、第5支持部36の第5ナット36bが、ねじ軸30のストロークに対して2倍のストロークで右方向に移動し、第2テーブル28は高速で右方向に移動する。   On the other hand, when a counterclockwise rotational force is transmitted from the drive motor 31 to the screw shaft 30, the screw shaft 30 is fed and driven in the right direction in FIG. 1, and the second support portion 33, the third support portion 34 and the fourth support portion are driven. The part 35 also moves to the right in FIG. When the screw shaft 30 is driven to the right in FIG. 1, the fifth nut 36 b of the fifth support portion 36 moves to the right with a stroke twice that of the screw shaft 30. 2 The table 28 moves to the right at high speed.

次に、本実施形態の直動テーブル装置の作用効果について説明する。
本実施形態の直動テーブル装置は、ねじ軸30の長手方向中央部(中間円筒部30c)を第4支持部35が支持しているので、共振を起こさない程度に固有振動数を高くすることができる。
また、ねじ軸30の長手方向中央部を支持する第4支持部35は、ねじ軸30の長手方向の両端部を支持している第2支持部33及び第3支持部34に対して別体構造で基台25に移動自在に支持されており、第2支持部33及び第3支持部34も互いに別体構造で基台25に移動自在に支持されており、本実施形態の装置は、ねじ軸30とともに移動する大重量の支持部材が存在しない。したがって、ねじ軸30とともに移動する支持部材の軽量化を図って小さな駆動トルクの小型の駆動モータ31とすることができるので、製造コストの低減化及び装置の小型化を図ることができる。
Next, the effect of the linear motion table device of this embodiment will be described.
In the linear motion table device of the present embodiment, since the fourth support portion 35 supports the longitudinal center portion (intermediate cylindrical portion 30c) of the screw shaft 30, the natural frequency is increased to such an extent that resonance does not occur. Can do.
In addition, the fourth support portion 35 that supports the central portion in the longitudinal direction of the screw shaft 30 is separate from the second support portion 33 and the third support portion 34 that support both ends in the longitudinal direction of the screw shaft 30. The second support part 33 and the third support part 34 are also supported by the base 25 in a separate structure so as to be movable. The apparatus of this embodiment is There is no heavy support member that moves with the screw shaft 30. Therefore, the supporting member that moves together with the screw shaft 30 can be reduced in weight, so that the small driving motor 31 with a small driving torque can be obtained, so that the manufacturing cost can be reduced and the apparatus can be downsized.

さらに、ブラケット37の軸受保持穴39に中間円筒部30cが位置するようにねじ軸30を挿通した後、軸受38は、外輪38aの外周面が軸受保持穴39の内周面39aに対向し、内輪38bの内周面が中間円筒部30cの外周面に当接するように配置されている。そして軸受固定部材45の外周面45aが、軸受保持穴39の内周面39aと当接し、軸受固定部材45の内周面45bが軸受38の外輪38aの外周面に当接するように配置されている。軸受固定部材45は、図4に示すように、一対のテーパーリング46,47から構成されている。ねじ48でテーパリング46,47を軸方向に互いに引き寄せることで変形させ、軸受固定部材45の外径45aを拡径するとともに、内径45bを縮径することによりハウジング37に対して軸受38を固定する。これにより、軸受38をハウジング37の軸受固定穴39に確実に固定させることができる。また、軸受38の外輪は、軸受固定部材45により軸芯方向に押し付けられるため与圧が掛かるので、中間円筒部30cと軸受固定穴39との芯を精度良く合わせることができる。さらに、ハウジング37および軸受38の位置中間円筒部30cに対する軸方向の固定位置を容易に調整できる。   Further, after the screw shaft 30 is inserted so that the intermediate cylindrical portion 30 c is positioned in the bearing holding hole 39 of the bracket 37, the outer peripheral surface of the outer ring 38 a faces the inner peripheral surface 39 a of the bearing holding hole 39, It arrange | positions so that the internal peripheral surface of the inner ring | wheel 38b may contact | abut to the outer peripheral surface of the intermediate | middle cylindrical part 30c. The outer peripheral surface 45a of the bearing fixing member 45 is disposed so as to contact the inner peripheral surface 39a of the bearing holding hole 39, and the inner peripheral surface 45b of the bearing fixing member 45 is disposed to contact the outer peripheral surface of the outer ring 38a of the bearing 38. Yes. As shown in FIG. 4, the bearing fixing member 45 includes a pair of tapered rings 46 and 47. The taper rings 46 and 47 are deformed by pulling them together in the axial direction with a screw 48, and the outer diameter 45a of the bearing fixing member 45 is expanded, and the inner diameter 45b is reduced, thereby fixing the bearing 38 to the housing 37. To do. Thereby, the bearing 38 can be reliably fixed to the bearing fixing hole 39 of the housing 37. Further, since the outer ring of the bearing 38 is pressed in the axial direction by the bearing fixing member 45, pressure is applied, so that the cores of the intermediate cylindrical portion 30c and the bearing fixing hole 39 can be accurately aligned. Further, the axial fixed positions of the housing 37 and the bearing 38 with respect to the position intermediate cylindrical portion 30c can be easily adjusted.

なお、本発明のリニアガイドがリニアガイド26に対応し、本発明のテーブルが第2テーブル28に対応し、本発明の送りねじ軸がねじ軸30に対応し、本発明の駆動ナットが第1ナット32bに対応し、本発明の固定ブラケットがナットブラケット32aに対応し、本発明の従動ナットが第5ナット36bに対応し、本発明の第1移動ブラケットがナットブラケット36aに対応し、本発明の中間支持部が第4支持部35に対応し、本発明のねじ軸支持部が第2支持部33及び第3支持部34に対応し、本発明の一端側支持部が第2支持部33及び第3支持部34の一方に対応し、本発明の他端側支持部が第2支持部33及び第3支持部34の他方に対応している。   The linear guide of the present invention corresponds to the linear guide 26, the table of the present invention corresponds to the second table 28, the feed screw shaft of the present invention corresponds to the screw shaft 30, and the drive nut of the present invention is the first. Corresponding to the nut 32b, the fixed bracket of the present invention corresponds to the nut bracket 32a, the driven nut of the present invention corresponds to the fifth nut 36b, and the first moving bracket of the present invention corresponds to the nut bracket 36a. The intermediate support portion corresponds to the fourth support portion 35, the screw shaft support portion of the present invention corresponds to the second support portion 33 and the third support portion 34, and the one end side support portion of the present invention corresponds to the second support portion 33. The other end side support portion of the present invention corresponds to the other of the second support portion 33 and the third support portion 34.

25…基台、26…リニアガイド、26a…レール、26b…スライダ、26c…スライダ、27…第1テーブル、28…第2テーブル、29…ガイド壁、30…ねじ軸、30a…右ねじ部、30b…左ねじ部、30c…中間円筒部、31…駆動モータ、32…第1支持部、32a…ナットブラケット、32b…第1ナット、33…第2支持部、33a…レール、33b… 支持架台、33c…軸受、33d…スライダ、34…第3支持部、34a…レール、34b…支持架台、34c…軸受、34d…スライダ、35…第4支持部、36…第5支持部、36a…ナットブラケット、36b…第5ナット、37…ブラケット、38…軸受、38a…外輪、38b…内輪、38c…転動体、39…軸受保持穴、39a…内周面、39b…外輪係止部、40…外輪保持部、41…ボルト、42…カラー、43…ロックナット、45…軸受固定部材   25 ... Base, 26 ... Linear guide, 26a ... Rail, 26b ... Slider, 26c ... Slider, 27 ... First table, 28 ... Second table, 29 ... Guide wall, 30 ... Screw shaft, 30a ... Right screw part, 30b ... Left screw part, 30c ... Intermediate cylindrical part, 31 ... Drive motor, 32 ... First support part, 32a ... Nut bracket, 32b ... First nut, 33 ... Second support part, 33a ... Rail, 33b ... , 33c ... bearing, 33d ... slider, 34 ... third support, 34a ... rail, 34b ... support frame, 34c ... bearing, 34d ... slider, 35 ... fourth support, 36 ... fifth support, 36a ... nut Bracket, 36b ... fifth nut, 37 ... bracket, 38 ... bearing, 38a ... outer ring, 38b ... inner ring, 38c ... rolling element, 39 ... bearing retaining hole, 39a ... inner peripheral surface, 39b ... outer ring locking 40, outer ring holding portion, 41, bolt, 42, collar, 43, lock nut, 45, bearing fixing member

Claims (2)

基台上にリニアガイドを介して設けたテーブルを、駆動モータの駆動力伝達による送りねじ軸の回転により直線移動させる直動テーブル装置であって、
前記送りねじ軸を、軸方向中央部の中間円筒部を境として一端側に右ねじ溝を有する右ねじ部を形成し、他端側に左ねじ溝を有する左ねじ部の他方を形成した軸とし、
前記右ねじ部及び前記左ねじ部の一方に螺合する駆動ナットと、この駆動ナットを前記基台上に固定する固定ブラケットと、
前記右ねじ部及び前記左ねじ部の他方に螺合する従動ナットと、この従動ナットをテーブルに固定し、前記リニアガイドに係合して前送りねじ軸に沿って移動する第1移動ブラケットと、
前記送りねじ軸の中間円筒部を回転自在に支持し、前送りねじ軸に沿って前記基台上に移動自在に設けた中間支持部と、
前記送りねじ軸の両端部を回転自在に支持し、前送りねじ軸に沿って前記基台上に移動自在に設けたねじ軸支持部と、を備え、
前記中間支持部及び前記ねじ軸支持部は、互いに別体構造で前記基台上に設けられ、
前記中間支持部は、前記送りねじ軸に沿って移動する第2移動ブラケットに設けた軸受保持穴と、前記中間円筒部が挿通される軸受と、前記軸受保持穴と前記軸受との間に介装される軸受固定部材と、を備え、
前記軸受は、複数の内輪と複数の外輪と前記複数の内輪及び前記複数の外輪との間に転動自在に配置した複数の転動体とで構成されており、
前記軸受固定部材は、前記軸受保持穴の内径面に嵌合する外径円筒面と、前記軸受の外輪外径面に嵌合する内径円筒面を有し、且つ、相互に当接するテーパ面をそれぞれ備えた一対のテーパリングからなるテーパーリング部材より構成され、前記テーパーリング部材を互いに軸方向に嵌入して前記軸受固定部材の前記外径円筒面の拡径及び前記内径円筒面の縮径を行うことにより、前記軸受保持穴に前記軸受を固定することを特徴とする直動テーブル装置。
A linear motion table device that linearly moves a table provided on a base via a linear guide by rotation of a feed screw shaft by driving force transmission of a drive motor,
A shaft in which the feed screw shaft is formed with a right-hand thread portion having a right-hand thread groove on one end side with respect to the intermediate cylindrical portion in the axially central portion and the other of the left-hand thread portion having a left-hand thread groove on the other end side. age,
A drive nut screwed into one of the right screw portion and the left screw portion, a fixing bracket for fixing the drive nut on the base,
A driven nut that is screwed to the other of the right screw portion and the left screw portion, a first moving bracket that is fixed to the table, engages with the linear guide, and moves along the forward feed screw shaft; ,
An intermediate support portion that rotatably supports the intermediate cylindrical portion of the feed screw shaft, and that is movably provided on the base along the front feed screw shaft;
A screw shaft support portion that rotatably supports both ends of the feed screw shaft, and is provided on the base so as to be movable along the front feed screw shaft;
The intermediate support part and the screw shaft support part are provided on the base in separate structures from each other,
The intermediate support part is interposed between a bearing holding hole provided in a second moving bracket that moves along the feed screw shaft, a bearing through which the intermediate cylindrical part is inserted, and the bearing holding hole and the bearing. A bearing fixing member to be mounted,
The bearing is composed of a plurality of rolling elements arranged to freely roll between a plurality of inner rings, a plurality of outer rings, the plurality of inner rings and the plurality of outer rings,
The bearing fixing member has an outer diameter cylindrical surface fitted to the inner diameter surface of the bearing holding hole, and an inner diameter cylindrical surface fitted to the outer ring outer diameter surface of the bearing, and has tapered surfaces that contact each other. Each of the taper ring members is composed of a pair of taper rings, and the taper ring members are fitted in the axial direction to increase the diameter of the outer cylindrical surface and the diameter of the inner cylindrical surface of the bearing fixing member. By performing, the said linear bearing table apparatus characterized by fixing the said bearing to the said bearing holding hole.
前記ねじ軸支持部は、前記送りねじ軸の一端側の端部を支持する一端側支持部と、前記送りねじ軸の他端側の端部を支持する他端側支持部とからなる別体構造で前記基台上に設けられていることを特徴とする請求項1記載の直動テーブル装置。   The screw shaft support portion is a separate body composed of one end side support portion that supports an end portion on one end side of the feed screw shaft and another end side support portion that supports an end portion on the other end side of the feed screw shaft. The linear motion table device according to claim 1, wherein the linear motion table device is provided on the base in a structure.
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