JP2013027090A - Motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a motor that prevents gas leakage even in a vacuum environment.SOLUTION: A mold layer 16 is arranged around a stator 13. The mold layer 16 is formed so as to come into close contact with the stator 13 and coat an outer surface of the stator 13. The mold layer 16 is made of resin material, such as thermosetting resin or rubber, and, more preferably, the resin material is too dense to transmit gas and the like produced in the stator 13. It is also preferable that the material is such that the mold layer 16 itself is less likely to produce gas.

Description

  The present invention relates to a motor, and more particularly to a technique for preventing leakage of gas generated from components.

  For example, a vacuum apparatus such as a multi-chamber CVD apparatus is provided with a transfer device for transferring a film to be formed between a charging / unloading chamber and a processing chamber. Such a conveying apparatus is composed of, for example, a roller that supports and moves the substrate, and a motor that rotates the roller.

  Conventionally, a motor used in a transfer device is disposed outside a chamber serving as a vacuum environment, that is, in contact with outside air, and a motor shaft (rotating shaft) is connected to a roller disposed in the chamber, thereby the inside of the chamber. The roller was rotating. For this reason, an airtight seal for keeping the airtightness in the chamber is provided at a portion where the motor shaft penetrates the wall surface of the chamber.

  However, in a structure in which the motor of the transfer device is installed outside the chamber and the motor shaft is connected to the roller in the chamber via an airtight seal, the entire transfer device becomes large, which is an obstacle to downsizing the vacuum device. It was.

  In addition, there is a problem that the structure is complicated, for example, an airtight seal is required between the motor shaft and the chamber wall surface. Furthermore, such a hermetic seal can keep the airtightness in the chamber only when the rotation speed of the motor shaft is about 500 rpm. It was an obstacle.

  For this reason, the vacuum apparatus provided with the conveying apparatus which has arrange | positioned the motor of the conveying apparatus inside the chamber is also known (for example, refer patent document 1). By disposing the motor inside the chamber, an airtight seal between the motor shaft and the chamber wall surface becomes unnecessary, the structure can be simplified, the vacuum apparatus can be miniaturized, and the airtightness inside the chamber can be maintained. The number of rotations of the motor can be increased to enable high-speed conveyance of the film formation.

JP 2007-277617 A

  However, the motor installed in the chamber is inevitably placed in a vacuum environment as the pressure in the chamber is reduced. A magnetic member such as a coil or a magnet is provided inside the motor, and such a coil or magnet has a problem of generating gas when placed in a vacuum environment. That is, the magnet is generally a porous material, and gas is released from a large number of holes.

  In addition, the coil is released by gasifying the adhesive and the solvent molding the wound metal wire. When the gas released from the coils and magnets constituting such a motor diffuses into the chamber, there is a concern that the film-formed object is contaminated.

  The present invention has been made to solve the above problems, and provides a motor in which gas does not leak even in a vacuum environment.

In order to solve the above problems, the present invention provides the following motor.
That is, the motor of the present invention includes a housing, a rotor that is rotatably supported by the housing and a magnetic member provided around the shaft, and a stator that is disposed so as to surround the rotor. A motor for rotating the rotor by a magnetic field generated between the rotor and the stator,
A mold layer is provided in close contact with and covers at least one of the stator and the magnetic member.

A metal thin film covering the surface of the mold layer is further provided.
Further, a partition member disposed between the magnetic member and the stator is further provided.

The partition member is supported at its end by the mold layer.
The partition member is fused to the mold layer.

The partition member is integrally formed with a rib for preventing bending.
Further, the magnetic member and the stator are constituted by magnets or electromagnetic coils.

    According to the motor of the present invention, even if the motor is installed in a vacuum environment, gas generated from the rotor and stator constituting the motor is not released to the outside of the housing. That is, the rotor and the stator are covered with the mold layer. As a result, the rotor and the stator are hermetically sealed in a space surrounded by the mold layer, the housing, and the shaft.

  Therefore, even if the magnetic member or stator of the rotor is a magnet or an electromagnetic coil in which a thin metal wire is wound and molded with a resin material, the magnetic member or stator of the rotor is not easily generated even in a vacuum environment. By gas-tightly covering with the partition member, it is possible to prevent the gas generated from the rotor and the stator from leaking out of the motor.

It is sectional drawing which shows the motor (vacuum motor) in 1st embodiment of this invention. It is sectional drawing which shows the motor in 2nd embodiment of this invention. It is sectional drawing which shows the motor in 3rd embodiment of this invention.

    Hereinafter, a motor according to the present invention will be described with reference to the drawings. Note that this embodiment is described by way of example in order to better understand the gist of the invention, and does not limit the present invention unless otherwise specified. In addition, in the drawings used in the following description, in order to make the features of the present invention easier to understand, there is a case where a main part is shown in an enlarged manner for convenience, and the dimensional ratio of each component is the same as the actual one. Not necessarily.

[First embodiment]
FIG. 1 is a cross-sectional view showing a configuration example of a motor in the first embodiment of the present invention.
For example, a vacuum motor (motor) 10 used for a substrate transport mechanism of a vacuum apparatus includes a housing (exterior body) 11, a rotor 12 accommodated in the housing 11, and a stator 13. The rotor 12 includes a shaft 21 and a magnetic member 22 formed around the shaft 21.

  The housing 11 is made of, for example, metal, resin, or the like, and bearings 14 a and 14 b are formed at two locations along the axial direction L of the shaft 21. The bearings 14a and 14b only need to be composed of, for example, a bearing and a receiving member that supports the bearing.

  The shaft 21 is pivotally supported at two locations along the rotation axis by bearings 14 a and 14 b attached to the housing 11. Thus, the rotor 12 is rotatably supported inside the housing 11.

  The magnetic member 22 formed on the peripheral surface of the shaft 21 is composed of, for example, a permanent magnet. Specific examples include ferrite magnets, samarium cobalt magnets, and neodymium magnets. Many of these permanent magnets are obtained by molding and sintering magnetically pulverized magnetic particles, and there are fine cavities inside, and gas is easily generated in a vacuum environment.

  The stator 13 is fixed to the housing 11 and is formed so as to surround the rotor 12 with a predetermined distance from the rotor 12. The stator 13 is composed of, for example, an electromagnetic coil. The electromagnetic coil is made of, for example, a thin wire such as copper wound around a magnetic body and molded with a resin material such as an adhesive. Such a resin material such as an adhesive is likely to be gasified and released in a vacuum environment due to volatilization of a resin constituent material itself or a solvent.

  The vacuum motor (motor) 10 generates electric field between the magnetic member 22 of the rotor 12 and the stator 13 by supplying electric power from the outside to the electromagnetic coils constituting the stator 13, and the shaft 21 together with the magnetic member 22. Rotate.

  A mold layer 16 is disposed around the stator 13. The mold layer 16 is formed so as to be in close contact with the stator 13 and cover the outer surface. The mold layer 16 is preferably made of a resin material such as a thermosetting resin or rubber, and is preferably a dense resin that does not transmit gas generated in the stator 13. In addition, it is preferable that the material does not easily generate gas from the mold layer 16 itself. The periphery of the stator 13 is hardened by the mold layer 16 made of such a resin material.

  The periphery of the mold layer 16 is preferably further covered with a metal thin film 17. The metal thin film 17 is made of, for example, a thin film made of Al, Cu, Fe, Ag, or an alloy thereof. Such a metal thin film 17 may be formed on the outer surface of the mold layer 16 by a method such as vapor deposition, electroless plating, or adhesion. The metal thin film 17 preferably covers the entire exposed region of the mold layer 16, but may be formed only in a partial region.

  A mold layer 18 is also disposed around the magnetic member 22 constituting the rotor 12. The mold layer 18 is formed in close contact with the magnetic member 22 so as to cover the outer surface. The mold layer 18 is also preferably formed of a member similar to the mold layer 16, for example, a resin material such as a thermosetting resin or rubber, and further a dense resin that does not transmit gas generated in the magnetic member 22.

  Moreover, it is preferable that the material does not easily generate gas from the mold layer 18 itself. The exposed region of the magnetic member 22 is solidified by the mold layer 18 made of such a resin material. As the shaft 21 rotates, the mold layer 18 rotates together with the magnetic member 22.

  The periphery of the mold layer 18 is preferably covered with the metal thin film 19 similarly to the mold layer 16. The metal thin film 19 is made of, for example, a thin film made of Al, Cu, Fe, Ag, or an alloy thereof. Such a metal thin film 19 may be formed on the outer surface of the mold layer 18 by a method such as vapor deposition, electroless plating, or adhesion. The metal thin film 19 preferably covers the entire exposed region of the mold layer 18, but may be formed only in a partial region.

  It is preferable that an encoder 27 for detecting the axial position and the rotational speed of the vacuum motor (motor) 10 is further formed on one end side of the shaft 21. Such an encoder 27 includes, for example, a rotating plate on which an index is formed and which rotates together with the shaft, and a sensor that detects the index.

  According to the vacuum motor (motor) 10 of the embodiment of the present invention having the above-described configuration, for example, the vacuum motor 10 is used as a transport motor for transporting an object to be deposited (substrate) in a vacuum apparatus. Even when installed in a chamber serving as an environment, the gas generated from the magnetic member 22 of the rotor 12 and the gas generated from the stator 13 are not released to the outside of the housing 11.

  That is, the periphery of the stator 13 composed of an electromagnetic coil or the like is hardened by the mold layer 16. Further, the outer surface of the mold layer 16 is further covered with a metal thin film 17. As a result, the stator 13 is hermetically sealed by the mold layer 16.

  The electromagnetic coil constituting the stator 13 is made of, for example, a wire wound with a thin wire such as copper and molded with a resin material such as an adhesive. In a vacuum environment, the molded resin itself or a solvent is volatilized and easily gasifies. However, even if gas is generated from the stator 13 by covering the entire stator 13 with the mold layer 16, such gas is prevented from leaking out of the vacuum motor 10. Moreover, since the mold layer 16 itself is also covered with the metal thin film 17, even if a small amount of gas is generated from the mold layer 16 itself, it is possible to prevent the gas from flowing out of the mold layer 16.

  On the other hand, the periphery of the magnetic member 22 of the rotor 12 is also solidified by the mold layer 18. Moreover, the outer surface of the mold layer 18 is further covered with the metal thin film 19. As a result, the magnetic member 22 is also hermetically sealed by the mold layer 16.

  The magnetic member 22 is composed of, for example, a permanent magnet. Among such permanent magnets, the sintered body has a fine cavity inside, and gas is easily generated in a vacuum environment. Covering with the mold layer 18 prevents such gas from leaking out of the vacuum motor 10 even if gas is generated from the magnetic member 22. Moreover, since the mold layer 18 itself is also covered with the metal thin film 19, even if a small amount of gas is generated from the mold layer 18 itself, the gas can be prevented from flowing out of the mold layer 18.

  Therefore, even if the vacuum motor 10 of this embodiment is installed in a vacuum environment such as in the chamber of a vacuum apparatus, the gas generated in the rotor 12 and the stator 13 of the vacuum motor 10 is not released into the chamber. In addition, it is possible to prevent defects such as film formation defects and impurity contamination of an object to be formed.

  In the embodiment described above, the magnetic member 22 of the rotor 12 is constituted by a permanent magnet and the stator 13 is constituted by an electromagnetic coil. Conversely, the magnetic member of the rotor may be constituted by an electromagnetic coil and the stator by a permanent magnet.

  In the above-described embodiment, the rotor 12 is covered with the mold layer 16 and the magnetic member 22 is covered with the mold layer 18. However, for example, by using one permanent magnet that generates less gas even in a vacuum environment, a configuration may be adopted in which a mold layer that hermetically seals only one of the magnetic material of the rotor or the stator is arranged. .

[Second Embodiment]
FIG. 2 is a cross-sectional view showing a configuration example of a motor according to the second embodiment of the present invention.
The vacuum motor (motor) 30 in the second embodiment includes a housing (exterior body) 31, a rotor 32 housed in the housing 31, and a stator 33. The rotor 32 includes a shaft 41 and the shaft 41. And a magnetic member 42 formed around the periphery.

  The housing 31 is made of, for example, metal, resin, or the like, and bearings 44 a and 44 b are formed at two locations along the axial direction L of the shaft 41. The shaft 41 is pivotally supported at two locations along the rotation axis direction by the bearings 44 a and 44 b, and thereby the rotor 32 is rotatably supported inside the housing 31. Further, the magnetic member 42 formed on the peripheral surface of the shaft 41 is composed of, for example, a permanent magnet.

  The stator 33 is fixed to the housing 31 and is formed so as to surround the rotor 32 at a predetermined interval with respect to the rotor 32. The stator 33 is composed of, for example, an electromagnetic coil.

  A partition member 35 is disposed between the magnetic member 42 of the rotor 32 and the stator 33. In the present embodiment, the partition member 35 includes a first partition member 36 and a second partition member 37. The first partition member 36 extends along the axial direction L of the shaft 41 and is disposed so as to cover the exposed surface of the stator 33 on the rotor 32 side.

  Mold layers 46 are formed on both side surfaces of the stator 33. The mold layer 46 is formed so as to be in close contact with and cover both side surfaces of the stator 33. For example, the mold layer 46 is preferably made of a resin material such as a thermosetting resin or rubber, and a dense resin that does not allow gas generated in the stator 33 to pass therethrough. In addition, it is preferable that the material does not easily generate gas from the mold layer 46 itself. Both side surfaces of the stator 33 are hardened by the mold layer 46 made of such a resin material.

  The end of the first partition member 36 is supported by the mold layer 46. That is, both end portions of the first partition member 36 are airtightly joined at the fusion part M by the mold layer 46. Thus, the stator 33 surrounded by the inner wall of the housing 31, the first partition member 36, and the mold layer 46 is hermetically sealed.

  The first partition member 36 may be formed of, for example, a metal plate that generates less dust and emits gas, such as Fe, Al, Cu, and SUS. The first partition member 36 may be a metal plate having a thickness of about 0.1 mm to 2 mm, for example.

  Ribs 49 are formed in a portion adjacent to the fusion part M of the first partition member 36 and in the vicinity of the center. The rib 49 is a part where a part of the metal plate forming the first partition member 36 extending along the axial direction L of the shaft 41 is bent in a spine shape, for example.

  By forming the rib 49 on the first partition member 36, the first partition member 36 is bent or buckled by stress even when a thin and light metal plate is used as the first partition member 36. And the strength in the surface spreading direction can be increased.

  The 2nd partition member 37 consists of the partition 37a and the support body 37b formed in the both ends of this partition 37a. The partition wall 37 a extends along the axial direction L of the shaft 41 and is disposed so as to cover the exposed surface of the magnetic member 42 on the stator 33 side. The support 37b extends along both side surfaces of the magnetic material 42, and is formed so as to be thicker than the partition wall 37a.

  Such a support 37 b is attached to the shaft 41. Both end portions of the partition wall 37a are airtightly joined to the support body 37b by welding. The support 37b is hermetically sealed with respect to the shaft 41 by a seal member 48. As a result, the peripheral surface of the shaft 41 and the magnetic member 42 surrounded by the second partition wall member 37 are hermetically sealed. Then, the rotation of the shaft 41 causes the second partition member 37 to rotate together with the magnetic member 42.

  The partition wall 37a may be formed of a metal plate that generates little dust and emits gas, such as Fe, Al, Cu, and SUS. Moreover, the support body 17b should just be formed from metals, such as Fe, Al, Cu, and SUS. The partition wall 37a may be a metal plate having a thickness of about 0.1 mm to 2 mm, for example. The partition walls 37a and the support body 37b are preferably composed of different members, but may be the same members and are not limited.

  The seal member 48 may be an O-ring extending around the axis of the shaft 41 and is made of an elastic member that retains elasticity even in a vacuum environment. Specific examples of the elastic member constituting the sealing member 48 include fluororesin, silicon resin, nitrile resin, ethylene propylene rubber, acrylic rubber, etc., but those that do not generate constituent gas in a vacuum environment. It is preferable to select.

  It is preferable that an encoder 47 for detecting the axial position and the rotational speed of the vacuum motor (motor) 30 is further formed on one end side of the shaft 41. Such an encoder includes, for example, a rotating plate that is formed with an index and rotates with the shaft, a sensor that detects the index, and the like.

  According to the vacuum motor (motor) 30 of the second embodiment of the present invention having the above-described configuration, for example, the vacuum motor 30 is used as a transport motor for transporting an object to be deposited (substrate) in a vacuum apparatus. Even if it is installed in a vacuum chamber, the gas generated from the magnetic member 42 and the gas generated from the stator 33 are not released to the outside of the housing 31.

  That is, the stator 33 composed of an electromagnetic coil or the like is covered with the inner wall surface of the housing 31, the mold layer 46, and the first partition member 36 whose end is fused to the mold layer 46. The electromagnetic coil that constitutes the stator 33 is made of, for example, a wire wound with a thin wire such as copper and molded with a resin material such as an adhesive. However, even if gas is generated from the stator 33 by covering the entire stator 33 with the inner wall surface of the housing 31, the mold layer 46, and the first partition member 36, such gas leaks out of the vacuum motor 30. To prevent that.

  On the other hand, the magnetic member 42 of the rotor 32 is covered with the peripheral surface of the shaft 41 and the second partition member 37. In addition, the partition wall 37a and the support body 37b constituting the second partition wall member 37 are hermetically welded. Further, the support 37 b is airtightly attached to the shaft 41 by a seal member 48. As a result, the magnetic material 42 is hermetically sealed in a space surrounded by the peripheral surface of the shaft 41 and the second partition member 37.

  The magnetic member 42 is composed of, for example, a permanent magnet. Among these permanent magnets, the sintered body has a fine cavity inside, and gas is easily generated in a vacuum environment. Even if gas is generated from the magnetic member 42, the gas is prevented from leaking outside the vacuum motor 30 by covering the partition member 37 and the peripheral surface of the shaft 41 in an airtight manner.

  Therefore, even if the vacuum motor 30 of this embodiment is installed in a vacuum environment such as in the chamber of the vacuum apparatus, the gas generated in the rotor 32 and the stator 33 of the vacuum motor 30 is not released into the chamber. In addition, it is possible to prevent defects such as film formation defects and impurity contamination of an object to be formed.

[Third embodiment]
FIG. 3 is a cross-sectional view showing an example of the configuration of the motor in the third embodiment of the present invention.
A vacuum motor (motor) 50 according to the third embodiment includes a housing (exterior body) 51, a rotor 52, and a stator 53, and the rotor 52 includes a shaft 61 and a magnetic member 62 formed around the shaft 61. Have. The shaft 61 is pivotally supported at two locations along the rotation axis direction by bearings 64a and 64b. The stator 53 is fixed to the housing 51 and is composed of, for example, an electromagnetic coil.

  A mold layer 71 is disposed around the stator 53. The mold layer 71 is formed so as to be in close contact with the stator 53 and cover the outer surface. The mold layer 71 is preferably made of a resin material such as a thermosetting resin or rubber, and a dense resin that does not allow gas generated in the stator 53 to pass therethrough. In addition, it is preferable that the material does not easily generate gas from the mold layer 71 itself. The periphery of the stator 53 is hardened by the mold layer 71 made of such a resin material.

  A first partition member 56 is formed on the surface of the mold layer 71, that is, on the exposed surface on the rotor 52 side. The first partition member 56 extends along the axial direction L of the shaft 61 and is disposed so as to cover the exposed surface of the mold layer 71 on the rotor 52 side. Such a first partition member 56 is fixed to the surface of the mold layer 71 by, for example, fusion. As an example, when the mold layer 71 is formed, the first partition member 56 is disposed on the mold material before solidification, and the mold material is solidified and the first partition member 56 is also fixed together.

  A mold layer 72 is also disposed around the magnetic member 62 constituting the rotor 52. The mold layer 72 is formed in close contact with the magnetic member 62 so as to cover the outer surface. The mold layer 72 is also preferably made of a member similar to the mold layer 71, for example, a resin material such as a thermosetting resin or rubber, and further a dense resin that does not allow gas generated in the magnetic member 62 to pass therethrough.

  Further, it is preferable that the material is less likely to generate gas from the mold layer 72 itself. The exposed region of the magnetic member 62 is solidified by the mold layer 72 by the mold layer 72 made of such a resin material. As the shaft 61 rotates, the mold layer 72 rotates together with the magnetic member 62.

  A second partition member 57 is formed on the surface of the mold layer 72, that is, on the exposed surface on the stator 53 side. The second partition member 57 extends along the axial direction L of the shaft 61 and is disposed so as to cover the exposed surface of the mold layer 72 on the stator 53 side. Such a second partition member 57 is fixed to the surface of the mold layer 71 by, for example, fusion.

  The 1st partition member 56 and the 2nd partition member 57 should just be formed from a metal plate with little dust generation and gas emission, such as Fe, Al, Cu, SUS, for example. In this embodiment, the first partition member 56 and the second partition member 57 do not have to completely cover the entire exposed portion of the mold layer 71 and the mold layer 72. By covering most of them, the mold layer It is possible to prevent diffusion of a gas (for example, a volatile component of resin) that may be generated from 71 or the mold layer 72.

  In addition, the motor of this invention is not limited to the kind of motor, It can apply to the motor of various systems. Table 1 exemplifies types of motors to which the configuration of the present invention can be applied, and combinations of the stators and rotors thereof.

DESCRIPTION OF SYMBOLS 10 Vacuum motor (motor), 11 Housing, 12 Rotor, 13 Stator, 16 Mold layer, 18 Mold layer, 21 Shaft, 22 Magnetic member.

Claims (7)

A rotor comprising a housing, a shaft rotatably supported by the housing, and a magnetic member provided around the shaft; and a stator arranged to surround the rotor, the rotor and the stator A motor for rotating the rotor by a magnetic field generated between
A motor comprising a mold layer that is in close contact with and covers at least one of the stator and the magnetic member.   The motor according to claim 1, further comprising a metal thin film covering a surface of the mold layer.   The motor according to claim 1, further comprising a partition member disposed between the magnetic member and the stator.   The motor according to claim 3, wherein an end of the partition member is supported by the mold layer.   The motor according to claim 3 or 4, wherein the partition member is fused to the mold layer.   The motor according to any one of claims 3 to 5, wherein a rib for preventing bending is formed integrally with the partition member. The motor according to any one of claims 1 to 6, wherein the magnetic member and the stator are composed of a magnet or an electromagnetic coil.

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